A refrigeration detector photoetching liquid circulation and workpiece positioning integrated structure

Abstract

The application discloses a kind of refrigeration detector photoetching liquid circulation and workpiece positioning integrated structure, it is related to detector production technical field.The present application includes work platform and circulating feed hopper, the inside wall of circulating feed hopper is connected with placement platform, the inside of placement platform is provided with first clamping assembly and second clamping assembly;The bottom of circulating feed hopper is communicated with liquid inlet pipe, the bottom of liquid inlet pipe is communicated with liquid collecting tank, and filter assembly is installed in the inside of liquid collecting tank;Liquid outlet pipe is arranged in the lower part of liquid collecting tank, and circulating water pump is installed in the port of liquid outlet pipe, the output of circulating water pump is communicated with the upper part of circulating feed hopper, and etching liquid circulation loop is formed;Silicon wafer can be placed in the placement groove on the top surface of bearing plate and taken and placed with the whole board, it is simple and convenient to operate, first clamping assembly and second clamping assembly realize wafer accurate fixation, without needing to repeat alignment every time feeding and discharging, coarse filtration is completed through spiral filter plate in liquid inlet pipe, and most of recoverable metal particles are intercepted.

Description

Technical Field

[0001] This invention relates to the field of detector manufacturing technology, specifically to an integrated structure for cooling detector photolithography etching solution circulation and workpiece positioning. Background Technology

[0002] The manufacturing of semiconductor chips for cooled detectors relies on two core micro-nano fabrication processes: photolithography and etching. Photolithography involves exposing and developing photoresist to transfer precisely designed patterns such as bridge layers and thermistor layers onto the wafer surface. Etching selectively removes sacrificial layers and areas not protected by photoresist, forming three-dimensional microstructures such as support layers and electrodes. Both processes require photolithography etching solutions, which are typically composed of acidic or alkaline etchants, functional additives, and solvents, allowing for the directional etching of silicon, metals, or dielectric materials.

[0003] In current semiconductor chip manufacturing processes, photolithography etching solutions are generally discharged in a single pass, resulting in high overall consumption. Furthermore, the waste solution is enriched with a large amount of recyclable metal particles generated during photolithography, leading to a double waste of chemical raw materials and metal resources, increasing manufacturing costs, and raising the burden on hazardous waste treatment. Both economic and environmental benefits need improvement. Simultaneously, each loading and unloading of silicon wafers requires individual handling, and re-alignment calibration is necessary after each batch. This repetitive positioning operation is cumbersome, inefficient, and prone to introducing particle contamination and positioning errors, thus limiting processing yield and process efficiency. Summary of the Invention

[0004] The purpose of this invention is to provide an integrated structure for cooling detector photolithography etching solution circulation and workpiece positioning, so as to solve the above-mentioned shortcomings in the prior art.

[0005] To achieve the above objectives, the present invention provides the following technical solution: an integrated structure for circulating photolithography etching solution and positioning workpiece in a cooled detector, comprising a working platform, a circulating feed hopper fixedly connected to the top surface of the working platform, a placement platform fixedly connected to the inner side wall of the circulating feed hopper, and a first clamping assembly and a second clamping assembly for workpiece positioning and clamping respectively disposed inside the placement platform; an inlet pipe fixedly connected to the bottom of the circulating feed hopper, a collection tank fixedly connected to the bottom of the inlet pipe, and a filter assembly detachably installed inside the collection tank; an outlet pipe disposed on the lower side wall of the collection tank, a circulating water pump installed at the port of the outlet pipe, and the output end of the circulating water pump connected to the upper part of the circulating feed hopper through a return pipe to form an etching solution circulation loop.

[0006] Preferably, the circulating feed hopper has an overall conical structure that is wider at the top and narrower at the bottom. The two opposite inner sidewalls of the circulating feed hopper are provided with connecting parts, and the circulating feed hopper is fixedly connected to the sidewall of the placement platform through the connecting parts. The placement platform includes a placement frame, a placement plate is fixedly connected inside the placement frame, a placement rack is fixedly connected to the top surface of the placement plate, and a support plate for supporting silicon wafer workpieces is movably abutted against the top surface of the placement rack. Guide rods are fixedly connected to both sides of the bottom surface inside the placement frame.

