A laser processing apparatus

Abstract

The application belongs to the technical field of laser processing, and particularly relates to a laser processing device. The processing device comprises a laser beam splitting device for splitting an output laser light source into two or more light beams; a supporting device comprises a base and a supporting seat, the supporting seat is movable relative to the base along an X direction, a Y direction and a vertical direction, and the laser beam splitting device is connected to the supporting seat. The application can solve the technical problem of poor adjustment accuracy in the manual adjustment process and influence on product processing quality, so as to guarantee product yield.

Description

Technical Field

[0001] This application belongs to the field of laser processing technology, specifically relating to a laser processing device. Background Technology

[0002] Laser processing relies on a laser source to output a directional beam that acts on the workpiece. The output position and coaxiality of the beam directly determine the spot position, energy distribution, and processing quality. In processing scenarios such as laser cutting and laser welding, it is necessary to ensure that the output beam of the laser source is as coaxial as possible with subsequent optical path components and the part to be processed. Once the position of the light source is offset, phenomena such as spot deflection, increased energy loss, and defects in processing quality will occur.

[0003] In existing laser processing equipment, most laser light sources are installed using fixed brackets, and the position of the light source is corrected by manually adjusting bolts or gears. This results in poor adjustment accuracy and affects the quality of product processing. Summary of the Invention

[0004] Based on the above-mentioned technical problems, this application provides a laser processing equipment, which aims to solve the technical problem of poor adjustment accuracy affecting product processing quality to a certain extent, so as to improve product yield.

[0005] This application is achieved through the following technical solution: A laser processing apparatus includes: a laser beam splitter for splitting an output laser source into two or more beams; a support device including a base and a support seat, the support seat being movable relative to the base along the X direction, the base including a first seat body and a first moving component, wherein the first seat body has a first cavity built inside, a through opening is provided at the top center of the first cavity, the bottom of the support seat is movably disposed at the bottom of the first cavity, a gap is formed between the periphery of the bottom of the support seat and the periphery of the first cavity, the top of the support seat extends through the through opening, and the laser beam splitter is connected to the top of the support seat; two first moving components are arranged opposite each other along the X direction, and each first moving component is disposed between the bottom of the support seat and the periphery of the first cavity along the X direction. The moving component includes: a first moving guide rail extending along the X direction, with the opposite ends of the first moving guide rails of the two first moving components separably abutting against the bottom of the support base on both sides in the X direction; two first housings, disposed on both sides of the first moving guide rail in the Y direction, with the opposite sides of the two first housings open, the Y direction being perpendicular to the X direction; and two or more first piezoelectric ceramic modules disposed within the first housings, each first piezoelectric ceramic module including a first Y-axis piezoelectric ceramic and a first X-axis piezoelectric ceramic, the output end of the first Y-axis piezoelectric ceramic extending and retracting along the Y direction, the first X-axis piezoelectric ceramic being connected to the output end of the first Y-axis piezoelectric ceramic, the first X-axis piezoelectric ceramic extending and retracting along the X direction, and the output end of the first X-axis piezoelectric ceramic abutting against the side of the first moving guide rail.

[0006] In some implementations, the two sides of the first moving guide rail are textured.

[0007] In some implementations, at least a portion of the part where the output end of the first X-axis piezoelectric ceramic contacts the first moving guide rail is flexible.

[0008] In some embodiments, the support device further includes two second movable components arranged opposite each other along the Y direction. Each second movable component is disposed between the bottom of the support base and the periphery of the first cavity along the Y direction. The second movable component includes: The second moving guide rail extends along the Y direction, and the opposite ends of the second moving guide rails of the two second moving components can be separably abutted against the two sides of the bottom of the support base in the Y direction. The second housing is provided in two parts, which are located on both sides of the second moving guide rail in the X direction, and the opposite sides of the two second housings are open. Two or more second piezoelectric ceramic modules are disposed inside the second housing. Each second piezoelectric ceramic module includes a second X-axis piezoelectric ceramic and a second Y-axis piezoelectric ceramic. The output end of the second X-axis piezoelectric ceramic extends and retracts along the X-axis. The second Y-axis piezoelectric ceramic is connected to the output end of the second X-axis piezoelectric ceramic. The second Y-axis piezoelectric ceramic extends and retracts along the Y-axis. The output end of the second Y-axis piezoelectric ceramic can abut against the side of the second moving guide rail.

[0009] In some implementations, the two sides of the second moving guide rail are textured.

[0010] In some embodiments, at least a portion of the part where the output end of the second Y-axis piezoelectric ceramic contacts the second moving guide rail is flexible.

[0011] In some embodiments, the support base is movable relative to the base along the Z-direction; the base further includes: a second seat body disposed below the first seat body, the second seat body having a built-in second cavity, the top of the second cavity being open; and multiple lifting mechanisms disposed within the second cavity, each lifting mechanism including a first connecting member, a second connecting member, and a third moving component, the first connecting member being connected to the bottom of the second seat body, the second connecting member being movablely connected to the bottom of the second cavity along the X-direction or Y-direction via the third moving component, the second connecting member being disposed at the bottom of the first connecting member, and the opposing surfaces of the second connecting member and the first connecting member being inclined surfaces. The second connector has a third cavity at its bottom, and the bottom of the third cavity is open. The third moving component includes: a fixing plate connected to the bottom of the second cavity and covering the bottom of the third cavity; two opposing third piezoelectric ceramic modules connected to the top surface of the fixing plate and located within the third cavity. There are two or more third piezoelectric ceramic modules. Each third piezoelectric ceramic module includes a third piezoelectric ceramic and a fourth piezoelectric ceramic. The telescopic ends of the third and fourth piezoelectric ceramics are perpendicular in their telescopic directions. The fourth piezoelectric ceramic is connected to the output end of the third piezoelectric ceramic, and the output end of the fourth piezoelectric ceramic can abut against the side wall of the third cavity.

