Multifunctional test probe with auxiliary structure and application thereof

Abstract

This invention provides a multifunctional test probe with an auxiliary structure and its application. The probe includes a seat, a probe tip, and an auxiliary tip arranged laterally at intervals. The probe tip is connected to the seat via a flexible probe cantilever, and the auxiliary tip is connected to the seat via an auxiliary cantilever. The probe tip has a limiting part, and the auxiliary tip has a serrated blocking part, which are arranged opposite to each other. The blocking part forms multiple grooves corresponding to different overdrive ranges. The auxiliary tip, auxiliary cantilever, and limiting part constitute the auxiliary structure. In its natural state, the probe tip is located above the auxiliary tip. When pressed down by an external force, the probe tip moves downward. After the external force is removed, the limiting part locks into the corresponding groove. This invention achieves multi-level self-locking and accurate overdrive reading through the cooperation of the limiting part and the serrated blocking part. The auxiliary structure helps the probe tip to complete wear detection and lateral slip judgment. The structure is simple, the function is highly integrated, and it can significantly improve wafer testing efficiency and quality while reducing testing costs.

Description

Technical Field

[0001] This application belongs to the field of semiconductor wafer testing technology, and specifically relates to a multifunctional test probe with an auxiliary structure and its application. Background Technology

[0002] With the rapid development of AI-driven memory chips, the pitch of chips is constantly decreasing and the I / O density is constantly increasing. The market demand for cantilever beam structure MEMS probes for memory chip wafer inspection is constantly increasing. At the same time, in order to increase production, the size of chip wafers is constantly increasing, which in turn leads to the corresponding increase in the number of pins on the MEMS probe card and the decrease in the tip pitch. This results in a growing difference between the performance of the probes on the whole card and the performance of a single pin, especially the overdrive (AOT) and probe height. Therefore, there is an urgent need for a multifunctional probe structure that can accurately reflect the performance of the probes on the whole card. Summary of the Invention

[0003] The purpose of this application is to overcome the shortcomings of the prior art and provide a multifunctional test probe with an auxiliary structure and its application.

[0004] To achieve the above objectives, in a first aspect, this application provides: a multifunctional test probe with an auxiliary structure, the multifunctional test probe comprising a base, a probe tip, and an auxiliary tip arranged at intervals along a transverse direction; the probe tip is connected to the base via a flexible probe cantilever, and the auxiliary tip is connected to the base via an auxiliary cantilever; the probe tip has a limiting portion protruding toward the auxiliary tip, and the auxiliary tip has a blocking portion disposed opposite to the limiting portion, the blocking portion being serrated, the serrated structure being arranged longitudinally... Multiple grooves, each corresponding to a different overdrive range; the auxiliary tip, auxiliary cantilever, and limiting part constitute the auxiliary structure; the probe tip is in its initial position when the probe cantilever is in its natural state, and the probe tip in the initial position is located above the auxiliary tip; the probe tip can move downwards in the longitudinal direction under the action of external force, and when the external force is removed, the limiting part can engage with the corresponding groove and lock with the blocking part to keep the probe tip in the locked position within the corresponding overdrive range.

[0005] In one feasible embodiment, the blocking portion has a plurality of serrated protrusions arranged sequentially along the longitudinal direction, each of the serrated protrusions having an inclined first surface and a horizontally extending second surface, the first surface being located above the second surface, and both overlapping near the tip of the probe.

[0006] In one feasible embodiment, the uppermost groove is located above the first surface of the uppermost serrated protrusion, the lowermost groove is located below the second surface of the lowermost serrated protrusion, and the intermediate groove is defined by the second surface of each of the serrated protrusions and the first surface of the lowerly adjacent serrated protrusion.

[0007] In one feasible embodiment, the second surface of each of the serrated protrusions has a first dimension in the lateral direction, and the first dimension of the plurality of serrated protrusions gradually increases from top to bottom.

