A device and method for orientation positioning of a crystal before cutting

Abstract

The application relates to the technical field of semiconductor crystal bar processing, and discloses a crystal direction positioning device and method used before crystal bar cutting, which comprises a workbench, the workbench comprises a base, a universal angle position table and a rotating shaft which are sequentially connected along a first direction, the base, the universal angle position table and the rotating shaft rotate around the first direction, one end of the base away from the universal angle position table in the first direction is provided with a crystal bar connecting surface used for connecting with a crystal bar, the crystal bar connecting surface extends along a second direction in an initial state, the universal angle position table is provided with a rotating table surface used for connecting with the base, the rotating table surface is arranged in parallel with the crystal bar connecting surface, and a controller is electrically connected with the universal angle position table and the rotating shaft. The crystal direction positioning device and method used before crystal bar cutting have high adjustment precision, high automation degree and can be widely compatible with crystal orientation measurement of a 15-degree or less wafer deviation angle.

Description

Technical Field

[0001] This invention relates to the technical field of semiconductor silicon crystal rod processing, and in particular to a crystal orientation positioning device and method for crystal rod cutting. Background Technology

[0002] In the processing of semiconductor and optoelectronic materials (such as silicon and gallium arsenide), crystal orientation measurement is a critical prerequisite process that determines the quality of subsequent processing. Positioning deviations can easily lead to the scrapping of the entire crystal ingot. Currently, X-ray diffraction equipment is widely used in the industry for crystal orientation positioning.

[0003] Current crystal orientation methods primarily rely on manual inspection or partially semi-automatic equipment (such as the arc-shaped guide rail peak-finding device disclosed in Chinese patent CN114910496A). However, in large-scale industrial production, existing technologies still have the following drawbacks: 1. Low testing efficiency and poor production line integration: Traditional methods rely heavily on manual labor, and peak alignment of a single crystal rod often takes several hours.

[0004] 2. Reliance on manual operation and poor positioning consistency: Manual fine-tuning or manual judgment of signal peak values ​​introduces uncontrollable human error, resulting in poor crystal orientation positioning consistency within the same batch and a high risk of product scrap.

[0005] 3. Extremely narrow angle compatibility: Existing manual and conventional testing equipment is generally only suitable for crystal rods with a crystal orientation of 0 degrees. When dealing with new devices (such as gallium arsenide) that require specific deflection angles of 0-15 degrees, existing equipment is not compatible, requiring the purchase of specialized machines, which increases production costs. Summary of the Invention

[0006] The invention aims to address at least one of the technical problems existing in the prior art. It provides a crystal orientation positioning device and method for crystal rod cutting, featuring high adjustment accuracy, high automation, and broad compatibility with crystal orientation measurements of wafer offset angles up to 15°.

[0007] To achieve the above objectives, the present invention provides a method for crystal orientation positioning before crystal rod cutting, comprising the following steps: Crystal rod fixing: Fix the crystal rod and make the end face of the crystal rod to be tested face towards the detection component; Pre-detection steps: Obtain the Bragg angle and required synthesis angle θ1 of the crystal rod to determine the preset receiving angle a2 of the detection component, and rotate the rotating stage towards the detection stage surface by an initial tilt angle b1, wherein the initial tilt angle b1 is equal to the required synthesis angle θ1; Distance adjustment: The intersection of the ray paths of the transmitter and the receiver is used as the measurement point, which is then positioned on the end face to be measured. Coarse crystal orientation detection: The controller drives the rotating shaft to rotate 360° around the first direction. The rotating shaft drives the crystal rod to perform a full-cycle spatial rotation scan, collect diffraction intensity signals and obtain the crystal orientation corresponding to the four first diffraction peaks. Precise crystal orientation detection: The measurement points of the detection component are respectively positioned at the crystal orientation corresponding to the four first diffraction peaks, the preset receiving angle α2 of the detection component is adjusted synchronously, and the actual receiving angles α1, α2, β1 and β2 of the detection component at the four second diffraction peaks are obtained respectively. Crystal orientation adjustment: The actual synthesis bias angle θ2 of the crystal rod is calculated, and the difference between the actual synthesis bias angle θ2 and the required synthesis angle θ1 is compared.

[0008] As a preferred embodiment, in the coarse crystal orientation detection step, the controller controls the rotating shaft to rotate at a first rotational speed. In the fine crystal orientation detection step, after the measurement point is positioned at the crystal orientation, the controller controls the rotating shaft to drive the crystal rod to reciprocate within a preset angle b2 at a second rotational speed. The receiver pauses rotation at the point where it receives the maximum current signal and simultaneously swings the transmitter and receiver. The first rotational speed is greater than the second rotational speed.

[0009] As a preferred embodiment, the first rotational speed is set to 8° / second - 10° / second, and the second rotational speed is set to 0.2° / second - 0.8° / second.

[0010] As a preferred embodiment, the preset angle b2 is set between 5° and 10°.

[0011] As a preferred embodiment, in the crystal orientation detection step, the swing amplitude of the preset receiving angle α2 of the detection component is set to ±3°.

