piezoelectric drive device

Abstract

A piezoelectric drive device (100) has a first piezoelectric drive section (PD1) and a second piezoelectric drive section (PD2) that move a movable member (1). The first piezoelectric drive section (PD1) has a first contact member (9A) fixed to a first piezoelectric element (8A) extending along a first axis (8AX) and in contact with an outer peripheral surface (1F) of the movable member (1). The first axis (8AX) is configured to cross relative to an X-axis direction at an inclination angle θ1 when viewed along a first longitudinal vibration direction (VD1). The second piezoelectric drive section (PD2) has a second contact member (9B) fixed to a second piezoelectric element (8B) extending along a second axis (8BX) and in contact with the outer peripheral surface (1F) of the movable member (1). The second axis (8BX) is configured to cross relative to the X-axis direction at an inclination angle θ2 when viewed along a second longitudinal vibration direction (VD2).

Description

Technical Field

[0001] This disclosure relates to piezoelectric drive devices. Background Technology

[0002] Previously, there were known drive devices that used piezoelectric elements to translate linear components (see Patent Document 1).

[0003] Existing technical documents Patent documents Patent Document 1: Japanese Patent Application Publication No. 8-140376 Summary of the Invention

[0004] The problem that the invention aims to solve However, the aforementioned drive device can only translate the linear component (movable component) and cannot enable the linear component (movable component) to perform other actions.

[0005] Therefore, it is desirable to provide a piezoelectric drive device that enables movable parts to perform a variety of actions.

[0006] Methods for solving problems The piezoelectric drive device according to the embodiments of this disclosure includes: a fixed side member; a movable member having a generally circular cross-sectional shape in a cutting plane perpendicular to the translation direction; and a piezoelectric drive unit for moving the movable member at least in the translation direction. The piezoelectric drive unit has a first piezoelectric drive unit and a second piezoelectric drive unit. The first piezoelectric drive unit has: a first piezoelectric element extending along a first axis; and a first contact member extending along the first axis, fixed to the side of the first piezoelectric element that is the movable member side, and contacting the outer peripheral surface of the movable member at a first position. When viewed in a direction perpendicular to one side of the first piezoelectric element, i.e., a first longitudinal vibration direction, the first axis is configured to intersect obliquely relative to the translational direction. The second piezoelectric drive unit has: a second piezoelectric element extending along a second axis; and a second contact member extending along the second axis and fixed to the side of the second piezoelectric element that becomes the movable member side, and in contact with the outer peripheral surface of the movable member in a second position. When viewed in a direction perpendicular to one side of the second piezoelectric element, i.e., a second longitudinal vibration direction, the second axis is configured to intersect obliquely relative to the translational direction.

[0007] Invention Effects The piezoelectric drive device described above enables the movable parts to perform a variety of actions. Attached Figure Description

[0008] Figure 1 This is a perspective view of a piezoelectric drive device according to an embodiment of the present disclosure.

[0009] Figure 2 yes Figure 1 An exploded perspective view of the piezoelectric drive device shown.

[0010] Figure 3 yes Figure 1 A more detailed exploded perspective view of the piezoelectric drive device shown.

[0011] Figure 4 It constitutes Figure 1 A perspective view of the holding component and the piezoelectric drive unit of the piezoelectric drive device shown.

[0012] Figure 5 It constitutes Figure 1 Front view of the movable part, shaft part, holding part, rod-shaped part, piezoelectric drive part, and swinging part of the piezoelectric drive device shown.

[0013] Figure 6 It indicates composition Figure 5 The diagram shows the piezoelectric element and contact components of the piezoelectric drive unit.

[0014] Figure 7 It constitutes Figure 1 Five views of the movable parts and piezoelectric drive unit of the piezoelectric drive device shown.

[0015] Figure 8 This is an exploded perspective view of another configuration example of the piezoelectric drive device according to an embodiment of the present disclosure.

[0016] Figure 9 It constitutes Figure 8 The diagram shows the rod-shaped component and the oscillating component of the piezoelectric drive device.

[0017] Figure 10 It constitutes Figure 8 Front view of the movable part, shaft part, holding part, rod-shaped part, piezoelectric drive part, and swinging part of the piezoelectric drive device shown.

[0018] Figure 11 This is a diagram showing the positional relationship between the movable part and the piezoelectric drive unit in another configuration example of the piezoelectric drive device according to an embodiment of the present disclosure. Detailed Implementation

[0019] The following is for reference Figures 1-3 The piezoelectric drive device 100 according to the embodiments of this disclosure will be described. Figure 1 This is a perspective view of the piezoelectric drive device 100. Specifically, Figure 1 The above figure is a perspective view of a piezoelectric drive device 100 that rotates the movable part 1 about the rotation axis 1X. Figure 1The central view is a perspective view of a piezoelectric drive device 100 that translates the movable part 1 along the rotation axis 1X to one side (X1 side, front side). Figure 1 The figure below is a perspective view of a piezoelectric drive device 100 that translates the movable part 1 along the rotation axis 1X to the other side (X2 side, rear side). Figure 2 This is an exploded perspective view of the piezoelectric drive device 100. Figure 3 This is a more detailed exploded perspective view of the piezoelectric drive device 100.

[0020] Figure 1 In the coordinate system, X1 represents one direction of the X-axis, and X2 represents the other direction of the X-axis. Y1 represents one direction of the Y-axis, and Y2 represents the other direction of the Y-axis. Z1 represents one direction of the Z-axis, and Z2 represents the other direction of the Z-axis. Figure 1 In the diagram, the X1 side of the piezoelectric drive device 100 corresponds to the front side (front face) of the piezoelectric drive device 100, and the X2 side corresponds to the rear side (back face) of the piezoelectric drive device 100. The Y1 side of the piezoelectric drive device 100 corresponds to the left side of the piezoelectric drive device 100, and the Y2 side corresponds to the right side of the piezoelectric drive device 100. The Z1 side of the piezoelectric drive device 100 corresponds to the upper side of the piezoelectric drive device 100, and the Z2 side corresponds to the lower side of the piezoelectric drive device 100. The same applies to other figures.

[0021] The piezoelectric drive device 100 is a device capable of realizing various movements of the movable member 1, and is configured to include the movable member 1, the fixed side member FB, the piezoelectric drive unit PD, and the swing member SM. In the example shown, the various movements of the movable member 1 include rotation of the movable member 1 about the rotation axis 1X and translation of the movable member 1 along the rotation axis 1X. Figure 1 As shown in the figure above, the piezoelectric drive device 100 can rotate the movable member 1 about the rotation axis 1X without translating the movable member 1 along the rotation axis 1X, or, as Figure 1 As shown in the central and lower figures, the movable member 1 can be translated along the rotation axis 1X without rotating the movable member 1 about the rotation axis 1X. Furthermore, the piezoelectric drive device 100 can also translate the movable member 1 along the rotation axis 1X while rotating the movable member 1 about the rotation axis 1X.

[0022] The movable part 1 is a component that is actuated by the piezoelectric drive unit PD, and is configured such that its cross-sectional shape perpendicular to the rotation axis 1X has a generally arcuate shape. The movable part 1 is formed of a metal such as titanium copper or stainless steel. Alternatively, the movable part 1 can also be formed of other metals. These other metals can be either magnetic or non-magnetic metals. Furthermore, the movable part 1 can also be formed of materials other than metals, such as synthetic resin or ceramics. In the illustrated example, the movable part 1 is a cylindrical body with a generally circular cross-sectional shape perpendicular to the rotation axis 1X, configured to actuate under the driving force generated by the piezoelectric drive unit PD. Alternatively, the movable part 1 can also be a cylinder.

[0023] The fixed-side component FB is used to support the movable component 1 and the swinging component SM. In the example shown in the figure, as... Figure 3 As shown, the fixed side component FB is configured to include a base component 2, a shaft support component 3, a shaft component 4, and a rod-shaped component 11.

[0024] The base component 2 is used to support other components constituting the fixed side component FB. In the illustrated example, the base component 2 is a component with a generally cuboid shape and a through-hole 2K that is rectangular in top view for accommodating the swing component SM in a swingable manner. Furthermore, in the illustrated example, the base component 2 is formed of synthetic resin. However, the base component 2 may also be formed of metal. Additionally, grooves 2G are formed on the upper surface of the base component 2 to accommodate the two ends of the rod-shaped component 11.

[0025] The shaft support component 3 is a component used to support the shaft component 4. In the example shown in the figure, the shaft support component 3 includes a rear shaft support component 3B and a front shaft support component 3F. The rear shaft support component 3B and the front shaft support component 3F each have a through portion TH1 through which a cylindrical (bar-shaped) shaft component 4 is inserted, and are fixed to the upper surface of the base component 2 by adhesive.

[0026] Shaft component 4 is a component used to support the movable component 1 so that it can move. In the example shown, shaft component 4 is a cylindrical (bar-shaped) component configured to support the movable component 1 so that it can rotate about the rotation axis 1X and translate along the rotation axis 1X. In the example shown, shaft component 4 is fixed to shaft support component 3 by adhesive.

[0027] The rod-shaped component 11 is used to support the swinging component SM so that it can swing. In the example shown, the rod-shaped component 11 is made of metal and is configured such that one end and the other end are respectively inserted into the groove 2G formed in the base component 2, and the middle part is inserted into the through portion TH2 provided in the swinging component SM. In addition, the rod-shaped component 11 is fixed to the base component 2 by adhesive.

[0028] The piezoelectric drive unit PD is a drive mechanism used to move the movable part 1, such as... Figure 3 As shown, it includes a first piezoelectric drive unit PD1 and a second piezoelectric drive unit PD2.

