Magnetic levitation pump sensor zero voltage measuring device, debugging device and method

Abstract

The application discloses a kind of magnetic suspension pump sensor zero voltage measuring device, debugging device, method, it belongs to magnetic suspension molecular pump radial displacement sensor measurement and debugging field, its technical key points are in, sensor lifting assembly, voltage acquisition unit, object platform moving assembly, main shaft simulation unit, middle component;Main shaft simulation unit includes: fixedly connected simulation main shaft and circular work station plate, the circumferential of circular work station plate is provided with protrusion, protrusion coincides with the central axis of simulation main shaft;Middle component includes: work station base, left and right spring assembly, left and right top silk assembly;Work station base is slidably arranged on object platform.The technical scheme of the application is suitable for mass production debugging of magnetic suspension molecular pump eddy current radial displacement sensor.

Description

Technical Field

[0001] This application relates to the field of radial displacement sensor measurement and debugging of magnetic levitation molecular pump, and more specifically, to a zero-position voltage measurement device, debugging device, and method for magnetic levitation pump sensor. Background Technology

[0002] <Structural Design of a Four-Slider Eddy Current Sensor> Magnetic levitation molecular pumps typically use a four-slider type eddy current sensor to detect the radial offset of the spindle in real time. Figure 1 This illustrates the four-slider eddy current sensor proposed by the research and development team.

[0003] from Figure 1 It can be seen that the four-slider type eddy current sensor 100 includes: a. A circular body 110 has a central through hole 113 formed in its middle for the main shaft to pass through; four mounting positions 111 are evenly distributed on its circumference at 90° intervals, corresponding to the four radial directions of the main shaft: X+, Y+, X-, and Y-; and four positioning holes 114 arranged in a circular array are provided on its top. b. Four sliders 120 with built-in eddy current coils are provided in each installation station. Each installation station is provided with a stepped limiting structure. The two sides of the slider 120 are attached to the stepped surface 112 of the stepped limiting structure. Each slider uses the eddy current effect to convert the gap change between the coil and the main shaft into an analog voltage signal, thereby indirectly feeding back the real-time position of the magnetic levitation pump main shaft. c. Screw 130, each slider 120 is clamped by two screws; threaded holes that mate with screw 130 are provided on the ring body 110.

[0004] The four-slider eddy current sensor 100 described above is characterized in that when the two screws are tightened, the screws press the two sides of the slider 120 against the stepped surface 112. At the same time, the stepped surface 112 is also subjected to compressive stress, which forces the stepped limiting structure to produce a slight elastic deformation.

[0005] In other words, the screw tightening torque has a significant impact on the test results: a) When the screw tightening torque is increased, the slight deformation of the step limit structure will increase, which will drive the slider fixed on the step to make a slight adjustment of the overall displacement, reduce the gap between the built-in coil of the slider and the main shaft, and increase the intensity of eddy current induction accordingly, and finally increase the output voltage of the sensor synchronously.

[0006] b. When the screw tightening torque is reduced (i.e., reverse adjustment), the step limit structure elastically deforms and rebounds, which increases the gap between the built-in coil of the slider and the main shaft, thereby weakening the eddy current induction intensity and ultimately reducing the sensor output voltage synchronously.

[0007] c. If the screw tightening torque is too high, the gap will be too small, resulting in excessive eddy current effects. This will cause the output voltage to enter the nonlinear region (the output voltage will no longer change linearly with the gap), causing the sensor to lose displacement resolution. Conversely, if the screw tightening torque is too low, the slider may loosen during vibration or temperature changes.

[0008] <Debugging Requirements for Four-Slider Eddy Current Sensors> The debugging requirements for a four-slider type eddy current sensor must meet the following two conditions: (1) When the spindle coincides with the axis of the four-slider eddy current sensor, the gaps between the four coils and the surface of the spindle are completely consistent (i.e., the electrical zero points are completely aligned).

[0009] (2) The magnetic levitation molecular pump is equipped with a protective bearing, and the maximum range of motion of the main shaft is within the range of the protective bearing. Within this range, the distance-voltage between the coil and the main shaft can always be kept in the linear range.

[0010] That is, when the axis of the main shaft coincides with that of the four-slider eddy current sensor, the distance between the coil and the main shaft is d, the inner surface diameter of the protective bearing is D1, and the outer surface diameter of the main shaft is D0. Therefore, it is necessary to ensure that the distance-voltage ratio between the coil and the main shaft remains within the linear range, within the range of d+(D1-D0) / 2 to d-(D1-D0) / 2.

[0011] However, there is currently a lack of debugging equipment for the aforementioned four-slider eddy current sensor. Summary of the Invention

[0012] The purpose of this application is to provide a magnetic levitation pump eddy current position sensor debugging device to address the shortcomings of the prior art.

[0013] Another objective of this application is to provide a debugging method for an eddy current position sensor for a magnetic levitation pump.

[0014] The technical solution of this application is as follows: A zero-position voltage measuring device for a magnetic levitation pump sensor is used to measure the zero-position voltage of the radial eddy current position sensor of the magnetic bearing of a magnetic levitation pump. include: Sensor lifting assembly, used to control the up and down movement of the sensor; The voltage acquisition unit is used to acquire the voltage signals of the four coils of the sensor; A moving assembly for a cargo platform includes: a working base plate, a cargo platform slidably disposed on the working base plate, and an X-axis pushing mechanism assembly for moving the cargo platform. The spindle simulation unit includes: a simulated spindle and a circular workstation plate that are fixedly connected. The circular workstation plate has a protrusion in its circumference, and the protrusion coincides with the central axis of the simulated spindle. The bottom of the simulated spindle has a protruding limiting component. The middle component includes: a workstation base, left and right spring assemblies, and left and right set screw assemblies; the workstation base is slidably mounted on the loading platform; one end of the left and right spring assemblies is fixedly connected to the loading platform, and the other end is connected to the left and right sides of the workstation base; the bottom of the workstation base is provided with an X-direction strip hole for the insertion of the limiting component at the bottom of the simulated spindle; the left and right set screw assemblies are respectively arranged on both sides of the workstation base, and the ends of the set screws of both abut against the protrusions of the circular workstation plate. By adjusting the left and right set screw assemblies, the X-direction position of the simulated spindle can be finely adjusted.