[0012] As a preferred embodiment, in the distance adjustment step, the distance data L1 between the measurement point and the end face to be measured is obtained by a distance sensor on the detection platform, and the distance between the measurement point and the end face to be measured is adjusted according to the distance data L1.

[0013] As a preferred embodiment, in the pre-detection step, when the crystal rod material has multiple Bragg angles, the preset receiving angle a2 is adjusted to be equal to one of the Bragg angles, and the initial tilt angle b1 is equal to the required synthesis angle θ1. Then, the coarse crystal orientation detection step is entered to obtain the crystal orientation corresponding to the first diffraction peak. Then, the pre-detection step is entered again, and the preset incident angle a1 and the receiving angle a2 are both adjusted to be equal to another Bragg angle. The direction between the rotating stage and the detection stage remains unchanged. Then, the coarse crystal orientation detection step is entered to continue obtaining the crystal orientation corresponding to the remaining first diffraction peaks.

[0014] As a preferred embodiment, in the distance adjustment step, the radial distance from the measurement point to the center of the end face to be measured is less than the radius of the end face to be measured.

[0015] A crystal orientation positioning device for crystal rod cutting has a first direction and a second direction that are perpendicular to each other. The device includes a worktable, which comprises a base, a universal angle positioning platform, and a rotating shaft connected sequentially along the first direction. The base, the universal angle positioning platform, and the rotating shaft rotate around the first direction. The base has a crystal rod connection surface at one end of the first direction away from the universal angle positioning platform for connecting with a crystal rod. The universal angle positioning platform has a rotating platform for connecting with the base. The rotating platform is parallel to the crystal rod connection surface. A controller is electrically connected to both the universal angle positioning platform and the rotating shaft.

[0016] As a preferred embodiment, a detection assembly is included, comprising a detection platform, a controller, a lifting mechanism, and a transmitter, a receiver, and a distance sensor respectively connected to the detection platform. The distance sensor has a distance detection direction in a first direction, the lifting mechanism is configured to move up and down along the first direction, the detection platform is connected to the lifting mechanism to move along the first direction, the distance sensor is used to measure the distance between the end face of the crystal rod to be tested and the measurement point, the transmitter has a transmission direction for transmitting detection signals, the receiver has a reception direction for receiving detection signals, the transmission direction and the first direction form a preset incident angle α1, the reception direction and the distance sensor form a reception angle α2, and the transmission direction and the reception direction intersect at the measurement point, and the controller is electrically connected to the transmitter, the receiver, and the distance sensor.

[0017] Compared with existing technologies, the crystal orientation positioning device and method of this invention for crystal rod cutting has the following advantages: The worktable includes a base, a universal angle positioning stage, and a rotating shaft. The base, universal angle positioning stage, and rotating shaft are sequentially connected and fixed along a first direction. The base is used to support the crystal rod, the rotating shaft is used to drive the crystal rod to rotate 360 ​​degrees, and the universal angle positioning stage is used to adjust the spatial tilt attitude of the crystal rod. The detection component is located above the worktable, and the lifting mechanism drives the detection table surface to rise and fall along the first direction. The X-ray emitter and receiver can swing relative to each other on both sides of the distance sensor. The distance sensor is used to measure the distance between the end face of the crystal rod to be measured and the measurement point. The controller is electrically connected to the emitter, receiver, distance sensor, universal angle positioning stage, and rotating shaft, thereby realizing laser focusing, global coarse orientation finding, micro-amplitude swing fine measurement, differential depolarization calculation, and driving the attitude adjustment of the universal angle positioning stage. The universal angular stage's rotating platform and the crystal rod's connecting surface are initially parallel, allowing for arbitrary angle deflection compensation of the crystal rod's orientation in space before cutting and inspection. This enables the device to not only be compatible with traditional crystal orientations but also to position crystal rods with specific composite deflection angles (such as gallium arsenide and other special semiconductor materials), achieving multi-purpose functionality and reducing the fixed costs for companies replacing equipment for different products. A distance sensor is connected to the inspection platform, which in turn is connected to the lifting mechanism. The inspection platform moves the distance sensor along a first direction, allowing it to detect the relative position of the crystal rod's test end face in real time. The controller, based on feedback signals, drives the lifting mechanism to dynamically move the inspection platform along the first direction, ensuring that the X-ray focus point, i.e., the measurement point, always falls on the test end face of the crystal rod. This dynamic focusing mechanism eliminates geometric errors caused by workpiece size differences or improper placement, guaranteeing the intensity and reliability of the X-ray diffraction signal from a physical source. A rotating axis revolves around a first direction, with the base connected to the crystal rod at the end opposite the universal angle positioning stage. After the universal angle positioning stage completes initial tilt angle compensation, the rotating axis can drive the crystal rod to rotate continuously or in steps. Combined with the pre-set emitter and receiver angles on the detection stage, the device captures multiple maximum diffraction signals on the same circumference during rotation. This structure is adapted to a 360-degree flip differential algorithm, which can filter mechanical concentricity deviations and zero-position errors, ensuring consistent crystal orientation positioning and reducing the risk of scrapping the entire crystal rod. The entire device forms a complete automated closed-loop control system, eliminating the outdated mode of frequent manual intervention and manual search for the maximum signal required by traditional equipment. It reduces the positioning time of a single crystal rod from several hours to minutes, improving overall processing cycle time and production efficiency. Attached Figure Description

[0018] Figure 1 This is a schematic diagram of the overall structure of an embodiment of the present invention.

