Temperature controlled reaction chamber window and plasma processing apparatus

Abstract

The present application relates to wafer processing equipment technical field, especially to a kind of temperature control type reaction chamber window and plasma processing equipment, including cooling cover, gas inlet, exhaust and several air temperature control parts;Cooling cover and dielectric window form closed cooling cavity;Exhaust end of exhaust and cooling cavity are communicated;Gas inlet is equipped with several gas outlets, each gas outlet of gas inlet is communicated with cooling cavity by each air temperature control part, and several air temperature control parts are correspondingly arranged in the central region and edge region of dielectric window;The present application realizes the differentiating, continuity precision regulation and control of the temperature of different regions of dielectric window, effectively eliminates the temperature difference between central region and edge region, makes the overall temperature of dielectric window tend to be consistent, significantly improves temperature uniformity, meets the strict requirements of high-precision semiconductor process on window temperature control.

Description

Technical Field

[0001] This invention relates to the field of wafer processing equipment technology, and more particularly to a temperature-controlled reaction chamber window and plasma processing equipment. Background Technology

[0002] In semiconductor manufacturing processes, wafers typically undergo etching, resist removal, or deposition processes within a sealed cavity. The temperature uniformity of the cavity cover window (dielectric window) directly affects plasma excitation stability and process performance. High-temperature conditions can also reduce the accumulation of reaction byproducts on the window surface. Therefore, the window has a clear temperature control requirement. Existing temperature control solutions only arrange a single heating mechanism and cooling fan at the window, and can only adjust the temperature by switching the heater on and off and starting and stopping the fan. This cannot control the overall temperature uniformity of the window, making it difficult to meet the high-precision temperature control requirements of semiconductor processes. Summary of the Invention

[0003] This invention relates to a temperature-controlled reaction chamber window and plasma processing equipment, aiming to solve the shortcomings of existing chamber cover window temperature control schemes that rely solely on a single heating mechanism and cooling fan for on / off adjustment, and cannot regulate the overall temperature uniformity of the window.

[0004] To achieve the above objectives, the present invention provides a temperature-controlled reaction chamber window, including a cooling cover plate, an air inlet, an air extraction component, and several temperature-controlled gas components; The cooling cover is located at the top of the medium window, and a closed cooling cavity is formed between the cooling cover and the medium window; The suction end of the suction component is connected to the cooling chamber; The air inlet is provided with a plurality of air outlets, and each air outlet of the air inlet is connected to the cooling chamber through a respective temperature-controlled gas element. The plurality of temperature-controlled gas elements are correspondingly arranged in the central area and the edge area of ​​the medium window. Based on the real-time temperature feedback of the central and edge regions, each of the air intake components dynamically adjusts the amount of cooling gas delivered to the corresponding region after being conditioned by each of the gas temperature control components, and / or the air extraction component dynamically adjusts the amount of heated gas extracted from the cooling chamber, so that the temperatures of the central and edge regions tend to be consistent.

[0005] Optionally, each of the aforementioned temperature-controlled components includes an insulation box and a temperature-controlled section; The cooling cover plate is provided with a number of air intake channels that correspond one-to-one with the temperature-controlled air element. The heat preservation box is fixed to the top of the cooling cover plate; The temperature regulating unit is located inside the insulation box, and the air inlet of the temperature regulating unit is connected to the air outlet of the air inlet component, and its air outlet is connected to the air inlet channel, so that the cooling gas input by the air inlet component is regulated by the temperature regulating unit and then transported to the cooling chamber through the air inlet channel.

[0006] Optionally, the temperature control unit includes a cold element temperature control unit and a hot element temperature control unit; The cold-electro-temperature regulating unit and the hot-electro-temperature regulating unit are alternately connected to the outlet end of the air inlet to selectively input cooling gas cooled by the cold-electro-temperature regulating unit or cooling gas heated by the hot-electro-temperature regulating unit into the corresponding region based on the real-time temperature of the corresponding region.

[0007] Optionally, the cold temperature control unit includes a cold temperature control body and a cooling pipe; The cooling temperature control body is connected to the cooling pipe and the air outlet of the air inlet component. The cooling pipe is connected to the air inlet channel. The cooling pipe includes several U-shaped segments and several arc-shaped segments, and each arc-shaped segment connects to two adjacent U-shaped segments.

[0008] Optionally, the thermoelectric temperature control unit includes a temperature control body and a temperature control pipe; The temperature-regulating body is connected to the outlet end of the temperature-regulating pipe and the air inlet component. The temperature-regulating pipe is connected to the air inlet channel. The temperature-regulating pipe includes several U-shaped segments and several arc-shaped segments, and each arc-shaped segment connects two adjacent U-shaped segments.

[0009] Optionally, the temperature-controlled gas component further includes a flexible hose, a rigid tube, a drive unit, and a connector; The top of the insulated box is provided with a through-hole; The connector is located inside the insulation box. The rigid tube is connected to the top of the connector. Its free end extends through the movable hole to the outside of the insulation box and is connected to the flexible tube. The free end of the flexible tube is connected to the outlet of the air inlet. The driving end of the driving unit is connected to the rigid tube unit to drive the rigid tube unit, along with the connector, to contact and conduct with the cold element temperature control unit, allowing cooling gas to pass through the cold element temperature control unit and enter the cooling chamber, or to contact and conduct with the hot element temperature control unit, allowing cooling gas to pass through the hot element temperature control unit and enter the cooling chamber.