[0029] The swing member SM is a component used to press a pair of piezoelectric drive units PD (first piezoelectric drive unit PD1 and second piezoelectric drive unit PD2) against the movable member 1. In the example shown in the figure, as... Figure 3 As shown, the swing member SM is configured to include a support member 5, a holding member 6, a force-applying member 7, and an intermediate member 12, and is supported by the fixed side member FB (rod-shaped member 11) to be able to swing. Moreover, the swing member SM is configured to press a pair of piezoelectric drive units PD against the movable member 1 with approximately the same force.

[0030] Support member 5 is a component used to support the piezoelectric drive unit PD. In the example shown, support member 5 includes a first support member 5A for supporting the first piezoelectric drive unit PD1 and a second support member 5B for supporting the second piezoelectric drive unit PD2. The first support member 5A and the second support member 5B are of the same size and are arranged symmetrically to each other. Specifically, the first support member 5A has a first opposing portion OP1, which is the portion opposite to the movable member 1, and a first spring receiving portion SR1, which is the portion that contacts the force-applying member 7. Similarly, the second support member 5B has a second opposing portion OP2, which is the portion opposite to the movable member 1, and a second spring receiving portion SR2, which is the portion that contacts the force-applying member 7.

[0031] The retaining member 6 is a component used to retain the piezoelectric drive unit PD. In the example shown, the retaining member 6 is formed by stamping a titanium-copper metal sheet. The metal sheet can also be formed of other metals such as stainless steel. Furthermore, in the example shown, the retaining member 6 includes a first retaining member 6A for retaining the first piezoelectric drive unit PD1 and a second retaining member 6B for retaining the second piezoelectric drive unit PD2. Specifically, the first retaining member 6A is housed in a first recess RP1 formed in the first support member 5A and is fixed by adhesive, and the second retaining member 6B is housed in a second recess RP2 formed in the second support member 5B (in...). Figure 3 (The middle part is not visible) and is fixed by adhesive. That is, the first piezoelectric drive unit PD1 is supported by the first support member 5A via the first holding member 6A, and the second piezoelectric drive unit PD2 is supported by the second support member 5B via the second holding member 6B.

[0032] The force-applying component 7 is a component that generates the force to press the piezoelectric drive unit PD against the movable component 1. In the example shown, the force-applying component 7 is a metal leaf spring LS, with its upper surface at the left end fixed to the lower surface of the first support component 5A, its upper surface at the right end fixed to the lower surface of the second support component 5B, and the upper surface of the middle portion located between the left and right ends fixed to the lower surface of the intermediate component 12. It should be noted that the force-applying component 7 is fixed to the support component 5 and the intermediate component 12 by any method such as adhesive or riveting.

[0033] Specifically, the force-applying member 7 is configured such that, when the movable member 1 is sandwiched between the first piezoelectric drive unit PD1 and the second piezoelectric drive unit PD2, it generates a preload that would bring the first opposing portion OP1 of the first support member 5A and the second opposing portion OP2 of the second support member 5B closer to each other.

[0034] The intermediate component 12 is a component used to form a through portion TH2 through which the rod-shaped component 11 is inserted. In the example shown, the intermediate component 12 is fixed to the upper surface of the middle portion of the force-applying component 7 in a state where it is disposed between the first support component 5A and the second support component 5B without contacting either the first support component 5A or the second support component 5B. Specifically, the intermediate component 12 is configured to include a first intermediate component 12A and a second intermediate component 12B, and is configured to clamp the rod-shaped component 11 vertically by the first intermediate component 12A and the second intermediate component 12B. The first intermediate component 12A and the second intermediate component 12B are fixed by adhesive.

[0035] According to this configuration, the swing member SM can balance the force that presses the first piezoelectric drive unit PD1 against the movable member 1 and the force that presses the second piezoelectric drive unit PD2 against the movable member 1. That is, the swing member SM can press a pair of piezoelectric drive units PD against the movable member 1 with approximately the same force.

[0036] Next, refer to Figure 4 as well as Figure 5 The details of the piezoelectric drive unit (PD) will be explained. Figure 4 This is a perspective view of the retaining component 6 and the piezoelectric drive unit PD. Specifically, Figure 4 The image above is a 3D assembly diagram. Figure 4 The image below is an exploded 3D view. Figure 5 This is a front view of the movable part 1, shaft part 4, retaining part 6, rod-shaped part 11, piezoelectric drive unit PD, and swinging part SM. Specifically, Figure 5 The image above is an assembly diagram. Figure 5 The image below is an exploded view.

[0037] The piezoelectric drive unit PD is configured to actuate the movable member 1. In the example shown, the piezoelectric drive unit PD is an example of a friction drive unit using the drive system disclosed in U.S. Patent No. 7,786,648, and is configured to include a piezoelectric element 8, a contact member 9, and a flexible wiring substrate 10. Furthermore, the piezoelectric drive unit PD is configured to be pressed against the movable member 1 by a force-applying member 7.

[0038] Specifically, the piezoelectric drive unit PD includes a first piezoelectric drive unit PD1 and a second piezoelectric drive unit PD2, the piezoelectric element 8 includes a first piezoelectric element 8A and a second piezoelectric element 8B, the contact member 9 includes a first contact member 9A and a second contact member 9B, and the flexible wiring substrate 10 includes a first flexible wiring substrate 10A and a second flexible wiring substrate 10B. Alternatively, the flexible wiring substrate 10 can be replaced by a rigid wiring substrate. Furthermore, the first flexible wiring substrate 10A and the second flexible wiring substrate 10B can also be constructed from a shared flexible wiring substrate. In this case, the shared flexible wiring substrate can also be configured such that one part functions as the first flexible wiring substrate 10A and the other part functions as the second flexible wiring substrate 10B.

[0039] More specifically, the first piezoelectric drive unit PD1 includes a first piezoelectric element 8A, a first contact member 9A, and a first flexible wiring substrate 10A, configured to be held by a first holding member 6A fixed to the first support member 5A, and pressed against the movable member 1 by a first force-applying member 7A fixed to the first support member 5A. The second piezoelectric drive unit PD2 includes a second piezoelectric element 8B, a second contact member 9B, and a second flexible wiring substrate 10B, configured to be held by a second holding member 6B fixed to the second support member 5B, and pressed against the movable member 1 by a second force-applying member 7B fixed to the second support member 5B. The first force-applying member 7A and the second force-applying member 7B are composed of a common spring member SP (leaf spring LS).

[0040] The first piezoelectric element 8A and the second piezoelectric element 8B are each configured to achieve bending vibration according to the applied voltage. In the example shown in the figure, as... Figure 4 As shown in the figure above, the first piezoelectric element 8A extends along the first axis 8AX, and the second piezoelectric element 8B extends along the second axis 8BX. Additionally, as... Figure 4 As shown in the figure below, the first piezoelectric element 8A and the second piezoelectric element 8B are each configured to achieve bending vibration with two nodes (ND). During bending vibration, the portions of the two ND nodes hardly vibrate. Figure 4In the diagram below, for clarity, crosshairs are marked at the positions of the nodes ND of the first piezoelectric element 8A and the second piezoelectric element 8B. Furthermore, the positions of the nodes ND in the piezoelectric element 8 include the positions of the first node ND1 and the second node ND2. The positions of the nodes ND correspond to positions at a predetermined distance from the end of the piezoelectric element 8. This predetermined distance is, for example, approximately one-quarter of the total length of the piezoelectric element 8.

[0041] The first flexible wiring substrate 10A is a flexible wiring substrate containing conductive patterns, configured to electrically connect an external voltage supply source (control circuit) to the first piezoelectric element 8A. In the illustrated example, the first flexible wiring substrate 10A is configured to apply a voltage to the first piezoelectric element 8A. Furthermore, the first piezoelectric element 8A is bonded to one side (proximal side, Y2 side) of the first flexible wiring substrate 10A using an adhesive. In the illustrated example, as shown... Figure 6 As shown, the first piezoelectric element 8A has electrodes ED at each of the four corners of its surface on the other side (far side, Y1 side). Furthermore, the four electrodes ED of the first piezoelectric element 8A are bonded via adhesive to four conductive patterns PT formed on the surface of one side (proximal side, Y2 side) of the first flexible wiring substrate 10A. The proximal side refers to the side closer to the movable member 1, and the far side refers to the side farther from the movable member 1.

[0042] The second flexible wiring substrate 10B is a flexible wiring substrate containing conductive patterns, configured to electrically connect an external voltage supply source (control circuit) to the second piezoelectric element 8B. In the illustrated example, the second flexible wiring substrate 10B is configured to apply a voltage to the second piezoelectric element 8B. Furthermore, the second piezoelectric element 8B is bonded to the surface of one side (proximal side, Y1 side) of the second flexible wiring substrate 10B via an adhesive. In the illustrated example, the second piezoelectric element 8B has electrodes ED at each of the four corners of the surface of the other side (distal side, Y2 side). Moreover, the four electrodes ED of the second piezoelectric element 8B are bonded to four conductive patterns PT formed on the surface of one side (proximal side, Y1 side) of the second flexible wiring substrate 10B via an adhesive.

[0043] In the example shown, the adhesive is one capable of forming an anisotropic conductive film. It is heated and pressurized while positioned between the piezoelectric element 8 and the flexible wiring substrate 10, thus fixing them to both the piezoelectric element 8 and the flexible wiring substrate 10. Consequently, the four electrodes ED of the piezoelectric element 8 and the four conductive patterns PT, which are part of the conductive pattern of the flexible wiring substrate 10, are individually electrically connected. However, the adhesive can be a conductive adhesive or can be replaced with solder or the like.

[0044] Furthermore, in the example shown, conductive patterns are formed on both sides of the flexible wiring substrate 10, and an insulating film is provided on both sides to cover the conductive patterns except for the connecting portions such as the conductive patterns PT. Moreover, in order to achieve more reliable insulation, an insulating protective film is provided on the portion that contacts the piezoelectric element 8 and the portion that contacts the holding member 6.

