Force-moment sensor and robot

Abstract

The present application relates to a force-moment sensor, the force-moment sensor according to an embodiment of the present application comprising: a base; a cover arranged on the base; and a first carrier and a second carrier arranged between the base and the cover, the cover and the first carrier and the second carrier moving relative to the base in a first axis direction when the cover is pressed in the first axis direction, and the cover moving relative to the first carrier in a first circumferential direction centered on the first axis when the cover is pressed in the first circumferential direction.

Description

Technical Field

[0001] This embodiment relates to a force-torque sensor. Background Technology

[0002] Robots are used in a wide range of fields, including industry, medicine, and services, as well as many others, and their applications are constantly expanding. To improve the performance of robot systems and ensure safety, it is essential to accurately monitor and control the robot's motion. In particular, the forces and torques generated when the robot interacts with its environment or handles objects are crucial information.

[0003] Existing robot sensor technologies primarily focus on detecting motion states such as position, velocity, and acceleration. However, force and torque play a crucial role in providing information about robot interactions and the working environment. Force-torque sensors are essential for robots to safely pick up or manipulate objects and respond to their environment. Furthermore, these sensors can be used to improve robot efficiency and prevent malfunctions.

[0004] Conventional force-torque sensors cannot separate the applied external force into forces along each axis. Therefore, they receive the input simultaneously and decompose the force, leading to noise due to crosstalk mixing with the measured values ​​for each axis. In particular, there is an increase in noise when the z-axis force and torque are mixed.

[0005] (Patent Document 1) KR 10-2023-0123723 A Summary of the Invention

[0006] This embodiment aims to provide a force-torque sensor capable of measuring z-axis force and torque force separately.

[0007] This aims to improve the control and operation of robots.

[0008] The force-torque sensor according to this embodiment includes: a base; a cover disposed on the base; and a first carrier and a second carrier disposed between the base and the cover, wherein when the cover is pressurized in a first axial direction, the cover, the first carrier, and the second carrier move relative to the base in the first axial direction, and when the cover is pressurized in a first circumferential direction centered on the first axis, the cover can move relative to the first carrier in the first circumferential direction.

[0009] When the cover is pressurized in a direction other than the first axis and the first circumferential direction, the cover and the first carrier can move relative to the second carrier.

[0010] When the cover is pressurized in a second axial direction perpendicular to the first axis or in a third axial direction perpendicular to both the first and second axes, the cover and the first carrier can move relative to the second carrier.

[0011] When the cover is pressurized in a second circumferential direction centered on the second axis or in a third circumferential direction centered on the third axis, the cover and the first carrier can move relative to the second carrier.

[0012] The cover may include a flange portion and a carrier portion, the carrier portion being connected to the flange portion via a first elastic member.

[0013] The force-torque sensor includes a first ball bearing disposed between the cover and the first carrier. At least one of the cover and the first carrier includes a first guide rail. The first ball bearing is disposed on the first guide rail, and the first guide rail can extend along the first circumferential direction.

[0014] The force-torque sensor may include a second ball bearing disposed between the first carrier and the second carrier.

[0015] The force-torque sensor includes: a first ball disposed between the cover and the first carrier; and a second ball disposed between the first carrier and the second carrier, wherein at least a portion of the first ball may overlap with the second ball in the first axial direction.

[0016] The force-torque sensor may include: a first magnet disposed on either the second carrier or the base; and a first sensor disposed on the other of the second carrier and the base and detecting the first magnet.

[0017] The force-torque sensor may include: a second magnet disposed on either the cover or the base; and a second sensor disposed on the other of the cover and the base and detecting the second magnet.

[0018] The force-torque sensor may include: a second elastic member connecting the carrier portion of the cover and the first carrier; a third elastic member connecting the first carrier and the second carrier; and a fourth elastic member connecting the second carrier and the base.

[0019] The force-torque sensor may include: a coil disposed on either the carrier or the base; and a sensor disposed on the other of the carrier and the base, which detects the electromagnetic field of the coil when current is applied to the coil.

[0020] The force-torque sensor may include a capacitance sensor that measures the change in capacitance between the cover and the base or between the second carrier and the base.

[0021] The force-torque sensor may include: an attractive magnet disposed on any one of the cover, the first carrier, the second carrier, and the base; and a yoke disposed on the other of the cover, the first carrier, the second carrier, and the base, the yoke being subjected to an attractive force with the force magnet.

[0022] The robot according to this embodiment may include the force-torque sensor.

[0023] [Beneficial Effects]

[0024] The force-torque sensor according to this embodiment can measure the z-axis force and torque force separately. This minimizes the influence of noise caused by crosstalk on the detected values ​​of each axis. In other words, the measurement accuracy of the force-torque sensor can be improved. Attached Figure Description

[0025] Figure 1 This is a perspective view of the force-torque sensor according to this embodiment.

[0026] Figure 2 It is along Figure 1 A cross-sectional view of line AA.

[0027] Figure 3 It is along Figure 1 A cross-sectional view of line BB.

[0028] Figure 4 and Figure 5 This is a cross-sectional view of the force-torque sensor according to this embodiment, cut perpendicular to the z-axis and viewed from above.

[0029] Figure 6 This is an exploded perspective view of the force-torque sensor according to this embodiment.

