Low temperature plasma reaction apparatus

Abstract

The application discloses a low-temperature plasma reaction device, and relates to the technical field of low-temperature plasma equipment, and comprises a reaction main body, a light guide structure and an energy management module device; the reaction main body is used for ionizing reaction of a working gas; one end of the light guide structure is connected with an ionization light-emitting area of the reaction main body, and the other end of the light guide structure extends to the outside of the reaction main body and is connected with a first photoelectric converter; and the first photoelectric converter is connected with the energy management module device; in the application, light generated by the ionization light-emitting area of the reaction main body can be guided to the first photoelectric converter through the light guide structure, the light can be captured and converted into electric energy, energy waste is reduced, and energy utilization is improved.

Description

Technical Field

[0001] This invention relates to the field of low-temperature plasma equipment technology, and in particular to a low-temperature plasma reaction device. Background Technology

[0002] Low-temperature plasma technology, with its advantages of high reactivity, low processing temperature, and minimal damage to substrates, is widely used in materials science, environmental engineering, microelectronics manufacturing, and biomedicine. Low-temperature plasma is mainly generated through gas discharge methods such as glow discharge, dielectric barrier discharge, radio frequency discharge, and microwave discharge. Its principle is that under specific gas pressure and electric field, the working gas is partially ionized, forming a system of active particles containing electrons, ions, excited-state molecules, and free radicals.

[0003] In traditional cryogenic plasma generators, most of the electrical energy output from the high-voltage power supply is converted into the kinetic energy of electrons within the plasma and the system's thermal energy. A significant amount of energy is lost to the external environment through thermal radiation, convection, conduction, and ineffective electromagnetic radiation, resulting in low overall energy utilization. Under high-power, continuous operation, energy loss not only significantly increases operating costs but also easily causes localized overheating, reducing operational stability and lifespan.

[0004] Currently, there are some energy recovery solutions in the industry, mainly using heat exchangers to recover waste heat from exhaust gas and using electromagnetic induction to recover leaked electromagnetic energy. However, they generally overlook a problem: when a low-temperature plasma generator is working, it will generate light energy, which will eventually dissipate and cannot be effectively utilized.

[0005] Therefore, there is an urgent need for a low-temperature plasma reaction device that can recover light energy. Summary of the Invention

[0006] The purpose of this invention is to provide a low-temperature plasma reaction device to solve the problems existing in the prior art, and to realize the recovery and reuse of light energy in the reaction body by using a light guide structure, thereby improving energy utilization efficiency.

[0007] To achieve the above objectives, the present invention provides the following solution: The present invention provides a low-temperature plasma reaction device, comprising: The reaction body is used to ionize the working gas. A light guide structure, one end of which is connected to the ionization light-emitting region of the reaction body, and the other end extends to the outside of the reaction body and is connected to the first photoelectric converter; And an energy management module device, wherein the first photoelectric converter is connected to the energy management module device.

[0008] In one embodiment, the optical guiding structure is an optical fiber bundle or an optical waveguide plate.

[0009] In one embodiment, the reaction body includes a high-voltage electrode, an insulating dielectric layer, and a grounding electrode. The insulating dielectric layer is cylindrical, the high-voltage electrode is located inside the insulating dielectric layer, and the grounding electrode is located outside the insulating dielectric layer. An ionization chamber is formed between the insulating dielectric layer and the high-voltage electrode, and the air inlet of the ionization chamber is connected to a gas supply system.

[0010] In one embodiment, the insulating dielectric layer is a transparent or translucent material layer.

[0011] In one embodiment, the grounding electrode has a hollow design, and a second photoelectric converter is disposed on the side of the grounding electrode away from the insulating dielectric layer. The second photoelectric converter is connected to the energy management module device.

[0012] In one embodiment, the first photoelectric converter and the second photoelectric converter are photovoltaic cells, photodiode arrays, or photosensitive semiconductor devices.

[0013] In one embodiment, the reaction body is fitted with a shell, and the inner wall of the shell is provided with the second photoelectric converter.

[0014] In one embodiment, the housing is connected to the cooling end of the refrigeration system.

[0015] In one embodiment, the inner wall surfaces of the outer shell corresponding to the air inlet and air outlet of the reaction body are provided with reflectors, and the reflectors reflect part of the light toward the second photoelectric converter.

[0016] In one embodiment, both the air inlet and outlet of the reaction body extend to the outside of the outer casing.

[0017] The present invention achieves the following main technical effects compared to the prior art: The light-guiding structure can guide the light generated by the ionization luminescence region of the reactant to the first photoelectric converter, thereby capturing the light and converting it into electrical energy, reducing energy waste and improving energy utilization.