[0019] Figure 2This is a schematic diagram of the crystal orientation structure of the crystal rod in an embodiment of the present invention.

[0020] Figure 3 This is a schematic diagram of the rotation structure of the crystal rod at a preset angle b2 according to an embodiment of the present invention.

[0021] Figure 4 This is a side view of the overall structure of an embodiment of the present invention.

[0022] Figure 5 This is a schematic diagram of the structure where the measurement point is located on the end face to be measured according to an embodiment of the present invention.

[0023] Figure 6 This is a schematic diagram of the structure of the crystal rod in the initial state and after rotating at the initial tilt angle b1 according to an embodiment of the present invention.

[0024] Figure 7 This is a crystal orientation waveform diagram of the four first diffraction peaks in the coarse crystal orientation detection step of an embodiment of the present invention.

[0025] In the picture: 10. Detection component; 11. Detection platform; 12. Controller; 13. Lifting mechanism; 14. Transmitter; 15. Receiver; 16. Measuring point; 17. Distance sensor; 20. Worktable; 21. Base; 22. Crystal rod connecting surface; 23. Universal corner stage; 24. Rotating table; 25. Rotation axis; 30. Crystal rod; 31. End face to be tested; H, first direction; F, second direction; Detailed Implementation

[0026] The specific embodiments of the present invention will be described in further detail below with reference to the accompanying drawings and examples. The following examples are for illustrative purposes only and are not intended to limit the scope of the invention.

[0027] In the description of this invention, it should be understood that the terms "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," and "outer" used to indicate orientation or positional relationships are based on the orientation or positional relationships shown in the accompanying drawings and are only for the convenience of describing this invention and simplifying the description, and are not intended to indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this invention.

[0028] In the description of this invention, it should be understood that the terms "connected," "linked," and "fixed," etc., used in this invention should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or a welded connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components, unless otherwise explicitly defined. Those skilled in the art can understand the specific meaning of the above terms in this invention according to the specific circumstances.

[0029] A method for crystal orientation positioning before crystal rod cutting, comprising the following steps: Crystal orientation positioning of crystal rod 30 before cutting using a crystal orientation positioning device. Crystal rod fixing, such as Figure 1 and Figure 3 As shown, the crystal rod 30 is fixed with the test end face 31 of the crystal rod 30 facing the detection component 10. One end of the crystal rod 30 is connected to the crystal rod connection surface 22, and the other end is the test end face 31, which faces the detection component 10. Pre-testing steps, such as Figure 5 As shown, the Bragg angle and required synthesis angle θ1 of the crystal rod 30 are obtained to determine the preset receiving angle a2 of the detection component 10. The rotating stage 24 is rotated towards the detection stage 11 by an initial tilt angle b1, wherein the initial tilt angle b1 is equal to the required synthesis angle θ1. The Bragg angle and required synthesis angle θ1 are obtained according to the material of the crystal rod 30. The preset incident angle a1 and receiving angle a2 are both adjusted to be equal to the Bragg angle corresponding to the material of the crystal rod 30. In the initial state, the crystal rod connecting surface 22 and the detection stage 11 are perpendicular to each other, and the rotating stage 24 and the detection stage 11 are perpendicular to each other. The rotating stage 24 is rotated towards the detection stage 11 by an initial tilt angle b1, wherein the initial tilt angle b1 is equal to the required synthesis angle θ1. Distance adjustment steps, such as Figure 4 As shown, the intersection of the ray paths of transmitter 14 and receiver 15 is the measurement point 16, and the measurement point 16 is positioned on the end face 31 to be measured. Coarse grain orientation detection, such as Figure 2 , Figure 3 as well as Figure 7 As shown, the controller 12 drives the rotating shaft 25 to rotate 360° around the first direction H. The rotating shaft 25 drives the crystal rod 30 to perform a full-cycle spatial rotation scan, acquiring diffraction intensity signals and obtaining the crystal orientations corresponding to the four first diffraction peaks. The controller 12 controls the rotating shaft 25 to rotate the crystal rod 30, and the receiver 15 acquires the diffraction intensity signals and obtains the crystal orientations corresponding to the four first diffraction peaks; these four crystal orientations are respectively... Figures 2 to 3 X1, X2, Y1, and Y2 are shown in the diagram. After rotating the crystal rod 30 360 degrees, the result is as follows: Figure 7The crystal orientation waveform diagram shown is provided, where X1=35°, Y1=128°, X2=218°, and Y2=308°.