[0007] Preferably, the top surface of the placement plate has sliding holes on both sides for the first clamping assembly to pass through, and the top surface of the placement plate has a cross-shaped sliding groove. A sliding rod is fixedly connected to the inner wall of one of the grooves. Rotary caps for supporting the second clamping assembly are fixedly connected to both sides of the bottom surface of the placement plate. The top surface of the support plate has a placement groove for placing silicon wafer workpieces, and the bottom surface of the support plate is fixedly connected to a limiting strip that cooperates with the two sets of clamping assemblies for positioning.

[0008] Preferably, the first clamping assembly includes a connecting plate, with connecting rods fixedly connected to the top surfaces of both ends of the connecting plate, connecting handles rotatably connected to the top ends of the connecting rods on both sides, and clamping plates rotatably connected to the other ends of the connecting handles on both sides; the bottom surface of the connecting plate is fixedly connected to the top end of the push rod, and the bottom end of the push rod is drively connected to the driving end of the push cylinder, which is fixedly installed on the bottom surface inside the placement frame; guide holes are respectively opened on both sides of the connecting plate, the guide holes are slidably connected to the outer side wall of the guide rod on the corresponding side, and the outer side wall of the connecting rod is slidably connected to the inner side wall of the sliding hole on the corresponding side.

[0009] Preferably, a rotating support is fixedly connected to the top of each of the connecting rods on both sides, and a rotating support is fixedly connected to the outer side wall of each of the clamping plates on both sides; a connecting rod is provided at both ends of the connecting handle, and the connecting handle is rotatably connected to the inner side wall of the corresponding rotating support on both sides through the connecting rods at both ends; a sliding cap is fixedly connected to the bottom surface of each of the clamping plates on both sides, and the inner side wall of the sliding cap is slidably connected to the outer side wall of the sliding rod and confined within the cross-shaped sliding groove; a clamping pad is fixedly provided on the upper part of the opposite side wall of each of the clamping plates on both sides.

[0010] Preferably, the second clamping assembly includes a bidirectional lead screw and two clamping plates. One end of the bidirectional lead screw is connected to the output end of a servo motor fixedly installed on the bottom surface of the placement plate. Threaded caps are fixedly connected to the bottom surfaces of both clamping plates. The two clamping plates are threadedly connected to the outer walls of the bidirectional lead screw via the threaded caps at their bottoms. The outer walls at both ends of the bidirectional lead screw are rotatably connected to the inner walls of rotating caps on both sides of the bottom surface of the placement plate. The two clamping plates are slidably connected to the inner wall of another channel of the cross-shaped slide groove via the outer walls of the threaded caps at their bottoms.

[0011] Preferably, the inlet pipe includes a pipe body, the inner side wall of which is spirally fixedly connected with a filter plate for trapping metal particles; the side wall of the pipe body is provided with an outlet for cleaning the trapped particles, a sealing door is rotatably connected to one side wall of the outlet, a locking assembly for locking the sealing door is fixedly connected to the bottom surface of the outlet, and a locking hole that cooperates with the locking assembly is provided on the bottom surface of the free end of the sealing door.

[0012] Preferably, the locking assembly includes a fixing frame, a fixing plate is provided below the fixing frame, a pull handle is fixedly connected to the bottom surface of the fixing plate, a locking rod is fixedly connected to the top surface of the fixing plate, and a locking spring is sleeved on the outer side of the locking rod; a connecting hole is opened on the bottom surface of the fixing frame, a limiting piece is fixedly connected to the outer side wall of the locking rod, the upper part of the locking rod passes through the connecting hole and is slidably connected to the inner side wall of the connecting hole, the limiting piece abuts against the bottom surface of the fixing frame, and the outer side wall of the top end of the locking rod is movably engaged with the inner side wall of the locking hole on the bottom surface of the sealed door.

