Carbon nanotube hierarchical nanochannel network and its construction method and application

Abstract

The application discloses a method for constructing a carbon nanotube hierarchical nanochannel network and belongs to the technical field of nanodevice manufacturing. The method comprises the following steps: S1, a gate electrode is prepared on the outer periphery of a single carbon nanotube on a substrate and corresponding lead wires are bonded; S2, photoresist with a thickness of 10-100 micrometers is coated on the side of the substrate where the carbon nanotube is arranged; S3, a microchannel is prepared in the photoresist layer through a photoetching process, the carbon nanotube is exposed, and the gate electrode is arranged in the remaining photoresist; S4, the residual carbon nanotube in the microchannel is removed through a local etching process, thereby forming at least two nanochannel units; S5, polydimethylsiloxane is bonded and packaged with the substrate; S6, the ports of the nanochannel units are functionally modified; and S7, the nanochannel units are coupled through the microchannel and / or coupled through external electrodes, thereby forming a group of series-connected and / or parallel-connected carbon nanotube hierarchical nanochannel networks.

Description

Technical Field

[0001] This invention belongs to the field of nanodevice manufacturing technology, and more specifically, relates to a carbon nanotube hierarchical nanochannel network, its construction method and application. Background Technology

[0002] Nanochannels, as the core carriers of biomimetic ion transport, have become important artificial structures for simulating biological ion channels due to their geometric approximation of the pore size range of biological protein channels (such as potassium and sodium channels) and their controllable surface physicochemical properties. They have been widely used in fields such as ion transport regulation, ion logic devices, ion memristors, and neuromorphic devices. Existing artificial nanochannel systems mainly rely on four typical structures: single nanopores (including conical and cylindrical pores) on solid films, asymmetric nanoconical pores (such as conical pores drawn from glass microtubes), sub-nanopores on two-dimensional material films (such as graphene and molybdenum disulfide), and luminous channels of single or multiple carbon nanotubes (CNTs). The regulation strategies for these structures mainly fall into two categories: one is to adjust the geometric constraint strength of the channel through physical confinement effects, such as changing the pore size, pore length, and pore shape; the other is to endow the channel with intelligent responsiveness to external stimuli (such as pH, temperature, light, voltage, and ligand concentration) through functional molecule modification, such as peptides and redox-responsive groups.

[0003] However, with the increasing integration and functional complexity of ion circuits, single-channel structures are gradually revealing their limitations in terms of control dimensionality. For example, a single channel can only provide a one-dimensional ion flow path, making it difficult to achieve parallel processing of multiple signals. This function is precisely the core feature of biological ion channel networks, such as voltage-gated channel arrays on neuronal axons. Therefore, researchers have recently begun to attempt to construct multi-channel coupled systems by spatially combining multiple nanochannels in series, parallel, or cascade arrangements to obtain synergistically enhanced ion transport properties, such as increasing ion flux, expanding the dynamic response range, and realizing multi-input multi-output logic operations. Currently reported multi-channel structures mainly encapsulate multiple carbon nanotubes or solid nanotubes in independent support substrates and then connect them through microfluidic channels to form parallel pipelines. While these methods physically achieve the superposition of channel numbers, in practical applications, either the center-to-center spacing between channels is typically on the order of millimeters or even centimeters, much larger than the nanoscale arrangement spacing in biological channel clusters, resulting in extremely weak cross-coupling effects of ion concentration between channels, making it impossible to form effective local ion microenvironment interactions, thus making it difficult to reproduce the neighbor-to-neighbor cooperative behavior in biological networks, and also leading to low channel integration; or the transport behavior of all channels is synchronously controlled by global parameters (such as overall membrane potential and overall electrolyte solution concentration), and individual channels do not have the ability to be independently regulated, thus failing to achieve programmable networking functions such as time-division multiplexing, independent switching, and differentiated weight settings.

