Aperture adjustment assembly and dynamically adjustable aperture device

Abstract

The application provides a diaphragm adjusting assembly and a dynamic adjustable diaphragm device. The diaphragm adjusting assembly comprises a plate main body, an adapter plate, a partition plate and a plurality of baffle plates. Any one of the plurality of baffle plates has an adjusting block arranged in a first direction. Any one of the plurality of adjusting blocks is located in an adjusting window in the first direction. Any one of the plurality of baffle plates is arranged in a first accommodating groove or a second accommodating groove, and the baffle plate can move relative to the first accommodating groove or the second accommodating groove in a second direction. In a third direction, the plurality of first accommodating grooves and the plurality of second accommodating grooves are arranged alternately. The application effectively improves the filtering freedom of the diaphragm device and reduces diffraction noise.

Description

Technical Field

[0001] This application relates to the field of optical technology, specifically to an aperture adjustment component and a dynamically adjustable aperture device. Background Technology

[0002] In the field of optical technology, the use of optical properties for detection (such as wafer defect detection) is a key research focus. To improve the detection sensitivity of minute defects, spatial frequency filtering of the light beam is usually required to suppress the strong diffraction noise generated by periodic circuit patterns. The aperture device needs to be able to flexibly and precisely control the shape and size of the light-transmitting area according to the pattern characteristics of the object under inspection, thereby achieving targeted filtering of diffraction noise.

[0003] In related technologies, aperture devices typically employ fixed-aperture apertures or mechanically variable aperture structures. However, the shape and size of a fixed-aperture aperture are fixed and cannot be changed, making it difficult to adapt to the detection needs of different types of patterns, resulting in limited detection adaptability. While mechanically variable apertures can adjust the size of the light-transmitting aperture, they can usually only form circular or regular polygonal light-transmitting holes, unable to generate specific complex light-transmitting area shapes such as rings or dipoles. This results in low freedom of shape adjustment and difficulty in achieving precise spatial frequency filtering, leading to insufficient background noise suppression during detection.

[0004] Therefore, how to effectively improve the filtering freedom of the aperture device and reduce diffraction noise is a technical problem that urgently needs to be solved in this field. Summary of the Invention

[0005] This application provides an aperture adjustment component and a dynamically adjustable aperture device to solve at least one of the aforementioned technical problems.

[0006] In a first aspect, this application provides a light-adjusting aperture assembly, including a plate body, an adapter plate, a partition plate, and multiple baffles. The plate body has a light-transmitting window extending through the plate body along a first direction, and multiple first receiving grooves spaced apart along a third direction. The multiple first receiving grooves are disposed on one side of the plate body along the first direction, and any one of the multiple first receiving grooves is disposed along a second direction and communicates with the light-transmitting window. The first direction is parallel to the thickness direction of the plate body, and the first direction, the second direction, and the third direction are perpendicular to each other.

[0007] The adapter plate has a first mating port and an adjustment window that penetrate the adapter plate along a first direction. The adapter plate is located on the side of the main body of the plate where the first receiving groove is provided. The geometric center of the first mating port coincides with the geometric center of the light-transmitting window. In the second direction, the adjustment window is located on at least one side of the first mating port. The side of the adapter plate near the main body of the plate also has a plurality of second receiving grooves that are spaced apart along a third direction. Any one of the plurality of second receiving grooves is provided along the second direction and connected to the first mating port.

[0008] The partition has a second mating port and a third mating port that penetrate the partition along a first direction. The partition is located between the main body of the plate and the adapter plate. The geometric center of the second mating port coincides with the geometric center of the light-transmitting window. The third mating port corresponds to the adjustment window in the first direction.

[0009] Any one of the plurality of baffles has an adjustment block disposed along a first direction, and any one of the plurality of adjustment blocks is located within an adjustment window in the first direction. Any one of the plurality of baffles is disposed within a first receiving groove or a second receiving groove, and the baffle is movable relative to the first receiving groove or the second receiving groove in a second direction. In a third direction, the plurality of first receiving grooves and the plurality of second receiving grooves are staggered.

[0010] In some alternative embodiments of this application, the plurality of baffles have a first state in which, in an orthographic projection onto a plane perpendicular to a first direction, the plurality of baffles cover the light-transmitting window.

[0011] In some alternative embodiments of this application, along a third direction, the thickness of the adjusting block is less than the thickness of the portion of the baffle connected to the adjusting block.

[0012] In some optional embodiments of this application, the multiple baffles are divided into a first group and a second group. The baffles of the first group cooperate with the first receiving groove and are disposed in the first receiving groove. The baffles of the second group cooperate with the second receiving groove and are disposed in the second receiving groove. The baffles in the first group are disposed on the side of the partition closer to the plate body, and the baffles in the second group are disposed on the side of the partition closer to the adapter plate.

[0013] In some optional embodiments of this application, the first group of baffles is divided into a first subgroup and a second subgroup. The baffles in the first subgroup and the baffles in the second subgroup are symmetrically arranged on both sides of the light-transmitting window along the second direction. The second group of baffles is divided into a third subgroup and a fourth subgroup. The baffles in the third subgroup and the baffles in the fourth subgroup are symmetrically arranged on both sides of the light-transmitting window along the second direction. The adjustment window is located on both sides of the first mating opening in the second direction.

[0014] In some optional embodiments of this application, the adapter plate includes a first sub-plate and a second sub-plate. The first sub-plate and the second sub-plate are symmetrically arranged on both sides of the light-transmitting window along a second direction. The first mating opening is formed by the first sub-plate and the second sub-plate enclosing the edges of the light-transmitting window along the second direction. The baffles in the first sub-group and the second sub-group are arranged between the first sub-plate and the plate body. The baffles in the second sub-group and the fourth sub-group are arranged between the second sub-plate and the plate body.

[0015] In some alternative embodiments of this application, any one of the plurality of baffles also has a cutout, the cutout being disposed on the side of the baffle close to the light-transmitting window along the second direction, and the cutout being inclined towards the partition from the side away from the partition along the first direction.

[0016] In some optional embodiments of this application, the aperture adjustment assembly further includes multiple pre-tightening structures. Any one of the multiple pre-tightening structures includes a component body and an elastic member. The component body is fixed to the plate body or the adapter plate. The component body has a receiving cavity arranged along a first direction and the opening of the receiving cavity faces the partition. The elastic member is at least partially disposed in the receiving cavity and can be compressed or expanded along the first direction. The plate body and the adapter plate are also provided with a pre-tightening window extending along the first direction. In the orthographic projection of a plane perpendicular to the first direction, the pre-tightening window at least partially coincides with the first receiving groove or the second receiving groove. The component body is at least partially disposed in the pre-tightening window. The elastic member at least partially extends out of the receiving cavity through the opening of the receiving cavity and abuts against the side of the baffle away from the partition plate.

[0017] In some optional embodiments of this application, the pre-tightening structure has multiple receiving cavities arranged along a third direction, and multiple elastic elements are provided, corresponding to the multiple receiving cavities. Any one of the multiple elastic elements abuts against one of the multiple baffles.

