Adjustment mechanism, optical device, and semiconductor device

Abstract

This application discloses an adjustment mechanism, an optical device, and a semiconductor apparatus. The adjustment mechanism drives and adjusts the rotation of an optical element mounted on a lens mount, which is located inside a lens barrel. The adjustment mechanism includes: a rotation unit comprising a drive element and a sequentially meshing drive gear, intermediate gear, and transmission gear; and a pre-tightening unit comprising at least one pre-tightening element, one end fixed to the lens barrel and the other end abutting against the lens mount. The intermediate gear includes a first gear, a second gear, an elastic element disposed between the first and second gears, and a bolt. The first or second gear has a slotted hole that mates with the bolt. This application can improve the adjustment accuracy and repeatability stability of the optical element's rotation angle, avoid introducing eccentric rotation errors, suppress axial movement and parasitic tilt of the lens mount, improve the adjustment accuracy of the optical element's rotation angle, and reduce the radial dimension of the device.

Description

Technical Field

[0001] This application relates to the field of semiconductor equipment technology, and in particular to an adjustment mechanism, an optical device, and a semiconductor device. Background Technology

[0002] In semiconductor manufacturing, photolithography, and precision optical inspection, optical components (such as mirrors and optical wedges) often require sub-arcsecond-level rotational adjustment to achieve precise beam pointing and coaxial alignment with the system. Existing gear transmission mechanisms have significant drawbacks: First, gear meshing backlash causes return errors during commutation, severely impairing repeatability and control stability, which even high-resolution encoders struggle to fully compensate for. Second, insufficient transmission rigidity or loose support can easily induce parasitic tilts (Rx, Ry) around the X / Y axes, resulting in optical axis offset or wavefront distortion, affecting imaging quality and overlay accuracy, which is unacceptable, especially in highly sensitive scenarios such as EUV lithography. Third, multi-stage reduction and external motor designs result in bulky components that are difficult to integrate into the compact spaces within semiconductor equipment (such as vacuum chambers or around objective lenses).

[0003] Therefore, there is an urgent need for a compact, backlash-free, high-rigidity adjustment mechanism that outputs only pure rotational degrees of freedom around the optical axis, while taking into account the requirements of high precision, high stability and miniaturization. Summary of the Invention

[0004] This application provides an adjustment mechanism, an optical device, and a semiconductor device to at least solve the technical problems in the prior art, such as insufficient repeatability and control stability of the adjustment mechanism, parasitic tilt, and large size.

[0005] To achieve the above objectives, according to a first aspect of this application, an adjustment mechanism is provided for driving and adjusting the rotation of an optical element, the optical element being mounted on a lens mount, the lens mount being disposed within a lens barrel; the adjustment mechanism includes: The rotating unit includes a driving component and a drive gear, an intermediate gear, and a transmission gear that mesh sequentially. The drive gear is connected to the driving component, and the transmission gear is fixedly connected to the mirror mount. The pre-tightening unit includes at least one pre-tightening member, one end of which is fixed to the lens barrel and the other end of which abuts against the lens mount; The intermediate gear includes a first gear, a second gear, an elastic element disposed between the first gear and the second gear, and a bolt; the first gear or the second gear is provided with a slotted hole that mates with the bolt.

[0006] According to a second aspect of this application, an optical device is provided, comprising: Optical components; The optical elements are mounted on the lens mount. The lens barrel, lens mount, and optical elements are housed inside the lens barrel; The aforementioned adjustment mechanism is connected to the lens mount and lens barrel and is used to drive and adjust the rotation of the optical elements.

[0007] According to a third aspect of this application, a semiconductor device is provided, including the aforementioned optical device.

[0008] The adjustment mechanism, optical device, and semiconductor equipment of this application embodiment, through the above technical solution, have at least the following beneficial effects: The use of a three-stage gear structure with sequential meshing eliminates backlash between the intermediate gear and the driving gear, as well as between the intermediate gear and the transmission gear, reducing or eliminating transmission backlash error, thereby improving the adjustment accuracy and repeatability of the optical element's rotation angle. The use of the waist hole on the first or second gear allows for fine-tuning of the relative circumferential phase of the two gears, ensuring stable rotation of the intermediate gear around its designed rotation center and avoiding eccentric rotation errors introduced by assembly deviations or the transmission process. The preload unit suppresses axial (vertical) movement of the lens mount and parasitic tilt around the X and Y axes, ensuring the optical element's rotational freedom around its optical axis, thereby improving adjustment accuracy. Furthermore, compared to the structure where the driving gear directly meshes with the transmission gear, this solution avoids the need for the transmission gear to extend excessively radially to meet the meshing conditions, thus reducing the radial dimension of the device and facilitating compact integration and miniaturization of the optical device in space-constrained scenarios such as semiconductor equipment. Attached Figure Description

