Sensor protection mechanism and electronic device

Abstract

The application discloses a sensor protection mechanism and electronic equipment. The sensor protection mechanism comprises a substrate, the substrate is provided with a first through hole and an abutting portion, a valve body, the valve body comprises a fixed portion and a movable portion opposite to the first through hole, the fixed portion is connected to the substrate, one end of the movable portion is a connecting portion connected to the fixed portion, and the other end is a free end; wherein the movable portion can move between an open position and a closed position, in the open position, the free end can be separated from the abutting portion to open the first through hole, in the closed position, the free end can abut against the abutting portion to cover the first through hole. The movable portion can close the first through hole, so that strong airflow can be prevented from entering the first through hole.

Description

Technical Field

[0001] This invention relates to the field of electronic equipment technology, and more specifically, to a sensor protection mechanism and electronic equipment. Background Technology

[0002] In related technologies, sensors with through holes, such as microphones, lack protection for critical components. When strong airflow or particulate matter enters through the through holes, it can cause physical damage to the inside of the sensor or reduce its performance.

[0003] Therefore, a new technical solution is needed to solve the above-mentioned technical problems. Summary of the Invention

[0004] One objective of this invention is to provide a new technical solution for a sensor protection mechanism.

[0005] According to a first aspect of the present invention, a sensor protection mechanism is provided. The sensor protection mechanism includes: A substrate, wherein the substrate is provided with a first through hole and an abutment portion; The valve body includes a fixed part and a movable part opposite to the first through hole. The fixed part is connected to the base plate. One end of the movable part is a connecting part connected to the fixed part, and the other end is a free end. The movable part is movable between an open position and a closed position. In the open position, the free end is able to separate from the abutting part to open the first through hole. In the closed position, the free end is able to abut against the abutting part to cover the first through hole.

[0006] Optionally, the substrate includes a board body and a gasket. The board body has a first through hole, and the gasket has a second through hole. The second through hole communicates with the first through hole. The gasket is located between the board body and the movable part, and the abutting part is provided on the board body and / or the gasket.

[0007] Optionally, the abutting part divides the first through hole into multiple through holes, and the movable part is provided in multiple ways, with each movable part corresponding to one of the through holes.

[0008] Optionally, the ends of the plurality of movable parts away from the fixed part can be arranged to form a third through hole.

[0009] Optionally, the movable part is connected to the inner edge of the fixed part, and the fixed part is located on the outer periphery of the first through hole; Alternatively, the movable part is connected to the outer periphery of the fixed part, and the fixed part is located inside the first through hole.

[0010] Optionally, the gasket is further provided with a fourth through hole, through which the fixing part can pass and be connected to the substrate, and the movable part is connected to the outer periphery of the fixing part.

[0011] Optionally, multiple first through holes are provided, and the multiple first through holes are arranged circumferentially around the fourth through hole.

[0012] Optionally, the movable part is elastically connected to the fixed part.

[0013] Optionally, the movable part and the fixed part are integrally formed.

[0014] According to a second aspect of this application, a MEMS sensor is provided. The MEMS sensor includes a sensor protection mechanism as described in the above embodiments.

[0015] According to a third aspect of this application, an electronic device is provided. This electronic device includes the MEMS sensor described in the above embodiments.

[0016] One technical advantage of this application is that the movable part can move between an open position and a closed position. In the open position, the first through hole is open. When the movable part is in the closed position, the movable part can close the first through hole to prevent strong airflow from entering the first through hole.

[0017] Other features and advantages of the invention will become clear from the following detailed description of exemplary embodiments of the invention with reference to the accompanying drawings. Attached Figure Description

[0018] The accompanying drawings, which are incorporated in and form part of this specification, illustrate embodiments of the invention and, together with their description, serve to explain the principles of the invention.

[0019] Figure 1 This is an exploded view of the sensor protection mechanism according to one embodiment of this application.

[0020] Figure 2 This is a cross-sectional view of a sensor protection mechanism according to an embodiment of this application.

[0021] Figure 3 This is an exploded view of the structure of multiple sensor protection mechanisms with different structures according to one embodiment of this application.

