Centering mechanism and centering tool

Abstract

The embodiment of the present disclosure provides a centering mechanism and a centering tool, and relates to the technical field of semiconductor equipment. The centering mechanism is used for the electrode of an arc lamp, and comprises: a centering block, a center hole of which is used for penetrating a corresponding electrode; a centering hole plate, which is provided with a centering hole matched with the corresponding electrode and is located at one end of the centering block; and at least two adjusting assemblies, which are respectively connected with the centering block and are distributed along the axial direction of the centering block. Along the circumferential direction of the centering block, the at least two adjusting assemblies are arranged in a staggered manner, so that the corresponding electrode can be adjusted in at least two directions.

Description

Technical Field

[0001] This disclosure relates to the field of semiconductor equipment technology, and more particularly to a centering mechanism and centering tooling. Background Technology

[0002] Millisecond annealing (MSA) is a heat treatment process widely used in semiconductor manufacturing. It uses a high-intensity light source to provide high-energy-density thermal radiation to the surface of a semiconductor substrate in a very short time, achieving process objectives such as doping activation, defect repair, and thin film performance optimization.

[0003] In related technologies, millisecond annealing systems typically include multiple arc lamps as flash sources, such as using multiple argon arc lamps to perform millisecond-level high-intensity exposure on the top surface of a semiconductor substrate. The arc lamps usually employ a tungsten-copper electrode structure. The tungsten tip of the electrode is the arc-generating site, and the electrode's lifespan is one of the important factors affecting the stable operation and maintenance costs of the millisecond annealing system. The electrode's alignment performance is one of the factors affecting its lifespan. Summary of the Invention

[0004] This disclosure provides a centering mechanism and centering tooling.

[0005] As one aspect of this disclosure, an embodiment provides a centering mechanism for electrodes of an arc lamp, comprising: a centering block having a central hole for a corresponding electrode to pass through; a centering plate having a centering hole adapted to the corresponding electrode and located at one end of the centering block; at least two adjustment components respectively connected to the centering block and spaced apart along the axial direction of the centering block; and along the circumferential direction of the centering block, wherein at least two of the adjustment components are staggered to enable centering adjustment of the corresponding electrode from at least two directions.

[0006] In some embodiments, the centering block has a connecting hole that communicates with the center hole of the centering block, and the axis of the connecting hole is perpendicular to the axis of the centering block; the adjustment assembly includes: a push rod whose axis is perpendicular to the axis of the centering block; wherein at least two push rods of the adjustment assembly have a preset angle between their axes; an adjustment block located at one end of the push rod facing the central axis of the centering block, used to push the corresponding electrode toward the central axis of the centering block under the action of the push rod; the end of the adjustment block facing the central axis of the centering block is provided with an arc-shaped surface adapted to the corresponding electrode; at least one of the push rod and the adjustment block cooperates with the connecting hole.

[0007] In some embodiments, the push rod includes a set screw.

[0008] In some embodiments, the end of the set screw opposite to the central axis of the centering block is provided with a first through hole; the axial direction of the first through hole is perpendicular to the axial direction of the set screw and perpendicular to the axial direction of the centering block; the adjustment assembly further includes: a rotating rod installed in the first through hole, and the two ends of the rotating rod extend out of the first through hole in opposite directions.

[0009] In some embodiments, the centering block has at least two annular grooves, and the annular grooves are spaced apart along the axial direction of the centering block; the connecting hole is used to connect the annular grooves with the center hole of the centering block; the adjusting assembly further includes: a locking ring, which is semi-annular; an adjusting ring, which is mated with the locking ring; the locking ring and the adjusting ring are engaged with corresponding slots; and the push rod passes through the adjusting ring.

[0010] In some embodiments, the adjusting ring includes: an adjusting ring body portion, which is semi-circular and docks with the locking ring and is securely connected to the locking ring; an adjusting ring extension portion, which is connected to the side of the adjusting ring body portion away from the central axis of the centering block and extends in a direction away from the central axis of the centering block; wherein the push rod passes through the adjusting ring extension ring and the adjusting ring body portion.

[0011] In some embodiments, the adjustment assembly further includes a connecting block connected between the push rod and the adjustment block.

[0012] In some embodiments, the preset angle between the axial directions of the push rods of at least two of the adjustment components is 120°.

[0013] In some embodiments, the centering holes of the centering plate are tapered; the diameter of the centering holes gradually decreases along the direction away from the centering block.

[0014] In some embodiments, the connection method between the centering plate and the centering block includes at least one of the following: magnetic adsorption connection, threaded connection, fastening connection, and plug-in connection.

[0015] In some embodiments, the centering mechanism further includes at least one positioning ring sleeved around the corresponding electrode.

[0016] In some embodiments, the end of the centering block opposite to the centering plate is provided with a positioning hole for engaging with a positioning bolt in the corresponding electrode assembly.

[0017] In some embodiments, the end of the centering block opposite to the centering plate includes a semi-annular positioning portion; the centering mechanism further includes: a caliper, semi-annular, for clamping the corresponding electrode assembly between the caliper and the positioning portion; and a locking bolt for fixing the caliper to the centering block.

[0018] As one aspect of the present disclosure, an embodiment of the present disclosure provides a centering fixture for the electrode of an arc lamp, comprising: two centering mechanisms, one of which is used to center the anode of the electrode, and the other of which is used to center the cathode of the electrode; wherein the centering mechanism is any of the centering mechanisms described above.

[0019] In some embodiments, the aperture of the centering hole corresponding to the anode is larger than the aperture of the centering plate corresponding to the cathode.

[0020] In some embodiments, the concentricity of the centering holes of the centering plates in the two centering mechanisms is greater than or equal to 0.02 mm and less than or equal to 0.05 mm.

[0021] In some embodiments, the end of the centering block corresponding to the anode away from the centering orifice plate is provided with a positioning hole for engaging with a positioning bolt in the anode assembly; the end of the centering block corresponding to the cathode away from the centering orifice plate includes a semi-annular positioning portion; the centering mechanism corresponding to the cathode further includes: a clamp, semi-annular in shape, for clamping the corresponding electrode assembly between the clamp and the positioning portion; and a locking bolt for fixing the clamp to the centering block.

[0022] The above-described technical solution in this embodiment can improve the alignment accuracy and consistency during electrode assembly, thereby reducing the eccentricity between the cathode and anode, ensuring good straightness and stability during arc formation, thus improving the working performance of the arc lamp and extending the service life of the electrode.

