Processing tool and processing method for wafer carrier

Abstract

The application belongs to the technical field of machining tooling, and discloses a machining tooling and a machining method for a wafer carrier plate. The machining tooling comprises a tooling table which is open at the top and has a ring structure. A machining cover body is arranged at the top of the tooling table. An annular plate coaxially arranged with the tooling table is rotatably mounted on the inner wall of the tooling table through a rotating shaft. The annular plate can automatically rotate. A plurality of positioning clamps uniformly distributed about the axis of the annular plate are fixed on the annular plate. A protruding block which is inserted and matched with a recessed part on the surface of the wafer carrier plate is fixed at the top of each positioning clamp. A clamping mechanism is arranged on the tooling table. Through the improvement of the existing structure, the application realizes the operation of continuous machining of multiple products. After the machining of the product is completed, the product is disassembled, and then the clamping of the subsequent product to be machined is performed, so that the overall waiting time is shortened, and the overall machining efficiency is improved.

Description

Technical Field

[0001] This invention relates to the field of machining tooling technology, and in particular to machining tooling and machining methods for wafer carrier disks. Background Technology

[0002] A wafer chuck is a key component used to hold and hold wafers in the semiconductor manufacturing process. It is widely used in processes such as photolithography, etching, thin film deposition, and inspection.

[0003] The existing tooling uses a single-station fixed clamping method. After processing each product, the machine must be stopped and the operator must disassemble the processed product and re-clamp the next product to be processed. This results in long auxiliary time, low effective processing time, and seriously affects the overall processing cycle, making it difficult to meet the needs of mass production. Summary of the Invention

[0004] To address the aforementioned problems, this invention provides a processing fixture and processing method for a wafer carrier disk.

[0005] The above-mentioned technical objective of the present invention is achieved through the following technical solution: a processing fixture for a wafer carrier disk, comprising a fixture stage with a top opening and an annular structure, wherein a processing cover is provided on the top of the fixture stage, and a milling cutter processing structure, a micro-hole processing structure, and a surface polishing structure are sequentially arranged inside the processing cover. An annular plate coaxially arranged with the fixture stage is rotatably mounted on the inner wall of the fixture stage via a rotating shaft seal. The annular plate can rotate automatically. Multiple positioning fixtures are fixed on the annular plate and are evenly distributed about the axis of the annular plate. The top of each positioning fixture is fixed with a protrusion that engages with a recessed part on the surface of the wafer carrier disk. A clamping mechanism for clamping the wafer carrier disk is provided on the fixture stage.

[0006] By adopting the above technical solution, the rotating annular plate drives the positioning fixture and the protrusion to perform circumferential motion, and places the products to be processed one by one on the top of the empty positioning fixture. The recessed part of the wafer carrier disk surface is engaged with the protrusion. The rotating annular plate moves the protrusion containing the product into the processing chamber, and the clamping mechanism clamps the product located in the processing chamber. The milling cutter processing structure, micro-hole processing structure and surface polishing structure sequentially perform corresponding processing operations on the passing products. Finally, the annular plate removes the processed product from the processing chamber, and the clamping mechanism releases the processed product. This enables the continuous processing of multiple products, eliminating the need for the existing technology to wait for the processed product to be disassembled before clamping the subsequent products. This shortens the overall waiting time and helps to improve the overall processing efficiency.

[0007] Furthermore, the positioning fixture has a hollow structure with an open bottom. The clamping mechanism includes clamping components. The number of clamping components is equal to the number of blocks in the positioning fixture, and their positions correspond one-to-one. Each clamping component includes four sliding blocks that are slidably disposed within the positioning fixture and evenly distributed about the axis of the positioning fixture; a clamping block that penetrates the side wall of the positioning fixture and slides with the positioning fixture; an adjusting shaft that is rotatably mounted on the top of the sliding blocks; and a turntable that is rotatably mounted on the inner top wall of the positioning fixture and coaxially disposed with the protrusion. The top of the turntable has an arc-shaped hole that is eccentrically disposed with the turntable and slides with the adjusting shaft. Each clamping block is U-shaped and connected to the sliding blocks. The number of sliding blocks, clamping blocks, adjusting shafts, and arc-shaped holes are equal, and their positions correspond one-to-one. The clamping mechanism also includes a transmission component and a lifting component that are used together for rotating the turntable along its own axis.

[0008] By adopting the above technical solution, after the product is inserted with the protrusion, the operation of the transmission component and the lifting component drives the turntable to rotate along its own axis. The arc hole will squeeze the four adjusting shafts to move towards or away from the turntable axis, thereby driving the sliding blocks connected to the four adjusting shafts and the clamping blocks connected to the four sliding blocks to move towards or away from the turntable axis, so that the clamping blocks are close to or separate from the product, thereby realizing the operation of clamping or releasing the product.

[0009] Furthermore, the number of transmission components and the number of positioning fixtures are equal and their positions correspond one-to-one. The transmission components include a drive column that passes through the top of the annular plate and is rotatably connected to the annular plate through a rotating shaft seal, a fixed frame that is fixed to the bottom of the annular plate and has a U-shaped structure, a horizontal block that is slidably disposed in the fixed frame, and an adjusting column that is rotatably mounted on the horizontal block. The drive column passes through the top of the horizontal block and cooperates with the horizontal block. The side wall of the drive column has a spiral groove that is slidably cooperates with the adjusting column. The side wall of the drive column has a vertical groove that is slidably cooperates with the adjusting column and communicates with the spiral groove. The lower end of the drive column is rotatably mounted to the bottom of the U-shaped cavity of the fixed frame. The upper end of the drive column is fixed to the bottom of the turntable and is coaxially disposed. The lifting component is also used for lifting the horizontal block.

