An oxidation-resistant composite wedge-shaped chopper and a preparation method thereof

Abstract

The application discloses an oxidation-preventing composite wedge-shaped cleaving knife and a preparation method thereof, and relates to the field of semiconductor processing tools.The device comprises an integrated wedge-shaped cleaving knife body, a sensor matrix module, a protection execution module and a control terminal module, the internal wire feeding through hole of the cleaving knife simultaneously serves as a metal wire channel and a protection medium channel, a hierarchical health index fusion algorithm is built in the control terminal, sensor data is calculated and fused into a continuous cleaving knife health index according to different fusion rules corresponding to different failure mechanisms, and all protection medium pulse injections are executed within a non-welding idle window of a bonding cycle.The device is prevented from being worn by physical contact cleaning on the cleaving knife tip and from being disturbed by airflow on the welding point precision through non-contact pulse protection of the internal channel of time sequence hard isolation;false alarm rate is reduced, and fixed counting is changed into accurate on-demand maintenance based on actual deterioration degree.

Description

Technical Field

[0001] This invention relates to the field of semiconductor processing tools, and in particular to an anti-oxidation composite wedge-shaped cleaver and its preparation method. Background Technology

[0002] Semiconductor wire bonding is a core process in chip packaging, and the wedge-shaped bonding tool, as a key tool in ultrasonic bonding, directly affects the solder joint quality and packaging yield. As chip pad spacing decreases to the micrometer level, higher demands are placed on the precision, lifespan, and reliability of the wedge-shaped bonding tool.

[0003] Regarding the structure of the cleaver, there are several improved solutions in the existing technology. Chinese Patent Publication CN121075935A discloses a side-entry ultra-fine pitch welding wire cleaver structure, which uses a gear block rotation mechanism to switch between two cleaver bodies. When one cleaver reaches a preset number of uses, the rotation mechanism switches it to a standby position, and a micro-motor drives a cleaning head to contact the cleaver tip, removing contaminants through physical friction. This solution also uses a counter to track the number of cleaver uses and switching times, prompting for replacement when a threshold is reached. Chinese Patent Publication CN121034975A ​​discloses an adjustable cleaver for narrow-pitch welding, which features a telescopic part and a detachable splicing part on the cleaver body. The cleaver length is adjusted via a screw and nut mechanism, and the bottleneck part with different end shapes can be replaced. Furthermore, the integrated wedge-shaped cleaver remains the mainstream choice in the industry due to its simple structure and high ultrasonic transmission efficiency.

[0004] In the aforementioned prior art, the gear block rotation mechanism in CN121075935A introduces a rotational gap between the ultrasonic generator and the chopping blade, while the telescopic and splicing parts in CN121034975A ​​introduce sliding and locking gaps on the chopping blade body. These mechanical interfaces are located on the ultrasonic vibration transmission path, causing acoustic impedance mismatch under micron-level ultrasonic amplitude, resulting in ultrasonic energy reflection and dissipation at the interfaces, making it impossible to stably transmit to the chopping blade tip. Furthermore, CN121075935A uses a cleaning head to clean the chopping blade tip through physical contact. The contact between the cleaning head and the cleaver carries the risk of abrasion on the cleaver tip or incomplete cleaning, and this method cannot clean the wire feeding hole wall inside the cleaver. Finally, CN121075935A determines the timing of cleaver replacement only through a simple counting method, without sensing the actual working state of the cleaver, which can easily lead to the premature replacement of still usable cleavers or the continued use of deteriorated cleavers. Existing technologies also lack the means to perform targeted fusion processing of data from multiple sensors for different failure modes and to adaptively adjust the protection strategy according to the actual degree of deterioration of the cleaver. Summary of the Invention

[0005] To address the shortcomings of existing technologies, this invention provides an anti-oxidation composite wedge-shaped chopping tool and its preparation method to solve the aforementioned problems.

[0006] To achieve the above objectives, the present invention provides the following technical solution: an anti-oxidation composite wedge-shaped chopping knife and its preparation method, comprising:

[0007] The system comprises a cleaving action module, a sensor matrix module, a protection action module, and a control terminal module.

[0008] The chopping knife execution module includes an integrated wedge-shaped chopping knife body, which has an axially penetrating wire feeding through hole inside. The wire feeding through hole serves as both a metal wire channel and a protective medium channel.

[0009] The sensor matrix module is used to collect working status parameters corresponding to various failure modes of the cleaver.

[0010] The protective execution module is used to pulse-feed the protective medium to the tip of the cutting tool through the wire feeding through hole during the non-welding window period.

[0011] The control terminal module has a built-in hierarchical health index fusion algorithm, which is used to calculate and fuse the data collected by the sensor matrix module into a continuous cleaving health index according to different fusion rules corresponding to different failure mechanisms, and adjust the action parameters of the protection execution module according to the health index.

