Liquid delivery apparatus for integrated circuit production

Abstract

The application relates to a liquid conveying device for integrated circuit production and relates to the technical field of integrated circuit production auxiliary devices, which comprises a cabinet shell, the lower half of the inner side of the cabinet shell is fixedly connected with a support frame, the support frame is mainly a rectangular metal frame fixedly connected by multiple metal profiles, the structural strength of the inner side of the cabinet shell is reinforced through the support frame, and the other side of the cabinet shell is also movably connected with a cabinet door; the inner side of the support frame is provided with at least two liquid source bottles, and the side of the support frame is also movably connected with a turnover liquid bottle support corresponding to the liquid source bottles; the liquid source bottles can be taken out from the inner side of the cabinet shell through the turnover liquid bottle support, so that the working space during dismounting of the liquid source bottles is increased, the liquid source bottles are rotated out from the inner side of the cabinet shell, manual dismounting of the liquid source bottles is facilitated, and workers are also facilitated to use dismounting tools to replace the liquid source bottles.

Description

Technical Field

[0001] This invention relates to the field of integrated circuit manufacturing auxiliary equipment technology, and more specifically to a liquid conveying device for integrated circuit production. Background Technology

[0002] The fully automatic source bottle gas holder is the core liquid supply unit of the liquid delivery equipment for integrated circuit production. It is often used in conjunction with wet process fluid delivery systems such as coating, developing, and etching. This equipment is a closed intelligent supply device designed specifically for high-purity chemical reagents. It is mainly used to store high-purity solutions such as photoresist, developer, and etchant. It is widely used in cleanrooms for semiconductor wafer manufacturing. The equipment can realize fully automatic pressure-stabilized delivery of chemical solutions and automatic switching of source bottles, ensuring uninterrupted and contamination-free supply of process solutions. Currently, fully automatic source cylinder gas holders on the market mainly consist of a cabinet protection module, a source cylinder load detection module, a high-purity fluid pipeline module, a pneumatic control module, and a safety monitoring and interlocking module. Their working principle is as follows: a sealed negative pressure cabinet is used for leak prevention; pressure and weighing sensors monitor the remaining volume of the source cylinder in real time; high-purity, corrosion-resistant pipelines and pneumatic valve groups, in conjunction with a PLC control system, complete nitrogen purging and vacuum leak detection; when the main source cylinder is low on volume, the equipment automatically switches to a backup source cylinder, maintaining stable control of liquid pressure and flow throughout the process, reducing the probability of bubble and impurity generation, and meeting the high-precision, high-cleanliness liquid delivery production requirements of integrated circuit manufacturing processes.

[0003] When any of the source cylinders experiences insufficient pressure, the equipment can automatically switch to the backup source cylinder using the PLC control system and shut down the main source cylinder. Afterwards, personnel need to open the cabinet door to replace the main source cylinder. Before replacement, workers need to disassemble the valve connections above the source cylinder. However, the internal space of the cabinet is relatively narrow, and the gaps between components are also small, making disassembly difficult. Furthermore, the limited space above the source cylinder makes it difficult to lift it, resulting in strenuous manual disassembly. Using disassembly tools also lacks sufficient space, leading to a lengthy disassembly process and high labor costs. Summary of the Invention

[0004] Technical problems to be solved The purpose of this invention is to overcome the shortcomings of the prior art, adapt to practical needs, and provide a liquid conveying device for integrated circuit production to solve the above-mentioned technical problems.

[0005] Technical solution To achieve the objectives of this invention, the technical solution adopted is as follows: A liquid conveying device for integrated circuit production includes a cabinet shell. A support frame is fixedly connected to the lower half of the inner side of the cabinet shell. The support frame is mainly a rectangular metal frame fixedly connected by multiple metal profiles. The support frame strengthens the structural strength of the inner side of the cabinet shell. A cabinet door is also movably connected to the other side of the cabinet shell. The inner side of the support frame is provided with at least two liquid source bottles, and the side of the support frame is also movably connected with a flip-type liquid bottle bracket corresponding to the liquid source bottle. The liquid source bottle is installed on the flip-type liquid bottle bracket, and the liquid source bottle can be removed from the inside of the cabinet shell through the flip-type liquid bottle bracket, thereby increasing the working space for disassembling the liquid source bottle, while the liquid source bottle is placed inside the flip-type liquid bottle bracket.

[0006] As a further technical solution of the present invention, the liquid source bottle is placed above the source bottle lifting seat, and the side of the liquid source bottle is fixedly connected with a positioning strap by a strap connecting ring, while the top of the liquid source bottle is also fixedly connected with a ring handle. The bottle connector includes a connecting tube that is fixedly connected to and communicates with its inner side. A locking flange is integrally provided on the outer side of the connecting tube. A sealing extension tube is integrally provided at the top of the connecting tube, and multiple rubber sealing rings are provided on the outer side of the sealing extension tube to fit therewith. The valve mounting head includes a valve mounting tube that is sleeved on the outside of the sealing extension tube. The bottom of the valve mounting tube is integrally provided with a fixing flange corresponding to the locking flange, and both the locking flange and the fixing flange are inserted into the inside of the locking groove.

[0007] As a further technical solution of the present invention, a highly elastic sealing ring is provided between the locking flange and the fixing flange, which can ensure the sealing effect between the locking flange and the fixing flange.

[0008] As a further technical solution of the present invention, the inner side of the cabinet shell is also provided with several valves, which are connected by pipelines. The end of the pipeline is also provided with a solenoid valve corresponding to the valve mounting head, and the solenoid valve is fixedly connected to the valve mounting pipe. The inner side of the cabinet shell is also provided with a PLC control system, which can control the valves and solenoid valves in the cabinet shell to be energized.

[0009] As a further technical solution of the present invention, the flip-type liquid bottle bracket includes an L-shaped mounting crossbeam and a mounting upright, which are fixedly connected. The mounting crossbeam is located at the bottom inner side of the support frame, while the mounting upright is attached to the side of the support frame. At the corners of the mounting crossbeam and the mounting upright, a shaft sleeve is integrally provided, which rotates with the support frame via a pin. Due to the L-shaped overall arrangement of the flip-type liquid bottle bracket, and with the shaft sleeve at the corner, the liquid source bottle can be flipped out of the cabinet shell. Compared with the traditional method of opening the cabinet door for disassembly, the flip-type liquid bottle bracket is completely flat on the side of the cabinet shell after being flipped, so that there is no obstruction to disassembly around the liquid source bottle. This not only facilitates manual disassembly but also provides sufficient space for disassembly tools.

[0010] As a further technical solution of the present invention, a source bottle lifting seat for placing liquid source bottles is provided above the mounting crossbeam. A conical protrusion for positioning the source bottle lifting seat is integrally provided above the source bottle lifting seat. The bottom of the liquid source bottle is quickly positioned by using the conical protrusion. A limiting sleeve corresponding to the limiting column is also fixedly connected to the bottom of the source bottle lifting seat. Moreover, double pin shaft connecting seats are fixedly connected to both ends of the bottom of the source bottle lifting seat.

[0011] As a further technical solution of the present invention, two symmetrically arranged swing support rods are movably connected to the lower side of any side of the source bottle lifting seat through a double pin connecting seat. Furthermore, an internally threaded slider is movably connected to the other end of each swing support rod. A compound threaded rod is symmetrically and movably connected to the inner side of the mounting frame, and the internally threaded slider is threadedly engaged with both ends of the compound threaded rod. A limit column is fixedly connected in a rectangular array at the upper middle position of the mounting frame, and the limit column and the limit sleeve are inserted into each other. Through the insertion and engagement between the limit column and the limit sleeve, the source bottle lifting seat is limited, so that the source bottle lifting seat can only move vertically.

