A spatial domain fully decoupled multi-microbeam parallel x-ray diffraction system and method

Abstract

The present disclosure relates to the technical field of material detection, and particularly relates to a spatial domain full decoupling multi-microbeam parallel X-ray diffraction system and method, which comprises: an X-ray source subsystem for generating an X-ray beam; an array type X-ray microbeam generation subsystem for modulating the X-ray beam into an X-ray microbeam array to simultaneously irradiate multiple spatial sites of a sample to be detected; a multifunctional integrated diffraction signal decoupling and conversion subsystem for eliminating crosstalk between initial diffraction signals generated by each spatial site after the X-ray microbeam array irradiates the multiple spatial sites, and converting the decoupled diffraction signals corresponding to each spatial site into visible light signals corresponding to each spatial site; and an optical amplification and image acquisition subsystem for amplifying the visible light signals corresponding to each spatial site, and acquiring the amplified visible light signals corresponding to each spatial site to generate a diffraction image. Through the present disclosure, spatial domain physical full decoupling is realized, and high-throughput, zero-artifact snapshot type tissue mapping can be realized.

Description

Technical Field

[0001] This disclosure relates to the field of materials testing technology, and in particular to a spatial domain fully decoupled multi-microbeam parallel X-ray diffraction system and method. Background Technology

[0002] X-ray diffraction (XRD) is a core characterization technique for studying the microstructure, crystal structure, orientation texture, and residual stress of materials. As materials science advances towards high-throughput experiments, in-situ dynamic evolution, and multi-scale simulation, the scientific and industrial communities face dual challenges in terms of both spatial and temporal resolution of X-ray diffraction. Particularly in fields such as metal recrystallization kinetics, semiconductor wafer defect detection, and in-situ monitoring in additive manufacturing, there is an urgent need for a dynamic imaging system capable of achieving a large field of view, high pixel resolution, and transient capture capabilities.

[0003] Currently, the main technical approaches to achieving X-ray diffraction spatial mapping fall into the following categories, but all have significant limitations:

[0004] 1. Scanning Micro-XRD:

[0005] Traditional techniques primarily rely on high-brightness micro-focused X-ray sources combined with high-precision five-axis sample stages to acquire spatial distribution information through point-to-point scanning. While this method yields reliable data, the limited X-ray photon flux means that single-point sampling often takes several seconds to minutes. For large-area mapping at the sub-micron level, requiring hundreds or even tens of thousands of sampling points, the time consumption can reach hours or even days. This low time efficiency makes it difficult to capture the synchronous transient evolution of various parts of the material under external stimuli such as heat, force, and electricity, and sample drift and thermal fluctuations during the scanning process severely interfere with measurement accuracy.

[0006] 2. Coded Aperture XRD and Compressed Sensing Diffraction Techniques:

[0007] To improve throughput, researchers have introduced coded masks (such as MURA masks) to achieve parallel multi-beam incidence. However, such schemes generate highly aliased diffraction signals at the detector, requiring complex mathematical reconstruction algorithms for deconvolution. When dealing with complex samples with strong texture, non-uniform stress, or large grains, the diffraction spot distribution is extremely irregular, making it difficult for the algorithm to converge and producing severe "ghosting" phenomena, making it difficult for the data authenticity to withstand rigorous physical verification.

[0008] 3. Synchrotron Multi-beam XRD:

[0009] While synchrotron radiation sources offer extremely high brightness and support multi-beam parallel detection, significant physical overlap still exists in the diffraction signals generated by adjacent microbeams on the detector plane, such as Debye-Scherrer rings. To avoid signal interference, it is necessary to limit the number of microbeams or increase the spacing between them, which restricts the scale of parallelization and spatial sampling density; alternatively, complex algorithms are used to decouple the overlapping diffraction signals. Furthermore, synchrotron radiation facilities are extremely resource-constrained, making it difficult to meet the general scientific research needs of routine laboratory settings. Although synchrotron radiation provides high-brightness multi-beam sources, it cannot solve the signal aliasing problem while maintaining high spatial sampling density, resulting in an inherent contradiction between parallel efficiency and spatial resolution.

[0010] 4. Three-dimensional X-ray diffraction (3DXRD) and laboratory diffraction contrast computed tomography (LabDCT):

[0011] Three-dimensional X-ray diffraction (3DXRD) is one of the most advanced methods for characterizing the internal grain orientation and deformation of polycrystalline materials. However, 3DXRD is highly dependent on the monochromaticity and high collimation of the synchrotron radiation source, and usually requires sample rotation for multi-angle projection acquisition, resulting in extremely high hardware and time costs. To bring this capability to the laboratory environment, Laboratory Diffraction Contrast Tomography (LabDCT) has been developed in recent years. LabDCT uses multicolor micro-focal source X-rays combined with complex grain reconstruction algorithms to extract grain information from overlapping diffraction spots. However, LabDCT is essentially a technique based on "computational decoupling of overlapping spots." When the sample thickness increases, the grain density increases, or strong texture exists, the diffraction spots on the detector will have severe physical overlap. Even the most advanced reconstruction algorithms currently available struggle to reconstruct the true grain orientation in images with extremely high overlap, leading to the appearance of spurious grains. Furthermore, to obtain sufficient three-dimensional information, LabDCT must perform hundreds of angular rotations of the sample, which limits its ability to characterize only "static" or "quasi-static" processes. For the transient, locally non-uniform dynamic evolution during metal recrystallization, LabDCT's sampling period is much slower than the material's evolution rate. To reduce spot overlap, LabDCT typically can only process small-volume samples, making it difficult to directly characterize large-size plates or foils that are industrially representative.

[0012] In summary, neither traditional scanning micro-area diffraction techniques nor LabDCT techniques, which rely on complex reconstruction algorithms, can achieve large field-of-view, snapshot-like parallel characterization while maintaining high data fidelity. Therefore, developing a parallel X-ray diffraction system that does not require sample rotation or complex reconstruction algorithms and can achieve full signal decoupling at the physical level is of great scientific significance and industrial application value for real-time monitoring of material microstructures. Summary of the Invention

[0013] In view of this, this disclosure proposes a spatially decoupled multi-microbeam parallel X-ray diffraction system and method.

[0014] According to one aspect of this disclosure, a spatially decoupled multi-microbeam parallel X-ray diffraction system is provided, the system comprising:

[0015] The system comprises an X-ray source subsystem, an array-type X-ray microbeam generation subsystem, a multifunctional integrated diffraction signal decoupling and conversion subsystem, and an optical amplification and image acquisition subsystem; among which...

[0016] The X-ray source subsystem is used to generate an X-ray beam;

[0017] The array-type X-ray microbeam generator subsystem is disposed in the output optical path of the X-ray source subsystem and is used to modulate the X-ray beam into an X-ray microbeam array to simultaneously irradiate multiple spatial sites of the sample under test; wherein, the X-ray microbeam array includes multiple microbeams, each microbeam being used to irradiate one spatial site;

[0018] The multifunctional integrated diffraction signal decoupling and conversion subsystem is used to eliminate crosstalk between the initial diffraction signals generated at each spatial site after the X-ray microbeam array irradiates the multiple spatial sites, to obtain the decoupled diffraction signal corresponding to each spatial site; and to convert the decoupled diffraction signal corresponding to each spatial site into the visible light signal corresponding to each spatial site.

[0019] The optical magnification and image acquisition subsystem is used to amplify the visible light signals corresponding to each spatial location and acquire the amplified visible light signals corresponding to each spatial location to generate a diffraction image.

[0020] In one possible implementation, the sample to be tested and the detection and receiving plane corresponding to the multifunctional integrated diffraction signal decoupling and conversion subsystem are arranged in a near-field configuration.

[0021] In one possible implementation, the multifunctional integrated diffraction signal decoupling and conversion subsystem has multiple physical decoupling and conversion channels, wherein any one of the multiple microbeams is matched with one of the multiple physical decoupling and conversion channels, so that the initial diffraction signal generated after the microbeam irradiates the corresponding spatial site of the sample under test can be incident on the physical decoupling and conversion channel.

[0022] In one possible implementation, the multifunctional integrated diffraction signal decoupling and conversion subsystem includes: a physical decoupling unit, an array-type transmission blocking unit, and a scintillator conversion unit; wherein the physical decoupling unit, the array-type transmission blocking unit, and the scintillator conversion unit are sequentially arranged along the propagation direction of the initial diffraction signal generated at each spatial site after the X-ray microbeam array irradiates the plurality of spatial sites, to constitute the plurality of physical decoupling and conversion channels; wherein...

