Transport unit and substrate transport device comprising the same

Abstract

The present invention relates to a transport unit and a substrate transport apparatus including the same, and more particularly, to a transport unit for transporting a substrate using magnetic levitation in a vacuum environment and a substrate transport apparatus including the same. Disclosed is a transport unit for transporting a substrate (1) by moving through magnetic levitation of a stator portion (200) generating an electromagnetic force, including: a permanent magnet portion (300) magnetically levitated based on the electromagnetic force of the stator portion (200); and a substrate support portion (400) having one end coupled to a facing surface of the stator portion (200) in the permanent magnet portion (300) and the other end supporting the substrate (1).

Description

Technical Field

[0001] The present invention relates to a transmission unit and a substrate transmission apparatus including the same, and more specifically, to a transmission unit and a substrate transmission apparatus including the same for transmitting substrates using magnetic levitation in a vacuum environment. Background Technology

[0002] Generally, a substrate processing system includes: a load locking module for introducing the substrate and converting the pressure between the outside and the inside of the substrate processing system; a substrate conveying device for conveying the substrate introduced through the load locking module; and a substrate processing device adjacent to the substrate conveying device for processing the transported substrate.

[0003] The substrate conveying device can convey the substrate to be processed to the substrate processing device or the processed substrate from the substrate processing device to the load locking module under vacuum pressure atmosphere.

[0004] On the other hand, traditional substrate conveying devices employ a conveying robot with a multi-jointed arm for conveying substrates and a rotary motor for driving the conveying robot. However, in this case, the driving range and application of the conveying robot, such as turning and extension, are limited by the rotary motor, and various particles may be generated due to friction.

[0005] In recent years, although a substrate transport device using a planar motor driven by magnetic levitation has been proposed, the stator cannot be arranged in the high vacuum transport space. If the stator is arranged outside the transport space, the electromagnetic force used to drive the transport unit containing permanent magnets cannot be fully transmitted, so magnetic levitation cannot be realized and controlled.

[0006] To improve this problem, the spacing between the stator arranged outside the transmission space and the transmission unit inside the transmission space is minimized, and the walls of the chamber constituting the transmission space are designed to be thinner. However, in this case, the walls of the chamber will deform due to the high vacuum of the transmission space, and the flatness will also decrease, resulting in uneven control due to the position of the transmission unit.

[0007] Furthermore, the transfer unit, which is magnetically levitated in a vacuum transfer space and carries a relatively hot substrate through contact support, cannot dissipate the heat and static electricity transferred from the substrate, causing them to accumulate and making particulate matter management difficult.

[0008] In particular, the transmission unit placed in the vacuum space has no other medium for releasing heat, and cannot release heat through conduction and radiation, thus maintaining a high temperature, which causes various particulate matter to scatter. Summary of the Invention

[0009] Technical problems to be solved The purpose of this invention is to provide a transfer unit for transferring a substrate using magnetic levitation in a vacuum environment and a substrate transfer device including the same, in order to solve the above-mentioned problems.

[0010] Problem-solving methods To achieve the objectives stated herein, this invention discloses a transmission unit that moves by magnetic levitation of a stator portion 200 that generates an electromagnetic field, thereby transmitting a substrate 1. The unit comprises: a permanent magnet portion 300 that is magnetically levitation based on the electromagnetic field of the stator portion 200; and a substrate support portion 400, one end of which is attached to the opposite side of the permanent magnet portion 300 on the stator portion 200 side, and the other end of which supports the substrate 1.

[0011] The substrate support portion 400 may include: a connecting portion 410, which is connected to the permanent magnet portion 300; a support portion 420, which supports the substrate 1; and a connecting portion 430, which connects the connecting portion 410 and the support portion 420.

[0012] The connecting portion 430 may include: a vertical connecting portion 431 extending vertically from the connecting portion 410; and a horizontal connecting portion 432 extending horizontally from the vertical connecting portion 431 and connecting to the supporting portion 420.

[0013] The vertical connecting portion 431 is guided to contact the groove 301 formed at a corresponding position in the side of the permanent magnet portion 300.

[0014] The substrate support portion 400 includes at least one material selected from aluminum, stainless steel, and ceramic, so that the electromagnetic field generated by the stator portion 200 can penetrate to the permanent magnet portion 300 side.

[0015] The substrate support portion 400 may be a ceramic material coated with a conductive substance on the opposite side of the permanent magnet portion 300.

[0016] Furthermore, the present invention discloses a substrate conveying device, comprising: a chamber portion 100, the interior of which forms a vacuum space S; a conveying unit 10, which moves by magnetic levitation within the vacuum space S, thereby conveying a substrate 1; and a plurality of stator portions 200 disposed in the chamber portion 100, which generate an electromagnetic field for the conveying unit 10 to move by magnetic levitation.

[0017] The present invention also includes a control unit that adjusts the movement of the transmission unit 10 by regulating the electromagnetic field generated by the stator 200.

