Cutting commissioning method and system for water guided laser processing apparatus

Abstract

The application discloses a kind of cutting debugging methods and systems of water guide laser processing equipment, the method includes: the relative position relationship between the center of calibration camera and processing head cutting center is calibrated;The pose deviation between workpiece coordinate system and machine tool coordinate system is calibrated and compensated into cutting program to obtain the corrected cutting trajectory path;The corrected cutting trajectory path is reversely projected to camera coordinate system as theoretical cutting trajectory;Whether the actual cutting trajectory of workpiece and the actual cutting trajectory of workpiece are visually consistent between theoretical cutting trajectory;Water jet and illumination light source of processing head are opened, and visible illumination light spot is formed on the surface of workpiece;The illumination light spot moves along the theoretical cutting trajectory on the surface of workpiece, and whether the actual cutting trajectory of workpiece and the actual cutting trajectory of workpiece exist deviation between the moving trajectory of illumination light spot;After correction and verification, actual laser cutting is carried out on workpiece.The application can complete the cutting debugging of water guide laser processing equipment without using laser and consuming workpiece.

Description

Technical Field

[0001] This invention relates to the field of water-guided laser processing technology, and in particular to a cutting and debugging method and system for water-guided laser processing equipment. Background Technology

[0002] Water-jet guided laser (WJL) is an advanced manufacturing technology that couples a laser beam into a stable water jet, using the water column as an optical waveguide to achieve "remote" precision machining. Its basic principle is as follows: high-pressure pure water is formed into a high-speed water column with a diameter of only tens to hundreds of micrometers through a sapphire nozzle. The laser, after being focused, is coupled into the water column at the center of the nozzle, is confined within the water column by total internal reflection, and is then "carried" by the water column to the workpiece surface for cutting.

[0003] With the rapid growth in demand for processing hard and brittle materials and composite materials in fields such as new energy vehicles, aerospace, and consumer electronics, water-guided laser processing equipment has become an important branch of high-end laser precision processing equipment. However, the structure and control of water-guided laser processing equipment are far more complex than those of ordinary fiber / solid-state laser cutting machines. This is because water-guided laser processing equipment involves the coupling of multiple systems, including optical path, water path, gas path, Z-axis focusing, camera vision, and nozzle-workpiece distance, requiring high alignment accuracy. This makes on-site debugging, trajectory verification, and the first trial cut after installation critical to affecting production capacity and yield.

[0004] Currently, the main process for cutting and debugging water-guided laser processing equipment is as follows: Mechanical zeroing and axis calibration: Return the X / Y / Z axes to the machine origin and establish the machine tool coordinate system; Laser output parameter tuning: Adjust laser power, pulse width, and repetition frequency; Trial cut verification: Control the machining head to perform trial cuts on the workpiece along the programmed trajectory; use a microscope camera to detect the position and shape of the actual cut; if there is a deviation between the actual cut trajectory and the theoretical trajectory, fine-tune the coordinate system offset parameters, camera hand-eye calibration matrix or trajectory compensation table and then perform trial cuts again until the cut trajectory deviation meets the preset accuracy requirements.

[0005] The existing solutions described above have the following problems: High trial cutting costs: Water-guided lasers are mainly used for high-value workpieces. Any deviation in the trial cutting will directly damage the product itself, resulting in a high cumulative scrap rate during the debugging phase.

[0006] It cannot reflect the true processing status: Conventional dry runs are mostly performed in the absence of water or laser, and are only used to check the kinematic correctness of the machine tool. Or, dry runs are performed with hot water, and the water jet hitting the workpiece surface and splashing water affects the observation and cannot reflect the true position of laser cutting. Summary of the Invention

[0007] The technical problem this invention aims to solve is that existing water-guided laser processing equipment must rely on actual laser test cuts during the installation and commissioning phase, leading to the destruction of high-value workpieces, and conventional idle runs cannot reflect the actual processing position after laser coupling via water jet. This invention provides a cutting and commissioning method and system for water-guided laser processing equipment that can complete the cutting and commissioning of the equipment without using the laser or consuming the workpiece.

