A device and method for repairing a vacuum flange seal knife edge defect
Patent Information
- Application Number
- CN202611102185.6
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2026-07-23
- Publication Date
- 2026-09-25
AI Technical Summary
1.修复精度与一致性的革命性提升。本发明通过膨胀式定位套筒与腔室内壁的刚性锁紧,以高精密轴承作为回转基准,强制约束仿形修复片的研磨轨迹与刀口原始设计圆心高度重合,彻底摆脱了人工打磨因姿态不稳、施力不均造成的形状失真。修复后刀口圆角半径一致性误差可控制在±0.01mm以内,表面粗糙度稳定达到Ra≤0.2μm,完全满足超高真空(10⁻8Pa级)密封要求,同时完整保留刀口的原始几何角度和R0.1mm圆角特征,避免二次修形导致的密封比压变化。
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Figure CN122807714A_ABST
Abstract
Description
Technical Field
[0001] This invention relates to the field of vacuum sealing technology, specifically to a device and method for repairing defects in the sealing knife edge of a vacuum flange. Background Technology
[0002] In the field of ultra-high vacuum technology, metal sealing structures have become the mainstream sealing method due to their extremely low outgassing rate and excellent resistance to high and low temperatures. Among them, the wedge-type knife-edge seal achieves elastic plastic deformation sealing by pressing an oxygen-free copper sealing ring into the flange edge. This method places extremely stringent requirements on the geometric accuracy and surface quality of the knife edge, typically requiring a corner radius of R0.1mm and a surface roughness better than Ra0.4μm. However, in practical engineering, the processing and maintenance of this critical component have long faced the following technical bottlenecks: Firstly, the machining accuracy in the manufacturing process is limited by the accessibility of the structure. When the vacuum cavity has a large spatial curved surface or a complex internal cavity structure, the sealing flange cutting edge cannot be machined using conventional turning processes and can only be completed by boring and milling. However, the boring and milling process is prone to vibration due to the long tool overhang and insufficient system rigidity, resulting in periodic sawtooth-like ripples or micro-chipping on the cutting edge, and it is difficult to directly machine a small radius of 0.1mm. Currently, the industry mainly relies on manual grinding with oilstones or sandpaper, which is not only inefficient, but also results in a radius consistency error of over ±0.05mm after grinding, seriously threatening the reliability of the seal.
[0003] Secondly, damage repair during assembly and use is heavily reliant on disassembly and return to the factory. During on-site assembly or equipment maintenance, improper operation or collisions with foreign objects often result in damage such as flaring, indentation, or localized chipping of the cutting edge. Existing repair methods require the entire vacuum chamber to be disassembled and transported to a machine tool for secondary turning repair. A single repair cycle typically exceeds 4 hours, and to ensure the symmetry of both sides of the cutting edge, it is often necessary to repair two flange faces simultaneously, resulting in significant time and manpower costs. For equipment already connected to complex pipeline systems, disassembly further increases the risk of system contamination and expands overall downtime losses.
[0004] Third, there is a lack of effective on-site repair techniques for micron-level shallow defects. For minute scratches or abrasions with a depth of only 0.02~0.1mm, existing technologies attempt to use brazing followed by manual grinding. However, there is a difference in the coefficient of thermal expansion between the brazing material and the stainless steel or aluminum alloy substrate, resulting in high residual stress at the interface after cooling. The bonding strength is generally below 200MPa, making it highly susceptible to interface peeling during drastic vacuum pressure fluctuations (such as switching from atmospheric pressure to high vacuum), leading to seal failure. Alternative solutions such as laser cladding are also difficult to implement on-site due to the high cost of equipment and the difficulty in controlling the heat-affected zone.
