Actuator device and projection device

Abstract

An actuator device includes a base, a frame, an optical element, at least two driving assemblies, and a controller. Two central axes of the optical element are parallel to a first direction and a second direction. The at least two driving assemblies are configured to drive the frame and the optical element to swing relative to the base with the two central axes as the axes of rotation. The controller is electrically connected to the at least two driving assemblies and configured to drive the at least two driving assemblies to cause the optical element to swing according to a swing mode. The swing mode includes at least a swing direction in which the optical element swings relative to the base toward a third direction. The third direction is a difference between the first direction and the second direction. A projection device is also provided. The actuator device and the projection device of the present invention can increase resolution without increasing the size.

Description

Technical Field

[0001] This invention relates to an actuator device and a projection device. Background Technology

[0002] As consumer demand for high-resolution projectors gradually increases, actuators can be installed inside the projector to improve its resolution. When the actuator's driving element is activated, the optical element rapidly oscillates back and forth, refracting (or reflecting) the image beam to another position, thus shifting the pixels and increasing the resolution.

[0003] In current projectors, if an imaging element with multiple rhomboid micromirrors is used, the actuator needs to be rotated 45° to allow the image pixels to move along the rhomboid path. However, the overall outline of the imaging element is still rectangular relative to the actuator rotated 45°. Therefore, when the actuator is rotated 45°, the size of the optical element needs to be increased to meet the requirements in order for the image beam from the imaging element to be transmitted to the optical element.

[0004] The "Background Art" paragraph is only used to help understand the content of this invention. Therefore, the content disclosed in the "Background Art" paragraph may include some known technologies that are not known to those skilled in the art. The content disclosed in the "Background Art" paragraph does not mean that the content or the problems to be solved by one or more embodiments of this invention were known or understood by those skilled in the art prior to this application. Summary of the Invention

[0005] The present invention provides an actuator device and a projection device that can produce an effect of increased resolution without increasing the size of the projection device / actuator device.

[0006] Other objects and advantages of the present invention can be further understood from the technical features disclosed herein.

[0007] To achieve one, some, or all of the above-mentioned objectives, or other objectives, an embodiment of the present invention provides an actuator device, comprising a base, a frame, an optical element, at least two drive assemblies, and a controller. The frame is disposed within the base. The optical element is disposed within the frame. The two central axes of the optical element are parallel to a first direction and a second direction. The at least two drive assemblies are disposed between the base and the frame, corresponding to the two central axes of the optical element. The at least two drive assemblies are used to drive the frame and the optical element to oscillate relative to the base about the two central axes. The controller is electrically connected to the at least two drive assemblies to drive the at least two drive assemblies, causing the optical element to oscillate according to an oscillation pattern. The oscillation pattern includes at least one oscillation of the optical element relative to the base in a third direction. The third direction is the difference between the first direction and the second direction.

[0008] To achieve one or more of the above-mentioned objectives, or other objectives, an embodiment of the present invention provides a projection device, comprising an illumination system, a light valve, a projection lens, and the aforementioned actuator device. The illumination system provides an illumination beam. The light valve is located in the transmission path of the illumination beam. The light valve has an effective area. The effective area is used to receive the illumination beam and to convert the illumination beam into an image beam. The light valve includes a plurality of micromirrors located on the effective area, wherein the two central axes of the effective area are parallel to a first direction and a second direction. The projection lens is located in the transmission path of the image beam and is used to project the image beam outside the projection device.

[0009] Based on the above, in an embodiment of the actuator device and projection device of the present invention, the two central axes of the optical element are parallel to the first direction and the second direction. The controller drives the drive assembly to make the optical element swing according to the swing mode. The swing mode includes at least the optical element swinging relative to the base in a third direction, such that each pixel of the image beam moves along a diamond-shaped path or the pixel offset profile formed by the offset positions of multiple pixels is diamond-shaped. Therefore, without increasing the size of the projection device / actuator device, the actuator device can still produce an effect of increased resolution.

[0010] To make the above features and advantages of the present invention more apparent and understandable, specific embodiments are described below in conjunction with the accompanying drawings. Attached Figure Description

[0011] Figure 1A This is a schematic diagram of a projection device according to an embodiment of the present invention.

[0012] Figure 1B This is a schematic diagram of a projection device according to another embodiment of the present invention.

[0013] Figure 2 This is a schematic diagram of the light valve of a projection device according to an embodiment of the present invention.

[0014] Figure 3A This is a schematic diagram of an actuator device according to an embodiment of the present invention.

[0015] Figure 3B This is a schematic diagram of an actuator device according to another embodiment of the present invention.

[0016] Figure 4A This is a schematic diagram of a first swing mode of an actuator device according to an embodiment of the present invention, in which pixel offset and its corresponding drive signal are generated by swing.

[0017] Figure 4B yes Figure 4A The driving signal in the diagram also includes a schematic of the oscillation signal.

[0018] Figure 5 This is a schematic diagram of a second swing mode of an actuator device according to an embodiment of the present invention, in which pixel offset and its corresponding drive signal are generated by swing.