[0008] The technical solution adopted by this invention to solve its technical problem is: Firstly, a cutting and debugging method for a water-guided laser processing device is provided, including: S1. Determine the relative positional relationship between the camera center and the cutting center of the machining head; S2. Identify the actual pose of the workpiece by performing feature positioning; calibrate the pose deviation between the workpiece coordinate system and the machine tool coordinate system. ; and the pose deviation The corrected cutting trajectory path is obtained by compensating for the cutting process. S3. Project the corrected cutting trajectory path in reverse onto the camera coordinate system to generate a theoretical cutting trajectory with the camera image center as the reference; superimpose the theoretical cutting trajectory on the real-time camera image and move the camera image center along the theoretical cutting trajectory; S4. Observe whether the theoretical cutting trajectory falls within the workpiece to be processed area; if a visual deviation is found between the theoretical cutting trajectory and the actual workpiece to be cut trajectory, then correct the actual pose of the workpiece and re-execute step S3 until the theoretical cutting trajectory and the actual workpiece to be cut trajectory visually match. S5. Turn on the water jet and illumination source of the processing head. The light beam emitted by the illumination source is coupled to the workpiece surface after beam combining and focusing, forming a visible illumination spot on the workpiece surface. S6. Convert the theoretical cutting trajectory to the machine tool coordinate system; control the movement of the machining head so that the illumination spot projected on the workpiece surface runs along the theoretical cutting trajectory, and compare and observe whether there is a trajectory deviation between the movement trajectory of the illumination spot and the actual cutting trajectory of the workpiece; if so, and the trajectory deviation exceeds the preset allowable range, return to step S1 or S3 to correct it again. S7. After correction and verification, keep the water jet stable and turn off the lighting source, turn on the laser generator, and perform actual laser cutting on the workpiece.

[0009] Furthermore, in step S6, a comparison is made between the moving trajectory of the illumination spot and the actual cutting trajectory of the workpiece to be cut to determine if there is a trajectory deviation. This specifically includes: Observe whether the illumination spot moves along the actual cutting trajectory; Observe whether the illumination spot deviates at the workpiece corner or during the cutting acceleration / deceleration phase.

[0010] Furthermore, in step S6, the process returns to step S3 or S1 for revision, specifically including: Recalibrate the relative positional relationship between the camera center and the cutting center of the processing head; The workpiece is re-positioned to identify its actual pose; the pose deviation between the workpiece coordinate system and the machine tool coordinate system is then recalibrated. The theoretical cutting trajectory was revised.

[0011] Furthermore, in step S6, it is observed whether there is a trajectory deviation between the moving trajectory of the illumination spot and the actual cutting trajectory of the workpiece, which is judged by manual visual inspection or automatically identified and judged by the image processing module.

[0012] Furthermore, the calibration process in step S1 includes: S1.1 Fix the calibration block on the worktable, adjust the position of the machining head to maintain the standard machining height; and use the machining head to cut a geometric feature pattern on the calibration block, and calculate the mechanical coordinates of the center of the pattern cut by the machining head in the machine tool coordinate system. ; S1.2 Adjust the position of the camera to align with the geometric feature pattern and take a picture; S1.3. Extract the geometric center of the geometric feature pattern in the camera coordinate system using an image processing algorithm, and calculate the pixel deviation between the geometric center and the camera center. Record the mechanical coordinates of the camera center in the machine tool coordinate system at this time. ; S1.4, Based on the pixel deviation between the geometric center and the camera center and the mechanical coordinates of the camera center. Based on the preset hand-eye calibration matrix, the target mechanical coordinates when the camera center moves to the geometric center are calculated. According to the mechanical coordinates of the center of the pattern); With the target mechanical coordinates ( The relative positional deviation between the camera center and the cutting center of the processing head is calculated.

[0013] Furthermore, the processing head includes a laser generator, an illumination source, and a nozzle. The light beam emitted by the illumination source passes through a beam combiner and a focusing lens and enters the micro-orifice of the nozzle together with the laser beam emitted by the laser generator. It couples with the water jet inside the nozzle to form an illumination spot concentric with the laser spot on the workpiece surface.