[0030] Figure 7 From and Figure 6 Exploded perspective views of the force-torque sensor according to this embodiment, viewed from different directions.

[0031] Figure 8This is a perspective view of the force-torque sensor according to this embodiment, omitting the flange portion of the cover.

[0032] Figure 9 This is a perspective view of the force-torque sensor according to this embodiment, omitting the cover and carrier.

[0033] Figure 10 This is a perspective view showing the carrier and related configuration of the force-torque sensor according to this embodiment.

[0034] Figure 11 The carrier part of the lid has been omitted. Figure 10 Perspective view.

[0035] Figure 12 This is a bottom perspective view showing the cover, carrier, and related configuration of the force-torque sensor according to this embodiment.

[0036] Figure 13 The second carrier and related configurations have been omitted. Figure 12 Bottom perspective view.

[0037] Figure 14 This is a bottom perspective view showing the first carrier and associated configuration of the force-torque sensor according to this embodiment.

[0038] Figure 15 This is a side view showing the first carrier of the force-torque sensor according to this embodiment.

[0039] Figure 16 This is a diagram illustrating the application of a force in the z-axis direction to a force-torque sensor according to this embodiment.

[0040] Figure 17 This is a diagram illustrating the situation when a rolling force is applied to a force-torque sensor according to this embodiment.

[0041] Figure 18 This diagram illustrates the application of forces in the x-axis, y-axis, yaw, and pitch directions to the force-torque sensor according to this embodiment. Detailed Implementation

[0042] Preferred embodiments of the present invention will be described in detail below with reference to the accompanying drawings.

[0043] However, the technical concept of the present invention is not limited to the embodiments to be described, but can be implemented in various forms, and one or more constituent elements can be selectively combined or substituted among the embodiments within the scope of the technical concept of the present invention.

[0044] Furthermore, the terms (including technical and scientific terms) used in the embodiments of the present invention, unless explicitly defined and described, may be interpreted as having a meaning that is generally understood by those skilled in the art, and common terms such as those defined in dictionaries may be interpreted in conjunction with the meaning in the context of the relevant art.

[0045] Furthermore, the terminology used in this specification is for the purpose of describing embodiments and is not intended to limit the invention.

[0046] In this specification, unless specifically indicated in the phrase, the singular form may include the plural form, and when described as “at least one (or more than one) of A, B, and C”, it may include one or more of all combinations that can be combined with A, B, and C.

[0047] Furthermore, when describing components of embodiments of the present invention, terms such as first, second, A, B, (a), and (b) may be used. These terms are intended only to distinguish components from other components, and they do not limit the nature, order, or sequence of the components.

[0048] Furthermore, when a component is described as being “connected,” “linked,” or “interconnected” to another component, the component is not only directly connected, linked, or interconnected to that other component, but may also include cases where the component is “connected,” “linked,” or “interconnected” due to another component between other components.

[0049] Furthermore, when described as being formed or positioned "above" or "below" each component, "above" or "below" means not only that the two components are in direct contact, but also that one or more other components are formed or positioned between the two components. Additionally, when expressed as "above" or "below," it can include not only an upward direction relative to a component but also a downward direction relative to a component.

[0050] In the following text, the base 100 may be referred to as the "fixed part".

[0051] In the following text, cover 200, first carrier 310 and second carrier 320 may be referred to as "moving parts". In the following text, one of cover 200, first carrier 310 and second carrier 320 may be referred to as "first moving part", another as "second moving part" and yet another as "third moving part".

[0052] In the following text, one of the upper guide rail 230, upper guide rail 311a, lower guide rail 312a, and lower guide rail 321 is referred to as the "first guide rail," another as the "second guide rail," yet another as the "third guide rail," and yet another as the "fourth guide rail." Furthermore, any two configurations of the upper guide rail 230, upper guide rail 311a, lower guide rail 312a, and lower guide rail 321 can be collectively referred to as the "first guide rail," etc.

[0053] In the following text, one of the upper guide ball 410 and the lower guide ball 420 is referred to as the "first ball" and the other may be referred to as the "second ball".

[0054] In the following text, one of the z-axis magnet 610 and the side magnet 630 is referred to as the "first magnet" and the other may be referred to as the "second magnet".

[0055] In the following text, one of the z-axis sensor 620 and the side sensor 640 is referred to as the "first sensor", and the other may be referred to as the "second sensor".

[0056] In the following text, one of the z-axis, x-axis, and y-axis will be called the "first axis", another will be called the "second axis", and yet another may be called the "third axis".

[0057] In the following text, one of the roll direction, yaw direction, and pitch direction is referred to as the "first circumferential direction," another as the "second circumferential direction," and yet another as the "third circumferential direction." Furthermore, the roll direction, yaw direction, and pitch direction can be referred to as the "first to third directions."

[0058] The configuration of the force-torque sensor according to this embodiment is described below with reference to the accompanying drawings.