[0010] By adopting the above technical solution, the lifting component drives the horizontal block to rise, which in turn causes the adjusting column connected to the horizontal block to move synchronously. First, the adjusting column slides along the spiral groove. During this process, the adjusting column squeezes the spiral groove, causing the drive column to rotate the turntable. The clamping block approaches the product and adheres to the product surface. Then, the adjusting column enters the vertical groove and slides along the vertical groove. During this process, the drive column remains stationary, and the product is located inside the processing chamber. The turntable remains in close contact with the product. After the product is processed and during the process of removing it from the processing chamber, the lifting component drives the horizontal block to fall, which in turn causes the adjusting column connected to the horizontal block to move synchronously. First, the adjusting column slides along the vertical groove. Then, the adjusting column slides from the vertical groove into the spiral groove and slides along the spiral groove. The adjusting column squeezes the spiral groove and causes the drive column to rotate in the opposite direction. The drive column drives the turntable to rotate synchronously, and the clamping block gradually moves away from the product and releases the product until the processed product moves to the loading position, thereby realizing the operation of clamping or releasing the product.

[0011] Furthermore, the lifting assembly includes two reciprocating lead screws that both penetrate the bottom of the fixed frame and are rotatably connected to the fixed frame, a driven gear fixedly sleeved on one of the reciprocating lead screws, a gear ring I fixed to the inner wall of the tooling table and coaxially arranged with the tooling table, two synchronous pulleys respectively fixedly sleeved on the two reciprocating lead screws, and a synchronous belt that meshes with both synchronous pulleys. The gear ring I meshes with the driven gear, and the reciprocating lead screws penetrate the cross block and are threadedly engaged with the cross block through a nut.

[0012] By adopting the above technical solution, during the rotation of the annular plate, the fixed frame fixed to the annular plate, the reciprocating screw rotatably connected to the fixed frame, and the driven gear fixed to the reciprocating screw all rotate synchronously. During this process, the driven gear meshing with the gear ring, the reciprocating screw fixed to the driven gear, the synchronous pulley fixed to the reciprocating screw, the synchronous belt meshing with the synchronous pulley, another synchronous pulley meshing with the synchronous belt, and the reciprocating screw fixed to the other synchronous pulley all rotate synchronously, thereby realizing the operation of lifting and lowering the horizontal block.

[0013] Furthermore, a connecting groove is provided on the wall surface of the side block near the sliding block on the lower side of the clamping block, allowing the sliding block to pass through and slide. The positioning fixture is provided with an adjustment mechanism. The number of adjustment mechanisms is equal to the number of blocks in the positioning fixture, and their positions correspond one-to-one. The adjustment mechanism includes an adjustment component, which includes four externally threaded tubes evenly distributed about the axis of the protrusion block inside the positioning fixture, a connecting plate one fixed to the bottom of the clamping block and threadedly connected to the externally threaded tubes, a connecting plate two fixed to the bottom of the sliding block, and a driving block one set on the inner wall of the externally threaded tubes. The externally threaded tubes pass through the connecting plate two and are rotatably connected to the connecting plate two. The number of externally threaded tubes, the number of connecting plates one, the number of connecting plates two, and the number of driving blocks one are equal, and their positions correspond one-to-one. The adjustment mechanism also includes a rotating component and a driving component that are used together to drive the four externally threaded tubes to rotate synchronously.

[0014] By adopting the above technical solution, operating the rotating component and the driving component, the four external threaded pipes are driven to rotate synchronously, so that the connecting plate 1, which is threaded to the four external threaded pipes respectively, and the clamping block, which is fixed to the four connecting plates respectively, can slide along the side wall of the sliding block, thereby changing the initial position between the clamping block and the axis of the protrusion block. By operating the adjustment mechanism, the distance between the four clamping blocks and the axis of the positioning fixture can be changed synchronously, which facilitates the use of the device.

[0015] Furthermore, the rotating assembly includes four fixed plates fixed to the top of the annular plate and evenly distributed about the axis of the protrusion; a drive rod that passes through the side wall of the fixed plate and is rotatably connected to the fixed plate; a bevel gear one fixedly sleeved on the drive rod; a drive block two rotatably mounted on the top of the annular plate and coaxially arranged with the drive column; and a bevel gear two fixedly sleeved on the drive block two and meshing with the bevel gear one. The number of fixed plates, the number of drive rods, and the number of bevel gears one are all equal and their positions correspond one-to-one. The drive rod passes through the external threaded tube and slides with the external threaded tube. The side wall of the drive rod is recessed and formed with a drive groove that slides with the drive block one. The drive column passes through the drive block two and is clearance-fitted with the drive block two. The driving assembly is also used to drive the drive block two to rotate along its own axis.

[0016] By adopting the above technical solution, the driving component drives the second driving block to rotate along its own axis, which in turn drives the second bevel gear fixed to the second driving block, the four first bevel gears all meshing with the second bevel gear, the driving rods fixed to the four first bevel gears, the first driving block that slides with the four driving rods through the driving groove, and the external threaded pipes connected to the four first driving blocks to rotate, thereby realizing the synchronous sliding operation of the four clamping blocks.