[0045] The first piezoelectric drive unit PD1 is configured to be pressed against the movable member 1 while being held by the first holding member 6A fixed to the first support member 5A. In the example shown in the figure, as Figure 4 As shown, the first retaining member 6A is configured such that the positions corresponding to the two nodes ND formed during the bending vibration of the first piezoelectric element 8A (the positions of the first protrusion SG1 and the second protrusion SG2) are in contact with the surface of the other side (far side, Y1 side) of the first flexible wiring substrate 10A. Alternatively, the first retaining member 6A and the first flexible wiring substrate 10A can also be bonded together with an adhesive.

[0046] The second piezoelectric drive unit PD2 is configured to be pressed against the movable member 1 while being held by the second holding member 6B, which is fixed to the second support member 5B. In the example shown, as... Figure 4 As shown, the second retaining member 6B is configured such that the positions corresponding to the two nodes ND formed during the bending vibration of the second piezoelectric element 8B (the positions of the first protrusion SG1 and the second protrusion SG2) are in contact with the surface of the other side (far side, Y2 side) of the second flexible wiring substrate 10B. Alternatively, the second retaining member 6B and the second flexible wiring substrate 10B can also be joined by an adhesive.

[0047] The retaining member 6 is formed from a metal plate. In the example shown, the first retaining member 6A has a first fixing portion 6AF fixed to the first support member 5A and a first support portion 6AS supporting the first piezoelectric drive portion PD1. Additionally, the second retaining member 6B has a second fixing portion 6BF fixed to the second support member 5B and a second support portion 6BS supporting the second piezoelectric drive portion PD2.

[0048] The first fixing part 6AF and the second fixing part 6BF each include a first protrusion SG1 and a second protrusion SG2 protruding toward the movable member 1 (proximal side). In the example shown, the first protrusion SG1 and the second protrusion SG2 are drawn reinforcing ribs formed by deep drawing. Alternatively, the first protrusion SG1 and the second protrusion SG2 can also be formed by embossing or semi-punching. Therefore, on the other side of the first fixing part 6AF (distal side, Y1 side) and the other side of the second fixing part 6BF (distal side, Y2 side), recesses corresponding to the first protrusion SG1 and the second protrusion SG2 are formed respectively. Specifically, the first protrusion SG1 and the second protrusion SG2 are formed to extend (protrude) perpendicularly to the extension direction of the piezoelectric element 8. Furthermore, the positions of the first protrusion SG1 and the second protrusion SG2 are preferably positioned corresponding to the nodes ND of the piezoelectric element 8, specifically, they are separated from each other in the extension direction of the piezoelectric element 8.

[0049] In the example shown, the first piezoelectric drive unit PD1 (first piezoelectric element 8A) is mounted to the first holding member 6A by means of adhesive or the like, fixing its long side to the first support portion 6AS. Specifically, the first piezoelectric drive unit PD1 is mounted to the first holding member 6A by means of adhesive or the like, fixing the positions of the first nodes ND1 and ND2 of the first piezoelectric element 8A on each of its two long side sides. Furthermore, the first piezoelectric drive unit PD1 is mounted to the first holding member 6A by means of adhesive, fixing the positions of the first nodes ND1 and ND2 of the first piezoelectric element 8A on the first flexible wiring substrate 10A to the first protrusions SG1 and SG2 of the first fixing portion 6AF. That is, the first piezoelectric drive unit PD1 is mounted on the first holding member 6A in such a way that the portion of the first flexible wiring substrate 10A that does not correspond to the first node ND1 and the second node ND2 of the first piezoelectric element 8A respectively, and the first fixing part 6AF of the first holding member 6A are not in contact.

[0050] Similarly, the second piezoelectric drive unit PD2 (second piezoelectric element 8B) is mounted to the second holding member 6B by means of adhesive or the like, fixing its long side to the second support portion 6BS. Specifically, the second piezoelectric drive unit PD2 is mounted to the second holding member 6B by means of adhesive or the like, fixing its two long side sides to positions corresponding to the first node ND1 and the second node ND2 of the second piezoelectric element 8B, respectively, and fixing its four second support portions 6BS. In addition, the second piezoelectric drive unit PD2 is mounted to the second holding member 6B by means of adhesive, fixing its two long side sides to positions corresponding to the first node ND1 and the second node ND2 of the second piezoelectric element 8B, respectively, and fixing its two fixed portions 6BF to the first protrusion SG1 and the second protrusion SG2, respectively. That is, the second piezoelectric drive unit PD2 is mounted on the second retaining member 6B in such a way that the portion of the second flexible wiring substrate 10B that does not correspond to the first node ND1 and the second node ND2 of the second piezoelectric element 8B respectively, and the second fixing portion 6BF of the second retaining member 6B does not contact the second retaining member 6B.

[0051] Next, refer to Figure 6 The operation of the first piezoelectric drive unit PD1 will be explained. Figure 6 This diagram shows the first piezoelectric element 8A and the first contact member 9A constituting the first piezoelectric drive unit PD1. Figure 6 For clarity, the illustration of the first flexible wiring substrate 10A is omitted. Specifically, Figure 6 The topmost image is a perspective view of the first piezoelectric element 8A and the first contact component 9A. Figure 6 The second, third, and fourth figures from the top are views of the first piezoelectric element 8A and the first contact component 9A as observed along the first transverse vibration direction BD1. Figure 6 The fifth, sixth, and seventh figures from the top are views of the first piezoelectric element 8A and the first contact member 9A as observed along the first longitudinal vibration direction VD1. Furthermore, in Figure 6 In the image, for ease of understanding, the flexural shape of the first piezoelectric drive unit PD1 is exaggerated. Additionally, refer to... Figure 6 The following description relates to the operation of the first piezoelectric drive unit PD1, but it also applies to the operation of the second piezoelectric drive unit PD2. This is because the first piezoelectric drive unit PD1 and the second piezoelectric drive unit PD2 have the same configuration.

[0052] In the example shown, the first piezoelectric element 8A has two parts (first part 8A1 and second part 8A2) arranged side by side along the first transverse vibration direction BD1, and two electrodes ED capable of being individually applied voltage are formed in each of these two parts. Specifically, the first electrode ED1 and the second electrode ED2 are formed in the first part 8A1, and the first electrode ED11 and the second electrode ED12 are formed in the second part 8A2. Furthermore, in Figure 6 For clarity, the first part 8A1 is labeled with a dot pattern, and the second part 8A2 is labeled with a diagonal line pattern.

[0053] When the first piezoelectric drive unit PD1 applies voltage to the first part 8A1 and the second part 8A2 separately at appropriate timing, it can, for example, cause the first piezoelectric element 8A to bend and vibrate (circular motion) in such a way that the trajectory drawn by the predetermined point, i.e., the center point CP, of the first piezoelectric element 8A (first piezoelectric drive unit PD1) becomes a circular track centered on the first axis 8AX. Furthermore, the circular motion can also be elliptical motion. That is, the first piezoelectric element 8A can achieve a movement such that the center point CP draws a circle (circular motion). In the illustrated example, the center point CP of the first piezoelectric element 8A is the center of gravity of the first piezoelectric element 8A. However, the center point CP of the circular motion can also be located within the first contact member 9A fixed to the first piezoelectric element 8A. This is because the first contact member 9A also performs circular motion together with the first piezoelectric element 8A. Furthermore, by applying voltages to the first portion 8A1 and the second portion 8A2 at appropriate timing, the first piezoelectric drive unit PD1 can switch the direction of movement (rotation direction) along the center point CP of the circular track between clockwise and counterclockwise when viewed from the side along the direction of the first axis 8AX. Moreover, the circle (circular track) drawn by the center point CP does not need to be a perfect circle; it only needs to be approximately circular and can also be elliptical. The same applies to the second piezoelectric drive unit PD2.

[0054] By switching the rotation direction, the combination of the first piezoelectric drive unit PD1 and the second piezoelectric drive unit PD2 can switch the translation direction of the movable part 1 along the rotation axis 1X, and can also switch the rotation direction of the movable part 1 around the rotation axis 1X.

[0055] exist Figure 6 In the topmost figure, the dashed arrows depicting the first piezoelectric element 8A indicate an example of the bending vibration of the first piezoelectric element 8A (a circular motion in which the first piezoelectric element 8A flexes while rotating counterclockwise around the first axis 8AX). Furthermore, although not indicated by arrows, the first piezoelectric element 8A can also flex while rotating clockwise around the first axis 8AX.

[0056] The first contact member 9A is mounted on the first piezoelectric element 8A and configured to contact the movable member 1. In the illustrated example, the first contact member 9A is bonded to the surface of one side (proximal side, Y2 side) of the first piezoelectric element 8A entirely by an adhesive. The first contact member 9A is formed of a metal such as titanium copper or stainless steel, and is configured with an appropriate thickness to allow it to undergo bending vibration (circular motion) in conjunction with the bending vibration (circular motion) of the first piezoelectric element 8A. In the illustrated example, the first contact member 9A is a friction plate formed of stainless steel. The first contact member 9A extends to the same length as the first piezoelectric element 8A in the same direction as its extension direction. Moreover, the first contact member 9A is configured to contact the movable member 1 at its central portion in its extension direction. Specifically, the first contact member 9A is configured to contact the movable member 1 at the portion where the amplitude of the bending vibration (circular motion) is largest (the portion corresponding to the antinode of the bending vibration). Furthermore, in the example shown, the contact surface 9AS of the first contact member 9A on the side that contacts the movable member 1 (proximal side, Y2 side) is a convex curved surface that protrudes towards the Y2 side. That is, the contact surface 9AS is configured to form a surface with a protrusion.