[0018] In some alternative embodiments of this application, any one of the plurality of baffles is provided with a pre-tightening structure on both sides along the second direction.

[0019] In some alternative embodiments of this application, the elastic member includes an elastic part and an abutting part. The elastic part is disposed in the receiving cavity, one side of the abutting part abuts against the elastic part, and the other side is at least partially located outside the opening of the receiving cavity and is used to abut against the baffle.

[0020] A second aspect of this application provides a dynamically adjustable aperture device, including a housing, the aforementioned aperture adjustment component, and a drive component. The housing has a first window extending through it along a first direction, and a receiving chamber located inside the housing. The aperture adjustment component is disposed within the receiving chamber and near the first window, with the geometric center of the light-transmitting window in the aperture adjustment component coinciding with the geometric center of the first window. The drive component is disposed within the receiving chamber and located on the side of the aperture adjustment component away from the first window, and is used to drive a baffle in the aperture adjustment component to move along a second direction. The first direction is parallel to the thickness direction of the plate body in the aperture adjustment component, and the first, second, and third directions are perpendicular to each other.

[0021] In some optional embodiments of this application, the driving assembly includes two centrally symmetrically arranged driving halves, one of which includes a driving rod. The driving half is capable of driving the driving rod to move upward in a second direction or a third direction. The driving rod is used to abut against the adjustment block in the aperture adjustment assembly and drive the adjustment block to move along the second direction.

[0022] In some optional embodiments of this application, the drive half includes two motor slides that are perpendicular to each other. A transmission finger is provided on the motor slide. The transmission finger includes a base that protrudes along a first direction and a finger portion that is connected to the base and disposed along a third direction. A drive rod is disposed at the end of the finger portion.

[0023] In some alternative embodiments of this application, the outer shell includes a shell body and a cover plate for sealing the opening on the shell body. The shell body and the cover plate enclose a receiving chamber. A first shell window is disposed on the shell body. A second shell window is disposed on the cover plate and penetrates the cover plate along a first direction. The geometric center of the second shell window coincides with the geometric center of the first shell window.

[0024] In some optional embodiments of this application, a light-shielding tube is also provided in the housing, which is disposed between the drive component and the optical axis to isolate the light source generated by the drive component.

[0025] In some optional embodiments of this application, the dynamically adjustable aperture device further includes an adjustment frame assembly, which includes a fixed plate and a housing connected to the fixed plate. The adjustment frame assembly is used to drive the housing to move along a first direction, a second direction, or a third direction via the fixed plate.

[0026] In this application, by setting a plate body with a light-transmitting window and a first receiving groove, an adapter plate with a second receiving groove, and a partition plate located between the two, and by staggering the first receiving groove and the second receiving groove in the third direction, it is possible to achieve a layered staggered arrangement of multiple baffles; furthermore, by setting an adjustment block on each baffle, it is possible to allow any baffle to slide independently, thereby enabling each baffle to independently adjust the occlusion range of the light-transmitting window along the second direction, realizing flexible splicing of the light path shape, facilitating the formation of light-transmitting areas of special shapes (such as annular, dipole, and freeform surfaces), improving the accuracy of spatial frequency filtering, effectively suppressing diffraction noise generated by periodic patterns, significantly improving the sensitivity of defect detection, and significantly enhancing the adaptability of the dynamically adjustable aperture device to complex detection requirements. Attached Figure Description

[0027] Figure 1 The diagram shown is a schematic diagram of the first viewpoint of the dynamically adjustable aperture device in an example of this application.

[0028] Figure 2The diagram shown is a schematic diagram of the second perspective of the dynamically adjustable aperture device in an example of this application.

[0029] Figure 3 As shown Figure 2 A schematic diagram of the cross-sectional structure along line E.

[0030] Figure 4 The diagram shown is a schematic diagram of the third-view structure of the dynamically adjustable aperture device in an example of this application.

[0031] Figure 5 The diagram shown is a schematic diagram of the aperture adjustment component in an example of this application.

[0032] Figure 6 The diagram shown is a structural schematic of the main body of the plate in an example of this application.

[0033] Figure 7 The diagram shown is a structural schematic of the first sub-board in an example of this application.

[0034] Figure 8 The diagram shown is a schematic diagram of the baffle in an example of this application.

[0035] Figure 9 The diagram shown is a structural schematic of multiple sets of baffles in an example of this application.

[0036] Figure 10 The diagram shown is a schematic diagram of the pre-tightening structure in an example of this application.

[0037] Figure 11 The diagram shown is a schematic diagram of the structure of the driving component in an example of this application.

[0038] Figure 12 The diagram shown is a structural schematic of the drive rod in an example of this application.

[0039] Figure 13 The diagram shown is a structural schematic of the outer shell in an example of this application.

[0040] Figure label: 10. Outer shell; 101. First shell window; 102. Shell body; 103. Cover plate; 104. Second shell window; 105. Light-shielding tube; 106. Purge vent; 20. Aperture adjustment assembly; 21. Plate body; 211. Light-transmitting window; 212. First receiving groove; 213. Pre-tightening window; 22. Adaptor plate; 221. First mating joint; 222. Adjustment window; 223. Second receiving groove; 2201. First sub-plate; 2202. Second sub-plate; 2 3. Partition; 231. Second mating port; 232. Third mating port; 24. Baffle; 241. Adjusting block; 25. Pre-tightening structure; 251. Main body of the component; 252. Elastic component; 2521. Elastic part; 2522. Abutting part; 30. Drive assembly; 301. Drive half component; 3011. Motor slide; 302. Drive rod; 303. Transmission finger; 3031. Base; 3032. Finger part; 40. Adjusting frame assembly; 401. Fixing plate. Detailed Implementation

[0041] The specific embodiments of this application are described in detail below. It should be understood that the specific embodiments described herein are for illustration and explanation only and are not intended to limit this application.

[0042] For ease of explanation and understanding, this application defines a first direction, a second direction, and a third direction that are perpendicular to each other. The first direction is parallel to the thickness direction of the plate body and is usually also the propagation direction of the light path in a dynamically adjustable aperture device; the second direction and the third direction together define a plane perpendicular to the optical axis, and the second direction and the third direction are also perpendicular to each other.

[0043] like Figure 3 , Figures 5 to 9 As shown, this application provides a light-adjusting assembly 20, including a plate body 21, an adapter plate 22, a partition plate 23, and a plurality of baffles 24. The plate body 21 has a light-transmitting window 211 extending through the plate body 21 along a first direction, and a plurality of first receiving grooves 212 spaced apart along a third direction. The plurality of first receiving grooves 212 are disposed on one side of the plate body 21 along the first direction, and any one of the plurality of first receiving grooves 212 is disposed along a second direction and communicates with the light-transmitting window 211. The first direction is parallel to the thickness direction of the plate body 21, and the first direction, the second direction, and the third direction are perpendicular to each other.

