A chip large carrier turnover device

Abstract

The application provides a chip large carrier turnover device, which comprises a crossbeam, a horizontal moving mechanism, rotating mechanisms and clamping mechanisms, the rotating mechanisms are two, symmetrically arranged at the two ends of the crossbeam, and the output ends of each rotating mechanism are connected with a clamping mechanism, which is used for driving the two clamping mechanisms to rotate synchronously; the clamping mechanism is used for clamping and fixing the carrier, the horizontal moving mechanism is arranged on the crossbeam and is used for driving the two rotating mechanisms to move towards or away from each other. The application has the advantages of simple structure, convenient operation, synchronous clamping of both sides during turnover, stable clamping, good stability of turnover operation and avoidance of the situation of turnover material falling.

Description

Technical Field

[0001] This invention relates to the field of semiconductor manufacturing equipment technology, and in particular to a flipping device for a large chip carrier. Background Technology

[0002] In the semiconductor industry, chips need to be packaged on a carrier during the manufacturing process, which is a large-area thin plate. There are often situations in chip manufacturing that require double-sided processing, meaning that after one side of the carrier is processed, it needs to be flipped to process the other side.

[0003] Existing flipping devices typically use grippers at the end of a robot to pick up the product from above and then flip the product using the robot's own degrees of freedom. Due to the large and thin nature of the carrier, this adsorption method is susceptible to unstable adsorption due to various factors, and there is a risk of material falling during flipping, resulting in huge losses. Summary of the Invention

[0004] The present invention aims to provide a flipping device for a large chip carrier to overcome the shortcomings of the prior art.

[0005] To solve the above-mentioned technical problems, the technical solution of the present invention is: a flipping device for a large chip carrier, comprising a crossbeam, a lateral movement mechanism, a rotation mechanism, and a clamping mechanism. Two rotation mechanisms are symmetrically arranged at both ends of the crossbeam, and the output end of each rotation mechanism is connected to a clamping mechanism to drive the two clamping mechanisms to rotate synchronously. The clamping mechanism is used to clamp and fix the carrier, and the lateral movement mechanism is located on the crossbeam to drive the two rotation mechanisms to move towards or away from each other. The rotating mechanism includes a mounting side plate, a servo motor, and a rotating shaft. The servo motor is located on the inner side of one end of the mounting side plate, and the rotating shaft is located on the other end of the mounting side plate. The servo motor has a gantry synchronization function. The rotating shaft is connected to the servo motor through a transmission component and is also connected to a clamping mechanism. The servo motor can drive the rotating shaft to rotate through the transmission component, thereby allowing the two clamping mechanisms to rotate synchronously.

[0006] Furthermore, in the aforementioned chip carrier flipping device, the transmission component is located on the outside of the mounting side plate and is a belt drive structure. Preferably, a protective cover covering the transmission component is provided on the outside of the mounting side plate.

[0007] Furthermore, in the aforementioned chip carrier flipping device, the transmission component is a synchronous belt transmission structure, including a main synchronous pulley, a slave synchronous pulley, and a synchronous belt. The main synchronous pulley is connected to the output shaft of the servo motor output end, and the slave synchronous pulley is connected to the main synchronous pulley via the synchronous belt. One end of the rotating shaft extends out of the outside of the mounting side plate and is fixedly connected to the slave synchronous pulley, while the other end is connected to the clamping mechanism.

[0008] Furthermore, in the aforementioned chip carrier flipping device, the rotating mechanism further includes a detection component, which includes a detection sensor and a sensing sheet. The detection sensor is located inside the mounting side plate, and the sensing sheet is located on the clamping mechanism. The detection sensor and the sensing sheet work together to detect whether the carrier has been flipped into place.

[0009] Furthermore, in the aforementioned chip carrier flipping device, the clamping mechanism has a clamping seat on the side near the rotating mechanism, the clamping seat has an insertion hole in the middle, the rotating shaft is inserted into the insertion hole, and at least one flat part is provided on the outer side of the end of the rotating shaft inserted into the insertion hole. The clamping seat is provided with multiple locking pins located on the outer side of the insertion hole. The rotating shaft is fixedly connected to the clamping seat through the cooperation of the flat part and the locking pins.

[0010] Furthermore, in the aforementioned chip carrier flipping device, the transverse mechanism includes a centering cylinder, a transverse seat, and a slide rail. The centering cylinder is located in the middle of the crossbeam, and its output end is provided with two symmetrically arranged transverse seats. Each transverse seat has a slider that is slidably connected to the slide rail below it. The slide rail is fixed on the crossbeam, and the two rotation mechanisms are correspondingly located above the two transverse seats.