[0018] The control unit controls the following: in order to discharge static electricity in the substrate support 400, the substrate support 400 is brought into contact with the inner surface of the chamber 100, which is kept in a grounded state.

[0019] The chamber portion 100 forms a grounding region S1 that remains grounded within a portion of the transfer area of ​​the transfer unit 10 formed by the stator portion 200. The control unit controls the transfer unit 10 to move to the grounding region S1 so that the substrate support portion 400 contacts the grounding region S1 in order to discharge static electricity within the substrate support portion 400.

[0020] The present invention also includes: an electrostatic sensor, provided in the chamber portion 100, for measuring the electrostatic charge of the substrate support portion 400 within the vacuum space S.

[0021] The control unit controls the following: when the electrostatic value measured by the electrostatic sensor exceeds a preset value, the substrate support 400 contacts the inner surface of the chamber 100.

[0022] The control unit controls the substrate support 400 to contact the inner surface of the chamber 100 in order to dissipate heat from the substrate support 400.

[0023] The chamber portion 100 forms a heat dissipation area S2 in a portion of the transfer area of ​​the transfer unit 10 formed by the stator portion 200. The control unit controls the transfer unit 10 to move to the heat dissipation area S2 so that the substrate support portion 400 contacts the heat dissipation area S2 in order to dissipate heat from the substrate support portion 400.

[0024] At least one of the chamber portion 100 and the stator portion 200 corresponding to the heat dissipation region S2 includes a cooling portion for heat exchange with the substrate support portion 400.

[0025] The present invention also includes: a temperature sensor provided in the chamber portion 100, for measuring the temperature of the substrate support portion 400 within the vacuum space S.

[0026] The control unit controls the following: when the temperature value measured by the temperature sensor exceeds a preset value, the substrate support 400 contacts the inner surface of the chamber 100.

[0027] The stator section 200 includes: a coil section 210 that generates an electromagnetic field that causes the transmission unit 10 to be magnetically levitated; a circuit section 220 that controls the coil section 210 and receives power applied from the outside; and a cooling section 230 for cooling the coil section 210.

[0028] The effects of the invention The advantage of the transmission unit and substrate transmission device including the present invention is that magnetic levitation can be achieved by a planar motor in a high vacuum space, thereby enabling the transmission of substrates.

[0029] In particular, the effect of the transmission unit and the substrate transmission device including the present invention is that, since the stator is arranged in the slot of the chamber module, sufficient electromagnetic force can be provided to the transmission unit in the vacuum space to realize magnetic levitation and drive control, and a high vacuum space can be achieved without changing the chamber module.

[0030] That is, the effect of the transmission unit and the substrate transmission device including it in the present invention is that it can stably provide electromagnetic force between the stator part outside the vacuum space and the transmission unit inside the vacuum space, while preventing deformation of the high vacuum space, thereby maintaining the flatness of the inner surface of the chamber module constituting the vacuum space, and maintaining the precision of the movement of the transmission unit and the transmission of the substrate.

[0031] In particular, the effect of the transmission unit and the substrate transmission device including the present invention is that it can discharge the static electricity accumulated in the transmission unit due to contact with the support substrate, thereby maintaining a stable electrical state of the transmission unit and enabling particulate matter management.

[0032] Furthermore, the effect of the transmission unit and the substrate transmission device including the present invention is that it can release the heat transferred to the transmission unit due to contact with the relatively high temperature substrate, thereby enabling stable management of the temperature of the transmission unit and the generated particulate matter. Attached Figure Description

[0033] Figure 1 This is a cross-sectional view showing the substrate conveying device of the present invention.

[0034] Figure 2 This is a perspective view showing the bottom surface of the base plate in the chamber module of the present invention.

[0035] Figure 3 It is shown Figure 2 A perspective view of the stator section in the chamber module, showing the insertion pattern of the slot.

[0036] Figure 4 It is shown Figure 2 A perspective view of the stator section within the chamber module.

[0037] Figure 5 It is shown Figure 2 An exploded perspective view of the configuration between the components of the stator section in the chamber module.

[0038] Figure 6 It is shown Figure 2 A cross-sectional view of the stator section configuration in the chamber module.

[0039] Figure 7 It is shown Figure 1 A diagram of the transfer unit in the substrate transfer device.

[0040] Figure 8 It is shown Figure 7 A cross-sectional view of the heat dissipation or electrostatic discharge state of the transfer unit in the substrate transfer device. Detailed Implementation

[0041] The following describes in detail the transmission unit and substrate transmission device including the present invention with reference to the accompanying drawings.

[0042] The substrate conveying device of the present invention, such as Figure 1 As shown, it includes: a chamber module 20, which forms a vacuum space S inside; and a transfer unit 10, which is arranged in the vacuum space S and moves based on the electromagnetic force of the stator 200 to magnetically levitate and transfer the substrate 1.

