Method and system for correcting transmission ratio of integrated circuit packaging equipment based on visual calibration

CN122766293APending Publication Date: 2026-09-15GUANGDONG XUYU OPTOELECTRONICS CO LTD +1
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Patent Information

Application Number
CN202610886488.5
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2026-06-18
Publication Date
2026-09-15

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Abstract

The present application relates to the technical field of integrated circuit package detection equipment, solves the problem of the decline of the angle correction accuracy of the integrated circuit package equipment detection caused by the transmission ratio drift of the rotating platform in the prior art, and provides a transmission ratio correction method and system for the integrated circuit package equipment based on visual calibration. The method comprises: acquiring the actual transmission ratio of the rotating platform in the current correction period; acquiring the preset transmission ratio currently used by the rotating driving unit, and judging whether the transmission ratio correction condition is met; when the transmission ratio correction condition is met, generating a transmission ratio correction parameter, and updating the transmission ratio parameter of the rotating driving unit based on the transmission ratio correction parameter; controlling the rotating platform to perform verification rotation, and determining whether the transmission ratio correction parameter takes effect according to the angle deviation between the verification rotation angle and the target rotation angle. The present application is beneficial to improving the rotation angle control accuracy and detection consistency in the integrated circuit package detection process.
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Description

Technical Field

[0001] This invention relates to the field of integrated circuit packaging and testing equipment technology, and in particular to a method and system for correcting the transmission ratio of integrated circuit packaging equipment based on vision calibration. Background Technology

[0002] As key control components in display modules, LED display units, and related electronic products, driver integrated circuits typically undergo visual positioning, angle correction, position adjustment, and inspection judgment processes during packaging, testing, and sorting. To ensure the consistency of the driver integrated circuit's posture on the carrier, testing station, or sorting station, packaging and testing equipment is usually equipped with a rotating platform. This platform rotates the integrated circuit under test to adjust its angle, ensuring that its edges, pads, pins, or marking areas are aligned with the detection coordinates of the imaging module.

[0003] In existing technologies, some solutions attempt to calibrate rotation axes or rotation platforms visually. For example, patent CN110570477B discloses a method, apparatus, and storage medium for calibrating the relative attitude of a camera and a rotation axis. This solution acquires calibration images at multiple sampling positions using a first camera, extracts corner points of a calibration plate, generates a fitting plane and a fitting circle, and calculates the attitude calibration parameters between the camera and the rotation axis based on the fitting circle, thereby achieving relative attitude calibration between the rotation axis and the camera. This type of solution can improve the calibration accuracy of the geometric relationship between the rotation axis and the imaging system and is suitable for determining the rotation axis attitude, camera extrinsic parameters, or visual coordinate transformation relationships.

[0004] However, the above-mentioned solution focuses on calibrating the attitude relationship between the rotating axis and the camera, and does not establish an online correction mechanism for the transmission chain of the rotating platform in integrated circuit packaging equipment. In other words, it does not calculate the actual transmission ratio of the rotating platform based on the correspondence between the actual rotation angle obtained from the rotational vision calibration and the pulse count of the rotational drive unit or the cumulative value of the encoder feedback pulse, nor does it generate transmission ratio correction parameters based on the deviation between the actual transmission ratio and the preset transmission ratio, and it does not use the transmission ratio correction parameters for rotation angle control in the subsequent integrated circuit packaging inspection process.

[0005] Therefore, in integrated circuit packaging equipment, even after the geometric calibration between the camera and the rotating axis has been completed, the rotary drive unit may still continue to use the theoretical or historical transmission ratio for angle control. When the transmission mechanism drifts or wears out, the deviation between the target rotation angle and the actual rotation angle will persist. Manual readjustment is not only inefficient but also fails to reflect the true transmission characteristics of the equipment under its current operating conditions. Especially in scenarios involving continuous batch testing of driven integrated circuits, if the transmission ratio deviation of the rotary platform cannot be detected and corrected in a timely manner, the angle correction residual can easily accumulate, reducing the consistency and reliability of the testing results. Summary of the Invention

[0006] In view of this, embodiments of the present invention provide a method and system for correcting the transmission ratio of integrated circuit packaging equipment based on visual calibration, in order to solve the problem that the transmission ratio drift of the rotating platform causes a decrease in the accuracy of the driving integrated circuit packaging detection angle correction in the prior art.

[0007] In a first aspect, embodiments of the present invention provide a transmission ratio correction method for integrated circuit packaging equipment based on visual calibration, characterized in that it is applied to an integrated circuit packaging equipment, the integrated circuit packaging equipment including a rotating platform for carrying and driving integrated circuits, a rotation driving unit for driving the rotating platform to rotate, and an imaging module for acquiring images of the rotating platform, the method comprising: In response to the detection that the rotating platform meets the online correction trigger condition, the current online correction cycle is entered; The actual transmission ratio of the rotating platform within the current online correction cycle is obtained, wherein the actual transmission ratio is determined based on the rotational visual calibration result and the motion control data corresponding to the rotating drive unit. The rotational visual calibration result includes the visual rotation angle difference determined by the rotating platform image acquired by the imaging module, and the motion control data includes the pulse count output by the rotating drive unit and / or the cumulative value of the encoder feedback pulse corresponding to the rotating platform. The preset transmission ratio currently used by the rotary drive unit is obtained, and based on the deviation between the actual transmission ratio and the preset transmission ratio, it is determined whether the rotary drive unit meets the online transmission ratio correction condition. Under the condition of online transmission ratio correction, a transmission ratio correction parameter is generated based on the correspondence between the actual transmission ratio and the preset transmission ratio. The transmission ratio correction parameter is used to correct the conversion relationship between the target rotation angle and the number of output pulses in the rotary drive unit. The transmission ratio parameter of the rotary drive unit is updated based on the transmission ratio correction parameter, so that the rotary drive unit generates rotation control commands based on the updated transmission ratio parameter during the integrated circuit packaging and testing process.

[0008] Preferably, obtaining the actual transmission ratio of the rotary platform within the current online correction cycle includes: The rotation drive unit is controlled to drive the rotation platform to rotate to multiple angular positions sequentially according to a preset angle sequence; At each angular position, a calibration image containing calibration features is acquired by the imaging module, and motion control data corresponding to the rotation drive unit is acquired to obtain an image data sequence and a motion control data sequence. The visual rotation angle difference of the rotating platform between various angular positions is obtained based on the image data sequence; Based on the correspondence between the visual rotation angle difference and the motion control data sequence, the actual transmission ratio of the rotating platform in the current online correction cycle is calculated.

[0009] Preferably, obtaining the visual rotation angle difference of the rotating platform at each angular position based on the image data sequence includes: Extract the visual coordinates of the same calibration feature at different angular positions from the image data sequence; Based on the visual coordinate set of the same calibration feature at different angular positions, a trajectory circle fitting is performed to obtain the coordinates of the trajectory circle center corresponding to the calibration feature; The rotation center coordinates of the rotating platform are determined based on the trajectory center coordinates corresponding to at least one of the calibration features. Based on the rotation center coordinates and the visual coordinates of the calibration feature at each angular position, calculate the visual vector angle of the calibration feature relative to the rotation center coordinates; The visual rotation angle difference is obtained based on the visual vector angle corresponding to different angular positions.

[0010] Preferably, determining whether the rotary drive unit meets the online transmission ratio correction condition based on the deviation between the actual transmission ratio and the preset transmission ratio includes: The transmission ratio deviation, visual fitting residual, and operating status data corresponding to the current online correction cycle are obtained. The transmission ratio deviation is determined based on the actual transmission ratio and the preset transmission ratio. The visual fitting residual is the root mean square error between the visual rotation angle difference corresponding to each angular position and the fitting angle value output by the transmission ratio fitting relationship during the transmission ratio fitting process. The operating status data includes at least one of the cumulative number of rotations of the rotating platform, the cumulative running time, and the current ambient temperature. The validity condition of the actual transmission ratio is determined based on the visual fitting residual. If the visual fitting residual is greater than the preset residual threshold, the actual transmission ratio of the current online correction cycle is determined to be invalid, and the rotational visual calibration is re-executed. When the visual fitting residual is less than or equal to the preset residual threshold, the transmission ratio deviation is compared with the first transmission ratio deviation threshold and the second transmission ratio deviation threshold, wherein the first transmission ratio deviation threshold is less than the second transmission ratio deviation threshold. When the transmission ratio deviation is less than the first transmission ratio deviation threshold, it is determined that the rotary drive unit does not meet the online transmission ratio correction condition, and the preset transmission ratio remains unchanged; When the transmission ratio deviation is greater than or equal to the first transmission ratio deviation threshold and less than the second transmission ratio deviation threshold, the rotary drive unit is determined to meet the first correction condition and enters the global transmission ratio correction process; When the transmission ratio deviation is greater than or equal to the second transmission ratio deviation threshold, or when the operating status data reaches the preset operating status threshold, the rotary drive unit is determined to meet the second correction condition and enters the transmission ratio correction process in the angular interval.

[0011] Preferably, the step of generating transmission ratio correction parameters based on the correspondence between the actual transmission ratio and the preset transmission ratio, when the online transmission ratio correction conditions are met, includes: When the rotary drive unit satisfies the first correction condition, a global transmission ratio correction coefficient is generated based on the ratio between the actual transmission ratio and the preset transmission ratio, and the global conversion relationship between the target rotation angle and the number of output pulses is updated based on the global transmission ratio correction coefficient. When the rotation drive unit satisfies the second correction condition, the actual transmission ratio of each angle interval is obtained based on the visual rotation angle difference corresponding to each angle position and the motion control data. Based on the difference between the actual transmission ratio of the interval and the preset transmission ratio, calculate the interval transmission ratio deviation corresponding to each angle interval; The rotatable angle range of the rotating platform is divided into multiple angle intervals according to a preset fixed angle step or according to the degree of change of the interval transmission ratio deviation. An angle interval compensation table is generated based on the interval transmission ratio deviation. The angle interval compensation table includes an angle interval identifier, an interval correction coefficient, and an interval pulse compensation amount. The interval correction coefficient is determined based on the ratio between the actual interval transmission ratio of the corresponding angle interval and the preset transmission ratio. The interval pulse compensation amount is determined based on the interval correction coefficient and the target rotation angle of the corresponding angle interval. The interval correction coefficients of adjacent angle intervals are subjected to continuity constraints so that the change in the interval correction coefficients between adjacent angle intervals is less than a preset continuity threshold. The transmission ratio correction parameters are obtained based on the global transmission ratio correction coefficient and / or the angle interval compensation table. The transmission ratio correction parameters include parameter version number, correction time, correction type, calibration quality index, and parameter verification value.