[0013] Preferably, the filter assembly includes a filter frame, with connecting frames fixedly connected to both sides of the filter frame, and snap-fit ​​blocks slidably connected to both ends of the connecting frames. A card box is fixedly connected to the inner wall of the liquid collection tank at the position corresponding to the snap-fit ​​block, and the outer wall of the snap-fit ​​block is movably snapped into the inner wall of the corresponding card box.

[0014] Preferably, the connecting frame has sliding grooves at both ends, and the top surface of the sliding grooves on both sides has a moving groove. The side wall of the snap-fit ​​block is fixedly connected to a sliding plate, and a snap-fit ​​spring is provided between one side wall of the sliding plate and the inner side wall of the sliding groove. The snap-fit ​​block is slidably installed in the sliding groove through the sliding plate on the side wall.

[0015] In the above technical solution, the present invention provides an integrated structure for circulating photolithography etching solution and positioning workpiece in a cooled detector, which has the following beneficial effects: 1. The silicon wafer can be placed in the placement slot on the top surface of the carrier plate and picked up and put in as a whole, which is simple to operate; after the carrier plate is aligned and placed in the placement frame by the bottom limiting strip, the first clamping component and the second clamping component can clamp the limiting strip from two vertical directions to achieve precise fixing of the wafer, without the need for repeated alignment each time it is loaded and unloaded, which effectively improves the processing efficiency and reduces particulate contamination caused by direct manual contact.

[0016] 2. After use, the etching solution is collected in the circulating feed hopper and flows sequentially through the inlet pipe and the collection tank: coarse filtration is completed through the spiral filter plate in the inlet pipe, which intercepts most of the recyclable metal particles. The intercepted particles can be easily cleaned and recycled by opening the sealed door of the outlet; then fine filtration and purification are carried out through the filter components in the collection tank. The purified etching solution is pumped back to the processing station by the circulating water pump for recycling, which greatly reduces the consumption of etching solution and the amount of hazardous waste to be treated, and has both economic and environmental benefits.

[0017] 3. The overall closed-loop circulation path reduces the evaporation and leakage of etching solution; the two-stage filtration structure effectively removes solid impurities in the etching solution, preventing the circulating liquid from carrying contaminants that could damage the wafer surface, thus ensuring processing yield and process cleanliness. Attached Figure Description

[0018] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments recorded in this invention. For those skilled in the art, other drawings can be obtained based on these drawings.

[0019] Figure 1 This is a schematic diagram of the overall structure provided for an embodiment of the present invention;

[0020] Figure 2 This is a schematic diagram of the overall cross-section provided in an embodiment of the present invention;

[0021] Figure 3 This is a schematic diagram of the internal structure of the placement platform provided in an embodiment of the present invention;

[0022] Figure 4 This is a cross-sectional structural diagram of the placement platform provided in an embodiment of the present invention;

[0023] Figure 5 This is a schematic diagram of the structure of the support plate provided in an embodiment of the present invention;

[0024] Figure 6 This is a top view of the support plate provided in an embodiment of the present invention;

[0025] Figure 7 This is a schematic diagram of the structure of the first clamping assembly provided in an embodiment of the present invention;

[0026] Figure 8 This is a schematic diagram of the structure of the second clamping assembly provided in an embodiment of the present invention;

[0027] Figure 9 This is a schematic diagram of the structure of the inlet pipe provided in an embodiment of the present invention;

[0028] Figure 10This is a schematic diagram of the structure of a sealing door provided in an embodiment of the present invention;

[0029] Figure 11 This is a schematic diagram of the locking assembly provided in an embodiment of the present invention;

[0030] Figure 12 This is a schematic diagram of the structure of the liquid collection tank provided in an embodiment of the present invention;

[0031] Figure 13 This is a schematic diagram of the structure of the filtering component provided in an embodiment of the present invention;

[0032] Figure 14 Provided for embodiments of the present invention Figure 13 An enlarged schematic diagram of the structure at point A in the middle.

