Liquid material gasification device based on filter clogging early warning and operation method thereof

Abstract

The present disclosure provides a liquid material gasification device based on filter clogging early warning and a method for operating the same. The device comprises a gas-liquid mixing part, a gasification part, a gasification block, a gas channel and a filter. The gas channel is used for gasifying the gas-liquid mixture to generate mixed gas. The filter is detachably arranged on the gasification block and located at the mixed gas output end of the gasification channel. The filter has a preset filtering accuracy and is used for intercepting liquid materials and solid particles that are not completely gasified. A pressure monitoring module is used for collecting the pressure near the filter in the gas channel and judging the clogging degree of the filter according to the collected pressure. The pressure monitoring module sends early warning information according to the judged clogging degree. In the present disclosure, the problem of ungasified medium escaping is solved. In addition, not only is the high interception efficiency of the filter ensured, but also the maintenance cost of the gasification part is reduced.

Description

Technical Field

[0001] This disclosure relates to the field of liquid material vaporization technology, and in particular to a liquid material vaporization device based on filter clogging early warning and its operation method. Background Technology

[0002] In semiconductor manufacturing processes (such as CVD, ALD, and OLED deposition), it is often necessary to vaporize low-vapor-pressure liquid materials such as tantalum pentaethoxy and tetra(dimethylamino)titanium and supply them to the reaction chamber in gaseous form. Currently, there is a liquid material vaporization device that separates the gas-liquid mixing section from the independently heated vaporization section, controlling their temperatures separately to maintain the vaporization section at a relatively high and suitable vaporization temperature (typically above 180°C). The device utilizes the pressure-reducing expansion principle of the nozzle section to instantly vaporize the liquid material.

[0003] However, due to fluctuations in the properties of liquid materials, sudden changes in flow rate, or uneven heating, some liquid materials may still exist in the form of tiny droplets and not be completely vaporized. Once these droplets enter the downstream reaction chamber with the mixed gas, they can lead to serious consequences such as chamber contamination, substrate defects, and decreased film quality. Therefore, a liquid material vaporization device and its operation method based on filter clogging early warning are proposed to solve the problem of escape of unvaporized media. Summary of the Invention

[0004] This disclosure aims to at least partially address one of the technical problems in the related art.

[0005] Therefore, the purpose of this disclosure is to provide a liquid material vaporization device and its operation method based on filter clogging early warning.

[0006] To achieve the above objectives, the first aspect of this disclosure provides a liquid material vaporization device based on filter clogging early warning, comprising: a gas-liquid mixing section, wherein the gas-liquid mixing section is used to control the flow rate of the introduced liquid material and mix it with the introduced carrier gas to generate a gas-liquid mixture; a vaporization section, wherein the vaporization section includes: a vaporization block, a gas channel and a filter screen, the vaporization channel passing through the vaporization block, and the mixture input end of the vaporization channel being connected to the mixture output end of the gas-liquid mixing section, the vaporization channel being used to vaporize the gas-liquid mixture to generate a mixed gas, the filter screen being detachably disposed on the vaporization block and located at the mixed gas output end of the vaporization channel, and the filter screen having a preset filtration accuracy for intercepting incompletely vaporized liquid material and solid particles; and a pressure monitoring module, wherein the pressure monitoring module is used to collect the pressure in the gas channel near the filter screen, and determine the degree of clogging of the filter screen based on the collected pressure, and issue an early warning message based on the determined degree of clogging.

[0007] Optionally, the pressure monitoring module is used to collect a first pressure located upstream of the filter screen and a second pressure located downstream of the filter screen in the gas channel, and to determine the degree of clogging of the filter screen based on the pressure difference between the first pressure and the second pressure.

[0008] Optionally, the pressure monitoring module is used to determine that the filter screen has reached a first degree of blockage and issue an early warning when the pressure difference between the first pressure and the second pressure reaches a first pressure difference threshold; and to determine that the filter screen has reached a second degree of blockage and control the gas-liquid mixing section to shut off when the pressure difference between the first pressure and the second pressure reaches a second pressure difference threshold; the second pressure difference threshold is greater than the first pressure difference threshold.

[0009] Optionally, the pressure monitoring module includes: a first pressure sensor, a second pressure sensor, and an early warning control unit; wherein, the vaporization block is provided with a first pressure tap, the first port of the first pressure tap extending into the gas channel and located upstream of the filter screen; the first pressure sensor is disposed on the vaporization block, and the pressure interface of the first pressure sensor is sealed and connected to the second port of the first pressure tap; the first pressure sensor is used to collect the first pressure; the vaporization block is provided with a second pressure tap, the first port of the second pressure tap extending into the gas channel and located downstream of the filter screen; the second pressure sensor is disposed on the vaporization block, and the pressure interface of the second pressure sensor is sealed and connected to the second port of the second pressure tap; the second pressure sensor is used to collect the second pressure; the signal input terminal of the early warning control unit is connected to the signal output terminal of the first pressure sensor and the signal output terminal of the second pressure sensor, respectively; the early warning control unit is used to collect the first pressure located upstream of the filter screen and the second pressure located downstream of the filter screen in the gas channel, and to determine the degree of clogging of the filter screen based on the pressure difference between the first pressure and the second pressure.

[0010] Optionally, the first pressure sensor is a high-temperature resistant pressure sensor based on the principle of sputtered thin film or metal strain gauge, and the pressure interface of the first pressure sensor and the second port of the first pressure tap are connected by an all-metal welded seal; and / or, the second pressure sensor is a high-temperature resistant pressure sensor based on the principle of sputtered thin film or metal strain gauge, and the pressure interface of the second pressure sensor and the second port of the second pressure tap are connected by an all-metal welded seal.