[0012] All protective actions of the protection execution module are limited to the non-welding idle window after the second solder joint wire breaks in the bonding cycle and before the start of the next cycle wire feeding.

[0013] Preferably, the chopping execution module further includes:

[0014] A chopping block holder, connected to the top of the wedge-shaped chopping block body, is used to fix the wedge-shaped chopping block body to the ultrasonic transducer, and the chopping block holder serves as a vibration node;

[0015] The foot surface, located at the bottom end of the wedge-shaped cutter body, is used to contact the solder pad during bonding;

[0016] An oblique wire feeding hole is provided on the oblique surface at the bottom of the wedge-shaped chopping blade body. One end of the hole is connected to the wire feeding through hole, and the other end extends through to the foot surface.

[0017] Multiple sets of longitudinal grooves are provided on the inner wall of the wire feeding through hole along the axial direction to increase the heat dissipation area of ​​the inner wall and form an airflow channel, while retaining the axial ridges of the inner wall that contact the metal wire.

[0018] Preferably, the sensor matrix module includes:

[0019] Impedance phase analyzer, integrated in the ultrasonic generator control cabinet, is used to measure resonant resistance and resonant frequency in real time;

[0020] An infrared temperature sensor is mounted on the side bracket of the bonding head and is non-contactly aligned with the handle of the cleaver to measure the handle temperature in real time.

[0021] A high-speed vision camera, installed inside the device and aimed at the tip of the chopping knife, is used to measure the width of the foot and detect foreign objects at the tip.

[0022] The Z-axis force sensor is integrated into the Z-axis motion module of the bonding head and is used to record the bonding force curve in real time.

[0023] An acoustic emission sensor is attached to the vibration node on the outer surface of the cleaver holder to capture high-frequency stress wave signals generated by the propagation of microcracks.

[0024] Preferably, the protection execution module includes:

[0025] A high-speed solenoid valve, the outlet of which is sealed and connected to the top opening of the wire feeding through hole, is used to control the pulse injection of the protective medium;

[0026] An electric proportional valve is used to continuously regulate injection pressure;

[0027] A multi-source gas switching valve assembly is used to switch between different injection media, wherein the injection media includes at least pure nitrogen and a nitrogen-hydrogen mixture.

[0028] Preferably, the hierarchical health index fusion algorithm built into the control terminal module specifically includes the calculation of three secondary indices and the fusion of one primary index:

[0029] The tribo-oxidation index is calculated based on the product of the relative increase in resonant resistance and the relative increase in tool holder temperature.

[0030] The wear and contamination index is calculated based on the weighted sum of the current relative wear on the sole surface and the current relative change in the high-frequency fluctuation energy of the force curve.

[0031] The micro-damage rejection index is triggered by a dual condition and logic based on the current statistical value of the acoustic emission event count and the current irreversible decrease in the resonant frequency.

[0032] The primary index is the knife health index, which is obtained by subtracting the weighted sum of the friction oxidation index and the wear and contamination index from the full score, and is subject to the veto constraint of the micro-damage rejection index.

[0033] Preferably, the formula for calculating the tribo-oxidation index is:

[0034] ,in:

[0035] For real-time resonant resistance, The baseline resonant resistance under healthy conditions; For real-time tool holder temperature, The baseline temperature is the temperature under healthy conditions. This product structure utilizes the synergistic effect of physical cause and effect, which is that increased friction inevitably leads to increased damping and increased heat generation, to filter false alarms caused by single sensor drift.

[0036] Preferably, the formula for calculating the wear and contamination index is:

[0037] ,in:

[0038] For real-time foot width, This is the initial width of the foot surface; The root mean square value of the high-frequency component of the force curve during the contact stabilization phase, after removing the low-frequency trend component using a first-order difference method. Its baseline value under healthy conditions; , These are the normalized weighting coefficients.

[0039] Preferably, the triggering condition for the micro-damage rejection index is that two conditions are met simultaneously:

[0040] Condition 1: The count of acoustic emission events exceeding a threshold within the most recent K welding cycles. Greater than the preset threshold , where K is a preset statistical window parameter;

[0041] Condition 2: The resonant frequency after temperature compensation is lower than the initial resonant frequency for M consecutive cycles. And the difference exceeds the preset threshold , where M is the preset statistical window parameter;

[0042] When the micro-damage rejection index is triggered, the health index of the chopping knife is directly set to zero, ignoring the current values ​​of other indices, and the system forcibly issues an alarm to replace the chopping knife.