[0043] The substrate 1, which is the object of processing according to the present invention, includes semiconductor substrates, substrates for display devices such as LEDs and LCDs, solar cell substrates, glass substrates, etc., and any type of target substrate disclosed in the past can also be applied.

[0044] The transmission unit 10 is a sealed vacuum space S formed by the chamber module 20, which is moved by electromagnetic levitation of the stator part 200 (described later) to transmit the components of the substrate 1.

[0045] That is, the transmission unit 10 is a component that moves in the manner of a planar motor, and includes a permanent magnet inside. It is magnetically levitated by the electromagnetic force generated by the stator 200 described later, thereby enabling it to move.

[0046] Furthermore, the transmission unit of the present invention will be described in detail below with reference to the accompanying drawings.

[0047] The transmission unit of the present invention is as follows: Figure 7 As shown, a transport unit for transporting substrate 1 by moving through the stator section 200 which generates electromagnetic force and is magnetically levitated includes: a permanent magnet section 300 which is magnetically levitated based on the electromagnetic field of the stator section 200; and a substrate support section 400 which is attached at one end to the side of the permanent magnet section 300 facing the stator section 200 and at the other end to support the substrate 1.

[0048] For example, the transmission unit 10 includes: a permanent magnet part 300, which is magnetically levitated based on the electromagnetic force of the stator part 200; and a substrate support part 400, one end of which is connected to the permanent magnet part 300 to support the substrate 1.

[0049] The permanent magnet part 300 is a component that interacts with the electromagnetic force generated by the stator part 200 to guide magnetic levitation and movement, and various components can be used.

[0050] In particular, the permanent magnet section 300 may be arranged in a plurality of permanent magnets that move in response to the electromagnetic field generated by the stator section 200, wherein the permanent magnets may adopt various shapes and structures disclosed previously.

[0051] Furthermore, the permanent magnet section 300 may employ a specific arrangement of multiple permanent magnets, for example, it may employ a Halbach array of various forms disclosed previously.

[0052] The substrate support 400 is a component that supports the substrate 1 by being combined with the permanent magnet 300, and various components can be used.

[0053] For example, the substrate support portion 400 is integrated with the permanent magnet portion 300 that moves via the stator portion 200 and moves integrally with the permanent magnet portion 300, thereby contacting and supporting the substrate 1.

[0054] The substrate support 400 is a component that is attached at one end to the opposite side of the stator portion 200 in the permanent magnet portion 300 and supports the substrate 1 at the other end.

[0055] That is, the substrate support portion 400 can be coupled to the stator portion 200 side facing the permanent magnet portion 300 and located between the permanent magnet portion 300 and the stator portion 200 described later, thereby moving integrally with the permanent magnet portion 300 to support and transport the substrate 1.

[0056] For example, the substrate support portion 400 is as follows Figure 7 As shown, it includes: a connecting portion 410, which is connected to the permanent magnet portion 300; a supporting portion 420, which supports the substrate 1; and a connecting portion 430, which connects the connecting portion 410 and the supporting portion 420.

[0057] The connecting part 410 is a component that is connected to the permanent magnet part 300, and various components can be used.

[0058] That is, the connecting part 410 is formed in a planar shape corresponding to the permanent magnet part 300, and is connected to the surface of the permanent magnet part 300. As an example, the connecting part 410 is formed in a circular plate shape corresponding to the permanent magnet part 300 which has a circular planar shape, and is connected to the stator part 200 side facing surface of the permanent magnet part 300.

[0059] The joint 410 is made of a material through which electromagnetic fields can easily pass, making electromagnetic interaction between the permanent magnet part 300 and the stator part 200 easier, and is formed with a relatively thin thickness.

[0060] The support portion 420 is a component that is located on the opposite side of the connecting portion 410 and is connected to the connecting portion 410 via the connecting portion 430 to support the base plate 1. Various components may be used.

[0061] For example, the support portion 420 is formed in the shape of a plate with a certain degree of planar area, thereby stably supporting the substrate 1. As another example, in order to minimize the contact area with the substrate 1 and stably support the substrate 1, multiple support members that are spaced apart from each other and extended are formed.

[0062] Furthermore, the support portion 420 is located at a relatively higher position than the connecting portion 410 because it is connected by the connecting portion 430 described later. In addition, it is also located at a relatively higher position than the permanent magnet portion 300, which prevents the substrate 1 from flowing in the upward and downward direction and contacting the bottom surface of the chamber portion 100 when it is supported, thereby enabling stable transport of the substrate 1.

[0063] The connecting part 430 is a component that connects the connecting part 410 and the supporting part 420, and can be made of various components.

[0064] For example, the connecting portion 430 includes: a vertical connecting portion 431 that extends vertically from the connecting portion 410; and a horizontal connecting portion 432 that extends horizontally from the vertical connecting portion 431 and connects to the supporting portion 420.