[0059] Figure 1 This is a perspective view of the force-torque sensor according to this embodiment; Figure 2 It is along Figure 1 A cross-sectional view of line AA; Figure 3 It is along Figure 1 A cross-sectional view of line BB; Figure 4 and Figure 5 This is a cross-sectional view of the force-torque sensor according to this embodiment, cut perpendicular to the z-axis and viewed from above; Figure 6 This is an exploded perspective view of the force-torque sensor according to this embodiment; Figure 7 From and Figure 6 Exploded perspective views of the force-torque sensor according to this embodiment, viewed from different directions; Figure 8 This is a perspective view of the force-torque sensor according to this embodiment, omitting the flange portion of the cover; Figure 9This is a perspective view of the force-torque sensor according to this embodiment, omitting the cover and carrier; Figure 10 This is a perspective view showing the carrier and related configuration of the force-torque sensor according to this embodiment. Figure 11 The carrier part of the lid has been omitted. Figure 10 Perspective view; Figure 12 This is a bottom perspective view showing the cover, carrier, and related configuration of the force-torque sensor according to this embodiment; Figure 13 The second carrier and related configurations have been omitted. Figure 12 Bottom perspective view; Figure 14 This is a bottom perspective view showing the first carrier and related configuration of the force-torque sensor according to this embodiment; and Figure 15 This is a side view showing the first carrier of the force-torque sensor according to this embodiment.

[0060] Force-torque sensors can be used to detect and measure forces and torques applied to a robot in real time. Force-torque sensors can detect forces applied to them. Force-torque sensors can measure forces applied to them. Force-torque sensors can detect torques applied to them. Force-torque sensors can measure torques applied to them. Force-torque sensors can be six-axis force-torque sensors. Force-torque sensors can detect and measure forces along six axes (i.e., x-axis, y-axis, z-axis, yaw, pitch, and roll). Force-torque sensors can also be used as finger sensors for robots.

[0061] A force-torque sensor may include a fixed part. The fixed part is a different concept from the moving part, and can be a part that is relatively fixed when the moving part moves.

[0062] A force-torque sensor may include a base 100. A fixing part may include the base 100. A cover 200 may be disposed in the base 100. At least a portion of the cover 200 may be accommodated in the base 100. A first carrier 310 may be disposed in the base 100. At least a portion of the first carrier 310 may be accommodated in the base 100. A second carrier 320 may be disposed in the base 100. At least a portion of the second carrier 320 may be accommodated in the base 100. A ball bearing may be disposed in the base 100. An elastic member may be disposed in the base 100. A sensing structure may be disposed in the base 100. The base 100 may be formed as a cylinder with an open upper portion. As a modified embodiment, the base 100 may be formed as a square column with an open upper portion.

[0063] The base 100 may include a lower plate 110. The lower plate 110 may be a base plate or a bottom plate. The lower plate 110 may include a hole 111. The hole 111 may be hollow. The lower plate 110 may be formed in a circular shape. In a modified embodiment, the lower plate 110 may be formed in a square shape.

[0064] The base 100 may include a side plate 120. The side plate 120 may extend from the lower plate 110. The side plate 120 may extend upward from the lower plate 110. When viewed from above, the side plate 120 may be formed in a circular shape. In a modified embodiment, when viewed from above, the side plate 120 may be formed in a square ring shape.

[0065] A force-torque sensor may include a moving part. The moving part may be a part that moves by an external force. That is, when an external force is applied to the force-torque sensor, the moving part may move relative to a fixed part.

[0066] The force-torque sensor may include a rolling moving part. The rolling moving part can move in the rolling direction. The rolling moving part can rotate in the rolling direction.

[0067] The force-torque sensor may include a cover 200. The cover 200 may be disposed within a base 100. The cover 200 may be disposed on the base 100. At least a portion of the cover 200 may be disposed inside the base 100. At least a portion of the cover 200 may be accommodated within the base 100. The cover 200 may be movably disposed on the base 100. The cover 200 may be movable in the rolling direction. The cover 200 may be movable relative to the base 100. The cover 200 may be movable relative to a first carrier 310. The cover 200 may be movable relative to a second carrier 320.

[0068] The cover 200 may include a flange portion 210. The flange portion 210 may be formed in a flange shape. The flange portion 210 may be formed in a plate shape. The flange portion 210 may be the portion to which an external force is applied. The flange portion 210 may be disposed on the base 100. The flange portion 210 may be disposed on the upper side of the base 100. The flange portion 210 may be spaced apart from the base 100. The flange portion 210 may be formed in a circular shape. In a modified embodiment, the flange portion 210 may be formed in a square shape.

[0069] The flange portion 210 may include a first hole 211. The first hole 211 may be hollow. The flange portion 210 may include a second hole 212. The second hole 212 may be a connecting hole. The second hole 212 may include multiple holes. Screws, etc., that are connected to another component of the robot can be fitted into the second hole 212.

[0070] The cover 200 may include a carrier portion 220. The carrier portion 220 may be disposed below the flange portion 210. The flange portion 210 may be disposed on the carrier portion 220. The carrier portion 220 may be spaced apart from the flange portion 210. The carrier portion 220 may be connected to the flange portion 210 via a first elastic member 510. The carrier portion 220 and the flange portion 210 may be elastically connected via the first elastic member 510. The carrier portion 220 and the flange portion 210 may move together. The carrier portion 220 and the flange portion 210 may move together in all directions. When the carrier portion 220 and the flange portion 210 move together, the amount of movement of the carrier portion 220 may be the same as the amount of movement of the flange portion 210. However, in modified embodiments, the amount of movement of the carrier portion 220 and the amount of movement of the flange portion 210 may be different.

