Mixed gas treatment system and method
Patent Information
- Application Number
- CN202611323911.7
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2026-08-28
- Publication Date
- 2026-09-25
AI Technical Summary
SF6/N2等混合气体含有微量水分,对SF6分解产物而言,水分会与SOF2、SO2F2等组分发生水解反应或者促进表面反应,但使用强干燥剂会导致SOF2、SO2F2等组分被吸附,造成混合气体比例失真,影响检测结果的准确性
[0015]本申请提供的混合气体处理系统以及方法,通过湿度隔离模块隔离目标混合气体中的水蒸气即对目标混合气体进行除湿;其中湿度隔离模块入口端的第一传感器用于检测目标混合气体进入湿度隔离模块时的干燥程度,通过湿度隔离模块出口端设置的第二传感器检测目标混合气体除湿后的干燥程度,控制模块根据第一传感器和第二传感器的检测值控制湿度隔离模块的势力差控制湿度隔离模块的扫气量;其次,经过除湿后的目标混合气体进入吸附模块,由吸附模块吸附目标混合气体中的目标组分,被吸附的目标组分进入组分处理模块进行处理,控制模块还可以控制吸附模块的工作温度以控制各目标组分在吸附模块中的吸附位置,本申请在对目标混合气体进行吸附处理前,先通过湿度隔离模块吸附目标混合气体中的水蒸气以起到除湿作用,进而减少水蒸气与目标混合气体中的目标组分发生反应的可能性,降低水蒸气对目标组分的组成比例的影响,保持目标混合气体中各目标组分的原始比例,进一步保证检测结果的准确性。
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Figure CN122806265A_ABST
Abstract
Description
Technical Field
[0001] This application relates to the field of gas analysis technology, and in particular to a mixed gas processing system and method. Background Technology
[0002] Sulfur hexafluoride (SF6) gas or its mixtures are widely used in high-voltage electrical equipment due to their excellent insulation and arc-quenching properties. However, SF6 / N2 mixtures decompose under conditions such as partial discharge, arc discharge, abnormal overheating, and aging of insulating materials, producing toxic and corrosive products such as SOF2, SO2, and H2S, which seriously affect the performance of electrical equipment and the health of personnel. Accurate analysis of the types and concentrations of decomposition products in SF6 / N2 mixtures can be used to infer insulation defects in electrical equipment, providing an effective means of determining the presence of potential faults such as partial discharge and abnormal overheating.
[0003] Existing trace gas enrichment devices typically capture the target analyte in a low-temperature adsorption tube and then desorb it by heating before introducing it into the chromatographic system. Mixtures such as SF6 / N2 contain trace amounts of moisture. For SF6 decomposition products, moisture can undergo hydrolysis reactions with components such as SOF2 and SO2F2, or promote surface reactions. However, using strong desiccants can lead to the adsorption of SOF2 and SO2F2, causing distortion of the mixed gas ratio and affecting the accuracy of the detection results. Summary of the Invention
[0004] Therefore, it is necessary to provide a mixed gas processing system and method that can adsorb water vapor to make the detection results more accurate.
[0005] In a first aspect, a mixed gas processing system is provided, comprising:
[0006] A humidity isolation module is provided, wherein the inlet end of the humidity isolation module is connected to a sample gas pipeline, a first sensor is provided at the inlet end of the humidity isolation module, and a second sensor is provided at the outlet end of the humidity isolation module. The humidity isolation module is used to isolate water vapor in the target mixed gas, and the sample gas pipeline is used to transport the target mixed gas.
[0007] An adsorption module is provided, with its inlet end connected to the humidity isolation module. The adsorption module includes a first working area and a second working area. The first working area is used to control the condensation state of the target mixed gas, and the second working area is used to adsorb the target components in the target mixed gas.
[0008] A component processing module, one end of which is connected to the adsorption module, is used to process the target component collected by the adsorption module;
[0009] The control module is used to control the driving mode of the humidity isolation module and the operating temperature of the adsorption module based on the detection signals of the first sensor and the second sensor.
[0010] Secondly, a method for treating a mixed gas is provided, the method being applied to the aforementioned mixed gas treatment system, the method comprising:
[0011] Acquire the first humidity value, the second humidity value, and the matrix ratio data of the target mixed gas;
[0012] The target dew point temperature of the target mixed gas is determined based on the matrix ratio data of the target mixed gas;
[0013] The working mode of the humidity isolation module is controlled according to the first humidity value, the second humidity value and the target dew point temperature, so that the humidity at the outlet of the humidity isolation module meets the transfer conditions of the target mixed gas.
[0014] The operating temperature of the adsorption module is controlled to correspond to the adsorption temperature of each target component in the target mixed gas, and the recovery results of each target component by the component processing module are obtained.