[0023] The above overview is for illustrative purposes only and is not intended to be limiting in any way. Further aspects, embodiments, and features of this disclosure will become readily apparent from the accompanying drawings and the following detailed description, in addition to the illustrative aspects, embodiments, and features described above. Attached Figure Description

[0024] In the accompanying drawings, unless otherwise specified, the same reference numerals throughout the various drawings denote the same or similar parts or elements. These drawings are not necessarily drawn to scale. It should be understood that these drawings depict only some embodiments disclosed in this disclosure and should not be construed as limiting the scope of this disclosure.

[0025] Figure 1 An exemplary embodiment illustrating an application scenario of a centering mechanism. Figure 1 ; Figure 2 An exemplary embodiment illustrating an application scenario of a centering mechanism. Figure 2 ; Figure 3 An exemplary embodiment illustrating an application scenario of a centering mechanism. Figure 1 ; Figure 4 An exemplary embodiment illustrating an application scenario of a centering mechanism. Figure 2 .

[0026] Explanation of reference numerals in the attached drawings: 110, centering block; 111, positioning part; 130, centering orifice plate; 150, adjusting assembly; 151, push rod; 152, adjusting block; 153, rotating rod; 154, locking ring; 155, adjusting ring; 155a, main body of adjusting ring; 155b, extension of adjusting ring; 156, connecting block; 171, positioning ring; 172, caliper; 173, locking bolt; 210, anode assembly; 211, anode; 212, positioning bolt; 220, cathode assembly; 221, cathode. Detailed Implementation

[0027] In the following description, only certain exemplary embodiments are briefly described. As those skilled in the art will recognize, the described embodiments can be modified in various ways without departing from the spirit or scope of this disclosure. Therefore, the drawings and description are to be considered exemplary in nature and not restrictive.

[0028] Research has revealed that the alignment accuracy between the cathode and anode in an electrode significantly impacts electrode lifespan. When the anode and cathode are eccentric, tilted, or misaligned, the electric arc is prone to deflection, oscillation, or localized concentration, leading to abnormally high local electrode temperatures. This accelerates the ablation and damage of the tungsten tip, thus shortening the electrode's lifespan. Furthermore, the electrode alignment directly affects the straightness and stability of the electric arc. Poor arc straightness not only results in uneven light output distribution but may also lead to decreased flash energy stability, consequently affecting the annealing uniformity and process repeatability of semiconductor tools.

[0029] However, in related technologies, electrode alignment and adjustment mostly rely on manual operation, making it difficult to guarantee alignment accuracy and resulting in poor consistency in electrode alignment performance. Therefore, there is an urgent need to provide an alignment device for positioning and calibrating the anode and cathode of arc lamps to improve alignment accuracy and consistency during electrode assembly, enhance arc linearity and stability, extend electrode lifespan, and improve the process performance and operational reliability of millisecond annealing equipment.

[0030] This embodiment provides a centering mechanism and centering fixture, which can adjust the position of the electrode, specifically by adjusting the radial displacement of the electrode so that the end of the electrode is aligned with the corresponding centering hole, thereby helping to ensure the alignment of the cathode and anode, and thus improving the centering accuracy and consistency of the electrode during assembly.

[0031] The structure and implementation process of the centering tooling in this embodiment will be illustrated below with reference to the accompanying drawings. Figure 1 This is a schematic diagram showing the partial disassembly of the centering mechanism in the assembly scenario of the anode assembly; Figure 2 This is a cross-sectional view of the anode assembly and the centering mechanism in the assembly scenario of the anode assembly; Figure 3 This is a schematic diagram showing the partial disassembly of the centering mechanism in the assembly scenario of the cathode assembly; Figure 4 This is a cross-sectional view of the cathode assembly and the centering mechanism in the assembly scenario of the cathode assembly.

[0032] It is understood that this embodiment is not only applicable to the alignment of the anode and cathode of an arc lamp, but also applicable to the alignment of the anode and cathode in other devices.

[0033] Please refer to Figures 1 to 4 This embodiment provides a centering fixture, including two centering mechanisms, which are respectively used to cooperate with the anode 211 and the cathode 221. The two centering mechanisms can have the same or different structures, and the appropriate mechanism can be selected based on actual needs.

[0034] The centering mechanism includes: a centering block 110 with a central hole for the corresponding electrode to pass through; a centering plate 130 with a centering hole adapted to the corresponding electrode and located at one end of the centering block 110; at least two adjusting components 150 connected to the centering block 110 respectively and spaced apart along the axial direction of the centering block 110; and at least two adjusting components 150 staggered along the circumferential direction of the centering block 110 to enable centering adjustment of the corresponding electrode from at least two directions.

[0035] At least a portion of the centering block 110 is columnar, but it can also be designed as conical, square, polygonal, or other regular structures according to actual installation requirements. The specific shape of the centering block 110 can be set according to actual needs.

[0036] For example, in the centering mechanism of the anode 211, the upper part of the centering block 110 is cylindrical and the lower part is quadrangular prism to facilitate positioning and connection with the anode assembly 210.

[0037] For example, in the centering mechanism that adapts to the cathode 221, the upper part of the centering block 110 is cylindrical and the lower part is conical to facilitate adaptation to the cathode assembly 220.

[0038] The center block 110 has a central hole extending axially through it, which is used for the electrode to be adjusted to pass through. In some examples, the electrode is typically cylindrical, and correspondingly, the central hole of the center block 110 is a circular hole. In other examples, a portion of the electrode is conical, and correspondingly, the corresponding portion of the central hole of the center block 110 can be a circular hole segment, a conical hole segment, or a stepped hole segment. In still other examples, the electrode is at least stepped cylindrical, and correspondingly, the corresponding portion of the central hole of the center block 110 can be a stepped hole segment. Of course, the structure and shape of the central hole of the center block 110 are not limited to these, and can be specifically set according to actual needs.

[0039] The diameter of the central hole in the centering block 110 is slightly larger than the outer diameter of the corresponding part of the electrode, so as to provide a certain radial adjustment space for the electrode. That is, along the radial direction of the centering block 110, the cross-section of the central hole of the centering block 110 is circular, and the diameter of the cross-section is slightly larger than the diameter of the cross-section at the corresponding position of the electrode.

[0040] A centering plate 130 is provided at one end of the centering block 110. The centering plate 130 is fixedly connected to the centering block 110. Specifically, the centering plate 130 can be detachably connected to the centering block 110 by means of screws or pins. Alternatively, the centering plate 130 can be fixedly connected to the centering block 110 by welding. Or, the centering plate 130 can be integrally formed with the centering block 110 using a one-piece molding process.

