Nondestructive testing device for microcracks in fused quartz materials

Abstract

The application relates to the technical field of high-purity quartz material detection, and discloses a micro-crack nondestructive detection device for high-purity quartz material formed by melting, which comprises a rack, a bearing frame, a visual detection camera, a centering cylinder and a driving mechanism. The driving mechanism drives the quartz workpiece body to reciprocatingly lift through a lifting shaft, and realizes segmented rotation by alternately matching the upper driving block, the lower driving block and the driving piece. The centering assembly prepositions the quartz workpiece body, the flexible suction cup forms adsorption, and the selective pressure relief assembly releases adsorption before discharging. The application realizes continuous detection of the quartz workpiece body in the height direction and the circumferential direction by a single driving source, reduces the scratching, collapse and crack risks caused by rigid clamping while guaranteeing the positioning accuracy and motion stability, and improves the integrity and reliability of micro-crack detection.

Description

Technical Field

[0001] This invention relates to the field of optical detection technology for high-purity quartz materials, and more particularly to a non-destructive testing device for microcracks in fused high-purity quartz materials. Background Technology

[0002] High-purity quartz material is a high-performance inorganic non-metallic material prepared based on high-purity silicon dioxide. It has the characteristics of high purity, good light transmittance, high temperature resistance, excellent thermal stability and chemical stability. It is an important new material in the fields of semiconductors, photovoltaics, precision optics, chemical industry and aerospace. After being melted, drawn, expanded or thermoformed, high-purity quartz material can be made into hollow products such as quartz tubes, quartz cylinders and quartz covers. During the molding cooling, subsequent heat processing and handling, small microcracks that are not easy to observe directly may be generated. Therefore, visual inspection of the molded products is required to determine whether there are defects on the surface and wall that affect product quality.

[0003] When inspecting hollow quartz products, existing visual inspection equipment typically requires adjusting the height and circumferential position of the workpiece separately so that different areas enter the camera's acquisition range sequentially. The inspection actions are relatively scattered, and it is not easy to maintain a stable connection during the lifting and rotating processes, which can easily lead to repeated acquisition of local areas or ineffective coverage. In addition, existing inspection fixtures mostly use grippers, blocks, or chucks to rigidly position and hold the outer wall or end of the quartz product. However, high-purity quartz products are hard and brittle and have high surface quality requirements. When the clamping force is concentrated or the clamping position is deviated, it can easily cause surface scratches, end breakage, or even induce new cracks, making it difficult to balance inspection coverage, inspection efficiency, and workpiece protection. Summary of the Invention

[0004] The technical problem to be solved by this invention is that existing visual inspection of hollow high-purity quartz products suffers from problems such as scattered height and circumferential adjustment actions, easy repetition or omission of inspection areas, and easy damage to workpieces by rigid clamping. To address these issues, we propose a non-destructive testing device for microcracks in fused high-purity quartz materials.

[0005] To achieve the above objectives, this application adopts the following technical solution: including a frame, a support frame mounted on the frame for carrying the quartz workpiece body to be inspected, a visual inspection camera disposed on the side of the support frame, a centering cylinder disposed on the support frame for pre-positioning the quartz workpiece body, and a drive mechanism for driving the quartz workpiece body to move.

[0006] The drive mechanism includes a lifting component and a segmented rotating component. The lifting component includes a vertically movable and rotatable lifting shaft that passes through the support frame and the centering cylinder, and a drive source that is connected to the lifting shaft and drives the lifting shaft to reciprocate up and down.

[0007] The segmented rotating component includes an upper drive block and a lower drive block mounted on the lifting shaft, and a drive component mounted on the support frame. The upper drive block and the lower drive block are respectively provided with inclined surfaces that cooperate with the drive component. When the lifting shaft reciprocates, the drive component alternately acts on the lower drive block and the upper drive block to drive the lifting shaft and the quartz workpiece body to rotate in segments, so that different height areas and circumferential areas of the quartz workpiece body pass through the detection area of ​​the visual inspection camera in sequence.