[0012] In some implementations, the portion of the third cavity that mates with the output terminal of the fourth piezoelectric ceramic is textured.

[0013] In some embodiments, at least a portion of the area where the output end of the fourth piezoelectric ceramic contacts the sidewall of the third cavity is flexible.

[0014] In some embodiments, one of the opposing surfaces of the second connector and the first connector is provided with a groove, and the other is provided with a slide rail, the slide rail moving in the corresponding groove; the top surface of the fixing plate is connected to a first guide and a second guide, the first guide sliding vertically through one side of the first connector, and the second guide being disposed on the other side of the first connector.

[0015] The laser processing equipment provided in this application, when adjusting the displacement of the laser beam splitter on the support device, controls the first Y-axis piezoelectric ceramic in one of the first moving components to extend by energizing it. The output end of the first Y-axis piezoelectric ceramic pushes the first X-axis piezoelectric ceramic to move along the Y direction, so that the output end of the first X-axis piezoelectric ceramic tightly abuts against and presses against the side of the first moving guide rail on the same side. At this time, the first moving guide rail and the support base form a rigid locking state through the static friction of the piezoelectric ceramic. Subsequently, the first X-axis piezoelectric ceramic in the first moving component is energized and extends, and the output end of the first X-axis piezoelectric ceramic extends, directly pushing the first moving guide rail to move along the X direction, thereby pushing the support base and the laser beam splitter to move a small step along the X direction. At the same time, the first Y-axis piezoelectric ceramic in the other moving component is energized and extends, and the output end of the first X-axis piezoelectric ceramic extends, causing the first moving guide rail on the same side to move backward synchronously. Then, the first Y-axis piezoelectric ceramics of the first moving components on both sides are de-energized and retracted, and the first X-axis piezoelectric ceramics are de-energized and retracted to their initial length. By repeating the above process, the support base and the laser beam splitter can be moved along the X direction to the set stroke.

[0016] This application utilizes the piezoelectric ceramics in two sets of first moving components to alternately perform feeding actions, accumulating and transferring the nanoscale deformation of the first X-axis piezoelectric ceramic to the support base. This allows the support base to achieve millimeter-level or even larger X-axis travel, eliminating the traditional lead screw and nut or gear transmission structure and fundamentally eliminating the inherent backlash error of mechanical transmission mechanisms. This effectively improves the repeatability of the laser beam splitter during X-axis positioning, solving the technical problem of poor adjustment accuracy during manual adjustment that affects product processing quality, thus ensuring product yield. Furthermore, when the support base moves to the target processing position, the first Y-axis piezoelectric ceramics in both sets of first moving components can simultaneously remain energized and extended, causing the output ends of the first X-axis piezoelectric ceramics on both sides to symmetrically and tightly abut against the corresponding sides of the first moving guide rail, forming a double-sided static friction lock. This effectively resists the X-axis impact force and reaction force generated during laser processing, preventing unexpected displacement of the support base and ensuring the long-term stability of the direction of the laser beam emitted by the laser beam splitter. In addition, the above-mentioned locking action does not require the addition of a separate brake component, which simplifies the overall structure of the equipment and reduces manufacturing costs. Attached Figure Description

[0017] To more clearly illustrate the technical solutions in the embodiments of the present invention, the accompanying drawings used in the description of the embodiments will be briefly introduced below. Obviously, the accompanying drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0018] Figure 1 A schematic diagram of the structure of a laser processing device in one or more embodiments of this application is shown; Figure 2 It shows Figure 1 A schematic diagram of the supporting device in the middle; Figure 3 It shows Figure 1 A schematic diagram of the laser beam splitter in the diagram; Figure 4 It shows Figure 3 Internal diagram; Figure 5 It shows Figure 2 Internal structure diagram; Figure 6 It shows Figure 2 Another perspective of the interior; Figure 7 It shows Figure 6 Enlarged view of point A; Figure 8 It shows Figure 6 Schematic diagram at point B; Figure 9 It shows Figure 5 A schematic diagram of the lifting mechanism in the diagram; Figure 10 It shows Figure 9 An explosion diagram.

[0019] Explanation of reference numerals in the attached figures: 10. Laser beam splitter; 101. Fixed mirror mount; 1011. First optical path channel; 1012. Water inlet pipe; 1013. Water outlet pipe; 102. Rotating mirror mount; 1021. Second optical path channel; 103. Fixed base; 1031. First connecting plate; 1032. Second connecting plate; 1033. Mounting hole; 104. Rotating base; 1041. Third optical path channel; 105. Beam splitter; 106. Quarter wave plate; 20. Supporting device; 100. Support base; 110. Connecting frame; 111. Clearance passage; 120. Base plate; 130. Top plate; 200. Base; 210. First seat; 211. First cavity; 212. Opening; 220. First moving component; 221. First moving guide rail; 222. First housing; 223. First piezoelectric ceramic module; 2231. First Y-axis piezoelectric ceramic; 2232. First X-axis piezoelectric ceramic; 224. First moving block; 230. Second moving component; 231. Second moving guide rail; 232. Second housing; 233. Second piezoelectric ceramic module; 2331. Second X-axis piezoelectric ceramic; 2332. Second Y-axis piezoelectric ceramic; 240. Second seat; 241. Second cavity; 250. Lifting mechanism; 251. First connecting member; 2511. Connecting column; 2512. Slide groove; 2513. Guide groove; 252. Second connecting member; 2521. Third cavity; 2522. Slide rail; 253. Third moving component; 2531. Fixing plate; 2532. Third piezoelectric ceramic module; 25321. Third piezoelectric ceramic; 25322. Fourth piezoelectric ceramic; 254. First guide member; 255. Second guide member; 260. Connecting cover; 270. Control buttons. Detailed Implementation

[0020] To enable those skilled in the art to more clearly understand this application, the technical solutions in the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only a part of the embodiments of this application, and not all of the embodiments. Based on the embodiments of this application, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the scope of protection of this application.