[0041] The centering plate 130 is provided with a centering hole, the central axis of which coincides with the central axis of the theoretical electrode. The diameter of the centering hole matches the outer diameter of the corresponding part of the electrode, so that the electrode can obtain accurate reference positioning when it is inserted into the centering hole.

[0042] The centering block 110 is provided with multiple adjustment components 150, which are spaced apart along the axial direction of the centering block 110 to provide multiple support points for the electrode along the axial direction. The axial direction of the centering block 110 is the up-down direction shown in the figure.

[0043] Two of the adjustment components 150 are arranged in a staggered manner. The staggered arrangement means that the second adjustment component 150 is positioned differently in the circumferential direction of the centering block 110.

[0044] For example, one of the electrodes can be set along a first direction to limit and adjust the position of the electrode in the first direction; the other electrode can be set along a second direction to limit and adjust the position of the electrode in the second direction. The first and second directions are at a preset angle, which can be greater than or equal to 90° and less than or equal to 120°.

[0045] For example, the adjustment assembly 150 may include a hydraulic cylinder and a hydraulic cylinder fixing member, the hydraulic cylinder fixing member fixing the hydraulic cylinder to the centering block 110, and the piston rod of the hydraulic cylinder being used to drive the corresponding electrode to move toward the central axis of the centering block 110. Alternatively, the adjustment assembly 150 may include a linear motor and a motor fixing member, the motor fixing member fixing the linear motor to the centering block 110, and the output end of the linear motor being used to drive the corresponding electrode to move toward the central axis of the centering block 110. Or, the adjustment assembly 150 may include a lead screw and an operating member disposed at the end of the lead screw, the operating member driving the lead screw to move, thereby driving the corresponding electrode to move toward the central axis of the centering block 110.

[0046] In the electrode assembly scenario, the electrode can be passed through the center hole of the centering block 110 and inserted into the centering hole of the centering plate 130. Then, at least one of the adjustment components 150 is adjusted to gradually correct the position of the electrode until the electrode is coaxial with the centering hole.

[0047] The centering fixture in this embodiment, by configuring centering mechanisms for the cathode 221 and anode 211 respectively, and configuring multiple adjustment components 150 arranged axially at intervals and staggered with each other in the centering mechanism, can accurately position and correct the posture of the electrode from at least two directions, improve the centering accuracy and consistency during the electrode assembly process, thereby helping to reduce the eccentricity between the cathode 221 and anode 211, ensuring good straightness and stability during arc formation, thereby improving the working performance of the arc lamp and extending the service life of the electrode.

[0048] In some embodiments, the centering block 110 has a connecting hole that communicates with the center hole of the centering block 110, and the axis of the connecting hole is perpendicular to the axis of the centering block 110.

[0049] Adjustment assembly 150 includes: a push rod 151, the axis of which is perpendicular to the axis of the centering block 110; wherein the axes of at least two push rods 151 of the adjustment assembly 150 are at a preset angle; an adjustment block 152 is located at one end of the push rod 151 facing the central axis of the centering block 110; the end of the adjustment block 152 facing the central axis of the centering block 110 is provided with an arc-shaped surface adapted to the corresponding electrode; at least one of the push rod 151 and the adjustment block 152 mates with a connecting hole.

[0050] In response to the force applied in the preset direction, the push rod 151 pushes the adjusting block 152 toward the central axis of the centering block 110.

[0051] The centering block 110 has multiple connecting holes, each of which communicates with the central hole, and the axis of the connecting hole is perpendicular to the axis of the central hole. These connecting holes provide installation space for the adjustment assembly 150 and allow the adjustment assembly 150 to apply an adjustment force to the electrode radially. The number of connecting holes is greater than or equal to the number of adjustment assemblies 150.

[0052] The push rod 151 is arranged along the axial direction of the connecting hole, and its axial direction is perpendicular to the axial direction of the centering block 110. The adjusting block 152 is arranged at the end of the push rod 151 facing the central axis of the centering block 110, and can be located near the communication area between the center hole and the connecting hole. At least one of the push rod 151 and the adjusting block 152 cooperates with the connecting hole to ensure that the adjusting block 152 can move smoothly in a predetermined direction.

[0053] The adjusting block 152 has an arc-shaped surface on the side facing the central hole. The curvature of the arc-shaped surface matches the curvature of the corresponding outer circular surface of the electrode. When the adjusting block 152 contacts the electrode, it can form a larger contact area, avoiding excessive local stress concentration that could damage the electrode surface and helping to reduce scratches or indentations on the electrode surface. At the same time, the arc-shaped surface can improve the contact stability during the adjustment process, allowing the adjustment force to be applied to the electrode more evenly.

[0054] The material of the adjustment block 152 can be set according to actual needs. For example, the adjustment block 152 can be made of elastic rubber material to further reduce scratches or indentations on the electrode surface.

[0055] At least two adjustment components 150 are positioned at different circumferential locations on the centering block 110, and each push rod 151 has a preset angle between its axes. For example, the preset angle can be 90° to adjust the position of the electrodes in two mutually perpendicular directions. Alternatively, the preset angle can be 60°, 120°, or other angles capable of multi-directional positioning.

[0056] In the electrode assembly scenario, the electrode passes through the central hole and extends into the centering hole of the centering plate 130. The operator applies a first force to the push rod 151, causing it to move along the connecting hole towards the central hole. During its movement, the push rod 151 pushes the adjusting block 152 toward the central axis of the centering block 110 until the arc-shaped surface of the adjusting block 152 contacts the outer peripheral surface of the electrode, further pushing the electrode to the target position, thereby achieving electrode position correction.

[0057] When other directional adjustments are required, a second force can be applied to the push rod 151 to move the push rod 151 away from the center hole. As the adjustment block 152 exits the contact area with the electrode, the electrode obtains the corresponding adjustment space for further correction.

[0058] In this embodiment, multiple adjustment components 150 work together to constrain and adjust the electrode from different directions. When the arc-shaped surfaces of each adjustment block 152 are in proper contact with the outer peripheral surface of the electrode, the electrode can be gradually adjusted to a position coaxial with the centering hole of the centering plate 130, thereby improving the alignment accuracy of the cathode 221 and anode 211, ensuring the formation of a stable arc with good straightness, and improving the working stability and service life of the arc lamp.

[0059] In some examples, push rod 151 includes a set screw.

[0060] For example, the centering block 110 has an internal thread in its connecting hole that is compatible with a set screw, and the set screw is installed in the connecting hole by means of a threaded connection. One end of the set screw is set towards the center hole and is connected to or directly abuts against the adjusting block 152; the other end of the set screw extends out of the outside of the centering block 110 so that the operator can make adjustments.