[0043] Preferably, the health index of the chopping knife The calculation introduces the veto multiplier When the micro-damage veto index is triggered ,otherwise ;

[0044] The calculation formula is:

[0045] ,in:

[0046] , These are the weighting coefficients. The tribo-oxidation index as described in the claims, The wear and contamination index as described in the claims;

[0047] The control terminal module continuously and proportionally determines the injection pulse duration and injection pressure based on the value of the cleaver health index. The injection medium adopts a dual-threshold hysteresis switching. When the health index drops from high to low below the lower threshold, it switches to a nitrogen-hydrogen mixture. When it rises from low to high above the upper threshold, it reverts to pure nitrogen. The upper threshold is higher than the lower threshold.

[0048] Preferably, the procedure includes the following steps:

[0049] S1. Real-time acquisition: During each bonding cycle, the sensor matrix module acquires data in real time, including resonant resistance, tool holder temperature, foot width, force curve, and acoustic emission signal.

[0050] S2. Window Determination: Determine whether the current window is a non-welding idle window after the second weld point wire breakage is completed and before the start of the next wire feeding cycle; if yes, proceed to step S3; if no, the protection execution module remains closed and return to step S1.

[0051] S3. Layered calculation: Within the non-welding idle window, the friction oxidation index and wear contamination index are calculated based on the data collected in step S1, and the determination status of the micro-damage rejection index is updated.

[0052] S4. Health Fusion: The secondary indices calculated in step S3 are fused and output according to the rules of weighted fusion and veto.

[0053] S5. Parameter Mapping and Execution: Based on the value of the health index of the splitting blade, continuously and proportionally determine the pulse duration and injection pressure of this injection, and switch the injection medium in segments according to the comparison results of the health index and the dual thresholds; drive the protection execution module to perform a pulse injection action towards the tip of the splitting blade through the wire feeding through hole;

[0054] S6. Reset: After the spraying action is completed, the protection execution module is turned off, the next cycle begins, and the process returns to step S1.

[0055] The technical effects and advantages of this invention are as follows:

[0056] The device adopts an integrated wedge-shaped cutting blade structure, and there are no movable or detachable mechanical interfaces on the ultrasonic vibration transmission path. This fundamentally avoids the acoustic impedance mismatch problem caused by rotation gap, sliding gap or snap gap in the rotary switching mechanism or telescopic splicing mechanism, ensuring that ultrasonic energy can be continuously and stably transmitted to the tip of the cutting blade, providing a reliable physical basis for subsequent intelligent monitoring and adaptive protection.

[0057] The device utilizes the existing wire feeding through-hole inside the wedge as a protective medium channel, and strictly limits the pulse jet of the protective medium to be executed within the non-welding idle window after the second weld point is broken and before the start of the next cycle of wire feeding. This timing hard isolation mechanism makes the protective action and the ultrasonic bonding action absolutely mutually exclusive in time, which not only achieves cooling and purging of the inner wall of the wire feeding hole and non-contact cleaning of the wedge tip, but also completely avoids the interference of airflow on the tail wire shape and weld point forming accuracy. It solves the problems of wear on the wedge tip, inability to clean the internal hole wall, and continuous air blowing interference with ultra-fine pitch bonding that exist in physical contact cleaning methods.

[0058] The device's hierarchical health index fusion algorithm targets three different failure modes of the chopping blade—frictional oxidation, wear and contamination, and micro-damage—and applies three different fusion rules: multiplicative, weighted summation, and rejection. The multiplicative fusion rule utilizes the physical causal relationship that increased friction inevitably leads to both increased impedance and temperature, effectively filtering false alarms caused by single-sensor drift. The weighted summation fusion rule integrates information from two dimensions: progressive wear on the sole surface and sudden anomalies in the force signal. The rejection fusion rule sets the highest priority for catastrophic failures such as micro-cracks, preventing their signals from being diluted during the weighting process. The secondary indices output by the three rules are then fused into a continuous chopping blade health index, achieving a quantitative assessment of the actual deterioration state of the chopping blade. This solves the problems of existing counting-based replacement methods failing to distinguish the true state of the chopping blade and the lack of targeted fusion processing in simply juxtaposing multiple sensors.

[0059] The device's control terminal proportionally adjusts the duration and pressure of the spray pulses based on the continuous values ​​of the blade's health index. When the health index falls below a preset threshold, it automatically switches the spray medium to perform restorative cleaning, forming an adaptive closed loop that corresponds to the decline in health status and the upgrade in protection strength. This method transforms the maintenance decision for blades from fixed-count replacement to precise on-demand maintenance based on the actual degree of deterioration. It avoids the waste caused by prematurely replacing still-usable blades and also prevents the continued use of deteriorated blades, which would lead to a decline in bonding quality. Attached Figure Description

[0060] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0061] Figure 1 This is a schematic diagram of the overall front structure of the present invention;

[0062] Figure 2 This is a schematic diagram of the overall bottom structure of the present invention;

[0063] Figure 3 This is a schematic diagram of the overall cross-sectional structure of the present invention;

[0064] Figure 4 This is a diagram of the overall system architecture of the present invention;

[0065] Figure 5 This is a flowchart of the internal processing of the control terminal of the present invention;

[0066] Figure 6 This is a mapping diagram from the health index to the injection parameters of this invention;

[0067] Figure 7 This is a flowchart of the preparation method of the present invention.