[0012] Preferably, updating the transmission ratio parameter of the rotary drive unit based on the transmission ratio correction parameter, so that the rotary drive unit generates rotation control commands based on the updated transmission ratio parameter during integrated circuit packaging and testing, includes: Read the transmission ratio parameter currently used by the rotary drive unit, and store the currently used transmission ratio parameter, the corresponding parameter version number, and the angle error before correction in the current online correction cycle as historical parameter records; The transmission ratio correction parameter is written into the candidate parameter storage area corresponding to the rotary drive unit, and the candidate parameter storage area is independent of the currently effective parameter storage area. Read the written candidate transmission ratio correction parameters from the candidate parameter storage area, and perform integrity verification on the read results based on the parameter verification value; If the integrity verification passes, the candidate transmission ratio correction parameter is set to a state to be verified, and the rotary drive unit performs trial rotation control based on the candidate transmission ratio correction parameter. During the trial operation of the rotation control, the target output pulse number of the rotation drive unit is calculated based on the target rotation angle, the global transmission ratio correction coefficient, and / or the angle interval compensation table. Once the candidate transmission ratio correction parameter passes the trial operation verification, the transmission ratio correction parameter in the candidate parameter storage area is updated to the currently effective parameter storage area, and the parameter version number corresponding to the candidate transmission ratio correction parameter is marked as the current effective version.

[0013] Preferably, after updating the transmission ratio parameters of the rotary drive unit based on the transmission ratio correction parameters, so that the rotary drive unit generates rotation control commands based on the updated transmission ratio parameters during integrated circuit packaging inspection, the method further includes: The rotation drive unit is controlled to drive the rotation platform to sequentially perform verification rotations at multiple verification angle positions according to the transmission ratio correction parameter package corresponding to the current effective version; At each verification angle position, the verification image acquired by the imaging module is obtained, and the corresponding verification rotation angle is calculated based on the verification image; Based on the verification rotation angle and target rotation angle corresponding to each verification angle position, multiple verification angle deviations are obtained, and the maximum angle deviation, average angle deviation, and angle deviation dispersion are calculated based on the multiple verification angle deviations. When the maximum angle deviation, the average angle deviation, and the angle deviation dispersion all meet the corresponding preset verification thresholds, the transmission ratio correction parameter is confirmed to be effective, and the current effective version is used for rotation angle control in the subsequent integrated circuit packaging and testing process. When the maximum angle deviation or the average angle deviation does not meet the corresponding preset verification threshold, the transmission ratio parameter of the rotary drive unit is rolled back to the previous valid version in the historical parameter record, and the number of consecutive retries corresponding to the current online correction cycle is accumulated. When the number of consecutive retries is less than the preset retry threshold, the current online correction cycle is re-executed; When the number of consecutive retries is greater than or equal to the preset retry threshold, a transmission ratio correction failure alarm is generated, and the previous valid version in the historical parameter record is maintained as the currently effective parameter. When the maximum angle deviation and the average angle deviation meet the corresponding preset verification thresholds, and the angle deviation dispersion does not meet the corresponding preset verification thresholds, the global transmission ratio correction coefficient is retained, and the sub-angle interval compensation table is regenerated to perform secondary correction on the rotation error of the local angle interval.

[0014] Preferably, the step of entering the current online correction cycle in response to the rotating platform meeting the online correction trigger condition includes: During the integrated circuit packaging inspection process, the imaging module acquires inspection images of the integrated circuit under test before and after rotation correction. The pre-correction deflection angle and post-correction deflection angle of the integrated circuit under test are obtained from the detected image, and the angle correction residual is obtained from the pre-correction deflection angle, the post-correction deflection angle and the target correction angle. The angle correction residuals corresponding to multiple integrated circuits under test are statistically analyzed according to the detection time sequence to obtain the angle correction residual sequence. Calculate the residual mean, residual change rate, and number of consecutive out-of-tolerances based on the angle-corrected residual sequence; When the average residual value is greater than a preset average residual value threshold, or the residual change rate is greater than a preset residual change rate threshold, or the number of consecutive out-of-tolerance errors reaches a preset number threshold, the rotating platform is determined to enter the current online correction cycle. After determining that the current online correction cycle has begun, the integrated circuit packaging equipment is controlled to pause the rotation correction operation of subsequent integrated circuits to be tested in the current batch, and the step of obtaining the actual transmission ratio of the rotating platform within the current online correction cycle is executed.

[0015] Preferably, after confirming that the transmission ratio correction parameter is effective, the method further includes: The chip contour information of the integrated circuit under test in the detection image of the imaging module is obtained, and the angle to be corrected of the placement posture of the integrated circuit under test relative to the target is determined based on the chip contour information. The target output pulse number of the rotary drive unit is calculated based on the angle to be corrected and the transmission ratio correction parameters corresponding to the current effective version. If the current effective version includes a sub-angle interval compensation table, the corresponding target angle interval is determined according to the angle to be corrected, and the interval pulse compensation amount corresponding to the target angle interval is read from the sub-angle interval compensation table; Based on the target output pulse count and the interval pulse compensation amount, a corrected rotation control command is generated; The rotation drive unit is controlled to drive the rotation platform to rotate according to the modified rotation control command, so as to perform angle correction on the integrated circuit under test; After angle correction, the imaging module re-acquires the re-inspection image of the integrated circuit under test, and determines whether the current posture of the integrated circuit under test meets the packaging inspection posture requirements based on the re-inspection image.

[0016] Secondly, embodiments of the present invention provide a transmission ratio correction system for integrated circuit packaging equipment based on visual calibration. The system includes an integrated circuit packaging equipment and a processor. The integrated circuit packaging equipment includes a rotating platform, a rotating drive unit, an imaging module, and a calibration plate. The rotating platform is used to carry the integrated circuit to be tested and drive the integrated circuit to be tested to perform rotational calibration. The rotating drive unit is connected to the rotating platform and is used to drive the rotating platform to rotate according to rotation control commands and output corresponding motion control data. The imaging module is used to acquire calibration images, verification images, and detection images of the integrated circuit to be tested on the rotating platform. The calibration plate is disposed on the rotating platform and includes calibration features for rotational visual calibration. The processor is communicatively connected to the rotating drive unit and the imaging module, respectively, and is configured to execute the method described in the first aspect.

[0017] In summary, the beneficial effects of the present invention are as follows: The vision-calibrated transmission ratio correction method and system for integrated circuit packaging equipment provided in this invention obtains the actual transmission ratio of the rotating platform within the current correction cycle and compares the actual transmission ratio with the preset transmission ratio currently used by the rotating drive unit. This enables timely identification of the conversion deviation between the target rotation angle and the actual rotation angle when the transmission ratio drifts due to long-term operation, wear of the transmission mechanism, or changes in assembly status. This avoids the rotating drive unit from using the theoretical or historical transmission ratio for angle control for a long time, thereby improving the accuracy of rotation angle correction during integrated circuit packaging inspection.

[0018] Secondly, this invention generates transmission ratio correction parameters based on the correspondence between the actual transmission ratio and the preset transmission ratio, and uses these correction parameters to update the transmission ratio parameters of the rotary drive unit. This enables the rotary drive unit to generate rotation control commands according to the updated transmission ratio parameters during subsequent integrated circuit packaging and testing. Therefore, the angle control of the rotary platform can match the actual transmission state of the current equipment, reducing the impact of factors such as synchronous belt tension, gear meshing clearance, bearing wear, or temperature changes on the accuracy of rotation angle control, and improving the consistency of the attitude adjustment of the integrated circuit under test.

[0019] Finally, after updating the transmission ratio parameters, this invention further controls the rotating platform to perform a verification rotation and obtains the verification rotation angle based on the verification image acquired by the imaging module. The angular deviation between the verification rotation angle and the target rotation angle is used to determine whether the transmission ratio correction parameters have taken effect. This verification step can prevent erroneous correction parameters from directly participating in subsequent packaging and testing control, improve the reliability and traceability of the transmission ratio correction results, reduce the number of manual readjustments, and facilitate the long-term stable operation of integrated circuit packaging equipment during continuous batch testing. Attached Figure Description

[0020] To more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings used in the embodiments of the present invention will be briefly introduced below. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort, and these are all within the protection scope of the present invention.

[0021] Figure 1 This is a schematic flowchart of the transmission ratio correction method for integrated circuit packaging equipment based on vision calibration provided in an embodiment of the present invention.

[0022] Figure 2 This is a flowchart illustrating the process of obtaining the actual transmission ratio provided in an embodiment of the present invention.

[0023] Figure 3 This is a flowchart illustrating the process of obtaining the visual rotation angle difference provided in an embodiment of the present invention. Detailed Implementation

[0024] The features and exemplary embodiments of various aspects of the present invention will now be described in detail. To make the objectives, technical solutions, and advantages of the present invention clearer, the present invention will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only configured to explain the present invention and are not configured to limit the present invention. For those skilled in the art, the present invention can be practiced without some of these specific details. The following description of the embodiments is merely intended to provide a better understanding of the present invention by illustrating examples of the invention.

[0025] It should be noted that, in this document, relational terms such as "first" and "second" are used only to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus. Without further limitations, an element defined by the phrase "comprising..." does not exclude the presence of other identical elements in the process, method, article, or apparatus that includes said element.

[0026] Example 1 See Figure 1-3 This invention provides a vision-calibrated transmission ratio correction method for integrated circuit packaging equipment, applied to an integrated circuit packaging equipment. The integrated circuit packaging equipment includes a rotating platform for carrying and driving integrated circuits, a rotation drive unit for driving the rotating platform to rotate, and an imaging module for acquiring images of the rotating platform. The method includes: S1. In response to detecting that the rotating platform meets the online correction trigger condition, enter the current online correction cycle; The online correction trigger condition is used to determine whether the rotary platform needs to switch from normal packaging and testing state to transmission ratio correction state. Specifically, during continuous operation, the integrated circuit packaging equipment can monitor the angle correction effect, cumulative operating status, and maintenance control commands of the rotary platform in real time or periodically. When the angle correction residual exceeds the allowable range, the cumulative number of rotations or the cumulative operating time of the rotary platform reaches a preset operating threshold, or a maintenance correction command is issued by the operator, the host computer, or the equipment control system, it can be determined that the rotary platform meets the online correction trigger condition.

