Abrasive impact shaping device and method

Abstract

The application relates to the technical field of semiconductor processing, and provides an abrasive impact shaping device and method, wherein the device comprises a body, the inside of the body is provided with a flow channel extending along a preset track, two ends of the flow channel are respectively provided with an inlet and an outlet; a plurality of cutting structures are located on the inner wall of the bending part of the flow channel; a feeding assembly is connected to the inlet and used for supplying abrasives; a first gas supply assembly is connected to the inlet and used for spraying compressed gas into the flow channel to drive the abrasives to move along the flow channel, and the abrasives are discharged through the outlet after impact collision with the cutting structures. The abrasives are driven by airflow to repeatedly impact and collide with the cutting structures at the bending part of the flow channel along the flow channel extending along the preset track, so that micro cutting edges are formed on the surface, the shape limitation is broken through, and the cutting value of the abrasives is further improved.

Description

Technical Field

[0001] This application relates to the field of abrasive processing technology, and in particular to an abrasive impact shaping device and method. Background Technology

[0002] Chemical mechanical polishing (CMP) achieves wafer surface planarization by combining chemical etching and mechanical abrasion. During the abrasion process, the polishing pad becomes passivated due to compression and debris clogging, leading to a decrease in polishing efficiency. A dresser is used to maintain the surface activity and flatness of the polishing pad. It is manufactured by fixing diamond abrasive onto the substrate through electroplating, sintering, or physical vapor deposition (PVD). The high hardness of the diamond abrasive allows it to mechanically scrape away the passivation layer on the surface of the polishing pad, removing embedded debris and restoring the pad's polishing capability.

[0003] Currently, the main method to improve the cutting value of diamond is shape sorting, which involves selecting blocky and equal-volume particles according to different shapes (i.e., shape grades) and removing needle-shaped and flaky particles, thereby improving the overall cutting performance. However, the limitation of this method is that once the diamond has been sorted into the same shape (i.e., the shape is close to uniform), it is impossible to further improve its cutting value through shape sorting.

[0004] It should be noted that the above problem is not unique to corundum. Other abrasives such as diamond, cubic boron nitride (CBN), and corundum also face the problem that the cutting value cannot be further improved after shape selection.

[0005] Therefore, how to overcome the limitations of shape and further improve the cutting value of abrasive within the same shape is a technical problem that urgently needs to be solved by those skilled in the art. Summary of the Invention

[0006] This application provides an abrasive impact shaping device and method, which uses airflow to drive the abrasive to repeatedly impact and collide with the cutting structure at the bend of the flow channel within a flow channel that extends along a preset trajectory, so as to form a micro-cutting edge on the surface, thereby breaking through the shape limitation and further improving the cutting value of the abrasive.

[0007] The technical solution adopted in this application is as follows: In a first aspect, an abrasive impact shaping apparatus is provided, the apparatus comprising: The main body has an internal flow channel that bends and extends along a preset trajectory, and the two ends of the flow channel are respectively provided with a feed inlet and a discharge outlet; Multiple cutting structures are located on the inner wall of the bend in the flow channel; A feeding assembly, connected to the feed inlet, is used to supply abrasive; The first air supply component is connected to the feed port and is used to inject compressed gas into the flow channel to drive the abrasive to move along the flow channel. After the abrasive impacts and collides with the cutting structure, it is discharged through the discharge port.

[0008] Preferably, the bends in the flow channel are provided with openings; The device also includes a cover plate that covers the body. The bottom surface of the cover plate is provided with a plurality of cutting structures, and the cutting structures are arranged opposite to the opening.

[0009] Preferably, the cutting structure includes a plurality of uniformly arranged protrusions, the end of which facing the interior of the flow channel is tapered, toothed, or blade-shaped.

[0010] Preferably, the feeding assembly includes a hopper, which is disposed on the body, and the discharge end of the hopper is connected to the inlet.

[0011] Preferably, the first air supply component includes a jet nozzle, the air inlet of which is connected to a compressed air source, and the air outlet is connected to the feed inlet and the discharge end of the hopper, respectively.

[0012] Preferably, the device further includes a filter assembly connected to the air inlet end of the jet nozzle.

[0013] Preferably, the device further includes a vibration component disposed on the body for driving the body to vibrate so as to cause the abrasive to vibrate within the flow channel.