[0015] Furthermore, the inner surface diameter of the protective bearing of the magnetic levitation pump on which the sensor to be tested is D1, and the outer surface diameter of the main shaft is D0; the outer surface diameter of the circular body of the sensor to be tested is DM, and the inner surface diameter of the protrusion of the circular workstation plate is DQ; it is necessary to satisfy: DQ-DM=D1-D0.

[0016] Furthermore, the X-direction pushing mechanism assembly includes: a left-side jacking mechanism assembly and a right-side jacking mechanism assembly; both the left-side jacking mechanism assembly and the right-side jacking mechanism assembly are placed on the working base plate, and both are unidirectional thrust mechanisms; The moving assembly of the loading platform also includes a loading platform return mechanism, which includes a left return spring assembly and a right return spring assembly. One end of the left return spring assembly and the right return spring assembly are connected to a vertical plate fixed to the working base plate, and the other end is connected to the loading platform.

[0017] Furthermore, it also includes: a centering cylinder assembly fixed to the working base plate; a V-shaped notch is provided on the side of the workstation base, and a pusher head adapted to the shape of the V-shaped notch is provided at the front end of the piston rod of the centering cylinder assembly.

[0018] Furthermore, multiple parallel lower X-axis guide rails are provided on the working base plate, and the loading platform is slidably arranged on the lower X-axis guide rails; multiple parallel upper X-axis guide rails are provided on the upper surface of the loading platform, and the workstation base is slidably arranged on the upper X-axis guide rails.

[0019] Furthermore, the sensor lifting assembly includes: a lifting drive mechanism, a lifting carrier plate, and a vacuum suction cup; the lifting drive mechanism is used to drive the lifting carrier plate to move up and down, and the vacuum suction cup is fixedly disposed on the lower side of the lifting carrier plate; the vacuum suction cup is used to adsorb the sensor.

[0020] Furthermore, both the lifting platform and the vacuum suction cup are equipped with through holes no smaller than the central through hole of the sensor.

[0021] Furthermore, a positioning pin is provided on the lower side of the vacuum suction cup, and the sensor is provided with a positioning hole that corresponds to the positioning pin.

[0022] A method for measuring the zero-position voltage of a magnetic levitation pump sensor, wherein the four coils of the sensor to be tested are sequentially labeled as coils 1, 2, 3, and 4; coils 1 and 3 form a detection pair, and coils 2 and 4 form a detection pair. The method for measuring the zero-position voltage of any coil i using the aforementioned measuring device includes the following steps: S1, place the sensor on the sensor lifting assembly and distribute the detection pair containing coil i along the X direction; i is any natural number from 1 to 4; S2, connect coil i to the voltage acquisition unit; S3, Initial adjustment of the position of the simulation spindle: Adjust the left and right set screw assemblies of the middle component to make the simulation spindle coaxial with the sensor; S4, the sensor lifting assembly drives the sensor to descend, allowing the analog spindle to pass through the central through hole of the sensor; S5, coil i generates a relative displacement with the main shaft to obtain its zero-position voltage; this includes the following sub-steps: S5.1, the push rod of the left-side jacking mechanism extends, causing the platform to move to the right. The platform then moves the workstation base and the spindle simulation unit to the right until the outer circle of the sensor contacts the raised inner wall of the workstation base of the spindle simulation unit. Record the output voltage of coil i at this moment: U i,右侧 ; S5.2, the push rod of the left push mechanism component returns to its initial state; S5.3, the push rod of the right-side jacking mechanism extends, causing the platform to move to the left. The platform, along with the workstation base and the spindle simulation unit, moves to the left until the outer circle of the sensor contacts the raised inner wall of the workstation base of the spindle simulation unit. Record the output voltage of coil i at this moment: U i,左侧 ; S5.4, the zero-position voltage of coil i is: (U i,右侧 +U i,左侧 ) / 2; S5.5, the push rod of the right-side jacking mechanism component returns to its initial state; S6, the sensor lifting assembly drives the sensor to rise to its initial state; S7, coil i is disconnected from the voltage acquisition unit.

[0023] Furthermore, S5.1 also includes: the pusher at the front end of the piston rod of the centering cylinder assembly is pulled out from the V-shaped notch in the workstation base; S5.5 also includes: pushing the platform back to its initial position, and then inserting the pusher at the front end of the piston rod of the centering cylinder assembly into the V-shaped notch of the workstation base.

[0024] A magnetic levitation pump sensor debugging device, comprising: A zero-point voltage measuring device for a magnetic levitation pump sensor, used to test the zero-point voltage of the sensor's four coils; The dual-screw synchronous locking mechanism has two locking actuators that can move along the X-axis. When the sensor lifting assembly controls the sensor to descend to the preset position, the dual-screw synchronous locking mechanism adjusts the tightening torque of the screw of the slider containing the adjacent coil of the two coils that can perform zero-position voltage measurement.

[0025] Furthermore, there are two dual-screw synchronous locking mechanisms, which are respectively set on the left and right sides of the magnetic levitation pump sensor zero-position voltage measuring device, and respectively adjust the tightening torque of the screws of the sliders where the two coils capable of zero-position voltage measurement are located.