[0057] The contact between the metal movable part 1 and the metal first contact part 9A is to prevent wear on the movable part 1 caused by the contact between the synthetic resin movable part 1 and the metal first contact part 9A. Furthermore, as long as contact between the movable part 1 and the first contact part 9A can be achieved, the length of the first contact part 9A along the first axis 8AX can differ from the length of the first piezoelectric element 8A along the first axis 8AX. For example, the length of the first contact part 9A along the first axis 8AX can be less than the length of the first piezoelectric element 8A along the first axis 8AX. However, the length of the first contact part 9A in the extending direction (along the first axis 8AX) is preferably greater than the length of the first piezoelectric element 8A.

[0058] When the first electrode ED1 is connected to a high potential and the second electrode ED2 is connected to a low potential by contracting the first part 8A1, and the first electrode ED11 is connected to a high potential and the second electrode ED12 is connected to a low potential by contracting the second part 8A2, as shown in the second figure from the top, the first piezoelectric element 8A and the first contact member 9A flex in a proximal-protruding manner. Hereinafter, the state of the first piezoelectric drive unit PD1 when the first piezoelectric element 8A and the first contact member 9A protrude to the proximal side is also referred to as the "proximal-protruding state".

[0059] Furthermore, when the first electrode ED1 and the second electrode ED2 are connected to the same potential with the first part 8A1 not extending or retracting, or when voltage is stopped being applied to the first electrode ED1 and the second electrode ED2 are connected to the same potential with the second part 8A2 not extending or retracting, or when voltage is stopped being applied to the first electrode ED11 and the second electrode ED12, as shown in the third and sixth figures from the top, the first piezoelectric element 8A and the first contact member 9A extend in a straight line. Hereinafter, the state of the first piezoelectric drive unit PD1 when the first piezoelectric element 8A and the first contact member 9A extend in a straight line is also referred to as the "neutral state." Additionally, the state when voltage is stopped is also referred to as the "initial state."

[0060] Furthermore, when the first electrode ED1 is connected to a low potential and the second electrode ED2 is connected to a high potential by extending the first part 8A1, and the first electrode ED11 is connected to a low potential and the second electrode ED12 is connected to a high potential by extending the second part 8A2, as shown in the fourth figure from the top, the first piezoelectric element 8A and the first contact member 9A flex in a way that protrudes distally. Hereinafter, the state of the first piezoelectric drive unit PD1 when the first piezoelectric element 8A and the first contact member 9A protrude distally is also referred to as the "distal convex state".

[0061] Furthermore, when the first electrode ED1 is connected to a low potential and the second electrode ED2 is connected to a high potential by extending the first part 8A1, and the first electrode ED11 is connected to a high potential and the second electrode ED12 is connected to a low potential by contracting the second part 8A2, as shown in the fifth figure from the top, the first piezoelectric element 8A and the first contact member 9A flex in a manner that protrudes upwards in the figure. Hereinafter, the state of the first piezoelectric drive unit PD1 when the first piezoelectric element 8A and the first contact member 9A protrude upwards in the figure is also referred to as the "upper convex state".

[0062] Furthermore, when the first electrode ED1 is connected to a high potential and the second electrode ED2 is connected to a low potential by contracting the first part 8A1, and the first electrode ED11 is connected to a low potential and the second electrode ED12 is connected to a high potential by extending the second part 8A2, as shown in the seventh figure from the top, the first piezoelectric element 8A and the first contact member 9A flex in a manner that protrudes downwards in the figure. Hereinafter, the state of the first piezoelectric drive unit PD1 when the first piezoelectric element 8A and the first contact member 9A protrude downwards in the figure is also referred to as the "downward convex state".

[0063] Furthermore, the action (vibration) that causes the state of the first piezoelectric drive unit PD1 to repeatedly change in the order of proximal convex state (the state shown in the second figure from the top), neutral state (the state shown in the third figure from the top), distal convex state (the state shown in the fourth figure from the top), neutral state, proximal convex state, ... is also called "longitudinal vibration". Additionally, the action (vibration) that causes the state of the first piezoelectric drive unit PD1 to repeatedly change in the order of upper convex state (the state shown in the fifth figure from the top), neutral state (the state shown in the sixth figure from the top), lower convex state (the state shown in the seventh figure from the top), neutral state, upper convex state, ... is also called "lateral vibration".

[0064] Furthermore, when a voltage is applied between the first electrode ED1 (first electrode ED11) and the second electrode ED2 (second electrode ED12) to elongate or contract the first portion 8A1 (second portion 8A2) in its extending direction, the first contact member 9A fixed to one side of the first piezoelectric element 8A does not change its size in the extending direction. Therefore, the first piezoelectric drive portion PD1 deforms into the state described above. In addition, the first flexible wiring substrate 10A fixed to the other side of the first piezoelectric element 8A can deform to follow the shape change of the first piezoelectric element 8A.

[0065] Here, refer to Figure 7 The relationship between the bending vibration (circular motion) of the piezoelectric drive unit PD and the motion of the movable part 1 is explained. Figure 7 These are five views (front view, left view, right view, top view, and bottom view) of the movable part 1 and the piezoelectric drive unit PD. Additionally, in Figure 7 In the diagram, the front view is located in the center, the left view is located to the left of the front view, the right view is located to the right of the front view, the top view is located above the front view, and the bottom view is located below the front view.

[0066] like Figure 7 As shown in the left view, when the first piezoelectric drive unit PD1 repeatedly changes in the order of proximal convex state, lower convex state, distal convex state, upper convex state, proximal convex state, ..., it generates a force F1 that aims to move the movable member 1 diagonally downward and forward. The movement of the movable member 1 is limited by the shaft member 4 to rotation about the rotation axis 1X and translation along the rotation axis 1X, therefore the force F1 is decomposed into an axial component F1X and a rotational component F1Z. Furthermore, when the first piezoelectric drive unit PD1 repeatedly changes in the order of proximal convex state, upper convex state, distal convex state, lower convex state, proximal convex state, ..., it generates a force F2 that aims to move the movable member 1 diagonally upward and backward. The movement of the movable member 1 is limited by the shaft member 4 to rotation about the rotation axis 1X and translation along the rotation axis 1X, therefore the force F2 is decomposed into an axial component F2X and a rotational component F2Z.

[0067] In addition, such as Figure 7 As shown in the right view, when the second piezoelectric drive unit PD2 repeatedly changes in the order of proximal convex state, lower convex state, distal convex state, upper convex state, proximal convex state, ..., it generates a force F3 that aims to move the movable member 1 diagonally downward and forward. The movement of the movable member 1 is limited by the shaft member 4 to rotation about the rotation axis 1X and translation along the rotation axis 1X, therefore the force F3 is decomposed into an axial component F3X and a rotational component F3Z. Furthermore, when the second piezoelectric drive unit PD2 repeatedly changes in the order of proximal convex state, upper convex state, distal convex state, lower convex state, proximal convex state, ..., it generates a force F4 that aims to move the movable member 1 diagonally upward and backward. The movement of the movable member 1 is limited by the shaft member 4 to rotation about the rotation axis 1X and translation along the rotation axis 1X, therefore the force F4 is decomposed into an axial component F4X and a rotational component F4Z.

[0068] The piezoelectric drive device 100 synchronizes the actions of the first piezoelectric drive unit PD1 and the second piezoelectric drive unit PD2, causing their respective states to repeatedly change in the order of proximal convex state, lower convex state, distal convex state, upper convex state, proximal convex state, ..., thereby enabling the movable part 1 to translate forward (X1 side) as indicated by arrow AR1. This is because if the magnitude of force F1 is the same as the magnitude of force F3, the rotational component F1Z of force F1, which is in opposite directions, cancels out the rotational component F3Z of force F3, while the axial component F1X of force F1, which is in the same direction, is synthesized with the axial component F3X of force F3.

[0069] Furthermore, the piezoelectric drive device 100 synchronizes the actions of the first piezoelectric drive unit PD1 and the second piezoelectric drive unit PD2, causing their respective states to repeatedly change in the order of proximal convex state, upper convex state, distal convex state, lower convex state, proximal convex state, ..., thereby enabling the movable member 1 to translate rearward (towards X2) as indicated by arrow AR2. This is because if the magnitude of force F2 is the same as the magnitude of force F4, the rotational component F2Z of force F2, which is in opposite directions, cancels out the rotational component F4Z of force F4, while the axial component F2X of force F2, which is in the same direction, is synthesized with the axial component F4X of force F4.

[0070] Furthermore, the piezoelectric drive device 100 synchronizes the actions of the first piezoelectric drive unit PD1 and the second piezoelectric drive unit PD2, causing the state of the first piezoelectric drive unit PD1 to repeatedly change in the order of proximal convex state, upper convex state, distal convex state, lower convex state, proximal convex state, ..., and the state of the second piezoelectric drive unit PD2 to repeatedly change in the order of proximal convex state, lower convex state, distal convex state, upper convex state, proximal convex state, ..., thereby enabling the movable part 1 to rotate clockwise around the rotation axis 1X as shown by arrow AR3 when viewed from the X1 side. This is because if the magnitude of force F2 is the same as the magnitude of force F3, the axial components F2X of force F2 and F3X of force F3, which are in opposite directions, cancel each other out, while the rotational component F2Z of force F2 and F3Z of force F3, which are in the same direction, are combined.

[0071] Furthermore, the piezoelectric drive device 100 synchronizes the actions of the first piezoelectric drive unit PD1 and the second piezoelectric drive unit PD2, causing the state of the first piezoelectric drive unit PD1 to repeatedly change in the order of proximal convex state, lower convex state, distal convex state, upper convex state, proximal convex state, ..., and the state of the second piezoelectric drive unit PD2 to repeatedly change in the order of proximal convex state, upper convex state, distal convex state, lower convex state, proximal convex state, ..., thereby enabling the movable part 1 to rotate counterclockwise around the rotation axis 1X as shown by arrow AR4 when viewed from the X1 side. This is because if the magnitude of force F1 is the same as the magnitude of force F4, the axial components F1X of force F1 and F4X of force F4, which are in opposite directions, cancel each other out, while the rotational component F1Z of force F1 and F4Z of force F4, which are in the same direction, are combined.