[0014] Preferably, the vibration assembly includes a pneumatic vibrator and a second air supply assembly, wherein the second air supply assembly is used to supply air to the pneumatic vibrator to drive the pneumatic vibrator to vibrate.

[0015] Preferably, the device further includes a detection component and a controller. The detection component is used to detect the cutting value of the impact-shaped abrasive. The controller is electrically connected to the detection component, the first air supply component, and the vibration component, respectively, and is used to adjust the pressure of the compressed gas and the vibration frequency of the vibration component according to the cutting value.

[0016] In a second aspect, a method for impact-shaping abrasives is provided, the method comprising: Abrasive is supplied into the flow channel that bends and extends along a preset trajectory; Compressed gas is injected into the flow channel to drive the abrasive to move along the flow channel, causing the abrasive to impact and collide with the cutting structure located on the inner wall of the bend of the flow channel. The impact-shaped abrasive is discharged from the flow channel.

[0017] According to the specific embodiments provided in this application, the following technical effects are disclosed: This application provides an abrasive impact shaping device and method. The device includes a body with an internal flow channel extending along a preset trajectory. The flow channel has an inlet and an outlet at its two ends. Multiple cutting structures are located on the inner wall of the flow channel's bends. A feeding assembly connected to the inlet supplies abrasive. A first air supply assembly connected to the inlet injects compressed gas into the flow channel to drive the abrasive along the flow channel. After impacting and colliding with the cutting structures, the abrasive is discharged through the outlet. This application uses airflow to drive the abrasive to move at high speed within the flow channel, causing repeated impacts and collisions with the cutting structures at the flow channel bends. This forms microscopic cutting edges on the abrasive surface, further improving the abrasive's cutting value. The bend in the flow channel causes the abrasive to continuously change its direction of movement, increasing the chance of collision with the cutting structures and thus improving the overall shaping effect of the abrasive. Attached Figure Description

[0018] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0019] Figure 1 This is an overall schematic diagram of the abrasive impact shaping device provided in the embodiments of this application; Figure 2 This is a side view schematic diagram of the abrasive impact shaping device provided in the embodiments of this application; Figure 3 This is a cross-sectional schematic diagram of the abrasive impact shaping device provided in the embodiments of this application; Figure 4 This is a schematic diagram of the structure of the body provided in the embodiments of this application; Figure 5 This is a schematic diagram showing the cutting structure and the opening at the peak of the flow channel provided in the embodiments of this application being arranged opposite each other; Figure 6 This is a flowchart of the abrasive impact shaping method provided in the embodiments of this application.

[0020] Figure label: 1. Body; 10. Flow channel; 11. Connecting channel; 100. Inlet; 101. Outlet; 102. Crest; 103. Trough; 104. Opening; 2. Cutting structure; 20. Protrusion; 3. Feeding assembly; 30. Hopper; 300. Discharge structure; 301. Sealing cover; 4. First air supply assembly; 40. Jet nozzle; 41. First valve body; 42. Second valve body; 5. Vibration assembly; 50. Pneumatic vibrator; 51. Second air supply assembly; 510. Air inlet pipe; 511. Air outlet pipe; 512. Third valve body; 513. Fourth valve body; 6. Cover plate; 7. Filter components; 8. Guide components; 9. Mounting bracket. Detailed Implementation

[0021] To make the objectives, technical solutions, and advantages of this application clearer, the technical solutions in the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. Based on the embodiments in this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0022] As described in the background section, the main method to improve the cutting value of diamond is shape sorting, which involves selecting blocky and equal-volume particles according to different shapes (i.e., shape grades) and removing needle-shaped and flaky particles, thereby improving the overall cutting performance. However, the limitation of this method is that once the diamond has been sorted into the same shape (i.e., the shape is close to uniform), it is impossible to further improve its cutting value through shape sorting.

[0023] Based on this, this application provides an abrasive impact shaping device and method, which aims to solve the problem in the prior art that abrasives cannot break through shape limitations to further improve cutting values.

[0024] The embodiments of this application will be analyzed in detail below with reference to the accompanying drawings.

[0025] Example 1 refer to Figures 1 to 3 The abrasive impact shaping device provided in this embodiment includes: a body 1, the interior of which is provided with a flow channel 10 extending along a preset trajectory, and the two ends of the flow channel 10 are respectively provided with an inlet 100 and an outlet 101; multiple cutting structures 2, located on the inner wall of the bend of the flow channel 10; a feeding assembly 3, connected to the inlet 100, for supplying abrasive; and a first air supply assembly 4, connected to the inlet 100, for injecting compressed gas into the flow channel 10 to drive the abrasive to move along the flow channel 10. After the abrasive impacts and collides with the cutting structures 2, it is discharged through the outlet 101.

