A pneumatically-actuated normally-opened semiconductor fluidic component

Abstract

The present application relates to a kind of pneumatic normally open semiconductor flow control components, comprising: valve body, valve seat, diaphragm, diaphragm gland and executor;Executor includes shell, piston, piston rod and elastic piece, which is sleeved on the piston rod and clamped between the piston and the shell;The end of piston rod protruding from the shell is used to provide the diaphragm with a deforming force, and the elastic piece keeps the upper and lower ends coaxial and the initial state is pre-compressed to provide the piston with a force to move away from the valve body, so that the diaphragm is away from the valve seat and the inlet passage is kept normally open.The present application significantly improves the running stability while maintaining the normally open function, effectively avoids the spring radial instability lateral bending by the design of pre-compressed and coaxial elastic piece, and solves the cleanliness failure risk caused by friction and wear from the source by non-contact elastic piece design, with the advantages of high running stability and good system cleanliness.

Description

Technical Field

[0001] This invention relates to the field of semiconductor gas delivery technology, and in particular to a pneumatically normally open semiconductor flow control component. Background Technology

[0002] In high-precision semiconductor manufacturing processes such as integrated circuit manufacturing and wafer fabrication, the stable delivery and precise switching of special process gases are the core links to ensure process yield. Even slight deviations in gas purity and flow control can lead to wafer defects.

[0003] Pneumatic diaphragm valves achieve complete physical isolation between the medium chamber and the drive chamber through an elastic diaphragm, possessing core advantages such as zero external leakage, no packing seal contamination, and excellent corrosion resistance, making them a key control component in semiconductor specialty gas delivery systems. Normally open pneumatic diaphragm valves automatically maintain pipeline continuity when the gas supply is interrupted, ensuring safe venting of the process and depressurization of the system under fault conditions. Therefore, they are widely used in core scenarios with extremely high reliability requirements, such as main process pipelines and safety venting circuits.

[0004] However, the actuators of existing pneumatic normally open diaphragm valves generally adopt a direct piston-spring-valve stem drive scheme, which has multiple technical defects in its power transmission mechanism that make it difficult to adapt to advanced manufacturing processes: 1. Insufficient operational stability manifests as large dispersion and difficulty in ensuring consistency of the output force value of the return spring. During high-frequency reciprocating compression, the spring is prone to radial instability and lateral bending, resulting in a decrease in the smoothness of the transmission mechanism and impact and off-center load phenomena in the valve stem opening and closing action. When the return spring is damaged and fails, the valve stem cannot perform the opening and closing function.

[0005] 2. The risk of cleanliness failure caused by friction and wear is particularly prominent. The transmission mating surfaces mostly adopt the form of hard metal contact. Long-term reciprocating motion generates wear particles. Especially when the return spring fails, the valve stem cannot return to its original position and retain the top column diaphragm, which can easily lead to diaphragm rupture and damage. At this time, the lubricating medium and particles in the cylinder drive chamber diffuse to the medium side through the mating gap, causing high-purity special gas pollution, which directly threatens the wafer process yield.

[0006] 3. Significant risks exist regarding the cost and supply of core materials. The reliance on imported raw materials for critical components such as return springs leads to high procurement costs, and the stability of raw material supply is affected by fluctuations in the international supply chain, hindering mass production control and cost management. These issues severely restrict the reliability and lifespan of semiconductor valves in advanced manufacturing processes. Summary of the Invention

[0007] Therefore, the purpose of this invention is to provide a pneumatically operated normally open semiconductor flow control component, which has the advantages of high operational stability and good system cleanliness.

[0008] To solve the above-mentioned technical problems, the present invention provides a pneumatic normally open semiconductor flow control component comprising: a valve body having a concave valve cavity and having an inlet channel and an outlet channel communicating with the valve cavity; a valve seat disposed in the inlet channel; a diaphragm for sealing and isolating the valve cavity and opening and closing the inlet channel by deforming and conforming to or moving away from the valve seat; a diaphragm cap disposed at one end in the valve cavity and having an end face structure matching the diaphragm to press the diaphragm from the outer edge; and an actuator connected to the diaphragm cap and extending out of the valve cavity at the other end for applying a force to deform the diaphragm; the actuator includes an internal cavity and connected to the diaphragm cap. The system comprises a housing, a piston disposed inside the cavity, a piston rod disposed on the bottom surface of the piston and extending downward out of the housing, and an elastic element sleeved on the piston rod and sandwiched between the piston and the housing. The piston and the housing are sealed together to form an air intake space above the piston, thereby driving the piston rod to move axially. One end of the piston rod extending out of the housing is used to provide a force to the diaphragm to deform it. The elastic element is kept coaxial at both ends and initially in a pre-compressed state to provide a force to the piston to make it move away from the valve body, thereby moving the diaphragm away from the valve seat and keeping the inlet channel normally open.

[0009] In one embodiment of the present invention, the bottom wall of the housing is provided with a through hole for the piston rod to pass through, the size of the through hole is adapted to the piston rod, and a first receiving groove is further extended radially outward within a predetermined depth above the bottom wall of the through hole for the lower end of the elastic element to be embedded, the radial dimension of the first receiving groove is adapted to the elastic element.

[0010] In one embodiment of the present invention, a second receiving groove is provided on the bottom wall of the piston, extending radially and axially in the region surrounding the outer periphery of the piston rod, respectively. The radial dimension of the second receiving groove is adapted to the elastic member so as to limit and guide the elastic member from the other end.