[0011] Optionally, the vaporization section further includes a pressure ring, wherein the vaporization block is provided with a mounting surface at the mixed gas output end of the vaporization channel, and the filter screen is disposed on the mounting surface and covers the mixed gas output end of the vaporization channel, and the pressure ring is detachably disposed on the mounting surface and presses the edge of the filter screen.

[0012] Optionally, the vaporization section further includes a metal sealing ring, wherein the mounting surface is provided with an annular sealing groove arranged circumferentially along the vaporization channel, and the metal sealing ring is disposed in the annular sealing groove and abuts against the pressure ring.

[0013] Optionally, the vaporization section further includes: a plurality of fastening screws, the mounting surface is provided with a plurality of screw holes, and the plurality of screw holes are evenly distributed along the circumference of the vaporization channel, and the threaded portions of the plurality of fastening screws respectively penetrate the pressure ring and are threaded in the corresponding screw holes.

[0014] Optionally, the pressure monitoring module is used to collect the first pressure in the gas channel located on the upstream side of the filter screen, and to determine the degree of clogging of the filter screen based on the rate of change of the first pressure over time.

[0015] The second aspect of this disclosure provides an operating method for a liquid material vaporization device, wherein the liquid material vaporization device is the same as the liquid material vaporization device based on filter clogging early warning provided in the first aspect of this disclosure. The operating method includes: controlling the flow rate of an introduced liquid material through a gas-liquid mixing section and mixing it with an introduced carrier gas to generate a gas-liquid mixture; receiving the gas-liquid mixture output from the gas-liquid mixing section through a vaporization channel and vaporizing the gas-liquid mixture to generate a mixed gas; intercepting incompletely vaporized liquid material and solid particles at the mixed gas output end of the vaporization channel through a filter; collecting a first pressure on the upstream side of the filter and a second pressure on the downstream side of the filter through a pressure monitoring module, and determining the degree of clogging of the filter based on the pressure difference between the first pressure and the second pressure; wherein, when the pressure difference between the first pressure and the second pressure reaches a first pressure difference threshold, determining that the filter has reached a first degree of clogging and issuing an early warning message; and, when the pressure difference between the first pressure and the second pressure reaches a second pressure difference threshold, determining that the filter has reached a second degree of clogging and controlling the gas-liquid mixing section to shut off, wherein the second pressure difference threshold is greater than the first pressure difference threshold.

[0016] The technical solution provided in this disclosure may include the following beneficial effects:

[0017] The gas-liquid mixing section controls the flow rate of the introduced liquid material and mixes it with the introduced carrier gas to generate a gas-liquid mixture. The vaporization channel receives the gas-liquid mixture output from the gas-liquid mixing section and vaporizes it to generate a mixed gas, which is then supplied to the downstream reaction chamber. Because the filter screen is located on the vaporization block at the mixed gas output end of the vaporization channel, and because the filter screen has a preset filtration accuracy, it can intercept incompletely vaporized liquid material and solid particles, thus solving the problem of escape of unvaporized media. Furthermore, a pressure monitoring module monitors filter screen blockage, and the filter screen's detachable replacement structure not only ensures high interception efficiency but also reduces the maintenance cost of the vaporization section.

[0018] Additional aspects and advantages of this disclosure will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of this disclosure. Attached Figure Description

[0019] The above and / or additional aspects and advantages of this disclosure will become apparent and readily understood from the following description of the embodiments taken in conjunction with the accompanying drawings, in which: Figure 1 This is a schematic diagram of the structure of a liquid material vaporization device based on filter clogging early warning according to an embodiment of this disclosure; Figure 2 This is a cross-sectional schematic diagram of a liquid material vaporization device based on filter clogging early warning according to an embodiment of this disclosure; Figure 3 This is a cross-sectional schematic diagram of the metal sealing ring in a liquid material vaporization device based on filter clogging early warning according to an embodiment of this disclosure; As shown in the figure: 1. Gas-liquid mixing section; 2. Vaporization section; 21. Vaporization block; 22. Gas passage; 23. Filter screen; 24. Pressure ring; 25. Metal sealing ring; 26. Fastening screw. 3. Pressure monitoring module, 31. First pressure sensor, 32. Second pressure sensor, 33. First pressure tap, 34. Second pressure tap. Detailed Implementation

[0020] Embodiments of this disclosure are described in detail below, examples of which are illustrated in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are used only to explain this disclosure, and should not be construed as limiting this disclosure. Rather, embodiments of this disclosure include all variations, modifications, and equivalents falling within the spirit and scope of the appended claims.

[0021] like Figure 1 , Figure 2 and Figure 3 As shown in the figure, this disclosure proposes a liquid material vaporization device based on filter clogging early warning, including: a gas-liquid mixing section 1, a vaporization section 2, and a pressure monitoring module 3. The gas-liquid mixing section 1 is used to control the flow rate of the introduced liquid material and mix it with the introduced carrier gas to generate a gas-liquid mixture. The vaporization section 2 includes: a vaporization block 21, a gas channel 22, and a filter 23. The vaporization channel passes through the vaporization block 21, and the mixture input end of the vaporization channel is connected to the mixture output end of the gas-liquid mixing section 1. The vaporization channel is used to vaporize the gas-liquid mixture to generate a mixed gas. The filter 23 is detachably installed on the vaporization block 21 and located at the mixed gas output end of the vaporization channel. The filter 23 has a preset filtration accuracy to intercept liquid materials and solid particles that are not completely vaporized. The pressure monitoring module 3 is used to collect the pressure in the gas channel 22 near the filter 23, and to determine the degree of clogging of the filter 23 based on the collected pressure, and to issue an early warning message based on the determined degree of clogging.