[0021] The laser processing equipment provided in this application aims to use piezoelectric ceramics to adjust the laser beam splitter in at least one of the X, Y and vertical directions to solve the technical problem of poor adjustment accuracy affecting product processing quality, thereby improving product yield.

[0022] Figure 1 A schematic diagram of the structure of a laser processing device according to one or more embodiments of this application is shown. Figure 2 It shows Figure 1 A schematic diagram of the supporting device. (Combined with...) Figure 1 as well as Figure 2The processing equipment includes a laser beam splitter 10 and a support device 20. The laser beam splitter 10 is used to split the output laser source into two or more beams. The support device 20 includes a base 200 and a support seat 100. The support seat 100 can move relative to the base 200 in the X direction. The laser beam splitter 10 is connected to the top of the support seat 100 so that by controlling the support seat 100 to move relative to the base 200 in the X direction, the support seat 100 and the laser beam splitter 10 can be pushed to move in the X direction.

[0023] It should be noted that, Figure 1 Only the laser beam splitter 10 in the laser processing equipment is shown. In the processing process of the laser processing equipment, there are also lasers and optical components that work together with the laser beam splitter 10. The optical components include, but are not limited to, collimators, focusers, galvanometers and field lenses. After the laser beam emitted by the laser is split by the laser beam splitter 10, it can be split into more than one beam, and at least one of the laser processing such as scribing, grooving, and drilling can be performed at the same time, thereby improving the work efficiency.

[0024] Combination Figure 2 In some embodiments, a connecting frame 110 is provided on the top of the support base 100 to cover the periphery of the laser beam splitter 10, thereby exposing both ends of the laser beam splitter 10 to facilitate connection between the laser beam splitter 10 and at least one of the components of the laser and optical components. Additionally, the carrier of the laser beam splitter 10 can be further connected to the top of the support base 100 and / or the connecting frame 110 via bolts to strengthen the connection between the laser beam splitter 10 and the support base 100 and prevent loosening. Furthermore, the periphery of the connecting frame 110 is provided with clearance channels 111 to avoid the water-cooling inlet and water-cooling outlet of the laser beam splitter 10.

[0025] Figure 3 It shows Figure 1 A schematic diagram of the laser beam splitter in the diagram. Figure 4 It shows Figure 3 Internal diagram, combined with Figure 3 as well as Figure 4The laser beam splitter 10 provided in this application includes a fixed mirror mount 101, a rotating mirror mount 102, a fixed base 103, and a rotating base 104. The fixed mirror mount 101 has a first optical path channel 1011 extending horizontally (i.e., in the X direction). A beam splitter element 105 is coaxially fixedly mounted within the first optical path channel 1011. This beam splitter element 105 can be a polarization beam splitter cube or a DOE (Diffractive Optical Array). The beam splitter 105 is a diffractive optical element, with its light-inlet and light-outlet surfaces facing the light-inlet and light-outlet ends of the first optical path channel 1011, respectively. In addition, a cold water channel is arranged on the inner wall of the fixed mirror base 101 around the beam splitter 105. A water inlet pipe 1012 and a water outlet pipe 1013 connected to the cold water channel are provided on the outer wall of the fixed mirror base 101. Cold water enters the cold water channel through the water inlet pipe 1012 and is discharged through the water outlet pipe 1013, thereby water cooling the beam splitter 105.

[0026] Combination Figure 3 as well as Figure 4 A second optical path channel 1021 is provided on the rotating mirror base 102, through which a beam splitting element 105 passes in the horizontal direction. The light-emitting end of the rotating mirror base 102 is coaxially installed in the light-inlet end of the first optical path channel 1011, so that the rotating mirror base 102 can be rotated and adjusted relative to the fixed mirror base 101. The second optical path channel 1021 is coaxially arranged with the first optical path channel 1011. A quarter wave plate 106 is coaxially fixedly installed in the second optical path channel 1021, so that the light-inlet surface and the light-emitting surface of the quarter wave plate 106 face the light-inlet end and the light-emitting end of the second optical path channel 1021, respectively.

[0027] Combination Figure 3 as well as Figure 4 The fixed base 103 includes a first connecting plate 1031 and a second connecting plate 1032 connected together to form an L-shaped structure. The first connecting plate 1031 is fixed on the fixed mirror base 101, so that the second connecting plate 1032 is vertically arranged in front of the light-inlet end of the rotating mirror base 102. The second connecting plate 1032 is provided with a circular mounting hole 1033, which is coaxially arranged with the second optical path channel 1021. The rotating base 104 is provided with a third optical path channel 1041 that runs through the horizontal direction (i.e., the X direction). The light-outlet end of the rotating base 104 is installed in the circular mounting hole 1033 of the fixed base 103, so that the rotating base 104 can be rotated and adjusted relative to the fixed base 103, and the third optical path channel 1041 is coaxially arranged with the second optical path channel 1021.