[0071] Cover 200 may include an upper guide rail 230. The upper guide rail 230 may be an upper guide ball guide rail. Upper guide balls 410 may be disposed in the upper guide rail 230. The upper guide rail 230 may extend in the rolling direction. The upper guide rail 230 may guide the upper guide balls 410 to move in the rolling direction. The upper guide rail 230 may guide the upper guide balls 410 to rotate on the upper guide rail 230. The upper guide rail 230 may be formed by a groove. The upper guide rail 230 may include a groove. The upper guide rail 230 may be a groove.

[0072] A force-torque sensor may include a tilting moving part. The tilting moving part may be tilted relative to a fixed part. The tilting moving part may be a rotational moving part.

[0073] The force-torque sensor may include a first carrier 310. The first carrier 310 may be disposed between a base 100 and a cover 200. The first carrier 310 may be disposed inside the base 100. The first carrier 310 may be disposed within the base 100. The first carrier 310 may be disposed on the base 100. The first carrier 310 may be movably disposed on the base 100. At least a portion of the first carrier 310 may be accommodated within the base 100. The first carrier 310 may be disposed on the underside of the cover 200. The first carrier 310 may be disposed on the underside of the flange portion 210 of the cover 200. The first carrier 310 may be disposed inside the cover 200. The first carrier 310 may be placed inside the carrier portion 220 of the cover 200. The first carrier 310 may be disposed between the cover 200 and the second carrier 320.

[0074] The first carrier 310 can move in any direction except the rolling direction. The first carrier 310 can move relative to the base 100. The first carrier 310 can move together with the cover 200 in any direction except the rolling direction.

[0075] The first carrier 310 may include an upper flange portion 311. The upper flange portion 311 may be disposed on a lower flange portion 312. The first carrier 310 may include a lower flange portion 312. The diameter of the upper flange portion 311 may be larger than the diameter of the lower flange portion 312. The first carrier 310 may include a connecting portion 313. The connecting portion 313 may connect the upper flange portion 311 and the lower flange portion 312. The diameter of the connecting portion 313 may be smaller than the diameter of each of the upper flange portion 311 and the lower flange portion 312. An upper guide ball 410 may be disposed on the upper flange portion 311. A lower guide ball 420 may be disposed on the lower flange portion 312.

[0076] The upper flange portion 311, the lower flange portion 312, and the connecting portion 313 can be integrally formed. The upper flange portion 311, the lower flange portion 312, and the connecting portion 313 can move integrally.

[0077] The first carrier 310 may include an upper guide rail 311a. The upper flange portion 311 may include the upper guide rail 311a. The upper guide rail 311a may be an upper guide ball guide rail. Upper guide balls 410 may be disposed in the upper guide rail 311a. The upper guide rail 311a may extend in the rolling direction. The upper guide rail 311a may guide the upper guide balls 410 to move in the rolling direction. The upper guide rail 311a may guide the upper guide balls 410 to rotate on the upper guide rail 311a. The upper guide rail 311a may be formed by a groove. The upper guide rail 311a may include a groove. The upper guide rail 311a may be a groove.

[0078] The first carrier 310 may include a lower guide rail 312a. The lower flange portion 312 may include the lower guide rail 312a. The lower guide rail 312a may be a lower guide ball guide rail. The lower guide ball 420 may be disposed in the lower guide rail 312a. The lower guide rail 312a may guide the lower guide ball 420 to rotate on the lower guide rail 312a. The lower guide rail 312a may guide the lower guide ball 420 to tilt on the lower guide rail 312a. The lower guide rail 312a may be formed by a groove. The lower guide rail 312a may include a groove. The lower guide rail 312a may be a groove.

[0079] A force-torque sensor may include a z-axis moving part. The z-axis moving part can move in the z-axis direction.

[0080] The force-torque sensor may include a second carrier 320. The second carrier 320 may be disposed between the base 100 and the cover 200. The second carrier 320 may be disposed inside the base 100. The second carrier 320 may be disposed within the base 100. The second carrier 320 may be disposed on the base 100. The second carrier 320 may be movably disposed on the base 100. At least a portion of the second carrier 320 may be accommodated within the base 100. The second carrier 320 may be disposed on the underside of the cover 200. The second carrier 320 may be disposed on the underside of the flange portion 210 of the cover 200. The second carrier 320 may be disposed inside the cover 200. The second carrier 320 may be disposed inside the carrier portion 220 of the cover 200. The second carrier 320 may be disposed between the first carrier 310 and the base 100.

[0081] The second carrier 320 can move in the z-axis direction. The second carrier 320 can move relative to the base 100. The second carrier 320 can move relative to the base 100 in the z-axis direction. The second carrier 320 can move only in the z-axis direction.

[0082] The second carrier 320 may include a lower guide rail 321. The lower guide rail 321 may be a lower guide ball guide rail. Lower guide balls 420 may be disposed within the lower guide rail 321. The lower guide rail 321 may guide the lower guide balls 420 to rotate on the lower guide rail 321. The lower guide rail 321 may also guide the lower guide balls 420 to tilt on the lower guide rail 321. The lower guide rail 321 may be formed by a groove. The lower guide rail 321 may include a groove. The lower guide rail 321 may be a groove.