[0014] Furthermore, the geometric feature pattern cut out by the calibration block has a clearly identifiable center point.

[0015] Secondly, a cutting and debugging system for a water-guided laser processing device is provided, comprising: The machine tool is equipped with a worktable that can move along the X / Y direction, and the worktable is used to place workpieces. The processing head includes a laser generator, an illumination source, and a nozzle. The light beam emitted by the illumination source passes through a beam combiner and a focusing lens and enters the micro-orifice of the nozzle together with the laser beam emitted by the laser generator. It couples with the water jet inside the nozzle to form an illumination spot concentric with the laser spot on the workpiece surface. Camera, used to acquire images of the workpiece / calibration block; An industrial control computer is used to execute the cutting and debugging methods of water-guided laser processing equipment.

[0016] The beneficial effects of this invention are: This invention can complete the verification of the cutting trajectory without laser output and without damaging the workpiece, reducing debugging losses of high-value workpieces; by calibrating the offset between the camera and the laser cutting center, it achieves accurate conversion between visual coordinates and machine tool processing coordinates; relying on the concept of common optical path coupling between the illumination source and the laser, the illumination spot is highly consistent with the actual laser processing landing point, which can truly reflect the laser processing situation; the entire debugging process can be completed in a few minutes of no-load simulation verification, which greatly shortens the debugging time. Attached Figure Description

[0017] The present invention will be further described below with reference to the accompanying drawings and embodiments.

[0018] Figure 1 This is a flowchart of the cutting and debugging method of the water-guided laser processing equipment of the present invention.

[0019] Figure 2 This is a schematic diagram of the movement of the illumination spot along the theoretical cutting trajectory of the present invention.

[0020] Figure 3 This is a schematic diagram showing that the actual movement trajectory of the illumination spot in this invention is consistent with the actual trajectory to be cut.

[0021] Figure 4 This is a schematic diagram showing a deviation between the actual movement trajectory of the illumination spot and the actual trajectory to be cut in this invention.

[0022] Figure 5 This is an architecture diagram of the cutting and debugging system of the water-guided laser processing equipment of the present invention. Detailed Implementation

[0023] The present invention will now be described in further detail with reference to the accompanying drawings. These drawings are simplified schematic diagrams, illustrating only the basic structure of the invention, and therefore only show the components relevant to the invention.

[0024] like Figure 1 and Figure 2 As shown, the cutting and debugging method of the water-guided laser processing equipment in this embodiment includes: S1. Determine the relative positional relationship between the camera center and the cutting center of the processing head.

[0025] S2. Identify the actual pose of the workpiece by performing feature positioning; calibrate the pose deviation between the workpiece coordinate system and the machine tool coordinate system. ; and the pose deviation The corrected cutting trajectory path is obtained by compensating for the input cutting process.

[0026] S3. Project the corrected cutting trajectory path in reverse onto the camera coordinate system to generate a theoretical cutting trajectory based on the camera image center; superimpose the theoretical cutting trajectory onto the real-time camera image and move the camera image center along the theoretical cutting trajectory.

[0027] S4. Observe whether the theoretical cutting trajectory falls within the workpiece's processing area. If a visual deviation is found between the theoretical cutting trajectory and the actual workpiece's cutting trajectory, correct the workpiece's actual pose and repeat step S3 until the theoretical cutting trajectory and the actual workpiece's cutting trajectory visually match.

[0028] S5. Turn on the water jet and lighting source of the processing head. The light beam emitted by the lighting source is combined and focused and then coupled with the water jet to the surface of the workpiece, forming a visible lighting spot on the surface of the workpiece.

[0029] S6. Convert the theoretical cutting trajectory to the machine tool coordinate system; control the movement of the machining head so that the illumination spot projected on the workpiece surface runs along the theoretical cutting trajectory, and compare and observe whether there is a trajectory deviation between the movement trajectory of the illumination spot and the actual cutting trajectory of the workpiece; if so, and the trajectory deviation exceeds the preset allowable range, return to step S1 or S3 to make corrections again.

[0030] S7. After correction and verification, keep the water jet stable and turn off the lighting source, turn on the laser generator, and perform actual laser cutting on the workpiece.