[0061] By using a set screw as the push rod 151, the self-locking characteristic of the threaded drive can be used to achieve continuous and stable positioning. It is not only simple in structure and low in manufacturing cost, but also has high adjustment accuracy and good repeatability. It is suitable for the precise centering adjustment of the arc lamp cathode 221 and anode 211, which is beneficial to improving the arc linearity and equipment operation stability.

[0062] In this example, when electrode alignment adjustment is required, the operator rotates the set screw. As the set screw is screwed into the connecting hole, it moves axially toward the center hole and applies a thrust to the adjusting block 152, causing the adjusting block 152 to move toward the central axis of the centering block 110. The arc-shaped surface of the adjusting block 152 gradually contacts the outer peripheral surface of the electrode and pushes the electrode toward the target position, achieving precise adjustment of the electrode position.

[0063] When it is necessary to release the adjusting block 152 or adjust it from other directions, the operator rotates the set screw in the opposite direction. As the set screw gradually exits the connecting hole, the set screw drives the adjusting block 152 to move away from the central axis of the centering block 110, thereby creating a gap between the adjusting block 152 and the electrode.

[0064] In this example, because the set screw has a threaded drive structure, it can convert rotational motion into axial linear motion, thereby achieving precise control of the displacement of the adjusting block 152. The operator can adjust the position of the electrode with high precision by controlling the rotation angle of the set screw, thus improving the alignment accuracy of the electrode.

[0065] In some examples, a first through hole is provided at the end of the set screw opposite to the central axis of the centering block 110; the axial direction of the first through hole is perpendicular to the axial direction of the set screw and perpendicular to the axial direction of the centering block 110. The adjustment assembly 150 also includes a rotating rod 153, which is installed in the first through hole, and the two ends of the rotating rod 153 extend out of the first through hole in opposite directions.

[0066] To facilitate the adjustment of the set screw, a first through hole is provided at the end of the set screw opposite to the central axis of the centering block 110. The first through hole extends through the set screw radially. The rotating rod 153 passes through the first through hole, and the two ends of the rotating rod 153 extend out of the first through hole in opposite directions, thus forming a handle structure that is easy to operate.

[0067] The middle portion of the rotating rod 153 can be fixed in the first through hole. For example, after the rotating rod 153 passes through the first through hole, a clamp or shaft end retainer can be installed on the rotating rod 153. Another example is that the middle portion of the rotating rod 153 is interference-fitted with the first through hole. Yet another example is that the rotating rod 153 is threaded into the first through hole.

[0068] The two ends of the rotating rod 153 can extend out of the first through hole by the same or different lengths. When the two ends are the same length, the rotating rod 153 is subjected to balanced force, which facilitates bidirectional operation; when the two ends are different lengths, the longer side can be selected as the main force-applying end according to the installation space to obtain a larger operating torque.

[0069] The rotating rod 153 may be a cylindrical rod structure; or the rotating rod 153 may also be a rod structure with anti-slip texture, knurled structure or anti-slip coating on the surface to improve grip stability and operating comfort.

[0070] In this example, the rotating rod 153 and the set screw together form a T-shaped structure. When electrode alignment adjustment is required, the operator can hold either end of the rotating rod 153 or both ends simultaneously and apply a rotational torque around the set screw axis. Because the rotating rod 153 has a longer lever arm relative to the set screw, the torque applied to the set screw by the operator can be increased, making the set screw easier to rotate. As the set screw rotates, the threaded pair between it and the alignment block 110 generates an axial feed motion, thereby driving the adjusting block 152 to move towards the central axis of the alignment block 110, achieving fine adjustment of the electrode position.

[0071] This example demonstrates that by providing a first through hole at the end of the set screw and installing a rotating rod 153, the operator can directly rotate and adjust the set screw without the need for additional special tools to complete the electrode alignment operation. This not only improves the convenience of adjustment but also enables a more precise and stable adjustment process, which is beneficial for improving electrode alignment accuracy and assembly efficiency.

[0072] In some embodiments, the centering block 110 has at least two annular grooves, and the annular grooves are spaced apart along the axial direction of the centering block 110; the connecting hole is used to connect the annular grooves with the center hole of the centering block 110. The adjustment assembly 150 also includes: a locking ring 154, which is semi-circular; an adjustment ring 155, which is mated with the locking ring 154; the locking ring 154 and the adjustment ring 155 are engaged with corresponding slots; and a push rod 151 is inserted into the adjustment ring 155.

[0073] The annular groove extends around the outer peripheral surface of the centering block 110 to form an annular structure. The connecting hole extends inward from the bottom of the corresponding annular groove and communicates with the central hole, so that the adjustment assembly 150 can adjust the electrode located in the central hole through the connecting hole.

[0074] The locking ring 154 has a semi-circular structure, and the adjusting ring 155 is positioned opposite to the locking ring 154. When they are mated, they form a ring-shaped installation structure that fits the corresponding ring groove. The locking ring 154 and the adjusting ring 155 together engage with the ring groove to fix them to the outer periphery of the centering block 110. By adopting a split structure, the installation and disassembly of the adjusting assembly 150 can be completed without having to fit it as a whole from the end of the centering block 110, which facilitates assembly and maintenance.

[0075] For example, the adjusting ring 155 is provided with a hole through which the push rod 151 passes. After the push rod 151 passes through the adjusting ring 155, its inner end can extend into the vicinity of the central hole through the connecting hole and connect with or act on the adjusting block 152. When the push rod 151 moves along its own axial direction, the adjusting block 152 can move toward or away from the central axis of the centering block 110, thereby realizing the adjustment of the electrode position.

[0076] The adjusting ring 155 and the push rod 151 form a threaded fit. When the push rod 151 rotates, it undergoes axial displacement relative to the adjusting ring 155, causing the adjusting block 152 to move towards the center hole, thereby achieving radial fine adjustment of the electrode. Since the adjusting ring 155 is fixed in the annular groove, it provides stable and reliable support and guidance for the push rod 151.

[0077] The locking ring 154 and the adjusting ring 155 can be fixed together by bolts, screws, pins, snap-fits, or clamping. By locking the locking ring 154 and the adjusting ring 155 into the ring groove, the axial and radial movement of the adjusting assembly 150 can be effectively restricted, thereby improving the structural stability of the entire centering mechanism.

[0078] At least two annular grooves are formed on the outer peripheral surface of the centering block 110, and the annular grooves are distributed at intervals along the axial direction of the centering block 110. Each annular groove corresponds to an adjustment component 150 at a different position, so as to support and position the adjustment component 150 and ensure the functional reliability of the adjustment component 150.