[0010] Optionally, the connector includes a sealed housing and several sealing parts; The sealed box is movably disposed inside the insulation box and communicates with the rigid pipe section. The sealed box has through holes on the side facing the cold element temperature control section and the hot element temperature control section. Each of the sealing parts is movably inserted into each of the through holes, and each sealing part includes a fitting sealing section and an abutting section. The fitting sealing section is fitted to the inner sidewall of the sealing box, and the orthographic projection structure of the fitting sealing section on the inner sidewall of the sealing box covers the inner outlet end of the through hole. The abutting section is movably inserted into the through hole, and its end away from the fitting sealing section extends out of the sealing box so that when it comes into contact with the cold element temperature control part or the hot element temperature control part, it moves into the sealing box and takes the fitting sealing section away from the inner sidewall of the sealing box, thereby opening the through hole.

[0011] Optionally, the connector further includes an elastic connection portion, with both ends of each elastic connection portion fixed to the inner sidewall of the fitting sealing section and the sealing box, so as to shorten or lengthen when the fitting sealing section moves closer to or away from the cold element temperature control section or the hot element temperature control section. Each of the aforementioned fitting and sealing sections is provided with a plurality of elastic connecting parts, which are arranged at intervals along the circumference of the sealing section, and the two ends of the plurality of elastic connecting parts are respectively located on two parallel axial planes.

[0012] Optionally, the temperature-controlled reaction chamber window may further include a gas distribution component; The air distribution component is located on the top of the cooling cover plate. An air distribution chamber is formed inside the air distribution component. The air inlet end of the air distribution chamber is connected to the air outlet end of the air inlet component. Several air outlet ends are provided in the air distribution chamber, and the air outlet end of each air distribution chamber is connected to each of the air conditioning components.

[0013] Optionally, the temperature-controlled reaction chamber window may further include a support ring. The cooling cover plate has several air outlet channels arranged circumferentially on its side wall. The support ring is fixed on the outer side wall of the cooling cover plate. The support ring has a circumferentially extending receiving cavity that communicates with the air extraction component. The support ring has several through holes that communicate with the receiving cavity, and each of the through holes is connected to each of the air outlet channels.

[0014] Optionally, the temperature-controlled reaction chamber window further includes a shielding cover plate, which is located at the top of the reaction chamber and forms a closed shielding cavity between the shielding cover plate and the reaction chamber. The cooling cover plate, the air inlet, and the air extraction component are all located inside the shielding cavity.

[0015] Optionally, the temperature-controlled reaction chamber window may further include a first temperature sensor, a second temperature sensor, and a control module; The first temperature sensor and the second temperature sensor are respectively located in the central region and the edge region; The first temperature sensor, the second temperature sensor, the air inlet, the temperature-controlled atmosphere device, and the air extraction device are all connected to the control module. The control module controls the temperature-controlled atmosphere device, the air inlet, and the air extraction device based on the temperatures of the central region and the edge region collected by the first temperature sensor and the second temperature sensor, respectively.

[0016] To achieve the above objectives, the present invention also provides a plasma processing device, including a reaction chamber, a heating seat, a dielectric window, and a temperature-controlled reaction chamber window, wherein the heating seat is disposed on the top of the reaction chamber, and the dielectric window is disposed on the top of the heating seat.

[0017] The beneficial effects of this invention are as follows: This invention forms a closed cooling chamber by setting a cooling cover plate on the top of the medium window, and configuring several temperature-controlled gas elements corresponding to the central and edge regions of the medium window. Based on the real-time temperature feedback of the central and edge regions, the air inlet dynamically adjusts the amount of cooling gas delivered to the corresponding region after being conditioned by the temperature-controlled gas elements, and / or the air extraction element dynamically adjusts the amount of heated gas extracted from the cooling chamber. This achieves differentiated and continuous precise control of the temperature of different regions of the medium window, effectively eliminating the temperature difference between the central and edge regions, making the overall temperature of the medium window more uniform, significantly improving temperature uniformity, and meeting the stringent requirements of high-precision semiconductor processes for window temperature control. Attached Figure Description

[0018] Figure 1 This is a schematic diagram of the structure of a plasma processing device in some embodiments of the present invention; Figure 2 for Figure 1 An enlarged schematic diagram of the structure at position A in the diagram; Figure 3 for Figure 2 An enlarged schematic diagram of the structure at position B in the diagram is shown. Figure 4 for Figure 1 An enlarged schematic diagram of the structure at position C in the diagram.

[0019] Explanation of reference numerals in the attached figures: 1. Reaction chamber; 2. Heating seat; 3. Medium window; 4. Cooling cover; 41. Air inlet channel; 42. Air outlet channel; 5. Cooling chamber; 6. Gas distribution component; 61. Gas distribution chamber; 7. Extraction component; 8. Air inlet component; 9. Temperature control component; 91. Insulation box; 911. Movable hole; 92. Flexible hose section; 93. Rigid pipe section; 94. Drive section; 95. Connector; 951. Sealed box body; 9511. Through hole; 952. Sealing section; 953. Flexible connection section; 96. Temperature control section; 961. Cold temperature control section; 9611. Cold temperature control body; 9612. Cooling pipe; 962. Hot temperature control section; 9621. Hot temperature control body; 9622. Hot temperature control pipe; 10. Support ring component; 101. Storage cavity; 102. Connecting hole; 11. Shielding cover. Detailed Implementation

[0020] To make the objectives, technical solutions, and advantages of this invention clearer, the technical solutions in the embodiments of this invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this invention. All other embodiments obtained by those skilled in the art based on the embodiments of this invention without inventive effort are within the scope of protection of this invention. Unless otherwise defined, the technical or scientific terms used herein should have the ordinary meaning understood by those skilled in the art. The terms "comprising" and similar expressions used herein mean that the element or object preceding the word covers the element or object listed following the word and its equivalents, but do not exclude other elements or objects.

