CVD wafer coating device with scratch protection function

Abstract

The application belongs to the technical field of semiconductor and discloses a CVD wafer coating device with scratch protection function, which comprises a wafer coating device and a one-way locking mechanism mounted on the wafer coating device; wherein the wafer coating device comprises a box body and a group of lugs fixed to the box body, and a cover plate is rotationally connected between the two lugs. The above scheme is opened by rotating the cover plate, and under the action of the spring force of the spring part on the spring pin, the spring pin is clamped into the one-way clamping groove and limits the cover plate from rotating downward. After the cover plate is rotated by 90 degrees, the other end of the cover plate is blocked by the arc-shaped block and cannot continue to rotate, thereby keeping a stable state. When resetting, the operator presses two groups of sliders to drive corresponding inclined blocks to move, so that the inclined blocks press the inner wall of the slot on one side, and the spring pin is also reset, so as to lock the cover plate after being opened next time, thereby significantly reducing the risk that the operator accidentally touches the cover plate and causes the cover plate to collide with and damage the coating equipment.

Description

Technical Field

[0001] This invention belongs to the field of semiconductor technology, specifically a CVD wafer coating device with scratch protection function. Background Technology

[0002] CVD is one of the most critical thin film deposition technologies in semiconductor manufacturing. It involves introducing one or more gaseous precursors containing thin film elements into a reaction chamber, where a chemical reaction occurs on the heated wafer surface to generate a solid thin film, which is then deposited onto the wafer.

[0003] In existing chip manufacturing processes, wafer coating equipment requires frequent maintenance, which significantly impacts coating efficiency. For example, the invention disclosed in CN114941124A provides a vacuum wafer coating apparatus, relating to the field of semiconductor technology. The vacuum wafer coating apparatus includes a cavity, a cover plate, and connectors. The cavity has an opening for housing a robotic arm used to transfer wafers. The cover plate has a connecting portion, which is fixed to the outer wall of the cavity via the connectors. The connecting portion is movably connected to the connectors, allowing the cover plate to rotate relative to the cavity, opening or closing the opening without needing to move the cover plate. This avoids scratches and impacts to the cover plate that could affect its sealing performance, and the convenient opening and closing facilitates maintenance or disassembly by the robotic arm, thereby improving maintenance efficiency, saving significant manpower and maintenance time, and ultimately increasing production efficiency.

[0004] While the above solution is convenient to open and does not require rotation, there is still a possibility that the operator may accidentally touch the cover and close it, which could cause the cover to hit the coating equipment and be damaged. Summary of the Invention

[0005] To address the problems mentioned in the background art, the present invention provides a CVD wafer coating apparatus with scratch protection function, which solves the problem that operators may accidentally touch the cover plate, causing it to collide with the coating equipment and be damaged.

[0006] To achieve the above objectives, the present invention provides the following technical solution: a CVD wafer coating apparatus with scratch protection function, comprising a wafer coating apparatus and further comprising: a one-way locking mechanism mounted on the wafer coating apparatus; wherein, the wafer coating apparatus comprises a housing and a set of lugs fixed thereon, and a cover plate is rotatably connected between the two lugs. The one-way locking mechanism includes a set of spring pins symmetrically installed on the cover plate. The spring pins have slots. A slider that passes through the cover plate and the slot is movably installed in the cover plate. A wedge is fixed to one side of the slider. In the initial state, one side of the slider will abut against one end of the inner wall of the slot. The lug is provided with several one-way slots. The spring pin has a tendency to move toward the lug due to its own elastic force, and one end of the spring pin can be inserted into the one-way slot in one direction due to its own elastic force. Pressing the slider can cause the inclined block to squeeze one end of the inner wall of the slot and disengage the end of the spring pin from the one-way slot.

[0007] Preferably, an arc-shaped stop is fixed to the lug, and the cover plate can abut against the top of the arc-shaped stop after rotating 90 degrees.

[0008] Preferably, a spring telescopic rod is hinged to the middle of one side of the slider, and the other end of the spring telescopic rod is hinged to the inside of the cover plate cavity; The slider is supported by the elastic force of the spring telescopic rod, keeping one end of the slider exposed outside the cover plate.

[0009] Preferably, when one end of the inclined block near the box body is exposed to the outside, one side of the inclined block will remain in contact with the inner wall of the slot. The inclined block has an inclined surface, and when the end of the slot cavity body abuts against the inclined surface, the inclined block can maintain the tendency to move towards the box body.

[0010] Preferably, when the end of the slider near the housing contacts the housing, one end of the spring latch will disengage from the one-way slot.

