Time-of-flight sensor and method for operating a time-of-flight sensor

Abstract

A time-of-flight sensor is provided, comprising: a transmitter unit (1) having at least two VCSELs (4, 5) that emit electromagnetic laser radiation (6, 6') during operation; a receiver unit (2) configured to detect the electromagnetic laser radiation (6, 6') of the at least two VCSELs (4, 5); and an optical element (7) configured to redirect the electromagnetic laser radiation (6, 6') of the at least two VCSELs (4, 5) to different portions (8, 9) of an illumination field (10). Furthermore, a method for operating the time-of-flight sensor is provided.

Description

[0001] A time-of-flight sensor and a method for operating the time-of-flight sensor are provided.

[0002] The aim is to provide an improved time-of-flight sensor. In particular, the aim is to provide a time-of-flight sensor with a small size and improved crosstalk between the transmitter and receiver units.

[0003] Furthermore, an improved method for operating a time-of-flight sensor is intended. In particular, the method for operating a time-of-flight sensor should at least reduce crosstalk between the transmitter unit and the receiver unit.

[0004] These objectives are achieved using a time-of-flight sensor having the features of claim 1 and a method for operating the time-of-flight sensor having the steps of claim 10.

[0005] Improved developments and implementation methods are given in the corresponding dependent claims.

[0006] According to one embodiment, the time-of-flight sensor includes a transmitter unit having at least two VCSELs (short for "vertical-cavity surface-emitting laser") that emit electromagnetic laser radiation during operation. Specifically, the transmitter unit may include more than two VCSELs, for example, three or more VCSELs.

[0007] A VCSEL specifically includes a sequence of epitaxial semiconductor layers having an active region configured to generate electromagnetic radiation during operation. The active region is specifically the laser active medium of the VCSEL. Specifically, the VCSEL includes a resonator in which an active laser medium, such as the active region, is disposed. For example, the resonator is formed by two opposing mirrors that reflect the electromagnetic radiation generated within the active region. For example, the mirrors are diffraction Bragg reflectors applied to opposing main surfaces of the epitaxial semiconductor layer sequence. Specifically, the mirrors and the main extension plane of the active region extend parallel to each other and further parallel to the radiation emitting surface of the VCSEL. Specifically, the radiation emission direction of the electromagnetic laser radiation emitted from the radiation emitting surface of the VCSEL extends parallel to the growth direction of the epitaxial semiconductor layer sequence. For example, the VCSEL is a VCSEL chip comprising or made of semiconductor material.

[0008] According to another embodiment, the time-of-flight sensor includes a receiver unit configured to detect electromagnetic laser radiation from at least two VCSELs. Specifically, the receiver unit is adapted to detect the wavelength and / or intensity and / or emission spectrum and / or polarization degree of the electromagnetic laser radiation from the VCSELs. If the electromagnetic laser radiation emitted by the VCSELs is different from each other, the receiver unit is configured to detect the different electromagnetic laser radiation.

[0009] According to another embodiment, the time-of-flight sensor includes an optical element configured to redirect electromagnetic laser radiation from at least two VCSELs to different portions of the illumination field. In other words, the optical element redirects the electromagnetic laser radiation from one of the at least two VCSELs to one portion of the illumination field, and redirects the electromagnetic laser radiation from the other of the at least two VCSELs to another portion of the illumination field. If the transmitter unit includes more than two VCSELs, the optical element specifically redirects the electromagnetic laser radiation from each VCSEL to a different portion of the illumination field.

[0010] Specifically, the electromagnetic laser radiation emitted by one VCSEL is redirected by an optical element to a region different from the electromagnetic laser radiation of the other VCSEL. If the unit comprises more than two VCSELs, the optical element redirects the electromagnetic laser radiation of each VCSEL to a different region. In particular, the electromagnetic laser radiation emitted by at least two VCSELs does not overlap in the illumination field.

[0011] For example, optical elements also widen the illumination field of the VCSEL. For example, optical elements can expand the illumination field of the VCSEL from 15° to 25° to 70° to 90°, including the limiting values.

