Superhard material multi-station laser processing integrated equipment

Abstract

The present application relates to superhard material processing equipment technical field, especially superhard material multi-station laser processing integrated equipment, its technical scheme includes frame, the top of frame is equipped with support platform, the top of support platform is movably provided with workbench, the top of workbench is equipped with feeding assembly, rough machining assembly, finishing assembly and discharging assembly, rough machining assembly includes multi-axis operation platform, the present application is through liquid nitrogen storage tank, deionized water storage box and other devices, according to 1:3 proportion liquid nitrogen and deionized water are transported, liquid nitrogen is vaporized and radiated, deionized water is buffered, sudden cooling stress and internal crack are avoided, swing assembly is arranged to make atomizing nozzle reciprocating swing, cooling medium is swept into narrow gap micropore to realize double cooling, swing speed control temperature difference can also be set to reduce internal stress crack, at the same time, the cooperation of gear two and toothed plate, electric push rod and servo motor and other structures in cleaning assembly drives cleaning cotton swab to rotate and clean atomizing nozzle, reduces the difficulty of subsequent manual cleaning.

Description

Technical Field

[0001] This invention relates to the field of superhard material processing equipment technology, and in particular to an integrated multi-station laser processing equipment for superhard materials. Background Technology

[0002] As an important branch of materials science, superhard materials are increasingly widely used in strategic emerging industries such as aerospace, automotive manufacturing, electronics and information technology, and high-end equipment due to their extremely high hardness, wear resistance, high temperature resistance, and chemical stability. Common superhard materials such as diamond, cubic boron nitride, and silicon carbide are extensively used in the manufacture of precision cutting tools, semiconductor substrates, aero-engine blade coatings, optical windows, and other key components. The processing accuracy and efficiency of these materials directly determine the performance and market competitiveness of downstream products, and laser cutting machines are required for processing.

[0003] Air or water cooling is generally used during cutting, but the heat generated by laser cutting is difficult to remove in time, causing the temperature in the cutting area to rise continuously. This not only aggravates the wear of the laser cutting head, but also causes thermal damage such as melting and carbonization at the cutting edge of the superhard material. Therefore, this application proposes an integrated multi-station laser processing equipment for superhard materials. Summary of the Invention

[0004] The purpose of this invention is to address the problem of poor cooling effect leading to thermal damage to materials in the prior art, and to propose a solution for an integrated multi-station laser processing equipment for superhard materials.

[0005] The technical solution of the present invention: a multi-station laser processing integrated equipment for superhard materials, including a frame, a support platform on the top of the frame, a worktable movably mounted above the support platform, a feeding assembly, a roughing assembly, a finishing assembly and an unloading assembly mounted above the worktable, the roughing assembly including a multi-axis running platform, a fixed plate fixedly mounted on the multi-axis running platform, and a laser cutter, a laser cutting head and a cooling assembly mounted on the fixed plate; The cooling assembly includes a liquid nitrogen storage tank and a deionized water storage tank. A cryogenic gear pump and a micro diaphragm pump are respectively installed on one side of the liquid nitrogen storage tank and the deionized water storage tank. A static mixer is installed below the liquid nitrogen storage tank and the deionized water storage tank. A drain pipe is provided at the outlet end of the static mixer. An annular pipe is fixed at the end of the drain pipe away from the static mixer. Multiple atomizing nozzles for spraying liquid are provided at the bottom of the annular pipe. Connecting plates are provided on both sides of the atomizing nozzles.

[0006] Optionally, the discharge ports of the cryogenic gear pump and the micro diaphragm pump are respectively equipped with a liquid nitrogen flow sensor and a deionized water flow sensor. The other side of the liquid nitrogen flow sensor and the deionized water flow sensor is fixedly equipped with a liquid outlet pipe, and the other end of the two liquid outlet pipes is fixedly connected to two inlet ends on one side of the static mixer.