[0021] This invention relates to a temperature-controlled reaction chamber window and plasma processing equipment, aiming to solve the shortcomings of existing chamber cover window temperature control schemes that rely solely on a single heating mechanism and cooling fan for on / off adjustment, and cannot regulate the overall temperature uniformity of the window.

[0022] To address the problems existing in the prior art, embodiments of the present invention provide a temperature-controlled reaction chamber 1 window, such as... Figure 1 As shown, the temperature-controlled reaction chamber 1 window includes a cooling cover plate 4, an air inlet 8, an air extraction component 7, and several temperature-controlled atmosphere components 9. The number of temperature-controlled atmosphere components 9 can be three, four, or more.

[0023] In some embodiments, such as Figure 1As shown, the cooling cover plate 4 is disposed on top of the medium window 3, forming a closed cooling cavity 5 between the cooling cover plate 4 and the medium window 3. The cooling cover plate 4 can be an inverted cylindrical structure, closed at the top and open at the bottom, covering the upper surface of the medium window 3, and together with the upper surface of the medium window 3, forming the closed cooling cavity 5. The cooling cover plate 4 can be made of a metal material with good thermal conductivity, such as aluminum alloy or stainless steel, to efficiently conduct heat and exchange heat with the cooling gas, thereby achieving precise control of the temperature of the medium window 3.

[0024] In some embodiments, such as Figure 1 As shown, the suction end of the suction component 7 is connected to the cooling chamber 5; the suction component 7 can be a suction pump or a vacuum generator, used to actively extract the heated gas in the cooling chamber 5 that has absorbed heat from the medium window 3, and can change the suction volume according to the dynamic adjustment of the control module, thereby coordinating with the air supply adjustment of the air intake component 8 to achieve precise control of the temperature distribution in the cooling chamber 5.

[0025] In some embodiments, the air inlet 8 can be a gas distributor or a proportional regulating valve assembly with multiple air outlets, used to distribute cooling gas to each temperature regulating component 9 as needed, and to dynamically adjust the gas flow rate at each air outlet in conjunction with the control module, so as to achieve precise control of the cooling gas delivery volume in different areas. The air inlet 8 can have one, two, three or more air outlets.

[0026] In some embodiments, such as Figure 1 As shown, the air inlet 8 is provided with a plurality of air outlets. Each air outlet of the air inlet 8 is connected to the cooling chamber 5 through a respective temperature-controlled gas element 9. The plurality of temperature-controlled gas elements 9 are correspondingly arranged in the central region and the edge region of the medium window 3.

[0027] In some embodiments, such as Figure 1 As shown, based on the real-time temperature feedback of the central region and the edge region, each of the air intake components 8 dynamically adjusts the amount of cooling gas delivered to the corresponding region after being conditioned by each of the gas temperature control components 9, and / or the air extraction component 7 dynamically adjusts the amount of heated gas extracted from the cooling chamber 5, so that the temperature of the central region and the edge region tends to be consistent.

[0028] By strategically placing temperature-controlled gas elements 9 in the central and edge regions of the dielectric window 3, and based on real-time temperature feedback from these regions, the air intake element 8 dynamically adjusts the flow rate of cooling gas, after being regulated by the temperature-controlled gas elements 9, to the corresponding regions. Simultaneously, the extraction element 7 dynamically adjusts the extraction rate of heated gas from the cooling chamber 5, enabling independent and precise temperature compensation for different regions of the dielectric window 3. When the temperature in a certain region is too high, the cooling gas flow rate is increased or the extraction rate is raised to enhance heat dissipation; when the temperature is too low, the cooling gas flow rate is reduced or even preheated cooling gas is introduced. This effectively eliminates the temperature gradient between the central and edge regions, rapidly bringing the overall temperature distribution of the dielectric window 3 to a uniform level. This solves the problem of traditional on / off temperature control's inability to adjust uniformity, significantly improving the stability of plasma excitation and process uniformity, and meeting the stringent requirements of high-precision semiconductor manufacturing for window temperature control.

[0029] In some embodiments, the arrangement of several temperature-controlled atmosphere components 9 may be such that some of the temperature-controlled atmosphere components 9 are concentrated in the central region of the medium window 3, while the remaining temperature-controlled atmosphere components 9 are evenly distributed circumferentially along the edge region of the medium window 3, thereby forming a zoned correspondence that matches the temperature distribution characteristics of the medium window 3, ensuring that the cooling gas can act specifically on the central region and the edge region, and realizing independent adjustment of the temperature at different positions of the medium window 3.

[0030] In some embodiments, the arrangement of the temperature-controlled elements 9 corresponding to the central region can be a series of concentric rings with different radii centered on the center of the medium window 3, so that the cooling gas can be injected radially and layer by layer from the center of the medium window 3 outward, thereby achieving fine gradient adjustment of the temperature at different radial and circumferential positions in the central region, and ensuring a highly uniform temperature distribution inside the central region.

[0031] In some embodiments, the arrangement of the temperature-controlled elements 9 corresponding to the edge region can be a series of concentric rings with different radii centered on the center of the medium window 3, and the radius of each ring temperature-controlled element 9 is larger than the distribution radius of the temperature-controlled elements 9 in the central region. This allows the cooling gas to be injected layer by layer from the inside to the outside along the edge region of the medium window 3, thereby precisely compensating for temperature differences at different radial and circumferential positions in the edge region, avoiding local overheating or overcooling in the edge region, and further ensuring the uniformity of the overall temperature of the medium window 3.