[0012] As a further technical solution of the present invention, a main drive threaded rod parallel to the mounting frame is also vertically provided between the mounting frame and the source bottle lifting seat. At the same time, a liftable positioning frame that fits against the side of the liquid source bottle is movably connected to the side of the mounting frame through the main drive threaded rod. The liftable positioning frame includes a grooved lifting seat. One side of the grooved lifting seat is in contact with the liquid source bottle, and the other side is threadedly engaged with the main drive threaded rod through an internal threaded sleeve embedded in the inner side of the grooved lifting seat. Both ends of the grooved lifting seat are fixedly connected to guide slides. The side of the mounting frame is also fixedly connected to a limiting guide rail corresponding to the guide slide, and the limiting guide rail and the guide slide slide in a sliding engagement.

[0013] As a further technical solution of the present invention, the ends of the two compound threaded rods are also provided with a transmission crossbar that is movably connected to the mounting crossbar. The transmission crossbar is perpendicular to the two compound threaded rods, and the main drive threaded rod is perpendicular to the transmission crossbar. Furthermore, bevel gears are installed at the connection positions of the transmission crossbar and the compound threaded rods, and at the connection positions of the transmission crossbar and the main drive threaded rod.

[0014] As a further technical solution of the present invention, multiple bevel gears are provided, which are respectively installed at the end of the handwheel rotating rod, both ends of the main drive threaded rod, the middle position of the transmission crossbar, and both ends of the compound threaded rod. When the handwheel rotating rod is rotated with a wrench, the handwheel rotating rod drives the main drive threaded rod to rotate through the bevel gears. The bevel gear at the other end of the main drive threaded rod is engaged with the bevel gear at the middle position of the transmission crossbar, thus transmitting power to the transmission crossbar, thereby driving the transmission crossbar to rotate. The transmission crossbar then drives the compound threaded rod to rotate through the bevel gears at both ends.

[0015] As a further technical solution of the present invention, a handwheel rotating rod is movably connected to the inner side of the mounting frame. Both ends of the handwheel rotating rod extend to both sides of the mounting frame. The handwheel rotating rod is located at the top of the main drive threaded rod. A bevel gear is also installed at the connection between the handwheel rotating rod and the main drive threaded rod, and the handwheel rotating rod and the main drive threaded rod are driven and engaged through the bevel gear.

[0016] As a further technical solution of the present invention, both ends of the groove lifting seat are fixedly connected to a lifting locking plate near the side of the mounting frame, and the top of the mounting frame is also fixedly connected to a side baffle and an L-shaped baffle corresponding to the lifting locking plate. Each set of side baffles and L-shaped baffles is located on both sides of the lifting locking plate at the corresponding position. The side of the lifting locking plate is also provided with a transmission crossbar, and the side of the L-shaped baffle is also integrally provided with a sliding protrusion inserted into the inner side of the transmission crossbar.

[0017] As a further technical solution of the present invention, the two ends of the groove lifting seat are also provided with strap connecting rings, and the side of the lifting locking plate near the liquid source bottle is also equipped with a spring-loaded one-way lifting frame, and a horizontal translation locking frame is provided above the spring-loaded one-way lifting frame, and the translation locking frame is installed on the inner side of the support frame through a limit side bracket that is movably connected to the side.

[0018] As a further technical solution of the present invention, the translation locking frame includes Z-shaped staggered locking claws. One end of the translation locking frame is attached to the limiting side bracket, and the other end extends to the space between the bottle body connector and the valve mounting head located above the liquid source bottle. The other end is also provided with a U-shaped groove for placing the bottle body connector and the valve mounting head, and the inner side of the U-shaped groove is also provided with a locking groove that engages with the bottle body connector and the valve mounting head.

[0019] As a further technical solution of the present invention, the Z-shaped staggered locking claw is provided with a horizontally arranged rectangular sliding groove at one end near the limiting side bracket, and the limiting side bracket includes a vertical mounting plate fixedly connected to the inner side of the support frame. The top of the vertical mounting plate is integrally provided with a rectangular mounting protrusion that penetrates the locking groove, and the rectangular mounting protrusion slides in cooperation with the locking groove. A compression spring is placed at the end of the locking groove away from the liquid source bottle, and the other end of the compression spring is in contact with the side of the rectangular mounting protrusion.

[0020] As a further technical solution of the present invention, the vertical mounting plate is provided with a guide baffle with inclined ends on the side near the spring-loaded one-way lifting frame, and the other end of the rectangular mounting protrusion is fixedly connected with a detachable block inserted into the inner side of the rectangular mounting protrusion, and the detachable block is located on the side of the staggered locking claws away from the vertical mounting plate.

[0021] As a further technical solution of the present invention, the side end of the interlaced locking claw near the vertical mounting plate is also inclinedly provided with an inclined surface corresponding to the top of the spring-loaded one-way lifting frame; wherein, the spring-loaded one-way lifting frame includes an inclined top rod provided below the end of the interlaced locking claw, the top of the inclined top rod is also provided with an inclined surface corresponding to the inclined surface of the end of the interlaced locking claw, and a rectangular sleeve is sleeved below the inclined top rod, and a bottom top rod is movably connected to the bottom of the inclined top rod through the rectangular sleeve, and the other end of the bottom top rod is integrally provided with a right-angle mounting frame fixedly connected to the lifting locking plate.

[0022] As a further technical solution of the present invention, a rotating connecting plate located inside the rectangular sleeve is provided between the bottom top rod and the inclined top rod. A central pin is fixedly connected to the inner side of the rectangular sleeve, and the rotating connecting plate is movably connected to the inner side of the rectangular sleeve through the central pin. A torsion spring coaxially arranged with the central pin is also sleeved on the side of the rotating connecting plate. One end of the torsion spring is engaged with the inner side of the rectangular sleeve, and the other end is engaged with the side of the rotating connecting plate.

[0023] As a further technical solution of the present invention, a reset rod is also inserted and fitted on the side of the rectangular sleeve near the guide baffle. The reset rod is located above the bottom rod and below the central pin. The top of the bottom rod is provided with a positioning groove, and the bottom of the inclined rod is provided with an arc-shaped surface. The top of the rotating connecting plate fits against the arc-shaped surface at the bottom of the inclined rod, and the bottom of the rotating connecting plate is placed inside the positioning groove. The top of the lifting locking plate is engaged with the inner top of the support frame, preventing the flip-type liquid bottle holder from flipping outward. Only when the top of the lifting locking plate moves to a position lower than the top of the mounting frame can the flip-type liquid bottle holder flip outward to replace the liquid source bottle placed inside the flip-type liquid bottle holder.