[0012] According to an embodiment, the time-of-flight sensor includes: a transmitter unit having at least two VCSELs that emit electromagnetic laser radiation during operation; a receiver unit configured to detect the electromagnetic laser radiation from the at least two VCSELs; and an optical element that redirects the electromagnetic laser radiation from the at least two VCSELs to different portions of the illumination field.

[0013] The concept of the time-of-flight sensor involves using at least two VCSELs to illuminate the sensor's illumination field, achieving both high-intensity illumination and high eye safety simultaneously. Specifically, the VCSELs of the transmitter unit do not illuminate the same portion of the illumination field. The portion of the illumination field illuminated by one VCSEL of the transmitter unit is laterally shifted relative to the portion of the illumination field illuminated by the other VCSEL of the transmitter unit. Furthermore, the portions of the illumination field illuminated by the VCSELs do not overlap or overlap only in small areas. Therefore, the intensity of the electromagnetic laser radiation emitted by the VCSELs does not add up in the illumination field. Because the VCSELs of the transmitter unit illuminate separate areas of the retina of the human user's eye, the eye is not harmed by the superposition of electromagnetic laser radiation from the two VCSELs.

[0014] According to another embodiment of the time-of-flight sensor, the optical element comprises at least two segments that redirect the electromagnetic laser radiation from at least two VCSELs to different portions of the illumination field. For example, the at least two segments are arranged laterally relative to each other. Specifically, the at least two segments do not overlap or overlap only in small areas. If the time-of-flight sensor includes an emitter unit having more than two VCSELs, the optical element particularly preferably comprises the same number of spatially separated segments, each segment redirecting the electromagnetic laser radiation from one VCSEL of the emitter unit to another portion of the illumination field. Particularly preferably, the portions of the illumination field illuminated by different VCSELs do not overlap or overlap only in small areas. For example, the redirection of electromagnetic laser radiation by the optical element is achieved through optical refraction.

[0015] According to another embodiment of the time-of-flight sensor, a first segment of at least two segments of the optical element redirects the electromagnetic radiation of the first VCSEL to a first portion of the illumination field, and a second segment of at least two segments of the optical element redirects the electromagnetic radiation of the second VCSEL to a second portion of the illumination field.

[0016] According to another embodiment of the time-of-flight sensor, the segments of the optical element are continuously connected to each other. For example, the segments of the optical element are arranged directly adjacent to each other. For example, the optical element is composed of these segments. If the transmitter unit includes more than two VCSELs, the optical element preferably includes the same number of segments as the VCSELs of the transmitter unit. In other words, the optical element can be divided into the same number of segments as the number of VCSELs. In particular, each segment directs the electromagnetic laser radiation of the assigned VCSEL into the assigned portion of the illumination field. For example, these portions of the illumination field form the illumination field. In other words, these portions of the illumination field illuminated by a single VCSEL constitute the illumination field.

[0017] According to another embodiment of the time-of-flight sensor, the receiver unit includes at least two segments, and each segment of the receiver unit detects electromagnetic laser radiation of a portion of the receiver unit's field of view. For example, a first segment of the at least two segments of the receiver unit is configured to detect electromagnetic laser radiation of a first portion of the field of view, and a second segment of the at least two segments of the receiver unit is configured to detect electromagnetic laser radiation of a second portion of the field of view. In other words, the field of view is subdivided into different portions observed through different segments of the receiver unit. For example, these portions of the field of view form the field of view. For example, these portions of the field of view, such as the first portion and the second portion, are arranged directly adjacent to each other.

[0018] According to the implementation of the time-of-flight sensor, the receiver unit includes or is composed of photodiodes, for example, a single-photon avalanche diode (SPAD). Specifically, the receiver unit includes or is composed of multiple photodiodes or an array of photodiodes, for example, a single-photon avalanche diode. Specifically, the single-photon avalanche diode is a semiconductor chip, for example, based on or composed of a semiconductor material such as silicon.