[0011] In one embodiment of the present invention, a fixing part is provided on the bottom wall of the first receiving groove and / or the second receiving groove, and the end of the elastic member is embedded in the fixing part to keep the upper end and / or lower end of the elastic member fixed so that the elastic member is kept in a non-contact state with the outer periphery of the piston rod.

[0012] In one embodiment of the present invention, the fixing part is an embedded groove disposed on the bottom wall of the first receiving groove and / or the second receiving groove, or the fixing part is a washer with a preset roughness sandwiched between the two ends of the elastic member and the bottom wall of the first receiving groove or the second receiving groove.

[0013] In one embodiment of the present invention, the bottom wall of the first receiving groove has a planar structure on the side facing the elastic member to form an abutting surface against the elastic member; the bottom wall of the through hole has an outward-facing inclined structure on the other side to form a reinforcing surface to enhance the load-bearing strength of the bottom wall against the elastic member and the piston.

[0014] In one embodiment of the present invention, the housing is provided with a fastening hole outside the through hole, and the inner wall of the fastening hole is provided with an internal thread structure. The top of the diaphragm gland is provided with a mounting part, and the outer periphery of the mounting part is provided with an external thread structure. The internal thread structure and the external thread structure are adapted to make the housing and the diaphragm gland threadedly fastened together. The housing is provided with a vent hole radially at the upper end of the fastening hole near the through hole, and the vent hole communicates with the space below the piston through the through hole.

[0015] In one embodiment of the present invention, the housing is provided with a locking hole in the radial direction in the axial region where the fastening hole is located and at a position that avoids the vent hole. A locking member is provided in the locking hole, and the locking member abuts against the diaphragm cover to lock the housing and prevent the housing from separating from the diaphragm cover.

[0016] In one embodiment of the present invention, a threaded structure is provided in the locking hole, and the locking member includes a spherical member that can be accommodated in the locking hole and can be deformed, and a screw that is fastened to the locking hole by an external thread and applies a radial force toward the spherical member to deform it and abut against the external threaded structure of the diaphragm cover.

[0017] In one embodiment of the present invention, a top post is provided inside the diaphragm cover, and the top post is located above the diaphragm. The piston rod extends through the end of the housing into the diaphragm cover until it contacts the top surface of the top post. During the downward extension of the piston rod, the top post is pushed to press against the diaphragm so that the diaphragm deforms and fits against the valve seat.

[0018] The pneumatic normally open semiconductor flow control component of the present invention is designed to be pre-compressed and coaxially mounted on the periphery of the piston rod, which effectively avoids radial instability and lateral bending of the elastic element. While maintaining the normally open function, it significantly improves the operational stability of the flow control component and avoids the risk of cleanliness failure caused by wear due to improper force acting on the diaphragm. It has the advantages of high operational stability and good system cleanliness. Attached Figure Description

[0019] To more clearly illustrate the technical solutions of the embodiments of this application, the drawings used in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0020] Figure 1 This is an overall cross-sectional view of the pneumatic normally open semiconductor flow control component of the present invention; Figure 2 This is a partial cross-sectional view of the pneumatic normally open semiconductor flow control component of the present invention; Figure 3 This is a partially enlarged view of the pneumatic normally open semiconductor flow control component of the present invention; Figure 4 This is a cross-sectional view of the housing of the present invention; Figure 5 This is a schematic diagram of the diaphragm cap structure of the present invention.

[0021] Explanation of reference numerals in the accompanying drawings: Valve body 1, Valve cavity 11, Inlet channel 12, Outlet channel 13, Valve seat 2, Diaphragm 3, Diaphragm gland 4, Mounting part 41, Actuator 5, Cavity 51, Housing 52, Through hole 521, First receiving groove 522, Planar structure 523, Inclined structure 524, Air inlet 525, Fastening hole 526, Vent hole 527, Locking hole 528, Piston 53, Second receiving groove 531, Piston rod 54, Elastic element 55, Fixing part 551, Locking element 6, Spherical element 61, Screw 62, Top column 7. Detailed Implementation

[0022] The embodiments of this application will now be described in detail with reference to the accompanying drawings.

[0023] The following specific examples illustrate the implementation of this application. Those skilled in the art can easily understand other advantages and effects of this application from the content disclosed in this specification. Obviously, the described embodiments are only a part of the embodiments of this application, and not all of them. This application can also be implemented or applied through other different specific embodiments, and the details in this specification can also be modified or changed based on different viewpoints and applications without departing from the spirit of this application. It should be noted that, in the absence of conflict, the following embodiments and features in the embodiments can be combined with each other. Based on the embodiments in this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0024] It should be noted that the following description covers various aspects of embodiments within the scope of the appended claims. It will be apparent that the aspects described herein can be embodied in a wide variety of forms, and any particular structure and / or function described herein is merely illustrative. Based on this application, those skilled in the art will understand that one aspect described herein can be implemented independently of any other aspect, and two or more of these aspects can be combined in various ways. For example, any number and aspects set forth herein can be used to implement the device and / or practice the method. Additionally, this device and / or method can be implemented using structures and / or functionalities other than one or more of the aspects set forth herein.

[0025] It should also be noted that the illustrations provided in the following embodiments are only schematic representations of the basic concept of this application. The drawings only show the components related to this application and are not drawn according to the actual number, shape and size of the components in the actual implementation. In the actual implementation, the form, quantity and proportion of each component can be arbitrarily changed, and the layout of the components may also be more complex.

[0026] Additionally, specific details are provided in the following description to facilitate a thorough understanding of the examples. However, those skilled in the art will understand that practice can be carried out without these specific details.

