A bonding head leveling mechanism, leveling device and leveling method

Abstract

This invention relates to the field of semiconductor technology, and particularly to a head-mounting leveling mechanism, leveling device, and leveling method. The head-mounting leveling mechanism includes a mounting housing, a voice coil motor, a guide shaft, and a leveling assembly. The voice coil motor is fixedly mounted on the upper end of the mounting housing. The guide shaft is drivenly connected to the output end of the voice coil motor, and the head-mounting assembly is mounted on the lower end of the guide shaft. The leveling assembly includes a leveling seat, several push rods, a drive mechanism, and an integrally formed elastic element. The leveling seat is coaxially rotatably connected to the outside of the guide shaft, and the outer periphery of the leveling seat has free movement space. The push rods press against the upper end of the leveling seat to adjust the tilt of the leveling seat. The drive mechanism drives the push rods to move in the vertical direction. The elastic element is located between the leveling seat and the mounting housing. The connecting seat of this invention is integrally machined, resulting in good consistency in size and elasticity, and small adjustment error.

Description

Technical Field

[0001] This invention relates to the field of semiconductor technology, and in particular to a leveling mechanism, leveling device and leveling method for a bonding head. Background Technology

[0002] In the thermoforming bonding process for chip packaging, the bonding head needs to be parallel to the bonding stage. When angular deviation occurs, the angle of the bonding head needs to be adjusted. For example, patent application number 2024119788373 discloses a bonding head adjustment assembly. Multiple sets of fine-tuning components work together to adjust the positional relationship between the second adjustment component and the first adjustment component. The fine-tuning components are screwed onto the first adjustment component to adjust the spacing between the second adjustment components around the first adjustment component. Multiple sets of fine-tuning components work together to control the angle and / or spacing changes of the second adjustment component relative to the first adjustment component, thereby adjusting the perpendicularity of the bonding head fixed on the second adjustment component and ensuring that the perpendicularity error of the bonding head is within the allowable range. However, this method uses multiple independent adjustment components, resulting in low consistency of adjustment and thus a relatively large adjustment error. Especially when the chip is large and the chip pin spacing is small, even a slight tilt of the bonding head will result in a large deviation of the pins, leading to poor bonding. Summary of the Invention

[0003] To address the problems of welding deviation and poor bonding caused by the tilting of the bonding head in existing technologies, this invention provides a bonding head leveling mechanism, leveling device, and leveling method that can adjust the bonding head angle.

[0004] One type of head-mounting leveling mechanism includes: a mounting housing; a voice coil motor fixedly mounted on the upper end of the mounting housing; a guide shaft drivingly connected to the output end of the voice coil motor, with a head-mounting assembly mounted on the lower end of the guide shaft; a leveling assembly including a leveling seat coaxially rotatably connected to the outside of the guide shaft, and the leveling seat having free movement space on its outer periphery; a plurality of push rods pressing against the upper end of the leveling seat for adjusting the tilt of the leveling seat; a driving mechanism for driving the push rods to move vertically; and an integrally formed elastic element disposed between the leveling seat and the mounting housing.

[0005] Furthermore, the guide shaft is flexibly connected to the output shaft of the voice coil motor, and the clearance between the mover and stator of the voice coil motor provides an adjustment range for the tilt angle of the leveling seat. During tilt adjustment, the clearance between the mover and stator of the voice coil motor is used to reserve adjustment space for tilt adjustment, replacing costly ball bearings and simplifying the structural design.

[0006] Furthermore, the elastic element includes a connecting seat, which is fixedly connected to the mounting housing. The connecting seat is an integrally formed annular elastic element with a curved groove along its circumference. The annular elastic element can achieve multi-directional elastic compensation in the axial, radial, and angular directions; it provides uniform circumferential force distribution, good fatigue resistance, and automatic centering; it has a compact structure, is suitable for shaft assembly, and has a small number of parts; it can buffer vibration and impact. The curved groove provides a smooth transition, making the elastic element easier to compress and achieving a larger stroke; the stress in the curved groove is gently distributed, making it less prone to cracking during long-term reciprocating motion; the curved groove makes the elastic force curve smooth, preventing sudden drops in elastic force and ensuring the stability of the movement.

