A detecting device and a tape and reel flip chip bonder

Abstract

The application provides a detection device and a tape flip chip bonder, and relates to the technical field of chip internal pin bonding qualification detection, and comprises detection lenses, the detection lenses are provided with two; adjusting mechanisms, the adjusting mechanisms are provided with two groups, and the two groups of adjusting mechanisms are respectively connected with the two detection lenses one by one; wherein the adjusting mechanisms comprise Y-axis adjusting assemblies and X-axis adjusting assemblies, so as to adjust the relative positions of the two detection lenses in the Y-axis and the X-axis; through the arrangement, the position interference problem of the detection lenses is solved when the two end bonding positions of the chip are detected at the same time, and then whether the two end bonding positions of the chip are offset or not can be detected, and the detection accuracy is improved.

Description

Technical Field

[0001] This invention relates to the field of chip pin bonding conformity testing technology, and more specifically, to a testing device and a tape-and-reel flip-chip mounter. Background Technology

[0002] Tape and reel flip-chip mounters are core equipment in the semiconductor packaging field. They are mainly used to precisely mount chips onto substrates or packages in a flip-chip manner. After the chips are mounted onto the substrates or packages in a flip-chip manner, it is necessary to use detection equipment to check whether there is any misalignment in the connection between the bumps (bumps on the chip) and the leads (internal pins of the substrate or package).

[0003] The existing testing equipment uses a single testing lens to check whether the bonding at one end of the chip has shifted, thereby determining whether the bonding of the entire chip has shifted. However, due to the thermal shrinkage of the substrate or package, the bonding at one end of the chip often shifts while the other end does not, resulting in low testing accuracy. Furthermore, due to the small overall size of the chip, there is a problem of positional interference, making it difficult to deploy testing lenses at both ends of the chip simultaneously. Summary of the Invention

[0004] The present invention aims to solve the problem that existing detection equipment can only detect whether the bonding at one end of the chip is misaligned, resulting in low detection accuracy.

[0005] To address the above problems, the present invention provides a detection device, comprising: The detection lens is provided in two parts; The adjustment mechanism is provided in two sets, and the two sets of adjustment mechanisms are respectively connected to the two detection lenses one by one; The adjustment mechanism includes a Y-axis adjustment component and an X-axis adjustment component to adjust the relative positions of the two detection lenses on the Y-axis and X-axis.

[0006] The detection device provided by this invention has, but is not limited to, the following beneficial effects compared to the prior art: By using two sets of adjustment mechanisms corresponding to the two detection lenses, interference between the detection lenses is avoided, improving detection accuracy. The specific detection method for the chip-substrate or package bonding is as follows: the Y-axis is aligned with the product transport direction. The relative positions of the two detection lenses are adjusted using the adjustment mechanism. Specifically, the Y-axis adjustment component adjusts the relative positions of the two detection lenses in the Y-axis, ensuring a certain distance between them. This distance satisfies both the placement of the two detection lenses, avoiding positional interference, and the requirement that when a chip is being detected at one detection lens, a chip is simultaneously being detected at the other detection lens. This is equivalent to having several workstation differences between the two detection lenses. (The X-axis...) The axis adjustment assembly adjusts the relative positions of the two detection lenses in the X-axis so that the distance between the two detection lenses in the X-axis is the same as the distance between the two bonding positions at the two ends of the chip. During detection, one detection lens first checks whether the bonding position at one end of a chip has shifted. As chips are successively conveyed for detection, after passing through several stations, the chip is finally conveyed to the other detection lens, which checks whether the bonding position at the other end of the chip has shifted. Thus, the bonding positions at both ends of the chip are detected by the two detection lenses. This setup solves the problem of positional interference of the detection lenses when the bonding positions at both ends are detected simultaneously due to the small size of the chip. As a result, it is possible to detect whether the bonding positions at both ends of the chip have shifted, thus improving the accuracy of the detection.

[0007] Furthermore, the Y-axis adjustment component and the X-axis adjustment component have the same structure and both include: A guide rail, on which a permanent magnet stator is arranged along its length, and a first winding mover slider is slidably arranged on the guide rail. The permanent magnet stator and the first winding mover slider form a permanent magnet linear motor, which drives the first winding mover slider to slide on the guide rail. The slider has a gap between its inner wall and the guide rail, and a throttling hole is provided on the inner wall of the slider. The throttling hole is connected to an external air supply system to form an air film between the slider and the guide rail.