[0015] The mixed gas processing system and method provided in this application dehumidifies the target mixed gas by isolating water vapor in the target mixed gas through a humidity isolation module. A first sensor at the inlet of the humidity isolation module detects the dryness of the target mixed gas upon entering the module, and a second sensor at the outlet detects the dryness after dehumidification. A control module controls the scavenging volume of the humidity isolation module based on the power difference between the first and second sensor values. Next, the dehumidified target mixed gas enters an adsorption module, where it adsorbs target components. The adsorbed components then enter a component processing module for further processing. The control module can also control the operating temperature of the adsorption module to control the adsorption position of each target component within it. Before adsorption processing, this application dehumidifies the target mixed gas by adsorbing water vapor through a humidity isolation module, thereby reducing the likelihood of reaction between water vapor and target components, minimizing the impact of water vapor on the composition ratio of target components, maintaining the original proportions of each target component in the target mixed gas, and further ensuring the accuracy of the detection results. Attached Figure Description
[0016] To more clearly illustrate the technical solutions in the embodiments of this application or the conventional technology, the drawings used in the description of the embodiments or the conventional technology will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.
[0017] Figure 1 This is a schematic diagram of the structure of a mixed gas processing system provided in one embodiment;
[0018] Figure 2 A schematic diagram of a mixed gas processing system provided in another embodiment;
[0019] Figure 3 A schematic diagram of a mixed gas processing system provided in another embodiment;
[0020] Figure 4 A schematic diagram of a mixed gas processing system provided in another embodiment;
[0021] Figure 5 This is a schematic flowchart of a mixed gas processing method provided in one embodiment.
[0022] Explanation of reference numerals in the attached figures:
[0023] Mixed gas processing system 100, first sensor 110, humidity isolation module 120, second sensor 130, adsorption module 140, component processing module 150, control module 160, sample gas branch 1201, drying branch 1202, recovery branch 310, carrier gas channel 320, focusing trap 510, and chromatographic analysis component 520. Detailed Implementation
[0024] To facilitate understanding of this application, a more complete description will be provided below with reference to the accompanying drawings, which illustrate embodiments of the present application. However, the present application can be implemented in many different forms and is not limited to the embodiments described herein. Rather, these embodiments are provided so that the disclosure of this application will be thorough and complete.
[0025] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs. The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the application.
[0026] It is understood that the terms "first," "second," etc., used herein may be used to describe various elements, but these elements are not limited by these terms. These terms are only used to distinguish one element from another. For example, without departing from the scope of this application, a first resistor may be referred to as a second resistor, and similarly, a second resistor may be referred to as a first resistor. Both the first resistor and the second resistor are resistors, but they are not the same resistor.
[0027] It is understood that the term "connection" in the following embodiments should be understood as "electrical connection," "communication connection," etc., if the connected circuits, modules, units, etc., have electrical signal or data transmission with each other.
[0028] It is understandable that "at least one" refers to one or more, and "multiple" refers to two or more. "At least a part of an element" refers to part or all of an element.
[0029] When used herein, the singular forms of “a,” “an,” and “the” may also include the plural forms unless the context clearly indicates otherwise. It should also be understood that the terms “comprising / including” or “having,” etc., specify the presence of the stated features, wholes, steps, operations, components, parts, or combinations thereof, but do not preclude the possibility of the presence or addition of one or more other features, wholes, steps, operations, components, parts, or combinations thereof. Meanwhile, the term “and / or” as used in this specification includes any and all combinations of the associated listed items.
[0030] This embodiment mainly focuses on the component processing of target SF6 / N2 mixed gases in power equipment. In power systems, SF6 / N2 mixed gases can produce toxic and corrosive products such as SOF2, SO2, and H2S under conditions such as partial discharge, arc discharge, abnormal overheating, and aging of insulation materials. The role of trace detection is to detect whether the mixed gas contains these toxic gases in small amounts.
[0031] Regarding the decomposition of SF6 in the target gas mixture, water vapor in the target gas mixture will hydrolyze or promote surface reactions with target components such as SOF2 and SO2. If a strong desiccant is used to adsorb moisture, the strong desiccant may adsorb target components such as SO2 and H2S while adsorbing moisture, which will cause the composition ratio of each target component in the target gas mixture to be distorted and thus affect the recovery rate of the target components.
[0032] In existing technologies, traditional dehumidification materials compete with active sulfur-containing target components for adsorption, making it difficult to balance dehumidification efficiency and target component recovery rate.
[0033] Figure 1A schematic diagram of the mixed gas processing system 100 is shown. Figure 1 As shown, this embodiment provides a mixed gas processing system 100, which includes:
[0034] A humidity isolation module 120 is provided. The inlet end of the humidity isolation module 120 is connected to the sample gas pipeline. A first sensor 110 is provided at the inlet end of the humidity isolation module 120, and a second sensor 130 is provided at the outlet end of the humidity isolation module 120. The humidity isolation module 120 is used to isolate water vapor in the target mixed gas, and the sample gas pipeline is used to transport the target mixed gas.