[0026] A method for debugging a magnetic levitation pump sensor, the sensor to be debugged includes: a circular ring body, with four mounting positions evenly distributed at 90° intervals along its circumference, corresponding to the four radial directions of the main shaft: X+, Y+, X-, and Y-; four sliders with built-in eddy current coils, one slider in each mounting position; each mounting position is provided with a stepped limiting structure, and the two sides of the slider are attached to the stepped surface of the stepped limiting structure; screws, one screw on each side of each slider, and threaded holes for cooperating with the screws provided on the circular ring body; each slider is tightened by two screws; The screw tightening torque of the four sliders was adjusted so that the zero-point voltage of the coils of all four sliders was within [E] after the sensor underwent aging treatment. 阈值min E 阈值max Within the range; The method for adjusting any one of the sliders includes the following steps: Step 1: Secure the two screws of the slider using the double-screw synchronous locking mechanism; Step 2, perform aging treatment on the sensor assembly, which means maintaining the sensor at 60°C for 48 hours; Step 3: Obtain the zero-point voltage E of the slider's coil using the sensor zero-point voltage measuring device. 老化后 ; Step 4, Logical Judgment: If E 老化后 In [E] 阈值min E 阈值max If the value is in the middle, it indicates that the screw tightening of the slider has been adjusted; E 阈值min E阈值max These represent the minimum and maximum values ​​of the target zero-position voltage threshold, respectively. Otherwise, adjust the tightening torque of the two screws on the slider using the double-screw synchronous locking mechanism to re-lock it, and repeat steps Step 1 to Step 4.

[0027] A method for debugging a magnetic levitation pump sensor, the sensor to be debugged includes: a circular ring body, with four mounting positions evenly distributed at 90° intervals along its circumference, corresponding to the four radial directions of the main shaft: X+, Y+, X-, and Y-; four sliders with built-in eddy current coils, one slider in each mounting position; each mounting position is provided with a stepped limiting structure, and the two sides of the slider are attached to the stepped surface of the stepped limiting structure; screws, one screw on each side of each slider, and threaded holes for cooperating with the screws provided on the circular ring body; each slider is tightened by two screws; The screw tightening torque of the four sliders was adjusted so that the zero-point voltage of the coils of all four sliders was within [E] after the sensor underwent aging treatment. 阈值min E 阈值max Within the range; The method for adjusting any one of the sliders includes the following steps: Step 1, Initial Locking and Initial Measurement: The two screws of the slider are locked using a double-screw synchronous locking mechanism, and the zero-position voltage E1 of the slider's coil is measured at the same time. Let the current iteration number n = 1; Step 2, Aging treatment: The sensor assembly is subjected to aging treatment, which means that the sensor is maintained at 60°C for 48 hours; Step 3, measurement after aging: obtain the zero-position voltage En' of the slider's coil; Step 4, Logical Judgment: If En' is in [E 阈值min E 阈值max If the value in the image is 'E', it indicates that the screw tightening of the slider has been completed, and the adjustment of the slider is finished; 阈值min E 阈值max These represent the minimum and maximum values ​​of the target zero-position voltage threshold, respectively. Otherwise, proceed to step five; Step 5, Re-locking: The two screws of the slider are adjusted and re-locked using a double-screw synchronous locking mechanism to make the zero-position voltage of the slider's coil En+1=E0·En / En'; where E0 represents the target optimal value of the zero-position voltage; Step six: Reassign n+1 to n, and return to step two.

[0028] Furthermore, E 阈值minE 阈值max 2.49V and 2.51V respectively.

[0029] Furthermore, E0 = 2.5V.

[0030] The beneficial effects of this application are as follows: (1) This application proposes a zero-position voltage measuring device for a magnetic levitation pump sensor, wherein the zero-position voltage represents the reference voltage signal when the main shaft has no offset.

[0031] The key design feature of the zero-position voltage measuring device is: i. The inner diameter of the protrusion on the circular workstation plate should be slightly larger than the outer diameter of the circular body of the sensor to be tested, so that the sensor can move within the range of the protrusion on the circular workstation plate, thereby simulating the offset between the spindle and the coil.

[0032] ii. The simulated spindle is fixed to the workstation base, and left and right spring assemblies are set on both the left and right sides of the workstation base instead of directly fixing the simulated spindle to the carrying platform. This is because: if the simulated spindle is directly fixed to the carrying platform, when the carrying platform moves with the circular workstation plate, if the distance moved by the carrying platform with the circular workstation plate is greater than (DQ-DM) / 2, the contact between the outer periphery of the sensor and the protrusion of the circular workstation plate will be a hard contact, and the shapes of both will be deformed, resulting in damage.

[0033] The detection approach in this application is as follows: i. The sensor lifting assembly controls the sensor to move downwards, so that the analog spindle is inserted into the center through hole of the sensor; ii. During detection, the sensor is kept stationary while the spindle moves in the X direction to simulate spindle offset. When the sensor moves and touches the protrusion of the circular workstation plate, it indicates that the spindle has offset and touched the protective bearing.

[0034] iii. Zero-position voltage: Select (voltage value when the coil is furthest from the spindle + voltage value when the coil is closest to the spindle) / 2 as the zero-position voltage value.

[0035] (2) How to center the zero-position voltage measuring device is a difficult problem. This application uses "a left push mechanism assembly and a right push mechanism assembly, in the initial state, the push rods of both do not directly contact the loading platform". At the same time, the design is as follows: a V-shaped notch is provided on the side of the workstation base; the piston rod of the centering cylinder assembly is provided with a push head that matches the shape of the V-shaped notch, so as to ensure that the simulated spindle can maintain the centering state each time it is in the initial state (in actual use, the centering cylinder assembly first positions the workstation base, and then the left and right push screw assemblies are used to adjust the position of the simulated spindle on the workstation base to ensure the position of the simulated spindle).

[0036] During use, first measure the zero-position voltage of coils 1 and 3, then simulate the spindle returning to its initial position. However, if the push rod of the left-side jacking mechanism is fixed to the platform, then controlling the stroke distance of the left-side jacking mechanism to return the simulated spindle to its initial position may result in a deviation.

[0037] (3) This application proposes a method for debugging a magnetic levitation pump sensor. Its core idea is: initial locking - aging treatment - voltage measurement - pass / fail judgment - relocking if unqualified - aging again - measurement again in an iterative cycle test until the voltage converges to the target voltage range after aging.