[0009] To more clearly illustrate the technical solutions in the embodiments of this application, the accompanying drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0010] To gain a more complete understanding of this application and its beneficial effects, the following description will be provided in conjunction with the accompanying drawings, wherein the same reference numerals in the following description denote the same parts.

[0011] Figure 1 This is one of the structural schematic diagrams of the adjustment mechanism provided in the embodiments of this disclosure; Figure 2 This is a schematic diagram of the structure of the rotating unit in the adjustment mechanism provided in the embodiments of this disclosure; Figure 3 This is an exploded view of the intermediate gear in the rotating unit provided in the embodiments of this disclosure; Figure 4 This is the second schematic diagram of the structure of the adjustment mechanism provided in the embodiments of this disclosure; Figure 5 This is the third schematic diagram of the structure of the adjustment mechanism provided in the embodiments of this disclosure; Figure 6 This is the fourth schematic diagram of the adjustment mechanism provided in the embodiments of this disclosure.

[0012] Explanation of reference numerals in the attached figures: 1-Adjustment mechanism; 2-Optical element; 21-First optical element; 22-Second optical element; 3-Mirror mount; 31-First mirror mount; 32-Second mirror mount; 321-Sensing area; 4-Scope tube; 41-First opening; 42-Second opening; 43-First stop; 44-Second stop; 5-Rotating unit; 51-Driver; 52-Driving gear; 53-Intermediate gear; 531-First gear; 532-Second gear; 533-Elastic element; 534-First slot; 535-Second slot; 536-First round hole; 537-Second round hole; 538-First bolt; 539-Second bolt; 530-Positioning groove; 5321-Bearing; 5322-Connecting shaft; 5323-Locking element; 54-Transmission gear; 541-First end face; 542-Second end face; 55-Cover; 6-Pretensioning unit; 61-First pretensioning element; 611-Leaf spring; 612-First end; 613-Second end; 62-Second pretensioning element; 63-Third pretensioning element; 7-Limit switch. Detailed Implementation

[0013] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0014] In the description of this application, it should be understood that the terms "center", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc., indicate the orientation or positional relationship according to the accompanying drawings, and are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this application.

[0015] The terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Therefore, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this application, unless otherwise stated, "a plurality of" means two or more.

[0016] In the description of this application, it should be noted that, unless otherwise expressly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection, a direct connection, or an indirect connection through an intermediate medium; or they can refer to the internal communication between two components. Those skilled in the art can understand the specific meaning of the above terms in this application based on the specific circumstances.

[0017] This application provides an adjustment mechanism, an optical device, and a semiconductor device, which will be described in detail below. It should be noted that the order of description of the following embodiments is not intended to limit the preferred order of the embodiments of this application. Furthermore, the descriptions of each embodiment have their own emphasis; parts not described in detail in a certain embodiment can be referred to in the relevant descriptions of other embodiments.

[0018] According to the first aspect of this application, please refer to Figure 1 , Figure 2 and Figure 3 This application provides an adjustment mechanism 1 for driving and adjusting the rotation of an optical element 2, which is mounted on a lens mount 3, located inside a lens barrel 4. The adjustment mechanism 1 includes a rotation unit 5 and a pre-tightening unit 6. The rotation unit 5 includes a drive member 51 and a drive gear 52, an intermediate gear 53, and a transmission gear 54 that mesh sequentially. The drive gear 52 is connected to the drive member 51, and the transmission gear 54 is fixedly connected to the lens mount 3. The pre-tightening unit 6 includes at least one pre-tightening member, one end of which is fixed to the lens barrel 4, and the other end abutting against the lens mount 3. The intermediate gear 53 includes a first gear 531, a second gear 532, an elastic member 533 disposed between the first gear 531 and the second gear 532, and a bolt. The first gear 531 or the second gear 532 has a slotted hole for engaging with the bolt.

