Micro-nano level mechanical arm based on dual vision cooperative positioning

Abstract

The application relates to a micro-nano level mechanical arm based on double-vision cooperative positioning, and belongs to the technical field of mechanical arms, which comprises a support, a movable arm and a probe; the movable arm comprises a driving seat, a supporting arm and a bearing seat, the movable arm is arranged at the upper end position of the support through a three-dimensional motion structure, the three-dimensional motion structure is specifically a telescopic mechanism of X, Y and Z axes, the driving seat is arranged at the upper end position of the support through the three-dimensional motion structure, the supporting arm is provided in plurality, the plurality of supporting arms are rotationally arranged on the driving seat, a servo motor is arranged in the driving seat and used for controlling the supporting arm to rotate, one end of the supporting arm deviating from the driving seat is connected with the bearing seat, and the probe is arranged in the bearing seat. The application can realize real-time sensing and dynamic compensation of micro-deviation of the probe, effectively improves the double-vision cooperative positioning precision and the dynamic anti-interference ability of the equipment, and has high operation stability and working condition adaptability.

Description

Technical Field

[0001] This invention belongs to the field of robotic arm technology, specifically a micro-nano-scale robotic arm based on dual-vision collaborative positioning. Background Technology

[0002] Micro-nano robotic arms are core operational equipment in high-precision fields such as precision micromachining, microscopic inspection, and microelectronic assembly. They rely on visual positioning technology to achieve precise alignment and operation of tiny workpieces. The positioning accuracy and operational stability of the equipment directly determine the quality and precision of the finished product in micro-nano operations. With the continuous upgrading of precision manufacturing technology, the industry has placed higher demands on the spatial positioning capabilities, dynamic interference resistance, and adaptability to various working conditions of micro-nano robotic arms. Dual-vision collaborative positioning technology is gradually becoming the core development direction for high-precision operation of micro-nano robotic arms. In actual operation, existing robotic arms are highly susceptible to mechanical vibration and inertial impact during X, Y, and Z axis spatial displacement, frequent start-stop, and continuous operation. This results in micron-level swaying and axial and radial micro-offsets. Without buffering, limiting, or friction-enhancing structures to constrain the probe posture, the visual inspection benchmark becomes unstable, and the visual imaging and positioning benchmark continue to jitter. This directly leads to a decrease in the accuracy of dual-vision collaborative positioning and matching, poor recognition consistency, and difficulty in meeting the basic requirements of high-precision alignment detection at the micro-nano scale. In view of this, a micro-nano-scale robotic arm based on dual-vision cooperative localization is proposed. Summary of the Invention

[0003] To solve the above-mentioned technical problems, the present invention provides: a micro-nano-scale robotic arm based on dual vision collaborative positioning, including a support, a movable arm and a probe; The movable arm includes a drive base, a support arm, and a carrier base. The movable arm is positioned at the upper end of the support via a three-dimensional motion structure, specifically a telescopic mechanism along the X, Y, and Z axes. The drive base is also positioned at the upper end of the support via the three-dimensional motion structure. Multiple support arms are provided, rotatably mounted on the drive base. A servo motor is installed inside the drive base to control the rotational movement of the support arms. The end of each support arm offset from the drive base is connected to the carrier base. The probe is housed within the carrier base and is specifically a recognition probe, with a visual detector at its bottom. The support base has a reserved slot, and an anti-shake component is provided in the reserved slot to limit the probe. The anti-shake component includes a frustum, an arc arm, a collar, an elastic plate, and an external threaded plug. The frustum is set outside the recognition probe and is located in the reserved slot. One end of the elastic plate is fixedly set on the top of the frustum, and the other end of the elastic plate is connected to a collar, which surrounds the recognition probe. Here, the inner diameter of the collar is larger than the outer diameter of the recognition probe. The periphery of the truncated cone is provided with identification components; An adsorption component is provided at the bottom of the frustum.

[0004] As a preferred technical solution for a micro-nano-scale robotic arm based on dual-vision collaborative positioning, the support includes a base, a support frame, and a top frame. The support frame is connected in the middle of the base and the top frame. The support frame is configured in pairs, with the two support frames located at the edges of the base and the top frame, respectively.