[0033] Explanation of reference numerals in the attached figures:

[0034] 1. Working platform; 2. Circulating feed hopper; 3. Placement platform; 31. Placement frame; 32. Placement plate; 321. Sliding hole; 322. Sliding groove; 323. Sliding rod; 324. Rotating cap; 33. Placement frame; 34. Bearing plate; 341. Placement slot; 342. Limiting strip; 35. Guide rod; 4. First clamping assembly; 41. Connecting plate; 411. Push rod; 412. Push cylinder; 413. Guide hole; 42. Connecting rod; 421. Rotating support one; 43. Connecting handle; 431. Connecting rotating rod; 44. Clamping plate one; 441. Rotating support two; 442. Sliding cap; 443. Clamping pad; 5. Second clamping assembly; 51. Bidirectional lead screw 511. Servo motor; 52. Clamping plate two; 521. Threaded cap; 6. Inlet pipe; 61. Pipe body; 611. Outlet; 62. Filter plate; 63. Sealing door; 631. Locking hole; 64. Locking assembly; 641. Fixing frame; 6411. Connecting hole; 642. Fixing plate; 6421. Pull handle; 643. Locking rod; 6431. Limiting piece; 644. Locking spring; 7. Liquid collection tank; 71. Outlet pipe; 72. Circulating water pump; 8. Filter assembly; 81. Filter frame; 82. Connecting frame; 821. Sliding groove; 822. Moving groove; 83. Snap-fit ​​block; 831. Sliding plate; 832. Snap-fit ​​spring; 84. Card box. Detailed Implementation

[0035] To enable those skilled in the art to better understand the technical solution of the present invention, the present invention will be further described in detail below with reference to the accompanying drawings.

[0036] Please see Figure 1-14A cooling detector photolithography etching solution circulation and workpiece positioning integrated structure includes a working platform 1, a circulating feed hopper 2 fixedly connected to the inner side of the top surface of the working platform 1, a placement platform 3 fixedly connected to the inner side wall of the circulating feed hopper 2, and a first clamping component 4 and a second clamping component 5 respectively provided inside the placement platform 3.

[0037] The bottom surface of the circulating feed hopper 2 is fixedly connected to the top surface of the liquid inlet pipe 6, and the bottom surface of the liquid inlet pipe 6 is fixedly connected to the top surface of the liquid collection tank 7. The liquid collection tank 7 is equipped with a filter assembly 8.

[0038] like Figure 1 and Figure 2 As shown, the circulating feed hopper 2 is generally cone-shaped with a larger opening at the top and a smaller opening at the bottom. The two inner side walls of the circulating feed hopper 2 are provided with connecting parts, and the circulating feed hopper 2 is fixedly connected to the side wall of the placement platform 3 through the connecting parts of the inner side walls.

[0039] like Figures 1-6 As shown, the placement platform 3 includes a placement frame 31, a placement plate 32 is fixedly connected inside the placement frame 31, a placement rack 33 is fixedly connected to the top surface of the placement plate 32, the top surface of the placement rack 33 is movably abutting against the bottom surface of the support plate 34, and guide rods 35 are fixedly connected to both sides of the bottom surface inside the placement frame 31.

[0040] Specifically, sliding holes 321 are provided on both sides of the top surface of the placement plate 32, and a cross-shaped sliding groove 322 is provided on the top surface of the placement plate 32. A sliding rod 323 is fixedly connected to the inner side wall of the sliding groove 322, and a rotating cap 324 is fixedly connected to both sides of the bottom surface of the placement plate 32.

[0041] The top surface of the support plate 34 is provided with a placement groove 341, and the bottom surface of the support plate 34 is fixedly connected with a limit strip 342.

[0042] More specifically, the first clamping assembly 4 includes a connecting plate 41, with connecting rods 42 fixedly connected to the top surfaces of both ends of the connecting plate 41, connecting handles 43 rotatably connected to the inner sidewalls of the connecting rods 42 on both sides, and clamping plates 44 rotatably connected to the outer sidewalls of the connecting handles 43 on both sides.