[0031] This embodiment, without using a laser or consuming the workpiece, obtains the relative positional relationship between the camera center and the cutting center through calibration in advance to simulate and correct the theoretical cutting trajectory; then, visible illumination light sharing the same optical path as the laser is projected onto the workpiece surface through a water jet to reproduce the actual landing trajectory of the laser spot; during the equipment's idle run, the movement trajectory of the illumination spot is observed in real time to see if it deviates; if the illumination spot moves along the actual cutting trajectory without deviation, the actual laser cutting begins; if deviation exists, it is corrected and verified again.

[0032] Specifically, the processing head includes a laser generator, an illumination source, and a nozzle. The light beam emitted from the illumination source passes through a beam combiner and a focusing lens, and then enters the micro-orifice of the nozzle along with the laser beam emitted from the laser generator. It couples with the water jet within the nozzle, forming an illumination spot concentric with the laser spot on the workpiece surface. For example, the illumination source can emit visible light. The visible light beam shares a section of the optical path with the laser beam as it enters the micro-orifice of the nozzle. When the water jet exits the nozzle stably, both the visible light beam and the laser beam can couple with the water jet and be "carried" by the water jet to the workpiece surface, forming a concentric illumination / laser spot. During the no-load testing phase, only the illumination source needs to be turned on to obtain an illumination spot consistent with the actual processing point of the laser spot. The cutting trajectory can be adjusted using this illumination spot, eliminating the need to turn on the laser and saving workpiece space.

[0033] In this embodiment, the camera and machining head are mounted on the same Z-axis slide or on two separate Z-axis slides. The mechanical relative position of the cutting centers of the camera and machining head is a fixed value, which can be converted into a fixed coordinate transformation value through calibration. Therefore, by calibrating the relative positional relationship between the camera center and the machining head cutting center, the relative positional deviation between the camera coordinate system and the machine tool coordinate system is obtained, so that the position of the machining head cutting center in the machine tool coordinate system can be obtained by inverse calculation from the camera image coordinates. The specific calibration process is as follows: S1.1, Fix the calibration block on the worktable, adjust the position of the machining head to maintain the standard machining height; and cut a geometric feature pattern on the calibration block using the machining head, and calculate the mechanical coordinates of the center of the pattern cut by the machining head in the machine tool coordinate system. S1.2 Adjust the camera position to align with the geometric feature pattern and take a picture. S1.3 Use image processing algorithms to extract the geometric center of the geometric feature pattern in the camera coordinate system, and calculate the pixel deviation coordinates between this geometric center and the camera center. Record the mechanical coordinates of the camera center in the machine tool coordinate system at this time. S1.4. Based on the pixel deviation between the geometric center and the camera center and the mechanical coordinates of the camera center Based on the preset hand-eye calibration matrix, the target mechanical coordinates when the camera center moves to the geometric center are calculated. ); based on the mechanical coordinates of the pattern center With the target machine coordinates ( The relative positional deviation between the camera center and the cutting center of the processing head is calculated.

[0034] It should be noted that the geometric feature patterns cut from the surface of the calibration block have clearly identifiable center points, such as crosshairs, rectangles, circles, etc., which facilitates image feature recognition by the camera. The camera is moved to focus and an image of the calibration block is captured by moving the Z-axis slide. The mechanical coordinates of the machining head cutting center and the camera center can be measured using position measurement tools (such as a tool setter, crosshair projector, etc.). The relative positional relationship between the calibrated camera center and the machining head cutting center is saved to the industrial computer for subsequent cutting trajectory simulation and no-load verification.

[0035] The workpiece is then clamped onto the worktable, and its actual pose is identified by feature positioning. An image of the workpiece is captured by a camera, and the pose deviation between the workpiece coordinate system and the machine tool coordinate system is calculated using feature points. The industrial control computer automatically corrects the posture deviation. The corrected cutting trajectory path is obtained by compensating for the input cutting process.

[0036] The calibration in step S1 converts the relative positional deviation between the camera center and the cutting center of the machining head into a known quantity, enabling coordinate transformation between the camera coordinate system and the machine tool coordinate system. The calibration in step S2 obtains the pose deviation, allowing for advance correction of the cutting trajectory path.

