An electron microscope stage for transmission electron microscope support grids

Abstract

The application discloses an electron microscope stage for a transmission electron microscope carrier net, and belongs to the technical field of electron microscope sample bearing equipment. The electron microscope stage comprises a stage main body, an observation hole, a light transmission hole and a containing space for clamping the carrier net are arranged on the stage main body, the observation hole and the light transmission hole are communicated with the containing space, one side of the carrier net bearing a sample can be observed through the observation hole, light can be emitted to the side of the carrier net far away from the sample through the light transmission hole, a blocking device is further arranged in the containing space, and the carrier net is located between the blocking device and the containing space. The carrier net is placed on the stage main body, the stability of the carrier net in the electron microscope observation experiment process is improved through the limitation of the blocking device and the containing space, the efficient, stable and accurate observation operation of the carrier net sample is guaranteed, and the experimental requirement of high-precision and high-quality micro-morphology and structure characterization is perfectly adapted.

Description

Technical Field

[0001] This invention relates to the field of electron microscope sample support equipment, and in particular to a scanning electron microscope stage for a transmission electron microscope grid. Background Technology

[0002] A transmission electron microscope (TEM) is a precision scientific research instrument that uses a high-energy electron beam to penetrate ultrathin samples and combines this with the multi-stage magnification principle of electromagnetic lenses to achieve ultra-high resolution microscopic imaging. With imaging precision at the nanometer and even atomic levels, it is widely used in many cutting-edge research fields such as new material development, semiconductor device testing, biological microstructure analysis, and nanomaterial morphology characterization. It is a core piece of equipment for microscale morphology, structure, and composition analysis. In TEM operations, it is impossible to directly support and observe microscopic and ultrathin samples such as powders, thin films, and biological sections. Therefore, the industry commonly uses specialized meshes as sample carriers to achieve stable mounting and accurate observation of ultrathin samples.

[0003] Conventional transmission electron microscope (TEM) grids are standardized thin-sheet mesh structures, approximately 3 millimeters in diameter. They are extremely small, thin, and lightweight, with a high proportion of openwork and weak structural rigidity. In actual sample preparation and observation, researchers typically attach and distribute the sample evenly within the central effective observation area of ​​the grid, ensuring the transmission electron beam can penetrate the sample smoothly for microscopic imaging. To further refine sample characterization and achieve complementary multi-device detection, the research field often performs secondary observations on the TEM grid carrying the sample. This involves transferring the TEM grid to a scanning electron microscope (SEM) to conduct multi-dimensional characterization analyses, including surface morphology, microscopic dimensions, and elemental distribution, thereby improving the comprehensiveness and accuracy of sample detection.

[0004] In the scanning electron microscope (SEM) observation process, the transmission electron microscope (TEM) mesh carrying the sample must be temporarily fixed to the surface of the SEM-specific sample stage or a universal sample holder before entering the equipment chamber to complete the observation work. Currently, most SEM sample stages are of a universal structure, mainly suitable for supporting and fixing conventional blocky and sheet-like large samples, and have not been structurally optimized for small-sized, ultra-thin, perforated TEM meshes. Existing sample stages rely solely on planar support structures to hold the mesh, lacking dedicated limiting and anti-fall-off fixing structures. Furthermore, the TEM mesh itself is tiny, extremely lightweight, and has a smooth surface without any fixed force-bearing structure.

[0005] In routine operating conditions, the mesh support placed on the existing sample stage is highly susceptible to displacement, slippage, or even direct drop. Once the mesh support falls, it not only directly damages the valuable sample to be tested mounted on its surface, rendering all the complex sample preparation procedures useless and significantly increasing the material and time costs of scientific research experiments, but it can also cause foreign matter from the fallen mesh support to contaminate the electron microscope chamber, affecting the operating accuracy and lifespan of the precision electron microscope equipment. In severe cases, it can even cause equipment malfunctions, delaying the progress of scientific research experiments. Furthermore, the falling or shifting of the mesh support can lead to problems such as observation point misalignment, blurred imaging, and data invalidation, greatly reducing the accuracy and repeatability of electron microscope detection data, failing to meet the requirements of high-precision, high-stability microscopic detection experiments.