[0043] The bottom surface of the connecting plate 41 is fixedly connected to the top end of the push rod 411, the bottom end of the push rod 411 is installed and connected to the driving end of the push cylinder 412, the push cylinder 412 is fixedly installed on the bottom surface inside the placement frame 31, and guide holes 413 are respectively opened on the top surfaces of both sides of the connecting plate 41.

[0044] The inner sides of the guide holes 413 on both sides of the connecting plate 41 are slidably connected to the outer side walls of the guide rods 35 on both sides, and the outer side walls of the connecting rods 42 on both sides are slidably connected to the inner side walls of the sliding holes 321 on both sides of the top surface of the placement plate 32.

[0045] Rotary support 421 is fixedly connected to the top of the connecting rods 42 on both sides, and rotating support 441 is fixedly connected to the outer side wall of the clamping plate 44 on both sides.

[0046] The side walls at both ends of the connecting handle 43 are respectively provided with connecting rods 431. The connecting handle 43 on each side is rotatably connected to the inner side wall of the corresponding rotating support 421 and rotating support 441 through the outer side of the connecting rods 431 at both ends.

[0047] The bottom surfaces of the clamping plates 44 on both sides are fixedly connected with sliding caps 442. The inner sidewalls of the sliding caps 442 on both sides are slidably connected to the outer sidewalls of the slide rod 323 and are located inside the slide groove 322. The sidewalls of the top edges of the clamping plates 44 on both sides are respectively provided with clamping pads 443.

[0048] In this embodiment, as Figure 2 , Figure 3 , Figure 4 and Figure 8 As shown, the second clamping assembly 5 includes a bidirectional lead screw 51, and a clamping plate 52 is provided on the outer side wall of the bidirectional lead screw 51.

[0049] One end of the bidirectional lead screw 51 is connected to the output end of the servo motor 511, which is fixedly mounted on the bottom surface of the placement plate 32;

[0050] There are two clamping plates 52. The bottom surfaces of the two clamping plates 52 are fixedly connected with threaded caps 521. The clamping plates 52 on both sides are threadedly connected to the outer side walls of the double-acting screw 51 through the inner side walls of the threaded caps 521 at the bottom. The double-acting screw 51 is rotatably connected to the inner side walls of the rotating caps 324 on both sides of the bottom surface of the placement plate 32 through the outer side walls of the threaded caps 521 at the bottom. The clamping plates 52 on both sides are slidably connected to the inner side walls of the slide groove 322 through the outer side walls of the threaded caps 521 at the bottom.

[0051] In this embodiment, as Figure 1 , Figure 2 , Figure 9 , Figure 10 and Figure 11 As shown, the liquid inlet pipe 6 includes a pipe body 61, and a filter plate 62 is fixedly connected to the inner wall of the pipe body 61 in a spiral shape.

[0052] The side wall of the tube body 61 is provided with a discharge port 611, and a sealing door 63 is rotatably connected to the side wall of the discharge port 611. A locking component 64 is fixedly connected to the bottom surface of the discharge port 611.

[0053] A locking hole 631 is provided on the bottom surface of the end of the sealing door 63;

[0054] The locking assembly 64 also includes a fixing frame 641, a fixing plate 642 is provided on the bottom surface of the fixing frame 641, a pull handle 6421 is fixedly connected to the bottom surface of the fixing plate 642, a locking rod 643 is fixedly connected to the top surface of the fixing plate 642, and a locking spring 644 is sleeved on the outer side of the locking rod 643.

[0055] The bottom surface of the fixing frame 641 has a connecting hole 6411. The outer side wall of the locking rod 643 is fixedly connected to the limiting piece 6431. The inner side wall of the connecting hole 6411 on the bottom surface of the fixing frame 641 is slidably connected to the outer side wall of the locking rod 643. The limiting piece 6431 is located on the bottom surface of the fixing frame 641. The outer side wall of the top of the locking rod 643 is movably engaged with the inner side wall of the locking hole 631 on the bottom surface of the sealing door 63.