[0022] Understandably, the gas-liquid mixing section 1 controls the flow rate of the introduced liquid material and mixes it with the introduced carrier gas to generate a gas-liquid mixture. The vaporization channel receives the gas-liquid mixture output from the gas-liquid mixing section 1 and vaporizes the mixture to generate a mixed gas, which is then supplied to the downstream reaction chamber. Since the filter screen 23 is mounted on the vaporization block 21 and located at the mixed gas output end of the vaporization channel, and the filter screen 23 has a preset filtration accuracy, it can intercept incompletely vaporized liquid material and solid particles, thus solving the problem of escape of unvaporized media. Furthermore, the pressure monitoring module 3 monitors the blockage of the filter screen 23, and the removable replacement structure of the filter screen 23 not only ensures high interception efficiency but also reduces the maintenance cost of the vaporization section 2.

[0023] The gas-liquid mixing section 1 has a flow control function, used to control the flow rate of low vapor pressure liquid materials and mix them with a carrier gas to generate a gas-liquid mixture. The specific type of the gas-liquid mixing section 1 can be configured according to actual needs and is not limited thereto. For example, the main body of the gas-liquid mixing section 1 has a liquid material inlet path, a carrier gas inlet path, and a gas-liquid mixture outlet path, etc., and a gas-liquid mixing chamber and a mixing tank are formed at the top. The liquid flow rate is controlled by a diaphragm driven by a piezoelectric actuator. Furthermore, the gas-liquid mixing section 1 is heated to a suitable temperature (e.g., 120℃-150℃) to promote the mixing of the liquid material and the carrier gas without causing thermal decomposition.

[0024] The vaporization section 2 is used to vaporize the gas-liquid mixture. The specific type of the vaporization section 2 can be set according to actual needs and is not limited thereto. For example, the gas channel 22 of the vaporization section 2 is independently connected to the gas-liquid mixing section 1 through a pipeline. A preheating block is also arranged upstream of the vaporization block 21. The gas channel 22 in the vaporization block 21 consists of a nozzle section located upstream and a gas outlet path located downstream. The vaporization section 2 is heated and kept at a temperature above 180°C (e.g., 200°C) by a built-in cylindrical heater to ensure that the liquid material is instantly depressurized and vaporized when it passes through the nozzle section. The gas outlet path is used to export the mixed gas generated after vaporization to the downstream reaction chamber. In addition, the filter screen 23 is arranged at the end of the gas outlet path, that is, the mixed gas output end of the vaporization channel.

[0025] The filter 23 is arranged at the mixed gas output end of the vaporization channel to intercept incompletely vaporized liquid materials and solid particles, preventing them from entering the downstream reaction chamber and avoiding problems such as chamber contamination, substrate defects, and film quality degradation. The specific type of filter 23 can be set according to actual needs and is not limited thereto. For example, the filter 23 can be a sintered metal filter 23 or an etched filter 23, with a filtration accuracy of 0.5μm-10μm (preferably 2μm). In addition, the filter 23 itself has sufficient thickness (thickness to diameter ratio greater than 1:5) to directly withstand the fastening pressure without deformation.

[0026] Among them, solid particles are particles formed by the crystallization of gases caused by excessively high temperatures in certain areas of the device.

[0027] The pressure monitoring module 3 is used to collect the pressure within the gas channel 22 near the filter 23, such as the pressure upstream of the filter 23 and the pressure downstream of the filter 23. Based on the collected pressure, it determines the degree of blockage in the filter 23. When the blockage is severe, it issues a warning. The specific type of the pressure monitoring module 3 can be configured according to actual needs and is not limited thereto.

[0028] It should be noted that, in order to intercept unvaporized media, the liquid material vaporization device in this embodiment is equipped with a filter screen 23 at the mixed gas output end of the vaporization channel. However, the filter screen 23 will gradually accumulate droplets and solid particles, which will cause the gas output to be blocked and the back pressure to increase, ultimately affecting the vaporization effect or even causing the process to fail.

[0029] If the filter screen 23 is fixed by permanent welding, once it becomes clogged, the entire gasification section 2 must be replaced, which is extremely costly and time-consuming, seriously increasing the operating and maintenance costs of the equipment. In addition, if the clogging status of the filter screen 23 is not monitored online, it will only be discovered when there is an abnormality in the process or the pressure in the reaction chamber, which will cause irreversible contamination of the chamber.

[0030] Therefore, in addition to the filter screen 23, the liquid material vaporization device of this embodiment is also equipped with a detachable structure of the filter screen 23 and a pressure monitoring module 3, thereby ensuring the high interception efficiency of the filter screen 23 and the low maintenance cost of the vaporization unit 2.

[0031] In some embodiments, the pressure monitoring module 3 is used to collect a first pressure located upstream of the filter screen 23 and a second pressure located downstream of the filter screen 23 in the gas channel 22, and to determine the degree of blockage of the filter screen 23 based on the pressure difference between the first pressure and the second pressure.

[0032] It is understandable that, based on the first pressure located upstream of the filter screen 23 and the second pressure located downstream of the filter screen 23, the pressure state of the fluid before and after the filter screen 23 can be obtained according to the pressure difference between the first pressure and the second pressure, thereby accurately judging the degree of blockage of the filter screen 23, and then issuing a warning message based on the judged degree of blockage.