[0027] The current online correction cycle refers to a process of acquiring the transmission ratio, judging deviations, correcting parameters, and updating parameters initiated by the equipment after responding to the aforementioned triggering conditions. This differs from factory calibration or offline manual debugging, and can be initiated promptly based on the actual operating status of the rotating platform during normal packaging and testing. Through this step, the equipment does not need to continuously and frequently perform transmission ratio corrections. Instead, it enters the current online correction cycle only when there is a risk of decreased testing accuracy, the operating status reaches maintenance conditions, or a maintenance request is received, thus balancing packaging and testing efficiency with the rotation platform's angle control accuracy.

[0028] S2. Obtain the actual transmission ratio of the rotating platform within the current online correction cycle, wherein the actual transmission ratio is determined based on the rotational visual calibration result and the motion control data corresponding to the rotating drive unit, the rotational visual calibration result includes the visual rotation angle difference determined by the rotating platform image acquired by the imaging module, and the motion control data includes the pulse count output by the rotating drive unit and / or the cumulative value of the encoder feedback pulse corresponding to the rotating platform; Specifically, the current online correction cycle refers to a transmission ratio calibration and correction process initiated during equipment operation due to factors such as increased angle correction residuals, reaching a threshold cumulative rotation count, maintenance triggering, or periodic self-checks. The actual transmission ratio reflects the true rotation angle corresponding to a unit pulse or unit encoder feedback quantity of the rotating platform under the current equipment state. It no longer uses the theoretical value at the factory, but is determined jointly by the rotation visual calibration results and motion control data. During execution, the imaging module can acquire images of the rotating platform at multiple angular positions. Based on the positional changes of calibration features in the images, the visual rotation angle difference is calculated. This is then combined with the pulse count output by the rotating drive unit or the cumulative value of the encoder feedback pulses to obtain the true angle conversion relationship of the current transmission chain. This step can reflect the actual transmission state caused by factors such as synchronous belt tension, gear backlash, bearing wear, or assembly changes in the transmission ratio calculation, avoiding subsequent corrections still relying on theoretical parameters.

[0029] S3. Obtain the preset transmission ratio currently used by the rotary drive unit, and determine whether the rotary drive unit meets the online transmission ratio correction condition based on the deviation between the actual transmission ratio and the preset transmission ratio. The preset transmission ratio is the angle conversion parameter originally used by the rotary drive unit in the current control configuration, used to convert the target rotation angle into the number of output pulses. Comparing the actual transmission ratio with the preset transmission ratio can determine whether the current actual transmission state of the rotary platform has deviated from the original control parameters. In practice, the difference, ratio deviation, or relative deviation between the two can be calculated, and combined with a preset threshold to determine whether the online correction conditions are met. If the deviation is small, it means that the existing parameters can still meet the attitude correction requirements in the drive integrated circuit packaging inspection, and the original parameters can be kept unchanged. If the deviation reaches the threshold, it means that there is a significant conversion error between the target angle and the actual angle, and the correction process needs to be initiated. This step can avoid frequent and unnecessary parameter updates, and trigger correction in time before the transmission ratio drift affects the detection accuracy.

[0030] S4. Under the condition that the transmission ratio is corrected online, a transmission ratio correction parameter is generated according to the correspondence between the actual transmission ratio and the preset transmission ratio. The transmission ratio correction parameter is used to correct the conversion relationship between the target rotation angle and the number of output pulses in the rotary drive unit. The transmission ratio correction parameter is control compensation data generated based on the correspondence between the actual transmission ratio and the preset transmission ratio. Its function is to correct the conversion relationship between the target rotation angle and the number of output pulses in the rotary drive unit. In practice, a global transmission ratio correction coefficient can be generated based on the ratio between the actual and preset transmission ratios. Alternatively, the transmission ratio deviation can be calculated separately for different angle intervals to form a sub-angle interval compensation table. For cases with relatively uniform deviations, the global correction coefficient can be used to uniformly adjust the pulse output. For cases where synchronous belt periodic errors, gear eccentricity, or local wear cause inconsistent errors in different angle intervals, the interval pulse compensation amount can be used for refined correction. This step ensures that the correction parameter can cover both overall transmission ratio drift and handle nonlinear errors in local angle intervals.

[0031] S5. Update the transmission ratio parameter of the rotary drive unit based on the transmission ratio correction parameter, so that the rotary drive unit generates a rotation control command based on the updated transmission ratio parameter during the integrated circuit packaging and testing process. Updating the transmission ratio parameters of the rotary drive unit formally incorporates the aforementioned transmission ratio correction parameters into the motion control configuration of the equipment, enabling it to participate in the rotation control during subsequent integrated circuit packaging and testing. In practice, the original transmission ratio parameters and corresponding versions can be saved first, then the transmission ratio correction parameters can be written into the candidate parameter area, and after integrity verification, they can be switched to the currently valid parameters. After receiving the target correction angle of the integrated circuit under test, the rotary drive unit recalculates the number of output pulses based on the updated transmission ratio parameters, thereby generating a rotation control command that matches the current actual transmission state. This step can truly transform the transmission state changes obtained from visual calibration into parameter updates on the motion control side, improving the consistency and executability of angle correction.

[0032] Preferably, step S2 includes: S21. Control the rotation drive unit to drive the rotation platform to rotate to multiple angle positions sequentially according to a preset angle sequence; The preset angle sequence is a set of multiple angular positions used to trigger the rotating platform to reach sequentially within the current online correction cycle. For example, it may include the zero angle, several forward angular positions, and several reverse angular positions, or it can be set according to the angle correction range commonly used in integrated circuit packaging and testing. During execution, the rotating drive unit outputs rotation control commands sequentially according to the preset angle sequence, causing the rotating platform to rotate between each angular position and remain stable after reaching each position. Continuous sampling of multiple angular positions allows subsequent calculations to cover the actual motion response of the rotating platform within an angular range, rather than relying on the result of a single rotation, thereby improving the stability of the actual transmission ratio calculation.

[0033] S22. At each angular position, acquire the calibration image containing calibration features collected by the imaging module, and acquire the motion control data corresponding to the rotation drive unit to obtain the image data sequence and the motion control data sequence. Calibration features are image features set on the rotating platform and stably recognizable by the imaging module. These can be circular, cross-shaped, or other markings with a clear geometric center. After the rotating platform reaches each angular position, the imaging module acquires a calibration image containing the calibration features, and simultaneously records the motion control data corresponding to that angular position from the rotation drive unit. The image data sequence reflects the angular changes of the calibration features in the visual coordinate system, while the motion control data sequence reflects the pulse changes output or feedback from the rotation drive unit to reach each angular position. The two are sequentially matched according to the same angular position, ensuring an accurate relationship between subsequent visual angle changes and motion control quantities.

[0034] S23. Obtain the visual rotation angle difference between the rotating platform at each angular position based on the image data sequence; The visual rotation angle difference refers to the actual angular change of a rotating platform between different angular positions, obtained from image data sequences. Since the actual rotation of the rotating platform may deviate from the commanded angle, the theoretical output of the rotation drive unit alone cannot reflect the actual state of the current transmission chain. Therefore, it is necessary to extract the positional changes of calibration features from the calibration images and calculate the actual rotation angle on the visual side based on their geometric relationship around the rotation center. This step transforms the actual rotation result of the rotating platform into quantifiable visual angle data, providing a direct basis for subsequent calculations of the actual transmission ratio.

[0035] S24. Calculate the actual transmission ratio of the rotating platform within the current online correction cycle based on the correspondence between the visual rotation angle difference and the motion control data sequence.

[0036] The actual transmission ratio is calculated through the correspondence between the visual rotation angle difference and the motion control data sequence. Specifically, a fitting relationship is established between the visual rotation angle difference between adjacent angular positions or the reference angular position and each angular position, and the corresponding difference in the number of output pulses or the cumulative difference in the encoder feedback pulse value. The conversion coefficient between the angle and the pulse in the fitting result is then used as the actual transmission ratio within the current online correction cycle. The actual transmission ratio obtained in this way reflects the true transmission relationship of the rotary platform under the current mechanical state. It can be used to determine whether the original preset transmission ratio needs to be corrected and to avoid the continuous accumulation of angle control deviations caused by synchronous belt tension, gear backlash, or bearing wear.

[0037] Preferably, step S23 includes: S231. Extract the visual coordinates of the same calibration feature at different angular positions from the image data sequence; The visual coordinates of the same calibration feature at different angular positions refer to the position coordinates of the same physical calibration feature identified by the imaging module in the corresponding calibration image after the rotating platform has rotated to each angular position. During execution, the calibration images in the image data sequence can first undergo grayscale processing, edge enhancement, or threshold segmentation, and then the coordinates of the center point or feature point of the same calibration feature in each frame image can be identified. Since these visual coordinates reflect the change in the imaging position of the same physical calibration feature after the rotating platform rotates, it can avoid trajectory fitting errors caused by mixing different features.

[0038] S232. Perform trajectory circle fitting based on the visual coordinate set of the same calibration feature at different angle positions to obtain the trajectory circle center coordinates corresponding to the calibration feature; Trajectory circle fitting refers to fitting the arc or circular trajectory formed by the same calibration feature as the rotating platform rotates, based on the set of visual coordinates of the same calibration feature at multiple angular positions. When the platform rotates, the calibration feature on the platform theoretically moves in a circle around the rotation center; therefore, the visual coordinates of the same calibration feature at different angular positions should fall near the same trajectory circle. Obtaining the trajectory circle center coordinates through least-squares fitting, weighted fitting, or iterative outlier removal can reduce the impact of image noise, local recognition errors, or single-point anomalies on the estimation of the rotation center.

[0039] S233. Determine the rotation center coordinates of the rotating platform based on the trajectory center coordinates corresponding to at least one of the calibration features; The rotation center coordinates are used to represent the actual rotation reference position of the rotating platform in the imaging coordinate system. Since the trajectory center of a single calibration feature may be affected by image recognition errors or local assembly errors, in practice, it can be determined comprehensively based on the trajectory center coordinates corresponding to one or more calibration features. For example, the rotation center coordinates can be determined by averaging, weighted averaging, or clustering multiple trajectory center coordinates. The rotation center coordinates obtained in this way are closer to the true motion center of the rotating platform, providing a stable geometric reference for subsequent visual vector angle calculations.