[0022] Figure 4 This is an exploded view of the structure of multiple sensor protection mechanisms with different structures according to another embodiment of this application.

[0023] Figure 5 This is an exploded view of the structure of a MEMS sensor according to an embodiment of this application.

[0024] Figure 6 This is a schematic diagram of the internal structure of a MEMS sensor according to an embodiment of this application.

[0025] Figure 7 This is a schematic diagram of the internal structure of a MEMS sensor according to another embodiment of this application.

[0026] Figure label: 1. Substrate; 11. First through hole; 12. Abutting part; 13. Board body; 2. Gasket; 21. Second through hole; 22. Fourth through hole; 3. Valve body; 31. Movable part; 32. Fixing part; 33. Third through hole; 4. Mounting plate; 41. Acoustic hole; 5. MEMS chip; 6. ASIC chip; 7. Cover. Detailed Implementation

[0027] Various exemplary embodiments of the present invention will now be described in detail with reference to the accompanying drawings. It should be noted that, unless otherwise specifically stated, the relative arrangement, numerical expressions, and values ​​of the components and steps set forth in these embodiments do not limit the scope of the invention.

[0028] The following description of at least one exemplary embodiment is merely illustrative and is in no way intended to limit the invention or its application or use.

[0029] Techniques, methods, and equipment known to those skilled in the art may not be discussed in detail, but where appropriate, such techniques, methods, and equipment should be considered part of the specification.

[0030] In all the examples shown and discussed herein, any specific values ​​should be interpreted as merely exemplary and not as limitations. Therefore, other examples of exemplary embodiments may have different values.

[0031] It should be noted that similar labels and letters in the following figures indicate similar items; therefore, once an item is defined in one figure, it does not need to be discussed further in subsequent figures.

[0032] According to one embodiment of this application, a sensor protection mechanism is provided. For example... Figures 1 to 7As shown, the sensor protection mechanism includes a base plate 1 and a valve body 3. The base plate 1 has a first through hole 11 and an abutment portion 12; the valve body 3 includes a fixed portion 32 and a movable portion 31 opposite to the first through hole 11. The fixed portion 32 is connected to the base plate 1, and one end of the movable portion 31 is a connecting portion connected to the fixed portion 32, and the other end is a free end; wherein, the movable portion 31 can move between an open position and a closed position. In the open position, the free end can separate from the abutment portion 12 to open the first through hole 11, and in the closed position, the free end can abut against the abutment portion 12 to cover the first through hole 11.

[0033] In this example, the sensor has a through-hole connecting to the outside. For example, a sound sensor (microphone) has a sound hole for receiving external sound signals. The sensor protection mechanism can be disposed at the sound hole, which is connected to the first through-hole 11. In a normal environment, the movable part 31 is in the open position, the first through-hole 11 is open, and the receiving unit inside the sound sensor can receive sound signals normally. When a strong airflow blows in, the strong airflow can move the movable part 31 from the open position to the closed position, thereby sealing the first through-hole 11. This prevents the strong airflow from blowing into the interior of the sound sensor and also isolates impurities such as solid particles or oil. Of course, the sensor protection mechanism of this application can also be used for other types of sensors. Those skilled in the art can determine the appropriate method based on the actual situation, and no specific limitation is made here.

[0034] like Figure 1 and Figure 2 As shown, in this example, the valve body 3 has a fixed part 32 and a movable part 31. One end of the movable part 31 is a connecting part, and the other end is a free end. The connecting part is connected to the fixed part 32, and the free end is movable relative to the fixed part 32. The fixed part 32 is connected to the substrate 1. When a strong airflow blows towards the movable part, the strong airflow can move the movable part 31 from the open position to the closed position. That is, the free end can abut against the abutment part 12 to cover the first through hole 11, thereby sealing the first through hole 11 to prevent the strong airflow from blowing into the interior of the sound sensor, and also to isolate impurities such as solid particles or oil. When the strong airflow disappears, the free end can separate from the abutment part 12 to open the first through hole 11, and the sound sensor can work normally.