[0030] Precision crystal orientation detection steps, such as Figure 1 and Figure 2 As shown, the measurement point 16 of the detection component 10 is positioned at the crystal orientation corresponding to the four first diffraction peaks, and the preset receiving angle α2 of the detection component 10 is adjusted synchronously to obtain the actual receiving angles α1, α2, β1, and β2 of the detection component 10 at the four second diffraction peaks. The controller 12 controls the rotating shaft 25 to drive the crystal rod 30 to rotate. When the measurement point 16 is positioned at one of the crystal orientations, the transmitter 14 and receiver 15 are oscillated synchronously. The receiver 15 obtains the actual receiving angle value corresponding to the second diffraction peak. The receivers 15 at the four crystal orientations obtain the actual receiving angles of the second diffraction peaks as α1, α2, β1, and β2, respectively. In the crystal orientation adjustment step, the actual composite bias angle θ2 of the crystal rod 30 is calculated, and the difference between the actual composite bias angle θ2 and the required composite angle θ1 is compared. The obtained α1, α2, β1, and β2 are used to calculate the independent tilt components α and β of the end face of the crystal rod 30 in physical space using a difference formula. Based on the space vector model, the actual composite bias angle θ2 of the crystal rod 30 is calculated, and the difference between the actual composite bias angle θ2 and the required composite angle θ1 is compared. If the actual composite bias angle θ2 does not meet the processing accuracy requirements, the control system automatically drives the rotating stage 24 to rotate towards the detection stage 11 based on the polarity and value of the independent tilt components α and β. After adjustment, the process returns to the fine crystal orientation detection step for retesting until the actual composite bias angle θ2 meets the accuracy requirements of the required composite angle θ1.

[0031] The crystal orientation positioning method of the present invention for crystal rod 30 before cutting involves pre-rotating the rotating stage 24 towards the detection component 10 by an initial tilt angle b1 in the pre-detection step. This crystal orientation positioning method is compatible with large tilt angle measurements of 0-15 degrees. If the crystal plane with a 15-degree tilt angle is directly rotated for peak finding, the diffraction signal is difficult to capture, leading to larger calculation errors. This method compensates for the initial tilt angle b1, pulling the atomic plane with a large tilt in space back to an approximately horizontal state, thus improving the calculation accuracy of the algorithm.

[0032] In the distance adjustment step, the measurement point 16, the intersection of the X-ray paths of emitter 14 and receiver 15, is positioned on the end face 31 to be measured. In actual production, the end face 31 to be measured before cutting may have problems such as poor flatness, cutting tilt, or different lengths of different crystal rods 30. If the measurement point 16 is not on the end face 31 to be measured, the penetration path of the X-ray inside the crystal will be deflected, causing the diffraction peak to drift. The distance adjustment step ensures that the optical focus point of the X-ray is always absolutely locked on the physical surface of the crystal, eliminating the geometric measurement error introduced by the workpiece's form and position tolerances, and laying a physical benchmark for subsequent peak finding.

[0033] First, a coarse crystal orientation detection step involves rotating 360 degrees to acquire four coarse crystal orientations. Then, a fine crystal orientation detection step stops the detector at a specific crystal orientation, and the transmitter 14 and receiver 15 are simultaneously oscillated to obtain high-precision actual receiving angle values ​​(α1, α2, β1, and β2). This hierarchical detection strategy, from coarse to fine, improves detection efficiency. The coarse crystal orientation detection step is used to quickly lock the crystal axis projection direction in three-dimensional space; the fine crystal orientation detection step, through the synchronous fine adjustment of the transmitter 14 and receiver 15 (i.e., oscillating curve scanning), can capture the true Bragg diffraction peak angle at that orientation. This method eliminates spurious crystal peaks and noise signals, ensuring that the acquired α1, α2, β1, and β2 represent the true tilt of the crystal lattice.

[0034] It should be noted that after the rotating platform 24 of the universal angle stage 23 deflects towards the detection component 10 to compensate for the initial tilt angle b1, the universal angle stage 23 synchronously adjusts its attitude during the rotation of the rotating shaft 25. The lifting mechanism 13 drives the detection platform 11 to perform real-time distance compensation, so that the initial tilt angle b1 remains unchanged when the crystal rod 30 rotates, and the distance from the measurement point 16 to the measured end face 31 of the crystal rod 30 remains unchanged. That is, at any step of the entire measurement cycle, as long as the rotating shaft 25 rotates, the attitude of the universal angle stage 23 and the lifting position of the lifting mechanism 13 are automatically adjusted synchronously in real time. The above compensation action only stops when the rotating shaft is completely stationary.

[0035] The crystal orientation adjustment step uses a differential formula to process the data on the opposite sides (α1, α2, β1, and β2) to calculate independent components, and compares the differences based on a space vector model. If the difference exceeds the tolerance, the rotating stage 24 is directly driven to adjust, and automatic retesting is performed until the standard is met. The differential formula addresses the asymmetric error in the clamping of the crystal rod 30, thus solving the problem of the opposite side angles not strictly differing by 180 degrees, and extracting the pure lattice deflection angle. The system directly converts the calculated X and Y space components into the control polarity and step size of the mechanical stage, improving the automation level of the crystal rod 30 orientation.