[0033] It should be noted that the filter 23 continuously intercepts incompletely vaporized liquid materials and solid particles. Over time, the accumulation of droplets and solid particles on the filter 23 leads to increasingly severe clogging, resulting in a more significant difference between the fluid pressure (first pressure) upstream of the filter 23 and the fluid pressure (second pressure) downstream of the filter 23 (the first pressure is greater than the second pressure). Therefore, by monitoring the first pressure upstream of the filter 23 and the second pressure downstream of the filter 23, and based on the pressure difference between the first and second pressures, the degree of clogging of the filter 23 can be accurately determined, thereby enabling accurate replacement of the filter 23.

[0034] In some embodiments, the pressure monitoring module 3 is used to determine that the filter 23 has reached a first degree of blockage and issue an early warning when the pressure difference between the first pressure and the second pressure reaches a first pressure difference threshold, and to determine that the filter 23 has reached a second degree of blockage and control the gas-liquid mixing section 1 to shut off when the pressure difference between the first pressure and the second pressure reaches a second pressure difference threshold; the second pressure difference threshold is greater than the first pressure difference threshold.

[0035] Understandably, when the device is operating normally, the vaporized mixed gas continuously flows through filter 23 into the reaction chamber. As the operating time increases, filter 23 gradually intercepts unvaporized droplets and solid particles, increasing flow resistance and causing the pressure difference between the upstream and downstream of filter 23 to rise. The pressure monitoring module 3 calculates the pressure difference ΔP between the first pressure (P1) and the second pressure (P2) in real time, i.e., ΔP = P1 - P2.

[0036] When the pressure difference between the first pressure and the second pressure does not reach the first pressure difference threshold (ΔP_th1), that is, when ΔP < ΔP_th1, it is determined that the filter 23 is not blocked and is in a normal state.

[0037] When the pressure difference between the first pressure and the second pressure reaches the first pressure difference threshold, that is, when ΔP≥ΔP_th1, it is determined that the filter screen 23 has reached the first degree of blockage and an early warning message is issued, thereby prompting the operator to replace the filter screen 23 in time during the process interval.

[0038] When the pressure difference between the first pressure and the second pressure reaches the second pressure difference threshold (ΔP_th2), that is, when ΔP≥ΔP_th2, it is determined that the filter screen 23 has reached the second degree of blockage, and the gas-liquid mixing section 1 is shut off to achieve emergency protection and prevent unvaporized medium from breaking through into the reaction chamber.

[0039] Issuing a warning message can be achieved by controlling the alarm device to emit an alarm signal, such as illuminating a yellow indicator light. Alternatively, it can be achieved by sending an alarm signal to the equipment's central control system (e.g., the equipment's host computer), such as sending an alarm message to the host computer stating "Outlet filter 23 is clogged and requires maintenance."

[0040] Additionally, for example, the range of the first differential pressure threshold ΔP_th1 can be 0.03MPa-0.10MPa, preferably 0.05MPa; the range of the second differential pressure threshold ΔP_th2 can be 0.10MPa.

[0041] like Figure 2 and Figure 3 As shown, in some embodiments, the pressure monitoring module 3 includes: a first pressure sensor 31, a second pressure sensor 32, and an early warning control unit (not shown in the figure). The vaporization block 21 is provided with a first pressure tap 33, the first port of which extends into the gas channel 22 and is located upstream of the filter screen 23. A first pressure sensor 31 is provided on the vaporization block 21, and the pressure interface of the first pressure sensor 31 is sealed and connected to the second port of the first pressure tap 33. The first pressure sensor 31 is used to collect a first pressure. The vaporization block 21 is provided with a second pressure tap 34, the first port of which extends into the gas channel 22 and is located downstream of the filter screen 23. A second pressure sensor 32 is provided on the vaporization block 21, and the pressure interface of the second pressure sensor 32 is sealed and connected to the second port of the second pressure tap 34. The second pressure sensor 32 is used to collect a second pressure. The signal input terminal of the early warning control unit is connected to the signal output terminal of the first pressure sensor 31 and the signal output terminal of the second pressure sensor 32, respectively. The early warning control unit is used to collect the first pressure located upstream of the filter screen 23 and the second pressure located downstream of the filter screen 23 in the gas channel 22, and to determine the degree of blockage of the filter screen 23 based on the pressure difference between the first pressure and the second pressure.

[0042] It is understandable that, since the first port of the first pressure tapping hole 33 extends into the gas channel 22 and is located upstream of the filter screen 23, and the pressure interface of the first pressure sensor 31 is sealed and connected to the second port of the first pressure tapping hole 33, the pressure interface of the first pressure sensor 31 and the upstream side of the filter screen 23 in the gas channel 22 can be connected through the first pressure tapping hole 33, thereby enabling the first pressure sensor 31 to accurately collect the first pressure.

[0043] Since the first port of the second pressure tap 34 extends into the gas channel 22 and is located downstream of the filter screen 23, and the pressure interface of the second pressure sensor 32 and the second port of the second pressure tap 34 are sealed together, the pressure interface of the second pressure sensor 32 and the downstream side of the filter screen 23 in the gas channel 22 can be connected through the second pressure tap 34, thereby enabling the second pressure sensor 32 to accurately collect the second pressure.

[0044] Since the signal input terminal of the early warning control unit is connected to the signal output terminal of the first pressure sensor 31 and the signal output terminal of the second pressure sensor 32 respectively, the early warning control unit can use the first pressure sensor 31 to obtain the first pressure on the upstream side of the filter screen 23 and the second pressure on the downstream side of the filter screen 23. Furthermore, the early warning control unit determines the degree of clogging of the filter screen 23 based on the pressure difference between the first pressure and the second pressure, thereby further realizing the clogging monitoring of the filter screen 23.