[0005] As a preferred technical solution for a micro-nano-scale robotic arm based on dual-vision collaborative positioning, the elastic plates are arranged in multiple arrays about the axis of the frustum. Friction textures are provided in the middle of the outer periphery of the elastic plates to increase friction. The external threaded plug is threadedly connected to the opening of the reserved slot, and the bottom end of the external threaded plug is in contact with the collar.

[0006] As a preferred technical solution for a micro-nano-scale robotic arm based on dual-vision collaborative positioning, the recognition component includes a rotating shaft, an external toothed ring, external toothed threads, and a linkage seat. Multiple storage slots are provided around the periphery of the truncated cone. A rotating shaft is rotatably arranged in the storage slot. An arc arm is arranged on the rotating shaft. An elastic element is arranged on the inner edge of the arc arm. The other side of the elastic element is in contact with the inner wall of the storage slot. The elastic element can reset the arc arm when it is not under pressure.

[0007] As a preferred technical solution for a micro-nano-scale robotic arm based on dual-vision collaborative positioning, the external toothed ring is rotatably mounted in a frustum, and there are four external toothed rings, each of which can move independently.

[0008] As a preferred technical solution for a micro / nano-scale robotic arm based on dual-vision collaborative positioning, the arm has four rotating shafts, each divided into four equal parts according to its height. External teeth are sequentially and equally distributed on each of the four rotating shafts, as detailed in the reference section. Figure 6 The four rotating shafts are defined as E, F, G and H respectively. External teeth are set at 1 / 4 of E, external teeth are set at 2 / 4 of F, and so on. The external teeth and the corresponding external tooth rings are meshed, which allows the corresponding external tooth rings to rotate.

[0009] As a preferred technical solution for a micro / nano-scale robotic arm based on dual-vision collaborative positioning, the inner edges of the four external toothed rings are sequentially and equally angledly arranged with linkage seats, specifically as shown in the reference. Figure 6 The four external toothed rings are defined as A, B, C and D respectively. A linkage seat is set at the 90-degree angle of A, a linkage seat is set at the 180-degree angle of B, and so on. The linkage seat is provided with a smooth section and a slope section.

[0010] As a preferred technical solution for a micro-nano-scale robotic arm based on dual-vision collaborative positioning, the adsorption component includes a suction cup, a piston, and a movable rod. The suction cup is located on the back of a frustum, and a movable chamber is formed at the bottom of the frustum. The piston is movably disposed in the movable chamber.

[0011] As a preferred technical solution for a micro / nano-scale robotic arm based on dual-vision collaborative positioning, the piston is equipped with a movable rod, which is T-shaped overall. The top end of the movable rod contacts the upper surface of the linkage seat, specifically as shown in the reference. Figure 9 There are four movable rods. When they correspond to the linkage seats in different positions, the length of the bottom end of the movable rod is adjusted accordingly.

[0012] The beneficial effects of this invention are: 1. This invention integrates anti-shake components within a pre-reserved slot in the support base, forming a wraparound limiting and anti-shake structure for the identification probe. Multiple arrayed elastic plates, along with a collar surrounding the probe, combined with the compression and locking effect of the external threaded plug, ensure a tight fit between the collar, elastic plates, and the inner wall of the pre-reserved slot. This provides all-around elastic constraint on the probe, effectively suppressing minor probe wobbling and displacement caused by equipment three-dimensional movement, mechanism start-up and shutdown, and operational vibrations. Unlike traditional rigid limiting structures, this elastic anti-shake structure buffers the impact force generated by mechanical movement, avoiding probe wear and positioning displacement caused by rigid compression, and significantly improving the static and dynamic stability of the probe during operation.

[0013] 2. This invention features an identification and correction component that forms a hierarchical linkage transmission structure through four sets of rotating shafts, differentially arranged external toothed grooves, and independently moving external toothed rings. Based on the external toothed groove layout at different heights of the four sets of rotating shafts and the linkage seat structure at different angles of the four sets of external toothed rings, it can accurately correspond to the tilting and offset conditions of the probe in different directions. When the identification probe is tilted to the left or right or at an angle, the arc arm in the corresponding position is squeezed, causing the rotating shaft to rotate. Through toothed groove meshing, the corresponding external toothed ring and linkage seat rotate synchronously. Relying on the structural switching between gentle and sloping sections, it achieves accurate identification and dynamic response to the offset condition, providing a precise triggering mechanism for subsequent stable correction. This solves the technical problem that traditional micro-nano arms cannot autonomously sense and correct the micro-offset of the probe, and improves the adaptive capability of the equipment operation.