[0035] The adsorption module 140 has an inlet end connected to the humidity isolation module 120. The adsorption module 140 includes a first working area and a second working area. The first working area is used to control the condensation state of the target mixed gas, and the second working area is used to adsorb the target components in the target mixed gas.
[0036] The component processing module 150 is connected at one end to the adsorption module 140 and is used to process the target components collected by the adsorption module 140.
[0037] The control module 160 is used to control the driving mode of the humidity isolation module 120 and the working temperature of the adsorption module 140 according to the detection signals of the first sensor 110 and the second sensor 130.
[0038] Specifically, the sample gas pipeline is connected to the inlet of the humidity isolation module 120, the humidity isolation module 120 is connected in series with the adsorption module 140, and the adsorption module 140 is connected with the component processing module 150.
[0039] The target mixed gas enters the humidity isolation module 120 through the sample gas pipeline. The humidity isolation module 120 separates the water vapor in the target mixed gas from other target components. The target mixed gas containing other target components but not water vapor enters the adsorption module 140 through the series channel between the humidity isolation module 120 and the adsorption module 140.
[0040] The first sensor 110 is disposed between the sample gas pipeline and the humidity isolation module 120, and the second sensor 130 is disposed between the humidity isolation module 120 and the adsorption. That is, the first sensor 110 is disposed at the inlet end of the humidity isolation module 120, and the second sensor 130 is disposed at the outlet end of the humidity isolation module 120.
[0041] The target mixed gas enters the inlet of the humidity isolation module 120 through the sample gas pipeline. The first sensor 110 is used to detect the dryness of the target mixed gas before it is dehumidified by the humidity isolation module 120, and the second sensor 130 is used to detect the dryness of the target mixed gas after it is dehumidified by the humidity isolation module 120.
[0042] The humidity isolation module 120 separates water vapor from the target gas mixture during delivery. The humidity isolation module 120 uses a membrane module to separate water vapor from other target components in the target gas mixture. The membrane material used in the membrane module has a high osmotic pressure for water vapor, which then enters the membrane-side channels after passing through the membrane module. Other target components of the target gas mixture are isolated by the membrane module.
[0043] The target mixed gas isolated in front of the membrane module flows through the adsorption module 140 via the series channel between the humidity isolation module 120 and the adsorption module 140.
[0044] Understandably, the first sensor 110 and the second sensor 130 are located on both sides of the channel to detect the dryness of the target mixed gas before and after dehumidification.
[0045] The control module 160 can determine the dehumidification effect of the target mixed gas based on the detection values of the first sensor 110 and the second sensor 130.
[0046] If the detection value of the second sensor 130 indicates that the target gas mixture still contains a large amount of water vapor, the partial pressure difference of the humidity isolation module 120 is controlled to keep the detection value of the second sensor 130 within a set range. When the detection value of the second sensor 130 remains within the set range, it indicates that the dryness of the target gas mixture meets the requirements.
[0047] The negative pressure of the humidity isolation module 120 refers to the partial pressure difference between the two sides of the membrane module, which drives water vapor to permeate from the outside of the membrane module to the membrane side channel inside the membrane module.
[0048] Preferably, this embodiment generates a pressure difference across the membrane module in two ways. The first method involves introducing a low-dew-point, dry, inert scavenging gas into the membrane module to reduce the water vapor partial pressure inside. The second method involves using a miniature vacuum pump connected to the humidity isolation module 120 to reduce the internal pressure of the membrane module.
[0049] It should be noted that the distinction between the outside and inside of the membrane module is only based on the direction of water vapor flow. The outside of the membrane module indicates the initial position of the water vapor, while the inside of the membrane module indicates the final position of the water vapor after it has flowed due to the force difference.
[0050] The two working areas in the adsorption module 140 are distributed in a manner corresponding to the flow direction of the target mixed gas, that is, the inlet end of the adsorption module 140 is connected to the outlet end of the humidity isolation module 120.
[0051] The outlet of the humidity isolation module 120 is used to discharge the target mixed gas after dehumidification. The side closer to the inlet of the adsorption module 140 is the first working area, and the side farther away from the inlet of the adsorption module 140 is the second working area.
[0052] The first and second working zones operate at different temperatures. The first working zone operates at a relatively higher temperature to suppress residual moisture in the target gas mixture, prevent the target components in the target gas mixture from undergoing condensation or freezing reactions, and mitigate matrix impact.
[0053] The matrix refers to the other components in the target gas mixture that are being processed, and its content is generally much higher than that of other target components. Matrix impact refers to a situation where the matrix concentration is too high, causing column overload and the signal of the detection module to approach saturation.
[0054] The operating temperature of the second working zone is lower than that of the first working zone. The second working zone is mainly used to adsorb the target components in the target mixed gas in order to complete the recovery of the target components.
[0055] The second working area can be selectively filled with adsorbent material to enrich the target components.