[0019] Specifically, the rotating unit 5 of the adjusting mechanism 1 includes a drive element 51, which serves as a power source to provide rotational power. The output shaft of the drive element 51 is connected to the drive gear 52 to input the rotational motion into the gear transmission system. It is understood that the drive element 51 can be a device capable of outputting rotational power, such as an electric motor. Optionally, the drive element 51 is a coreless motor to balance high responsiveness, low rotational inertia, and a compact structure.

[0020] Specifically, the rotating unit 5 employs a three-stage gear structure with sequential meshing, including a driving gear 52, an intermediate gear 53, and a transmission gear 54. The driving gear 52 serves as the input end, rotating with the output shaft of the drive unit 51. The transmission gear 54 serves as the output end, fixedly connected to the mirror mount 3, transmitting driving force to the optical element 2, thereby causing the optical element 2 to rotate. The intermediate gear 53, located between the driving gear 52 and the transmission gear 54, acts as a backlash-eliminating gear, consisting of a first gear 531 and a second gear 532 coaxially arranged, and an elastic element 533 sandwiched between them. Under the elastic force of the elastic element 533, the first gear 531 and the second gear 532 generate a slight relative rotation, pressing against the tooth surfaces of the driving gear 52 and the transmission gear 54 respectively. This simultaneously eliminates the backlash between the intermediate gear 53 and the driving gear 52, and between the intermediate gear 53 and the transmission gear 54, effectively reducing or eliminating transmission backlash error, thereby improving the adjustment accuracy and repeatability of the optical element 2's rotation angle. Meanwhile, the first gear 531 or the second gear 532 is provided with a waist hole (waist-shaped hole) for use with bolts. Through the cooperation of the bolts and the waist hole, on the one hand, the axial displacement (in this application, axial means Z direction, i.e. vertical) of the first gear 531 or the second gear 532 caused by the action of the elastic element 533 is limited, and on the other hand, the relative circumferential phase of the two gears can be finely adjusted by adjusting the position of the waist hole, so as to ensure that the intermediate gear 53 rotates stably around its designed rotation center and avoids eccentric rotation error introduced by assembly deviation or transmission process.

[0021] Specifically, the pre-tightening unit 6 includes at least one pre-tightening member. One end of the pre-tightening member is fixed to the lens barrel 4, and the other end (cantilever end) elastically abuts against the lens base 3. During the rotation of the optical element 2, the cantilever end of the pre-tightening member continuously applies axial (vertical) pre-tightening force to the lens base 3, suppressing the axial movement of the lens base 3 and the parasitic tilt around the X-axis and Y-axis, ensuring that the optical element 2 can rotate freely around its optical axis, thereby improving the adjustment accuracy.

[0022] Furthermore, compared to the structure where the drive gear 52 directly meshes with the transmission gear 54, this solution not only achieves bidirectional backlash elimination by introducing an intermediate gear 53, but also avoids the situation where the transmission gear 54 needs to extend excessively in the radial direction to meet the meshing conditions. This effectively reduces the radial dimension of the device, which is beneficial for the compact integration and miniaturization design of optical devices in space-constrained scenarios such as semiconductor equipment.

[0023] Therefore, this embodiment employs a three-stage gear structure with sequential meshing, simultaneously eliminating backlash between the intermediate gear 53 and the driving gear 52, and between the intermediate gear 53 and the transmission gear 54, reducing or eliminating transmission backlash error, thereby improving the adjustment accuracy and repeatability of the optical element 2's rotation angle. The waist hole on the first gear 531 or the second gear 532 allows for fine-tuning of the relative circumferential phase of the two gears, ensuring stable rotation of the intermediate gear 53 around its designed rotation center, avoiding eccentric rotation errors introduced by assembly deviations or the transmission process. Furthermore, the preload unit 6 suppresses axial (vertical) movement and parasitic tilting around the X and Y axes of the mirror mount 3, ensuring the optical element 2's rotational freedom around its optical axis, thus improving adjustment accuracy. Simultaneously, compared to the structure where the driving gear 52 directly meshes with the transmission gear 54, this solution avoids the need for the transmission gear 54 to extend excessively radially to meet the meshing conditions, thereby reducing the radial dimension of the device and facilitating compact integration and miniaturization of the optical device in space-constrained environments such as semiconductor equipment.

