Cutting fluid supply device

Abstract

The application provides a cutting cooling liquid supply device, relates to the field of cutting cooling liquid injection control, and aims to solve the problem of limited coverage of cutting cooling liquid in high-speed cutting. The cutting cooling liquid supply device adopts a spraying pipe arranged along the cutting line direction, and multiple interval-distributed fan-shaped nozzles are arranged to form a large range of spraying on the cutting area. Meanwhile, a moving assembly linked and adjusted along two mutually perpendicular directions is arranged to drive the position adjustment of the spraying assembly to match the cutting position change of the workpiece to be cut. Thus, the spraying stability, uniformity and position adaptability of the cooling liquid are improved, the heat dissipation and chip removal effects of the cutting area are improved, the risk of hidden cracks and edge collapse is reduced, and the processing stability and product yield are improved.

Description

Technical Field

[0001] This application relates to the field of cutting coolant technology, and more particularly to a cutting coolant supply device. Background Technology

[0002] During the cutting process of photovoltaic silicon wafers, coolant spraying is usually used to cool, lubricate and flush away debris in the contact area between the diamond wire and the silicon rod, so as to ensure cutting quality and process continuity.

[0003] However, existing spraying devices have limited spray coverage and cannot continuously and evenly act on the contact area during high-speed cutting, resulting in insufficient local heat dissipation and silicon powder accumulation, which poses risks of microcracks and yield fluctuations in silicon wafers. Summary of the Invention

[0004] This application provides a cutting coolant supply device to solve the problem of limited coolant spray range during silicon wafer cutting.

[0005] This application provides a cutting coolant supply device, comprising: a spray assembly, the spray assembly including a spray pipe and a plurality of nozzles disposed on the spray pipe, the plurality of nozzles being spaced apart along the axial direction of the spray pipe, the axial direction of the spray pipe being configured parallel to the axial direction of the cutting line, the nozzles of the plurality of nozzles being fan-shaped and configured to face the workpiece to be cut, so as to spray the cutting coolant disposed in the spray pipe onto the cutting area; and a moving assembly, the moving assembly including a first moving mechanism and a second moving mechanism, the second moving mechanism being slidably connected to the first moving mechanism, the spray assembly being slidably connected to the second moving mechanism, the first moving mechanism being able to drive the second moving mechanism to move along a first direction and drive the spray assembly to move synchronously, and the second moving mechanism being able to drive the spray assembly to move along a second direction;

[0006] Wherein, the first direction is perpendicular to the second direction.

[0007] In one possible implementation, the cutting coolant supply device further includes a controller; the controller is electrically connected to the moving component and is used to adjust the position of the spraying component in real time according to the cutting process parameters.

[0008] In one possible implementation, the cutting process parameters include the cutting speed, the bow height of the cutting line, and the feed path of the workpiece to be cut.

[0009] In one possible implementation, the controller is configured to adjust the position of the spraying assembly when the bow height of the cutting line is a first height, so that the distance between the nozzle and the workpiece to be cut is a first distance; the controller is further configured to adjust the position of the spraying assembly when the bow height of the cutting line is a second height, so that the distance between the nozzle and the workpiece to be cut is a second distance; wherein the first height is less than the second height, and the first distance is less than the second distance.

[0010] In one possible implementation, the first moving mechanism includes a first driving unit, a first slide rail, and a first slider. The first driving unit is electrically connected to the controller. The first slide rail extends along the first direction. The first slider is slidably connected to the first slide rail and is also fixedly connected to the second moving mechanism. The first driving unit is used to drive the first slider to slide on the first slide rail. The second moving mechanism includes a second driving unit, a second slide rail, and a second slider. The second driving unit is electrically connected to the controller. The second slide rail extends along the second direction. The second slider is slidably connected to the second slide rail and is also fixedly connected to the spray assembly. The second driving unit is used to drive the second slider to slide on the second slide rail.

[0011] In one possible implementation, the water mist areas sprayed from adjacent nozzles partially overlap.

[0012] In one possible implementation, each nozzle is equipped with a corresponding solenoid valve, which can adjust the spray flow rate and spray angle of the corresponding nozzle.

[0013] In one possible implementation, the cutting coolant supply device further includes a delivery hose; one end of the delivery hose is configured to communicate with a cutting coolant storage tank, and the other end of the delivery hose is configured to communicate with the spray pipe.