[0018] Other solutions of the present invention achieve the following technical effects compared with the prior art: By setting a transparent or semi-transparent insulating dielectric layer, combined with a hollowed-out grounding electrode, internal light can penetrate the insulating dielectric layer and be captured by the second photoelectric converter, ensuring the normal operation of the reaction while improving the light capture rate and energy utilization rate. Attached Figure Description

[0019] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the drawings used in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0020] Figure 1 This is a schematic diagram of the low-temperature plasma reaction device in an embodiment of the present invention; The components include: 1. Reactor body; 2. Photoconductor structure; 3. First photoelectric converter; 4. Energy management module; 5. Second photoelectric converter; 6. Outer shell; 7. Reflector; and 8. High-voltage connector. Detailed Implementation

[0021] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0022] The purpose of this invention is to provide a low-temperature plasma reaction device to solve the problems existing in the prior art, and to realize the recovery and reuse of light energy in the reaction body by using a light guide structure, thereby improving energy utilization efficiency.

[0023] To make the above-mentioned objects, features and advantages of the present invention more apparent and understandable, the present invention will be further described in detail below with reference to the accompanying drawings and specific embodiments.

[0024] Please refer to the following: Figure 1As shown, a low-temperature plasma reaction device is provided, including: a reaction body 1, a light guide structure 2, and an energy management module 4. The reaction body 1 is used to ionize the gas supplied to it under normal or low pressure to stably generate low-temperature plasma. The generated plasma contains high-energy electrons, ions, excited-state particles, and active free radicals, providing a reaction basis for various subsequent chemical reactions and material processing. Light radiation is generated simultaneously during the ionization reaction. One end of the light guide structure 2 is connected to the ionization light-emitting area of ​​the reaction body 1, and the other end extends to the outside of the reaction body 1 and is connected to the first photoelectric converter 3. The light generated by the ionization light-emitting area of ​​the reaction body 1 is guided to the first photoelectric converter 3 to capture the light and convert it into electrical energy, reducing energy waste and improving energy utilization. The first photoelectric converter 3 is connected to the energy management module 4 and is used to rectify, stabilize, and store the converted electrical energy. It can also feed the converted DC power into the power supply system of the reaction body 1 (the converted DC power is combined with the external mains power on the low-voltage side) or an external load to achieve secondary utilization of energy.

[0025] The light guide structure 2 can be an optical fiber bundle or an optical waveguide plate. The specific docking position can be the gas outlet of the reaction body 1. The light guide structure 2 obtains light from the gas outlet and guides the light to the first photoelectric converter 3 located on the side of the reaction body 1 (in the area where the gas outlet is not blocked).

[0026] The reaction body 1 includes a high-voltage electrode, an insulating dielectric layer, and a grounding electrode. The insulating dielectric layer is cylindrical, and the high-voltage electrode is located inside the insulating dielectric layer. The high-voltage electrode is powered through a high-voltage connector 8 located outside the insulating dielectric layer. The grounding electrode is located outside the insulating dielectric layer, specifically in a ring shape wrapped around the outside of the insulating dielectric layer. An ionization chamber is formed between the insulating dielectric layer and the high-voltage electrode. The air inlet of the ionization chamber is connected to the air supply system. The whole reaction body 1 forms a dielectric barrier discharge (DBD) structure.

[0027] In one embodiment, the insulating dielectric layer is a transparent or translucent material layer, which can be made of fused silica, borosilicate glass, etc., and can be selected as needed.

[0028] With the insulating dielectric layer being a transparent or semi-transparent material layer, the grounding electrode is designed in a hollow shape (it can be a mesh or a hollow structure formed by uniform or non-uniform through holes). A second photoelectric converter 5 is set on the side of the grounding electrode away from the insulating dielectric layer. The second photoelectric converter 5 is connected to the energy management module 4, so that the internal light can penetrate the insulating dielectric layer and be captured by the second photoelectric converter 5, ensuring the normal operation of the reaction while improving the light capture rate and energy utilization rate.

[0029] Since the insulating dielectric layer is cylindrical in shape, the second photoelectric converter 5 can be evenly distributed on the outer periphery of the insulating dielectric layer, thereby increasing the arrangement area of ​​the second photoelectric converter 5 and improving the light capture rate.

[0030] The first photoelectric converter 3 and the second photoelectric converter 5 are photovoltaic cells, photodiode arrays, or photosensitive semiconductor devices. The spectral response range of the first photoelectric converter 3 and the second photoelectric converter 5 completely covers the mainstream emission band of plasma, thereby ensuring photoelectric conversion efficiency.

[0031] In one embodiment, the reaction body 1 is fitted with a shell 6, and a second photoelectric converter 5 is provided on the inner wall of the shell 6. The shell 6 provides a mounting base for the second photoelectric converter 5.