[0027] Existing pneumatic normally open diaphragm valves generally employ a "piston-spring-stem direct connection" transmission scheme. This power transmission mechanism suffers from several technical defects that make it difficult to adapt to advanced manufacturing processes: insufficient operational stability, the return spring is prone to radial instability and lateral bending, resulting in poor smoothness of the transmission mechanism, and the valve stem's opening and closing actions are susceptible to impact and off-center loading. Furthermore, the transmission mating surfaces are mostly hard metal contacts, which can easily generate wear particles over long-term reciprocating motion. Additionally, lubricating media and wear particles may diffuse towards the media side, causing high-purity specialty gas contamination and affecting wafer process yield. Moreover, key components rely on imported raw materials, resulting in high procurement costs and insufficient supply stability.

[0028] In response, this application proposes a pneumatically normally open semiconductor flow control component, referring to... Figure 1 and 2As shown, it includes: a valve body 1 with a concave valve cavity 11 and an inlet channel 12 and an outlet channel 13 communicating with the valve cavity 11; a valve seat 2 disposed in the inlet channel 12; a diaphragm 3 for sealing and isolating the valve cavity 11 and opening and closing the inlet channel 12 by deforming and fitting against or moving away from the valve seat 2; a diaphragm cap 4 with one end disposed in the valve cavity 11 and having an end face structure matching the diaphragm 3 to press the diaphragm 3 from the outer edge; and an actuator 5 connected to the diaphragm cap 4 and extending out of the valve cavity 11 at the other end for applying a force to deform the diaphragm 3; the actuator 5 includes a housing 52 with an internal cavity 51 and connected to the diaphragm cap 4, and a housing disposed in the cavity 51. The piston 53, the piston rod 54 located on the bottom surface of the piston 53 and extending downward out of the housing 52, and the elastic member 55 sleeved on the piston rod 54 and sandwiched between the piston 53 and the housing 52; the piston 53 and the housing 52 are sealed together to form an air intake space above the piston 53, thereby pushing the piston rod 54 to move axially; the end of the piston rod 54 extending out of the housing 52 is used to provide a force to the diaphragm 3 to deform it, and the elastic member 55 is kept coaxial at both ends and initially in a pre-compressed state to provide a force to the piston 53 to make it move away from the valve body 1, thereby moving the diaphragm 3 away from the valve seat 2 and keeping the inlet channel 12 in a normally open state.

[0029] The valve body 1 can be integrally formed from metal, with a valve cavity 11, inlet channel 12, and outlet channel 13 formed internally through casting or machining. The valve cavity 11 can be designed as circular or square to accommodate different diaphragm 3 shapes. The inlet channel 12 and outlet channel 13 can be straight or curved and can be provided with different connection interfaces, such as flange interfaces or threaded interfaces. The valve seat 2 is an annular structure that is independently machined and embedded or welded into the inlet channel 12. For example, the valve seat 2 can be made of the same or different material as the valve body 1, and its sealing surface in contact with the diaphragm 3 can be polished to improve sealing performance. The installation position of the valve seat 2 can be adjusted according to the fluid control requirements to optimize the stroke and sealing effect of the diaphragm 3. The diaphragm 3 is usually made of cobalt-based alloy or nickel-based alloy material, and its shape can be an arch with a circular or elliptical opening. The diaphragm 3 is pressed and fixed by its periphery, and its central region undergoes axial deformation under the action of the actuator 5. When the diaphragm 3 deforms downwards and fits against the valve seat 2, the inlet channel 12 is closed; when the diaphragm 3 deforms upwards and moves away from the valve seat 2, the inlet channel 12 is opened. The material selection and thickness design of the diaphragm 3 affect its flexibility and pressure resistance. The diaphragm gland 4 can be an annular or disc-shaped component, one end of which extends into the valve cavity 11 and has a pressing surface that matches the outer edge of the diaphragm 3, thereby firmly pressing the outer edge of the diaphragm 3 against the corresponding structure of the valve body 1. The actuator 5 converts pneumatic energy into axial thrust on the diaphragm 3 through its internal mechanical structure, causing it to deform.

[0030] Furthermore, the housing 52 can be made of metal, with an internal cavity 51. The piston 53 is a disc-shaped component that can slide axially within the cavity 51. The piston rod 54 is typically a cylindrical rod, with one end fixed to the bottom surface of the piston 53 and the other end extending downward out of the housing 52. The elastic element 55 can be a coil spring or a disc spring assembly, which is fitted around the outer periphery of the piston rod 54 and held by the bottom surface of the piston 53 and the bottom wall of the housing 52. A small gap is maintained between the outer diameter of the piston 53 and the inner diameter of the housing 52, and a sealing ring is installed by providing one or more sealing grooves around the periphery of the piston 53, thereby forming a sealed air intake space above the piston 53. When gas is introduced into this air intake space, the gas pressure acts on the upper surface of the piston 53, generating a downward thrust that drives the piston 53 and piston rod 54 to move axially. One end of the piston rod 54 extending out of the housing 52 can directly contact the central region of the diaphragm 3, or indirectly contact the diaphragm 3 through an intermediate transmission component (e.g., a push rod). When the piston rod 54 moves downward, its end applies pressure to the diaphragm 3, causing the diaphragm 3 to deform downward and fit against the valve seat 2, thereby closing the inlet channel 12. When the piston rod 54 moves upward, the diaphragm 3 returns to its original shape under its own elastic force, moves away from the valve seat 2, and opens the inlet channel 12.