[0083] Force-torque sensors may include guide members. The guide members can guide the movement of the moving part relative to the stationary part.

[0084] The force-torque sensor may include a ball. The guide member may include a ball. The ball can guide the movement of the moving part relative to the fixed part. The ball can guide the movement of the moving part relative to the fixed part in a specific direction. In this embodiment, the ball may be formed of ceramic balls.

[0085] The force-torque sensor may include an upper guide ball 410. The upper guide ball 410 may be a rolling guide ball. The upper guide ball 410 may limit the movement of the cover 200 relative to the first carrier 310 in the rolling direction. The upper guide ball 410 may induce the movement of the cover 200 relative to the first carrier 310 in the rolling direction. The upper guide ball 410 may guide the movement of the cover 200 relative to the base 100 in the rolling direction.

[0086] An upper guide ball 410 can be disposed between the cover 200 and the first carrier 310. The upper guide ball 410 can be disposed within the cover 200. The upper guide ball 410 can contact the cover 200. The upper guide ball 410 can move along the cover 200. The upper guide ball 410 can be disposed within the first carrier 310. The upper guide ball 410 can contact the first carrier 310. The upper guide ball 410 can move along the first carrier 310. The upper guide ball 410 can be disposed within the carrier portion 220 of the cover 200. The upper guide ball 410 can contact the carrier portion 220 of the cover 200. The upper guide ball 410 can move along the carrier portion 220 of the cover 200.

[0087] The upper guide ball 410 can be disposed between the upper guide rail 230 of the cover 200 and the upper guide rail 311a of the first carrier 310. The upper guide ball 410 can be disposed within the upper guide rail 230 of the cover 200. The upper guide ball 410 can move along the upper guide rail 230 of the cover 200. The upper guide ball 410 can also be disposed within the upper guide rail 311a of the first carrier 310. The upper guide ball 410 can move along the upper guide rail 311a of the first carrier 310.

[0088] The upper guide ball 410 may include a plurality of balls. When viewed from above, at least three upper guide balls 410 may be spaced apart in the rolling direction. When viewed from above, four upper guide balls 410 may be spaced apart in the rolling direction. When viewed from above, fifteen upper guide balls 410 may be spaced apart in the rolling direction. The upper guide ball 410 may include a plurality of balls overlapping each other in the rolling direction. The upper guide ball 410 may be arranged in one layer in the z-axis direction. However, in a modified embodiment, the upper guide ball 410 may be arranged in multiple layers in the z-axis direction.

[0089] The force-torque sensor may include a lower guide ball 420. The lower guide ball 420 may be a rotary guide ball. The lower guide ball 420 may limit the rotational movement of the first carrier 310 relative to the second carrier 320. The lower guide ball 420 may induce the rotational movement of the first carrier 310 relative to the second carrier 320. The lower guide ball 420 may guide the rotation of the first carrier 310 relative to the second carrier 320.

[0090] The lower guide ball 420 can be disposed between the first carrier 310 and the second carrier 320. The lower guide ball 420 can be disposed within the first carrier 310. The lower guide ball 420 can contact the first carrier 310. The lower guide ball 420 can move along the first carrier 310. The lower guide ball 420 can be disposed within the second carrier 320. The lower guide ball 420 can contact the second carrier 320. The lower guide ball 420 can move along the second carrier 320.

[0091] The lower guide ball 420 can be disposed between the lower guide rail 312a of the first carrier 310 and the lower guide rail 321 of the second carrier 320. The lower guide ball 420 can be disposed within the lower guide rail 312a of the first carrier 310. The lower guide ball 420 can rotate on the lower guide rail 312a of the first carrier 310. The lower guide ball 420 can be disposed on the lower guide rail 321 of the second carrier 320. The lower guide ball 420 can rotate on the lower guide rail 321 of the second carrier 320.

[0092] The lower guide ball 420 may include multiple balls. When viewed from above, at least three lower guide balls 420 may be spaced apart in the rolling direction. When viewed from above, four lower guide balls 420 may be spaced apart in the rolling direction. The lower guide balls 420 may be arranged in one layer in the z-axis direction.

[0093] At least a portion of the upper guide ball 410 may overlap with the lower guide ball 420 in the z-axis direction.

[0094] The force-torque sensor may include a reset member. When the external force acting on the force-torque sensor disappears, the reset member can move the moving part back to its original position.

[0095] The force-torque sensor may include a ball bearing pressure member. The ball bearing pressure member can pressurize the upper guide ball 410, ensuring that the upper guide ball 410 does not deviate from a preset position and that the contact state between the cover 200 and the first carrier 310 is maintained. The ball bearing pressure member can also pressurize the lower guide ball 420, maintaining the contact state between the first carrier 310 and the second carrier 320, thereby ensuring that the lower guide ball 420 does not deviate from its preset position.

[0096] The force-torque sensor may include an elastic member. The reset member may include an elastic member. The ball bearing compression member may include an elastic member. When the external force applied to it disappears, the elastic member can move the moving part back to its original position. The elastic member can maintain the compressed state of the ball. The elastic member may include a spring. The elastic member may be elastic. The elastic member may have an elastic restoring force.