[0008] In one feasible embodiment, the limiting portion has a horizontally extending upper surface and an inclined lower surface, the upper surface being located above the lower surface and both coinciding with the ends of the auxiliary needle tip; when the probe tip is in the initial position, the upper surface is parallel to the second surface, and the horizontal plane containing the upper surface intersects with the end of the uppermost serrated protrusion of the first surface away from the probe tip.

[0009] In one feasible embodiment, in the longitudinal direction, the distance between the first and second surfaces of each of the serrated protrusions gradually increases from the probe tip to the auxiliary tip, and the maximum distance between the first and second surfaces of the plurality of serrated protrusions is equal.

[0010] In one feasible embodiment, the upper surface of the limiting portion has a second dimension in the lateral direction, and there is a gap between the probe tip and the auxiliary tip to accommodate the limiting portion and the blocking portion. The sum of the first dimension and the second dimension is greater than the dimension of the gap in the lateral direction.

[0011] In one feasible embodiment, the probe cantilever has multiple hollowed-out portions, each of which is rectangular; the multiple hollowed-out portions are spaced apart along the longitudinal direction.

[0012] In one feasible embodiment, the base, probe tip, auxiliary tip, probe cantilever, and auxiliary cantilever are integrally molded.

[0013] In one feasible embodiment, the top of the auxiliary needle tip has a recessed conical hole, the recessed direction of which is opposite to the orientation of the probe needle tip.

[0014] Secondly, this application provides: an application of a multifunctional test probe with an auxiliary structure, including a MEMS probe card having the multifunctional test probe provided in the first aspect and probe card testing using the MEMS probe card.

[0015] This application has the following advantages compared with the prior art:

[0016] This invention achieves multi-position self-locking of the probe tip in the longitudinal direction and accurate reading of the AOT range by setting mutually cooperating limiting parts and serrated blocking parts on the probe tip and auxiliary tip. The self-locking stability of the probe tip is improved by the gradual design of the serrated lateral dimensions and the complementary shape design of the limiting parts. A tapered hole at the top of the auxiliary tip enables rapid and accurate detection of tip wear. By comparing the AOT range of the probe, the direction and extent of lateral slippage can be determined online. This invention has a simple structure and high functional integration, which can significantly improve the efficiency and quality of wafer testing and reduce testing costs. Attached Figure Description

[0017] Figure 1 This application provides a schematic diagram of a multifunctional test probe with an auxiliary structure.

[0018] Figure 2 for Figure 1 A magnified view of a portion of point A in the middle;

[0019] Figure 3 This is a schematic diagram of the original probe structure.

[0020] The components are: 1. base; 2. probe tip; 21. limiting part; 211. upper surface; 212. lower surface; 3. auxiliary tip; 31. blocking part; 311. serrated protrusion; 3111. first surface; 3112. second surface; 312. groove; 32. conical hole; 4. probe cantilever; 41. hollow part; 5. auxiliary cantilever; 6. alignment block. Specific Implementation

[0021] To illustrate the technical content, structural features, achieved objectives, and effects of the invention in detail, the technical solutions of the embodiments of this application will be described below with reference to the accompanying drawings. Obviously, the described embodiments are only a part of the embodiments of this application, and not all of them. In the following description, for illustrative purposes, numerous specific details are set forth to provide a detailed description of various exemplary embodiments or implementations of the invention. However, various exemplary embodiments may also be implemented independently without these specific details or in one or more equivalent arrangements. Furthermore, the various exemplary embodiments may differ, but are not necessarily exclusive. For example, the specific shape, construction, and characteristics of the exemplary embodiments may be used or implemented in another exemplary embodiment without departing from the inventive concept.

[0022] The "vertical direction" mentioned in this application refers to Figure 1 The vertical direction shown is different from the horizontal direction described in this application. Figure 1The left and right directions are shown.

[0023] This application provides a multifunctional test probe with an auxiliary structure. This multifunctional test probe can be used for various tests of MEMS probe cards, and can accurately and quickly respond to test results, effectively improving test efficiency.