[0056] For example, the main components of the target mixed gas are SF6 / N2, and the target components adsorbed in the second working area can be sulfur-containing decomposition products, i.e., the target components involved in this embodiment.
[0057] Optionally, the first working area and the second working area can be equipped with a cooling component or a heating component, and the control module 160 controls the cooling efficiency or heating efficiency of the first working area and / or the second working area respectively according to their working effect.
[0058] Furthermore, the control module 160 can control the operating temperature of the second working zone according to the proportion of the matrix components in the target mixed gas, so that the operating temperature of the second working zone is higher than the condensation temperature of the matrix components and a safety margin is left, so as to avoid the adsorption of matrix components in the second working zone and affect the recovery effect of the target components.
[0059] For example, the working temperature of the first working zone can be set between -5℃ and 10℃; the working temperature of the second working zone can be set between -30℃ and -50℃. It should be noted that the working temperature of the second working zone should be higher than the condensation temperature of the matrix components and have a safety margin of not less than 5℃.
[0060] The control module 160 receives the detection values sent by the first sensor 110 and the second sensor 130, and controls the water vapor permeability of the humidity isolation module 120 according to the detection values of the first sensor 110 and the second sensor 130 to improve the dehumidification effect of the target mixed gas.
[0061] When the detection value of the second sensor 130 indicates that the water vapor content of the target mixed gas will not react with the target component, the control module 160 controls the passage of the series channel between the humidity isolation module 120 and the adsorption module 140.
[0062] After the target component is adsorbed, the switching valve at the outlet of the adsorption module 140 switches the passage to the recovery branch 310, and uses dry carrier gas to replace the residual water vapor and matrix components in the adsorption module 140 to the recovery branch 310. At this time, the target component is still retained on the adsorption material of the adsorption module 140.
[0063] After the replacement is completed, the switching valve at the outlet of the adsorption module 140 switches the passage to the passage of the component processing module 150. The control module 160 increases the operating temperature of the second working zone, at which point the adsorbed target component is released and transported to the component processing module 150.
[0064] It should be noted that, Figure 1 The sizes of the first and second work areas shown are for illustrative purposes only and do not limit the configuration of the first and second work areas provided in this embodiment.
[0065] In this embodiment, the humidity isolation module 120 isolates water vapor in the target mixed gas, allowing the dehumidified target mixed gas to enter the adsorption module 140. During the dehumidification process, the membrane module in the humidity isolation module 120 separates the water vapor from other target components in the target mixed gas. The water vapor enters the recovery branch 310 through the membrane side channel. The dehumidified target mixed gas enters the adsorption module 140, where the adsorption module 140 adsorbs the target components in the target mixed gas. After adsorption, gas replacement is completed by a drying carrier gas. Finally, the adsorbed target components enter the component processing module 150. The humidity isolation module 120 dehumidifies the target mixed gas, reducing the influence of water vapor on the proportion of target components. Then, gas replacement removes the residual water vapor and matrix components in the target mixed gas, preventing the matrix components from entering the component processing module 150 along with the target components. This ensures the original proportion of each target component in the target mixed gas, further guaranteeing the detection results of the recovery rate of each target component, and is beneficial to ensuring the treatment effect of the target mixed gas.
[0066] Furthermore, such as Figure 2 As shown, the humidity isolation module 120 includes a sample gas branch 1201 and a drying branch 1202. The sample gas branch 1201 is connected to the adsorption module 140, and the drying branch 1202 is connected to the recovery branch 310.
[0067] The first sensor 110 is located at the inlet end of the sample gas branch 1201, and the second sensor 130 is located at the outlet end of the sample gas branch 1201.
[0068] Drying branch 1202 is used to adsorb water vapor in the target mixed gas.
[0069] Sample gas branch 1201 is used to send the dehumidified target mixed gas into adsorption module 140.
[0070] Specifically, such as Figure 2 As shown, the humidity isolation module 120 separates other target components and water vapor from the target mixed gas through a membrane assembly. The isolated water vapor enters the drying branch 1202, which can be equipped with a strong desiccant to absorb the water vapor, or the drying branch 1202 can be connected to the recovery branch 310.
[0071] Furthermore, the partial pressure difference between the two sides of the membrane module specifically refers to the partial pressure difference between the side before water vapor permeation and the side after water vapor permeation, with the side after water vapor permeation being the drying branch 1202.
[0072] Specifically, the sample gas branch 1201 and the drying branch 1202 are connected in parallel. The membrane module in the humidity isolation module 120 is used as the separation component. The target mixed gas enters the humidity isolation module 120, and the membrane module permeates water vapor into the membrane side, which is the drying branch 1202. The membrane module has low permeability to other target components in the target mixed gas, so they cannot pass through the membrane module. Instead, they enter the adsorption module 140 through the sample gas channel.