[0035] In one example, such as Figure 1 and Figure 2The substrate 1 shown includes a board body 13 and a gasket 2. The board body is provided with a first through hole 11, and the gasket 2 is provided with a second through hole 21. The second through hole 21 communicates with the first through hole 11. The gasket 2 is located between the board body 13 and the movable part 31. One end of the gasket 2 facing the movable part 31 can abut against the movable part 31. The abutting part 12 is provided on the board body 13 and / or the gasket 2.

[0036] In this example, the gasket 2 is connected to the main body 13 and is located between the movable part 31 and the main body 13. The end of the gasket 2 facing the movable part 31 can abut against the movable part 31, that is, the gasket 2 can support the movable part 31 in the open position. A strong airflow can blow from the side of the movable part 31 away from the first through hole 11, that is, the strong airflow can blow the movable part 31 toward the first through hole 11 so that the movable part 31 can completely cover the second through hole 21, thereby closing the first through hole 11. The movable part 31 moves from the open position to the closed position, thereby closing the first through hole 11. When the strong airflow disappears, under the support of the gasket 2, the movable part 31 can move away from the first through hole 11, and the movable part 31 moves from the closed position to the open position, thereby opening the first through hole 11.

[0037] It should be noted that the movable part 31 has a certain degree of elasticity and can swing around the connection between the movable part 31 and the fixed part 32. The position where the pad 2 abuts against the movable part 31 is close to the connection between the movable part 31 and the fixed part 32.

[0038] In this example, the abutment portion 12 is provided on the plate body 13 and / or the gasket 2. That is, the abutment portion 12 can be provided on the plate body 13, and in the closed position, the free end of the movable portion 31 can abut against the plate body 13. Alternatively, the abutment portion 12 can also be provided on the gasket 2, which covers the plate body 13, and in the closed position, the free end of the movable portion 31 can abut against the gasket 2. Alternatively, both the plate body 13 and the gasket 2 are provided with abutment portions 12, and in the closed position, part of the movable portion 31 abuts against the plate body 13, while the other part of the movable portion 31 abuts against the gasket 2. Those skilled in the art can decide according to the actual situation, and no specific limitation is made here.

[0039] In this example, the abutment part 12 is provided on the gasket 2, and the gasket 2 covers the plate body 13. When in the closed position, the free end of the movable part 31 can abut against the gasket 2, which can prevent the movable part 31 from contacting the plate body 13 and prevent the movable part 31 from being stuck to the adhesive on the plate body 13.

[0040] It should be noted that the fixing part 32 can be bonded to the plate body 13, and the gasket 2 can also be bonded to the plate body 13. Of course, the specific connection method between the fixing part 32 and the gasket 2 can be determined by those skilled in the art according to the actual situation, and no specific limitation is made here.

[0041] It should also be noted that the valve body 3 can be made of materials such as polyimide film or metal foil. The gasket 2 can be made of materials such as stainless steel, polyimide film, FR-4 (where "FR" indicates flame-retardant and "4" represents materials made of epoxy resin and fiberglass cloth with a flame retardancy rating of UL94V-0), silicone, TUP (Thermoplastic Urethane), rubber, etc. The substrate 1 can be made of materials such as ceramic, stainless steel, aluminum alloy, polyimide film, FR-4, PBT (polybutylene terephthalate), PC (polycarbonate), etc. Of course, the specific materials of the valve body 3, gasket 2, and substrate 1 can be determined by those skilled in the art according to the actual situation, and no specific limitations are made here.

[0042] In this example, the movable part 31 can move between an open position and a closed position. In the open position, the first through hole 11 is open. When the movable part 31 is in the closed position, the movable part 31 can close the first through hole 11 to prevent strong airflow from entering the first through hole 11, and can also isolate impurities such as solid particles or oil stains.

[0043] In one example, such as Figure 1 and Figure 2 As shown, the abutting part 12 divides the first through hole 11 into multiple through holes, and the movable part 31 is provided in multiple ways, with each movable part 31 corresponding to one of the through holes.