[0045] The first pressure sensor 31 is disposed on the upstream side of the filter screen 23 via a first pressure tap 33 to detect the first pressure P1 on the upstream side of the filter screen 23. The second pressure sensor 32 is disposed on the downstream side of the filter screen 23 via a second pressure tap 34 to detect the second pressure P2 on the downstream side of the filter screen 23. The specific types of the first pressure sensor 31 and the second pressure sensor 32 can be set according to actual needs and are not limited thereto.

[0046] In addition, the first pressure tap 33 and the second pressure tap 34 are located at the mixed gas output end of the gas outlet path and are arranged radially along the gas channel 22.

[0047] The specific type of the early warning control unit can be set according to actual needs and is not limited thereto. For example, the early warning control unit includes: a microprocessor, a comparator, and an alarm (such as an audible and visual alarm or an interface for communication with a host computer). The microprocessor calculates the pressure difference between the first pressure and the second pressure, and uses the comparator to compare the calculated pressure difference with the pressure difference threshold, and controls the alarm to issue corresponding early warning information based on the comparison result.

[0048] In some embodiments, the first pressure sensor 31 is a high-temperature resistant pressure sensor based on the principle of sputtered thin film or metal strain gauge, and the pressure interface of the first pressure sensor 31 and the second port of the first pressure tapping hole 33 are connected by an all-metal welded seal; the second pressure sensor 32 is a high-temperature resistant pressure sensor based on the principle of sputtered thin film or metal strain gauge, and the pressure interface of the second pressure sensor 32 and the second port of the second pressure tapping hole 34 are connected by an all-metal welded seal.

[0049] Understandably, by employing a high-temperature resistant pressure sensor based on sputtered thin film or metal strain gauge principles, combined with an all-metal welded sealing structure, pressure detection without filler fluid and resistant to high temperatures can be achieved, thereby solving the problem of pressure sensor failure in high-temperature environments and ensuring the accurate acquisition of the first and second pressures.

[0050] It should be noted that the working temperature of vaporization section 2 is higher than 180℃. The filling fluid (such as silicone oil) inside ordinary pressure sensors is prone to volatilization or leakage, which can lead to measurement drift or even failure. The bonding layer of conventional strain gauge sensors is prone to aging and falling off at high temperatures. In addition, conventional elastic seals (such as fluororubber O-rings) will age and carbonize under long-term high temperatures, lose their airtightness and generate particulate contamination, which cannot meet the cleanliness and reliability requirements of semiconductor processes.

[0051] Therefore, in the liquid material vaporization device of this embodiment, both the first pressure sensor 31 and the second pressure sensor 32 adopt high-temperature resistant pressure sensors based on the principle of sputtered thin film or metal strain gauge, that is, dry pressure sensing elements without filling liquid are used to overcome the failure problem of pressure sensors under high temperature environment.

[0052] Specifically, the first pressure sensor 31 and the second pressure sensor 32 do not contain any filling liquid (such as silicone oil). Instead, an insulating layer and a metal strain gauge are deposited directly on a metal elastic diaphragm using a sputtering process (or the metal strain gauge is directly attached to the diaphragm and then treated with a special process to ensure high-temperature stability), forming a pressure-sensitive bridge. When pressure is applied to the diaphragm, the diaphragm undergoes a slight deformation, causing a change in the resistance value of the strain gauge, which outputs an electrical signal proportional to the pressure through the bridge.

[0053] Because the sensor contains no internal liquid filling, it fundamentally eliminates the measurement drift and failure problems caused by the evaporation and leakage of the filling liquid at high temperatures. The sensor's operating temperature range is -20℃ to over +200℃, with a temperature compensation range covering 15℃ to 200℃, allowing for long-term stable operation in the high-temperature environment of Vaporization Section 2. The sensor's wetted material is made of Hastelloy C276 or Inconel 718 to withstand high-temperature corrosive environments.

[0054] The pressure interfaces of the first pressure sensor 31 and the second pressure sensor 32 are directly connected using an all-metal welded sealing structure. For example, the pressure interface end face of the pressure sensor is tightly mated to the corresponding pressure tap end face, and laser welding (or argon arc welding) is performed around the joint to fuse them into a single, permanent, gasket-free metal seal. The outer diameter of the welded part is essentially the same as the diameter of the sensor body, eliminating the need for additional threaded joints and wrench operation space, resulting in a compact structure.

[0055] like Figure 1 , Figure 2 and Figure 3 As shown, in some embodiments, the vaporization section 2 further includes: a pressure ring 24, the vaporization block 21 is provided with a mounting surface at the mixed gas output end of the vaporization channel, and the filter screen 23 is provided on the mounting surface and covers the mixed gas output end of the vaporization channel, and the pressure ring 24 is detachably provided on the mounting surface and presses the edge of the filter screen 23.

[0056] It is understandable that, since the pressure ring 24 is detachably mounted on the mounting surface and presses against the edge of the filter screen 23, the filter screen 23 can be detachably arranged at the gas mixing outlet of the gasification channel, thereby improving the maintenance efficiency of the gasification section 2 and reducing the maintenance cost of the gasification section 2.

[0057] Meanwhile, the detachable structure with direct clamping by the pressure ring 24 eliminates the need for the filter screen 23, thereby reducing the number of parts in the gasification section 2, simplifying its structure, and thus reducing the manufacturing cost of the gasification section 2.