[0004] Therefore, how to develop a carbon nanotube hierarchical nanochannel network and its construction method that can simultaneously achieve high-density integration, independent control and programmable networking of multiple nanochannels is a technical problem that urgently needs to be solved in this field. Summary of the Invention

[0005] 1. The problem to be solved To address the technical problems of large inter-channel distances, low structural integration, and difficulty in achieving independent control of individual channels in existing multi-channel coupling systems, this invention provides a method for constructing a carbon nanotube-level nanochannel network. Microchannels with widths of 10 μm to 200 μm and nanochannel units with lengths of 0.2 μm to 200 μm are obtained through photolithography and local etching processes, respectively, thereby shortening the distance between nanochannel units and improving the integration of the carbon nanotube-level nanochannel network. Simultaneously, by applying different gate voltages to the gate control electrode, the surface charge density and ion transport behavior of the carbon nanotube channels can be independently controlled. These channels are then connected in series and / or in parallel through microchannel coupling and / or external electrode coupling, thereby forming a carbon nanotube-level nanochannel network with a tree-like structure, a mesh structure, a cascade structure, or a biomimetic neural network structure.

[0006] 2. Technical Solution To solve the above problems, the technical solution adopted by the present invention is as follows: The first aspect of the present invention provides a carbon nanotube-level nanochannel network, comprising at least one set of carbon nanotube-level nanochannel subnetworks; The carbon nanotube hierarchical nanochannel subnetwork includes at least two nanochannel units, the length of which is 0.2 μm to 200 μm, preferably 10 μm to 120 μm, and more preferably 15 μm to 80 μm. A gated electrode is disposed in the nanochannel unit. Each of the nanochannel units has a microchannel on each side, and the width of the microchannel is 10 μm to 200 μm, preferably 50 μm to 150 μm. There is one and only one nanochannel unit between two adjacent microchannels. The nanochannel units are connected in series and / or in parallel.

[0007] It should be noted that series connection refers to multiple nanochannel units being connected sequentially to form a single-path ion transport network; parallel connection refers to multiple nanochannel units being connected together between the same input electrode and the same output electrode to form a multi-path ion transport network. Hybrid series and parallel connections can form tree structures, mesh structures, cascade structures, or biomimetic neural network structures.

[0008] The carbon nanotube hierarchical nanochannel network provided by this invention achieves independent control of the surface charge density and ion transport behavior of carbon nanotube channels by applying a gate voltage to the gated electrode.

[0009] As a preferred embodiment of any of the first aspects of the present invention, it includes at least two sets of carbon nanotube-level nanochannel subnetworks; The carbon nanotube hierarchical nanochannel subnetworks are coupled to each other via microchannel coupling and / or external electrodes.

[0010] Furthermore, the height of the microchannel is 10 μm to 100 μm, preferably 10 μm to 50 μm, and even more preferably 20 μm to 40 μm.

[0011] As a preferred embodiment of any of the first aspects of the present invention, the structure of the microchannel is composed of positive photoresist or negative photoresist.

[0012] A second aspect of this invention provides a method for constructing a carbon nanotube-level nanochannel network, comprising the following steps: S1. A gated electrode is fabricated on the outer periphery of a single carbon nanotube located on a substrate and corresponding leads are bonded thereto, wherein the number of gated electrodes is greater than or equal to 2. S2. Coat a photoresist with a thickness of 10 μm to 100 μm on the side of the substrate where the carbon nanotubes are disposed, and remove the solvent in the photoresist by baking; S3. Microchannels are prepared in the photoresist layer by photolithography to expose the carbon nanotubes and place the gate electrode in the retained photoresist. The width of the microchannel is 10μm~200μm, preferably 50μm~150μm, and there is one and only one gate electrode between two adjacent microchannels. S4. The carbon nanotubes remaining in the microchannel are removed by a local etching process, thereby forming at least two nanochannel units. The length of the nanochannel unit is 0.2 μm to 200 μm, preferably 10 μm to 120 μm, and more preferably 15 μm to 80 μm. S5. Bond and encapsulate polydimethylsiloxane to the substrate; S6. Functionalize the ports of the nanochannel unit to give the ports functional groups, wherein the functional groups of the ports are selected from one or more of carboxyl, amino, hydroxyl, mercapto, sulfonic acid and quaternary ammonium salt groups; S7. The nanochannel units form a series-connected and / or parallel-connected carbon nanotube hierarchical nanochannel network through microchannel coupling and / or external electrode coupling.