[0023] The physical decoupling unit is used to filter out oblique scattered light from the initial diffraction signal generated by each spatial site after the X-ray microbeam array irradiates the multiple spatial sites, so as to obtain the diffraction signal corresponding to each spatial site after removing oblique scattered light.

[0024] The array-type transmission blocking unit is used to filter the transmitted direct beam in the diffraction signal after removing oblique scattered light corresponding to each spatial position, so as to obtain the decoupled diffraction signal corresponding to each spatial position.

[0025] The scintillator conversion unit is used to convert the decoupled diffraction signals corresponding to each spatial location into visible light signals corresponding to each spatial location.

[0026] In one possible implementation, the physical decoupling unit includes a plurality of physical decoupling slits, the array-type transmission blocking unit includes a plurality of transmission blocking components, and the scintillator conversion unit includes a scintillator. In this case, one of the plurality of physical decoupling slits, one of the plurality of transmission blocking components, and the region on the scintillator corresponding to the physical decoupling slit constitute a physical decoupling and conversion channel.

[0027] In one possible implementation, the array-type X-ray microbeam generator subsystem includes a Fresnel zone plate array or a pinhole array.

[0028] In one possible implementation, the optical magnification and image acquisition subsystem includes: an optical objective amplifier and an optical camera sensor; wherein,

[0029] The optical objective amplifier is positioned on the propagation path of the visible light signal corresponding to each spatial position, and is used to physically amplify the visible light signal corresponding to each spatial position to obtain the amplified visible light signal corresponding to each spatial position.

[0030] The optical camera sensor is positioned along the propagation path of the amplified visible light signal corresponding to each spatial location, and is used to collect the amplified visible light signal corresponding to each spatial location to generate the diffraction image.

[0031] In one possible implementation, the plurality of microbeams are periodically distributed, and / or the plurality of physical decoupling and conversion channels are periodically distributed.

[0032] In one possible implementation, the system further includes:

[0033] A control and data processing subsystem is used to control one or more of the X-ray source subsystem, the array-type X-ray microbeam generation subsystem, the multifunctional integrated diffraction signal decoupling and conversion subsystem, and the optical amplification and image acquisition subsystem.

[0034] And / or,

[0035] The diffraction image is used to analyze the diffraction image and obtain the structural information of the sample to be tested.

[0036] According to another aspect of this disclosure, a spatially decoupled multi-microbeam parallel X-ray diffraction method is provided, applied to any of the above-described spatially decoupled multi-microbeam parallel X-ray diffraction systems, the method comprising:

[0037] An X-ray beam is generated through an X-ray source subsystem;

[0038] The X-ray beam is modulated into an X-ray microbeam array using an array-type X-ray microbeam generator subsystem to simultaneously irradiate multiple spatial sites of the sample under test; wherein the X-ray microbeam array includes multiple microbeams, each of which is used to irradiate one spatial site;

[0039] A multifunctional integrated diffraction signal decoupling and conversion subsystem is used to eliminate crosstalk between the initial diffraction signals generated at each spatial site after the X-ray microbeam array irradiates the multiple spatial sites, thereby obtaining the decoupled diffraction signal corresponding to each spatial site; and the decoupled diffraction signal corresponding to each spatial site is converted into the visible light signal corresponding to each spatial site.

[0040] The visible light signal corresponding to each spatial location is amplified using an optical magnification and image acquisition subsystem, and the amplified visible light signal corresponding to each spatial location is acquired to generate a diffraction image.

[0041] According to embodiments of this disclosure, a spatially decoupled multi-microbeam parallel X-ray diffraction system includes: an X-ray source subsystem, an array-type X-ray microbeam generating subsystem, a multifunctional integrated diffraction signal decoupling and conversion subsystem, and an optical amplification and image acquisition subsystem. The X-ray source subsystem generates an X-ray beam. The array-type X-ray microbeam generating subsystem is disposed in the output optical path of the X-ray source subsystem and is used to modulate the X-ray beam into an X-ray microbeam array to simultaneously irradiate multiple spatial sites of the sample under test. The X-ray microbeam array includes multiple microbeams, each of which... The system is used to irradiate a spatial site; the multifunctional integrated diffraction signal decoupling and conversion subsystem is used to eliminate crosstalk between the initial diffraction signals generated by each spatial site after the X-ray microbeam array irradiates the multiple spatial sites, to obtain the decoupled diffraction signal corresponding to each spatial site; and to convert the decoupled diffraction signal corresponding to each spatial site into the visible light signal corresponding to each spatial site; the optical amplification and image acquisition subsystem is used to amplify the visible light signal corresponding to each spatial site and acquire the amplified visible light signal corresponding to each spatial site to generate a diffraction image. In this way, the array-type X-ray microbeam generation subsystem enables measurement using a multi-microbeam parallel mode. Furthermore, the array-type X-ray microbeam generation subsystem and the multifunctional integrated diffraction signal decoupling and conversion subsystem achieve spatial domain physical decoupling. Without rotating the sample under test, crosstalk between diffraction signals between adjacent microbeams is completely eliminated at the physical level. This breaks the contradiction between parallel efficiency and spatial resolution at the physical level, enabling snapshot-style tissue mapping with high throughput and zero artifacts without complex reconstruction algorithms. Moreover, it allows for high spatial sampling density and zero aliasing parallel imaging in ordinary laboratories.

[0042] Other features and aspects of this disclosure will become clear from the following detailed description of exemplary embodiments with reference to the accompanying drawings. Attached Figure Description

[0043] The accompanying drawings, which are included in and form part of this specification, illustrate exemplary embodiments, features, and aspects of this disclosure together with the specification and serve to explain the principles of this disclosure.

[0044] Figure 1 A structural diagram of a spatially decoupled multi-microbeam parallel X-ray diffraction system according to an embodiment of the present disclosure is shown.

[0045] Figure 2 A structural diagram of another spatially decoupled multi-microbeam parallel X-ray diffraction system according to an embodiment of the present disclosure is shown.

[0046] Figure 3A schematic diagram of an array-type X-ray microbeam generator subsystem according to an embodiment of the present disclosure is shown;

[0047] Figure 4 A schematic diagram illustrating the principle of near-field arrangement decoupling according to an embodiment of the present disclosure is shown.

[0048] Figure 5 This diagram illustrates the structure of a multifunctional integrated diffraction signal decoupling and conversion subsystem according to an embodiment of the present disclosure.

[0049] Figure 6 This diagram illustrates the principle of a multifunctional integrated diffraction signal decoupling and conversion subsystem according to an embodiment of the present disclosure.

[0050] Figure 7 A flowchart is shown for a spatially decoupled multi-microbeam parallel X-ray diffraction method according to an embodiment of the present disclosure.

[0051] Figure 8 A flowchart is shown for another spatially decoupled multi-microbeam parallel X-ray diffraction method according to an embodiment of the present disclosure. Detailed Implementation

[0052] Various exemplary embodiments, features, and aspects of this disclosure will now be described in detail with reference to the accompanying drawings. The same reference numerals in the drawings denote elements that have the same or similar functions. Although various aspects of the embodiments are shown in the drawings, they are not necessarily drawn to scale unless specifically indicated otherwise.

[0053] As used herein, the terms “comprising,” “including,” “having,” or variations thereof are open-ended and include one or more of the stated features, integrals, elements, steps, components, or functions, but do not exclude the presence or addition of one or more other features, integrals, elements, steps, components, functions, or groups thereof.

[0054] When an element is referred to as “connected,” “coupled,” “responding,” or a variation thereof relative to another element, it may be directly connected, coupled, or responding to another element, or there may be an intermediate element present.

[0055] Although the terms first, second, third, etc., may be used herein to describe various elements / operations, these elements / operations should not be limited by these terms. These terms are only used to distinguish one element / operation from another. Therefore, without departing from the teachings of the inventive concept, a first element / operation in some embodiments may be referred to as a second element / operation in other embodiments.

[0056] The term “exemplary” as used herein means “serving as an example, embodiment, or illustration.” Any embodiment illustrated herein as “exemplary” is not necessarily to be construed as superior to or better than other embodiments.

[0057] Furthermore, to better illustrate this disclosure, numerous specific details are set forth in the following detailed description. Those skilled in the art will understand that this disclosure can be practiced without certain specific details. In some instances, methods, means, components, and circuits well known to those skilled in the art have not been described in detail in order to highlight the main points of this disclosure.