[0065] The vertical connecting part 431 is a component formed by extending vertically upward from a predetermined position on the edge of the connecting part 410, and has an appropriate length, while the supporting part 420 is located at a predetermined height.

[0066] Furthermore, in order to ensure that the permanent magnet section 300, in which multiple permanent magnets are arranged in a predetermined specific pattern and structure, is positioned relative to the substrate support section 400, the vertical connecting section 431 is guided to contact the groove 301 formed on the side of the permanent magnet section 300.

[0067] That is, the vertical connecting part 431 can be inserted into the groove 301 formed at the corresponding position in the side of the permanent magnet part 300.

[0068] The horizontal connecting part 432 is a component that extends horizontally from the vertical connecting part 431 and connects to the support part 420.

[0069] That is, the horizontal connecting part 432 is a component that extends horizontally from the upper end of the vertical connecting part 431 and has a support part 420 at the end.

[0070] Furthermore, as described above, the substrate support portion 400 has a connecting portion 410 arranged between the permanent magnet portion 300 and the stator portion 200, and is located at a relatively lower position compared to the support portion 420. As another example, when the connecting portion 410 is arranged between the permanent magnet portion 300 and the stator portion 200 or connected to the side opposite to the stator portion 200 in the permanent magnet portion 300, the support portion 420 is located at a relatively lower position compared to the permanent magnet portion 300.

[0071] That is, the substrate support portion 400 is arranged closer to the stator portion 200 than the permanent magnet portion 300. Under the control of the control portion described later, the electromagnetic force on the stator portion 200 side is controlled to drop, thereby contacting the inner surface of the chamber portion 100, thereby releasing the heat transferred from the relatively high temperature substrate 1 and dissipating the accumulated static electricity.

[0072] For example, the substrate support portion 400 controls the electromagnetic force of the stator portion 200 through the control portion described later, so that the joint portion 410 arranged between the permanent magnet portion 300 and the stator portion 200 contacts the inner surface of the chamber portion 100, and the heat and static electricity transmitted from the support portion 420 side of the support substrate 1 through the connection portion 430 are discharged to the outside through the inner surface of the chamber portion 100.

[0073] Furthermore, the substrate support portion 400 is located on the inner surface of the chamber portion 100, between the stator portion 200 and the permanent magnet portion 300. In order to precisely control the magnetic levitation and drive of the permanent magnet portion 300, it is made of a material that can smoothly generate electromagnetic interaction between the stator portion 200 and the permanent magnet portion 300.

[0074] That is, the substrate support portion 400, especially the joint portion 410, is a component with low permeability and easy passage of electromagnetic fields, and can be made of metallic materials, such as aluminum or stainless steel including SUS.

[0075] Furthermore, as mentioned above, the substrate support portion 400 needs to release static electricity and heat through contact. Therefore, it is made of a metal material with low magnetic permeability and high electrical and thermal conductivity. As another example, it is made of a ceramic material with low magnetic permeability, with a conductive material coated on the contact surface of the inner surface of the contact chamber portion 100.

[0076] The chamber module 20 is a component that forms a vacuum space S inside, and various components can be used.

[0077] That is, the chamber module 20 is a component that forms a vacuum space S inside and is used to transfer the substrate 1, and a transfer unit 10 for transferring the substrate 1 can be arranged inside it.

[0078] The chamber module of the present invention will be described in detail below with reference to the accompanying drawings.

[0079] The chamber module of the present invention, as shown Figure 2 As shown, it includes: a chamber section 100, which forms a vacuum space S inside and a plurality of mounting slots 101 on the outside; and a plurality of stator sections 200, which are respectively disposed in the plurality of mounting slots 101, and generate electromagnetic forces for magnetic levitation movement on the transmission unit 10.

[0080] The chamber section 100 is a component that forms a vacuum space S inside and a plurality of slots 101 outside, and can be made of various components.

[0081] That is, the chamber portion 100 is a component that forms a sealed vacuum space S inside and forms a plurality of mounting slots 101 on the outside for inserting and mounting the stator portion 200 described later.

[0082] The chamber portion 100 is based on a regular hexahedron and has a plurality of mounting slots 101 formed on at least one of the six faces. Depending on the formation of the movement path of the conveying unit 10 in the vacuum space S, the mounting slots 101 are formed on all six faces when it is deemed necessary.

[0083] Furthermore, the chamber portion 100 has a plurality of mounting slots 101 formed on one surface. Depending on the needs and taking into account the formation of the moving path of the conveying unit 10, the mounting slots 101 can be formed at specific positions.

[0084] Furthermore, the following description assumes that the groove 101 is formed on the outer side of the bottom surface that constitutes the bottom in the chamber portion 100, but is not limited thereto.

[0085] The chamber portion 100 includes: a chamber body 110 with an opening on its lower surface; a bottom plate 120, which is combined with the opening to form a bottom surface, and forms a sealed vacuum space S with the chamber body 110, with a plurality of mounting grooves 101 formed on the bottom surface.

