Dual interface connection admission control system and method within a chemical supply cabinet

Abstract

The application discloses a double-interface connection access control system and method in a chemical supply cabinet, and belongs to the technical field of electronic chemical supply equipment. The system comprises a bearing positioning unit, a liquid pumping end connection detection unit, a liquid returning end connection detection unit, a cabinet safety detection unit, a double-interface integrity detection unit, a liquid supply execution unit and an access control unit. The liquid supply execution unit has a liquid supply prohibition state, an interface test state and a liquid supply permission state; in the interface test state, the downstream liquid supply port is isolated, and the liquid pumping end and the liquid returning end are connected to the double-interface integrity detection unit. The access control unit generates a connection preparation access signal when the packaging barrel is in a standard connection station and the cabinet door and exhaust meet the conditions, and controls the liquid supply execution unit to switch to the liquid supply permission state when the double-interface connection confirmation, double-path integrity detection and leakage state meet the conditions, otherwise, the liquid supply execution unit remains in the liquid supply prohibition state or the interface test state, thereby improving the compatibility and liquid supply safety of electronic-grade chemical packaging barrel replacement.

Description

Technical Field

[0001] This application relates to the field of electronic chemical supply equipment technology, and in particular to a dual-interface connection access control system and method for a chemical supply cabinet. Background Technology

[0002] In recent years, the manufacturing processes of semiconductors, display panels, and solar cells have placed increasing demands on the usage and supply stability of wet electronic chemicals. Acids, alkalis, organic solvents, and compound chemicals typically possess corrosive, toxic, irritating odors, or other hazardous properties. The sealing, safety, and cleanliness of these chemicals during supply, transfer, and replacement directly impact production safety and process stability. For chemicals used in relatively small quantities, chemical supply cabinets are typically used on-site to extract, return, or transfer chemicals from electronic-grade chemical containers, which are then supplied to downstream process equipment via pumps, valves, pipelines, and filtration units.

[0003] Existing Chemical Dispenser Modules (CDMs) typically include a cabinet, pump and valve assemblies, piping assemblies, leak detection, ventilation systems, door detection, alarm systems, and control systems to reduce the risks of chemical leaks, mishandling, and personnel exposure to hazardous chemicals. Some automated dispensers can also utilize conveying mechanisms, clamping mechanisms, robotic arms, or vision recognition mechanisms to assist in the placement, positioning, and connection of electronically packaged chemical containers, thereby reducing manual labor intensity and improving replacement efficiency.

[0004] However, the safety controls of existing chemical supply cabinets are mostly concentrated on individual safety functions such as cabinet door interlocks, leakage alarms, pump and valve start / stop, or abnormal shutdown. For electronic-grade chemical packaging drums with liquid extraction and return ends, there is usually a lack of unified cabinet connection access control logic for the following: the connection status of the liquid extraction end, the connection status of the liquid return end, whether the electronic-grade chemical packaging drum is in the standard connection position, whether the cabinet door is closed, whether the cabinet exhaust meets the connection preparation conditions, whether the dual interface passages before liquid supply are complete, whether the downstream liquid supply port is isolated, and whether there are any leakage anomalies inside the cabinet.

[0005] In this situation, even if the supply cabinet has leak detection, door detection, or pump / valve control functions, the following problems may occur: The electronic-grade chemical packaging drum is not stably in the standard connection position before the connection or liquid supply process begins; the liquid extraction end is connected but the return end is not reliably connected before liquid supply is started; the connector appears to be in good condition, but the seal integrity of the liquid extraction or return end has not been confirmed; the downstream liquid supply port is not isolated before pump / valve switching is performed directly; or the cabinet's ventilation or leakage conditions do not meet safety requirements before liquid supply begins. All of these problems may lead to interface leakage, abnormal pipeline pressure, leakage of residual chemicals, or abnormal shutdown of the supply cabinet. Summary of the Invention

[0006] The purpose of this application is to provide a dual-interface connection access control system and method for chemical supply cabinets. After electronic-grade chemical packaging drums enter the supply cabinet, the system performs phased access judgments on the standard connection station, liquid extraction end, liquid return end, access integrity, and safety status inside the cabinet, so as to avoid accidental start of liquid supply when the interface is not reliably connected or the status inside the cabinet is abnormal.

[0007] To achieve the above technical objectives, this application adopts the following technical solution: A dual-interface access control system is provided inside a chemical supply cabinet, wherein the cabinet contains a liquid supply area, a pump area, and an electrical control area that are isolated from each other. The control system includes: an electronic-grade chemical packaging barrel bearing and positioning unit, a liquid extraction end connection detection unit, a liquid return end connection detection unit, an in-cabinet safety detection unit, a dual-interface integrity detection unit, a liquid supply execution unit, and an access control unit; The electronic-grade chemical packaging barrel support and positioning unit is located in the liquid supply area and is used to support the electronic-grade chemical packaging barrel. When the electronic-grade chemical packaging barrel is in a preset connection position and the posture meets the preset conditions, it outputs a standard connection station confirmation signal. The liquid extraction end connection detection unit, the liquid return end connection detection unit, the cabinet safety detection unit, and the dual-interface integrity detection unit are all signal-connected to the access control unit, and respectively output the liquid extraction end connection confirmation signal, the liquid return end connection confirmation signal, the cabinet door status signal, the exhaust status signal, the leakage status signal, the liquid extraction end integrity detection result, and the liquid return end integrity detection result to the access control unit; The liquid supply execution unit is located in the pump area and is connected to the liquid extraction end, the liquid return end and the downstream liquid supply port respectively; the access control unit is located in the electrical control area and is communicatively connected to the liquid supply execution unit. The liquid supply execution unit is equipped with three working modes: liquid supply prohibited state, interface test state, and liquid supply allowed state. In the interface test state, the liquid supply execution unit isolates the downstream liquid supply port passage and connects the liquid extraction end and the liquid return end to the dual interface integrity detection unit in sequence. The access control unit is configured to generate a connection preparation access signal when the standard connection station confirmation signal, cabinet door status, and exhaust status meet preset connection preparation conditions. When the liquid extraction end connection confirmation signal, the liquid return end connection confirmation signal, the liquid extraction end integrity detection result, the liquid return end integrity detection result, and the leakage status signal meet the preset liquid supply access conditions, the liquid supply execution unit is controlled to switch to the liquid supply allowed state; otherwise, the liquid supply execution unit is controlled to maintain the liquid supply prohibited state or the interface test state.

[0008] Optionally, the electronic-grade chemical packaging drum carrying and positioning unit includes: an inlet, a carrying and conveying part, a limiting part, and a clamping and positioning part; The inlet is used to guide the electronic-grade chemical packaging barrel into the liquid supply area, the carrying and conveying part is used to convey the electronic-grade chemical packaging barrel to the preset connection position, the limiting part is used to limit the horizontal offset range of the electronic-grade chemical packaging barrel at the preset connection position, and the clamping and positioning part is used to clamp the outer periphery of the electronic-grade chemical packaging barrel. The electronic-grade chemical packaging drum bearing and positioning unit is used to output the standard connection station confirmation signal based on the electronic-grade chemical packaging drum positioning signal, clamping positioning signal and attitude confirmation signal; wherein, the attitude confirmation signal indicates that the tilt angle, eccentricity and height position of the electronic-grade chemical packaging drum are all within the preset allowable error range.

[0009] Optionally, the cabinet safety detection unit includes: a cabinet door detection component, an exhaust detection component, and a leakage detection component; the cabinet door detection component is used to collect and output cabinet door status signals indicating the opening and closing status of the cabinet door in real time; the exhaust detection component is used to collect and output exhaust status signals indicating the exhaust operation status of the cabinet in real time; and the leakage detection component is used to collect and output leakage status signals indicating the leakage of chemicals inside the cabinet in real time. The access control unit is configured to connect under the following conditions: the cabinet door is closed according to the cabinet door status signal, and the exhaust parameters inside the cabinet according to the exhaust status signal meet the preset exhaust standards.