[0005] In summary, there is currently a lack of a field repair device and method for sealing blades that can simultaneously ensure high shape accuracy and high surface quality without disassembling the chamber or introducing thermal effects. This has become a common technical challenge restricting the rapid repair and reliability improvement of ultra-high vacuum equipment. Summary of the Invention
[0006] To address the aforementioned technical problems, the present invention provides the following technical solution: A device for repairing defects in the sealing knife edge of a vacuum flange, comprising a positioning sleeve, a positioning locking bolt, a locking nut, a locking push rod, a one-dimensional locking sleeve, a high-precision bearing, a lower locking flange, an upper locking flange, a fastening bolt assembly, a contour knife edge repair piece, a drive flange, and a ratchet rocker arm; The positioning sleeve is pressed and locked against the inner wall of the vacuum chamber. The two ends of the locking push rod are respectively hinged to the positioning sleeve and the one-dimensional locking sleeve. The one-dimensional locking sleeve achieves one-dimensional movement by using the slot on the positioning sleeve and the rotational thrust of the positioning locking bolt. The positioning locking bolt is connected with the locking nut, and the locking nut is installed in the slot of the positioning sleeve. The outer ring of the high-precision bearing is connected to the positioning sleeve, and the inner ring of the high-precision bearing is connected to the lower locking flange. The contoured blade repair piece is installed in the groove on the upper surface of the lower locking flange, the upper locking flange is installed in the stop of the lower locking flange, and the fastening bolt component passes through the connection hole of the upper locking flange and is fastened to the threaded hole on the lower locking flange. The drive flange is fastened to the external thread on the upper locking flange via an internal thread, and the ratchet rocker is mounted on the drive flange to drive the repair device to rotate around the high-precision bearing.
[0007] Preferably, it also includes a set bolt disposed on the side of the lower locking flange; the contour knife-edge repair piece is a precision whetstone, which is pressed and fixed in the fixing groove of the lower locking flange by the set bolt, and the contour knife-edge repair piece extends beyond the bottom end face of the lower locking flange.
[0008] Preferably, the precision oilstone is a diamond abrasive or a cubic boron nitride abrasive with a particle size range of 200# to 2000#.
[0009] Preferably, the grinding surface of the contour-following blade repair piece is an arc-shaped surface or a wedge-shaped surface.
[0010] Preferably, the drive flange has a connection hole for connecting a universal flexible shaft and a portable power source.
[0011] Preferably, it also includes a micro motor drive system, which is connected to the drive flange and has an adjustable speed range of 100-1000 rpm.
[0012] The present invention also provides a method for repairing defects in the sealing knife edge of a vacuum flange using the above-mentioned device, comprising the following steps: Step 1: Insert the repair device into the vacuum chamber through the positioning sleeve, so that the contoured blade repair piece contacts the sealing blade to be repaired; Step 2: Manually tighten the positioning locking bolt. The positioning locking bolt moves downward, driving the one-dimensional locking sleeve to slide along the slot. The locking push rod pushes the positioning sleeve radially outward, causing the positioning sleeve to expand and lock with the inner wall of the vacuum chamber, and ensuring that the rotation surface of the contour knife edge repair piece is parallel to the sealing knife edge repair surface. Step 3: Install the drive flange and the ratchet rocker arm onto the upper locking flange; Step 4: Rotate the ratchet rocker arm to make the contoured blade repair piece rotate radially around the center of the sealing blade. By controlling the normal pressure and rotation speed, the defect layer on the blade surface is removed, and the geometry of the sealing blade is reshaped.
[0013] Preferably, step four employs a multi-stage repair process. In the coarse repair stage, a contoured cutting edge repair sheet with a particle size of 200#-600# is used to remove defects. In the fine repair stage, a contoured cutting edge repair sheet with a particle size of 800#-2000# is used for surface finishing.
[0014] Preferably, step four is performed in manual mode, i.e., the ratchet lever is directly operated for repair.
[0015] Preferably, step four adopts an automatic mode, that is, the drive flange is connected to the portable electric drill via a universal flexible shaft for power drive.
[0016] The advantages of this invention compared to the prior art are: 1. Revolutionary improvement in repair precision and consistency. This invention utilizes an expansion-type positioning sleeve rigidly locked to the inner wall of the cavity, with a high-precision bearing as the rotation reference. This forcibly constrains the grinding trajectory of the contour repair piece to coincide with the original design center of the cutting edge, completely eliminating shape distortion caused by unstable posture and uneven force during manual grinding. The consistency error of the cutting edge radius after repair can be controlled within ±0.01mm, and the surface roughness stably reaches Ra≤0.2μm, fully meeting the requirements of ultra-high vacuum (10⁻⁻¹). 8 It meets the sealing requirements of Pa level, while fully preserving the original geometric angles and R0.1mm rounded corner features of the blade edge to avoid changes in sealing pressure caused by secondary reshaping.