[0072] Furthermore, in the example diagram, such as Figure 7 As shown in the left view, the angle θ1 between the straight line L3 along the translation direction (X-axis direction) and the straight line L1 along the first axis 8AX when viewed along the first longitudinal vibration direction VD1 is as follows. Figure 7As shown in the right view, when viewed along the second longitudinal vibration direction VD2, the angle θ2 between the straight line L4 along the translation direction (X-axis direction) and the straight line L2 along the second axis 8BX is the same. However, angles θ1 and θ2 can also be different from each other. This is because, by making the magnitude of the bending vibration (circular motion) of the first piezoelectric drive unit PD1 different from the magnitude of the bending vibration (circular motion) of the second piezoelectric drive unit PD2, the resultant force acting on either the rotational or translational direction can be selectively made zero. Specifically, because the piezoelectric drive device 100 adjusts the magnitude of the bending vibration (circular motion) of the first piezoelectric drive unit PD1 and the second piezoelectric drive unit PD2 respectively through feedback control, it is possible to make the resultant force acting on the rotational direction zero, or to make the resultant force acting on the translational direction zero.

[0073] Additionally, in the example shown, the first piezoelectric drive unit PD1 is configured such that the first electrode ED1 is connected to a high potential and the second electrode ED2 is connected to a low potential to cause the first portion 8A1 to contract, and the first electrode ED1 is connected to a low potential and the second electrode ED2 is connected to a high potential to cause the first portion 8A1 to extend. However, it can also be configured such that the first electrode ED1 is connected to a low potential and the second electrode ED2 is connected to a high potential to cause the first portion 8A1 to contract, and the first electrode ED1 is connected to a high potential and the second electrode ED2 is connected to a low potential to cause the first portion 8A1 to extend. This also applies to the second portion 8A2.

[0074] Next, refer to Figures 8-10 The piezoelectric drive device 100A, which is another configuration example of the piezoelectric drive device 100, will be described. Figure 8 This is an exploded perspective view of the piezoelectric drive device 100A. Figure 9 This is a diagram of the rod-shaped component 11 and the oscillating component SM1 that constitute the piezoelectric drive device 100A. Specifically, Figure 9 The top image is a top view of the assembly. Figure 9 The second image from the top is a exploded top view. Figure 9 The third image from the top is the assembly bottom view. Figure 9 The bottom image is a exploded bottom view. Figure 10 This is a front view of the movable part 1, shaft part 4, retaining part 6, rod-shaped part 11, piezoelectric drive unit PD, and swinging part SM1. Specifically, Figure 10 The image above is an assembly diagram. Figure 10 The image below is an exploded view.

[0075] The piezoelectric drive device 100A differs from the piezoelectric drive device 100, which has a swing member SM1, in that it has a swing member SM1. Furthermore, the swing member SM1 differs from the swing member SM, which uses a tension coil spring TS as the force-applying member 7 (spring member SP), in that it uses a leaf spring LS as the force-applying member 7 (spring member SP). Additionally, the swing member SM1 differs from the swing member SM, which uses a cover member LM to form the through portion TH2 through which the rod-shaped member 11 is inserted, in that it uses an intermediate member 12 to form the through portion TH2.

[0076] Specifically, the swing member SM1 is a component capable of pressing a pair of piezoelectric drive units PD (first piezoelectric drive unit PD1 and second piezoelectric drive unit PD2) against the movable member 1. In the example shown in the figure, as... Figure 9 As shown, the swing member SM1 is configured to include a support member 5, a holding member 6, a force-applying member 7 (tension coil spring TS), and a cover member LM, and is supported by the fixed side member FB (rod-shaped member 11) to enable it to swing. Moreover, the swing member SM1 is configured to press a pair of piezoelectric drive units PD against the movable member 1 with approximately the same force.

[0077] More specifically, the support member 5 includes a first support member 5A and a second support member 5B having the same size and shape. The first support member 5A includes a first opposing portion OP1, which is the portion opposite to the movable member 1, a pair of first legs LG1 extending from the first opposing portion OP1, and a first spring receiving portion SR1 disposed between the pair of first legs LG1. The first spring receiving portion SR1 is fixed to the pair of first legs LG1 by adhesive. Similarly, the second support member 5B includes a second opposing portion OP2, which is the portion opposite to the movable member 1, a pair of second legs LG2 extending from the second opposing portion OP2, and a second spring receiving portion SR2 disposed between the pair of second legs LG2. The second spring receiving portion SR2 is fixed to the pair of second legs LG2 by adhesive. Moreover, a first through portion TH21 is formed on the proximal surface of the pair of first legs LG1 of the first support member 5A, and a second through portion TH22 is also formed on the proximal surface of the pair of second legs LG2 of the second support member 5B.

[0078] The first support member 5A and the second support member 5B are combined in such a way that one of the pair of second legs LG2 of the second support member 5B is sandwiched between the pair of first legs LG1 of the first support member 5A, and one of the pair of first legs LG1 of the first support member 5A is sandwiched between the pair of second legs LG2 of the second support member 5B. Furthermore, the first support member 5A and the second support member 5B are combined such that the first through portion TH21 and the second through portion TH22 are located on the same straight line, and the rod-shaped member 11 is inserted through the through portion TH2, which is formed by the first through portion TH21 and the second through portion TH22.

[0079] like Figure 9 As shown in the top figure, a pair of first cover parts LM1 are fixed to the first support part 5A by covering the first through-hole TH21 through which the rod-shaped part 11 is inserted, and a pair of second cover parts LM2 are fixed to the second support part 5B by covering the second through-hole TH22 through which the rod-shaped part 11 is inserted. Furthermore, the support part 5 and the cover parts LM are fixed by any method such as adhesive or riveting.

[0080] The force-applying component 7 (tension coil spring TS) includes a first force-applying component 7A (first tension coil spring TS1) and a second force-applying component 7B (second tension coil spring TS2). The first tension coil spring TS1 and the second tension coil spring TS2 are respectively fixed to the first support component 5A and the second support component 5B to generate a preload that brings the first opposing portion OP1 of the first support component 5A and the second opposing portion OP2 of the second support component 5B closer together. Specifically, as... Figure 9 As shown in the second figure from the bottom, the left end of the first tension coil spring TS1 is fixed to a second left-side recess H2L formed on the distal surface of one of the pair of second legs LG2 of the second support member 5B, and the right end is fixed to a second right-side recess H2R formed on the distal surface of the first spring receiving portion SR1 of the first support member 5A. Similarly, the right end of the second tension coil spring TS2 is fixed to a first right-side recess H1R formed on the distal surface of one of the pair of first legs LG1 of the first support member 5A, and the left end of the second tension coil spring TS2 is fixed to a first left-side recess H1L formed on the distal surface of the second spring receiving portion SR2 of the second support member 5B.

[0081] In addition, such as Figure 9 As shown in the topmost figure, the first retaining member 6A is housed in the first recess RP1 formed near the first opposing portion OP1 of the first support member 5A and is fixed by an adhesive, and the second retaining member 6B is housed in the second recess RP2 formed near the second opposing portion OP2 of the second support member 5B and is fixed by an adhesive.

[0082] According to this configuration, the piezoelectric drive device 100A, like the piezoelectric drive device 100, can utilize the bending vibration (circular motion) of the first piezoelectric drive unit PD1 and the second piezoelectric drive unit PD2 to rotate the movable member 1 around the rotation axis 1X without translating it along the rotation axis 1X, or to translate the movable member 1 along the rotation axis 1X without rotating it around the rotation axis 1X. Furthermore, the piezoelectric drive device 100A can also rotate the movable member 1 around the rotation axis 1X while simultaneously translating it along the rotation axis 1X.

[0083] Furthermore, the swing member SM1 is configured to use a tension coil spring TS as the force-applying member 7 (spring member SP), but it can also be configured to use a compression coil spring as the force-applying member 7 (spring member SP). When using a compression coil spring as the force-applying member 7, the position of the force-applying member 7 can be changed.

[0084] Next, refer to Figure 11 Another configuration example of the piezoelectric drive unit (PD) will be described. Figure 11 This is a diagram showing the positional relationship between the movable part 1 and the piezoelectric drive unit PD. Specifically, Figure 11 The top left and top right images show the first single-sided configuration of the piezoelectric drive unit (PD). Figure 11 The lower left and lower right figures show the second single-sided configuration of the piezoelectric drive unit (PD). More specifically, Figure 11 The top left and bottom left images are front views of the movable part 1 and the piezoelectric drive unit PD. Figure 11 The upper right and lower right images are right views of the movable part 1 and the piezoelectric drive unit PD. Additionally, in Figure 11 In the upper right and lower right diagrams, for ease of understanding, only the outline of movable part 1 is represented by a thick dashed line.

[0085] The first and second single-sided configurations are examples of single-sided configurations. The single-sided configuration is arranged opposite the first piezoelectric drive unit PD1 and the second piezoelectric drive unit PD2, sandwiching the movable member 1. Figure 5 as well as Figure 10 The different side configurations (opposite configurations) shown indicate that the first piezoelectric drive unit PD1 and the second piezoelectric drive unit PD2 are configured on one side of the movable member 1. Figure 11 In the example shown, the first piezoelectric drive unit PD1 and the second piezoelectric drive unit PD2 are not located on the right side (Y2 side) of the movable member 1, but on the left side (Y1 side) of the movable member 1.