[0008] Furthermore, a protective assembly is provided between the guide rail and the first winding mover slider. The protective assembly includes a second winding mover slider that is slidably disposed on the guide rail. A pad is provided on the side of the second winding mover slider close to the first winding mover slider. The thickness of the pad is the same as the distance between the inner wall surface of the first winding mover slider and the guide rail.

[0009] Furthermore, the pad has a first groove on the side facing the first moving slider, and the second winding moving slider has a second groove. A vent hole is provided between the first groove and the second groove. A central rod is axially arranged in the second groove. A movable plate is slidably sleeved on the central rod. The edge of the movable plate and the inner wall of the second groove are slidably sealed and fitted together. An air outlet hole is provided on the movable plate.

[0010] Furthermore, the air outlets are evenly spaced along the circumference of the movable plate, and an adjustment plate is coaxially rotatably mounted on the movable plate, with adjustment holes corresponding to the positions of the air outlets arranged on the adjustment plate.

[0011] Furthermore, a contact switch is provided at the opening of the second groove; A guide rod that passes through the movable plate is provided on the inner wall of the second groove.

[0012] Furthermore, a limit cylinder is provided on the second winding mover slider, and the limit cylinder extends and retracts toward the first winding mover slider.

[0013] Furthermore, the adjustment mechanism also includes a Z-axis adjustment component to adjust the position of the detection lens in the Z-axis direction. The Z-axis adjustment component and the Y-axis adjustment component have the same structure.

[0014] Furthermore, the Z-axis adjustment assembly also includes a compensation cylinder, which is disposed at the lower part of the first winding mover slider to apply an upward thrust to the first winding mover slider.

[0015] The present invention also provides a roll-to-roll flip-chip bonding machine, which includes the above-mentioned detection device.

[0016] Since the technological improvements and beneficial effects of tape-and-roll flip-chip mounters are at least the same as those of testing devices, tape-and-roll flip-chip mounters will not be discussed further here. Attached Figure Description

[0017] Figure 1 This is a schematic diagram of the overall structure of the testing device of this application; Figure 2 This is a schematic diagram of the Y-axis adjustment component; Figure 3 This is a schematic diagram showing the layout of the throttling orifice on the slider of the first winding. Figure 4 for Figure 1 Enlarged view of the structure at point A; Figure 5 This is a schematic diagram of the protective component. Figure 6 This is a schematic diagram showing the location of the vents; Figure 7 This is a schematic diagram of the movable plate structure.

[0018] Explanation of reference numerals in the attached figures: 1. Detection lens; 2. Adjustment mechanism; 21. Y-axis adjustment assembly; 22. X-axis adjustment assembly; 23. Protective assembly; 24. Z-axis adjustment assembly; 201. Guide rail; 202. Permanent magnet stator; 203. First winding mover slider; 204. Throttling orifice; 231. Second winding mover slider; 232. Pad; 233. First groove; 234. Second groove; 235. Vent hole; 236. Center rod; 237. Movable plate; 238. Air outlet; 239. Adjustment plate; 2310. Adjustment hole; 2311. Contact switch; 2312. Guide rod; 2313. Limit cylinder; 241. Compensation cylinder; 242. Force-bearing component. Detailed Implementation

[0019] To make the objectives, technical solutions, and advantages of this application clearer, specific embodiments of this application are described clearly and completely below with reference to the accompanying drawings. It should be understood that the described embodiments are only a part of the embodiments of this application, and not all of them. All other embodiments obtained by those skilled in the art based on the embodiments described in this application without creative effort will fall within the scope of protection of this application.

[0020] Unless otherwise defined, all technical and scientific terms used in this application have the same meaning as commonly understood by one of ordinary skill in the art to which this application pertains; the terminology used in the specification of this application is for the purpose of describing specific embodiments only and is not intended to limit this application; the terms "comprising," "including," "having," "containing," "comprise," etc., in the specification, claims, and accompanying drawings of this application are open-ended terms. They indicate that a method comprises one or more steps, or an apparatus comprises one or more elements, but do not exclude the inclusion of other steps or elements. The terms "first," "second," etc., in the specification, claims, or accompanying drawings of this application are used to distinguish different objects, not to describe a specific order or hierarchy. Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, a feature defined with "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this application, unless otherwise stated, "a plurality of" means two or more.

[0021] In the description of this application, it should be understood that the terms "upper", "lower", "left", "right", "front", "rear", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this application.

[0022] In the description of this application, it should be noted that, unless otherwise expressly specified and limited, the terms "installation," "connection," "linking," and "attachment" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal communication between two components. Those skilled in the art can understand the specific meaning of the above terms in this application according to the specific circumstances.