[0017] 2. Rapid on-site repair capabilities significantly reduce equipment downtime. The entire unit can be directly inserted into the chamber via existing vacuum flanges or manholes without disassembling any external pipelines, valves, or heating elements. A single complete repair operation (including installation, rough repair, fine repair, and disassembly) takes no more than 1 hour. Compared to the traditional disassembly and return-to-factory machining process that takes more than 4 hours, maintenance efficiency is improved by over 75%. This is particularly suitable for applications such as semiconductors and particle accelerators where continuous operation is extremely important, significantly reducing production or experimental losses caused by equipment downtime.
[0018] 3. No heat-affected zone; significantly enhanced interface strength and service reliability after repair. This invention employs a purely physical grinding removal method, which does not generate high temperatures during processing, resulting in no thermally induced phase transitions, no residual thermal stress, and no softening of the material structure. The bond strength between the repaired cutting edge and the substrate remains no less than 300 MPa, capable of withstanding a strength greater than 1 × 10⁻⁶ MPa. 5 The intense alternating vacuum pressure of Pa fundamentally eliminates the risk of interface peeling caused by thermal expansion mismatch during brazing or cladding repair, significantly extending the service life of the sealing structure.
[0019] 4. Versatility and flexible operation for flanges of various materials and specifications. The device has a compact structure, and the positioning sleeve can be serialized according to the inner diameter of the cavity, covering a diameter range from DN100 to DN500. By changing the conformal repair pieces with different grit sizes (200#~2000#) and different grinding surface shapes (arc or wedge), it can be applied to common flange materials such as stainless steel and aluminum alloy. Simultaneously, this invention provides three power input modes: manual ratchet rocker drive, universal flexible shaft electric drill drive, and micro-motor automatic drive. These modes can be flexibly selected according to the size of the site space and the operator's position, making it particularly suitable for complex working environments such as confined spaces and non-linear visibility, demonstrating strong engineering practicality and promotional value. Attached Figure Description
[0020] Figure 1 This is a schematic diagram of the vacuum chamber connection.
[0021] Figure 2 This is a schematic diagram of the vacuum chamber sealing installation process.
[0022] Figure 3 A schematic diagram of the overall structure of the invention.
[0023] Figure 4 This is a cross-sectional view of the overall structure of the present invention.
[0024] Figure 5 This is an enlarged schematic diagram of a partial structure of the present invention.
[0025] Reference numerals: 1-First vacuum chamber; 2-Second vacuum chamber; 3-First bolt fastening component; 4-Oxygen-free copper sealing ring; 5-Ratchet rocker arm; 6-Drive flange; 7-Upper locking flange; 8-Fastening bolt component; 9-Lower locking flange; 10-High precision bearing; 11-Positioning sleeve; 12-Positioning locking bolt; 13-Locking nut; 14-Locking push rod; 15-One-dimensional locking sleeve; 16-Contour-shaped blade repair piece. Detailed Implementation
[0026] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.
[0027] like Figure 1 and Figure 2 As shown, the vacuum chamber is assembled from a first vacuum chamber 1 and a second vacuum chamber 2 by several first bolt fastening components 3, and an oxygen-free copper sealing ring 4 is provided between the first vacuum chamber 1 and the second vacuum chamber 2.
[0028] Example 1: Manual mode repair of stainless steel sealing blade like Figures 3 to 5 As shown, this embodiment is for repairing the wedge-shaped sealing knife edge of a DN100 stainless steel vacuum chamber.
[0029] Before installing the repair device, first confirm that there are no large particulate contaminants on the surface of the blade to be repaired. Place the entire repair device into the first vacuum chamber 1 or the second vacuum chamber 2 through the positioning sleeve 11. Taking the first vacuum chamber 1 as an example, adjust the position so that the contoured blade repair piece 16 (in this embodiment, an arc-shaped surface and a 600# diamond precision oilstone) fits against the blade to be repaired and sealed.
[0030] At this point, there is a gap of approximately 1 mm between the positioning sleeve 11 and the inner wall of the first vacuum chamber 1. The operator uses a wrench to tighten the positioning locking bolt 12. The bolt head, in conjunction with the locking nut 13, is pushed downwards, causing the one-dimensional locking sleeve 15 to descend. Under the pressure of the sleeve 15, the locking push rod 14 moves radially outwards, pushing the positioning sleeve 11 to elastically expand until it is tightly abutted and locked against the inner wall of the first vacuum chamber 1. This locking method not only fixes the device but also ensures that the plane of rotation of the repair piece 16 is absolutely parallel to the blade end face.