[0036] Furthermore, such as Figures 2 to 3As shown, in the coarse crystal orientation detection step, the controller 12 controls the rotating shaft 25 to rotate at a first rotational speed. Since the complete 360-degree rotational scanning path of the crystal rod 30 is relatively long, blindly using a low-speed scan across the entire area would be time-consuming. The first rotational speed is greater than the second rotational speed in the fine crystal orientation detection step. Using high-speed operation in the coarse crystal orientation detection step shortens the peak-finding time in useless intervals and improves peak-finding efficiency. In the fine crystal orientation detection step, after finding the accurate angle and positioning the measurement point 16 in the crystal orientation, the controller 12 controls the rotating shaft 25 to drive the crystal rod 30 to reciprocate within a preset angle b2 at a second rotational speed. Measurement is only performed at a reduced speed within the target area, i.e., the preset angle b2, improving the data sampling resolution within this small interval. Simultaneously, the low-speed reciprocating rotation of the crystal rod 30 within the preset angle b2, through multiple cross-comparisons of data crossing peak values, ensures that the rotating shaft 25 ultimately stops precisely at the actual physical extreme point. The receiver 15 pauses its rotation at the point where it receives the maximum current signal, and simultaneously swings the transmitter 14 and receiver 15. The crystal orientation deviation in space includes two dimensions: azimuth deviation and tilt angle deviation, i.e., the deviation in pitch. If the crystal rod 30 is rotated and the receiver 15 is swung simultaneously, their motion errors will overlap, leading to data distortion. In this invention, during fine-tuning, the crystal rod 30 is first brought to an absolute stop at its optimal azimuth position, i.e., a single variable is locked. Then, only the transmitter 14 and receiver 15 are subjected to a small-range swing scan. This separation of azimuth determination and tilt angle measurement avoids vibration interference caused by the movement of heavy-duty mechanisms, improving the accuracy of the final received angles a2, i.e., α1, α2, β1, and β2.

[0037] Furthermore, such as Figures 2 to 3 As shown, the first rotation speed is set at 8° / s-10° / s. During coarse crystal orientation detection, the crystal rod 30 needs to rotate 360 ​​degrees. At a speed of 8°-10° / s, completing one scan takes only 36 to 45 seconds. Compared to the blind scan of traditional equipment that takes several minutes, the first rotation speed ensures a production cycle of 30 minutes for positioning a single crystal rod. Industrial-grade semiconductor crystal rods 30 have a large mass and eccentric torque when eccentrically clamped. If the first rotation speed exceeds 10° / s, centrifugal force and mechanical vibration will increase dramatically, leading to excessive load on the main bearing, equipment resonance, and even loosening of the clamp; if it is below 8° / s, the speed advantage is almost lost. The second rotation speed is set at 0.2° / s-0.8° / s. The peak shape of X-ray diffraction is narrow. If a higher speed is used to pass through this region, due to the inherent electrical signal integration and response delay of the X-ray receiver 15, the collected current peak value will be lower or the peak position will be shifted backward, forming a false peak. The second rotational speed is set at 0.2° / second to 0.8° / second to ensure data sampling density, lock the true maximum current point, and reduce processing errors.

[0038] Furthermore, such as Figure 3As shown, the preset angle b2 is set to 5°-10°. By setting the preset angle b2 to 5°-10°, the receiver 15 can completely depict the waveform from nothing to something and from the highest point to nothing during low-speed reciprocating motion, thus improving the accuracy of the final locked angle.

[0039] Furthermore, such as Figure 1 As shown, in the crystal orientation detection step, the swing amplitude of the preset receiving angle α2 is set at ±3°. Traditional equipment stops at points with high current, making it susceptible to errors due to momentary electrical noise. In the crystal orientation detection step, after the crystal rod 30 is stationary, the transmitter 14 and receiver 15 scan left and right to perform a second confirmation of the signal across the entire band. This not only finds the highest point but also verifies the signal shape, filters out false peaks, and ensures the accuracy of the final calculation. The preset transmission angle is equal to the preset receiving angle α2.

[0040] Furthermore, such as Figures 4 to 5 As shown, in the distance adjustment step, the distance data L1 between the measurement point 16 and the end face 31 to be measured is obtained by the distance sensor 17 of the detection stage 11, and the distance between the measurement point 16 and the end face 31 to be measured is adjusted according to the distance data L1. The X-ray paths of the X-ray emitter 14 and the receiver 15 have an intersection point in space, namely the measurement point 16. If the end face 31 to be measured of the crystal rod 30 is not exactly at this intersection point, the diffracted beam will be translated in space, causing a deviation in the peak angle captured by the receiver 15. By measuring the distance with the distance sensor 17 and controlling the detection stage 11 to move forward and backward along the first direction H, the coincidence of the optical origin and the physical surface is ensured, improving the positioning accuracy of the crystal rod 30. When the crystal rod 30 rotates, the detection stage 11 is dynamically fine-tuned and follows the change of the distance data L1 through the lifting mechanism 13, ensuring that the X-ray spot is always locked on the end face 31 to be measured throughout the entire rotation scanning cycle, ensuring the continuity and fidelity of the diffraction peak signal.