[0058] It should be noted that the information (including but not limited to user device information, user personal information, etc.), data (including but not limited to data used for analysis, data stored, data displayed, etc.) and signals involved in this application are all authorized by the user or fully authorized by all parties, and the collection, use and processing of related data must comply with the relevant laws, regulations and standards of the relevant regions.

[0059] This disclosure provides a spatially decoupled multi-microbeam parallel X-ray diffraction system. Through an array-type X-ray microbeam generation subsystem and a multifunctional integrated diffraction signal decoupling and conversion subsystem, spatial physical decoupling is achieved. Without rotating the sample under test, crosstalk between diffraction signals between adjacent microbeams is completely eliminated at the physical level. This enables snapshot-type tissue mapping with high throughput and zero artifacts without complex reconstruction algorithms. This effectively overcomes the shortcomings of existing scanning diffraction techniques, such as extremely low efficiency, excessive reliance on complex reconstruction algorithms, and signal overlap artifacts in LabDCT and coded aperture techniques.

[0060] Figure 1 A structural diagram of a spatially decoupled multi-microbeam parallel X-ray diffraction system according to an embodiment of the present disclosure is shown. Figure 1 As shown, the system may include: an X-ray source subsystem, an array-type X-ray microbeam generation subsystem, a multifunctional integrated diffraction signal decoupling and conversion subsystem, and an optical amplification and image acquisition subsystem; wherein,

[0061] The X-ray source subsystem is used to generate an X-ray beam;

[0062] The array-type X-ray microbeam generator subsystem is disposed in the output optical path of the X-ray source subsystem and is used to modulate the X-ray beam into an X-ray microbeam array to simultaneously irradiate multiple spatial sites of the sample under test; wherein, the X-ray microbeam array includes multiple microbeams, each microbeam being used to irradiate one spatial site;

[0063] The multifunctional integrated diffraction signal decoupling and conversion subsystem is used to eliminate crosstalk between the initial diffraction signals generated at each spatial site after the X-ray microbeam array irradiates the multiple spatial sites, to obtain the decoupled diffraction signal corresponding to each spatial site; and to convert the decoupled diffraction signal corresponding to each spatial site into the visible light signal corresponding to each spatial site.

[0064] The optical magnification and image acquisition subsystem is used to amplify the visible light signals corresponding to each spatial location and acquire the amplified visible light signals corresponding to each spatial location to generate a diffraction image.

[0065] For example, the sample to be tested can be a thin sample, such as an aluminum sheet, a semiconductor wafer, a functional thin film, or a foil.

[0066] In this embodiment of the disclosure, the spatially decoupled multi-microbeam parallel X-ray diffraction system includes: an X-ray source subsystem, an array-type X-ray microbeam generating subsystem, a multifunctional integrated diffraction signal decoupling and conversion subsystem, and an optical amplification and image acquisition subsystem; wherein, the X-ray source subsystem is used to generate an X-ray beam; the array-type X-ray microbeam generating subsystem is disposed in the output optical path of the X-ray source subsystem, and is used to modulate the X-ray beam into an X-ray microbeam array to simultaneously irradiate multiple spatial sites of the sample under test; wherein, the X-ray microbeam array includes multiple microbeams, each microbeam... The system is used to irradiate a spatial site; the multifunctional integrated diffraction signal decoupling and conversion subsystem is used to eliminate crosstalk between the initial diffraction signals generated by each spatial site after the X-ray microbeam array irradiates the multiple spatial sites, to obtain the decoupled diffraction signal corresponding to each spatial site; and to convert the decoupled diffraction signal corresponding to each spatial site into the visible light signal corresponding to each spatial site; the optical amplification and image acquisition subsystem is used to amplify the visible light signal corresponding to each spatial site and acquire the amplified visible light signal corresponding to each spatial site to generate a diffraction image. In this way, the array-type X-ray microbeam generation subsystem enables measurement using a multi-microbeam parallel mode. Furthermore, the array-type X-ray microbeam generation subsystem and the multifunctional integrated diffraction signal decoupling and conversion subsystem achieve spatial domain physical decoupling. Without rotating the sample under test, crosstalk between diffraction signals between adjacent microbeams is completely eliminated at the physical level. This breaks the contradiction between parallel efficiency and spatial resolution at the physical level, enabling snapshot-style tissue mapping with high throughput and zero artifacts without complex reconstruction algorithms. Moreover, it allows for high spatial sampling density and zero aliasing parallel imaging in ordinary laboratories.

[0067] Figure 2 This diagram illustrates the structure of another spatially decoupled multi-microbeam parallel X-ray diffraction system according to an embodiment of the present disclosure, as shown below.Figure 2 As shown, the system may include: an X-ray source subsystem 1, an array-type X-ray microbeam generation subsystem 3, a multifunctional integrated diffraction signal decoupling and conversion subsystem 8, an optical objective amplifier 9, and an optical camera sensor 10.

[0068] X-ray source subsystem 1 is the one described above. Figure 1 The X-ray source subsystem, specifically the array-type X-ray microbeam generator subsystem 3, is... Figure 1 The medium-array X-ray microbeam generator subsystem and the multifunctional integrated diffraction signal decoupling and conversion subsystem are 8 Figure 1 The multifunctional integrated diffraction signal decoupling and conversion subsystem, including the optical objective amplifier 9 and the optical camera sensor 10, is the aforementioned... Figure 1 The optical magnification and image acquisition subsystem.

[0069] also, Figure 2 The image also shows the sample under test 5, X-ray beam 2, X-ray microbeam array 4, transmission X-ray beam 6, and diffraction signal 7.

[0070] For example, such as Figure 2 As shown, the X-ray source subsystem 1, the array-type X-ray microbeam generation subsystem 3, the multifunctional integrated diffraction signal decoupling and conversion subsystem 8, the optical objective amplifier 9, and the optical camera sensor 10 are arranged sequentially along the X-ray propagation direction.

[0071] As an example, the optical path center of the X-ray source subsystem 1, the center of the array-type X-ray microbeam generation subsystem 3, the centroid of the sample 5 under test, the center of the multifunctional integrated diffraction signal decoupling and conversion subsystem 8, the center of the optical objective amplifier 9, and the center of the optical camera sensor 10 can be located on the same straight line.

[0072] When measurements are performed using the fully decoupled multi-microbeam parallel X-ray diffraction system in this spatial domain, the X-ray source subsystem 1 generates an X-ray beam 2, which is then modulated by the array-type X-ray microbeam generation subsystem 3. The array-type X-ray microbeam generation subsystem 3 outputs the modulated X-ray microbeam array 4. After the X-ray microbeam array 4 irradiates the sample 5, it generates a diffraction signal 7. The diffraction signal 7 is then incident on the multifunctional integrated diffraction signal decoupling and conversion subsystem 8 to obtain a visible light signal. The visible light signal is amplified by the optical objective amplifier 9 and then acquired by the optical camera sensor 10 to generate a diffraction image.

[0073] The following is a summary of the above. Figure 1 and Figure 2 Each subsystem will be explained in detail.

[0074] (1) X-ray source subsystem:

[0075] During the measurement process, the X-ray source subsystem is used to generate the X-ray beam.

[0076] For example, the X-ray source subsystem may include an X-ray source, such as a synchrotron radiation source, a laboratory microfocus source (e.g., a Cu / W target), or a liquid metal jet source.

[0077] For example, the generated X-ray beam can be a parallel beam or a cone beam, which can be configured as needed and is not limited thereto.

[0078] For example, the generated X-ray beam can be monochromatic or polychromatic, and the choice can be made as needed without limitation.

[0079] As an example, an X-ray source can produce a high-energy X-ray beam with sufficient flux and collimation.

[0080] Because this spatial domain fully decoupled multi-microbeam parallel X-ray diffraction system is equipped with an array-type X-ray microbeam generation subsystem, that is, it adopts a multi-microbeam parallel mode, it can utilize the photons emitted by the X-ray source more efficiently and reduce the total exposure time required for a single X-ray diffraction spatial mapping.

[0081] (2) Array-type X-ray microbeam generation subsystem:

[0082] An array-type X-ray microbeam generator subsystem is positioned in the output beam path of the X-ray source subsystem.

[0083] During the measurement process, the X-ray beam can be modulated into an X-ray microbeam array to simultaneously irradiate multiple spatial sites of the sample under test; wherein, the X-ray microbeam array includes multiple microbeams, each of which is used to irradiate one spatial site.