[0017] Furthermore, the driving assembly includes a connecting block 1 rotatably disposed on the side wall of the driving block 2, a connecting block 2 rotatably mounted on the connecting block 1, and a threaded rod rotatably mounted on the inner wall of the positioning fixture. The threaded rod passes through the connecting block 2 and is threadedly connected to the connecting block 2. A crossbar is fixed inside the positioning fixture, and the crossbar passes through the connecting block 2 and slides with the connecting block 2.

[0018] By adopting the above technical solution, rotating the threaded rod will cause the connecting block two connected to the threaded rod to slide along the axial direction of the threaded rod. Under the action of the connecting block one, the driving block two connected to the connecting block one will rotate to ensure the adjustment of the clamping block position.

[0019] Furthermore, the adjustment mechanism also includes a locking assembly, which includes a limiting block fixed to the side wall of the threaded rod and a threaded sleeve that is threaded through the side wall of the positioning fixture and threadedly connected to the positioning fixture, and has a hollow structure with an opening on one side. The threaded rod is inserted into the threaded sleeve through the opening of the threaded sleeve, and the inner wall of the threaded sleeve is provided with a limiting groove that slides with the limiting block.

[0020] By adopting the above technical solution, rotating the threaded sleeve causes the limiting block that slides with the limiting groove and the threaded rod that is fixed to the limiting block to rotate synchronously. The threaded sleeve is threadedly connected to the positioning fixture, which can ensure the stability of the threaded rod when it is stationary.

[0021] Furthermore, a mounting shell is fixed to the side wall of the tooling table, and a drive motor is fixed to the bottom of the mounting shell. The output end of the drive motor passes through the top of the mounting shell and is rotatably connected to the mounting shell. A drive gear located inside the mounting shell is fixedly sleeved on the output end of the drive motor. A gear ring two coaxially arranged with the annular plate is fixed to the bottom of the annular plate. A clearance through hole is provided through the side wall of the tooling table for the drive gear to pass through. The drive gear meshes with the gear ring two.

[0022] By adopting the above technical solution, the drive motor drives the drive gear to rotate, which in turn causes the gear ring two that meshes with the drive gear and the annular plate that is fixed to the gear ring two to rotate, thereby ensuring the normal and continuous processing of the device.

[0023] This application also discloses a processing method for a processing fixture for a wafer carrier disk, including the following steps: S1, inserting the recessed portion of the surface of the product to be processed into the protrusion block, and making the bottom of the product fit against the top of the positioning fixture;

[0024] S2. The rotating ring plate moves the product placed on the positioning fixture into the processing chamber. After the product enters the processing chamber, the clamping mechanism clamps the product.

[0025] S3. When the product moves inside the processing cover, the milling cutter processing structure, the micro-hole processing structure and the surface polishing structure sequentially perform corresponding processing operations on the product.

[0026] S4. After processing is completed, the annular plate will remove the processed product from the processing cover, and the clamping mechanism will automatically release the product.

[0027] S5. Repeat the above steps and place the products one by one on the corresponding positioning fixtures. This allows for the continuous processing of multiple products without the need for the existing technology to wait for the processed products to be disassembled before clamping the subsequent products, thus shortening the overall waiting time.

[0028] In summary, the present invention has the following beneficial effects: 1. In this application, by improving the existing structure, the continuous processing of multiple products is realized. It eliminates the need for the prior art to wait for the processed products to be disassembled before the subsequent products to be processed can be clamped, thus shortening the overall waiting time and improving the overall processing efficiency.

[0029] 2. In this application, by adjusting the adjustment mechanism, the distance between the four clamping blocks and the axis of the protrusion block in the same clamping assembly can be adjusted simultaneously. On the one hand, this can adapt to the positioning and clamping of products of various sizes, thus expanding the scope of application. On the other hand, it eliminates the need to adjust the clamping blocks of each clamping assembly individually, which helps to shorten the adjustment time of the clamping blocks. Attached Figure Description

[0030] Figure 1 This is a schematic diagram of the overall structure of an embodiment of the present invention;

[0031] Figure 2 This is a cross-sectional structural schematic diagram of an embodiment of the present invention;

[0032] Figure 3 This is a cross-sectional schematic diagram of an embodiment of the present invention to highlight the internal structure of the positioning fixture;

[0033] Figure 4 This is a schematic diagram illustrating the connection structure between the annular plate and the fixing frame in an embodiment of the present invention;

[0034] Figure 5 This is a cross-sectional schematic diagram of an embodiment of the present invention to highlight the connection structure between the annular plate and the tooling table;

[0035] Figure 6 This is a cross-sectional schematic diagram of an embodiment of the present invention to highlight the connection structure between the clamping block and the sliding block;

[0036] Figure 7 This is a cross-sectional schematic diagram of an embodiment of the present invention to highlight the connection structure between the positioning fixture and the clamping block;

[0037] Figure 8 This is an exploded view of an embodiment of the present invention used to highlight the connection structure between the threaded sleeve and the threaded rod.