[0010] Optionally, the liquid extraction end connection detection unit includes at least one of the following: a liquid extraction connector in-place detection element, a liquid extraction connector locking detection element, and a liquid extraction end pressure detection element; The access control unit determines the connection status of the liquid extraction end based on the detection results of at least one of the liquid extraction connector presence detection device, the liquid extraction connector locking detection device, and the liquid extraction end pressure detection device, and generates the liquid extraction end connection confirmation signal.

[0011] Optionally, the return end connection detection unit includes at least one of the following: a return connector in-place detection element, a return connector locking detection element, and a return end pressure detection element; The access control unit determines the connection status of the return end based on the detection results of at least one of the return connector presence detection device, the return connector locking detection device, and the return end pressure detection device, and generates the return end connection confirmation signal.

[0012] Optionally, the dual-interface integrity detection unit includes: a test gas source, a test valve group, and a pressure detection element; when the liquid supply execution unit is in the interface test state, the test valve group switches the liquid extraction end and the liquid return end to the test branch respectively, forming a detection loop with the test gas source and the pressure detection element; The pressure detection device collects at least one of the following: pressure holding results, pressure decay data, or on / off detection data of the liquid extraction end and the liquid return end. Based on the collected data, it determines the interface sealing and connection filling, and outputs the integrity detection results of the liquid extraction end and the integrity detection results of the liquid return end.

[0013] Optionally, the liquid supply execution unit includes: a liquid supply pump, a liquid supply valve group, a liquid return valve group, and a downstream isolation valve; under the liquid supply prohibited state, the liquid supply pump stops running and the downstream isolation valve closes, cutting off the overall liquid supply path; In the interface test state, the downstream isolation valve is closed and the liquid supply valve group and the liquid return valve group are reversed respectively, connecting the liquid extraction end and the liquid return end to the test circuit of the dual interface integrity detection unit; When the liquid supply is permitted, the downstream isolation valve opens, and the liquid supply pump, the liquid supply valve group, and the return valve group work together to ensure normal liquid supply of chemicals.

[0014] Optionally, the cabinet safety detection unit further includes a partitioned liquid receiving detection component located below the liquid supply area; The partitioned liquid contact detection component is divided into a liquid contact area at the bottom of the electronic-grade chemical packaging barrel, a liquid contact area connected to the liquid extraction end, and a liquid contact area connected to the liquid return end. The access control unit generates a dynamically updated leakage status signal based on the triggering area, triggering time, and liquid level change trend of the partition liquid detection component.

[0015] To achieve the above technical objectives, this application adopts the following technical solution: A dual-interface connection access control method for a chemical supply cabinet, wherein the method is applied to the dual-interface connection access control system for a chemical supply cabinet as described in any one of the above claims, and the access control method includes: The electronic-grade chemical packaging barrel is carried into the liquid supply area by the electronic-grade chemical packaging barrel bearing and positioning unit. The position, clamping status and attitude parameters of the electronic-grade chemical packaging barrel are detected. After the calibration is qualified, the standard connection station confirmation signal is output. By acquiring the cabinet door status signal and exhaust status signal collected by the cabinet safety monitoring unit, and when the standard connection station confirmation signal, the cabinet door status and the exhaust status simultaneously meet the connection preparation conditions, the access control unit generates a connection preparation access signal. The interface connection status is detected by connecting the liquid extraction end to the detection unit and the liquid return end to the detection unit respectively, and the liquid extraction end connection confirmation signal and the liquid return end connection confirmation signal are output respectively. After receiving the dual-interface connection confirmation signal, the access control unit controls the liquid supply execution unit to switch to the interface test state and closes the downstream isolation valve to isolate the downstream liquid supply port. The integrity detection unit performs integrity detection on the liquid extraction end and the liquid return end respectively, and obtains the integrity detection results of the liquid extraction end and the liquid return end. The cabinet's internal safety monitoring unit monitors the leakage situation in real time and continuously outputs leakage status signals. The access control unit verifies the dual-interface connection status, dual-interface integrity detection results, and leak-free status. If all liquid supply access conditions are met, the control unit switches the liquid supply execution unit to the liquid supply allowed state and starts normal liquid supply; otherwise, it maintains the test state or prohibits liquid supply.

[0016] Optionally, when the liquid extraction end connection confirmation signal does not meet the liquid supply access condition, the liquid supply execution unit is controlled to close the liquid extraction end passage and keep the downstream liquid supply port isolated; When the return liquid connection confirmation signal does not meet the liquid supply access condition, the liquid supply execution unit is controlled to close the return liquid passage and keep the downstream liquid supply port isolated. When the integrity detection result of the liquid extraction end or the integrity detection result of the liquid return end is abnormal and does not meet the liquid supply access conditions, the liquid supply execution unit is controlled to close the pipeline passage of the corresponding abnormal interface and keep the downstream liquid supply port isolated.

[0017] The main advantages of this application compared to the prior art are as follows: This application incorporates an electronic chemical packaging drum positioning unit, a liquid extraction end connection detection unit, a liquid return end connection detection unit, a cabinet safety detection unit, a dual-interface integrity detection unit, a liquid supply execution unit, and an access control unit within the chemical supply cabinet. This allows the system to move beyond relying solely on manual experience or single cabinet door or leakage signals to determine whether liquid supply is permitted upon the electronic chemical packaging drum entering the supply area. Instead, it integrates standard connection positions, liquid extraction end connection status, liquid return end connection status, liquid extraction end integrity, liquid return end integrity, cabinet door status, ventilation status, and leakage status into a unified liquid supply access judgment. This enables phased access control of the dual-interface connection process of the electronic chemical packaging drum before liquid supply, preventing accidental initiation of liquid supply when the packaging drum is not stably positioned, the liquid extraction or return end is not reliably connected, the integrity of the passage is not confirmed, or the cabinet's safety status is abnormal. This reduces the risks of interface leakage, abnormal pipeline pressure, and chemical leakage, improving the connection reliability and operational safety of the chemical supply cabinet.

[0018] This application enables the liquid supply execution unit to have three states: liquid supply prohibited, interface test, and liquid supply permitted. In the interface test state, the downstream liquid supply port is isolated, while the extraction and return ends are connected to a dual-interface integrity detection unit. This allows for the completion of dual-interface path detection without supplying liquid downstream. Consequently, the risk of externally intact connectors, internal leaks, unconnected paths, or undetected abnormalities on the return side can be reduced.

[0019] This application sets up connection preparation and liquid supply access in stages. The cabinet door status and exhaust status are first used as prerequisites for entering the dual-interface connection confirmation stage, and then the liquid extraction end connection confirmation, liquid return end connection confirmation, dual-path integrity detection, and leakage status are used as prerequisites for liquid supply. This avoids performing liquid supply operations before the cabinet environment meets safety conditions, thus establishing a clear safety boundary between the electronic-grade chemical packaging container connection process and the liquid supply initiation process.

[0020] This application performs connection verification and path integrity checks on both the pumping and returning ends separately, preventing the two interfaces from being treated as a single connected state. This allows for the separate identification of pumping end connection anomalies, returning end connection anomalies, pumping end anomalies, and returning end anomalies, facilitating subsequent actions such as pump shutdown, valve closure, isolation maintenance, alarm activation, or ventilation maintenance based on different anomaly types, thus improving the efficiency of anomaly location and fault handling.

[0021] This application maintains a liquid supply prohibition state or interface test state when any liquid supply access condition is not met, enabling the supply cabinet to remain in a controlled state in the event of an anomaly, rather than directly entering liquid supply or completely losing control and shutting down. This reduces the safety risks caused by accidental liquid supply, accidental valve opening, or downstream misconnection during the connection of electronic-grade chemical packaging containers, and improves the error prevention capabilities and manageability of the chemical supply process. Attached Figure Description

[0022] Figure 1 This is a structural block diagram of the dual-interface access control system for the chemical supply cabinet in this application. Figure 2 This is a flowchart of the dual-interface connection access control method for the chemical supply cabinet described in this application.