[0028] The laser beam splitting device provided in this embodiment converts linearly polarized light into circularly polarized light using a quarter-wave plate 106, and then splits the light source into two or more beams using a beam splitter 105. By adjusting the angle of the fixing base 103, the angle of the beam splitter 105 can be rotated to achieve the alignment function of the output beam on the projection surface; by rotating and adjusting the angle of the rotating mirror base 102, the energy of the output beam can be adjusted. After adjustment, the locking bolts and fasteners are locked, and then a water source is connected to the water inlet pipe 1012 and the water outlet pipe 1013 to cool the lens.

[0029] Figure 5 It shows Figure 2 Internal structure diagram, combined with Figure 2 as well as Figure 5 In some embodiments, the base 200 includes a first seat body 210, which has a first cavity 211 inside. The top center of the first cavity 211 has a through opening 212. The bottom of the support seat 100 is movably disposed on the bottom of the first cavity 211. There is a gap between the periphery of the bottom of the support seat 100 and the periphery of the first cavity 211. The top of the support seat 100 extends through the through opening 212. The laser beam splitter 10 is connected to the top of the support seat 100 to realize the connection and assembly of the support seat 100 and the base 200. For example, the first cavity 211 is square, and the opening 212 at the top of the first cavity 211 is circular. The support base 100 includes a bottom plate 120 and a top plate 130. The bottom plate 120 is movably disposed in the first cavity 211 and is square. The top plate 130 is located on top of the bottom plate 120 and is coaxial with the bottom plate 120. The top plate 130 is circular and is gapped in the opening 212. The laser beam splitting device 10 and the connecting frame 110 are both connected to the top of the top plate 130.

[0030] Figure 6 It shows Figure 2 An internal diagram from another perspective. Combined with... Figure 6 In some embodiments, the support device 20 further includes a first moving component 220. Two first moving components 220 are arranged opposite each other along the X direction. Along the X direction, the first moving component 220 is arranged between the bottom of the support base 100 and the periphery of the first cavity 211.

[0031] Figure 7 It shows Figure 6 A magnified diagram of point A. Combined with... Figure 7The first moving component 220 includes a first moving guide rail 221, a first housing 222, and two or more first piezoelectric ceramic modules 223. The first moving guide rail 221 extends along the X direction, and the opposite ends of the first moving guide rails 221 of the two first moving components 220 are separably abutted against the bottom of the support base 100 on both sides in the X direction. Two first housings 222 are provided, located on both sides of the first moving guide rail 221 in the Y direction. The opposite sides of the two first housings 222 are open, and the Y direction and... The X-direction is perpendicular; two or more first piezoelectric ceramic modules 223 are disposed in the first housing 222. The first piezoelectric ceramic module 223 includes a first Y-direction piezoelectric ceramic 2231 and a first X-direction piezoelectric ceramic 2232. The output end of the first Y-direction piezoelectric ceramic 2231 extends and retracts along the Y-direction. The first X-direction piezoelectric ceramic 2232 is connected to the output end of the first Y-direction piezoelectric ceramic 2231. The first X-direction piezoelectric ceramic 2232 extends and retracts along the X-direction. The output end of the first X-direction piezoelectric ceramic 2232 can abut against the side of the first moving guide rail 221.

[0032] The laser processing equipment provided in this application, when it is necessary to adjust the X-direction displacement of the laser beam splitter 10 on the support device 20, controls the first Y-direction piezoelectric ceramic 2231 in one of the first moving components 220 (example: the first moving component 220 on the left) to be energized and extended. The output end of the first Y-direction piezoelectric ceramic 2231 pushes the first X-direction piezoelectric ceramic 2232 to move along the Y-direction, so that the output end of the first X-direction piezoelectric ceramic 2232 closely abuts against and presses against the side of the first moving guide rail 221 on the same side. At this time, the first moving guide rail 221 and the support 100 form a rigid locking state through the static friction of the piezoelectric ceramics. Subsequently, the first X-direction piezoelectric ceramic 2232 of the first moving component 220 is energized and extended. The output end of the first X-direction piezoelectric ceramic 2232 extends and directly pushes the first moving guide rail 221 to move along the X-direction, thereby pushing the support 100 and the laser beam splitter 10 to move by a small step in the X-direction. Simultaneously, the first Y-axis piezoelectric ceramic 2231 of the first moving component 220 on the other side (in this example, the first moving component 220 on the right) is energized and extends, while the output end of the first X-axis piezoelectric ceramic 2232 extends, causing the first moving guide rail 221 on the same side to retract synchronously. Then, the first Y-axis piezoelectric ceramic 2231 of the first moving components 220 on both sides is de-energized and retracts, while the first X-axis piezoelectric ceramic 2232 is de-energized and retracts to its initial length. By repeating the above process, the support base 100, along with the laser beam splitter 10, can be moved along the X direction to the set stroke.

[0033] This application utilizes the piezoelectric ceramics in two sets of first moving components 220 to alternately perform feeding actions, accumulating and transmitting the nanoscale deformation of the first X-axis piezoelectric ceramic 2232 to the support 100. This allows the support 100 to achieve millimeter-level or even larger X-axis strokes, eliminating the traditional lead screw and nut or gear transmission structure and fundamentally eliminating the inherent backlash error of mechanical transmission mechanisms. This effectively improves the repeatability of the laser beam splitter 10 in X-axis positioning, solving the technical problem of poor adjustment accuracy during manual adjustment that affects product processing quality, and ensuring product yield. Furthermore, once the support base 100 moves to the target processing position, the first Y-axis piezoelectric ceramics 2231 of the two sets of first moving components 220 can simultaneously remain energized and extended, causing the output ends of the first X-axis piezoelectric ceramics 2232 on both sides to symmetrically and tightly abut against the sides of the corresponding first moving guide rails 221, forming a double-sided static friction lock. This effectively resists the X-axis impact force and reaction force generated during laser processing, preventing the support base 100 from undergoing unexpected displacement, thereby ensuring the long-term stability of the direction of the laser beam emitted by the laser beam splitter 10. In addition, the above-mentioned locking action does not require the addition of an independent braking brake component, simplifying the overall structure of the equipment and reducing manufacturing costs.