[0013] It should be noted that different nanochannel units can have the same or different functional groups. Furthermore, microchannel coupling refers to the ion transport coupling between two adjacent nanochannel units through the electrolyte solution in the microchannel between them; external electrode coupling refers to the electrical signal coupling formed by multiple nanochannel units through external electrodes.

[0014] Furthermore, the baking method is a stepped heating process.

[0015] Furthermore, the stepped heating refers to maintaining the temperature at 35℃, 45℃, and 55℃ for 200 s to 400 s, at 65℃ for 500 s to 700 s, at 75℃ and 85℃ for 200 s to 400 s, and at 95℃ for 500 s to 700 s.

[0016] As a preferred embodiment of any of the second aspects of the present invention, the method further includes the following steps: Repeat steps S1 to S7 to prepare multiple sets of carbon nanotube hierarchical nanochannel networks as carbon nanotube hierarchical nanochannel subnetworks. The carbon nanotube hierarchical nanochannel subnetworks are connected by microchannel coupling and / or external electrode coupling to form a carbon nanotube hierarchical nanochannel network.

[0017] In the carbon nanotube hierarchical nanochannel network provided by the present invention, nanochannel units can be connected in series and / or in parallel; carbon nanotube hierarchical nanochannel subnetworks can be connected in series and / or in parallel; and nanochannel units and carbon nanotube hierarchical nanochannel subnetworks can be connected in series and / or in parallel.

[0018] As a preferred embodiment of any of the second aspects of the present invention, the gate control electrode is prepared by electron beam lithography, ultraviolet lithography or focused ion beam lithography; The gated electrode is selected from one or more of the following: a surrounding structure, a bottom gate structure, and a side gate structure; The axial width of the gated electrode is 0.2 μm to 200 μm, which is 80% to 100% of the length of the nanochannel unit. The material of the gated electrode is selected from one or more of gold, platinum, titanium, chromium, graphene, and conductive polymers.

[0019] In the carbon nanotube-level nanochannel network provided by this invention, the charge on the surface of the nanochannel unit is differentially controlled in real time by a gated electrode, thereby changing the threshold of the electrical signal transition.

[0020] Furthermore, the gate control electrode is a double-layer metal electrode, wherein the thickness of the inner layer of the double-layer metal electrode is 2 nm to 8 nm, and the thickness of the outer layer is 20 nm to 80 nm.

[0021] As a preferred embodiment of any of the second aspects of the present invention, the length of the carbon nanotube is 100 μm to 20 mm, preferably 0.9 mm to 10 mm, more preferably 0.9 mm to 5 mm, and the diameter is 0.5 nm to 10 nm, preferably 1 nm to 5 nm. The carbon nanotubes are selected from one or both of single-walled carbon nanotubes and multi-walled carbon nanotubes. The carbon nanotubes are selected from one or both of metallic carbon nanotubes and semiconductor carbon nanotubes.

[0022] As a preferred embodiment of any of the second aspects of the present invention, the photoresist is a positive photoresist or a negative photoresist; The height of the microchannel is 10 μm to 100 μm, preferably 10 μm to 50 μm, and more preferably 20 μm to 40 μm.

[0023] Furthermore, the negative photoresist is SU-8 photoresist, ma-N photoresist, NR photoresist, or RFJ photoresist.

[0024] As a preferred embodiment of any of the second aspects of the present invention, the number of nanochannel units is 2 to 100.

[0025] As a preferred embodiment of any of the second aspects of the present invention, the etching process in S4 is selected from one or more of plasma etching, reactive ion etching, and focused ion beam etching.

[0026] A third aspect of the present invention provides an ion transport device comprising the carbon nanotube layered nanochannel network provided in the first aspect of the present invention.

[0027] As a preferred embodiment of any of the third aspects of the present invention, the ion transport device is an ion transistor, an ion logic device, an ion memristor, a neuromorphic computing device, or an ion sensor.