[0079] The number of annular grooves can be set according to actual needs. For example, two annular grooves are provided on the centering block 110 at intervals along the axial direction, and each annular groove corresponds to a set of adjustment components 150; three or more annular grooves can also be provided to improve the support stability and adjustment accuracy in the electrode length direction.

[0080] In the electrode assembly scenario, the locking ring 154 and the adjusting ring 155 are first installed in the corresponding ring grooves to form a fixed support structure, and then the push rod 151 is installed in the adjusting ring 155. When the push rod 151 drives the adjusting block 152 to move, the adjusting components 150 at different positions in the ring grooves can act on different parts of the electrode respectively, so as to achieve precise adjustment of the electrode position and attitude through multi-point adjustment.

[0081] In some examples, the adjusting ring 155 includes: an adjusting ring body 155a, which is semi-circular and docks with and is securely connected to the locking ring 154; an adjusting ring extension 155b, which is connected to the side of the adjusting ring body 155a away from the central axis of the centering block 110 and extends in a direction away from the central axis of the centering block 110; wherein, the push rod 151 passes through the adjusting ring extension and the adjusting ring body 155.

[0082] The main body 155a of the adjusting ring is semi-annular, and its shape corresponds to that of the locking ring 154. After the main body 155a of the adjusting ring and the locking ring 154 are mated, they form a ring-shaped mounting structure and are installed on the outer periphery of the centering block 110 in accordance with the corresponding ring groove. The main body 155a of the adjusting ring and the locking ring 154 are fixedly connected by fasteners, thereby ensuring that the adjusting ring 155a and the locking ring 154 maintain a stable relative positional relationship during use and are reliably located in the corresponding ring groove.

[0083] The adjusting ring extension 155b can be integrally formed with the adjusting ring body 155a, or it can be a separate structure and then fixed together by welding, bolting or other connection methods.

[0084] The adjusting ring extension 155b forms an outwardly extending mounting support structure, causing the mounting position of the push rod 151 to be offset outward relative to the adjusting ring main body 155a. The push rod 151 passes through both the adjusting ring extension 155b and the adjusting ring main body 155a, thereby increasing the effective support length of the push rod 151, improving the manufacturing reliability of the push rod 151, and obtaining a longer guide path. This ensures the reliability of the push rod 151's movement along the preset direction, which is beneficial for improving the straightness and repeatability of the adjustment block 152 driven by the push rod 151.

[0085] In this embodiment, the push rod 151 moves axially under the joint fabrication and guidance of the main body 155a and the extension 155b of the adjustment ring, which not only improves the stability and guiding accuracy of the push rod 151 installation, but also enhances the overall structural strength of the adjustment assembly 150.

[0086] In some embodiments, the adjustment assembly 150 further includes a connecting block 156 connecting the push rod 151 and the adjustment block 152. The connecting block 156 is used to connect the push rod 151 and the adjustment block 152 and transmit force. When the push rod 151 moves along its own axial direction, the push rod 151 transmits force to the adjustment block 152 through the connecting block 156, thereby driving the adjustment block 152 to move towards the central axis of the centering block 110, thereby adjusting the position of the electrode.

[0087] The connecting block 156 is fixedly connected to the push rod 151 and the adjusting block 152, forming an integral transmission structure with the push rod 151, the connecting block 156, and the adjusting block 152. When the push rod 151 undergoes axial displacement, the connecting block 156 moves synchronously, thereby driving the adjusting block 152 to move. This structure has the advantages of direct force transmission, rapid response, and simple structure.

[0088] The connecting block 156 and the push rod 151 can be connected by a detachable structure. For example, they can be connected by thread, pin, snap-fit, or fastener. The size of the connecting block 156 can be set according to actual needs to meet the assembly requirements of electrodes of different specifications.

[0089] The connecting block 156 and the adjusting block 152 can be connected by a detachable structure. For example, they can be connected by thread, pin, snap-fit, or fastener. When the adjusting block 152 wears out or needs to be replaced with an adjusting block 152 of a different specification, the component can be replaced simply by disassembling the corresponding connecting part, which improves maintenance convenience and adaptability.

[0090] The connecting block 156 can be made of metal materials, such as stainless steel, tool steel, or alloy steel; it can also be made of engineering plastics or composite materials with wear-resistant properties. Selecting appropriate materials according to actual working conditions is beneficial to improving the strength, wear resistance, and service life of the connecting block 156.

[0091] In the electrode assembly scenario, the axial movement of the push rod 151 is first transmitted to the connecting block 156, and then the connecting block 156 drives the adjusting block 152 to move. Since the connecting block 156 is located between the push rod 151 and the adjusting block 152, it serves to transmit force, connect, install, and transition positions, making the structural arrangement of the push rod 151 and the adjusting block 152 more flexible. Simultaneously, by setting the connecting block 156, the off-center load effect of the push rod 151 on the adjusting block 152 can be reduced, improving the smoothness of the adjusting block 152's movement and the accuracy of electrode alignment.

[0092] In some embodiments, the preset angle between the axial directions of the push rods 151 of at least two adjustment components 150 is 120°.

[0093] For example, each annular groove can be connected to the central hole of the centering block 110 through three connecting holes, and the three connecting holes are evenly distributed, so that the angle between two adjacent connecting holes is 120°. The connecting holes connected to each annular groove can correspond along the axial direction of the centering block 110.

[0094] In some examples, there may be two adjustment components 150, and two annular grooves. During installation, when the push rod 151 in one adjustment component 150 is aligned with a connecting hole in the corresponding annular groove, the push rod 151 in the other adjustment component 150 can be aligned with other connecting holes in the corresponding annular groove, improving the ease of installation of the adjustment components 150.

[0095] By adjusting the position of any one of the push rods 151, the radial force applied to the electrode by its corresponding adjustment block 152 can be changed; by coordinating the adjustment of the position of the other push rod 151, the electrode can be precisely positioned in the radial plane.

[0096] The push rods 151, distributed at 120°, can form a relatively balanced force state, so that the electrode can always maintain stable support during the adjustment process, reducing the deviation, shaking or tilting caused by excessive force on one side.

[0097] In other examples, the centering mechanism includes three adjustment components 150, with push rods 151 of the three adjustment components 150 circumferentially distributed around the central hole of the centering block 110, and each pair of adjacent push rods 151 forming a 120° angle between their axes. That is, the three push rods 151 are evenly distributed with the central axis of the centering block 110 as the center.

[0098] In some embodiments, the centering hole of the centering plate 130 is tapered; the diameter of the centering hole gradually decreases along the direction away from the centering block 110, thereby forming a tapered channel with guiding function.