[0041] Furthermore, such as Figure 1 as well as Figure 6As shown, in the pre-detection step, when the crystal rod 30 material has multiple Bragg angles, the preset incident angle a1 and preset receiving angle a2 are both adjusted to be equal to one of the Bragg angles, and the initial tilt angle b1 is equal to the required synthesis angle. The process then proceeds to the coarse crystal orientation detection step to obtain the crystal orientation corresponding to the first diffraction peak. Next, in the pre-detection step, the preset incident angle a1 and preset receiving angle a2 are adjusted to be equal to another Bragg angle, and the direction between the rotating stage 24 and the detection stage 11 remains unchanged. The process then proceeds to the coarse crystal orientation detection step to continue obtaining the crystal orientation corresponding to the remaining first diffraction peaks. During this process, the distance between the measurement point 16 and the test surface 31 remains unchanged, and the measurement point 16 is always positioned on the test surface 31. Different crystal rod 30 materials (GaAs, Si, SiC) and different crystal plane specifications ((100), (111), (110)) have different numbers and values ​​of Bragg angles. In traditional equipment, adjustments are made based on the operator's professional skills. In the pre-detection step of this invention, the material and specifications of the crystal rod 30 are input into the controller 12. The controller 12 then performs multiple Bragg angle adjustments sequentially according to the set steps to obtain four crystal orientations, thereby improving the automation level of crystal rod 30 positioning. Simultaneously, when switching Bragg angles, the initial tilt angle b1 must remain unchanged, ensuring that the peak values ​​extracted in different directions, such as α1, α2, β1, and β2, are all derived based on the same geometric reference system, thus guaranteeing the accuracy of the difference formula solution.

[0042] Furthermore, in the distance adjustment step, the radial distance from the measurement point 16 to the center of the measured end face 31 is less than the radius of the measured end face 31. Limiting the radial distance to within the radius is equivalent to leaving sufficient offset distance to ensure that the measurement point 16 always falls on the measured end face 31 during the rotation of the crystal rod 30.

[0043] Furthermore, in the crystal orientation adjustment step, the difference formula is: α=(α1-α2) / 2, β=(β1-β2) / 2, and the actual synthesis bias angle is... The process involves subtracting the values ​​using a 180-degree inverted differential calculation to filter out the bonding system error and initial geometric error of the equipment during the loading of the crystal ingot 30, extracting the pure physical tilt component. If the crystal ingot 30 has a large tilt angle, the projections of its tilt angle in the X and Y directions will interfere with each other. Directly applying conventional formulas will result in projection calculation errors. This invention uses the universal angle stage 23 to pre-tilt the crystal ingot 30 in the reverse direction by the required angle, such as 15 degrees, to bring the originally significantly tilted atomic crystal plane back to a state with a slight deviation that is almost perpendicular to the main axis of rotation. In this state, the slight tilts in the X and Y directions are independent and do not interfere with each other. Therefore, the calculation error is reduced and the calculation accuracy is improved.

[0044] like Figure 1As shown, a preferred embodiment of the present invention provides a crystal orientation positioning device for crystal rod cutting, having a first direction H and a second direction F perpendicular to each other. It also includes a worktable 20 and a controller 12. The worktable 20 includes a base 21, a universal angle positioning platform 23, and a rotating shaft 25 connected sequentially along the first direction H. The base 21, the universal angle positioning platform 23, and the rotating shaft 25 rotate around the first direction H. The end of the base 21 facing away from the universal angle positioning platform 23 in the first direction H has a crystal rod connecting surface 22 for connecting with a crystal rod 30. The crystal rod connecting surface 22 extends along the second direction F in the initial state. The universal angle positioning platform 23 is provided with a rotating platform 24 for connecting with the base 21. The rotating platform 24 and the crystal rod connecting surface 22 are arranged parallel to each other in the initial state. The controller 12 is electrically connected to the universal angle positioning platform 23 and the rotating shaft 25.

[0045] Furthermore, the system includes a detection component 10, which comprises a detection platform 11, a lifting mechanism 13, and a transmitter 14, a receiver 15, and a distance sensor 17 connected to the detection platform 11. The distance detection direction of the distance sensor 17 is a first direction H. The distance sensor 17 is used to measure the distance between the end face 31 of the crystal rod 30 to be tested and the measurement point 16. The detection platform 11 is connected to the lifting mechanism 13 to move along the first direction H. The transmitter 14 has a transmission direction for transmitting detection signals, and the receiver 15 has a reception direction for receiving detection signals. A preset incident angle a1 is formed between the transmission direction and the first direction H, and a reception angle a2 is formed between the receiver 15 and the first direction H. The transmission direction and the reception direction intersect at the measurement point 16. The controller 12 is electrically connected to the transmitter 14, the receiver 15, and the distance sensor 17.