[0084] In this way, the X-ray beam generated by the X-ray source subsystem is divided into multiple microbeams by the array-type X-ray microbeam generator subsystem. Each microbeam will independently irradiate a spatial site of the sample to be tested, and the different microbeams will not interfere with each other.

[0085] For example, the array-type X-ray microbeam generation subsystem can be an array-type X-ray microbeam generator. As a spatial modulation element located in front of the sample to be tested, the array-type X-ray microbeam generator can modulate the X-ray beam generated by the X-ray source subsystem into an X-ray microbeam array, and then simultaneously irradiate the sample to be tested with multiple microbeams in the X-ray microbeam array, wherein each microbeam irradiates a spatial site.

[0086] Among them, X-ray microbeam arrays can also be called arrayed X-ray microbeams. A microbeam is an independent X-ray beam, which can be a tiny X-ray beam at the micrometer scale (tens to hundreds of micrometers) or even the submicrometer scale. The spatial location represents the area on the sample being irradiated by each microbeam; it can also be called a discrete region or micro-region, etc.

[0087] In one possible implementation, the plurality of microbeams are periodically distributed.

[0088] For example, the periodic distribution may include an array of multiple microbeams arranged at equal intervals in space. The spacing within the periodic distribution determines the spatial sampling step size of the spatially decoupled multi-microbeam parallel X-ray diffraction system, and its specific value can be configured as needed and is not limited thereto.

[0089] In this way, after the X-ray beam generated by the X-ray source subsystem is incident on the array-type X-ray micro-beam generator subsystem, the array-type X-ray micro-beam generator subsystem can divide the continuous large-size X-ray beam into multiple micro-beams with a periodic distribution.

[0090] In one possible implementation, the array-type X-ray microbeam generator subsystem includes a Fresnel zone plate array or a pinhole array.

[0091] As an example, the array-type X-ray microbeam generation subsystem is a Fresnel zone plate array (FZP array). Exemplarily, the Fresnel zone plate array can be a periodic array composed of multiple zone plate units. The X-ray beam generated by the X-ray source subsystem is incident on the Fresnel zone plate array. Each zone plate unit in the Fresnel zone plate array uses the principle of diffraction to coherently modulate the wavefront within its coverage area, converging the divergent or parallel X-ray beam to a predetermined focal point. In this way, using the Fresnel zone plate array, a microfocal array with extremely high flux density and a specific spatial distribution can be constructed on the incident plane of the sample under test, i.e., an X-ray microbeam array.

[0092] As another example, the array-type X-ray microbeam generation subsystem is a pinhole array. Exemplarily, the pinhole array can be a high-aspect-ratio pinhole array. The X-ray beam generated by the X-ray source subsystem is incident on the high-aspect-ratio pinhole array, passes through a shield with high-aspect-ratio channels, and is geometrically truncated and physically shielded by a high-absorbing material (such as tungsten, platinum, etc.), allowing only rays passing through the pinhole regions to penetrate. In this way, through the pinhole array, the spatial domain is physically divided, directly generating a parallel microbeam array with high collimation, i.e., an X-ray microbeam array.

[0093] For example, Figure 3A schematic diagram of an array-type X-ray microbeam generator subsystem according to an embodiment of the present disclosure is shown, as follows: Figure 3 As shown, the left side represents a Fresnel zone plate array; the right side represents a pinhole array. The Fresnel zone plate array modulates the X-ray beam into a micro-beam array based on the principle of coherent focusing; the pinhole array modulates the X-ray beam into a micro-beam array based on the principle of geometric shielding. Figure 3 As shown, when using a Fresnel zone plate array (i.e., when the array-type X-ray microbeam generator subsystem 3 is a Fresnel zone plate array): the X-ray beam 2 is incident on a periodic array composed of multiple zone plate units. Each zone plate unit coherently modulates the wavefront within its coverage area, thereby converging the divergent or parallel X-ray beams to a preset focal point, generating an X-ray microbeam array 4, which irradiates the sample 5 to be tested. When using a pinhole array (i.e., when the array-type X-ray microbeam generator subsystem 3 is a pinhole array): the X-ray beam 2 passes through a shield with a high aspect ratio channel. High-absorbing materials are used to geometrically cut off and physically shield the main beam, allowing only rays passing through the pinhole region to penetrate, generating an X-ray microbeam array 4, which irradiates the sample 5 to be tested.

[0094] It should be noted that the Fresnel zone plate array and pinhole array in the above array-type X-ray microbeam generator subsystem are only examples. Arrays with non-uniform distribution or specific topological structures can be customized according to requirements to meet the spatial sampling needs of different samples.

[0095] Furthermore, after the array-type X-ray microbeam generator subsystem modulates the X-ray beam into an X-ray microbeam array, the X-ray microbeam array irradiates the sample under test, and the sample under test interacts with the X-ray microbeam array, thereby exciting the initial diffraction signal; since the X-ray microbeam array simultaneously irradiates multiple spatial sites of the sample under test, each spatial site can generate an initial diffraction signal.

[0096] Thus, an array-type X-ray microbeam generation subsystem is configured in the spatially decoupled multi-microbeam parallel X-ray diffraction system. By simultaneously irradiating the sample under test with multiple microbeams, measurement is achieved in a multi-microbeam parallel mode. In this mode, because multiple microbeams irradiate the sample under test simultaneously, each spatial site corresponding to the sample irradiated by each microbeam can generate its own initial diffraction signal in a single exposure, thereby obtaining the diffraction pattern corresponding to each spatial site.

[0097] For example, during measurement, synchrotron radiation or laboratory X-ray sources can be used to modulate the incident X-ray beam into an X-ray microbeam array with a specific periodic distribution using high-precision spatial modulation elements, i.e., array-type X-ray microbeam generators (such as Fresnel zone plate arrays, pinhole arrays, etc.). This X-ray microbeam array simultaneously irradiates multiple spatial sites of the sample under test (such as foils, films, etc.), exciting diffraction signals carrying microstructural information at each irradiated spatial site, thereby forming a transmission diffraction signal array, i.e., the initial diffraction signal corresponding to each spatial site; thus realizing the generation and modulation of the X-ray microbeam array.

[0098] (3) Multifunctional integrated diffraction signal decoupling and conversion subsystem:

[0099] During the measurement process, the multifunctional integrated diffraction signal decoupling and conversion subsystem can eliminate crosstalk between the initial diffraction signals generated at each spatial site after the X-ray microbeam array irradiates the multiple spatial sites, obtain the decoupled diffraction signal corresponding to each spatial site, and convert the decoupled diffraction signal corresponding to each spatial site into the visible light signal corresponding to each spatial site.

[0100] For example, a multifunctional integrated diffraction signal decoupling and conversion subsystem can be set between the sample under test and the optical magnification and image acquisition subsystem.

[0101] Because the sample under test interacts with the X-ray microbeam array, most of the X-rays pass through the sample to form a transmitted X-ray beam, while the rays that satisfy the Bragg condition generate diffraction signals. As described above. Figure 2 As shown, after the X-ray microbeam array 4 irradiates the sample 5, most of the X-rays pass through the sample to form a transmitted X-ray beam 6, while the rays that satisfy the Bragg condition generate diffraction signals 7. In addition, oblique scattered light is also generated. It can be seen that the initial diffraction signals generated at each spatial site after the X-ray microbeam array irradiates multiple spatial sites are not pure diffraction signals. Therefore, the initial diffraction signals generated at each spatial site can be further processed by the multifunctional integrated diffraction signal decoupling and conversion subsystem.

[0102] In one possible implementation, the sample to be tested and the detection and receiving plane corresponding to the multifunctional integrated diffraction signal decoupling and conversion subsystem are arranged in a near-field configuration.

[0103] Near-field arrangement refers to controlling the distance between the sample under test and the multifunctional integrated diffraction signal decoupling and conversion subsystem within a small range. For example, the sample under test can be placed close to or very close to the detection and receiving plane corresponding to the multifunctional integrated diffraction signal decoupling and conversion subsystem.

[0104] For example, the multifunctional integrated diffraction signal decoupling and conversion subsystem, together with the optical amplification and image acquisition subsystem, constitutes the detector. The detection receiving plane corresponding to the multifunctional integrated diffraction signal decoupling and conversion subsystem is the receiving plane of the detector.