[0031] Furthermore, the elastic element 55 is pre-compressed during installation, placing it in a pre-compressed state. This pre-compression ensures that the elastic element 55 always exerts an upward restoring force on the piston 53, even if it tends to move away from the valve body 1. When the actuator 5 is not pneumatically driven, the restoring force of the elastic element 55 pushes the piston 53 and piston rod 54 upward, moving the diaphragm 3 away from the valve seat 2, thereby ensuring that the inlet channel 12 remains normally open.

[0032] This application effectively suppresses radial instability and lateral bending of the elastic element 55 during reciprocating motion by sleeved on the piston rod 54 and clamped between the piston 53 and the housing 52, thus significantly improving the smoothness and reliability of the transmission mechanism.

[0033] Furthermore, the bottom wall of the housing 52 is provided with a through hole 521 through which the piston rod 54 passes. The size of the through hole 521 is adapted to the piston rod 54. A first receiving groove 522 is provided radially outward within a preset depth above the bottom wall of the through hole 521 for the lower end of the elastic member 55 to be embedded. The radial dimension of the first receiving groove 522 is adapted to the elastic member 55.

[0034] Specifically, the through hole 521 is a through hole formed on the bottom wall of the housing 52. Its main function is to provide an axial path for the piston rod 54 to extend from the inside of the actuator 5 to the outside, thereby connecting with the diaphragm gland 4 or the diaphragm 3 and applying force. The size of the through hole 521 is adapted to the piston rod 54, meaning that there is a suitable fitting clearance between the inner diameter of the through hole 521 and the outer diameter of the piston rod 54. This adaptation aims to ensure that the piston rod 54 can slide smoothly and axially within the through hole 521, while effectively limiting its radial wobble. The first receiving groove 522 is a groove structure formed in a specific area of ​​the bottom wall of the housing 52, above the through hole 521, extending radially outward. Its core function is to provide a precise positioning and limiting space for the lower end of the elastic element 55, preventing the elastic element 55 from radially shifting or bending during operation. The radial dimension of the first receiving groove 522 is adapted to the elastic member 55, meaning there is a suitable fit between the inner diameter of the first receiving groove 522 and the outer diameter of the elastic member 55. This fit ensures that the lower end of the elastic member 55 can be tightly embedded in the first receiving groove 522, thereby effectively limiting its radial movement. For example, the outer diameter of the elastic member 55 can be designed to be slightly smaller than the inner diameter of the first receiving groove 522, leaving a small gap for easy installation, while the groove wall provides radial constraint on the elastic member 55.

[0035] The above technical solution solves the problem of friction and wear caused by radial contact between the elastic element 55 and the piston rod 54, significantly improving the smoothness and reliability of the transmission mechanism, thereby significantly improving the service life of the components and greatly extending the overall service life of the semiconductor flow control components. At the same time, it avoids the generation of wear particles and ensures the cleanliness requirements during long-term operation.

[0036] Furthermore, a second receiving groove 531 is provided on the bottom wall of the piston 53 in the radial and axial directions in the area surrounding the outer periphery of the piston rod 54, respectively. The radial dimension of the second receiving groove 531 is adapted to the elastic member 55 so as to limit and guide the elastic member 55 from the other end.

[0037] Specifically, the second receiving groove 531 refers to a groove structure formed by machining at the bottom of the piston 53, surrounding the outer area of ​​the piston rod 54. This groove extends both radially and axially, designed to provide a constrained mounting space for the elastic element 55. For example, the second receiving groove 531 can be a cylindrical groove with a specific depth and diameter, its inner wall smooth to reduce friction with the elastic element 55. Simultaneously, "fit" means that there is a precise fit between the radial dimension of the second receiving groove 531 and the outer diameter of the elastic element 55. This fit aims to ensure that the radial position of the elastic element 55 is effectively constrained during axial movement. For example, the inner diameter of the second receiving groove 531 can be slightly larger than the outer diameter of the elastic element 55, forming a small gap that allows the elastic element 55 to freely expand and contract axially while preventing significant radial offset or lateral bending.

[0038] Through the above technical solution, when one end of the elastic element 55 is limited by the first receiving groove 522 in the housing 52, its other end is precisely limited by the second receiving groove 531 on the piston 53. This double-end limiting structure ensures that the elastic element 55 always maintains axial alignment during compression and extension, avoiding unexpected contact friction between it and the outer periphery of the piston rod 54. Therefore, by effectively guiding the movement trajectory of the elastic element 55, the operational smoothness of the transmission mechanism is significantly improved, thereby extending the service life of the elastic element 55 and the entire actuator 5, and thus improving the reliability of the pneumatic normally open semiconductor flow control component; at the same time, it reduces wear particles generated by metal friction, thereby reducing the risk of high-purity special gas contamination and ensuring the cleanliness requirements of the semiconductor manufacturing process.

[0039] Furthermore, a fixing part 551 is provided on the bottom wall of the first receiving groove 522 and / or the second receiving groove 531, and the end of the elastic member 55 is embedded in the fixing part 551 to keep the upper end and / or lower end of the elastic member 55 fixed so that the elastic member 55 is kept in a non-contact state with the outer periphery of the piston rod 54.