[0011] Furthermore, in the aforementioned chip carrier flipping device, the clamping mechanism includes a connecting seat, a gripper cylinder, and a clamping plate. The gripper cylinder is mounted on the connecting seat, and its output end is provided with two clamping plates arranged opposite each other. The opposite sides of the two clamping plates are provided with elastic fixing blocks.

[0012] Furthermore, in the aforementioned chip carrier flipping device, each clamping plate is provided with two fixing blocks, which are symmetrically arranged at both ends of the clamping plate.

[0013] Furthermore, in the aforementioned chip carrier flipping device, the fixing block is made of ESD urethane adhesive.

[0014] Furthermore, the aforementioned chip carrier flipping device also includes a lifting mechanism, which is used to drive the crossbeam to move up and down. The lifting mechanism includes a linear motion module and a lifting seat located at the output end of the linear motion module. The crossbeam is fixed on the lifting seat. The linear motion module is a dust-free module that can drive the crossbeam to move in the up and down direction.

[0015] Preferably, each component of the flipping device is made of antistatic material and / or has an antistatic coating on its surface.

[0016] Compared with the prior art, the beneficial effects of the present invention are: the present invention has a simple structure, is easy to operate, and the clamping on both sides is synchronous and stable during flipping, the flipping operation has good stability, and it can avoid the situation of material falling off during flipping. Attached Figure Description

[0017] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments recorded in the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0018] Figure 1 This is a schematic diagram of the structure of the present invention; Figure 2 This is a partial structural diagram of the present invention; Figure 3 for Figure 2 A top-view structural diagram; Figure 4 This is a schematic diagram of the clamping mechanism of the present invention; In the diagram: 1. Crossbeam; 2. Lateral movement mechanism; 21. Centering cylinder; 22. Lateral movement seat; 23. Slide rail; 3. Rotating mechanism; 31. Mounting side plate; 32. Servo motor; 33. Rotating shaft; 34. Main synchronous pulley; 35. Slave synchronous pulley; 36. Synchronous belt and detection assembly; 37. Detection sensor; 38. Sensing plate; 4. Clamping mechanism; 41. Connecting seat; 42. Gripper cylinder; 43. Clamping plate; 44. Fixing block; 45. Clamping base; 5. Lifting mechanism; 51. Linear movement module; 52. Lifting seat; 6. Carrier. Detailed Implementation

[0019] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0020] Example like Figure 1-4 As shown, a flipping device for a large chip carrier includes a crossbeam 1, a transverse mechanism 2, a rotating mechanism 3, and a clamping mechanism 4. There are two rotating mechanisms 3, symmetrically arranged at both ends of the crossbeam 1, and the output end of each rotating mechanism 3 is connected to a clamping mechanism 4 to drive the two clamping mechanisms 4 to rotate synchronously. The clamping mechanism 4 is used to clamp and fix the carrier 6. The transverse mechanism 2 is located on the crossbeam 1 and is used to drive the two rotating mechanisms 3 to move towards each other or away from each other.

[0021] The rotating mechanism 3 includes a mounting side plate 31, a servo motor 32, and a rotating shaft 33. The servo motor 32 is located on the inner side of one end of the mounting side plate 31, and the rotating shaft 33 is located on the other end of the mounting side plate 31. The rotating shaft 33 is supported and mounted on the mounting side plate 31 by a bearing with a seat. The rotating shaft 33 is connected to the servo motor 32 through a transmission component. The rotating shaft 33 is also connected to the clamping mechanism 4. The servo motor 32 can drive the rotating shaft 33 to rotate through the transmission component, thereby allowing the two clamping mechanisms 4 to rotate synchronously.

[0022] In addition, the servo motor 32 and the reducer form a rotary drive. The servo motor 32 also has a gantry synchronization function. The gantry synchronization function of the servo motor ensures that the two independent servo axes of the same beam maintain strict position and speed synchronization during the movement, preventing mechanical twisting, vibration or damage caused by deviation. Ultimately, it allows the two clamping mechanisms 4 to rotate synchronously, ensuring that the product will not be torn due to the different speeds on both sides during the flipping process.

[0023] In the above structure, such as Figure 2 As shown, the transmission component is located on the outside of the mounting side plate 31 and is a belt drive structure. It should be noted that the transmission component is not limited to a belt drive structure; it can also be a gear drive structure, etc. In addition, a protective cover is provided on the outside of the mounting side plate 31 to cover the transmission component, protecting it and ensuring stable and safe transmission operation.

[0024] In this embodiment, as shown in the figure, the transmission component is a synchronous belt transmission structure, including a main synchronous pulley 34, a driven synchronous pulley 35, and a synchronous belt 36. The main synchronous pulley 34 is connected to the output shaft of the servo motor 32. The driven synchronous pulley 35 is connected to the main synchronous pulley 34 via the synchronous belt 36. One end of the rotating shaft 33 extends out of the outside of the mounting side plate 31 and is fixedly connected to the driven synchronous pulley 35, while the other end is connected to the clamping mechanism 4.