[0105] For example, the near-field arrangement of the sample under test and the detection and receiving plane corresponding to the multifunctional integrated diffraction signal decoupling and conversion subsystem may include: the distance between the sample under test and the multifunctional integrated diffraction signal decoupling and conversion subsystem is less than a preset threshold; wherein, the specific value of the preset threshold can be set according to requirements, based on ensuring that the initial diffraction signals generated by each spatial site after the X-ray microbeam array irradiates multiple spatial sites of the sample under test do not have significant overlap after being incident on the detection and receiving plane corresponding to the multifunctional integrated diffraction signal decoupling and conversion subsystem, and is not limited thereto.

[0106] In this way, by optimizing the subsystem layout, the detection and receiving planes corresponding to the sample under test and the multifunctional integrated diffraction signal decoupling and conversion subsystem are arranged in a near-field state in the fully decoupled multi-microbeam parallel X-ray diffraction system in the spatial domain. This near-field arrangement can effectively reduce the overlap of the initial diffraction signals generated at each spatial site incident on the multifunctional integrated diffraction signal decoupling and conversion subsystem. At the same time, this near-field arrangement, combined with the geometric constraints in the multifunctional integrated diffraction signal decoupling and conversion subsystem, forcibly limits the diffusion range of the diffraction signals generated at each spatial site. This enables a more comprehensive elimination of crosstalk between the initial diffraction signals generated at each spatial site after the X-ray microbeam array irradiates multiple spatial sites, achieving full physical spatial decoupling.

[0107] Figure 4 This diagram illustrates the principle of near-field arrangement decoupling according to an embodiment of the present disclosure. Figure 4 As shown,

[0108] This illustration shows the overlap of diffraction signals when the distance between the detector receiving plane and the sample is different. The left side shows the overlapping diffraction signals, and the right side shows the non-overlapping diffraction signals. As shown on the left, when the detector receiving plane is far from the sample, the diffraction signals generated after each microbeam irradiates the corresponding spatial site will overlap on the detector receiving plane. As shown on the right, when the detector receiving plane is very close to the sample, the diffraction signals generated after each microbeam irradiates the corresponding spatial site will not overlap on the detector receiving plane. Therefore, the near-field arrangement shown on the right in this embodiment effectively reduces the overlap of the initial diffraction signals generated at each spatial site incident on the multifunctional integrated diffraction signal decoupling and conversion subsystem through physical decoupling.

[0109] In one possible implementation, the multifunctional integrated diffraction signal decoupling and conversion subsystem has multiple physical decoupling and conversion channels, wherein any one of the multiple microbeams is matched with one of the multiple physical decoupling and conversion channels, so that the initial diffraction signal generated after the microbeam irradiates the corresponding spatial site of the sample under test can be incident on the physical decoupling and conversion channel.

[0110] For example, matching any one of the multiple microbeams with one of the multiple physical decoupling and conversion channels includes: for any one of the multiple microbeams, the optical path center of that microbeam is aligned with the center of a physical decoupling and conversion channel; thus, the multifunctional integrated diffraction signal decoupling and conversion subsystem has a physical decoupling and conversion channel with a spatial domain that is quasi-conjugate matched with that microbeam in the X-ray microbeam array. Consequently, the initial diffraction signal generated after the microbeam irradiates the corresponding spatial site of the sample under test can be accurately incident on the physical decoupling and conversion channel matched with that microbeam.

[0111] In one possible implementation, the plurality of physical decoupling and transformation channels are periodically distributed.

[0112] For example, the periodic distribution of multiple physical decoupling and conversion channels can correspond to the periodic distribution of multiple microbeams; for instance, the periodic distribution of multiple microbeams can be N. If N microbeams are arranged at equal intervals, then the periodic distribution of multiple physical decoupling and conversion channels can be N N physical decoupling and conversion channels are arranged at equal intervals; wherein the center of the optical path of each micro-beam is aligned with the center of one physical decoupling and conversion channel; thus, N N microbeams and N N physical decoupling and conversion channels are matched one by one.

[0113] Among them, the multi-functional integrated diffraction signal decoupling and conversion subsystem can also be called the multi-functional integrated diffraction signal decoupling and conversion module.

[0114] In one possible implementation, the multifunctional integrated diffraction signal decoupling and conversion subsystem includes: a physical decoupling unit, an array-type transmission blocking unit, and a scintillator conversion unit; wherein the physical decoupling unit, the array-type transmission blocking unit, and the scintillator conversion unit are sequentially arranged along the propagation direction of the initial diffraction signal generated at each spatial site after the X-ray microbeam array irradiates the plurality of spatial sites, to form the plurality of physical decoupling and conversion channels; wherein the physical decoupling unit is used to filter out obliquely scattered light from the initial diffraction signal generated at each spatial site after the X-ray microbeam array irradiates the plurality of spatial sites, to obtain the diffraction signal corresponding to each spatial site after removing obliquely scattered light; the array-type transmission blocking unit is used to filter the transmitted direct beam from the diffraction signal corresponding to each spatial site after removing obliquely scattered light, to obtain the decoupled diffraction signal corresponding to each spatial site; the scintillator conversion unit is used to convert the decoupled diffraction signal corresponding to each spatial site into the visible light signal corresponding to each spatial site.

[0115] For example, along the propagation direction of the initial diffraction signal generated by each spatial site after the X-ray microbeam array irradiates the multiple spatial sites, the physical decoupling unit can be set at the front end, the array-type transmission blocking unit can be set at the middle end, and the scintillator conversion unit can be set at the rear end. That is, after the initial diffraction signal generated by each spatial site is incident on the multifunctional integrated diffraction signal decoupling and conversion subsystem, it reaches the physical decoupling unit, the array-type transmission blocking unit, and the scintillator conversion unit in sequence.

[0116] For example, the physical decoupling unit can be a micro-pore array, wherein each micro-pore is a physical decoupling slit, thereby filtering out oblique scattered light in the initial diffraction signal generated by each spatial site after the X-ray microbeam array irradiates multiple spatial sites, and obtaining the diffraction signal corresponding to each spatial site after removing oblique scattered light.

[0117] For example, the array-type transmission blocking unit can block high-intensity direct transmission beams (0th order beams), thereby filtering the direct transmission beams from the diffraction signals after removing oblique scattered light at each spatial location, and obtaining the decoupled diffraction signals at each spatial location; thus preventing the direct transmission beams from causing detector saturation or generating severe stray light interference, and highlighting weak diffraction signals.

[0118] For example, the scintillator conversion unit can be attached to the rear end of the physical decoupling unit and the array-type transmission blocking unit, thereby converting the decoupled diffraction signal corresponding to each spatial position after being modulated by the array-type transmission blocking unit into the visible light signal corresponding to each spatial position.

[0119] In this way, the multifunctional integrated diffraction signal decoupling and conversion subsystem highly integrates physical decoupling units, array-type transmission blocking units, and scintillator conversion units. For example, these three structures can be strictly aligned in space period through micro-nano fabrication processes to form independent functional units with physical self-alignment capabilities, i.e., multiple physical decoupling and conversion channels.

[0120] In one possible implementation, the physical decoupling unit includes a plurality of physical decoupling slits, the array-type transmission blocking unit includes a plurality of transmission blocking components, and the scintillator conversion unit includes a scintillator. In this case, one of the plurality of physical decoupling slits, one of the plurality of transmission blocking components, and the region on the scintillator corresponding to the physical decoupling slit constitute a physical decoupling and conversion channel.

[0121] For example, the physical decoupling slits can be 2D Solar slits; one end of each physical decoupling slit can be attached to or positioned on the scintillator. The geometric axis of the physical decoupling slits is strictly aligned with the optical path center of the corresponding microbeam, thereby forcibly filtering out oblique scattered light from the initial diffraction signal generated by the microbeam illuminating the spatial site corresponding to the sample under test; thus ensuring that the diffraction signals corresponding to adjacent spatial sites are completely isolated at the physical level.

[0122] As an example, physical decoupling slits can be made of highly absorbent materials such as tungsten or gold.

[0123] For example, multiple transmission blocking components are arranged in an array, and each transmission blocking component can be identical in size and structure; one end of each transmission blocking component can be attached to or disposed on the scintillator. Each transmission blocking component can be positioned at the center of its respective physical decoupling and conversion channel. As an example, the transmission blocking component can be a miniature shielding block; thus, by placing a miniature shielding block at the center of each decoupling channel, high-intensity transmitted direct beams (Class 0 beams) are blocked.

[0124] For example, the scintillator can be attached close to the rear end of the physical decoupling slit and the transmission blocking component to convert physically filtered pure X-ray diffracted photons into visible light signals.