[0038] Its core concept lies in the following steps for adjusting any slider: Step 1, Initial Locking and Initial Measurement: The two screws of the slider are locked using a double-screw synchronous locking mechanism, and the zero-position voltage E1 of the slider's coil is measured at the same time. Let the current iteration number n = 1; Step 2, Aging treatment: The sensor assembly is subjected to aging treatment, which means that the sensor is maintained at 60°C for 48 hours; Step 3, measurement after aging: obtain the zero-position voltage En' of the slider's coil; Step 4, Logical Judgment: If En' is in [E 阈值min E 阈值max If the value in the image is 'E', it indicates that the screw tightening of the slider has been completed, and the adjustment of the slider is finished; 阈值min E 阈值max These represent the minimum and maximum values ​​of the target zero-position voltage threshold, respectively. Otherwise, proceed to step five; Step 5, Re-locking: The two screws of the slider are adjusted and re-locked using a double-screw synchronous locking mechanism to make the zero-position voltage of the slider's coil En+1=E0·En / En'; where E0 represents the target optimal value of the zero-position voltage; Step six: Reassign n+1 to n, and return to step two. Attached Figure Description

[0039] The present application will be further described in detail below with reference to the embodiments in the accompanying drawings, but this does not constitute any limitation on the present application.

[0040] Figure 1 It is a 3D design drawing of an existing four-slider eddy current sensor.

[0041] Figure 2 This is a schematic diagram of a design where the slider is tightened by screws.

[0042] Figure 3 This is a design schematic diagram of the installation station and the step surface.

[0043] Figure 4 This is a three-dimensional structural schematic diagram of the magnetic bearing eddy current sensor debugging device of this application.

[0044] Figure 5 This is a schematic diagram showing the relationship between the zero-position voltage measuring device for the magnetic levitation pump sensor and the double-screw synchronous locking mechanism of this application.

[0045] Figure 6 This is a three-dimensional structural schematic diagram of the sensor lifting assembly of this application.

[0046] Figure 7 This is a three-dimensional structural diagram of the vacuum suction cup of this application.

[0047] Figure 8 This is a three-dimensional structural diagram of the spindle simulation unit of this application.

[0048] Figure 9 This is a top view of the central component of this application.

[0049] Figure 10 This is a three-dimensional structural diagram of the central component of this application.

[0050] Figure 11 This is a three-dimensional structural schematic diagram of the moving component of the cargo platform of this application.

[0051] Figure 12 This is a side view of the moving component of the cargo platform of this application.

[0052] Figure 13 This is a three-dimensional structural schematic diagram of the centering cylinder assembly of this application.

[0053] Figure 14 This is a schematic diagram showing the relationship between the pusher of the centering cylinder assembly and the V-shaped notch of the workstation base in this application.

[0054] Figure 15 This is a flowchart of the magnetic levitation pump sensor debugging method of this application.

[0055] The annotations in the attached figures are explained as follows: Sensor 100, circular ring body 110, mounting station 111, stepped surface 112, central through hole 113, positioning hole 114; Slider 120; Screw 130; Sensor zero-point voltage measuring device 1000; Sensor lifting assembly 1100, lifting carrier plate 1110, vacuum suction cup 1120, positioning pin 1121; Voltage acquisition unit 1200; Spindle simulation unit 1300, workstation plate 1301, simulated spindle 1302, protrusion 1303; The central component 1400, the workstation base 1410, the X-direction strip hole 1411, the V-shaped notch 1412, the left set screw assembly 1420, the right set screw assembly 1430, the left spring assembly 1440, and the right spring assembly 1450. The following components are included: a moving platform assembly 1500, a working base plate 1510, a lower X-axis guide rail 1520, a loading platform 1530, a left-side jacking mechanism assembly 1541, a right-side jacking mechanism assembly 1542, an upper X-axis guide rail 1550, and a loading platform return mechanism 1560. Cylinder assembly 1600 and pusher 1610; Double screw synchronous locking mechanism 2000. Detailed Implementation

[0056] To make the objectives, technical solutions, and advantages of this application clearer, the technical solutions of this application will be clearly and completely described below in conjunction with specific embodiments and corresponding drawings. Obviously, the described embodiments are only a part of the embodiments of this application, and not all of them. Based on the embodiments in this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0057] <Research and Development Foundation> The sensor to be debugged is a radial eddy current position sensor of a magnetic bearing in a magnetically levitated molecular pump, and its structure includes: a. A circular ring body, with a central through hole formed in the middle for the main shaft to pass through; four mounting positions evenly distributed at 90° intervals on the side of its circumference, corresponding to the four radial directions of the main shaft: X+, Y+, X-, and Y-; and four positioning holes arranged in a circular array on its top. b. Four sliders with built-in eddy current coils are installed in each installation station. Each installation station is equipped with a stepped limiting structure, and the two sides of the sliders are attached to the stepped surface of the stepped limiting structure. Each slider uses the eddy current effect to convert the gap change between the coil and the main shaft into an analog voltage signal, thereby indirectly feeding back the real-time position of the magnetic levitation pump main shaft. c. Screws: Each slider is secured by two screws; threaded holes that mate with the screws are provided on the ring body.

[0058] The debugging objective of this application is to adjust the screw tightening torque to ensure that the distance-voltage between the coil and the spindle remains within the linear range. Since the distance between the coil and the spindle (corresponding to the voltage) is within a certain range, the distance-voltage linear range can be guaranteed. Therefore, the optimal value of the target zero-point voltage, E0, can be used as the debugging target.

[0059] For the four-slider eddy current sensor used by the R&D team, E0=2.5. That is, the goal of the debugging is to adjust the tightening torque of the two screws of each slider so that the threshold range corresponding to the coil of each slider is [2.49V, 2.51V].

[0060] <Example 1> Figure 4 The overall three-dimensional structure of the magnetic bearing eddy current sensor debugging device is shown. Figure 5 The diagram illustrates the relationship between the zero-position voltage measuring device of the magnetic levitation pump sensor and the double-screw synchronous locking mechanism.