[0038] In the diagram: 1. Tooling table; 2. Annular plate; 3. Positioning fixture; 4. Protrusion block; 5. Clamping mechanism; 51. Clamping assembly; 511. Sliding block; 512. Clamping block; 513. Adjusting shaft; 514. Turntable; 515. Arc hole; 52. Transmission assembly; 521. Drive column; 522. Fixing frame; 523. Horizontal block; 524. Adjusting column; 525. Spiral groove; 526. Vertical groove; 53. Lifting assembly; 531. Reciprocating lead screw; 532. Driven gear; 533. Gear ring one; 534. Synchronous pulley; 535. Synchronous belt; 6. Adjusting mechanism 61. Adjusting assembly; 611. External threaded pipe; 612. Connecting plate one; 613. Connecting plate two; 614. Drive block one; 62. Rotating assembly; 621. Fixed plate; 622. Drive rod; 623. Bevel gear one; 624. Drive block two; 625. Bevel gear two; 63. Drive assembly; 631. Connecting block one; 632. Connecting block two; 633. Threaded rod; 64. Locking assembly; 641. Limiting block; 642. Threaded sleeve; 643. Limiting groove; 7. Crossbar; 8. Mounting shell; 9. Drive motor; 10. Drive gear; 11. Gear ring two. Detailed Implementation

[0039] The technical solutions in the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. All other embodiments obtained by those skilled in the art based on the embodiments of this application without creative effort are within the scope of protection of this application.

[0040] like Figure 1-8As shown in the figure, this application discloses a processing fixture for a wafer carrier disk, including a fixture table 1, a clamping mechanism 5, and an adjusting mechanism 6. The fixture table 1 has an annular structure with an open top. A processing cover is provided on the top of the fixture table 1, and a milling cutter processing structure, a micro-hole processing structure, and a surface polishing structure are sequentially arranged inside the processing cover (this part is prior art and is not shown in the figure). An annular plate 2 coaxially arranged with the fixture table 1 is rotatably mounted on the inner wall of the fixture table 1 via a rotating shaft seal, and the annular plate 2 can rotate automatically. Multiple positioning jigs 3 are fixed on the annular plate 2, evenly distributed about the axis of the annular plate 2. The top of each positioning jig 3 is fixed with a protrusion 4 that engages with a recessed part on the surface of the wafer carrier disk. In this embodiment, the protrusion 4 can be replaced with a suction cup, and a corresponding air passage structure that can rotate with the annular plate 2 can be used. For example, a sealing cylinder corresponding to the number of protrusions 4 can be fixed at the bottom of the annular plate 2, and a piston can be set in the sealing cylinder. An air pipe connected to the sealing cylinder can be installed on the sealing cylinder, and the other end of the air pipe can be connected to the inside of the protrusion 4. With the corresponding structure, before the product moves into the processing cover with the positioning jig 3, the piston moves and the air pipe generates negative pressure. The protrusion 4 generates negative pressure to adsorb the product. At the same time, after the product moves away from the processing cover with the positioning jig 3, the piston moves and the air pipe generates positive pressure to release the state of adsorption of the product by the protrusion 4. Replacing the protrusion 4 with a suction cup can improve the stability of the product during processing. The rotating annular plate 2 drives the positioning fixture 3 and the protrusion 4 to perform a circular motion, placing the products to be processed one by one on the top of the empty positioning fixture 3, and engaging the recessed part of the wafer carrier disk with the protrusion 4. The rotating annular plate 2 moves the protrusion 4 containing the products into the processing housing, and the clamping mechanism 5 clamps the products located in the processing housing. The milling cutter processing structure, micro-hole processing structure, and surface polishing structure sequentially perform corresponding processing operations on the passing products. Finally, the annular plate 2 removes the processed products from the processing housing, and the clamping mechanism 5 releases the processed products, thereby realizing the continuous processing of multiple products. This eliminates the need for the existing technology to wait for the processed products to be disassembled before clamping the subsequent products, shortening the overall waiting time and improving the overall processing efficiency.

[0041] The positioning fixture 3 has a hollow structure with an open bottom. The number of clamping components 51 is equal to the number of pieces in the positioning fixture 3, and their positions correspond one-to-one. The clamping mechanism 5 is mounted on the tooling table 1 and is used to clamp the wafer carrier. The clamping mechanism 5 includes clamping components 51, transmission components 52, and lifting components 53. There are four sliding blocks 511. The four sliding blocks 511 are slidably disposed within the positioning fixture 3 and are evenly distributed about the axis of the positioning fixture 3. Each sliding block 511 is provided with a limiting block that slides and engages with the top of the positioning fixture 3 to ensure the stability of the sliding block 511 during sliding (not shown in the figure). The clamping block 512 is disposed through the side wall of the positioning fixture 3 and slides and engages with the positioning fixture 3. The clamping block 512 is U-shaped and connected to the sliding block 511. The number of sliding blocks 511, the number of clamping blocks 512, the number of adjusting shafts 513, and the number of arc holes 515 are equal and their positions correspond one-to-one. The adjusting shaft 513 is rotatably mounted on the top of the sliding block 511, and the turntable 514 is rotatably mounted on the inner top wall of the positioning fixture 3 and coaxially arranged with the protrusion 4. The top of the turntable 514 has a through-hole 515 that is eccentrically positioned with the turntable 514 and slides in cooperation with the adjusting shaft 513. After the product is inserted into the protrusion 4, the operating transmission assembly 52 and lifting assembly 53 drive the turntable 514 to rotate along its own axis. The arc hole 515 will compress the four adjusting shafts 513, causing them to move closer to or further away from the axis of the turntable 514. This causes the sliding blocks 511 connected to the four adjusting shafts 513 and the clamping blocks 512 connected to the four sliding blocks 511 to move closer to or further away from the axis of the turntable 514, thus allowing the clamping blocks 512 to adhere to or separate from the product, thereby achieving the operation of clamping or releasing the product.