[0008] Preferably, the lower drive block is located below the upper drive block, and both the upper and lower drive blocks are distributed at intervals along the circumference of the lifting shaft, and the upper and lower drive blocks are staggered along the circumference of the lifting shaft.

[0009] Preferably, a clearance channel is formed between adjacent upper drive blocks, so that when the lifting shaft rises, the drive component can enter between the upper drive block and the lower drive block relative to the lifting shaft through the clearance channel.

[0010] Preferably, the inclined planes of the upper and lower drive blocks are configured to cause the lifting shaft to rotate in segments along the same circumference during the upward and downward strokes.

[0011] Preferably, the centering cylinder is provided with a centering component, which includes a plurality of radial grooves spaced apart along the circumference of the centering cylinder, a centering block movably disposed in the radial grooves along the radial direction of the centering cylinder, and an elastic element disposed between the centering block and the inner wall of the radial groove.

[0012] The upper sidewall of the lifting shaft is provided with grooves that correspond one-to-one with the centering blocks. The grooves include a centering area at the top and a reciprocating lifting area below the centering area. The depth of the reciprocating lifting area is greater than the depth of the centering area. The upper and lower ends of the centering area are respectively provided with inclined surfaces.

[0013] Preferably, when the lifting shaft rises, the centering block moves to the outside of the centering cylinder through the centering zone and abuts against the inner wall of the quartz workpiece body. After the lifting shaft continues to rise, the centering block enters the reciprocating lifting zone and retracts under the action of the elastic element to release the continuous contact with the quartz workpiece body.

[0014] Preferably, the centering cylinder is rotatably connected to the support frame. When the quartz workpiece body is lifted and rotated in sections, the end of the centering block near the lifting shaft is located in the reciprocating lifting area, and the centering cylinder can rotate with the lifting shaft.

[0015] Preferably, one end of the quartz workpiece body is open and the other end is closed. A flexible suction cup is provided at the top of the lifting shaft. When the lifting shaft rises, the flexible suction cup is attached to the inner wall of the closed end of the quartz workpiece body and is compressed and discharged by the gravity of the quartz workpiece body to form an adsorption on the quartz workpiece body.

[0016] Preferably, the lifting shaft is provided with a selective pressure relief component, which includes a cavity disposed on the inner side of the upper end of the lifting shaft and communicating with the adsorption cavity of the flexible suction cup, a rotating shaft rotatably disposed in the reciprocating lifting area of ​​the groove, a docking hole disposed on the inner wall of the cavity and corresponding to the rotating shaft, and a protrusion disposed on one side of the rotating shaft and protruding into the reciprocating lifting area.

[0017] The rotating shaft and the protrusion are provided with interconnected pressure relief holes. The centering block can drive the rotating shaft to rotate by pushing the protrusion, so that the pressure relief holes can be selectively connected to or offset from the docking holes.

[0018] Preferably, a torsion spring is provided between the rotating shaft and the lifting shaft;

[0019] When the lifting shaft moves upward past the centering block, the centering block drives the rotating shaft to rotate through the protrusion, causing the pressure relief through hole to be misaligned with the docking hole; after the inspection is completed, when the lifting shaft moves downward past the centering block, the centering block drives the rotating shaft to rotate in the opposite direction through the protrusion, causing the pressure relief through hole to connect with the docking hole, so as to release the adsorption of the flexible suction cup on the quartz workpiece body.

[0020] The technical effects and advantages of this invention are as follows:

[0021] This invention uses a drive source to drive a lifting shaft to reciprocate up and down, and utilizes the alternating cooperation of the upper drive block, lower drive block and drive components to convert the lifting stroke into segmented rotation. This allows the quartz workpiece to simultaneously complete circumferential repositioning as it reciprocates through the detection area of ​​the visual inspection camera along the height direction. Thus, a single drive source can achieve both height direction scanning and continuous circumferential repositioning, reducing the need for independent rotary drive structures and their control coordination. This avoids detection omissions caused by inconsistent lifting and rotation rhythms, enabling high-purity quartz products with one open end to complete non-destructive testing of microcracks in both the height and circumferential directions within a relatively compact workstation.