[0061] A magnetic bearing eddy current sensor debugging device 10, comprising: The sensor zero-point voltage measuring device 1000 is used to test the zero-point voltage of the four coils of the sensor. The dual-screw synchronous locking mechanism 2000 consists of two units, which are respectively located on the left and right sides of the zero-position voltage measuring device of the magnetic levitation pump sensor. They are used to adjust the tightening torque of the screws of the sliders containing the two coils that can perform zero-position voltage measurement (after extensive testing, the sensor has a unique optimal stable operating range: screw tightening torque of 2.0~2.8 N·m).

[0062] A magnetic levitation pump sensor zero-position voltage measuring device 1000, comprising: i. Sensor lifting assembly 1100. Figure 6 and Figure 7 A three-dimensional structural diagram of the sensor lifting assembly 1100 is shown. The sensor lifting assembly 1100 includes: a lifting drive mechanism, a lifting carrier plate 1110, and a vacuum suction cup 1120. The lifting drive mechanism is used to drive the lifting carrier plate 1110 to rise and fall. The vacuum suction cup 1120 is fixedly disposed on the lower side of the lifting carrier plate 1110. The vacuum suction cup 1120 is used to adsorb the sensor 100 to be debugged. Two positioning pins 1121 are provided on the lower side of the vacuum suction cup 1120. The sensor 100 has four positioning holes 114 with a phase angle of 90°. In use, two positioning holes of the sensor 100 are inserted into the positioning pins; then the sensor 100 is rotated 90° and the other two positioning holes are inserted into the positioning pins. Both the lifting carrier plate 1110 and the vacuum suction cup 1120 have through holes in their middle sections, and the size of these through holes is larger than the central through hole of the sensor. That is, during detection, the simulated spindle 1302 extends into the central through hole of the sensor, the through hole of the vacuum suction cup 1120, and the through hole of the lifting carrier plate 1110.

[0063] ii. Voltage acquisition unit 1200, which is used to acquire the voltage signals of the four coils of sensor 100.

[0064] iii, Spindle simulation unit 1300. Figure 8 A three-dimensional structural diagram of the spindle simulation unit 1300 is shown. It includes: a workstation plate 1301 and a simulated spindle 1302 fixed in the middle of the workstation plate 1301; the circular workstation plate is provided with a protrusion 1303 in the circumferential direction, and the protrusion 1303 coincides with the central axis of the simulated spindle 1302.

[0065] The inner surface diameter of the protective bearing of the magnetic levitation pump on which the sensor to be tested is D1, and the outer surface diameter of the main shaft is D0; the outer surface diameter of the circular body of the sensor to be tested is DM, and the inner surface diameter of the protrusion of the circular workstation plate is DQ; D1, D0, DQ, and DM need to satisfy: DQ-DM=D1-D0.

[0066] iv. Middle component 1400. Figure 9 The diagram shows a top view of the central component 1400. Figure 10 The diagram shows the three-dimensional structure of the central component 1400.

[0067] The middle component 1400 includes: a workstation base 1410, a left set screw assembly 1420, a right set screw assembly 1430, a left spring assembly 1440, and a right spring assembly 1450. The workstation base 1410 can be mounted on the upper X-guide rail 1550 of the loading platform 1530. Vertical plates are provided on the left and right sides of the loading platform 1530, and springs are mounted on these vertical plates. The left vertical plate and the spring on it constitute a left spring assembly 1440, and the right vertical plate and the spring on it constitute a right spring assembly 1450. That is, one end of the left spring assembly 1440 and the right spring assembly 1450 are connected to the left and right vertical plates respectively, and the other end is fixedly connected to the workstation base 1410. Through the symmetrical arrangement of the left spring assembly 1440 and the right spring assembly 1450, when the loading platform 1530 moves along the X-direction to the end of its stroke, the springs are compressed or stretched, generating a buffering force to absorb the impact kinetic energy of the loading platform 1530, achieving flexible limiting and buffer protection in the X-direction. The bottom of the workstation base 1410 is provided with an X-shaped slot 1411; The mounting bases of the left and right set screw assemblies are respectively fixed on the left and right sides of the workstation base 1410; A limiting component is provided below the spindle simulation unit 1300. The limiting component is inserted into the X-direction strip hole 1411, that is, the spindle simulation unit 1300 is placed on the workstation base 1410, and the spindle simulation unit 1300 and the workstation base 1410 can generate relative displacement in the X direction. The left set screw assembly 1420 and the right set screw assembly 1430 are symmetrically arranged on both sides of the spindle simulation unit 1300; by adjusting the left / right set screw assemblies, the position of the spindle simulation unit 1300 in the X direction can be adjusted in conjunction with the workstation base 1410.

[0068] v, Cargo platform mobile component 1500. Figure 11 The three-dimensional structural design of the mobile component 1500 of the cargo platform is shown. Figure 12 The side view of the moving component 1500 of the cargo platform is shown.

[0069] The moving assembly 1500 for the loading platform includes: a working base plate 1510, a lower X-axis guide rail 1520, a loading platform 1530, a left-side jacking mechanism assembly 1541, a right-side jacking mechanism assembly 1542, an upper X-axis guide rail 1550, and a loading platform return mechanism 1560. Multiple parallel lower X-guide rails 1520 are provided on the upper surface of the working base plate 1510, and the loading platform 1530 is movably mounted on the lower X-guide rails 1520. Both the left-side jacking mechanism assembly 1541 and the right-side jacking mechanism assembly 1542 are placed on the working base plate 1510. Both are unidirectional jacking mechanisms; that is, the left-side jacking mechanism assembly 1541 can only push the loading platform 1530 to the right along the X-axis horizontal direction, and it cannot pull the loading platform 1530 back to the left along the X-axis horizontal direction; similarly, the right-side jacking mechanism assembly 1542 can only push the loading platform 1530 to the left along the X-axis horizontal direction, and it cannot pull the loading platform 1530 back to the right along the X-axis horizontal direction. Multiple parallel upper X-axis guide rails 1550 are also arranged on the loading platform 1530, and the workstation base 1410 is movably set on the upper X-axis guide rails 1550. The loading platform return mechanism 1560 includes a left return spring assembly and a right return spring assembly. One end of the left return spring assembly and the right return spring assembly are connected to a vertical plate fixed to the working base plate 1510, and the other end is connected to the loading platform 1530.