[0086] The chamber body 110 is a component with an opening at the bottom, and may be a component in which a base plate 120 is disposed at the opening to form a closed vacuum space S together with the base plate 120.

[0087] The bottom plate 120 is a component that is attached to the opening to form a bottom surface and forms a sealed vacuum space S with the main body of the chamber 110, and the bottom surface has a plurality of grooves 101.

[0088] Multiple slots 101 are formed on the outside of the base plate 120.

[0089] The slots 101 form a lattice structure, thereby forming a quadrilateral in a plane.

[0090] Accordingly, a plurality of slots 101 with a grid structure are formed on the outside of the base plate 120, and a plurality of frames perpendicular to each other on the plane of the base plate 120 are formed between adjacent slots 101.

[0091] In addition, as described above, the base plate 120 is integrally formed with the chamber body 110 and combined with another grid frame to form a groove 101 on the lower wall of the chamber body 110.

[0092] Furthermore, the chamber portion 100 also includes a cover member (not shown in the drawings), which is attached to the setting slot 101 for inserting the setting stator portion 200. The cover member is fastened to a grid frame formed between a plurality of setting slots 101 on the bottom surface of the base plate 120 and is attached to the setting slot 101 in the state where the setting stator portion 200 has been inserted.

[0093] Furthermore, the chamber portion 100 includes a support portion 102, which has a bottom surface or an inner surface of the mounting groove 101 to support a stator portion 200 inserted into the mounting groove 101.

[0094] For example, the support portion 102 protrudes from the inner side of the setting groove 101 to support the stator portion 200. As another example, the stator portion 200 extends from the bottom surface of the grid frame toward the setting groove 101 to support the stator portion 200.

[0095] Accordingly, when the stator portion 200 is inserted into the mounting slot 101, the support portion 102 interferes with a portion of the bottom surface of the circuit portion 220 on the lower side of the stator portion 200 and supports the stator portion 200.

[0096] The chamber portion 100 further includes a fastener 130, which passes through the support portion 102 and is coupled to the stator portion 200 to fix the stator portion 200, thereby fixing the stator portion 200 into the mounting groove 101.

[0097] Additionally, the support portion 102 as... Figure 6 As shown, four of them are formed by protruding from the lowest side of the inner surface of the forming groove 101, arranged in pairs opposite each other, or arranged in pairs diagonally on the plane, or corresponding to the vertices of the quadrilateral stator portion 200 on the plane.

[0098] Furthermore, the support portion 102 may have a structure that simply protrudes in the horizontal direction. For example, Figure 6 As shown, the inner surface of the corresponding groove 101 is shaped by forming an opening at the center and having a cross-section forming a ' The frame is '-shaped, thus forming a structure in which the fastener 130 is fixed to the inner surface of the mounting groove 101 in a horizontal direction and fixed to the stator part 200 in a vertical direction.

[0099] In addition, as another example, the support portion 102 simply has multiple ' The '-shaped brackets are fixedly connected to the stator section 200 and the chamber section 100 respectively and support the stator section 200.

[0100] In the chamber portion 100, a cover member is provided as another component as described above to cover at least a portion of the mounting groove 101. As another example, at least a portion of the mounting groove 101 is covered by a support portion 102, which serves as the aforementioned frame, thereby the support portion 102 acts as a cover.

[0101] Accordingly, when the stator 200 is supported by the support 102, it is connected to the external or adjacent stator 200 through the inner surface of the support 102, and connected to various lines for transmitting power, refrigerant and various control signals.

[0102] Furthermore, the chamber portion 100, within a portion of the transfer area of ​​the transfer unit 10 formed by the stator portion 200 in the vacuum space S, additionally forms a grounding region S1 and a heat dissipation region S2 that maintain a grounded state.

[0103] Among them, the grounding area S1 and the heat dissipation area S2 are areas that can be distinguished from each other in the transfer area. As another example, at least a part of the two can be overlapping areas, forming a part in the whole of the transfer area.

[0104] Additionally, the grounding area S1 is a region where the inner surface of the chamber portion 100 is connected to the external ground, and it remains grounded while contacting the inner surface as the substrate support portion 400 descends, thereby releasing static electricity. It is distinct from other regions where a transfer area with an additional coating or non-conductive cover can be applied. The contact surface with the substrate support portion 400 is made of a conductor and can be a region where a static electricity discharge path based on the chamber portion 100 is set.

[0105] In the grounding area S1, an electrostatic sensor, which will be described later, may be provided. This area may be where the electrostatic quantity measurement of the substrate support 400 is performed by an electrostatic sensor provided in the chamber section 100.

[0106] Regarding the heat dissipation area S2, as part of the inner surface of the chamber portion 100 constituting the transfer area, it may be an area that contacts the substrate support portion 400 and releases heat to the outside.