[0022] This invention uses a centering component to simultaneously extend multiple centering blocks from the inside of the quartz workpiece body to correct its initial position, improving the positional accuracy between the quartz workpiece body and the lifting shaft. After centering, the centering blocks retract into the reciprocating lifting area to avoid continuous pressure on the quartz workpiece body during subsequent lifting and rotation. The contact end of the centering blocks adopts a flexible structure, and the flexible suction cup uses the weight of the quartz workpiece body to form an adsorption, keeping the quartz workpiece body stable during reciprocating lifting and segmented rotation. While ensuring positioning accuracy and motion stability, it reduces the concentrated force generated by rigid clamping of the outer wall or end, reducing the risk of surface scratches, end breakage, and the induction of new cracks. After the inspection is completed, the selective pressure relief component releases the adsorption of the flexible suction cup before the quartz workpiece body falls onto the support frame, making it easy to directly remove the quartz workpiece body and allow the lifting shaft to continue to move down and reset. Attached Figure Description

[0023] The disclosure of this invention is illustrated with reference to the accompanying drawings. It should be understood that the drawings are for illustrative purposes only and are not intended to limit the scope of protection of this invention. In the drawings, the same reference numerals are used to refer to the same parts:

[0024] Figure 1 This is a schematic diagram of the structure of the present invention;

[0025] Figure 2 This is a structural schematic diagram of the support frame, drive source, and quartz workpiece body of the present invention in a disassembled state.

[0026] Figure 3 This is a structural schematic diagram of the lifting shaft, the centering cylinder, and the support frame of the present invention in a disassembled state.

[0027] Figure 4 This is a schematic diagram of the overall structure of the lifting shaft and the centering cylinder of the present invention;

[0028] Figure 5 This is a schematic cross-sectional view of the upper end of the lifting shaft of the present invention in the state of being engaged with the center cylinder;

[0029] Figure 6 This is a schematic diagram showing different states of the protrusion of the present invention;

[0030] Figure 7 This is a schematic diagram of the overall structure of the rotating shaft and the protrusion of the present invention;

[0031] Figure 8 This is a schematic diagram of the internal structure of the through hole in this invention.

[0032] Legend: 1. Frame; 2. Support frame; 3. Vision inspection camera; 4. Quartz workpiece body; 5. Drive source; 6. Lifting shaft; 7. Centering cylinder; 8. Flexible suction cup; 9. Lower drive block; 10. Upper drive block; 11. Clearance channel; 12. Groove; 13. Centering block; 14. Cavity; 15. Pressure relief through hole; 16. Radial groove; 17. Elastic element; 18. Rotating shaft; 19. Docking hole; 20. Protrusion; 21. Moving part; 22. Torsion spring; 23. Through hole; 24. Drive element. Detailed Implementation

[0033] It is readily understood that, based on the technical solution of this invention, those skilled in the art can propose various interchangeable structural methods and implementations without altering the essential spirit of the invention. Therefore, the following detailed embodiments and accompanying drawings are merely illustrative examples of the technical solution of this invention and should not be considered as the entirety of the invention or as limitations or restrictions on the technical solution of this invention.