[0028] 3. Beneficial effects Compared with the prior art, the beneficial effects of the present invention are as follows: (1) The carbon nanotube hierarchical nanochannel network construction method provided by the present invention obtains microchannels with a width of 10 μm to 200 μm and nanochannel units with a length of 0.2 μm to 200 μm through photolithography and local etching processes, respectively, thereby reducing the physical distance between individually programmable nanochannel units, realizing high-density arrangement at the micro-nano scale, and improving the integration of the carbon nanotube hierarchical nanochannel network; at the same time, each nanochannel unit is given an independent and addressable electrical control and flow control interface through the surface charge engineering of the gate electrode, supporting real-time differentiated control; and by utilizing the flexible network topology definition capabilities such as microchannel coupling and / or external electrode coupling, each nanochannel unit is connected in series and / or in parallel to form a carbon nanotube hierarchical nanochannel network with a tree structure, a mesh structure, a cascade structure or a biomimetic neural network structure, thereby simulating advanced functions such as cooperative transmission, signal integration and plasticity learning in biological ion channel networks.

[0029] (2) The carbon nanotube hierarchical nanochannel network provided by this invention has nanochannel unit lengths of 0.2 μm to 200 μm and microchannel widths of 10 μm to 200 μm. The distance between nanochannel units is short, and the integration degree of the carbon nanotube hierarchical nanochannel network is high. The gated electrode can change the charge density and polarity of the carbon nanotube wall by applying different gate voltages, thereby regulating the electrostatic repulsion or attraction of ions. The carbon nanotube hierarchical nanochannel network, which is compatible with both microchannel coupling and external electrode coupling, can achieve flexible networking of multiple nanochannel units through series connection and / or parallel connection, thereby simulating the cooperative transport and information processing behavior in biological ion channel networks.

[0030] (3) The ion transport device provided by the present invention has high integration and strong cross-coupling effect of ion concentration between channels, which can form effective local ion microenvironment interaction and effectively reproduce the neighbor-to-neighbor cooperative behavior in biological networks. Attached Figure Description

[0031] Figure 1 This is a flowchart of the method for constructing a carbon nanotube-level nanochannel network according to Embodiment 1 of the present invention; Figure 2 This is a schematic diagram of the carbon nanotube-level nanochannel structure in Embodiment 1 of the present invention; In the picture: 1. Silicon wafer substrate; 2. Nanochannel unit; 3. Gate electrode; 4. Microchannel; 5. Photoresist; 6. Polydimethylsiloxane capping sheet; Figure 3 This is a flowchart of the method for constructing a carbon nanotube-level nanochannel network according to Embodiment 2 of the present invention. Detailed Implementation

[0032] It should be noted that when one component is referred to as "connecting" another component, it can be directly connected to the other component or the two components may be integrated as one unit.

[0033] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention pertains; the term “and / or” as used herein includes any and all combinations of one or more of the associated listed items.

[0034] Unless otherwise specified in the examples, the procedures should be performed under standard conditions or conditions recommended by the manufacturer. Reagents or instruments whose manufacturers are not specified are all commercially available products.

[0035] As used herein, the term “about” is used to provide for the flexibility and imprecision associated with a given term, measure, or value. Those skilled in the art can readily determine the degree of flexibility for a particular variable.

[0036] As used herein, “adjacent” means that two structures or elements are close to each other. Specifically, elements identified as “adjacent” may be adjacent or connected. Such elements may also be close to or near each other without necessarily touching. In some cases, the precision of proximity may depend on the specific context.

[0037] Concentration, amount, and other numerical data may be presented in range format herein. It should be understood that such range format is used solely for convenience and brevity and should be flexibly interpreted to include not only the values ​​explicitly stated as the limits of the range, but also all individual values ​​or subranges encompassed within the range, as if each value and subrange were explicitly stated. For example, a range of values ​​from about 1 to about 4.5 should be interpreted to include not only the explicitly stated limits of 1 to 4.5, but also individual numbers (such as 2, 3, 4) and subranges (such as 1 to 3, 2 to 4, etc.). The same principle applies to ranges that describe only a single value, such as "less than about 4.5," which should be interpreted to include all the values ​​and ranges described above. Furthermore, this interpretation should apply regardless of the breadth of the range or characteristic described.