[0107] Specifically, the heat dissipation area S2, compared to other areas of the transfer area on the inner surface of the chamber 100, is controlled at a relatively low temperature. It may be an area that releases heat through contact generated by the descent of the substrate support 400. It cannot be further temperature-regulated and is distinguished from other areas that maintain a relatively high temperature, thus its temperature is relatively low or controlled at a low temperature.

[0108] For example, regarding the heat dissipation area S2, the corresponding stator portion 200 includes a cooling portion 230, which is described later. Compared to other cooling portions 230, the cooling portion 230 has a relatively stronger refrigerant flow rate or a lower refrigerant temperature to contact the substrate support portion 400, thereby guiding the heat dissipation of the substrate support portion 400.

[0109] Furthermore, as another example, regarding the heat dissipation area S2, as additional refrigerant is supplied to the wall of the corresponding chamber section 100, the temperature can be controlled at a lower level. As a component similar to the cooling section 230 applicable to the stator section 200, the chamber section 100 of the corresponding heat dissipation area S2 is provided with an additional cooling section.

[0110] Furthermore, as another example, the heat dissipation area S2 is a relatively low temperature area in the vacuum space S1, and as another example, it is a relatively far area from the substrate processing device that performs substrate processing and is located adjacent to the substrate transfer device.

[0111] Furthermore, as another example, the heat dissipation area S2 is an area where the temperature is controlled at a lower temperature. It is an area where the temperature of the substrate support 400 rises. For example, it is an area that receives the high-temperature substrate that has completed substrate processing, which is adjacent to the substrate conveying device that performs substrate processing and is located adjacent to the substrate conveying device.

[0112] The temperature sensor described later is provided in the heat dissipation area S2, and the temperature measurement of the substrate support 400 is performed by the temperature sensor provided in the chamber section 100.

[0113] The stator 200 is a component that is respectively disposed in multiple mounting slots 101 and generates an electromagnetic force for magnetic levitation movement on the transmission unit 10. Various components may be used.

[0114] In particular, the stator section 200 can be composed of a single module and a single module can be disposed in the setting slot 101, or multiple modules can be disposed in multiple setting slots 101 respectively, thereby forming a movement path in the vacuum space S of the transmission unit 10.

[0115] Accordingly, regarding the stator section 200, a portion of the multiple stator sections 200 can be controlled independently as needed, and a single module, which is the smallest unit, can be controlled separately.

[0116] For example, the stator section 200 is as follows Figure 4 and 5 As shown, it includes: a coil section 210 that applies electromagnetic force to the transmission unit 10; a circuit section 220 that controls the coil section 210 and receives power applied from the outside; and a cooling section 230 for cooling the coil section 210.

[0117] Wherein, the stator section 200 is as follows Figure 3 As shown, in the insertion slot 101, the coil part 210, the cooling part 230 and the circuit part 220 are inserted and arranged in sequence from the vacuum space S side, and combined into a module.

[0118] That is, in order to facilitate the action of electromagnetic force based on the electromagnetic field between the transmission unit 10, the coil section 210 is arranged on the vacuum space S side of the insertion slot 101 adjacent to the transmission unit 10, and the cooling section 230, which cools the high temperature state caused by the application of the electromagnetic field, is arranged adjacent to the coil section 210 as needed, and the circuit section 220 is arranged to connect the coil section 210.

[0119] The coil section 210 is a component that provides electromagnetic force through electromagnetic interaction with the permanent magnet of the transmission unit 10, and can be a coil board in the form of a PCB.

[0120] The circuit section 220 is a component that applies power to the coil section 210 and controls the power applied to the coil section 210 according to various control signals.

[0121] Furthermore, the coil portion 210 can be disposed in a mounting groove 232 formed on the cooling portion 230, and is sealed by a sealing member 240 for sealing between it and the inner surface of the mounting groove 101.

[0122] The cooling section 230 is a component that forms a refrigerant circulation path 231 for transporting refrigerant from the outside and transporting refrigerant out, and performs cooling by circulating refrigerant in the refrigerant circulation path 231.

[0123] That is, the cooling section 230 forms a refrigerant circulation path 231 in a box made of a material that facilitates heat transfer, and performs cooling by exchanging heat with the coil section 210 and the bottom surface of the chamber section 100 and other peripheral components through the refrigerant supplied from the outside.

[0124] The cooling section 230 can transfer cooled refrigerant through an external heat exchange device, and the refrigerant circulation path 231 in the cooling section 230 between adjacent stator sections 200 is connected to each other so that the refrigerant can circulate.

[0125] In addition, the multiple stator sections 200 are divided into multiple control units including at least two stator sections 200, and are controlled independently by control unit. Among them, multiple cooling sections 230 in a single control unit share refrigerant because the refrigerant circulation path 231 is connected to each other, so they can be controlled together.

[0126] Therefore, cooling can be controlled independently by control unit, and cooling of specific areas of multiple stator sections 200, namely the areas of the chamber section 100 adjacent to the substrate processing device that maintain a relatively high temperature, can be enhanced as needed.