[0056] In this embodiment, as Figure 1 , Figure 2 , Figure 9 and Figure 12 As shown, a liquid outlet pipe 71 is provided on one side wall of the liquid collection tank 7 near the bottom. The port of the liquid outlet pipe 71 is connected to the inlet section of the circulating water pump 72. The top surface of the liquid collection tank 7 is connected to the bottom surface of the liquid inlet pipe 6.

[0057] In this embodiment, as Figure 2 , Figure 12 , Figure 13 and Figure 14 As shown, the filter assembly 8 includes a filter frame 81, with connecting frames 82 fixedly connected to both sides of the filter frame 81, and snap-fit ​​blocks 83 slidably connected to both ends of the connecting frames 82, with the outer side wall of the snap-fit ​​block 83 movably snap-fitted to the inner side wall of the card box 84.

[0058] The two ends of the connecting frame 82 are respectively provided with sliding grooves 821, and the top surface of the sliding grooves 821 on both sides is provided with moving grooves 822. The side wall of the snap-fit ​​block 83 is fixedly connected with a sliding plate 831, and a snap-fit ​​spring 832 is provided on one side wall of the sliding plate 831. The snap-fit ​​block 83 is slidably disposed in the sliding groove 821 through the outer side wall of the sliding plate 831 on the side wall. The card boxes 84 on both sides of the filter assembly 8 are fixedly connected to the inner side wall of the liquid collection tank 7.

[0059] Working principle: First, the silicon wafer is placed in the placement groove 341 on the top surface of the support plate 34. Then, the support plate 34 is secured and placed on the top surface of the placement rack 33 by the bottom limiting strip 342. At this time, the pushing cylinder 412 is activated. The pushing cylinder 412 drives the connecting plate 41 to move downward through the push rod 411. The connecting rods 42 at both ends of the connecting plate 41 slide downward in the sliding hole 321. During the downward movement, the connecting rods 42 on both sides push the clamping plates 44 on both sides through the connecting handle 43 to move towards each other along the sliding rod 323 through the bottom sliding cap 442. The clamping pad 443 on the side wall of the first holding plate 44 clamps and limits the limiting strips 342 on both sides of the bottom surface of the support plate 34. Then, the servo motor 511 drives the bidirectional lead screw 51 to rotate. The bidirectional lead screw 51 is threadedly connected to the threaded cap 521 at the bottom of the second clamping plate 52, thereby synchronously driving the second clamping plates 52 on both sides to slide towards each other in the slide groove 322. The second clamping plates 52 on both sides clamp and limit the limiting strips 342 on the other two sides of the bottom surface of the support plate 34, thereby clamping and limiting the support plate 34 and the silicon wafer on its top surface.

[0060] During the photolithography process, the photolithography solution of the silicon wafer workpiece falls into the circulating feed hopper 2 below, and is then fed into the liquid inlet pipe 6 on the bottom surface through the circulating feed hopper 2. The filter plate 62 inside the liquid inlet pipe 6 filters and recovers the recyclable metal particles in the photolithography solution. The sealing door 63 of the discharge port 611 on the side wall of the liquid inlet pipe 6 is opened by rotating, which facilitates the recovery and collection of the filtered and trapped metal particles.

[0061] After the etchant passes through the inlet pipe 6 to filter the particles, it enters the collection tank 7. The etchant first falls onto the top surface of the filter frame 81 of the filter assembly 8, and is then filtered again by the filter frame 81 for reuse. The etchant is then collected in the collection tank 7 and connected to the circulating water pump 72 through the outlet pipe 71 on the side wall of the collection tank 7. This facilitates the circulation and pumping of the etchant recovered in the collection tank 7, thereby enabling the etchant to be recycled and reused.

[0062] The foregoing has only described certain exemplary embodiments of the present invention by way of illustration. Undoubtedly, those skilled in the art can modify the described embodiments in various ways without departing from the spirit and scope of the present invention. Therefore, the foregoing drawings and descriptions are illustrative in nature and should not be construed as limiting the scope of protection of the claims of the present invention.