[0026] The main body 1 serves as the base of the device. It is roughly rectangular in shape, made of metal, and has sufficient strength and rigidity to withstand vibration and airflow impact.

[0027] refer to Figure 3 The cross-sectional view of the flow channel 10 extends along a predetermined trajectory in a wavy pattern, specifically with bends at the crests 102 and troughs 103. The cutting structure 2 is exemplarily positioned at the crest 102. This design, on the one hand, causes the abrasive to continuously change direction during high-speed movement, increasing the collision opportunities between the abrasive and the inner wall of the flow channel 10 and the cutting structure 2, avoiding the problem of limited unidirectional impact and collision frequency inherent in straight flow channels. On the other hand, when the abrasive flows through the crest 102 of the flow channel 10, under the combined action of centrifugal force and airflow deflection, the abrasive tends to deflect towards the outer side of the crest 102 (i.e., the location of the cutting structure 2), thereby increasing the effective collision probability with the cutting structure 2 and making the impact shaping effect more significant. For further examples, refer to... Figure 3 The wavy, curved flow channel 10 has four alternating peaks 102 and troughs 103, with a cutting structure 2 corresponding to each peak 102.

[0028] When the abrasive flows at high speed through the crest 102 of the flow channel 10 under the drive of compressed gas, the abrasive impacts the cutting structure 2 with significant kinetic energy due to the abrupt change in airflow direction and the effect of centrifugal force. The cutting structure 2 has high hardness and sharp protrusions 20, which generate microscopic fragmentation and plastic shearing on the abrasive surface at the moment of impact, thereby forming uniformly distributed microscopic cutting edges on the surface of the abrasive particles. These newly generated cutting edges enhance the cutting ability of the abrasive in the subsequent grinding process, that is, increase the cutting value of the abrasive. In some examples, the cutting structure 2 can be directly fixed to the inner wall of the flow channel 10 and located at the crest 102. In other examples, the cutting structure 2 is set separately from the opening 104 on the flow channel 10, only requiring that the cutting structure 2 and the crest 102 be positioned relative to each other.

[0029] As a preferred embodiment, refer to Figures 1 to 3 The device also includes a vibration component 5, which is located on the body 1 and is used to drive the body 1 to vibrate so as to drive the abrasive to vibrate in the flow channel 10.

[0030] The vibration component 5 serves as an auxiliary vibration element. When the abrasive flows at high speed through the flow channel 10, a large number of particles accumulate and move. The outer layer particles directly impact and collide with the cutting structure 2, while the inner layer particles are encased within the material flow and difficult to expose for collision. The vibration component 5 drives the body 1 to vibrate, causing the abrasive within the flow channel 10 to shake and rearrange. Particles originally gathered in the inner layer are brought to the surface, increasing the probability of effective collision with the cutting structure 2. This results in more particles being impact-shaped, further improving the overall cutting value of the abrasive. It should be noted that within a reasonable vibration range, the higher the vibration frequency applied by the vibration component 5, the more intense the shaking and rearrangement of the abrasive, the faster the inner layer particles are brought to the surface, the more effective collisions with the cutting structure 2 per unit time, and the better the impact-shaped effect.

[0031] The first air supply assembly 4 is connected to a compressed air source. Compressed gas is injected at high speed through its inlet, forming a high-speed airflow near the outlet. According to Bernoulli's principle, the high-speed flowing gas creates a low-pressure zone around it. This low-pressure zone, based on the negative pressure effect, draws the abrasive from the feeding assembly 3 into the airflow. The abrasive is then fed into the flow channel 10 along with the compressed gas. In this way, the first air supply assembly 4 achieves continuous and controllable delivery of the abrasive and provides the power for the high-speed impact collision between the abrasive and the cutting structure 2 in the subsequent flow channel 10.

[0032] As an example, the gas source of the compressed gas includes, but is not limited to, compressed air, nitrogen, or inert gases such as argon.

[0033] In summary, this embodiment 1 uses airflow to drive the abrasive to move at high speed within the flow channel, causing it to repeatedly impact and collide with the cutting structure at the crest of the flow channel, thereby forming a micro-cutting edge on the abrasive surface and further improving the cutting value of the abrasive; the flow channel is designed with a wavy, curved shape, which causes the abrasive to constantly change its direction of movement, increasing the chance of collision with the cutting structure, thereby improving the overall shaping effect of the abrasive.