[0024] Beneficial effects: A. In this invention, the door opening wrench is attached to the end of the handwheel rotating rod. Since the shape of the end of the handwheel rotating rod corresponds to the shape of the end of the door opening wrench, the handwheel rotating rod can be rotated using the door opening wrench. Because the other end of the handwheel rotating rod and the end of the main drive threaded rod are respectively provided with bevel gears, the meshing between the two bevel gears causes the handwheel rotating rod to drive the main drive threaded rod to rotate. The other end of the main drive threaded rod also drives the transmission crossbar to rotate via bevel gears. After the power is transmitted through the transmission crossbar, it is finally transmitted to the compound threaded rods through the bevel gears at both ends of the transmission crossbar, thereby causing the compound threaded rods located on both sides of the mounting frame to rotate synchronously. At this time, the internal threaded sliders at both ends of the compound threaded rod, which are threaded together with it, move to both sides respectively. The bottom of the swing support rod movably connected to the internal threaded slider separates from both ends of the compound threaded rod. This causes the source bottle lifting seat, which is movably connected to the other end of the swing support rod, to move downward. This causes the liquid source bottle placed on the source bottle lifting seat to automatically separate from the valve above it. Then, it rotates around the axis of the shaft sleeve set at the connection between the mounting frame and the mounting cross frame, rotating the liquid source bottle out from the inside of the cabinet shell. This increases the disassembly space when disassembling the liquid source bottle, which not only facilitates manual disassembly of the liquid source bottle, but also makes it easier for workers to use disassembly tools to replace the liquid source bottle, shortening the replacement time. B. In this invention, when the main drive threaded rod rotates, the grooved lifting seat slides downward on the side of the mounting frame because the main drive threaded rod is threadedly engaged with the internal threaded sleeve at the end of the grooved lifting seat. The grooved lifting seat is also provided with symmetrically distributed guide slides on the side of the mounting frame, which are slidably engaged with the limit guide rails corresponding to the side of the mounting frame, making the grooved lifting seat more stable when it rises and falls. In addition, the grooved lifting seat will also drive the lifting locking plates arranged at both ends to move up and down synchronously. When the lifting locking plates move upward, the ends of the lifting locking plates can move to the inner side of the top of the support frame, so that the lifting locking plates are staggered with the crossbeams arranged above the mounting frame, which has a locking effect on the mounting frame, preventing the mounting frame from flipping outward, thereby improving the safety during use. C. In this invention, when the lifting locking plate moves up and down, the spring-loaded one-way lifting frame fixed to the side of the lifting locking plate will move synchronously with it. When rising, the bottom push rod will push the rotating connecting plate upward. The bottom push rod applies an upward thrust to the rotating connecting plate, and at the same time, with the weight of the inclined push rod, the bottom of the rotating connecting plate is tightly attached to the positioning groove at the top of the bottom push rod. Then, the rotating connecting plate pushes the inclined push rod upward, and the inclined surface at the top of the inclined push rod pushes the translation locking frame to move horizontally. When the lifting locking plate moves downward, the bottom push rod will lose its lifting pressure on the rotating connecting plate at the moment of descent. At this point, the torsion spring, through its own elasticity, is sufficient to overcome the friction between the bottom of the rotating connecting plate and the positioning groove, thereby pushing the rotating connecting plate to deflect around the central pin. After deflection, a large gap will appear between the rotating connecting plate and the inclined top rod. Subsequently, the inclined top rod moves downward rapidly under its own weight, causing the top of the inclined top rod to fall rapidly from the top of the translation locking frame, causing the translation locking frame to quickly and automatically reset. This allows the translation locking frame to quickly separate from the connection between the bottle body connector and the valve mounting head, thereby preventing the translation locking frame from affecting the normal separation of the bottle body connector and the valve mounting head. D. In this invention, after the liquid source bottle is replaced, the flip-type liquid bottle bracket needs to be flipped back to the inside of the cabinet shell. At this time, the lifting locking plate is located below the crossbeam at the top of the support frame, and the spring-loaded one-way lifting frame fixed on the side of the lifting locking plate is located on the side of the guide baffle. Moreover, the rectangular sleeve in the spring-loaded one-way lifting frame is aligned with the guide baffle, and the reset rod installed on the side of the rectangular sleeve is blocked by the guide baffle, so that the reset rod slides relative to the inside of the rectangular sleeve. Since the reset rod is located at the deflection position of the rotating connecting plate, the reset rod can push the rotating connecting plate to reset. As the lifting locking plate drives the spring-loaded one-way lifting frame to move upward, the reset rod gradually moves to the top of the guide baffle, without affecting the normal deflection of the rotating connecting plate. E. In this invention, the translational locking frame is supported by a limiting side bracket. Because the Z-shaped staggered locking claw has a horizontally arranged rectangular sliding groove, and the sliding engagement between the rectangular mounting protrusion and the rectangular sliding groove allows the Z-shaped staggered locking claw to move laterally only on the side of the vertical mounting plate. When the inclined top rod moves upward, the inclined surface at the top of the inclined top rod engages with the corresponding inclined surface at the end of the Z-shaped staggered locking claw, thereby pushing the Z-shaped staggered locking claw to move laterally. Since a buffer rubber pad is also provided between the locking flange and the fixing flange, as the liquid source bottle moves upward, the buffer rubber pad is squeezed until the U-shaped groove at the end of the Z-shaped staggered locking claw is fitted onto the connection between the bottle connector and the valve mounting head. The locking flange and the fixing flange are then inserted into the inner side of the locking slot, thus automatically locking the connection. This eliminates the need for manual connection of the pipeline and further improves the speed of changing the liquid source bottle. Attached Figure Description

[0025] Figure 1 This is a three-dimensional structural diagram of the present invention; Figure 2 In this invention Figure 1 Another perspective view; Figure 3 In this invention Figure 2 A schematic diagram of the split structure; Figure 4 In this invention Figure 3 The main view; Figure 5 In this invention Figure 3 Partial structural diagram; Figure 6 In this invention Figure 5 The main view; Figure 7 This is a schematic diagram showing the position and structure of the flip-type liquid bottle support and the liftable positioning frame in this invention; Figure 8 In this invention Figure 7 Another perspective view; Figure 9 In this invention Figure 8 A magnified view of a portion of the image; Figure 10 This is a schematic diagram of the disassembled structure of the flip-type liquid bottle holder in this invention; Figure 11 In this invention Figure 10 A schematic diagram of the bottom structure; Figure 12 In this invention Figure 11 A magnified view of a portion of the image; Figure 13 This is a three-dimensional structural diagram of the liftable positioning frame in this invention; Figure 14 In this invention Figure 13 Another perspective view; Figure 15 This is a three-dimensional structural diagram of the bouncing unidirectional lifting frame in this invention; Figure 16 In this invention Figure 15 A schematic diagram of the split structure; Figure 17 In this invention Figure 16 A partial sectional view; Figure 18 In this invention Figure 17 A magnified view of a portion of the image; Figure 19 This is a schematic diagram of the cooperative structure of the translation locking frame and the limiting side bracket in this invention; Figure 20 In this invention Figure 19A magnified view of a portion of the image; Figure 21 In this invention Figure 19 Another perspective view; Figure 22 In this invention Figure 21 A magnified view of a portion of the image; Figure 23 This is a three-dimensional structural diagram of the limiting side bracket in this invention; Figure 24 This is a three-dimensional structural diagram of the liquid source bottle in this invention; Figure 25 In this invention Figure 24 A magnified view of a portion of the image; Figure 26 This is a front view of the translation locking frame in this invention.