[0007] Optionally, the bottom of the annular tube is provided with multiple liquid outlets, which are located above the atomizing nozzle. A stainless steel corrugated hose is fixedly provided on the top of the atomizing nozzle, and the end of the stainless steel corrugated hose away from the atomizing nozzle is fixedly connected to the liquid outlet.

[0008] Optionally, the roughing assembly and the finishing assembly have the same structure, and the power of the cutting component in the finishing assembly is lower than that of the cutting component in the roughing assembly.

[0009] Optionally, a PLC is fixedly installed on one side of the frame, a limiting rail is provided on the top of the support platform, and multiple support rods are fixedly installed on the bottom of the worktable. Each of the multiple support rods has a slider fixedly installed at its bottom end. The slider and the limiting rail are movably connected. The arrangement of the support rods, sliders and limiting rail can improve the stability of the worktable when it rotates.

[0010] Optionally, the surface of the workbench is provided with four through slots, each of which is fixedly provided with a mesh plate. A servo motor is fixedly provided on the top of the support platform, and the output end of the servo motor is fixedly connected to the bottom of the workbench through a coupling.

[0011] Optionally, each of the connecting plates is provided with a swing assembly, which enables the atomizing nozzle to swing back and forth, improving the flexibility of cooling coverage. The swing assembly includes a servo motor II for providing power and two rotating shafts distributed on both sides of the atomizing nozzle. The ends of the two rotating shafts that are far apart are respectively movably connected to the two connecting plates. One of the rotating shafts is fixedly provided with a gear I, and the output end of the servo motor II is fixedly provided with an incomplete gear. The incomplete gear and the gear I mesh and drive each other.

[0012] Optionally, each of the two connecting plates has a mounting hole on its adjacent side. One inner wall of the mounting hole has a circular hole, and a bearing is fixedly installed in the circular hole. The inner ring of the bearing is fixedly sleeved on the rotating shaft. A coil spring is fixedly installed in the mounting hole, and the inner ring of the coil spring is fixedly sleeved on the rotating shaft.

[0013] Optionally, one of the connecting plates has a cleaning component at its bottom. This cleaning component is used to clean impurities inside the spray holes of the atomizing nozzle. The cleaning component includes a mounting box, within which a driving gear and multiple driven gears are movably mounted. The driven gears mesh with the driving gear. Positioning shafts are fixedly mounted at the top and bottom of both the driven gears and the driving gear. The top ends of the positioning shafts penetrate the mounting box and are movably connected to the inner top wall of the mounting box. Each positioning shaft has a cleaning swab at its top end. The diameter of the cleaning swab is the same as that of the atomizing nozzle. The spray nozzle diameter is matched. A servo motor four is fixedly installed at the bottom of the mounting box. The output end of the servo motor four is fixedly connected to the positioning shaft at the bottom of the drive gear. A horizontal plate is fixedly installed at the bottom of the mounting box. An electric push rod is fixedly installed at the top of the horizontal plate. A toothed plate is fixedly installed at the other end of the electric push rod. A servo motor three is installed above the toothed plate. A gear two is fixedly installed at the output end of the servo motor three. The gear two and the toothed plate mesh and drive each other. Two connecting rods are movably installed on both sides of the toothed plate. Both sets of connecting rods are fixedly connected to one of the connecting plates.

[0014] Optionally, both sides of the toothed plate are provided with sliding grooves, and the bottom end of each set of connecting rods is fixedly provided with the same mounting plate. Two sliders are fixedly provided on the side of the mounting plate near the sliding groove. The sliders are movably connected to the sliding groove. Two limiting rods are fixedly provided at the bottom of the toothed plate. Both limiting rods are movably connected to the cross plate.