[0019] Figure 6 This is a schematic diagram of a third swing mode of an actuator device according to an embodiment of the present invention, in which pixel offset and its corresponding drive signal are generated by swing.

[0020] Explanation of reference numerals in the attached figures:

[0021] 1, 2, 3, 4: Position

[0022] 10A, 10B: Projection devices

[0023] 100: Lighting System

[0024] 200: Light valve

[0025] 200C1, 200C2: Center axis

[0026] 210: Microscope

[0027] 300, 300A, 300B: Actuator devices

[0028] 310: Base

[0029] 320: Frame

[0030] 330: Optical Components

[0031] 340-1: First drive component

[0032] 340-2: Second drive component

[0033] 350: Controller

[0034] 400: Projection lens

[0035] A1: First Axis

[0036] A2: Second Axis

[0037] AR: Effective Area

[0038] D1: First Direction

[0039] D2: Second Direction

[0040] D3: Third direction

[0041] D4: Fourth Direction

[0042] DS: Drive signal

[0043] DS1: First drive signal

[0044] DS2: Second drive signal

[0045] L1: illumination beam

[0046] L2: Image Beam

[0047] OS: Oscillation signal

[0048] S1: First Phase

[0049] S2: Second Phase

[0050] S3: Third Phase

[0051] S4: Fourth Phase

[0052] S5: Fifth Phase

[0053] S6: Sixth Phase

[0054] S7: Seventh Phase

[0055] S8: Eighth Phase

[0056] T1, T2, T3: Periods. Detailed Implementation

[0057] The foregoing descriptions and other technical contents, features, and effects of this invention will be clearly presented in the following detailed description of a preferred embodiment with reference to the accompanying drawings. The directional terms used in the following embodiments, such as up, down, left, right, front, or back, are merely for reference to the accompanying drawings. Therefore, the directional terms used are for illustrative purposes and not for limiting the invention.

[0058] Figure 1A This is a schematic diagram of a projection device according to an embodiment of the present invention. Figure 1B This is a schematic diagram of a projection device according to another embodiment of the present invention. Figure 2 This is a schematic diagram of the light valve of a projection device according to an embodiment of the present invention.

[0059] Please refer to Figures 1A to 2An embodiment of the present invention provides a projection device 10A, 10B, which includes an illumination system 100, a light valve 200, a projection lens 400, and an actuator device 300. The illumination system 100 provides an illumination beam L1. The light valve 200 is located on the transmission path of the illumination beam L1. The light valve 200 is, for example, a digital micromirror device (DMD). The light valve 200 has an effective area AR. The effective area AR is used to receive the illumination beam L1 from the illumination system 100 and to convert the illumination beam L1 into an image beam L2. The light valve 200 includes a plurality of micromirrors 210 located on the effective area AR, wherein the two central axes 200C1, 200C2 of the effective area AR are parallel to a first direction D1 and a second direction. The central axes 200C1, 200C2 are lines connecting the midpoints of any two adjacent sides of the effective area AR to the midpoints of their opposite sides. The projection lens 400 is located on the transmission path of the image beam L2 and is used to project the image beam L2 out of the projection devices 10A and 10B. The actuator device 300 is located on the transmission path of the image beam L2 from the light valve 200 and is disposed between the light valve 200 and the projection lens 400 (e.g., Figure 1A (as shown) or configured within the projection lens 400 (such as Figure 1B (As shown). In other embodiments, the actuator device 300 may also be configured between the prism (not shown) and the projection lens 400 of the projection device 10A.

[0060] In detail, in this embodiment, the lighting system 100 may be composed of a light source, a wavelength conversion element (e.g., a phosphor wheel), a light homogenizing element (e.g., an integrating column), a light filtering element (e.g., a filter wheel), a light guiding element (e.g., a reflector), or the lighting system 100 may be composed of a multi-color light source, a light combining element (e.g., a reflector and / or a lens), a light splitting element (e.g., a beam splitter), to provide light beams of different wavelengths as the source of the lighting beam L1. The light source may include one or more light-emitting elements, wherein the light-emitting elements are, for example, light-emitting diodes (LEDs) and / or laser diodes (LDs).

[0061] In this embodiment, the projection lens 400 is, for example, a combination of one or more optical lenses having refractive power. The embodiments of the present invention do not limit the type or form of the projection lens 400.

[0062] Please refer to Figure 1A , Figure 1B and Figure 3AIn this embodiment, the actuator device 300 includes a base 310, a frame 320, an optical element 330, at least two drive components, and a controller 350. The at least two drive components include at least one first drive component 340-1 and at least one second drive component 340-2. The frame 320 is disposed within the base 310. The optical element 330 is disposed within the frame 320. The at least two drive components 340-1 and 340-2 are disposed between the base 310 and the frame 320. The at least two drive components 340-1 and 340-2 are used to drive the frame 320 and the optical element 330 to swing relative to the base 310 about two central axes A1 and A2. That is, with the base 310 as a fixed reference point, the frame 320 and the optical element 330 swing relative to the base 310.