[0026] In the diagram: 1-Cabinet shell, 2-Cabinet door, 3-Flip-type liquid bottle bracket, 31-Mounting stand, 311-Handwheel rotation rod, 312-Side baffle, 313-L-shaped baffle, 314-Sliding protrusion, 32-Mounting crossbar, 321-Limiting column, 33-Main drive threaded rod, 34-Double threaded rod, 35-Swing support rod, 36-Source bottle lifting seat, 361-Double pin shaft connecting seat, 362-Limiting sleeve, 37-Bevel gear, 38-Limiting guide rail, 39-Transmission crossbar, 4-Support frame, 5-Liftable positioning frame, 51-Groove lifting seat, 52-Lifting locking plate, 53-Binding strap connecting ring, 54-Internal threaded sleeve, 55-Guide slide, 56-Internal concave limiting groove, 6-Liquid source bottle, 61-Ring handle, 6 2-Bottle body connector, 621-Connecting tube, 622-Locking flange, 623-Sealing extension tube, 624-Rubber sealing ring, 63-Valve mounting head, 631-Valve mounting tube, 632-Fixing flange, 7-Transfer locking bracket, 71-Z-type staggered locking claw, 72-Rectangular slide groove, 73-U-shaped groove, 74-Locking slot, 75-Compression spring, 8-Bounce type one-way lifting bracket, 81-Bottom top rod, 82-Right angle mounting bracket, 83-Rectangular sleeve, 84-Center pin rod, 85-Reset top rod, 86-Angled top rod, 87-Rotating connecting plate, 88-Torsion spring, 89-Positioning groove, 9-Limiting side bracket, 91-Vertical mounting plate, 92-Guide baffle, 93-Rectangular mounting protrusion, 94-Removable stop block. Detailed Implementation

[0027] Please see Figure 1-6 , Figure 24-25A liquid conveying device for integrated circuit production includes a cabinet shell 1. A support frame 4 is fixedly connected to the lower half of the inner side of the cabinet shell 1. The support frame 4 is mainly a rectangular metal frame fixedly connected by multiple metal profiles. The support frame 4 strengthens the structural strength of the inner side of the cabinet shell 1. A cabinet door 2 is also movably connected to the other side of the cabinet shell 1. The inner side of the support frame 4 is provided with at least two liquid source bottles 6, and the side of the support frame 4 is also movably connected with a flip-type liquid bottle bracket 3 corresponding to the liquid source bottle 6. The liquid source bottle 6 is installed on the flip-type liquid bottle bracket 3, and the liquid source bottle 6 can be taken out from the inside of the cabinet shell 1 through the flip-type liquid bottle bracket 3, thereby increasing the working space for disassembling the liquid source bottle 6, and the liquid source bottle 6 is placed inside the flip-type liquid bottle bracket 3.

[0028] Furthermore, a positioning strap is fixedly connected to the side of the liquid source bottle 6 via a strap connecting ring 53. The positioning strap first passes through one side of the strap connecting ring 53, then goes around the side of the liquid source bottle 6 away from the liftable positioning frame 5, and then passes through the other side of the strap connecting ring 53. Finally, both ends of the positioning strap are fixedly connected to the liftable positioning frame 5. The position of the liquid source bottle 6 is positioned using the liftable positioning frame 5 and the positioning strap. The liftable positioning frame 5 and the positioning strap do not need to be firmly locked to the liquid source bottle 6. They only need to limit the liquid source bottle 6 to prevent it from tipping over. Therefore, the positioning strap does not need to be disassembled when replacing the liquid source bottle 6, thus reducing the operation steps. A ring handle 61 is also fixedly connected to the top of the liquid source bottle 6 for easy lifting of the liquid source bottle 6 during manual disassembly.

[0029] As a further explanation of the above technical solution, the bottle connector 62 includes a connecting tube 621 that is fixedly connected to and communicates with its inner side. A locking flange 622 is integrally provided on the outer side of the connecting tube 621. A sealing extension tube 623 is also integrally provided at the top end of the connecting tube 621. A plurality of rubber sealing rings 624 are provided on the outer side of the sealing extension tube 623 to fit with it. The sealing effect at the connection is increased by the rubber sealing rings 624. The valve mounting head 63 includes a valve mounting tube 631 that is sleeved on the outside of the sealing extension tube 623. The bottom of the valve mounting tube 631 is integrally provided with a fixing flange 632 corresponding to the locking flange 622, and both the locking flange 622 and the fixing flange 632 are inserted into the inside of the locking groove 74.

[0030] As a further limitation of the above technical solution, a high-elasticity sealing ring is provided between the locking flange 622 and the fixing flange 632. The sealing ring can ensure the sealing effect between the locking flange 622 and the fixing flange 632, and the high-elasticity sealing ring can increase the sealing effect at the contact position between the bottle body connector 62 and the valve mounting head 63.

[0031] More specifically, the inner side of the cabinet shell 1 is also equipped with several valves. These valves are connected by pipelines to form a specific conveying path. The liquid conveying equipment mainly adopts the existing fully automatic source cylinder gas holder. The valve path inside the cabinet shell 1 is the same as the path inside the fully automatic source cylinder gas holder. All pneumatic valves, solenoid valves, safety detection switches and interlock switches inside are connected to the IO points of the PLC control system. With the PLC as the control center, it collects feedback signals from various switches and sensors, and automatically controls the opening and closing of each valve and the safety interlock action according to the preset program logic, so as to achieve fully automatic operation without human intervention. The end of the pipeline is also equipped with a solenoid valve corresponding to the valve mounting head 63, and the solenoid valve is fixedly connected to the valve mounting pipe 631. The inner side of the cabinet shell 1 is also equipped with a PLC control system. The PLC control system can control the valves and solenoid valves in the cabinet shell 1 to be energized (this PLC control system is an existing mature and well-known technology, and its specific structure, working principle and control logic are well known to those skilled in the art, and will not be described in detail here).

[0032] In this embodiment, please refer to Figure 7-14 The flip-type liquid bottle support 3 includes an L-shaped mounting frame 32 and a mounting frame 31, which are fixedly connected. The mounting frame 32 is located at the bottom inner side of the support frame 4, while the mounting frame 31 is attached to the side of the support frame 4. At the corner of the mounting frame 32 and the mounting frame 31, a shaft sleeve is integrally provided, which rotates with the support frame 4 through a pin. Due to the L-shaped overall arrangement of the flip-type liquid bottle support 3 and the shaft sleeve at the corner, the liquid source bottle 6 can be flipped out of the cabinet shell 1. Compared with the traditional method of opening the cabinet door 2 for disassembly, the flip-type liquid bottle support 3 is completely flat on the side of the cabinet shell 1 after being flipped, so that there is no obstruction to disassembly around the liquid source bottle 6. This not only facilitates manual disassembly but also provides sufficient space for disassembly tools.

[0033] As a further explanation of the above technical solution, the mounting frame 32 is provided with a source bottle lifting seat 36 for placing the liquid source bottle 6 above it. The source bottle lifting seat 36 is integrally provided with a conical protrusion for positioning the source bottle lifting seat 36. The bottom of the liquid source bottle 6 is quickly positioned by the conical protrusion. The bottom of the source bottle lifting seat 36 is also fixedly connected with a limiting sleeve 362 corresponding to the limiting column 321. Moreover, the two ends of the bottom of the source bottle lifting seat 36 are also fixedly connected with double pin shaft connecting seats 361. Two symmetrically arranged swing support rods 35 are movably connected to the lower side of either side of the source bottle lifting seat 36 via a double pin connecting seat 361. Each swing support rod 35 has an internally threaded slider movably connected to its other end. A compound threaded rod 34 is symmetrically and movably connected to the inner side of the mounting frame 32, and the internally threaded slider is threaded to both ends of the compound threaded rod 34. Limiting columns 321 are fixedly connected in a rectangular array at the upper center of the mounting frame 32. The limiting columns 321 and limiting sleeves 362 are inserted into each other, thus limiting the movement of the source bottle lifting seat 36, ensuring that the source bottle lifting seat 36 can only move vertically.