[0015] Compared with the prior art, the present invention has the following beneficial technical effects: This invention utilizes a liquid nitrogen storage tank, a deionized water storage tank, a cryogenic gear pump, a micro diaphragm pump, a liquid nitrogen flow sensor, a deionized water flow sensor, and a static mixer to deliver liquid nitrogen and deionized water in a 1:3 ratio. The liquid nitrogen vaporization reaction rapidly removes heat, while the deionized water acts as a buffer, preventing sudden cooling stress caused by direct injection of pure liquid nitrogen and eliminating internal cracking. Furthermore, the oscillating component allows the atomizing nozzle to oscillate reciprocally during cooling, sweeping the atomized cooling medium into narrow slits or micropores for dual surface and internal cooling. The oscillation speed can also be set to achieve a gradient distribution of cooling intensity, rationally controlling the temperature difference along the material thickness direction and reducing internal stress cracking at its source. Furthermore, through the setting of the cleaning components, during cleaning, the installation box is moved to below the atomizing nozzle by the cooperation of gear two and toothed plate. The electric push rod then drives the installation box to move upward, allowing multiple cleaning swabs to be inserted into the spray holes. Then, through the cooperation of servo motor four, driven gear and driving gear, the cleaning swabs are made to rotate in the spray holes to complete the cleaning of the atomizing nozzle. Attached Figure Description

[0016] Figure 1 A first-person perspective three-dimensional structural diagram of an integrated multi-station laser processing equipment for superhard materials; Figure 2 A second-view stereoscopic structural diagram of an integrated multi-station laser processing equipment for superhard materials; Figure 3 A schematic diagram of the three-dimensional structure of the support platform; Figure 4 for Figure 1 Enlarged structural diagram at point A; Figure 5 This is a first-view structural diagram of the cooling assembly. Figure 6 for Figure 5 Enlarged structural diagram at point B; Figure 7 A schematic diagram of the cooling component from a second-view perspective. Figure 8 This is a schematic diagram of the exploded structure of the oscillating component; Figure 9 A first-view structural diagram of the cleaning component; Figure 10 A second-view structural diagram of the cleaning component; Figure 11 This is a top-section diagram of the cleaning component.

[0017] Figure label: 1. Rack; 2. Support platform; 3. Workbench; 4. Material feeding assembly; 5. Precision-machined components; 6. Rough machining components; 601. Multi-axis operating platform; 602. Fixing plate; 603. Laser cutting machine; 604. Laser cutting head; 7. Feeding assembly; 8. Place the wire mesh panel; 9. PLC; 10. Cooling assembly; 101. Liquid nitrogen storage tank; 102. Deionized water storage tank; 103. Cryogenic gear pump; 104. Miniature diaphragm pump; 105. Liquid nitrogen flow sensor; 106. Deionized water flow sensor; 107. Discharge pipe; 108. Static mixer; 109. Drain pipe; 1010. Annular pipe; 1011. Atomizing nozzle; 1012. Connecting plate; 11. Swing assembly; 111. Servo motor II; 112. Rotating shaft; 113. Coil spring; 114. Gear I; 115. Incomplete gear; 12. Cleaning components; 121. Mounting box; 122. Drive gear; 123. Driven gear; 124. Positioning shaft; 125. Cleaning swabs; 126. Servo motor four; 127. Horizontal plate; 128. Limit rod; 129. Electric push rod; 1210. Gear plate; 1211. Mounting plate; 1212. Connecting rod; 1213. Gear two; 1214. Servo motor three; 13. Servo motor one; 14. Limiting track; 15. Support rod. Detailed Implementation

[0018] The technical solution of the present invention will be further described below with reference to the accompanying drawings and specific embodiments.