[0040] Specifically, the fixing part 551 is a structure used to position and fix the end of the elastic member 55. The fixing part 551 can be designed as an integral structure with the bottom wall of the first receiving groove 522 and / or the second receiving groove 531, such as a protrusion, a limiting ring, or a groove. By inserting, snapping, or pressing the end of the elastic member 55, such as the end coil of a coil spring, into the fixing part 551, an effective connection between the elastic member 55 and the bottom wall of the receiving groove is achieved. This insertion method can be mechanical, such as by shape matching to achieve engagement, or by pressing the elastic member 55 into the groove of the fixing part 551 through its own elastic deformation. By fixing the end of the elastic member 55, the radial degree of freedom of the elastic member 55 during axial compression can be effectively restricted, keeping it always in a predetermined central position, i.e., coaxial with the piston rod 54. This fixing can be single-end fixing, i.e., fixing only the upper or lower end of the elastic element 55 to meet basic stability requirements; or it can be double-end fixing, i.e., fixing both the upper and lower ends of the elastic element 55 simultaneously to provide higher radial stability, further ensuring that the elastic element 55 can operate stably under various working conditions. By ensuring that the ends of the elastic element 55 are firmly fixed, radial displacement or lateral bending of the elastic element 55 during reciprocating motion and force deformation is avoided. This elimination of radial displacement fundamentally eliminates the possibility of frictional contact between the elastic element 55 and the outer periphery of the piston rod 54. In semiconductor flow control components, maintaining this stable non-contact state for a long time allows the elastic element 55 and the piston rod 54 to always be in a wear-free operating environment, significantly reducing the wear rate of the core moving pair, delaying the performance degradation of the component from the root, and ultimately achieving a significant improvement in the overall service life of the semiconductor flow control component. At the same time, maintaining this non-contact state can prevent the generation of wear particles and maintain the cleanliness of the component's interior.

[0041] The above technical solution achieves physical anchoring of the end of the elastic element 55. This anchoring effect restricts the radial displacement of the elastic element 55 during compression from the source, ensuring that the elastic element 55 can always maintain the preset coaxiality when subjected to axial force, effectively preventing the elastic element 55 from lateral bending or shaking due to uneven force.

[0042] Furthermore, the fixing part 551 is an embedded groove provided on the bottom wall of the first receiving groove 522 and / or the second receiving groove 531, or the fixing part 551 is a washer with a preset roughness sandwiched between the two ends of the elastic member 55 and the bottom wall of the first receiving groove 522 or the second receiving groove 531.

[0043] The groove refers to a recessed structure machined on the bottom wall of the first receiving groove 522 and / or the second receiving groove 531 to accommodate and fix the end of the elastic member 55. The shape and size of the groove typically match the end structure of the elastic member 55; for example, it can be an annular groove. The washer is a ring-shaped or disc-shaped component with a specially treated surface to have a predetermined roughness. The washer is placed between the end of the elastic member 55 and the bottom wall of the first receiving groove 522 or the second receiving groove 531, increasing contact friction through its rough surface, thereby fixing the end of the elastic member 55.

[0044] Through the above technical solutions, when the fixing part 551 adopts a groove structure, the end of the elastic element 55 is physically embedded and locked in the groove. This effectively restricts the radial and axial minute displacements of the end of the elastic element 55, ensuring that the elastic element 55 maintains precise axial positioning during reciprocating compression. This prevents the elastic element 55 from radially shifting or tilting due to vibration or uneven force, fundamentally eliminating the possibility of contact between the elastic element 55 and the piston rod 54. When the fixing part 551 uses a washer with a preset roughness, the washer, through its high-friction surface, makes close contact with the end of the elastic element 55 and the bottom wall of the receiving groove, significantly increasing the static friction of the contact surface. This effectively prevents the end of the elastic element 55 from sliding under force or vibration, and also stabilizes the axial movement trajectory of the elastic element 55. Both fixing methods effectively ensure a non-contact state between the elastic element 55 and the piston rod 54, thereby avoiding the generation of metal wear particles and significantly reducing the risk of cleanliness failure.

[0045] Reference Figure 3 As shown, the bottom wall of the first receiving groove 522 has a planar structure 523 on the side facing the elastic member 55 to form an abutting surface against the elastic member 55; the bottom wall of the through hole 521 has an inclined structure 524 that is inclined from the outside to the inside and from the bottom to the top to form a reinforcing surface to enhance the load-bearing strength of the bottom wall on the elastic member 55 and the piston 53.

[0046] Specifically, the bottom wall of the first receiving groove 522 has a planar structure 523 on the side facing the elastic member 55, designed to provide a flat and stable support surface for the lower end of the elastic member 55. When the elastic member 55 is subjected to pre-compression force and subsequent working load, the uniform contact surface ensures that the force is transmitted along the axial direction of the elastic member 55, avoiding local stress concentration or tilting of the elastic member 55 due to uneven contact. At the same time, the other side of the bottom wall of the through hole 521 has an inclined surface structure 524 that slopes from the outside to the inside and from the bottom to the top. This is a structural reinforcement design that effectively increases the moment of inertia and overall stiffness of the bottom wall of the housing 52 in the area around the through hole 521 by changing the geometric distribution of the material. Its function is to disperse the impact load generated during the movement of the piston 53 and the pre-compression force of the elastic member 55, preventing the bottom wall from deforming or fatigue failure under long-term stress.

[0047] Through the above technical solution, this application has optimized the structure of the bottom wall of the housing 52, significantly improving the mechanical load-bearing capacity and operational stability of the transmission mechanism. The planar structure 523 serves as the contact surface, while the inclined structure 524 serves as the reinforcing surface. These two features work synergistically, optimizing the installation conditions of the elastic element 55 through the planar contact surface and enhancing the overall structural strength of the bottom wall of the housing 52 through the inclined reinforcing surface. This addresses the structural fatigue and off-center loading issues that easily occur in the transmission mechanism during long-term high-frequency operation from a mechanical structural perspective. Consequently, it ensures the accuracy and sealing performance of the diaphragm 3's opening and closing action, improves the overall reliability and service life of the flow control components, and effectively reduces the risk of cleanliness failure.