[0014] In one possible implementation, the moving component further includes a third moving mechanism, the first moving mechanism being slidably connected to the third moving mechanism, the third moving mechanism being able to drive the first moving mechanism to move along a third direction and drive the second moving mechanism and the spraying component to move synchronously; wherein, the first direction, the second direction and the third direction are perpendicular to each other.

[0015] In one possible implementation, the plurality of nozzles are arranged at equal intervals along the axial direction of the spray pipe. Attached Figure Description

[0016] The accompanying drawings, which are incorporated in and form part of this specification, illustrate embodiments consistent with this application and, together with the description, serve to explain the principles of this application.

[0017] Figure 1 This is a schematic diagram of the cutting coolant supply device provided in an embodiment of this application.

[0018] Figure label:

[0019] 100-Injection Assembly;

[0020] 101-Spray pipe; 102-Sprayer head; 103-Water mist zone.

[0021] 200 - Mobile components;

[0022] 201 - First moving mechanism; 202 - Second moving mechanism;

[0023] 300 - Part to be cut;

[0024] 400 - Delivery hose.

[0025] The accompanying drawings illustrate specific embodiments of this application, which will be described in more detail below. These drawings and descriptions are not intended to limit the scope of the concept in any way, but rather to illustrate the concept of this application to those skilled in the art through reference to particular embodiments. Detailed Implementation

[0026] During silicon wafer dicing, a continuous cooling fluid is required at the contact area between the diamond wire and the workpiece to achieve cooling, lubrication, and debris removal. In related technologies, the cooling fluid is usually delivered to the dicing area through a fixed spraying device, typically employing a single spray direction and a relatively concentrated spray pattern. This allows the cooling fluid to be sprayed from the spraying end onto the surface of the workpiece, covering the area where the diamond wire participates in the dicing process and carrying away heat and silicon dust during the dicing process.

[0027] However, under high-speed cutting conditions, a fixed spraying device struggles to continuously match the spatial changes in the cutting area, resulting in limited coverage of the cutting coolant, uneven spray distribution, and a tendency for localized insufficient cooling and debris accumulation. Furthermore, fluctuations in spray flow rate or spray area misalignment can exacerbate temperature rise in the contact area, making the silicon wafer more susceptible to microcracks, edge chipping, and yield fluctuations. Since spraying position adjustments typically rely on manual intervention, process continuity and stability are also affected.

[0028] To address the aforementioned issues, this application provides a cutting coolant supply device. This device uses a spray assembly comprising a spray pipe and multiple fan-shaped nozzles to provide a wider spray coverage of the cutting area. Furthermore, a moving assembly including a first moving mechanism and a second moving mechanism with mutually perpendicular directions of motion drives the spray assembly to move in different directions, thereby better adapting to changes in the cutting position of the workpiece and improving the coolant supply effect.

[0029] The technical solution of this application and how the technical solution of this application solves the above-mentioned technical problems are described in detail below with specific embodiments. These specific embodiments can be combined with each other, and the same or similar concepts or processes may not be described again in some embodiments. The embodiments of this application will now be described with reference to the accompanying drawings.

[0030] refer to Figure 1 The cutting coolant supply device provided in this application embodiment includes: a spraying assembly 100 and a moving assembly 200.

[0031] The spray assembly 100 includes a spray pipe 101 and a plurality of nozzles 102 disposed on the spray pipe 101. The plurality of nozzles 102 are spaced apart along the axial direction of the spray pipe 101 and communicate with the spray pipe 101. The axial direction of the spray pipe 101 is configured to be parallel to the axial direction of the cutting line. The nozzles of the plurality of nozzles 102 are fan-shaped and configured to face the workpiece 300 to spray the cutting coolant disposed in the spray pipe 101 onto the cutting area.

[0032] The spray assembly 100 is an execution unit used to deliver cutting coolant to the cutting area in a controlled spray manner. Its function is to make the cutting coolant act on the contact area between the cutting line and the workpiece 300 to achieve cooling, lubrication and debris flushing of the cutting area.

[0033] The spray pipe 101 is the main delivery channel for the cutting coolant. It is connected to the coolant supply source through the pipe interface and is used to receive the externally delivered cutting coolant and distribute it to multiple nozzles 102. The axis of the spray pipe 101 is parallel to the axis of the cutting line so that the spray band formed by the multiple nozzles 102 spreads along the extension direction of the cutting line, ensuring that the spray of the cutting coolant can cover the entire cutting area.