[0034] Combination Figure 7 In some embodiments, the two first housings 222 of each first moving component 220 are U-shaped structures with openings facing each other. Each first housing 222 contains four sets of first piezoelectric ceramic modules 223, which are spaced apart along the extension direction (i.e., the X direction) of the first moving guide rail 221. The output ends of the multiple first X-direction piezoelectric ceramics 2232 are distributed at multiple points along the length of the first moving guide rail 221, forming a dispersed clamping force. Compared to single-point clamping, multi-point clamping makes the force on the first moving guide rail 221 more uniform in the X direction, avoiding local stress concentration and minor bending deformation caused by concentrated clamping force. This ensures the straightness of the support 100 when moving in the X direction and obtains a driving force much greater than that of a single piezoelectric ceramic module, enabling the support 100 to reliably perform nanometer-level stepping drive even under large loads such as the laser beam splitter 10.

[0035] Combination Figure 7In some embodiments, the two sides of the first moving guide rail 221 are textured. With this configuration, the first Y-axis piezoelectric ceramic 2231 extends when energized, pushing the first X-axis piezoelectric ceramic 2232 towards the side of the first moving guide rail 221 along the Y direction. When the output end of the first X-axis piezoelectric ceramic 2232 abuts against the side of the first moving guide rail 221, the textured structure changes the contact between them from a smooth surface contact to an interlocking contact, significantly increasing the static friction coefficient of the contact area. Therefore, reliable static friction locking can be established at a lower driving voltage for the first Y-axis piezoelectric ceramic 2231, avoiding step loss due to slippage of the contact surface and ensuring the accuracy and consistency of displacement transmission.

[0036] In some embodiments, at least a portion of the part where the output end of the first X-axis piezoelectric ceramic 2232 contacts the first moving guide rail 221 is flexible. When the flexible part is pushed and pressed against the side of the first moving guide rail 221 by the first Y-axis piezoelectric ceramic 2231, it undergoes elastic deformation under the action of clamping force. This elastic deformation allows the contact end face of the flexible part to conform to the texture of the side of the guide rail, which can significantly improve the static friction locking force and further improve the positioning stability of the support 100 in the locked state.

[0037] Combination Figure 7 In some embodiments, the opposite ends of the first moving guide rail 221 are connected to the first moving block 224 to increase the contact area between the first moving guide rail 221 and the bottom plate of the support 100, reduce the contact stress, avoid the bottom of the support 100 from being indented or deformed under long-term stepping impact, and facilitate the replacement of wear parts separately in the later stage, thereby reducing maintenance costs.

[0038] Combination Figure 5 as well as Figure 6 In some embodiments, the support 100 of this application may move relative to the base 200 in the Y direction. Figure 8 It shows Figure 6 The diagram at point B, combined with... Figure 8Specifically, the support device 20 further includes a second moving assembly 230. Two second moving assemblies 230 are arranged opposite each other along the Y direction. Along the Y direction, a second moving assembly 230 is provided between the bottom of the support base 100 and the periphery of the first cavity 211. Each second moving assembly 230 includes a second moving guide rail 231, a second housing 232, and two or more second piezoelectric ceramic modules 233. The second moving guide rail 231 extends along the Y direction, and the opposite ends of the second moving guide rails 231 of the two second moving assemblies 230 can be separably abutted against the two sides of the bottom of the support base 100 in the Y direction. Two second housings 232 are provided. The second housing 232 is disposed on both sides of the second moving guide rail 231 in the X direction, and the opposite sides of the two second housings 232 are open; two or more second piezoelectric ceramic modules 233 are disposed inside the second housings 232. The second piezoelectric ceramic module 233 includes a second X-direction piezoelectric ceramic 2331 and a second Y-direction piezoelectric ceramic 2332. The output end of the second X-direction piezoelectric ceramic 2331 extends and retracts along the X direction. The second Y-direction piezoelectric ceramic 2332 is connected to the output end of the second X-direction piezoelectric ceramic 2331. The second Y-direction piezoelectric ceramic 2332 extends and retracts along the Y direction. The output end of the second Y-direction piezoelectric ceramic 2332 can abut against the side of the second moving guide rail 231.

[0039] Similar to the control of the second moving component 230, when it is necessary to adjust the Y-direction displacement of the laser beam splitter 10 on the support device 20, the second X-direction piezoelectric ceramic 2331 in one of the second moving components 230 (for example, the front second moving component 230) is energized and extended. The output end of the second X-direction piezoelectric ceramic 2331 pushes the second Y-direction piezoelectric ceramic 2332 to move along the X-direction, so that the output end of the second Y-direction piezoelectric ceramic 2332 closely abuts against and presses against the side of the second moving guide rail 231 on the same side. At this time, the second moving guide rail 231 and the support 100 form a rigid locking state through the static friction of the piezoelectric ceramics. Subsequently, the second Y-direction piezoelectric ceramic 2332 of the second moving component 230 is energized and extended. The output end of the second Y-direction piezoelectric ceramic 2332 extends and directly pushes the front second moving guide rail 231 to move along the Y-direction, thereby pushing the support 100 and the laser beam splitter 10 to move by a small step along the Y-direction. Simultaneously, the second X-axis piezoelectric ceramic 2331 of the second moving component 230 on the other side is energized and extends, while the output end of the second Y-axis piezoelectric ceramic 2332 extends, causing the second moving guide rail 231 on the same side to retract synchronously. Then, the second Y-axis piezoelectric ceramic 2332 of the second moving components 230 on both sides is de-energized and retracts, while the second X-axis piezoelectric ceramic 2331 is de-energized and retracts to its initial length. By repeating the above process, the support base 100, along with the laser beam splitter 10, can be moved along the Y direction to the set stroke. The technical effect of the second moving component 230 is similar to that of the first moving component 220, and will not be described in detail here.