[0063] Figure 3A This is a schematic diagram of an actuator device according to an embodiment of the present invention. Figure 3B This is a schematic diagram of an actuator device according to another embodiment of the present invention. In this embodiment, the above-described... Figure 1A and Figure 1B The actuator device 300 can be implemented as follows: Figure 3A Dual-axis driven actuator device 300 with inner and outer frame type Figure 3B The 300A is a suspended, dual-axis driven actuator device. Figure 3A In the illustrated embodiment, the frame 320 includes an inner frame (not shown) and an outer frame (not shown). The outer frame is disposed within the base 310 and is connected to the base 310 via a pivot (not shown). The inner frame is disposed within the outer frame and is connected to the outer frame via a pivot (not shown). The optical element 330 is disposed within the inner frame. At least one first drive assembly 340-1 is disposed between the outer frame and the inner frame, and at least one second drive assembly 340-2 is disposed between the base 310 and the outer frame. Figure 3B In the embodiment shown, the frame 320 can be connected to the base 310 via a pivot (not shown), and at least one first drive assembly 340-1 and at least one second drive assembly 340-2 are located between the base 310 and the frame 320, respectively.

[0064] Actuator device 300 and actuator device 300A can be either dual-sided or single-sided driven. The aforementioned dual-sided drive means that the first drive assembly 340-1 has at least two components, and the second drive assembly 340-2 has at least two components. For example... Figure 3A and Figure 3BAs shown, actuator devices 300 and 300A each include two sets of first drive assemblies 340-1 and two sets of second drive assemblies 340-2. The two central axes of the optical element 330 include a first axis A1 and a second axis A2. The first axis A1 is parallel to the second direction D2, and the second axis A2 is parallel to the first direction D1. The first direction D1 may be perpendicular to the second direction D2. The central axis is a line connecting the midpoint of any two adjacent sides of the optical element 330 to the midpoint of their respective opposite sides. The two sets of first drive assemblies 340-1 are configured corresponding to the second axis A2 and are respectively configured on opposite sides of the frame 320. The two sets of second drive assemblies 340-2 are configured corresponding to the first axis A1 and are respectively configured on opposite sides of the frame 320.

[0065] In other embodiments, actuator devices 300 and 300A may also be in the form of single-sided drive. The aforementioned single-sided drive means that the first drive component 340-1 is a single component and the second drive component 340-2 is a single component, a set of first drive components 340-1 is configured corresponding to the second axis A2, and a set of second drive components 340-2 is configured corresponding to the first axis A1.

[0066] In this embodiment, the optical element 330 can be glass, plastic, or other light-transmitting elements with a refractive index greater than 1, or it can be a reflective element (such as a mirror). The optical element 330 receives the image beam L2 from the light valve 200 and allows the image beam L2 to pass through or be reflected. Thus, when the optical element 330 swings with the frame 320, compared to the stationary state of the optical element 330, the image beam L2's transmission path is shifted due to refraction or reflection after passing through the optical element 330, thereby adjusting the projection position of the image beam L2. For example... Figure 4A , Figure 5 , Figure 6 Positions 1, 2, 3, and 4 are shown. Figure 3A and Figure 3B The outline of the optical element 330 includes at least its optically effective range, which is the range from the effective area AR of the light valve 200 to the optical element 330. The optically effective range of the optical element 330 can be... Figure 3A and Figure 3B The rectangle shown allows the four sides of the optical element 330 to be parallel to the four sides of the effective area AR of the light valve 200 when the optical element 330 is in a non-oscillating state. In other embodiments, the optical element 330 may also be of other shapes.

[0067] In this embodiment, the controller 350 is electrically connected to at least two driving components 340-1 and 340-2 to drive the optical element 330 to oscillate. The at least two driving components 340-1 and 340-2 are, for example, voice coil motors, piezoelectric materials, or electromagnets. The controller 350 may include, for example, a central processing unit (CPU), a microprocessor, a digital signal processor (DSP), a programmable controller, a programmable logic device (PLD), or other similar devices or combinations thereof. In one embodiment, the functions of the controller 350 may be implemented as multiple program codes. These program codes are stored in a memory unit and executed by the controller 350. Alternatively, in one embodiment, the functions of the controller 350 may be implemented as one or more circuits. The embodiments of the present invention do not limit the implementation of the functions of the controller 350 in software or hardware.

[0068] In this embodiment, the controller 350 drives the first drive assembly 340-1 and the second drive assembly 340-2 to cause the optical element 330 to oscillate according to an oscillation mode. The first drive assembly 340-1 causes the optical element 330 to oscillate back and forth relative to the base 310 about a first axis A1. The second drive assembly 340-2 causes the optical element 330 to oscillate back and forth relative to the base 310 about a second axis A2.