[0007] Furthermore, the groove is wavy and interrupted in the middle. The wavy groove provides deformation margin; when compressed or bent, the troughs or crests can expand and fold, achieving a greater elastic stroke under the same external force. Moreover, the interrupted wavy structure distributes deformation across multiple corrugated units, avoiding localized stress overload, reducing the risk of fatigue fracture, and improving durability for repeated use. In addition, the groove removes some material, reducing the overall weight and facilitating structural lightweighting.

[0008] Furthermore, the push rods are evenly distributed circumferentially along the connecting seat, and the connecting seat also has through holes for the push rods to pass through. The lower end of the through hole has a constricted section with an inner diameter matching the diameter of the push rod. Except for the constricted section, the inner diameter of the through hole is larger than that of the push rod. The leveling seat of the present invention is connected to the mounting housing through the connecting seat. The lower end of the push rod restricts the movement of the connecting seat. The connecting seat is elastic. When tilting, the leveling seat needs to constrain the degrees of freedom other than the tilting adjustment direction, so as to ensure that the leveling seat can move smoothly when leveling and also constrain the movement of the leveling seat other than tilting adjustment.

[0009] Furthermore, the end of the push rod near the connecting seat is designed with a spherical shape. During tilt adjustment, the movement of the leveling seat is a relatively complex spatial motion. If the leveling motor and leveling seat are connected by a hinge, the hinge structure would be very complex, and the precision error of the hinge itself would also affect the adjustment accuracy. Making the end of the push rod spherical allows for point contact, allowing for slight tilting and angular deviations of the contacted parts. It can adapt to the angle of the mating surface, preventing one-sided jamming or warping, and releasing angular errors. If it were a flat-headed push rod, localized hard contact would occur if the two parts were not in close contact, generating additional lateral forces. Spherical contact only transmits axial force, almost without any impact on the lateral force. Transmitting lateral torque without jamming or sticking; eliminating the need for the push rod and the pushed part to be strictly parallel and coaxial, as the spherical surface can compensate for angular and positional deviations caused by assembly and parts machining; preventing the edges from scratching the workpiece when the flat end is tilted; concentrating the contact stress on the spherical surface in a small area, making it less likely to scratch the part surface during fine-tuning; ensuring stable contact; transmitting pressure along the spherical axis, resulting in a stable axial output force that does not change due to slight tilting, making it suitable for scenarios like pushers that require precise pressure control; and ensuring smooth disengagement without the spherical end easily adhering or getting stuck after the pushing action is completed.

[0010] Furthermore, a spring is also engaged at the bottom end of the guide shaft, and the bottom surface of the leveling seat abuts against the spring. The spring serves two purposes: supporting the leveling seat and cushioning its movement.

[0011] Furthermore, the drive mechanism includes a leveling motor, the output end of which is connected to a push plate. A push rod is fixed to the push plate, and a measuring mechanism is also installed on the mounting housing, facing the push plate to measure the displacement of the leveling motor. The output end of the leveling motor is connected to the push rod via a bent push plate, allowing the push rod to be positioned inside the leveling motor, reducing the overall height of the leveling mechanism and saving space. Specifically, the push plate is a Z-shaped rigid bend, rigidly connecting the motor and the push rod. There is a radial height / lateral misalignment between the motor output point and the installation position of the push rod. The Z-shaped bend crosses the intermediate obstacle, transmitting the motor's driving force to the push rod without changing the transmission direction. The Z-shaped rigid body transmission ensures that the input and output motion directions are completely consistent, only performing positional translation without changing the direction of motion or introducing a deflection angle. When the motor moves in the Z-direction, the push rod also moves in the Z-direction. The entire component has high rigidity, minimal deformation under stress, and direct transmission of thrust and displacement, ensuring pressure and positioning accuracy. The entire unit is bent and formed, eliminating the need for multiple parts to be assembled, reducing the number of screws and adapters, simplifying assembly, and reducing the number of parts. Due to the overall machine layout constraints, the motor and push rod cannot be coaxially aligned; however, a Z-shaped push plate allows for their separate placement, achieving a compact overall layout. The Z-shaped cross-section provides a higher bending section modulus and superior bending resistance compared to flat, thin plates, making it less prone to bending deformation under lateral loads.