[0127] The substrate conveying apparatus including the conveying unit of the present invention will be described in detail below with reference to the accompanying drawings.

[0128] The substrate conveying device of the present invention includes: a chamber portion 100, which forms a vacuum space S inside; a conveying unit 10, which moves by magnetic levitation within the vacuum space S to convey a substrate 1; a plurality of stator portions 200 disposed in the chamber portion 100 to generate electromagnetic forces for magnetic levitation movement on the conveying unit 10; and a control unit that adjusts the electromagnetic forces generated by the stator portions 200 to control the movement of the conveying unit 10.

[0129] Furthermore, the substrate transfer device of the present invention includes an electrostatic sensor, which is provided in the chamber portion 100 to measure the electrostatic charge of the substrate support portion 400 within the vacuum space S.

[0130] Furthermore, the substrate conveying device of the present invention includes a temperature sensor, which is provided in the chamber portion 100 to measure the temperature of the substrate support portion 400 within the vacuum space S.

[0131] The chamber section 100, stator section 200 and transmission unit 10 adopt the same structure as described above, so repeated descriptions are omitted.

[0132] The control unit is a component that controls the movement of the transmission unit 10 by adjusting the electromagnetic force generated by the stator 200, and various components may be used.

[0133] That is, the control unit adjusts the electromagnetic force generated by the stator 200 and controls the movement of the transmission unit 10 by appropriately adjusting the power applied to the coil section 210 side through the circuit section 220 of the stator section 200.

[0134] In addition, conventional transmission units transfer heat from the substrate 1 and accumulate static electricity by centering on the substrate support 400 that supports the relatively high-temperature substrate 1. Since they are arranged in a magnetically levitated state in the high-vacuum space S, it is difficult to dissipate the accumulated heat and static electricity, thus causing problems with particulate matter management.

[0135] To improve this problem, the control unit controls the substrate support 400 to contact the inner surface of the chamber 100, which is kept in a grounded state, in order to discharge static electricity within the substrate support 400.

[0136] That is, in order to discharge the static electricity accumulated in the substrate support portion 400, the control unit, such as Figure 8 As shown, the generation of electromagnetic force in a specific stator section 200 is interrupted, and the permanent magnet section 300 is guided to descend. Accordingly, the joint 410 arranged between the permanent magnet section 300 and the stator section 200 contacts the bottom surface of the chamber section 100, thereby guiding it to discharge static electricity along the bottom surface of the grounded chamber section 100.

[0137] Therefore, the control unit receives the measurement value of an electrostatic sensor that measures the static electricity of the substrate support portion 400 inside or outside the chamber portion 100 by contact or non-contact measurement within the vacuum space S. When the measured value exceeds a preset value, a control signal is applied to cause the transmission unit 10 to descend and contact the inner surface of the chamber portion 100.

[0138] That is, the control unit controls the following: when the electrostatic value measured by the electrostatic sensor exceeds a preset value, the substrate support 400 contacts the inner surface of the chamber 100.

[0139] Alternatively, the control unit may lower the substrate support 400 to contact the inner surface of the chamber 100 after a certain period of time, without relying on the measurement value of another electrostatic sensor.

[0140] Furthermore, the control unit controls the substrate support 400 to contact the inner surface of the chamber 100 in order to dissipate heat from the substrate support 400.

[0141] That is, the control unit is as follows Figure 8 As shown, since there is no other heat transfer medium in the high vacuum space S, the transmission unit 10, which is in a magnetic levitation state, is lowered in order to release the heat of the substrate support 400, so that the joint 410 contacts the bottom surface of the chamber 100 and releases heat through conduction.

[0142] In addition, in this case, as the substrate support portion 400, which receives heat from the substrate 1 and maintains a relatively high temperature, comes into contact with the inner surface of the chamber portion 100, which is maintained at a relatively low temperature by the cooling portion 230 inside the stator portion 200, heat exchange can be performed to cool the substrate support portion 400.

[0143] The control unit controls the following: it receives the measured value of a temperature sensor located inside or outside the chamber 100 and measuring the temperature of the substrate support 400 in the vacuum space S by contact or non-contact measurement; when the measured value exceeds a preset value, it applies a control signal to lower the transmission unit 10 so that it contacts the inner surface of the chamber 100 to perform cooling.

[0144] That is, the control unit controls the substrate support 400 to contact the inner surface of the chamber 100 when the temperature value measured by the temperature sensor exceeds a preset value.

[0145] Alternatively, the control unit may lower the substrate support 400 to contact the inner surface of the chamber 100 after a certain period of time, without relying on the measured value of another temperature sensor.

[0146] Furthermore, the aforementioned electrostatic sensor and temperature sensor are located outside the chamber portion 100 and perform measurements in a non-contact manner. As another example, they are arranged inside the vacuum space S to measure electrostatics and temperature respectively.