[0034] Meanwhile, the nozzles of multiple nozzles 102 are designed in a fan shape. The cross-section of the fan-shaped nozzle is a narrow and flat slit structure, which is different from the dot-shaped nozzles such as round holes, conical holes, and square holes. After the fluid is squeezed out from the narrow slit, it is subjected to fluid tension and airflow shearing. The fluid rushes out of the nozzle and spreads laterally, without gathering into a single water column. Finally, it forms a flat, fan-shaped continuous spray surface with a wide coverage and uniform spray. The flushing effect of the fan-shaped spray can also quickly remove silicon wafers and prevent the accumulation of silicon wafers.

[0035] The spray pipe 101 can be a round pipe, a rectangular pipe, or an irregularly shaped hollow pipe, and can adopt a straight pipe type, an arc-shaped pipe type, or a segmented splicing structure. The length of the spray pipe 101 is set according to the cutting width to ensure that its length is compatible with the cutting path. The pipe diameter or inner cavity cross-section of the spray pipe 101 can be determined according to the liquid supply flow rate.

[0036] The moving component 200 includes a first moving mechanism 201 and a second moving mechanism 202. The second moving mechanism 202 is slidably connected to the first moving mechanism 201, and the spraying component 100 is slidably connected to the second moving mechanism 202. The first moving mechanism 201 can drive the second moving mechanism 202 to move along a first direction (x-axis shown in the figure) and drive the spraying component 100 to move synchronously. The second moving mechanism 202 can drive the spraying component 100 along a second direction (z-axis shown in the figure, the first direction is perpendicular to the second direction).

[0037] The first moving mechanism 201 refers to the linear drive mechanism in the moving assembly 200 that provides displacement in the first direction (x-axis shown in the figure). Its function is to drive the second moving mechanism 202 and the entire spray assembly 100 to move along the first direction, so as to adjust the lateral position of the spray assembly 100 relative to the cutting area. The second moving mechanism 202 refers to the secondary linear adjustment mechanism provided on the first moving mechanism 201. It is used to drive the spray assembly 100 to move further in the second direction (z-axis shown in the figure) so as to realize the longitudinal adjustment of the spray position.

[0038] The spray assembly 100 can be installed on the slide, mounting plate or connecting bracket of the second moving mechanism 202. The spray pipe 101 and multiple nozzles 102 move together with the connecting component. The liquid supply end of the spray assembly 100 is connected to an external coolant source to ensure continuous liquid supply during displacement.

[0039] Based on the above analysis, it can be seen that in the operation of the cutting coolant supply device provided in this application, after the cutting coolant enters the spray pipe 101 from the external coolant source, a relatively uniform pressure distribution is formed inside the spray pipe 101, and it is respectively delivered to a plurality of nozzles 102 arranged at intervals along the axial direction. Each nozzle 102 sprays the coolant towards the workpiece 300 through a fan-shaped nozzle, so that the coolant forms a spray band with a large coverage area in the cutting line direction, thereby enabling the contact area between the diamond wire and the workpiece 300 to continuously obtain cooling, lubrication and debris removal.

[0040] Meanwhile, the first moving mechanism 201 can drive the second moving mechanism 202 and the spraying assembly 100 to move along the first direction (x-axis shown in the figure) according to the change of the cutting position. The second moving mechanism 202 then drives the spraying assembly 100 to move along the second direction (z-axis shown in the figure), so that the spraying area corresponds to the actual cutting position of the workpiece 300 to be cut.

[0041] Because the nozzles 102 are spaced apart along the axial direction and have a fan-shaped nozzle, the spray coverage is no longer limited to a single point of concentrated spraying, but can form a large-area spray coverage along the cutting line. Furthermore, because the moving component 200 has adjustment capabilities in two mutually perpendicular directions, the spray component 100 can be positionally compensated according to the cutting conditions. Therefore, the position and range of the coolant can maintain a high degree of matching with the cutting area, avoiding localized coolant supply blind spots, localized debris accumulation, spray deviation, and heat accumulation during the cutting process. The temperature rise in the contact area during cutting can be more effectively controlled, and the lubrication and debris removal effects between the cutting line and the workpiece 300 are improved. This helps reduce the probability of silicon wafer microcracks, edge chipping, and yield fluctuations, and improves the adaptability of the entire machine under different cutting conditions.

[0042] In this embodiment, the cutting coolant supply device further includes a controller, which is electrically connected to the moving component 200. The controller is used to adjust the position of the spraying component 100 in real time according to the cutting process parameters.

