Non-thermal equilibrium bio-impedance online detection device and processing technology thereof

Abstract

This invention provides an online non-thermal equilibrium bioimpedance detection device and its manufacturing process. A temperature sensor and an impedance detection electrode are both mounted on the same surface of a PCB substrate, with the temperature sensor located within the heat-sensitive area of ​​the impedance detection electrode. The temperature sensor is thin-film encapsulated. A data processing module is electrically connected to the temperature sensor and the impedance detection electrode. The data processing module compensates for the temperature sensor's measurements and performs temperature compensation on the impedance detected by the impedance detection electrode based on the compensated temperature data. This online non-thermal equilibrium bioimpedance detection device ensures the spatial consistency of the temperature sensor and the impedance detection electrode, guarantees the heat exchange efficiency between the temperature sensor and the sample, and ensures the accuracy of the final temperature measurement. This, in turn, provides more accurate temperature compensation for the impedance detection data, ensuring the accuracy of the final result.

Description

Technical Field

[0001] This invention relates to the field of online bioimpedance detection technology, specifically to an online non-thermal equilibrium bioimpedance detection device and its processing technology. Background Technology

[0002] Bioimpedance detection technology obtains key parameters such as conductivity and dielectric constant by detecting the impedance characteristics of biological tissues or fluids under an alternating electric field, thereby analyzing the composition of biological fluids, cell concentration, and physiological state.

[0003] When performing impedance characteristic testing on a continuously flowing sample, the impedance characteristics of biological fluids are highly sensitive to temperature. Therefore, when the temperature of the sample changes, the measured impedance data will change with the temperature. In order to reduce the impact of temperature on the accuracy of impedance detection, existing technologies usually use temperature sensors to perform impedance temperature compensation.

[0004] However, since there is a physical distance between the sensor temperature measurement point and the actual electrode measurement point, and to avoid direct contact between the sample to be tested and the temperature sensor, the temperature sensor is placed on the outer wall of the pipe. Therefore, when the temperature changes and causes a temperature gradient or local temperature difference in the delivery pipe, the temperature measured by the temperature sensor cannot accurately reflect the real-time temperature of the impedance to be tested, which can easily lead to the failure of temperature compensation and ultimately affect the accuracy of impedance measurement. Summary of the Invention

[0005] In view of this, embodiments of the present invention provide an online non-thermal equilibrium bioimpedance detection device and its processing technology to solve the problem that in existing online impedance detection, the temperature measured by the temperature sensor cannot accurately reflect the real-time temperature of the electrode surface due to the physical distance between the sensor temperature measurement point and the actual electrode measurement point, which easily leads to temperature compensation failure and ultimately affects the impedance measurement accuracy.

[0006] To achieve the above objectives, the embodiments of the present invention provide the following technical solutions:

[0007] The first aspect of the present invention discloses an online non-thermal equilibrium bioimpedance detection device, comprising: a temperature sensor, an impedance detection electrode, a PCB substrate, and a data processing module;

[0008] The temperature sensor and the impedance detection electrode are both located on the same mounting surface of the PCB substrate, and the temperature sensor is located in the heat-sensitive area of ​​the impedance detection electrode. The temperature sensor is encapsulated in a thin film.

[0009] The data processing module is electrically connected to the temperature sensor and the impedance detection electrode. The data processing module is used to compensate the measured value of the temperature sensor and to perform temperature compensation on the impedance detected by the impedance detection electrode based on the compensated temperature data.

[0010] Preferably, the impedance detection electrode includes: an excitation electrode, a first voltage detection electrode, a second voltage detection electrode, and a current detection electrode;

[0011] The excitation electrode, the first voltage detection electrode, the second voltage detection electrode, and the current detection electrode are arranged sequentially at preset distances.