[0011] Preferably, a magnetic suction component is installed on the wafer coating apparatus; The magnetic attraction assembly includes a magnet one and a magnet two, which are respectively fixedly installed on the box body and the cover plate. The magnet one and the magnet two attract each other to keep the cover plate in a closed state.

[0012] Preferably, a set of telescopic damping rods are arranged symmetrically on the cover plate, and the other end of the telescopic damping rods is hinged to the box body.

[0013] Preferably, the telescopic damping rod includes a sleeve with one end hinged in the cover plate, a piston rod movably sleeved in the sleeve, the other end of the piston rod being hinged to the housing, and a through hole being provided at one end of the piston rod located inside the sleeve, the through hole being used to connect the sleeve cavity on both sides of the piston end of the piston rod; the sleeve contains hydraulic oil.

[0014] Preferably, a protective component is movably sleeved inside the piston rod and located within the through hole one; the protective component includes a spring rod movably sleeved at the piston end of the piston rod, the top end of the spring rod blocking the through hole one, allowing hydraulic oil to push the spring rod outward through the through hole one and flow upward through the gap between the through hole one and the spring rod; the hydraulic oil at the top end of the sleeve can flow downward into the sleeve through the flow channel hole and the through hole two.

[0015] Preferably, a set of handles is mounted on the top of the wafer coating apparatus.

[0016] Compared with the prior art, the beneficial effects of the present invention are as follows: The above solution involves opening the cover by rotating it. The spring force of the spring-loaded latch causes it to engage in a one-way slot, preventing the cover from rotating downwards. After rotating 90 degrees, the other end of the cover is blocked by an arc-shaped stop, preventing further rotation and maintaining a stable state. To reset, the operator presses two sets of sliders, moving the corresponding inclined blocks. This causes one side of the inclined block to press against the inner wall of the slot, disengaging the spring-loaded latch from the one-way slot. The operator can then rotate the cover downwards to reset it. As the cover closes, the top of the housing pushes the slider upwards, releasing the inclined block from the spring-loaded latch. Simultaneously, the spring-loaded latch resets, facilitating locking when the cover is opened again. This significantly reduces the risk of accidental contact with the cover, potentially causing damage to the coating equipment.

[0017] The above solution works by allowing hydraulic oil below the piston end of the piston rod to enter the area above the piston end of the piston rod through through hole one when the cover is opened. Since the diameter of the sleeve cavity and the diameter of the piston end of the piston rod are both larger than the diameter of through hole one, fluid damping is generated when the liquid below the piston end of the piston rod enters the cavity of the sleeve above the piston end of the piston rod through through hole one. This slows down the speed of the cover when it is closed or opened, preventing the cover from closing too quickly and colliding with the housing.

[0018] The above solution allows the hydraulic oil to enter the piston rod above the piston end through through-hole one while the cover is open. Simultaneously, the hydraulic oil pushes the spring rod upwards through through-hole one and enters the cavity above the piston end of the sleeve through the space between through-hole one and the spring rod, as well as through the flow channel and through-hole two. During the closing process, the spring rod end blocks through-hole one, allowing the hydraulic oil at the top of the sleeve to enter through-hole one through the flow channel and through-hole two and flow into the cavity of the sleeve containing the piston rod. This design enables the cover to open quickly while slowing its closing speed to avoid impact with the top of the housing. Attached Figure Description

[0019] Figure 1 This is a schematic diagram of the overall structure of the present invention; Figure 2 This is a frontal sectional view of the present invention; Figure 3 This is a schematic diagram of the spring latch of the present invention; Figure 4 This is a front cross-sectional view of the unidirectional locking mechanism of the present invention. Figure 5 for Figure 4 Enlarged view of point A in the middle; Figure 6 for Figure 4 Enlarged view of point B in the middle; Figure 7 for Figure 4 Enlarged view of point C in the middle; Figure 8 for Figure 7 Enlarged view at point D; Figure 9 This is a schematic diagram of the structure of the protective component of the present invention; Figure 10 This is a schematic diagram of the cover plate being opened in this invention.