[0023] In the attached diagram: 1. Electronic-grade chemical packaging drum; 11. Liquid extraction end; 12. Liquid return end; 13. Downstream liquid supply port; 100. Chemical supply cabinet; 101. Cabinet body; 110. Liquid supply area; 120. Pump area; 130. Electrical control area; 200. Electronic-grade chemical packaging drum bearing and positioning unit; 210. Inlet section; 220. Bearing and conveying section; 230. Limiting section; 240. Clamping and positioning section; 251. Electronic-grade chemical packaging drum positioning detection component; 252. Clamping positioning detection component; 253. Posture detection component; 300. Liquid extraction end connection detection unit; 310. Liquid extraction connector in-place detection component; 320. Liquid extraction connector locking detection component; 330. Liquid extraction end pressure detection component; 400. Liquid return end connection detection unit; 410. Liquid return connector in-place detection component; 420. Liquid return connector locking component. Detection components; 430, Return liquid pressure detection component; 500, Cabinet internal safety detection unit; 510, Cabinet door detection component; 520, Exhaust detection component; 530, Leakage detection component; 540, Zoned liquid receiving detection assembly; 541, Bottom liquid receiving area of ​​electronic grade chemical packaging drum; 542, Liquid receiving area connected to the extraction end; 543, Liquid receiving area connected to the return end; 600, Dual-interface integrity detection unit; 610, Test gas source; 620, Test valve assembly; 630, Pressure detection component; 700, Liquid supply execution unit; 710, Liquid supply pump; 720, Liquid supply valve assembly; 730, Return valve assembly; 740, Downstream isolation valve; 800, Access control unit; 810, Controller; 820, Input / output module; 830, Valve and pump control module; 840, Status judgment module; 850, Alarm recording module. Detailed Implementation

[0024] The technical solution of this application will be clearly and completely described below with reference to the accompanying drawings. It should be understood that the described embodiments are only for illustrating this application and are not intended to limit the scope of protection of this application. Where there is no conflict, the various technical features in this embodiment can be combined with each other. For example... Figure 1 As shown, this embodiment provides a dual-interface access control system for a chemical supply cabinet.

[0025] It should be noted that the dual-port designation refers to the liquid extraction end on the electronic-grade chemical packaging drum 1 used for discharging chemical liquids, and the liquid return end used for liquid return, reflux, or pressure balancing. The electronic-grade chemical packaging drum 1 can be an electronic-grade chemical packaging drum for supplying electronic chemicals, including acids, alkalis, organic solvents, or compound chemicals.

[0026] In this embodiment, an electronic-grade chemical packaging drum 1 is used as an example for illustration, but its connection access control logic is also applicable to other chemical containers with a liquid extraction end and a liquid return end.

[0027] The chemical supply cabinet 100 includes a cabinet body 101, within which are separated supply area 110, pump area 120, and electrical control area 130. Supply area 110 is used to accommodate electronic-grade chemical packaging containers 1 that enter the cabinet body 101, and serves as an area for connection preparation, connection verification, and leak detection of the electronic-grade chemical packaging containers 1. Pump area 120 is used to house pumps, valves, pipelines, and flow switching components related to the supply. Electrical control area 130 is used to house electrical control components to reduce the impact of chemical gases or leaked liquids in supply area 110 on the electrical control components.

[0028] The dual-interface access control system includes an electronic chemical packaging drum bearing and positioning unit 200, a liquid extraction end connection detection unit 300, a liquid return end connection detection unit 400, a cabinet safety detection unit 500, a dual-interface integrity detection unit 600, a liquid supply execution unit 700, and an access control unit 800.

[0029] The electronic-grade chemical packaging drum support and positioning unit 200 is located in the liquid supply area 110. It is used to support the electronic-grade chemical packaging drum 1 entering the liquid supply area 110 and output a standard connection station confirmation signal. The standard connection station confirmation signal is used to indicate that the electronic-grade chemical packaging drum 1 is in a preset position and preset posture within the liquid supply area 110 and can be confirmed for dual-interface connection.

[0030] In this embodiment, the electronic-grade chemical packaging barrel carrying and positioning unit 200 includes an inlet section 210, a carrying and conveying section 220, a limiting section 230, and a clamping and positioning section 240. The inlet section 210 is located on the inlet side of the liquid supply area 110 and is used to guide the electronic-grade chemical packaging barrel 1 into the liquid supply area 110 along a preset direction. The carrying and conveying section 220 carries the electronic-grade chemical packaging barrel 1 and conveys it to a preset connection position. The carrying and conveying section 220 can employ a roller conveyor structure, a conveyor belt structure, a linear slide structure, or other structures capable of carrying and conveying the electronic-grade chemical packaging barrel 1. The limiting section 230 is located near the preset connection position and is used to limit the lateral or longitudinal displacement of the electronic-grade chemical packaging barrel 1 within the liquid supply area 110. The clamping and positioning section 240 clamps the outer periphery of the electronic-grade chemical packaging barrel 1, ensuring its stability during connection confirmation and interface testing.

[0031] The electronic-grade chemical packaging drum positioning unit 200 also includes an electronic-grade chemical packaging drum positioning detection element 251, a clamping positioning detection element 252, and a posture detection element 253. The electronic-grade chemical packaging drum positioning detection element 251 detects whether the electronic-grade chemical packaging drum 1 has reached the preset connection position. The clamping positioning detection element 252 detects whether the clamping positioning unit 240 has stably clamped the electronic-grade chemical packaging drum 1. The posture detection element 253 detects whether the electronic-grade chemical packaging drum 1 has any tilt, eccentricity, or height abnormality exceeding the allowable range. The access control unit 800 generates a standard connection station confirmation signal based on the detection results of the electronic-grade chemical packaging drum positioning detection element 251, clamping positioning detection element 252, and posture detection element 253. This prevents the electronic-grade chemical packaging drum 1 from entering the subsequent connection confirmation or liquid supply access process before it is stably positioned in the connection station.

[0032] The liquid extraction end connection detection unit 300 is used to acquire a liquid extraction end connection confirmation signal of the electronic-grade chemical packaging container 1. The liquid extraction end connection confirmation signal indicates that a predetermined connection has been formed between the liquid extraction end and the liquid extraction end 11 of the electronic-grade chemical packaging container 1. The liquid extraction end 11 refers to the liquid extraction passage extending from the liquid extraction end of the electronic-grade chemical packaging container 1 to the liquid supply execution unit 700.

[0033] In this embodiment, the liquid extraction end connection detection unit 300 may include at least one of a liquid extraction connector in-situ detection element 310, a liquid extraction connector locking detection element 320, and a liquid extraction end pressure detection element 330. The liquid extraction connector in-situ detection element 310 is used to detect whether the liquid extraction connector is in a predetermined connection position at the liquid extraction end. The liquid extraction connector locking detection element 320 is used to detect whether the liquid extraction connector has been properly locked. The liquid extraction end pressure detection element 330 is used to detect the pressure response or pressure holding state of the liquid extraction end 11 after connection. The access control unit 800 generates a liquid extraction end connection confirmation signal based on at least one of the above detection results.

[0034] The return liquid end connection detection unit 400 is used to acquire a return liquid end connection confirmation signal of the electronic-grade chemical packaging container 1. The return liquid end connection confirmation signal indicates that a predetermined connection has been formed between the return liquid end and the return liquid end 12 of the electronic-grade chemical packaging container 1. The return liquid end 12 refers to the return liquid, reflux, venting, or pressure balancing passage that is connected to the return liquid end of the electronic-grade chemical packaging container 1.

[0035] In this embodiment, the return end connection detection unit 400 may include at least one of a return connector in-situ detection element 410, a return connector locking detection element 420, and a return end pressure detection element 430. The return connector in-situ detection element 410 is used to detect whether the return connector is in a predetermined connection position at the return end. The return connector locking detection element 420 is used to detect whether the return connector is properly locked. The return end pressure detection element 430 is used to detect the pressure response or pressure holding state of the return end 12 after connection. The access control unit 800 generates a return end connection confirmation signal based on at least one of the above detection results.

[0036] By separately setting up a liquid extraction end connection detection unit 300 and a liquid return end connection detection unit 400, this embodiment does not treat the liquid extraction end and the liquid return end of the electronic-grade chemical packaging container 1 as a single connection object, but instead acquires a liquid extraction end connection confirmation signal and a liquid return end connection confirmation signal separately. Therefore, it can independently identify different abnormal states such as liquid extraction end not connected, liquid extraction end not locked, liquid return end not connected, or liquid return end not locked.