[0044] The adapter plate 22 has a first mating port 221 and an adjustment window 222 that penetrate through the adapter plate 22 in a first direction. The adapter plate 22 is located on the side of the plate body 21 where the first receiving groove 212 is provided. The geometric center of the first mating port 221 coincides with the geometric center of the light-transmitting window 211. In the second direction, the adjustment window 222 is located on at least one side of the first mating port 221. The side of the adapter plate 22 near the plate body 21 also has a plurality of second receiving grooves 223 that are spaced apart in a third direction. Any one of the plurality of second receiving grooves 223 is provided in the second direction and communicates with the first mating port 221.

[0045] The partition 23 has a second mating port 231 and a third mating port 232 that penetrate the partition 23 along a first direction. The partition 23 is located between the plate body 21 and the adapter plate 22. The geometric center of the second mating port 231 coincides with the geometric center of the light-transmitting window 211. The third mating port 232 corresponds to the adjustment window 222 in the first direction.

[0046] Any one of the plurality of baffles 24 has an adjustment block 241 disposed along a first direction. In the first direction, any one of the plurality of adjustment blocks 241 is located within an adjustment window 222. Any one of the plurality of baffles 24 is disposed within a first receiving groove 212 or a second receiving groove 223, and the baffle 24 is movable relative to the first receiving groove 212 or the second receiving groove 223 in a second direction. In a third direction, the plurality of first receiving grooves 212 and the plurality of second receiving grooves 223 are staggered.

[0047] Understandably, the aperture adjustment component 20 can be used in optical inspection equipment, especially in optical path systems for semiconductor wafer defect inspection, to perform dynamic spatial frequency filtering of the Fourier surface optical field.

[0048] For example, the second direction can be a horizontal direction, and the third direction can be a vertical direction.

[0049] For example, the light-transmitting window 211 provided on the main body 21 can provide a main channel for the light beam to pass through. On the side of the main body 21 where the light beam exits, a plurality of first receiving slots 212 are provided at intervals along a third direction. The first mating port 221 on the adapter plate 22 and the light-transmitting window 211 together form the light transmission axis of the entire assembly. The adjustment window 222 on the adapter plate 22 is used to accommodate the adjustment block 241 and facilitates the adjustment block 241 to be moved.

[0050] For example, the multiple baffles 24 can be divided into multiple groups according to actual use needs, such as two groups, which are slidably mounted in the first receiving groove 212 and the second receiving groove 223 respectively. Each baffle 24 is provided with an adjustment block 241 protruding in the first direction. The adjustment block 241 passes through the third mating port 232 on the partition 23 and extends into the adjustment window 222 on the adapter plate 22, so that the external driving force can drive the baffle 24 to move in the second direction by moving the adjustment block 241.

[0051] Exemplarily, the plate body 21 can be understood as the reference base for the entire aperture adjustment assembly 20. The plate body 21 is plate-shaped, and its thickness direction is the first direction. The light-transmitting window 211 is a through hole opened in the central region of the plate body 21, and its outline shape can be designed according to actual needs, optionally being circular, rectangular, or other polygonal. The first receiving groove 212 is a plurality of elongated grooves formed on the surface of the plate body 21. These grooves extend outward from the edge of the light-transmitting window 211 along the second direction. The plurality of first receiving grooves 212 are arranged sequentially along the third direction, and adjacent grooves are separated by thin walls. The depth direction of the first receiving groove 212 is parallel to the first direction, and the groove opening faces the side where the adapter plate 22 is located. The first receiving groove 212 defines the degree of freedom of movement of the baffle 24 in the third direction, allowing the baffle 24 to slide back and forth in the second direction.

[0052] For example, the adapter plate 22 is disposed opposite to the plate body 21, forming a space between them for holding the partition plate 23 and the baffle 24. The first mating opening 221 is an opening on the adapter plate 22 for avoiding the light path, and its outline shape and size match the light-transmitting window 211, jointly defining the maximum aperture range that allows the light beam to pass through. The adjustment window 222 is used to accommodate the adjustment block 241 of multiple baffles 24 and provides guidance and limiting space for the movement of the adjustment block 241. In the second direction, the adjustment window 222 can be disposed on one side of the first mating opening 221, or disposed on both sides of the first mating opening 221 to accommodate a symmetrical layout. For example, the adjustment window 222 can be "U" shaped and disposed on both sides of the first mating opening 221, or two sub-windows can be symmetrically disposed on both sides of the first mating opening 221. The structure of the second receiving groove 223 is similar to that of the first receiving groove 212, but it is disposed on the surface of the adapter plate 22 near the plate body 21. Similarly, the depth direction of the second receiving groove 223 is parallel to the first direction, and the groove opening faces the partition 23.

[0053] For example, the partition 23 can be a thin plate-shaped separator, whose main function is to spatially separate the two sets of baffles 24 assembled on the plate body 21 and the adapter plate 22 to prevent mutual interference. The second mating port 231 is a central through hole on the partition 23 for light transmission. The third mating port 232 is a through hole for avoiding the adjustment block 241, and its outline size can be similar to that of the adjustment window 222, or it can be slightly larger than the area of ​​the adjustment window 222 to provide sufficient movement clearance. Along the first direction, the outline of the third mating port 232 can be located outside the outline of the adjustment window 222. Furthermore, the general outline of the partition 23 is the same as that of the adapter plate 22. If the adapter plate 22 can be composed of two parts, then the partition 23 can also be composed of two parts.

[0054] For example, the baffle 24 can be a direct element for adjusting the light transmission aperture. Each baffle 24 includes a baffle 24 body and an adjustment block 241 connected to the baffle 24 body. The baffle 24 body is an elongated strip extending along a second direction, with its thickness direction parallel to a third direction and its width direction parallel to a first direction. Guided by the first receiving groove 212 or the second receiving groove 223, the baffle 24 can slide toward or away from the light transmission window 211 along the second direction. When the baffle 24 moves toward the light transmission window 211, its end near the light transmission window 211 extends into the beam cross-section of the light transmission window 211, blocking part of the beam; conversely, when the baffle 24 moves away from the light transmission window 211, the blocked area is reduced. By independently controlling the position of each baffle 24, the desired shape of any light transmission area can be formed by stitching together the end contours of multiple baffles 24. Furthermore, the adjusting block 241 has an extension point on the baffle 24, which can be adjusted according to actual use, such as extending from the center of the baffle 24 along the second direction, etc. This application does not make specific limitations.

[0055] like Figure 3 , Figures 5 to 9 As shown, in some optional embodiments of this application, a plurality of baffles 24 have a first state in which, in the orthographic projection of a plane perpendicular to the first direction, the plurality of baffles 24 cover the light-transmitting window 211.