[0023] In this application, the term "and / or" is merely a description of the relationship between related objects, indicating that three relationships can exist. For example, A and / or B can represent: A existing alone, A and B existing simultaneously, or B existing alone. Additionally, in this application, the character " / " generally indicates that the preceding and following related objects have an "or" relationship.

[0024] See Figure 1 A detection device according to an embodiment of the present invention includes: There are two detection lenses (1). Adjustment mechanism 2, there are two sets of adjustment mechanism 2, and the two sets of adjustment mechanism 2 are respectively connected to the two detection lenses 1 one by one; The adjustment mechanism 2 includes a Y-axis adjustment component 21 and an X-axis adjustment component 22 to adjust the relative positions of the two detection lenses 1 on the Y-axis and X-axis.

[0025] In this embodiment, the specific detection method for the bonding of the chip to the substrate or package is as follows: The Y-axis is aligned with the product transport direction. The relative position of the two detection lenses 1 is adjusted by the adjustment mechanism 2. Specifically, the relative position of the two detection lenses 1 in the Y-axis is adjusted by the Y-axis adjustment component 21, ensuring a certain distance between them. This distance satisfies both the layout of the two detection lenses 1, avoiding positional interference, and the requirement that when a chip is being detected at one detection lens 1, a chip is simultaneously being detected at the other detection lens 1. This is equivalent to a certain number of workstation differences between the two detection lenses 1. The X-axis adjustment component 22 is used to adjust the relative position of the two detection lenses 1. In the X-axis direction, the distance between the two detection lenses 1 is the same as the distance between the two bonding positions at the two ends of the chip. During detection, one detection lens 1 first detects whether the bonding position at one end of a chip has shifted. As the chips are successively transported for detection, after passing through several stations, the chip is finally transported to the other detection lens 1, which detects whether the bonding position at the other end of the chip has shifted. Thus, the bonding positions at both ends of the chip are detected by the two detection lenses 1. This setup solves the problem of positional interference of the detection lenses 1 when the bonding positions at both ends are detected simultaneously due to the small size of the chip. As a result, it is possible to detect whether the bonding positions at both ends of the chip have shifted, thus improving the accuracy of the detection.

[0026] Furthermore, referring to Figures 1 to 3 The Y-axis adjustment assembly 21 and the X-axis adjustment assembly 22 have the same structure and both include: The guide rail 201 has a permanent magnet stator 202 arranged along its length direction, and a first winding mover slider 203 is slidably arranged on the guide rail 201. The permanent magnet stator 202 and the first winding mover slider 203 form a permanent magnet linear motor, which drives the first winding mover slider 203 to slide on the guide rail 201. There is a gap between the inner wall of the slider and the guide rail 201. A throttling hole 204 is provided on the inner wall of the slider. The throttling hole 204 is connected to an external air supply system to form an air film between the slider and the guide rail 201.

[0027] In this embodiment, for the Y-axis adjustment component 21 and the X-axis adjustment component 22, an air film is formed between the slider and the guide rail 201 through the throttling hole 204, thereby forming a non-contact air-floating sliding structure. This structure is driven by a permanent magnet linear motor composed of a permanent magnet stator 202 and a first winding mover slider 203. This ensures that the first winding mover slider 203 does not contact the guide rail 201 when sliding, avoiding wear caused by mechanical hard contact and preventing the reduction in position adjustment accuracy due to wear. This ensures the positional accuracy of the two detection lenses 1 and thus guarantees the detection accuracy.

[0028] Of course, for the Y-axis adjustment component 21, its guide rail 201 is set along the Y direction, and for the X-axis adjustment component 22, its guide rail 201 is set along the X direction. Specifically, the guide rail 201 of the Y-axis adjustment component 21 is set along the Y direction, the first winding mover slider 203 of the Y-axis adjustment component 21 is slidably set on the upper part of the corresponding guide rail 201, the guide rail 201 of the X-axis adjustment component 22 is fixed along the X direction on the upper part of the first winding mover slider 203 of the Y-axis adjustment component 21, the first winding mover slider 203 of the X-axis adjustment component 22 is slidably set on its corresponding guide rail 201, and the two detection lenses 1 are respectively fixed relative to each other on the first winding mover slider 203 of the X-axis adjustment component 22 of the two sets of adjustment mechanisms 2.