[0034] As a further limitation of the above technical solution, a main drive threaded rod 33 parallel to the mounting frame 31 is also provided vertically between the mounting frame 31 and the source bottle lifting seat 36. At the same time, a liftable positioning frame 5 that fits against the side of the liquid source bottle 6 is movably connected to the side of the mounting frame 31 through the main drive threaded rod 33. The adjustable positioning frame 5 includes a grooved lifting seat 51. One side of the grooved lifting seat 51 is in contact with the liquid source bottle 6, and the other side is threadedly engaged with the main drive threaded rod 33 through an internal threaded sleeve 54 embedded in the inner side of the grooved lifting seat 51. Both ends of the grooved lifting seat 51 are fixedly connected to guide slides 55. The side of the mounting frame 31 is also fixedly connected to a limiting guide rail 38 corresponding to the guide slide 55, and the limiting guide rail 38 slides in contact with the guide slide 55.

[0035] By adopting the above technical solution, when the main drive threaded rod 33 rotates, the main drive threaded rod 33 is threadedly engaged with the internal threaded sleeve 54 at the end of the groove lifting seat 51, thus causing the groove lifting seat 51 to slide downward on the side of the mounting frame 31. The groove lifting seat 51 is also provided with symmetrically distributed guide slides 55 on the side near the mounting frame 31, which slide in cooperation with the limit guide rails 38 correspondingly provided on the side of the mounting frame 31, making the groove lifting seat 51 more stable when it rises and falls. In addition, the groove lifting seat 51 will also drive the lifting locking plates 52 arranged at both ends to move up and down synchronously. When the lifting locking plates 52 move upward, the end of the lifting locking plates 52 can move to the inner side of the top of the support frame 4, so that the lifting locking plates 52 are staggered with the crossbeams arranged above the mounting frame 31, which has a locking effect on the mounting frame 31, preventing the mounting frame 31 from flipping outward, thereby improving the safety during use.

[0036] More specifically, the ends of the two compound threaded rods 34 are also provided with transmission crossbars 39 that are movably connected to the mounting crossbar 32, so that the transmission crossbars 39 can only rotate inside the mounting crossbar 32. The transmission crossbars 39 are perpendicular to the two compound threaded rods 34, and the main drive threaded rod 33 is perpendicularly arranged above the transmission crossbars 39. Furthermore, bevel gears 37 are installed at the connection positions of the transmission crossbars 39 and the compound threaded rods 34, and at the connection positions of the transmission crossbars 39 and the main drive threaded rod 33.

[0037] As a further explanation of the above technical solution, a handwheel rotating rod 311 is also movably connected to the inner side of the mounting bracket 31. Both ends of the handwheel rotating rod 311 extend to both sides of the mounting bracket 31. The handwheel rotating rod 311 is located at the top of the main drive threaded rod 33. A bevel gear 37 is also installed at the connection between the handwheel rotating rod 311 and the main drive threaded rod 33, and the handwheel rotating rod 311 and the main drive threaded rod 33 are driven and engaged through the bevel gear 37.

[0038] Specifically, the handwheel rotating rod 311 extends to the outer side of the cabinet shell 1 and has an integrally provided cylindrical protrusion coaxially arranged therewith. Both sides of the cylindrical protrusion have integrally provided protruding plates arranged in a straight line. A special wrench is attached to the end of the handwheel rotating rod 311, and the end of the wrench is engaged with the outer side of the cylindrical protrusion and the protruding plates, so that the handwheel rotating rod 311 can be rotated by the wrench.

[0039] By adopting the above technical solution, the door opening wrench is attached to the end of the handwheel rotating rod 311. Since the shape of the end of the handwheel rotating rod 311 corresponds to the shape of the end of the door opening wrench, the handwheel rotating rod 311 can be rotated using the door opening wrench. Since the other end of the handwheel rotating rod 311 and the end of the main drive threaded rod 33 are respectively provided with bevel gears 37, the handwheel rotating rod 311 drives the main drive threaded rod 33 to rotate through the meshing between the two bevel gears 37. The other end of the main drive threaded rod 33 also drives the transmission crossbar 39 to rotate through the bevel gears 37. After the power is transmitted through the transmission crossbar 39, it is finally transmitted to the compound threaded rod 34 through the bevel gears 37 at both ends of the transmission crossbar 39, so that the compound threaded rods 34 located on both sides of the mounting crossbar 32 rotate synchronously. Through the bevel gears 37, the power can be accurately transmitted from the handwheel rotating rod 311 to the compound threaded rod 34.

[0040] As a further explanation of the above technical solution, multiple bevel gears 37 are provided, and the multiple bevel gears 37 have the same module and number of teeth. They are respectively installed at the end of the handwheel rotating rod 311, both ends of the main drive threaded rod 33, the middle position and both ends of the transmission crossbar 39, and the end of the compound threaded rod 34. When the handwheel rotating rod 311 is rotated with a wrench, the handwheel rotating rod 311 drives the main drive threaded rod 33 to rotate through the bevel gears 37. The bevel gear 37 at the other end of the main drive threaded rod 33 is engaged with the bevel gear 37 at the middle position of the transmission crossbar 39, thus transmitting power to the transmission crossbar 39, thereby driving the transmission crossbar 39 to rotate. The transmission crossbar 39 then drives the compound threaded rod 34 to rotate through the bevel gears 37 at both ends. Because the double threaded rods 34 on both sides of the mounting frame 32 are symmetrically arranged, and the transmission crossbar 39 drives the double threaded rods 34 on both sides to rotate in opposite directions, when the transmission crossbar 39 drives the double threaded rods 34 to rotate, the internal threaded sliders at both ends of the double threaded rods 34 will move closer or further apart. In conjunction with the cooperation of the swing support rod 35 and the double pin connecting seat 361, the source bottle lifting seat 36 moves up and down, thereby connecting or separating the liquid source bottle 6 from the valve above it.

[0041] Furthermore, both ends of the groove lifting seat 51 are fixedly connected to a lifting locking plate 52 near the side of the mounting frame 31, and the top of the mounting frame 31 is also fixedly connected to a side baffle 312 and an L-shaped baffle 313 corresponding to the lifting locking plate 52. Each set of side baffles 312 and L-shaped baffles 313 are respectively located on both sides of the lifting locking plate 52 at the corresponding positions. The side of the lifting locking plate 52 is also provided with a transmission crossbar 39, and the side of the L-shaped baffle 313 is also integrally provided with a sliding protrusion 314 inserted into the inner side of the transmission crossbar 39.

[0042] As a further explanation of the above technical solution, the two ends of the groove lifting seat 51 are also provided with strap connecting rings 53, the lifting locking plate 52 is also provided with a spring-loaded one-way lifting frame 8 on the side near the liquid source bottle 6, and a horizontal translation locking frame 7 is provided above the spring-loaded one-way lifting frame 8, and the translation locking frame 7 is installed on the inner side of the support frame 4 through a side-mounted limiting side bracket 9.