[0040] S234. Based on the rotation center coordinates and the visual coordinates of the calibration feature at each angular position, calculate the visual vector angle of the calibration feature relative to the rotation center coordinates; The visual vector angle refers to the angle between the vector formed by the rotation center coordinates and the visual coordinates of the calibration feature, and a preset reference direction. During execution, at each angular position, a visual vector is constructed starting from the rotation center coordinates and ending at the visual coordinates of the calibration feature. The corresponding angle is then calculated based on the components of this visual vector in the imaging coordinate system. Since this angle directly originates from the positional relationship of the calibration feature relative to the rotation center, it reflects the actual attitude of the rotating platform at that angular position, reducing calculation errors caused by simply using image translation.

[0041] S235. Obtain the visual rotation angle difference based on the visual vector angles corresponding to different angular positions.

[0042] The difference between the visual vector angles corresponding to different angular positions is the visual rotation angle difference. In actual calculation, a reference angular position can be selected as the baseline, and the visual vector angles at other angular positions can be subtracted from the reference visual vector angle to obtain the visual rotation angle difference from the reference angular position to each angular position; alternatively, the visual vector angle difference between adjacent angular positions can be calculated to obtain the segmented visual rotation angle difference. This visual rotation angle difference can correspond to the pulse number difference or encoder feedback value difference in the motion control data, thereby further calculating the actual transmission ratio of the current rotating platform.

[0043] Preferably, step S3 includes: S31. Obtain the transmission ratio deviation, visual fitting residual, and operating status data corresponding to the current online correction cycle. The transmission ratio deviation is determined based on the actual transmission ratio and the preset transmission ratio. The visual fitting residual is the root mean square error between the visual rotation angle difference corresponding to each angular position and the fitting angle value output by the transmission ratio fitting relationship during the transmission ratio fitting process. The operating status data includes at least one of the cumulative number of rotations of the rotating platform, the cumulative running time, and the current ambient temperature. The transmission ratio deviation reflects the degree of deviation of the current actual transmission ratio from the original control parameters of the equipment. It can be expressed as the difference between the actual transmission ratio and the preset transmission ratio, the ratio deviation, or the relative error. The visual fitting residual reflects the reliability of the current rotational visual calibration result itself. It originates from the difference between the visual rotation angle difference at each angular position and the fitted angle value obtained after fitting the transmission ratio. The operating status data reflects the current usage status of the rotating platform. For example, the more cumulative rotations, the longer the cumulative running time, or the more significantly the current ambient temperature deviates from the normal operating temperature, the higher the possibility of wear, thermal deformation, or changes in transmission clearance in the transmission mechanism. This step does not simply determine whether to correct based on the transmission ratio deviation, but simultaneously introduces the visual calibration quality and the equipment operating status, so that subsequent judgments take into account both the reliability of the calculation results and the actual operating conditions of the equipment.

[0044] S32. Determine whether the actual transmission ratio meets the validity condition based on the visual fitting residual. If the visual fitting residual is greater than the preset residual threshold, determine that the actual transmission ratio of the current online correction cycle is invalid and re-execute the rotational visual calibration. Before using the actual transmission ratio for correction, the validity of the actual transmission ratio is first determined by the visual fitting residual. If the visual fitting residual is greater than a preset residual threshold, it indicates a large dispersion between the visual rotation angle difference at each angular position and the fitted relationship. This may indicate errors in calibration feature recognition, unstable rotation platform positioning, abnormal image acquisition, or local motion jitter. In this case, directly updating the control parameters of the rotation drive unit based on the actual transmission ratio may introduce incorrect correction. Therefore, this step determines the current actual transmission ratio as invalid when the residual exceeds the limit and re-executes rotational visual calibration to ensure that the actual transmission ratio entering the correction judgment has sufficient computational reliability.

[0045] S33. When the visual fitting residual is less than or equal to the preset residual threshold, the transmission ratio deviation is compared with the first transmission ratio deviation threshold and the second transmission ratio deviation threshold, wherein the first transmission ratio deviation threshold is less than the second transmission ratio deviation threshold. After the visual fitting residuals meet the requirements, the transmission ratio deviation is compared with two different levels of deviation thresholds. The first transmission ratio deviation threshold corresponds to a relatively slight transmission ratio drift that already needs correction, while the second transmission ratio deviation threshold corresponds to a more significant transmission ratio drift or one that may have nonlinear characteristics, and the second transmission ratio deviation threshold is greater than the first transmission ratio deviation threshold. By setting two levels of thresholds, the transmission ratio deviation can be divided into three processing levels: no correction required, global correction, and angle-range correction, instead of using a single threshold for simple on / off judgment. This facilitates the selection of a more appropriate correction strategy based on the degree of drift.

[0046] S34. When the transmission ratio deviation is less than the first transmission ratio deviation threshold, it is determined that the rotary drive unit does not meet the online transmission ratio correction condition, and the preset transmission ratio is kept unchanged. When the transmission ratio deviation is less than the first transmission ratio deviation threshold, it indicates that the deviation between the current actual transmission ratio and the preset transmission ratio is still within the allowable range. When the rotary drive unit generates rotation control commands according to the original preset transmission ratio, it can still meet the angle correction requirements in the drive integrated circuit packaging detection. If the transmission ratio parameters are forcibly updated at this time, the parameters may change frequently due to measurement noise or short-term fluctuations. Therefore, this step chooses to keep the preset transmission ratio unchanged, allowing the equipment to continue operating with the original parameters. This reduces unnecessary parameter writing and verification actions and improves the stability of the online correction mechanism.

[0047] S35. When the transmission ratio deviation is greater than or equal to the first transmission ratio deviation threshold and less than the second transmission ratio deviation threshold, it is determined that the rotary drive unit meets the first correction condition and enters the global transmission ratio correction process. When the transmission ratio deviation reaches the first transmission ratio deviation threshold but not the second, it indicates that the actual transmission relationship of the rotating platform has shifted identibly relative to the original parameters. However, this shift can still be considered a relatively uniform proportional deviation. At this point, the global transmission ratio correction process is initiated. By uniformly adjusting the conversion relationship between the target rotation angle and the number of output pulses through a global transmission ratio correction coefficient, subsequent rotation control can be made closer to the current actual transmission state. This step is suitable for relatively uniform error situations such as slight tension in the synchronous belt, changes in overall transmission efficiency, or long-term parameter drift, and can achieve effective correction with low complexity.

[0048] S36. When the transmission ratio deviation is greater than or equal to the second transmission ratio deviation threshold, or when the operating status data reaches the preset operating status threshold, the rotary drive unit is determined to meet the second correction condition and enters the angle interval transmission ratio correction process.

[0049] When the transmission ratio deviation reaches the second transmission ratio deviation threshold, or when the cumulative number of rotations, cumulative running time, current ambient temperature, and other operating status data reach the preset operating status threshold, it indicates that the rotary platform may have experienced a significant change in transmission status, or that the errors in different angle intervals may no longer exhibit a simple proportional relationship. For example, localized wear of the synchronous belt, gear eccentricity, changes in bearing clearance, or localized deformation caused by temperature can all lead to errors in some angle intervals being significantly greater than those in other angle intervals. At this point, the transmission ratio correction process for different angle intervals is initiated, generating correction amounts separately for each angle interval. This allows for more detailed compensation of local angle errors and improves angle control accuracy in complex transmission drift scenarios.

[0050] Preferably, step S4 includes: S41. When the rotary drive unit satisfies the first correction condition, a global transmission ratio correction coefficient is generated based on the ratio between the actual transmission ratio and the preset transmission ratio, and the global conversion relationship between the target rotation angle and the number of output pulses is updated based on the global transmission ratio correction coefficient. The first correction condition corresponds to a situation where the transmission ratio deviation has exceeded the range of slight errors, but the overall drift remains relatively consistent proportionally. In this case, the ratio between the actual transmission ratio and the preset transmission ratio can be used as a global transmission ratio correction coefficient to uniformly adjust the conversion relationship between the target rotation angle and the number of output pulses. For example, if the actual rotation angle of the rotating platform is smaller than the theoretical value, the number of output pulses needs to be increased accordingly based on this global transmission ratio correction coefficient in subsequent control to bring the rotating platform to the target rotation angle. This step does not require establishing compensation relationships for each angle interval separately, making it suitable for handling overall tension of the synchronous belt, overall changes in transmission efficiency, or uniform drift caused by long-term operation. It can complete the transmission ratio correction with low computational complexity.

[0051] S42. When the rotation drive unit satisfies the second correction condition, the actual transmission ratio of each angle interval is obtained according to the visual rotation angle difference corresponding to each angle position and the motion control data. The second correction condition corresponds to a large transmission ratio deviation, or situations where the equipment operation status indicates that the rotating platform may have non-uniform errors such as localized wear, gear eccentricity, or uneven tension of the synchronous belt. In this case, using only a global correction coefficient may not be able to cover the transmission differences within different angular intervals. Therefore, it is necessary to calculate the actual transmission ratio within adjacent angular positions or preset angular intervals based on the visual rotation angle difference and motion control data corresponding to each angular position. The actual transmission ratio within an interval reflects the true rotation angle corresponding to a unit pulse or unit encoder feedback within a certain angular range, enabling subsequent compensation to be refined to a local angular range, rather than uniformly correcting the entire rotation range.

[0052] S43. Calculate the interval transmission ratio deviation corresponding to each angle interval based on the difference between the actual transmission ratio of the interval and the preset transmission ratio; The interval transmission ratio deviation is the deviation of the actual transmission ratio within each angular interval from the preset transmission ratio. By calculating the interval transmission ratio deviation for different angular intervals, it can be determined whether the rotary platform has different degrees of transmission error within each local angular range. For example, a smaller deviation in some angular intervals indicates a more stable transmission state in that interval; while a significantly larger deviation in other angular intervals may correspond to local wear of the timing belt, gear meshing errors, or local angular errors caused by changes in the rotary platform load. This step further breaks down the overall transmission ratio drift into multiple interval errors, providing data for the subsequent generation of an angular interval compensation table.

[0053] S44. Calculate the interval transmission ratio deviation corresponding to each angle interval based on the difference between the actual transmission ratio of the interval and the preset transmission ratio; The actual transmission ratio within a certain interval represents the true angle conversion relationship of the rotary platform within a specific local angle interval, while the preset transmission ratio is the theoretical or historical conversion parameter used by the rotary drive unit in the original control configuration. By calculating the difference between the actual transmission ratio and the preset transmission ratio, the interval transmission ratio deviation corresponding to each angle interval can be obtained. This interval transmission ratio deviation reflects the distribution of transmission error of the rotary platform within different angle ranges. For example, if the actual transmission ratio within a certain angle interval deviates significantly from the preset transmission ratio, it indicates that when the rotary drive unit outputs the same number of pulses within that angle interval, there is a large deviation between the actual rotation angle and the theoretical rotation angle generated by the rotary platform. This may be related to uneven tension of the synchronous belt, gear eccentricity, transmission clearance, or local force changes on the platform. Through this step, the overall transmission ratio drift can be further refined into local deviations within multiple angle intervals, providing basic data for the subsequent generation of angle interval compensation tables.