[0032] In some embodiments, such as Figure 2 As shown, each of the temperature-controlled gas components 9 includes an insulation box 91 and a temperature-regulating part 96.

[0033] In some embodiments, such as Figure 2As shown, the cooling cover plate 4 is provided with a plurality of air intake channels 41 corresponding one-to-one with the temperature-controlled atmosphere components 9; the air intake channels 41 are preferably axially extending through holes. The number of air intake channels 41 is the same as the number of temperature-controlled atmosphere components 9. Each air intake channel 41 forms an air outlet end of the air intake component 8.

[0034] In some embodiments, such as Figure 2 As shown, the heat preservation box 91 is fixed to the top of the cooling cover plate 4.

[0035] In some embodiments, such as Figure 2 As shown, the temperature regulating unit 96 is located inside the insulation box 91, and the air inlet of the temperature regulating unit 96 is connected to the air outlet of the air inlet component 8, and its air outlet is connected to the air inlet channel 41, so that the cooling gas input by the air inlet component 8 is regulated by the temperature regulating unit 96 and then transported to the cooling chamber 5 through the air inlet channel 41.

[0036] By integrating the temperature control unit 96 into the insulation box 91 and using the air inlet channel 41 to directly introduce the temperature-controlled cooling gas into the cooling chamber 5, the insulation box 91 effectively reduces the heat exchange between the temperature control unit 96 and the outside environment, ensuring the temperature stability of the cooling gas during transportation. It also eliminates the need for complex external piping and insulation structures, simplifying the system layout. At the same time, this design allows the cooling gas to be precisely temperature-controlled before entering the cooling chamber 5, achieving coordinated control of gas temperature and flow rate. It can quickly respond to temperature changes in different areas of the medium window 3, thereby improving the adjustment accuracy and response speed of the entire temperature control system.

[0037] In some embodiments, such as Figure 2 As shown, the temperature control unit 96 includes a cold temperature control unit 961 and a hot temperature control unit 962.

[0038] In some embodiments, such as Figure 2 As shown, the cold temperature regulating unit 961 and the hot temperature regulating unit 962 are alternately connected to the outlet end of the air inlet 8, so as to selectively input cooling gas cooled by the cold temperature regulating unit 961 or cooling gas heated by the hot temperature regulating unit 962 into the corresponding region based on the real-time temperature of the corresponding region.

[0039] This embodiment, by configuring a cold temperature regulating unit 961 and a hot temperature regulating unit 962 in the same temperature-controlled gas element 9, and having them alternately connected to the outlet end of the air inlet element 8, can selectively input cooling gas after cooling or heating according to the real-time temperature of the corresponding area, thus achieving bidirectional active temperature regulation of each area of ​​the dielectric window 3. When the temperature of a certain area of ​​the dielectric window 3 is too high, cold air can be introduced for rapid cooling; when the temperature is too low, hot air can be introduced for compensatory heating. This breaks the limitation of traditional single cooling methods that can only dissipate heat in one direction, effectively eliminates the temperature gradient inside the dielectric window 3, and makes the temperature of the central area and the edge area quickly become consistent, significantly improving the flexibility and process adaptability of temperature control, and meeting the stringent requirements of high-precision semiconductor processes for window temperature uniformity.

[0040] In some embodiments, such as Figure 2 As shown, the cooling temperature control unit 961 includes a cooling temperature control body 9611 and a cooling pipe 9612. The cooling temperature control body 9611 has a hollow interior and interfaces at both ends to connect the outlet of the air inlet 8 and the shell of the cooling pipe 9612. When the cooling gas flows through its interior, it exchanges heat with the cooling pipe 9612 to achieve cooling. The structure is simple, compact, and has high heat exchange efficiency. A cooling element is provided inside the shell. The cooling element can be a semiconductor refrigeration chip or a built-in refrigerant channel to enhance the cooling effect on the cooling gas and ensure that the temperature of the gas entering the cooling chamber 5 is stable and controllable.

[0041] In some embodiments, such as Figure 2 As shown, the cooling temperature control body 9611 connects the cooling pipe 9612 and the air outlet of the air inlet 8. The cooling pipe 9612 is connected to the air inlet channel 41. The cooling pipe 9612 includes several U-shaped segments and several arc segments, and each arc segment connects to two adjacent U-shaped segments.

[0042] By setting the cooling pipe 9612 as a structure in which several U-shaped sections and arc-shaped sections are alternately connected, the flow path and residence time of the cooling gas in the cooling temperature control body 9611 are effectively extended, so that the cooling gas can have a full and uniform heat exchange with the cooling temperature control body 9611, thereby significantly improving the cooling efficiency and temperature control stability. At the same time, the combination design of U-shaped and arc-shaped sections, while ensuring sufficient heat exchange area, makes the pipe layout more compact and flexible, which is convenient for optimized arrangement in the limited space of the insulation box 91, and enhances the structural adaptability and heat exchange reliability of the entire cooling temperature control section 961.

[0043] In some embodiments, the number of the first U-shaped segment can be two, three, or more; the number of the first arc-shaped segment can be one, two, three, or more.

[0044] In some embodiments, such as Figure 2 As shown, the thermostatic temperature control unit 962 includes a thermostatic temperature control body 9621 and a thermostatic pipe 9622. The thermostatic temperature control body 9621 has a hollow interior and interfaces at both ends to connect the outlet of the air inlet 8 and the shell of the thermostatic pipe 9622. When the cooling gas flows through its interior, it exchanges heat with the thermostatic pipe 9622 to achieve temperature increase. The structure is simple, compact, and has high heat exchange efficiency. A heating element is provided inside the shell. The heating element can be an electric heating wire or a heating rod embedded in the shell, which is used to actively heat the thermostatic pipe 9622, thereby raising the temperature of the flowing cooling gas to the required temperature and ensuring that the temperature of the heat compensation gas input into the cooling chamber 5 is stable and controllable.