[0043] By adopting the above technical solution, when the compound threaded rod 34 rotates, the internal threaded sliders at both ends of the compound threaded rod 34 that are threaded with it move to both sides respectively. The bottom of the swing support rod 35 movably connected to the internal threaded slider separates towards both ends of the compound threaded rod 34. Consequently, the source bottle lifting seat 36 movably connected to the other end of the swing support rod 35 moves downward, causing the liquid source bottle 6 placed on the source bottle lifting seat 36 to automatically separate from the valve above it. Then, it rotates around the axis of the shaft sleeve set at the connection between the mounting bracket 31 and the mounting cross bracket 32, rotating the liquid source bottle 6 out from the inside of the cabinet shell 1. This increases the disassembly space when disassembling the liquid source bottle 6, which not only facilitates manual disassembly of the liquid source bottle 6, but also makes it easier for workers to replace the liquid source bottle 6 using disassembly tools, shortening the replacement time.

[0044] In this embodiment, please refer to Figure 19-23 , Figure 26 The translation locking frame 7 includes Z-shaped staggered locking claws 71. One end of the translation locking frame 7 is attached to the limiting side bracket 9, and the other end extends to the space between the bottle body connector 62 and the valve mounting head 63 located above the liquid source bottle 6. The end is also provided with a U-shaped groove 73 for placing the bottle body connector 62 and the valve mounting head 63. The inner side of the U-shaped groove 73 is also provided with a locking groove 74 that engages with the bottle body connector 62 and the valve mounting head 63. The Z-shaped staggered locking claw 71 is provided with a horizontally arranged rectangular sliding groove 72 at one end near the limiting side bracket 9. The limiting side bracket 9 includes a vertical mounting plate 91 fixedly connected to the inner side of the support frame 4. The top of the vertical mounting plate 91 is integrally provided with a rectangular mounting protrusion 93 that penetrates the locking groove 74. The rectangular mounting protrusion 93 slides with the locking groove 74. A compression spring 75 is placed at the end of the locking groove 74 away from the liquid source bottle 6. The other end of the compression spring 75 is also in contact with the side of the rectangular mounting protrusion 93.

[0045] More specifically, the vertical mounting plate 91 is also provided with a guide baffle 92 with inclined ends on the side near the spring-loaded one-way lifting frame 8, and the other end of the rectangular mounting protrusion 93 is also fixedly connected with a detachable block 94 inserted into the inner side of the rectangular mounting protrusion 93, and the detachable block 94 is located on the side of the staggered locking claw 71 away from the vertical mounting plate 91.

[0046] By adopting the above technical solution, the translation locking frame 7 is supported by the limiting side bracket 9. Since the Z-shaped staggered locking claw 71 has a horizontally arranged rectangular sliding groove 72, and the sliding cooperation between the rectangular mounting protrusion 93 and the rectangular sliding groove 72, the Z-shaped staggered locking claw 71 can only move laterally on the side of the vertical mounting plate 91. When the spring-loaded one-way lifting frame 8 moves upward, the inclined surface at the top of the spring-loaded one-way lifting frame 8 cooperates with the inclined surface corresponding to the end of the Z-shaped staggered locking claw 71, thereby pushing the Z-shaped staggered locking claw 71 laterally. As the liquid source bottle 6 moves upward, a buffer rubber pad is provided between the locking flange 622 and the fixing flange 632. Therefore, as the liquid source bottle 6 moves upward, the buffer rubber pad is squeezed until the U-shaped groove 73 at the end of the Z-shaped staggered locking claw 71 is fitted onto the connection between the bottle body connector 62 and the valve mounting head 63. The locking flange 622 and the fixing flange 632 are respectively inserted into the inner side of the locking slot 74, thereby automatically locking the connection. This eliminates the need for manual connection of the pipeline and further improves the replacement speed of the liquid source bottle 6.

[0047] In this embodiment, please refer to Figure 15-18 The staggered locking claw 71 is also provided with an inclined surface at one end near the vertical mounting plate 91, which corresponds to the top of the spring-loaded one-way lifting frame 8. The spring-loaded one-way lifting frame 8 includes an inclined top rod 86 located below the end of the staggered locking claw 71. The top of the inclined top rod 86 also has an inclined surface corresponding to the inclined surface of the end of the staggered locking claw 71. A rectangular sleeve 83 is sleeved below the inclined top rod 86, and a bottom top rod 81 is movably connected to the bottom of the inclined top rod 86 through the rectangular sleeve 83. The other end of the bottom top rod 81 is integrally provided with a right-angle mounting bracket 82 that is fixedly connected to the lifting locking plate 52.

[0048] As a further explanation of the above technical solution, a rotating connecting plate 87 located inside the rectangular sleeve 83 is provided between the bottom top rod 81 and the inclined top rod 86. A central pin rod 84 is fixedly connected to the inner side of the rectangular sleeve 83, and the rotating connecting plate 87 is movably connected to the inner side of the rectangular sleeve 83 through the central pin rod 84. A torsion spring 88 coaxially arranged with the central pin rod 84 is also sleeved on the side of the rotating connecting plate 87. One end of the torsion spring 88 is engaged with the inner side of the rectangular sleeve 83, and the other end is engaged with the side of the rotating connecting plate 87.

[0049] Furthermore, a reset rod 85 is also inserted and fitted on the side of the rectangular sleeve 83 near the guide baffle 92, and the reset rod 85 is located above the bottom rod 81 and below the central pin rod 84. The bottom top rod 81 is provided with a positioning groove 89 at its top end, while the bottom of the inclined top rod 86 is provided with an arc-shaped surface. The top end of the rotating connecting plate 87 fits into the arc-shaped surface at the bottom of the inclined top rod 86, while the bottom of the rotating connecting plate 87 is placed inside the positioning groove 89.

[0050] By adopting the above technical solution, when the lifting locking plate 52 moves up and down, the spring-loaded one-way lifting frame 8 fixed on the side of the lifting locking plate 52 will move synchronously with it. When it rises, the bottom top rod 81 will push the rotating connecting plate 87 to move upward. The bottom top rod 81 applies an upward thrust to the rotating connecting plate 87. At the same time, with the weight of the inclined top rod 86, the bottom of the rotating connecting plate 87 is tightly attached to the positioning groove 89 at the top of the bottom top rod 81. Then, the rotating connecting plate 87 pushes the inclined top rod 86 to move upward, and the inclined surface at the top of the inclined top rod 86 pushes the translation locking frame 7 to move horizontally. As a further explanation of the above technical solution, when the lifting locking plate 52 moves downward, the bottom push rod 81 will lose the lifting pressure on the rotating connecting plate 87 at the moment of descent. At this time, the torsion spring 88 is sufficient to overcome the friction between the bottom of the rotating connecting plate 87 and the positioning groove 89 through its own elasticity, thereby pushing the rotating connecting plate 87 to deflect around the central pin rod 84. After deflection, a large gap will appear between the rotating connecting plate 87 and the inclined push rod 86. Subsequently, the inclined push rod 86 moves downward quickly under the pull of its own weight, causing the top of the inclined push rod 86 to fall quickly from the top of the translation locking frame 7, causing the translation locking frame 7 to quickly and automatically reset, thereby causing the translation locking frame 7 to quickly separate from the connection between the bottle body connector 62 and the valve mounting head 63.

[0051] Furthermore, the top of the lifting locking plate 52 is engaged with the inner top of the support frame 4, preventing the flip-type liquid bottle bracket 3 from flipping outward. When the top of the lifting locking plate 52 moves to a position lower than the top of the mounting bracket 31, the flip-type liquid bottle bracket 3 can flip outward to the support frame 4, thereby replacing the liquid source bottle 6 placed inside the flip-type liquid bottle bracket 3.