[0058] The pressure ring 24 is used to press and fix the filter screen 23. The specific type of the pressure ring 24 can be set according to actual needs and is not limited. For example, the pressure ring 24 is a ring structure and is arranged on the mounting surface of the gasification block 21 away from the preheating block. In addition, the first pressure tap 33 can be arranged on the gasification block 21, and the second pressure tap 34 can be arranged on the pressure ring 24.

[0059] like Figure 2 and Figure 3 As shown, in some embodiments, the vaporization section 2 further includes a metal sealing ring 25, the mounting surface of which is provided with an annular sealing groove arranged circumferentially along the vaporization channel, and the metal sealing ring 25 is disposed in the annular sealing groove and abuts against the pressure ring 24.

[0060] Understandably, since the metal sealing ring 25 is set in the annular sealing groove of the mounting surface and abuts against the pressure ring 24, the circumference of the filter screen 23 can be sealed by the metal sealing ring 25, thereby ensuring the stable delivery of the mixed gas to the reaction chamber while making the filter screen 23 removable.

[0061] The metal sealing ring 25 is used for circumferential sealing of the filter screen 23. The specific type of the metal sealing ring 25 can be set according to actual needs and there is no restriction. For example, the metal sealing ring 25 is made of annealed oxygen-free copper, nickel or silver-plated stainless steel, which can maintain elastic recovery and sealing performance for a long time at a high temperature of 200℃ and does not produce any organic volatiles.

[0062] In addition, for example, the inner ring of the metal sealing ring 25 has protrusions on the side near the vaporized block 21 and the outer ring of the metal sealing ring 25 has protrusions on the side near the pressure ring 24, so that the cross-section of the metal sealing ring 25 is close to a Z-shaped structure. By utilizing the protruding structure of the inner and outer rings, the sealing performance of the metal sealing ring 25 can be greatly improved when the pressure ring 24 is tightened.

[0063] like Figure 1 As shown, in some embodiments, the vaporization section 2 further includes: a plurality of fastening screws 26, the mounting surface is provided with a plurality of screw holes, and the plurality of screw holes are evenly distributed along the circumference of the vaporization channel, and the threaded portions of the plurality of fastening screws 26 respectively penetrate the pressure ring 24 and are threaded in the corresponding screw holes.

[0064] Understandably, using multiple fastening screws 26 not only enables the removable structure of the pressure ring 24 on the mounting surface, but also ensures a more uniform fastening force on the filter screen 23 between the pressure ring 24 and the mounting surface.

[0065] It should be noted that during installation, the metal sealing ring 25 is placed inside the annular sealing groove, and the filter screen 23 is placed directly on the mounting surface, so that the outer edge of the filter screen 23 covers the metal sealing ring 25. Then, the pressure ring 24 is placed above the outer edge of the filter screen 23, and the fastening screws 26 are tightened evenly. The pressure ring 24 presses the filter screen 23 tightly, while simultaneously compressing and deforming the metal sealing ring 25 to form a reliable end-face seal. The filter screen 23 directly participates in the end-face seal, eliminating the need for a separate filter screen 23 holder, resulting in a simpler structure, fewer parts, and lower material costs.

[0066] When the warning system indicates that filter 23 is clogged, maintenance personnel can stop the machine online, simply remove the fastening screws 26 and pressure ring 24, remove the old filter 23, replace it with a new filter 23 and metal sealing ring 25, and then tighten them again to resume production. The entire process does not require disassembling the main body of the vaporization section 2, any welding operations, or replacing the entire vaporizer.

[0067] In some embodiments, the pressure monitoring module 3 is used to collect the first pressure in the gas channel 22 located upstream of the filter screen 23, and to determine the degree of blockage of the filter screen 23 based on the rate of change of the first pressure over time.

[0068] Understandably, the pressure monitoring module 3 collects the first pressure in the gas channel 22 located upstream of the filter screen 23, and judges the degree of blockage of the filter screen 23 based on the rate of change of the first pressure over time, thereby accurately determining the replacement of the filter screen 23 based on the degree of blockage.

[0069] It should be noted that in some cases where the downstream back pressure is maintained stable by an independent pressure control system, the system can be simplified to only have a high-temperature pressure sensor installed upstream of filter 23. This sensor also uses the principle of sputtered thin film or metal strain gauge and an all-metal welded seal. The pressure monitoring module 3 determines the degree of blockage by monitoring the rate of change of the upstream first pressure P1 over time, dP1 / dt. This solution reduces the number of sensors, but it cannot directly eliminate the influence of back pressure fluctuations and is suitable for systems with highly stable back pressure.

[0070] In summary, the liquid material vaporization device of this embodiment has at least the following advantages: Online real-time monitoring and early warning of filter 23 blockage are achieved: by setting a high-temperature pressure sensor upstream and downstream of filter 23, the pressure difference is detected in real time, and maintenance can be prompted before filter 23 is completely blocked, preventing unvaporized media from entering the reaction chamber and effectively protecting downstream process equipment and product quality.

[0071] The maintenance drawbacks of welded fixed filter screen 23 are completely overcome: the filter screen 23 adopts a detachable structure without a filter screen 23 seat, and is directly pressed and sealed by the pressure ring 24, metal sealing ring 25 and fastening screw 26. When the warning system indicates blockage, only the screws and pressure ring 24 need to be removed, and the filter screen 23 and sealing ring need to be replaced. There is no need to replace the entire vaporization section 2, which simplifies the structure, reduces the number of parts and lowers the cost.