[0086] In the first single-sided configuration, such as Figure 11As shown in the upper left and upper right figures, the first piezoelectric drive unit PD1 is configured to contact the outer peripheral surface 1F of the movable member 1 at a first position P1, and the second piezoelectric drive unit PD2 is configured to contact the outer peripheral surface 1F of the movable member 1 at a second position P2. Furthermore, the first piezoelectric drive unit PD1 is configured such that, when viewed from the Y2 side along the Y-axis, the straight line L1 along the first axis 8AX intersects the straight line L3 along the translation direction (X-axis) at an angle θ1 greater than 0 degrees and less than 90 degrees. Similarly, the second piezoelectric drive unit PD2 is configured such that, when viewed from the Y2 side along the Y-axis, the straight line L2 along the second axis 8BX intersects the straight line L4 along the translation direction (X-axis) at an angle θ2 greater than 0 degrees and less than 90 degrees. Moreover, the first piezoelectric drive unit PD1 and the second piezoelectric drive unit PD2 are arranged in a linearly symmetrical (vertically symmetrical) configuration with angles θ1 and θ2 sandwiching the rotation axis 1X. That is, as... Figure 11 As shown in the upper left figure, the angle α1 between lines AL1 and ALC is the same as the angle α2 between lines AL2 and ALC. Furthermore, line AL1 is a line in the YZ plane passing through the first position P1 and the rotation axis 1X, line AL2 is a line in the YZ plane passing through the second position P2 and the rotation axis 1X, and line ALC is a line in the YZ plane parallel to the Y-axis and intersecting the rotation axis 1X. However, angles α1 and α2 can also be different.

[0087] In addition, Figure 11 In the examples shown in the top left and top right images, such as Figure 11 As shown in the upper right figure, the first piezoelectric drive unit PD1 and the second piezoelectric drive unit PD2 are configured such that the distance between their left ends is smaller than the distance between their right ends, but they can also be configured such that the distance between their left ends is larger than the distance between their right ends.

[0088] In the second single-sided configuration, such as Figure 11As shown in the lower left and lower right figures, the first piezoelectric drive unit PD1 is configured to contact the outer peripheral surface 1F of the movable member 1 at a first position P1, and the second piezoelectric drive unit PD2 is configured to contact the outer peripheral surface 1F of the movable member 1 at a second position P2. Furthermore, the first piezoelectric drive unit PD1 is configured such that, when viewed from the Y2 side along the Y-axis, the straight line L1 along the first axis 8AX intersects the straight line L3 along the translation direction (X-axis) at an angle θ1 greater than 0 degrees and less than 90 degrees. Similarly, the second piezoelectric drive unit PD2 is configured such that, when viewed from the Y2 side along the Y-axis, the straight line L2 along the second axis 8BX intersects the straight line L4 along the translation direction (X-axis) at an angle θ2 greater than 0 degrees and less than 90 degrees. Moreover, the first piezoelectric drive unit PD1 and the second piezoelectric drive unit PD2 are arranged such that angles θ1 and θ2 sandwich a straight line AL3 representing a plane perpendicular to the rotation axis 1X, exhibiting linear symmetry (front-to-back symmetry).

[0089] In addition, Figure 11 In the examples shown in the lower left and lower right figures, the first piezoelectric drive unit PD1 and the second piezoelectric drive unit PD2 are as follows: Figure 11 As shown in the lower right figure, the distance between the left end of the first piezoelectric drive unit PD1 and the right end of the second piezoelectric drive unit PD2 is greater than the distance between the right end of the first piezoelectric drive unit PD1 and the left end of the second piezoelectric drive unit PD2. However, it is also possible to configure the distance between the left end of the first piezoelectric drive unit PD1 and the right end of the second piezoelectric drive unit PD2 to be smaller than the distance between the right end of the first piezoelectric drive unit PD1 and the left end of the second piezoelectric drive unit PD2.

[0090] according to Figure 11 In the configuration shown, even when the piezoelectric drive unit PD is configured on one side, the piezoelectric drive device 100, like the configuration on both sides (opposite configuration), can rotate the movable member 1 about the rotation axis 1X without translating the movable member 1 along the rotation axis 1X, or can translate the movable member 1 along the rotation axis 1X without rotating the movable member 1 about the rotation axis 1X. Furthermore, the piezoelectric drive device 100 can also rotate the movable member 1 about the rotation axis 1X while simultaneously translating the movable member 1 along the rotation axis 1X.

[0091] Furthermore, in the single-sided configuration, the movable member 1 is configured to be guided by a guide member such as the shaft member 4. That is, the movable member 1 is configured such that it cannot perform any movement other than rotation about the rotation axis 1X and translation along the rotation axis 1X, as guided by the guide member. Additionally, the force-applying member 7 (not shown) is configured to be combined with other members as needed to maintain continuous contact between the first piezoelectric drive unit PD1 and the second piezoelectric drive unit PD2 and the movable member 1. On the other hand, in Figure 5 In the illustrated two-sided configuration (opposite configuration), the shaft component 4, which functions as a guide component, can also be omitted. This is because, in Figure 5 In the two-sided configuration (opposite configuration) shown, the movable member 1 is clamped by the first piezoelectric drive unit PD1 and the second piezoelectric drive unit PD2, restricting its movement other than rotation about the rotation axis 1X and translation along the rotation axis 1X.

[0092] As described above, the piezoelectric drive device 100 according to the embodiments of this disclosure includes a fixed side member FB, a movable member 1 whose cross-sectional shape in a cut plane perpendicular to the translational direction (X-axis direction) is approximately circular, and a piezoelectric drive unit PD that moves the movable member 1 at least in the translational direction (X-axis direction). Furthermore, as Figure 3 As shown, the piezoelectric drive unit PD includes a first piezoelectric drive unit PD1 and a second piezoelectric drive unit PD2. Furthermore, as... Figures 4-6 As shown, the first piezoelectric drive unit PD1 includes: a first piezoelectric element 8A extending along a first axis 8AX; and a first contact member 9A extending along the first axis 8AX and stacked and fixed to the side of the first piezoelectric element 8A that becomes the movable member 1 side (Y2 side) (first plane FP1), and at a first position P1, it is attached to the outer peripheral surface 1F of the movable member 1 (see reference). Figure 5 ) contact. Furthermore, when viewed along the direction perpendicular to one side of the first piezoelectric element 8A (the direction in which the first piezoelectric element 8A and the first contact member 9A are stacked), i.e., the first longitudinal vibration direction VD1 (Y-axis direction), as... Figure 7 As shown, the first piezoelectric drive unit PD1 is configured such that a straight line L1 along the first axis 8AX intersects a straight line L3 along the translation direction (X-axis direction) at an angle θ1 greater than 0 degrees and less than 90 degrees. Similarly, the second piezoelectric drive unit PD2 has: a second piezoelectric element 8B extending along the second axis 8BX; and a second contact member 9B extending along the second axis 8BX and stacked and fixed to the side of the second piezoelectric element 8B that is the movable member 1 side (Y1 side) (first plane FP2), and in contact with the outer peripheral surface 1F of the movable member 1 at the second position P2. In addition, the second piezoelectric drive unit PD2 is configured such that, when viewed along the second longitudinal vibration direction VD2 (Y-axis direction) perpendicular to the side of the second piezoelectric element 8B (first plane FP2) (the direction in which the second piezoelectric element 8B and the second contact member 9B are stacked), a straight line L2 along the second axis 8BX intersects a straight line L4 along the translation direction (X-axis direction) at an angle θ2 greater than 0 degrees and less than 90 degrees. In addition, Figure 5In the example shown, the straight line AL passing through the first position P1 and the second position P2 intersects the rotation axis 1X. Furthermore, the first piezoelectric drive unit PD1 is configured to be perpendicular to one side (first plane FP1) of the first piezoelectric element 8A and intersects the rotation axis 1X through the straight line at the first position P1. Similarly, the second piezoelectric drive unit PD2 is configured to be perpendicular to one side (first plane FP2) of the second piezoelectric element 8B and intersects the rotation axis 1X through the straight line at the second position P2.

[0093] In this configuration, the movable member 1 is driven by a first piezoelectric drive unit PD1 that contacts the outer peripheral surface 1F of the movable member 1 at a first position P1, and a second piezoelectric drive unit PD2 that contacts the outer peripheral surface 1F of the movable member 1 at a second position P2. Therefore, this configuration provides the effect that the movable member 1 can perform various actions by controlling the driving method (motion) of the two piezoelectric drive units PD. Furthermore, this configuration is useful, for example, for humanoid or animal-type robots or robotic arms. In the illustrated example, the various actions include rotation about the rotation axis 1X (X-axis) and translation along the rotation axis 1X (X-axis).

[0094] In addition, such as Figure 6 As shown, the first piezoelectric element 8A may also have two parts (first part 8A1 and second part 8A2) arranged side by side along a direction perpendicular to the first axis 8AX and perpendicular to the first longitudinal vibration direction VD1, i.e., the first transverse vibration direction BD1, so that two electrodes ED can be formed in such a way that voltage can be applied to each of the two parts separately. Similarly, the second piezoelectric element 8B may also have two parts arranged side by side along a direction perpendicular to the second axis 8BX and perpendicular to the second longitudinal vibration direction VD2, i.e., the second transverse vibration direction BD2, so that two electrodes ED can be formed in such a way that voltage can be applied to each of the two parts separately.

[0095] This configuration enables the piezoelectric drive unit PD to move in a circular motion (including elliptical motion) by applying voltage to the piezoelectric element 8 at appropriate timing. This results in the ability to selectively achieve translation of the movable part 1 along the rotation axis 1X and rotation of the movable part 1 around the rotation axis 1X.

[0096] Alternatively, a first flexible wiring substrate 10A with a conductive pattern PT connected to the electrode ED can be fixedly disposed on the other side (second plane DP1) (Y1 side) of the first piezoelectric element 8A. Similarly, a second flexible wiring substrate 10B with a conductive pattern PT connected to the electrode ED can be fixedly disposed on the other side (second plane DP2) (Y2 side) of the second piezoelectric element 8B. In other words, the first piezoelectric drive unit PD1 can also have a first flexible wiring substrate 10A fixed to the other side (second plane DP1) of the first piezoelectric element 8A and provided with a conductive pattern PT connected to the electrode ED of the first piezoelectric element 8A. Furthermore, the second piezoelectric drive unit PD2 can also have a second flexible wiring substrate 10B fixed to the other side (second plane DP2) of the second piezoelectric element 8B and provided with a conductive pattern PT connected to the electrode ED of the second piezoelectric element 8B.