[0037] The cabinet safety detection unit 500 is used to acquire information on the cabinet door status, ventilation status, and leakage status. The cabinet door status indicates whether the cabinet door of cabinet 101 is closed or tightened. The ventilation status indicates whether the ventilation, negative pressure, or air exchange status in the liquid supply area 110 meets the connection preparation conditions. The leakage status indicates whether there is leaking liquid or a suspected leak in the liquid supply area 110.

[0038] In this embodiment, the cabinet safety detection unit 500 includes a cabinet door detection component 510, an exhaust detection component 520, and a leakage detection component 530. The cabinet door detection component 510 can be a magnetic door switch, proximity switch, limit switch, or clamping detection component, used to output the cabinet door status. The exhaust detection component 520 can be an airflow detection component, air pressure detection component, negative pressure detection component, or exhaust operation status detection component, used to output the exhaust status. The leakage detection component 530 can be a liquid level sensor, conductive leakage detection component, photoelectric leakage detection component, or other leakage detection component suitable for chemical environments, used to output the leakage status.

[0039] The leak detection element 530 includes a water collection tank and a liquid level sensor. The water collection tank is located below the conveying section 220 and between the roller frames on both sides of the conveying section 220. The water collection tank extends along the conveying direction of the electronic-grade chemical packaging drum 1, and its upper part forms a liquid receiving opening facing the bottom of the electronic-grade chemical packaging drum 1 and the dual-interface connection area, for collecting liquids dripping or leaking from the drum body, the extraction end, the return end, or the corresponding connection passage of the electronic-grade chemical packaging drum 1. The water collection tank is fixed to the bottom plate of the supply area 110 or the mounting plate of the conveying section 220, and the tank body is made of a corrosion-resistant material compatible with the supplied chemicals.

[0040] The bottom of the water collection tank is inclined towards a preset collection position so that liquid entering the tank collects at the preset collection position. A level sensor is located at the preset collection position, with its sensing end positioned at a preset height above the bottom of the water collection tank. It is used to detect whether the liquid level in the water collection tank has reached a preset alarm level. The level sensor can be a corrosion-resistant contact level sensor or a non-contact level sensor located on the outside of the water collection tank.

[0041] The liquid level sensor is connected to the access control unit 800. When the liquid level in the collection tank does not reach the preset alarm level, the liquid level sensor outputs a no-leakage trigger signal; when the liquid level in the collection tank reaches the preset alarm level, the liquid level sensor outputs a leakage trigger signal. Based on this, the access control unit 800 generates a leakage state indicating an abnormal leakage and controls the liquid supply execution unit 700 to maintain the liquid supply prohibited state, or stops the liquid supply pump 710, closes the downstream isolation valve 740, and maintains the exhaust state.

[0042] In the partitioned detection implementation, the water collection tank is equipped with a partition structure, which divides the water collection tank into a bottom liquid receiving area 541 of the electronic-grade chemical packaging drum, a liquid receiving area 542 connected to the extraction end, and a liquid receiving area 543 connected to the return end, thus forming a partitioned liquid receiving detection component 540. Each liquid receiving area corresponds to the bottom of the electronic-grade chemical packaging drum 1, the liquid receiving area connected to the extraction end, and the liquid receiving area connected to the return end, respectively. Each liquid receiving area is equipped with a liquid level sensor. The access control unit 800 determines the leakage location based on the liquid receiving area that outputs the leakage trigger signal, and generates the corresponding leakage status in conjunction with the current connection stage or interface testing stage.

[0043] Furthermore, the cabinet-mounted safety detection unit 500 may include a zoned liquid receiving detection component 540 located below the liquid supply area 110. The zoned liquid receiving detection component 540 includes a bottom liquid receiving area 541 for the electronic-grade chemical packaging drum, a liquid receiving area 542 connected to the extraction end, and a liquid receiving area 543 connected to the return end. The bottom liquid receiving area 541 corresponds to the bottom area of ​​the electronic-grade chemical packaging drum 1 and is used to receive or detect any leaked liquid that may occur at the bottom, body, or bottom bearing area of ​​the electronic-grade chemical packaging drum 1. The liquid receiving area 542 corresponds to the extraction end connection area and is used to receive or detect any residual or leaked liquid that may occur at the extraction end connection. The liquid receiving area 543 corresponds to the return end connection area and is used to receive or detect any residual or leaked liquid that may occur at the return end connection.

[0044] In this embodiment, the access control unit 800 comprehensively judges the leakage status based on the triggering area, triggering time, and liquid level change trend of the partition liquid receiving detection component 540. Specifically: when the liquid receiving area 542 of the liquid receiving end is triggered in stage S3 (liquid receiving end connection confirmation stage), and the liquid level continues to rise above the first liquid level threshold within a preset time window, it is determined that the liquid receiving end connection area is leaking abnormally; when the liquid receiving area 543 of the liquid receiving end is triggered in stage S3, and the liquid level continues to rise above the second liquid level threshold, it is determined that the liquid receiving end connection area is leaking abnormally; when the liquid receiving area 541 at the bottom of the electronic-grade chemical packaging drum is triggered at any stage, it is determined that the bottom of the electronic-grade chemical packaging drum is leaking abnormally. For cases where the liquid level stabilizes and no longer rises after an instantaneous trigger, it is determined to be residual liquid dripping rather than continuous leakage, and no leakage abnormality alarm is triggered.

[0045] The dual-interface integrity detection unit 600 is used to acquire the integrity detection results of the liquid extraction end and the liquid return end, respectively. The integrity detection result of the liquid extraction end is used to indicate whether the liquid extraction end 11 meets the preset integrity conditions. The integrity detection result of the liquid return end is used to indicate whether the liquid return end 12 meets the preset integrity conditions.

[0046] In this embodiment, the dual-interface integrity detection unit 600 includes a test gas source 610, a test valve assembly 620, and a pressure detection element 630. The test gas source 610 provides the test medium to the test branch. The test medium can be a clean, dry gas, an inert gas, or other test medium that will not contaminate the chemical pathway and is suitable for the chemical supply environment. The test valve assembly 620 switches the liquid extraction end 11 and the liquid return end 12 to the test branch respectively during interface testing. The pressure detection element 630 acquires the pressure holding result, pressure decay result, or continuity test result for the liquid extraction end 11 and the liquid return end 12 respectively.

[0047] Specifically, during pressure holding testing, the test valve assembly 620 connects the test gas source 610 to the liquid extraction end 11 or the liquid return end 12, bringing the corresponding passage to the preset test pressure. Then, the corresponding test valve is closed, and the pressure detection element 630 detects the pressure change within the preset holding time. If the pressure drop does not exceed the preset pressure decay threshold, the pressure holding result of the corresponding passage is deemed to meet the integrity condition; if the pressure drop exceeds the preset pressure decay threshold, the corresponding passage is deemed to have a risk of loose connection, abnormal sealing, or leakage.

[0048] During pressure decay detection, the pressure detection element 630 acquires the pressure decay curve of the corresponding passage within a preset time. The access control unit 800 compares the pressure decay curve with preset decay conditions and generates the integrity detection result of the corresponding passage. During continuity detection, the test valve assembly 620 applies test pressure or test flow to the corresponding passage. The pressure detection element 630 detects whether the passage response reaches the preset response condition within a preset response time. If the preset response condition is reached, the corresponding passage is determined to be in a connected state; if the preset response condition is not reached, it is determined that the corresponding passage may have an abnormality such as not being connected, being blocked, or the valve not being switched to the correct position.

[0049] The dual-interface integrity detection unit 600 detects the liquid extraction end 11 and the liquid return end 12 respectively, and outputs the detection results as the liquid extraction end integrity detection result and the liquid return end integrity detection result respectively. This detection is completed before the liquid supply execution unit 700 enters the liquid supply permission state, and can confirm the integrity of the dual-interface path without supplying liquid to downstream process equipment.