[0034] As a preferred embodiment, refer to Figures 3 to 5 The flow channel 10 has an opening 104 at the bend; the device also includes a cover plate 6, which covers the body 1. The bottom surface of the cover plate 6 has a plurality of cutting structures 2, and the cutting structures 2 are arranged opposite to the opening 104.

[0035] The cover plate 6 and the body 1 are designed separately. The cutting structure 2 is detachably installed on the bottom surface of the cover plate 6, which makes it easy to replace the corresponding type of cutting structure 2 according to the abrasive with different shapes. At the same time, in the multi-stage impact forming process, when the cutting structure 2 is worn, only the cutting structure 2 needs to be replaced, without replacing the cover plate 6, thus reducing maintenance costs.

[0036] As an example, see reference Figure 4The wavy, curved flow channel 10 has four alternating crests 102 and troughs 103 to form the bends of the flow channel 10, wherein each crest 102 is provided with a corresponding opening 104; Reference Figure 5 When the cover plate 6 is closed on the body 1, the cutting structure 2 is positioned opposite to the opening 104. The bottom surface of the cover plate 6 has a groove structure, the cutting structure 2 is located in the groove structure, and the end face of the protrusion 20 of the cutting structure 2 is flush with the bottom surface of the cover plate 6.

[0037] As a preferred embodiment, refer to Figure 5 The cutting structure 2 includes a plurality of uniformly arranged protrusions 20, and one end of the protrusions 20 facing the interior of the flow channel 10 is tapered, toothed or blade-shaped.

[0038] Among them, conical protrusions are suitable for blocky abrasives with high hardness and large particle size; the conical end generates point contact impact, forming tiny pits or microcracks on the abrasive surface, increasing surface roughness and cutting edge. Toothed protrusions are suitable for medium-hardness, equal-volume abrasives; the toothed end resembles the contour of a single gear tooth, generating a concentrated impact upon collision, forming clear scratches or micro-fragmentation bands on the abrasive surface, enhancing cutting ability; blade-shaped protrusions are suitable for abrasives that are already close to equal-volume but still require further finishing; the blade-shaped end generates line contact shearing, forming fine linear cutting edges on the abrasive edge or surface, improving cutting sharpness.

[0039] As a preferred embodiment, refer to Figures 1 to 3 The feeding component 3 includes a hopper 30, which is located on the main body 1. The discharge end of the hopper 30 is connected to the inlet 100.

[0040] As an example, see reference Figures 1 to 3 The bottom of the hopper 30 has an inverted conical discharge structure 300, which can use gravity to allow the abrasive to naturally converge and fall smoothly, avoiding blockage and ensuring the continuity of the supply. The discharge structure 300 is fixed to the top side of the body 1, and its discharge end is directly connected to the feed port 100, shortening the conveying path. The top of the hopper 30 has a movably connected sealing cover 301, which can prevent external impurities from entering, and can be opened when needed to replenish abrasive or clean the inside of the hopper 30.

[0041] As a preferred embodiment, refer to Figures 1 to 3 The first air supply component 4 includes a jet nozzle 40, the air inlet of which is connected to a compressed air source, and the air outlet is connected to the feed inlet 100 and the discharge end of the hopper 30 respectively.

[0042] As an example, see reference Figures 1 to 3The main body 1 also includes a connecting channel 11 located below the hopper 30. The connecting channel 11 has a first end, a second end, and a third end. The first end connects to the air outlet of the jet nozzle 40, the second end connects to the feed inlet 100 of the flow channel 10, and the third end extends upward in a curved shape and connects to the discharge end of the discharge structure 300. The first air supply assembly 4 also includes a first valve body 41 and a second valve body 42. The second valve body 42 controls the on / off state of the compressed air source, and the first valve body 41 regulates the gas pressure entering the jet nozzle 40. Figure 3 Based on this, the second valve body 42 is connected to the compressed air source, and the output compressed gas flows sequentially through the second valve body 42, the first valve body 41, the air inlet and outlet of the jet nozzle 40, the first and second ends of the connecting channel 11, and the feed inlet 100 and the discharge outlet 101 of the flow channel 10; at the same time, the abrasive in the hopper 30 is sucked out under the action of negative pressure, flows through the discharge end of the discharge structure 300, the third and second ends of the connecting channel 11, and the feed inlet 100 of the flow channel 10 into the flow channel 10, and impacts and collides with the cutting structure 2.