[0125] For example, Figure 5 This diagram illustrates the structure of a multifunctional integrated diffraction signal decoupling and conversion subsystem according to an embodiment of the present disclosure. Figure 5 As shown, the left side is a view perpendicular to the X-ray direction (i.e., the propagation direction of the initial diffraction signal generated at each spatial point), and the right side is a view parallel to the X-ray direction. Figure 5As shown, the multifunctional integrated diffraction signal decoupling and conversion subsystem may include: multiple physical decoupling slits 8-1, multiple transmission blocking components 8-2, and a scintillator 8-3. Each physical decoupling slit 8-1, each transmission blocking component 8-2, and the corresponding region of the scintillator 8-3 constitutes a physical decoupling and conversion channel. For example, each small box in the right-hand view represents a physical decoupling and conversion channel. The physical decoupling slit 8-1 is located at the foremost end, the transmission blocking component 8-2 is located in the middle, and the scintillator 8-3 is located at the rearmost end. As shown in the left-hand view, the initial diffraction signals generated at each spatial location pass sequentially through the physical decoupling slit 8-1, the transmission blocking component 8-2, and the scintillator 8-3, generating a visible light signal 8-4.

[0126] Figure 6 A schematic diagram of a multifunctional integrated diffraction signal decoupling and conversion subsystem according to an embodiment of the present disclosure is shown. Figure 6 As shown, after the X-ray microbeam array 4 irradiates the sample 5, most of the X-rays pass through the sample to form a transmitted X-ray beam 6, while the rays satisfying the Bragg condition generate a diffraction signal 7. In addition, oblique scattered light is also generated. The oblique scattered light is then filtered out by the physical decoupling slit 8-1, and the transmitted X-ray beam 6 is filtered out by the transmission blocking component 8-2, thus obtaining a pure diffraction signal 7. Finally, it is converted into a visible light signal 8-4 by the scintillator 8-3. In this way, the physical purification and photoelectric preprocessing of the diffraction signal are achieved through the multifunctional integrated diffraction signal decoupling and conversion subsystem, effectively solving the problem of aliasing in parallel diffraction signals.

[0127] (4) Optical magnification and image acquisition subsystem:

[0128] During the measurement process, the optical magnification and image acquisition subsystem can amplify the visible light signal corresponding to each spatial location and acquire the amplified visible light signal corresponding to each spatial location to generate a diffraction image.

[0129] In one possible implementation, the optical magnification and image acquisition subsystem includes: an optical objective amplifier and an optical camera sensor; wherein, the optical objective amplifier is disposed on the propagation path of the visible light signal corresponding to each spatial location, and is used to physically amplify the visible light signal corresponding to each spatial location to obtain the amplified visible light signal corresponding to each spatial location; the optical camera sensor is disposed on the propagation path of the amplified visible light signal corresponding to each spatial location, and is used to acquire the amplified visible light signal corresponding to each spatial location to generate the diffraction image.

[0130] As an example, an optical objective amplifier can be a high numerical aperture (NA) precision optical lens assembly; the optical objective amplifier physically amplifies the visible light signal emitted by the scintillator (e.g., 10X or 20X). In some scenarios, because the system uses near-field detection (i.e., the aforementioned near-field arrangement), the initial diffraction spots are extremely small. Optical amplification can overcome the limitations of CMOS pixel size, greatly improving the system's ability to resolve subtle orientation differences and strain within the grain.

[0131] As an example, the optical camera sensor can be an sCMOS or CMOS image sensor, etc. For instance, the optical camera sensor can be a large-area, low-noise sCMOS or CMOS image sensor. The optical camera sensor can simultaneously capture and digitize the amplified visible light signal. Since physical decoupling has been achieved at the front end, the visible light image captured by the optical camera sensor is an array of multiple pure diffraction patterns, which can be directly processed by the back-end algorithm for real-time parallel analysis.

[0132] Furthermore, Figure 1 and Figure 2 The system shown may also include: a control and data processing subsystem;

[0133] In one possible implementation, a control and data processing subsystem is used to control one or more of the X-ray source subsystem, the array-type X-ray microbeam generation subsystem, the multifunctional integrated diffraction signal decoupling and conversion subsystem, and the optical amplification and image acquisition subsystem.

[0134] In one possible implementation, a control and data processing subsystem is used to analyze the diffraction image to obtain the structural information of the sample under test.

[0135] For example, the diffraction image can be analyzed to determine the structural features of each spatial site among multiple spatial sites in the sample to be tested.

[0136] For example, structural features may include crystal structure information and / or microstructure characteristics. As an example, microstructure characteristics such as stress, texture, phase, and crystal orientation at different spatial sites of the sample under test can be obtained.

[0137] Existing algorithms can be used to analyze the diffraction image to obtain the structural information of the sample under test; there are no limitations on this approach. Therefore, the measurement of the structural information of the sample can be achieved without complex reconstruction algorithms.

[0138] For example, based on the actual distance from the sample to be tested to the detection and receiving plane corresponding to the multifunctional integrated diffraction signal decoupling and conversion subsystem during the actual measurement process, as well as the configuration parameters of each subsystem, existing algorithms can be used to analyze the diffraction image (also known as the diffraction spot image) to obtain the structural information of the sample to be tested.

[0139] Since the physical decoupling and conversion channels in the multifunctional integrated diffraction signal decoupling and conversion subsystem are in fixed physical locations, the algorithm does not need to search for spots in the entire diffraction image. For example, based on the geometric coordinates of the physical decoupling and conversion channels, several logical calculation blind zones can be directly generated on the CMOS target surface to achieve second-level parallel preprocessing of massive diffraction data; thereby realizing automatic mask segmentation based on physical priors.

[0140] In one possible implementation, the control and data processing subsystem is also used to automatically calibrate the diffraction angle and azimuth angle corresponding to the pixels in the diffraction image based on a preset automatic calibration algorithm.

[0141] For example, based on a preset automatic calibration algorithm, taking into account the characteristic that each microbeam in the parallel optical path has an independent diffraction center (Direct Beam Center), the diffraction angle and azimuth angle corresponding to millions of pixels in the diffraction spot image are automatically calculated by referring to the standard diffraction ring of the sample, ensuring the consistency of cross-regional data; thus realizing multi-center parallel geometric calibration.

[0142] In one possible implementation, the control and data processing subsystem is further configured to: identify incoherent background noise (such as incoherent background noise generated for extremely thick samples) in the diffraction image using a trained deep learning model, thereby achieving high-fidelity denoising.

[0143] For example, the model can be trained using an existing training method with the built-in background database to enable the model to identify incoherent background noise in the diffraction image, thereby obtaining a trained deep learning model. This deep learning model can be called a deep learning-assisted "background stripping" model. In actual measurement, the diffraction image generated by the optical magnification and image acquisition subsystem is input into the model, thereby accurately identifying incoherent background noise in the diffraction image. This incoherent background noise can then be removed from the diffraction image without changing the diffraction physical pattern, thus achieving high-fidelity noise reduction.

[0144] In some scenarios, Figure 1 and Figure 2The system shown may also include a touchscreen display, a radiation shielding device, etc. Except for the control and data processing subsystem and the touchscreen display, all other parts of the system are housed within the radiation shielding device, thus preventing X-ray leakage and ionizing radiation damage to operators. The control and data processing subsystem is equipped with a touchscreen display, allowing users to set parameters and requirements. The touchscreen display can also show the system's real-time status and parameters, as well as the structural information of the sample being measured.

[0145] Compared to existing X-ray diffraction systems, the multi-microbeam parallel X-ray diffraction system with full decoupling in the basis space domain provided in this disclosure has at least one or more of the following beneficial effects:

[0146] (1) Extremely high characterization efficiency and throughput:

[0147] In this embodiment, the synergy between an array-type microbeam generation subsystem and a multifunctional integrated diffraction signal decoupling and conversion subsystem (such as multiple physical decoupling and conversion channels) achieves a technological leap from traditional "point-to-point scanning" to "area array snapshot imaging." Within a single exposure (e.g., 100 seconds), diffraction information from hundreds of spatial sites can be acquired simultaneously. Compared to traditional scanning micro-area diffraction techniques, the characterization efficiency is improved by more than two orders of magnitude, significantly shortening the time required for full-field mapping of the sample.