[0024] Please see Figure 1 , Figure 2 and Figure 3 In some embodiments, the first gear 531 has a first oblong hole 534 and a second oblong hole 535; the second gear 532 has a first circular hole 536 and a second circular hole 537. The first oblong hole 534 corresponds to the first circular hole 536, and the second oblong hole 535 corresponds to the second circular hole 537. The intermediate gear 53 also includes a first bolt 538 and a second bolt 539. The first bolt 538 passes through the first oblong hole 534 and the first circular hole 536, and the second bolt 539 passes through the second oblong hole 535 and the second circular hole 537. Specifically, the first gear 531 and the second gear 532 have the same diameter, and their centers are coaxial. The first gear 531 has a first oblong hole 534 and a second oblong hole 535 symmetrically arranged about its center, both of which are through holes; the second gear 532 has a first circular hole 536 and a second circular hole 537 symmetrically arranged about its center, both of which are blind holes. The first circular hole 536 corresponds to the first oblong hole 534, and the second circular hole 537 corresponds to the second oblong hole 535. The first bolt 538 passes through the first oblong hole 534 and the first circular hole 536 in sequence, and the second bolt 539 passes through the second oblong hole 535 and the second circular hole 537 in sequence. Through the cooperation of the bolts and the oblong holes, on the one hand, the axial displacement of the first gear 531 under the action of the elastic element 533 is limited, and on the other hand, the relative circumferential phase between the first gear 531 and the second gear 532 can be finely adjusted by adjusting the position of the oblong holes (the position of the first gear 531), thereby ensuring that the intermediate gear 53 rotates stably around its designed rotation center and effectively avoiding eccentric rotation errors introduced by assembly deviations or the transmission process.

[0025] It is understood that in some alternative embodiments, the first gear 531 and the second gear 532 can be interchanged according to actual needs. That is, blind holes and round holes are opened on the first gear 531, and through holes and waist holes are opened on the second gear 532. The above adjustment function can also be achieved by bolt connection.

[0026] Please see Figure 1 , Figure 2 and Figure 3 In some embodiments, the elastic element 533 is housed within a positioning groove 530 formed by the first gear 531 and the second gear 532. Both ends of the elastic element 533 abut against the first gear 531 and the second gear 532, respectively, to apply elastic force to the first gear 531 and the second gear 532. Specifically, the positioning groove 530 for accommodating the elastic element 533 is formed on the facing end faces of the first gear 531 and the second gear 532. Optionally, the elastic element 533 is a torsion spring, which is housed in the positioning groove 530, with one end abutting against the first gear 531 and the other end abutting against the second gear 532. In a pre-tensioned state, the torsion spring applies opposite elastic torques to the first gear 531 and the second gear 532, causing them to rotate slightly relative to each other, thereby pressing them against the tooth surfaces of the driving gear 52 and the transmission gear 54, effectively eliminating tooth backlash during gear transmission, improving transmission accuracy and repeatability, and thus improving the rotational accuracy of the optical element 2.

[0027] Please see Figure 3 In some embodiments, in the structure of the intermediate gear 53, the first gear 531 and the second gear 532 are coaxially sleeved on the outer ring of the bearing 5321, and the inner ring of the bearing 5321 is mounted on the connecting shaft 5322. The connecting shaft 5322 passes through the central holes of the first gear 531 and the second gear 532. The connecting shaft 5322 is axially fixed to the bearing 5321 by a locking member 5323, thereby achieving radial support and axial positioning of the first gear 531 and the second gear 532. In addition, the adjusting mechanism 1 also includes a cover 55, which covers the gear transmission parts such as the driving gear 52, the intermediate gear 53, and the transmission gear 54, and serves to prevent dust, protect, and provide integrated encapsulation.