[0042] The number of transmission components 52 is equal to the number of positioning fixtures 3, and their positions correspond one-to-one. Transmission components 52 and lifting components 53 work together to rotate the turntable 514 along its own axis. Transmission components 52 include a drive column 521, a fixed frame 522, a horizontal block 523, and an adjusting column 524. The drive column 521 passes through the top of the annular plate 2 and is rotatably connected to it via a rotating shaft seal. The drive column 521 passes through the top of the horizontal block 523 and engages with it. A spiral groove 525 is provided on the side wall of the drive column 521, which slides with the adjusting column 524. A vertical groove 526 is provided on the side wall of the drive column 521, which slides with the adjusting column 524 and communicates with the spiral groove 525. The lower end of the drive column 521 is rotatably mounted on the bottom of the U-shaped cavity of the fixed frame 522. The upper end of the drive column 521 is fixed to the bottom of the turntable 514 and coaxially arranged. The fixed frame 522 is fixed to the bottom of the annular plate 2 and has a U-shaped structure. The horizontal block 523 is slidably disposed within the fixed frame 522, and the adjusting column 524 is rotatably mounted on the horizontal block 523. The lifting assembly 53 drives the horizontal block 523 to rise, causing the adjusting column 524 connected to the horizontal block 523 to move synchronously. First, the adjusting column 524 slides along the spiral groove 525. During this process, the adjusting column 524 presses against the spiral groove 525, causing the drive column 521 to drive the turntable 514 to rotate. The clamping block 512 approaches the product and adheres tightly to the product surface. Subsequently, the adjusting column 524 enters the vertical groove 526 and slides along the vertical groove 526. During this process, the drive column 521 remains stationary, and the product is located within the processing enclosure. The turntable 514 remains in close contact with the product. After the product is processed... During the process of removing the product from the processing enclosure, the lifting component 53 drives the horizontal block 523 to descend, which causes the adjusting column 524 connected to the horizontal block 523 to move synchronously. First, the adjusting column 524 slides along the vertical groove 526. Then, the adjusting column 524 slides from the vertical groove 526 into the spiral groove 525 and slides along the spiral groove 525. The adjusting column 524 presses against the spiral groove 525 and causes the driving column 521 to rotate in the opposite direction. The driving column 521 drives the turntable 514 to rotate synchronously. The clamping block 512 gradually moves away from the product and releases the product until the processed product moves to the loading position, thereby realizing the operation of clamping or releasing the product.

[0043] The lifting assembly 53 is also used for lifting the horizontal block 523. The lifting assembly 53 includes a reciprocating lead screw 531, a driven gear 532, a gear ring 533, a synchronous pulley 534, and a synchronous belt 535. There are two reciprocating lead screws 531, both of which pass through the bottom of the fixed frame 522 and are rotatably connected to the fixed frame 522. The reciprocating lead screws 531 pass through the horizontal block 523 and are threadedly engaged with the horizontal block 523 by nuts. The driven gear 532 is fixedly sleeved on one of the reciprocating lead screws 531. The gear ring 533 is fixed to the inner wall of the tooling table 1 and is coaxially arranged with the tooling table 1. The gear ring 533 meshes with the driven gear 532. There are two synchronous pulleys 534, each fixedly sleeved on one of the two reciprocating lead screws 531. The synchronous belt 535 meshes with both synchronous pulleys 534. During the rotation of the annular plate 2, the fixed frame 522 fixed to the annular plate 2, the reciprocating screw 531 rotatably connected to the fixed frame 522, and the driven gear 532 fixed to the reciprocating screw 531 all rotate synchronously. During this process, the driven gear 532 meshing with the gear ring 533, the reciprocating screw 531 fixed to the driven gear 532, the synchronous pulley 534 fixed to the reciprocating screw 531, the synchronous belt 535 meshing with the synchronous pulley 534, another synchronous pulley 534 meshing with the synchronous belt 535, and the reciprocating screw 531 fixed to the other synchronous pulley 534 all rotate synchronously, thereby realizing the lifting and lowering operation of the horizontal block 523.