[0148] (2) Excellent data authenticity and zero algorithm artifacts:

[0149] Unlike LabDCT or coded aperture technologies, which heavily rely on complex mathematical reconstruction algorithms, this embodiment employs a physical-level "spatial domain full decoupling" mechanism. By forcibly filtering out crosstalk of diffraction signals corresponding to adjacent spatial sites through quasi-conjugate matched decoupling slits, the uncertainty and erroneous results caused by diffraction signal aliasing and analytical aliasing signals are eliminated at the source, ensuring the originality and reliability of the diffraction pattern.

[0150] (3) Ultra-high spatial resolution and near-field detection advantages:

[0151] By optimizing the near-field compact geometry and introducing a two-stage magnification imaging architecture of "scintillator + optical objective + CMOS", the embodiments of this disclosure overcome the technical bottleneck of excessively small spot size caused by near-field detection. The system can capture subtle orientation differences, stress gradients, and phase transition details inside the grain with micron-level or even sub-micron-level spatial resolution, filling the gap in high-resolution dynamic mapping in laboratory environments.

[0152] (4) Excellent dynamic characterization ability and mechanical stability:

[0153] Thanks to the use of distributed parallel illumination and multi-directional signal acquisition logic, the system does not require rotating the sample or detector during measurement. This "static measurement" mode completely eliminates mechanical vibration, eccentricity error, and sample displacement caused by rotating mechanisms, enabling precise capture of transient characteristics in non-uniform dynamic processes such as metal recrystallization and semiconductor processing thermal evolution.

[0154] (5) Excellent system integration and laboratory versatility:

[0155] By integrating physical decoupling, transmission blocking, and signal conversion functions into a multifunctional integrated diffraction signal decoupling and conversion subsystem, the difficulty of aligning precision optical paths is significantly reduced, and the robustness of the system is enhanced. This solution is not only applicable to synchrotron radiation high-brightness light sources, but also significantly improves the utilization rate of laboratory micro-focal sources, enabling efficient and high-precision characterization of large-size sheet foils to be achieved in conventional laboratory environments.

[0156] Furthermore, the spatially decoupled multi-microbeam parallel X-ray diffraction system in this disclosure serves as a high-throughput parallel X-ray diffraction imaging architecture that achieves signal decoupling in physical space. In some scenarios, the spatially decoupled multi-microbeam parallel X-ray diffraction system in this disclosure can be applied to in-situ X-ray diffraction. In-situ X-ray diffraction technology plays a crucial role in materials science and other fields, helping to study the dynamic evolution of material crystal structures, including stress, texture, phases, microcrystals, and crystal orientations, which is of great significance for optimizing material properties. X-ray diffraction technology uses X-rays to irradiate samples and analyzes the diffraction signals generated after the interaction between X-rays and the sample to obtain rich information about the internal crystal structure of the sample. Thus, applying the spatially decoupled multi-microbeam parallel X-ray diffraction system to non-uniform dynamic evolution processes such as recrystallization, phase transitions, and battery charging and discharging in large-size plates and foils provides an in-situ real-time monitoring method with high realism and high spatiotemporal resolution, filling the technological gap in efficient dynamic mapping in a laboratory environment.

[0157] In some scenarios, when using the spatial domain fully decoupled multi-microbeam parallel X-ray diffraction system in the embodiments of this disclosure for actual measurement, it can be combined with existing industrial production lines. The sample to be measured can be placed and measured by devices such as robotic arms. All processes can be automated and intelligently controlled by the control and data processing subsystem. The obtained measurement results can be further analyzed and help optimize the production process.

[0158] Figure 7 This diagram illustrates a spatially decoupled multi-microbeam parallel X-ray diffraction method according to an embodiment of the present disclosure. This method can be applied to the spatially decoupled multi-microbeam parallel X-ray diffraction system described in the above embodiment and may include the following steps:

[0159] Step 701: Generate an X-ray beam using the X-ray source subsystem;

[0160] Step 702: Modulate the X-ray beam into an X-ray microbeam array using an array-type X-ray microbeam generator subsystem to simultaneously irradiate multiple spatial sites of the sample to be tested; wherein the X-ray microbeam array includes multiple microbeams, each of which is used to irradiate one spatial site;

[0161] Step 703: Using a multifunctional integrated diffraction signal decoupling and conversion subsystem, crosstalk between the initial diffraction signals generated at each spatial site after the X-ray microbeam array irradiates the multiple spatial sites is eliminated, and the decoupled diffraction signals corresponding to each spatial site are obtained; and the decoupled diffraction signals corresponding to each spatial site are converted into visible light signals corresponding to each spatial site.

[0162] Step 704: Using the optical magnification and image acquisition subsystem, amplify the visible light signal corresponding to each spatial location, and acquire the amplified visible light signal corresponding to each spatial location to generate a diffraction image.

[0163] In some examples, thanks to the multifunctional integrated diffraction signal decoupling and conversion subsystem, diffraction signals that might otherwise alias in the detector receiving plane are physically confined to independent sensitive regions of the detector, achieving complete spatial isolation. The system utilizes the detector to synchronously receive this diffraction signal array, eliminating the need for complex reconstruction algorithms. By parallel analysis of signals from different detection regions (i.e., sub-regions), the system can obtain microstructural features such as stress, texture, phase composition, and crystal orientation at different spatial sites of the sample. Furthermore, the strong transmitted light (direct light, aligned with the incident light direction) formed by the X-ray microbeam array directly penetrating the sample is blocked by a precise transmission blocking array, preventing its influence on the diffraction signal and damage to the detector system; thus achieving zero-aliasing detection and parallel characterization.

[0164] In some examples, considering that when the sample is close to the detector (i.e., near-field detection), although the diffraction patterns do not overlap, the diffraction spots become extremely small, making it impossible for ordinary X-ray detectors with pixel sizes to capture image details. Therefore, an optical objective amplifier is introduced to amplify and improve detector resolution: the decoupled diffraction signal is received by a high-resolution detector. This detector first converts X-ray photons into visible light signals (i.e., visible light images) through a thin-film scintillator; then, the visible light signals are physically amplified at high magnification using an optical objective amplifier; finally, the amplified diffraction spot image is captured by a CMOS or sCMOS sensor. Relying on the optical amplification architecture and physical decoupling mechanism, the system can capture high-precision local details of the diffraction pattern within a very small detection area. By parallel analysis of the signals in each sub-region (i.e., the signals corresponding to each spatial site), ultra-high spatial resolution mapping of the microstructure characteristics such as stress, texture, and crystal orientation of different spatial sites of the sample under test is achieved.

[0165] Figure 8 A flowchart illustrating another spatially domain fully decoupled multi-microbeam parallel X-ray diffraction method according to an embodiment of the present disclosure is shown, as follows: Figure 8 As shown,

[0166] First, adjust the relative positions of the microbeam generator (pinhole / zone plate array) with the spatial decoupling module and the transmission blocking array to ensure that the physical decoupling channels are strictly aligned.

[0167] For example, a high-precision adjustment mechanism can be used to achieve spatial alignment between the front-end array-type microbeam generation system and the back-end multifunctional integrated decoupling module. This ensures that each microbeam accurately passes through the corresponding physical decoupling channel, establishing a point-to-point "conjugate optical path" reference.

[0168] Then, the sample, such as the foil / film to be tested, is placed on the sample stage. Optionally, an external stimulus is applied, such as in-situ heating or mechanical tension, to trigger the evolution of the microstructure.

[0169] For example, the sample to be tested can be placed at a preset position on the microbeam path, and external stimuli such as heating or stretching can be applied to the sample. This completes the sample loading process. In addition, the initial state of the sample can be recorded.

[0170] Furthermore, the X-ray source generates X-rays, and multiple X-ray beams generated by the micro-beam generator simultaneously penetrate the sample, striking several spatially discrete sites (such as N). N) synchronously excited diffraction signals.

[0171] For example, an X-ray source can be activated, and the X-rays are modulated by an array-type X-ray microbeam generator subsystem to form an X-ray microbeam array, which simultaneously irradiates multiple spatial sites of the sample under test; each irradiated spatial site is synchronously excited to generate a diffraction signal containing crystal structure information; thereby realizing multi-point parallel excitation and diffraction signal generation.

[0172] Next, the diffracted signal passes through a conjugate-matched decoupling module (i.e., a physical decoupling and conversion channel), where the overlap of adjacent signals is forcibly eliminated through physical constraints. Strong transmitted signals are blocked by a transmission blocking array.