[0031] Subsequently, the drive flange 6 is screwed onto the external thread of the upper locking flange 7, and the ratchet lever 5 is inserted. The operator holds the ratchet lever 5 and rotates it counterclockwise at a constant speed (approximately 30-50 rpm) with the high-precision bearing 10 as the rotation center. During this period, the contour-following blade repair piece 16 performs contour grinding on the blade surface. In the rough finishing stage, a normal force of approximately 10N-15N is applied to quickly remove serrated defects; after observing that the blade edge is basically formed, the repair piece is replaced with a 1200# grit piece, and a normal force of approximately 5N-8N is applied for fine finishing. After the repair is completed, the blade radius is checked to be R0.1mm±0.008mm, and the surface roughness is Ra0.18μm, taking approximately 45 minutes.
[0032] Example 2: Automatic mode repair of sealing blades made of aluminum alloy like Figures 3 to 5 As shown, this embodiment is for the sealing blade of a DN500 aluminum alloy vacuum chamber. Due to the relatively soft nature of aluminum alloy, a contoured blade repair piece 16 (400# grit) made of cubic boron nitride is selected, and its shape is designed as a wedge to match the blade angle.
[0033] Given the confined space inside the chamber, making it inconvenient for the operator to stand while working, an automatic drive mode was adopted. One end of the universal joint was connected to the connection hole above drive flange 6, and the other end was clamped onto a portable electric drill. The drill was started, and the speed was set to 200 rpm. The flexibility of the universal joint allowed the operator to apply force stably even from the side of the chamber. A two-step method of rough and fine finishing was used: first, a 400# oilstone was used to repair for 5 minutes to remove obvious scratches (approximately 0.05 mm deep), and then a 1500# oilstone was used for fine finishing for 3 minutes. The total repair time was controlled within 40 minutes, and the repaired cutting edge was free of burrs and flanging, with flatness meeting vacuum sealing standards.
[0034] Example 3: Precision Drive Mode for Micromotors like Figures 3 to 5 As shown, for ultra-high vacuum (10⁻ 9 This scientific experimental equipment, requiring extremely high precision (on the order of Pa), employs a micro-motor drive system. This system is coaxially connected to drive flange 6. The operator sets the speed to 500 rpm (constant torque) during the roughing stage on the control panel, and reduces the speed to 150 rpm during the finishing stage. The micro-motor provides extremely stable speed output, eliminating micro-ripples that may occur due to uneven speed in manual cranking. In this embodiment, the surface roughness of the repaired cutting edge consistently reaches Ra0.12 μm, and the cutting edge morphology exhibits excellent consistency.
[0035] Working principle description The overall working logic and physical process of the present invention will be systematically described below with reference to the accompanying drawings.
[0036] After the entire repair device is placed into the first vacuum chamber 1 to be repaired, an assembly gap is pre-made between the positioning sleeve 11 and the inner wall of the chamber. The operator tightens the positioning locking bolt 12, which, under the axial constraint of the locking nut 13, converts the rotational motion into a downward linear thrust. This thrust is transmitted to the one-dimensional locking sleeve 15, forcing it to slide downward within the groove of the positioning sleeve 11.
[0037] As the one-dimensional locking sleeve 15 descends, it pushes the locking push rod 14 to move outward along the radial channel of the positioning sleeve 11. Multiple locking push rods 14 extend outward simultaneously, uniformly squeezing the cylinder wall of the positioning sleeve 11, causing it to undergo controllable elastic expansion deformation, and finally forming a multi-point contact, gapless static friction locking state with the inner wall surface of the first vacuum chamber 1.
[0038] The expansion and locking process simultaneously achieves three functions: First, it firmly fixes the entire repair device inside the chamber, resisting the circumferential torque and radial vibration generated by subsequent grinding operations; second, by utilizing the coaxial fit between the positioning sleeve 11 and the outer ring of the high-precision bearing 10, it forcibly constrains the rotation plane of the contoured blade repair piece 16 to remain absolutely parallel to the end face of the sealing blade to be repaired; third, since the locking force is applied to the inner wall of the chamber, it avoids applying additional stress to the external flange surface, thus protecting the overall structural precision of the vacuum chamber.