[0046] The crystal orientation positioning device for crystal rod cutting of the present invention includes a worktable 20 comprising a base 21, a universal angle stage 23, and a rotating shaft 25. The base 21, the universal angle stage 23, and the rotating shaft 25 are sequentially connected and fixed along a first direction H. The base 21 is used to support the crystal rod 30, the rotating shaft 25 is used to drive the crystal rod 30 to rotate 360 ​​degrees, and the universal angle stage 23 is used to adjust the spatial tilt posture of the crystal rod 30. The detection assembly 10 is disposed above the worktable 20, and the lifting mechanism 13 drives the detection table surface 11 to move up and down along the first direction H. The X-ray emitter 14 and the X-ray receiver 15 can swing relative to each other on both sides of the distance sensor 17. Distance sensor 17 is used to measure the distance between the end face 31 of the crystal rod 30 to the measurement point 16. Controller 12 is electrically connected to transmitter 14, receiver 15, distance sensor 17, universal angle stage 23, and rotating shaft 25, thereby realizing laser focusing, global coarse orientation finding, micro-amplitude swing precision measurement, differential de-biasing calculation, and driving the universal angle stage 23 to adjust its attitude. The rotating platform 24 of the universal angle stage 23 is parallel to the crystal rod connecting surface 22, enabling arbitrary angle deflection compensation of the crystal rod 30's orientation in space before cutting and inspection. This allows the device to not only be compatible with traditional 0-degree crystal orientation but also to achieve crystal orientation positioning of crystal rods 30 with specific composite deflection angles of 0-15 degrees (such as gallium arsenide and other special semiconductor materials), achieving multi-purpose functionality and reducing the fixed costs for companies to replace equipment for different products. Distance sensor 17 and lifting mechanism 13 extend along the first direction H. Distance sensor 17 is connected to detection platform 11, and detection platform 11 is connected to lifting mechanism 13. Detection platform 11 drives distance sensor 17 to move along the first direction H, thereby detecting the relative position of the end face 31 of the crystal rod 30 to be measured in real time. Controller 12 drives lifting mechanism 13 to dynamically move detection platform 11 along the first direction H based on feedback signals, ensuring that the focal point of the X-rays, i.e., the measurement point 16, always falls on the end face 31 of the crystal rod 30 to be measured. This dynamic focusing mechanism eliminates geometric errors caused by differences in workpiece size or improper placement, guaranteeing the intensity and reliability of the X-ray diffraction signal from a physical source. A rotating shaft 25, rotating about a first direction H, connects to a crystal rod 30 at the end of a base 21 opposite to the universal angle stage 23. After the universal angle stage 23 completes initial tilt angle compensation, the rotating shaft 25 can drive the crystal rod 30 to rotate continuously or in steps. Combined with the pre-set angles of the transmitter 14 and receiver 15 on the detection stage 11, the device captures multiple maximum diffraction signals on the same circumference during rotation. This structure is adapted to a 180-degree flip differential algorithm, which can filter mechanical concentricity deviations and zero-position errors, ensuring consistent crystal orientation positioning and reducing the risk of scrapping the entire crystal rod.The entire device forms a complete automated closed-loop control system, getting rid of the outdated mode of traditional equipment that requires frequent manual intervention and manual search for the maximum signal. It reduces the positioning time of a single crystal rod 30 from several hours to minutes, improving the overall processing cycle and production efficiency.

[0047] It should be noted that both transmitter 14 and receiver 15 swing synchronously.

[0048] As one embodiment, such as Figure 1 As shown, the distance sensor 17 includes a non-contact sensor and a replaceable contact sensor; preferably, the non-contact sensor is a laser sensor.

[0049] In one embodiment, the first direction H is coaxial with the Z-axis direction.

[0050] Example 1: Material: Indium phosphide; Specification: 100; Required synthesis angle: 0 degrees; Allowable error less than 0.2 degrees; The current of transmitter 14 is adjusted to 2mA, and the voltage of transmitter 14 is about 30KV.

[0051] Feeding steps, such as Figure 1 and Figure 3 As shown, one end of the indium phosphide crystal rod 30 is connected to the crystal rod connection surface 22, and the other end is the end face to be tested 31, with the end face to be tested 31 facing the test stage surface 11; Pre-testing steps, such as Figure 5 As shown, based on the material and specifications of crystal rod 30, the Bragg angles in both the X and Y directions are approximately 31 degrees. To achieve a desired composite angle θ1 = 0°, both the preset incident angle a1 and receiving angle a2 are adjusted to 31°. The rotating stage 24 and the detection stage 11 are then adjusted to be perpendicular to each other, so that the initial tilt angle b1 = the desired composite angle θ1 = 0 degrees. Distance adjustment steps, such as Figure 4 As shown, the intersection of the ray paths of transmitter 14 and receiver 15 is the measurement point 16, and the measurement point 16 is positioned on the end face 31 to be measured. The procedure for coarse grain orientation detection is as follows: Figure 2 , Figure 3 as well as Figure 7 As shown, the controller 12 drives the rotating shaft 25 to rotate 360° around the first direction H. The rotating shaft 25 drives the crystal rod 30 to perform a full-cycle spatial rotation scan, obtaining X1=20.32°, Y1=111.21°, X2=199.53°, Y2=290.64°. Precision crystal orientation detection steps, such as Figure 1 and Figure 2As shown, the controller 12 controls the rotating shaft 25 to drive the crystal rod 30 to rotate to the crystal orientation position of X1=20.32°. The measuring point 16 is positioned at the crystal orientation position of X1=20.32°. The transmitter 14 and receiver 15 are oscillating synchronously to obtain α1=31.432°. The controller 12 controls the rotating shaft 25 to drive the crystal rod 30 to rotate to the crystal orientation position of Y1=111.21°. The measuring point 16 is positioned at the crystal orientation position of Y1=111.21°. The transmitter 14 and receiver 15 are oscillating synchronously to obtain β1=31.432°. The controller 12 controls the rotating shaft 25 to drive the crystal rod 30 to rotate to the crystal orientation position of X2=199.53°. The measuring point 16 is positioned at the crystal orientation position of X2=199.53°. The transmitter 14 and receiver 15 are oscillating synchronously to obtain α2=31.363°. The controller 12 controls the rotating shaft 25 to drive the crystal rod 30 to rotate to the crystal orientation position of Y2=290.64°. The measuring point 16 is positioned at the crystal orientation position of Y2=290.64°. The transmitter 14 and receiver 15 are oscillating synchronously to obtain β2=31.364°. The crystal orientation adjustment steps, using the difference formulas: α=(α1-α2) / 2=(31.432-31.363) / 2=0.0345, β=(β1-β2) / 2=(31.432-31.364) / 2=0.034, and the actual synthesis bias angle... = =0.048, the difference between the actual synthesized bias angle θ2=0.048° and the required synthesized angle θ1=0° is less than 0.2°, which meets the processing requirements.