[0006] In summary, current electron microscope sample stages suffer from core defects such as poor structural adaptability, lack of anti-drop function for the netting, and insufficient fixation stability. These defects make it difficult to adapt to the stable placement and precise observation of the netting in transmission electron microscopes. The industry urgently needs a dedicated stage structure that is specifically adapted to the netting of transmission electron microscopes, can effectively prevent the netting from falling, is firmly fixed, and has strong adaptability, in order to solve the many technical drawbacks of the existing technology and ensure that the netting sample observation operation is carried out efficiently, stably, and accurately. Summary of the Invention

[0007] The purpose of this invention is to solve the above-mentioned technical problems and provide an electron microscope stage for a transmission electron microscope (TEM) mesh carrier, comprising a stage body, an observation hole, a light transmission hole, and a receiving space for holding the mesh carrier on the stage body. The observation hole and the light transmission hole are both connected to the receiving space. The observation hole allows observation of the sample carried by the mesh carrier, and the light transmission hole allows light to be directed to the side of the mesh carrier away from the sample. A blocking device is also provided in the receiving space, and the mesh carrier is located between the blocking device and the receiving space.

[0008] Preferably, the blocking device includes a pressure ring; The main body of the stage has a support groove for supporting the net, and the bottom of the support groove is used to accommodate the net. The pressure ring is located in the support groove and presses against the net. The side of the pressure ring facing the bottom of the support groove includes a contact area and a pressure area. The contact area is located outside the pressure area. The central axis of the pressure area is collinear with the central axis of the observation hole. The pressure area is located radially around the observation hole. The inner contour of the pressure area is larger than the outer contour of the observation hole. The contact area is used to contact the bottom of the support groove. The pressure area is used to press against the net. The accommodating space is located between the pressure area and the support groove.

[0009] Preferably, the side of the pressure ring away from the bearing groove does not protrude from the bearing groove.

[0010] Preferably, the pressure ring includes an annular structure and a lever ear. The annular structure includes a contact area and a ballast area. The annular structure is fixedly connected to the lever ear. Both the annular structure and the lever ear are located within the bearing groove. The lever ear is rotatably connected to the bottom of the groove, allowing the lever ear to rotate horizontally within the bearing groove. The annular structure can rotate with the lever ear.

[0011] Preferably, the actuating ear is rotatably connected to the side wall of the bearing groove, so that the actuating ear can flip within the bearing groove, and the annular structure can flip along with the actuating ear.

[0012] Preferably, the device further includes a spring, the two ends of which are respectively connected to the sidewalls of the actuating lug and the movable groove.

[0013] Preferably, the bottom of the bearing groove is provided with a convex ring, which is used to support the carrier net, and the receiving space is provided between the convex ring and the pressure area of ​​the pressure ring.

[0014] Preferably, the ring structure can be C-shaped.

[0015] Preferably, the stage body is made of conductive metal material.

[0016] Preferably, there are multiple bearing grooves, and a marking and positioning device for marking the position is provided between adjacent bearing grooves.

[0017] Compared with the prior art, the present invention has at least the following beneficial effects: The electron microscope stage includes a main body with a light-transmitting aperture to provide light to the space within the stage. The light from the aperture is directed onto a sample grid, facilitating observation of the sample on the grid through the observation port. A blocking device prevents the grid from detaching from the storage space. By securing the grid to the main body of the stage, the stability of the grid during electron microscope experiments is improved, ensuring efficient, stable, and accurate observation of the sample. This perfectly meets the demands of high-precision, high-requirement microscopic morphology and structural characterization experiments. Attached Figure Description

[0018] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the drawings used in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained by analyzing these drawings without creative effort.

[0019] Figure 1The following is a top view of the main body of the stage (with a flip-type pressure ring) in an embodiment of the present invention (a is a structural schematic diagram of the annular pressure ring in the bearing groove, b is a structural schematic diagram of the bearing groove adapted to the annular pressure ring (excluding the pressure ring), and c is a structural schematic diagram of the C-shaped pressure ring in the bearing groove). Figure 2 This is a top view of the main body of the stage (with a rotating pressure ring) in an embodiment of the present invention (a is a structural schematic diagram of the annular pressure ring pressing the carrier net in the bearing groove, b is a structural schematic diagram of the annular pressure ring in the receiving groove (this case applies to situations such as preparing to place or remove the carrier net), c is a structural schematic diagram of the C-shaped pressure ring in the bearing groove). Figure 3 This is a side view of the stage body (with a flip-type pressure ring) in an embodiment of the present invention. Figure 4 This is a cross-sectional structural diagram of the stage body (with a flip-type pressure ring) in an embodiment of the present invention; Figure 5 This is a top view of the rotating pressure ring (C-shaped) in an embodiment of the present invention; Figure 6 This is a top view of the flip-type pressure ring (C-shaped) in an embodiment of the present invention; Figure 7 This is a top view of the rotating pressure ring (ring) in an embodiment of the present invention.