[0044] like Figure 1 As shown, in this example, the abutment portion 12 has a cross-shaped structure and divides the first through hole 11 into four through holes, i.e., it has four first through holes 11. Four movable portions 31 are correspondingly provided, with multiple movable portions 31 corresponding to multiple through holes one-to-one. Each movable portion 31 can close one through hole. Alternatively, two first through holes 11 are spaced apart, with the abutment portion 12 between the two first through holes 11, and two movable portions 31 are also correspondingly provided. Of course, the specific number and arrangement of the movable portions 31 and the first through holes 11 can be determined by those skilled in the art according to the actual situation, as long as the movable portions 31 can close or open multiple first through holes 11; no specific limitation is made here.

[0045] In this example, the gasket 2 can be a support plate structure, and a second through hole 21 is provided through the gasket 2 along its thickness direction. The position of the second through hole 21 corresponds to the position of the first through hole 11, so that the second through hole 21 communicates with the first through hole 11, for example, the second through hole 21 and the first through hole 11 coincide. The outer wall of the gasket 2 can abut against the movable part 31. When the movable part 31 is in the closed position, the movable part 31 can completely cover the second through hole 21, so that the movable part 31 can be tightly attached to the surface of the gasket 2 away from the substrate 1, thereby improving the sealing performance of closing the second through hole 21, thereby improving the sealing performance of closing the first through hole 11.

[0046] It should be noted that the second through hole 21 and the first through hole 11 can be formed on the gasket 2 and the substrate 1 respectively by mechanical cutting or laser cutting. Of course, the specific method of forming the second through hole 21 and the first through hole 11 can be determined by those skilled in the art according to the actual situation, and no specific limitation is made here.

[0047] In this example, by providing multiple movable parts 31, the inner diameter of the through hole formed when the movable part 31 is in the open position can be increased, thereby improving the signal transmission effect of the sensor.

[0048] In one example, such as Figure 2 As shown, the ends of the plurality of movable parts 31 away from the fixed part 32 can form a third through hole 33.

[0049] like Figure 2 As shown, in this example, Figure 2 Multiple movable parts 31 are in the open position. One end of each movable part 31 is connected to the fixed part 32, and the other end can form a third through hole 33 around it. The third through hole 33 can communicate with the first through hole 11. There may also be a gap hole between two adjacent movable parts 31, which can also communicate with the first through hole 11.

[0050] like Figure 3 As shown, in this example, Figure 3 The diagram shows an exploded view of the structure of several sensor protection mechanisms with different designs. Figure 3 The first row of the middle section are respectively Figure 3 A, Figure 3 B Figure 3 C and Figure 3 A schematic diagram of the structure of substrate 1 of D, the second row is respectively... Figure 3 A, Figure 3 B Figure 3 C and Figure 3 The structural diagram of gasket 2 in D, the third row is as follows: Figure 3 A, Figure 3 B Figure 3 C and Figure 3A schematic diagram of the valve body 3 of D. The base plate 1, gasket 2 and valve body 3 correspond respectively.

[0051] like Figure 3 As shown in Figure A, four movable parts 31 are formed by cutting an "X" shape on the valve body 3. Figure 3 B and Figure 3 The structure of the active part 31 in D is all in Figure 3 It is obtained by transforming A. For example Figure 3 B and Figure 3 As shown in D, by cutting the end of the movable part 31 away from the fixed part 32, multiple movable parts 31 can be arranged to form a third through hole 33.

[0052] It should be noted that when the movable part 31 is in the closed position, the third through hole 33 can correspond to the solid part of the pad 2 or the substrate 1, so that the third through hole 33 and the first through hole 11 cannot communicate.

[0053] like Figure 3 As shown, in this example, the second through-hole 21 of the gasket 2 can have the same shape and size as the first through-hole 11 of the substrate 1. For example, as Figure 3 A and Figure 3 As shown in Figure C, the shape of the second through hole 21 can be triangular, such as... Figure 3 As shown in Figure B, the shape of the second through hole 21 can be circular, or, as shown in Figure B, ... Figure 3 As shown in Figure D, the second through hole 21 is composed of a plurality of small holes spaced apart. Those skilled in the art can determine the specific configuration based on actual conditions; no specific limitations are made here.