[0056] Understandably, the first state can be a state where all baffles 24 are advanced to their respective limit travel positions towards the center of the light-transmitting window 211. In the first state, along the first direction, the entire projection area of ​​the light-transmitting window 211 is filled with the densely arranged baffles 24, leaving no light-transmitting gaps. The setting of the first state makes the aperture not only a variable light-transmitting aperture, but also a completely closed optical shutter. When the detection system needs to perform dark-field calibration, acquire background noise, or protect downstream detectors from strong light, all baffles 24 can be driven to this first state, thereby completely blocking the light path, providing the necessary conditions for obtaining zero reference background, improving the accuracy of detection data and the security of the system.

[0057] For example, in the third direction, the dimensions of the first receiving groove 212 and the second receiving groove 223 may be different. For instance, in the third direction, the size of the first receiving groove 212 may be slightly larger than the size of the second receiving groove 223, so that the first receiving groove 212 can accommodate baffles 24 of different sizes in the second receiving groove 223. Further, the plurality of baffles 24 includes a baffle 24 of a first size and a baffle 24 of a second size. The baffle 24 of the first size cooperates with the first receiving groove 212, and the baffle 24 of the second size cooperates with the second receiving groove 223. In the third direction, the size of the baffle 24 of the first size is slightly larger than the size of the baffle 24 of the second size, so that when they are staggered, there is an overlapping area at the edges of the baffles 24 in the first receiving groove 212 and the baffles 24 in the second receiving groove 223, reducing the risk of light leakage at the edges of the baffles 24 in the third direction and improving the light-blocking effect.

[0058] like Figure 7 As shown, in some alternative embodiments of this application, along a third direction, the thickness of the adjusting block 241 is less than the thickness of the portion of the baffle 24 connected to the adjusting block 241.

[0059] It is understood that the adjusting block 241 can be a rectangular block protruding from the main surface of the baffle 24, and its dimension along the third direction is its thickness. The area on the main body of the baffle 24 where the adjusting block 241 is connected can be the width of the baffle 24 in the third direction. By making the thickness of the adjusting block 241 along the third direction less than the thickness of the part of the baffle 24 where the adjusting block 241 is connected, a gap can be reserved on both sides of the adjusting block 241 along the third direction. When the drive rod 302 needs to retract and go around to the other side of the baffle 24 for reverse drive after completing one push, the drive rod 302 can pass through this gap without colliding with the baffle 24. It provides a clearance channel for the movement of the drive rod 302, enabling the drive rod 302 to quickly move from the front to the rear of the adjusting block 241, or from the rear to the front. This provides a structural basis for the efficient bidirectional operation of the drive mechanism of the baffle 24 without motion interference. Thus, it achieves bidirectional precise adjustment of the position of the baffle 24 with simple structural logic, greatly improving the flexibility of aperture shape adjustment and the simplicity of the control algorithm.

[0060] refer to Figure 9 In some optional embodiments of this application, the multiple baffles 24 are divided into a first group and a second group. The baffles 24 of the first group cooperate with the first receiving groove 212 and are disposed in the first receiving groove 212. The baffles 24 of the second group cooperate with the second receiving groove 223 and are disposed in the second receiving groove 223. The baffles 24 in the first group are disposed on the side of the partition 23 near the plate body 21, and the baffles 24 in the second group are disposed on the side of the partition 23 near the adapter plate 22.

[0061] Understandably, by dividing the multiple baffles 24 into a first group and a second group, the existing partition 23 can be used to physically separate them, allowing the baffles 24 in the first and second groups to be in different planes during movement, thus improving the individual control effect of each group. It also effectively utilizes the space in the third direction, allowing for a greater number of baffles 24 to be accommodated within the same projected area compared to a single-layer arrangement. As the number of baffles 24 increases, the area blocked by each baffle 24 decreases, reducing the jagged effect at the boundary of the light-transmitting area formed by the combined blocking areas of multiple baffles 24, thereby improving the accuracy of the formed shape.

[0062] refer to Figure 9 In some optional embodiments of this application, the first group of baffles 24 is divided into a first subgroup and a second subgroup. The baffles 24 in the first subgroup and the baffles 24 in the second subgroup are symmetrically arranged on both sides of the light-transmitting window 211 along the second direction. The second group of baffles 24 is divided into a third subgroup and a fourth subgroup. The baffles 24 in the third subgroup and the baffles 24 in the fourth subgroup are symmetrically arranged on both sides of the light-transmitting window 211 along the second direction. In the second direction, the adjustment window 222 is located on both sides of the first mating port 221.

[0063] Understandably, by dividing the first group of baffles 24 into first and second subgroups, and the second group of baffles 24 into third and fourth subgroups, multiple baffles 24 can form a symmetrical layout on both sides of the light-transmitting window 211. This allows the calculation of the stroke and position of the baffles 24 on both sides to be completed mirror-imagely when the aperture generates all centrally symmetrical or mirror-symmetrical filtering patterns such as circles, rings, and dipoles, simplifying the calculation burden on the control system. Simultaneously, it ensures uniform force on the aperture, natural shape splicing, reduces deformation caused by asymmetrical stress, and effectively improves the symmetry and uniformity of shape adjustment.

[0064] In this embodiment, by setting the first subgroup, the second subgroup, the third subgroup, and the fourth subgroup, the position of each baffle can be adjusted in real time within the field of view, significantly improving the dynamic programmability of the aperture shape, thereby forming an aperture of a specific shape, achieving targeted and efficient filtering of the defined beam, effectively filtering out background and noise in the beam, and effectively improving the detection sensitivity of the optical system.

[0065] like Figure 3 , Figures 5 to 9 As shown, in some optional embodiments of this application, the adapter plate 22 includes a first sub-plate 2201 and a second sub-plate 2202. The first sub-plate 2201 and the second sub-plate 2202 are symmetrically arranged on both sides of the light-transmitting window 211 along the second direction. The first mating opening 221 is formed by the edges of the first sub-plate 2201 and the second sub-plate 2202 close to the light-transmitting window 211 along the second direction. The baffles 24 in the first sub-group and the second sub-group are disposed between the first sub-plate 2201 and the plate body 21. The baffles 24 in the second sub-group and the fourth sub-group are disposed between the second sub-plate 2202 and the plate body 21.

[0066] It is understandable that the first mating opening 221 is not formed by processing a single solid, but is formed by the edges of the first sub-plate 2201 and the second sub-plate 2202 respectively along the second direction near the light-transmitting window 211. Furthermore, the first sub-plate 2201 may provide a semi-circular or semi-polygonal edge, and the second sub-plate 2202 may provide the other half symmetrically, and the two are spliced ​​together to form a complete first mating opening 221.

[0067] For example, in the second direction, there may be a gap between the first sub-board 2201 and the second sub-board 2202.

[0068] In this embodiment, by symmetrically arranging the first sub-plate 2201 and the second sub-plate 2202, and the positional relationship between the baffles 24 in the first subgroup and the first sub-plate 2201 and the second subgroup and the second subgroup, a split structure in the second direction can be obtained, so that there are two symmetrical baffle 24 half-regions in the second direction. This allows for independent pre-assembly and debugging on the first sub-plate 2201 and the second sub-plate 2202, and then final assembly with the plate body 21 and the partition 23. This significantly reduces the difficulty of ultra-precision assembly and improves the yield and assembly accuracy.