[0173] For example, the diffraction signal enters a multifunctional integrated diffraction signal decoupling and conversion subsystem. The physical decoupling and conversion channel limits the signal's diffusion range, forcibly eliminating spatial overlap between diffraction signals generated by adjacent spatial sites. Simultaneously, the blocking structure within the multifunctional integrated diffraction signal decoupling and conversion subsystem shields the high-intensity transmitted direct beam, thereby purifying the diffraction signal at the physical level. This achieves spatial domain physical decoupling and background shielding.

[0174] Furthermore, the scintillator of the high-resolution detector system receives the diffraction signal, converts it into a visible light signal, amplifies it through an optical objective lens, and is received by a photoelectric sensor (such as CMOS), further improving the resolution of the detected diffraction signal.

[0175] For example, the purified diffraction signal after physical decoupling is irradiated onto a scintillator and converted into a visible light signal. This visible light signal is then physically amplified by an optical objective amplifier to compensate for the miniaturization of the spot size caused by near-field detection and improve the recognizability of the diffraction spot image; thereby achieving signal conversion and optical magnification.

[0176] Finally, after the detector acquires an array image containing several independent, interference-free diffraction patterns, the computer automatically segments the image region, extracts parameters such as stress, texture, and crystal orientation at each point, and performs further analysis.

[0177] For example, a high-resolution photoelectric sensor (CMOS / sCMOS) is used to acquire amplified visible light signals to generate an arrayed diffraction pattern. The computer software automatically segments the diffraction spot image into multiple independent sub-regions (corresponding to multiple spatial sites) according to the preset coordinates of the physical decoupling and conversion channels, and extracts the orientation, stress, phase, and other evolution parameters of each spatial site over time in parallel; thereby realizing parallel image acquisition and automated analysis.

[0178] The flowcharts and block diagrams in the accompanying drawings illustrate the architecture, functionality, and operation of possible implementations of systems, methods, and computer program products according to various embodiments of the present disclosure. In this regard, each block in a flowchart or block diagram may represent a module, segment, or portion of an instruction containing one or more executable instructions for implementing a specified logical function. In some alternative implementations, the functions marked in the blocks may occur in a different order than those shown in the drawings. For example, two consecutive blocks may actually be executed substantially in parallel, and they may sometimes be executed in reverse order, depending on the functions involved. It should also be noted that each block in the block diagrams and / or flowcharts, and combinations of blocks in the block diagrams and / or flowcharts, may be implemented using a dedicated hardware-based system that performs the specified function or action, or using a combination of dedicated hardware and computer instructions.

[0179] The various embodiments of this disclosure have been described above. These descriptions are exemplary and not exhaustive, nor are they limited to the disclosed embodiments. Many modifications and variations will be apparent to those skilled in the art without departing from the scope and spirit of the described embodiments. The terminology used herein is chosen to best explain the principles, practical application, or technical improvements to the embodiments in the market, or to enable others skilled in the art to understand the embodiments disclosed herein.

Claims

1. A spatially decoupled multi-microbeam parallel X-ray diffraction system, characterized in that, The system includes: The system comprises an X-ray source subsystem, an array-type X-ray microbeam generation subsystem, a multifunctional integrated diffraction signal decoupling and conversion subsystem, and an optical amplification and image acquisition subsystem; among which... The X-ray source subsystem is used to generate an X-ray beam; The array-type X-ray microbeam generator subsystem is disposed in the output optical path of the X-ray source subsystem and is used to modulate the X-ray beam into an X-ray microbeam array to simultaneously irradiate multiple spatial sites of the sample under test; wherein, the X-ray microbeam array includes multiple microbeams, each microbeam being used to irradiate one spatial site; The multifunctional integrated diffraction signal decoupling and conversion subsystem is used to eliminate crosstalk between the initial diffraction signals generated at each spatial site after the X-ray microbeam array irradiates the multiple spatial sites, to obtain the decoupled diffraction signal corresponding to each spatial site; and to convert the decoupled diffraction signal corresponding to each spatial site into the visible light signal corresponding to each spatial site. The optical magnification and image acquisition subsystem is used to amplify the visible light signals corresponding to each spatial location and acquire the amplified visible light signals corresponding to each spatial location to generate a diffraction image.

2. The system according to claim 1, characterized in that, The sample to be tested and the detection and receiving planes corresponding to the multifunctional integrated diffraction signal decoupling and conversion subsystem are arranged in a near-field configuration.

3. The system according to claim 1, characterized in that, The multifunctional integrated diffraction signal decoupling and conversion subsystem has multiple physical decoupling and conversion channels. Each of the multiple microbeams is matched with one of the multiple physical decoupling and conversion channels so that the initial diffraction signal generated after the microbeam irradiates the corresponding spatial site of the sample under test can be incident on the physical decoupling and conversion channel.

4. The system according to claim 3, characterized in that, The multifunctional integrated diffraction signal decoupling and conversion subsystem includes: a physical decoupling unit, an array-type transmission blocking unit, and a scintillator conversion unit; wherein, the physical decoupling unit, the array-type transmission blocking unit, and the scintillator conversion unit are sequentially arranged along the propagation direction of the initial diffraction signal generated at each spatial site after the X-ray microbeam array irradiates the multiple spatial sites, to constitute the multiple physical decoupling and conversion channels; wherein... The physical decoupling unit is used to filter out oblique scattered light from the initial diffraction signal generated by each spatial site after the X-ray microbeam array irradiates the multiple spatial sites, so as to obtain the diffraction signal corresponding to each spatial site after removing oblique scattered light. The array-type transmission blocking unit is used to filter the transmitted direct beam in the diffraction signal after removing oblique scattered light corresponding to each spatial position, so as to obtain the decoupled diffraction signal corresponding to each spatial position. The scintillator conversion unit is used to convert the decoupled diffraction signals corresponding to each spatial location into visible light signals corresponding to each spatial location.

5. The system according to claim 4, characterized in that, The physical decoupling unit includes multiple physical decoupling slits, the array-type transmission blocking unit includes multiple transmission blocking components, and the scintillator conversion unit includes a scintillator. The physical decoupling slit, the transmission blocking component, and the area on the scintillator corresponding to the physical decoupling slit constitute a physical decoupling and conversion channel.

6. The system according to claim 1, characterized in that, The array-type X-ray microbeam generation subsystem includes a Fresnel zone plate array or a pinhole array.

7. The system according to claim 1, characterized in that, The optical magnification and image acquisition subsystem includes: an optical objective amplifier and an optical camera sensor; wherein... The optical objective amplifier is positioned on the propagation path of the visible light signal corresponding to each spatial position, and is used to physically amplify the visible light signal corresponding to each spatial position to obtain the amplified visible light signal corresponding to each spatial position. The optical camera sensor is positioned along the propagation path of the amplified visible light signal corresponding to each spatial location, and is used to collect the amplified visible light signal corresponding to each spatial location to generate the diffraction image.

8. The system according to claim 3, characterized in that, The plurality of microbeams are periodically distributed, and / or the plurality of physical decoupling and conversion channels are periodically distributed.

9. The system according to claim 1, characterized in that, The system also includes: A control and data processing subsystem is used to control one or more of the X-ray source subsystem, the array-type X-ray microbeam generation subsystem, the multifunctional integrated diffraction signal decoupling and conversion subsystem, and the optical amplification and image acquisition subsystem. And / or, The diffraction image is used to analyze the diffraction image and obtain the structural information of the sample under test.

10. A spatially decoupled multi-microbeam parallel X-ray diffraction method, characterized in that, The method, applied to any one of the spatial domain fully decoupled multi-microbeam parallel X-ray diffraction systems of claims 1-9, comprises: An X-ray beam is generated through an X-ray source subsystem; The X-ray beam is modulated into an X-ray microbeam array using an array-type X-ray microbeam generator subsystem to simultaneously irradiate multiple spatial sites of the sample under test; wherein the X-ray microbeam array includes multiple microbeams, each of which is used to irradiate one spatial site; A multifunctional integrated diffraction signal decoupling and conversion subsystem is used to eliminate crosstalk between the initial diffraction signals generated at each spatial site after the X-ray microbeam array irradiates the multiple spatial sites, thereby obtaining the decoupled diffraction signal corresponding to each spatial site; and the decoupled diffraction signal corresponding to each spatial site is converted into the visible light signal corresponding to each spatial site. The visible light signal corresponding to each spatial location is amplified using an optical magnification and image acquisition subsystem, and the amplified visible light signal corresponding to each spatial location is acquired to generate a diffraction image.

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