[0019] A single-photon avalanche diode specifically includes a pn junction that is reverse-biased at an operating voltage, thereby creating a depletion region. The operating voltage specifically exceeds the junction breakdown voltage of the pn junction. Therefore, the electric field within the single-photon avalanche diode is extremely high, causing a single charge carrier injected into the depletion region to trigger a self-sustaining charge carrier avalanche.

[0020] According to another embodiment of the time-of-flight sensor, the distance between the transmitter unit and the receiver unit does not exceed 3 mm. Specifically, the time-of-flight sensor is configured to operate with no crosstalk, negligible crosstalk, or acceptable crosstalk between the transmitter unit and the receiver unit. Therefore, the distance between the transmitter unit and the receiver unit can be reduced. This specifically results in a very small size and / or a very small form factor for the time-of-flight sensor.

[0021] Depending on the implementation of the time-of-flight sensor, the optical element is a lens, a diffractive optical element, a Fresnel lens, or a multi-lens array. In particular, a multi-lens array may include or be composed of multiple microlenses. The microlenses of the multi-lens array may be identical or different from each other. For example, the optical element has focusing and / or diffusion characteristics.

[0022] According to the implementation, the radiated energy and / or radiated power of the time-of-flight sensor does not exceed a given threshold when no optical element is present. For example, the time-of-flight sensor still meets the Level 1 eye safety limits according to 21 CFR Part 1040 (the latest version as of January 26, 2024), the disclosure of which is incorporated herein by reference. In other words, if the optical element is removed from the time-of-flight sensor, the time-of-flight sensor still meets, for example, the Level 1 eye safety limits according to 21 CFR Part 1040 (the latest version as of January 26, 2024).

[0023] For example, common time-of-flight sensors include optical elements that, in addition to guiding light emitted from a light source in a desired manner, also protect the retina of the human user's eye. In common time-of-flight sensors, the optical elements diffuse the light from the light source such that the intensity of light incident on the retina of the human user's eye is below a given threshold, for example, defined by a Level 1 eye safety limit. If the optical element is removed, for example due to damage to the time-of-flight sensor, the intensity of light emitted by the common time-of-flight sensor exceeds, for example, the given threshold defined by a Level 1 eye safety limit, and may be harmful to the retina. To meet eye safety limits, common time-of-flight sensors include a detection unit, such as an interlocked multi-lens array, as a safety element to detect when the optical element has been removed. In particular, this safety element can be omitted in this time-of-flight sensor.

[0024] The time-of-flight sensor disclosed herein can be operated using the methods disclosed below. Therefore, the features and implementation methods disclosed in the time-of-flight sensor can also be incorporated into methods for operating the time-of-flight sensor, and vice versa.

[0025] According to an embodiment of the method, a first VCSEL of at least two VCSELs in the transmitter unit is operated to emit electromagnetic laser radiation. To operate the VCSEL to emit electromagnetic laser radiation, a current is applied to the active region of the VCSEL and converted into electromagnetic laser radiation through the active region. When the first VCSEL of at least two VCSELs is operated to emit electromagnetic laser radiation, in other words, the first VCSEL is turned on.

[0026] According to another embodiment of the method, after operating the first VCSEL, a second VCSEL of at least two VCSELs is operated to emit electromagnetic laser radiation. The second VCSEL is operated in the same manner as the first VCSEL to emit electromagnetic laser radiation. Specifically, when the second VCSEL is turned on, the first VCSEL is turned off, and vice versa. In other words, at any given time, only one of the at least two VCSELs is turned on. This particularly preferably helps to reduce crosstalk between the transmitter unit and the receiver unit. Furthermore, for example, the radiated energy and / or radiated power of the transmitter unit can be limited to predetermined values ​​defined by Level 1 eye safety limits to achieve eye-safe operation of the time-of-flight sensor.

[0027] If the time-of-flight sensor includes more than two VCSELs, the VCSELs are turned on one after another, while the other VCSELs are turned off simultaneously. In other words, at any given time, only one VCSEL in the transmitter unit is turned on.