[0012] The present invention also provides a bonding head leveling device, including the bonding head leveling mechanism described above, and a measuring carrier that moves along the XY direction. A first distance measuring mechanism is installed on the upper end of the measuring carrier, which is used to measure the distance between the carrier and the bonding head assembly. A second distance measuring mechanism is installed on the lower end of the measuring carrier, which is used to measure the distance between the carrier and the bonding stage.

[0013] The present invention also provides a method for leveling the head of a fitting, which uses the above-mentioned head leveling device and includes the following steps: S1: Insert the measuring carrier between the bonding head assembly and the bonding stage, and the first and second ranging mechanisms perform ranging measurements respectively. S2: The measuring carrier moves along the XY direction to measure multiple points on the head assembly; S3: Calculate the height difference of multiple points to obtain the parallelism between the bonding head component and the bonding stage; S4: If the parallelism meets the requirements, stop; if the parallelism does not meet the requirements, calculate the displacement of each leveling motor, the corresponding leveling motor will move, and the movement distance will be fed back through the measuring mechanism. Repeat steps S1 to S3 until the parallelism meets the requirements.

[0014] Beneficial effects: (1) The present invention uses an integrally processed elastic component to realize the angle adjustment of the leveling seat, thereby adjusting the angle of the connector. Since the connecting seat of the present invention is integrally processed, the consistency of size and elasticity is good, the adjustment error is small, thereby reducing welding deviation, improving product yield and reliability, and reducing the cost of rework and scrap. (2) The clearance margin between the mover and stator of the voice coil motor provides the adjustment range for the tilt amplitude of the leveling seat. When tilting, the clearance between the mover and stator of the voice coil motor is used to reserve adjustment space for tilting, replacing the expensive ball bearing, simplifying the structural design. Moreover, since the tilt adjustment amplitude is very small, the mover and stator of the voice coil motor have a certain clearance margin, so the tilt adjustment will not affect the voice coil motor. (3) The elastic element adopts a ring-shaped connecting seat. The ring-shaped elastic element can simultaneously withstand axial compression, radial offset, and small angular deflection, and can compensate for angular tilt, eccentricity, and axial displacement. The ring is a continuous closed loop along the circumference, and the load is distributed along the entire circumference, so there will be no local stress concentration. It is not easy to crack under reciprocating fatigue conditions and has a longer fatigue life. The ring-shaped elastic element has symmetrical circumferential elastic force and has an automatic centering effect when subjected to eccentric load, which limits radial offset, suppresses shaking, and ensures coaxiality. It can be fitted around the outer side of shaft parts without occupying additional radial space, which is suitable for small and precision mechanisms such as the head, and is conducive to weight reduction. The circumferential structure can absorb vibration and impact, weaken vibration in all directions, reduce resonance under high-speed operation of equipment, and play a role in vibration reduction and noise reduction. When assembling, the ring-shaped part is pressed tightly, and the circumference can provide a uniform circumferential preload, eliminate assembly gaps, and avoid abnormal noise during operation. A single ring-shaped part can achieve functions such as compensation for angular tilt, eccentricity, and axial displacement, without the need for splicing multiple spring pieces, reducing parts and assembly errors. The connecting seat has curved grooves along the circumference. This special machining shape gives the connecting seat good elasticity, a large adjustment range, good rebound performance after pressure, and a longer service life, eliminating the need for frequent replacement of the connecting seat. (4) A wavy groove is opened along the circumference of the connecting seat. The wavy groove provides deformation allowance. When compressed or bent, the trough or crest can be stretched and folded, and a greater elastic stroke can be obtained under the same external force. Moreover, the wavy structure is broken to distribute the deformation to multiple corrugated units, avoid local stress overload, reduce the risk of fatigue fracture, and improve the durability of repeated use. In addition, the groove removes some material, reducing the overall weight and facilitating the lightweighting of the structure.