[0012] Preferably, the excitation electrode, the first voltage detection electrode, the second voltage detection electrode, and the current detection electrode are arranged along a first direction, or the excitation electrode, the first voltage detection electrode, the second voltage detection electrode, and the current detection electrode are arranged along a second direction, wherein the first direction is the fluid flow direction, and the second direction is perpendicular to the first direction;

[0013] The temperature sensor is positioned between the first voltage detection electrode and the second voltage detection electrode.

[0014] Preferably, it further includes a shielding layer disposed on the first voltage detection electrode and the second voltage detection electrode.

[0015] Preferably, the data processing module includes: a temperature detection circuit, an impedance detection circuit, a functional unit PCB board, a header, and a data processing unit;

[0016] Temperature detection circuit, impedance detection circuit, busbar and data processing unit are all located on the functional unit PCB board;

[0017] The PCB substrate is connected to the pin header and the female header via pin headers.

[0018] Preferably, the film thickness is 1 μm to 10 μm.

[0019] The second aspect of this invention discloses a manufacturing process for an online non-thermal equilibrium bioimpedance detection device, comprising:

[0020] S1. Solder the temperature sensor and impedance detection electrode to the same mounting surface of the PCB substrate;

[0021] S2. The temperature sensor is encapsulated using a thin film.

[0022] Preferably, S2 includes:

[0023] S21. Use tape as a mask to attach to the impedance detection electrode;

[0024] S22. A thin film is coated onto the temperature sensor and tape using a chemical vapor deposition process;

[0025] S22. Remove the tape covering the impedance detection electrode.

[0026] Preferably, the film is made of parylene.

[0027] Preferably, before S1, it also includes:

[0028] Clean the surfaces of the PCB substrate on which the temperature sensor and impedance detection electrodes are mounted.

[0029] Based on the above-described online non-thermal equilibrium bioimpedance detection device and its processing technology provided by the present invention, both the temperature sensor and the impedance detection electrode are disposed on the same mounting surface of the PCB substrate, with the temperature sensor located within the heat-sensitive area of ​​the impedance detection electrode. The temperature sensor is thin-film encapsulated, and a data processing module is electrically connected to both the temperature sensor and the impedance detection electrode. The data processing module compensates for the measured values ​​of the temperature sensor and performs temperature compensation on the impedance detected by the impedance detection electrode based on the compensated temperature data. Through the above-disclosed online non-thermal equilibrium bioimpedance detection device, the spatial positional consistency of the temperature sensor and the impedance detection electrode can be ensured, as well as the heat exchange efficiency between the temperature sensor and the sample under test, guaranteeing the accuracy of the final temperature measurement by the temperature sensor. This, in turn, provides more accurate temperature compensation for the impedance detection data, ensuring the accuracy of the final result. Attached Figure Description

[0030] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on the provided drawings without creative effort.

[0031] Figure 1 This is a schematic diagram of the structure of an online non-thermal equilibrium bioimpedance detection device provided in an embodiment of the present invention;

[0032] Figure 2 This is a schematic diagram illustrating the principle of temperature detection spatial site consistency in an embodiment of the present invention.

[0033] Figure 3 This is a schematic diagram of the shielding layer configuration provided in an embodiment of the present invention;

[0034] Figure 4 This is a schematic diagram of the pin header configuration provided in an embodiment of the present invention;

[0035] Figure 5 This is a schematic diagram of the PCB substrate provided in an embodiment of the present invention;

[0036] Figure 6 A temperature response comparison diagram between the non-thermal equilibrium bioimpedance online detection device of the present invention and existing detection devices provided in this embodiment of the invention;

[0037] Figure 7The following is a flowchart of the signal processing steps of the non-thermal equilibrium bioimpedance online detection device provided in the embodiments of the present invention;

[0038] Figure 8 A flowchart illustrating the manufacturing process of an online non-thermal equilibrium bioimpedance detection device provided in this embodiment of the invention;

[0039] Figure 9 A flowchart of encapsulating a temperature sensor with a thin film is provided for an embodiment of the present invention;

[0040] Figure 10 This is a schematic diagram of an impedance detection electrode attached to an impedance sensor using tape as a mask, as provided in an embodiment of the present invention.