[0073] Preferably, the first sensor 110 is located on the side of the sample gas branch 1201 away from the adsorption module 140, that is, at the inlet end of the humidity isolation module 120. The second sensor 130 is located on the side of the sample gas branch 1201 closer to the adsorption module 140, that is, at the outlet end of the humidity isolation module 120. The outlet end of the humidity isolation module 120 can be the outlet end of the sample gas branch 1201.
[0074] The target mixed gas enters the adsorption module 140 through the outlet of the sample gas branch 1201. Before entering the adsorption module 140, the control module 160 determines the dew point temperature of the target mixed gas through the detection values of the first sensor 110 and the second sensor 130.
[0075] If the dew point temperature is higher than the upper limit, the scavenging air flow rate or partial pressure difference of the drying branch 1202 is increased to drive water vapor into the drying branch 1202. If the dew point temperature is lower than the lower limit, the scavenging air flow rate or partial pressure difference of the drying branch 1202 is decreased.
[0076] In this embodiment, water vapor in the target mixed gas is separated by the membrane module in the humidity isolation module 120. Simultaneously, a sample gas branch 1201 and a drying branch 1202 are arranged in parallel to separate the water vapor and the dehumidified target mixed gas. A first sensor 110 is installed at the inlet of the sample gas branch 1201, and a second sensor 130 is installed at the outlet of the sample gas branch 1201. The dehumidification effect of the target mixed gas is determined by the detection values of the first sensor 110 and the second sensor 130. Simultaneously, the dew point temperature of the target mixed gas is detected by the second sensor 130 to determine the degree of dryness of the target mixed gas. This ensures that water vapor does not react with the target components, affecting their composition and concentration, and to a certain extent, guarantees the recovery effect of the target components.
[0077] Furthermore, the first sensor 110 and the second sensor 130 are dew point sensors.
[0078] The first sensor 110 is used to output the first dew point temperature value at the inlet of the humidity isolation module 120, and the second sensor 130 is used to output the second dew point temperature value at the outlet of the humidity isolation module 120.
[0079] The control module 160 receives the first dew point temperature value sent by the first sensor 110 and the second dew point temperature value sent by the second sensor 130, and controls the driving force and scavenging volume of the humidity isolation module 120 according to the deviation between the second dew point temperature value and the first dew point temperature value.
[0080] Specifically, the first sensor 110 and the second sensor 130 are dew point sensors, wherein the first sensor 110 is located at the inlet end of the humidity isolation module 120, and the second sensor 130 is located at the outlet end of the humidity isolation module 120.
[0081] The dew point sensor is used to detect the dew point temperature of the sample gas branch 1201. The higher the pressure in the pipeline where the first sensor 110 is located, the easier it is for water vapor to condense, and the higher the dew point temperature will be.
[0082] The control module 160 can determine the pressure difference across the membrane assembly and the dryness of the target mixed gas by reading the first dew point temperature value of the first sensor 110 and the second dew point temperature value of the second sensor 130, so as to perform the next operation and ensure that the dew point temperature of the target mixed gas at the outlet of the sample gas branch 1201 meets the set value. This also ensures that the water vapor content in the target mixed gas will not affect the adsorption effect of the adsorption module 140.
[0083] Furthermore, the first sensor 110 and the second sensor 130 are humidity sensors.
[0084] The first sensor 110 is used to output the first humidity value at the inlet of the humidity isolation module 120, and the second sensor 130 is used to output the second humidity value at the outlet of the humidity isolation module 120.
[0085] The control module 160 receives the first humidity value sent by the first sensor 110 and the second humidity value sent by the second sensor 130, and controls the driving force and scavenging volume of the humidity isolation module 120 according to the deviation between the first humidity value and the second humidity value.
[0086] Specifically, the first sensor 110 and the second sensor 130 are humidity sensors. The first sensor 110 and the second sensor 130 detect the humidity data at the inlet and outlet of the humidity isolation module 120. The difference in humidity data indicates the dehumidification effect of the target mixed gas.
[0087] The control module 160 can convert the first humidity value sent by the first sensor 110 and the second humidity value sent by the second sensor 130 into the corresponding dew point temperature, and the second humidity value into the corresponding dew point temperature. Then, based on the two dew point temperatures, it can determine the dryness of the target mixed gas and adjust the driving force for controlling the flow of water vapor by adjusting the partial pressure difference on both sides of the membrane module.
[0088] Optionally, pressure sensors can also be installed at the inlet and outlet of the humidity isolation module 120. The pressure difference between the two sides of the membrane module is determined based on the pressure value detected by the pressure sensor. The driving force of water vapor is controlled in this way to increase or decrease the dryness of the target mixed gas.
[0089] Furthermore, the temperature value of the first working zone of the adsorption module 140 corresponds to the condensation temperature of the matrix and water in the target mixed gas. The temperature of the first working zone satisfies the first condition, which is to prevent the matrix in the target mixed gas from condensing with the water.