[0045] In some embodiments, such as Figure 2 As shown, the heat-regulating body 9621 connects the heat-regulating pipe 9622 and the air outlet of the air inlet 8. The heat-regulating pipe 9622 is connected to the air inlet channel 41. The heat-regulating pipe 9622 includes several U-shaped segments and several arc-shaped segments, and each arc-shaped segment connects two adjacent U-shaped segments.

[0046] By setting the heat-regulating pipe 9622 as a structure in which several U-shaped segments and arc segments are alternately connected, the flow path and residence time of the cooling gas in the heat-regulating body 9621 are effectively extended, so that the cooling gas can fully and uniformly exchange heat with the heating element and the heat-regulating pipe 9622, thereby significantly improving the heating efficiency and the stability of temperature control. At the same time, the combination design of U-shape and arc shape makes the pipe layout more compact and flexible while ensuring sufficient heat exchange area, which is convenient for optimized arrangement in the limited space of the insulation box 91, and enhances the structural adaptability and heat exchange reliability of the entire heat-regulating part 962.

[0047] In some embodiments, the number of the second U-shaped segment can be two, three, or more; the number of the second arc-shaped segment can be one, two, three, or more.

[0048] In some embodiments, such as Figure 2 As shown, the temperature-controlled gas component 9 also includes a flexible hose 92, a rigid tube 93, a drive unit 94, and a connector 95.

[0049] In some embodiments, such as Figure 2 As shown, the top of the insulated box 91 is provided with a through hole 911.

[0050] In some embodiments, such as Figure 2As shown, the connector 95 is located inside the insulation box 91, and the rigid tube 93 is connected to the top of the connector 95. Its free end extends through the movable hole 911 to the outside of the insulation box 91 and communicates with the flexible tube 92. There is a moving gap between the circumferential outer wall of the rigid tube 93 and the inner wall of the movable hole 911. The free end of the flexible tube 92 communicates with the air outlet of the air inlet 8.

[0051] In some embodiments, such as Figure 2 As shown, the driving end of the driving unit 94 is connected to the rigid tube 93 to drive the rigid tube 93, along with the connector 95, to contact and conduct with the cold element temperature control unit 961, allowing cooling gas to enter the cooling chamber 5 through the cold element temperature control unit 961, or to contact and conduct with the hot element temperature control unit 962, allowing cooling gas to enter the cooling chamber 5 through the hot element temperature control unit 962.

[0052] In this embodiment, the drive unit 94 moves the rigid pipe unit 93 and the connector 95, enabling the connector 95 to selectively contact and conduct with the cold temperature regulating unit 961 or the hot temperature regulating unit 962. This achieves controllable switching of the cooling gas flow to the cold temperature regulating path and the hot temperature regulating path within the same gas temperature regulating element 9, eliminating the need for separate cold and hot gas supply branches and valves for each temperature zone, greatly simplifying the pipeline layout and reducing hardware costs. At the same time, this mechanical switching method is responsive and reliable, and can quickly select the input cold or hot gas based on real-time temperature feedback, accurately compensating for the temperature deviation of the corresponding area of ​​the medium window 3, effectively improving the regulation efficiency and operational stability of the temperature control system.

[0053] In some embodiments, such as Figure 2 and Figure 3 As shown, the connector 95 includes a sealed housing 951 and a plurality of sealing portions 952; the number of sealing portions 952 is consistent with the sum of the number of the cold temperature regulating portion 961 and the hot temperature regulating portion 962. Preferably, there are two sealing portions 952, and one cold temperature regulating portion 961 and one hot temperature regulating portion 962.

[0054] In some embodiments, such as Figure 3 As shown, the sealed box 951 is movably disposed inside the insulation box 91 and communicates with the rigid pipe section 93. The sealed box 951 has through holes 9511 on the side facing the cold element temperature control section 961 and the hot element temperature control section 962.

[0055] In some embodiments, such as Figure 3As shown, each of the sealing parts 952 is movably inserted into each of the through holes 9511, and each of the sealing parts 952 includes a fitting sealing section and an abutting section. The fitting sealing section is fitted to the inner sidewall of the sealing housing 951, and the orthographic projection structure of the fitting sealing section on the inner sidewall of the sealing housing 951 covers the inner outlet end of the through hole 9511. The abutting section is movably inserted into the through hole 9511, and its end away from the fitting sealing section extends to the outside of the sealing housing 951, so that when it abuts against the cold element temperature regulating part 961 or the hot element temperature regulating part 962, it moves into the sealing housing 951, thereby taking the fitting sealing section away from the inner sidewall of the sealing housing 951 and making the through hole 9511 open.

[0056] This design, by creating a segmented structure for the sealing section 952—combining a sealing section and a contact section—and utilizing the sealing section to cover the inner outlet end of the through hole 9511 to achieve a normally closed seal, allows the connector 95 to move under the drive of the drive unit 94 to contact the cold temperature regulating unit 961 or the hot temperature regulating unit 962. The contact section then moves into the sealing housing 951, causing the sealing section to detach from the inner wall of the sealing housing 951, thus quickly opening the through hole 9511. This achieves mechanical, on-demand opening of the cooling gas passage. This structure eliminates the need for additional solenoid valves to switch and seal the gas path, simplifying the control system and reducing hardware costs. Furthermore, the rapid response and high sealing reliability due to physical contact effectively prevent gas leakage or mis-connection, ensuring accurate switching of the cold and hot temperature regulating passages and stable operation of the entire temperature control system.