[0069] In this embodiment, as Figure 2 As shown, when multiple sides of the contour of the micromirror 210 of the light valve 200 are not parallel to the long or short side of the effective area AR of the light valve 200, the controller 350 controls the swing direction of the above-mentioned swing mode to include at least the swing of the optical element 330 relative to the base 310 toward a third direction D3, so that the pixel offset path of the image beam L2 or the pixel offset contour formed by multiple pixel offset positions can correspond to the contour of the micromirror 210. The third direction D3 is the difference between the first direction D1 and the second direction D2. The third direction D3 is not parallel to the first direction D1 and the first direction D2.

[0070] For example, such as Figure 2As shown, the effective area AR of the light valve 200 has a rectangular outline. When the outline of the micromirror 210 of the light valve 200 is rhomboid relative to the effective area AR, or when any axis of rotation (not shown) on the micromirror 210 of the light valve 200 is parallel to the long or short side of the effective area AR of the light valve 200, the controller 350 is used to move each pixel of the image beam L2 along a rhomboid path (or to make the pixel offset outline formed by the offset positions of multiple pixels rhomboid). This makes the pixel offset path (or pixel offset outline) of the image beam L2 parallel to the outline (rhomboid) of the micromirror 210 of the light valve 200. In this embodiment, the two diagonals of each micromirror 210 are parallel to the first direction D1 and the second direction D2, and the two adjacent sides of the micromirror 210 are parallel to the third direction D3 and the fourth direction D4.

[0071] In this embodiment, the controller 350 generates multiple drive signals DS to at least two drive components 340-1 and 340-2 to drive them. Simultaneously, the multiple drive signals DS may correspond to different drive currents and / or different drive voltages. The multiple drive signals DS include a first drive signal DS1 for driving the first drive component 340-1 and a second drive signal DS2 for driving the second drive component 340-2. In each phase of each cycle T1, one of the first drive signal DS1 and the second drive signal DS2 is a zero signal (i.e., the drive current or drive voltage is 0), and the other is a positive or negative signal. That is, when the at least two drive components 340-1 and 340-2 are operating, in each phase, either the first drive signal DS1 or the second drive signal DS2 is a zero signal, and the first drive signal DS1 and the second drive signal DS2 are not simultaneously zero signals. Furthermore, in some embodiments, the first driving component 340-1 and the second driving component 340-2 operate synchronously, and there is no phase difference between the first driving signal DS1 and the second driving signal DS2.

[0072] In this embodiment, the oscillation mode of the optical element 330 may include at least one of a first oscillation mode, a second oscillation mode, and a third oscillation mode. The actuator devices 300 and 300A may have only one oscillation mode or multiple oscillation modes. The first oscillation mode, the second oscillation mode, and the third oscillation mode will be described sequentially below.

[0073] Figure 4A This is a schematic diagram illustrating pixel offset and its corresponding drive signal generated by oscillation in a first oscillation mode of an actuator device according to an embodiment of the present invention. Please refer to... Figure 4AThe first oscillation mode includes oscillation of the optical element 330 relative to the base 310 in a third direction D3 (e.g., the upper right direction), as well as oscillation in the opposite direction to the third direction D3 (e.g., the lower left direction), a fourth direction D4 (e.g., the lower right direction), and its opposite direction (e.g., the upper left direction). The fourth direction D4 is the sum of the first direction D1 and the second direction D2. The fourth direction D4 is not parallel to the first direction D1 and the first direction D2. In embodiments where the micromirror 210 profile of the light valve 200 is rhomboid relative to the effective area AR, the third direction D3 may be perpendicular to the fourth direction D4.

[0074] In this embodiment, each period T1 of the first swing mode sequentially includes a first phase S1, a second phase S2, a third phase S3, and a fourth phase S4. The first swing mode includes the optical element 330 swinging relative to the base 310 in the first to fourth phases S1 to S4 in the directions of the third direction D3, the fourth direction D4, the opposite direction of the third direction D3, and the opposite direction of the fourth direction D4, respectively.

[0075] In this embodiment, the first driving signal DS1 is, in the first to fourth phases S1 to S4, a zero signal, a positive signal, a zero signal, and a negative signal, respectively. The second driving signal DS2 is, in the first to fourth phases S1 to S4, a positive signal, a zero signal, a negative signal, and a zero signal, respectively.