[0097] This configuration, compared to the case where a conductive pattern is formed in the support member 5, makes it easier to energize the piezoelectric element 8.

[0098] In addition, such as Figure 5 As shown, the piezoelectric drive device 100 may also include: a first force-applying member 7A, which applies force to the first contact member 9A toward the movable member 1, so that the first contact member 9A contacts the movable member 1; and a second force-applying member 7B, which applies force to the second contact member 9B toward the movable member 1, so that the second contact member 9B contacts the movable member 1.

[0099] This configuration results in the following effect: compared to a configuration where the contact member 9 exerts weaker pressure on the movable member 1, the movable member 1 can move more reliably.

[0100] Alternatively, the first force-applying component 7A and the second force-applying component 7B can also be composed of a common spring component SP.

[0101] This configuration has the following effect: compared with the case where the first force-applying component 7A and the second force-applying component 7B are composed of separate independent components, it can suppress the increase in the number of components.

[0102] In addition, such as Figure 5As shown, the piezoelectric drive device 100 may also have a first support member 5A including a first opposing portion OP1 supporting the first piezoelectric drive unit PD1 and a second support member 5B including a second opposing portion OP2 supporting the second piezoelectric drive unit PD2. In this case, the first opposing portion OP1 and the second opposing portion OP2 may also be arranged in opposite positions while clamping the movable member 1. Furthermore, the spring member SP may be configured to be provided between the first support member 5A and the second support member 5B, pressing (applying force) the first contact member 9A toward the movable member 1 side (Y2 side) via the first support member 5A, and pressing (applying force) the second contact member 9B toward the movable member 1 side (Y1 side) via the second support member 5B.

[0103] This configuration allows the movable member 1 to be clamped between the first piezoelectric drive unit PD1 and the second piezoelectric drive unit PD2, thus enabling the spring member SP to easily apply forces to both the first piezoelectric drive unit PD1 and the second piezoelectric drive unit PD2. Therefore, this configuration provides the following effect: it stabilizes the pressure of the contact member 9 relative to the movable member 1, allowing the movable member 1 to move more reliably.

[0104] In addition, such as Figure 2 as well as Figure 3 As shown, the piezoelectric drive device 100 may also include: a rod-shaped member 11 extending along the translational direction (X-axis direction); and an intermediate member 12 having a through portion TH2 through which the rod-shaped member 11 is inserted, and configured to have a gap GP between the first support member 5A and the second support member 5B (see reference). Figure 5 Furthermore, the intermediate component 12 can also be integrated with one of the first support component 5A and the second support component 5B. In this case, such as Figure 5 As shown, the spring component SP can also be composed of a leaf spring LS. The first part LS1 of the leaf spring LS is fixed to the first support member 5A at a first fixed position CT1 away from the portion where the first piezoelectric drive unit PD1 is located (first opposing part OP1). The second part LS2 of the leaf spring LS is fixed to the second support member 5B at a second fixed position CT2 away from the portion where the second piezoelectric drive unit PD2 is located (second opposing part OP2). The third part 7C (intermediate part), located between the first part LS1 and the second part LS2, is fixed to the intermediate member 12. Alternatively, the leaf spring LS can be configured such that the portion of the first support member 5A where the first piezoelectric drive unit PD1 is located (first opposing part OP1) and the portion of the second support member 5B where the second piezoelectric drive unit PD2 is located (second opposing part OP2) approach each other.

[0105] This configuration results in the same force that allows the first contact member 9A to press against the movable member 1 and the second contact member 9B to press against the movable member 1. This is because the swing member SM swings around the rod-shaped member 11 while holding the first contact member 9A and the second contact member 9B in a manner that the movable member 1 is clamped by the first contact member 9A and the second contact member 9B.

[0106] In addition, such as Figure 9 As shown, the spring component SP can also be constructed from a tension coil spring TS. Additionally, as... Figure 10 As shown, when viewed along the translation direction (X-axis direction), the first support member 5A and the second support member 5B may also have intersecting portions (intersecting portions CR). That is, the intersecting portions CR may also include the first intersecting portion CR1 of the first support member 5A and the second intersecting portion CR2 of the second support member 5B. Furthermore, the rod-shaped member 11 may be inserted through the first support member 5A and the second support member 5B in the intersecting portions CR. Moreover, a tension coil spring TS may be arranged between the portion of the first support member 5A that sandwiches the first intersecting portion CR1 and is located on the opposite side of the portion (first opposing portion OP1) where the first piezoelectric drive unit PD1 is arranged (the first leg LG1 or the first spring receiving portion SR1), and the portion of the second support member 5B that sandwiches the second intersecting portion CR2 and is located on the opposite side of the portion (second opposing portion OP2) where the second piezoelectric drive unit PD2 is arranged (the second spring receiving portion SR2 or the second leg LG2).

[0107] This composition and such Figure 5 As shown, the spring component SP is composed of a leaf spring LS, which also produces the same effect as the force that allows the first contact component 9A to press against the movable component 1 and the second contact component 9B to press against the movable component 1.

[0108] Alternatively, the piezoelectric drive device 100 may have a first holding member 6A that holds the first piezoelectric drive unit PD1, which is composed of a component different from the first force-applying member 7A, and a second holding member 6B that holds the second piezoelectric drive unit PD2, which is composed of a component different from the second force-applying member 7B.

[0109] This configuration offers the following advantages: it increases design flexibility compared to a configuration where the retaining component 6 and the force-applying component 7 are integrally formed. However, the retaining component 6 and the force-applying component 7 can also be integrally formed.

[0110] In addition, such as Figure 5 As shown, when viewed along the translation direction (X-axis direction), the first position P1 and the second position P2 can also be different positions in the circumferential direction of the movable part 1. Figure 5In the example shown, the first position P1 and the second position P2 are configured such that the central angles centered on the rotation axis 1X differ by 180 degrees.

[0111] This configuration offers the following advantages: compared to a configuration where the first position P1 and the second position P2 are arranged at an angle with a central angle difference of less than 180 degrees, it is easier to arrange the two piezoelectric drive units PD (easier to contact the movable member 1). This is because the orientation in which the first contact member 9A is pressed against the movable member 1 is opposite to the orientation in which the second contact member 9B is pressed against the movable member 1. Furthermore, this configuration offers the following advantages: compared to... Figure 11 Compared to the second single-sided configuration shown in the lower right figure, the movable area of ​​the movable part 1 in the translation direction (X-axis direction) can be increased.

[0112] In addition, such as Figure 5 As shown, the first piezoelectric drive unit PD1 and the second piezoelectric drive unit PD2 can also be arranged in a position opposite to the movable member 1.

[0113] This configuration results in the ability to transmit motion (force) to the movable part 1 in a balanced and efficient manner.

[0114] In addition, such as Figure 7 The left view shows the straight line L1 along the first axis 8AX when viewed along the first longitudinal vibration direction VD1, relative to the straight line L3 along the translation direction (X-axis direction), and as shown... Figure 7 As shown in the right view, when viewed along the second longitudinal vibration direction VD2, the straight line L2 along the second axis 8BX can also be tilted in the same direction (as the X1 side) relative to the straight line L4 along the translation direction (X-axis direction).

[0115] This configuration enables simultaneous translation of the movable member 1 along the rotation axis 1X and rotation of the movable member 1 about the rotation axis 1X. Furthermore, this configuration allows for the selective realization of either translation of the movable member 1 along the rotation axis 1X or rotation of the movable member 1 about the rotation axis 1X.

[0116] In addition, such as Figure 7 The angle θ1 between the straight line L3 along the translation direction (X-axis direction) and the straight line L1 along the first axis 8AX, as shown in the left view along the first longitudinal vibration direction VD1, can also be compared with... Figure 7 The angle θ2 between the straight line L4 along the translation direction (X-axis direction) and the straight line L2 along the second axis 8BX when viewed along the second longitudinal vibration direction VD2 is the same as that between the right view and the straight line L2 along the second axis 8BX.

[0117] This configuration, compared to cases where angles θ1 and θ2 are different from each other, makes it easier to control the movable part 1 when it moves in the desired direction.

[0118] In addition, such as Figure 10 As shown, the first piezoelectric drive unit PD1 and the second piezoelectric drive unit PD2 can also be configured such that, when viewed along the translation direction (X-axis direction), one side of the first piezoelectric element 8A (first plane FP1) and one side of the second piezoelectric element 8B (first plane FP2) are inclined (the first plane FP1 and the first plane FP2 form part of a V-shape).

[0119] This configuration brings about the following effects: (as in...) Figure 5 Compared to the case where the first piezoelectric drive unit PD1 and the second piezoelectric drive unit PD2 are arranged opposite each other as shown, the piezoelectric drive device 100 can be miniaturized.

[0120] In addition, such as Figure 11 As shown in the lower right figure, the first piezoelectric drive unit PD1 and the second piezoelectric drive unit PD2 can also be arranged in the translational direction (X-axis direction). In this case, when observed along the first longitudinal vibration direction VD1, the straight line L1 along the first axis 8AX and the straight line L2 along the second axis 8BX can also be tilted to opposite sides relative to the straight line L3 along the translational direction (X-axis direction). Furthermore, in Figure 11 In the example shown in the lower right figure, the first piezoelectric drive unit PD1 and the second piezoelectric drive unit PD2 are configured such that the distance between the left end of the first piezoelectric drive unit PD1 and the right end of the second piezoelectric drive unit PD2 is greater than the distance between the right end of the first piezoelectric drive unit PD1 and the left end of the second piezoelectric drive unit PD2.