[0054] S45. Divide the rotatable angle range of the rotating platform into multiple angle intervals according to a preset fixed angle step or according to the degree of change of the interval transmission ratio deviation. Multiple angle intervals are compensation units obtained by dividing the rotatable angle range of the rotating platform. Specifically, a preset fixed angle step size can be used, for example, dividing the rotatable angle range from 0° to 360° into 36 angle intervals with an angle step size of 10°, or non-equal intervals can be made according to the degree of change in the interval transmission ratio deviation.

[0055] For angle ranges where the transmission ratio deviation changes relatively smoothly, a larger angle step size can be used to reduce the amount of data in the compensation table; for angle ranges where the transmission ratio deviation changes drastically, a smaller angle step size can be used to improve the accuracy of local compensation.

[0056] Through this step, the rotatable range of the rotating platform is converted into multiple angle ranges that can be calculated and compensated separately, so that subsequent transmission ratio correction no longer depends on a single global correction coefficient, but can be finely processed for error differences in different angle ranges.

[0057] S46. Generate a sub-angle interval compensation table based on the interval transmission ratio deviation. The sub-angle interval compensation table includes an angle interval identifier, an interval correction coefficient, and an interval pulse compensation amount. The interval correction coefficient is determined based on the ratio between the actual interval transmission ratio of the corresponding angle interval and the preset transmission ratio. The interval pulse compensation amount is determined based on the interval correction coefficient and the target rotation angle of the corresponding angle interval. The angle interval compensation table records the compensation parameters corresponding to each angle interval. It includes at least an angle interval identifier, an interval correction coefficient, and an interval pulse compensation amount. The angle interval identifier indicates the applicable angle range for the compensation parameter, such as 0° to 10°, 10° to 20°, etc. The interval correction coefficient indicates the proportional correction relationship between the actual transmission ratio and the preset transmission ratio within the angle interval. The interval pulse compensation amount indicates the amount of compensation used to increase or decrease the target output pulse count within the angle interval. In practice, the interval correction coefficient can be determined based on the ratio between the actual transmission ratio and the preset transmission ratio of the corresponding angle interval. Then, the interval pulse compensation amount is calculated based on the interval correction coefficient and the target rotation angle within the angle interval. Thus, when the rotating platform performs a target angle correction, the rotating drive unit can first determine the angle interval to which the target angle belongs, and then retrieve the corresponding interval correction coefficient and interval pulse compensation amount from the angle interval compensation table, thereby making the output pulse count more consistent with the actual transmission state of that local angle interval.

[0058] S47. Perform continuity constraint processing on the interval correction coefficients of adjacent angle intervals so that the change in the interval correction coefficients between adjacent angle intervals is less than the preset continuity threshold. Continuity constraint processing is used to avoid abrupt changes in the interval correction coefficients between adjacent angle intervals. Since the interval correction coefficients are calculated based on visual calibration results and motion control data, they may be affected by image recognition errors, single-point sampling anomalies, rotation platform jitter, or local noise, leading to excessively large differences in correction coefficients between adjacent angle intervals. If a compensation table with excessively large differences is used directly, the rotation platform may experience control command jumps when crossing adjacent angle intervals, resulting in rotational shocks, angle overshoot, or unstable attitude correction.

[0059] Therefore, it is necessary to smooth or limit the interval correction coefficients of adjacent angle intervals to ensure that the change in the interval correction coefficients between adjacent angle intervals is less than a preset continuity threshold. This step ensures that the sub-angle interval compensation table changes continuously and smoothly within the angle range, improving the availability and stability of the compensation parameters in actual packaging and testing equipment.

[0060] S48. Obtain transmission ratio correction parameters based on the global transmission ratio correction coefficient and / or the angle interval compensation table. The transmission ratio correction parameters include parameter version number, correction time, correction type, calibration quality index, and parameter verification value.

[0061] The transmission ratio correction parameter is a comprehensive set of parameters used for subsequent updates to the transmission ratio parameters of the rotary drive unit. Specifically, when the rotary platform only experiences overall proportional transmission ratio drift, the transmission ratio correction parameter can be obtained based on the global transmission ratio correction coefficient; when the rotary platform has local non-uniform errors in different angle ranges, the transmission ratio correction parameter can be obtained based on the angle range compensation table; and when both overall correction and local compensation are required, the global transmission ratio correction coefficient and the angle range compensation table can be used together as the transmission ratio correction parameter.

[0062] The transmission ratio correction parameters include a parameter version number, correction time, correction type, calibration quality index, and parameter verification value. The parameter version number distinguishes parameters generated in different correction cycles; the correction time records the parameter generation time; the correction type identifies whether the correction is a global correction, angle-interval correction, or combined correction; the calibration quality index reflects the reliability of the visual calibration and transmission ratio fitting results; and the parameter verification value verifies parameter integrity during writing and reading. This step ensures that the transmission ratio correction parameters are storable, verifiable, and traceable, facilitating subsequent writing to the candidate parameter storage area, verification, and parameter rollback in case of anomalies.

[0063] Preferably, step S5 includes: S51. Read the transmission ratio parameter currently used by the rotary drive unit, and store the currently used transmission ratio parameter, the corresponding parameter version number, and the angle error before correction in the current online correction cycle as historical parameter records. First, the transmission ratio parameters currently used by the rotary drive unit are read to clarify the original angle conversion status of the equipment before the update. The currently used transmission ratio parameters correspond to the parameters used by the rotary drive unit to calculate the number of output pulses before the correction. The parameter version number is used to identify the source and effective batch of the parameter, and the angle error before correction reflects the actual angle control deviation of the rotary platform before this online correction. Storing this information as historical parameter records can provide a fallback basis when subsequent candidate parameter verification fails, and also facilitates tracing the rotary control parameters used in the packaging and testing process of a certain batch of integrated circuits.

[0064] S52. Write the transmission ratio correction parameter into the candidate parameter storage area corresponding to the rotary drive unit. The candidate parameter storage area is independent of the currently effective parameter storage area. The candidate parameter storage area is used to temporarily store newly generated transmission ratio correction parameters, while the currently effective parameter storage area is used to store transmission ratio parameters that are currently involved in the actual control of the equipment. Setting these two areas independently prevents new parameters from directly replacing currently effective parameters before verification and validation, thus preventing the rotary drive unit from immediately using incorrect parameters due to abnormal parameter calculations, writing errors, or incomplete data. This step is equivalent to setting up a buffer before the parameters officially take effect, making the transmission ratio parameter update process more secure.

[0065] S53. Read the written candidate transmission ratio correction parameters from the candidate parameter storage area, and perform integrity verification on the reading result according to the parameter verification value; Reading the written candidate transmission ratio correction parameters from the candidate parameter storage area is to confirm whether the actual written content is consistent with the previously generated correction parameters. The parameter verification value can be calculated from data such as the global transmission ratio correction coefficient, the angle interval compensation table, the parameter version number, the correction time, and the calibration quality index in the transmission ratio correction parameters, for example, using checksums, hash values, or cyclic redundancy check values. Recalculating or comparing the verification value after reading can detect problems such as data loss, byte misalignment, version mismatch, or missing items in the compensation table during the writing process, thereby preventing incomplete parameters from entering subsequent verification stages.

[0066] S54. If the integrity verification passes, set the candidate transmission ratio correction parameter to a state to be verified, and enable the rotary drive unit to perform trial rotation control based on the candidate transmission ratio correction parameter. After the integrity check passes, the candidate transmission ratio correction parameters are set to a pending verification state, rather than being directly marked as valid parameters. The pending verification state indicates that the parameter package has passed the write integrity check, but its control effect still needs to be confirmed through actual trial operation of the rotary platform. Subsequently, the rotary drive unit performs trial rotary control based on the candidate transmission ratio correction parameter package, observing whether the rotary platform can move accurately at the target angle through low-risk verification actions. This step distinguishes between the correctness of the parameter data level and the validity of the mechanical motion level, avoiding the assumption that the correction is effective simply because the write was successful.

[0067] S55. During the trial operation of the rotation control, the target output pulse number of the rotation drive unit is calculated based on the target rotation angle, the global transmission ratio correction coefficient, and / or the angle interval compensation table. The target output pulse count during the trial run of the rotation control is a control quantity recalculated based on the target rotation angle and candidate transmission ratio correction parameters. If the candidate parameters include a global transmission ratio correction coefficient, the overall conversion ratio between the target rotation angle and the output pulse count is adjusted according to this coefficient. If the candidate parameters include a sub-angle interval compensation table, the angle interval into which the target rotation angle falls is first determined, and then the corresponding interval correction coefficient or interval pulse compensation amount is called to locally compensate the base output pulse count. This step ensures that the trial run is not simply a repetition of the original control, but rather a practical verification of the impact of the candidate correction parameters on the rotation control command.

[0068] S56. After the candidate transmission ratio correction parameter passes the trial operation verification, the transmission ratio correction parameter in the candidate parameter storage area is updated to the currently effective parameter storage area, and the parameter version number corresponding to the candidate transmission ratio correction parameter is marked as the current effective version.

[0069] Only after the candidate transmission ratio correction parameters have passed trial operation verification are the transmission ratio correction parameters in the candidate parameter storage area updated to the currently effective parameter storage area, and their parameter version number marked as the current valid version. This ensures that the parameters involved in subsequent driver integrated circuit packaging detection and control simultaneously meet the requirements of integrity verification and motion verification. The mark of the current valid version can also form a version chain with historical parameter records, facilitating subsequent parameter traceability, anomaly location, and version rollback when necessary, making the transmission ratio correction process more stable and reliable.

[0070] Preferably, after step S5, the method further includes: S61. Control the rotation drive unit to drive the rotation platform to sequentially perform verification rotations at multiple verification angle positions according to the transmission ratio correction parameter package corresponding to the current valid version; Specifically, in S61, the currently valid version refers to the transmission ratio correction parameter version that has been provisionally designated for rotation control after parameter writing, integrity verification, and trial operation verification. Multiple verification angle positions can cover the commonly used correction angle range of the rotary platform, or multiple typical intervals in the angle interval compensation table. By controlling the rotary drive unit to sequentially execute verification rotations according to the transmission ratio correction parameter package corresponding to the currently valid version, it is possible to verify whether the transmission ratio correction parameter package can achieve stable and accurate angle control at different rotation angles, rather than relying solely on a single verification angle to determine the reliability of the correction result.