[0048] Reference Figure 4 and 5 As shown, the housing 52 has a fastening hole 526 outside the through hole 521. The inner wall of the fastening hole 526 has an internal thread structure. The top of the diaphragm cover 4 has a mounting part 41. The outer periphery of the mounting part 41 has an external thread structure. The internal thread structure and the external thread structure are adapted to make the housing 52 and the diaphragm cover 4 threadedly fastened together. The housing 52 has a vent hole 527 radially opened at the upper end of the fastening hole 526 near the through hole 521. The vent hole 527 is connected to the space below the piston 53 through the through hole 521.

[0049] Specifically, the fastening hole 526 is a structure on the housing 52 used to accommodate and connect the mounting portion 41 of the diaphragm gland 4. The mounting portion 41 is a specially designed part on the top of the diaphragm gland 4 for connecting the actuator 5. Threaded fastening connection refers to the tight and detachable connection of the housing 52 and the diaphragm gland 4 through the engagement of internal and external threads. This threaded connection method provides high connection strength and rigidity, ensuring that the housing 52 and the diaphragm gland 4 are not prone to loosening or relative displacement during operation. Meanwhile, the vent hole 527 is a channel opened on the housing 52, whose main function is to achieve pressure balance in the space below the piston 53. When the actuator 5 is working, the piston 53 moves axially within the cavity 51, and the gas volume in the space below it changes. Without an effective exhaust or ventilation structure, the gas in the space below the piston 53 may be compressed or expanded, forming back pressure or negative pressure, thereby hindering the smooth movement of the piston 53 and affecting the response speed and stability of the actuator 5. The vent 527 communicates with the space below the piston 53 via the through hole 521, allowing this space to connect with the external environment or a pressure equalization chamber. When the piston 53 moves downward, gas in the space below it can be discharged through the vent 527; when the piston 53 moves upward, external gas can enter through the vent 527, thus preventing abnormal pressure accumulation in the space below the piston 53. The vent 527 can be a simple circular hole or a channel with a specific shape (such as elliptical or grooved) to optimize gas flow efficiency.

[0050] Through the above technical solution, the housing 52 and the diaphragm gland 4 are connected by a threaded fastening. This connection method not only provides sufficient mechanical strength and rigidity, effectively preventing loosening, but also ensures high-precision coaxiality between the actuator 5 and the valve body 1 through the precise fit of the threads. The presence of the vent 527 eliminates the air pressure resistance effect that may occur during the axial movement of the piston 53, ensuring the smooth movement of the piston 53 and avoiding sluggish action caused by back pressure changes. Therefore, the flow control component of this application can maintain a faster response speed and higher operational stability during frequent opening and closing, significantly improving the overall performance and service life of the semiconductor flow control component.

[0051] Reference Figure 2 and 3 As shown, the housing 52 has a locking hole 528 radially opened in the axial region where the fastening hole 526 is located and at a position that avoids the vent hole 527. A locking member 6 is provided in the locking hole 528. The locking member 6 abuts against the diaphragm cover 4 to lock the housing 52 and prevent the housing 52 from separating from the diaphragm cover 4.

[0052] Specifically, a locking hole 528 is radially formed on the housing 52. This locking hole 528 is a hole for accommodating the locking element 6, designed to achieve secondary locking of the connection between the housing 52 and the diaphragm cover 4. The locking hole 528 is a simple through hole, the inner wall of which can be smooth or threaded to accommodate different types of locking elements 6. Simultaneously, the locking hole 528 avoids the vent hole 527, meaning that the opening of the locking hole 528 will not obstruct the airflow passage of the vent hole 527, thus ensuring that the normal pneumatic function of the actuator 5 is not affected. The locking element 6 can be a simple pin or bolt, fixed in the locking hole 528 by interference fit or threaded connection, and protruding from the opening to abut against the diaphragm cover 4. The locking element 6 abuts against the diaphragm cover 4 to lock the housing 52, preventing the housing 52 from detaching from the diaphragm cover 4. This contact is the core function of the locking element 6, which prevents relative movement between the housing 52 and the diaphragm cover 4 through physical contact or mechanical interference, especially rotational loosening or axial separation.

[0053] Through the above technical solution, a radial locking mechanism is additionally introduced on the basis of the threaded connection between the housing 52 and the diaphragm gland 4. A locking hole 528 is opened in the axial region of the fastening hole 526 in the housing 52, and a locking element 6 is installed, allowing the locking element 6 to directly abut against the diaphragm gland 4. This abutment forms a mechanical limit, effectively resisting the vibration generated by the reciprocating motion of the piston 53 inside the actuator 5, as well as the rotational torque and axial impact caused by air pressure fluctuations. This dual locking mechanism significantly enhances the overall rigidity and stability of the connection between the housing 52 and the diaphragm gland 4, effectively preventing the threaded connection from loosening during long-term use, thereby ensuring the valve's sealing performance and structural integrity. This is crucial for the reliable operation of semiconductor flow control components under complex operating conditions, improving the operational safety and service life of the equipment.

[0054] Reference Figure 2 and 3 As shown, a threaded structure is provided in the locking hole 528. The locking member 6 includes a spherical member 61 that can be accommodated in the locking hole 528 and can be deformed, and a screw 62 that is fastened to the locking hole by an external thread and applies a radial force toward the spherical member 61 to deform it and abut against the external threaded structure of the diaphragm cover 4.