[0050] The liquid supply execution unit 700 is located in the pump area 120 and is connected to the liquid extraction end 11, the liquid return end 12, and the downstream liquid supply port 13. The downstream liquid supply port 13 is used to connect to downstream process equipment, liquid storage units, or liquid supply networks. The state switching of the liquid supply execution unit 700 is controlled by the access control unit 800. The conditions for switching from the liquid supply prohibited state to the interface test state are: the standard connection station confirmation signal is valid, the cabinet door status indicates that the cabinet door is closed, the exhaust status meets the preset exhaust conditions, and both the liquid extraction end connection confirmation signal and the liquid return end connection confirmation signal are valid. The conditions for switching from the interface test state to the liquid supply permitted state are: both the liquid extraction end integrity test result and the liquid return end integrity test result meet the preset integrity conditions, and the leakage status indicates that there is no leakage abnormality. During the interface test, if the cabinet door is opened, the exhaust is abnormal, the leakage is abnormal, or any connection confirmation signal fails, the access control unit 800 immediately controls the liquid supply execution unit 700 to return to the liquid supply prohibited state.

[0051] In this embodiment, the liquid supply execution unit 700 includes a liquid supply pump 710, a liquid supply valve assembly 720, a return valve assembly 730, and a downstream isolation valve 740. The liquid supply pump 710 provides pumping or supply power when liquid supply is permitted. The liquid supply valve assembly 720 controls the connection between the pumping end 11 and the liquid supply pump 710, the downstream liquid supply port 13, or the test branch. The return valve assembly 730 controls the connection between the return end 12 and the return branch, the pressure balance branch, or the test branch. The downstream isolation valve 740 controls the connection or isolation between the liquid supply execution unit 700 and the downstream liquid supply port 13.

[0052] The liquid supply execution unit 700 has a liquid supply prohibited state, an interface test state, and a liquid supply allowed state.

[0053] When liquid supply is prohibited, the liquid supply pump 710 stops, the downstream isolation valve 740 closes, and the liquid supply execution unit 700 does not supply liquid to the downstream liquid supply port 13. At this time, even if the electronic-grade chemical packaging drum 1 has entered the liquid supply area 110, it will not output chemicals to the downstream process equipment.

[0054] During interface testing, the downstream isolation valve 740 remains closed, isolating the downstream supply port 13. The supply valve assembly 720 and return valve assembly 730 connect the extraction end 11 and the return end 12 to the dual-interface integrity detection unit 600, respectively. At this time, the dual-interface integrity detection unit 600 can perform pressure maintenance, pressure decay, or on / off detection on the extraction end 11 and the return end 12, but the testing process will not allow chemicals to enter the downstream supply port 13. Therefore, dual-interface integrity verification can be completed under controlled conditions with downstream isolation.

[0055] When the liquid supply is permitted, the liquid supply execution unit 700 disconnects the test connection between the liquid extraction end 11 and the liquid return end 12 and the test branch, and opens the downstream isolation valve 740 according to the liquid supply task, so that the downstream liquid supply port 13 enters the liquid supply state. The liquid supply pump 710 can be started under the control of the access control unit 800, and the liquid supply valve group 720 and the liquid return valve group 730 form corresponding liquid supply and liquid return ends according to the liquid supply logic.

[0056] The access control unit 800 is located in the electrical control area 130 and is signal-connected to the electronic-grade chemical packaging drum positioning unit 200, the liquid extraction end connection detection unit 300, the liquid return end connection detection unit 400, the cabinet safety detection unit 500, and the dual-interface integrity detection unit 600. The access control unit 800 is also control-connected to the liquid supply execution unit 700 to control the liquid supply execution unit 700 to switch between a liquid supply prohibited state, an interface test state, and a liquid supply permitted state.

[0057] The access control unit 800 may include a controller, an input / output module, a valve / pump control module, a status judgment module, and an alarm recording module. The controller may be a PLC, industrial controller, embedded controller, or other controller suitable for chemical supply equipment. The input / output module receives detection signals from each detection unit and outputs control signals to the liquid supply execution unit 700. The status judgment module determines whether the connection preparation conditions and liquid supply access conditions are met. The alarm recording module records the entry time of the electronic-grade chemical packaging drum 1, the connection preparation access time, the liquid extraction end connection confirmation time, the liquid return end connection confirmation time, interface test results, leakage status, liquid supply access time, and abnormal information.

[0058] The access control unit 800 first determines whether the connection preparation conditions are met based on the standard connection station confirmation signal, cabinet door status, and exhaust status. Connection preparation conditions may include: the electronic-grade chemical packaging drum 1 being in the standard connection station; the cabinet door status indicating the door is closed or tightened; and the exhaust status indicating that the exhaust volume, negative pressure value, or exhaust operation status meets preset exhaust conditions. Once the connection preparation conditions are met, the access control unit 800 generates a connection preparation access signal. This signal indicates that the liquid supply area 110 has met the prerequisites for dual-interface connection confirmation, but the signal itself does not indicate permission to supply liquid to the downstream liquid supply port 13.

[0059] After generating the connection preparation access signal, the access control unit 800 acquires the liquid extraction end connection confirmation signal and the liquid return end connection confirmation signal. Only when both the liquid extraction end connection confirmation signal and the liquid return end connection confirmation signal indicate that the corresponding interface connection meets the preset conditions, will the access control unit 800 control the liquid supply execution unit 700 to enter the interface test state; if any interface connection is not confirmed, the access control unit 800 keeps the liquid supply execution unit 700 in the liquid supply prohibited state.

[0060] During interface testing, the access control unit 800 keeps the downstream isolation valve 740 closed, isolating the downstream supply port 13. Simultaneously, it controls the supply valve assembly 720 and return valve assembly 730 to connect the suction end 11 and return end 12 to the dual-interface integrity detection unit 600. The dual-interface integrity detection unit 600 outputs the integrity detection results for both the suction end and the return end. Based on these detection results, the access control unit 800 determines whether the dual-interface path meets the integrity requirements.

[0061] The access control unit 800 also acquires the leakage status. The leakage status can originate from the leakage detection element 530 or from the zone liquid contact detection component 540. The access control unit 800 determines whether there is a leakage anomaly in the liquid supply zone 110 based on the leakage status. If the leakage status indicates no leakage anomaly, and the liquid extraction end connection confirmation signal, the liquid return end connection confirmation signal, the liquid extraction end integrity detection result, and the liquid return end integrity detection result all meet the liquid supply access conditions, then the access control unit 800 controls the liquid supply execution unit 700 to switch to the liquid supply permitted state.

[0062] If any of the following conditions—the liquid extraction connection confirmation signal, the liquid return connection confirmation signal, the liquid extraction integrity test result, the liquid return integrity test result, or the leakage status—does not meet the liquid supply access conditions, the access control unit 800 controls the liquid supply execution unit 700 to maintain a liquid supply prohibited state or an interface test state. Specifically, when the liquid extraction connection confirmation signal or the liquid return connection confirmation signal does not meet the liquid supply access conditions, the access control unit 800 keeps the downstream isolation valve 740 closed and prohibits the liquid supply pump 710 from starting. When the liquid extraction integrity test result or the liquid return integrity test result does not meet the liquid supply access conditions, the access control unit 800 controls the corresponding path to close or maintain test isolation and outputs an interface abnormality alarm. When the leakage status indicates a leakage abnormality, the access control unit 800 controls the liquid supply pump 710 to stop, closes the downstream isolation valve 740, and maintains the exhaust state to reduce the risk of leakage liquid or volatile gas diffusion.

[0063] Through the above system structure, this embodiment forms a complete control link from the positioning of the electronic-grade chemical packaging drum 1 in the cabinet, connection preparation and access, dual-interface connection confirmation, dual-path integrity detection, leakage status acquisition to the switching of the liquid supply execution status. This control link does not rely on a single cabinet door detection or a single leakage alarm signal to determine whether to supply liquid. Instead, it integrates the standard connection position of the electronic-grade chemical packaging drum 1, the connection status of the liquid extraction end, the connection status of the liquid return end, the integrity of the liquid extraction end, the integrity of the liquid return end, the cabinet door status, the ventilation status, and the leakage status into the liquid supply access judgment.

[0064] Figure 2This is a flowchart of the dual-interface connection access control method for a chemical supply cabinet according to this application. This method is applied to the aforementioned dual-interface connection access control system for a chemical supply cabinet. The method includes steps S1 to S6, which are sequentially connected to form an access control process for the same electronic-grade chemical packaging drum 1 within the same connection cycle.