[0097] The force-torque sensor may include a first elastic member 510. The first elastic member 510 may include a spring. The first elastic member 510 may connect the flange portion 210 of the cover 200 and the carrier portion 220 of the cover 200. The first elastic member 510 may elastically connect the flange portion 210 of the cover 200 and the carrier portion 220 of the cover 200. The first elastic member 510 may be coupled to the flange portion 210 of the cover 200. The first elastic member 510 may be coupled to the carrier portion 220 of the cover 200. The first elastic member 510 may be configured to be parallel to the z-axis.

[0098] The force-torque sensor may include a second elastic member 520. The second elastic member 520 may include a spring. The second elastic member 520 may connect the carrier portion 220 of the cover 200 and the first carrier 310. The second elastic member 520 may elastically connect the carrier portion 220 of the cover 200 and the first carrier 310. The second elastic member 520 may connect the cover 200 and the first carrier 310. The second elastic member 520 may be coupled to the carrier portion 220 of the cover 200. The second elastic member 520 may be coupled to the first carrier 310. The second elastic member 520 may be configured to be perpendicular to the z-axis. The second elastic member 520 may be coupled to the lower surface of the carrier portion 220 of the cover 200 and the lower surface of the upper flange portion 311 of the first carrier 310.

[0099] The force-torque sensor may include a third elastic member 530. The third elastic member 530 may include a spring. The third elastic member 530 may connect to a first carrier 310 and a second carrier 320. The third elastic member 530 may elastically connect the first carrier 310 and the second carrier 320. The third elastic member 530 may be coupled to the first carrier 310. The third elastic member 530 may be coupled to the upper surface of the lower flange portion 312 of the first carrier 310 and the upper surface of the second carrier 320.

[0100] The force-torque sensor may include a fourth elastic member 540. The fourth elastic member 540 may include a spring. The fourth elastic member 540 may connect the second carrier 320 and the base 100. The fourth elastic member 540 may elastically connect the second carrier 320 and the base 100. The fourth elastic member 540 may be coupled to the second carrier 320. The fourth elastic member 540 may be coupled to the base 100. The fourth elastic member 540 may be configured to be perpendicular to the z-axis. The fourth elastic member 540 may be coupled to the bottom surface of the base 100 and the lower surface of the second carrier 320. The base 100 may include a step for coupling the fourth elastic member 540. This step may protrude from the bottom surface of the base 100.

[0101] The force-torque sensor may include a sensing element. The sensing element can detect movement of a moving part relative to a fixed part. The sensing element can measure the amount of movement of the moving part relative to the fixed part. The sensing element may include a magnet and a Hall sensor. The magnet may be disposed on one of the cover 200 and the base 100. The sensor may be disposed on the other of the cover 200 and the base 100. Furthermore, the magnet may be disposed on either the second carrier 320 or the base 100. The sensor may be disposed on the other of the second carrier 320 and the base 100. The sensor can detect the magnet. The sensor may be a Hall sensor.

[0102] The force-torque sensor may include a z-axis sensing element. The z-axis sensing element can detect the movement of the cover 200 in the z-axis direction. The z-axis sensing element can measure the amount of movement of the cover 200 in the z-axis direction.

[0103] The force-torque sensor may include a z-axis magnet 610. The z-axis magnet 610 may be disposed on the lower surface of the second carrier 320. The z-axis magnet 610 may be disposed within the second carrier 320. The z-axis magnet 610 may move together with the second carrier 320.

[0104] The force-torque sensor may include a z-axis sensor 620. The z-axis sensor 620 may face the z-axis magnet 610. The z-axis sensor 620 may be positioned at a location corresponding to the z-axis magnet 610. The z-axis sensor 620 may be disposed within the lower plate 110 of the base 100. The z-axis sensor 620 may be disposed within the base 100.

[0105] The z-axis sensor 620 can detect the z-axis magnet 610. The z-axis sensor 620 can measure the amount of movement of the z-axis magnet 610. The z-axis sensor 620 can detect the magnetic field of the z-axis magnet 610. The z-axis sensor 620 can be a Hall sensor.

[0106] In a modified embodiment, the z-axis magnet 610 may be disposed in the base 100, and the z-axis sensor 620 may be disposed in the second carrier 320.

[0107] The force-torque sensor may include a rotation sensing component. The rotation sensing component can detect the rotation of the cover 200. The rotation sensing component can measure the amount of rotation of the cover 200.

[0108] The force-torque sensor may include a side magnet 630. The side magnet 630 may be disposed on the outer surface of the cover 200. The side magnet 630 may be disposed within the cover 200. The side magnet 630 may move with the cover 200. The side magnet 630 may be disposed within the carrier portion 220 of the cover 200.

[0109] The force-torque sensor may include a side sensor 640. The side sensor 640 can detect a side magnet 630. The side sensor 640 can measure the amount of movement of the side magnet 630. The side sensor 640 can detect the magnetic field of the side magnet 630. The side sensor 640 may be a Hall sensor. The side sensor 640 may face the side magnet 630. The side sensor 640 may be positioned at a location corresponding to the side magnet 630. The side sensor 640 may be disposed in the side plate 120 of the base 100. The side sensor 640 may be disposed in the base 100.

[0110] In a modified embodiment, the side magnet 630 may be disposed in the base 100, and the side sensor 640 may be disposed in the cover 200.