[0041] Figure 11 This is a schematic diagram illustrating the application of a thin film to a temperature sensor and an adhesive tape using a chemical vapor deposition process, as provided in an embodiment of the present invention.

[0042] Figure 12 This is a schematic diagram showing the result after removing the tape covering the impedance detection electrode, as provided in an embodiment of the present invention.

[0043] The components include: a temperature sensor 1; an impedance detection electrode 2; an excitation electrode 21; a first voltage detection electrode 22; a second voltage detection electrode 23; a current detection electrode 24; a PCB substrate 3; a top copper layer 31; a via 32; and a bottom copper layer 33; a data processing module 4; a temperature detection circuit 41; an impedance detection circuit 42; a functional unit PCB board 43; a header 44; a data processing unit 45; a shielding layer 5; a pin header 6; a conduit 7; a detection cell 71; and a thin film 8. Detailed Implementation

[0044] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0045] In this application, the terms "comprising," "including," or any other variations thereof are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising one..." does not exclude the presence of other identical elements in the process, method, article, or apparatus that includes said element.

[0046] This invention provides an online non-thermal equilibrium bioimpedance detection device, see [link to relevant documentation]. Figure 1 and combined Figures 2 to 7 , Figure 1 This is a schematic diagram of the structure of an online non-thermal equilibrium bioimpedance detection device, which includes: a temperature sensor 1, an impedance detection electrode 2, a printed circuit board (PCB) substrate 3, and a data processing module 4.

[0047] Temperature sensor 1 and impedance detection electrode 2 are both disposed on the same mounting surface of PCB substrate 3, and temperature sensor 1 is located in the heat-sensitive area of ​​impedance detection electrode 2. Temperature sensor 1 is encapsulated with thin film 8.

[0048] The data processing module 4 is electrically connected to the temperature sensor 1 and the impedance detection electrode 2. The data processing module 4 is used to compensate the measured value of the temperature sensor 1 and to perform temperature compensation on the impedance detected by the impedance detection electrode 2 based on the compensated temperature data.

[0049] It should be noted that by setting a detection pool 71 in the fluid delivery pipe 7, and placing the PCB substrate 3 equipped with the temperature sensor 1 and the impedance detection electrode 2 in the detection pool 71, the impedance detection electrode 2 will form a sensitive area (such as...) during operation. Figure 2 V in t This area represents the thermally sensitive range of the impedance detection electrode 2. The temperature inside the thermally sensitive area can be regarded as the ambient temperature of the impedance detection electrode 2 relative to the sample under test. By placing the temperature sensor 1 within the thermally sensitive area of ​​the impedance detection electrode 2, the temperature measurement point of the temperature sensor 1 and the measurement point of the impedance detection electrode 2 can be unified, eliminating the spatial deviation of temperature measurement caused by the temperature gradient of the fluid.

[0050] Furthermore, the temperature sensor 1 of this application is encapsulated with a thin film 8, which electrically isolates the temperature sensor 1 from the sample under test and effectively reduces the thermal inertia of the temperature sensor 1, enabling rapid heat exchange between the sample under test and the temperature sensor 1, thus providing a hardware foundation for achieving millisecond-level thermal response.

[0051] It should also be noted that since establishing thermal equilibrium takes a long time, and this application is to perform real-time detection on flowing biological liquid, the biological liquid does not have enough time to establish thermal equilibrium. Therefore, the data processing module 4 of this application needs to compensate the measured value of the temperature sensor 1 and perform temperature compensation on the impedance detected by the impedance detection electrode 2 based on the compensated temperature data, so as to effectively correct the lag of the temperature sensor 1 in real time and ensure the accuracy of the final impedance detection result.