[0039] The high-precision bearing 10 divides the device into a fixed part and a rotating part. The fixed part includes a positioning sleeve 11, a locking push rod 14, and related components that lock with the inner wall of the cavity; the rotating part includes a lower locking flange 9, an upper locking flange 7, a contour knife edge repair piece 16, and a drive flange 6.
[0040] When the operator rotates the ratchet rocker arm 5 or starts the micro-motor drive system, the drive flange 6 drives the upper locking flange 7 to rotate synchronously, and transmits the rotational motion to the lower locking flange 9 through the fastening bolt assembly 8. Because the inner hole of the lower locking flange 9 is interference-fitted with the inner ring of the high-precision bearing 10, its rotation axis coincides with the bearing's rotation axis and the geometric center of the sealing blade on the same straight line in space.
[0041] The contoured repair piece 16, fixed within the slot of the lower locking flange 9, slides continuously along the circumferential direction of the sealing blade under the drive of the centering rotary motion. The working surface of the repair piece is pre-machined into an arc-shaped or wedge-shaped surface complementary to the theoretical geometry of the sealing blade. Therefore, during rotation, the repair piece and the blade surface maintain a contoured fit in surface or line contact. At this time, the movement trajectory of the repair piece relative to the blade is a concentric arc centered on the blade's center, meaning its cutting direction is always perpendicular to the radial section of the blade.
[0042] The contour-following tool edge repair piece 16 is made of diamond or cubic boron nitride precision oilstone, with regularly distributed hard abrasive grains fixed on its surface. During rotary grinding, the operator applies normal pressure (i.e., pressure perpendicular to the sealing tool edge surface) to the repair piece via ratchet lever 5 or the drive system. This pressure causes the oilstone abrasive grains to penetrate the tool edge surface material with a certain depth of cut.
[0043] As the repair piece slides circumferentially, the abrasive grains, under the combined action of normal pressure and tangential motion, produce a micro-cutting and plowing effect on the cutting edge surface. For raised serrated cutting edges or scratch edges, the abrasive grains compress and shear with a negative rake angle, removing the protruding material in the form of fine chips; for the recessed scratch valleys, the abrasive grains only perform slight polishing without cutting, thereby gradually reducing the micro-unevenness of the cutting edge surface.
[0044] Since the rotational motion ensures that the probability and amount of cutting at each point in the circumferential direction are completely uniform, and the contoured surface ensures that the repaired contour of each point on the radial section is completely consistent with the original design contour, the repair effect is macroscopically manifested as an overall downward movement, that is, uniformly removing a layer of defects on the surface of the cutting edge, while completely preserving its original geometric angles and R0.1mm fillet features.
[0045] This invention employs a phased strategy of roughing and finishing. In the roughing stage, a larger-grained (200#-600#) oilstone is used. The large abrasive grain size and ample chip space enable a high material removal rate (approximately 0.01-0.02 mm / brush), quickly eliminating deep defects. In the finishing stage, a finer-grained (800#-2000#) oilstone is used. The finer abrasive grains and shallower cutting depth primarily produce polishing and plastic flow effects, eliminating microscopic scratches left by the roughing stage and ultimately achieving a mirror-like surface quality (Ra≤0.2μm).
[0046] To address space constraints in various on-site working conditions, this invention features two power input modes: a manual mode, directly driven by a ratchet rocker arm 5, suitable for open spaces and small-scale repairs, where the operator can sense changes in cutting resistance in real time; and an automatic mode, connected to a portable electric drill via a universal flexible shaft. The flexible shaft's adaptability allows the operator to apply force from a non-linear field of vision, adapting to confined or irregularly shaped chambers. Both modes share the same rotary motion chain, ensuring consistent repair accuracy.
[0047] Instructions for replacing the contour knife edge repair piece 16: When it is necessary to replace the contour knife edge repair piece 16 with one of different grit sizes, simply loosen the set bolts on the side of the locking flange 9, remove the original repair piece from the slot, insert the new repair piece, and then tighten it. The operation is extremely convenient.