[0057] It is worth noting that the diameter of the contact section is smaller than the aperture of the through hole 9511; when the sealing section separates from the inner wall of the sealing box 951, and the cooling gas can enter the cold temperature regulating part 961 or the hot temperature regulating part 962, the sealing box 951 and the hot temperature regulating body 9621 or the cold temperature regulating body 9611 are arranged to abut against each other on their respective sides to achieve a seal at the connection between the two.

[0058] In some embodiments, such as Figure 3 As shown, the connector 95 also includes an elastic connecting part 953. The two ends of each elastic connecting part 953 are respectively fixed to the inner sidewall of the fitting sealing section and the sealing box 951, so as to shorten or lengthen when the fitting sealing section moves closer to or away from the cold element temperature regulating part 961 or the hot element temperature regulating part 962.

[0059] An elastic connection 953 is provided between the sealing section and the inner wall of the sealing housing 951. After the sealing section is squeezed by the cold temperature regulating part 961 or the hot temperature regulating part 962 and the sealing section is driven to disengage from the through hole 9511, the elastic connection 953 stores the reset potential energy by deformation. When the resisting force is removed, it automatically drives the sealing section to move in the opposite direction and re-fit tightly against the inner wall of the sealing housing 951, realizing the automatic closure and reliable sealing of the through hole 9511. There is no need to set up additional reset components such as springs, which simplifies the internal structure of the connector 95. At the same time, the extension and retraction of the elastic connection 953 is flexible and smooth, ensuring the timeliness of air circuit switching and the durability of the seal.

[0060] In some embodiments, the elastic connection 953 is preferably a helical spring.

[0061] In some embodiments, such as Figure 3 As shown, each of the fitting sealing sections is provided with a plurality of elastic connecting parts 953. The plurality of elastic connecting parts 953 are arranged at intervals along the circumference of the sealing part 952, and the two ends of the plurality of elastic connecting parts 953 are respectively located on two parallel axial surfaces.

[0062] By providing multiple elastic connecting parts 953 circumferentially spaced on each sealing section and fixing the two ends of each elastic connecting part 953 to two parallel axial surfaces, a uniform and symmetrical elastic restoring force can be provided along the circumferential direction of the sealing part 952. This ensures that the sealing section is balanced in force and does not become skewed during the reset process, and always maintains parallel contact with the inner wall of the sealing box 951, thereby avoiding local air leakage and further improving the sealing reliability when the through hole 9511 is closed. It also enhances the structural stability and service life of the connector 95 when switching between hot and cold air paths.

[0063] In some embodiments, such as Figure 1 As shown, the temperature-controlled reaction chamber 1 window also includes a gas distribution component 6. The gas distribution component 6 is preferably a flat annular block or a disc-shaped structure.

[0064] In some embodiments, such as Figure 1 As shown, the air distribution component 6 is located on the top of the cooling cover plate 4. An air distribution chamber 61 is provided in the air distribution component 6. The air inlet end of the air distribution chamber 61 is connected to the air outlet end of the air inlet component 8. Several air outlet ends of the air distribution chamber 61 are provided, and the air outlet end of each air distribution chamber 61 is connected to each of the air conditioning components 9.

[0065] By setting a gas distribution component 6 with a gas distribution chamber 61 on the top of the cooling cover plate 4, the single-path output of the air inlet component 8 is converted into a multi-path parallel output, and distributed to each gas temperature control component 9 accordingly. This realizes the centralized distribution and independent delivery of cooling gas to each area of ​​the medium window 3, which simplifies the pipeline connection, reduces the risk of leakage from external joints, and ensures the balance of gas supply pressure in each area, providing a reliable gas distribution basis for the synchronous and precise temperature control of multiple temperature zones.

[0066] It is worth noting that in this embodiment, the number of air intake components 8 is set to one.

[0067] In some embodiments, such as Figure 1 and Figure 4 As shown, the temperature-controlled reaction chamber 1 window also includes a support ring 10. The support ring 10 is preferably an annular structure.

[0068] In some embodiments, such as Figure 4 As shown, a number of air outlet channels 42 are arranged circumferentially on the side wall of the cooling cover plate 4, preferably at equal intervals; the number of air outlet channels 42 can be set to two, three or more.

[0069] In some embodiments, such as Figure 4 As shown, the support ring 10 is fixedly disposed on the outer side wall of the cooling cover plate 4. The support ring 10 has a circumferentially extending receiving cavity 101 that communicates with the suction component 7. The support ring 10 has several through holes 102 communicating with the receiving cavity 101, and each through hole 102 is connected to each of the air outlet channels 42. The number of through holes 102 is consistent with the number of air outlet channels 42.

[0070] This configuration, by fixing the support ring 10 to the outer wall of the cooling cover plate 4 and incorporating a circumferentially extending receiving cavity 101, and connecting several connecting holes 102 to each air outlet channel 42 in a one-to-one correspondence, forms a uniform air extraction channel surrounding the edge of the cooling cavity 5. This allows the heated gas to be extracted synchronously and evenly from multiple circumferential positions of the cooling cavity 5, avoiding airflow dead zones and local temperature accumulation caused by unilateral air extraction. This further promotes the uniformity of temperature distribution within the cooling cavity 5 and enhances the effect of temperature regulation on the edge area of ​​the medium window 3.