[0068] In the diagram: 1. Wedge-shaped cutting tool; 11. Foot support surface; 2. Cutting tool seat; 3. Wire feeding through hole; 4. Longitudinal groove; 5. Angled wire feeding hole. Detailed Implementation

[0069] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0070] To better understand the above technical solutions, the following will provide a detailed explanation of the technical solutions in conjunction with the accompanying drawings and specific implementation methods.

[0071] This invention discloses an anti-oxidation composite wedge-shaped chopping knife and its preparation method, according to the appendix. Figures 1 to 4 As shown, it includes:

[0072] The system comprises a cleaving action module, a sensor matrix module, a protection action module, and a control terminal module.

[0073] The chopping knife execution module includes an integrated wedge-shaped chopping knife body 1, which has an axially penetrating wire feeding through hole 3 inside. The wire feeding through hole 3 serves as both a metal wire channel and a protective medium channel.

[0074] The sensor matrix module is used to collect working status parameters corresponding to various failure modes of the cutting blade;

[0075] The protective execution module is used to pulse-feed the protective medium to the tip of the cutting tool through the wire feed through hole 3 during non-welding window periods.

[0076] The control terminal module has a built-in hierarchical health index fusion algorithm, which is used to calculate and fuse the data collected by the sensor matrix module into a continuous cleaver health index according to different fusion rules corresponding to different failure mechanisms, and adjust the action parameters of the protection execution module according to the health index.

[0077] All protective actions of the protection execution module are limited to the non-welding idle window after the second solder joint wire breaks in the bonding cycle and before the start of the next cycle wire feeding.

[0078] In this embodiment, the system integrates the cleaving blade execution module, sensor matrix module, protection execution module, and control terminal module into a closed-loop intelligent protection system. It does not require the addition of external motion nozzles around the tip of the cleaving blade, but reuses the original wire feeding through hole of the cleaving blade as the protection medium channel, and uses the control terminal to realize hierarchical fusion of sensor data and adaptive control of protection actions. In addition, by using time-series hard isolation, all protection actions are limited to the non-welding window, which fundamentally avoids interference with the ultrasonic bonding process.

[0079] According to the appendix Figures 1 to 3 As shown, the cleaver execution module further includes:

[0080] The wedge-shaped wedge holder 2 is connected to the top of the wedge-shaped wedge body 1 and is used to fix the wedge-shaped wedge body 1 to the ultrasonic transducer. The wedge holder 2 serves as a vibration node.

[0081] The foot surface 11 is located at the bottom end of the wedge-shaped cutter body 1 and is used to contact the solder pad during bonding.

[0082] An oblique wire feeding hole 5 is opened on the oblique surface at the bottom of the wedge-shaped chopping knife body 1. One end of the hole is connected to the wire feeding through hole 3, and the other end extends through to the foot surface 11.

[0083] Multiple sets of longitudinal grooves 4 are provided on the inner wall of the wire feeding through hole 3 along the axial direction to increase the heat dissipation area of ​​the inner wall and form an airflow channel, while retaining the axial ridges of the inner wall that contact the metal wire.

[0084] In this embodiment, the longitudinal groove extends axially along the inner wall of the wire feeding through hole. Its function is to increase the surface area of ​​the inner wall to improve heat dissipation capacity and airflow cross section, while retaining the axial ridges of the inner wall in contact with the metal wire. These ridges constitute the transmission path of ultrasonic vibration energy coupling from the chopper body to the metal wire. The longitudinal groove is set along the axial direction, which does not destroy the continuity of the circumferential structure of the chopper body and avoids stress concentration caused by transverse grooves or threaded grooves and their weakening of ultrasonic vibration transmission.

[0085] According to the appendix Figures 1 to 4 As shown, the sensor matrix module further includes:

[0086] Impedance phase analyzer, integrated in the ultrasonic generator control cabinet, is used to measure resonant resistance and resonant frequency in real time;

[0087] An infrared temperature sensor is mounted on the side bracket of the bonding head and is non-contactly aligned with the handle of the cleaver to measure the handle temperature in real time.

[0088] A high-speed vision camera, installed inside the device and aimed at the tip of the chopping blade, is used to measure the width of the foot surface 11 and detect foreign objects at the tip.

[0089] The Z-axis force sensor is integrated into the Z-axis motion module of the bonding head and is used to record the bonding force curve in real time.