[0014] 3. This invention is equipped with an adaptive adsorption component that works in conjunction with the identification and correction component to construct an integrated stable system from sensing to correction to stabilization. Based on different probe offset directions and angles, the corresponding linkage seat drives the movable rods of different lengths to move, causing the piston to rise and fall within the movable chamber. This changes the internal air pressure of the suction cup, creating a vacuum adsorption force that tightly adsorbs the suction cup onto the inner wall of the pre-reserved slot. Through the mechanical compensation principle of offset reverse traction, a reverse pull corrects the tilted probe, offsetting the positional shift caused by motion disturbances and mechanical deviations in real time. This fundamentally solves the problem of probe wobbling and misalignment in micro-nano level operations. Even under high-speed, high-frequency three-dimensional motion conditions, the identification probe can still be kept in a central reference working state, greatly improving the operational stability, repeatability, and service life of the equipment under complex working conditions. Attached Figure Description

[0015] Figure 1 This is a diagram of the overall structure.

[0016] Figure 2 This is a separate diagram of the movable arm.

[0017] Figure 3 This is a schematic diagram of the image stabilization component.

[0018] Figure 4 This is a schematic diagram of a frustum.

[0019] Figure 5 for Figure 4 Cross-sectional view.

[0020] Figure 6 for Figure 5 Explosion effect diagram.

[0021] Figure 7 for Figure 5 Middle 1 / 4 section bottom view.

[0022] Figure 8 for Figure 7 Enlarged view of section X in the middle.

[0023] Figure 9 This is a reference diagram showing the positions of the linkage seat and the movable rod in different locations.

[0024] Figure label: 10. Base; 11. Support frame; 12. Top frame; 13. Drive base; 14. Support arm; 15. Bearing seat; 16. Identification probe; 17. Reserved slot; 20. Frustum; 21. Storage slot; 22. Rotating shaft; 23. Arc arm; 24. Elastic element; 25. External gear ring; 26. External toothed groove; 27. Suction cup; 28. Movable chamber; 29. ​​Piston; 210. Movable rod; 211. Linkage seat; 212. Smooth section; 213. Slope section; 30. Collar; 31. Elastic plate; 32. Friction pattern; 33. External thread plug. Detailed Implementation

[0025] The technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present invention. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. All other embodiments obtained by those skilled in the art based on the embodiments of the present invention without creative effort are within the scope of protection of the present invention.

[0026] The embodiments provided by the present invention will be described in detail below: First embodiment: A micro / nano-scale robotic arm based on dual-vision collaborative localization, such as Figures 1 to 3 This includes a support frame, a movable arm, and a probe; The bracket includes a base 10, a support frame 11 and a top frame 12. The support frame 11 is connected in the middle of the base 10 and the top frame 12. The support frame 11 is provided in two pieces, with the two support frames 11 located at the edges of the base 10 and the top frame 12 respectively. The base 10 is provided with a product placement area. The movable arm includes a drive base 13, a support arm 14, and a carrier base 15. The movable arm is set at the upper end of the support through a three-dimensional motion structure, which is specifically a telescopic mechanism of the X, Y, and Z axes. The drive base 13 is set at the upper end of the support through the three-dimensional motion structure. Multiple support arms 14 are provided, and the multiple support arms 14 are rotatably set on the drive base 13. The drive base 13 is equipped with a servo motor to control the rotation of the support arms 14. The end of the support arm 14 that is off from the drive base 13 is connected to the carrier base 15. The probe is placed in the carrier base 15. The probe is specifically a recognition probe 16, and the bottom of the recognition probe 16 is a vision detector. The support 15 has a reserved slot 17, and the reserved slot 17 is equipped with a shake-proof component to limit the probe.

[0027] The above can achieve the following: the three-dimensional motion structure on the top frame 12 can drive the drive seat 13 to move in the X, Y and Z directions, thereby achieving a better visual collaborative positioning effect. The drive seat 13 drives the support arm 14 to make the carrier seat 15 move up and down, thereby adjusting the distance between the recognition probe 16 and the product, thereby improving the overall visual recognition effect.