[0147] The above description only illustrates a portion of the preferred embodiments that can be implemented by the present invention. Therefore, it is well known that the scope of the present invention should not be limited to the above embodiments and should not be interpreted in a restrictive manner. The technical ideas of the present invention described above and their related technical ideas are all included within the scope of the present invention.

Claims

1. A transmission unit that moves by magnetic levitation of a stator section (200) that generates an electromagnetic field, thereby transmitting a substrate (1). Its features are, Includes: a permanent magnet section (300) that is magnetically levitated based on the electromagnetic field of the stator section (200); The substrate support portion (400) is attached at one end to the opposite side of the stator portion (200) in the permanent magnet portion (300), and at the other end supports the substrate (1).

2. The transmission unit according to claim 1, characterized in that, The substrate support portion (400) includes: a connecting portion (410) connected to the permanent magnet portion (300); a support portion (420) supporting the substrate (1); and a connecting portion (430) connecting the connecting portion (410) and the support portion (420).

3. The transmission unit according to claim 2, characterized in that, The connecting portion (430) includes: a vertical connecting portion (431) extending vertically from the connecting portion (410); and a horizontal connecting portion (432) extending horizontally from the vertical connecting portion (431) and connecting to the supporting portion (420).

4. The transmission unit according to claim 3, characterized in that, The vertical connecting portion (431) is guided to contact the groove (301) formed at a corresponding position in the side of the permanent magnet portion (300).

5. The transmission unit according to claim 1, characterized in that, The substrate support portion (400) includes at least one material selected from aluminum, stainless steel and ceramic, so that the electromagnetic field generated by the stator portion (200) can penetrate to the permanent magnet portion (300).

6. The transmission unit according to claim 1, characterized in that, The substrate support portion (400) is a ceramic material coated with a conductive substance on the opposite side of the permanent magnet portion (300).

7. A substrate conveying device, Its features are, Includes: a chamber section (100) that forms a vacuum space (S) inside; The transmission unit (10) according to any one of claims 1 to 6 moves by magnetic levitation within the vacuum space (S) to transmit the substrate (1); Multiple stator sections (200) are disposed in the chamber section (100) to generate an electromagnetic field for magnetic levitation movement of the transmission unit (10).

8. The conveying device according to claim 7, characterized in that, It also includes a control unit that adjusts the movement of the transmission unit (10) by regulating the electromagnetic field generated by the stator unit (200).

9. The conveying device according to claim 8, characterized in that, The control unit controls the following: in order to discharge static electricity in the substrate support (400), the substrate support (400) is brought into contact with the inner surface of the chamber (100) which is kept in a grounded state.

10. The conveying device according to claim 8, characterized in that, The chamber portion (100) forms a grounding region (S1) that remains grounded within a portion of the transfer area of ​​the transfer unit (10) formed by the stator portion (200). The control unit controls the following: in order to discharge static electricity in the substrate support (400), the transmission unit (10) moves to the grounding area (S1) so that the substrate support (400) contacts the grounding area (S1).

11. The conveying device according to claim 9, characterized in that, It also includes an electrostatic sensor, which is provided in the chamber portion (100) to measure the electrostatic charge on the substrate support portion (400) within the vacuum space (S).

12. The conveying device according to claim 11, characterized in that, The control unit controls the following: when the electrostatic value measured by the electrostatic sensor exceeds a preset value, the substrate support (400) is brought into contact with the inner surface of the chamber (100).

13. The conveying device according to claim 8, characterized in that, The control unit controls the substrate support (400) to contact the inner surface of the chamber (100) in order to dissipate heat from the substrate support (400).

14. The conveying device according to claim 8, characterized in that, The chamber portion (100) forms a heat dissipation area (S2) within a portion of the transfer area of ​​the transfer unit (10) formed by the stator portion (200). The control unit controls the following: in order to dissipate heat from the substrate support (400), the transfer unit (10) moves to the heat dissipation area (S2) so that the substrate support (400) contacts the heat dissipation area (S2).

15. The conveying device according to claim 14, characterized in that, At least one of the chamber portion (100) and the stator portion (200) corresponding to the heat dissipation area (S2) includes a cooling portion for heat exchange with the substrate support portion (400).

16. The conveying device according to claim 13, characterized in that, It also includes a temperature sensor, which is provided in the chamber portion (100) to measure the temperature of the substrate support portion (400) within the vacuum space (S).

17. The conveying device according to claim 16, characterized in that, The control unit controls the following: when the temperature value measured by the temperature sensor exceeds a preset value, the substrate support (400) contacts the inner surface of the chamber (100).

18. The conveying device according to claim 13, characterized in that, The stator section (200) includes: a coil section (210) that generates an electromagnetic field that causes the transmission unit (10) to be magnetically levitated; a circuit section (220) that controls the coil section (210) and receives power applied from the outside; and a cooling section (230) for cooling the coil section (210).

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