[0052] After replacing the liquid source bottle 6 using the above technical solution, the flip-type liquid bottle bracket 3 needs to be flipped back to the inside of the cabinet shell 1. At this time, the lifting locking plate 52 is located below the crossbeam at the top of the support frame 4, and the spring-loaded one-way lifting frame 8 fixed on the side of the lifting locking plate 52 is located on the side of the guide baffle 92. Moreover, the rectangular sleeve 83 in the spring-loaded one-way lifting frame 8 is aligned with the guide baffle 92, and the reset rod 85 installed on the side of the rectangular sleeve 83 is blocked by the guide baffle 92, so that the reset rod 85 slides relative to the inside of the rectangular sleeve 83. Since the reset rod 85 is located at the deflection position of the rotating connecting plate 87, the reset rod 85 can push the rotating connecting plate 87 to reset. As the lifting locking plate 52 drives the spring-loaded one-way lifting frame 8 to move upward, the reset rod 85 gradually moves to the top of the guide baffle 92, without affecting the normal deflection of the rotating connecting plate 87.

[0053] The working principle of this invention is as follows: First, the handwheel rotating rod 311 is rotated by a wrench. Through multiple mutually cooperating bevel gears 37, the handwheel rotating rod 311 drives the main drive threaded rod 33 and the transmission crossbar 39 to rotate. This causes the two compound threaded rods 34 to rotate synchronously in opposite directions, causing the two internal threaded sliders on the compound threaded rods 34 to move away from each other. This causes the lower end of the swing support rod 35 to separate to both sides, causing the source bottle lifting seat 36 to move downward. This, in turn, causes the liquid source bottle 6 to move downward as a whole, separating the bottle body connector 62 from the valve mounting head 63. During this process, due to the threaded engagement between the main drive threaded rod 33 and the internal threaded sleeve 54, the grooved lifting seat 51 also moves downward synchronously when the main drive threaded rod 33 rotates. The lifting locking plates 52 installed at both ends also move downward synchronously with the grooved lifting seat 51. At this time, the rotating connecting plate 87 loses its upward thrust, and the reset top rod 85 is located at the guide baffle 9. Above 2, therefore, the rotating connecting plate 87 will deflect under the action of the torsion spring 88. After the rotating connecting plate 87 deflects, the inclined top rod 86 loses support and will fall down a certain distance. The top of the inclined top rod 86 will move instantly to the bottom of the Z-shaped interlocking locking claw 71, causing the Z-shaped interlocking locking claw 71 to lose its thrust. At this time, the compression spring 75 installed on the inner side of the Z-shaped interlocking locking claw 71 will drive it to quickly reset, thereby causing the other end of the Z-shaped interlocking locking claw 71 to move away from the outside of the locking flange 622 and the fixing flange 632 without affecting the separation of the two and the downward movement of the locking flange 622. When the top of the lifting locking plate 52 moves to the bottom of the mounting bracket 31, the flip-type liquid bottle bracket 3 can be flipped outward to the outside of the cabinet shell 1 to turn out the liquid source bottle 6. After obtaining sufficient disassembly space, the old liquid source bottle 6 can be removed and replaced with a new liquid source bottle 6. Then the flip-type liquid bottle bracket 3 can be flipped back to the inside of the support frame 4. At this time, the reset push rod 85 will slide relative to the inside of the rectangular sleeve 83 under the obstruction of the guide baffle 92, thereby pushing the rotating connecting plate 87 to reset, so that the bottom of the rotating connecting plate 87 returns to the positioning groove 89, and the top of the rotating connecting plate 87 pushes the inclined push rod 86 back to the starting position. Then, the handwheel rotating rod 311 is rotated in the opposite direction, causing the double threaded rod 34 to rotate in the opposite direction, so that the internal threaded sliders come closer together. In conjunction with the swing support rod 35, the source bottle lifting seat 36 is pushed upward, causing the liquid source bottle 6 to rise, so that the bottle body connector 62 gradually approaches the valve mounting head 63. During this process, the lifting locking plate 52 moves upward synchronously, and the spring-loaded one-way lifting frame 8 rises synchronously with the lifting locking plate 52. The inclined top rod 81 is pushed upward through the rotating connecting plate 87, and the inclined surface at the top pushes the Z-shaped interlocking locking claw 71 to move laterally. When the bottle body connector 62 and the valve mounting head 63 are connected, the locking groove 74 of the Z-shaped interlocking locking claw 71 is just locked into the connection between the bottle body connector 62 and the valve mounting head 63, completing the automatic locking of the connection. At the same time, the top of the lifting locking plate 52 is locked into the inner top of the support frame 4, locking the rotation of the flip-type liquid bottle bracket 3, completing the replacement of the liquid source bottle, and normal infusion operation can be resumed.

[0054] The embodiments disclosed herein are preferred embodiments, but are not limited thereto. Those skilled in the art can readily grasp the spirit of the present invention based on the above embodiments and make different extensions and variations, but as long as they do not depart from the spirit of the present invention, they are all within the protection scope of the present invention.

Claims

1. A liquid conveying device for integrated circuit manufacturing, characterized in that: Includes cabinet shell (1), the lower half of the inner side of the cabinet shell (1) is fixedly connected to a support frame (4), the inner side of the support frame (4) is provided with at least two liquid source bottles (6), and the side of the support frame (4) is also movably connected to a flip-type liquid bottle bracket (3) corresponding to the liquid source bottle (6). The flip-type liquid bottle bracket (3) is L-shaped in the whole, and the liquid source bottle (6) is placed inside the flip-type liquid bottle bracket (3). The flip-type liquid bottle support (3) includes an L-shaped mounting crossbeam (32) and a mounting stand (31), and the mounting crossbeam (32) and the mounting stand (31) are fixedly connected. The mounting crossbeam (32) is located at the bottom inner side of the support frame (4), while the mounting stand (31) is attached to the side of the support frame (4). The corners of the mounting crossbeam (32) and the mounting stand (31) are also integrally provided with shaft sleeves that rotate with the support frame (4) through pins. Above the mounting frame (32) is a source bottle lifting seat (36) for placing the liquid source bottle (6). The bottom of the source bottle lifting seat (36) is also fixedly connected to a limiting sleeve (362) corresponding to the limiting column (321). Moreover, the bottom ends of the source bottle lifting seat (36) are also fixedly connected to double pin shaft connecting seats (361). Two symmetrically arranged swing support rods (35) are movably connected to the bottom of either side of the source bottle lifting seat (36) via a double pin connecting seat (361). Furthermore, an internal threaded slider is movably connected to the other end of each swing support rod (35). A compound threaded rod (34) is symmetrically movably connected to the inner side of the mounting frame (32). The internal threaded slider is threaded to both ends of the compound threaded rod (34). A limit column (321) is fixedly connected in a rectangular array at the middle position of the upper part of the mounting frame (32).

2. The liquid conveying equipment for integrated circuit manufacturing as described in claim 1, characterized in that: The mounting bracket (31) and the source bottle lifting seat (36) are also vertically provided with a main drive threaded rod (33) parallel to the mounting bracket (31). At the same time, the side of the mounting bracket (31) is movably connected to a liftable positioning frame (5) that fits against the side of the liquid source bottle (6) through the main drive threaded rod (33). The liftable positioning frame (5) includes a groove lifting seat (51). One side of the groove lifting seat (51) is in contact with the liquid source bottle (6), and the other side is threadedly engaged with the main drive threaded rod (33) through an internal threaded sleeve (54) embedded in the inner side of the groove lifting seat (51). Both ends of the groove lifting seat (51) are fixedly connected to guide slides (55). The side of the mounting frame (31) is also fixedly connected to a limiting guide rail (38) corresponding to the guide slide (55), and the limiting guide rail (38) and the guide slide (55) slide in cooperation.