[0071] It is worth noting that the number of the air extraction components 7 is one.

[0072] In some embodiments, such as Figure 1As shown, the temperature-controlled reaction chamber 1 window also includes a shielding cover plate 11, which is located on the top of the reaction chamber 1 and forms a closed shielding cavity between the shielding cover plate 11 and the reaction chamber 1. The cooling cover plate 4, the air inlet 8 and the air extraction component 7 are all located inside the shielding cavity.

[0073] By concentrating temperature control components such as cooling cover plate 4, air inlet 8, and air extraction 7 within a closed shielded cavity formed by shielding cover plate 11 and reaction chamber 1, the external environment can be effectively isolated from the temperature control system, preventing external dust, moisture, or temperature fluctuations from affecting the temperature regulation accuracy of the cooling gas and the window temperature control effect. At the same time, the shielded cavity can also block the leakage of radio frequency radiation or plasma energy from the reaction chamber 1, protecting the safety of external equipment and operators.

[0074] In some embodiments, the shielding cover 11 is preferably an inverted cylindrical structure with a closed top and an open bottom, covering the top of the reaction chamber 1 and forming a closed shielding cavity together with the upper surface of the reaction chamber 1. This provides sufficient and regular installation space for the internal temperature control components and effectively isolates the interference of the external environment and the outward radiation of internal energy.

[0075] In some embodiments, the window of the temperature-controlled reaction chamber 1 further includes a first temperature sensor, a second temperature sensor, and a control module.

[0076] In some embodiments, the first temperature sensor and the second temperature sensor are respectively located in the central region and the edge region; the first temperature sensor, the second temperature sensor, the air inlet 8, the temperature-controlled atmosphere 9, and the air extraction device 7 are all connected to the control module, and the control module controls the temperature-controlled atmosphere 9, the air inlet 8, and the air extraction device 7 according to the temperatures of the central region and the edge region collected by the first temperature sensor and the second temperature sensor respectively.

[0077] This embodiment constructs a complete closed-loop feedback temperature control system by arranging a first temperature sensor and a second temperature sensor in the central and edge regions of the medium window 3, respectively, and connecting them to the control module along with the air inlet 8, the temperature-controlled atmosphere 9, and the air extraction component 7. This allows the control module to obtain the actual temperature at different locations of the window in real time and dynamically adjust the switching between hot and cold temperatures of each temperature-controlled atmosphere 9, the gas delivery volume of the air inlet 8, and the air extraction volume of the air extraction component 7. This achieves intelligent, automated, and precise control of the temperature distribution of the medium window 3, effectively eliminating the regional temperature difference between the central and edge regions, significantly reducing manual intervention, and improving the temperature control response speed and process consistency.

[0078] In some embodiments, the first temperature sensor and the second temperature sensor are preferably thermocouple sensors or infrared temperature sensors.

[0079] In some embodiments, the control module is preferably a programmable logic controller or an embedded microcontroller.

[0080] To address the problems existing in the prior art, embodiments of the present invention also provide a plasma processing device, such as... Figure 1 As shown, the plasma processing equipment includes a reaction chamber 1, a heating seat 2, a dielectric window 3, and a temperature-controlled reaction chamber 1 window. The heating seat 2 is located on the top of the reaction chamber 1, and the dielectric window 3 is located on the top of the heating seat 2.

[0081] In some embodiments, the plasma processing equipment can be an etching equipment, a resist stripping equipment, or a deposition equipment. These devices all require processing the wafer using plasma in a sealed chamber. The temperature-controlled reaction chamber 1 window provided by the present invention can ensure that the dielectric window 3 maintains a uniform and stable temperature distribution throughout the entire process, thereby effectively improving the stability of plasma excitation and process uniformity, and meeting the requirements of high-precision semiconductor manufacturing.

[0082] While embodiments of the present invention have been described in detail above, it will be apparent to those skilled in the art that various modifications and variations can be made to these embodiments. However, it should be understood that such modifications and variations fall within the scope and spirit of the present invention. Furthermore, the present invention described herein may have other embodiments and can be implemented or carried out in various ways.

Claims

1. A temperature-controlled reaction chamber window, characterized in that, Includes a cooling cover, air intake components, air extraction components, and several temperature-controlled air components; The cooling cover is located at the top of the medium window, and a closed cooling cavity is formed between the cooling cover and the medium window; The suction end of the suction component is connected to the cooling chamber; The air inlet is provided with a plurality of air outlets, and each air outlet of the air inlet is connected to the cooling chamber through a respective temperature-controlled gas element. The plurality of temperature-controlled gas elements are correspondingly arranged in the central area and the edge area of ​​the medium window. Based on the real-time temperature feedback of the central and edge regions, each of the air intake components dynamically adjusts the amount of cooling gas delivered to the corresponding region after being conditioned by each of the gas temperature control components, and / or the air extraction component dynamically adjusts the amount of heated gas extracted from the cooling chamber, so that the temperatures of the central and edge regions tend to be consistent.

2. The temperature-controlled reaction chamber window according to claim 1, characterized in that, Each of the aforementioned controlled atmosphere components includes an insulation box and a temperature control unit; The cooling cover plate is provided with a number of air intake channels that correspond one-to-one with the temperature-controlled air element. The heat preservation box is fixed to the top of the cooling cover plate; The temperature regulating unit is located inside the insulation box, and the air inlet of the temperature regulating unit is connected to the air outlet of the air inlet component, and its air outlet is connected to the air inlet channel, so that the cooling gas input by the air inlet component is regulated by the temperature regulating unit and then transported to the cooling chamber through the air inlet channel.