[0111] The side sensor 640 may include multiple sensors. Specifically, the side sensor 640 may include four sensors. The side sensor 640 may include first to fourth sensors 641, 642, 643, and 644. It may include a first side sensor 641, a second side sensor 642, a third side sensor 643, and a fourth side sensor 644 for detecting the side magnet 630.

[0112] The first side sensor 641, the second side sensor 642, the third side sensor 643, and the fourth side sensor 644 can be disposed in the side plate 120 of the base 100. When viewed from the inside, the first side sensor 641 is disposed on the upper side of the side magnet 630, the second side sensor 642 is disposed on the lower side of the side magnet 630, the third side sensor 643 is disposed on the left side of the side magnet 630, and the fourth side sensor 644 can be disposed on the right side of the side magnet 630.

[0113] In this embodiment, when the cover 200 is pressurized in the z-axis direction, the cover 200, the first carrier 310, and the second carrier 320 can move relative to the base 100 in the z-axis direction. That is, when the cover 200 moves in the z-axis direction, the first carrier 310 and the second carrier 320 can move integrally with the cover 200.

[0114] When the cover 200 is pressurized in the rolling direction centered on the z-axis, the cover 200 can move relative to the first carrier 310 in the rolling direction.

[0115] When the cover 200 is pressed in a direction other than the z-axis and the rolling direction, the cover 200 and the first carrier 310 can move relative to the second carrier 320. The amount of movement of the cover 200 and the first carrier 310 can differ. However, while the cover 200 and the first carrier 310 can move, the second carrier 320 and the base 100 can be fixed.

[0116] When the cover 200 is pressed in the x-axis direction perpendicular to the z-axis, or in the y-axis direction perpendicular to both the z-axis and the x-axis, the cover 200 and the first carrier 310 can move relative to the second carrier 320.

[0117] When the cover 200 is pressurized in the yaw direction centered on the x-axis or in the pitch direction centered on the y-axis, the cover 200 and the first carrier 310 can move relative to the second carrier 320.

[0118] In the force-torque sensor according to this embodiment, the balls can be disposed between moving parts or between moving parts and stationary parts. The balls can be pressurized by an elastic member. Alternatively, in a modified embodiment, the balls can be pressurized by the attractive force between a magnet and a yoke. The cross-section of the guide rail on which the balls are disposed can be formed as a curve or as a polygonal shape such as a triangle or a square.

[0119] In this embodiment, the force in the z-direction is measured separately from the forces in other directions, thus minimizing crosstalk. Furthermore, this embodiment simplifies the structure.

[0120] In a modified embodiment, the elasticity of one of the springs in the elastic member can be further increased, thereby allowing it to be designed to be stably supported in the initial position.

[0121] The force-torque sensor according to the modified embodiment may differ from that of this embodiment in its sensing element. The force-torque sensor according to the modified embodiment may include a coil instead of a magnet.

[0122] The force-torque sensor may include a coil. The coil may be disposed in either the cover 200 or the base 100. The sensor may be disposed in the other of the cover 200 and the base 100. Furthermore, the coil may be disposed in either the second carrier 320 or the base 100. The sensor may be disposed in the other of the second carrier 320 and the base 100. When current is applied to the coil, the sensor can detect the electromagnetic field of the coil.

[0123] The force-torque sensor may include a z-axis coil. The z-axis coil may be disposed on the lower surface of the second carrier 320. The z-axis coil may be disposed within the second carrier 320. The z-axis coil may move together with the second carrier 320.

[0124] The force-torque sensor may include a side coil. The side coil may be disposed on the outer surface of the cover 200. The side coil may be disposed within the cover 200. The side coil may move with the cover 200.

[0125] In another modified embodiment, the sensing element may be provided with a capacitive sensor instead of a magnet and a Hall sensor.

[0126] The force-torque sensor may include a capacitive sensor that measures changes in capacitance between the cover 200 and the base 100, or between the second carrier 320 and the base 100. A predetermined potential can be applied to the cover 200, and different potentials can be applied to the base 100. A predetermined potential can be applied to the second carrier 320, and different potentials can be applied to the base 100. Thus, the capacitance can change according to movement of the cover 200 and the second carrier 320. In a modified embodiment, a capacitive sensor that detects this change may be provided.

[0127] In another modified embodiment, the ball bearing pressure member may be provided with an attraction magnet and a yoke.

[0128] An attraction magnet can be disposed on any one of the cover 200, the first carrier 310, the second carrier 320, and the base 100. A yoke can be disposed on the other of the cover 200, the first carrier 310, the second carrier 320, and the base 100, such that the attraction magnet and the attraction force can function. Furthermore, an attraction magnet can be disposed on any one of the cover 200 and the second carrier 320. A yoke can be disposed on the other of the cover 200 and the second carrier 320, such that the attraction magnet and the attraction force can function.

[0129] The operation of the force-torque sensor according to this embodiment is described below with reference to the accompanying drawings.

[0130] Figure 16 This is a diagram illustrating the application of a force in the z-axis direction to a force-torque sensor according to this embodiment.