[0024] like Figure 1 As shown, the multifunctional test probe includes a base 1, a probe tip 2, and an auxiliary tip 3 arranged at intervals along the left-right direction. The base 1 is used to fix the entire probe on the base plate of the probe card. Both the probe tip 2 and the auxiliary tip 3 extend upward relative to the base 1. The probe tip 2 is connected to the base 1 via a flexible probe cantilever 4, and the auxiliary tip 3 is connected to the base 1 via an auxiliary cantilever 5.

[0025] In this embodiment, the base 1, probe tip 2, auxiliary tip 3, probe cantilever 4, and auxiliary cantilever 5 are integrally molded. This multifunctional test probe is integrally formed through a metal deposition process. First, a metal seed layer is deposited on the surface of a silicon substrate; then, photoresist is spin-coated, patterned, exposed, developed, and dried sequentially on the surface of the metal seed layer; next, an alloy plating layer is deposited, and excess plating is removed by a polishing process; then, residual photoresist is removed; finally, the formed probe is released from the frame using an etching solution to form a multifunctional test probe. The alloy plating layer is a nickel-cobalt alloy plating.

[0026] The probe cantilever 4 has multiple rectangular cutouts 41, which are spaced apart along the vertical direction and integrally formed during the metal deposition process. The cutouts 41 reduce the equivalent bending stiffness of the probe cantilever 4, making the probe tip 2 more compliant during downward pressure. Simultaneously, the spaced distribution of the cutouts 41 helps regulate the stress distribution of the probe cantilever 4, avoiding stress concentration and extending fatigue life. The solid portion between adjacent cutouts 41 forms a reinforcing rib structure, ensuring the guiding accuracy of the probe cantilever 4 while providing appropriate elastic restoring force. This allows the probe tip 2 to bend under external force and return to its natural state after the force is removed. The length of the probe cantilever 4 in the lateral direction is greater than its width in the vertical direction to achieve a larger range of elastic deformation.

[0027] The auxiliary cantilever 5 has greater rigidity than the probe cantilever 4. During the downward pressure of the probe tip 2, the auxiliary cantilever 5 does not undergo significant bending deformation, thus providing stable support for the auxiliary tip 3. The auxiliary cantilever 5 is positioned outside the probe cantilever 4 to prevent the probe cantilever 4 from affecting its movement during elastic bending, thereby ensuring the normal operation of this multifunctional test probe.

[0028] The probe tip 2 has a limiting part 21, which is located on the side surface of the probe tip 2 and protrudes toward the auxiliary tip 3.

[0029] like Figure 1 , 2 As shown, the auxiliary needle tip 3 has a blocking portion 31 disposed opposite to the limiting portion 21. The blocking portion 31 is located on the side surface of the auxiliary needle tip 3 and protrudes toward the probe needle tip 2. The blocking portion 31 is serrated, and the serrated structure forms a plurality of grooves 312 arranged sequentially in the vertical direction, with the opening of each groove 312 facing toward the probe space 2. In the detection of probe overdrive, the plurality of grooves 312 correspond to different overdrive ranges.

[0030] The auxiliary tip 3, the auxiliary cantilever 5, and the limiting part 21 on the probe tip 2 constitute an auxiliary structure. This auxiliary structure can accurately reflect the slippage of the probe tip, the wear of the probe tip, and the actual penetration amount of the probe tip, making it easier for operators to observe the test results and reducing the analysis time of the test and the maintenance cost of the subsequent probe.