[0020] In the diagram: 1. Wafer coating device; 11. Housing; 12. Cover plate; 121. Handle; 13. Lug; 131. Arc-shaped stop; 132. One-way slot; 2. One-way locking mechanism; 21. Spring pin; 22. Slider; 221. Spring telescopic rod; 23. Inclined block; 231. Inclined surface; 24. Groove; 3. Telescopic damping rod; 31. Sleeve; 32. Piston rod; 33. Through hole one; 4. Protective assembly; 41. Spring rod; 42. Flow channel hole; 43. Through hole two; 5. Magnetic assembly; 51. Magnet one; 52. Magnet two. Detailed Implementation

[0021] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0022] like Figures 1 to 10 As shown, the present invention provides a CVD wafer coating apparatus with scratch protection function, including a wafer coating apparatus 1, and further including a one-way locking mechanism 2 installed on the wafer coating apparatus 1; wherein, the wafer coating apparatus 1 includes a housing 11 and a set of lugs 13 fixed thereon, and a cover plate 12 is rotatably connected between the two lugs 13; the one-way locking mechanism 2 includes a set of spring pins 21 installed symmetrically on the cover plate 12, the spring pins 21 having a slot 24, and a slider 22 movably installed in the cover plate 12, penetrating the cover plate 12 and the slot 24, with a wedge 23 fixed to one side of the slider 22, and in the initial state, one side of the slider 22 abuts against one end of the inner wall of the slot 24; The lug 13 is provided with several one-way slots 132. The spring pin 21 has a tendency to move toward the lug 13 due to its own elastic force, and one end of the spring pin 21 can be inserted into the one-way slot 132 due to its own elastic force. Pressing the slider 22 can cause the inclined block 23 to squeeze one end of the inner wall of the slot 24 and cause the end of the spring pin 21 to disengage from the one-way slot 132. A set of handles 121 is installed on the top of the wafer coating device 1; an arc-shaped stop 131 is fixed on the lug 13, and the cover plate 12 can abut against the top of the arc-shaped stop 131 after rotating ninety degrees.

[0023] Using the above scheme, when the cover plate 12 is opened by rotating it, the spring force on the spring-loaded pin 21 will cause it to engage in the one-way slot 132, preventing the cover plate 12 from rotating downwards. After the cover plate 12 rotates 90 degrees, its other end will be blocked by the arc-shaped stop 131, preventing further rotation and maintaining a stable state. When resetting, the operator presses the two sets of sliders 22 to move the corresponding inclined blocks 23, causing one side of the inclined block 23 to press against the inner wall of the slot 24, which will cause the spring-loaded pin 21 to disengage from the one-way slot 132. At this time, the operator can rotate the cover plate 12 downwards to reset it. When the cover plate 12 is about to close, the top of the housing 11 will press the slider 22 upwards, causing the inclined block 23 to release the pressure on the spring-loaded pin 21. At the same time, the spring-loaded pin 21 will also reset, so as to lock it after the cover plate 12 is opened next time. This significantly reduces the risk of the operator accidentally touching the cover plate and causing it to collide with and damage the coating equipment.

[0024] like Figures 1-6 and Figure 10 As shown, a spring telescopic rod 221 is hinged to the middle of one side of the slider 22, and the other end of the spring telescopic rod 221 is hinged to the inside of the cavity of the cover plate 12. The slider 22 is supported by the elastic force of the spring telescopic rod 221 and one end of the slider 22 is exposed outside the cover plate 12; when the end of the inclined block 23 near the box 11 is exposed outside, one side of the inclined block 23 will remain in contact with the inner wall of the slot 24. An inclined surface 231 is provided on the inclined block 23. When the end of the cavity of the slot 24 abuts against the inclined surface 231, the inclined block 23 can maintain the tendency to move towards the box 11. When the end of the slider 22 near the box 11 contacts the box 11, one end of the spring pin 21 will disengage from the one-way slot 132.

[0025] By adopting the above scheme, the support effect of the spring telescopic rod 221 on the slider 22 ensures that when the operator presses the slider 22, the inclined block 23 can stably switch between the two states of squeezing the inner wall of the groove 24 and detaching from the inner wall of the groove 24. Meanwhile, the inclined surface 231 ensures that the inner wall of the groove 24 is more stable when it comes into contact with the inclined surface 231, and there will be no relative slippage or separation.

[0026] like Figure 1 , Figure 2 , Figure 4 and Figure 10As shown, a magnetic suction assembly 5 is installed on the wafer coating device 1; the magnetic suction assembly 5 includes a magnet 51 and a magnet 52 respectively fixedly installed on the housing 11 and the cover plate 12. The magnet 51 and the magnet 52 attract each other to keep the cover plate 12 in a closed state. By adopting the above scheme, the cover plate 12 will be more stable when closed by setting magnet 51 and magnet 52.