[0028] Second embodiment: A micro / nano-scale robotic arm based on dual-vision collaborative localization, such as Figure 3The anti-shake component includes a frustum 20, an arc arm 23, a collar 30, an elastic plate 31, and an external threaded plug 33. The frustum 20 is disposed outside the recognition probe 16 and is located in the reserved slot 17. One end of the elastic plate 31 is fixedly disposed on the top of the frustum 20, and the other end of the elastic plate 31 is connected to the collar 30, which surrounds the recognition probe 16. Here, the inner diameter of the collar 30 is larger than the outer diameter of the recognition probe 16. Multiple elastic plates 31 are provided, and the multiple elastic plates 31 are arranged in an array about the axis of the frustum 20. Friction grooves 32 are provided in the middle of the outer periphery of the elastic plates 31. The friction grooves 32 are used to increase friction. The external threaded plug 33 is threadedly connected to the opening of the reserved slot 17, and the bottom end of the external threaded plug 33 is in contact with the collar 30.

[0029] The above steps achieve the following: The identification probe 16 is placed into the reserved slot 17. First, the range of the arc arm 23 is controlled so that the frustum 20 can enter the reserved slot 17. After the frustum 20 enters the reserved slot 17, the elastic element 24 allows the arc arm 23 to contact the inner edge of the reserved slot 17. At this moment, the identification probe 16 is at the center of the entire support seat 15. Then, the external threaded plug 33 is screwed on, causing the compression ring 30 to bend and contact the inner wall of the reserved slot 17. At this moment, the identification probe 16 is in the optimal state. Furthermore, in this step, the elastic plate 31 can also abut against the rotating shaft 22, thus counteracting any shaking.

[0030] Third embodiment: A micro / nano-scale robotic arm based on dual-vision collaborative localization, such as Figure 4 , Figure 5 , Figure 6 and Figure 9 The truncated cone 20 is provided with identification components around its periphery. The identification components include a rotating shaft 22, an external toothed ring 25, an external toothed thread 26, and a linkage seat 211. Multiple storage slots 21 are provided around the truncated cone 20. The rotating shaft 22 is rotatably arranged in the storage slot 21. An arc arm 23 is provided on the rotating shaft 22. An elastic element 24 is provided on the inner edge of the arc arm 23. The other side of the elastic element 24 is in contact with the inner wall of the storage slot 21. The elastic element 24 can reset the arc arm 23 when it is not under pressure. The external toothed ring 25 is rotatably mounted in the frustum 20. There are four external toothed rings 25, and each of the four external toothed rings 25 can move independently. There are four rotating shafts 22, which are divided into four equal parts according to their height. External toothed threads 26 are arranged sequentially and equally on each of the four rotating shafts 22, as detailed in the reference. Figure 6The four rotating shafts 22 are defined as E, F, G and H respectively. External toothed patterns 26 are set at 1 / 4 of E, external toothed patterns 26 are set at 2 / 4 of F, and so on. The external toothed patterns 26 and the corresponding external toothed rings 25 are meshed, which allows the corresponding external toothed rings 25 to rotate. The inner edges of the four external toothed rings 25 are provided with linkage seats 211 at equal angles in sequence, as detailed in the reference. Figure 6 The four external toothed rings 25 are defined as A, B, C and D respectively. A linkage seat 211 is set at the 90-degree angle of A, a linkage seat 211 is set at the 180-degree angle of B, and so on. A smooth section 212 and a slope section 213 are set on the linkage seat 211.

[0031] Fourth embodiment: A micro / nano-scale robotic arm based on dual-vision cooperative localization, such as Figures 7 to 9 The bottom of the truncated cone 20 is provided with an adsorption component, which includes a suction cup 27, a piston 29 and a movable rod 210. The suction cup 27 is located on the back of the truncated cone 20. The bottom of the truncated cone 20 is provided with a movable chamber 28, and the piston 29 is movably located in the movable chamber 28. A movable rod 210 is provided on the piston 29. The movable rod 210 is T-shaped, and its top end contacts the upper surface of the linkage seat 211. (See reference for details.) Figure 9 There are four movable rods 210. When they correspond to the linkage seat 211 at different positions, the length of the bottom end of the movable rod 210 is adjusted accordingly.