[0052] It is worth noting that the data processing module 4 of this application compensates for the measured value of the temperature sensor 1, and the compensated temperature data is used to compensate for the impedance detected by the impedance detection electrode 2. Both of these are existing technologies. The specific compensation methods are as follows:

[0053] By real-time monitoring of the temperature sensor 1 signal and its rate of change, when the temperature of the sample under test changes, based on τ... The first-order model (where τ is the time constant, The sensor measurement value. (For the actual temperature of the fluid), introduce a parameter based on the calibration parameter τ and the instantaneous rate of change. The dynamic correction term can predict and compensate for the real-time temperature measurement deviation caused by thermal response delay, so that the output effective temperature value can track the real temperature change of the sample in real time, significantly improving the measurement accuracy and real-time performance of online detection under variable temperature conditions.

[0054] In this embodiment of the invention, both the temperature sensor 1 and the impedance detection electrode 2 are disposed on the same mounting surface of the PCB substrate 3, with the temperature sensor 1 located within the heat-sensitive area of ​​the impedance detection electrode 2. The temperature sensor 1 is encapsulated using a thin film 8, and a data processing module 4 is electrically connected to both the temperature sensor 1 and the impedance detection electrode 2. The data processing module 4 compensates for the measured values ​​of the temperature sensor 1 and performs temperature compensation on the impedance detected by the impedance detection electrode 2 based on the compensated temperature data. Through the above-disclosed online non-thermal equilibrium bioimpedance detection device, the spatial positional consistency of the temperature sensor 1 and the impedance detection electrode 2 can be ensured, as well as the heat exchange efficiency between the temperature sensor 1 and the sample under test, guaranteeing the accuracy of the final temperature measurement by the temperature sensor 1. This, in turn, provides more accurate temperature compensation for the impedance detection data, ensuring the accuracy of the final result.

[0055] Specifically, the impedance detection electrode 2 includes: an excitation electrode 21, a first voltage detection electrode 22, a second voltage detection electrode 23, and a current detection electrode 24;

[0056] The excitation electrode 21, the first voltage detection electrode 22, the second voltage detection electrode 23, and the current detection electrode 24 are arranged at preset intervals.

[0057] It should be noted that when the excitation electrode 21, the first voltage detection electrode 22, the second voltage detection electrode 23, and the current detection electrode 24 are arranged at preset intervals, electric field lines will be formed between the excitation electrode 21 and the current detection electrode 24 (e.g., ...). Figure 2 V in EFurthermore, the electric field lines point from the excitation electrode 21 to the current detection electrode 24. The outermost electromagnetic layer represents the boundary of the electric field sensitive area and represents the sensitive range of the impedance detection circuit 42. The temperature sensor 1 is then placed within the sensitive range, achieving consistency between the temperature measurement point of the temperature sensor 1 and the measurement point of the electrode in spatial position, and eliminating the spatial deviation of temperature measurement caused by the temperature gradient of the fluid.

[0058] Specifically, the excitation electrode 21, the first voltage detection electrode 22, the second voltage detection electrode 23, and the current detection electrode 24 are arranged along the first direction, or the excitation electrode 21, the first voltage detection electrode 22, the second voltage detection electrode 23, and the current detection electrode 24 are arranged along the first direction, wherein the first direction is the fluid flow direction, and the second direction is perpendicular to the first direction;

[0059] Temperature sensor 1 is disposed between the first voltage detection electrode 22 and the second voltage detection electrode 23.