[0065] Step S1: The electronic-grade chemical packaging drum is carried into the liquid supply area by the electronic-grade chemical packaging drum carrying and positioning unit, and a standard connection station confirmation signal is obtained.

[0066] In step S1, after the electronic-grade chemical packaging drum 1 enters the liquid supply area 110 of the chemical supply cabinet 100, it is carried and positioned by the electronic-grade chemical packaging drum carrying and positioning unit 200. Specifically, the inlet 210 guides the electronic-grade chemical packaging drum 1 into the liquid supply area 110, the carrying and conveying 220 carries the electronic-grade chemical packaging drum 1 and conveys it to a preset connection position, the limiting 230 limits the offset range of the electronic-grade chemical packaging drum 1 at the preset connection position, and the clamping and positioning 240 clamps and positions the outer periphery of the electronic-grade chemical packaging drum 1.

[0067] The access control unit 800 acquires an electronic chemical packaging drum arrival signal via the electronic chemical packaging drum arrival detection element 251, a clamping arrival signal via the clamping arrival detection element 252, and an attitude confirmation signal via the attitude detection element 253. The access control unit 800 determines whether the electronic chemical packaging drum 1 is in the standard connection position based on the electronic chemical packaging drum arrival signal, the clamping arrival signal, and the attitude confirmation signal. When the electronic chemical packaging drum 1 reaches the preset connection position, the clamping and positioning part 240 forms an effective clamp, and the attitude of the electronic chemical packaging drum 1 is within the allowable range, the access control unit 800 acquires or generates a standard connection position confirmation signal.

[0068] If the electronic-grade chemical packaging drum 1 does not reach the preset connection position, the clamping and positioning part 240 fails to form an effective clamp, or the attitude detection component 253 detects that the electronic-grade chemical packaging drum 1 is eccentric, tilted, or has an abnormal height, the access control unit 800 will not generate a valid standard connection station confirmation signal. At this time, subsequent connection preparation access will not be triggered, and the liquid supply execution unit 700 will remain in a liquid supply prohibited state. Thus, S1 provides a stable station foundation for subsequent cabinet door, ventilation, dual-interface connection confirmation, and interface testing.

[0069] Step S2: Obtain the cabinet door status and exhaust status, and after confirming that the signal, cabinet door status and exhaust status meet the connection preparation conditions at the standard connection station, generate a connection preparation access signal.

[0070] In step S2, after obtaining the standard connection station confirmation signal, the access control unit 800 further obtains the cabinet door status and exhaust status. The cabinet door status is output by the cabinet door detection element 510, indicating whether the cabinet door of the cabinet 101 is closed or pressed tightly. The exhaust status is output by the exhaust detection element 520, indicating whether the exhaust volume, negative pressure value, or exhaust operation status in the liquid supply area 110 has reached the preset exhaust conditions.

[0071] The access control unit 800 uses the standard connection station confirmation signal, cabinet door status, and exhaust status as connection preparation conditions for judgment. When the standard connection station confirmation signal is valid, the cabinet door status indicates that the cabinet door is closed or tightened, and the exhaust status indicates that the liquid supply area 110 has reached the preset exhaust conditions, the access control unit 800 generates a connection preparation access signal.

[0072] The connection preparation access signal indicates that the supply zone 110 has met the basic safety conditions for entering the dual-interface connection confirmation stage. It should be noted that the connection preparation access signal is not the same as the supply access signal; it only allows subsequent acquisition of the pumping end connection confirmation signal and the return end connection confirmation signal, or allows external connection actuators, manual connection operations, or semi-automatic connection mechanisms to perform interface connection confirmation under controlled conditions. At this time, the supply execution unit 700 remains in a supply prohibited state, and the downstream supply port 13 does not enter a supply connected state.

[0073] If any of the standard connection station confirmation signal, cabinet door status, or exhaust status fails to meet the connection preparation conditions, the access control unit 800 will not generate a connection preparation access signal. The liquid supply execution unit 700 will continue to maintain the liquid supply prohibited state to prevent the dual-interface connection confirmation or liquid supply process from starting if the electronic-grade chemical packaging drum 1 is not stably positioned, the cabinet door is not closed, or the exhaust is not up to standard.

[0074] Step S3: Obtain the connection confirmation signal for the liquid extraction end and the connection confirmation signal for the liquid return end.

[0075] In step S3, after generating the connection preparation access signal, the access control unit 800 acquires the liquid extraction end connection confirmation signal and the liquid return end connection confirmation signal, respectively. The liquid extraction end connection confirmation signal is output by the liquid extraction end connection detection unit 300, and the liquid return end connection confirmation signal is output by the liquid return end connection detection unit 400.

[0076] For the pumping end, the pumping end connection detection unit 300 can detect whether the pumping connector has reached the preset connection position through the pumping connector in-place detection element 310, detect whether the pumping connector is locked through the pumping connector locking detection element 320, and detect whether the pumping end 11 has the expected connection pressure response through the pumping end pressure detection element 330. The access control unit 800 generates a pumping end connection confirmation signal based on at least one of the above detection results.

[0077] For the return end, the return end connection detection unit 400 can detect whether the return connector has reached the preset connection position through the return connector in-place detection element 410, detect whether the return connector is locked through the return connector locking detection element 420, and detect whether the return end 12 has the expected connection pressure response through the return end pressure detection element 430. The access control unit 800 generates a return end connection confirmation signal based on at least one of the above detection results.

[0078] In step S3, the liquid extraction end connection confirmation signal and the liquid return end connection confirmation signal are independent of each other. The access control unit 800 will not assume that the other interface has also completed connection confirmation simply because one interface has completed connection confirmation. If both the liquid extraction end connection confirmation signal and the liquid return end connection confirmation signal meet the preset connection confirmation conditions, the access control unit 800 allows the liquid supply execution unit 700 to enter the interface test state to perform subsequent dual-path integrity detection. If either connection confirmation signal does not meet the preset connection confirmation conditions, the access control unit 800 keeps the liquid supply execution unit 700 in the liquid supply prohibited state and does not allow it to enter the liquid supply permitted state.

[0079] Step S4: Under the interface test state of the liquid supply execution unit isolating the downstream liquid supply port, perform integrity tests on the liquid extraction end and the liquid return end respectively, and obtain the integrity test results of the liquid extraction end and the liquid return end.

[0080] In step S4, after the access control unit 800 confirms that both the liquid extraction end connection confirmation signal and the liquid return end connection confirmation signal meet the preset connection confirmation conditions based on S3, the access control unit 800 controls the liquid supply execution unit 700 to enter the interface test state.

[0081] In the interface test state, the liquid supply execution unit 700 keeps the downstream isolation valve 740 closed, thereby isolating the downstream liquid supply port 13. At this time, the liquid supply pump 710 does not output chemicals to the downstream liquid supply port 13. The liquid supply valve group 720 and the liquid return valve group 730 connect the liquid extraction end 11 and the liquid return end 12 to the dual interface integrity detection unit 600, respectively, so that the liquid extraction end 11 and the liquid return end 12 enter the testable state.

[0082] The dual-interface integrity detection unit 600 performs integrity detection on the liquid extraction end 11 and the liquid return end 12 through a test gas source 610, a test valve assembly 620, and a pressure detection element 630, respectively. For the liquid extraction end 11, the test valve assembly 620 switches the liquid extraction end 11 to the corresponding test branch, and the pressure detection element 630 acquires the pressure holding result, pressure decay result, or on / off detection result of the liquid extraction end 11, and outputs the integrity detection result of the liquid extraction end. For the liquid return end 12, the test valve assembly 620 switches the liquid return end 12 to the corresponding test branch, and the pressure detection element 630 acquires the pressure holding result, pressure decay result, or on / off detection result of the liquid return end 12, and outputs the integrity detection result of the liquid return end.

[0083] In one detection method, the dual-interface integrity detection unit 600 applies a preset test pressure to the liquid extraction end 11 or the liquid return end 12, and detects the pressure change within a preset holding time after closing the corresponding test valve. When the pressure change is within a preset allowable range, the access control unit 800 determines that the integrity detection result of the corresponding passage meets the liquid supply access conditions; when the pressure change exceeds the preset allowable range, the access control unit 800 determines that there is a leak, poor sealing, or abnormal connection in the corresponding passage.