[0028] Please see Figure 2 , Figure 4 and Figure 5In some embodiments, the transmission gear 54 is a sector gear with an acute central angle corresponding to its gear ring. The tooth ratio between the driving gear 52 and the transmission gear 54 is 1:4.5 to 1:4.6. Specifically, the transmission gear 54 is a partial gear, specifically a sector gear with an acute central angle corresponding to its gear ring. The transmission gear 54 has a first end face 541 and a second end face 542, and the included angle formed by the intersection of their extensions is the central angle. When the central angle corresponding to the gear ring of the transmission gear 54 is an acute angle, a large non-tooth area is retained on both sides (clockwise and counterclockwise), thereby providing sufficient rotation space for the transmission gear 54 to achieve bidirectional rotation at a large angle, thereby driving the optical element 2 to complete a wide range of angle adjustments. This included angle can be any value among 40°, 50°, 60°, 70°, or 80°, but is not limited to these values. The gear ratio between the driving gear 52 and the transmission gear 54 can be any one of 1:4.5, 1:4.52, 1:4.54, 1:4.55, 1:4.56, 1:4.58, or 1:4.6, but is not limited to these ratios. The driving gear 52, the first gear 531 and the second gear 532 in the intermediate gear 53, and the transmission gear 54 all use the same module of 0.8 to ensure meshing compatibility. Specifically, the driving gear 52 has 24 teeth, the first gear 531 and the second gear 532 both have 24 teeth, and the transmission gear 54 has 110 teeth, thus forming a reduction gear ratio to meet the requirements of high-precision angle adjustment.

[0029] Please see Figures 4 to 6 In some embodiments, the pre-tightening unit 6 includes a first pre-tightening member 61, a second pre-tightening member 62, and a third pre-tightening member 63. The first pre-tightening member 61, the second pre-tightening member 62, and the third pre-tightening member 63 are evenly arranged along the circumference of the lens mount 3. Specifically, the first pre-tightening member 61, the second pre-tightening member 62, and the third pre-tightening member 63 are evenly distributed at 120° intervals along the circumference of the lens mount 3, thereby applying a circumferentially symmetrical and uniform axial pre-tightening force to the lens mount 3, effectively avoiding problems such as jamming or unstable movement of the optical element 2 during rotation due to uneven force.

[0030] Please see Figures 4 to 6In some embodiments, the preload element is a leaf spring. The first end 612 of the leaf spring is fixed to the lens barrel 4; the second end 613 of the leaf spring has a spherical protrusion that elastically abuts against the lens mount 3, and is used to apply an axial preload force to the lens mount 3. Specifically, the preload element used in the preload unit 6 is a leaf spring. The structures of each preload element are the same, and the following description uses the first preload element 61 as an example. The first preload element 61 is the leaf spring 611. The first end 612 of the leaf spring 611 is fixed to the lens barrel 4 by fasteners such as screws, and its second end 613 is a cantilever end, which has a spherical protrusion that abuts against the lens mount 3. The point contact method formed by the spherical protrusion effectively reduces the contact area between the preload element and the lens mount 3, thereby reducing frictional resistance and making the lens mount 3 and the optical element 2 it carries more stable and smooth during rotation.

[0031] According to the second aspect of this application, please refer to Figures 1 to 6 Some embodiments of this application also provide an optical device, which includes: an optical element 2; a lens mount 3, on which the optical element 2 is mounted; a lens barrel 4, in which the lens mount 3 and the optical element 2 are disposed; and the aforementioned adjustment mechanism 1, which is connected to the lens mount 3 and the lens barrel 4, for driving and adjusting the rotation of the optical element 2.

[0032] Specifically, optical element 2 includes a first optical element 21 and a second optical element 22 arranged coaxially. Lens mount 3 correspondingly includes a first lens mount 31 and a second lens mount 32, wherein the first optical element 21 and the second optical element 22 are respectively fixed to their respective first lens mount 31 and second lens mount 32 by adhesive bonding. The inner wall of the lens barrel 4 has a stepped structure, through which the lens mount 3 is axially positioned and installed inside the lens barrel 4. The transmission gear 54 of the adjustment mechanism 1 is fixedly installed on the second lens mount 32, thereby driving the second lens mount 32 and the second optical element 22 it carries to rotate around the optical axis, achieving precise control of the optical path. It is understood that the number of lens mounts and optical elements can be set according to actual application requirements and is not limited to the number described in the above embodiments. Optical elements may include lenses, optical wedges, parallel plates, and other optical devices requiring angle adjustment. Furthermore, the fixing method between the optical elements and the lens mount can be flexibly selected according to actual needs.