[0038] The present invention will be further described below with reference to specific embodiments.

[0039] Example 1 This embodiment provides a carbon nanotube (CNT) hierarchical nanochannel network, the construction method of which is as follows: Figure 1 As shown, the specific steps include: 1. Growth of carbon nanotubes: At 900 °C, using ferrous sulfate as a catalyst and ethanol as a carbon source, a semiconductor-type single-walled carbon nanotube was laterally grown on a silicon wafer substrate 1 with a silicon dioxide layer thickness of 300 nm for 20 min using airflow-guided chemical vapor deposition. One single-walled carbon nanotube with a length of about 2 mm and a diameter of 2.4 nm was selected.

[0040] 2. Fabrication of gated electrodes: Three independent gated electrodes 3 coated with carbon nanotubes were fabricated using electron beam lithography and metal evaporation processes and wire bonded together. The gated electrodes 3 are double-layer metal electrodes with a width of 30 μm. The inner metal layer is titanium (Ti) with a thickness of 5 nm, and the outer metal layer is gold (Au) with a thickness of 50 nm.

[0041] 3. Coating photoresist: Spin-coat a 30 μm thick epoxy-based UV negative photoresist 5 (SU-8 photoresist) on one side of the silicon wafer substrate where single-walled carbon nanotubes are grown, and remove the solvent from the SU-8 photoresist by step-by-step heating and baking.

[0042] 4. Fabrication of microchannel structure: A four-level microchannel structure is fabricated in the SU-8 photoresist layer using a photolithography process that includes ultraviolet light exposure and wet development. This exposes single-walled carbon nanotubes and keeps the gate electrode within the retained SU-8 photoresist. The width of microchannel 4 is 100 μm and the height is 30 μm, denoted as C1, C2, C3, and C4, respectively.

[0043] 5. Plasma etching CNT start: The residual single-walled carbon nanotubes in the microchannel are removed by oxygen plasma local etching process, thereby constructing three independent nanochannel units 2 on the same carbon nanotube, denoted as N1, N2 and N3 respectively. The three nanochannel units 2 arranged in sequence can serve as a continuous ion transport path.

[0044] 6. PDMS Bonding and Encapsulation: First, ultrasonically clean the polydimethylsiloxane (PDMS) cover sheet 6 and the silicon substrate 1 treated in step 5 with isopropanol and deionized water, respectively, and then dry them with nitrogen. Next, place both surfaces to be bonded upwards into the plasma cleaning chamber, evacuate, and then introduce oxygen for plasma activation treatment for 60 seconds. After treatment, quickly remove them and align and bond the surfaces to be bonded (i.e., the activated surface of the PDMS and the flow channel surface of the substrate), applying a 2 N / cm clamping mechanism. 2 Apply uniform pressure for 30 seconds, and then allow it to stand and solidify before encapsulation.

[0045] 7. CNT end modification: The port of nanochannel unit 2 was functionalized with carboxyl groups using a coupling reaction of 1-ethyl-3-(3-dimethylaminopropyl)carbodiimide / N-hydroxysuccinimide (EDC / NHS) to obtain carbon nanotube-level nanochannels, such as... Figure 2 As shown.

[0046] 8. A 1 mol / L KCl solution is introduced into each of the four microchannels as an electrolyte. The two adjacent nanochannel units 2 are coupled in series through the electrolyte solution in the middle microchannel 3. That is, each nanochannel unit 2 is coupled in series by sharing the KCl solution.

[0047] 9. Different gate voltages are applied to each gate control electrode 3 to achieve independent control of the ion transport behavior of each nanochannel unit 2, and finally obtain a series-type CNT hierarchical nanochannel network based on microchannel coupling.