[0054] like Figure 3 As shown in Figure C, the substrate 1 has two first through holes 11 opposite each other, and the gasket 2 has two corresponding second through holes 21. The valve body 3 also has two corresponding movable parts 31 opposite each other. Of course, the specific shape and structure of the movable parts 31 can be determined by those skilled in the art according to the actual situation, and no specific limitation is made here.

[0055] In one example, such as Figure 3 and Figure 4 As shown, the movable part 31 is connected to the inner edge of the fixed part 32, and the fixed part 32 is located on the outer periphery of the first through hole 11; or, the movable part 31 is connected to the outer periphery of the fixed part 32, and the fixed part 32 is located on the inner side of the first through hole 11.

[0056] like Figures 1 to 3As shown, in this example, the movable part 31 is connected to the inner edge of the fixed part 32, and the fixed part 32 is located on the outer periphery of the first through hole 11. That is, the movable part 31 is located in the middle of the valve body 3, and the fixed part 32 is located on the outer periphery of the valve body 3. In other words, the fixed part 32 has an annular structure, and the movable part 31 is disposed on the inner side of the fixed part 32. Correspondingly, the first through hole 11 is located in the middle of the substrate 1, and the substrate 1 forms a mounting part on the outer periphery of the first through hole 11. The fixed part 32 can be connected to the mounting part, and the fixed part 32 is located on the outer periphery of the first through hole 11.

[0057] Or, such as Figure 4 As shown, in this example, the movable part 31 is connected to the outer periphery of the fixed part 32, and the fixed part 32 is located inside the first through hole 11. That is, the movable part 31 is located on the outer periphery of the valve body 3, and the fixed part 32 is located in the middle position of the valve body 3. Correspondingly, a plurality of first through holes 11 are arranged at circumferential intervals, and the substrate 1 forms a mounting part inside the plurality of first through holes 11. The fixed part 32 can be connected to the mounting part, and the fixed part 32 is located inside the plurality of first through holes 11.

[0058] In one example, such as Figure 4 As shown, the gasket 2 is also provided with a fourth through hole 22, the fixing part 32 can pass through the fourth through hole 22 and be connected to the substrate 1, and the movable part 31 is connected to the outer periphery of the fixing part 32.

[0059] like Figure 4 As shown, in this example, Figure 4 The diagram shown is an exploded view of the structure of multiple sensor protection mechanisms with different structures according to another embodiment. Figure 4 The first row of the middle section are respectively Figure 4 A, Figure 4 B Figure 4 C and Figure 4 A schematic diagram of the structure of substrate 1 of D, the second row is respectively... Figure 4 A, Figure 4 B Figure 4 C and Figure 4 The structural diagram of gasket 2 in D, the third row is as follows: Figure 4 A, Figure 4 B Figure 4 C and Figure 4 A schematic diagram of the valve body 3 of D. The base plate 1, gasket 2 and valve body 3 correspond respectively.

[0060] Figure 4In the demonstrated sensor protection mechanism, the movable part 31 is located on the outer periphery of the valve body 3, and the fixed part 32 is located in the middle of the valve body 3. The movable part 31 is disposed on the outside of the fixed part 32. Correspondingly, a mounting part is formed on the inner side of the first through hole 11 on the substrate 1, and the fixed part 32 can be connected to the mounting part. The gasket 2 is provided with a fourth through hole 22, through which the fixed part 32 can pass and be connected to the mounting part of the substrate 1. Since the movable part 31 is connected to the outer periphery of the fixed part 32, the end of the fourth through hole 22 facing away from the substrate 1 can support the movable part 31.

[0061] like Figure 4 As shown in Figure A, the first through-hole 11 of the substrate 1 can be a rectangular hole, and multiple rectangular holes are provided, spaced apart around the mounting portion. The second through-hole 21 of the gasket 2 is a rectangular hole, and multiple rectangular holes are provided. The fourth through-hole 22 is a circular hole, and multiple rectangular holes are spaced apart around the fourth through-hole 22. The valve body 3 has a rectangular structure and is cut from the corners of the valve body 3 towards the center, thereby obtaining four movable portions 31 and a fixed portion 32 located in the middle of the multiple movable portions 31.