[0060] It should be noted that when the excitation electrode 21, the first voltage detection electrode 22, the second voltage detection electrode 23, and the current detection electrode 24 are arranged along the first direction, or when the excitation electrode 21, the first voltage detection electrode 22, the second voltage detection electrode 23, and the current detection electrode 24 are arranged along the first direction, and the first direction is the fluid flow direction, and the second direction is perpendicular to the first direction, the excitation electrode 21 and the current detection electrode 24 will form electric field lines (such as...). Figure 2 V in E The electric field lines point from the excitation electrode 21 to the current detection electrode 24. The outermost electromagnetic layer represents the boundary of the electric field sensitive area and represents the sensitive range of the impedance detection circuit 42. The temperature sensor 1 is placed between the first voltage detection electrode 22 and the second voltage detection electrode 23. The temperature sensor 1 is then within the sensitive range, achieving consistency between the temperature measurement point of the temperature sensor 1 and the measurement point of the electrode in spatial position, and eliminating the spatial deviation of temperature measurement caused by the temperature gradient of the fluid.

[0061] Furthermore, the non-thermal balance bioimpedance online detection device also includes a shielding layer 5 disposed on the first voltage detection electrode 22 and the second voltage detection electrode 23.

[0062] It should be noted that by setting a shielding layer 5 on the first voltage detection electrode 22 and the second voltage detection electrode 23, the shielding layer 5 is set inside the PCB substrate 3. The shielding layer 5 can provide a low inductance return path for the high-frequency signal current that is close to the signal line, effectively shortening and constraining the parasitic path, and avoiding parasitic inductance and spatial radiation interference caused by excessively long paths.

[0063] It should also be noted that the shielding layer 5 is considered as an independent shielding ring in the planar layout. The two shielding rings surround the first voltage detection electrode 22 and the second voltage detection electrode 23 respectively, forming an independent shielding protection zone to reduce the electric field coupling and signal crosstalk between the first voltage detection electrode 22 and the second voltage detection electrode 23 and other electrodes.

[0064] It is worth noting that the shielding ring structure of this application also has two working modes, which can be selected through circuit configuration: 1. The shielding ring can be connected to the operational amplifier trench drive shield, so that the shielding ring potential follows the electrode potential in real time, so as to actively cancel and suppress the near-field capacitive coupling between the highly sensitive electrode and the surrounding conductor; 2. The shielding ring is connected to a fixed reference potential and used as a passive shield to provide a path to ground for external electromagnetic field interference and suppress spatial electromagnetic interference.

[0065] Specifically, the data processing module 4 includes: a temperature detection circuit 41, an impedance detection circuit 42, a functional unit PCB board 43, a busbar 44, and a data processing unit 45;

[0066] Temperature detection circuit 41, impedance detection circuit 42, busbar 44 and data processing unit 45 are all located on functional unit PCB board 43;

[0067] The PCB substrate 3 is connected to the header 6 via the header pins 6.

[0068] It should be noted that the temperature sensor 1 of this application is connected to the temperature detection circuit 41, and the impedance detection electrode 2 is connected to the impedance detection circuit 42. When the data processing unit 45 receives the corresponding instruction, it will control the temperature sensor 1 to detect the temperature and control the impedance detection electrode 2 to perform impedance detection. The detected temperature signal and impedance signal are sent to the data processing unit 45 together. The data processing unit 45 processes the temperature signal through the set non-thermal balance dynamic compensation module and performs dynamic temperature compensation on the processed impedance measurement value to obtain the reference temperature and the corrected impedance. After further processing by the data processing unit 45, the impedance detection result can be obtained.

[0069] It should also be noted that the PCB substrate 3 is connected to the header 6 via the header pin 6. The header pin 6 enables signal transmission and significantly shortens the signal path between the impedance detection electrode 2 and the data processing module 4, effectively suppressing the series parasitic effect caused by the distributed inductance, and providing a clean electrical environment for the accurate extraction of high-frequency, weak impedance signals.

[0070] Preferably, the PCB substrate 3 includes a top copper layer 31, vias 32, and a bottom copper layer 33.

[0071] It should be noted that the temperature sensor 1 is electrically connected through the PCB top copper layer 31, via 32, PCB bottom copper layer 33, and pin header 6 trench.

[0072] Specifically, the thickness of film 8 is 1 μm to 10 μm.