Claims

1. An integrated structure for circulating photolithography etching solution and positioning workpiece in a cooled detector, comprising a working platform (1), characterized in that, The top surface of the working platform (1) is fixedly connected to a circulating feed hopper (2), and the inner side wall of the circulating feed hopper (2) is fixedly connected to a placement platform (3). The placement platform (3) is respectively provided with a first clamping component (4) and a second clamping component (5) for workpiece positioning and clamping. The bottom of the circulating feed hopper (2) is fixedly connected to an inlet pipe (6), and the bottom of the inlet pipe (6) is fixedly connected to a collection tank (7). A filter assembly (8) is detachably installed inside the collection tank (7). An outlet pipe (71) is provided on the lower side wall of the collection tank (7). A circulating water pump (72) is installed at the port of the outlet pipe (71). The output end of the circulating water pump (72) is connected to the upper part of the circulating feed hopper (2) through a return pipe to form an etching solution circulation loop.

2. The integrated structure for cooling detector photolithography etching solution circulation and workpiece positioning according to claim 1, characterized in that, The circulating feed hopper (2) has a cone-shaped structure that is wider at the top and narrower at the bottom. The two opposite inner sidewalls of the circulating feed hopper (2) are provided with connecting parts. The circulating feed hopper (2) is fixedly connected to the sidewall of the placement platform (3) through the connecting parts. The placement platform (3) includes a placement frame (31). A placement plate (32) is fixedly connected inside the placement frame (31). A placement rack (33) is fixedly connected to the top surface of the placement plate (32). A support plate (34) for carrying silicon wafer workpieces is movably abutted against the top surface of the placement rack (33). Guide rods (35) are fixedly connected to both sides of the bottom surface inside the placement frame (31).

3. The integrated structure for cooling detector photolithography etching solution circulation and workpiece positioning according to claim 2, characterized in that, The top surface of the placement plate (32) is provided with sliding holes (321) for the first clamping assembly (4) to pass through. The top surface of the placement plate (32) is provided with a cross-shaped sliding groove (322). A sliding rod (323) is fixedly connected to the inner wall of one of the grooves of the cross-shaped sliding groove (322). Rotary caps (324) for supporting the second clamping assembly (5) are fixedly connected to both sides of the bottom surface of the placement plate (32). The top surface of the support plate (34) is provided with a placement groove (341) for placing silicon wafer workpieces. The bottom surface of the support plate (34) is fixedly connected with a limiting strip (342) that cooperates with the two sets of clamping assemblies for positioning.

4. The integrated structure for cooling detector photolithography etching solution circulation and workpiece positioning according to claim 3, characterized in that, The first clamping assembly (4) includes a connecting plate (41), with connecting rods (42) fixedly connected to the top surfaces of both ends of the connecting plate (41), and connecting handles (43) rotatably connected to the top ends of the connecting rods (42) on both sides, and clamping plates (44) rotatably connected to the other ends of the connecting handles (43) on both sides; the bottom surface of the connecting plate (41) is fixedly connected to the top end of the push rod (411), and the bottom end of the push rod (411) is connected to the driving end of the pushing cylinder (412), and the pushing cylinder (412) is fixedly installed on the bottom surface inside the placement frame (31); guide holes (413) are opened on both sides of the connecting plate (41), and the guide holes (413) are slidably connected to the outer side wall of the guide rod (35) on the corresponding side, and the outer side wall of the connecting rod (42) is slidably connected to the inner side wall of the sliding hole (321) on the corresponding side.

5. The integrated structure for cooling detector photolithography etching solution circulation and workpiece positioning according to claim 4, characterized in that, The top of each of the two connecting rods (42) is fixedly connected to a rotating support (421), and the outer side wall of each of the two clamping plates (44) is fixedly connected to a rotating support (441). Both ends of the connecting handle (43) are provided with connecting rods (431), and the connecting handle (43) is rotatably connected to the inner side wall of the rotating support (421) and the rotating support (441) on the corresponding side through the connecting rods (431) at both ends. The bottom surface of each of the two clamping plates (44) is fixedly connected with a sliding cap (442), and the inner side wall of the sliding cap (442) is slidably connected to the outer side wall of the sliding rod (323) and confined within the cross-shaped sliding groove (322). The upper part of the opposite side wall of each of the two clamping plates (44) is fixedly provided with a clamping pad (443).