[0029] In addition, the Y-axis adjustment components 21 of the two sets of adjustment mechanisms 2 can share a guide rail 201. That is, the two sets of Y-axis adjustment components 21 share a guide rail 201 arranged in the Y direction. The first winding mover slider 203 of the two sets of Y-axis adjustment components 21 is slidably arranged on the guide rail 201 in the Y direction.

[0030] Furthermore, referring to Figure 2 , Figures 4 to 7 A protective component 23 is provided between the guide rail 201 and the first winding mover slider 203. The protective component 23 includes a second winding mover slider 231 that is slidably disposed on the guide rail 201. A pad 232 is provided on the side of the second winding mover slider 231 near the first winding mover slider 203. The thickness of the pad 232 is the same as the distance between the inner wall surface of the first winding mover slider 203 and the guide rail 201.

[0031] In the prior art, when it is first used, the throttle orifice 204 needs a certain amount of time to form a stable air film between the first winding mover slider 203 and the guide rail 201. During this time, hard contact can easily occur between the first winding mover slider 203 and the guide rail 201, causing wear and reducing the adjustment accuracy of the position of the detection lens 1.

[0032] In this embodiment, by setting the protective component 23, before a stable air film is formed between the first winding mover slider 203 and the guide rail 201, the pad 232 is placed between the first winding mover slider 203 and the guide rail 201 to prevent hard contact between the first winding mover slider 203 and the guide rail 201, avoid mechanical hard wear, and ensure adjustment accuracy. Specifically, the permanent magnet stator 202 on the second winding mover slider 231 and the guide rail 201 also form a permanent magnet linear motor to drive the second winding mover slider 231. 31 moves on the guide rail 201. When it is first used, the second winding mover slider 231 drives the pad 232 to move, so that the pad 232 enters between the first winding mover slider 203 and the guide rail 201. After a stable air film is formed between the first winding mover slider 203 and the guide rail 201, the second winding mover slider 231 drives the pad 232 to move out from between the first winding mover slider 203 and the guide rail 201. The first winding mover slider 203 moves normally along the guide rail 201 to adjust the position of the detection lens 1.

[0033] Of course, the pad 232 is made of a rubber plate with a certain degree of elasticity. On the one hand, the slight deformation of the pad 232 makes it easier for the pad 232 to enter between the first winding mover slider 203 and the guide rail 201. On the other hand, it reduces wear with the first winding mover slider 203 and the guide rail 201.

[0034] Furthermore, referring to Figures 4 to 7 The pad 232 has a first groove 233 on the side facing the first moving slider, and the second winding moving slider 231 has a second groove 234. A vent 235 is provided between the first groove 233 and the second groove 234. A central rod 236 is axially arranged in the second groove 234. A movable plate 237 is slidably sleeved on the central rod 236. The edge of the movable plate 237 and the inner wall of the second groove 234 are slidably sealed and fitted together. An air outlet 238 is provided on the movable plate 237.

[0035] In this embodiment, when the pad 232 is positioned between the first winding mover slider 203 and the guide rail 201, the slot opening of the first groove 233 partially covers the throttling orifice 204. Air flowing out of this portion of the throttling orifice 204 enters the first groove 233 and then enters the second groove 234 through the vent 235. The air entering the second groove 234 is discharged from the vent 238 on the movable plate 237. As the airflow rate discharged from the throttling orifice 204 gradually increases, the vent 238 on the movable plate 237... When the air entering the second groove 234 is completely exhausted, the air pressure between the movable plate 237 and the bottom of the second groove 234 gradually increases, pushing the movable plate 237 to move closer to the groove opening. When the movable plate 237 moves to the groove opening position, it indicates that the air flow rate discharged from the throttle orifice 204 is large enough to form a stable air film between the first winding mover slider 203 and the guide rail 201. At this time, the pad 232 can be moved out from between the first winding mover slider 203 and the guide rail 201.

[0036] Furthermore, referring to Figure 5 and Figure 7 The air vents 238 are evenly spaced along the circumference of the movable plate 237. An adjustment plate 239 is coaxially rotatably mounted on the movable plate 237. The adjustment plate 239 is provided with adjustment holes 2310 corresponding to the positions of the air vents 238.

[0037] In this embodiment, by rotating the adjustment plate 239, the positional correspondence between the adjustment hole 2310 and the air outlet 238 on the adjustment plate 239 can be adjusted, thereby adjusting the exhaust volume at the air outlet 238, and thus adjusting the air flow rate at which the throttle orifice 204 can be pushed to adapt to the different airflow intensities required at the throttle orifice 204.