[0069] like Figure 7 As shown, in some optional embodiments of this application, any one of the plurality of baffles 24 also has a cutout, which is disposed on the side of the baffle 24 near the light-transmitting window 211 along the second direction, and the cutout is inclined towards the partition 23 from the side away from the partition 23 along the first direction.

[0070] For example, the cutout can be formed in a knife-edge shape at the end of the baffle 24, meaning the end of the baffle 24 is not a straight surface perpendicular to its sliding direction, but a bevel. The dimension of the cutout along the first direction decreases closer to the optical axis, making the light-blocking boundary not an abrupt geometric transition, but a gradually transitioning attenuation region. When incident light strikes this bevel, the diffraction effect is dispersed over a wider spatial frequency range, thereby reducing strong diffraction spots concentrated in a specific direction. Furthermore, since the cutout directions of the first group of baffles 24 and the second group of baffles 24 are opposite, adjacent baffles 24 can form a partially overlapping overlap area in the optical axis direction, further reducing the light leakage gap, improving the aperture extinction ratio, and ultimately enhancing the signal-to-noise ratio of the optical device.

[0071] For example, the cut can be obtained by tilting the end face of the baffle 24 near the light-transmitting window 211, such as the end face tilting from one side of the partition 23 along the first direction.

[0072] like Figure 3 , Figure 10As shown, in some optional embodiments of the present application, the diaphragm adjustment assembly 20 further comprises a plurality of pre-tensioning structures 25, any one of the plurality of pre-tensioning structures 25 comprises a member body 251 and an elastic member 252, the member body 251 is fixed to the plate body 21 or the adapter plate 22, the member body 251 is provided with an accommodation cavity arranged along the first direction, and an opening of the accommodation cavity faces the partition plate 23, at least part of the elastic member 252 is arranged in the accommodation cavity and can be compressed or expanded along the first direction, the plate body 21 and the adapter plate 22 are further provided with pre-tensioning windows 213 extending along the first direction, in orthographic projection on a plane perpendicular to the first direction, the pre-tensioning window 213 at least partially overlaps with the first accommodation groove 212 or the second accommodation groove 223, at least part of the member body 251 is arranged in the pre-tensioning window 213, at least part of the elastic member 252 extends out of the accommodation cavity through the opening of the accommodation cavity, and abuts against a side of the blocking sheet 24 away from the partition plate 23.

[0073] It can be understood that the member body 251 may be a base-like component for fixed connection with the plate body 21 or the adapter plate 22. Further, a part of the elastic member 252 protrudes from the opening of the accommodation cavity and abuts against a back surface of the blocking sheet 24 away from the partition plate 23, applying a continuous pressure along the first direction to the blocking sheet 24, so that a surface of the blocking sheet 24 close to the partition plate 23 can be closely attached to the partition plate 23, generating a certain static friction force to prevent the blocking sheet 24 from free moving in a non-driven state. The blocking sheet 24 can also be locked at a set position when the assembly is transported, an inertial force is generated by rapid scanning, or the assembly is in an environment with slight vibration, which not only ensures the stability of the diaphragm shape, but also enables no lag in the adjustment process, facilitates repeated positioning, and improves the positioning accuracy, that is, it can provide a stabilization mechanism for the plurality of blocking sheets 24, and resist position drift of the blocking sheets 24 caused by external vibration, gravity or回程 gap of the driving mechanism.

[0074] Exemplarily, the member body 251 comprises a deepening part protruding toward the partition plate 23 along the first direction, the opening of the accommodation cavity is arranged on a surface of the deepening part facing the partition plate 23, the deepening part is matched with the pre-tensioning window 213 and arranged in the pre-tensioning window 213. By arranging the deepening part, a convex shape can be formed while maintaining the size of the accommodation cavity in the first direction, which improves the connection strength between the pre-tensioning structure 25 and the plate body 21 as well as the adapter plate 22, and ensures the fastening effect of the pre-tensioning structure 25 on the blocking sheet 24.

[0075] Exemplarily, eight pre-tensioning structures 25 may be provided. Further, four pre-tensioning structures are arranged on the plate body 21 along the second direction, two of which correspond to the blocking sheets 24 in the first subgroup, and the other two correspond to the blocking sheets 24 in the second subgroup; four pre-tensioning structures are arranged on the adapter plate 22 along the second direction, two of which correspond to the blocking sheets 24 in the third subgroup, and the other two correspond to the blocking sheets 24 in the fourth subgroup.

[0076] For example, the pre-tightening window 213 on the plate body 21 is configured such that one end is disposed on the surface of the plate body 21 away from the partition 23, and the other end extends along the first direction to communicate with the first receiving groove 212. Further, the pre-tightening window 213 on the adapter plate 22 is configured such that one end is disposed on the surface of the adapter plate 22 away from the partition 23, and the other end extends along the first direction to communicate with the second receiving groove 223.

[0077] For example, the elastic element 252 may include a spring and an abutting ball. The abutting ball is disposed within the receiving cavity near the opening of the receiving cavity and abuts against the spring. The spring is configured to be in a compressed state, with one end abutting against the bottom of the receiving cavity and the other end abutting against the abutting ball. The abutting ball is configured to be slightly larger than the opening of the receiving cavity, allowing it to be at least partially extruded from the opening of the receiving cavity, but not completely detached from the opening. This allows the abutting ball to be abutted by the end wall of the receiving cavity under certain conditions, reducing the pressure on the baffle 24 and improving the service life of the baffle 24.

[0078] For example, the elastic element 252 may include a spring and an abutment ball, with one end of the spring connected to the bottom of the receiving cavity and the other end connected to the abutment ball, and the spring is configured to be in a compressed state when the expected structure is installed in the preload window 213.

[0079] like Figure 3 , Figure 10 As shown, in some optional embodiments of this application, the pre-tightening structure 25 has a plurality of receiving cavities arranged along a third direction, and a plurality of elastic members 252 are provided and correspond to the plurality of receiving cavities. Any one of the plurality of elastic members 252 abuts against one of the plurality of baffles 24.

[0080] It is understandable that, on the main body 251 of a single pre-tightening structure 25, multiple accommodating cavities arranged along a third direction are provided with elastic elements 252, so that the elastic elements 252 and the baffles 24 form a one-to-one correspondence. By arranging multiple accommodating cavities along a third direction on the pre-tightening structure 25, and providing multiple elastic elements 252 corresponding to multiple accommodating cavities, any one of the multiple elastic elements 252 abuts against one of the multiple baffles 24, so that after assembly, any one of the multiple elastic elements 252 corresponds to one of the multiple baffles 24 and abuts against it. That is, in a single pre-tightening structure 25, a single baffle 24 is pre-tightened independently by a single elastic element 252, so that the clamping force and the resulting sliding friction force on the single baffle 24 are independent and uniform. This not only ensures that the driving force required by the drive assembly 30 to push any of the baffles 24 is basically consistent, avoiding some baffles 24 being too tight or too loose due to manufacturing tolerances, thus facilitating high-precision open-loop or closed-loop control, but also prevents the force coupling effect that may occur due to the shared pre-tightening structure 25, significantly improving the controllability and shape reproduction capability of the entire baffle array 24.