6. The integrated structure for cooling detector photolithography etching solution circulation and workpiece positioning according to claim 3, characterized in that, The second clamping assembly (5) includes a bidirectional lead screw (51) and two clamping plates (52). One end of the bidirectional lead screw (51) is connected to the output end of a servo motor (511) fixedly installed on the bottom surface of the placement plate (32). The bottom surfaces of the two clamping plates (52) are fixedly connected with thread caps (521). The clamping plates (52) on both sides are connected to the outer wall of the bidirectional lead screw (51) through the thread caps (521) at the bottom. The outer walls at both ends of the bidirectional lead screw (51) are rotatably connected to the inner walls of the rotating caps (324) on both sides of the bottom surface of the placement plate (32). The clamping plates (52) on both sides are slidably connected to the inner wall of the other channel of the cross-shaped slide groove (322) through the outer wall of the thread caps (521) at the bottom.

7. The integrated structure for cooling detector photolithography etching solution circulation and workpiece positioning according to claim 1, characterized in that, The inlet pipe (6) includes a pipe body (61), and a filter plate (62) for trapping metal particles is fixedly connected to the inner side wall of the pipe body (61) in a spiral shape; the side wall of the pipe body (61) is provided with an outlet (611) for cleaning the trapped particles, and a sealing door (63) is rotatably connected to one side wall of the outlet (611). A locking component (64) for locking the sealing door (63) is fixedly connected to the bottom surface of the outlet (611), and a locking hole (631) that cooperates with the locking component (64) is provided on the bottom surface of the free end of the sealing door (63).

8. The integrated structure for cooling detector photolithography etching solution circulation and workpiece positioning according to claim 7, characterized in that, The locking assembly (64) includes a fixed frame (641), a fixed plate (642) is provided below the fixed frame (641), a pull handle (6421) is fixedly connected to the bottom surface of the fixed plate (642), a locking rod (643) is fixedly connected to the top surface of the fixed plate (642), and a locking spring (644) is sleeved on the outer side of the locking rod (643); a connecting hole (6411) is opened on the bottom surface of the fixed frame (641), a limiting piece (6431) is fixedly connected to the outer side wall of the locking rod (643), the upper part of the locking rod (643) passes through the connecting hole (6411) and slides in connection with the inner side wall of the connecting hole (6411), the limiting piece (6431) abuts against the bottom surface of the fixed frame (641), and the outer side wall of the top end of the locking rod (643) is movably engaged with the inner side wall of the locking hole (631) on the bottom surface of the sealing door (63).

9. The integrated structure for cooling detector photolithography etching solution circulation and workpiece positioning according to claim 1, characterized in that, The filter assembly (8) includes a filter frame (81), with connecting frames (82) fixedly connected to both sides of the filter frame (81), and snap-fit ​​blocks (83) slidably connected to both ends of the connecting frames (82). A card box (84) is fixedly connected to the inner wall of the liquid collection tank (7) at the position corresponding to the snap-fit ​​block (83), and the outer wall of the snap-fit ​​block (83) is movably snapped into the inner wall of the corresponding card box (84).

10. The integrated structure for cooling detector photolithography etching solution circulation and workpiece positioning according to claim 9, characterized in that, The connecting frame (82) has sliding grooves (821) at both ends, and moving grooves (822) are provided on the top surface of the sliding grooves (821) on both sides. A sliding plate (831) is fixedly connected to the side wall of the snap-fit ​​block (83). A snap-fit ​​spring (832) is provided between one side wall of the sliding plate (831) and the inner side wall of the sliding groove (821). The snap-fit ​​block (83) is slidably installed in the sliding groove (821) through the sliding plate (831) on the side wall.

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