[0090] Specifically, the temperature of the first working zone of the adsorption module 140 can be maintained at a temperature at which moisture and the matrix of the target mixed gas do not condense or freeze significantly, in order to buffer the residual water vapor in the target mixed gas and prevent impact on the matrix.
[0091] Optionally, the operating temperature of the first working zone needs to meet the first condition, which is to prevent the target components in the target mixed gas from condensing with moisture.
[0092] When moisture condenses with the target component or forms water vapor that reacts with the target component, the resulting products will affect the component ratio and concentration of the target mixed gas.
[0093] Furthermore, the adsorption module 140 is equipped with adsorption material for enriching multiple different target components in the target gas mixture. Furthermore, the adsorption material in the adsorption module 140 is layered. The temperature of the second working zone of the adsorption module 140 is gradient-distributed, and the adsorption location of the target components is controlled by different temperature distributions.
[0094] Specifically, the second working area of the adsorption module 140 can be filled with adsorption material. Optionally, the adsorption material can be filled in layers, with gaps between the layers, which can increase the adsorption area.
[0095] The placement of the adsorbent material can be combined with the adsorption temperature of different target components, and different areas can be set as adsorption sites for different types of target components.
[0096] Adsorption materials are essentially designed to selectively separate and process different target components from a target gas mixture by using principles such as size matching, polar interactions, or specific chemical bonds.
[0097] In this embodiment, the target component refers to the decomposition products of the matrix component in the target mixed gas.
[0098] For example, a target gas mixture composed of SF6 / N2 may decompose into products including, but not limited to, SOF2, SO2, and H2S. The role of the adsorbent material is to separate the target component from the matrix components in a large proportion and adsorb it into the adsorbent material.
[0099] Meanwhile, setting the operating temperature of the second working zone is essentially to ensure the separation effect of the target component. The second working zone is a low-temperature adsorption zone, which efficiently enriches the target component from the matrix component by utilizing the difference in physical state between the matrix component and the target component under low-temperature conditions.
[0100] Due to the roles of the first and second working zones in the adsorption module 140, the working temperatures of the first and second working zones are distributed in a gradient.
[0101] Furthermore, by setting a gradient distribution in the second working zone, the adsorption sites of different target components can be controlled. Simultaneously, adsorbent material suitable for the specific temperature range is filled according to the adsorption sites of different types of target components to maximize adsorption performance.
[0102] As an optional implementation, a cooler can be installed in the second working area of the adsorption module 140. The cold end of the cooler is coupled to the second working area through components such as a cold plate, jacket, or heat-conducting block; the hot end of the cooler is provided with a heat dissipation structure, and the cold end of the cooler is provided with a heat insulation layer and a condensate drainage structure. A temperature sensor and a temperature regulation component are installed in the first working area of the adsorption module 140. The temperature regulation component is used to heat or lower the operating temperature of the first working area. In this way, the operating temperature of the adsorption module 140 is distributed in a gradient.
[0103] Meanwhile, the adsorption module 140 is also equipped with various valve components, including a sample gas inlet shut-off valve, a dry carrier gas shut-off valve, and an outlet switching valve. The sample gas inlet shut-off valve is used to open or close the target mixed gas to open or close the sample injection state. The dry carrier gas shut-off valve is used to open or close the channel for the dry carrier gas to enter the adsorption module 140. The outlet switching valve is used to switch the path connecting the outlet end of the adsorption module 140 to the recovery branch 310 or the component module.
[0104] like Figure 3 As shown, the mixed gas processing system 100 further includes a carrier gas channel 320 and a recovery branch 310. The carrier gas channel 320 is connected to the inlet of the adsorption module 140, and the recovery branch 310 is used to recover the displaced water vapor and matrix.
[0105] The carrier gas channel 320 is used to deliver dry carrier gas to the adsorption module 140 after the adsorption module 140 has completed the adsorption of the target component to perform a gas replacement operation. The gas replacement operation replaces the target mixed gas in the adsorption module 140 with the carrier gas.
[0106] After the gas replacement operation is completed, the control module 160 controls the temperature value of the second working area to rise, so that the target component enters the component processing module 150 to complete the transfer process of the target mixed gas.
[0107] When the target component enters the component processing module 150, the control module 160 controls the temperature value of the second working area to increase in order to perform the residue cleaning operation.
[0108] Specifically, the carrier gas channel 320 is used to deliver dry carrier gas to the adsorption module 140, thereby replacing the residual water vapor and matrix components in the adsorption module 140.
[0109] The outlet of the carrier gas channel 320 is connected to the inlet of the adsorption module 140, and the inlet of the recovery branch 310 is connected to the outlet of the adsorption module 140. The dry carrier gas enters the adsorption module 140 through the carrier gas channel 320, and the residual water vapor and matrix components in the adsorption module 140 are discharged through the outlet of the adsorption module 140 and enter the recovery branch 310.