[0040] Combination Figure 8 Similar to the first moving component 220, each second moving component 230 has two second housings 232 with openings facing each other in a U-shaped structure, and each second housing 232 contains four sets of second piezoelectric ceramic modules 233. The two sides of the second moving guide rail 231 are textured, and at least part of the part where the output end of the second Y-axis piezoelectric ceramic 2332 contacts the second moving guide rail 231 is flexible.

[0041] The laser processing equipment provided in this application features a support base 100 whose precise displacement in the X and Y directions is independently driven by a first moving component 220 and a second moving component 230, respectively. The feed directions of the two moving components alternate positively in the XY plane. By applying synchronous or time-division driving voltage signals to the two moving components through a controller, the support base 100 can achieve nanometer-level resolution large-stroke positioning and arbitrary trajectory interpolation motion in a two-dimensional plane. When the support base 100 moves to the target processing position, all piezoelectric ceramics in the two moving components can simultaneously lock the corresponding guide rails, forming a fully circumferential rigid locking state to resist multi-directional impact loads during laser processing and ensure the long-term stability of the beam direction.

[0042] In some implementations, the support 100 is movable relative to the base 200 in the Z direction. Specifically, in conjunction with Figure 5 The base 200 also includes a second seat 240 and a lifting mechanism 250. The lifting movement of the support 100 is driven by the lifting mechanism 250. The second seat 240 is located below the first seat 210. The second seat 240 has a second cavity 241 inside, and the top of the second cavity 241 is open. Multiple lifting mechanisms 250 are provided, and multiple lifting mechanisms 250 are arranged inside the second cavity 241.

[0043] Figure 9 It shows Figure 5 A schematic diagram of the lifting mechanism in the diagram. Figure 10 It shows Figure 9 A schematic diagram of the explosion. Combined with... Figure 9 as well as Figure 10The lifting mechanism 250 includes a first connecting member 251, a second connecting member 252, and a third moving component 253. The first connecting member 251 is connected to the bottom of the second base 240. The second connecting member 252 is movably connected to the bottom of the second cavity 241 in the X or Y direction via the third moving component 253. The second connecting member 252 is disposed at the bottom of the first connecting member 251, and the opposing surfaces of the second connecting member 252 and the first connecting member 251 are inclined surfaces, that is, the second connecting member 252 is disposed at the bottom of the first connecting member 251 and the two abut against each other in an inclined fit. The bottom of the second connecting member 252 is provided with a third cavity 2521, and the bottom of the third cavity 2521 is open. The third moving component 253 includes a fixed... The system comprises a fixed plate 2531 and two or more third piezoelectric ceramic modules 2532. The fixed plate 2531 is connected to the bottom of the second cavity 241 and covers the bottom of the third cavity 2521. The two third piezoelectric ceramic modules 2532, which are arranged opposite to each other, are connected to the top surface of the fixed plate 2531 and are located inside the third cavity 2521. Each third piezoelectric ceramic module 2532 includes a third piezoelectric ceramic 25321 and a fourth piezoelectric ceramic 25322. The telescopic ends of the third piezoelectric ceramic 25321 and the telescopic ends of the fourth piezoelectric ceramic 25322 are perpendicular in telescopic direction. The fourth piezoelectric ceramic 25322 is connected to the output end of the third piezoelectric ceramic 25321 and the output end of the fourth piezoelectric ceramic 25322 can abut against the side wall of the third cavity 2521.

[0044] When the support 100 needs to be driven to rise, the fourth piezoelectric ceramics 25322 of the two third piezoelectric ceramic modules 2532 are first energized and elongated, so that their output ends are tightly pressed against the inner sidewall of the third cavity 2521 in the positive direction to establish a static friction locking relationship. Then, the third piezoelectric ceramics 25321 in the third piezoelectric ceramic module 2532 are energized and elongated in the positive horizontal direction. This elongation is directly converted into a horizontal thrust on the inner sidewall of the third cavity 2521 to push the second connector 252 to move a microstep displacement in the positive horizontal direction. At the same time, since the first connector 251 and the second connector 252 are in a beveled fit relationship, the horizontal displacement of the second connector 252 forces the first connector 251 to rise in the vertical direction by a corresponding microstep displacement. The second seat 240, the first seat 210, and the support seat 100 above it rise intermittently but continuously, and the height of each step is equal to the product of the horizontal step displacement and the tangent of the inclined plane angle. When the support seat 100 needs to descend, the third piezoelectric ceramic module 2532 is controlled in the reverse direction to push the second connector 252 to move in the opposite horizontal direction. This allows the first connector 251 and the support seat 100 above it to descend gradually under the reverse conversion of the inclined plane. By adjusting the amplitude and frequency of the driving voltage of the third piezoelectric ceramic module 2532 by the controller, the horizontal step displacement and step frequency of each step can be continuously adjusted, thereby accurately controlling the lifting resolution and lifting speed of the support seat 100 in the Z direction and achieving vertical positioning with nanometer-level precision.