[0015] (5) The connecting seat can be flexibly designed in shape and installation position according to the specific situation of the mechanism to adapt to mechanisms of different sizes and make the mechanism more compact; (6) The connecting seat has a through hole so that the push rod can pass through it, and the size of the lower end of the through hole of the connecting seat is adapted to the push rod. On the one hand, the push rod can restrict the connecting seat, which in turn restricts the leveling seat and prevents it from moving arbitrarily. On the other hand, the narrowing section is only a small section, so it will not affect the operation of the leveling seat. (7) This invention measures the parallelism between the bonding head assembly and the bonding stage through two distance measuring mechanisms. Then, the leveling motor drives the push rod to tilt the connecting seat, thereby causing the guide shaft to swing. During the adjustment process, the height is measured and the parallelism is calculated by sensors until the required parallelism is achieved. If the angle is measured directly, a special angle sensor (tilt meter, encoder) is required. This invention indirectly feeds back the angle by measuring the height. Therefore, the angle can be measured by ordinary displacement / height sensors (laser displacement, grating, contact probe). There are many types of height sensors and the price is lower. In addition, it is not easy to arrange angle sensors in many narrow spaces. The installation space constraint is small, which is suitable for compact and precision structures such as bonding heads. Multiple height acquisitions at one time can determine the height position of the current plane and calculate the tilt angle. It achieves two goals at once. Compared with some angle sensors, which are easily affected by magnetic fields and vibrations, the displacement-based height measurement method is not sensitive to magnetic fields and is suitable for bonding head environments with magnetic fields around the motor. After obtaining the angle, the control system can perform a compensation algorithm to correct the tilt of the mechanism and compensate for the skew caused by assembly and thermal deformation. The adjustment process is easy to implement and simple to operate. Attached Figure Description

[0016] To more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings used in the following description of the embodiments will be briefly introduced. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0017] Figure 1 This is a three-dimensional structural diagram of the leveling mechanism for the head of the present invention; Figure 2 This is a front structural diagram of the leveling mechanism for the head of the present invention; Figure 3 For along Figure 2 A cross-sectional view along the AA direction; Figure 4 This is a schematic diagram of the cross-sectional structure of the connector. Figure 5 This is a schematic diagram of the structure of the leveling device for the head of the present invention; Figure 6 This is a schematic diagram of the measurement position in the bottom view of the suction nozzle.

[0018] Among them, 1. voice coil motor, 2. guide shaft, 3. mounting housing, 4. leveling motor, 5. push plate, 6. top rod, 7. leveling seat, 8. suction nozzle, 9. heating module, 10. spring, 11. air bearing, 12. connecting seat, 121. groove, 122. through hole, 1221. narrow hole section, 123. mounting part, 13. measuring mechanism, 14. first ranging mechanism, 15. second ranging mechanism. Detailed Implementation

[0019] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. The following description of at least one exemplary embodiment is merely illustrative and is in no way intended to limit the present invention or its application or use. All other embodiments obtained by those skilled in the art based on the embodiments of the present invention without creative effort are within the scope of protection of the present invention.

[0020] It should be noted that the terminology used herein is for the purpose of describing particular embodiments only and is not intended to limit the exemplary embodiments according to this application. As used herein, the singular form is intended to include the plural form as well, unless the context clearly indicates otherwise. Furthermore, it should be understood that when the terms "comprising" and / or "including" are used in this specification, they indicate the presence of features, steps, operations, devices, components, and / or combinations thereof.

[0021] Unless otherwise specifically stated, the relative arrangement, numerical expressions, and values ​​of the components and steps set forth in these embodiments do not limit the scope of the invention. It should also be understood that, for ease of description, the dimensions of the various parts shown in the drawings are not drawn to actual scale. Techniques, methods, and devices known to those skilled in the art may not be discussed in detail, but where appropriate, such techniques, methods, and devices should be considered part of the specification. In all examples shown and discussed herein, any specific values ​​should be interpreted as merely exemplary and not as limitations. Therefore, other examples of exemplary embodiments may have different values. It should be noted that similar reference numerals and letters in the following figures denote similar items; therefore, once an item is defined in one figure, it need not be further discussed in subsequent figures.

[0022] In the description of this invention, it should be understood that the orientation or positional relationship indicated by directional terms such as "front, back, up, down, left, right", "horizontal, vertical, horizontal" and "top, bottom" is generally based on the orientation or positional relationship shown in the accompanying drawings, and is only for the convenience of describing this invention and simplifying the description. Unless otherwise stated, these directional terms do not indicate or imply that the device or element referred to must have a specific orientation or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation on the scope of protection of this invention; the directional terms "inner" and "outer" refer to the inner and outer contours relative to the outline of each component itself.