[0121] This configuration brings about the following effects: (as in...) Figure 5 or Figure 10 Compared to the case where the first piezoelectric drive unit PD1 and the second piezoelectric drive unit PD2 are arranged opposite each other, the size of the piezoelectric drive device 100 in the Y-axis direction can be reduced.

[0122] Alternatively, the movable part 1 can also be made of metal. This configuration has the following effect: compared with the case where the movable part 1 is made of synthetic resin, it can suppress the generation of wear powder and the like that that accompany the contact between the movable part 1 and the piezoelectric drive part PD (contact part 9).

[0123] Alternatively, the movable part 1 may also have a cylindrical shape. In this case, the fixed side part FB may also include a shaft part 4 inserted into the movable part 1.

[0124] This configuration enables the shaft component 4 to function as a guide component, thus stabilizing the movement of the movable component 1.

[0125] The preferred embodiments of this disclosure have been described in detail above. However, the present invention is not limited to the embodiments described above. Various modifications or substitutions can be applied to the above embodiments without departing from the scope of the present invention. In addition, the various features described with reference to the above embodiments can be appropriately combined as long as they are not technically contradictory.

[0126] For example, in the above-described embodiment, the movable member 1 is a cylindrical member through which the shaft member 4 is inserted and rotates about the shaft member 4, but it can also be a rod-shaped member (cylindrical member) without a through hole for the shaft member 4 to be inserted. For example, the shaft member 4 can also be part of the movable member 1. In this case, the piezoelectric drive device 100 is able to rotate the movable member 1, which is integrated with the shaft member 4, about the rotation axis 1X, and translate it along the rotation axis 1X.

[0127] This application claims priority based on Japanese Patent Application No. 2024-027172, filed on February 27, 2024, the entire contents of which are incorporated herein by reference.

[0128] Explanation of reference numerals in the attached figures 1. Movable parts; 1F···Outer perimeter; 1X··· Rotation axis; 2. Base components; 2G...slot section; 2K...through section; 3. Shaft support components; 3B... Rear axle support component; 3F...Front side shaft support component; 4. Shaft components; 5. Support components; 5A···First support component; 5B···Second support component; 6. Holding components; 6A... First retaining component; 6AF···First fixing part; 6AS···First support section; 6B...Second retaining component; 6BF···Second fixing part; 6BS···Second Support Section; 7. Force-applying components; 7A... First force-applying component; 7B···Second force-applying component; 7C...Third; 8. Piezoelectric elements; 8A... First piezoelectric element; 8A1···Part One; 8A2···Part Two; 8AX...First axis; 8B...Second piezoelectric element; 8BX...Second Axis; 9. Contact components; 9A... First contact component; 9AS···Contact surface; 9B...Second contact component; 10. Flexible wiring substrate; 10A... First flexible wiring substrate; 10B···Second flexible wiring substrate; 11. Rod-shaped components; 12. Intermediate components; 12A...First intermediate component; 12B...Second intermediate component; 100, 100A... piezoelectric drive device; BD1... First transverse vibration direction; BD2...Second transverse vibration direction; CP...center point; CR...intersection; CR1···First intersection section; CR2...Second intersection section; CT1...First fixed position; CT2...Second fixed position; DP1, DP2... second plane; ED electrode; ED1, ED11... First electrode; ED2, ED12...second electrodes; FB...fixed side components; FP1, FP2... First plane; H1L···First left recess; H1R···First right-side recess; H2L···Second left-side recess; H2R···Second right side recess; LG1...First leg; LG2...Second leg; LM··· Cover component; LM1...First cover component; LM2...Second cover component; LS leaf spring; LS1... Part 1; LS2... Part Two; ND··· nodes; ND1...First wave; ND2...Second wave; OP1...First Opposite Section; OP2...Second Opposite Section; P1...First position; P2...Second position; PD...Piezoelectric drive unit; PD1...First piezoelectric drive unit; PD2...Second piezoelectric drive unit; PT...conductive pattern; RP1···The first recess; RP2···Second recess; SG1···The first convex part; SG2···Second convex part; SM, SM1... swing components; SP··· Spring components; SR1···First spring receiving part; SR2···Second spring receiving part; TH1, TH2... connecting section; TH21···First Through Section; TH22···Second Through Section; TS··· Tension coil spring; TS1...First tension coil spring; TS2...Second tension coil spring; VD1···First longitudinal vibration direction; VD2···Second longitudinal vibration direction.

Claims

1. A piezoelectric drive device comprising: Fixed side components; The movable part has a roughly circular cross-section in a cutting plane perpendicular to the translation direction; and The piezoelectric drive unit causes the movable member to move at least in the translational direction. Its features are, The piezoelectric drive unit includes a first piezoelectric drive unit and a second piezoelectric drive unit. The first piezoelectric drive unit includes: a first piezoelectric element extending along a first axis; and a first contact member extending along the first axis, fixed to the side of the first piezoelectric element that becomes the movable member side, and in contact with the outer peripheral surface of the movable member at a first position. When viewed along the first longitudinal vibration direction, which is perpendicular to one of the faces of the first piezoelectric element, the first axis is configured to intersect at an angle relative to the translational direction. The second piezoelectric drive unit has: a second piezoelectric element extending along a second axis; and a second contact member extending along the second axis and fixed to the side of the second piezoelectric element that becomes the movable member side, and in contact with the outer peripheral surface of the movable member at a second position. When viewed along the direction perpendicular to one of the second piezoelectric elements, i.e., the second longitudinal vibration direction, the second axis is configured to intersect at an angle relative to the translational direction.

2. The piezoelectric drive device according to claim 1, wherein, The first piezoelectric element has two portions arranged side by side along a direction perpendicular to the first axis and perpendicular to the first longitudinal vibration direction. Each of the two portions has two electrodes formed in such a way that a voltage can be applied independently. The second piezoelectric element has two portions arranged side by side along a direction perpendicular to the second axis and perpendicular to the second longitudinal vibration direction, each portion having two electrodes formed in such a way that a voltage can be applied individually.

3. The piezoelectric drive device according to claim 2, wherein, A first flexible wiring substrate with a conductive pattern connected to the electrode is fixed on the other side of the first piezoelectric element. A second flexible wiring substrate with a conductive pattern connected to the electrode is fixed on the other side of the second piezoelectric element.

4. The piezoelectric drive device according to any one of claims 1 to 3, wherein, have: The first force-applying component causes the first contact component to contact the movable component; as well as The second force-applying component causes the second contact component to come into contact with the movable component.

5. The piezoelectric drive device according to claim 4, wherein, The first force-applying component and the second force-applying component are composed of a common spring component.

6. The piezoelectric drive device according to claim 5, wherein, have: The first support member includes a first opposing portion supporting the first piezoelectric drive portion; and The second support member includes a second opposing portion that supports the second piezoelectric drive unit. The first opposing portion and the second opposing portion are respectively arranged in positions opposite to each other, sandwiching the movable component. The spring component is disposed between the first support component and the second support component, pressing the first contact component toward the movable component via the first support component, and pressing the second contact component toward the movable component via the second support component.

7. The piezoelectric drive device according to claim 6, wherein, The fixed-side component has a rod-shaped component extending along the translational direction. The spring component is composed of leaf springs. The first part of the leaf spring is fixed to the first support member. The second part of the leaf spring is fixed to the second support member. The leaf spring is configured to apply force in such a way that the portion of the first support member having the first piezoelectric drive part and the portion of the second support member having the second piezoelectric drive part approach each other.

8. The piezoelectric drive device according to claim 6, wherein, The fixed-side component has a rod-shaped component extending along the translational direction. The spring component is composed of a tension helical spring. When viewed along the translational direction, the first support member and the second support member have intersecting portions. At the intersection, the rod-shaped member is inserted into both the first support member and the second support member. The tension helical spring is disposed between the portion of the first support member that sandwiches the intersection and is located on the side opposite to the portion where the first piezoelectric drive unit is disposed, and the portion of the second support member that sandwiches the intersection and is located on the side opposite to the portion where the second piezoelectric drive unit is disposed.

9. The piezoelectric drive device according to claim 4, wherein, have: The first retaining member, composed of a component different from the first force-applying member, retains the first piezoelectric drive unit; and The second holding member is composed of a component different from the second force-applying member, and holds the second piezoelectric drive unit.

10. The piezoelectric drive device according to any one of claims 1 to 3, wherein, When viewed along the translation direction, the first position and the second position are different positions in the circumferential direction of the movable part.

11. The piezoelectric drive device according to claim 10, wherein, The first piezoelectric drive unit and the second piezoelectric drive unit are positioned opposite each other, sandwiching the movable component.

12. The piezoelectric drive device according to claim 11, wherein, The first axis when viewed along the first longitudinal vibration direction and the second axis when viewed along the second longitudinal vibration direction are tilted to the same side relative to the translation direction.

13. The piezoelectric drive device according to claim 12, wherein, The first axis when viewed along the first longitudinal vibration direction and the second axis when viewed along the second longitudinal vibration direction are tilted at the same angle relative to the translation direction.

14. The piezoelectric drive device according to claim 10, wherein, The first piezoelectric drive unit and the second piezoelectric drive unit are configured such that, when viewed along the translation direction, one side of the first piezoelectric element is inclined to the other side of the second piezoelectric element.

15. The piezoelectric drive device according to any one of claims 1 to 3, wherein, The first piezoelectric drive unit and the second piezoelectric drive unit are arranged in the translational direction. When viewed along the first longitudinal vibration direction, the first axis and the second axis are tilted to opposite sides relative to the translation direction.

16. The piezoelectric drive device according to any one of claims 1 to 3, wherein, The movable part is made of metal.

17. The piezoelectric drive device according to any one of claims 1 to 3, wherein, The movable part has a cylindrical shape. The fixed-side component includes a shaft component that passes through the movable component.

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