[0034] Reference Figures 1-8As shown, this invention provides a technical solution: a non-destructive testing device for microcracks in fused-molded high-purity quartz materials. This device is mainly used for visual inspection of microcracks in hollow high-purity quartz products that are open at one end and closed at the other. It can be used for quartz bell jars, quartz crucibles, closed-end quartz sleeves, and other fused-molded quartz products with internal cavities. These products can be applied in semiconductor, photovoltaic, optical, chemical, and aerospace fields. The device mainly includes a frame 1. During testing, the quartz workpiece body 4, open at one end, is placed inside the frame 1. A support frame 2 is installed on the frame 1. The frame 2 is used to support the quartz workpiece body 4. One or more support frames 2 can be set on the frame 1 according to the inspection cycle to form single-station or multi-station inspection. A vision inspection camera 3 is set on the upper side of the support frame 2. A centering cylinder 7 is set on the top of the support frame 2 for pre-positioning the quartz workpiece body 4. The upper outer periphery of the centering cylinder 7 is chamfered. The open end of the quartz workpiece body 4 is upside down on the outside of the centering cylinder 7 to achieve pre-positioning. The inner diameter of the quartz workpiece body 4 is larger than the diameter of the centering cylinder 7. The vision inspection camera 3 is located in the side area of ​​the quartz workpiece body 4 in the upside-down state.

[0035] The visual inspection camera 3 can be an industrial area scan camera, a line scan camera, or multiple industrial cameras arranged at intervals along the height direction, and is used in conjunction with an external lighting unit set around its periphery or mounting end. The external lighting unit can be a strip light source, a ring light source, or a polarized light source, and the lighting area corresponds to the acquisition area of ​​the visual inspection camera 3. During inspection, the illumination light shines on the side wall of the quartz workpiece body 4. The microcracks cause scattering, refraction, or local reflection changes to the incident light. The visual inspection camera 3 acquires information on the abrupt changes in brightness, linear anomalies, and texture discontinuities on the surface of the quartz workpiece body 4, thereby determining whether there are microcracks in the corresponding inspection area. The visual inspection camera 3 and the external lighting unit are all conventional technical means, and their specific detailed construction will not be described in detail.

[0036] In order to achieve comprehensive detection of the quartz workpiece body 4 in both the height and circumferential directions, a drive mechanism for controlling the lifting and rotation of the quartz workpiece body 4 is provided on the support frame 2. The drive mechanism includes a lifting component and a segmented rotating component.

[0037] In a preferred embodiment, the lifting component includes a through hole 23 vertically arranged on the support frame 2. A lifting shaft 6 is vertically and movably connected to the through hole 23. The upper end of the lifting shaft 6 is movably connected to the inner side of the centering cylinder 7, and the top end of the lifting shaft 6 can extend to the top of the centering cylinder 7. A drive source 5 for driving the lifting shaft 6 to rise and fall is installed on the frame 1. The drive source 5 is preferably a cylinder. The cylinder drives the lifting shaft 6 to rise and fall, and the lifting shaft 6 can push the quartz workpiece body 4 to rise and fall, thereby facilitating the visual inspection camera 3 to detect the height direction of the quartz workpiece body 4. The lifting stroke of the drive source 5 can be set according to the height of the quartz workpiece body 4 and the acquisition range of the visual inspection camera 3, so that the height range to be detected of the quartz workpiece body 4 can pass through the acquisition area of ​​the visual inspection camera 3 in sequence.