[0023] For ease of description, spatial relative terms such as "above," "on top of," "on the upper surface of," "above," etc., are used herein to describe the spatial positional relationship of a device or feature as shown in the figures to other devices or features. It should be understood that spatial relative terms are intended to encompass different orientations in use or operation beyond the orientation of the device as described in the figures. For example, if the device in the figures were inverted, a device described as "above" or "on top of" other devices or structures would subsequently be positioned as "below" or "under" other devices or structures. Thus, the exemplary term "above" can include both "above" and "below." The device may also be positioned in other different ways (rotated 90 degrees or in other orientations), and the spatial relative descriptions used herein will be interpreted accordingly.

[0024] Furthermore, it should be noted that the use of terms such as "first" and "second" to define components is merely for the purpose of distinguishing the corresponding components. Unless otherwise stated, the above terms have no special meaning and therefore should not be construed as limiting the scope of protection of this invention.

[0025] Example 1 like Figures 1-4 This invention provides a leveling mechanism for a head, comprising a mounting housing 3, a voice coil motor 1, a guide shaft 2, and a leveling assembly. The voice coil motor 1 is fixedly mounted on the upper end of the mounting housing 3. The guide shaft 2 is drivenly connected to the output end of the voice coil motor 1. The voice coil motor is a W-axis voice coil motor. The head assembly is mounted on the lower end of the guide shaft 2. The leveling assembly includes a leveling seat 7, several push rods 6, a drive mechanism, and an integrally formed elastic element. The leveling seat 7 is coaxially rotatably connected to the outside of the guide shaft 2. Optionally, the leveling seat 7 is mounted on the outside of the guide shaft 2 via an air bearing 11, and the outer periphery of the leveling seat 7 has free movement space. In this invention, there is a gap between the leveling seat 7 and the surrounding parts, thereby providing tilt adjustment space. The push rods 6 abut against the upper end of the leveling seat 7 and are used to adjust the tilt amplitude of the leveling seat 7. The drive mechanism is used to drive the push rods 6 to move in the vertical direction. The elastic element is disposed between the leveling seat 7 and the mounting housing 3.

[0026] Preferably, the guide shaft 2 is flexibly connected to the output shaft of the voice coil motor 1, and the clearance margin between the mover and stator of the voice coil motor 1 provides an adjustment range for the tilt amplitude of the leveling seat 7.

[0027] The elastic element includes a connecting seat 12, which is fixedly connected to the mounting housing 3. The connecting seat 12 is an integrally formed annular elastic element. Push rods 6 are evenly distributed around the circumference of the connecting seat 12. The connecting seat 12 also has through holes 122 through which the push rods 6 pass. The lower end of the through hole 122 has a constricted section 1221 with an inner diameter matching the diameter of the push rod 6. The inner diameter of the through hole 122, except for the constricted section 1221, is larger than that of the push rod 6. For ease of connection, such as... Figure 1 and Figure 4 The upper end of the connecting seat 12 is provided with a mounting part 123, which can be fixed to the mounting housing 3 by screws. The mounting parts 123 are evenly distributed around the circumference of the connecting seat 12, and are locked to the mounting housing 3 by screws. The evenly distributed screws around the circumference ensure that the connecting seat 12 and the mounting housing 3 remain coaxial, suppressing radial offset, ensuring the centering accuracy of the central components, and preventing eccentric wobbling. This is suitable for precision coaxial mechanisms such as connectors. The multi-point screw fixing around the circumference provides locking force in all directions compared to fixing with only a few screws. Under high-frequency vibration and impact conditions, local loosening is less likely to occur, resulting in good vibration resistance. The evenly distributed mounting parts 123 disperse the compressive stress generated by screw tightening to each independent mounting position, avoiding stress concentration in one place, preventing local cracking and deformation of the connecting seat 12, and improving fatigue life. The multi-point screws around the circumference allow for uniform tightening; if there is a slight deviation, minor circumferential and coaxial adjustments can be made by adjusting the screw tightening degree. The screws are only locked onto the special mounting lugs (mounting part 123) and will not directly press against the elastic deformation body area. The effective deformation part of the connecting seat 12 is not squeezed by the screws, ensuring that the original elastic performance of the elastic element is not damaged.

[0028] The end of the push rod 6 near the connecting seat 12 is spherical. A spring piece 10 is also fitted at the bottom of the guide shaft 2, and the bottom surface of the leveling seat 7 abuts against the spring piece 10. The impact of the bonding press is first buffered by the upper elastic connecting seat 12, and then further absorbed by the lower spring piece 10; this avoids direct rigid transmission of the impact, reducing the impact on the push rod, leveling seat, and motor, and minimizing damage to components. Furthermore, the two-stage elastic structure provides better damping, absorbing vibrations generated by the high-speed operation of the equipment, weakening resonance, and improving bonding repeatability.