[0019] like Figures 1-7 As shown, the multi-station laser processing integrated equipment for superhard materials proposed in this invention includes a frame 1, a support platform 2 on the top of the frame 1, and a worktable 3 movably mounted above the support platform 2. The surface of the worktable 3 has four through slots, each containing a fixed mesh plate 8. A servo motor 13 is fixedly mounted on the top of the support platform 2, and its output end is fixedly connected to the bottom of the worktable 3 via a coupling. Above the worktable 3 are a feeding assembly 7, a roughing assembly 6, a finishing assembly 5, and an unloading assembly 4. The feeding assembly 7 picks up a blank from the raw material bin and uses CCD vision positioning to calibrate the relative position of the mesh plate 8 at the center of the blank. The roughing assembly 6 uses a high-power laser cutting component to cut the material. The low-power laser cutting component in the finishing assembly 5 is activated to perform micro-beveling on the edges of the cut workpiece. The unloading component 4 picks up qualified products and places them in the finished product bin, and picks up unqualified products and places them in the waste box. The roughing component 6 and the finishing component 5 have the same structure. The cutting power of the cutting parts in the finishing component 5 is lower than that in the roughing component 6. A PLC 9 is fixed on one side of the frame 1. A limit rail 14 is provided on the top of the support table 2. Multiple support rods 15 are fixed on the bottom of the worktable 3. A slider is fixed on the bottom end of each of the multiple support rods 15. The slider and the limit rail 14 are movably connected. The setting of the support rods 15, sliders and limit rail 14 can improve the stability of the worktable 3 when rotating. The roughing component 6 includes a multi-axis running platform 601. A fixed plate 602 is fixed on the multi-axis running platform 601. A laser cutting machine 603, a laser cutting head 604 and a cooling component 10 are provided on the fixed plate 602. In one embodiment, the cooling assembly 10 includes a liquid nitrogen storage tank 101 and a deionized water storage tank 102. A cryogenic gear pump 103 and a miniature diaphragm pump 104 are respectively installed on one side of the liquid nitrogen storage tank 101 and the deionized water storage tank 102. A liquid nitrogen flow sensor 105 and a deionized water flow sensor 106 are respectively installed at the discharge ports of the cryogenic gear pump 103 and the miniature diaphragm pump 104. An outlet pipe 107 is fixedly installed on the other side of both the liquid nitrogen flow sensor 105 and the deionized water flow sensor 106. The other ends of the two outlet pipes 107 are respectively connected to the static mixing tank. Two inlet ends on one side of the device 108 are fixedly connected. A static mixer 108 is provided below the liquid nitrogen storage tank 101 and the deionized water storage tank 102. A drain pipe 109 is provided at the outlet end of the static mixer 108. An annular pipe 1010 is fixedly provided at the end of the drain pipe 109 away from the static mixer 108. Multiple atomizing nozzles 1011 for spraying liquid are provided at the bottom of the annular pipe 1010. Multiple liquid outlets are provided at the bottom of the annular pipe 1010, and the multiple liquid outlets are located above the atomizing nozzles 1011. A stainless steel corrugated flexible hose is fixedly provided at the top of the atomizing nozzles 1011. The stainless steel corrugated flexible hose is fixedly connected to the outlet at one end away from the atomizing nozzle 1011. Connecting plates 1012 are provided on both sides of the atomizing nozzle 1011. A deionized water flow sensor 106 and a liquid nitrogen flow sensor 105 are connected to the PLC 9 via cables. These sensors monitor the flow rate of the transported medium. The analog output module of the proportional control unit of the PLC 9 is connected to the speed controller of the cryogenic gear pump 103 and the miniature diaphragm pump 104 via control cables to achieve precise control of the pump speed. Ensure that liquid nitrogen and deionized water are supplied in a 1:3 ratio. When the liquid nitrogen in the mixed atomized cooling process comes into contact with the high temperature of the cutting area, it will instantly undergo a phase change and vaporize. During the process of liquid nitrogen changing from liquid to gas, it can absorb a large amount of latent heat of vaporization. This heat absorption efficiency is better than air convection heat transfer. At the same time, after the liquid nitrogen vaporizes, there is still enough deionized water to cover the cutting area, which carries away the residual heat. Through the buffering effect of deionized water, the sudden cooling stress caused by direct spraying of pure liquid nitrogen is avoided. This not only can quickly remove the heat generated by laser cutting, but also prevent thermal damage to the material during processing.