[0110] Understandably, the outlet of the adsorption module 140 is connected to both the recovery branch 310 and the component processing module 150. However, the passage between the outlet of the adsorption module 140 and the recovery branch 310, as well as the passage between the outlet of the adsorption module 140 and the component processing module 150, are connected by components such as switching valves to ensure that the two passages are not connected at the same time.
[0111] Preferably, the drying carrier gas can be dry helium or argon. The gas replacement operation is performed for 30-180 seconds. Once the residual amount of the matrix component is reduced to a preset threshold, the passage is switched back to the passage of the component processing module 150 via a switching valve.
[0112] The target mixed gas in the displacement adsorption module 140 referred to in this embodiment refers to the part that was not adsorbed by the adsorption module 140, namely the matrix components and residual water vapor.
[0113] After the gas replacement operation is completed, the control module 160 controls the working temperature of the second working area to rise, so that the adsorbed target components are released and enter the component processing module 150.
[0114] Preferably, the dry carrier gas can be used as the desorption transfer gas to deliver the target component released by heating to the component processing module 150.
[0115] Optionally, the increasing trend of the operating temperature of the second temperature can correspond to the gradient distribution set in the second working area, so as to control the release of different types of target components at different time points and their entry into the component processing module 150.
[0116] In this embodiment, a carrier gas channel 320 and a recovery branch 310 are provided in the mixed gas processing system 100. After the adsorption module 140 completes adsorption, the unadsorbed matrix components and residual water vapor are replaced to the recovery branch 310. Then, the second working zone is heated to release the adsorbed target components. At the same time, the target components are quickly introduced into the component processing module 150 with the help of dry carrier gas, which helps to improve the processing efficiency of the target components.
[0117] like Figure 4 As shown, the component processing module 150 further includes:
[0118] Focusing trap 510 is used to receive the target component flowing out of adsorption module 140 and form pulsed injection gas.
[0119] The chromatographic analysis component 520 receives pulsed gas injection and separates multiple target components in the target gas mixture.
[0120] Specifically, the function of the focusing trap 510 is to enable the detection module to capture trace amounts of the target component, thereby obtaining a signal of the corresponding target component concentration value.
[0121] After capturing the target component, the focusing trap 510 is rapidly heated, causing the captured molecules to concentrate and desorb quickly, forming a pulsed injection gas. This pulsed injection gas then enters the chromatographic analysis unit 520 for analysis.
[0122] The chromatographic analysis component 520 detects the concentration of the target component. The concentration of the target component corresponds to the adsorption effect of the adsorption module 140, and also means the recovery rate of the target component.
[0123] By comparing the concentrations of each target component, the composition ratio of each target component is obtained, so as to determine that the composition ratio of each target component before and after treatment is not significantly affected by hydrolysis, oxidation and surface reactions, and the component distribution stability of each target component in the target mixed gas is effectively maintained.
[0124] Figure 5 A schematic flowchart of the mixed gas treatment method provided in this embodiment is shown. Figure 5 As shown, this embodiment provides a method for treating a mixed gas. This method is applied to the mixed gas treatment system provided in the above embodiment. The method includes steps S502 to S508, wherein:
[0125] S502, acquire the first humidity value, the second humidity value, and the matrix ratio data of the target mixed gas.
[0126] S504, determine the target dew point temperature of the target gas mixture based on the matrix proportion data of the target gas mixture.
[0127] S506, the working mode of the humidity isolation module is controlled according to the first humidity value, the second humidity value and the target dew point temperature, so that the humidity at the outlet of the humidity isolation module meets the transfer conditions of the target mixed gas.
[0128] S508 controls the operating temperature of the adsorption module to correspond to the adsorption temperature of each target component in the target mixed gas and obtains the recovery results of each target component by the component processing module.
[0129] Specifically, the first humidity value is detected by the first sensor installed at the inlet of the humidity isolation module, and the second humidity value is detected by the second sensor installed at the outlet of the humidity isolation module.
[0130] The control module determines the dehumidification effect of the humidity isolation module on the target mixed gas based on the first humidity value and the second humidity value.
[0131] Optionally, a sensor can be installed at the inlet of the humidity isolation module to read the matrix proportion data in the target gas mixture. The matrix can be one or two components.
[0132] The target dew point temperature of the target mixed gas is determined based on the matrix ratio data. The target dew point temperature is mainly used to determine the dew point temperature of the target mixed gas at the outlet of the humidity isolation module. The control module can control whether to deliver the target mixed gas to the adsorption module based on the dew point temperature at the outlet.
[0133] However, if the dew point temperature of the target mixed gas meets the requirements, the target mixed gas enters the adsorption module. The control module controls the operating temperature of each component according to the working process of the adsorption module, and completes the process of moisture-proof replacement and segmented desorption.
[0134] In the description of this specification, references to terms such as "some embodiments," "other embodiments," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of this application. In this specification, the illustrative descriptions of the above terms do not necessarily refer to the same embodiments or examples.