[0076] by Figure 4ATaking period T1 as an example, the image beam L2 from optical element 330 can form light spots that move in the order of positions 1 to 4 on a virtual plane, thus performing pixel shifting. This virtual plane is, for example, parallel to the projection plane. For instance, taking optical element 330 as a light-transmitting element, starting from position 4, at the beginning of the first phase S1, the first driving signal DS1 changes from a negative signal to a zero signal, and the second driving signal DS2 changes from a zero signal to a positive signal. Optical element 330 swings relative to base 310 in a third direction D3, and the image beam L2 moves from position 4 to position 1 through the position of optical element 330. At the beginning of the second phase S2, the first driving signal DS1 changes from a zero signal to a positive signal, and the second driving signal DS2 changes from a positive signal to a zero signal. Optical element 330 swings relative to base 310 in a fourth direction D4, and the image beam L2 moves from position 1 to position 2 through the position of optical element 330. At the beginning of the third phase S3, the first driving signal DS1 changes from a positive signal to a zero signal, and the second driving signal DS2 changes from a zero signal to a negative signal. The optical element 330 oscillates relative to the base 310 in the opposite direction of the third direction D3, and the image beam L2 moves from position 2 to position 3 through the optical element 330. At the beginning of the fourth phase S4, the first driving signal DS1 changes from a zero signal to a negative signal, and the second driving signal DS2 changes from a negative signal to a zero signal. The optical element 330 oscillates relative to the base 310 in the opposite direction of the fourth direction D4, and the image beam L2 moves from position 3 to position 4 through the optical element 330. The first oscillation pattern corresponds, for example, to a clockwise (or counterclockwise) diamond-shaped path movement of the pixel offset path of the image beam L2. Therefore, in one period T1, the image beam L2 forms a pixel set at positions 1 to 4, and the pixel offset contour formed by multiple pixel offset positions (positions 1 to 4) is a rhombus. By shifting the position of each pixel in the image, the resolution of the projection devices 10A and 10B is improved. The foregoing description uses the optical element 330 as a light-transmitting element as an example. In other embodiments, when the optical element 330 is a reflective element, the image beam L2 will be reflected by the optical element 330, changing its position. Furthermore, in other embodiments, during the first to fourth phases S1, the pixel offset position of the image beam L2 may also be shifted counterclockwise from position 1 to positions 4, 3, and 2.

[0077] Figure 4B yes Figure 4A The driving signals also include a schematic diagram of the oscillation signal. Please refer to [the diagram]. Figure 4A and Figure 4BThe first driving signal DS1 and the second driving signal DS2 also include an oscillation signal OS that causes the optical element 330 to oscillate. During the oscillation period of the optical element 330 (which also corresponds to the beginning of the phase and between signal transitions), the optical element 330 will remain in a steady-state position (corresponding to the stable state of the first driving signal DS1 / second driving signal DS2). For example, at the beginning of the first phase S1, the oscillation signal OS of the first driving signal DS1 and the second driving signal DS causes the optical element 330 to oscillate relative to the base 310 in a third direction D3, and the optical element 330 will remain in position 1 after the oscillation.

[0078] Figure 5 This is a schematic diagram illustrating the generation of pixel offset and its corresponding drive signal in a second oscillation mode of an actuator device according to an embodiment of the present invention. Please refer to... Figure 5 In this embodiment, the second swing mode also includes swinging in the opposite direction to the second direction D2 and the first direction D1.

[0079] In this embodiment, each period T2 of the second swing mode sequentially includes a first phase S1, a second phase S2, a third phase S3, and a fourth phase S4. The second swing mode includes the optical element 330 swinging relative to the base 310 in the opposite directions of the third direction D3, the second direction D2, the third direction D3, and the first direction D1, respectively, during the first to fourth phases S1 to S4.

[0080] In this embodiment, the first driving signal DS1 is, in the first to fourth phases S1 to S4, a zero signal, a zero signal, a positive signal, and a negative signal, respectively. The second driving signal DS2 is, in the first to fourth phases S1 to S4, a positive signal, a negative signal, a zero signal, and a zero signal, respectively.

[0081] by Figure 5Taking period T2 as an example, the image beam L2 from optical element 330 can form light spots that move in the order of positions 1 to 4 on a virtual plane, thus performing pixel shifting. For example, taking optical element 330 as a light-transmitting element, starting from position 4, at the beginning of the first phase S1, the first driving signal DS1 changes from a negative signal to a zero signal, and the second driving signal DS2 changes from a zero signal to a positive signal. Optical element 330 swings relative to base 310 in a third direction D3, and image beam L2 moves from position 4 to position 1 through the position of optical element 330. At the beginning of the second phase S2, the first driving signal DS1 remains a zero signal, and the second driving signal DS2 changes from a positive signal to a negative signal. Optical element 330 swings relative to base 310 in a second direction D2, and image beam L2 moves from position 1 to position 2 through the position of optical element 330. At the beginning of the third phase S3, the first driving signal DS1 changes from zero to positive, and the second driving signal DS2 changes from negative to zero. Optical element 330 oscillates relative to base 310 in the third direction D3, and the image beam L2 moves from position 2 to position 3 through optical element 330. At the beginning of the fourth phase S4, the first driving signal DS1 changes from positive to negative, and the second driving signal DS2 remains zero. Optical element 330 oscillates relative to base 310 in the opposite direction to the first direction D1, and the image beam L2 moves from position 3 to position 4 through optical element 330. The second oscillation pattern corresponds, for example, to a pixel offset path of image beam L2 that includes at least a diagonal path movement, such as moving from position 1 to its diagonal position 2, and from position 3 to its diagonal position 4. Therefore, the image beam L2 forms a pixel set of the projection devices 10A and 10B at positions 1 to 4, and the pixel offset contour formed by multiple pixel offset positions (positions 1 to 4) is rhomboid, which improves the image resolution of the projection devices 10A and 10B.