[0071] S62. At each verification angle position, acquire the verification image collected by the imaging module, and calculate the corresponding verification rotation angle based on the verification image. The verification image is an image acquired by the imaging module after the rotating platform reaches each verification angle position. In practice, the verification rotation angle at that verification angle position can be calculated by identifying calibration features, chip contour features, or other image features that can characterize the attitude of the rotating platform in the verification image. Since the verification rotation angle comes from visual measurement results, it can reflect the actual rotation result of the rotating platform under the action of the current transmission ratio correction parameters, thus avoiding the need to judge the accuracy of rotation solely based on drive commands or pulse output.

[0072] S63. Based on the verification rotation angle and target rotation angle corresponding to each verification angle position, obtain multiple verification angle deviations, and calculate the maximum angle deviation, average angle deviation, and angle deviation dispersion based on the multiple verification angle deviations. Verification angle deviation represents the difference between the verification rotation angle and the target rotation angle. By calculating the verification angle deviation at multiple verification angle positions, a set of angle error data can be obtained. The maximum angle deviation reflects the most unfavorable error situation among all verification positions, the average angle deviation reflects the overall angle control accuracy, and the angle deviation dispersion reflects whether the error distribution is uniform across different verification angle positions. By simultaneously calculating these three indicators, different situations such as overall correction failure, insufficient compensation in local areas, and occasional errors can be distinguished, providing a basis for subsequent confirmation of effectiveness, parameter rollback, or local secondary correction.

[0073] S64. When the maximum angle deviation, the average angle deviation, and the angle deviation dispersion all meet the corresponding preset verification thresholds, the transmission ratio correction parameter is confirmed to be effective, and the current effective version is used for rotation angle control in the subsequent integrated circuit packaging and testing process. When the maximum angle deviation, average angle deviation, and angle deviation dispersion all meet the corresponding preset verification thresholds, it indicates that the current transmission ratio correction parameter package meets the requirements in terms of worst-case error, overall error level, and error distribution consistency. At this point, the transmission ratio correction parameters can be confirmed to be effective, and the current valid version can be used as the rotation angle control parameter in the subsequent integrated circuit packaging inspection process. This step ensures that the parameters officially participating in packaging inspection have passed multi-angle visual verification, reducing the risk of using incorrectly corrected parameters directly for batch inspection.

[0074] S65. When the maximum angle deviation or the average angle deviation does not meet the corresponding preset verification threshold, the transmission ratio parameter of the rotary drive unit is rolled back to the previous valid version in the historical parameter record, and the number of consecutive retries corresponding to the current online correction cycle is accumulated. When the maximum or average angle deviation does not meet the corresponding preset verification threshold, it indicates that the current transmission ratio correction parameter package still does not meet the requirements in terms of overall control accuracy or control accuracy at the most unfavorable angle position. Continuing to use this parameter at this time may lead to an increase in the angle correction error of the subsequent drive integrated circuit. Therefore, it is necessary to revert the transmission ratio parameter of the rotary drive unit to the previous valid version in the historical parameter record. Simultaneously, the number of consecutive retries corresponding to the current online correction cycle is accumulated to record the number of verification failures and re-corrections during this online correction process, providing a basis for judgment to avoid infinite loops.

[0075] S66. When the number of consecutive retries is less than the preset retry threshold, the current online correction cycle is re-executed; When the number of consecutive retries is less than the preset retry threshold, it indicates that the current online correction cycle is still within the allowable retry range, and the current online correction cycle can be re-executed. During re-execution, the calibration image can be re-acquired, the actual transmission ratio can be re-obtained, the transmission ratio deviation can be re-judged, and new transmission ratio correction parameters can be generated. This step provides the equipment with another opportunity to correct when correction fails due to an abnormal calibration image, local recognition error, or occasional mechanical vibration, thus improving the fault tolerance of the online correction mechanism.

[0076] S67. When the number of consecutive retries is greater than or equal to the preset retry threshold, a transmission ratio correction failure alarm is generated, and the previous valid version in the historical parameter record is maintained as the currently effective parameter. When the number of consecutive retries exceeds or equals the preset retry threshold, it indicates that the transmission ratio correction parameters that meet the verification requirements have not been obtained after multiple re-executions of the current online correction cycle. This may indicate problems such as abnormal calibration characteristics, imaging module malfunctions, mechanical failures of the rotating platform, or severe wear of the transmission mechanism. Continuing to automatically retry in this situation could cause the equipment to remain in the correction process for an extended period. Therefore, a transmission ratio correction failure alarm is generated, and the previous valid version from the historical parameter record is retained as the currently effective parameter. This step prevents the correction process from looping indefinitely and puts the equipment into a safe state where alarms are possible, maintenance is possible, and rollback is possible.

[0077] S68. When the maximum angle deviation and the average angle deviation meet the corresponding preset verification threshold, and the angle deviation dispersion does not meet the corresponding preset verification threshold, the global transmission ratio correction coefficient is retained, and the sub-angle interval compensation table is regenerated to perform secondary correction on the rotation error of the local angle interval.

[0078] When the maximum and average angular deviations meet the corresponding preset verification thresholds, but the angular deviation dispersion does not, it indicates that the current correction parameters have largely resolved the overall transmission ratio deviation problem, but uneven error distribution still exists between different verification angular positions. In this case, it is not necessary to directly reject the global transmission ratio correction coefficient; instead, the global transmission ratio correction coefficient is retained, and a new angular interval compensation table is generated to address the uneven error distribution. This method allows for secondary correction of rotational errors in local angular intervals while maintaining the overall correction effect, thereby improving the consistency of rotational control across different angular ranges.

[0079] Preferably, step S1 includes: S11. During the integrated circuit packaging inspection process, the imaging module is used to acquire inspection images of the integrated circuit under test before and after rotation correction; In S12, the imaging module directly acquires inspection images of the integrated circuit under test before and after rotational correction during normal packaging and inspection. This allows for monitoring the angle correction effect of the rotating platform without adding an additional independent inspection mechanism. The inspection image before correction reflects the initial deflection state of the integrated circuit under test before entering rotational correction, while the inspection image after correction reflects the actual posture of the rotating platform after angle correction. By incorporating these two types of images into the operational monitoring, the angle correction effect can be obtained in a timely manner while the equipment continuously inspects the driven integrated circuit, rather than waiting for manual sampling or product anomalies to discover the transmission ratio drift problem.

[0080] S13. Obtain the pre-correction deflection angle and post-correction deflection angle of the integrated circuit under test based on the detection image, and obtain the angle correction residual based on the pre-correction deflection angle, post-correction deflection angle and target correction angle. The pre-correction deflection angle can be determined based on the angle between the edge contour of the integrated circuit under test, the pad arrangement direction, the pin boundary, or the chip marking direction and the target placement posture. The post-correction deflection angle is used to determine whether the posture of the rotary platform after angle correction is close to the target posture. The target correction angle is a theoretical rotation amount determined based on the pre-correction deflection angle and the target placement posture. By combining the pre-correction deflection angle, the post-correction deflection angle, and the target correction angle to calculate the angle correction residual, the residual error of the rotary platform after completing the target angle correction in the actual packaging inspection task can be reflected, thus providing a direct basis for whether to enter the online correction cycle.

[0081] S14. Statistically analyze the angle correction residuals corresponding to multiple integrated circuits under test according to the detection time sequence to obtain the angle correction residual sequence; By statistically analyzing the angle correction residuals corresponding to multiple integrated circuits under test in chronological order of detection, a sequence of angle correction residuals reflecting the continuous operating status of the equipment can be obtained. The angle correction residual of a single drive integrated circuit may be affected by image recognition fluctuations, local defects at the chip edge, or the clamping state of the carrier, making it difficult to directly represent whether the transmission ratio of the rotary platform has drifted. By performing time-series statistical analysis on the angle correction residuals of multiple continuously detected objects, it is possible to observe whether the residuals continuously increase, whether continuous deviations occur, or whether they show a significant trend change, making the online correction triggering conditions more stable and reliable.

[0082] S15. Calculate the residual average, residual change rate, and number of consecutive out-of-tolerances based on the angle correction residual sequence; The average residual reflects the overall angle correction error level over a period of time, the residual change rate reflects the trend of angle correction error changes with the detection process, and the number of consecutive out-of-tolerance errors reflects whether the angle correction anomaly is persistent. If only one angle correction residual is large, it may indicate a single image recognition anomaly or an abnormal placement of a particular integrated circuit under test. If the average residual increases, the residual change rate continues to increase, or the number of consecutive out-of-tolerance errors increases, it further indicates that the transmission state of the rotating platform may have deviated from the original transmission ratio parameters. This step comprehensively evaluates the angle correction residual sequence through multiple indicators, which can reduce false triggering caused by occasional errors.

[0083] S16. When the average residual value is greater than a preset average residual value threshold, or the residual change rate is greater than a preset residual change rate threshold, or the number of consecutive out-of-tolerance errors reaches a preset number threshold, the rotating platform is determined to enter the current online correction cycle. The residual mean, residual change rate, and number of consecutive out-of-tolerance errors correspond to different types of anomaly triggering methods. A residual mean greater than a preset residual mean threshold indicates a decrease in overall correction accuracy; a residual change rate greater than a preset residual change rate threshold indicates a continuous deterioration trend in angle correction error; and a number of consecutive out-of-tolerance errors reaching a preset threshold indicates that the anomaly is not sporadic but continuous. When any of the above conditions are met, the rotary platform enters the current online correction cycle, enabling timely re-acquisition and correction of the actual transmission ratio, preventing angle correction errors from further affecting the testing consistency of subsequent batches of drive integrated circuits.

[0084] S16. After determining that the current online correction cycle has been entered, control the integrated circuit packaging equipment to pause the rotation correction action of the subsequent integrated circuits to be tested in the current batch, and execute step S2.

[0085] After confirming the start of the current online correction cycle, the rotational correction of subsequent integrated circuits in the current batch is paused. This is to avoid continuing batch angle correction when the transmission ratio parameter may already be inaccurate, which could lead to attitude errors in more integrated circuits. Then, step S2 is executed to obtain the actual transmission ratio of the rotary platform within the current online correction cycle, switching the equipment from the normal testing process to the transmission ratio correction process. This process can promptly convert abnormal angle corrections during operation into online correction actions, reducing manual intervention and mitigating the risk of abnormal transmission ratios continuing to affect production testing.