3. The liquid conveying equipment for integrated circuit manufacturing as described in claim 1, characterized in that: The ends of the two compound threaded rods (34) are also provided with transmission crossbars (39) that are movably connected to the mounting crossbar (32). The transmission crossbars (39) are perpendicular to the two compound threaded rods (34). The main drive threaded rod (33) is perpendicular to the transmission crossbars (39). The connection positions of the transmission crossbars (39) and the compound threaded rods (34) and the connection positions of the transmission crossbars (39) and the main drive threaded rods (33) are all equipped with bevel gears (37). The main drive threaded rods (33) and the transmission crossbars (39) and the transmission crossbars (39) and the compound threaded rods (34) are all driven and engaged through the bevel gears (37).

4. The liquid conveying equipment for integrated circuit manufacturing as described in claim 2, characterized in that: The inner side of the mounting bracket (31) is also movably connected to a handwheel rotating rod (311). Both ends of the handwheel rotating rod (311) extend to both sides of the mounting bracket (31). The handwheel rotating rod (311) is located at the top of the main drive threaded rod (33). A bevel gear (37) is also installed at the connection between the handwheel rotating rod (311) and the main drive threaded rod (33). The handwheel rotating rod (311) and the main drive threaded rod (33) are connected by the bevel gear (37). Both ends of the groove lifting seat (51) are fixedly connected to a lifting locking plate (52) near the side of the mounting frame (31). The top of the mounting frame (31) is also fixedly connected to a side baffle (312) and an L-shaped baffle (313) corresponding to the lifting locking plate (52). Each set of side baffles (312) and L-shaped baffles (313) are located on both sides of the lifting locking plate (52) at the corresponding positions. The side of the lifting locking plate (52) is also provided with a transmission crossbar (39), and the side of the L-shaped baffle (313) is also integrally provided with a sliding protrusion (314) inserted into the inside of the transmission crossbar (39).

5. The liquid conveying equipment for integrated circuit manufacturing as described in claim 4, characterized in that: The groove lifting seat (51) is also provided with strap connecting rings (53) at both ends. The lifting locking plate (52) is also provided with a spring-loaded one-way lifting frame (8) on the side near the liquid source bottle (6). A horizontal translation locking frame (7) is provided above the spring-loaded one-way lifting frame (8). The translation locking frame (7) is installed on the inner side of the support frame (4) through a side-mounted limit side bracket (9).

6. The liquid conveying equipment for integrated circuit manufacturing as described in claim 5, characterized in that: The translation locking frame (7) includes Z-shaped staggered locking claws (71). One end of the translation locking frame (7) is attached to the limiting side bracket (9), and the other end extends to the space between the bottle body connector (62) and the valve mounting head (63) located above the liquid source bottle (6). The end is also provided with a U-shaped groove (73) for placing the bottle body connector (62) and the valve mounting head (63). The inner side of the U-shaped groove (73) is also provided with a locking groove (74) that engages with the bottle body connector (62) and the valve mounting head (63). The Z-shaped staggered locking claw (71) is provided with a rectangular sliding groove (72) arranged horizontally at one end near the limiting side bracket (9). The limiting side bracket (9) includes a vertical mounting plate (91) fixedly connected to the inner side of the support frame (4). The top of the vertical mounting plate (91) is provided with a rectangular mounting protrusion (93) that penetrates the locking slot (74). The rectangular mounting protrusion (93) slides with the locking slot (74). A compression spring (75) is placed at the end of the locking slot (74) away from the liquid source bottle (6). The other end of the compression spring (75) is also in contact with the side of the rectangular mounting protrusion (93).

7. The liquid conveying equipment for integrated circuit manufacturing as described in claim 6, characterized in that: The vertical mounting plate (91) is also provided with a guide baffle (92) with inclined ends on the side near the spring-loaded one-way lifting frame (8). The other end of the rectangular mounting protrusion (93) is also fixedly connected with a detachable block (94) inserted into the inner side of the rectangular mounting protrusion (93), and the detachable block (94) is located on the side of the staggered locking claw (71) away from the vertical mounting plate (91). The end of the staggered locking claw (71) near the vertical mounting plate (91) is also provided with an inclined surface corresponding to the top of the spring-loaded one-way lifting frame (8). Among them, the spring-loaded one-way lifting frame (8) includes an inclined top rod (86) set below the end of the interlocking locking claw (71). The top of the inclined top rod (86) is also provided with an inclined surface corresponding to the inclined surface of the end of the interlocking locking claw (71). A rectangular sleeve (83) is sleeved below the inclined top rod (86), and a bottom top rod (81) is movably connected to the bottom of the inclined top rod (86) through the rectangular sleeve (83). The other end of the bottom top rod (81) is integrally provided with a right-angle mounting bracket (82) fixedly connected to the lifting locking plate (52).

8. The liquid conveying equipment for integrated circuit manufacturing as described in claim 7, characterized in that: Between the bottom top rod (81) and the inclined top rod (86), there is a rotating connecting plate (87) located inside the rectangular sleeve (83). The inner side of the rectangular sleeve (83) is also fixedly connected to a central pin rod (84), and the rotating connecting plate (87) is movably connected to the inner side of the rectangular sleeve (83) through the central pin rod (84). The side of the rotating connecting plate (87) is also sleeved with a torsion spring (88) coaxially arranged with the central pin rod (84). One end of the torsion spring (88) is engaged with the inner side of the rectangular sleeve (83), and the other end is engaged with the side of the rotating connecting plate (87).

9. The liquid conveying equipment for integrated circuit manufacturing as described in claim 8, characterized in that: The rectangular sleeve (83) is also fitted with a reset rod (85) on the side near the guide baffle (92), and the reset rod (85) is located above the bottom rod (81) and below the central pin rod (84). The bottom top rod (81) is provided with a positioning groove (89) at its top, and the bottom of the inclined top rod (86) is provided with an arc-shaped surface at an angle. The top of the rotating connecting plate (87) is in contact with the arc-shaped surface at the bottom of the inclined top rod (86), and the bottom of the rotating connecting plate (87) is placed inside the positioning groove (89).

10. The liquid conveying equipment for integrated circuit manufacturing as described in claim 1, characterized in that: The liquid source bottle (6) is placed above the source bottle lifting seat (36), and the side of the liquid source bottle (6) is fixedly connected to a positioning strap by a strap connecting ring (53), while a ring handle (61) is fixedly connected to the top of the liquid source bottle (6). The bottle connector (62) includes a connecting tube (621) that is fixedly connected to and communicates with its inner side. A locking flange (622) is integrally provided on the outer side of the connecting tube (621). A sealing extension tube (623) is also integrally provided at the top end of the connecting tube (621), and a plurality of rubber sealing rings (624) are provided on the outer side of the sealing extension tube (623) to be sleeved thereon. The valve mounting head (63) includes a valve mounting tube (631) sleeved on the outside of the sealing extension tube (623). The bottom of the valve mounting tube (631) is integrally provided with a fixing flange (632) corresponding to the locking flange (622), and both the locking flange (622) and the fixing flange (632) are inserted into the inside of the locking slot (74).

Images