[0043] The controller adjusts the position of the spraying component 100 in real time based on the cutting process parameters. This can be understood as the controller first collecting and analyzing the process parameters from the main control system of the cutting equipment, then generating a position correction amount according to the preset displacement compensation relationship, speed matching relationship or spray coverage model, and then converting the correction amount into the target displacement command of the first moving mechanism 201 and the second moving mechanism 202 to drive the spraying component 100 to move along the predetermined trajectory.

[0044] Since the spray assembly 100 needs to continuously cool and rinse the contact area between the diamond wire and the workpiece 300 during the cutting process, if the cutting process parameters change, the controller can adjust the position of the spray assembly 100 in a timely manner to improve the following and adaptability of the coolant spray position, so that the fan-shaped nozzles of multiple nozzles 102 always face the effective cutting area and maintain the relative relationship between the axis of the spray pipe 101 and the axis of the cutting line basically stable, thereby avoiding the coolant from deviating from the action area or insufficient coverage.

[0045] Specifically, the controller calculates the target position of the spraying assembly 100 in real time according to the cutting process parameters and outputs a position control signal to the moving assembly 200 so that the spraying assembly 100 is adjusted synchronously or alternately in the first direction (x-axis shown in the figure) and the second direction (z-axis shown in the figure) to maintain a suitable spraying distance, spraying angle and coverage between the nozzle 102 and the workpiece 300 to be cut.

[0046] The controller can consist of a single central controller or adopt a distributed control architecture. It can also achieve the same control function through hardware logic control circuits or software algorithms. The communication method can be wired industrial Ethernet, CAN (Controller Area Network) bus, RS485 (Recommended Standard 485) or wireless communication, as long as it can meet the real-time and reliability requirements of the cutting process.

[0047] In this embodiment of the application, the cutting process parameters include the cutting speed, the bow height of the cutting line, and the feed path of the workpiece 300 to be cut.

[0048] Cutting speed refers to the travel rate of the cutting line when it cuts the workpiece 300. As the cutting speed changes, the controller can promptly correct the relative position of the nozzle 102 in the first direction (x-axis shown in the figure) and the second direction (z-axis shown in the figure) to avoid the coolant coverage being delayed due to the increase in linear speed.

[0049] The two ends of the cutting wire are tensioned to provide constant tension. When the workpiece to be cut is fed at 300, it generates reverse cutting resistance on the cutting wire. The tension and cutting resistance work together to cause the cutting wire to bend and form an outward arch. This arch is called the wire bow. The vertical distance between the apex of the arch and the reference plane of the cutting kerf of the workpiece to be cut at 300 is the wire bow height.

[0050] As the height of the cutting wire changes, the controller can adjust the orientation or spray point of the nozzle 102 according to the change in the force deflection of the cutting wire, so that the coolant can continuously act on the contact area between the cutting wire and the workpiece 300 to be cut.

[0051] The feed path of the workpiece 300 to be cut refers to the complete motion route of the workpiece 300 relative to the cutting line according to the preset trajectory during the processing. As the feed path of the workpiece 300 to be cut changes, the controller further drives the first moving mechanism 201 and the second moving mechanism 202 to work together, so that the spray assembly 100 can move in a following manner in two mutually perpendicular directions, so that the multiple nozzles 102 arranged along the cutting line axis of the spray pipe 101 can cover the cutting area at different positions.

[0052] In this embodiment, the controller is used to adjust the position of the spraying assembly 100 when the height of the wire bow of the cutting line is a first height, so that the distance between the nozzle 102 and the workpiece 300 to be cut is a first distance; the controller is also used to adjust the position of the spraying assembly 100 when the height of the wire bow of the cutting line is a second height, so that the distance between the nozzle 102 and the workpiece 300 to be cut is a second distance; wherein, the first height is less than the second height, and the first distance is less than the second distance.

[0053] When the tool first enters the workpiece, the cut is shallow with low cutting resistance and a gentle bow with a small arc. When the tool reaches the middle to high position, after the cutting depth of 300 mm is more than halfway through, the cutting contact area becomes large, the resistance increases dramatically, and the bow arches significantly.

[0054] The first height corresponds to the working condition where the arc of the cutting line is relatively low. At this time, the controller controls the spraying component 100 to approach the workpiece 300 to be cut and maintain a small first gap. The sprayed cutting coolant lands exactly on the blade gap, and the liquid can completely rush into the cutting area.

[0055] The second height corresponds to the working condition where the arc of the cutting line is relatively high. At this time, the controller controls the spraying component 100 to move away from the workpiece 300 to be cut appropriately and maintain a large second distance, extending the spraying distance and causing the landing point of the cutting coolant parabola to shift backward, just catching up with the backward arching steel wire blade, ensuring a continuous and sufficient supply of coolant to the cutting area.