[0070] vi, centering cylinder assembly 1600. Figure 13 A three-dimensional structural diagram of the centering cylinder assembly 1600 is shown. Figure 14The diagram illustrates the connection between the V-shaped notch 1412 and the pusher head 1610.

[0071] The centering cylinder assembly 1600 is fixed on the working base plate 1510; a V-shaped notch 1412 is provided on the side of the workstation base 1410, and a pusher 1610 adapted to the shape of the V-shaped notch 1412 is provided at the front end of the piston rod of the centering cylinder assembly 1600.

[0072] It should be noted that the X-axis ( Figure 9 The X-axis (shown in the diagram) refers to the direction of movement of the cargo platform. Both the upper and lower X-axis guide rails are parallel to the direction of movement of the cargo platform.

[0073] It should be noted that the lifting drive mechanism can be an existing lifting drive mechanism, such as an electric telescopic mechanism.

[0074] It should be noted that the dual-screw synchronous locking mechanism 2000 adopts the existing dual electric screwdriver locking mechanism (such as CN113798812A).

[0075] A method for measuring the zero-position voltage of a magnetic levitation pump sensor, comprising the following steps: S1, the four coils of the sensor to be tested are numbered 1, 2, 3, and 4 respectively; The sensor to be tested is placed on the vacuum suction cup 1120 and positioned by the positioning pin 1121 on the lower surface of the vacuum suction cup 1120. Coils No. 1 and No. 3 are distributed along the X direction (that is, during the test, coil No. 1, the analog spindle, and coil No. 3 are also arranged along the X direction). S2, connect coils 1 and 3 to voltage acquisition unit 1200; S3, In the initial state, the pusher 1610 at the front end of the piston rod of the centering cylinder assembly 1600 is inserted into the V-shaped notch 1412 of the workstation base 1410; By adjusting the left set screw assembly 1420 and the right set screw assembly 1430 of the middle assembly 1400, the analog spindle 1302 is made coaxial with the sensor 100. S4, the lifting platform 1110 of the sensor lifting assembly 1100 drives the sensor to descend, so that the analog spindle 1302 passes through the central through hole 113; (but the bottom of the sensor does not contact the work station plate 1301, and it is still fixed by the vacuum suction cup 1120). S5, the pusher 1610 at the front end of the piston rod of the centering cylinder assembly 1600 is pulled out from the V-shaped notch 1412 in the workstation base 1410; S6, the push rod of the left push mechanism component 1541 extends, causing the loading platform 1530 to move to the right. The loading platform 1530 will then drive the workstation base 1410 and the spindle simulation unit 1300 to move to the right together. The sensor will undergo relative displacement with the spindle simulation unit 1300 until the outer circle of the sensor contacts the raised inner wall of the workstation base 1410 of the spindle simulation unit 1300. Record the output voltages of coils 1 and 3 at this point: U 1,右侧 U 3,右侧 At this time, the left spring assembly 1440 begins to compress and bear force, and the left push mechanism assembly 1541 stops operating. S7, the push rod of the left push mechanism assembly 1541 returns to its initial state, and the loading platform return mechanism 1560 pushes the loading platform 1530 back to its initial position; S8, the push rod of the right push mechanism component 1542 extends, causing the loading platform 1530 to move to the left. The loading platform 1530 will then move the workstation base 1410 and the spindle simulation unit 1300 to the left together. The sensor will undergo relative displacement with the spindle simulation unit 1300 until the outer circle of the sensor contacts the raised inner wall of the workstation base 1410 of the spindle simulation unit 1300. Record the output voltage of the two slider coils at this point: U 1,左侧 U 3,左侧 At this time, the right spring assembly 1450 begins to compress and bear force, and the right push mechanism assembly 1542 stops operating. The zero-position voltages of coils 1 and 3 are: (U 1,右侧 +U 1,左侧 ) / 2, (U 3,右侧 +U 3,左侧 ) / 2; S9, the push rod of the right push mechanism assembly 1542 returns to the initial state, and the cargo platform return mechanism 1560 pushes the cargo platform 1530 back to the initial position; The pusher 1610 at the front end of the piston rod of the centering cylinder assembly 1600 is inserted into the V-shaped notch 1412 of the workstation base 1410; The lifting platform 1110 of the sensor lifting assembly 1100 drives the sensor to rise to its initial state; Coils 1 and 3 are disconnected from voltage acquisition unit 1200; S10, rotate the sensor 90° and place it under the vacuum suction cup 1120 (that is, during the test, coil No. 2, the analog spindle, and coil No. 4 are also arranged along the X direction), and coils No. 2 and No. 4 are connected to the voltage acquisition unit 1200; Repeat steps S4 to S9 to obtain the zero-position voltages of voltages 2 and 4.

[0076] Figure 15 A schematic diagram illustrating the debugging method for a magnetic levitation pump sensor is provided. The sensor to be debugged includes: a circular ring body with four mounting positions evenly distributed at 90° intervals along its circumference, corresponding to the four radial directions of the main shaft: X+, Y+, X-, and Y-; four sliders with built-in eddy current coils, one slider in each mounting position; each mounting position is provided with a stepped limiting structure, and the two sides of the sliders are abutted against the stepped surfaces of the stepped limiting structure; screws, one on each side of each slider, with threaded holes on the circular ring body to mate with the screws; each slider is secured by two screws. The tightening torque of the screws on the four sliders is adjusted; the method for adjusting any one slider includes the following steps: Step 1: Secure the two screws of the slider using the double-screw synchronous locking mechanism; Step 2, perform aging treatment on the sensor assembly, which means maintaining the sensor at 60°C for 48 hours; Step 3: Obtain the zero-point voltage E of the slider's coil using the sensor zero-point voltage measuring device. 老化后 ; Step 4, Logical Judgment: If E 老化后 In [E] 阈值min E 阈值max If the value is in the middle, it indicates that the screw tightening of the slider has been adjusted; E 阈值min E 阈值max These represent the minimum and maximum values ​​of the target zero-position voltage threshold, respectively. Otherwise, adjust the tightening torque of the two screws on the slider using the double-screw synchronous locking mechanism to re-lock it, and repeat steps Step 1 to Step 4.