[0135] The technical features of the above embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.
[0136] The embodiments described above are merely illustrative of several implementation methods of this application, and while the descriptions are specific and detailed, they should not be construed as limiting the scope of this application. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this application, and these modifications and improvements all fall within the protection scope of this application. Therefore, the protection scope of this application should be determined by the appended claims.
Claims
1. A mixed gas processing system, characterized in that, The system includes: A humidity isolation module is provided, wherein the inlet end of the humidity isolation module is connected to a sample gas pipeline, a first sensor is provided at the inlet end of the humidity isolation module, and a second sensor is provided at the outlet end of the humidity isolation module. The humidity isolation module is used to isolate water vapor in the target mixed gas, and the sample gas pipeline is used to transport the target mixed gas. An adsorption module is provided, with its inlet end connected to the humidity isolation module. The adsorption module includes a first working area and a second working area. The first working area is used to control the condensation state of the target mixed gas, and the second working area is used to adsorb the target components in the target mixed gas. A component processing module, one end of which is connected to the adsorption module, is used to process the target component collected by the adsorption module; A control module is provided, which controls the driving mode of the humidity isolation module and the operating temperature of the adsorption module based on the detection signals from the first sensor and the second sensor.
2. The system according to claim 1, characterized in that, The humidity isolation module includes a sample gas branch and a drying branch. The sample gas branch is connected to the adsorption module, and the drying branch is connected to the recovery branch. The first sensor is located at the inlet end of the sample gas branch, and the second sensor is located at the outlet end of the sample gas branch. The drying branch is used to adsorb water vapor in the target mixed gas; The sample gas branch is used to send the dehumidified target mixed gas into the adsorption module.
3. The system according to claim 1, characterized in that, The first sensor and the second sensor are dew point sensors; The first sensor is used to output the first dew point temperature value at the inlet of the humidity isolation module, and the second sensor is used to output the second dew point temperature value at the outlet of the humidity isolation module. The control module receives the first dew point temperature value sent by the first sensor and the second dew point temperature value sent by the second sensor, and controls the driving force and scavenging volume of the humidity isolation module according to the deviation between the second dew point temperature value and the first dew point temperature value.
4. The system according to claim 1, characterized in that, The first sensor and the second sensor are humidity sensors; The first sensor is used to output a first humidity value at the inlet of the humidity isolation module, and the second sensor is used to output a second humidity value at the outlet of the humidity isolation module. The control module receives a first humidity value sent by the first sensor and a second humidity value sent by the second sensor, and controls the driving force and scavenging volume of the humidity isolation module according to the deviation between the first humidity value and the second humidity value.
5. The system according to claim 1, characterized in that, The temperature value of the first working zone of the adsorption module corresponds to the condensation temperature of the matrix and water in the target mixed gas. The temperature of the first working zone satisfies a first condition, which is to prevent the matrix in the target mixed gas from condensing with water.
6. The system according to claim 1, characterized in that, The system also includes a carrier gas channel and a recovery branch. The carrier gas channel is connected to the inlet of the adsorption module, and the recovery branch is used to recover the displaced water vapor and matrix. The carrier gas channel is used to deliver carrier gas into the adsorption module to perform a gas replacement operation after the adsorption module has completed the adsorption of the target component. The gas replacement operation replaces the target mixed gas in the adsorption module with dry carrier gas. After the gas replacement operation is completed, the control module controls the temperature value of the second working area to rise, so that the target component enters the component processing module to complete the transfer process of the target mixed gas; When the target component enters the component processing module, the control module controls the temperature value of the second working area to increase in order to perform a residue cleaning operation.
7. The system according to claim 1, characterized in that, The component processing module includes: A focusing trap, which is used to receive the target component flowing out of the adsorption module and form a pulsed injection gas; A chromatographic analysis component receives the pulsed injection gas and separates multiple target components from the target mixed gas.
8. The system according to claim 1, characterized in that, The adsorption module is equipped with adsorption materials to enrich multiple different types of target components in the target mixed gas.
9. The system according to claim 8, characterized in that, The adsorption material of the adsorption module is layered and packed; the temperature of the second working zone of the adsorption module is gradient-distributed, and the adsorption position of the target component is controlled by different temperature distributions.
10. A method for treating a mixed gas, characterized in that, The method is applied to the mixed gas processing system according to any one of claims 1 to 9, the method comprising: Acquire the first humidity value, the second humidity value, and the matrix ratio data of the target mixed gas; The target dew point temperature of the target mixed gas is determined based on the matrix ratio data of the target mixed gas; The working mode of the humidity isolation module is controlled according to the first humidity value, the second humidity value and the target dew point temperature, so that the humidity at the outlet of the humidity isolation module meets the transfer conditions of the target mixed gas. The operating temperature of the adsorption module is controlled to correspond to the adsorption temperature of each target component in the target mixed gas, and the recovery results of each target component by the component processing module are obtained.