[0072] Employing a sputtered thin film / metal strain gauge sensor completely eliminates the risk of filler fluid failure: Unlike traditional oil-filled pressure sensors, this invention uses a sensor based on the principle of sputtered thin film or metal strain gauge, which has no filler fluid inside. This fundamentally eliminates the measurement drift and failure problems caused by the volatilization and leakage of silicone oil at high temperatures, ensuring long-term stable and reliable operation.

[0073] The sensor is reliably sealed, meeting ultra-high cleanliness requirements: the sensor and vaporization section 2 employ an all-metal welded sealing structure, with a leakage rate as low as 1×10⁻⁶. - ¹¹ Pa·m³ / s, without any elastic or plastic seals, completely eliminates particulate contamination caused by seal wear and thermal aging, meeting the ultra-high cleanliness requirements of semiconductor manufacturing.

[0074] Compact structure, suitable for equipment integration: The sensor adopts an all-metal welded connection, and the outer diameter of the welded part is basically the same as that of the sensor body. No additional threaded joints or wrench operation space are required, and the space occupies little space, making it particularly suitable for semiconductor equipment with limited internal space.

[0075] Reduced overall operating costs: Through early warning, interlock protection, and the ability to quickly replace filter 23, unplanned downtime caused by chamber contamination is significantly reduced, the cleaning and maintenance cycle of the reaction chamber is extended, and the total life cycle cost of the equipment is reduced.

[0076] This disclosure also proposes an operating method for a liquid material vaporization device, characterized in that the liquid material vaporization device is a liquid material vaporization device based on filter clogging early warning according to this disclosure, and the operating method includes: S1: The flow rate of the introduced liquid material is controlled by the gas-liquid mixing unit 1 and mixed with the introduced carrier gas to generate a gas-liquid mixture; S2: Receives the gas-liquid mixture output from the gas-liquid mixing section 1 through the vaporization channel, and vaporizes the gas-liquid mixture to generate a mixed gas; S3: Intercepts liquid materials and solid particles that are not fully vaporized at the gas output end of the vaporization channel through filter screen 23; S4: The pressure monitoring module 3 collects the first pressure on the upstream side of the filter screen 23 and the second pressure on the downstream side of the filter screen 23 in the gas channel 22, and judges the degree of blockage of the filter screen 23 based on the pressure difference between the first pressure and the second pressure. Specifically, when the pressure difference between the first pressure and the second pressure reaches the first pressure difference threshold, the filter 23 is determined to have reached the first degree of blockage, and an early warning message is issued; and when the pressure difference between the first pressure and the second pressure reaches the second pressure difference threshold, the filter 23 is determined to have reached the second degree of blockage, and the gas-liquid mixing section 1 is controlled to shut off, wherein the second pressure difference threshold is greater than the first pressure difference threshold.

[0077] Understandably, the gas-liquid mixing section 1 controls the flow rate of the introduced liquid material and mixes it with the introduced carrier gas to generate a gas-liquid mixture. The vaporization channel receives the gas-liquid mixture output from the gas-liquid mixing section 1 and vaporizes the mixture to generate a mixed gas, which is then supplied to the downstream reaction chamber. Since the filter screen 23 is mounted on the vaporization block 21 and located at the mixed gas output end of the vaporization channel, and the filter screen 23 has a preset filtration accuracy, it can intercept incompletely vaporized liquid material and solid particles, thus solving the problem of escape of unvaporized media. Furthermore, the pressure monitoring module 3 monitors the blockage of the filter screen 23, and the removable replacement structure of the filter screen 23 not only ensures high interception efficiency but also reduces the maintenance cost of the vaporization section 2.

[0078] When the pressure difference between the first pressure and the second pressure reaches the first pressure difference threshold, the filter 23 is determined to have reached the first degree of blockage, and an early warning message is issued to remind the operator to replace the filter 23 in a timely manner during the process interval.

[0079] When the pressure difference between the first pressure and the second pressure reaches the second pressure difference threshold, it is determined that the filter screen 23 has reached the second degree of blockage, and the gas-liquid mixing section 1 is shut off to achieve emergency protection and prevent unvaporized medium from breaking through into the reaction chamber.

[0080] It should be noted that in the description of this disclosure, the terms "first," "second," etc., are used for descriptive purposes only and should not be construed as indicating or implying relative importance. Furthermore, in the description of this disclosure, unless otherwise stated, "a plurality of" means two or more.

[0081] Any process or method description in the flowchart or otherwise herein can be understood as representing a module, segment, or portion of code comprising one or more executable instructions for implementing a particular logical function or process, and the scope of preferred embodiments of this disclosure includes additional implementations in which functions may be performed not in the order shown or discussed, including substantially simultaneously or in reverse order depending on the function involved, as will be understood by those skilled in the art to which embodiments of this disclosure pertain.

[0082] In the description of this specification, the references to terms such as "one embodiment," "some embodiments," "example," "specific example," or "some examples," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of this disclosure. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples.

[0083] Although embodiments of the present disclosure have been shown and described above, it is to be understood that the above embodiments are exemplary and should not be construed as limiting the present disclosure. Those skilled in the art can make changes, modifications, substitutions and variations to the above embodiments within the scope of the present disclosure.

Claims

1. A liquid material vaporization device based on filter clogging early warning, characterized in that, include: A gas-liquid mixing section is used to control the flow rate of the introduced liquid material and mix it with the introduced carrier gas to generate a gas-liquid mixture. The vaporization section includes a vaporization block, a gas channel, and a filter screen. The vaporization channel passes through the vaporization block, and the mixture input end of the vaporization channel is connected to the mixture output end of the gas-liquid mixing section. The vaporization channel is used to vaporize the gas-liquid mixture to generate a mixed gas. The filter screen is detachably mounted on the vaporization block and located at the mixed gas output end of the vaporization channel. The filter screen has a preset filtration accuracy and is used to intercept incompletely vaporized liquid materials and solid particles. The pressure monitoring module is used to collect the pressure in the gas channel near the filter screen, determine the degree of blockage of the filter screen based on the collected pressure, and issue a warning message based on the determined degree of blockage.