[0032] In one embodiment, in order to control the temperature, the outer shell 6 is connected to the cooling end of the refrigeration system. The outer shell 6 needs to be made of a thermally conductive material. For example, the outer shell 6 adopts a jacketed design, with the jacket serving as the cooling end of the refrigeration system. That is, the cold water of the refrigeration system is circulated and supplied to the jacket to achieve temperature control. Alternatively, a cold water pipe can be coiled around the outer wall of the outer shell 6, and the cold water of the refrigeration system is circulated and supplied to the cold water pipe to achieve temperature control.

[0033] In one embodiment, the inner wall surfaces of the outer shell 6 corresponding to the air inlet and air outlet of the reaction body 1 are provided with reflectors 7. The reflectors 7 are designed to be annular according to the shape of the insulating dielectric layer. The reflectors 7 reflect part of the light to the second photoelectric converter 5. More light can be reflected to the second photoelectric converter 5 through the reflectors 7 to improve the light capture rate.

[0034] The gas inlet and outlet of the reaction body 1 extend to the outside of the outer shell 6 in order to connect to the gas supply system and subsequent plasma gas utilization equipment.

[0035] In actual use, the light radiation generated by the reaction body 1 during normal operation is partly guided by the light guide structure 2 to the first photoelectric converter 3 for photoelectric conversion at the gas outlet, and the other part penetrates the insulating dielectric layer and is directed to the second photoelectric converter 5 for photoelectric conversion. The converted electrical energy is then transmitted to the energy management module 4.

[0036] Any adaptive changes made according to actual needs are within the scope of protection of this invention.

[0037] It should be noted that, for those skilled in the art, it is obvious that the present invention is not limited to the details of the exemplary embodiments described above, and that the invention can be implemented in other specific forms without departing from the spirit or essential characteristics of the invention. Therefore, the embodiments should be considered illustrative and non-limiting in all respects, and the scope of the invention is defined by the appended claims rather than the foregoing description. Thus, all variations falling within the meaning and scope of equivalents of the claims are intended to be included within the present invention. No reference numerals in the claims should be construed as limiting the scope of the claims.

[0038] Specific examples have been used to illustrate the principles and implementation methods of this invention. The descriptions of the above embodiments are only for the purpose of helping to understand the method and core ideas of this invention. Furthermore, those skilled in the art will recognize that, based on the ideas of this invention, there will be changes in the specific implementation methods and application scope. Therefore, the content of this specification should not be construed as a limitation of this invention.

Claims

1. A low-temperature plasma reaction device, characterized in that, include: The reaction body is used to ionize the working gas. A light guide structure, one end of which is connected to the ionization light-emitting region of the reaction body, and the other end extends to the outside of the reaction body and is connected to the first photoelectric converter; And an energy management module device, wherein the first photoelectric converter is connected to the energy management module device.

2. The low-temperature plasma reaction apparatus according to claim 1, characterized in that, The optical guiding structure is an optical fiber bundle or an optical waveguide plate.

3. The low-temperature plasma reaction apparatus according to claim 1, characterized in that, The reaction body includes a high-voltage electrode, an insulating dielectric layer, and a grounding electrode. The insulating dielectric layer is cylindrical. The high-voltage electrode is located inside the insulating dielectric layer, and the grounding electrode is located outside the insulating dielectric layer. An ionization chamber is formed between the insulating dielectric layer and the high-voltage electrode. The air inlet of the ionization chamber is connected to the air supply system.

4. The low-temperature plasma reaction apparatus according to claim 3, characterized in that, The insulating dielectric layer is a transparent or semi-transparent material layer.

5. The low-temperature plasma reaction apparatus according to claim 4, characterized in that, The grounding electrode has a hollow design, and a second photoelectric converter is provided on the side of the grounding electrode away from the insulating dielectric layer. The second photoelectric converter is connected to the energy management module device.

6. The low-temperature plasma reaction apparatus according to claim 5, characterized in that, The first photoelectric converter and the second photoelectric converter are photovoltaic cells, photodiode arrays or photosensitive semiconductor devices.

7. The low-temperature plasma reaction apparatus according to claim 5, characterized in that, The reaction body is fitted with a shell, and the inner wall of the shell is provided with the second photoelectric converter.

8. The low-temperature plasma reaction apparatus according to claim 7, characterized in that, The outer casing is connected to the cooling end of the refrigeration system.

9. The low-temperature plasma reaction apparatus according to claim 7, characterized in that, The inner wall surfaces of the outer shell corresponding to the air inlet and outlet of the reaction body are each provided with a reflector, which reflects part of the light toward the second photoelectric converter.

10. The low-temperature plasma reaction apparatus according to claim 7, characterized in that, The air inlet and outlet of the reaction body both extend to the outside of the outer shell.

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