Claims
1. A device for repairing defects in the sealing knife edge of a vacuum flange, characterized in that: It includes a positioning sleeve (11), a positioning locking bolt (12), a locking nut (13), a locking push rod (14), a one-dimensional locking sleeve (15), a high-precision bearing (10), a lower locking flange (9), an upper locking flange (7), a fastening bolt assembly (8), a contour knife edge repair piece (16), a drive flange (6), and a ratchet rocker arm (5); The positioning sleeve (11) is pressed and locked against the inner wall side of the vacuum chamber. The two ends of the locking push rod (14) are respectively hinged to the positioning sleeve (11) and the one-dimensional locking sleeve (15). The one-dimensional locking sleeve (15) realizes one-dimensional movement by using the slot on the positioning sleeve (11) and the rotational thrust of the positioning locking bolt (12). The positioning locking bolt (12) is connected with the locking nut (13). The locking nut (13) is installed in the slot of the positioning sleeve (11). The outer ring of the high-precision bearing (10) is connected to the positioning sleeve (11), and the inner ring of the high-precision bearing (10) is connected to the lower locking flange (9). The contoured blade repair piece (16) is installed in the groove on the upper surface of the lower locking flange (9), the upper locking flange (7) is installed in the stop of the lower locking flange (9), and the fastening bolt component (8) passes through the connecting hole of the upper locking flange (7) and is fastened to the threaded hole on the lower locking flange (9). The drive flange (6) is fastened to the external thread on the upper locking flange (7) by the internal thread, and the ratchet rocker arm (5) is installed on the drive flange (6) to drive the repair device to rotate around the high-precision bearing (10).
2. The device for repairing defects in the sealing knife edge of a vacuum flange according to claim 1, characterized in that: It also includes a set bolt disposed on the side of the lower locking flange (9); the contour knife edge repair piece (16) is a precision whetstone, which is pressed and fixed in the fixing groove of the lower locking flange (9) by the set bolt, and the contour knife edge repair piece (16) extends beyond the bottom end face of the lower locking flange (9).
3. The device for repairing defects in the sealing knife edge of a vacuum flange according to claim 2, characterized in that: The precision oilstone is a diamond abrasive or a cubic boron nitride abrasive, with a particle size range of 200# to 2000#.
4. The device for repairing defects in the sealing knife edge of a vacuum flange according to claim 1, characterized in that: The grinding surface of the contoured blade repair piece (16) is an arc-shaped surface or a wedge-shaped surface.
5. The device for repairing defects in the sealing knife edge of a vacuum flange according to claim 1, characterized in that: The drive flange (6) has a connection hole for connecting a universal flexible shaft and a portable power source.
6. The device for repairing defects in the sealing knife edge of a vacuum flange according to claim 1, characterized in that: It also includes a micro motor drive system, which is connected to the drive flange (6) and has an adjustable speed range of 100-1000 rpm.
7. A method for repairing defects in the sealing knife edge of a vacuum flange using the apparatus according to any one of claims 1 to 6, characterized in that, Includes the following steps: Step 1: Insert the repair device into the vacuum chamber through the positioning sleeve (11) so that the contoured blade repair piece (16) contacts the sealing blade to be repaired; Step 2: Manually tighten the positioning locking bolt (12). The positioning locking bolt (12) moves downward, driving the one-dimensional locking sleeve (15) to slide along the slot. The locking push rod (14) pushes the positioning sleeve (11) radially outward, so that the positioning sleeve (11) expands and locks with the inner wall of the vacuum chamber, and ensures that the rotation surface of the contour knife edge repair piece (16) is parallel to the sealing knife edge repair surface. Step 3: Install the drive flange (6) and the ratchet rocker arm (5) onto the upper locking flange (7); Step 4: Rotate the ratchet rocker (5) to make the contoured blade repair piece (16) rotate radially around the center of the sealing blade. By controlling the normal pressure and rotation speed, the defect layer on the blade surface is removed, and the geometry of the sealing blade is reshaped.
8. A device for repairing defects in the sealing knife edge of a vacuum flange according to claim 7, characterized in that: In step four, a multi-stage repair is adopted. In the coarse repair stage, a contoured knife-edge repair piece (16) with a particle size of 200#-600# is used to remove defects. In the fine repair stage, a contoured knife-edge repair piece (16) with a particle size of 800#-2000# is used for surface finishing.
9. A device for repairing defects in the sealing knife edge of a vacuum flange according to claim 7, characterized in that: In step four, the manual mode is used, that is, the ratchet rocker (5) is operated directly for repair.
10. A device for repairing defects in the sealing knife edge of a vacuum flange according to claim 7, characterized in that: In step four, an automatic mode is used, that is, the drive flange (6) is connected to the portable electric drill via a universal flexible shaft for power drive.