[0131] According to this embodiment, when an external force having a z-axis component is applied to the flange portion 210 of the cover 200 of the force-torque sensor, the cover 200, the first carrier 310, and the second carrier 320 can be considered as a single unit (see [reference]). Figure 16 A) moves in the z-axis direction (see Figure 16(B). At this time, since the base 100 is maintained in a fixed state, the z-axis sensor 620 provided in the base 100 detects the z-axis magnet 610 provided on the second carrier 320, thereby measuring the amount of movement of the cover 200 in the z-axis direction. In this way, the z-axis component of the external force applied to the cover 200 can be measured.

[0132] Figure 17 This is a diagram illustrating the situation when a force in the rolling direction is applied to the force-torque sensor according to this embodiment.

[0133] When an external force having a rolling direction component is applied to the flange portion 210 of the cover 200 of the force-torque sensor according to this embodiment, the cover 200 (see...) Figure 17 A) can rotate or tilt about the z-axis (see Figure 17 (B). At this time, since the base 100 is maintained in a fixed state, the side sensor 640 provided in the base 100 detects the side magnet 630 provided in the cover 200, thereby measuring the amount of movement of the cover 200. In this way, the rolling direction component of the external force applied to the cover 200 can be measured.

[0134] Figure 18 This diagram illustrates the application of forces in the x-axis, y-axis, yaw, and pitch directions to the force-torque sensor according to this embodiment.

[0135] According to this embodiment, when an external force having a component in at least one of the y-axis direction and the yaw direction is applied to the flange portion 210 of the cover 200 of the force-torque sensor, the cover 200 and the first carrier 310 can rotate integrally about the x-axis (see [reference]). Figure 18 A) or tilt (see Figure 18 (B) At this time, since the base 100 is maintained in a fixed state, the side sensor 640 provided on the base 100 detects the side magnet 630 provided in the cover 200, thereby measuring the amount of movement of the cover 200. This allows the measurement of the y-axis component and yaw component of the external force applied to the cover 200. In a modified embodiment, the side sensor 640 can detect the movement of the first carrier 310.

[0136] According to this embodiment, when an external force having a component in at least one of the x-axis and pitch directions is applied to the flange portion 210 of the cover 200 of the force-torque sensor, the cover 200 and the first carrier 310 can rotate integrally about the y-axis (see [reference]). Figure 18 A) or tilt (see Figure 18(C). At this time, since the base 100 is maintained in a fixed state, the side sensor 640 provided in the base 100 detects the side magnet 630 provided in the cover 200, thereby measuring the amount of movement of the cover 200. In this way, the x-axis component and pitch component of the external force applied to the cover 200 can be measured.

[0137] The configuration of the robot according to this embodiment is described below.

[0138] The robot may include a body. The robot may include an arm connected to the body. The robot's arm may include a gripping component. The gripping component may include, for example, a finger shape. In this embodiment, a force-torque sensor may be disposed in the gripping component of the arm. The robot's arm may include a joint. In this embodiment, a force-torque sensor may be disposed on the joint of the arm.

[0139] Although embodiments of the invention have been described with reference to the accompanying drawings, those skilled in the art will understand that the invention can be implemented in other specific forms without altering its technical concept or essential characteristics. Therefore, it should be understood that the above embodiments are exemplary in all respects and not restrictive.

Claims

1. A force-torque sensor, comprising: Base; A cover, which is disposed on the base; as well as A first carrier and a second carrier are disposed between the base and the cover. Wherein, when the cover is pressurized in the first axial direction, the cover, the first carrier, and the second carrier are configured to move relative to the base in the first axial direction, and When the cover is pressurized in a first circumferential direction centered on the first axis, the cover is configured to move relative to the first carrier in the first circumferential direction.

2. The force-torque sensor according to claim 1, wherein, When the cover is pressurized in a direction other than the first axis and the first circumferential direction, the cover and the first carrier are configured to move relative to the second carrier.

3. The force-torque sensor according to claim 1, wherein, When the cover is pressurized in a second axial direction perpendicular to the first axis or in a third axial direction perpendicular to both the first and second axes, the cover and the first carrier are configured to move relative to the second carrier.

4. The force-torque sensor according to claim 3, wherein, When the cover is pressurized in a second circumferential direction centered on the second axis or in a third circumferential direction centered on the third axis, the cover and the first carrier are configured to move relative to the second carrier.

5. The force-torque sensor according to claim 1, wherein, The cover includes a flange portion and a carrier portion, the carrier portion being connected to the flange portion via a first elastic member.

6. The force-torque sensor according to claim 1, comprising a first ball bearing disposed between the cover and the first carrier. in, At least one of the cover and the first carrier includes a first guide rail, and the first ball is disposed on the first guide rail. The first guide rail extends in the first circumferential direction.

7. The force-torque sensor according to claim 1, comprising: A second ball bearing is disposed between the first carrier and the second carrier.

8. The force-torque sensor according to claim 2, comprising: A first ball bearing is disposed between the cover and the first carrier; as well as The second ball bearing is disposed between the first carrier and the second carrier. Wherein, at least a portion of the first ball overlaps with the second ball in the direction of the first axis.

9. The force-torque sensor according to claim 1, comprising: A first magnet is disposed on either the second carrier or the base; as well as A first sensor is disposed on the other of the second carrier and the base, and is configured to detect the first magnet.

10. The force-torque sensor according to claim 1, comprising: A second magnet is disposed on either the cover or the base; as well as A second sensor is disposed on the other of the cover and the base, and is configured to detect the second magnet.

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