[0044] A connecting groove is provided on the wall surface of the side block of the clamping block 512 near the sliding block 511, allowing the sliding block 511 to pass through and slide. The adjustment mechanism 6 is mounted on the positioning fixture 3. The number of adjustment mechanisms 6 is equal to the number of blocks in the positioning fixture 3, and their positions correspond one-to-one. The adjustment mechanism 6 includes an adjustment component 61, a rotation component 62, a drive component 63, and a locking component 64. The adjustment component 61 includes an external threaded tube 611, a connecting plate 612, a connecting plate 613, and a drive block 614. There are four external threaded tubes 611. The four external threaded tubes 611 are located inside the positioning fixture 3 and are evenly distributed about the axis of the protrusion 4. The connecting plate 612 is fixed to the bottom of the clamping block 512 and threadedly connected to the external threaded tubes 611. The connecting plate 613 is fixed to the bottom of the sliding block 511, and the drive block 614 is located on the inner wall of the external threaded tubes 611. The externally threaded tube 611 passes through the connecting plate 613 and is rotatably connected to it. The number of externally threaded tubes 611, the number of connecting plates 612, the number of connecting plates 613, and the number of driving blocks 614 are equal and their positions correspond one-to-one. Since the sliding block 511 and the clamping block 512 are slidably connected, the position of the clamping block 512 on the side wall of the sliding block 511 can be adjusted by operating the adjustment mechanism 6, thereby changing the distance between the clamping block 512 and the axis of the protrusion 4 to accommodate clamping or loosening of various sizes. Operating the rotating assembly 62 and the driving assembly 63 causes the four externally threaded tubes 611 to rotate synchronously, which allows the connecting plates 612, which are threadedly connected to the four externally threaded tubes 611, and the clamping blocks 512, which are fixed to the four connecting plates 612, to slide along the side wall of the sliding block 511. This changes the initial position between the clamping blocks 512 and the axis of the protrusion block 4. Operating the adjusting mechanism 6 can synchronously change the distance between the four clamping blocks 512 and the axis of the positioning fixture 3, making the device easier to use.

[0045] The rotating assembly 62 and the driving assembly 63 work together to drive the four externally threaded tubes 611 to rotate synchronously. The rotating assembly 62 includes a fixed plate 621, a driving rod 622, a first bevel gear 623, a second driving block 624, and a second bevel gear 625. The fixed plate 621 has four pieces, which are fixed to the top of the annular plate 2 and evenly distributed about the axis of the protrusion 4. The driving column 521 passes through the second driving block 624 and is clearance-fitted with the second driving block 624. The driving rod 622 passes through the externally threaded tubes 611 and is slidably fitted with the externally threaded tubes 611. The side wall of the driving rod 622 is recessed and formed with a driving groove that is slidably fitted with the first driving block 614. The driving rod 622 is inserted through the side wall of the fixed plate 621 and is rotatably connected to the fixed plate 621. The first bevel gear 623 is fixedly sleeved on the driving rod 622. The number of fixed plates 621, drive rods 622, and bevel gears 623 are all equal and their positions correspond one-to-one. Drive block 624 is rotatably mounted on the top of the annular plate 2 and is coaxially arranged with drive column 521. Bevel gear 625 is fixedly sleeved on drive block 624 and meshes with bevel gear 623. The operation of drive assembly 63 drives drive block 624 to rotate along its own axis, which in turn drives bevel gear 625 fixed to drive block 624, four bevel gears 623 all meshing with bevel gear 625, drive rods 622 fixed to the four bevel gears 623, drive blocks 614 slidingly engaged with the four drive rods 622 through drive grooves, and external threaded pipes 611 connected to the four drive blocks 614 to rotate, thereby realizing the synchronous sliding operation of the four clamping blocks 512.

[0046] The drive assembly 63 is also used to drive the second drive block 624 to rotate along its own axis. The drive assembly 63 includes a first connecting block 631, a second connecting block 632, and a threaded rod 633. The first connecting block 631 is rotatably mounted on the side wall of the second drive block 624, and the second connecting block 632 is rotatably mounted on the first connecting block 631. The threaded rod 633 is rotatably mounted on the inner wall of the positioning fixture 3. The threaded rod 633 passes through the second connecting block 632 and is threadedly connected to the second connecting block 632. A crossbar 7 is fixed inside the positioning fixture 3. The crossbar 7 passes through the second connecting block 632 and is slidably engaged with the second connecting block 632. Rotating the threaded rod 633 causes the second connecting block 632, which is threadedly connected to the threaded rod 633, to slide along the axial direction of the threaded rod 633. Under the action of the first connecting block 631, the second drive block 624 connected to the first connecting block 631 rotates to ensure the adjustment of the position of the clamping block 512.

[0047] The locking assembly 64 includes a limiting block 641 and a threaded sleeve 642. The limiting block 641 is fixed to the side wall of the threaded rod 633. The threaded sleeve 642 is threaded through the side wall of the positioning fixture 3 and is open on one side, forming a hollow structure. A hexagonal groove is formed at the end of the threaded sleeve 642 away from the threaded rod 633. The threaded rod 633 passes through the opening of the threaded sleeve 642. A limiting groove 643, which slides with the limiting block 641, is formed on the inner wall of the threaded sleeve 642. Rotating the threaded sleeve 642 causes the limiting block 641, which slides with the limiting groove 643, and the threaded rod 633, which is fixed to the limiting block 641, to rotate synchronously. The threaded sleeve 642 is threadedly connected to the positioning fixture 3, ensuring the stability of the threaded rod 633 when it is stationary.

[0048] A mounting shell 8 is fixed to the side wall of the tooling table 1, and a drive motor 9 is fixed to the bottom of the mounting shell 8. The output end of the drive motor 9 passes through the top of the mounting shell 8 and is rotatably connected to the mounting shell 8. A drive gear 10 located inside the mounting shell 8 is fixedly sleeved on the output end of the drive motor 9. A gear ring 11 coaxially arranged with the annular plate 2 is fixed to the bottom of the annular plate 2. A clearance through hole is provided through the side wall of the tooling table 1 for the drive gear 10 to pass through, and the drive gear 10 meshes with the gear ring 11. When the drive motor 9 works, it drives the drive gear 10 to rotate, which in turn causes the gear ring 11 meshing with the drive gear 10 and the annular plate 2 fixed to the gear ring 11 to rotate, thereby ensuring the normal and continuous processing of the device.