[0082] Figure 6 This is a schematic diagram illustrating the generation of pixel offset and its corresponding drive signal in the third swing mode of an actuator device according to an embodiment of the present invention. Please refer to... Figure 6 In this embodiment, the third swing mode also includes swinging in the direction opposite to the third direction D3, the second direction D2 and the opposite direction.

[0083] In this embodiment, each period T3 of the third swing mode sequentially includes a first phase S1, a second phase S2, a third phase S3, a fourth phase S4, a fifth phase S5, a sixth phase S6, a seventh phase S7, and an eighth phase S8. The third swing mode includes the optical element 330 swinging relative to the base 310 in the second to fourth and sixth to eighth phases S2 to S4 and S6 to S8 in the third direction D3, the second direction D2, the third direction D3, the opposite direction of the third direction D3, the opposite direction of the second direction D2, and the opposite direction of the third direction D3, respectively.

[0084] In this embodiment, the first driving signal DS1 is a negative signal, a zero signal, a zero signal, a positive signal, a positive signal, a zero signal, a zero signal, and a negative signal in the first to eighth phases S1 to S8. The second driving signal DS2 is a zero signal, a positive signal, a negative signal, a zero signal, a zero signal, a zero signal, a negative signal, a positive signal, and a zero signal in the first to eighth phases S1 to S8.

[0085] by Figure 6Taking period T3 as an example, the image beam L2 from optical element 330 can form light spots that move in the order of positions 1 to 4 on a virtual plane, thus performing pixel shifting. For example, taking optical element 330 as a light-transmitting element, starting from position 1, in the first phase S1, the first driving signal DS1 remains a negative signal, and the second driving signal DS2 remains a zero signal. The position of image beam L2 passing through optical element 330 remains at position 1 in the eighth phase S8, that is, it remains stationary at position 1. At the beginning of the second phase S2, the first driving signal DS1 changes from a negative signal to a zero signal, and the second driving signal DS2 changes from a zero signal to a positive signal. Optical element 330 swings relative to base 310 in a third direction D3, and the position of image beam L2 passing through optical element 330 moves from position 1 to position 2. At the beginning of the third phase S3, the first driving signal DS1 remains at zero, the second driving signal DS2 changes from positive to negative, the optical element 330 swings relative to the base 310 in the second direction D2, and the image beam L2 moves from position 2 to position 3 through the optical element 330. At the beginning of the fourth phase S4, the first driving signal DS1 changes from zero to positive, the second driving signal DS2 changes from negative to zero, the optical element 330 swings relative to the base 310 in the third direction D3, and the image beam L2 moves from position 3 to position 4 through the optical element 330. In the fifth phase S5, the first driving signal DS1 remains positive, the second driving signal DS2 remains zero, and the image beam L2 remains stationary at position 4 in the fourth phase S4. At the beginning of the sixth phase S6, the first driving signal DS1 changes from positive to zero, and the second driving signal DS2 changes from zero to negative. Optical element 330 oscillates relative to base 310 in the opposite direction of the third direction D3, and the image beam L2 moves from position 4 to position 3 through optical element 330. At the beginning of the seventh phase S7, the first driving signal DS1 remains zero, and the second driving signal DS2 changes from negative to positive. Optical element 330 oscillates relative to base 310 in the opposite direction of the second direction D2, and the image beam L2 moves from position 3 to position 2 through optical element 330. At the beginning of the eighth phase S8, the first driving signal DS1 changes from zero to negative, and the second driving signal DS2 changes from positive to zero. Optical element 330 oscillates relative to base 310 in the opposite direction of the third direction D3, and the image beam L2 moves from position 2 to position 1 through optical element 330. The third oscillation mode corresponds, for example, to a movement that reverses the pixel offset path of image beam L2.The first driving signal DS1 is mirror-symmetric with the first to fourth phases S1 to S4 and the fifth to eighth phases S5 to S8; the second driving signal DS2 is mirror-symmetric with the first to fourth phases S1 to S4 and the fifth to eighth phases S5 to S8. Therefore, the image beam L2 forms the pixel set of the projection devices 10A and 10B at positions 1 to 4 and then from position 4 to position 1, and the pixel offset contour formed by multiple pixel offset positions (positions 1 to 4) is rhomboid, thereby improving the image resolution of the projection devices 10A and 10B.

[0086] In this embodiment, by means of the first oscillation mode, the second oscillation mode, and / or the third oscillation mode of the optical element 330, the pixel offset profile (rhombus) formed by multiple pixel offset positions (positions 1 to 4) of the image beam L2 can correspond to the profile (rhombus) of the micromirror 210 of the light valve 200. Based on this, compared with the prior art projector, the actuator devices 300 and 300A of the embodiment of the present invention do not need to be rotated 45° relative to the effective area AR of the light valve to meet the requirement of the pixel offset profile being rhombus. Thus, the effects of not needing to increase the size of the actuator, improving space utilization, and improving image resolution can be achieved.