[0081] For example, in the third direction, the arrangement of multiple receiving cavities can be linear or curved. Furthermore, in the third direction, the arrangement of multiple receiving cavities can be wavy, effectively reducing the problem of difficulty in arranging the receiving cavities due to their size in the third direction, effectively compressing the overall size of multiple receiving cavities in the third direction, making it easier for the pre-tightening structure 25 to fit into the arrangement of multiple baffles 24 in the third direction, and improving the pre-tightening accuracy and pre-tightening targeting.

[0082] like Figure 3 , Figure 10 As shown, in some optional embodiments of this application, any one of the plurality of baffles 24 is provided with a pre-tightening structure 25 on both sides along the second direction.

[0083] It is understood that each of the two end regions of any baffle 24 along its sliding direction (second direction) is pre-tightened by a pre-tightening structure 25, i.e., one of the two pre-tightening structures 25 is close to the light-transmitting window 211, and the other is far away from the light-transmitting window 211. Through the two pre-tightening structures 25, a pair of force couples can be formed in space, or at least two spaced fulcrums can be formed, firmly pressing the baffle 24 into the first receiving groove 212 or the second receiving groove 223. When the baffle 24 is at any position in its stroke, there are two stable clamping forces, reducing the seesaw effect or slight loosening that may occur due to unilateral support. In particular, when the drive rod 302 drives the baffle 24, the double-sided pre-tightening ensures that the baffle 24 will not experience uncontrollable drift (such as micron-level drift) due to its own weight, cable drag, or residual stress, which further improves the splicing accuracy of the aperture pattern (such as reaching the sub-micron level), realizes gapless and stable control of the sliding of the baffle 24, and reduces the risk of backlash error.

[0084] like Figure 3 , Figure 10 As shown, in some optional embodiments of this application, the elastic member 252 includes an elastic part 2521 and an abutting part 2522. The elastic part 2521 is disposed in the receiving cavity, and one side of the abutting part 2522 abuts against the elastic part 2521, while the other side is at least partially located outside the opening of the receiving cavity and is used to abut against the baffle 24.

[0085] For example, the elastic portion 2521 may be a core, such as a coil spring or a sheet spring, that provides preload and is housed within a receiving cavity of the body 251. The abutting portion 2522 may be an abutting block adapted to the opening of the receiving cavity; for example, if the opening of the receiving cavity is circular, the abutting portion 2522 may be a sphere. Further, the abutting portion 2522 may be configured to abut against a curved surface of the baffle 24; for example, the abutting portion may be a sphere or a roller. By including the elastic portion 2521 and the abutting portion 2522 in the elastic member 252, with one side of the abutting portion 2522 abutting against the elastic portion 2521, rolling friction, rather than sliding friction, occurs between the surface of the baffle 24 and the abutting portion 2522 when the baffle 24 slides in the second direction. The coefficient of friction for rolling friction is much lower than that for sliding friction, thus reducing the amount of wear debris by an order of magnitude. While providing sufficient vertical pressure to ensure reliable locking, it also suppresses the generation and release of particles to the greatest extent, maintaining the ultra-high cleanliness of the optical inspection equipment for long-term operation and preventing the degradation of inspection performance caused by carbon dust or metal powder contamination of optical lenses.

[0086] like Figures 1 to 4 and Figure 11As shown, in a second aspect of this application, a dynamically adjustable aperture device is provided, including a housing 10, the aforementioned aperture adjustment assembly 20, and a drive assembly 30. The housing 10 has a first window 101 extending through the housing 10 along a first direction, and a receiving chamber located inside the housing 10. The aperture adjustment assembly 20 is disposed within the receiving chamber and close to the first window 101, and the geometric center of the light-transmitting window 211 in the aperture adjustment assembly 20 coincides with the geometric center of the first window 101. The drive assembly 30 is disposed within the receiving chamber and located on the side of the aperture adjustment assembly 20 away from the first window 101, and is used to drive the baffle 24 in the aperture adjustment assembly 20 to move along a second direction. The first direction is parallel to the thickness direction of the plate body 21 in the aperture adjustment assembly 20, and the first, second, and third directions are perpendicular to each other.

[0087] For example, the housing 10 may be a component that provides protection and support for the dynamically adjustable aperture device, and may have a receiving chamber inside. A first housing window 101 extending along a first direction is provided on the housing wall of the housing 10 as a channel for the light beam to enter and exit the receiving chamber. Furthermore, the plate body 21 on the aperture adjustment assembly 20 may be fitted to the housing wall of the first housing window 101.

[0088] For example, the drive assembly 30 is also disposed in the receiving chamber and is located on the other side of the aperture adjustment assembly 20 away from the first housing window 101. That is, the drive assembly 30 and the first housing window 101 are located on opposite sides of the aperture adjustment assembly 20.

[0089] Understandably, the housing 10 provides a closed or semi-closed clean chamber for the optical path adjustment assembly and the drive assembly 30, reducing interference from stray light and dust from the outside. The first housing window 101 is the light entrance, which can be covered by optical glass or simply serve as a physical opening. The plate body 21, adapter plate 22, partition plate 23, and baffle plate 24 in the aperture adjustment assembly 20 are housed within the chamber. The drive assembly 30 can be an electromechanical device that receives control commands from a host computer and uses a specific transmission mechanism to move the adjustment block 241 on the baffle plate 24, thereby completing the dynamic reconstruction of the shape of the dynamically adjustable aperture device.

[0090] In this embodiment, by integrating the aperture adjustment component 20 and the drive component 30 into a relatively independent structure, it is easy to install, replace, and calibrate them in the optical system. Users only need to connect the mounting interface or electrical interface, which may be located on the housing 10, to quickly deploy a spatial frequency modulation device with arbitrary shape filtering capabilities in the optical path.

[0091] like Figures 1 to 4 , Figure 11 , Figure 12As shown, in some optional embodiments of this application, the drive assembly 30 includes two centrally symmetrically arranged drive halves 301. Either of the two drive halves 301 includes a drive rod 302. The drive halves 301 can drive the drive rod 302 to move upward in a second direction or a third direction. The drive rod 302 is used to abut against the adjustment block 241 in the aperture adjustment assembly 20 and drive the adjustment block 241 to move along the second direction.

[0092] For example, the drive rod 302 is positioned along a first direction.

[0093] For example, the two drive halves 301 are arranged symmetrically around the center of the optical axis.

[0094] For example, the drive half 301 may include multiple drive motors to enable movement in multiple directions, such as including two drive motors to enable upward movement in a second direction or a third direction.