[0043] As a preferred embodiment, refer to Figures 1 to 3 The device also includes a filter assembly 7, which is connected to the air inlet of the jet nozzle 40.

[0044] As an example, see reference Figure 1 and Figure 3 The device also includes a mounting base 9, with the main body 1 mounted on the mounting base 9. A filter assembly 7 is mounted on the side plate of the mounting base 9 and is connected between the first valve body 41 and the jet nozzle 40. The filter assembly 7 filters the gas output from the compressed gas source before outputting it to the jet nozzle 40. The filter assembly 7 can be a gas filter, with an internal filter element for removing moisture, oil mist, and solid particulate impurities from the compressed gas, ensuring the cleanliness of the gas entering the jet nozzle 40 and preventing impurities from contaminating the abrasive or clogging the flow channel 10.

[0045] As a preferred embodiment, refer to Figures 1 to 3 The vibration assembly 5 includes a pneumatic vibrator 50 and a second air supply assembly 51. The second air supply assembly 51 is used to supply air to the pneumatic vibrator 50 to drive the pneumatic vibrator 50 to vibrate.

[0046] As an example, see reference Figures 1 to 3 The pneumatic vibrator 50 can be installed on the top surface of the cover plate 6 for easy assembly and disassembly together with the cover plate 6. The second air supply assembly 51 includes an air inlet pipe 510, an air outlet pipe 511, a third valve body 512, and a fourth valve body 513. Figure 3Based on this, the inlet pipe 510 and the outlet pipe 511 are respectively connected to the inlet and outlet ends of the pneumatic vibrator 50. A fourth valve body 513 and a third valve body 512 are sequentially connected to the inlet pipe 510. The fourth valve body 513 controls the on / off state of the compressed air source, and the third valve body 512 regulates the gas pressure entering the pneumatic vibrator 50. The compressed air source can simultaneously supply air to the second air supply assembly 51 and the first air supply assembly 4 (sharing a common air source), or the second air supply assembly 51 and the first air supply assembly 4 can use independent air sources. When the pneumatic vibrator 50 is working, compressed gas enters the interior of the pneumatic vibrator 50 through the inlet pipe 510, driving the built-in piston or ball bearings to reciprocate at high speed, thereby generating mechanical vibration. After the gas completes its work, it is discharged through the outlet pipe 511. By adjusting the opening of the third valve body 512, the inlet pressure and flow rate can be changed, thereby adjusting the vibration frequency and amplitude to meet the needs of abrasive vibration assistance under different working conditions.

[0047] As a preferred embodiment, refer to Figures 1 to 3 The device also includes a guide 8, which is movably connected to the discharge port 101 and is used to guide the impact-shaped abrasive to be output in a preset direction.

[0048] Among them, the movable guide 8 allows the staff to adjust the output direction according to actual needs, guiding the impact-shaped abrasive to fall accurately into the collection container and avoid splashing and scattering.

[0049] In a preferred embodiment, the device further includes a detection component and a controller (both not shown in the figure). The detection component is used to detect the cutting value of the impact-shaped abrasive. The controller is electrically connected to the detection component, the first air supply component 4 and the vibration component 5 respectively, and is used to adjust the pressure of the compressed gas and the vibration frequency of the vibration component 5 according to the cutting value.

[0050] As an example, the detection component can be located at the collection container below the guide 8. After the impact-shaped abrasive is discharged, the detection component collects abrasive samples from the collection container. Using a built-in sensor or optical detection module, it obtains the surface morphology features of the abrasive based on image analysis algorithms or directly calculates the cutting value, generates a detection signal, and sends it to the controller. The controller has a built-in preset target cutting value range and control algorithm. When the received detection signal indicates that the cutting value is below the preset range, the controller determines that the current shaping intensity is insufficient and immediately outputs an adjustment signal to the first air supply component 4 to increase the pressure of the compressed gas, thereby increasing the movement speed and impact kinetic energy of the abrasive; simultaneously, it outputs an adjustment signal to the vibration component 5 to increase the vibration frequency, increasing the probability and collision frequency of inner-layer particles turning to the surface. Conversely, when the cutting value is above the preset range or reaches the target value, the controller can appropriately reduce the gas pressure and vibration frequency to avoid excessive breakage. In this way, the device can adjust the process parameters according to the actual shaping effect, ensuring that the cutting value of the output abrasive remains stable within the target range.