[0020] Explanation of reference numerals in the attached drawings: 1. Main body of the stage; 11. Support groove; 12. Receiving groove; 13. Marking and positioning device; 14. Light-transmitting hole; 2. Pressure ring; 21. Ring structure; 22. Actuating ear; 3. Carrying net; 4. Spring. Detailed Implementation

[0021] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only a part of the embodiments of the present invention, and not all of them. Based on the embodiments of the present invention, all other embodiments analyzed and obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0022] The purpose of this invention is to provide an electron microscope stage for a transmission electron microscope (TEM) screen. The electron microscope stage includes a stage body, a light-transmitting hole on the stage body to provide light to the space on the stage body, and the light from the light-transmitting hole is placed on the screen to facilitate observation of the sample on the screen through the observation hole. A blocking device is also provided in the space, and the screen is located between the blocking device and the space. The pressing action of the blocking device on the screen can prevent the screen from falling out of the space.

[0023] To make the above-mentioned objects, features and advantages of the present invention more apparent and understandable, the present invention will be further described in detail below with reference to the accompanying drawings and specific embodiments.

[0024] like Figures 1-7 As shown, this embodiment provides an electron microscope stage for a transmission electron microscope grid 3, including a stage body 1. The stage body 1 has an observation hole, a light transmission hole 14, and a receiving space for clamping the grid 3. The observation hole and the light transmission hole 14 are both connected to the receiving space. The observation hole can observe the sample carried by the grid 3, and the light transmission hole 14 can shine light onto the side of the grid 3 away from the sample. The sample on the grid 3 can then be observed through the observation hole. A blocking device is also provided in the receiving space, and the grid 3 is located between the blocking device and the receiving space.

[0025] In one embodiment, the blocking device includes a pressure ring 2; The stage body 1 has a support groove 11 for supporting the net 3, and the bottom of the support groove 11 is used to accommodate the net 3. A pressure ring 2 is located inside the support groove 11 and presses onto the net 3. The side of the pressure ring 2 facing the bottom of the support groove 11 includes a contact area and a pressure area, both of which are annular. The contact area is located outside the pressure area, and the central axis of the pressure area is collinear with the central axis of the observation hole, allowing light to pass through the light-transmitting hole 14 onto the net 3 within the accommodating space. The pressure area is located radially around the observation hole, and its inner contour is larger than the outer contour of the observation hole. The contact area is used to contact the bottom of the support groove 11, and the pressure area is used to press onto the net 3. The accommodating space is located between the pressure area and the support groove 11, and the net 3 is located within the accommodating space between the pressure area and the support groove 11, thus completing the pressure and position constraint of the net 3 to prevent displacement of the net 3 during the experiment and affecting observation.

[0026] In one embodiment, the contact area and the ballast area of ​​the pressure ring 2 are stepped transitions, and the outer wall of the ballast area is equivalent to the inner wall of the contact area. When the ballast area is pressed onto the carrier net 3, the outer wall of the ballast area can restrict the carrier net 3 and prevent the carrier net 3 from moving within the ballast area.

[0027] In one embodiment, the pressure ring 2 does not protrude from the support groove 11. When the stage body 1 is placed on the electron microscope, the pressure ring 2 will not affect the insertion of the stage body 1, so that the stage body 1 will not increase the risk of collision between the pressure ring 2 and the electron microscope lens due to the protrusion of the pressure ring 2.

[0028] In one embodiment, the pressure ring 2 includes an annular structure 21 and a lever ear 22. The annular structure 21 includes a contact area and a ballast area. The annular structure 21 and the lever ear 22 are fixedly connected. Both the annular structure 21 and the lever ear 22 are located within the bearing groove 11. The lever ear 22 is rotatably connected to the bottom of the groove, allowing the lever ear 22 to rotate horizontally within the bearing groove 11. An operator can directly or use a tool to rotate the lever ear 22. When the lever ear 22 rotates, the annular structure 21 can rotate along with the lever ear 22.