[0025] The rotating mechanism 3 also includes a detection component, which includes a detection sensor 37 and a sensing plate 38. The detection sensor 38 is located inside the mounting side plate 31, and the sensing plate 38 is located on the clamping mechanism 4. The detection sensor 37 and the sensing plate 38 work together to detect whether the carrier has rotated to the correct position. Specifically, there are two sensing plates 38, symmetrically arranged on both sides of the connecting seat 41, with the two sensing plates 38 corresponding to two operating states of the carrier.

[0026] In addition, to ensure a secure connection between the rotating shaft and the clamping mechanism, such as Figure 2-4As shown, the clamping mechanism 4 has a clamping seat 45 on the side near the rotating mechanism 3, that is, the clamping seat is fixed to the end of the connecting seat 41. The clamping seat 45 has an insertion hole in the middle, and the rotating shaft 33 is inserted into the insertion hole. The outer side of the end of the rotating shaft 33 inserted into the insertion hole has at least one flat part. The clamping seat 45 has multiple locking pins located on the outer side of the insertion hole. The rotating shaft 33 is fixedly connected to the clamping seat 45 through the cooperation of the flat part and the locking pin. In this embodiment, there are two flat parts, and each flat part has two corresponding locking pins, so the connection is stable.

[0027] Among them, such as Figure 1-3 As shown, the transverse movement mechanism 2 includes a centering cylinder 21, a transverse movement seat 22, and a slide rail 23. The centering cylinder 21 is located in the middle of the crossbeam 1, and its output end is provided with two symmetrically arranged transverse movement seats 22. Each transverse movement seat 22 is provided with a slider that is slidably connected to the slide rail 23 below it. The slide rail 23 is fixed on the crossbeam 1, and two rotating mechanisms 3 are correspondingly arranged above the two transverse movement seats 22.

[0028] like Figure 2-4 As shown, the clamping mechanism 4 includes a connecting seat 41, a gripper cylinder 42, and a clamping plate 43. The gripper cylinder 42 is mounted on the connecting seat 41, and its output end is provided with two clamping plates 43 arranged opposite to each other. The opposite sides of the two clamping plates 43 are provided with elastic fixing blocks 44.

[0029] To ensure stable clamping, each clamping plate 43 is equipped with two fixing blocks 44, which are symmetrically arranged at both ends of the clamping plate 43. The fixing blocks of the two clamping mechanisms respectively clamp the two side plates of the carrier. The two fixing blocks are spaced apart and clamp the two ends of the middle part of the side plates, ensuring stable clamping while ensuring the minimum clamping area.

[0030] In the above structure, the fixing block 44 is made of ESD urethane adhesive. ESD urethane adhesive combines the rigidity of plastic with the elasticity of rubber, and has high wear resistance, oil resistance, tear resistance and high load-bearing capacity. It can also prevent static electricity from damaging electronic components, and has the functions of cushioning and shock absorption and static protection, so as to prevent the carrier from sticking to the clamping plate when the clamping plate is released.

[0031] like Figure 1 As shown, the above-mentioned chip carrier flipping device also includes a lifting mechanism 5. The lifting mechanism 5 is used to drive the crossbeam 1 to rise and fall. It includes a linear motion module 51 and a lifting seat 52 located at the output end of the linear motion module 51. The crossbeam 1 is fixed on the lifting seat 52. The linear motion module 51 can drive the crossbeam 1 to move in the up and down direction, thereby adjusting the height of the carrier and making the carrier reach the flipping height to avoid collision damage to the carrier during flipping. In addition, the linear motion module 51 is a dust-free module to ensure the cleanliness of the operation.

[0032] In addition, the components of the aforementioned chip carrier flipping device are made of anti-static materials and / or coated with an anti-static layer to prevent the generation of static electricity or to discharge static electricity in a timely manner, thereby improving the operational safety of the device.

[0033] The working principle of this invention is as follows: After the carrier is loaded, the transverse mechanism 2 drives the two clamping mechanisms 4 to move towards each other. When the clamping plate 43 approaches the edge of the carrier, the clamping mechanism 4 starts to clamp both sides of the product and waits for the operation on the carrier surface one. After the operation is completed, the lifting mechanism 5 drives the crossbeam 1 to move up to the flipping height. Then the two rotating mechanisms 3 start synchronously, driving the clamping mechanism 4 and the carrier clamped on the clamping mechanism 4 to flip 180°, completing the product flipping. The operation on the carrier surface two can then begin. The entire flipping operation process is simple, fast, and has good operational stability.

[0034] In summary, the present invention has a simple structure, is easy to operate, and the clamping on both sides is synchronous and stable during flipping, resulting in good stability of the flipping operation and avoiding material falling during flipping.