[0029] The drive mechanism includes a leveling motor 4, the output end of which is connected to a push plate 5. A push rod 6 is fixed to the push plate 5. A measuring mechanism 13 is also installed on the mounting housing 3, facing the push plate 5 to measure the displacement of the leveling motor 4. The measuring mechanism 13 can be, but is not limited to, a grating ruler reading head. Specifically, the push plate 5 is a Z-shaped rigid bend, rigidly connecting the motor and the push rod. There is a radial height / lateral misalignment between the output point of the leveling motor 4 and the mounting position of the push rod 6. The Z-shaped bend crosses the intermediate obstacle, transmitting the driving force of the leveling motor 4 to the push rod without changing the transmission direction. The Z-shaped rigid body transmission ensures that the input and output motion directions are completely consistent, only performing position translation without changing the motion direction or introducing a deflection angle. The leveling motor 4 moves along the Z-axis, and the push rod 6 also moves along the Z-axis. The entire component has high rigidity, minimal deformation under stress, and direct transmission of thrust and displacement, ensuring pressure and positioning accuracy. The integral bending and forming process eliminates the need for multiple parts to be assembled, reducing the number of screws and adapters, simplifying assembly. Due to the overall machine layout limitations, the leveling motor 4 and the push rod 6 cannot be coaxially aligned. Using a Z-shaped push plate allows for their separate placement, achieving a compact overall layout. The push plate 5 has a Z-shaped cross-section, resulting in a higher bending section modulus and superior bending resistance compared to flat, thin plates, making it less prone to bending deformation under lateral loads.

[0030] The present invention also provides a leveling device for the head of a shank, such as... Figure 5 The system includes the aforementioned bonding head leveling mechanism, and also a measuring carrier that moves along the XY direction. The measuring carrier can be a measuring plate or similar component, and is driven by a cylinder or other drive mechanism. A first ranging mechanism 14 is mounted on the upper end of the measuring carrier, which measures the distance between it and the bonding head assembly. A second ranging mechanism 15 is mounted on the lower end of the measuring plate, which measures the distance between it and the bonding stage. Both the first ranging mechanism 14 and the second ranging mechanism 15 can be, but are not limited to, precision ranging sensors.

[0031] The present invention also provides a method for leveling the head of a fitting, which uses the above-mentioned head leveling device and includes the following steps: S1: Insert the measuring carrier between the bonding head assembly and the bonding stage, and the first ranging mechanism 14 and the second ranging mechanism 15 perform ranging respectively; S2: The measuring carrier moves along the XY direction to measure multiple points on the head assembly. Preferably, multiple points are measured evenly near the edge of the head assembly. S3: Calculate the height difference of multiple points to obtain the parallelism between the bonding head component and the bonding stage; S4: If the parallelism meets the requirements, stop; if the parallelism does not meet the requirements, calculate the displacement of each leveling motor 4, the corresponding leveling motor 4 will move, and the movement distance will be fed back through the measuring mechanism 13. Repeat steps S1 to S3 until the parallelism meets the requirements.

[0032] This invention will be specifically described using a type of connector assembly as an example, such as... Figures 2-3 and Figures 5-6 The nozzle assembly includes a suction nozzle 8 and a heating module 9.

[0033] Workflow (1) such as Figure 5 As shown, before leveling, insert two precision distance sensors between the bonding head assembly and the bonding stage to measure the height of the nozzle 8 and the bonding stage respectively. Measure four points at different positions in the X and Y directions. Optionally, according to... Figure 6 Following the sequence A→B→C→D, measure the height of the nozzle 8 and stage at these four points, calculate the height difference between the four points, and determine the parallelism between the nozzle 8 and the stage.

[0034] (2) Based on the parallelism between the nozzle 8 and the bonding stage, the displacement of each leveling motor 4 (4 in total) is calculated. Based on this displacement, the leveling motor 4 drives the push rod 6 to move vertically, thereby pushing the leveling seat 7 to make tilt adjustments. The end of the push rod 6 is designed with a spherical surface to ensure that the push rod 6 can still effectively contact the leveling seat 7 after tilt adjustment. A grating ruler reading head is used to read the precise displacement of the leveling motor 4. The adjustment action is transmitted to the nozzle 8 through the air bearing 11, guide shaft 2, and heating module 9.