[0056] For example, when the blade is first inserted, the wire bow is relatively flat, and the distance between the nozzle 102 and the workpiece 300 to be cut can be 20mm to accurately deliver liquid to the cutting edge; when cutting to the middle or high position, the distance between the nozzle 102 and the workpiece 300 to be cut needs to be adjusted to 30mm.

[0057] The controller can obtain the real-time bow height of the cutting line based on the bow height sensor, displacement sensor or vision detection unit of the cutting line, and compare the detected value with a preset threshold. When the detected value falls into the first height range, it outputs a first position command, and when the detected value falls into the second height range, it outputs a second position command, so that the second moving mechanism 202 or the first moving mechanism 201 adjusts the spatial position of the spraying assembly 100 according to the corresponding displacement.

[0058] In this embodiment, the first moving mechanism 201 includes a first driving unit, a first slide rail, and a first slider. The first driving unit is electrically connected to the controller. The first slide rail extends along a first direction (x-axis shown in the figure). The first slider is slidably connected to the first slide rail. The first slider is also fixedly connected to the second moving mechanism. The first driving unit is used to drive the first slider to slide on the first slide rail. The second moving mechanism 202 includes a second driving unit, a second slide rail, and a second slider. The second driving unit is electrically connected to the controller. The second slide rail extends along a second direction (z-axis shown in the figure). The second slider is slidably connected to the second slide rail. The second slider is also fixedly connected to the spray assembly 100. The second driving unit is used to drive the second slider to slide on the second slide rail.

[0059] The first drive unit and the second drive unit respectively constitute the execution part of the two-stage orthogonal adjustment mechanism. The first drive unit is used to drive the second moving mechanism 202 and the injection assembly 100 to perform overall displacement along the first direction (x-axis shown in the figure). The second drive unit is used to further drive the injection assembly 100 to perform position correction along the second direction (z-axis shown in the figure) after positioning in the first direction.

[0060] The first slide rail is parallel to the first direction and fixed to the equipment frame or support base. A smooth sliding guide engagement is formed between the first slider and the first slide rail. The second moving mechanism 202 is fixed to the first slider via a mounting base, connecting plate, or transition bracket, thus moving synchronously with the first slider. Similarly, the second slide rail is parallel to the second direction and mounted on the support frame of the second moving mechanism 202. The second slider slides in a sliding engagement with the second slide rail. The spray assembly 100 is fixed to the second slider via clamping parts, bolt seats, or connecting flanges, enabling the spray assembly 100 to achieve graded adjustment in two mutually perpendicular directions.

[0061] The first drive unit and the second drive unit can be stepper motors, servo motors, electric push rods or linear motors, respectively, to meet the control requirements of the cutting coolant spray position at both the coarse and fine adjustment levels; the first slide rail and the second slide rail can be linear guide rails, V-shaped guide rails, dovetail guide rails or cross roller guide rails, respectively; the first slider and the second slider can be ball sliders, sliding blocks or slide base structures with lubricating bushings.

[0062] When the system starts, the controller outputs control signals based on cutting process parameters such as cutting speed, wire bow height, and feed path of the workpiece 300 to be cut. First, it drives the first drive unit to move, causing the first slider to move along the first slide rail, and driving the second moving mechanism 202 and the spraying assembly 100 fixedly connected to it to complete the overall positioning along the first direction (x-axis shown in the figure). Then, the second drive unit drives the second slider to make orthogonal adjustment along the second slide rail, so that the spraying assembly 100 is accurately aligned with the target spraying position in the cutting area.

[0063] The aforementioned hierarchical orthogonal adjustment structure can improve the adjustable range and positioning accuracy of the spray position, reduce coolant coverage deviation and local insufficient cooling, thereby improving the thermal management effect and chip removal ability of the cutting area, and reducing the probability of silicon wafer microcracks, edge breakage and processing fluctuations.

[0064] In this embodiment of the application, the moving component 200 further includes a third moving mechanism. The first moving mechanism 201 is slidably connected to the third moving mechanism. The third moving mechanism can drive the first moving mechanism 201 to move along a third direction (the y-axis shown in the figure, the first direction, the second direction and the third direction are perpendicular to each other) and drive the second moving mechanism 202 and the spraying component 100 to move synchronously.