[0020] Furthermore, such as Figure 8As shown, each connecting plate 1012 is equipped with a swing assembly 11, which enables the atomizing nozzle 1011 to swing back and forth, improving the flexibility of cooling coverage. Specifically, the swing assembly 11 includes a servo motor 111 for providing power and two rotating shafts 112 distributed on both sides of the atomizing nozzle 1011. The ends of the two rotating shafts 112 that are far apart are respectively movably connected to the two connecting plates 1012. The sides of the two connecting plates 1012 that are close to each other are provided with mounting holes. A circular hole is provided on the inner wall of one side of the mounting hole. A bearing is fixedly installed in the circular hole, and the inner ring of the bearing is fixedly sleeved on the rotating shaft 112. A coil spring 113 is fixedly installed in the mounting hole, and the inner ring of the coil spring 113 is fixedly sleeved on the rotating shaft 112. A gear 114 is fixedly installed on one of the rotating shafts 112. An incomplete gear 115 is fixedly installed at the output end of the servo motor 111. The incomplete gear 115 and the gear 114 mesh and drive each other. The PLC9 and the servo motor 111 are connected by a cable. The second gear 111 drives the incomplete gear 115, which in turn drives the first gear 114. The first gear 114 then drives the rotating shaft 112, which in turn drives the atomizing nozzle 1011 and coils the coil spring 113. When the teeth of the incomplete gear 115 separate from the teeth of the first gear 114, the coil spring 112 drives the rotating shaft 112 to reset. The rotating shaft 112 then drives the atomizing nozzle 1011. The teeth of the incomplete gear 115 separate from and mesh with the teeth of the first gear 114, thus enabling the atomizing nozzle 1011 to be in a reciprocating oscillating state. For narrow slit cutting or micro-hole cutting of ultra-hard materials, the oscillating nozzle can sweep the atomized cooling medium into the narrow slit or micro-hole through small-amplitude high-frequency reciprocating oscillation, achieving dual cooling of the surface and the interior, and avoiding micro-hole edge cracks caused by internal heat accumulation.

[0021] like Figure 9 and Figure 10 As shown, a cleaning component 12 is provided at the bottom of one of the connecting plates 1012. The cleaning component 12 is used to clean impurities in the spray hole of the atomizing nozzle 1011. Specifically, the cleaning component 12 includes a mounting box 121. A drive gear 122 and multiple driven gears 123 are movably mounted inside the mounting box 121. The driven gears 123 mesh with the drive gear 122. Positioning shafts 124 are fixedly mounted at the top and bottom of both the driven gears 123 and the drive gear 122. The top ends of the positioning shafts 124 penetrate the mounting box 121 and are movably connected to the inner top wall of the mounting box 121. Cleaning swabs 125 are mounted at the top ends of the positioning shafts 124. The diameter of the cleaning swabs 125 is adapted to the spray hole diameter of the atomizing nozzle 1011. A servo motor 12 is fixedly mounted at the bottom of the mounting box 121. 6. The output end of servo motor 4 126 is fixedly connected to the positioning shaft 124 at the bottom of the drive gear 122. A horizontal plate 127 is fixedly provided at the bottom of the mounting box 121. An electric push rod 129 is fixedly provided at the top of the horizontal plate 127. A gear plate 1210 is fixedly provided at the other end of the electric push rod 129. A servo motor 3 1214 is provided above the gear plate 1210. A gear 2 1213 is fixedly provided at the output end of the servo motor 3 1214. The gear 2 1213 and the gear plate 1210 mesh and drive each other. Two connecting rods 1212 are movably provided on both sides of the gear plate 1210. Sliding grooves are provided on both sides of the gear plate 1210. Each set of connecting rods 1212... The bottom of each component is fixedly equipped with the same mounting plate 1211. Two sliders are fixedly mounted on the side of the mounting plate 1211 near the slide groove. The sliders are movably connected to the slide groove. Two limit rods 128 are fixedly mounted on the bottom of the toothed plate 1210. Both limit rods 128 are movably connected to the horizontal plate 127. Two sets of connecting rods 1212 are fixedly connected to one of the connecting plates 1012. Dust particles generated during the material cutting process will adhere to the inner wall of the spray hole. The servo motor 1214 and the electric push rod 129 are started by PLC9. The servo motor 1214 drives the horizontal plate 127 through the cooperation of the gear 1213 and the toothed plate 1210. The plate 127 moves the mounting box 121 to below the atomizing nozzle 1011. Then, the electric push rod 129 is activated, causing its output end to move the horizontal plate 127 upward. The horizontal plate 127 moves the mounting box 121 and multiple cleaning swabs 125 upward, allowing the cleaning swabs 125 to be inserted into the spray holes of the atomizing nozzle 1011. Then, the electric push rod 129 is closed and the servo motor 126 is activated. The servo motor 126 drives the drive gear 122, which in turn drives multiple driven gears 123. The multiple driven gears 123 and the servo motor 126 then drive the cleaning swabs 125 to rotate, thus cleaning the atomizing nozzle 1011.