[0037] After completing steps S1 and S2, a camera-based cutting trajectory simulation is performed. Specifically, the industrial control computer projects the corrected cutting trajectory path back onto the camera coordinate system, generating a theoretical cutting trajectory with the camera image center as the reference. This theoretical cutting trajectory is overlaid and displayed in the camera's real-time view. Then, the camera position is adjusted to focus on the workpiece surface, and the camera image center is slowly moved along the theoretical cutting trajectory to observe whether the theoretical cutting trajectory falls within the workpiece's processing area. If a visual deviation is found between the theoretical cutting trajectory and the actual workpiece's cutting trajectory (e.g., starting point offset, angle tilt, etc.), step S3 is re-executed after correcting the workpiece's actual pose until the theoretical cutting trajectory and the workpiece's actual position visually match.

[0038] Steps S1 to S4 are the debugging process. After debugging is completed, a no-load test can be performed.

[0039] After the cutting trajectory simulation is completed, a no-load test can be performed. High-pressure water is supplied to the machining head, forming a stable columnar water jet at the nozzle outlet. The laser generator is kept off, but the illumination source is turned on. The beam emitted by the illumination source is combined and focused, then coupled with the water jet to the workpiece surface, forming a visible illumination spot. Then, the three-axis motion module moves the illumination spot along the theoretical cutting trajectory corrected in step S4 on the workpiece surface. During the no-load test, observe whether there is a trajectory deviation between the illumination spot's movement trajectory and the actual cutting trajectory. Specifically, observe the following: (a) whether the illumination spot moves along the actual cutting trajectory; (b) whether the illumination spot deviates at workpiece corners or during the cutting acceleration / deceleration phases (the reasons for deviation include: movement lag, overshoot, or water jet tilt, etc.).

[0040] like Figure 3 As shown, if the trajectory of the illumination spot is within the allowable range or has no deviation from the actual trajectory to be cut, then the actual cutting stage can begin. Figure 4 As shown, if the trajectory deviation between the illumination spot and the actual cutting trajectory exceeds the allowable range, resulting in a significant deviation, the process returns to step S3 or S1 for correction. The correction may involve: the height of the machining head, the relative positional relationship between the camera and the cutting center of the machining head, pose deviation, water column stability, etc. During correction, if returning to step S1, it is necessary to recalibrate the relative positional relationship between the camera and the cutting center of the machining head, recalibrate the pose deviation between the workpiece coordinate system and the machine tool coordinate system, and correct the theoretical cutting trajectory. If returning to step S3, it is necessary to correct the theoretical cutting trajectory.

[0041] The deviation between the moving trajectory of the illumination spot and the actual trajectory to be cut can be judged by manual visual inspection or by automatic identification by the image processing module.

[0042] In this embodiment, during the no-load run phase, an illumination spot is used as a substitute for the laser spot. Without laser beams or actual workpiece cutting, the illumination spot moves along the theoretical cutting trajectory to determine if there are any trajectory deviations, thus reducing workpiece debugging losses. Once the no-load run verification is successful, actual laser cutting can begin.

[0043] like Figure 5As shown, the present invention also provides a cutting and debugging system for a water-guided laser processing equipment, comprising: a machine tool, wherein the machine tool is provided with a worktable movable along the X / Y direction, the worktable being used to place a workpiece; a processing head, wherein the processing head includes a laser generator, an illumination source, and a nozzle, wherein the light beam emitted by the illumination source passes through a beam combiner and a focusing lens and enters the micro-orifice of the nozzle together with the laser beam emitted by the laser generator, and couples with the water jet inside the nozzle to form an illumination spot concentric with the laser spot on the surface of the workpiece; a camera for acquiring images of the workpiece / calibration block; and an industrial control computer for executing the cutting and debugging method of the water-guided laser processing equipment.