[0027] like Figures 2-4 and Figures 7-10 As shown, a set of telescopic damping rods 3 are symmetrically arranged on the cover plate 12, and the other end of the telescopic damping rods 3 is hinged to the housing 11. The telescopic damping rod 3 includes a sleeve 31 with one end hinged in the cover plate 12. A piston rod 32 is movably sleeved in the sleeve 31. The other end of the piston rod 32 is hinged to the housing 11. A through hole 33 is opened at one end of the piston rod 32 located in the sleeve 31. The through hole 33 is used to connect the sleeve 31 cavities on both sides of the piston end of the piston rod 32. Hydraulic oil is stored in the sleeve 31. By adopting the above solution, when the cover plate 12 is opened, the hydraulic oil below the piston end of the piston rod 32 will enter the area above the piston end of the piston rod 32 through the through hole 33. Since the diameter of the cavity of the sleeve 31 and the diameter of the piston end of the piston rod 32 are both larger than the diameter of the through hole 33, when the liquid below the piston end of the piston rod 32 enters the cavity of the sleeve 31 above the piston end of the piston rod 32 through the through hole 33, fluid damping will be generated, thereby slowing down the speed of the cover plate 12 when it is closed or opened, and avoiding the situation where the cover plate 12 closes too quickly and collides with the housing 11.

[0028] like Figures 7-10 As shown, a protective component 4 is movably sleeved inside the piston rod 32 and located within the through hole 33. The protective component 4 includes a spring rod 41 movably sleeved at the piston end of the piston rod 32. The top end of the spring rod 41 blocks the through hole 33. Hydraulic oil can push the spring rod 41 outward through the through hole 33 and flow upward through the gap between the through hole 33 and the spring rod 41. Hydraulic oil at the top end of the sleeve 31 can flow downward into the sleeve 31 through the flow channel hole 42 and the through hole 43. By adopting the above scheme, when the hydraulic oil enters the piston rod 32 above the piston end through the through hole 33, the cover plate 12 is in the open state. The hydraulic oil will also push the spring rod 41 upward through the through hole 33 and simultaneously enter the cavity of the sleeve 31 above the piston end of the piston rod 32 through the space between the through hole 33 and the spring rod 41, as well as through the flow channel hole 42 and the through hole 43. When the cover plate 12 is closed, the end of the spring rod 41 blocks the through hole 33. The hydraulic oil at the top of the sleeve 31 can only enter the through hole 33 through the flow channel hole 42 and the through hole 43 and flow to the cavity of the sleeve 31 where the upper rod of the piston rod 32 is located. With the above arrangement, the cover plate 12 can be opened quickly, and the closing speed of the cover plate 12 can be slowed down to avoid impact with the top of the housing 11.

[0029] Working principle and usage process of this invention: When in use, the operator opens the cover 12 by rotating it while holding the handle 121. Under the elastic force of the spring on the spring-loaded pin 21, it will engage in the one-way slot 132, thus restricting the downward rotation of the cover 12. After the cover 12 rotates 90 degrees, its other end will be blocked by the arc-shaped stop 131 and will not be able to continue rotating. At this time, the cover 12 remains stable. When resetting, the operator presses the two sets of sliders 22 to move the corresponding inclined blocks 23, causing one side of the inclined block 23 to press against the inner wall of the slot 24, which will cause the spring-loaded pin 21 to disengage from the one-way slot 132. At this time, the operator can rotate the cover 12 downward to reset it. When the cover 12 is about to close, the top of the box 11 will press the slider 22 upward and release the inclined block 23 from pressing the spring-loaded pin 21. At the same time, the spring-loaded pin 21 will also reset to facilitate locking when the cover 12 is opened again.

[0030] When the cover plate 12 is opened, the hydraulic oil below the piston end of the piston rod 32 will enter the area above the piston end of the piston rod 32 through the through hole 33. Since the diameter of the cavity of the sleeve 31 and the diameter of the piston end of the piston rod 32 are both larger than the diameter of the through hole 33, when the liquid below the piston end of the piston rod 32 enters the cavity of the sleeve 31 above the piston end of the piston rod 32 through the through hole 33, fluid damping will be generated, thereby slowing down the speed of the cover plate 12 when it is closed or opened, and preventing the cover plate 12 from colliding with the housing 11 due to excessive speed when it is closed.

[0031] During the process of hydraulic oil entering the piston end of piston rod 32 through through hole 33, cover plate 12 is in the open state. Hydraulic oil also pushes spring rod 41 upward through through hole 33 and enters the cavity of sleeve 31 above piston end of piston rod 32 through the space between through hole 33 and spring rod 41, as well as through flow channel hole 42 and through hole 43. During the closing process of cover plate 12, the end of spring rod 41 blocks through hole 33. Hydraulic oil at the top of sleeve 31 can only enter through hole 33 through flow channel hole 42 and through hole 43 and flow to the cavity of sleeve 31 where piston rod 32 is located. With the above settings, cover plate 12 can be opened quickly, and the closing speed of cover plate 12 can be slowed down to avoid impact with the top of housing 11.