[0062] like Figure 4 B Figure 4 C Figure 4 As shown in Figure D, the first through hole 11 of the substrate 1 can be formed by a plurality of spaced-apart small holes. Alternatively, the first through hole 11 of the substrate 1 can also be a plurality of fan-shaped holes, which are spaced around the mounting portion. The position and number of the second through holes 21 on the gasket 2 correspond to the first through hole 11, and the shape of the second through hole 21 can be the same as or different from the first through hole 11.

[0063] like Figure 4 B Figure 4 As shown in Figure C, the valve body 3 can also be circular, and the movable part 31 can be fan-shaped. For example... Figure 4 As shown in D, the movable part 31 has a fan-shaped structure, and there are two movable parts 31. The two movable parts 31 are connected to the opposite sides of the fixed part 32.

[0064] Of course, the specific shape and structure of the substrate 1, gasket 2 and valve body 3 can be determined by those skilled in the art according to the actual situation, and no specific limitation is made here.

[0065] In one example, multiple first through holes 11 are provided, and these multiple first through holes 11 are circumferentially spaced around the fourth through hole 22. The position of the fourth through hole 22 corresponds to the mounting portion, and the multiple first through holes 11 are circumferentially spaced around the fourth through hole 22, that is, the multiple first through holes 11 are circumferentially spaced around the mounting portion. By providing multiple first through holes 11, the interior of the sensor can communicate with the outside through multiple first through holes 11, which helps to improve the accuracy of the sensor's signal reception and reduce the influence of the protective mechanism on the sensor.

[0066] In one example, the movable part 31 is elastically connected to the fixed part 32, which facilitates the reset of the movable part 31, that is, it facilitates the automatic movement of the movable part 31 from the closed position to the open position. For example, the valve body 3 is made of an elastic material, and the movable part 31 is formed by cutting so that the movable part 31 also has a certain degree of elasticity. Alternatively, an elastic element is provided between the movable part 31 and the fixed part 32 to improve the reset accuracy of the movable part 31.

[0067] In one example, the movable part 31 and the fixed part 32 are integrally formed, thereby simplifying the structure of the valve body 3 and reducing assembly steps. For example, the valve body 3 is sheet-shaped, and the movable part 31 is formed by cutting the valve body 3 by mechanical cutting or other methods.

[0068] According to another embodiment of this application, a MEMS sensor is provided. This MEMS sensor includes the sensor protection mechanism described in the above embodiments.

[0069] In this example, such as Figures 5 to 7 As shown, the MEMS sensor is a MEMS microphone, which also includes a mounting plate 4, a MEMS chip 5, and an ASIC chip 6. The ASIC chip 6 is mounted on the mounting plate 4 and is electrically connected to the MEMS chip 5. The mounting plate 4 has a sound hole 41, and the MEMS chip 5 is positioned corresponding to the sound hole 41. The MEMS chip 5 receives external sound signals through the sound hole 41.

[0070] like Figure 6 and Figure 7 As shown, Figure 6 This is a schematic diagram showing the structure of the movable part 31 in the open position, with the first through hole 11 open. Figure 7 This is a schematic diagram showing the structure when the movable part 31 is in the closed position and the movable part 31 closes the first through hole 11.

[0071] It should be noted that the sensor protection mechanism is mounted on the mounting plate 4 and covers the sound hole 41. For example, the sensor protection mechanism can be bonded to the mounting plate 4 using double-sided tape or adhesive. The MEMS chip 5 can be bonded to the side of the substrate 1 facing away from the valve body 3. The valve body 3 is located on the side of the substrate 1 facing the sound hole 41. When a strong airflow blows from outside the sound hole 41, the strong airflow acts on the valve body 3. That is, the strong airflow can move the movable part 31 from the open position to the closed position, thereby sealing the first through hole 11. This prevents the strong airflow from entering the interior of the MEMS microphone and also isolates impurities such as solid particles or oil. In a normal environment, the movable part 31 is in the open position, the first through hole 11 is open, and the first through hole 11 is connected to the sound hole 41. The MEMS chip 5 can communicate with the sound hole 41 through the first through hole 11 to receive sound signals normally.