[0051] Example 2 refer to Figure 3 and Figure 6 The abrasive impact shaping method provided in this embodiment includes: S1: Supply abrasive material into the flow channel 10, which bends and extends along a preset trajectory; S2: Compressed gas is injected into the flow channel 10 to drive the abrasive to move along the flow channel 10, so that the abrasive impacts and collides with the cutting structure 2 located on the inner wall of the bend of the flow channel 10. S3: The impact-shaped abrasive is discharged from the flow channel 10.

[0052] The method of this embodiment two can be implemented by the device of embodiment one. The technical effect of the method of this embodiment two is the same as that of the device of embodiment one, and will not be repeated here.

[0053] In the description of this specification, the references to terms such as "one embodiment," "some embodiments," "example," "specific example," or "some examples," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of this application. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples.

[0054] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this application, "multiple" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0055] Although embodiments of this application have been shown and described above, it is understood that the above embodiments are exemplary and should not be construed as limiting this application. Those skilled in the art can make changes, modifications, substitutions and variations to the above embodiments within the scope of this application.

Claims

1. An abrasive impact shaping device, characterized in that, The device includes: The body (1) has a flow channel (10) inside which bends and extends along a preset trajectory. The two ends of the flow channel (10) are respectively provided with an inlet (100) and an outlet (101). Multiple cutting structures (2) are located on the inner wall of the bend in the flow channel (10); The feeding assembly (3), connected to the feed inlet (100), is used to supply abrasive; The first air supply component (4) is connected to the feed port (100) and is used to inject compressed gas into the flow channel (10) to drive the abrasive to move along the flow channel (10). After the abrasive impacts and collides with the cutting structure (2), it is discharged through the discharge port (101).

2. The abrasive impact shaping device according to claim 1, characterized in that, The flow channel (10) has an opening (104) at the bend. The device also includes a cover plate (6) which covers the body (1). The bottom surface of the cover plate (6) is provided with a plurality of cutting structures (2), and the cutting structures (2) are arranged opposite to the opening (104).

3. The abrasive impact shaping device according to claim 1 or 2, characterized in that, The cutting structure (2) includes a plurality of uniformly arranged protrusions (20), one end of which faces the interior of the flow channel (10) and is tapered, toothed or blade-shaped.

4. The abrasive impact shaping device according to claim 1, characterized in that, The feeding assembly (3) includes a hopper (30), which is located on the body (1), and the discharge end of the hopper (30) is connected to the inlet (100).

5. The abrasive impact shaping device according to claim 4, characterized in that, The first air supply component (4) includes a jet nozzle (40), the air inlet of which is connected to a compressed air source, and the air outlet is connected to the feed inlet (100) and the discharge end of the hopper (30) respectively.

6. The abrasive impact shaping device according to claim 5, characterized in that, The device also includes a filter assembly (7) connected to the air inlet of the jet nozzle (40).

7. The abrasive impact shaping device according to claim 1, characterized in that, The device further includes a vibration component (5) disposed on the body (1) for driving the body (1) to vibrate so as to drive the abrasive to vibrate in the flow channel (10).

8. The abrasive impact shaping device according to claim 7, characterized in that, The vibration assembly (5) includes a pneumatic vibrator (50) and a second air supply assembly (51), the second air supply assembly (51) being used to supply air to the pneumatic vibrator (50) to drive the pneumatic vibrator (50) to vibrate.

9. The abrasive impact shaping device according to claim 7 or 8, characterized in that, The device further includes a detection component and a controller. The detection component is used to detect the cutting value of the impact-shaped abrasive. The controller is electrically connected to the detection component, the first air supply component (4), and the vibration component (5) respectively, and is used to adjust the pressure of the compressed gas and the vibration frequency of the vibration component (5) according to the cutting value.

10. A method for abrasive impact shaping, characterized in that, The method includes: Abrasive is supplied into the flow channel (10) that bends and extends along a preset trajectory; Compressed gas is injected into the flow channel (10) to drive the abrasive to move along the flow channel (10), so that the abrasive impacts and collides with the cutting structure (2) located on the inner wall of the bend of the flow channel (10). The impact-shaped abrasive is discharged from the flow channel (10).

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