[0099] The large-diameter end of the centering hole faces the centering block 110, and the small-diameter end faces the side away from the centering block 110. When the electrode passes through the center hole of the centering block 110 and moves towards the centering hole, even if there is a certain deviation between the electrode and the center of the centering hole, the large-diameter end of the centering hole can provide a large tolerance space for the electrode end, and gradually move towards the center position of the centering hole under the guidance of the conical surface.

[0100] Because the tapered hole has a self-guiding function, it can reduce the positional accuracy requirements during electrode insertion and improve assembly efficiency. At the same time, when the adjustment assembly 150 performs radial adjustment of the electrode, the tapered hole can serve as the final centering reference, prompting the electrode to gradually approach the central axis of the centering hole, thereby improving the coaxiality of the electrode.

[0101] The smaller diameter end of the centering hole is slightly larger than the outer diameter of the corresponding electrode to ensure that the electrode can pass smoothly through the centering hole while maintaining high guiding accuracy. When the electrode is adjusted to the target position, a small gap is formed between the outer circumferential surface of the electrode and the smaller diameter end area of ​​the tapered hole, thereby achieving precise positioning. The taper angle of the tapered hole can be set according to the electrode size, adjustment accuracy requirements, and assembly convenience.

[0102] The inner wall of the tapered hole can be precision machined, for example, by grinding, polishing, or precision boring to form a smooth surface, thereby reducing frictional resistance during the contact between the electrode and the centering hole and improving the smoothness of the guiding process. Meanwhile, the centering hole plate 130 can be made of cemented carbide, stainless steel, ceramic, or other wear-resistant materials to reduce wear on the tapered hole during long-term use and ensure the stability of the centering accuracy.

[0103] During electrode assembly, as the electrode moves towards the centering hole under the action of the adjusting component 150, if there is a deviation between the electrode axis and the centering hole axis, the inner wall of the tapered hole will guide the electrode, causing it to gradually shift towards the center position. When the electrode can smoothly enter the small-diameter end region of the tapered hole, it indicates that the electrode has basically coincided with the center axis of the centering hole, thus completing the electrode alignment and calibration.

[0104] The use of the above-mentioned tapered centering hole structure can not only improve the guiding performance during electrode assembly and adjustment, but also enhance the fault tolerance of the centering mechanism for electrode deviation, achieve faster and more accurate electrode positioning, improve the centering accuracy between cathode 221 and anode 211, and thus improve the arc straightness and working stability of the arc lamp.

[0105] In some embodiments, the centering plate 130 and the centering block 110 are detachably connected to facilitate the installation, removal, and replacement of the centering plate 130. The connection method between the centering plate 130 and the centering block 110 includes at least one of the following: magnetic adsorption connection, threaded connection, fastening connection, and plug-in connection.

[0106] In some examples, when magnetic adsorption is used for connection, magnetic materials or permanent magnets are respectively provided on the contact surfaces of the centering block 110 and the centering perforated plate 130. The centering perforated plate 130 and the centering block 110 are quickly positioned and fixed by magnetic force. This method has the advantages of convenient assembly and disassembly and quick positioning, and is suitable for application scenarios that require frequent replacement of the centering perforated plate 130.

[0107] In some examples, when a threaded connection is used, a mating thread structure is provided between the centering plate 130 and the centering block 110, allowing for fixing and disassembly by screwing in or out. This connection method is structurally stable and suitable for applications requiring high rigidity.

[0108] In some examples, when a fastening connection is used, the centering plate 130 is fixedly connected to the centering block 110 by screws, bolts or clamping parts, thereby ensuring that the centering plate 130 will not undergo relative displacement during operation and ensuring the stability of the electrode centering reference.

[0109] In some examples, when a plug-in connection is used, the centering plate 130 and the centering block 110 are respectively provided with mutually cooperating positioning protrusions and positioning grooves or guide slot structures. Initial positioning is achieved through insertion and engagement, and then fixation is achieved through an additional locking structure. This method has the advantages of simple structure and convenient processing.

[0110] In some examples, the above connection methods can be combined according to actual usage requirements. For example, magnetic adsorption connection and plug-in connection can be used to ensure that the centering plate 130 will not move along the axial and radial directions of the centering hole, thereby ensuring the centering accuracy and consistency of the electrode.

[0111] In some embodiments, the centering mechanism further includes at least one positioning ring 171, sleeved around the corresponding electrode. The positioning ring 171 is used to assist in constraining and positioning the electrode.

[0112] The inner hole of the positioning ring 171 can be a circular hole structure, matching the outer diameter of the electrode. The inner wall of the positioning ring 171 can be made of wear-resistant material or fitted with a wear-resistant bushing to reduce wear on the electrode during relative movement and improve its service life.

[0113] The positioning ring 171 forms a clearance fit or a slight transition fit with the electrode, which allows the positioning ring 171 to initially restrict the radial position of the electrode without significantly increasing the frictional resistance, thereby reducing the swaying or offset of the electrode during assembly and adjustment.

[0114] The positioning ring 171 can be a single ring or multiple rings spaced apart along the electrode axis. When multiple positioning rings 171 are provided, each positioning ring 171 corresponds to a different axial position of the electrode, thereby forming a multi-point support structure for the electrode.

[0115] The positioning ring 171 can be fixedly installed on the centering block 110. The positioning ring 171 and the centering block 110 can be detachable, such as by snap-fit ​​installation or plug-in positioning, to facilitate replacement or adjustment according to different electrode specifications. Alternatively, the positioning ring 171 can be fixed in the groove of the corresponding electrode assembly.

[0116] The inner edge of the positioning ring 171 can be provided with a guide chamfer or rounded corner structure to enable the electrode to transition smoothly during insertion, reduce assembly resistance and avoid scratching the electrode surface.

[0117] In some embodiments, the end of the centering block 110 opposite to the centering plate 130 is provided with a positioning hole for cooperating with the positioning bolt 212 in the corresponding electrode assembly to realize the positioning connection between the electrode assembly and the centering mechanism.

[0118] The positioning hole can be a blind hole structure, with its axis parallel to the axis of the centering block 110. The positioning hole is provided with internal threads.

[0119] The positioning bolt 212 is mounted on the mounting base in the electrode assembly. When the electrode assembly approaches the centering block 110, the positioning bolt 212 is inserted into the positioning hole, thereby achieving the initial positioning of the electrode assembly and the centering mechanism, and establishing a pre-positioning relationship between the electrode assembly and the centering mechanism.

[0120] The positioning hole wall can be provided with a guide chamfer or rounded corner structure, so that the positioning bolt 212 can automatically correct minor deviations during the insertion process, thereby improving assembly efficiency and reliability.