[0031] When the probe cantilever 4 is in its natural state, the probe tip 2 is in its initial position, located above the auxiliary tip 3. In its natural state, the tip of the probe tip 2 is closer to the external force than the top of the auxiliary tip 3. When the external force presses down, the probe tip 2 first contacts the external force, causing the probe cantilever 4 to bend. Under the downward pressure of the external force, the probe tip 2 moves downward to contact the auxiliary tip 3, and the limiting part 21 on the probe tip 2 can engage with one of the grooves 312 of the blocking part 31. When the external force retracts, the cooperation between the limiting part 21 and the blocking part 31 allows the probe tip 2 to remain in a self-locking position. When the probe tip 2 is in the self-locking position, the limiting part 21 is blocked by the blocking part 31 due to the upward tendency of the probe cantilever 4. The limiting part 21 is restricted within the corresponding groove 312 and cannot retract, forming a self-locking between the probe tip 2 and the auxiliary tip 3. This allows the operator to confirm the overdrive range by checking the groove 312 into which the limiting part 21 is engaged. The greater the downward pressure distance of the probe tip 2, the greater the downward movement distance of the limiting part 21, allowing it to engage in the lower groove 312. Therefore, the upper groove 312 corresponds to a smaller overdrive range, and the lower groove 312 corresponds to a larger overdrive range.

[0032] The blocking portion 31 has a plurality of serrated protrusions 311 arranged sequentially in a vertical direction. Each serrated protrusion 311 has an inclined first surface 3111 and a horizontally extending second surface 3112. The first surface 3111 is located above the second surface 3112, and the two coincide near the end of the probe tip 2 (i.e., they intersect at the tip of the serrated protrusion 311). The uppermost groove 312 is located above the first surface 3111 of the uppermost serrated protrusion 311; the lowermost groove 312 is located below the second surface 3112 of the lowermost serrated protrusion 311; the middle groove 312 is defined by the second surface 3112 of each serrated protrusion 311 and the first surface 3111 of the lower adjacent serrated protrusion 311, such that the groove 312 forms a groove with a "V" shaped cross section for accommodating at least a portion of the limiting portion 21. The distance between the first surface 3111 and the second surface 3112 of each serrated protrusion 311 gradually increases from the probe tip 2 towards the auxiliary tip 3. Each serrated protrusion 311 has a maximum distance H, and the maximum distance H of multiple serrated protrusions 311 is equal to ensure that the longitudinal constraint capability of each groove 312 on the limiting part 21 is consistent. In the embodiment of this application, in the vertical direction, the distance between the tip of the probe tip 2 and the upper end face of the auxiliary tip 3 is greater than the sum of the maximum distances H of multiple serrated protrusions 311.

[0033] The limiting part 21 has a horizontally extending upper surface 211 and an obliquely extending lower surface 212. The upper surface 211 is located above the lower surface 212, and the two coincide near the ends of the auxiliary needle tip 3 (i.e., they intersect at the tip of the limiting part 21). The distance between the upper surface 211 and the lower surface 212 gradually decreases from the probe needle tip 2 to the auxiliary needle tip 3.

[0034] When the probe tip 2 is in its initial position, the upper surface 211 is parallel to the second surface 3112, and the horizontal plane on which the upper surface 211 is located intersects with the end of the first surface 3111 away from the probe tip 2, so that the tip shape of the limiting part 21 is complementary to the tip shape of the serrated protrusion 311. When the probe tip 2 moves downward, the lower surface 212 with the same inclination direction slides against the first surface 3111 of the serrated protrusion 311, so that when the limiting part 21 of the probe tip 2 is pressed down by an external force, it can slide along the first surface 3111 and enter the next groove 312. When the limiting part 21 continues to move downward, it will pass over the current serrated protrusion 311 and enter the groove 312 below the serrated protrusion 311; when the limiting part 21 is pressed down by an external force, the limiting part 21 slides over the first surface 3111 of the serrated protrusion 311 below the groove 312, passes over the next serrated protrusion 311, and enters the next groove 312. When the downward pressure on the probe tip 2 is removed, its upward rebound tendency is blocked by the most recently passed serrated protrusion 311. The upper surface 211 of the limiting part 21 abuts against the second surface 3112 of the blocking serrated protrusion 311, and the abutting upper surface 211 and the second surface 3112 cannot provide the force to make the limiting part 21 slide upward. The limiting part 21 is locked in the current groove 312, so that the probe tip 2 is kept in the self-locking position and cannot move up and down, thereby improving the stability of the self-locking.