[0038] In a preferred embodiment, the segmented rotating component includes an upper driving block 10 and a lower driving block 9 mounted on the lower part of the lifting shaft 6. The lower driving block 9 is located below the upper driving block 10. Both the upper driving block 10 and the lower driving block 9 are evenly distributed along the circumference of the lifting shaft 6, and the upper driving block 10 and the lower driving block 9 are staggered along the circumference of the lifting shaft 6. The adjacent ends of the lower driving block 9 and the upper driving block 10 are both inclined, preferably spiral inclined surfaces adapted to the circumferential curvature of the lifting shaft 6. A driving member 24 is provided on the inner wall of the through hole 23. The driving member 24 is preferably a roller rotatably disposed inside the through hole 23. The driving member 24 is used to cooperate with the inclined surfaces at the ends of the upper driving block 10 and the lower driving block 9. A clearance channel 11 is formed between adjacent upper driving blocks 10, allowing the driving member 24 to pass through. The output shaft of the driving source 5 is rotatably connected to the lower end of the lifting shaft 6, preferably through a bearing. Initially, the driving member 24 is located in the clearance channel 11. At the upper end, after the lifting shaft 6 moves upward and lifts the quartz workpiece body 4, the drive component 24 enters between the upper drive block 10 and the lower drive block 9 via the clearance channel 11 relative to the lifting shaft 6. When the lifting shaft 6 continues to rise to the set position, the drive component 24 cooperates with the inclined surface of the lower drive block 9 and pushes the lifting shaft 6 to rotate by a set angle. At this time, the lower inclined surface of the adjacent upper drive block 10 rotates to the corresponding position of the drive component 24. Subsequently, when the lifting shaft 6 moves downward, the drive component 24 cooperates with the lower inclined surface of the upper drive block 10 and pushes the lifting shaft 6 to rotate by a set angle again. The rotation direction of the inclined surfaces of the upper drive block 10 and the lower drive block 9 is set so that the lifting shaft 6 rotates in segments along the same circumferential direction during the rising and falling strokes. Thus, when the drive source 5 periodically extends and retracts, the reciprocating lifting and circumferential segmented rotation of the quartz workpiece body 4 is realized through a single drive source 5, and the height and circumferential directions of the quartz workpiece body 4 are detected in conjunction with the vision inspection camera 3.

[0039] To improve the positional accuracy of the quartz workpiece body 4, a centering assembly is provided on the centering cylinder 7. The centering assembly includes multiple radial grooves 16 spaced circumferentially along the sidewall of the centering cylinder 7. Each radial groove 16 contains a centering block 13 that is movably arranged radially along the centering cylinder 7. An elastic element 17 for resetting the centering block 13 is provided between the sidewall of the centering block 13 and the inner wall of the radial groove 16. The upper sidewall of the lifting shaft 6 has grooves 12 corresponding to the centering blocks 13. The upper end of the groove 12 is the centering area, and the lower end is the reciprocating lifting area during detection. The depth of the reciprocating lifting area is greater than the depth of the centering area. Both the upper and lower ends of the centering area are inclined surfaces, and the lower inclined surface smoothly transitions to the inner wall of the reciprocating lifting area. In the initial state, the lifting shaft 6... The upper end of the lifting shaft 6 is located below the centering block 13. When the lifting shaft 6 rises, the outer circumferential surface of the upper end of the lifting shaft 6 and the inclined surface of the upper end of the centering area push each centering block 13 outward along the corresponding radial groove 16. Multiple centering blocks 13 lightly abut against the inner wall of the quartz workpiece body 4 from different circumferential positions, so that the axis of the quartz workpiece body 4 is approximately coincident with the axis of the centering cylinder 7. As the lifting shaft 6 continues to rise, the end of each centering block 13 near the axis of the centering cylinder 7 enters the deeper reciprocating lifting area through the inclined surface at the lower end of the centering area. The elastic element 17 drives the centering block 13 to retract inward and release the contact with the inner wall of the quartz workpiece body 4. Subsequently, the lifting shaft 6 can drive the quartz workpiece body 4 to rise, fall and rotate within the corresponding stroke of the reciprocating lifting area.

[0040] The elastic element 17 is preferably a tension spring or a compression spring.

[0041] Since the end of the centering block 13 near the axis of the centering cylinder 7 is located in the reciprocating lifting area at the lower end of the groove 12 during the reciprocating lifting test, in order to avoid interference with the rotation of the lifting shaft 6, the centering cylinder 7 can be rotatably mounted on the support frame 2 through a bearing, so that the centering cylinder 7 rotates synchronously with the lifting shaft 6 when the lifting shaft 6 rotates.

[0042] In some embodiments, a movable element 21 is provided at one end of the centering block 13 near the axis of the centering cylinder 7. The movable element 21 can be a rotatable roller or a ball bearing, etc. It can rotate when the centering block 13 and the inner wall of the groove 12 are relatively displaced, which can reduce frictional resistance and wear.

[0043] In some embodiments, a flexible structure, such as rubber or silicone, can be provided at the end of the centering block 13 away from the axis of the centering cylinder 7 to avoid hard damage to the interior of the quartz workpiece body 4.