[0044] It should be noted that the high-pressure water supply system can supply water to the nozzle, forming a columnar water jet inside the nozzle that exits from the nozzle outlet. The laser beam emitted by the laser generator is collimated to form a parallel beam, which is then expanded by a beam expander to a size matching the nozzle's micro-orifice diameter so that it can completely enter the nozzle's micro-orifice. The visible beam emitted by the illumination source is collimated by a condenser lens and then combined with the laser beam by a beam combiner / dichroic mirror. After beam combining, the visible light and laser continue to propagate coaxially and along the same optical path. After being focused by the beam combiner and focusing lens, it enters the nozzle's micro-orifice and couples with the water jet, which then "carries" it to the workpiece surface to form a concentric illumination / laser spot.

[0045] The camera and machining head can be mounted on the Z-axis slide of the machine tool, with the camera's optical axis pointing vertically downwards (view from above) or at a fixed angle to the water jet axis (view from the side). There is a fixed mechanical relative offset between the camera center and the nozzle center (i.e., the cutting center of the machining head) in the three-dimensional direction. This offset can be obtained through the calibration in step S1 and stored in the industrial control computer.

[0046] In summary, the cutting and debugging method and system of the water-guided laser processing equipment of the present invention, which adopts the debugging process of "camera calibration - cutting trajectory simulation - illumination spot idle run verification - deviation judgment - actual cutting", has the following advantages: (1) The equipment can complete the full process verification of the processing trajectory without turning on the laser and without damaging the physical workpiece. For high-value precision workpieces, it reduces the material scrap loss during the debugging stage and significantly reduces the production debugging cost.

[0047] (2) The illumination light and laser are designed to share the same optical path. The two are coupled and transmitted through the same water beam. The imaging point of the illumination spot coincides with the actual processing point of the laser. This allows for a direct and realistic restoration of the actual working point of the laser-water beam coupled processing.

[0048] (3) With a dedicated calibration process, the alignment deviation between the camera vision center and the laser processing center can be accurately calculated and solidified, and the unknown offset can be converted into a callable quantitative parameter to complete the high-precision bidirectional conversion between visual image coordinates and machine tool processing coordinates.

[0049] (4) The entire calibration, trajectory simulation and empty trajectory verification process can be completed in a few minutes without repeated physical test cutting and debugging, which greatly shortens the equipment changeover and process debugging cycle and significantly improves the efficiency of debugging operations.

[0050] (5) The imaging screen, processing trajectory and process parameters of the entire debugging process can be automatically stored and archived to form a complete process data archive, which not only meets the requirements of product quality traceability, but also facilitates the rapid replication and mass promotion of mature processes.

[0051] (6) The lighting source, camera and water-guided laser processing head can be integrated into a standardized module, which can be flexibly equipped with various water-guided laser processing equipment, compatible with various types of lasers, and has universal adaptability to various types of workpieces such as carbon fiber and semiconductor crystals.

[0052] Based on the above-described preferred embodiments of the present invention, and through the foregoing description, those skilled in the art can make various changes and modifications without departing from the inventive concept. The technical scope of this invention is not limited to the contents of the specification, but must be determined according to the scope of the claims.

Claims

1. A cutting and debugging method for a water-guided laser processing device, characterized in that, include: S1. Determine the relative positional relationship between the camera center and the cutting center of the processing head; S2. Identify the actual pose of the workpiece by performing feature positioning; calibrate the pose deviation between the workpiece coordinate system and the machine tool coordinate system. ; and the pose deviation The corrected cutting trajectory path is obtained by compensating for the cutting process. S3. Project the corrected cutting trajectory path in reverse onto the camera coordinate system to generate a theoretical cutting trajectory with the camera image center as the reference; superimpose the theoretical cutting trajectory on the real-time camera image and move the camera image center along the theoretical cutting trajectory; S4. Observe whether the theoretical cutting trajectory falls within the workpiece's processing area; If a visual deviation is found between the theoretical cutting trajectory and the actual cutting trajectory of the workpiece, the actual pose of the workpiece is corrected and step S3 is executed again until the theoretical cutting trajectory and the actual cutting trajectory of the workpiece visually match. S5. Turn on the water jet and illumination source of the processing head. The light beam emitted by the illumination source is coupled to the workpiece surface after beam combining and focusing, forming a visible illumination spot on the workpiece surface. S6. Convert the theoretical cutting trajectory to the machine tool coordinate system; control the movement of the machining head so that the illumination spot projected on the workpiece surface runs along the theoretical cutting trajectory, and compare and observe whether there is a trajectory deviation between the movement trajectory of the illumination spot and the actual cutting trajectory of the workpiece; if so, and the trajectory deviation exceeds the preset allowable range, return to step S1 or S3 to correct it again. S7. After correction and verification, keep the water jet stable and turn off the lighting source, turn on the laser generator, and perform actual laser cutting on the workpiece.