[0121] In some embodiments, the end of the centering block 110 opposite to the centering perforated plate 130 includes a semi-annular positioning portion 111.

[0122] The centering mechanism also includes: a caliper 172, which is semi-circular, for clamping the corresponding electrode assembly between the caliper 172 and the positioning part 111; and a locking bolt 173 for fixing the caliper 172 to the centering block 110.

[0123] The positioning part 111 is used to provide end positioning and mounting reference for the electrode assembly.

[0124] The caliper 172 has a semi-ring structure and is provided correspondingly to the positioning part 111. It is used to clamp the corresponding electrode assembly between the caliper 172 and the positioning part 111, thereby realizing the clamping and positioning of the electrode assembly.

[0125] For example, the caliper 172 and the positioning part 111 together form a clamping space for accommodating the end of the electrode assembly when closed. After the electrode assembly is installed in the clamping space, the caliper 172 applies a radial clamping force to the electrode assembly to keep it in a predetermined installation position, thereby reducing the axial movement and radial displacement of the electrode assembly during operation.

[0126] The locking bolt 173 is used to fix the caliper 172 to the centering block 110. The locking bolt 173 passes through the connecting hole of the caliper 172 and mates with the hole on the centering block 110. By tightening the locking bolt 173, the caliper 172 is tightly fitted with the positioning part 111, thereby forming a stable and reliable clamping structure.

[0127] The axial direction of the locking bolt 173 can be parallel to the axial direction of the centering block 110. The positioning part 111 can be connected with mounting ears, and the end of the caliper 172 has two mounting ears, which are distributed on opposite sides of the caliper 172. Each mounting ear is provided with a second through hole, and the locking bolt 173 passes through the second through hole and connects with the caliper 172 to engage with the nut.

[0128] Alternatively, the axial direction of the locking bolt 173 can be perpendicular to the axial direction of the centering block 110. The positioning part 111 is provided with a threaded hole. The locking bolt 173 passes through the connecting hole of the caliper 172 and engages with the threaded hole.

[0129] In some embodiments, to accommodate the structural differences between the two electrodes, the end of the centering block 110 corresponding to the anode 211 away from the centering orifice plate 130 is provided with a positioning hole for engaging with the positioning bolt 212 in the anode assembly 210. The end of the centering block 110 corresponding to the cathode 221 away from the centering orifice plate 130 includes a semi-annular positioning portion 111; the centering mechanism corresponding to the cathode 221 further includes: a clamp 172, which is semi-annular, for clamping the corresponding electrode assembly between the clamp 172 and the positioning portion 111; and a locking bolt 173 for fixing the clamp 172 to the centering block 110.

[0130] In the assembly scenario of anode 211, the integral anode assembly 210 is installed. The positioning ring 171 is installed into the groove of the anode assembly 210. The centering block 110 is tightened through the positioning holes of the assembly using positioning bolts 212. The connecting block 156 is installed onto one of the adjusting rings 155. The adjusting block 152 is then installed together with the connecting block 156. Next, a set screw is installed onto the adjusting ring 155. A rotating rod 153 is installed at the end of the set screw and locked using a shaft end retainer. The rotating rod 153 drives the set screw to adjust the position of the adjusting block 152. Finally, the adjusting ring 155 is installed onto the centering block 110. In one of the annular grooves, the corresponding locking ring 154 is engaged with the adjusting ring 155 by bolts, thus completing the assembly of one of the adjusting components 150; similarly, the assembly of the other adjusting component 150 is completed, and the push rods 151 in the two adjusting components 150 are arranged at 120°; the anodes 211 at different positions are adjusted by the two sets of adjusting components 150, so that the end of the anode 211 is inserted into the centering hole of the centering plate 130; wherein, due to magnetic adsorption and positioning groove positioning, the centering plate 130 will not move radially or axially, and the positional change of the anode 211 can be controlled relatively accurately by fine adjustment to ensure that the anode 211 is centered.

[0131] In the assembly scenario of cathode 221, first install the integral cathode assembly 220, with the end face of cathode assembly 220 abutting against the stepped surface of centering block 110. Tighten and lock the clamp 172 using locking bolt 173. Install the connecting block 156 onto one of the adjusting rings 155, and install the adjusting block 152 together with the connecting block 156. Next, install the set screw onto the adjusting ring 155, install the rotating rod 153 at the end of the set screw, and lock the rotating rod 153 using a shaft end retainer. Drive the set screw with the rotating rod 153 to adjust the position of the adjusting block 152. Finally, install the adjusting ring 155 onto one of the centering blocks 110. In each annular groove, the corresponding locking ring 154 is engaged with the adjusting ring 155 by bolts, thus completing the assembly of one adjusting component 150; similarly, the assembly of the other adjusting component 150 is completed, and the push rods 151 in the two adjusting components 150 are arranged at 120°; the cathodes 221 in different positions can be adjusted through the two adjusting components 150, so that the end of the cathode 221 is inserted into the centering hole of the centering plate 130; wherein, due to magnetic adsorption and positioning groove positioning, the centering plate 130 will not move radially or axially, and the position change of the anode 211 can be controlled more precisely through fine adjustment to ensure that the cathode 221 is centered.

[0132] In some embodiments, corresponding centering mechanisms are provided for the cathode 221 and anode 211 in the arc lamp system. The diameter of the electrode head of the cathode 221 is smaller, and the diameter of the anode 211 is larger. Correspondingly, the diameter of the centering hole corresponding to the anode 211 is larger than the diameter of the centering hole plate 130 corresponding to the cathode 221.

[0133] In some embodiments, the concentricity of the centering holes of the centering plates 130 in the two centering mechanisms is greater than or equal to 0.02 mm and less than or equal to 0.05 mm. That is, the centering holes of the centering plates 130 in the two centering mechanisms have high concentricity requirements, and their concentricity is controlled between 0.02 mm and 0.05 mm.

[0134] This concentricity range is used to limit the machining and assembly deviation of the centering hole relative to the 130 datum axis of the centering hole plate. By controlling the concentricity within the above range, it is possible to effectively ensure that the electrode has consistent datum guiding conditions during insertion and adjustment, thereby reducing electrode deflection or arc offset caused by hole eccentricity.

[0135] In this embodiment, the concentricity of the centering plate 130 is controlled within the range of 0.02mm to 0.05mm, which can achieve a good balance between processing feasibility and centering accuracy. This allows the cathode 221 and anode 211 to achieve stable and reliable coaxial positioning with the cooperation of their respective centering mechanisms, thereby improving the overall operational consistency and process stability of the arc lamp system.