[0090] An acoustic emission sensor is attached to the vibration node on the outer surface of the chopping block 2 to capture high-frequency stress wave signals generated by the propagation of microcracks.

[0091] In this embodiment, the installation positions of each sensor are determined based on its measurement principle and the requirement to avoid interference with the transmission of ultrasonic vibrations: the impedance phase analyzer is integrated into the control cabinet of the ultrasonic generator and indirectly measures the mechanical damping state of the chopping knife through electrical signals; the infrared temperature sensor is non-contactly aligned with the vibration node area of ​​the chopping knife handle; the acoustic emission sensor is attached to the vibration node on the outer surface of the chopping knife base to isolate the ultrasonic main frequency interference from both physical location and frequency domain; the high-speed vision camera and the Z-axis force sensor measure through optical non-contact methods and force transmission paths, respectively, without intervening in the ultrasonic vibration system of the chopping knife.

[0092] According to the appendix Figures 1 to 4 As shown, the protection execution module further includes:

[0093] A high-speed solenoid valve, whose outlet seal is connected to the top opening of the wire feeding through hole 3, is used to control the pulse injection of the protective medium;

[0094] An electric proportional valve is used to continuously regulate injection pressure;

[0095] A multi-source gas switching valve assembly is used to switch between different injection media, which include at least pure nitrogen and nitrogen-hydrogen mixture.

[0096] In this embodiment, the outlet seal of the high-speed solenoid valve is connected to the top opening of the wire feeding through hole to ensure that all protective medium pulses enter the wire feeding through hole; the electro-proportional valve is used to continuously adjust the output pressure within the injection pressure range; the multi-way gas source switching valve group is used to switch between pure nitrogen and nitrogen-hydrogen mixture, wherein pure nitrogen is used for routine cooling, purging and tail wire alignment, and nitrogen-hydrogen mixture is used for online reduction and cleaning of the oxidized inner wall of the cleaver.

[0097] According to the appendix Figures 1 to 6 As shown, the hierarchical health index fusion algorithm built into the control terminal module, which is specifically disclosed, includes the calculation of three secondary indices and the fusion of one primary index:

[0098] The tribo-oxidation index is calculated based on the product of the relative increase in resonant resistance and the relative increase in tool holder temperature.

[0099] The wear and contamination index is calculated based on the weighted sum of the current relative wear on the sole surface 11 and the current relative change in the high-frequency fluctuation energy of the force curve;

[0100] The micro-damage rejection index is triggered by a dual condition and logic based on the current statistical value of the acoustic emission event count and the current irreversible decrease in the resonant frequency.

[0101] The primary index is the knife health index, which is obtained by subtracting the weighted sum of the friction oxidation index and wear and contamination index from the full score, and is subject to the veto constraint of the micro-damage veto index.

[0102] In this embodiment, the core of the hierarchical health index fusion algorithm lies in matching three different information fusion rules for the three different failure modes of the splitting knife with different physical properties:

[0103] Triboelectric oxidation failures are governed by a multiplicative fusion rule, wear and contamination failures by a weighted summation fusion rule, and micro-damage failures by a rejection fusion rule.

[0104] Among them, the multiplicative fusion rule utilizes the physical causal relationship that increased friction inevitably leads to increased damping and increased heat generation, filtering out false alarms caused by drift of a single sensor; the weighted summation fusion rule integrates information from two dimensions: progressive wear and sudden contamination; the veto fusion rule sets the highest priority for handling catastrophic failure modes to avoid their signals being diluted by smooth weighting; the three fusion rules output three secondary indices, which are then fused into a continuous cleaver health index.

[0105] According to the appendix Figures 1 to 6 As shown, the formula for calculating the tribo-oxidation index is as follows:

[0106] ,in:

[0107] For real-time resonant resistance, The baseline resonant resistance under healthy conditions; For real-time tool holder temperature, The baseline temperature is the temperature under healthy conditions. This product structure utilizes the synergistic effect of physical cause and effect, which is that increased friction inevitably leads to increased damping and increased heat generation, to filter false alarms caused by single sensor drift.

[0108] In this embodiment, the tribo-oxidation index The calculation uses the product of the relative increase in resonant resistance and the relative increase in tool holder temperature; The resonant resistance is measured in real time by an impedance phase analyzer. The average resonant resistance measured by running the new cleaver under standard bonding cycles at normal operating temperature; The temperature of the tool holder is measured in real time by an infrared temperature sensor. The average temperature of the handle of the new cleaver after it reaches thermal equilibrium under the same working conditions; The function outputs a positive value only when the parameter rises relative to the baseline, and sets it to zero when it falls or remains unchanged, thus achieving a filtering effect that prevents false alarms from being generated by single sensor anomalies.