[0035] Each serrated protrusion 311 has a second surface 3112 with a first dimension L1 in the left-right direction. The first dimension L1 of the multiple serrated protrusions 311 gradually increases from top to bottom, that is, the first dimension L1 of each serrated protrusion 311 is smaller than the first dimension L1 of the adjacent serrated protrusion 311 below. This design makes the depth of the groove 312 greater as it goes lower, so that when the probe slides laterally under pressure, the limiting part 21 on the probe tip 2 can also be inserted into the corresponding groove 312, which can reflect the degree of slippage of the probe tip.

[0036] The upper surface 211 of the limiting part 21 has a second dimension L2 in the left-right direction.

[0037] A gap exists between the side surface of the limiting part 21 on the probe tip 2 and the side surface of the blocking part 31 on the auxiliary tip 3, sufficient to accommodate the limiting part 21 and the blocking part 31. In this embodiment, the sum of the first dimension L1 and the second dimension L2 is greater than the dimension L3 of the gap in the left-right direction. This structural design ensures that the limiting part 21 and the serrated protrusion 311 overlap in the left-right direction and are staggered in the up-down direction, so that the limiting part 21 can reliably be engaged in the groove 312 without slipping over the surface of the blocking part 31 due to insufficient lateral dimension. This multifunctional test probe is used as a monitoring needle in probe card testing. After the limiting part 21 of the probe tip is engaged in the groove 312, it does not need to be removed. After testing, the operator reads the overdrive range, and the used multifunctional test probe card can be discarded.

[0038] In this embodiment, the top of the auxiliary needle tip 3 is provided with a conical hole 32, the concave direction of which is opposite to the orientation of the probe tip. This conical hole 32 serves as a measurement reference point for wear testing. The conical hole 32 is a conical recess with an opening diameter larger than its bottom diameter and a depth of 10 μm.

[0039] This application also provides various applications of the multifunctional test probe, including MEMS probe cards equipped with the multifunctional test probe and probe card AOT test methods, wear tests and lateral slip tests using MEMS probe cards equipped with the multifunctional test probe.

[0040] To improve testing accuracy, MEMS probe cards are divided into multiple test areas, with at least one multi-functional test probe installed in each area to ensure that each test area has a multi-functional test probe that can quickly provide test results.

[0041] An AOT testing method for a probe card, employing a MEMS probe card with multifunctional test probes, includes the following steps:

[0042] S1 provides a MEMS probe card, which is placed on the test equipment with its probe tip facing upwards;

[0043] S2, a wafer is provided, which is driven by a preset pressure to press down from above the MEMS probe card, and the wafer moves downward a preset distance from contact with the probe tip of the MEMS.

[0044] S3, the wafer plate retracts upwards;

[0045] S4. Remove the MEMS probe card and observe the multi-functional test probes on it. Based on the grooves into which the limiting parts of each multi-functional test probe are inserted, obtain the corresponding overdrive range.

[0046] The number and size of the sawtooth protrusions are set according to different measurement accuracies, so that each groove corresponds to a specific AOT value range. For example, the overdrive (AOT) range of the entire blocking part is 0 to 200 μm. Four sawtooth protrusions are set to form five grooves, and the maximum distance between two adjacent sawtooth protrusions is 40 μm. The uppermost groove corresponds to an AOT range of 0 to 40 μm, the second groove corresponds to an AOT range of 40 to 80 μm, the third groove corresponds to an AOT range of 80 to 120 μm, the fourth groove corresponds to an AOT range of 120 to 160 μm, and the fifth groove corresponds to an AOT range of 160 to 200 μm. By observing or detecting the position of the limiting part 21 currently engaged in the groove 312, the current AOT value range of the probe tip can be determined. When the limiting part 21 is engaged in the second groove, the AOT range of the probe tip is 40-80 μm. When the limiting part 21 is engaged in the fifth groove, the AOT range of the probe tip is 160-200 μm.