[0065] The third moving mechanism is a higher-level motion mechanism used to support the first moving mechanism 201 and to move the first moving mechanism 201, the second moving mechanism 202 and the spraying assembly 100 as a whole along a third direction (y-axis shown in the figure). It is used to expand the spatial adjustment range of the device while maintaining the stability of the spraying assembly 100's posture, so that the spraying assembly 100 can adapt to different height changes or front-back position changes in three-dimensional space.

[0066] The third moving mechanism and the first moving mechanism 201 are in a sliding fit relationship. The first moving mechanism 201 is installed on the guide structure of the third moving mechanism and moves linearly back and forth along the third direction (y-axis shown in the figure) under the drive of the third moving mechanism. At the same time, since the second moving mechanism 202 is set on the first moving mechanism 201 and the spraying component 100 is slidably connected to the second moving mechanism 202, the third moving mechanism can drive the first moving mechanism 201, the second moving mechanism 202 and the spraying component 100 to move synchronously as a whole when the third moving mechanism is in motion. Thus, after the coarse adjustment is completed, the first moving mechanism 201 and the second moving mechanism 202 can perform fine adjustment.

[0067] Because the third moving mechanism provides coarse positioning capability in the third dimension, the spray assembly 100 can adjust more promptly to follow the spatial position changes of the workpiece 300 to be cut, reducing the deviation of the spray area from the cutting point, and enabling the cutting coolant to form a more continuous and stable coverage near the cutting line.

[0068] refer to Figure 1 In this embodiment of the application, the water mist areas 103 sprayed by adjacent nozzles 102 partially overlap.

[0069] The overlap of the water mist zone 103 means that when two adjacent nozzles 102 on the spray pipe 101 spray cutting coolant, the atomized coverage areas formed by them overlap in space, so that the spray edges of the adjacent nozzles 102 connect with each other and form a continuous coverage.

[0070] To avoid spray blind spots caused by the gap between adjacent nozzles 102, the cutting coolant can form a more continuous spray band near the cutting line, thereby enhancing the heat dissipation, lubrication and debris flushing capabilities of the contact area between the diamond wire and the workpiece 300, and reducing the probability of local overheating and silicon powder accumulation.

[0071] Partial overlap can also be achieved by adjusting the nozzle angle, nozzle diameter, liquid supply pressure, or nozzle orientation, rather than relying solely on adjusting the distance between nozzles.

[0072] In this embodiment of the application, each nozzle 102 is respectively equipped with a solenoid valve, which can adjust the spray flow rate and spray angle of the corresponding nozzle 102.

[0073] The solenoid valve is an electrically controlled valve used to control the on / off state and regulate the flow of the liquid supply passage of the nozzle 102. Its function is to change the liquid supply state of the corresponding nozzle 102 according to the control signal, thereby independently controlling the spray flow rate, spray intensity and spray angle of a single nozzle 102 to meet the cooling requirements of different positions during the cutting process.

[0074] Each nozzle 102 is equipped with a corresponding solenoid valve, which is electrically connected to the controller via a wire, so that the controller can output opening / closing signals or proportional control signals to each solenoid valve.

[0075] Since the working areas corresponding to each nozzle 102 may have positional shifts, heat load differences, and chip distribution differences during the cutting process, by configuring a solenoid valve for each nozzle 102 individually, the liquid supply of different nozzles 102 can be adjusted in zones, so that the spray coverage relationship between adjacent nozzles 102 remains continuous. At the same time, the spray angle of a specific nozzle 102 can be finely adjusted according to the local cutting state, so that the cutting coolant can act more accurately on the contact area between the diamond wire and the workpiece 300 to be cut.

[0076] The controller sends control commands to the solenoid valves corresponding to each nozzle 102, causing some nozzles 102 to replenish the cutting coolant to the cutting area with a larger flow rate and a wider spray angle, while other nozzles 102 provide auxiliary coverage with a smaller flow rate or a narrower spray angle. As the spray assembly 100 changes position under the action of the first moving mechanism 201 and the second moving mechanism 202, the solenoid valves can also synchronously correct the spray state of each nozzle, so that the cutting coolant always forms a continuous, uniform and adjustable fan-shaped spray band near the cutting line.

[0077] In this embodiment of the application, the cutting coolant supply device further includes a delivery hose 400; one end of the delivery hose 400 is configured to communicate with the cutting coolant storage tank, and the other end of the delivery hose 400 is connected to the spray pipe 101.