[0045] The laser processing equipment provided in this application has a support base 100 whose precise displacement in the X and Y directions is independently driven by a first moving component group 220 and a second moving component group 230, respectively; its lifting motion in the Z direction is achieved by a lifting mechanism 250, which drives a second connecting member 252 to move horizontally via a third moving component 253, and converts this horizontal displacement into a vertical lifting displacement of the first connecting member 251 and the structure above it through the inclined surface cooperation between the first connecting member 251 and the second connecting member 252. By applying synchronous or time-division driving voltage signals to the three sets of driving components through a controller, the support base 100 and the laser beam splitter 10 can achieve nanometer-level resolution large-stroke positioning and arbitrary spatial trajectory interpolation motion in three-dimensional space. When the laser beam splitter 100 moves to the target processing position, all the piezoelectric ceramics in the three sets of driving components can simultaneously lock the corresponding kinematic pairs, forming a three-dimensional full-circumferential rigid locking state, effectively resisting multi-directional impact loads during laser processing and ensuring the long-term pointing stability of the beam focus in three-dimensional space.

[0046] Combination Figures 1-5In some embodiments, the second seat 240 has a square structure and an open top. The bottom of the first seat 210 is provided with a connecting cover 260, which can cover the top and sides of the second seat 240 from the top. Four lifting mechanisms 250 are provided, and the four lifting mechanisms 250 are located at the four corners of the second cavity 241 of the second seat 240.

[0047] Combination Figure 9 as well as Figure 10 In some embodiments, both the first connector 251 and the second connector 252 are plate-shaped structures. Except for their opposing surfaces, which are inclined, the other surfaces of the first connector 251 and the second connector 252 are flat. A connecting post 2511 is provided at the top of the first connector 251 of the lifting mechanism 250, and the connecting post 2511 is connected to the connecting cover 260. A third cavity 2521 is opened at the bottom of the second connector 252, and the bottom of the third cavity 2521 is open.

[0048] Combination Figure 9 as well as Figure 10 In some embodiments, one of the opposing surfaces of the second connector 252 and the first connector 251 is provided with a groove 2512, and the other is provided with a slide rail 2522. The slide rail 2522 moves in the corresponding groove 2512 to guide the movement of the first connector 251 and the second connector 252. For example, there are two grooves 2512. The bottom of the first connector 251 is provided with two grooves 2512 extending along the inclined surface. Correspondingly, the top of the second connector 252 is provided with a slide rail 2522 corresponding to each groove 2512. In other embodiments, the groove 2512 may also be provided on the top of the second connector 252, and the bottom of the first connector 251 may be provided with a slide rail 2522. This application does not limit this.

[0049] Combination Figure 9 as well as Figure 10In some embodiments, the top surface of the fixing plate 2531 is connected to a first guide member 254 and a second guide member 255. The first guide member 254 slides vertically through one side of the first connector 251, and the second guide member 255 is disposed on the other side of the first connector 251. By constraining the first connector 251 horizontally from both sides of the first connector 251 by the first guide member 254 and the second guide member 255 respectively, the first connector 251 cannot follow the second connector 252 horizontally during the lifting process, ensuring that the horizontal displacement of the inclined surface is completely converted into vertical lifting displacement. At the same time, the guide members on both sides can effectively prevent the first connector 251 from tilting or deflecting during the lifting process, and always maintain a horizontal lifting posture. For example, a guide groove 2513 is provided on one side of the first connector 251. The outer side of the guide groove 2513 is open. The first guide member 254 is adapted to pass through the guide groove 2513. The second guide member 255 is plate-shaped and is disposed in close contact with the other side of the first connector 251.

[0050] Similarly, in some embodiments, the portion of the third cavity 2521 that mates with the output terminal of the fourth piezoelectric ceramic 25322 is textured. In some embodiments, at least a portion of the portion where the output terminal of the fourth piezoelectric ceramic 25322 contacts the sidewall of the third cavity 2521 is flexible.

[0051] Combination Figure 5 as well as Figure 6 In some embodiments, a control button 270 is provided on the base 200. Specifically, the control button 270 is located on the top surface of the second seat 240 and in front of the first seat 210, so as to facilitate operation by the operator when standing in front of the equipment. The control button 270 plays the following role in actual use: During equipment debugging or position calibration, the operator can send a drive signal to the corresponding piezoelectric ceramic module in the first moving component 220, the second moving component 230, or the lifting mechanism 250 by pressing the control button 270, thereby controlling the support base 100 to move forward or backward in the X, Y, or Z directions. For example, the control button 270 may include an X forward movement button, an X reverse movement button, a Y forward movement button, a Y reverse movement button, a Z forward up button, a Z reverse down button, and an emergency stop button. The layout of each button is arranged according to operating habits to reduce the probability of accidental touch.

[0052] In this application, unless otherwise expressly specified and limited, "above" or "below" the second feature can include direct contact between the first and second features, or contact between the first and second features through another feature between them. Furthermore, "above," "over," and "on top" of the second feature includes the first feature being directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature includes the first feature being directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0053] In the description of this application, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", and "counterclockwise" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this application.

[0054] In this application, unless otherwise expressly specified and limited, the terms "connection," "fixed," etc., should be interpreted broadly. For example, "fixed" can mean a fixed connection, a detachable connection, or an integral part; it can mean a mechanical connection or an electrical connection; it can mean a direct connection or an indirect connection through an intermediate medium; it can mean the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this application according to the specific circumstances.

[0055] Furthermore, the use of terms such as "first" and "second" in this application is for descriptive purposes only and should not be construed as indicating or implying their relative importance or implicitly specifying the number of technical features indicated. Therefore, features defined with "first" or "second" may explicitly or implicitly include one or more features. In the description of this application, "multiple" means two or more, unless otherwise explicitly specified.