[0044] In addition, to increase the stability between the quartz workpiece body 4 and the lifting shaft 6, a flexible suction cup 8 is provided at the top of the lifting shaft 6. The flexible suction cup 8 is preferably made of a plastic material with elastic deformation capability, such as silicone or polyurethane. The flexible suction cup 8 has an adsorption cavity that can selectively isolate it from the outside world. When the quartz workpiece body 4 is still supported by the support frame 2 and the lifting shaft 6 rises, the flexible suction cup 8 first contacts the inner wall of the closed end of the quartz workpiece body 4. The continued upward movement of the lifting shaft 6 and the gravity of the quartz workpiece body 4 cause the flexible suction cup 8 to be elastically compressed. Some of the air inside the flexible suction cup 8 is discharged from the lip before the lip of the suction cup is completely sealed, thereby adsorbing the quartz workpiece body 4. The top of the lifting shaft 6 forms a vertical support for the quartz workpiece body 4. The adsorption effect formed by the flexible suction cup 8 is mainly used to suppress the shaking, detachment and relative slippage of the quartz workpiece body 4 during the reciprocating lifting and low-speed rotation process.

[0045] To facilitate the subsequent separation and unloading of the quartz workpiece body 4 from the flexible suction cup 8, a selective pressure relief assembly is provided on the lifting shaft 6 to cooperate with the centering block 13. The selective pressure relief assembly includes a cavity 14 located on the inner side of the upper end of the lifting shaft 6 and communicating with the adsorption cavity of the flexible suction cup 8. The lower end of the cavity 14 corresponds to the upper end of the reciprocating lifting area. A rotating shaft 18 is rotatably mounted on the inner wall of the upper end of one of the reciprocating lifting areas. Specifically, an arc-shaped groove adapted to the rotating shaft 18 can be provided on the inner wall of the reciprocating lifting area. The rotating shaft 18 is rotatably mounted in the arc-shaped groove. A docking hole 19 communicating with the arc-shaped groove is provided on the inner wall of the lower end of the cavity 14. A sealing ring or sealing strip can be provided between the rotating shaft 18 and the arc-shaped groove to ensure the sealing of the periphery of the docking hole 19. A protrusion 20 protruding from the reciprocating lifting area is provided. The centering block 13 can push the protrusion 20 and drive the rotating shaft 18 to rotate. A pressure relief through hole 15 is provided on one side of the rotating shaft 18 and on the protrusion 20. The pressure relief through hole 15 is configured as follows: when the lifting shaft 6 moves upward and passes the centering block 13, the centering block 13 drives the rotating shaft 18 to rotate downward through the protrusion 20. At this time, the pressure relief through hole 15 is misaligned with the docking hole 19, and the passage between the cavity 14 and the outside is closed. When the lifting shaft 6 moves downward and passes the centering block 13 after the detection is completed, the centering block 13 drives the rotating shaft 18 to flip upward through the protrusion 20. The pressure relief through hole 15 is connected with the docking hole 19, so that the cavity 14 and the adsorption cavity of the flexible suction cup 8 are connected to the outside and the air is vented and pressure is relieved.

[0046] To achieve the reset of the rotating shaft 18, a torsion spring 22 is provided between the end of the rotating shaft 18 and the inner wall of the reciprocating lifting area. Initially, the protrusion 20 corresponds to the centering block 13. When the centering block 13 pushes the protrusion 20, the torsion spring 22 twists and deforms. After the centering block 13 separates from the protrusion 20, the torsion spring 22 drives the rotating shaft 18 and the protrusion 20 to return to their initial positions. When the quartz workpiece body 4 is reciprocated for lifting detection, the reciprocating lifting section of the lifting shaft 6 is located below the rotating shaft 18. Therefore, the centering block 13 will not repeatedly trigger the selective pressure relief component in each detection stroke.