[0055] Specifically, the inner wall of the locking hole 528 is provided with a threaded structure. This threaded structure provides precise guidance and fixation for the screw 62 to be screwed in, and allows its axial position to be adjusted through the threaded engagement, thereby controlling the radial force applied to the spherical component 61. The spherical component 61 in the locking component 6 is a component with a spherical appearance that can undergo elastic or plastic deformation under force. Its deformable characteristic is key to achieving flexible locking. For example, the spherical component 61 can be made of a relatively soft metal material, such as brass, mild steel, or aluminum alloy, which undergoes slight plastic deformation under force, thereby better conforming to the surface of the locked component. The spherical design of the spherical component 61 allows it to uniformly transmit pressure when subjected to force in any direction and facilitates effective contact with the external threaded structure of the screw 62 and the diaphragm cap 4. When the screw 62 is screwed in, its end gradually contacts and presses against the spherical component 61, applying a radial force to it. This radial force causes the spherical part 61 to deform and be pushed against the diaphragm gland 4, allowing it to fit tightly into the external thread structure on the mounting portion 41 of the diaphragm gland 4. The screw depth of the screw 62 can precisely control the degree of deformation of the spherical part 61 and the locking force on the diaphragm gland 4. For example, the screw 62 can be an internal hex screw or a slotted screw for easy installation and adjustment; or, a screw with a lock washer can be used to further improve the stability of the locking.

[0056] Through the above technical solution, the deformable spherical component 61 can undergo elastic or plastic deformation when squeezed by the screw 62, thereby increasing the contact area with the external thread structure of the diaphragm cap 4 and achieving surface contact instead of traditional point or line contact. This flexible contact effectively disperses the locking stress, avoids damage caused by local stress concentration, and significantly improves the reliability and durability of the locking structure. At the same time, the deformation of the spherical component 61 allows it to be tightly embedded in the external thread structure of the diaphragm cap 4, forming a stable mechanical interlock, effectively resisting long-term vibration and pressure fluctuations, and preventing relative displacement or separation between the housing 52 and the diaphragm cap 4 under complex working conditions, thereby ensuring the long-term stable operation and process safety of the pneumatically operated normally open semiconductor flow control component.

[0057] Reference Figure 1 As shown, the diaphragm cover 4 has a top post 7 inside, and the top post 7 is located above the diaphragm 3. The piston rod 54 extends through the end of the housing 52 into the diaphragm cover 4 until it contacts the top surface of the top post 7. During the downward extension of the piston rod 54, it pushes the top post 7 to press against the diaphragm 3, so that the diaphragm 3 deforms and fits against the valve seat 2.

[0058] Specifically, the top post 7, as an intermediate transmission component between the piston rod 54 and the diaphragm 3, functions to evenly transmit the axial thrust of the piston rod 54 to the diaphragm 3. The end of the piston rod 54 can be designed as a flat surface, an arc surface, or a ball head to form a stable contact with the top surface of the top post 7, reducing stress concentration. Simultaneously, the clearance between the piston rod 54 and the diaphragm gland 4 should be properly controlled to ensure smooth movement of the piston rod 54 and prevent the generation of wear particles.

[0059] Through the above technical solution, a top post 7 is introduced as an intermediate transmission medium between the piston rod 54 and the diaphragm 3, constructing an indirect contact transmission path. This design effectively solves the problems of uneven force and insufficient deformation control precision that may occur when the piston rod 54 directly acts on the diaphragm 3, ensuring smooth deformation of the diaphragm 3 and reliable contact with the valve seat 2 during the opening and closing process. At the same time, the physical isolation effect of the top post 7 avoids direct friction and wear between the piston rod 54 and the diaphragm 3, significantly reducing the risk of wear particle generation, thereby improving the cleanliness and sealing reliability of the semiconductor flow control component and extending its service life.

[0060] Reference Figure 2 As shown, the piston 53 has a sealing groove 533 on its periphery for installing the sealing ring 532, so that a sealed chamber is formed above the piston 53. The top surface of the housing 52 is provided with an air inlet 525 corresponding to the center position of the piston 53, so as to introduce gas to drive the piston 53 to move the piston rod 54, thereby applying a force to the diaphragm 3.

[0061] Specifically, the sealing groove 533 refers to a groove structure machined on the outer circumferential surface of the piston 53, whose main function is to accommodate and fix the sealing ring 532. The shape and size of this groove are usually matched with the type of sealing ring 532 selected, such as a rectangular groove, a V-shaped groove, or an O-shaped groove. Its design aims to ensure that the sealing ring 532 can stably maintain its position and sealing performance during the movement of the piston 53. The sealing ring 532 is an elastic element, usually made of elastic materials such as rubber, fluororubber, and polytetrafluoroethylene (PTFE), which has good wear resistance, corrosion resistance, and high temperature resistance. Its function is to form a tight seal between the piston 53 and the inner wall of the housing 52, preventing gas from leaking from the upper area of ​​the piston 53 to the lower area, thereby ensuring that a sealed chamber is formed above the piston 53. The air inlet 525 refers to a channel opened on the top surface of the housing 52 for introducing driving gas. The position of the air inlet 525 is designed in an area corresponding to the center position of the piston 53, aiming to ensure that the driving gas can act evenly and symmetrically on the top surface of the piston 53. This center-intake design helps prevent the piston 53 from being unbalanced or tilted under load, thus ensuring that the piston 53 and its connected piston rod 54 can move smoothly and linearly along a predetermined axis. The intake port 525 can be a simple circular hole or a hole with a flow guide structure to optimize airflow distribution.