[0073] It should be noted that the thickness of the film 8 can be 1μm, 10μm, or 6μm, and those skilled in the art can choose according to their needs.

[0074] To further facilitate understanding of the non-thermal balance dynamic compensation algorithm involved in the above scheme, refer to... Figure 7 The system takes two real-time measurement signals as inputs: the real-time impedance measurement signal Z(t) from the impedance detection electrode 2 and the real-time temperature measurement signal T(t) from the temperature sensor 1. These two signals are first simultaneously input to the temperature change rate calculation module. This module processes the temperature signal T(t), calculates its instantaneous rate of change, and outputs the result as the signal dT / dt. Subsequently, the real-time impedance measurement signal Z(t) and the calculated dT / dt signal are fed together into the non-thermal equilibrium dynamic compensation model module. Based on its built-in model, the non-thermal equilibrium dynamic compensation model module dynamically corrects the real-time impedance measurement signal Z(t) due to temperature hysteresis, outputting the corrected impedance result after real-time compensation.

[0075] Based on the non-thermal equilibrium bioimpedance online detection device provided in the above embodiments, combined with Figure 6 The present invention also provides a manufacturing process for an online non-thermal equilibrium bioimpedance detection device, the manufacturing process of which includes at least the following steps:

[0076] S1. Solder the temperature sensor and impedance detection electrode to the same mounting surface of the PCB substrate.

[0077] S2. The temperature sensor is encapsulated using a thin film.

[0078] During the execution of step S2, the specific steps of step S2 are as follows:

[0079] S21. Use tape as a mask to attach to the impedance detection electrode.

[0080] S22. A thin film is coated on the temperature sensor and tape using a chemical vapor deposition process.

[0081] S22. Remove the tape covering the impedance detection electrode.

[0082] It should be noted that the impedance detection electrode includes an excitation electrode, a first voltage detection electrode, a second voltage detection electrode, and a current detection electrode. First, tape is used as a mask to attach the impedance detection electrode. Then, a thin film is covered on the temperature sensor and the tape using a chemical vapor deposition process. Finally, the tape covering the impedance detection electrode is removed, which allows for thin-film encapsulation of only the temperature sensor while ensuring that the impedance detection electrode is exposed.

[0083] In this embodiment of the invention, the temperature sensor and impedance detection electrode are soldered to the same mounting surface of a PCB substrate, and the temperature sensor is encapsulated with a thin film. Through the fabrication process of the above-disclosed non-thermal equilibrium bioimpedance online detection device, the thin film not only physically isolates the temperature sensor from the sample under test, but also effectively reduces the thermal inertia of the temperature sensor, enabling rapid heat exchange between the sample and the temperature sensor, thus providing a hardware foundation for achieving millisecond-level thermal response.

[0084] Specifically, the film is made of parylene.

[0085] It should be noted that the film can be made of parylene or other materials, and those skilled in the art can choose according to their needs.

[0086] Furthermore, before performing step S1, the following steps are also included:

[0087] Clean the surfaces of the PCB substrate on which the temperature sensor and impedance detection electrodes are mounted.

[0088] It should be noted that cleaning the surface of the PCB substrate on which the temperature sensor and impedance detection electrode are mounted not only ensures the adhesiveness of the tape but also effectively prevents external dust from affecting the temperature sensor's detection results.

[0089] The various embodiments in this specification are described in a progressive manner. Similar or identical parts between embodiments can be referred to mutually. Each embodiment focuses on describing the differences from other embodiments. In particular, for system or system embodiments, since they are basically similar to method embodiments, the description is relatively simple, and relevant parts can be referred to the descriptions in the method embodiments. The systems and system embodiments described above are merely illustrative. The units described as separate components may or may not be physically separate. The components shown as units may or may not be physical units; that is, they may be located in one place or distributed across multiple network units. Some or all of the modules can be selected to achieve the purpose of this embodiment according to actual needs. Those skilled in the art can understand and implement this without creative effort.