[0087] In summary, in one embodiment of the present invention, the actuator device and the projection device using the actuator device include a base, a frame, an optical element, at least two drive components, and a controller. The optical element is disposed within the frame, and the two central axes of the optical element are parallel to a first direction and a second direction. The drive components are used to drive the frame and the optical element to oscillate relative to the base about the two central axes. The controller is used to drive the drive components to make the optical element oscillate according to an oscillation pattern. The oscillation pattern includes at least one oscillation of the optical element relative to the base in a third direction, such that each pixel of the image beam moves along a diamond-shaped path or the pixel offset profile formed by the offset positions of multiple pixels is diamond-shaped. Therefore, the actuator device can still produce an effect of increased resolution without increasing the size of the projection device / actuator device.

[0088] The above description is merely a preferred embodiment of the present invention and should not be construed as limiting the scope of the invention. Any simple equivalent changes and modifications made in accordance with the claims and description of the invention are still within the scope of this patent. Furthermore, no embodiment or claim of the present invention needs to achieve all the objectives, advantages, or features disclosed in the invention. In addition, the abstract and title (invention title) are only used to assist in patent document retrieval and are not intended to limit the scope of the invention. Furthermore, the terms "first," "second," etc., mentioned in this specification or claims are only used to name elements or distinguish different embodiments or scopes, and are not used to limit the upper or lower limit of the number of elements.

Claims

1. An actuator device, characterized in that, The actuator device includes a base, a frame, optical elements, at least two drive components, and a controller, wherein: The frame is disposed within the base; The optical element is disposed within the frame, and the two central axes of the optical element are parallel to the first direction and the second direction; The at least two driving components are disposed between the base and the frame, corresponding to the two central axes of the optical element, and are used to drive the frame and the optical element to swing relative to the base about the two central axes as rotation axes; and The controller is electrically connected to the at least two driving components to drive the at least two driving components, causing the optical element to oscillate according to an oscillation pattern. The swing direction of the swing mode includes at least the swing of the optical element relative to the base in a third direction, where the third direction is the difference between the first direction and the second direction.

2. The actuator device according to claim 1, characterized in that, The swing mode includes at least one of a first swing mode, a second swing mode, and a third swing mode, wherein the first swing mode further includes swinging the optical element relative to the base in a direction opposite to a third direction, a fourth direction, and the opposite direction thereof; the second swing mode further includes swinging in a direction opposite to the second direction and the first direction; and the third swing mode further includes swinging in a direction opposite to the third direction, the second direction, and the opposite direction thereof, wherein the fourth direction is the sum of the first direction and the second direction.

3. The actuator device according to claim 1, characterized in that, The at least two driving components include at least one first driving component and at least one second driving component. The two central axes of the optical element include a first axis parallel to the second direction and a second axis parallel to the first direction, wherein: The at least one first drive assembly is used to cause the optical element to oscillate back and forth relative to the base about the first axis as a rotation axis, and The at least one second drive assembly is used to cause the optical element to oscillate back and forth relative to the base about the second axis as the rotation axis.

4. The actuator device according to claim 3, characterized in that, The controller is used to drive the at least two drive components by means of multiple drive signals. The plurality of drive signals include a first drive signal for driving the at least one first drive component and a second drive signal for driving the at least one second drive component. In each phase of each cycle, one of the first driving signal and the second driving signal is a zero signal, and the other is a positive signal or a negative signal.

5. The actuator device according to claim 4, characterized in that, Each cycle of the oscillation pattern sequentially includes a first phase, a second phase, a third phase, and a fourth phase. The oscillation mode includes the optical element oscillating relative to the base in the first to the fourth phases toward the third direction, the fourth direction, the opposite direction of the third direction, and the opposite direction of the fourth direction, respectively, wherein the fourth direction is the sum of the first direction and the second direction.

6. The actuator device according to claim 5, characterized in that, The first driving signal is, in the first to the fourth phases, the zero signal, the positive signal, the zero signal and the negative signal in sequence, and the second driving signal is, in the first to the fourth phases, the positive signal, the zero signal, the negative signal and the zero signal in sequence.

7. The actuator device according to claim 4, characterized in that, Each cycle of the oscillation pattern sequentially includes a first phase, a second phase, a third phase, and a fourth phase. The oscillation mode includes the optical element oscillating relative to the base in the first to the fourth phases in the opposite directions of the third direction, the second direction, the third direction, and the first direction, respectively.

8. The actuator device according to claim 7, characterized in that, The first driving signal is, in the first to the fourth phases, the zero signal, the positive signal, and the negative signal in sequence, and the second driving signal is, in the first to the fourth phases, the positive signal, the negative signal, the zero signal, and the zero signal in sequence.

9. The actuator device according to claim 4, characterized in that, Each cycle of the oscillation pattern sequentially includes a first phase, a second phase, a third phase, a fourth phase, a fifth phase, a sixth phase, a seventh phase, and an eighth phase. The oscillation mode includes the optical element oscillating relative to the base in the second to the fourth and the sixth to the eighth phases toward the third direction, the second direction, the third direction, the opposite direction of the third direction, the opposite direction of the second direction, and the opposite direction of the third direction, respectively.