[0049] This application also discloses a processing method for a processing fixture for a wafer carrier disk, including the following steps: S1, inserting the recessed part of the surface of the product to be processed into the protrusion 4, and making the bottom of the product fit against the top of the positioning fixture 3.

[0050] S2. The rotating ring plate 2 moves the product placed on the positioning fixture 3 into the processing chamber. After the product enters the processing chamber, the clamping mechanism 5 clamps the product.

[0051] S3. When the product moves inside the processing cover, the milling cutter processing structure, the micro-hole processing structure and the surface polishing structure sequentially perform corresponding processing operations on the product.

[0052] S4. After processing is completed, the annular plate 2 removes the processed product from the processing cover, and the clamping mechanism 5 automatically releases the product.

[0053] S5. Repeat the above steps and place the products one by one on the corresponding positioning fixture 3. This allows for the continuous processing of multiple products without the need for the existing technology to wait for the processed products to be disassembled before clamping the subsequent products, thus shortening the overall waiting time.

[0054] The above description is merely a preferred embodiment of the present invention. The scope of protection of the present invention is not limited to the above embodiments. All technical solutions falling within the scope of the present invention's concept are within the scope of protection of the present invention. It should be noted that for those skilled in the art, any improvements and modifications made without departing from the principles of the present invention should also be considered within the scope of protection of the present invention.

Claims

1. A tooling for processing wafer carrier disks, characterized in that: The fixture includes a tooling table (1) with an open top and a ring structure. The inner wall of the tooling table (1) is rotatably mounted with a ring plate (2) coaxially arranged with the tooling table (1) via a rotating shaft seal. The ring plate (2) can rotate automatically. Multiple positioning fixtures (3) are fixed on the ring plate (2) and are evenly distributed about the axis of the ring plate (2). Each positioning fixture (3) has a protrusion (4) fixed on its top that is inserted into the recessed part of the wafer carrier disk. The tooling table (1) is provided with a clamping mechanism (5) for clamping the wafer carrier disk.

2. The processing fixture for a wafer carrier disk according to claim 1, characterized in that: The positioning fixture (3) has a hollow structure with an open bottom. The clamping mechanism (5) includes a clamping assembly (51). The number of clamping assemblies (51) is equal to the number of blocks in the positioning fixture (3), and their positions correspond one-to-one. The clamping assembly (51) includes four sliding blocks (511) that are slidably disposed inside the positioning fixture (3) and evenly distributed about the axis of the positioning fixture (3), a clamping block (512) that passes through the side wall of the positioning fixture (3) and slides in cooperation with the positioning fixture (3), an adjusting shaft (513) that is rotatably mounted on the top of the sliding block (511), and a clamping shaft (512) that is rotatably mounted on the inner top wall of the positioning fixture (3). A turntable (514) is coaxially arranged with the protrusion (4). The top of the turntable (514) is provided with an arc hole (515) that is eccentrically arranged with the turntable (514) and slides with the adjusting shaft (513). The clamping block (512) is U-shaped and connected to the sliding block (511). The number of sliding blocks (511), the number of clamping blocks (512), the number of adjusting shafts (513) and the number of arc holes (515) are equal and their positions correspond one-to-one. The clamping mechanism (5) also includes a transmission component (52) and a lifting component (53) that are used together for the turntable (514) to rotate along its own axis.

3. The processing fixture for a wafer carrier disk according to claim 2, characterized in that: The number of transmission components (52) is equal to the number of positioning fixtures (3), and their positions correspond one-to-one. The transmission components (52) include a drive column (521) that passes through the top of the annular plate (2) and is rotatably connected to the annular plate (2) through a rotating shaft seal, a fixing frame (522) that is fixed to the bottom of the annular plate (2) and has a U-shaped structure, a horizontal block (523) that is slidably disposed in the fixing frame (522), and an adjusting column (524) that is rotatably mounted on the horizontal block (523). The drive column (521) passes through the top of the horizontal block (523) and is connected to the horizontal block (523) through the rotating shaft seal. The block (523) is fitted together. The side wall of the drive column (521) is provided with a spiral groove (525) that slides with the adjustment column (524). The side wall of the drive column (521) is provided with a vertical groove (526) that slides with the adjustment column (524) and communicates with the spiral groove (525). The lower end of the drive column (521) is rotatably installed at the bottom of the U-shaped cavity of the fixed frame (522). The upper end of the drive column (521) is fixed to the bottom of the turntable (514) and coaxially arranged. The lifting assembly (53) is also used for lifting the horizontal block (523).

4. The processing fixture for a wafer carrier disk according to claim 3, characterized in that: The lifting assembly (53) includes two reciprocating screws (531) that pass through the bottom of the fixed frame (522) and are rotatably connected to the fixed frame (522), a driven gear (532) fixedly sleeved on one of the reciprocating screws (531), a gear ring (533) fixed to the inner wall of the tooling table (1) and coaxially arranged with the tooling table (1), two synchronous pulleys (534) respectively fixedly sleeved on the two reciprocating screws (531), and a synchronous belt (535) that meshes with both synchronous pulleys (534). The gear ring (533) meshes with the driven gear (532), and the reciprocating screw (531) passes through the cross block (523) and is threadedly engaged with the cross block (523) through a nut.