[0084] In another detection method, the dual-interface integrity detection unit 600 performs continuity detection on the liquid extraction end 11 or the liquid return end 12. When the test valve is opened, if the corresponding passage generates a pressure response or flow response that meets the preset conditions within a preset response time, the access control unit 800 determines that the corresponding passage is in a connected state; if the corresponding passage does not generate a response that meets the preset conditions, the access control unit 800 determines that the corresponding passage is not connected, blocked, or has an abnormal valve switching.

[0085] Step S4 is performed while the downstream supply port 13 is isolated. Therefore, even if there is a connection abnormality at the extraction end 11 or the return end 12, the abnormality will be limited to the interface test state and will not directly cause the chemicals to be mistakenly supplied to the downstream supply port 13.

[0086] Step S5: Obtain the leakage status.

[0087] In step S5, the access control unit 800 acquires the leakage status output by the cabinet safety detection unit 500. The leakage status can be output by the leakage detection element 530 or by the partition liquid contact detection component 540.

[0088] In this embodiment, the zoned liquid contact detection component 540 includes a liquid contact area 541 at the bottom of the electronic-grade chemical packaging container, a liquid contact area 542 connected to the extraction end, and a liquid contact area 543 connected to the return end. The access control unit 800 generates a leakage status based on the triggering area, triggering time, and liquid level change trend of the zoned liquid contact detection component 540.

[0089] Specifically, if no abnormal liquid level or leakage trigger signal is detected in the bottom receiving area 541, the liquid receiving area 542 connected to the extraction end, and the liquid receiving area 543 connected to the return end of the electronic-grade chemical packaging container, the access control unit 800 generates a leakage state indicating no leakage abnormality. If the liquid receiving area 542 connected to the extraction end triggers a leakage signal in the corresponding stage S3 or S4, and the liquid level change trend indicates a continuous increase in liquid, the access control unit 800 can generate a leakage state indicating a leakage abnormality in the liquid receiving area. If the liquid receiving area 543 connected to the return end triggers a leakage signal in the corresponding stage S3 or S4, and the liquid level change trend indicates a continuous increase in liquid, the access control unit 800 can generate a leakage state indicating a leakage abnormality in the return end connection area. If the liquid receiving area 541 at the bottom of the electronic-grade chemical packaging container triggers a leakage signal, the access control unit 800 can generate a leakage state indicating a leakage abnormality at the bottom of the electronic-grade chemical packaging container or in the liquid supply area.

[0090] The leakage status in step S5 is used for liquid supply access judgment in step S6. Even if the connection between the liquid extraction end and the liquid return end has been confirmed in step S3, and the dual-path integrity detection result in step S4 meets the conditions, as long as the leakage status obtained in step S5 indicates that there is a leakage abnormality, the access control unit 800 will still not control the liquid supply execution unit 700 to enter the liquid supply permission state.

[0091] Step S6: After the liquid extraction end connection confirmation signal, the liquid return end connection confirmation signal, the liquid extraction end integrity detection result, the liquid return end integrity detection result, and the leakage status meet the liquid supply access conditions, control the liquid supply execution unit to switch to the liquid supply allowed state; otherwise, control the liquid supply execution unit to remain in the liquid supply prohibited state or the interface test state.

[0092] In step S6, the access control unit 800 integrates the liquid extraction end connection confirmation signal and the liquid return end connection confirmation signal obtained in step S3, the liquid extraction end integrity detection result and the liquid return end integrity detection result obtained in step S4, and the leakage status obtained in step S5 to determine whether the liquid supply access conditions are met.

[0093] When the liquid extraction end connection confirmation signal indicates that the liquid extraction end connection meets the preset conditions, the liquid return end connection confirmation signal indicates that the liquid return end connection meets the preset conditions, the liquid extraction end integrity detection result indicates that the liquid extraction end 11 meets the preset integrity conditions, the liquid return end integrity detection result indicates that the liquid return end 12 meets the preset integrity conditions, and the leakage status indicates that there is no leakage abnormality in the liquid supply area 110, the access control unit 800 determines that the liquid supply access conditions are met. At this time, the access control unit 800 controls the liquid supply execution unit 700 to switch from the interface test state to the liquid supply permission state.

[0094] 0094 Under the liquid supply permission state, the liquid supply valve group 720 and the return valve group 730 disconnect the test connection between the liquid extraction end 11, the return end 12 and the dual-interface integrity detection unit 600, and switch to the valve circuit state corresponding to the liquid supply task, so that the liquid extraction end 11 is connected to the downstream liquid supply port 13, and the return end 12 is in the return liquid connection state or pressure balance state according to the liquid supply task. The downstream isolation valve 740 opens, so that the downstream liquid supply port 13 enters the liquid supply state. The liquid supply pump 710 is allowed to start under the control of the access control unit 800, thereby transporting the chemicals in the electronic-grade chemical packaging drum 1 to the downstream liquid supply port 13 through the liquid extraction end 11, and forming return liquid, backflow or pressure balance through the return end 12 as needed.

[0095] If any of the following conditions are not met: the liquid extraction connection confirmation signal, the liquid return connection confirmation signal, the liquid extraction integrity detection result, the liquid return integrity detection result, or the leakage status, the access control unit 800 will not control the liquid supply execution unit 700 to switch to the liquid supply allowed state. At this time, the access control unit 800 controls the liquid supply execution unit 700 to remain in the liquid supply prohibited state or the interface test state.

[0096] Specifically, when the connection confirmation signal at the extraction end does not meet the liquid supply access conditions, the access control unit 800 keeps the liquid supply pump 710 stopped and controls the liquid supply valve group 720 to close the corresponding liquid supply path at the extraction end 11. When the connection confirmation signal at the return end does not meet the liquid supply access conditions, the access control unit 800 controls the return valve group 730 to close the corresponding liquid supply path at the return end 12. When the integrity detection result at the extraction end or the integrity detection result at the return end does not meet the liquid supply access conditions, the access control unit 800 controls the liquid supply execution unit 700 to maintain the interface test state or return to the liquid supply prohibition state, and keeps the downstream isolation valve 740 closed. This prevents the path that fails the integrity detection from directly connecting to the downstream liquid supply port 13.

[0097] When a leak status indicates an abnormality, the access control unit 800 stops the liquid supply pump 710, closes the downstream isolation valve 740, and maintains ventilation. If the leak originates from the zoned liquid contact detection component 540, the access control unit 800 can also record the corresponding source of the abnormality based on the triggering area, such as a leak in the liquid extraction connection area, a leak in the liquid return connection area, or a leak at the bottom of the electronic-grade chemical packaging container, so that subsequent maintenance personnel can locate the cause of the abnormality.

[0098] Through steps S1 to S6, the method of this embodiment forms a tightly connected dual-interface connection access process within the cabinet: S1 confirms whether the electronic-grade chemical packaging drum 1 is in the standard connection position; S2 confirms whether the liquid supply area 110 is ready for connection; S3 confirms whether the extraction end and return end are connected separately; S4 confirms the integrity of the extraction end 11 and return end 12 under the interface test state isolated by the downstream liquid supply port 13; S5 confirms whether there is any leakage abnormality in the liquid supply area 110; and S6 determines whether the liquid supply execution unit 700 can enter the liquid supply permission state based on the above results. This process ensures that the liquid supply permission state can only be formed after the dual-interface connection state, dual-path integrity, and cabinet safety state are all met, thereby reducing the risk of accidental liquid supply, interface leakage, and abnormal expansion within the cabinet.

[0099] The above are merely preferred embodiments of this application and are not intended to limit the scope of protection of this application. Therefore, any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this application should be included within the scope of protection of this application.