10. The actuator device according to claim 9, characterized in that, The first driving signal is the negative signal, the zero signal, the zero signal, the positive signal, the positive signal, the zero signal, the zero signal, and the negative signal in the first to the eighth phases, and the second driving signal is the zero signal, the positive signal, the negative signal, the zero signal, the zero signal, the negative signal, the positive signal, and the zero signal in the first to the eighth phases.

11. A projection device, characterized in that, The projection device includes an illumination system, a light valve, a projection lens, and an actuator device, wherein: The lighting system is used to provide a beam of light; The light valve is located on the transmission path of the illumination beam. The light valve has an effective area for receiving the illumination beam and converting it into an image beam. The light valve includes a plurality of micromirrors located on the effective area, wherein the two central axes of the effective area are parallel to a first direction and a second direction. The projection lens is located in the transmission path of the image beam and is used to project the image beam outside the projection device; and The actuator device is located on the transmission path of the image beam from the light valve and is disposed between the light valve and the projection lens or within the projection lens. The actuator device includes a base, a frame, optical elements, at least two drive components, and a controller. The frame is disposed within the base; The optical element is disposed within the frame, and the two central axes of the optical element are parallel to the first direction and the second direction; The at least two driving components are disposed between the base and the frame, corresponding to the two central axes of the optical element, and are used to drive the frame and the optical element to swing relative to the base about the two central axes as rotation axes; and The controller is electrically connected to the at least two driving components to drive the at least two driving components, causing the optical element to oscillate according to an oscillation pattern. The swing direction of the swing mode includes at least the swing of the optical element relative to the base in a third direction, where the third direction is the difference between the first direction and the second direction.

12. The projection device according to claim 11, characterized in that, The swing mode includes at least one of a first swing mode, a second swing mode, and a third swing mode, wherein the first swing mode further includes swinging the optical element relative to the base in a direction opposite to a third direction, a fourth direction, and the opposite direction thereof; the second swing mode further includes swinging in a direction opposite to the second direction and the first direction; and the third swing mode further includes swinging in a direction opposite to the third direction, the second direction, and the opposite direction thereof, wherein the fourth direction is the sum of the first direction and the second direction.

13. The projection device according to claim 11, characterized in that, The at least two driving components include at least one first driving component and at least one second driving component. The two central axes of the optical element include a first axis parallel to the second direction and a second axis parallel to the first direction, wherein: The at least one first drive assembly is used to cause the optical element to oscillate back and forth relative to the base about the first axis as a rotation axis, and The at least one second drive assembly is used to cause the optical element to oscillate back and forth relative to the base about the second axis as the rotation axis.

14. The projection device according to claim 13, characterized in that, The controller is used to drive the at least two drive components by means of multiple drive signals. The plurality of drive signals include a first drive signal for driving the at least one first drive component and a second drive signal for driving the at least one second drive component. In each phase of each cycle, one of the first driving signal and the second driving signal is a zero signal, and the other is a positive signal or a negative signal.

15. The projection device according to claim 14, characterized in that, Each cycle of the oscillation pattern sequentially includes a first phase, a second phase, a third phase, and a fourth phase. The oscillation mode includes the optical element oscillating relative to the base in the first to the fourth phases toward the third direction, the fourth direction, the opposite direction of the third direction, and the opposite direction of the fourth direction, respectively, wherein the fourth direction is the sum of the first direction and the second direction.

16. The projection device according to claim 15, characterized in that, The first driving signal is, in the first to the fourth phases, the zero signal, the positive signal, the zero signal and the negative signal in sequence, and the second driving signal is, in the first to the fourth phases, the positive signal, the zero signal, the negative signal and the zero signal in sequence.

17. The projection device according to claim 14, characterized in that, Each cycle of the oscillation pattern sequentially includes a first phase, a second phase, a third phase, and a fourth phase. The oscillation mode includes the optical element oscillating relative to the base in the first to the fourth phases in the opposite directions of the third direction, the second direction, the third direction, and the first direction, respectively.

18. The projection device according to claim 17, characterized in that, The first driving signal is, in the first to the fourth phases, the zero signal, the positive signal, and the negative signal in sequence, and the second driving signal is, in the first to the fourth phases, the positive signal, the negative signal, the zero signal, and the zero signal in sequence.

19. The projection device according to claim 14, characterized in that, Each cycle of the oscillation pattern sequentially includes a first phase, a second phase, a third phase, a fourth phase, a fifth phase, a sixth phase, a seventh phase, and an eighth phase. The oscillation mode includes the optical element oscillating relative to the base in the second to the fourth and the sixth to the eighth phases toward the third direction, the second direction, the third direction, the opposite direction of the third direction, the opposite direction of the second direction, and the opposite direction of the third direction, respectively.

20. The projection device according to claim 19, characterized in that, The first driving signal is the negative signal, the zero signal, the zero signal, the positive signal, the positive signal, the zero signal, the zero signal, and the negative signal in the first to the eighth phases, and the second driving signal is the zero signal, the positive signal, the negative signal, the zero signal, the zero signal, the negative signal, the positive signal, and the zero signal in the first to the eighth phases.

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