[0095] For example, the rod body or end of the drive rod 302 is used to abut against the adjustment block 241 in the aperture adjustment assembly 20. When the drive rod 302 moves, it pushes the adjustment block 241, thereby causing the entire baffle 24 to move linearly in the second direction.

[0096] In this embodiment, the driving component 30 includes two centrally symmetrically arranged driving half-pieces 301, which enable each driving half-piece 301 to drive the baffle 24 located on the corresponding side of the light-transmitting window 211, realizing independent control on both sides without competing for position.

[0097] like Figures 1 to 3 and Figure 11 As shown, in some optional embodiments of this application, the drive half 301 includes two motor slides 3011, which are perpendicular to each other. A transmission finger 303 is provided on the motor slide 3011. The transmission finger 303 includes a base 3031 protruding along a first direction and a finger portion 3032 connected to the base 3031 and provided along a third direction. The drive rod 302 is provided at the end of the finger portion 3032.

[0098] For example, each drive half 301 may include two motor slides 3011 as a basic motion module. The guide rails of the two motor slides 3011 are perpendicular to each other, one is responsible for providing movement in a second direction (such as the X-axis), and the other is responsible for providing movement in a third direction (such as the Y-axis), which together form a two-dimensional motion platform.

[0099] In this embodiment, by making the drive half 301 include two motor slides 3011, which are perpendicular to each other, and a transmission finger 303 is provided on the motor slide 3011, the transmission finger 303 includes a base 3031 protruding along a first direction, and a finger portion 3032 connected to the base 3031 and arranged along a third direction. The drive rod 302 is disposed at the end of the finger portion 3032. When the two motor slides 3011 make interpolation movements, the transmission finger 303 drives the drive rod 302 to move freely in a two-dimensional plane. The drive rod 302 can then move precisely to the vicinity of the adjustment block 241 of the target baffle 24, and complete the addressing and pushing operation of the designated baffle 24. This realizes an efficient driving mode of operating multiple baffles 24 online with one drive rod 302.

[0100] like Figures 1 to 3 and Figure 13 As shown, in some optional embodiments of this application, the outer shell 10 includes a shell body 102 and a cover plate 103 for sealing the opening on the shell body 102. The shell body 102 and the cover plate 103 enclose a receiving chamber. A first shell window 101 is disposed on the shell body 102. A second shell window 104 is disposed on the cover plate 103 and penetrates the cover plate 103 along a first direction. The geometric center of the second shell window 104 coincides with the geometric center of the first shell window 101.

[0101] For example, the shell body 102 can be a box structure with one open side, and its interior is recessed to form the main receiving chamber. The cover plate 103 can be used to cover the opening of the shell body 102. After the cover plate 103 and the shell body 102 are closed and fixed, the two together enclose a closed receiving chamber, which facilitates the assembly and maintenance of the internal precision components.

[0102] In this embodiment, by aligning the geometric center of the second shell window 104 with the geometric center of the first shell window 101, the dynamically adjustable aperture device can have two coaxial light-transmitting windows for entry and exit. The light beam can enter from the first shell window 101, be modulated into the desired shape by the aperture adjustment component 20, and then exit from the second shell window 104, or propagate in the opposite direction. This provides a physical interface for directly connecting the dynamically adjustable aperture device in series with the main optical path of the optical system.

[0103] For example, the housing 10 is also provided with a purge vent 106 for introducing clean gas (such as clean air or nitrogen) to purge the containment chamber, preventing particulate contamination of the equipment and ensuring the cleanliness requirements for long-term operation of the device. Furthermore, there are two purge vents 106, both located on the cover plate 103 and arranged diagonally, one for air intake and the other for air exhaust.

[0104] like Figures 1 to 3 and Figure 13As shown, in some optional embodiments of this application, a light-shielding tube 105 is further provided in the accommodating chamber. The light-shielding tube 105 is disposed between the drive assembly 30 and the optical axis to isolate the light source generated by the drive assembly 30. In one embodiment, the dynamically adjustable aperture device further includes an adjustment frame assembly 40, which includes a fixing plate 401. The housing 10 is connected to the fixing plate 401, and the adjustment frame assembly 40 is used to drive the housing 10 to move along a first direction, a second direction, or a third direction via the fixing plate 401.

[0105] For example, the light-shielding tube 105 can be a cylindrical structure with a blackened finish. Furthermore, the light-shielding tube 105 can be fitted around the path through which the light passes and located between the light-emitting side of the adjustment component and the drive component 30. The inner wall of the light-shielding tube 105 can be machined with matte threads or coated with matte paint, which can efficiently absorb and isolate unwanted light sources generated by the drive component 30, ensuring that pure signal light emitted through the aperture adjustment component 20 exits the second shell window 104, effectively guaranteeing the signal-to-noise ratio of the detection system.

[0106] like Figures 1 to 4 As shown, in some optional embodiments of this application, the dynamically adjustable aperture device further includes an adjustment frame assembly 40, which includes a fixing plate 401. The housing 10 is connected to the fixing plate 401, and the adjustment frame assembly 40 is used to drive the housing 10 to move along a first direction, a second direction, or a third direction through the fixing plate 401.

[0107] For example, the adjustment frame assembly 40 may be a base member that partially surrounds the outer side of the housing 10, and the fixing plate 401 may be a connecting medium between the housing 10 and the adjustment frame assembly 40. The housing 10 of the dynamically adjustable aperture device and the fixing plate 401 may be rigidly connected or adjustablely connected. Furthermore, the adjustment frame assembly 40 itself has multi-dimensional attitude precision adjustment capabilities, which can drive the fixing plate 401, together with the entire dynamically adjustable aperture device housing 10 fixed thereon, to perform translational displacement in space along a first direction, a second direction, or a third direction.

[0108] For example, the adjustment frame assembly 40 may also have an adjustment function that allows rotation about the optical axis. By translating in three orthogonal directions and rotating about the optical axis, the dynamically adjustable aperture device can be adjusted to the required filtering position in the optical system, such as on the Fourier transform plane, ensuring that the center of the light transmission window 211 coincides with the optical axis, thus achieving high-precision axial alignment adjustment.

[0109] For example, the adjustment frame assembly 40 may include a plurality of adjustment knobs for adjusting the attitude of the adjustment frame assembly 40.

[0110] The foregoing has described some specific embodiments of this application in detail; however, this application is not limited thereto. Within the scope of the technical concept of this application, various simple modifications can be made to the technical solution of this application, including combining various technical features in any other suitable manner. These simple modifications and combinations should also be considered as the content disclosed in this application and are all within the protection scope of this application.