[0038] Furthermore, referring to Figure 5 and Figure 6 A contact switch 2311 is provided at the opening of the second groove 234; A guide rod 2312 that passes through the movable plate 237 is provided on the inner wall of the second groove 234.

[0039] In this embodiment, a contact switch 2311 is provided at the opening of the second groove 234. When the movable plate 237 is pushed to contact the contact switch 2311, it indicates that a stable air film can be formed between the first winding mover slider 203 and the guide rail 201. The contact switch 2311 controls the winding of the second winding mover slider 231 to be energized, driving the second winding mover slider 231 to slide on the guide rail 201, thereby causing the pad 232 to move out from between the first winding mover slider 203 and the guide rail 201.

[0040] Furthermore, referring to Figures 4 to 6A limit cylinder 2313 is provided on the second winding mover slider 231, and the limit cylinder 2313 extends and retracts toward the first winding mover slider 203.

[0041] In this embodiment, a limiting cylinder 2313 is provided on the second winding mover slider 231. On the one hand, when the first winding mover slider 203 slides normally along the guide rail 201, it can prevent the pad 232 from entering between the first winding mover slider 203 and the guide rail 201 and affecting the normal sliding of the first winding mover slider 203. On the other hand, the limiting cylinder 2313 can serve as an end limiting structure of the guide rail 201, restricting the movement position of the first winding mover slider 203 towards the end of the guide rail 201. Specifically, at the beginning of use, the limiting cylinder 2313 retracts into the second winding mover slider 231, and the pad 232 is located between the first winding mover slider 203 and the guide rail 201. After a stable air film is formed between the winding mover slider 203 and the guide rail 201, the second winding mover slider 231 drives the pad 232 to move out from between the first winding mover slider 203 and the guide rail 201, and the second winding mover slider 231 eventually moves to the end position of the guide rail 201. At this time, the limiting cylinder 2313 extends a certain length towards the first winding mover slider 203. When the first winding mover slider 203 moves closer to the second winding mover slider 231, the limiting cylinder 2313 contacts the first winding mover slider 203 to form a limit, preventing the pad 232 from entering between the first winding mover slider 203 and the guide rail 201, and restricting the first winding mover slider 203 from continuing to move.

[0042] Furthermore, referring to Figure 1 The adjustment mechanism 2 also includes a Z-axis adjustment component 24 to adjust the position of the detection lens 1 in the Z-axis direction. The Z-axis adjustment component 24 and the Y-axis adjustment component 21 have the same structure.

[0043] In this embodiment, the adjustment mechanism 2 further includes a Z-axis adjustment component 24. The detection lens 1 is fixed relative to the Z-axis adjustment component 24. The Z-axis adjustment component 24 is used to adjust the position of the detection lens 1 in the Z-axis direction, that is, to adjust the vertical distance between the detection lens 1 and the chip product, so that there is a suitable detection distance between the detection lens 1 and the chip product.

[0044] Furthermore, referring to Figure 1 The Z-axis adjustment assembly 24 also includes a compensation cylinder 241, which is located at the lower part of the first winding mover slider 203 to apply an upward thrust to the first winding mover slider 203.

[0045] In this embodiment, the compensation cylinder 241 is used to apply an upward thrust to the first winding mover slider 203 of the Z-axis adjustment assembly 24 to compensate for the gravity of the Z-axis adjustment assembly 24 and the detection lens 1, so that the first winding mover slider 203 of the Z-axis adjustment assembly 24 slides more smoothly. Specifically, the compensation cylinder 241 is vertically arranged, and the lower end of the compensation cylinder 241 is fixed to the lower end of the slide rail of the Z-axis adjustment assembly 24. A force-receiving member 242 is provided on the first winding mover slider 203 of the Z-axis adjustment assembly 24. The top end of the compensation cylinder 241 abuts against the force-receiving member 242. The compensation cylinder 241 provides a thrust equal to the gravity of the Z-axis adjustment assembly 244 and the detection lens 1 to the force-receiving member 242 at all times, thereby forming gravity compensation.

[0046] A roll-to-roll flip-chip bonding machine includes a detection device.

[0047] The above-mentioned roll-to-roll flip-chip mounter has some testing data during processing and production, as shown in Tables 1 and 2.

[0048] Table 1 shows partial test data for the two lenses.

[0049] Table 1 Table 2 shows a set of test results.