[0032] It should be noted that, in this document, relational terms such as "first" and "second" are used only to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such process, method, article, or apparatus.

[0033] Although embodiments of the invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A CVD wafer coating apparatus with scratch protection function, comprising a wafer coating apparatus (1), characterized in that, Also includes: One-way locking mechanism (2) installed on wafer coating apparatus (1); The wafer coating apparatus (1) includes a housing (11) and a set of lugs (13) fixed thereon, with a cover plate (12) rotatably connected between the two lugs (13). The one-way locking mechanism (2) includes a set of spring pins (21) installed symmetrically on the cover plate (12). The spring pins (21) have slots (24). A slider (22) is movably installed in the cover plate (12) through the cover plate (12) and the slot (24). A wedge (23) is fixed to one side of the slider (22). In the initial state, one side of the slider (22) will abut against one end of the inner wall of the slot (24). The lug (13) is provided with several one-way slots (132), and the spring pin (21) has a tendency to move toward the lug (13) due to its own elastic force, and one end of the spring pin (21) can be inserted into the one-way slot (132) in one direction due to its own elastic force. Pressing the slider (22) moves the inclined block (23) to squeeze the inner wall of the slot (24) and cause the end of the spring pin (21) to disengage from the one-way slot (132).

2. The CVD wafer coating apparatus with scratch protection function according to claim 1, characterized in that: An arc-shaped stop (131) is fixedly connected to the lug (13), and the cover plate (12) can abut against the top of the arc-shaped stop (131) after rotating ninety degrees.

3. The CVD wafer coating apparatus with scratch protection function according to claim 1, characterized in that: A spring telescopic rod (221) is hinged to the middle of one side of the slider (22), and the other end of the spring telescopic rod (221) is hinged to the inside of the cavity of the cover plate (12). The slider (22) is supported by the elastic force of the spring telescopic rod (221) and one end of the slider (22) is exposed outside the cover plate (12).

4. The CVD wafer coating apparatus with scratch protection function according to claim 3, characterized in that: When one end of the inclined block (23) near the box body (11) is exposed to the outside, one side of the inclined block (23) will remain in contact with the inner wall of the slot (24); The inclined block (23) has an inclined surface (231) on it. When the end of the slot (24) cavity abuts against the inclined surface (231), the inclined block (23) can maintain the tendency to move towards the box (11).

5. The CVD wafer coating apparatus with scratch protection function according to claim 4, characterized in that: When the end of the slider (22) close to the housing (11) comes into contact with the housing (11), one end of the spring pin (21) will disengage from the one-way slot (132).

6. The CVD wafer coating apparatus with scratch protection function according to claim 1, characterized in that: A magnetic suction component (5) is installed on the wafer coating device (1); The magnetic suction assembly (5) includes a magnet one (51) and a magnet two (52) respectively fixedly installed on the box body (11) and the cover plate (12). The magnet one (51) and the magnet two (52) attract each other to keep the cover plate (12) in a closed state.

7. The CVD wafer coating apparatus with scratch protection function according to claim 1, characterized in that: A set of telescopic damping rods (3) are arranged symmetrically on the cover plate (12), and the other end of the telescopic damping rods (3) is hinged to the box body (11).

8. The CVD wafer coating apparatus with scratch protection function according to claim 7, characterized in that: The telescopic damping rod (3) includes a sleeve (31) with one end hinged in the cover plate (12), a piston rod (32) is movably sleeved in the sleeve (31), the other end of the piston rod (32) is hinged to the box (11), and a through hole (33) is opened at one end of the piston rod (32) located in the sleeve (31). The through hole (33) is used to connect the sleeve (31) cavity on both sides of the piston end of the piston rod (32). The sleeve (31) contains hydraulic oil.

9. The CVD wafer coating apparatus with scratch protection function according to claim 8, characterized in that: The piston rod (32) is fitted with a protective component (4) located in the through hole (33). The protective component (4) includes a spring rod (41) movably sleeved at the piston end of the piston rod (32). The top of the spring rod (41) will block the through hole (33). Hydraulic oil can push the spring rod (41) outward through the through hole (33) and flow upward through the gap between the through hole (33) and the spring rod (41). The hydraulic oil at the top of the sleeve (31) can flow downward into the sleeve (31) through the flow channel hole (42) and the second through hole (43).

10. The CVD wafer coating apparatus with scratch protection function according to claim 1, characterized in that: A set of handles (121) is installed on the top of the wafer coating apparatus (1).

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