[0086] Preferably, after step S6, the method further includes: S71. Obtain the chip contour information of the integrated circuit under test in the detection image of the imaging module, and determine the angle to be corrected of the integrated circuit under test relative to the target placement posture based on the chip contour information. Chip contour information can include image features that characterize the chip's posture, such as the outer edge line, corner points, long side direction, short side direction, pad arrangement direction, or marked area direction of the integrated circuit under test. After acquiring the inspection image, the imaging module determines the chip contour information through edge extraction, line fitting, corner point localization, or template matching, and compares it with the target placement posture to obtain the angle that the integrated circuit under test needs to be corrected. This step ensures that subsequent rotation control is based on the actual posture of the integrated circuit under test, rather than using a fixed preset angle, thus adapting to the initial deflection differences when different chips enter the inspection station.

[0087] S72. Calculate the target output pulse number of the rotary drive unit based on the angle to be corrected and the transmission ratio correction parameter corresponding to the current effective version; The transmission ratio correction parameters corresponding to the current valid version have been verified and confirmed through the aforementioned online correction, and can reflect the current actual transmission state of the rotary platform. Calculating the target output pulse count based on the angle to be corrected and the transmission ratio correction parameters converts the angle deviation identified by the visual side into a control quantity that the rotary drive unit can execute. If only the preset transmission ratio before correction is used for conversion, the output pulse count may be insufficient or excessive due to transmission ratio drift. Using the correction parameters corresponding to the current valid version ensures that the target output pulse count matches the actual transmission relationship of the rotary platform, improving the angle correction accuracy of the integrated circuit under test.

[0088] S73. If the current effective version includes a sub-angle interval compensation table, determine the corresponding target angle interval according to the angle to be corrected, and read the interval pulse compensation amount corresponding to the target angle interval from the sub-angle interval compensation table. If the current valid version includes a sub-angle interval compensation table, it indicates that the error of the rotary platform is not a simple overall proportional deviation, but may have varying degrees of local error in different angle intervals. In this case, it is necessary to first determine the target angle interval that the angle to be corrected falls into, and then read the corresponding interval pulse compensation amount from the sub-angle interval compensation table. The interval pulse compensation amount is used to compensate for local transmission errors within the angle range, in addition to the basic target output pulse number. This allows angle correction to no longer rely solely on the global transmission ratio correction coefficient, but to make fine adjustments to angle errors caused by local wear of the synchronous belt, gear eccentricity, or local clearance.

[0089] S74. Generate a corrected rotation control command based on the target output pulse count and the interval pulse compensation amount; The corrected rotation control command is determined by the target output pulse count and the interval pulse compensation amount. In practice, the interval pulse compensation amount can be added to or subtracted from the target output pulse count, or the target output pulse count can be recalculated based on the interval correction coefficient to generate the final control command. This step combines global correction with local interval compensation, ensuring that the control command received by the rotation drive unit reflects both the overall transmission ratio drift and the actual error characteristics of the local interval where the target angle is located, thereby improving control consistency in different angle correction tasks.

[0090] S75. Control the rotation drive unit to drive the rotation platform to rotate according to the modified rotation control command, so as to perform angle correction on the integrated circuit to be tested; The rotary drive unit drives the rotary platform to rotate according to the corrected rotary control command, enabling the integrated circuit under test (ICP-T) mounted on the platform to complete angle correction. Since this rotary control command has been calculated based on the transmission ratio correction parameters and interval pulse compensation amount of the current valid version, the actual rotation angle of the rotary platform is closer to the visually recognized angle to be corrected. This step applies the aforementioned online correction results to the actual driving IC packaging and testing process, ensuring that the transmission ratio correction is not merely a calibration step but directly serves the attitude adjustment of the IC-T.

[0091] S76. After angle correction, the imaging module re-acquires the re-inspection image of the integrated circuit under test, and determines whether the current posture of the integrated circuit under test meets the packaging inspection posture requirements based on the re-inspection image.

[0092] The re-inspection image is used to verify whether the current posture of the integrated circuit under test, after angle correction, meets the packaging inspection posture requirements. After the imaging module re-acquires the image, it can extract the chip outline, edge direction, pad arrangement direction, or marked area direction again, and compare it with the target placement posture to determine whether the remaining deflection angle falls within the allowable range. If the requirements are met, subsequent inspection, sorting, or packaging processes can continue; if the requirements are not met, re-correction, an abnormal alarm, or marking the driver integrated circuit as having an abnormal posture can be triggered. This step can confirm the effect of the corrected rotation control at the actual inspection object level, improving the posture consistency and reliability in the batch inspection process.

[0093] Example 2 Secondly, embodiments of the present invention provide a transmission ratio correction system for integrated circuit packaging equipment based on visual calibration. The system includes an integrated circuit packaging device and a processor. The integrated circuit packaging device includes a rotating platform, a rotating drive unit, an imaging module, and a calibration plate. The rotating platform is used to carry the integrated circuit to be tested and drive the integrated circuit to be tested to perform rotational calibration. The rotating drive unit is connected to the rotating platform and is used to drive the rotating platform to rotate according to rotation control commands and output corresponding motion control data. The imaging module is used to acquire calibration images, verification images, and detection images of the integrated circuit to be tested on the rotating platform. The calibration plate is disposed on the rotating platform and includes calibration features for rotational visual calibration. The processor is communicatively connected to the rotating drive unit and the imaging module, and is configured to execute the method described in Embodiment 1.

[0094] It should be clarified that the present invention is not limited to the specific configurations and processes described above and shown in the figures. For the sake of brevity, detailed descriptions of known methods are omitted here. In the above embodiments, several specific steps are described and shown as examples. However, the method process of the present invention is not limited to the specific steps described and shown. Those skilled in the art can make various changes, modifications, and additions, or change the order of steps, after understanding the spirit of the present invention.

[0095] Those skilled in the art will understand that embodiments of the present invention can be provided as methods, systems, or computer program products. Therefore, the present invention can take the form of a completely hardware embodiment, a completely software embodiment, or an embodiment combining software and hardware aspects. Furthermore, the present invention can take the form of a computer program product embodied on one or more computer-usable storage media (including, but not limited to, disk storage, CD-ROM, optical storage, etc.) containing computer-usable program code.

[0096] This invention is described with reference to flowchart illustrations and / or block diagrams of methods, apparatus (systems), and computer program products according to embodiments of the invention. It will be understood that each block of the flowchart illustrations and / or block diagrams, and combinations of blocks in the flowchart illustrations and / or block diagrams, can be implemented by computer program instructions. These computer program instructions can be provided to a processor of a general-purpose computer, special-purpose computer, embedded processor, or other programmable data processing apparatus to produce a machine, such that the instructions, which execute via the processor of the computer or other programmable data processing apparatus, generate instructions for implementing the flowchart illustrations and / or block diagrams. Figure 1 One or more processes and / or boxes Figure 1 A device that provides the functions specified in one or more boxes.

[0097] These computer program instructions may also be stored in a computer-readable storage medium that can direct a computer or other programmable data processing device to function in a particular manner, such that the instructions stored in the computer-readable storage medium produce an article of manufacture including instruction means, which are implemented in a process Figure 1 One or more processes and / or boxes Figure 1 The function specified in one or more boxes.

[0098] These computer program instructions may also be loaded onto a computer or other programmable data processing apparatus to cause a series of operational steps to be performed on the computer or other programmable apparatus to produce a computer-implemented process, thereby providing instructions that execute on the computer or other programmable apparatus for implementing the process. Figure 1 One or more processes and / or boxes Figure 1 The steps of the function specified in one or more boxes.

[0099] It should also be noted that the exemplary embodiments mentioned in this invention describe methods or systems based on a series of steps or apparatus. However, this invention is not limited to the order of the steps described above; that is, the steps can be performed in the order mentioned in the embodiments, or in a different order, or several steps can be performed simultaneously.

[0100] The above description is merely a specific embodiment of the present invention. Those skilled in the art will clearly understand that, for the sake of convenience and brevity, the specific working processes of the systems, modules, and units described above can be referred to the corresponding processes in the foregoing method embodiments, and will not be repeated here. It should be understood that the protection scope of the present invention is not limited thereto. Any person skilled in the art can easily conceive of various equivalent modifications or substitutions within the technical scope disclosed in the present invention, and these modifications or substitutions should all be covered within the protection scope of the present invention.

Claims

1. An integrated circuit package equipment transmission ratio correction method based on visual calibration, characterized by, An integrated circuit packaging device is applied to such a device, which includes a rotating platform for carrying and driving integrated circuits, a rotation drive unit for driving the rotating platform to rotate, and an imaging module for acquiring images of the rotating platform. The method includes: In response to the detection that the rotating platform meets the online correction trigger condition, the current online correction cycle is entered; The actual transmission ratio of the rotating platform within the current online correction cycle is obtained, wherein the actual transmission ratio is determined based on the rotational visual calibration result and the motion control data corresponding to the rotating drive unit. The rotational visual calibration result includes the visual rotation angle difference determined by the rotating platform image acquired by the imaging module, and the motion control data includes the pulse count output by the rotating drive unit and / or the cumulative value of the encoder feedback pulse corresponding to the rotating platform. The preset transmission ratio currently used by the rotary drive unit is obtained, and based on the deviation between the actual transmission ratio and the preset transmission ratio, it is determined whether the rotary drive unit meets the online transmission ratio correction condition. Under the condition of online transmission ratio correction, a transmission ratio correction parameter is generated based on the correspondence between the actual transmission ratio and the preset transmission ratio. The transmission ratio correction parameter is used to correct the conversion relationship between the target rotation angle and the number of output pulses in the rotary drive unit. The transmission ratio parameter of the rotary drive unit is updated based on the transmission ratio correction parameter, so that the rotary drive unit generates rotation control commands based on the updated transmission ratio parameter during the integrated circuit packaging and testing process.

2. The method of claim 1, wherein, The step of obtaining the actual transmission ratio of the rotating platform within the current online correction cycle includes: The rotation drive unit is controlled to drive the rotation platform to rotate to multiple angular positions sequentially according to a preset angle sequence; At each angular position, a calibration image containing calibration features is acquired by the imaging module, and motion control data corresponding to the rotation drive unit is acquired to obtain an image data sequence and a motion control data sequence. The visual rotation angle difference of the rotating platform between various angular positions is obtained based on the image data sequence; Based on the correspondence between the visual rotation angle difference and the motion control data sequence, the actual transmission ratio of the rotating platform in the current online correction cycle is calculated.