[0029] In one embodiment, the support groove 11 also includes a receiving groove 12 for accommodating the rotated pressure ring 2. When it is necessary to place the carrier net 3 or remove the carrier net 3 from the support groove 11, the annular structure 21 and the actuating ear 22 can be rotated into the support groove 11.

[0030] In one embodiment, an elastic device may be added between the actuating ear 22 and the bottom of the groove, and a threaded locking device may be provided at the rotating connection between the actuating ear 22 and the bottom of the groove. In actual operation, if it is necessary to rotate the actuating ear 22 and the annular structure 21 into the receiving groove 12, simply rotate the actuating ear 22. The actuating ear 22 will drive the annular structure to rotate into the receiving groove 12. Since the rotating connection between the actuating ear 22 and the bottom of the groove is provided with a threaded locking device, the locking effect of the threaded locking device is released during the process of rotating the annular structure 21 and the actuating ear 22 into the receiving groove 12. Under the elastic action of the elastic device, the actuating ear 22 and the annular structure 21 move away from the bearing groove 11. In the horizontal direction, the distance between the annular structure 21 and the bottom of the bearing groove 11 increases, making it easier to place the carrier net 3 into the receiving space. When it is necessary to return the annular structure 21 and the actuating ear 22 into the bearing groove 11, the threaded locking device reduces the distance between the annular structure 21 and the actuating ear 22 and the bottom of the bearing groove 11, so that the annular structure 21 can press down and restrict the carrier net 3.

[0031] In one embodiment, any locking device capable of achieving thread-like locking function can be used for locking, which will not be elaborated further here.

[0032] In one embodiment, the actuating ear 22 is rotatably connected to the side wall of the bearing groove 11, allowing the actuating ear 22 to flip within the bearing groove 11. The annular structure 21 can also flip along with the actuating ear 22. When it is necessary to place the net 3 into or remove it from the receiving space, the annular structure 21 and the actuating ear 22 are flipped within the bearing groove 11 with the connection point between the actuating ear 22 and the side wall of the bearing groove 11 as the axis, facilitating the removal or placement of the net 3. After the net 3 is placed into the receiving groove 12, the actuating ear 22 and the annular structure 21 are flipped back to their original positions to restrict and press the net 3.

[0033] In one embodiment, a spring 4 is also included. The two ends of the spring 4 are connected to the actuating ear 22 and the side wall of the movable groove, respectively. The elasticity of the spring 4 facilitates the flipping of the actuating ear 22 and the annular structure 21. Furthermore, a damping device can be provided between the actuating ear 22 and the side wall of the bearing groove 11, and a locking device can be provided on the annular structure 21. The damping device can control the flipping of the annular structure 21 and the actuating ear 22, allowing them to hover during the flipping process. The locking device can lock the annular structure 21 and the stage body 1, preventing the annular structure 21 and the actuating ear 22 from flipping open during the experiment.

[0034] In one embodiment, the sidewall of the annular structure 21 is provided with a window, making the annular structure 21 resemble a C-shape. The window can reduce the area of ​​the annular structure 21 pressing on the carrier net 3, allowing the carrier net 3 to be exposed more during observation. Of course, those skilled in the art can also adjust the shape and size of the annular structure 21 according to the actual situation to meet experimental requirements.

[0035] In one embodiment, the bottom of the support groove 11 is provided with a convex ring, which is used to support the carrier net 3. There is a receiving space between the convex ring and the ballast area of ​​the pressure ring 2. The carrier net 3 is placed in the receiving space and the carrier net 3 is fixed by the convex ring and the ballast area together.

[0036] In one embodiment, the stage body 1 is made of a conductive metal material. Furthermore, the material of the stage body 1 is the same as that of the electron microscope sample stage, both being made of conductive metal materials.

[0037] In one embodiment, there are multiple carrier grooves 11, and a marking and positioning device 13 for marking positions is provided between adjacent carrier grooves 11. When there are multiple carrier grooves 11 on the stage body 1, the positions of different carrier grooves 11 can be determined by the marking and positioning device 13. The marking and positioning device 13 can take the form of engraved lines, engraved dots, digital engraved marks or combinations thereof. It should be noted that the top of the marking and positioning device 13 should not be higher than the top of the carrier groove 11 body to avoid the risk of collision between the marking and positioning device 13 and the electron microscope lens.