[0047] After the quartz workpiece body 4 is inspected, the pressure relief through hole 15 is connected to the docking hole 19 during the descent of the lifting shaft 6. The quartz workpiece body 4 is released from the adsorption of the flexible suction cup 8 and is removed by manual or robotic arm. Then the lifting shaft 6 continues to move down to the initial height and waits for the subsequent quartz workpiece body 4 to be inspected to be loaded.

[0048] Working principle:

[0049] In use, the quartz workpiece body 4 to be inspected is placed upside down on the outside of the centering cylinder 7 with the open end facing downwards, and the open end of the quartz workpiece body 4 is supported by the support frame 2. After the vision inspection camera 3 and its external lighting unit are activated, the drive source 5 drives the lifting shaft 6 to rise. The upper end of the lifting shaft 6 acts on multiple centering blocks 13 in sequence, causing the multiple centering blocks 13 to move radially outwards and center the quartz workpiece body 4 from different directions. After the lifting shaft 6 continues to rise, the centering blocks 13 enter the reciprocating lifting area and retract under the action of the elastic element 17. The flexible suction cup 8 then contacts, compresses and forms a negative pressure adsorption with the inner wall of the closed end of the quartz workpiece body 4. The lifting shaft 6 lifts the quartz workpiece body 4 off the support frame 2.

[0050] During the inspection, the drive source 5 drives the lifting shaft 6 to rise and fall periodically according to the set stroke. The quartz workpiece body 4 moves back and forth with the lifting shaft 6 within the acquisition area of ​​the vision inspection camera 3. The drive component 24 alternately cooperates with the inclined surfaces of the lower drive block 9 and the upper drive block 10 during the rising and falling strokes of the lifting shaft 6, so that the lifting shaft 6 and the quartz workpiece body 4 rotate in segments along the same circumference during each lifting and falling process. The vision inspection camera 3 can continuously acquire images. After multiple lifting and rotation cycles, different height areas and different circumferential areas of the quartz workpiece body 4 pass through the inspection field of view in sequence. The external illumination unit makes the microcrack location form an optical anomaly that is different from the normal quartz area. Based on this, the vision inspection camera 3 obtains the microcrack detection image of the quartz workpiece body 4.

[0051] After the test is completed, the drive source 5 drives the lifting shaft 6 to descend, the centering block 13 pushes the protrusion 20 to flip upward, so that the pressure relief through hole 15 is connected to the docking hole 19, the cavity 14 and the adsorption cavity of the flexible suction cup 8 are connected to the outside, and the negative pressure of the flexible suction cup 8 is released; before the quartz workpiece body 4 falls to the support frame 2, the quartz workpiece body (4) is removed by manual or robotic arm, and then the lifting shaft 6 continues to move down and drives the corresponding parts to return to the initial state, so as to wait for the next workpiece to be tested to be loaded.

[0052] The technical scope of this invention is not limited to the content described above. Those skilled in the art can make various modifications and variations to the above embodiments without departing from the technical concept of this invention, and all such modifications and variations should fall within the protection scope of this invention.