3. The method of claim 2, wherein, The step of obtaining the visual rotation angle difference of the rotating platform at each angular position based on the image data sequence includes: Extract the visual coordinates of the same calibration feature at different angular positions from the image data sequence; Based on the visual coordinate set of the same calibration feature at different angular positions, a trajectory circle fitting is performed to obtain the coordinates of the trajectory circle center corresponding to the calibration feature; The rotation center coordinates of the rotating platform are determined based on the trajectory center coordinates corresponding to at least one of the calibration features. Based on the rotation center coordinates and the visual coordinates of the calibration feature at each angular position, calculate the visual vector angle of the calibration feature relative to the rotation center coordinates; The visual rotation angle difference is obtained based on the visual vector angle corresponding to different angular positions.

4. The method of claim 1, wherein, The step of determining whether the rotary drive unit meets the online transmission ratio correction condition based on the deviation between the actual transmission ratio and the preset transmission ratio includes: The transmission ratio deviation, visual fitting residual, and operating status data corresponding to the current online correction cycle are obtained. The transmission ratio deviation is determined based on the actual transmission ratio and the preset transmission ratio. The visual fitting residual is the root mean square error between the visual rotation angle difference corresponding to each angular position and the fitting angle value output by the transmission ratio fitting relationship during the transmission ratio fitting process. The operating status data includes at least one of the cumulative number of rotations of the rotating platform, the cumulative running time, and the current ambient temperature. The validity condition of the actual transmission ratio is determined based on the visual fitting residual. If the visual fitting residual is greater than the preset residual threshold, the actual transmission ratio of the current online correction cycle is determined to be invalid, and the rotational visual calibration is re-executed. When the visual fitting residual is less than or equal to the preset residual threshold, the transmission ratio deviation is compared with the first transmission ratio deviation threshold and the second transmission ratio deviation threshold, wherein the first transmission ratio deviation threshold is less than the second transmission ratio deviation threshold. When the transmission ratio deviation is less than the first transmission ratio deviation threshold, it is determined that the rotary drive unit does not meet the online transmission ratio correction condition, and the preset transmission ratio remains unchanged; When the transmission ratio deviation is greater than or equal to the first transmission ratio deviation threshold and less than the second transmission ratio deviation threshold, the rotary drive unit is determined to meet the first correction condition and enters the global transmission ratio correction process; When the transmission ratio deviation is greater than or equal to the second transmission ratio deviation threshold, or when the operating status data reaches the preset operating status threshold, the rotary drive unit is determined to meet the second correction condition and enters the transmission ratio correction process in the angular interval.

5. The method according to claim 4, characterized in that, Under the condition of satisfying the online transmission ratio correction, the transmission ratio correction parameters are generated according to the correspondence between the actual transmission ratio and the preset transmission ratio, including: When the rotary drive unit satisfies the first correction condition, a global transmission ratio correction coefficient is generated based on the ratio between the actual transmission ratio and the preset transmission ratio, and the global conversion relationship between the target rotation angle and the number of output pulses is updated based on the global transmission ratio correction coefficient. When the rotation drive unit satisfies the second correction condition, the actual transmission ratio of each angle interval is obtained based on the visual rotation angle difference corresponding to each angle position and the motion control data. Based on the difference between the actual transmission ratio of the interval and the preset transmission ratio, calculate the interval transmission ratio deviation corresponding to each angle interval; The rotatable angle range of the rotating platform is divided into multiple angle intervals according to a preset fixed angle step or according to the degree of change of the interval transmission ratio deviation. An angle interval compensation table is generated based on the interval transmission ratio deviation. The angle interval compensation table includes an angle interval identifier, an interval correction coefficient, and an interval pulse compensation amount. The interval correction coefficient is determined based on the ratio between the actual interval transmission ratio of the corresponding angle interval and the preset transmission ratio. The interval pulse compensation amount is determined based on the interval correction coefficient and the target rotation angle of the corresponding angle interval. The interval correction coefficients of adjacent angle intervals are subjected to continuity constraints so that the change in the interval correction coefficients between adjacent angle intervals is less than a preset continuity threshold. The transmission ratio correction parameters are obtained based on the global transmission ratio correction coefficient and / or the angle interval compensation table. The transmission ratio correction parameters include parameter version number, correction time, correction type, calibration quality index, and parameter verification value.

6. The method according to claim 5, characterized in that, The step of updating the transmission ratio parameter of the rotary drive unit based on the transmission ratio correction parameter, so that the rotary drive unit generates rotation control commands based on the updated transmission ratio parameter during the integrated circuit packaging and testing process, includes: Read the transmission ratio parameter currently used by the rotary drive unit, and store the currently used transmission ratio parameter, the corresponding parameter version number, and the angle error before correction in the current online correction cycle as historical parameter records; The transmission ratio correction parameter is written into the candidate parameter storage area corresponding to the rotary drive unit, and the candidate parameter storage area is independent of the currently effective parameter storage area. Read the written candidate transmission ratio correction parameters from the candidate parameter storage area, and perform integrity verification on the read results based on the parameter verification value; If the integrity verification passes, the candidate transmission ratio correction parameter is set to a state to be verified, and the rotary drive unit performs trial rotation control based on the candidate transmission ratio correction parameter. During the trial operation of the rotation control, the target output pulse number of the rotation drive unit is calculated based on the target rotation angle, the global transmission ratio correction coefficient, and / or the angle interval compensation table. Once the candidate transmission ratio correction parameter passes the trial operation verification, the transmission ratio correction parameter in the candidate parameter storage area is updated to the currently effective parameter storage area, and the parameter version number corresponding to the candidate transmission ratio correction parameter is marked as the current effective version.

7. The method according to claim 6, characterized in that, After updating the transmission ratio parameters of the rotary drive unit based on the transmission ratio correction parameters, so that the rotary drive unit generates rotation control commands based on the updated transmission ratio parameters during integrated circuit packaging inspection, the method further includes: The rotation drive unit is controlled to drive the rotation platform to sequentially perform verification rotations at multiple verification angle positions according to the transmission ratio correction parameter package corresponding to the current effective version; At each verification angle position, the verification image acquired by the imaging module is obtained, and the corresponding verification rotation angle is calculated based on the verification image; Based on the verification rotation angle and target rotation angle corresponding to each verification angle position, multiple verification angle deviations are obtained, and the maximum angle deviation, average angle deviation, and angle deviation dispersion are calculated based on the multiple verification angle deviations. When the maximum angle deviation, the average angle deviation, and the angle deviation dispersion all meet the corresponding preset verification thresholds, the transmission ratio correction parameter is confirmed to be effective, and the current effective version is used for rotation angle control in the subsequent integrated circuit packaging and testing process. When the maximum angle deviation or the average angle deviation does not meet the corresponding preset verification threshold, the transmission ratio parameter of the rotary drive unit is rolled back to the previous valid version in the historical parameter record, and the number of consecutive retries corresponding to the current online correction cycle is accumulated. When the number of consecutive retries is less than the preset retry threshold, the current online correction cycle is re-executed; When the number of consecutive retries is greater than or equal to the preset retry threshold, a transmission ratio correction failure alarm is generated, and the previous valid version in the historical parameter record is maintained as the currently effective parameter. When the maximum angle deviation and the average angle deviation meet the corresponding preset verification thresholds, and the angle deviation dispersion does not meet the corresponding preset verification thresholds, the global transmission ratio correction coefficient is retained, and the sub-angle interval compensation table is regenerated to perform secondary correction on the rotation error of the local angle interval.

8. The method according to claim 1, characterized in that, The response that the rotating platform meets the online correction trigger condition and enters the current online correction cycle includes: During the integrated circuit packaging inspection process, the imaging module acquires inspection images of the integrated circuit under test before and after rotation correction. The pre-correction deflection angle and post-correction deflection angle of the integrated circuit under test are obtained from the detected image, and the angle correction residual is obtained from the pre-correction deflection angle, the post-correction deflection angle and the target correction angle. The angle correction residuals corresponding to multiple integrated circuits under test are statistically analyzed according to the detection time sequence to obtain the angle correction residual sequence. Calculate the residual mean, residual change rate, and number of consecutive out-of-tolerances based on the angle-corrected residual sequence; When the average residual value is greater than a preset average residual value threshold, or the residual change rate is greater than a preset residual change rate threshold, or the number of consecutive out-of-tolerance errors reaches a preset number threshold, the rotating platform is determined to enter the current online correction cycle. After determining that the current online correction cycle has begun, the integrated circuit packaging equipment is controlled to pause the rotation correction operation of subsequent integrated circuits to be tested in the current batch, and the step of obtaining the actual transmission ratio of the rotating platform within the current online correction cycle is executed.

9. The method according to claim 7, characterized in that, After confirming that the transmission ratio correction parameter is effective, the method further includes: The chip contour information of the integrated circuit under test in the detection image of the imaging module is obtained, and the angle to be corrected of the placement posture of the integrated circuit under test relative to the target is determined based on the chip contour information. The target output pulse number of the rotary drive unit is calculated based on the angle to be corrected and the transmission ratio correction parameters corresponding to the current effective version. If the current effective version includes a sub-angle interval compensation table, the corresponding target angle interval is determined according to the angle to be corrected, and the interval pulse compensation amount corresponding to the target angle interval is read from the sub-angle interval compensation table; Based on the target output pulse count and the interval pulse compensation amount, a corrected rotation control command is generated; The rotation drive unit is controlled to drive the rotation platform to rotate according to the modified rotation control command, so as to perform angle correction on the integrated circuit under test; After angle correction, the imaging module re-acquires the re-inspection image of the integrated circuit under test, and determines whether the current posture of the integrated circuit under test meets the packaging inspection posture requirements based on the re-inspection image.

10. A transmission ratio correction system for integrated circuit packaging equipment based on vision calibration, characterized in that, The system includes an integrated circuit packaging device and a processor. The integrated circuit packaging device includes a rotating platform, a rotating drive unit, an imaging module, and a calibration plate. The rotating platform carries the integrated circuit under test and drives it to perform rotational correction. The rotating drive unit is connected to the rotating platform and drives the rotating platform to rotate according to rotational control commands, and outputs corresponding motion control data. The imaging module acquires calibration images, verification images, and detection images of the integrated circuit under test on the rotating platform. The calibration plate is disposed on the rotating platform and includes calibration features for rotational visual calibration. The processor is communicatively connected to the rotating drive unit and the imaging module, and is configured to execute the transmission ratio correction method for an integrated circuit packaging device based on visual calibration as described in any one of claims 1 to 9.

Citation Information

Patent Citations

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    CN110570477B