[0028] According to another embodiment of the method, a first segment of the receiver unit detects electromagnetic laser radiation emitted by the first VCSEL in the field of view during a first time interval, and a second segment of the receiver unit detects electromagnetic laser radiation emitted by the second VCSEL in the field of view during a second time interval. Specifically, the first and second time intervals are different from each other. Specifically, during the first time interval, the first VCSEL is turned on and the second VCSEL is turned off, and during the second time interval, the first VCSEL is turned off and the second VCSEL is turned on. If the transmitter unit includes more than two VCSELs, a corresponding number of time intervals are provided during the method for operating the time-of-flight sensor, and during one of these time intervals, one VCSEL is turned on, while all other VCSELs are turned off. All the time intervals provided by the method are specifically different from each other and do not overlap.

[0029] Specifically, the time-of-flight sensor described herein can be part of a mobile phone. For example, the mobile phone also includes a camera device, and the time-of-flight sensor is used for the autofocus function of the camera device. For example, the autofocus function is LDAF (laser autofocus). Using this time-of-flight sensor, the image quality of pictures captured by the camera device of the mobile phone can be advantageously improved.

[0030] In particular, time-of-flight sensors can be used in robots for consumer applications, such as autonomous robots like vacuum cleaners, industrial robots, and / or drones, and especially for robot navigation. Furthermore, time-of-flight sensors can be used for people counting, occupancy sensors, door automation, posture sensors, proximity sensors, and collision avoidance.

[0031] Other advantageous embodiments and developments of the time-of-flight sensor and the method for operating the time-of-flight sensor are derived from the exemplary embodiments described below in conjunction with the accompanying drawings.

[0032] Figure 1 A schematic diagram of a time-of-flight sensor according to an exemplary embodiment is shown.

[0033] Figure 2 A schematic diagram of a phase of a time-of-flight sensor during a method for operating a time-of-flight sensor, according to an exemplary embodiment, is shown.

[0034] Figure 3 It shows according to Figure 1 A schematic diagram of another phase of the time-of-flight sensor during the method for operating the time-of-flight sensor, as described in an exemplary embodiment.

[0035] Figure 4An illustrative simulation of the plan view of the transmitter unit of the time-of-flight sensor during operation is shown.

[0036] Figure 5 Another simulation of a plan view of the transmitter unit of the time-of-flight sensor during operation is shown as an example.

[0037] Figure 6 An exemplary simulation of electromagnetic laser radiation emitted by the transmitter unit of a common time-of-flight sensor and crosstalk from the receiver unit is shown.

[0038] Figure 7 An exemplary simulation of electromagnetic laser radiation emitted by the transmitter unit of a time-of-flight sensor according to an exemplary embodiment and crosstalk between the receiver unit and the transmitter unit is shown.

[0039] In the accompanying drawings, identical or similar elements, as well as elements with the same function, are indicated by the same reference numerals. The scale of the drawings and the elements shown in them is not intended to be to scale. Rather, individual elements, particularly layers, may be shown enlarged in size for better presentation and / or better understanding.

[0040] according to Figure 1 An exemplary embodiment of the time-of-flight sensor includes a transmitter unit 1 and a receiver unit 2. Specifically, the transmitter unit 1 is attached to a common sensor chip 3, and the receiver unit 2 is integrated into the common sensor chip 3, and the transmitter unit 1 and the receiver unit 2 are arranged at a distance D from each other, i.e., a so-called baseline.

[0041] Transmitter unit 1 currently includes a first VCSEL 4 and a second VCSEL 5, both VCSELs 4 and 5 emitting electromagnetic laser radiation 6 and 6' during operation. Specifically, the two VCSELs 4 and 5 can operate independently of each other. In particular, the two VCSELs 4 and 5 of transmitter unit 1 can be turned on and off independently of each other. When the first VCSEL 4 is turned on, the second VCSEL 5 can be turned off, and vice versa.

[0042] Furthermore, the time-of-flight sensor includes an optical element 7 configured to redirect the electromagnetic laser radiation 6, 6' of the two VCSELs 4, 5 to different portions 8, 9 of the illumination field 10 of the time-of-flight sensor. In this exemplary embodiment, the optical element 10 has two segments 11, 12 arranged laterally adjacent to each other. The first segment 11 of the optical element 7 redirects the electromagnetic laser radiation 6 of the first VCSEL 4 to a first portion 8 of the illumination field 10, and the second segment 12 of the optical element 7 redirects the electromagnetic laser radiation 6' of the second VCSEL 5 to a second portion 9 of the illumination field 10. In other words, the illumination field 10 of the time-of-flight sensor is a segmented illumination field.