[0047] A lateral slip test for a probe card is provided, which judges the slippage of the probe tip based on the overdrive range obtained by the aforementioned probe card AOT test method. If the AOT range obtained in a certain area is larger than a preset distance, it means that the resistance encountered by the probe tip when it deflects is small, and it is determined that the bias direction of the probe tip in that area is the same as the slippage direction; if the AOT range obtained in a certain area is smaller than the preset distance, it means that the resistance encountered by the probe tip when it deflects is large, and it is determined that the bias direction of the probe tip in that area is opposite to the slippage direction; if the AOT range obtained in a certain area matches the preset distance, it is determined that the probe tip in that area has not slipped.

[0048] When the probe card experiences lateral displacement or tilting, the probe tips will slide laterally on the wafer. This lateral sliding causes additional lateral resistance or assistance to the probe tips during downward pressure, thus affecting the actual position of the locking groove. If the bias direction of the probe tip is the same as the sliding direction, the tip experiences less resistance in the sliding direction, making it easier to reach a larger downward pressure position, resulting in a larger AOT range value. If the bias direction of the probe tip is opposite to the sliding direction, the tip experiences greater resistance in the sliding direction, hindering downward pressure, resulting in a smaller AOT range value. The severity of the sliding is assessed by the difference between the AOT range and the preset distance; a larger difference indicates a greater amount of sliding. Using the various multi-functional test probes on the probe card, rapid, online judgment and analysis can be performed without the need for expensive external testing equipment, significantly reducing testing costs and time.

[0049] A wear test for a probe card uses the lowest point of the bottom of the conical hole of multiple multifunctional test probes of the MEMS probe card as a reference point. The distance between the reference point and the tip of the corresponding multifunctional test probe in the vertical direction is measured. By comparing the change in this distance before and after the wear test, the wear amount of the probe tip can be determined.

[0050] In previous wear tests, measurements were taken using the original probe, such as... Figure 3 As shown, compared with the multifunctional test probe of this application, the original probe lacks an auxiliary structure including an auxiliary tip, and its probe tip 2 also lacks a limiting part. The original probe's reference component in wear testing is the alignment block 6 protruding from the side of the probe tip 2. In previous wear tests, the wear condition of the tip was determined by measuring the reference distance between the tip of the probe tip 2 and the top of the alignment block 6. By comparing the changes in the reference distance, the tip wear value could be obtained: Tip wear value = Initial reference distance - Reference distance during testing. However, in practice, because the edge of the alignment block 6 is prone to chamfering during manufacturing, the reference distance will exceed its maximum value D. max and minimum value D min The difference between the measured and actual wear patterns varies. Typically, the chamfer radius is 2μm, but the maximum actual test error can reach 2μm, resulting in a significant discrepancy between the measured needle tip wear and the actual needle tip wear.

[0051] This invention uses optical measuring instruments (such as laser rangefinders, confocal microscopes, etc.) to measure the longitudinal distance between the lowest point of the conical aperture and the tip of the probe, denoted as the dimension D0 before wear. Then, after the probe card undergoes a certain number of wafer tests, the vertical distance between the tip of the probe and the bottom of the conical aperture is measured again, denoted as the dimension D1 after wear. Finally, the two measurements are compared to calculate the wear amount ΔD = D0 - D1. The degree of wear of the probe tip can be determined based on the magnitude of ΔD, thus deciding whether the probe needs to be replaced.

[0052] Since the tapered hole is located on the auxiliary probe tip, and the auxiliary probe tip does not directly contact the wafer during the test, the position of the tapered hole remains stable and is not affected by wear, making it an ideal measurement reference point.

[0053] This invention achieves multi-position self-locking of the probe tip and accurate reading of the AOT range by setting mutually cooperating limiting parts and serrated blocking parts on the probe tip and auxiliary tip; the self-locking stability is improved by the gradient design of the lateral dimension of the serrations and the complementary shape design of the limiting parts; the tapered hole at the top of the auxiliary tip enables rapid and accurate detection of tip wear; and the lateral slip direction and degree can be determined online by comparing the AOT range of the probe. This invention has a simple structure and high functional integration, which can significantly improve the efficiency and quality of wafer testing and reduce testing costs.