[0136] This embodiment also provides a centering mechanism, the structure and implementation process of which are the same as the centering mechanism in any of the previous embodiments, and will not be described again in this embodiment.

[0137] The other components of the centering mechanism and centering tooling in the above embodiments can be adopted from various technical solutions that are now and will be known to those skilled in the art, and will not be described in detail here.

[0138] In the description of this specification, it should be understood that the terms “center,” “lateral,” “inner,” “outer,” “axial,” “radial,” “circumferential,” etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing this disclosure and simplifying the description, and are not intended to indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this disclosure.

[0139] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this disclosure, "multiple" means two or more, unless otherwise explicitly specified.

[0140] In this disclosure, unless otherwise expressly specified and limited, the terms "installation," "connection," "linking," "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection, an electrical connection, or a communication connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this disclosure according to the specific circumstances.

[0141] In this disclosure, unless otherwise expressly specified and limited, "above" or "below" the second feature can include direct contact between the first and second features, or contact between the first and second features through another feature between them. Furthermore, "above," "over," and "on top" of the second feature includes the first feature being directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature includes the first feature being directly above or diagonally above the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0142] The foregoing disclosure provides many different implementations or examples for carrying out different structures of this disclosure. To simplify the disclosure, specific examples of components and arrangements have been described above. Of course, these are merely examples and are not intended to limit the scope of this disclosure. Furthermore, reference numerals and / or letters may be repeated in different examples; such repetition is for simplification and clarity and does not in itself indicate a relationship between the various implementations and / or arrangements discussed.

[0143] The above description is merely a specific embodiment of this disclosure, but the scope of protection of this disclosure is not limited thereto. Any person skilled in the art can easily conceive of various variations or substitutions within the technical scope disclosed in this disclosure, and these should all be included within the scope of protection of this disclosure. Therefore, the scope of protection of this disclosure should be determined by the scope of the claims.

Claims

1. A centering mechanism for electrodes of an arc lamp, characterized in that, include: The central hole of the block is used for the corresponding electrode to pass through; The centering plate is provided with centering holes adapted to the corresponding electrodes and is located at one end of the centering block; At least two adjustment components are respectively connected to the centering block and are spaced apart along the axial direction of the centering block; Along the circumference of the centering block, at least two of the adjustment components are staggered to enable centering adjustment of the respective electrodes from at least two directions.

2. The centering mechanism according to claim 1, characterized in that, The centering block has a connecting hole, which is connected to the center hole of the centering block, and the axis of the connecting hole is perpendicular to the axis of the centering block. The adjustment component includes: A push rod, the axis of which is perpendicular to the axis of the centering block; wherein the axes of at least two push rods of the adjustment assembly are at a preset angle; An adjustment block is located at one end of the push rod facing the central axis of the centering block, and is used to push the corresponding electrode toward the central axis of the centering block under the drive of the push rod; the end of the adjustment block facing the central axis of the centering block is provided with an arc-shaped surface adapted to the corresponding electrode; at least one of the push rod and the adjustment block cooperates with the connecting hole.

3. The centering mechanism according to claim 2, characterized in that, The push rod includes a set screw.

4. The centering mechanism according to claim 3, characterized in that, The end of the set screw that is away from the central axis of the centering block is provided with a first through hole; the axis of the first through hole is perpendicular to the axis of the set screw and the axis of the centering block. The adjustment component further includes: A rotating rod is installed in the first through hole, and the two ends of the rotating rod extend out of the first through hole in opposite directions.

5. The centering mechanism according to claim 2, characterized in that, The centering block is provided with at least two annular grooves, and each annular groove is distributed at intervals along the axial direction of the centering block. The connecting hole is used to connect the annular groove with the center hole of the centering block; The adjustment component further includes: The locking ring is semi-circular in shape. An adjusting ring is connected to the locking ring; the locking ring and the adjusting ring are engaged with corresponding slots; the push rod passes through the adjusting ring.

6. The centering mechanism according to claim 5, characterized in that, The adjustment ring includes: The main body of the adjusting ring is semi-circular, docks with the locking ring, and is securely connected to the locking ring; An adjustment ring extension is connected to the side of the adjustment ring main body away from the central axis of the centering block and extends in a direction away from the central axis of the centering block; wherein the push rod passes through the adjustment ring extension and the adjustment ring main body.

7. The centering mechanism according to claim 2, characterized in that, The adjustment assembly further includes a connecting block connected between the push rod and the adjustment block.

8. The centering mechanism according to claim 2, characterized in that, The preset angle between the axial directions of at least two of the push rods of the adjustment components is 120°.

9. The centering mechanism according to claim 1, characterized in that, The centering hole of the centering plate is conical; the diameter of the centering hole gradually decreases along the direction away from the centering block.

10. The centering mechanism according to claim 1, characterized in that, The connection method between the centering plate and the centering block includes at least one of the following: Magnetic adsorption connection, threaded connection, fastening connection, plug connection.

11. The centering mechanism according to claim 1, characterized in that, Also includes: At least one positioning ring is fitted over the corresponding electrode.

12. The centering mechanism according to claim 1, characterized in that, The end of the centering block opposite to the centering plate is provided with a positioning hole for engaging with the positioning bolt in the corresponding electrode assembly.

13. The centering mechanism according to claim 1, characterized in that, The end of the centering block that is away from the centering perforated plate includes a semi-annular positioning part; The centering mechanism also includes: The caliper is semi-circular and is used to clamp the corresponding electrode assembly between the caliper and the positioning part. Locking bolts are used to securely connect the caliper to the centering block.

14. A centering fixture for electrodes of an arc lamp, characterized in that, include: Two centering mechanisms, one of which is used to center the anode in the electrode and the other of which is used to center the cathode in the electrode; wherein the centering mechanism is the centering mechanism according to any one of claims 1 to 13.

15. The centering fixture according to claim 14, characterized in that, The diameter of the centering hole corresponding to the anode is larger than the diameter of the centering plate corresponding to the cathode; The concentricity of the centering holes in the centering plates of the two centering mechanisms is greater than or equal to 0.02 mm and less than or equal to 0.05 mm.

16. The centering fixture according to claim 14, characterized in that, The centering block corresponding to the anode has a positioning hole at its end away from the centering plate, which is used to cooperate with the positioning bolt in the anode assembly. The end of the centering block corresponding to the cathode that is away from the centering plate includes a semi-annular positioning part; The centering mechanism corresponding to the cathode also includes: The caliper is semi-circular and is used to clamp the corresponding electrode assembly between the caliper and the positioning part. Locking bolts are used to securely connect the caliper to the centering block.

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