[0043] For example, the optical element 7 is a multi-lens array 13 having a plurality of microlenses. For example, a first segment 11 of the multi-lens array 13 includes a first number of microlenses, and a second segment 12 of the multi-lens array includes a second number of microlenses.

[0044] also, Figure 1 The time-of-flight sensor includes a cover glass 14 that completely covers the sensor chip 3, as seen in the plan view of the cover glass 14.

[0045] For example, the receiver unit 2 of the time-of-flight sensor includes one, two, or more photodiodes as detection elements. If the receiver unit 2 of the time-of-flight sensor includes multiple photodiodes as detection elements, these photodiodes are usually arranged in an array. For example, the detection element is a single-photon avalanche diode.

[0046] The time-of-flight sensor includes additional optical elements 15 that redirect the electromagnetic laser radiation 16, 16' of the field of view 17 of the time-of-flight sensor to the focal plane of the receiver unit 2. For example, the receiver unit 2 includes a first segment 18 and a second segment 20. The first segment 18 detects electromagnetic laser radiation 16 emitted by the first VCSEL 4 in a first portion 19 of the field of view 17 during a first time interval, and the second segment 20 detects electromagnetic laser radiation 16' emitted by the second VCSEL 5 in a second portion 21 of the field of view 17 during a second time interval.

[0047] During operation, electromagnetic laser radiation 6, 6' emitted from the first VCSEL 4 and the second VCSEL 5 irradiates the radiation incident surface 22 of the optical element and is redirected, for example, by diffraction into the first portion 8 and the second portion 9 of the illumination field 10. The electromagnetic laser radiation 6, 6' exits the optical element 7 from the emitting surface 23, passes through the cover glass 14, and extends through the illumination field 10 of the time-of-flight sensor.

[0048] If an object (not shown) is positioned within the illumination field 10, the electromagnetic laser radiation 6, 6' emitted by the two VCSELs 4, 5 is at least partially reflected back to the time-of-flight sensor by the object. The reflected electromagnetic laser radiation 16, 16' extends through the cover glass 14 and through an additional optical element 15. The additional optical element 15 redirects the electromagnetic laser radiation 16, 16' from the field of view 17 of the time-of-flight sensor to the focal plane of the receiver unit 2.

[0049] Combination Figure 2 and Figure 3 This describes a method for operating a time-of-flight sensor according to an exemplary embodiment. For example,Figure 1 The time-of-flight sensor can utilize based on Figure 2 and Figure 3 The method of the exemplary implementation is operated.

[0050] During the first step of the method for operating the time-of-flight sensor, the first VCSEL 4 of the transmitter unit 1 of the time-of-flight sensor is turned on during a first time interval and emits electromagnetic laser radiation 6, such as Figure 2 As shown. The electromagnetic laser radiation 6 of the first VCSEL 4 extends through the first segment 11 of the optical element 7 of the time-of-flight sensor and is redirected by the first segment 11 into the first part 8 of the illumination field 10. During the first time interval, the second VCSEL of the transmitter unit of the time-of-flight sensor is turned off ( Figure 2 The second VCSEL 5 was turned off during the first time interval.

[0051] During the first time interval, the electromagnetic laser radiation 6 of the first VCSEL 4 of the transmitter unit 1 is detected by the first segment 18 of the receiver unit 2 of the time-of-flight sensor.

[0052] Then, during the second time interval immediately following the first time interval, the second VCSEL 5 of transmitter unit 1 is turned on, and the first VCSEL 4 is simultaneously turned off. Similarly, the electromagnetic laser radiation 6' of the second VCSEL 5 extends through the optical element 7 and is redirected by the second segment 12 of the optical element 7 to the second portion 9 of the illumination field 10 of the time-of-flight sensor. During the second time interval, the electromagnetic laser radiation 6' of the second VCSEL 5 is detected by the second segment 20 of the receiver unit 2 of the time-of-flight sensor. Figure 3 ).