[0056] Although embodiments of this application have been shown and described, those skilled in the art will understand that various changes, modifications, substitutions and variations can be made to these embodiments without departing from the principles and spirit of this application, the scope of which is defined by the claims and their equivalents.

Claims

1. A laser processing device, characterized in that, The processing equipment includes: A laser beam splitter is used to split the output laser source into two or more beams. A support device includes a base and a support seat. The support seat is movable relative to the base in the X direction. The base includes a first seat body and a first moving component. The first seat body has a first cavity inside. A through opening is provided at the top center of the first cavity. The bottom of the support seat is movably disposed at the bottom of the first cavity. There is a gap between the periphery of the bottom of the support seat and the periphery of the first cavity. The top of the support seat extends out of the through opening. The laser beam splitter is connected to the top of the support seat. Two first movable components are arranged opposite each other along the X direction. Each first movable component is disposed between the bottom of the support base and the periphery of the first cavity along the X direction. Each first movable component includes: The first moving guide rail extends along the X direction, and the opposite ends of the first moving guide rails of the two first moving components can be separably abutted against the two sides of the bottom of the support base in the X direction. The first housing is provided in two parts, which are disposed on both sides of the first moving guide rail in the Y direction. The opposite sides of the two first housings are open, and the Y direction is perpendicular to the X direction. Two or more first piezoelectric ceramic modules are disposed within the first housing. Each first piezoelectric ceramic module includes a first Y-axis piezoelectric ceramic and a first X-axis piezoelectric ceramic. The output end of the first Y-axis piezoelectric ceramic extends and retracts along the Y-axis. The first X-axis piezoelectric ceramic is connected to the output end of the first Y-axis piezoelectric ceramic. The first X-axis piezoelectric ceramic extends and retracts along the X-axis. The output end of the first X-axis piezoelectric ceramic can abut against the side of the first moving guide rail.

2. The laser processing equipment according to claim 1, characterized in that, The first moving guide rail has textured surfaces on both sides.

3. The laser processing equipment according to claim 1, characterized in that, At least a portion of the part where the output end of the first X-axis piezoelectric ceramic contacts the first moving guide rail is flexible.

4. The laser processing equipment according to claim 1, characterized in that, The support base can move relative to the base along the Y direction; The support device further includes a second movable component. Two second movable components are arranged opposite each other along the Y direction. Along the Y direction, a second movable component is disposed between the bottom of the support base and the periphery of the first cavity. The second movable component includes: The second moving guide rail extends along the Y direction, and the opposite ends of the second moving guide rails of the two second moving components can be separably abutted against the two sides of the bottom of the support base in the Y direction. The second housing is provided in two parts, which are located on both sides of the second moving guide rail in the X direction, and the opposite sides of the two second housings are open. Two or more second piezoelectric ceramic modules are disposed inside the second housing. Each second piezoelectric ceramic module includes a second X-axis piezoelectric ceramic and a second Y-axis piezoelectric ceramic. The output end of the second X-axis piezoelectric ceramic extends and retracts along the X-axis. The second Y-axis piezoelectric ceramic is connected to the output end of the second X-axis piezoelectric ceramic. The second Y-axis piezoelectric ceramic extends and retracts along the Y-axis. The output end of the second Y-axis piezoelectric ceramic can abut against the side of the second moving guide rail.

5. The laser processing equipment according to claim 4, characterized in that, The second moving guide rail has textured surfaces on both sides.

6. The laser processing equipment according to claim 5, characterized in that, At least a portion of the part where the output end of the second Y-axis piezoelectric ceramic contacts the second moving guide rail is flexible.

7. A laser processing apparatus according to any one of claims 1-6, characterized in that, The support base is movable relative to the base along the Z direction; the base further includes: The second seat is located below the first seat, and the second seat has a built-in second cavity with an open top. Multiple lifting mechanisms are provided, each disposed within the second cavity. Each lifting mechanism includes a first connecting member, a second connecting member, and a third moving component. The first connecting member is connected to the bottom of the second base. The second connecting member is movably connected to the bottom of the second cavity via the third moving component in either the X or Y direction. The second connecting member is disposed at the bottom of the first connecting member, and the opposing surfaces of the second and first connecting members are inclined. The bottom of the second connecting member contains the third cavity, which is open at the bottom. The third moving component includes: A fixing plate is attached to the bottom of the second cavity and covers the bottom of the third cavity; Two opposing third piezoelectric ceramic modules are connected to the top surface of the fixing plate and located within the third cavity. There are two or more third piezoelectric ceramic modules. Each third piezoelectric ceramic module includes a third piezoelectric ceramic and a fourth piezoelectric ceramic. The telescopic ends of the third and fourth piezoelectric ceramics are perpendicular in their telescopic directions. The fourth piezoelectric ceramic is connected to the output end of the third piezoelectric ceramic, and the output end of the fourth piezoelectric ceramic can abut against the side wall of the third cavity.

8. A laser processing device according to claim 7, characterized in that, The part of the third cavity that mates with the output end of the fourth piezoelectric ceramic is textured.

9. A laser processing device according to claim 7, characterized in that, At least a portion of the part where the output end of the fourth piezoelectric ceramic contacts the side wall of the third cavity is flexible.

10. A laser processing device according to claim 7, characterized in that, One of the opposing surfaces of the second connector and the first connector is provided with a groove, and the other is provided with a slide rail, wherein the slide rail moves in the corresponding groove; The top surface of the fixing plate is connected to a first guide and a second guide. The first guide slides vertically through one side of the first connector, and the second guide is located on the other side of the first connector.

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