[0109] According to the appendix Figures 1 to 6 As shown, the formula for calculating the wear and contamination index, which is specifically disclosed, is as follows:

[0110] ,in:

[0111] For real-time foot width of 11, The initial width of the foot surface is 11. The root mean square value of the high-frequency component of the force curve during the contact stabilization phase, after removing the low-frequency trend component using a first-order difference method. Its baseline value under healthy conditions; , These are the normalized weighting coefficients.

[0112] In this embodiment, the wear and contamination index The weighted sum of the relative wear on the sole surface of the foot and the relative change in the high-frequency fluctuation energy of the force curve was used. The width of the foot surface measured in real time by a high-speed vision camera. The initial foot width measured for the first time with a new cleaver; The high-frequency fluctuation energy of the force curve is calculated as follows: extract the force signal recorded by the Z-axis force sensor during the contact stabilization phase, remove the low-frequency trend component by first-order difference, and then calculate the root mean square value of the remaining high-frequency component. This represents the baseline mean of the fluctuating energy of the newly cleaving blade in a healthy state; weighting coefficients. and According to the conditions when the sole of the foot wears to the preset replacement limit and the force fluctuation energy increases to the preset severe abnormal value, two measures are taken. The criteria are determined based on the principle of equal contribution.

[0113] According to the appendix Figures 1 to 6 As shown, it is important to emphasize that the triggering condition for the micro-damage rejection index is that two conditions must be met simultaneously:

[0114] Condition 1: The count of acoustic emission events exceeding a threshold within the most recent K welding cycles. Greater than the preset threshold , where K is a preset statistical window parameter;

[0115] Condition 2: The resonant frequency after temperature compensation is lower than the initial resonant frequency for M consecutive cycles. And the difference exceeds the preset threshold , where M is the preset statistical window parameter;

[0116] When the micro-damage rejection index is triggered, the health index of the chopping knife is directly set to zero, ignoring the current values ​​of other indices, and the system forcibly issues an alarm to replace the chopping knife.

[0117] In this embodiment, the micro-damage rejection index is triggered only if two conditions are met simultaneously:

[0118] In condition one, Count the acoustic emission events that exceed the background noise threshold within the most recent K welding cycles. Add a preset multiple of the standard deviation to the mean of the acoustic emission event counts during the calibration phase of the new cleaver;

[0119] In condition two, the determination of the irreversible decrease in resonant frequency introduces a temperature compensation mechanism. Based on the measured temperature of the tool holder, the resonant frequency is linearly corrected for temperature drift, eliminating frequency shifts caused by temperature fluctuations. The temperature-compensated resonant frequency remains lower than the initial resonant frequency for M consecutive cycles. And the difference exceeds At that time, it was determined to be an irreversible decline. The preset multiple of the normal fluctuation range of the frequency during the calibration stage is selected; the value of K is selected to make the statistical window cover the typical number of cycles from the initiation of microcracks to the detectable expansion; the value of M is selected to balance the response speed and anti-interference ability; once the micro-damage rejection index is triggered, the blade health index is directly set to zero and an alarm is forced, which is not changed by the current value of other indices.

[0120] According to the appendix Figures 1 to 6 As shown, it is particularly important to emphasize the health index of the splitting knife. The calculation introduces the veto multiplier When the micro-damage veto index is triggered ,otherwise ;

[0121] The calculation formula is:

[0122] ,in:

[0123] , These are the weighting coefficients. The tribo-oxidation index is as described in claim 6. The wear and contamination index is as described in claim 7;

[0124] The control terminal module continuously and proportionally determines the duration and pressure of the injection pulse based on the value of the health index of the splitting knife. The injection medium adopts a dual-threshold hysteresis switching. When the health index drops from high to low and falls below the lower threshold, it switches to nitrogen-hydrogen mixture. When it rises from low to high and rises above the upper threshold, it reverts to pure nitrogen. The upper threshold is higher than the lower threshold.

[0125] In this embodiment, the weighting coefficient and According to and When each reaches its corresponding failure threshold, the deductions to the health index are equal for both; the injection pulse duration and injection pressure are... A linear inverse proportional relationship is used for continuous mapping; media switching employs dual-threshold hysteresis logic, with an upper threshold set. and lower threshold and ;when Breaking down from high to low When, switch to a nitrogen-hydrogen mixture; when From low to high When the above occurs, revert to pure nitrogen; avoid hysteresis. The medium switches frequently when fluctuating around the threshold.

[0126] According to the appendix Figure 7 As shown, the following steps require special emphasis:

[0127] S1. Real-time acquisition: During each bonding cycle, the sensor matrix module acquires data in real time, including resonant resistance, tool holder temperature, foot surface width, force curve, and acoustic emission signal.

[0128] S2. Window Determination: Determine whether the current window is a non-welding idle window after the second weld point wire breakage is completed and before the start of the next wire feeding cycle; if yes, proceed to step S3; if no, the protection execution module remains closed and return to step S1.