[0022] In this embodiment, the support rod 15, the limiting rail 14, and the slider are used to ensure the stability of the worktable 3 when it rotates. During processing, the feeding component 7 places the material in the material bin on top of the placement mesh plate 8. The PLC 9 starts the servo motor 13, which drives the worktable 3 to rotate. The worktable 3 transfers the material to be processed to the bottom of the roughing component 6. The multi-axis running platform 601 drives the laser cutting machine 603 and the laser cutting head 604 to cut the material. During the cutting process, the low-temperature gear pump 103 and the micro diaphragm pump 104 respectively extract liquid nitrogen and deionized water and introduce them into the static mixer 108 in a 1:3 ratio. The static mixer 108 introduces the uniformly mixed medium into the annular pipe 1010, and then introduces the corresponding mist through the stainless steel corrugated hose. The atomizing nozzle 1011 sprays the atomizing medium onto the material surface through the spray hole. Simultaneously, PLC9 activates servo motor 111, which in turn drives incomplete gear 115. Incomplete gear 115 then drives gear 114, which in turn drives shaft 112. Shaft 112 then drives the atomizing nozzle 1011 and retracts the coil spring 113. When the teeth of incomplete gear 115 separate from the teeth of gear 114, the coil spring 113 resets shaft 112, which then drives the atomizing nozzle 1011, causing it to oscillate back and forth. For slit cutting or micro-hole cutting of ultra-hard materials, the oscillating nozzle can sweep the atomized cooling medium into the slit or micro-hole through small-amplitude, high-frequency oscillation. Internally, dual cooling of the surface and interior is achieved to prevent micropore edge cracks caused by internal heat accumulation. Simultaneously, the oscillating nozzle's oscillation speed can be adjusted by changing the rotation speed of servo motor 111, achieving a gradient distribution of cooling intensity and rationally controlling the temperature difference along the material thickness direction. This reduces internal stress cracks at the source. After rough machining, servo motor 13 drives the worktable 3 to continue rotating, moving the material below the finishing component 5 for micro-beveling of the workpiece edges. After finishing, servo motor 13 drives the worktable 3 to rotate, moving the material below the unloading component 4. The unloading component 4 picks up qualified products and places them in the finished product bin, while picking up unqualified products and placing them in the waste bin, thus completing the material processing. If subsequent cleaning of the atomizing nozzle 1 is required... When impurities are removed from the spray nozzle 011, servo motor 3 1214 is activated. Servo motor 3 1214 drives gear plate 1210 via gear 2 1213. Gear plate 1210 then drives electric push rod 129, which in turn drives horizontal plate 127. Horizontal plate 127 then drives mounting box 121, bringing it below atomizing nozzle 1011. PLC 9 then shuts off servo motor 3 1214 and activates electric push rod 129, causing its output to move horizontal plate 127 upwards. Horizontal plate 127 then moves mounting box 121 and multiple cleaning swabs 125 upwards, inserting the cleaning swabs 125 into the spray nozzle 1011. Finally, electric push rod 129 is shut off and servo motor 4 126 is activated. Servo motor 4 126 drives drive gear 122.The driving gear 122 then drives multiple driven gears 123, which in turn, along with the servo motor 126, drive the cleaning swab 125 to rotate, thus cleaning the atomizing nozzle 1011 and effectively reducing the difficulty of manual cleaning.