[0090] Those skilled in the art will further recognize that the units and algorithm steps of the various examples described in conjunction with the embodiments disclosed herein can be implemented in electronic hardware, computer software, or a combination of both. To clearly illustrate the interchangeability of hardware and software, the components and steps of the various examples have been generally described in terms of functionality in the foregoing description. Whether these functions are implemented in hardware or software depends on the specific application and design constraints of the technical solution. Those skilled in the art can use different methods to implement the described functions for each specific application, but such implementations should not be considered beyond the scope of this invention.

[0091] The above description of the disclosed embodiments enables those skilled in the art to make or use the invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the invention. Therefore, the invention is not to be limited to the embodiments shown herein, but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. A non-thermal equilibrium bioimpedance online detection device, wherein the non-thermal equilibrium bioimpedance online detection device is installed in the detection pool of a fluid transport pipeline, characterized in that, include: Temperature sensor, impedance detection electrode, PCB substrate and data processing module; The temperature sensor and the impedance detection electrode are both disposed on the same mounting surface of the PCB substrate, and the temperature sensor is located in the heat-sensitive area of ​​the impedance detection electrode. The temperature sensor is encapsulated in thin film. The data processing module is electrically connected to the temperature sensor and the impedance detection electrode. The data processing module is used to compensate the measured value of the temperature sensor and to perform temperature compensation on the impedance detected by the impedance detection electrode based on the compensated temperature data.

2. The online non-thermal equilibrium bioimpedance detection device according to claim 1, characterized in that, The impedance detection electrode includes: an excitation electrode, a first voltage detection electrode, a second voltage detection electrode, and a current detection electrode; The excitation electrode, the first voltage detection electrode, the second voltage detection electrode, and the current detection electrode are arranged sequentially at a preset distance.

3. The online non-thermal equilibrium bioimpedance detection device according to claim 2, characterized in that, The excitation electrode, the first voltage detection electrode, the second voltage detection electrode, and the current detection electrode are arranged along a first direction, or the excitation electrode, the first voltage detection electrode, the second voltage detection electrode, and the current detection electrode are arranged along a second direction, wherein the first direction is the fluid flow direction, and the second direction is perpendicular to the first direction; The temperature sensor is disposed between the first voltage detection electrode and the second voltage detection electrode.

4. The online non-thermal equilibrium bioimpedance detection device according to claim 2, characterized in that, Also includes: The shielding layer is disposed on the first voltage detection electrode and the second voltage detection electrode.

5. The online non-thermal equilibrium bioimpedance detection device according to claim 1, characterized in that, The data processing module includes: a temperature detection circuit, an impedance detection circuit, a functional unit PCB board, a busbar, and a data processing unit; The temperature detection circuit, the impedance detection circuit, the busbar and the data processing unit are all located on the PCB board of the functional unit; The PCB substrate is connected to the header pins.

6. The online non-thermal equilibrium bioimpedance detection device according to claim 1, characterized in that, The film thickness is 1 μm to 10 μm.

7. A manufacturing process for a non-thermal equilibrium bioimpedance online detection device, applicable to any one of claims 1 to 6, characterized in that, include: S1. Solder the temperature sensor and impedance detection electrode to the same mounting surface of the PCB substrate; S2. The temperature sensor is encapsulated using a thin film.

8. The processing technology according to claim 7, characterized in that, S2 includes: S21. Use adhesive tape as a mask to attach to the impedance detection electrode; S22. A thin film is coated on the temperature sensor and the tape using a chemical vapor deposition process; S22. Remove the tape covering the impedance detection electrode.

9. The processing technology according to claim 8, characterized in that, The film is made of parylene.

10. The processing technology according to claim 8, characterized in that, Before S1, it also includes: The surfaces of the PCB substrate on which the temperature sensor and the impedance detection electrode are mounted are cleaned.

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