Claims

1. An aperture adjustment assembly, comprising: include: The board body has a light-transmitting window that extends through the board body along a first direction, and a plurality of first receiving grooves spaced apart along a third direction. The plurality of first receiving grooves are disposed on one side of the board body along the first direction, and any one of the plurality of first receiving grooves is disposed along a second direction and communicates with the light-transmitting window. The first direction is parallel to the thickness direction of the board body, and the first direction, the second direction and the third direction are perpendicular to each other. The adapter plate has a first mating port and an adjustment window that extend through the adapter plate along the first direction. The adapter plate is located on the side of the plate body where the first receiving groove is provided. The geometric center of the first mating port coincides with the geometric center of the light-transmitting window. In the second direction, the adjustment window is located on at least one side of the first mating port. The side of the adapter plate near the plate body also has a plurality of second receiving grooves that are spaced apart along the third direction. Any one of the plurality of second receiving grooves is provided along the second direction and communicates with the first mating port. The partition has a second mating port and a third mating port that extend through the partition along the first direction. The partition is located between the plate body and the adapter plate. The geometric center of the second mating port coincides with the geometric center of the light-transmitting window. The third mating port corresponds to the adjustment window in the first direction. A plurality of baffles, any one of which has an adjustment block arranged along the first direction, any one of the plurality of adjustment blocks is located within the adjustment window in the first direction, any one of the plurality of baffles is disposed in the first receiving groove or the second receiving groove, and the baffle is movable relative to the first receiving groove or the second receiving groove in the second direction. In the third direction, the plurality of first receiving slots and the plurality of second receiving slots are arranged alternately.

2. The aperture adjustment assembly of claim 1, wherein, The plurality of baffles have a first state in which, in the first state, the plurality of baffles cover the light-transmitting window in an orthographic projection onto a plane perpendicular to the first direction.

3. The aperture adjustment assembly of claim 1, wherein, Along the third direction, the thickness of the adjusting block is less than the thickness of the portion of the baffle connected to the adjusting block.

4. The aperture adjustment assembly of claim 1, wherein, The multiple baffles are divided into a first group and a second group. The baffles of the first group cooperate with the first receiving groove and are disposed in the first receiving groove. The baffles of the second group cooperate with the second receiving groove and are disposed in the second receiving groove. The baffles in the first group are disposed on the side of the partition closer to the plate body, and the baffles in the second group are disposed on the side of the partition closer to the adapter plate.

5. The aperture adjustment assembly of claim 4, wherein, The first group of baffles is divided into a first subgroup and a second subgroup. The baffles in the first subgroup and the baffles in the second subgroup are symmetrically arranged on both sides of the light-transmitting window along the second direction. The second group of baffles is divided into a third subgroup and a fourth subgroup. The baffles in the third subgroup and the baffles in the fourth subgroup are symmetrically arranged on both sides of the light-transmitting window along the second direction. In the second direction, the adjustment window is located on both sides of the first mating opening.

6. The aperture adjustment assembly of claim 5, wherein, The adapter plate includes a first sub-plate and a second sub-plate. The first sub-plate and the second sub-plate are symmetrically arranged on both sides of the light-transmitting window along the second direction. The first mating opening is formed by the edges of the first sub-plate and the second sub-plate along the second direction near the light-transmitting window. The baffles in the first sub-group and the second sub-group are disposed between the first sub-plate and the plate body. The baffles in the second sub-group and the fourth sub-group are disposed between the second sub-plate and the plate body.

7. The aperture adjustment assembly of any of claims 4 to 6, wherein, Any one of the plurality of baffles also has a cutout, the cutout being disposed on the side of the baffle close to the light-transmitting window along the second direction, the cutout being inclined towards the partition from the side away from the partition along the first direction.

8. The aperture adjustment assembly of claim 1, wherein, It also includes multiple pre-tightening structures, each of which includes a component body and an elastic element. The component body is fixed to the plate body or the adapter plate. The component body has a receiving cavity arranged along the first direction, and the opening of the receiving cavity faces the partition. The elastic element is at least partially disposed in the receiving cavity and is capable of being compressed or expanded along the first direction. The plate body and the adapter plate are also provided with a pre-tightening window extending along the first direction. In the orthographic projection of a plane perpendicular to the first direction, the pre-tightening window at least partially coincides with the first receiving groove or the second receiving groove. The component body is at least partially disposed in the pre-tightening window. The elastic element at least partially extends out of the receiving cavity through the opening of the receiving cavity and abuts against the side of the baffle away from the partition plate.

9. The aperture adjustment assembly of claim 8, wherein, The pre-tightening structure has a plurality of receiving cavities arranged along the third direction, and a plurality of elastic elements are provided, corresponding to the plurality of receiving cavities. Any one of the plurality of elastic elements abuts against one of the plurality of baffles.

10. The aperture adjustment assembly of claim 8, wherein, The pre-tightening structure is provided on both sides of any one of the plurality of baffles along the second direction.

11. The aperture adjustment assembly of any of claims 8 to 10, wherein, The elastic element includes an elastic portion and an abutting portion. The elastic portion is disposed within the receiving cavity. One side of the abutting portion abuts against the elastic portion, and the other side is at least partially located outside the opening of the receiving cavity and is used to abut against the baffle.

12. A dynamically adjustable aperture device, characterized by include: The outer casing has a first shell window that extends through the outer casing in a first direction, and a receiving chamber located inside the outer casing; The aperture adjustment assembly as described in any one of claims 1 to 11 is disposed in the receiving chamber and close to the first shell window, and the geometric center of the light-transmitting window in the aperture adjustment assembly coincides with the geometric center of the first shell window; A driving component is disposed in the receiving chamber and located on the side of the aperture adjustment component away from the first shell window, and is used to drive the baffle in the aperture adjustment component to move along a second direction, the first direction being parallel to the thickness direction of the plate body in the aperture adjustment component, and the first direction, the second direction and the third direction being perpendicular to each other.

13. The dynamically adjustable iris device of claim 12, wherein, The driving assembly includes two centrally symmetrically arranged driving halves, each of which includes a driving rod. The driving half can drive the driving rod to move upward in the second direction or the third direction. The driving rod is used to abut against the adjustment block in the aperture adjustment assembly and drive the adjustment block to move along the second direction.

14. The dynamically adjustable iris device of claim 13, wherein, The drive half includes two motor slides that are perpendicular to each other. A transmission finger is provided on each motor slide. The transmission finger includes a base that protrudes along the first direction and a finger portion that is connected to the base and disposed along the third direction. The drive rod is disposed at the end of the finger portion.

15. The dynamically adjustable iris device of claim 12, wherein, The outer shell includes a shell body and a cover plate for sealing the opening on the shell body. The shell body and the cover plate enclose the receiving chamber. The first shell window is disposed on the shell body. The cover plate is provided with a second shell window that penetrates the cover plate along the first direction. The geometric center of the second shell window coincides with the geometric center of the first shell window.

16. The dynamically adjustable aperture device according to claim 12, wherein, The housing is also equipped with a light-shielding tube, which is located between the drive component and the optical axis to isolate the light source generated by the drive component.

17. The dynamically adjustable aperture device according to claim 12, wherein, It also includes an adjustment frame assembly, which includes a fixing plate. The housing is connected to the fixing plate, and the adjustment frame assembly is used to drive the housing to move along the first direction, the second direction, or the third direction via the fixing plate.

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