[0048] Example 2 This embodiment provides a carbon nanotube (CNT) hierarchical nanochannel network, the construction method of which is as follows: Figure 3 As shown, the specific steps are basically the same as in Example 1, except that in step 1, the single-walled carbon nanotubes grown laterally on the silicon substrate 1 are semiconductor-type single-walled carbon nanotubes with a length of about 1.5 mm and a diameter of 1.2 nm; in step 7, the ports of nanochannel units N1 in microchannel C1 are modified with carboxyl functionalization, the ports of nanochannel units N1 and N2 in microchannel C2 are modified with amino functionalization using a silanization reaction, and the ports of nanochannel units in microchannels C3 and C4 are modified with hydroxyl functionalization using a strong alkaline alcohol solution oxidation reaction; it also includes channel series and parallel connection steps, specifically including the following steps: Three nanochannel units are each configured with a set of Ag / AgCl electrodes to form a series connection structure. The input electrodes of the three nanochannel units are connected to a common input electrode, and the output electrodes are connected to a common output electrode, so that the three nanochannel units form a parallel connection structure.

[0049] Ultimately, a series-parallel CNT hierarchical nanochannel network based on external electrode coupling was obtained.

[0050] Example 3 This embodiment provides a carbon nanotube (CNT) hierarchical nanochannel network. The specific steps are basically the same as in Embodiment 1, except that in step 1, they are respectively referred to as the first single-walled carbon nanotube, the second single-walled carbon nanotube, and the third single-walled carbon nanotube. Accordingly, three independent nanochannel units are constructed on the first single-walled carbon nanotube, forming the first group of nanochannel units; two independent nanochannel units are constructed on the second single-walled carbon nanotube, forming the second group of nanochannel units; and three independent nanochannel units are constructed on the third single-walled carbon nanotube, forming the third group of nanochannel units. In step 7, the ports of the first group of nanochannel units are modified with carboxyl groups, the ports of the second group of nanochannel units are modified with amino groups, and the ports of the third group of nanochannel units are modified with hydroxyl groups. The embodiment also includes channel series and parallel connection steps, specifically including the following steps: The first group of nanochannel units shares the first electrolyte solution, the second group of nanochannel units shares the second electrolyte solution, and the third group of nanochannel units shares the third electrolyte solution. The first, second, and third electrolyte solutions are all KCl solutions with a concentration of 1 mol / L, thereby forming a tandem CNT hierarchical nanochannel network based on microchannel coupling within each group of nanochannel units. The first group of nanochannel units was connected to the second group of nanochannel units using Ag / AgCl electrodes, and the second group of nanochannel units was connected to the third group of nanochannel units using another group of Ag / AgCl electrodes, ultimately resulting in a cascaded CNT-level nanochannel network with microchannel-electrode hybrid coupling.

[0051] Example 4 This embodiment provides a carbon nanotube (CNT) hierarchical nanochannel network. The specific steps are basically the same as in Embodiment 3, except that in step 1, three single-walled carbon nanotubes are selected and grown laterally on a silicon substrate. The diameters of the nanotubes are 1.6 nm, 2.5 nm, and 3.2 nm, and the corresponding lengths are 1.7 mm, 0.9 mm, and 2.3 mm, respectively. The first group of nanochannel units is configured with a set of Ag / AgCl electrodes to form a series connection structure. The input electrode of the first group of nanochannel units is connected to the first common input electrode, and the output electrode is connected to the first common output electrode to form a parallel connection structure. The second group of nanochannel units is configured with a set of Ag / AgCl electrodes to form a series connection structure. The input electrode of the second group of nanochannel units is connected to the second common input electrode, and the output electrode is connected to the second common output electrode to form a parallel connection structure. Similarly, the third group of nanochannel units forms a parallel connection structure, and finally a biomimetic neural network-type CNT hierarchical nanochannel network with a tree-like topology is obtained.

[0052] Example 5 This embodiment provides a carbon nanotube (CNT) layered nanochannel network. The specific steps are basically the same as those in Embodiment 3, except that one single-walled carbon nanotube is metallic and two single-walled carbon nanotubes are semiconductor, ultimately resulting in a cascaded heterogeneous CNT layered nanochannel network with microchannel-electrode hybrid coupling.

[0053] The above description provides an illustrative overview of the present invention and its embodiments. This description is not restrictive, and the embodiments shown are merely one example of the invention's implementation. Actual implementations are not limited to these examples. Therefore, if those skilled in the art are inspired by this description and design similar implementations and examples without departing from the spirit of the invention, such designs should fall within the scope of protection of the present invention.