[0077] E 阈值min =2.49V, E 阈值max =2.51V.

[0078] It should be noted that screws must undergo aging treatment after being loosened (aging treatment releases stress on the screws). The sensor sequence is: slider 1, slider 2, slider 3, slider 4. When the zero-point voltage of sliders 1, 2, and 3 is qualified after aging, but the zero-point voltage of slider 4 is still unqualified, only the tightening torque of the screw of slider 4 needs to be readjusted. Then, aging treatment can be performed again (after aging treatment, the screws of sliders 1, 2, and 3 will not be adjusted, therefore, the zero-point voltage of all three will still meet the requirements).

[0079] It should be noted that, generally speaking, the zero-point voltage after aging will be lower than the zero-point voltage before aging. After extensive production practice, in Step 1, the two screws of the slider are locked using a double-screw synchronous locking mechanism, and then the zero-point voltage E of the slider's coil is obtained. 老化前 It is 2.6V, which can speed up the debugging process.

[0080] More generally, the method for adjusting any slider includes the following steps: Step 1.1, Initial Locking and Initial Measurement: The two screws of the slider are locked using a double-screw synchronous locking mechanism, and the zero-position voltage E1 of the slider's coil is measured at the same time. Step 1.2, perform aging treatment on the sensor assembly, which means maintaining the sensor at 60°C for 48 hours; Step 1.3: Obtain the zero-position voltage E1' of the slider's coil using the sensor zero-position voltage measuring device; Step 1.4, Logical Judgment: If E1' is in [E 阈值min E 阈值max If the value is in the middle, it indicates that the screw tightening of the slider has been adjusted; E 阈值min E 阈值max These represent the minimum and maximum values ​​of the target zero-position voltage threshold, respectively. Otherwise, proceed to Step 2.1; Step 2.1, Secondary Locking and Secondary Measurement: The two screws of the slider are adjusted and the locking torque is adjusted by the double screw synchronous locking mechanism to re-lock the slider so that the zero voltage of the slider coil is E2=E1·E0 / E1', that is, (E1-E1') / E1=(E2-E0) / E2. Step 2.2: Perform aging treatment on the sensor components; Step 2.3: Obtain the zero-position voltage E2' of the slider's coil using the sensor zero-position voltage measuring device; Step 2.4, Logical Judgment: If E2' is in [E 阈值min E 阈值max If the value is in the middle, it indicates that the screw tightening of the slider has been adjusted; E 阈值min E 阈值max These represent the minimum and maximum values ​​of the target zero-position voltage threshold, respectively. Otherwise, proceed to Step 3.1; ... Step n.1, n times of locking and n times of measurement: The locking torque of the two screws of the slider is adjusted by the double screw synchronous locking mechanism to re-lock it, so that the zero voltage of the slider coil En = En-1·E0 / En-1', that is, (En-1·En-1') / En-1 = (En-E0) / En; Step n.2, perform aging treatment on the sensor assembly; Step n.3: Obtain the zero-position voltage En' of the slider's coil using the sensor zero-position voltage measuring device; Step 4, Logical Judgment: If En' is in [E 阈值min E 阈值max If the value is in the middle, it indicates that the screw tightening of the slider has been adjusted; E 阈值min E 阈值max These represent the minimum and maximum values ​​of the target zero-position voltage threshold, respectively. Otherwise, proceed to Stepn+1.1; ... That is, the program ends when the screws of the slider are tightened and adjusted.

[0081] The above-described embodiments are preferred embodiments of this application and are only used to facilitate the illustration of this application. They are not intended to limit this application in any way. Any person with ordinary knowledge in the art can make equivalent embodiments by making partial modifications or alterations to the technical content disclosed in this application without departing from the scope of the technical features of this application. Such equivalent embodiments are still within the scope of the technical features of this application.

Claims

1. A zero-position voltage measuring device for a magnetic levitation pump sensor, characterized in that, include: Sensor lifting assembly, used to control the up and down movement of the sensor; The voltage acquisition unit is used to acquire the voltage signals of the four coils of the sensor; A moving assembly for a cargo platform includes: a working base plate, a cargo platform slidably disposed on the working base plate, and an X-axis pushing mechanism assembly for moving the cargo platform. The spindle simulation unit includes: a simulated spindle and a circular workstation plate that are fixedly connected. The circular workstation plate has a protrusion on its circumference, and the protrusion and the central axis of the simulated spindle are coincident. The bottom of the simulated spindle has a protruding limiting component. The middle component includes: a workstation base, left and right spring assemblies, and left and right set screw assemblies; the workstation base is slidably mounted on the loading platform; one end of the left and right spring assemblies is fixedly connected to the loading platform, and the other end is connected to the left and right sides of the workstation base; the bottom of the workstation base is provided with an X-direction strip hole for the insertion of the limiting component at the bottom of the simulated spindle; the left and right set screw assemblies are respectively arranged on both sides of the workstation base, and the ends of the set screws of both abut against the protrusions of the circular workstation plate. By adjusting the left and right set screw assemblies, the X-direction position of the simulated spindle can be finely adjusted. The inner surface diameter of the protective bearing of the magnetic levitation pump on which the sensor to be tested is D1, and the outer surface diameter of the main shaft is D0; the outer surface diameter of the circular body of the sensor to be tested is DM, and the inner surface diameter of the protrusion of the circular workstation plate is DQ. The following condition must be met: DQ-DM=D1-D0.