[0078] The delivery hose 400 is a flexible fluid delivery pipeline used to connect the cutting coolant storage tank and the spray pipe 101. Its function is to stably deliver the cutting coolant stored in the cutting coolant storage tank to the spray pipe 101, and to provide flexible compensation when the spray assembly 100 is adjusted in position with the moving assembly 200, so as to ensure the continuity of fluid supply.

[0079] When the system is started, the cutting coolant in the cutting coolant storage tank enters the delivery hose 400 under pump pressure or gravity, and is continuously delivered to the spray pipe 101 via the delivery hose 400. The spray pipe 101 then distributes the coolant to each nozzle 102 and sprays it onto the cutting area.

[0080] Because the delivery hose 400 is a flexible pipe, it can bend, extend, or partially retract synchronously with the spray assembly 100 as it adjusts its position in conjunction with the first moving mechanism 201 and the second moving mechanism 202. This compensates for the length difference in the liquid supply path caused by the positional change of the spray assembly 100, preventing the movement stroke from being limited due to excessive pipe rigidity, or leakage or detachment due to excessive force at the connection. At the same time, the delivery hose 400 maintains a continuous connection between the cutting coolant storage tank and the spray pipe 101, ensuring that the cutting coolant can still stably enter the spray pipe 101 when the cutting speed changes, the bow height of the cutting line changes, and the feed path of the workpiece changes, thus ensuring the reliability of the liquid supply during the positional adjustment process of the spray assembly 100.

[0081] The 400 delivery hose can achieve a sealed connection through connectors, clamps, quick-connect fittings or threaded fittings, thereby forming a closed or semi-closed fluid delivery circuit to prevent leakage of cutting coolant.

[0082] The delivery hose 400 can be any of the following: rubber hose, polyurethane hose, reinforced braided hose, or corrugated hose.

[0083] In this embodiment, multiple nozzles 102 are arranged at equal intervals along the axial direction of the spray pipe 101.

[0084] Each nozzle 102 is arranged at equal intervals along the length of the spray pipe 101, so that the cutting coolant covers the surface of the workpiece 300 more evenly, reducing the situation where the coverage gap between adjacent nozzles 102 is too large or the local spraying is too concentrated.

[0085] In summary, this application provides a cutting coolant supply device including a spray assembly 100 and a moving assembly 200. The spray assembly 100 includes a spray pipe 101 and a plurality of nozzles 102 disposed on the spray pipe 101. The plurality of nozzles 102 are spaced apart along the axial direction of the spray pipe 101 and communicate with the spray pipe 101. The axial direction of the spray pipe 101 is configured to be parallel to the axial direction of the cutting line. The nozzles of the plurality of nozzles 102 are fan-shaped and configured to face the workpiece 300 to cut the workpiece 300 disposed within the spray pipe 101. Coolant is sprayed onto the cutting area; the moving component 200 includes a first moving mechanism 201 and a second moving mechanism 202, the second moving mechanism 202 is slidably connected to the first moving mechanism 201, and the spraying component 100 is slidably connected to the second moving mechanism 202. The first moving mechanism 201 can drive the second moving mechanism 202 to move along a first direction and drive the spraying component 100 to move synchronously. The second moving mechanism 202 can drive the spraying component 100 to move along a second direction; wherein, the first direction is perpendicular to the second direction.

[0086] The cutting coolant supply device provided in this application provides a method where the cutting coolant enters the spray pipe 101 from an external coolant source, forming a relatively uniform pressure distribution inside the spray pipe 101, and is then delivered to multiple nozzles 102 spaced apart along the axial direction. Each nozzle 102 sprays the coolant outwards towards the workpiece 300 through a fan-shaped nozzle, creating a spray band with a large coverage area along the cutting line. This ensures that the contact area between the diamond wire and the workpiece 300 is continuously cooled, lubricated, and has debris removed. Simultaneously, the first moving mechanism 201 can drive the second moving mechanism 202 and the spray assembly 100 to move along the first direction (x-axis shown in the figure) according to changes in the cutting position. The second moving mechanism 202 then drives the spray assembly 100 to move along the second direction (z-axis shown in the figure), ensuring that the spray area corresponds to the actual cutting position of the workpiece 300.