[0053] Figure 4 and Figure 5 An illustrative simulation of the radiation intensity of the radiation emitting surfaces 24 of the first VCSEL 4 and the second VCSEL 5 of the transmitter unit 1 of the time-of-flight sensor with segmented illumination field 10 is shown.

[0054] Figure 4 An exemplary simulation of the radiation intensity of the radiation emitting surface 24 of the first VCSEL 4 when it is switched on is shown, and Figure 5 An illustrative simulation of the radiation intensity of the radiation emitting surface 24 of the second VCSEL 5 when it is switched on is shown.

[0055] For example, each VCSEL 4, 5 of transmitter unit 1 operates with a 50% duty cycle but at twice the current, such as operating at 1 ampere compared to two VCSELs operating simultaneously in a common time-of-flight sensor.

[0056] Specifically, the two VCSELs 4 and 5 of the time-of-flight sensor are switched on alternately with a current of 1 A. In this case, the total input current is 1 A. In the signal-to-noise ratio (SNR) of the time-of-flight sensor, the signal is linearly proportional to the optical power and time, but the noise is only proportional to the square root of time. Therefore, compared to the SNR of a common time-of-flight sensor without segmented illumination fields, the SNR of the time-of-flight sensor with segmented illumination field 10 and the two VCSELs 4 and 5 successively illuminating different portions 8 and 9 of the illumination field 10 has, for example, a value of 2 / sqrt(2). Therefore, compared to the SNR of a common time-of-flight sensor without segmented illumination fields operating with the same current, the SNR of the time-of-flight sensor with two portions 8 and 9 of the illumination field 10 is improved by 41%.

[0057] Figure 6 and Figure 7 Simulated crosstalk of electromagnetic laser radiation 6 between transmitter unit 1 and receiver unit 2 via cover glass 14 is shown (only rays contributing to crosstalk are shown). Multilens array 13 is used as optical element 7. The simulation is based on the assumption that the reflectivity of electromagnetic laser radiation 6 at the interface between cover glass 14 and the surrounding medium (e.g., air) is 5%.

[0058] like Figure 6 As shown, most of the electromagnetic radiation 6 that contributes to crosstalk has three reflections at the interface between the cover glass 14 and the surrounding medium, resulting in a high attenuation of the amplitude of the electromagnetic laser radiation 6.

[0059] Figure 7 Only electromagnetic laser radiation 6, which contributes to crosstalk but is outside the illumination field 10 of optical element 7, is shown. Since these radiations are outside the nominal illumination field of view, they have only minimal amplitude.

[0060] The features and exemplary embodiments described in conjunction with the accompanying drawings can be combined with each other according to other exemplary embodiments, even if not all combinations are explicitly described. Furthermore, the exemplary embodiments described in conjunction with the accompanying drawings may alternatively or additionally have other features as described in the general section.

[0061] This application claims priority to German application DE 102024104985.5, the disclosure of which is incorporated herein by reference.

[0062] This invention is not limited to the description of the exemplary embodiments. Rather, the invention includes each new feature and each combination of features, particularly each combination of features of the claims, even if the feature or combination of features is not explicitly given in the claims or exemplary embodiments.

[0063] Figure Labels

[0064] 1. Transmitter Unit

[0065] 2 Receiver Unit

[0066] 3 Sensor Chips 3

[0067] 4 First VCSEL

[0068] 5 Second VCSEL

[0069] 6. Electromagnetic laser radiation in the illumination field of 6'