[0072] like Figure 5 As shown, in this example, the MEMS sensor also includes a housing 7. The open end of the housing 7 is bonded or soldered to one end of the mounting plate 4 where the MEMS chip 5 and the ASIC chip 6 are located, and the housing 7 can cover the MEMS chip 5 and the ASIC chip 6. The mounting plate 4 can be a PCB circuit board.

[0073] Of course, the MEMS sensor in this application can also be other types of sensors. As long as the sensor has a through hole that connects to the outside, it can be protected by the sensor protection mechanism of this application. Those skilled in the art can decide according to the actual situation, and no specific limitation is made here.

[0074] According to another embodiment of this application, an electronic device is provided, characterized in that it includes the MEMS sensor described in the above embodiments. For example, the electronic device can be a mobile phone, tablet, or computer, etc., and those skilled in the art can determine it according to the actual situation, without making specific limitations here.

[0075] The above embodiments mainly describe the differences between the various embodiments. As long as the different optimization features between the various embodiments are not contradictory, they can be combined to form a better embodiment. For the sake of brevity, they will not be elaborated here.

[0076] While specific embodiments of the invention have been described in detail by way of examples, those skilled in the art should understand that the examples are for illustrative purposes only and not intended to limit the scope of the invention. Those skilled in the art should understand that modifications can be made to the above embodiments without departing from the scope and spirit of the invention. The scope of the invention is defined by the appended claims.

Claims

1. A sensor protection mechanism, characterized in that, include: A substrate, wherein the substrate is provided with a first through hole and an abutment portion; The valve body includes a fixed part and a movable part opposite to the first through hole. The fixed part is connected to the base plate. One end of the movable part is a connecting part connected to the fixed part, and the other end is a free end. The movable part is movable between an open position and a closed position. In the open position, the free end is able to separate from the abutting part to open the first through hole. In the closed position, the free end is able to abut against the abutting part to cover the first through hole.

2. The sensor protection mechanism according to claim 1, characterized in that, The substrate includes a board body and a gasket. The board body has a first through hole, and the gasket has a second through hole. The second through hole communicates with the first through hole. The gasket is located between the board body and the movable part. One end of the gasket facing the movable part can abut against the movable part. The abutting part is provided on the board body and / or the gasket.

3. The sensor protection mechanism according to claim 1, characterized in that, The abutting part divides the first through hole into multiple through holes, and the movable part is provided in multiple ways, with each movable part corresponding to one of the through holes.

4. The sensor protection mechanism according to claim 3, characterized in that, The ends of the multiple movable parts away from the fixed part can surround and form a third through hole.

5. The sensor protection mechanism according to claim 3, characterized in that, The movable part is connected to the inner edge of the fixed part, and the fixed part is located on the outer periphery of the first through hole; Alternatively, the movable part is connected to the outer periphery of the fixed part, and the fixed part is located inside the first through hole.

6. The sensor protection mechanism according to claim 2, characterized in that, The gasket is also provided with a fourth through hole, through which the fixing part can pass and be connected to the substrate, and the movable part is connected to the outer periphery of the fixing part.

7. The sensor protection mechanism according to claim 6, characterized in that, The first through hole is provided in multiple ways, and the multiple first through holes are arranged circumferentially around the fourth through hole.

8. The sensor protection mechanism according to claim 1, characterized in that, The movable part is elastically connected to the fixed part.

9. The sensor protection mechanism according to claim 1, characterized in that, The movable part and the fixed part are integrally formed.

10. A MEMS sensor, characterized in that, Includes the sensor protection mechanism as described in any one of claims 1 to 9.

11. An electronic device, characterized in that, Including the MEMS sensor as described in claim 10.

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