[0023] The above specific embodiments are merely optional embodiments of the present invention. Based on the technical solutions of the present invention and the relevant teachings of the above embodiments, those skilled in the art can make various alternative improvements and combinations to the above specific embodiments.

Claims

1. A multi-station laser processing integrated equipment for superhard materials, comprising a frame (1), a support platform (2) on the top of the frame (1), a worktable (3) movably mounted above the support platform (2), and a loading assembly (7), a roughing assembly (6), a finishing assembly (5), and a unloading assembly (4) mounted above the worktable (3), characterized in that: The roughing component (6) includes a multi-axis running platform (601), on which a fixing plate (602) is fixedly mounted, and on which a laser cutting machine (603), a laser cutting head (604) and a cooling component (10) are mounted. The cooling assembly (10) includes a liquid nitrogen storage tank (101) and a deionized water storage tank (102). A cryogenic gear pump (103) and a micro diaphragm pump (104) are respectively provided on one side of the liquid nitrogen storage tank (101) and the deionized water storage tank (102). A static mixer (108) is provided below the liquid nitrogen storage tank (101) and the deionized water storage tank (102). A drain pipe (109) is provided at the outlet end of the static mixer (108). An annular pipe (1010) is fixed at the end of the drain pipe (109) away from the static mixer (108). A plurality of atomizing nozzles (1011) for spraying liquid are provided at the bottom of the annular pipe (1010). A connecting plate (1012) is provided on both sides of the atomizing nozzle (1011).

2. The integrated multi-station laser processing equipment for superhard materials according to claim 1, characterized in that, The discharge ports of the cryogenic gear pump (103) and the micro diaphragm pump (104) are respectively equipped with a liquid nitrogen flow sensor (105) and a deionized water flow sensor (106). The other side of the liquid nitrogen flow sensor (105) and the deionized water flow sensor (106) are respectively fixedly equipped with a liquid outlet pipe (107). The other end of the two liquid outlet pipes (107) is fixedly connected to the two inlet ends on one side of the static mixer (108).

3. The integrated multi-station laser processing equipment for superhard materials according to claim 1, characterized in that, The bottom of the annular tube (1010) is provided with multiple liquid outlets, which are located above the atomizing nozzle (1011). A stainless steel corrugated hose is fixedly provided on the top of the atomizing nozzle (1011), and the end of the stainless steel corrugated hose away from the atomizing nozzle (1011) is fixedly connected to the liquid outlet.

4. The integrated multi-station laser processing equipment for superhard materials according to claim 1, characterized in that, The roughing component (6) and the finishing component (5) have the same structure, and the power of the cutting component in the finishing component (5) is lower than that of the cutting component in the roughing component (6).

5. The integrated multi-station laser processing equipment for superhard materials according to claim 1, characterized in that, A PLC (9) is fixedly installed on one side of the frame (1), a limiting rail (14) is provided on the top of the support platform (2), and multiple support rods (15) are fixedly installed at the bottom of the worktable (3). A slider is fixedly installed at the bottom of each of the multiple support rods (15). The slider and the limiting rail (14) are movably connected. The arrangement of the support rods (15), sliders and limiting rail (14) can improve the stability of the worktable (3) when it rotates.