[0050] Table 2 Table 1 shows the data of 13 chips detected by the upper and lower detection modules (corresponding to two detection lenses). Specifically, the upper and lower detection modules detect the two ends of the chip respectively. Table 2 shows the detection results of one group. This group has a total of 2561 detection positions, of which 78 are empty chips, meaning that no chip was detected at 78 detection positions. The actual number of chips detected is 2483. Among these 2483 chips, the offset of 2477 chips meets the requirements, with a pass rate of 99.8%. The offset of 6 chips does not meet the requirements, with a failure rate of 0.2%. There are 0 dual chips (i.e., stacked materials) and 0 unidentifiable chips, indicating a high detection accuracy.

[0051] In the prior art, the roll-to-roll flip-chip bonding machine has a winding chamber where the thermo-bonded products are wound up. The detection device is specifically installed in the winding chamber of the roll-to-roll flip-chip bonding machine to detect whether the bonding position of the product is offset before the product is wound up.

[0052] While the present invention has been disclosed above, its scope of protection is not limited thereto. Those skilled in the art can make various changes and modifications without departing from the spirit and scope of the present invention, and all such changes and modifications will fall within the scope of protection of the present invention.

Claims

1. A detection device, characterized in that, include: The detection lens (1) is provided in two parts; Adjustment mechanism (2), the adjustment mechanism (2) is provided in two sets, and the two sets of adjustment mechanisms (2) are respectively connected to the two detection lenses (1); The adjustment mechanism (2) includes a Y-axis adjustment component (21) and an X-axis adjustment component (22) to adjust the relative positions of the two detection lenses (1) on the Y-axis and X-axis.

2. The detection device according to claim 1, characterized in that, The Y-axis adjustment assembly (21) and the X-axis adjustment assembly (22) have the same structure and both include: A guide rail (201) is provided with a permanent magnet stator (202) along its length direction. A first winding mover slider (203) is slidably provided on the guide rail (201). The permanent magnet stator (202) and the first winding mover slider (203) form a permanent magnet linear motor, which drives the first winding mover slider (203) to slide on the guide rail (201). There is a gap between the inner wall of the slider and the guide rail (201). A throttling hole (204) is provided on the inner wall of the slider. The throttling hole (204) is connected to an external air supply system to form an air film between the slider and the guide rail (201).

3. The detection device according to claim 2, characterized in that, A protective component (23) is provided between the guide rail (201) and the first winding mover slider (203). The protective component (23) includes a second winding mover slider (231) slidably disposed on the guide rail (201). A pad (232) is provided on the side of the second winding mover slider (231) near the first winding mover slider (203). The thickness of the pad (232) is the same as the distance between the inner wall surface of the first winding mover slider (203) and the guide rail (201).

4. The detection device according to claim 3, characterized in that, The pad (232) has a first groove (233) on the side facing the first moving slider, and a second groove (234) is provided on the second winding moving slider (231). A vent hole (235) is provided between the first groove (233) and the second groove (234). A center rod (236) is axially provided in the second groove (234). A movable plate (237) is slidably sleeved on the center rod (236). The edge of the movable plate (237) and the inner wall of the second groove (234) are slidably sealed and fitted together. An air outlet hole (238) is provided on the movable plate (237).

5. The detection device according to claim 4, characterized in that, The air outlets (238) are evenly spaced along the circumference of the movable plate (237). An adjustment plate (239) is coaxially rotatably mounted on the movable plate (237). The adjustment plate (239) is provided with adjustment holes (2310) corresponding to the positions of the air outlets (238).

6. The detection device according to claim 4, characterized in that, A contact switch (2311) is provided at the opening of the second groove (234); The inner wall of the second groove (234) is provided with a guide rod (2312) that passes through the movable plate (237).

7. The detection device according to claim 3, characterized in that, A limit cylinder (2313) is provided on the second winding mover slider (231), and the limit cylinder (2313) extends and retracts toward the first winding mover slider (203).

8. The detection device according to any one of claims 2 to 7, characterized in that, The adjustment mechanism (2) further includes a Z-axis adjustment component (24) to adjust the position of the detection lens (1) in the Z-axis direction. The Z-axis adjustment component (24) and the Y-axis adjustment component (21) have the same structure.

9. The detection device according to claim 8, characterized in that, The Z-axis adjustment assembly (24) further includes a compensation cylinder (241), which is disposed at the lower part of the first winding mover slider (203) to apply an upward thrust to the first winding mover slider (203).

10. A roll-to-roll flip-chip mounter, characterized in that, Includes the detection device as described in any one of claims 1 to 9.

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