2. The cutting and debugging method of the water-guided laser processing equipment as described in claim 1, characterized in that, In step S6, a comparison is made between the moving trajectory of the illumination spot and the actual cutting trajectory of the workpiece to be cut to determine if there is a trajectory deviation. This specifically includes: Observe whether the illumination spot moves along the actual cutting trajectory; Observe whether the illumination spot deviates at the workpiece corner or during the cutting acceleration / deceleration phase.

3. The cutting and debugging method of the water-guided laser processing equipment as described in claim 1, characterized in that, In step S6, return to step S3 or S1 for correction, specifically including: Recalibrate the relative positional relationship between the camera center and the cutting center of the processing head; The workpiece is re-positioned to identify its actual pose; the pose deviation between the workpiece coordinate system and the machine tool coordinate system is then recalibrated. The theoretical cutting trajectory was revised.

4. The cutting and debugging method of the water-guided laser processing equipment as described in claim 1, characterized in that, In step S6, observe whether there is a trajectory deviation between the moving trajectory of the illumination spot and the actual cutting trajectory of the workpiece, which can be judged by manual visual inspection or by automatic identification by the image processing module.

5. The cutting and debugging method of the water-guided laser processing equipment as described in claim 1, characterized in that, The calibration process in step S1 includes: S1.1 Fix the calibration block on the worktable, adjust the position of the machining head to maintain the standard machining height; and use the machining head to cut a geometric feature pattern on the calibration block, and calculate the mechanical coordinates of the center of the pattern cut by the machining head in the machine tool coordinate system. ; S1.2 Adjust the position of the camera to align with the geometric feature pattern and take a picture; S1.

3. Extract the geometric center of the geometric feature pattern in the camera coordinate system using an image processing algorithm, and calculate the pixel deviation between the geometric center and the camera center. Record the mechanical coordinates of the camera center in the machine tool coordinate system at this time. ; S1.4, Based on the pixel deviation between the geometric center and the camera center and the mechanical coordinates of the camera center. Based on the preset hand-eye calibration matrix, the target mechanical coordinates when the camera center moves to the geometric center are calculated. According to the mechanical coordinates of the center of the pattern); With the target mechanical coordinates ( The relative positional deviation between the camera center and the cutting center of the processing head is calculated.

6. The cutting and debugging method of the water-guided laser processing equipment as described in claim 1, characterized in that, The processing head includes a laser generator, an illumination source, and a nozzle. The light beam emitted by the illumination source passes through a beam combiner and a focusing lens and enters the micro-orifice of the nozzle together with the laser beam emitted by the laser generator. It couples with the water jet inside the nozzle to form an illumination spot concentric with the laser spot on the workpiece surface.

7. The cutting and debugging method of the water-guided laser processing equipment as described in claim 5, characterized in that, The geometric feature pattern cut out by the calibration block has a clearly identifiable center point.

8. A cutting and debugging system for a water-guided laser processing equipment, characterized in that, include: The machine tool is equipped with a worktable that can move along the X / Y direction, and the worktable is used to place workpieces. The processing head includes a laser generator, an illumination source, and a nozzle. The light beam emitted by the illumination source passes through a beam combiner and a focusing lens and enters the micro-orifice of the nozzle together with the laser beam emitted by the laser generator. It couples with the water jet inside the nozzle to form an illumination spot concentric with the laser spot on the workpiece surface. Camera, used to acquire images of the workpiece / calibration block; An industrial control computer is used to execute the cutting and debugging method of the water-guided laser processing equipment as described in any one of claims 1-7.

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