[0038] In one embodiment, the present invention also provides a method for using an electron microscope stage for a transmission electron microscope grid 3, including the electron microscope stage for the transmission electron microscope grid 3 described above, with the following specific steps: 1. Place the sample on the carrier grid 3 according to the specifications; 2. The operator flips or rotates the actuating ear 22, which causes the annular structure 21 to flip or rotate, so as to place the sample-bearing mesh 3 into the receiving space. After the mesh 3 is placed, the actuating ear 22 and the annular structure 21 are returned to their initial positions to press and restrict the mesh 3. 3. When observing the sample using an electron microscope, the operator can quickly confirm the position of different carrier grooves 11 according to the position marking positioning device 13, thereby improving the observation efficiency of the multi-carrying mesh 3 sample.

[0039] Specific examples have been used to illustrate the principles and implementation methods of this invention. The descriptions of the above embodiments are only for the purpose of helping to understand the method and core ideas of this invention. Furthermore, those skilled in the art will recognize that, based on the ideas of this invention, there will be changes in the specific implementation methods and application scope. Therefore, the content of this specification should not be construed as a limitation of this invention.

Claims

1. An electron microscope stage for a transmission electron microscope grid, characterized in that: The device includes a stage body, on which an observation hole, a light-transmitting hole, and a receiving space for clamping a carrier net are provided. The observation hole and the light-transmitting hole are both connected to the receiving space. The observation hole allows observation of the sample carried by the carrier net, and the light-transmitting hole allows light to be projected onto the side of the carrier net away from the sample. A blocking device is also provided in the receiving space, and the carrier net is located between the blocking device and the receiving space.

2. The electron microscope stage for a transmission electron microscope grid according to claim 1, characterized in that: The blocking device includes a pressure ring; The main body of the stage has a support groove for supporting the net, and the bottom of the support groove is used to accommodate the net. The pressure ring is located in the support groove and presses against the net. The side of the pressure ring facing the bottom of the support groove includes a contact area and a pressure area. The contact area is located outside the pressure area. The central axis of the pressure area is collinear with the central axis of the observation hole. The pressure area is located radially around the observation hole. The inner contour of the pressure area is larger than the outer contour of the observation hole. The contact area is used to contact the bottom of the support groove. The pressure area is used to press against the net. The accommodating space is located between the pressure area and the support groove.

3. The electron microscope stage for a transmission electron microscope grid according to claim 2, characterized in that: The side of the pressure ring away from the bearing groove does not protrude from the bearing groove.

4. The electron microscope stage for a transmission electron microscope grid according to claim 2, characterized in that: The pressure ring includes an annular structure and a lever ear. The annular structure includes a contact area and a ballast area. The annular structure is fixedly connected to the lever ear. Both the annular structure and the lever ear are located in the bearing groove. The lever ear is rotatably connected to the bottom of the groove, so that the lever ear can rotate horizontally in the bearing groove, and the annular structure can rotate with the lever ear.

5. The electron microscope stage for a transmission electron microscope grid according to claim 4, characterized in that: The actuating ear is rotatably connected to the side wall of the bearing groove, allowing the actuating ear to flip within the bearing groove, and the annular structure to flip along with the actuating ear.

6. The electron microscope stage for a transmission electron microscope grid according to claim 5, characterized in that: It also includes a spring, the two ends of which are connected to the sidewalls of the actuating lug and the movable groove, respectively.

7. The electron microscope stage for a transmission electron microscope grid according to claim 5, characterized in that: The bottom of the bearing groove is provided with a convex ring, which is used to support the carrier net, and the receiving space is provided between the convex ring and the pressure area of ​​the pressure ring.

8. The electron microscope stage for a transmission electron microscope grid according to claim 7, characterized in that: The ring structure can be C-shaped.

9. The electron microscope stage for a transmission electron microscope grid according to claim 2, characterized in that: The stage body is made of conductive metal material.

10. The electron microscope stage for a transmission electron microscope grid according to claim 2, characterized in that: The number of the bearing grooves is multiple, and a marking and positioning device for marking the position is provided between adjacent bearing grooves.

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