2. The zero-position voltage measuring device for a magnetic levitation pump sensor according to claim 1, characterized in that, The X-axis pushing mechanism assembly includes: a left-side pushing mechanism assembly and a right-side pushing mechanism assembly; both the left-side pushing mechanism assembly and the right-side pushing mechanism assembly are placed on the working base plate, and both are unidirectional pushing mechanisms; The moving assembly of the loading platform also includes a loading platform return mechanism, which includes a left return spring assembly and a right return spring assembly. One end of the left return spring assembly and the right return spring assembly are connected to a vertical plate fixed to the working base plate, and the other end is connected to the loading platform.

3. The zero-position voltage measuring device for a magnetic levitation pump sensor according to claim 2, characterized in that, Also includes: Centering cylinder assembly fixed to the working base plate; A V-shaped notch is provided on the side of the workstation base; The piston rod of the centering cylinder assembly is provided with a pusher head that matches the shape of the V-shaped notch at its front end.

4. A magnetic levitation pump sensor zero-position voltage measuring device according to any one of claims 1 to 3, characterized in that, The sensor lifting assembly includes: a lifting drive mechanism, a lifting platform, and a vacuum suction cup; the lifting drive mechanism is used to drive the lifting platform to move up and down, and the vacuum suction cup is fixedly installed on the lower side of the lifting platform; the vacuum suction cup is used to adsorb the sensor.

5. The zero-position voltage measuring device for a magnetic levitation pump sensor according to claim 4, characterized in that, Both the lifting platform and the vacuum suction cup are equipped with through holes no smaller than the central through hole of the sensor.

6. A method for measuring the zero-position voltage of a magnetic levitation pump sensor, wherein the four coils of the sensor to be tested are sequentially labeled as coils 1, 2, 3, and 4; coils 1 and 3 form a detection pair, and coils 2 and 4 form a detection pair; Its features are, The method for measuring the zero-position voltage of any i-th coil using the measuring device as described in claim 2 includes the following steps: S1, place the sensor on the sensor lifting assembly and distribute the detection pair containing coil i along the X direction; i is any natural number from 1 to 4; S2, connect coil i to the voltage acquisition unit; S3, Initial adjustment of the position of the simulation spindle: Adjust the left and right set screw assemblies of the middle component to make the simulation spindle coaxial with the sensor; S4, the sensor lifting assembly drives the sensor to descend, allowing the analog spindle to pass through the sensor's central through hole; S5, coil i generates a relative displacement with the main shaft to obtain its zero-position voltage; this includes the following sub-steps: S5.1, the push rod of the left-side jacking mechanism extends, causing the platform to move to the right. The platform then moves the workstation base and the spindle simulation unit to the right until the outer circle of the sensor contacts the raised inner wall of the circular workstation plate of the spindle simulation unit. Record the output voltage of coil i at this moment: U i,右侧 ; S5.2, the push rod of the left push mechanism component returns to its initial state; S5.3, the push rod of the right-side jacking mechanism extends, causing the platform to move to the left. The platform, along with the workstation base and the spindle simulation unit, moves to the left until the outer circle of the sensor contacts the raised inner wall of the circular workstation plate of the spindle simulation unit. Record the output voltage of coil i at this moment: U i,左侧 ; S5.4, the zero-position voltage of coil i is: (U i,右侧 +U i,左侧 ) / 2; S5.5, the push rod of the right-side jacking mechanism component returns to its initial state; S6, the sensor lifting assembly drives the sensor to rise to its initial state; S7, coil i is disconnected from the voltage acquisition unit.

7. A magnetic levitation pump sensor debugging device, characterized in that, include: i. The zero-position voltage measuring device for the magnetic levitation pump sensor as described in claim 1 is used to test the zero-position voltage of the four coils of the sensor. ii. The dual-screw synchronous locking mechanism has two locking actuators that can move along the X direction. When the sensor lifting assembly controls the sensor to descend to the preset position, the dual-screw synchronous locking mechanism adjusts the locking torque of the screw of the slider of the adjacent coil among the two coils that can perform zero-position voltage measurement.

8. The magnetic levitation pump sensor debugging device according to claim 7, characterized in that, There are two dual-screw synchronous locking mechanisms, which are respectively set on the left and right sides of the magnetic levitation pump sensor zero-position voltage measuring device, and respectively adjust the locking torque of the screws of the sliders where the two coils capable of zero-position voltage measurement are located.

9. A method for debugging a magnetic levitation pump sensor, wherein the sensor to be debugged includes: The ring body has four mounting positions evenly distributed at 90° intervals along its circumference, corresponding to the four radial directions of the main shaft: X+, Y+, X-, and Y-. Four sliders with built-in eddy current coils are installed at each mounting position. Each mounting position is equipped with a stepped limiting structure, and the two sides of the slider are attached to the stepped surface of the stepped limiting structure. Each slider has one screw on each side, and the ring body has threaded holes for the screws. Each slider is secured by two screws. The screw tightening torque of the four sliders is adjusted using the magnetic levitation pump sensor debugging device as described in claim 7 or 8, so that the zero-position voltage of the coils of the four sliders is within [E] after the sensor aging treatment. 阈值min E 阈值max Within the range; The method for adjusting any one of the sliders is characterized by the following steps: Step 1, Initial Locking and Initial Measurement: The two screws of the slider are locked using a double-screw synchronous locking mechanism, and the zero-position voltage E1 of the slider's coil is measured simultaneously. Let the current iteration number n = 1; Step 2, Aging treatment: The sensor assembly is subjected to aging treatment, which means that the sensor is maintained at 60°C for 48 hours; Step 3, measurement after aging: obtain the zero-position voltage En' of the slider's coil; Step 4, Logical Judgment: If En' is in [E 阈值min E 阈值max If the value in the image is 'E', it indicates that the screw tightening of the slider has been completed, and the adjustment of the slider is finished; 阈值min E 阈值max These represent the minimum and maximum values ​​of the target zero-position voltage threshold, respectively. Otherwise, proceed to step five; Step 5, Re-locking: The two screws of the slider are adjusted and re-locked using a double-screw synchronous locking mechanism to make the zero-position voltage of the slider's coil En+1=E0·En / En'; where E0 represents the target optimal value of the zero-position voltage; Step six: Reassign n+1 to n, and return to step two.

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