Claims

1. A method for constructing a carbon nanotube hierarchical nanochannel network, characterized in that, Includes the following steps: S1. A gated electrode is fabricated on the outer periphery of a single carbon nanotube located on a substrate and corresponding leads are bonded thereto, wherein the number of gated electrodes is greater than or equal to 2. S2. Coat a photoresist with a thickness of 10 μm to 100 μm on the side of the substrate where the carbon nanotubes are disposed, and remove the solvent in the photoresist by baking; S3. Microchannels are prepared in the photoresist layer by photolithography to expose the carbon nanotubes and place the gate electrode in the retained photoresist. The width of the microchannel is 10 μm to 200 μm, and there is one and only one gate electrode between two adjacent microchannels. S4. Remove the residual carbon nanotubes in the microchannels by a local etching process to form at least two nanochannel units, the length of which is 0.2 μm to 200 μm. S5. Bond and encapsulate polydimethylsiloxane to the substrate; S6. Functionalize the ports of the nanochannel unit to give the ports functional groups, wherein the functional groups of the ports are selected from one or more of carboxyl, amino, hydroxyl, mercapto, sulfonic acid and quaternary ammonium salt groups; S7. The nanochannel units form a series-connected and / or parallel-connected carbon nanotube hierarchical nanochannel network through microchannel coupling and / or external electrode coupling.

2. The construction method according to claim 1, characterized in that, It also includes the following steps: Repeat steps S1 to S7 to prepare multiple sets of carbon nanotube hierarchical nanochannel networks as carbon nanotube hierarchical nanochannel subnetworks. The carbon nanotube hierarchical nanochannel subnetworks are connected by microchannel coupling and / or external electrode coupling to form a carbon nanotube hierarchical nanochannel network.

3. The construction method according to claim 2, characterized in that, The gated electrode is prepared by electron beam lithography, ultraviolet lithography or focused ion beam; The gated electrode is selected from one or more of the following: a surrounding structure, a bottom gate structure, and a side gate structure; The axial width of the gated electrode is 0.2 μm to 200 μm, which is 80% to 100% of the length of the nanochannel unit. The material of the gated electrode is selected from one or more of gold, platinum, titanium, chromium, graphene, and conductive polymers.

4. The construction method according to claim 1, characterized in that, The carbon nanotubes have a length of 100 μm to 20 mm and a diameter of 0.5 nm to 10 nm. The carbon nanotubes are selected from one or both of single-walled carbon nanotubes and multi-walled carbon nanotubes. The carbon nanotubes are selected from one or both of metallic carbon nanotubes and semiconductor carbon nanotubes.

5. The construction method according to claim 1, characterized in that, The photoresist is either a positive photoresist or a negative photoresist; The height of the microchannel is 10 μm to 100 μm.

6. The construction method according to claim 1, characterized in that, The number of nanochannel units is 2 to 100.

7. The construction method according to claim 1, characterized in that, The etching process in S4 is selected from one or more of plasma etching, reactive ion etching, and focused ion beam etching.

8. The carbon nanotube hierarchical nanochannel network obtained by the construction method according to claims 1-7, characterized in that, Includes at least one set of carbon nanotube hierarchical nanochannel subnetworks; The carbon nanotube hierarchical nanochannel subnetwork includes at least two nanochannel units, the length of which is 0.2 μm to 200 μm, and a gated electrode is disposed in the nanochannel unit; Each of the nanochannel units has a microchannel on each side, the width of which is 10 μm to 200 μm, and there is one and only one nanochannel unit between two adjacent microchannels. The nanochannel units are connected in series and / or in parallel.

9. The carbon nanotube hierarchical nanochannel network according to claim 8, characterized in that, Includes at least two sets of carbon nanotube hierarchical nanochannel subnetworks; The carbon nanotube hierarchical nanochannel subnetworks are coupled to each other via microchannel coupling and / or external electrodes.

10. An ion transport device, characterized in that, Including the carbon nanotube-level nanochannel network as described in claim 8 or 9.

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