5. The processing fixture for a wafer carrier disk according to claim 4, characterized in that: The side block on the lower side of the clamping block (512) near the sliding block (511) has a connecting groove for the sliding block (511) to pass through and slide. The positioning fixture (3) is provided with an adjustment mechanism (6). The number of adjustment mechanisms (6) is equal to the number of blocks in the positioning fixture (3) and their positions correspond one-to-one. The adjustment mechanism (6) includes an adjustment component (61). The adjustment component (61) includes four externally threaded tubes (611) that are disposed in the positioning fixture (3) and evenly distributed about the axis of the protrusion (4), and a connecting tube (611) that is fixed to the bottom of the clamping block (512) and threadedly connected to the externally threaded tubes (611). The adjustment mechanism (6) includes a first plate (612), a second connecting plate (613) fixed to the bottom of the sliding block (511), and a first driving block (614) disposed on the inner wall of the external threaded tube (611). The external threaded tube (611) passes through the second connecting plate (613) and is rotatably connected to the second connecting plate (613). The number of external threaded tubes (611), the number of first connecting plates (612), the number of second connecting plates (613), and the number of first driving blocks (614) are equal and their positions correspond one-to-one. The adjustment mechanism (6) also includes a rotating component (62) and a driving component (63) that are used together to drive the four external threaded tubes (611) to rotate synchronously.

6. The processing fixture for a wafer carrier disk according to claim 5, characterized in that: The rotating assembly (62) includes four fixed plates (621) fixed to the top of the annular plate (2) and evenly distributed about the axis of the protrusion (4); a drive rod (622) that passes through the side wall of the fixed plate (621) and is rotatably connected to the fixed plate (621); a bevel gear one (623) fixedly sleeved on the drive rod (622); a drive block two (624) rotatably mounted on the top of the annular plate (2) and coaxially arranged with the drive column (521); and a bevel gear two (625) fixedly sleeved on the drive block two (624) and meshing with the bevel gear one (623). The number of fixed plates (621), the number of drive rods (622), and the number of bevel gears (623) are all equal and their positions correspond one to one. The drive rod (622) is inserted into the external threaded tube (611) and slides in cooperation with the external threaded tube (611). The side wall of the drive rod (622) is recessed and formed with a drive groove that slides in cooperation with the drive block (614). The drive column (521) passes through the drive block (624) and is clearance-fitted with the drive block (624). The drive assembly (63) is also used to drive the drive block (624) to rotate along its own axis.

7. The processing fixture for a wafer carrier disk according to claim 6, characterized in that: The drive assembly (63) includes a connecting block 1 (631) rotatably disposed on the side wall of the drive block 2 (624), a connecting block 2 (632) rotatably mounted on the connecting block 1 (631), and a threaded rod (633) rotatably mounted on the inner wall of the positioning fixture (3). The threaded rod (633) passes through the connecting block 2 (632) and is threadedly connected to the connecting block 2 (632). A crossbar (7) is fixed inside the positioning fixture (3). The crossbar (7) passes through the connecting block 2 (632) and slides with the connecting block 2 (632).

8. The processing fixture for a wafer carrier disk according to claim 7, characterized in that: The adjustment mechanism (6) further includes a locking assembly (64), which includes a limiting block (641) fixed to the side wall of the threaded rod (633) and a threaded sleeve (642) that is threaded through the side wall of the positioning fixture (3) and threadedly connected to the positioning fixture (3) and has a hollow structure with one side opening. The threaded rod (633) is inserted into the threaded sleeve (642) through the opening of the threaded sleeve (642), and the inner wall of the threaded sleeve (642) is provided with a limiting groove (643) that slides with the limiting block (641).

9. The processing fixture for a wafer carrier disk according to claim 1, characterized in that: A mounting shell (8) is fixed on the side wall of the tooling table (1). A drive motor (9) is fixed at the bottom of the mounting shell (8). The output end of the drive motor (9) passes through the top of the mounting shell (8) and is rotatably connected to the mounting shell (8). A drive gear (10) located inside the mounting shell (8) is fixedly sleeved at the output end of the drive motor (9). A gear ring II (11) coaxially arranged with the annular plate (2) is fixed at the bottom of the annular plate (2). A clearance through hole for the drive gear (10) to pass through is provided through the side wall of the tooling table (1). The drive gear (10) meshes with the gear ring II (11).

10. The processing method of the processing fixture for a wafer carrier disk according to any one of claims 1-9, characterized in that, Includes the following steps: S1. Insert the recessed part of the surface of the product to be processed into the protrusion (4), and make the bottom of the product fit against the top of the positioning fixture (3); S2. The ring plate (2) rotates to move the product placed on the positioning fixture (3) into the processing cover. After the product enters the processing cover, the clamping mechanism (5) clamps the product. S3. When the product moves inside the processing cover, the milling cutter processing structure, the micro-hole processing structure and the surface polishing structure sequentially perform corresponding processing operations on the product. S4. After processing is completed, the ring plate (2) moves the processed product out of the processing cover, and the clamping mechanism (5) automatically releases the product. S5. Repeat the above steps and place the products one by one on the corresponding positioning fixture (3) to realize the continuous processing of multiple products. There is no need to wait for the products to be processed and then disassemble them before clamping the subsequent products to be processed, which shortens the overall waiting time.

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