[0062] Under the stable driving force, the piston rod 54 can push the diaphragm 3 to deform in a more uniform and controllable manner, making it precisely fit with the valve seat 2. This effectively avoids uneven force distribution or localized stress concentration on the diaphragm 3, significantly reducing wear and fatigue of the diaphragm 3 during frequent opening and closing, thereby extending the service life of the diaphragm 3 and improving the sealing reliability of the valve. In addition, the optimized sealing structure and stable driving process also reduce the generation of mechanical wear particles, further ensuring the cleanliness requirements of the semiconductor flow control components.

[0063] Obviously, the above embodiments are merely illustrative examples for clear explanation and are not intended to limit the implementation. Those skilled in the art will recognize that other variations or modifications can be made based on the above description. It is neither necessary nor possible to exhaustively list all possible implementations here. However, obvious variations or modifications derived therefrom are still within the scope of protection of this invention.

Claims

1. A pneumatically operated normally open semiconductor flow control component, comprising: A valve body having a concave valve cavity and having an inlet channel and an outlet channel communicating with the valve cavity; a valve seat disposed within the inlet channel; a diaphragm for sealing and isolating the valve cavity and opening and closing the inlet channel by deforming and conforming to or moving away from the valve seat; a diaphragm cap disposed at one end within the valve cavity and having an end face structure matching the diaphragm to press the diaphragm from its outer edge; and an actuator connected to the diaphragm cap and extending out of the valve cavity at the other end for applying a force to deform the diaphragm, characterized in that... The actuator includes a housing with an internal cavity and connected to the diaphragm cover, a piston disposed inside the cavity, a piston rod disposed on the bottom surface of the piston and extending downward out of the housing, and an elastic member sleeved on the piston rod and sandwiched between the piston and the housing; The piston and the housing are sealed together to form an intake space above the piston, thereby pushing the piston rod to move axially; one end of the piston rod extends out of the housing to provide a force to the diaphragm to deform it; the elastic element is kept coaxial at both ends and initially in a pre-compressed state to provide a force to the piston to make it move away from the valve body, thereby moving the diaphragm away from the valve seat and keeping the inlet channel open.

2. The pneumatically operated normally open semiconductor flow control component according to claim 1, characterized in that, The bottom wall of the housing is provided with a through hole for the piston rod to pass through. The size of the through hole is adapted to the piston rod. A first receiving groove is further extended radially outward within a predetermined depth above the bottom wall of the through hole for the lower end of the elastic element to be embedded. The radial dimension of the first receiving groove is adapted to the elastic element.

3. The pneumatically operated normally open semiconductor flow control component according to claim 2, characterized in that, The piston has a second receiving groove extending radially and axially in the region surrounding the outer periphery of the piston rod on its bottom wall. The radial dimension of the second receiving groove is adapted to the elastic element so as to limit and guide the elastic element from the other end.

4. The pneumatically operated normally open semiconductor flow control component according to claim 3, characterized in that, The bottom wall of the first receiving groove and / or the second receiving groove is provided with a fixing part, and the end of the elastic member is embedded in the fixing part to keep the upper end and / or lower end of the elastic member fixed so that the elastic member is kept in a non-contact state with the outer periphery of the piston rod.

5. The pneumatically operated normally open semiconductor flow control component according to claim 4, characterized in that, The fixing part is an embedded groove provided on the bottom wall of the first receiving groove and / or the second receiving groove. Alternatively, the fixing part is a washer with a preset roughness, which is clamped between the two ends of the elastic member and the bottom wall of the first or second receiving groove.

6. The pneumatically operated normally open semiconductor flow control component according to claim 2, characterized in that, The bottom wall of the first receiving groove has a planar structure on the side facing the elastic member to form an abutting surface against the elastic member; the bottom wall of the through hole has an outward-facing inclined structure on the other side to form a reinforcing surface to enhance the load-bearing strength of the bottom wall against the elastic member and the piston.

7. The pneumatically operated normally open semiconductor flow control component according to claim 2, characterized in that, The housing has a fastening hole outside the through hole, and the inner wall of the fastening hole has an internal thread structure. The top of the diaphragm gland has a mounting part, and the outer periphery of the mounting part has an external thread structure. The internal thread structure and the external thread structure are adapted to make the housing and the diaphragm gland threadedly fastened together. The housing has a vent hole radially opened at the upper end of the fastening hole near the through hole, and the vent hole communicates with the space below the piston through the through hole.

8. The pneumatically operated normally open semiconductor flow control component according to claim 7, characterized in that, The housing has a locking hole radially opened in the axial region of the fastening hole and at a position that avoids the vent hole. A locking member is provided in the locking hole, and the locking member abuts against the diaphragm cover to lock the housing and prevent the housing from separating from the diaphragm cover.

9. The pneumatically operated normally open semiconductor flow control component according to claim 8, characterized in that, The locking hole is provided with a threaded structure. The locking member includes a spherical member that can be accommodated in the locking hole and can be deformed, and a screw that is fastened to the locking hole by an external thread and applies a radial force toward the spherical member to deform it and abut against the external threaded structure of the diaphragm cover.

10. The pneumatically operated normally open semiconductor flow control component according to claim 1, characterized in that, The diaphragm cover has a top post inside, and the top post is located above the diaphragm. The piston rod extends through the end of the housing into the diaphragm cover until it contacts the top surface of the top post. As the piston rod extends downward, it pushes the top post against the diaphragm, so that the diaphragm deforms and fits against the valve seat.

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