[0035] (3) After adjustment, use a precision distance sensor to measure the height of the nozzle 8 and the bonding stage at four points again, and calculate the parallelism. If they are not parallel, repeat step 2 to adjust until the nozzle 8 is parallel to the bonding stage.

[0036] (4) When tilting, the leveling seat 7 needs to constrain the degrees of freedom other than the tilting adjustment direction. The leveling seat 7 of the present invention is fixed by the connecting seat 12. The connecting seat 12 is elastic, which ensures that the leveling seat 7 can move smoothly when tilting and also constrains the movement of the leveling seat 7 other than tilting.

[0037] (5) When tilting, the guide shaft 2 will also cause the mover of the W-axis voice coil motor 1 to tilt. Since the tilting adjustment range is very small, the mover and stator of the voice coil motor 1 have a certain clearance margin, so the tilting adjustment will not affect the W-axis voice coil motor 1.

[0038] Example 2 A curved groove 121 is provided along the circumference of the connecting seat 12. The other structures are the same as in Embodiment 1. The groove 121, which is interconnected internally and externally, enhances the elasticity of the connecting seat 12 and has at least the following advantages: (1) Reduce local stiffness and increase elastic deformation: straight grooves are prone to abrupt changes in stiffness; curved grooves have a smooth transition, making it easier for the connecting seat 12 to bend and compress, thus obtaining a larger stroke. (2) Optimize stress distribution, reduce stress concentration, and improve fatigue life: The sharp corners at both ends of the straight groove are prone to stress concentration, and repeated deformation can easily cause fracture; the curved groove has no sharp corners, the stress is dispersed smoothly, and long-term reciprocating elastic deformation is not easy to crack. (3) The deformation under stress is more uniform and the elastic force output is stable: the bending groove guides the elastic element to deform along the preset direction, avoiding the twisting and skewing of the parts, and the elastic force curve is smooth, without sudden increase or decrease of elastic force. (4) Limiting the deformation direction and playing a guiding role: controlling the connecting seat 12 to deform only along the bending direction of the groove, preventing lateral tilting and twisting, and ensuring stable assembly. (5) Buffering and shock absorption: When subjected to impact, the bending structure can deform step by step to dissipate the impact energy, and the buffering effect is better than that of the straight groove structure.

[0039] Example 3 A groove 121 is provided along the circumference of the connecting seat 12. The groove 121 is wavy and interrupted in the middle. Preferably, the groove 121 can be evenly arranged in multiple segments, each segment being unconnected. Specifically, the number of segments is 1 / 2 times the number of through holes. For example, there are 4 through holes and 2 segments. The middle position of each segment is higher than both ends, and they are arranged symmetrically from left to right. The through holes 122 on the same groove 121 are also arranged symmetrically from left to right on the same groove 121, so that the structure of each part is symmetrical, ensuring the consistency of deformation and elasticity. Other structures in this embodiment are the same as in embodiment 1.

[0040] This embodiment has at least the following advantages: (1) Adjusting stiffness and improving deformation capacity: The wave groove provides deformation margin. When compressed / bent, the trough and crest can be stretched and folded, and a greater elastic stroke can be obtained under the same external force. The softness and hardness can be precisely controlled by the depth and wavelength of the wave to achieve gradual elasticity.

[0041] (2) Distribute stress, alleviate stress concentration, and extend service life: When a flat elastic component is bent, the stress is concentrated in a single narrow area, which is prone to cracking and fatigue over a long period of time. The corrugated groove distributes the deformation to multiple corrugated units, avoids local stress overload, reduces the risk of fatigue fracture, and improves the durability of repeated use.

[0042] (3) Enhanced shock absorption, buffering and vibration absorption performance: The deformation process of the wave groove can dissipate vibration energy. Compared with smooth solid elastic parts, it has a better damping effect and can absorb impact, weaken vibration and reduce operating noise.

[0043] (4) Compensation for assembly tolerances and thermal expansion and contraction gaps: Equipment parts have processing errors and dimensional expansion and contraction due to temperature changes; the wave structure has elastic expansion and contraction margin, continuously provides stable pre-tightening force, eliminates gaps, and prevents loosening and abnormal noise.