[0033] Please see Figure 1 and Figure 2In some embodiments, the optical device further includes a limit switch 7; a sensing area 321 is provided on the outer peripheral surface of the lens mount 3, which is used to cooperate with the limit switch 7 to detect the angular position of the lens mount 3. Specifically, the lens mount 3 is provided with a sensing area for position calibration, for example, a metal sensing area 321 is provided on the outer peripheral surface of the second lens mount 32. This sensing area 321 is used in conjunction with the limit switch 7 installed on the lens barrel 4. When the second lens mount 32 rotates to a preset angle (such as zero position), the sensing area 321 enters the detection range of the limit switch 7, triggering a switch signal, thereby providing a precise angular reference for the control system, realizing the origin calibration or travel limit of the rotation position of the second optical element 22. It is understood that the setting position of the sensing area 321 can be flexibly configured according to actual adjustment needs. If the first lens mount 31 and the first optical element 21 it supports also need to rotate and provide position feedback independently, another sensing area can be added at the corresponding position of the first lens mount 31, in conjunction with an additional limit switch or by reusing the same limit switch for multi-position detection. The combination of the sensing zone and the limit switch has a simple structure and reliable response, and is suitable for typical operating environments of semiconductor equipment such as vacuum and clean environments.

[0034] Please see Figure 5 In some embodiments, the lens barrel 4 has a first opening 41 and a second opening 42 on its barrel wall. The adjustment mechanism 1 is connected to the lens mount 3 via the first opening 41; the limit switch 7 is installed on the lens barrel 4 via the second opening 42. Specifically, the lens barrel 4 has a first opening 41 and a second opening 42 on its barrel wall. The first opening 41 allows the transmission gear 54 of the adjustment mechanism 1 to pass through so that it can be installed on the second lens mount 32 to drive the second optical element 22 supported by the second lens mount 32 to rotate. The second opening 42 allows the limit switch 7 to extend into the lens barrel 4, thereby detecting the rotation angle of the second lens mount 32 and cooperating with the sensing area 321 provided thereon to achieve position calibration or travel limit.

[0035] Please see Figure 5 and Figure 6In some embodiments, a first stop portion 43 and a second stop portion 44 are formed on the inner circumferential surface of the lens barrel 4. The transmission gear has a first end face and a second end face located at both ends of the transmission gear. The first stop portion 43 and the second stop portion 44 respectively cooperate with the first end face 541 and the second end face 542 to limit the rotation angle of the optical element 2. Specifically, the inner circumferential surface of the lens barrel 4 is provided with a first stop portion 43 and a second stop portion 44 for hard limiting the rotation stroke of the transmission gear 54. The first stop portion 43 abuts against the first end face 541 of the transmission gear 54, and the second stop portion 44 abuts against the second end face 542 of the transmission gear 54, thereby limiting the rotation range of the transmission gear 54 in two directions. Both the first stop portion 43 and the second stop portion 44 are provided with protruding corner structures to reliably engage with the first end face 541 and the second end face 542 of the transmission gear 54, ensuring that the limiting position is accurate and stable. The limiting structure is directly integrated into the lens barrel 4 body, eliminating the need for additional independent limiting components. This simplifies the overall structure and improves assembly compactness and reliability.

[0036] In some embodiments, a sealing ring is provided inside the adjustment mechanism 1 and / or at the connection between the adjustment mechanism 1 and the lens barrel 4. Specifically, optionally, a sealing ring is provided separately inside the adjustment mechanism 1; or, a sealing ring is provided separately at the connection between the adjustment mechanism 1 and the lens barrel 4; or, sealing rings are provided both inside the adjustment mechanism 1 and at the connection between the adjustment mechanism 1 and the lens barrel 4. The sealing ring can be multi-stage. This sealing ring is used to prevent external contaminants (especially particles in a cleanroom environment) from entering the optical device, thereby avoiding contamination or damage to precision optical components. Thanks to the above-mentioned sealing design, the optical device can operate stably in the harsh environment required for semiconductor manufacturing. Simultaneously, through the integrated optical adjustment system, the semiconductor equipment can achieve real-time and precise control of optical path parameters, fully meeting the stringent requirements of semiconductor manufacturing processes for optical systems in terms of high precision, high stability, and high reliability, thereby improving the processing accuracy and production efficiency of semiconductor products.

[0037] According to a third aspect of this application, some embodiments of this application also provide a semiconductor device including the aforementioned optical device. Since the optical device in this semiconductor device has the same technical features as the aforementioned optical device, both can solve the same technical problem and achieve the same technical effect, and will not be described in detail here.