2. The liquid material vaporization device based on filter clogging early warning according to claim 1, characterized in that, The pressure monitoring module is used to collect a first pressure located upstream of the filter screen and a second pressure located downstream of the filter screen in the gas channel, and to determine the degree of clogging of the filter screen based on the pressure difference between the first pressure and the second pressure.

3. The liquid material vaporization device based on filter clogging early warning according to claim 2, characterized in that, The pressure monitoring module is used to determine that the filter screen has reached a first degree of blockage and issue an early warning when the pressure difference between the first pressure and the second pressure reaches a first pressure difference threshold; and to determine that the filter screen has reached a second degree of blockage and control the gas-liquid mixing section to shut down when the pressure difference between the first pressure and the second pressure reaches a second pressure difference threshold. The second differential pressure threshold is greater than the first differential pressure threshold.

4. The liquid material vaporization device based on filter clogging early warning according to claim 2, characterized in that, The pressure monitoring module includes: First pressure sensor, second pressure sensor, and early warning control unit; The vaporization block is provided with a first pressure tapping hole, the first port of the first pressure tapping hole extends into the gas channel and is located upstream of the filter screen, the first pressure sensor is disposed on the vaporization block, and the pressure interface of the first pressure sensor is sealed and connected to the second port of the first pressure tapping hole, and the first pressure sensor is used to collect the first pressure. The vaporization block is provided with a second pressure tapping hole. The first port of the second pressure tapping hole extends into the gas channel and is located downstream of the filter screen. The second pressure sensor is disposed on the vaporization block, and the pressure interface of the second pressure sensor is sealed and connected to the second port of the second pressure tapping hole. The second pressure sensor is used to collect the second pressure. The signal input terminal of the early warning control unit is connected to the signal output terminal of the first pressure sensor and the signal output terminal of the second pressure sensor, respectively. The early warning control unit is used to collect the first pressure located on the upstream side of the filter screen and the second pressure located on the downstream side of the filter screen in the gas channel, and to determine the degree of blockage of the filter screen based on the pressure difference between the first pressure and the second pressure.

5. The liquid material vaporization device based on filter clogging early warning according to claim 4, characterized in that, The first pressure sensor is a high-temperature resistant pressure sensor based on the principle of sputtered thin film or metal strain gauge, and the pressure interface of the first pressure sensor and the second port of the first pressure tap are connected by all-metal welding seal. And / or, The second pressure sensor is a high-temperature resistant pressure sensor based on the principle of sputtered thin film or metal strain gauge, and the pressure interface of the second pressure sensor and the second port of the second pressure tap are connected by all-metal welded seal.

6. The liquid material vaporization device based on filter clogging early warning according to claim 1, characterized in that, The vaporization unit also includes: The gasification block is located at the mixed gas output end of the gasification channel and has an installation surface. The filter screen is installed on the installation surface and covers the mixed gas output end of the gasification channel. The pressure ring is detachably installed on the installation surface and presses the edge of the filter screen.

7. The liquid material vaporization device based on filter clogging early warning according to claim 6, characterized in that, The vaporization unit also includes: The metal sealing ring has an annular sealing groove arranged circumferentially along the vaporization channel on the mounting surface, and the metal sealing ring is disposed in the annular sealing groove and abuts against the pressure ring.

8. The liquid material vaporization device based on filter clogging early warning according to claim 6, characterized in that, The vaporization unit also includes: Multiple fastening screws are provided, and the mounting surface is provided with multiple screw holes. The multiple screw holes are evenly distributed along the circumference of the vaporization channel. The threaded portions of the multiple fastening screws pass through the pressure ring and are threaded into the corresponding screw holes.

9. The liquid material vaporization device based on filter clogging early warning according to claim 1, characterized in that, The pressure monitoring module is used to collect the first pressure in the gas channel located on the upstream side of the filter screen, and to determine the degree of clogging of the filter screen based on the rate of change of the first pressure over time.

10. A method for operating a liquid material vaporization device, characterized in that, The liquid material vaporization device is the liquid material vaporization device based on filter clogging early warning as described in any one of claims 1-9, and the operating method includes: The flow rate of the introduced liquid material is controlled by the gas-liquid mixing section and mixed with the introduced carrier gas to generate a gas-liquid mixture. The gas-liquid mixture output from the gas-liquid mixing section is received through the vaporization channel, and the gas-liquid mixture is vaporized to generate a mixed gas. The filter intercepts liquid materials and solid particles that are not fully vaporized at the output end of the gas mixture in the vaporization channel. The pressure monitoring module collects the first pressure located upstream of the filter screen and the second pressure located downstream of the filter screen in the gas channel, and determines the degree of clogging of the filter screen based on the pressure difference between the first pressure and the second pressure. Specifically, when the pressure difference between the first pressure and the second pressure reaches a first pressure difference threshold, the filter is determined to have reached a first degree of blockage, and an early warning message is issued; and when the pressure difference between the first pressure and the second pressure reaches a second pressure difference threshold, the filter is determined to have reached a second degree of blockage, and the gas-liquid mixing section is controlled to shut off, wherein the second pressure difference threshold is greater than the first pressure difference threshold.

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