6. The integrated multi-station laser processing equipment for superhard materials according to claim 1, characterized in that, The surface of the workbench (3) is provided with four through slots, and each through slot is fixedly provided with a mesh plate (8). The top of the support platform (2) is fixedly provided with a servo motor (13), and the output end of the servo motor (13) is fixedly connected to the bottom of the workbench (3) through a coupling.

7. The integrated multi-station laser processing equipment for superhard materials according to claim 1, characterized in that, Each of the connecting plates (1012) is provided with a swing assembly (11). The swing assembly (11) can make the atomizing nozzle (1011) swing back and forth, improving the flexibility of cooling coverage. The swing assembly (11) includes a second servo motor (111) for providing power and two rotating shafts (112) distributed on both sides of the atomizing nozzle (1011). The ends of the two rotating shafts (112) that are far apart are respectively movably connected to the two connecting plates (1012). One of the rotating shafts (112) is fixedly provided with a gear (114). The output end of the second servo motor (111) is fixedly provided with an incomplete gear (115). The incomplete gear (115) and the gear (114) mesh and drive each other.

8. The integrated multi-station laser processing equipment for superhard materials according to claim 7, characterized in that, The two connecting plates (1012) are provided with mounting holes on their adjacent sides. A circular hole is provided on one inner wall of the mounting hole. A bearing is fixedly installed in the circular hole. The inner ring of the bearing is fixedly sleeved on the rotating shaft (112). A coil spring (113) is fixedly installed in the mounting hole. The inner ring of the coil spring (113) is fixedly sleeved on the rotating shaft (112).

9. The integrated multi-station laser processing equipment for superhard materials according to claim 8, characterized in that, One of the connecting plates (1012) has a cleaning component (12) at its bottom, which is used to clean impurities in the spray holes of the atomizing nozzle (1011); The cleaning component (12) includes a mounting box (121). A drive gear (122) and multiple driven gears (123) are movably mounted inside the mounting box (121). The multiple driven gears (123) mesh with the drive gear (122). Positioning shafts (124) are fixedly mounted at the top and bottom of both the driven gears (123) and the drive gear (122). The top ends of the multiple positioning shafts (124) penetrate the mounting box (121) and are movably connected to the inner top wall of the mounting box (121). Cleaning swabs (125) are mounted at the top ends of the multiple positioning shafts (124). The diameter of the cleaning swabs (125) is adapted to the spray hole diameter of the atomizing nozzle (1011). A servo motor (126) is fixedly mounted at the bottom of the mounting box (121). The output end of the servo motor four (126) is fixedly connected to the positioning shaft (124) at the bottom of the drive gear (122). A horizontal plate (127) is fixedly provided at the bottom of the mounting box (121). An electric push rod (129) is fixedly provided at the top of the horizontal plate (127). A toothed plate (1210) is fixedly provided at the other end of the electric push rod (129). A servo motor three (1214) is provided above the toothed plate (1210). A gear two (1213) is fixedly provided at the output end of the servo motor three (1214). The gear two (1213) and the toothed plate (1210) mesh and drive each other. Two connecting rods (1212) are movably provided on both sides of the toothed plate (1210). Both sets of connecting rods (1212) are fixedly connected to one of the connecting plates (1012).

10. The integrated multi-station laser processing equipment for superhard materials according to claim 9, characterized in that, Both sides of the toothed plate (1210) are provided with sliding grooves. The bottom end of each set of connecting rods (1212) is fixedly provided with the same mounting plate (1211). Two sliders are fixedly provided on the side of the mounting plate (1211) near the sliding groove. The sliders are movably connected to the sliding groove. Two limiting rods (128) are fixedly provided at the bottom of the toothed plate (1210). Both limiting rods (128) are movably connected to the cross plate (127).

Images