[0044] (5) Weight reduction and material saving: The groove removes some materials, reducing the overall weight; in a narrow installation space, a thinner structure can achieve flexible function, which is convenient for structural miniaturization.

[0045] The above are merely preferred embodiments of the present invention, but the scope of protection of the present invention is not limited thereto. Any equivalent substitutions or modifications made by those skilled in the art within the scope of the technology disclosed in the present invention, based on the technical solution and inventive concept of the present invention, should be covered within the scope of protection of the present invention.

Claims

1. A head-leveling mechanism, characterized in that: include: Mounting housing (3); A voice coil motor (1) is fixedly installed on the upper end of the mounting housing (3); Guide shaft (2) is connected to the output end of voice coil motor (1) and a head assembly is installed at the lower end of the guide shaft (2). Leveling component, the leveling component includes: The leveling seat (7) is coaxially rotatably connected to the outside of the guide shaft (2), and the outer periphery of the leveling seat (7) has free movement space; Several push rods (6) are placed on the upper end of the leveling seat (7) to adjust the tilt of the leveling seat (7); The driving mechanism is used to drive the push rod (6) to move in the vertical direction; An integrally formed elastic element is provided between the leveling seat (7) and the mounting housing (3). The elastic element includes a connecting seat (12), which is fixedly connected to the mounting housing (3). The connecting seat (12) is an integrally formed annular elastic element, and a curved groove (121) is provided on the connecting seat (12) along the circumference.

2. The leveling mechanism for a tie head according to claim 1, characterized in that: The guide shaft (2) is flexibly connected to the output shaft of the voice coil motor (1), and the clearance margin between the mover and stator of the voice coil motor (1) provides the adjustment range of the tilt amplitude of the leveling seat (7).

3. The leveling mechanism for a tie head according to claim 1, characterized in that: The groove (121) is wavy and broken in the middle.

4. The leveling mechanism for a tie head according to claim 1, characterized in that: The push rods (6) are evenly distributed around the connecting seat (12). The connecting seat (12) also has a through hole (122) for the push rods (6) to pass through. The lower end of the through hole (122) is provided with a constricted section (1221) whose inner diameter matches the diameter of the push rod (6). The inner diameter of the through hole (122) is larger than that of the push rod (6) at other positions except for the constricted section (1221).

5. A leveling mechanism for a tie head according to claim 4, characterized in that: The end of the top rod (6) near the connecting seat (12) is spherical.

6. A leveling mechanism for a tie head according to claim 5, characterized in that: The bottom end of the guide shaft (2) is also fitted with a spring piece (10), and the bottom surface of the leveling seat (7) abuts against the spring piece (10).

7. A leveling mechanism for a tie head according to any one of claims 1 to 6, characterized in that: The drive mechanism includes a leveling motor (4), the output end of which is connected to a push plate (5), the push rod (6) is fixed on the push plate (5), and a measuring mechanism (13) is also installed on the mounting housing (3). The measuring mechanism (13) is directly opposite the push plate (5) to measure the displacement of the leveling motor (4).

8. A head leveling device, characterized in that: The device includes the bonding head leveling mechanism as described in claim 7, and also includes a measuring carrier that moves along the XY direction. The upper end of the measuring carrier is equipped with a first distance measuring mechanism (14), which is used to measure the distance between itself and the bonding head assembly. The lower end of the measuring plate is equipped with a second distance measuring mechanism (15), which is used to measure the distance between itself and the bonding stage.

9. A method for leveling a tie head, characterized in that: The method of using the leveling device for the head of the fitting as described in claim 8 includes the following steps: S1: Insert the measuring carrier between the bonding head assembly and the bonding stage, and the first ranging mechanism (14) and the second ranging mechanism (15) perform ranging respectively; S2: The measuring carrier moves along the XY direction to measure multiple points on the head assembly; S3: Calculate the height difference of multiple points to obtain the parallelism between the bonding head component and the bonding stage; S4: If the parallelism meets the requirements, stop; if the parallelism does not meet the requirements, calculate the displacement of each leveling motor (4), the corresponding leveling motor (4) moves, and the movement distance is fed back through the measuring mechanism (13). Repeat steps S1~S3 until the parallelism meets the requirements.

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