[0032] Through the above content, namely the third and fourth embodiments, the following can be achieved: when three-dimensional motion or other factors occur, the recognition probe 16 will tilt left and right. At this time, the corresponding arc arm 23 will be squeezed against the inner wall of the reserved slot 17. At this time, the arc arm 23 and the rotating shaft 22 at the corresponding position will rotate. For better illustration, the rotating shaft 22 corresponding to position E on the left will rotate. The rotating shaft 22 uses the external tooth pattern 26 to make the external tooth ring 25 at position A rotate. The external tooth ring 25 drives the linkage seat 211 at the right position to rotate. At this time, the movable rod 210 moves from the flat section 212 to the slope section 213. The piston 29 will move upward from the movable chamber 28, which allows the suction cup 27 to better adhere to the inner edge of the reserved slot 17 by relying on vacuum. Thus, when tilted to the left, the suction component on the right can play a pulling effect, thereby improving the stability of the recognition probe 16 during use.

[0033] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the protection scope of the present invention.

Claims

1. A micro / nano-scale robotic arm based on dual-vision collaborative positioning, characterized in that: Includes a support frame, a movable arm, and a probe; The movable arm includes a drive seat (13), a support arm (14), and a carrier seat (15). The movable arm is set at the upper end of the support through a three-dimensional motion structure, which is specifically a telescopic mechanism of the X, Y, and Z axes. The drive seat (13) is set at the upper end of the support through the three-dimensional motion structure. Multiple support arms (14) are provided, and multiple support arms (14) are rotatably set on the drive seat (13). The end of the support arm (14) that is away from the drive seat (13) is connected to the carrier seat (15). The probe is placed in the carrier seat (15), and the probe is specifically a recognition probe (16). The support base (15) is provided with a reserved slot (17), and the reserved slot (17) is provided with a shake-proof component for limiting the probe. The shake-proof component includes a frustum (20), an arc arm (23), a collar (30), an elastic plate (31), and an external threaded plug (33). The frustum (20) is located outside the recognition probe (16) and is located in the reserved slot (17). One end of the elastic plate (31) is fixedly located on the top of the frustum (20), and the other end of the elastic plate (31) is connected to the collar (30), and the collar (30) surrounds the recognition probe (16). The periphery of the truncated cone (20) is provided with identification components; The identification component includes a rotating shaft (22), an external toothed ring (25), external toothed threads (26), and a linkage seat (211). Multiple storage slots (21) are provided around the periphery of the truncated cone (20). The rotating shaft (22) is rotatably arranged in the storage slot (21). An arc arm (23) is provided on the rotating shaft (22). An elastic element (24) is provided on the inner edge of the arc arm (23). The other side of the elastic element (24) is in contact with the inner wall of the storage slot (21). The external toothed ring (25) is rotatably disposed in the frustum (20). There are four external toothed rings (25), and each of the four external toothed rings (25) can move independently. There are four rotating shafts (22), each rotating shaft (22) is divided into four equal parts according to its height, and external teeth (26) are arranged on each of the four rotating shafts (22) in an equal order. The external teeth (26) and the corresponding external tooth rings (25) are meshed. The inner edges of the four external toothed rings (25) are provided with linkage seats (211) at equal angles in sequence. The linkage seats (211) are provided with a gentle section (212) and a slope section (213). An adsorption component is provided at the bottom of the frustum (20); The adsorption component includes a suction cup (27), a piston (29) and a movable rod (210). The suction cup (27) is located on the back of the truncated cone (20). The bottom of the truncated cone (20) has a movable chamber (28). The piston (29) is movably located in the movable chamber (28). The piston (29) is provided with a movable rod (210), which is T-shaped in general. The top of the movable rod (210) touches the upper surface of the linkage seat (211).

2. The micro / nano-scale robotic arm based on dual-vision collaborative positioning according to claim 1, characterized in that: The bracket includes a base (10), a support frame (11) and a top frame (12). The support frame (11) is connected in the middle of the base (10) and the top frame (12). The support frame (11) is provided in pairs, with the two support frames (11) located at the edges of the base (10) and the top frame (12) respectively.

3. The micro / nano-scale robotic arm based on dual-vision collaborative positioning according to claim 1, characterized in that: The elastic plate (31) is provided in multiples, and the multiple elastic plates (31) are arranged in an array about the axis of the frustum (20). Friction texture (32) is provided in the middle section of the outer periphery of the elastic plate (31). The external threaded plug (33) is threadedly connected to the opening of the reserved slot (17), and the bottom end of the external threaded plug (33) is in contact with the collar (30).

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