[0035] It will be apparent to those skilled in the art that the present invention is not limited to the details of the exemplary embodiments described above, and that the invention can be implemented in other specific forms without departing from its spirit or essential characteristics. Therefore, the embodiments should be considered in all respects as exemplary and non-limiting, and the scope of the invention is defined by the appended claims rather than the foregoing description. Thus, all variations falling within the meaning and scope of equivalents of the claims are intended to be included within the present invention. No reference numerals in the claims should be construed as limiting the scope of the claims.

[0036] Furthermore, it should be understood that although this specification describes embodiments, not every embodiment contains only one independent technical solution. This narrative style is merely for clarity. Those skilled in the art should consider the specification as a whole, and the technical solutions in each embodiment can also be appropriately combined to form other embodiments that can be understood by those skilled in the art.

Claims

1. A flipping device for a large chip carrier, characterized in that: It includes a crossbeam, a lateral movement mechanism, a rotation mechanism, and a clamping mechanism. There are two rotation mechanisms, symmetrically arranged at both ends of the crossbeam, and the output end of each rotation mechanism is connected to a clamping mechanism to drive the two clamping mechanisms to rotate synchronously. The clamping mechanism is used to clamp and fix the carrier. The lateral movement mechanism is located on the crossbeam and is used to drive the two rotation mechanisms to move towards each other or away from each other. The rotating mechanism includes a mounting side plate, a servo motor, and a rotating shaft. The servo motor is located on the inner side of one end of the mounting side plate, and the rotating shaft is located on the other end of the mounting side plate. The servo motor has a gantry synchronization function. The rotating shaft is connected to the servo motor through a transmission component and is also connected to a clamping mechanism. The servo motor can drive the rotating shaft to rotate through the transmission component, thereby allowing the two clamping mechanisms to rotate synchronously.

2. The chip carrier flipping device according to claim 1, characterized in that: The transmission component is located on the outside of the mounting side plate and is a belt drive structure.

3. The chip carrier flipping device according to claim 2, characterized in that: The transmission component is a synchronous belt drive structure, including a main synchronous pulley, a driven synchronous pulley, and a synchronous belt. The main synchronous pulley is connected to the output shaft of the servo motor output end. The driven synchronous pulley is connected to the main synchronous pulley via the synchronous belt. One end of the rotating shaft extends out of the outside of the mounting side plate and is fixedly connected to the driven synchronous pulley, while the other end is connected to the clamping mechanism.

4. The chip carrier flipping device according to claim 1, characterized in that: The rotating mechanism also includes a detection component, which includes a detection sensor and a sensing plate. The detection sensor is located inside the mounting side plate, and the sensing plate is located on the clamping mechanism. The detection sensor and the sensing plate work together to detect whether the carrier has been rotated into position.

5. The chip carrier flipping device according to claim 1, characterized in that: The clamping mechanism has a clamping seat on the side near the rotating mechanism. The clamping seat has an insertion hole in the middle. The rotating shaft is inserted into the insertion hole, and at least one flat part is provided on the outer side of the end of the rotating shaft inserted into the insertion hole. The clamping seat has multiple locking pins located on the outer side of the insertion hole. The rotating shaft is fixedly connected to the clamping seat through the cooperation of the flat part and the locking pin.

6. The chip carrier flipping device according to claim 1, characterized in that: The transverse movement mechanism includes a centering cylinder, a transverse movement seat, and a slide rail. The centering cylinder is located in the middle of the crossbeam, and its output end is provided with two symmetrically arranged transverse movement seats. Each transverse movement seat is provided with a slider that is slidably connected to the slide rail below it. The slide rail is fixed on the crossbeam, and the two rotation mechanisms are correspondingly located above the two transverse movement seats.

7. The chip carrier flipping device according to claim 1, characterized in that: The clamping mechanism includes a connecting seat, a gripper cylinder, and a clamping plate. The gripper cylinder is mounted on the connecting seat, and its output end is provided with two clamping plates arranged opposite each other. The opposite sides of the two clamping plates are provided with elastic fixing blocks.

8. The chip carrier flipping device according to claim 7, characterized in that: Each clamping plate is provided with two fixing blocks, which are symmetrically arranged at both ends of the clamping plate.

9. The chip carrier flipping device according to claim 7, characterized in that: The fixing block is made of ESD urethane adhesive.

10. The chip carrier flipping device according to claim 1, characterized in that: It also includes a lifting mechanism for driving the crossbeam to move up and down. The lifting mechanism includes a linear motion module and a lifting seat located at the output end of the linear motion module. The crossbeam is fixed on the lifting seat. The linear motion module is a dust-free module that can drive the crossbeam to move in the up and down direction.

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