[0129] S3. Layered calculation: Within the non-welding idle window, calculate the friction oxidation index and wear contamination index based on the data collected in step S1, and update the judgment status of the micro-damage rejection index.

[0130] S4. Health Integration: The secondary indices calculated in step S3 are integrated and output as the current Chopping Health Index according to the rules of weighted integration and veto.

[0131] S5. Parameter Mapping and Execution: Based on the value of the blade health index, continuously and proportionally determine the pulse duration and injection pressure of this injection, and switch the injection medium in segments according to the comparison results of the health index and the dual thresholds; drive the protection execution module to perform a pulse injection action towards the blade tip through the wire feeding through hole 3;

[0132] S6. Reset: After the spraying action is completed, the protection execution module is shut down, the next cycle begins, and the process returns to step S1.

[0133] In this embodiment, steps S2 to S5 are all completed within a non-welding idle window, which is the process gap inherent in the bonding cycle; the calculation of the tribo-oxidation index and wear contamination index and the determination of the micro-damage rejection index in step S3 can be performed in parallel; in step S5, the spray pulse duration and spray pressure are continuously mapped to the cleaver health index using a linear inverse relationship, and the spray medium is switched in segments according to the comparison results of the health index and the hysteresis dual thresholds; the calibration of all baseline values, thresholds and weight coefficients is completed automatically during cleaver replacement without manual intervention; this method ensures that the protective action and the bonding process are absolutely mutually exclusive in timing, and is suitable for ultra-fine pitch bonding scenarios with pad spacing on the order of a preset micrometer.

[0134] Finally, it should be noted that the above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the protection scope of the present invention.

Claims

1. An anti-oxidation composite wedge-shaped chopping tool, characterized in that, include: The system comprises a cleaving action module, a sensor matrix module, a protection action module, and a control terminal module. The chopping knife execution module includes an integrated wedge-shaped chopping knife body (1), which has an axially penetrating wire feeding through hole (3) inside. The wire feeding through hole (3) serves as both a metal wire channel and a protective medium channel. The sensor matrix module is used to collect working status parameters corresponding to various failure modes of the cleaver. The protective execution module is used to pulse-feed the protective medium to the tip of the cutting tool through the wire feeding through hole (3) during the non-welding window period; The control terminal module has a built-in hierarchical health index fusion algorithm, which is used to calculate and fuse the data collected by the sensor matrix module into a continuous cleaving health index according to different fusion rules corresponding to different failure mechanisms, and adjust the action parameters of the protection execution module according to the health index. All protective actions of the protection execution module are limited to the non-welding idle window after the second solder joint wire breaks in the bonding cycle and before the start of the next cycle wire feeding.

2. The anti-oxidation composite wedge-shaped chopping tool according to claim 1, characterized in that, The cleaving execution module also includes: The wedge-shaped wedge holder (2) is connected to the top of the wedge-shaped wedge body (1) and is used to fix the wedge-shaped wedge body (1) to the ultrasonic transducer. The wedge holder (2) serves as a vibration node. The foot surface (11) is located at the bottom end of the wedge-shaped cutter body (1) and is used to contact the solder pad during bonding; An oblique wire feeding hole (5) is opened on the oblique surface at the bottom of the wedge-shaped chopping knife body (1), with one end connected to the wire feeding through hole (3) and the other end penetrating to the foot surface (11). Multiple sets of longitudinal grooves (4) are provided on the inner wall of the wire feeding through hole (3) along the axial direction to increase the heat dissipation area of ​​the inner wall and form an airflow channel, while retaining the axial ridges of the inner wall in contact with the metal wire.

3. The anti-oxidation composite wedge-shaped chopping tool according to claim 1, characterized in that, The sensor matrix module includes: Impedance phase analyzer, integrated in the ultrasonic generator control cabinet, is used to measure resonant resistance and resonant frequency in real time; An infrared temperature sensor is mounted on the side bracket of the bonding head and is non-contactly aligned with the handle of the cleaver to measure the handle temperature in real time. A high-speed vision camera, installed inside the device and aligned with the tip of the chopping knife, is used to measure the width of the foot surface (11) and detect foreign objects at the tip; The Z-axis force sensor is integrated into the Z-axis motion module of the bonding head and is used to record the bonding force curve in real time. An acoustic emission sensor is attached to the vibration node on the outer surface of the chopping block (2) to capture the high-frequency stress wave signal generated by the propagation of microcracks.