[0070] 7 Optical Components

[0071] 8. The first part of the illumination field

[0072] 9. Part Two of the Illumination Field

[0073] 10 Illumination Field

[0074] 11. First section of optical element

[0075] 12. Second section of optical elements

[0076] 13 Multi-lens array

[0077] 14. Cover with glass

[0078] 15 Other optical components

[0079] Electromagnetic laser radiation in 16' and 16' fields of view

[0080] 17 Field of view

[0081] The first segment of the 18 receiver units

[0082] 19. The first part of the field of view

[0083] 20 Second segment of receiver unit

[0084] 21. The second part of the field of view

[0085] 22. Radiation incident surface of optical elements

[0086] 23. Emitting surface of optical elements

[0087] 24 VCSEL radiation exit surface

[0088] D Distance

Claims

1. A time-of-flight sensor, comprising: - A transmitter unit (1) having at least two VCSELs (4, 5) that emit electromagnetic laser radiation (6, 6') during operation. - Receiver unit (2), the receiver unit (2) being configured to detect the electromagnetic laser radiation (6, 6') of the at least two VCSELs (4, 5), and - Optical element (7), which is configured to redirect the electromagnetic laser radiation (6, 6') of the at least two VCSELs (4, 5) to different portions (8, 9) of the illumination field (10).

2. The time-of-flight sensor according to the preceding claim, wherein, The optical element (7) includes at least two segments (11, 12) that redirect the electromagnetic laser radiation (6, 6') of the at least two VCSELs (4, 5) to different portions (8, 9) of the illumination field (10).

3. The time-of-flight sensor according to the preceding claim, wherein, - The first segment (11) of at least two segments (11, 12) of the optical element (7) redirects the electromagnetic laser radiation (6) of the first VCSEL (4) into the first part (8) of the illumination field (10), and - The second segment (12) of at least two segments (11, 12) of the optical element (7) redirects the electromagnetic laser radiation (6') of the second VCSEL (5) into the second part (9) of the illumination field (10).

4. The time-of-flight sensor according to the preceding claim, wherein, At least two segments (11, 12) of the optical element (7) are continuously connected to each other.

5. The time-of-flight sensor according to any one of the preceding claims, wherein, The receiver unit (2) includes at least two segments (18, 20), and each segment (18, 20) of the receiver unit (2) detects electromagnetic laser radiation (16, 16') of a portion (19, 21) of the field of view (17).

6. The time-of-flight sensor according to the preceding claim, wherein, - The first segment (18) of at least two segments (18, 20) of the receiver unit (2) is configured to detect electromagnetic laser radiation (16) of a first portion (19) of the field of view (17), and - The second segment (20) of at least two segments (18, 20) of the receiver unit (2) is configured to detect electromagnetic laser radiation (16') of the second part (20) of the field of view (17).

7. The time-of-flight sensor according to any one of the preceding claims, wherein, The receiver unit (2) includes at least one single-photon avalanche diode.

8. The time-of-flight sensor according to any one of the preceding claims, wherein, The optical element (7) is a lens, a diffractive optical element, a Fresnel lens, or a multi-lens array (13).

9. The time-of-flight sensor according to any one of the preceding claims, wherein, Without the optical element (7), the radiated energy and / or radiated power of the time-of-flight sensor does not exceed a given threshold.

10. A method for operating a time-of-flight sensor according to any one of the preceding claims, the method comprising the steps of: - Operate the first VCSEL (4) of at least two VCSELs (4, 5) of the transmitter unit (1) to emit electromagnetic laser radiation (6), and - After operating the first VCSEL (4), the second VCSEL (5) of the at least two VCSELs (4, 5) is operated to emit electromagnetic laser radiation (6').

11. The method according to the preceding claim, wherein, When the second VCSEL (5) is turned on, the first VCSEL (4) is turned off, and vice versa.

12. The method according to any one of claims 10 to 11, wherein, - The first segment (18) of the receiver unit (2) detects electromagnetic laser radiation (16) emitted by the first VCSEL (4) in the field of view (17) during the first time interval, and - The second segment (20) of the receiver unit (2) detects electromagnetic laser radiation (16') emitted by the second VCSEL (5) in the field of view (17) during the second time interval.

13. The method according to the preceding claim, wherein, The first time interval and the second time interval are different from each other.

14. A mobile phone comprising a time-of-flight sensor according to any one of claims 1 to 9.

15. The mobile phone according to the preceding claim further includes a camera device, and the time-of-flight sensor is used for the autofocus function of the camera device.

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