[0054] The foregoing has shown and described the basic principles, main features, and advantages of the present invention. Those skilled in the art should understand that the present invention is not limited to the above embodiments. The embodiments and descriptions in the specification are merely illustrative of the principles of the invention. Various changes and modifications can be made to the invention without departing from its spirit and scope. The scope of protection of the present invention is defined by the appended claims, specification, and their equivalents.

Claims

1. A multifunctional test probe with an auxiliary structure, characterized in that, The multifunctional test probe includes a base, a probe tip, and an auxiliary tip arranged at intervals along the lateral direction. The probe tip is connected to the base via a flexible probe cantilever, and the auxiliary tip is connected to the base via an auxiliary cantilever. The probe tip has a limiting portion protruding towards the auxiliary tip, and the auxiliary tip has a blocking portion opposite to the limiting portion. The blocking portion is serrated, forming multiple grooves arranged longitudinally, and the multiple grooves correspond to different overdrive ranges. The auxiliary tip, the auxiliary cantilever, and the limiting portion constitute the auxiliary structure. When the probe cantilever is in its natural state, the probe tip is in its initial position, and the probe tip in the initial position is located above the auxiliary tip. Under the action of an external force, the probe tip can move downward along the longitudinal direction. When the external force is removed, the limiting portion can engage with the corresponding groove and lock with the blocking portion to keep the probe tip in a locked position within the corresponding overdrive range.

2. The multifunctional test probe according to claim 1, characterized in that, The blocking portion has a plurality of serrated protrusions arranged sequentially along the longitudinal direction. Each of the serrated protrusions has an inclined first surface and a horizontally extending second surface. The first surface is located above the second surface, and the two coincide near the tip of the probe.

3. The multifunctional test probe according to claim 2, characterized in that, The uppermost groove is located above the first surface of the uppermost serrated protrusion, the lowermost groove is located below the second surface of the lowermost serrated protrusion, and the middle groove is defined by the second surface of each serrated protrusion and the first surface of the adjacent serrated protrusion below.

4. The multifunctional test probe according to claim 2, characterized in that, The second surface of each of the aforementioned serrated protrusions has a first dimension in the said transverse direction, and the first dimension of the plurality of serrated protrusions gradually increases from top to bottom.

5. The multifunctional test probe according to claim 4, characterized in that, The limiting part has a horizontally extending upper surface and an inclinedly extending lower surface. The upper surface is located above the lower surface, and the ends of both near the auxiliary needle tip coincide. When the probe needle tip is in the initial position, the upper surface is parallel to the second surface, and the horizontal plane on which the upper surface is located intersects with the end of the uppermost serrated protrusion of the first surface away from the probe needle tip.

6. The multifunctional test probe according to claim 4, characterized in that, In the longitudinal direction, the distance between the first and second surfaces of each of the serrated protrusions gradually increases from the probe tip to the auxiliary tip, and the maximum distance between the first and second surfaces of the plurality of serrated protrusions is equal.

7. The multifunctional test probe according to claim 4, characterized in that, The upper surface of the limiting part has a second dimension in the transverse direction, and there is a gap between the probe tip and the auxiliary tip to accommodate the limiting part and the blocking part. The sum of the first dimension and the second dimension is greater than the dimension of the gap in the transverse direction.

8. The multifunctional test probe according to claim 1, characterized in that, The probe cantilever has multiple hollow sections, each of which is rectangular; the multiple hollow sections are spaced apart along the longitudinal direction.

9. The multifunctional test probe according to claim 1, characterized in that, The base, probe tip, auxiliary tip, probe cantilever, and auxiliary cantilever are designed as a single integrated unit.

10. The multifunctional test probe according to claim 1, characterized in that, The auxiliary needle tip has a recessed conical hole at its top, and the direction of the recess in the conical hole is opposite to the orientation of the probe needle tip.

11. An application of a multifunctional test probe with an auxiliary structure, characterized in that, The invention includes a MEMS probe card having a multifunctional test probe as described in any one of claims 1-10 and probe card testing performed using the MEMS probe card.

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