Claims

1. A dual-interface access control system for a chemical supply cabinet, characterized in that, The chemical supply cabinet has isolated liquid supply area, pump area and electrical control area inside the cabinet; The control system includes: an electronic-grade chemical packaging barrel bearing and positioning unit, a liquid extraction end connection detection unit, a liquid return end connection detection unit, an in-cabinet safety detection unit, a dual-interface integrity detection unit, a liquid supply execution unit, and an access control unit; The electronic-grade chemical packaging barrel support and positioning unit is located in the liquid supply area and is used to support the electronic-grade chemical packaging barrel. When the electronic-grade chemical packaging barrel is in a preset connection position and the posture meets the preset conditions, it outputs a standard connection station confirmation signal. The liquid extraction end connection detection unit, the liquid return end connection detection unit, the cabinet safety detection unit, and the dual-interface integrity detection unit are all signal-connected to the access control unit, and respectively output the liquid extraction end connection confirmation signal, the liquid return end connection confirmation signal, the cabinet door status signal, the exhaust status signal, the leakage status signal, the liquid extraction end integrity detection result, and the liquid return end integrity detection result to the access control unit; The liquid supply execution unit is located in the pump area and is connected to the liquid extraction end, the liquid return end and the downstream liquid supply port respectively; the access control unit is located in the electrical control area and is communicatively connected to the liquid supply execution unit. The liquid supply execution unit is equipped with three working modes: liquid supply prohibited state, interface test state, and liquid supply allowed state. In the interface test state, the liquid supply execution unit isolates the downstream liquid supply port passage and connects the liquid extraction end and the liquid return end to the dual interface integrity detection unit in sequence. The access control unit is configured to generate a connection preparation access signal when the standard connection station confirmation signal, cabinet door status, and exhaust status meet preset connection preparation conditions. When the liquid extraction end connection confirmation signal, the liquid return end connection confirmation signal, the liquid extraction end integrity detection result, the liquid return end integrity detection result, and the leakage status signal meet the preset liquid supply access conditions, the liquid supply execution unit is controlled to switch to the liquid supply allowed state; otherwise, the liquid supply execution unit is controlled to maintain the liquid supply prohibited state or the interface test state.

2. The system according to claim 1, characterized in that, The electronic-grade chemical packaging drum bearing and positioning unit includes: an inlet, a bearing and conveying part, a limiting part, and a clamping and positioning part; The inlet is used to guide the electronic-grade chemical packaging barrel into the liquid supply area, the carrying and conveying part is used to convey the electronic-grade chemical packaging barrel to the preset connection position, the limiting part is used to limit the horizontal offset range of the electronic-grade chemical packaging barrel at the preset connection position, and the clamping and positioning part is used to clamp the outer periphery of the electronic-grade chemical packaging barrel. The electronic-grade chemical packaging drum bearing and positioning unit is used to output the standard connection station confirmation signal based on the electronic-grade chemical packaging drum positioning signal, clamping positioning signal and attitude confirmation signal; wherein, the attitude confirmation signal indicates that the tilt angle, eccentricity and height position of the electronic-grade chemical packaging drum are all within the preset allowable error range.

3. The system according to claim 1, characterized in that, The cabinet safety detection unit includes: a cabinet door detection component, an exhaust detection component, and a leakage detection component; the cabinet door detection component is used to collect and output cabinet door status signals in real time to indicate the opening and closing status of the cabinet door; the exhaust detection component is used to collect and output exhaust status signals in real time to indicate the exhaust operation status of the cabinet; and the leakage detection component is used to collect and output leakage status signals in real time to indicate the leakage of chemicals inside the cabinet. The access control unit is configured to connect under the following conditions: the cabinet door is closed according to the cabinet door status signal, and the exhaust parameters inside the cabinet according to the exhaust status signal meet the preset exhaust standards.

4. The system according to claim 1, characterized in that, The liquid extraction end connection detection unit includes at least one of the following: a liquid extraction connector in-place detection component, a liquid extraction connector locking detection component, and a liquid extraction end pressure detection component; The access control unit determines the connection status of the liquid extraction end based on the detection results of at least one of the liquid extraction connector presence detection device, the liquid extraction connector locking detection device, and the liquid extraction end pressure detection device, and generates the liquid extraction end connection confirmation signal.

5. The system according to claim 1, characterized in that, The return liquid end connection detection unit includes at least one of the following: a return liquid connector in-place detection element, a return liquid connector locking detection element, and a return liquid end pressure detection element; The access control unit determines the connection status of the return end based on the detection results of at least one of the return connector presence detection device, the return connector locking detection device, and the return end pressure detection device, and generates the return end connection confirmation signal.

6. The system according to claim 1, characterized in that, The dual-interface integrity detection unit includes: a test gas source, a test valve group, and a pressure detection element; when the liquid supply execution unit is in the interface test state, the test valve group switches the liquid extraction end and the liquid return end to the test branch respectively, forming a detection loop with the test gas source and the pressure detection element. The pressure detection device collects at least one of the following: pressure holding results, pressure decay data, or on / off detection data of the liquid extraction end and the liquid return end. Based on the collected data, it determines the interface sealing and connection filling, and outputs the integrity detection results of the liquid extraction end and the integrity detection results of the liquid return end.

7. The system according to claim 1, characterized in that, The liquid supply execution unit includes: a liquid supply pump, a liquid supply valve group, a return valve group, and a downstream isolation valve; under the liquid supply prohibited state, the liquid supply pump stops running and the downstream isolation valve closes, cutting off the overall liquid supply path; In the interface test state, the downstream isolation valve is closed and the liquid supply valve group and the liquid return valve group are reversed respectively, connecting the liquid extraction end and the liquid return end to the test circuit of the dual interface integrity detection unit; When the liquid supply is permitted, the downstream isolation valve opens, and the liquid supply pump, the liquid supply valve group, and the return valve group work together to ensure normal liquid supply of chemicals.

8. The system according to claim 1, characterized in that, The cabinet safety detection unit also includes a partitioned liquid receiving detection component located below the liquid supply area; The partitioned liquid contact detection component is divided into a liquid contact area at the bottom of the electronic-grade chemical packaging barrel, a liquid contact area connected to the liquid extraction end, and a liquid contact area connected to the liquid return end. The access control unit generates a dynamically updated leakage status signal based on the triggering area, triggering time, and liquid level change trend of the partition liquid detection component.

9. A method for access control of a dual-interface connection within a chemical supply cabinet, characterized in that, The access control method, applied to the dual-interface connection access control system within the chemical supply cabinet according to any one of claims 1 to 8, comprises: The electronic-grade chemical packaging barrel is carried into the liquid supply area by the electronic-grade chemical packaging barrel bearing and positioning unit. The position, clamping status and attitude parameters of the electronic-grade chemical packaging barrel are detected. After the calibration is qualified, the standard connection station confirmation signal is output. By acquiring the cabinet door status signal and exhaust status signal collected by the cabinet safety monitoring unit, and when the standard connection station confirmation signal, the cabinet door status and the exhaust status simultaneously meet the connection preparation conditions, the access control unit generates a connection preparation access signal. The interface connection status is detected by connecting the liquid extraction end to the detection unit and the liquid return end to the detection unit respectively, and the liquid extraction end connection confirmation signal and the liquid return end connection confirmation signal are output respectively. After receiving the dual-interface connection confirmation signal, the access control unit controls the liquid supply execution unit to switch to the interface test state and closes the downstream isolation valve to isolate the downstream liquid supply port. The integrity detection unit performs integrity detection on the liquid extraction end and the liquid return end respectively, and obtains the integrity detection results of the liquid extraction end and the liquid return end. The cabinet's internal safety monitoring unit monitors the leakage situation in real time and continuously outputs leakage status signals. The access control unit verifies the dual-interface connection status, dual-interface integrity detection results, and leak-free status. If all liquid supply access conditions are met, the control unit switches the liquid supply execution unit to the liquid supply allowed state and starts normal liquid supply; otherwise, it maintains the test state or prohibits liquid supply.

10. The method according to claim 9, characterized in that, When the liquid extraction end connection confirmation signal does not meet the liquid supply access conditions, the liquid supply execution unit is controlled to close the liquid extraction end passage and keep the downstream liquid supply port isolated. When the return liquid connection confirmation signal does not meet the liquid supply access condition, the liquid supply execution unit is controlled to close the return liquid passage and keep the downstream liquid supply port isolated. When the integrity detection result of the liquid extraction end or the integrity detection result of the liquid return end is abnormal and does not meet the liquid supply access conditions, the liquid supply execution unit is controlled to close the pipeline passage of the corresponding abnormal interface and keep the downstream liquid supply port isolated.

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