3. The temperature-controlled reaction chamber window according to claim 2, characterized in that, The temperature control unit includes a cold element temperature control unit and a hot element temperature control unit; The cold-electro-temperature regulating unit and the hot-electro-temperature regulating unit are alternately connected to the outlet end of the air inlet to selectively input cooling gas cooled by the cold-electro-temperature regulating unit or cooling gas heated by the hot-electro-temperature regulating unit into the corresponding region based on the real-time temperature of the corresponding region.

4. The temperature-controlled reaction chamber window according to claim 3, characterized in that, The cold temperature control unit includes a cold temperature control body and cooling pipes; The cooling temperature control body is connected to the cooling pipe and the air outlet of the air inlet component. The cooling pipe is connected to the air inlet channel. The cooling pipe includes several U-shaped segments and several arc-shaped segments, and each arc-shaped segment connects to two adjacent U-shaped segments.

5. The temperature-controlled reaction chamber window according to claim 3, characterized in that, The thermoelectric temperature control unit includes a temperature control body and a temperature control pipe; The temperature-regulating body is connected to the outlet end of the temperature-regulating pipe and the air inlet component. The temperature-regulating pipe is connected to the air inlet channel. The temperature-regulating pipe includes several U-shaped segments and several arc-shaped segments, and each arc-shaped segment connects two adjacent U-shaped segments.

6. The temperature-controlled reaction chamber window according to claim 3, characterized in that, The temperature-controlled gas component also includes a flexible tube section, a rigid tube section, a drive section, and a connector. The top of the insulated box is provided with a through-hole; The connector is located inside the insulation box. The rigid tube is connected to the top of the connector. Its free end extends through the movable hole to the outside of the insulation box and is connected to the flexible tube. The free end of the flexible tube is connected to the outlet of the air inlet. The driving end of the driving unit is connected to the rigid tube unit to drive the rigid tube unit, along with the connector, to contact and conduct with the cold element temperature control unit, allowing cooling gas to pass through the cold element temperature control unit and enter the cooling chamber, or to contact and conduct with the hot element temperature control unit, allowing cooling gas to pass through the hot element temperature control unit and enter the cooling chamber.

7. The temperature-controlled reaction chamber window according to claim 6, characterized in that, The connector includes a sealed housing and several sealing parts; The sealed box is movably disposed inside the insulation box and communicates with the rigid pipe section. The sealed box has through holes on the side facing the cold element temperature control section and the hot element temperature control section. Each of the sealing parts is movably inserted into each of the through holes, and each sealing part includes a fitting sealing section and an abutting section. The fitting sealing section is fitted to the inner sidewall of the sealing box, and the orthographic projection structure of the fitting sealing section on the inner sidewall of the sealing box covers the inner outlet end of the through hole. The abutting section is movably inserted into the through hole, and its end away from the fitting sealing section extends out of the sealing box so that when it comes into contact with the cold element temperature control part or the hot element temperature control part, it moves into the sealing box and takes the fitting sealing section away from the inner sidewall of the sealing box, thereby opening the through hole.

8. The temperature-controlled reaction chamber window according to claim 7, characterized in that, The connector also includes an elastic connection part, and the two ends of each elastic connection part are respectively fixed to the inner sidewall of the fitting sealing section and the sealing box, so as to shorten or lengthen when the fitting sealing section moves closer to or away from the cold element temperature control part or the hot element temperature control part; Each of the aforementioned fitting and sealing sections is provided with a plurality of elastic connecting parts, which are arranged at intervals along the circumference of the sealing section, and the two ends of the plurality of elastic connecting parts are respectively located on two parallel axial planes.

9. The temperature-controlled reaction chamber window according to claim 1, characterized in that, It also includes air distribution components; The air distribution component is located on the top of the cooling cover plate. An air distribution chamber is formed inside the air distribution component. The air inlet end of the air distribution chamber is connected to the air outlet end of the air inlet component. Several air outlet ends are provided in the air distribution chamber, and the air outlet end of each air distribution chamber is connected to each of the air conditioning components.

10. The temperature-controlled reaction chamber window according to claim 1, characterized in that, It also includes support ring components; The cooling cover plate has several air outlet channels arranged circumferentially on its side wall. The support ring is fixed on the outer side wall of the cooling cover plate. The support ring has a circumferentially extending receiving cavity that communicates with the air extraction component. The support ring has several through holes that communicate with the receiving cavity, and each of the through holes is connected to each of the air outlet channels.

11. The temperature-controlled reaction chamber window according to claim 1, characterized in that, It also includes a shielding cover plate, which is disposed on the top of the reaction chamber, and a closed shielding cavity is formed between the shielding cover plate and the reaction chamber. The cooling cover plate, the air inlet and the air extraction component are all disposed inside the shielding cavity.

12. The temperature-controlled reaction chamber window according to claim 1, characterized in that, It also includes a first temperature sensor, a second temperature sensor, and a control module; The first temperature sensor and the second temperature sensor are respectively located in the central region and the edge region; The first temperature sensor, the second temperature sensor, the air inlet, the temperature-controlled atmosphere device, and the air extraction device are all connected to the control module. The control module controls the temperature-controlled atmosphere device, the air inlet, and the air extraction device based on the temperatures of the central region and the edge region collected by the first temperature sensor and the second temperature sensor, respectively.

13. A plasma processing device, characterized in that, It includes a reaction chamber, a heating seat, a medium window, and a temperature-controlled reaction chamber window as described in any one of claims 1 to 12, wherein the heating seat is disposed on the top of the reaction chamber, and the medium window is disposed on the top of the heating seat.

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