Claims

1. A non-destructive testing device for microcracks in fused high-purity quartz material, characterized in that, It includes a frame, a support frame mounted on the frame for carrying the quartz workpiece body to be inspected, a vision inspection camera set on the side of the support frame, a centering cylinder set on the support frame for pre-positioning the quartz workpiece body, and a drive mechanism for moving the quartz workpiece body. The drive mechanism includes a lifting component and a segmented rotating component. The lifting component includes a vertically movable and rotatable lifting shaft that passes through the support frame and the centering cylinder, and a drive source that is connected to the lifting shaft and drives the lifting shaft to reciprocate up and down. The segmented rotating component includes an upper drive block and a lower drive block mounted on the lifting shaft, and a drive component mounted on the support frame. The upper drive block and the lower drive block are respectively provided with inclined surfaces that cooperate with the drive component. When the lifting shaft reciprocates, the drive component alternately acts on the lower drive block and the upper drive block to drive the lifting shaft and the quartz workpiece body to rotate in segments, so that different height areas and circumferential areas of the quartz workpiece body pass through the detection area of ​​the visual inspection camera in sequence. The centering cylinder is equipped with a centering assembly, which includes multiple radial grooves spaced apart circumferentially along the centering cylinder, a centering block movably disposed within the radial grooves along the radial direction of the centering cylinder, and an elastic element disposed between the centering block and the inner wall of the radial groove. The upper side wall of the lifting shaft is provided with grooves corresponding to the centering blocks. The grooves include a centering area at the top and a reciprocating lifting area below the centering area. The depth of the reciprocating lifting area is greater than the depth of the centering area. Inclined surfaces are provided at the upper and lower ends of the centering area. When the lifting shaft rises, the centering block moves to the outside of the centering cylinder through the centering area and abuts against the inner wall of the quartz workpiece body. After the lifting shaft continues to rise, the centering block enters the reciprocating lifting area and retracts under the action of the elastic element to release the continuous abutment against the quartz workpiece body. The centering cylinder is rotatably connected to the support frame. When the quartz workpiece body is lifted and rotated in sections, the end of the centering block near the lifting shaft is located in the reciprocating lifting area, and the centering cylinder can rotate with the lifting shaft.

2. The microcrack non-destructive testing device for fused-molded high-purity quartz material according to claim 1, characterized in that, The lower drive block is located below the upper drive block. Both the upper and lower drive blocks are distributed at intervals along the circumference of the lifting shaft, and the upper and lower drive blocks are staggered along the circumference of the lifting shaft.

3. The microcrack non-destructive testing device for fused-molded high-purity quartz material according to claim 2, characterized in that, An obstacle avoidance channel is formed between adjacent upper drive blocks. When the lifting shaft rises, the drive component can enter between the upper drive block and the lower drive block through the obstacle avoidance channel relative to the lifting shaft.

4. The microcrack non-destructive testing device for fused-molded high-purity quartz material according to claim 3, characterized in that, The inclined planes of the upper and lower drive blocks are configured to rotate in segments along the same circumference during the lifting and lowering strokes.

5. The non-destructive testing device for microcracks in fused-molded high-purity quartz material according to claim 1, characterized in that, One end of the quartz workpiece body is open and the other end is closed. A flexible suction cup is provided at the top of the lifting shaft. When the lifting shaft rises, the flexible suction cup is attached to the inner wall of the closed end of the quartz workpiece body, and under the action of the gravity of the quartz workpiece body, it is pressed to expel at least part of the gas in the flexible suction cup, so as to form an adsorption on the quartz workpiece body.

6. The microcrack non-destructive testing device for fused-molded high-purity quartz material according to claim 5, characterized in that, The lifting shaft is provided with a selective pressure relief component, which includes a cavity located on the inner side of the upper end of the lifting shaft and communicating with the adsorption cavity of the flexible suction cup, a rotating shaft rotatably located in the reciprocating lifting area of ​​the groove, a docking hole located on the inner wall of the cavity and corresponding to the rotating shaft, and a protrusion located on one side of the rotating shaft and protruding into the reciprocating lifting area. The rotating shaft and the protrusion are provided with interconnected pressure relief holes. The centering block can drive the rotating shaft to rotate by pushing the protrusion, so that the pressure relief holes can be selectively connected to or offset from the docking holes.

7. The microcrack non-destructive testing device for fused-molded high-purity quartz material according to claim 6, characterized in that, A torsion spring is provided between the rotating shaft and the lifting shaft; When the lifting shaft moves upward past the centering block, the centering block drives the rotating shaft to rotate through the protrusion, causing the pressure relief through hole to be misaligned with the docking hole; after the inspection is completed, when the lifting shaft moves downward past the centering block, the centering block drives the rotating shaft to rotate in the opposite direction through the protrusion, causing the pressure relief through hole to connect with the docking hole, thereby releasing the adsorption of the flexible suction cup on the quartz workpiece body.

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