[0038] In the description of this specification, specific features, structures, materials, or characteristics may be combined in any suitable manner in one or more embodiments or examples.

[0039] The above description is merely a specific embodiment of this application, but the scope of protection of this application is not limited thereto. Any variations or substitutions that can be easily conceived by those skilled in the art within the technical scope disclosed in this application should be included within the scope of protection of this application. Therefore, the scope of protection of this application should be determined by the scope of protection of the claims. Furthermore, specific examples have been used in the specification to illustrate the principles and implementation methods of this application. The description of the above embodiments is only for the purpose of helping to understand the method and core ideas of this application, and the content of this specification should not be construed as a limitation of this application.

Claims

1. An adjustment mechanism for driving and adjusting the rotation of an optical element, the optical element being mounted on a lens mount, the lens mount being disposed within a lens barrel; characterized in that, The adjustment mechanism includes: A rotating unit, comprising a driving component and a drive gear, an intermediate gear and a transmission gear meshing sequentially, wherein the drive gear is connected to the driving component and the transmission gear is fixedly connected to the mirror base; A pre-tightening unit, the pre-tightening unit including at least one pre-tightening member, one end of the pre-tightening member being fixed to the lens barrel and the other end abutting against the lens mount; The intermediate gear includes a first gear, a second gear, an elastic element disposed between the first gear and the second gear, and a bolt; the first gear or the second gear is provided with a waist hole that mates with the bolt.

2. The adjusting mechanism according to claim 1, characterized in that, The first gear is provided with a first waist hole and a second waist hole; The second gear is provided with a first round hole and a second round hole, the first round hole corresponding to the first waist hole, and the second round hole corresponding to the second waist hole; The intermediate gear also includes a first bolt and a second bolt, wherein the first bolt passes through the first waist hole and the first round hole, and the second bolt passes through the second waist hole and the second round hole.

3. The adjusting mechanism according to claim 1, characterized in that, The elastic element is housed in a positioning groove formed by the first gear and the second gear; The two ends of the elastic element abut against the first gear and the second gear respectively, and are used to apply elastic force to the first gear and the second gear.

4. The adjusting mechanism according to claim 1, characterized in that, The transmission gear is a sector gear, and the central angle corresponding to its gear ring is an acute angle; The ratio of the number of teeth of the driving gear to the number of teeth of the transmission gear is 1:4.5 to 1:4.

6.

5. The adjusting mechanism according to claim 1, characterized in that, The pretensioning unit includes a first pretensioner, a second pretensioner, and a third pretensioner; The first pre-tightening member, the second pre-tightening member, and the third pre-tightening member are evenly arranged along the circumference of the mirror base.

6. The adjusting mechanism according to claim 1, characterized in that, The preload element is a leaf spring. The first end of the leaf spring is fixed to the lens barrel; The second end of the leaf spring is provided with a spherical protrusion, which elastically abuts against the mirror mount to apply an axial preload to the mirror mount.

7. An optical device, characterized in that, include: Optical components; A mirror mount, on which the optical element is mounted; The lens barrel, the lens mount, and the optical elements are disposed inside the lens barrel; According to any one of claims 1 to 6, the adjustment mechanism is connected to the lens mount and the lens barrel, and is used to drive and adjust the rotation of the optical element.

8. The optical device according to claim 7, characterized in that, Also includes: A limit switch is provided, and a sensing area is provided on the outer peripheral surface of the mirror base. The sensing area is used to cooperate with the limit switch to detect the angular position of the mirror base.

9. The optical device according to claim 8, characterized in that, The tube wall of the microscope is provided with a first opening and a second opening; The adjustment mechanism is connected to the mirror base via the first opening; The limit switch is installed on the lens barrel via the second opening.

10. The optical device according to claim 7, characterized in that, A first stop and a second stop are formed on the inner circumferential surface of the lens barrel; The transmission gear has a first end face and a second end face located at both ends of the transmission gear, respectively. The first stop and the second stop respectively cooperate with the first end face and the second end face to limit the rotation angle of the optical element.

11. The optical device according to claim 7, characterized in that, A sealing ring is provided inside the adjustment mechanism and / or at the connection between the adjustment mechanism and the lens barrel.

12. A semiconductor device, characterized in that, Includes the optical device according to any one of claims 7 to 11.

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