4. The anti-oxidation composite wedge-shaped chopping tool according to claim 1, characterized in that, The protection execution module includes: A high-speed solenoid valve, the outlet of which is sealed and connected to the top opening of the wire feeding through hole (3), is used to control the pulse injection of the protective medium; An electric proportional valve is used to continuously regulate injection pressure; A multi-source gas switching valve assembly is used to switch between different injection media, wherein the injection media includes at least pure nitrogen and a nitrogen-hydrogen mixture.

5. The anti-oxidation composite wedge-shaped chopping tool according to claim 1, characterized in that, The hierarchical health index fusion algorithm built into the control terminal module specifically includes the calculation of three secondary indices and the fusion of one primary index: The tribo-oxidation index is calculated based on the product of the relative increase in resonant resistance and the relative increase in tool holder temperature. The wear and contamination index is calculated based on the weighted sum of the current relative wear on the sole surface (11) and the current relative change in the high-frequency fluctuation energy of the force curve; The micro-damage rejection index is triggered by a dual condition and logic based on the current statistical value of the acoustic emission event count and the current irreversible decrease in the resonant frequency. The primary index is the knife health index, which is obtained by subtracting the weighted sum of the friction oxidation index and the wear and contamination index from the full score, and is subject to the veto constraint of the micro-damage rejection index.

6. The anti-oxidation composite wedge-shaped chopping tool according to claim 5, characterized in that, The formula for calculating the tribo-oxidation index is as follows: ,in: For real-time resonant resistance, The baseline resonant resistance under healthy conditions; For real-time tool holder temperature, The baseline temperature is the temperature under healthy conditions. This product structure utilizes the synergistic effect of physical cause and effect, which is that increased friction inevitably leads to increased damping and increased heat generation, to filter false alarms caused by single sensor drift.

7. The anti-oxidation composite wedge-shaped chopping tool according to claim 5, characterized in that, The formula for calculating the wear and contamination index is as follows: ,in: For the real-time width of the foot surface (11), The initial width of the foot surface (11); The root mean square value of the high-frequency component of the force curve during the contact stabilization phase, after removing the low-frequency trend component using a first-order difference method. Its baseline value under healthy conditions; , These are the normalized weighting coefficients.

8. The anti-oxidation composite wedge-shaped chopping tool according to claim 5, characterized in that, The triggering condition for the micro-damage rejection index is that two conditions are met simultaneously: Condition 1: The count of acoustic emission events exceeding a threshold within the most recent K welding cycles. Greater than the preset threshold , where K is a preset statistical window parameter; Condition 2: The resonant frequency after temperature compensation is lower than the initial resonant frequency for M consecutive cycles. And the difference exceeds the preset threshold , where M is the preset statistical window parameter; When the micro-damage rejection index is triggered, the health index of the chopping knife is directly set to zero, ignoring the current values ​​of other indices, and the system forcibly issues an alarm to replace the chopping knife.

9. The anti-oxidation composite wedge-shaped chopping tool according to claim 5, characterized in that, The health index of the split knife The calculation introduces the veto multiplier When the micro-damage veto index is triggered ,otherwise ; The calculation formula is: ,in: , These are the weighting coefficients. The tribo-oxidation index as described in claim 6, The wear and contamination index as described in claim 7; The control terminal module continuously and proportionally determines the injection pulse duration and injection pressure based on the value of the cleaver health index. The injection medium adopts a dual-threshold hysteresis switching. When the health index drops from high to low below the lower threshold, it switches to a nitrogen-hydrogen mixture. When it rises from low to high above the upper threshold, it reverts to pure nitrogen. The upper threshold is higher than the lower threshold.

10. A method for preparing an oxidation-resistant composite wedge-shaped chopping tool, used to prepare the oxidation-resistant composite wedge-shaped chopping tool according to any one of claims 1-9, characterized in that, The process includes the following steps: S1. Real-time acquisition: During each bonding cycle, the resonant resistance, handle temperature, foot surface (11) width, force curve and acoustic emission signal data are acquired in real time through the sensor matrix module; S2. Window Determination: Determine whether the current window is a non-welding idle window after the second weld wire breakage is completed and before the start of the next cycle of wire feeding; if yes, proceed to step three; if no, the protection execution module remains closed and return to step one. S3. Layered calculation: Within the non-welding idle window, based on the data collected in step one, calculate the friction oxidation index and wear contamination index respectively, and update the judgment status of the micro-damage rejection index; S4. Health Fusion: The secondary indices calculated in step S3 are fused and output according to the rules of weighted fusion and veto. S5. Parameter Mapping and Execution: Based on the value of the cleaver health index, continuously and proportionally determine the pulse duration and injection pressure of this injection, and switch the injection medium in segments according to the comparison results of the health index and the dual thresholds; Drive the protection execution module to perform a pulse jet action in the direction of the cutting blade tip through the wire feeding through hole (3); S6. Reset: After the spraying action is completed, the protection execution module is turned off, the next cycle begins, and the process returns to step S1.

Images