[0087] Because the nozzles 102 are spaced apart along the axial direction and have a fan-shaped nozzle, the spray coverage is no longer limited to a single point of concentrated spraying, but can form a large-area spray coverage along the cutting line. Furthermore, because the moving component 200 has adjustment capabilities in two mutually perpendicular directions, the spray component 100 can be positionally compensated according to the cutting conditions. Therefore, the position and range of the coolant can maintain a high degree of matching with the cutting area, avoiding localized coolant supply blind spots, localized debris accumulation, spray deviation, and heat accumulation during the cutting process. The temperature rise in the contact area during cutting can be more effectively controlled, and the lubrication and debris removal effects between the cutting line and the workpiece 300 are improved. This helps reduce the probability of silicon wafer microcracks, edge chipping, and yield fluctuations, and improves the adaptability of the entire machine under different cutting conditions.

[0088] Finally, it should be noted that other embodiments of this application will readily conceive of by those skilled in the art upon consideration of the specification and practice of the application disclosed herein. This application is intended to cover any variations, uses, or adaptations of this application that follow the general principles of this application and include common knowledge or customary techniques in the art not disclosed herein, and is not limited to the precise structures described above and shown in the accompanying drawings, and various modifications and alterations may be made without departing from its scope. The scope of this application is limited only by the appended claims.

Claims

1. A cutting coolant supply device, characterized in that, include: The spraying assembly includes a spray pipe and a plurality of nozzles disposed on the spray pipe. The plurality of nozzles are spaced apart along the axial direction of the spray pipe, the axial direction of the spray pipe is configured to be parallel to the axial direction of the cutting line, and the nozzles of the plurality of nozzles are fan-shaped and configured to face the workpiece to be cut, so as to spray the cutting coolant disposed in the spray pipe onto the cutting area. A moving component, comprising a first moving mechanism and a second moving mechanism, wherein the second moving mechanism is slidably connected to the first moving mechanism, and the spraying component is slidably connected to the second moving mechanism; wherein the first moving mechanism can drive the second moving mechanism to move along a first direction and drive the spraying component to move synchronously, and the second moving mechanism can drive the spraying component to move along a second direction; Wherein, the first direction is perpendicular to the second direction.

2. The cutting coolant supply device according to claim 1, characterized in that, The cutting coolant supply device also includes a controller; The controller is electrically connected to the moving component, and the controller is used to adjust the position of the jetting component in real time according to the cutting process parameters.

3. The cutting coolant supply device according to claim 2, characterized in that, The cutting process parameters include the cutting speed, the bow height of the cutting line, and the feed path of the workpiece to be cut.

4. The cutting coolant supply device according to claim 3, characterized in that, The controller is used to adjust the position of the spraying assembly when the bow height of the cutting line is a first height, so that the distance between the nozzle and the workpiece to be cut is a first distance; the controller is also used to adjust the position of the spraying assembly when the bow height of the cutting line is a second height, so that the distance between the nozzle and the workpiece to be cut is a second distance. Wherein, the first height is less than the second height, and the first spacing is less than the second spacing.

5. The cutting coolant supply device according to claim 2, characterized in that, The first moving mechanism includes a first driving unit, a first slide rail, and a first slider. The first driving unit is electrically connected to the controller. The first slide rail extends along the first direction. The first slider is slidably connected to the first slide rail. The first slider is also fixedly connected to the second moving mechanism. The first driving unit is used to drive the first slider to slide on the first slide rail. The second moving mechanism includes a second driving unit, a second slide rail, and a second slider. The second driving unit is electrically connected to the controller. The second slide rail extends along the second direction. The second slider is slidably connected to the second slide rail. The second slider is also fixedly connected to the spraying assembly. The second driving unit is used to drive the second slider to slide on the second slide rail.

6. The cutting coolant supply device according to claim 1, characterized in that, The water mist areas sprayed from adjacent nozzles partially overlap.

7. The cutting coolant supply device according to claim 1, characterized in that, Each of the nozzles is equipped with a corresponding solenoid valve, which can adjust the spray flow rate and spray angle of the corresponding nozzle.

8. The cutting coolant supply device according to claim 1, characterized in that, The cutting coolant supply device also includes a delivery hose; One end of the delivery hose is configured to communicate with the cutting coolant storage tank, and the other end of the delivery hose is connected to the spray pipe.

9. The cutting coolant supply device according to claim 1, characterized in that, The moving component further includes a third moving mechanism, and the first moving mechanism is slidably connected to the third moving mechanism. The third moving mechanism can drive the first moving mechanism to move along a third direction and drive the second moving mechanism and the spraying component to move synchronously. Wherein, the first direction, the second direction, and the third direction are perpendicular to each other.

10. The cutting coolant supply device according to claim 1, characterized in that, The multiple nozzles are arranged at equal intervals along the axial direction of the spray pipe.

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