[0052] Example 2: Material: Gravel arsenide; Specification: 110; Required angle of synthesis: 15 degrees; Allowable error less than 0.2 degrees; The current of transmitter 14 is adjusted to 1mA, and the voltage of transmitter 14 is about 10KV.

[0053] Feeding steps, such as Figure 1 and Figure 3 As shown, one end of the arsenide crystal rod 30 is connected to the crystal rod connecting surface 22, and the other end is the end face to be tested 31, with the end face to be tested 31 facing the detection stage surface 11; Pre-testing steps, such as Figure 5 As shown, based on the material and specifications of crystal rod 30, the Bragg angle in the X direction is approximately 45 degrees. In the Y direction, the Bragg angle is approximately 48 degrees or 18 degrees. To achieve a desired synthesis angle θ1 = 15°, both the preset incident angle a1 and receiving angle a2 are adjusted to 45°. The rotating stage 24 is rotated towards the detection stage 11 with an initial tilt angle b1 = 15 degrees. Distance adjustment steps, such as Figure 4As shown, the intersection of the ray paths of transmitter 14 and receiver 15 is the measurement point 16, and the measurement point 16 is positioned on the end face 31 to be measured. The procedure for coarse grain orientation detection is as follows: Figure 2 , Figure 3 as well as Figure 7 As shown, the controller 12 drives the rotating shaft 25 to rotate 360° around the first direction H. The rotating shaft 25 drives the crystal rod 30 to perform a full-cycle spatial rotation scan, resulting in X1=37.42° and X2=217.33°. Before the test, the initial tilt angle between the rotating stage 24 and the test stage 11 remains unchanged, and the preset incident angle a1 and receiving angle a2 are both adjusted to 48°. The procedure for coarse grain orientation detection is as follows: Figure 2 , Figure 3 as well as Figure 7 As shown, the controller 12 drives the rotating shaft 25 to rotate 360° around the first direction H. The rotating shaft 25 drives the crystal rod 30 to perform a full-cycle spatial rotation scan, resulting in Y1=126.84°. Before the test, the initial tilt angle between the rotating stage 24 and the test stage 11 remains unchanged, and the preset incident angle a1 and receiving angle a2 are both adjusted to 18°. The procedure for coarse grain orientation detection is as follows: Figure 2 , Figure 3 as well as Figure 7 As shown, the controller 12 drives the rotating shaft 25 to rotate 360° around the first direction H. The rotating shaft 25 drives the crystal rod 30 to perform a full-cycle spatial rotation scan, resulting in Y2=306.79°. Precision crystal orientation detection steps, such as Figure 1 and Figure 2 As shown, the controller 12 controls the rotating shaft 25 to drive the crystal rod 30 to rotate to the crystal orientation position of X1=37.42°. The measuring point 16 is positioned at the crystal orientation position of X1=37.42°. The transmitter 14 and receiver 15 are oscillating synchronously to obtain α1=45.476°. The controller 12 controls the rotating shaft 25 to drive the crystal rod to rotate to the crystal orientation position of Y1=126.84°. The measuring point 16 is positioned at the crystal orientation position of Y1=126.84°. The transmitter 14 and receiver 15 are oscillating synchronously to obtain β1=48.030. The controller 12 controls the rotating shaft 25 to drive the crystal rod 30 to rotate to the crystal orientation position of X2=217.33°. The measuring point 16 is positioned at the crystal orientation position of X2=217.33°. The transmitter 14 and receiver 15 are oscillating synchronously to obtain α2=45.060. The controller 12 controls the rotating shaft 25 to drive the crystal rod to rotate to the crystal orientation position of Y2=306.79°. The measuring point 16 is positioned at the crystal orientation position of Y2=306.79°. The transmitter 14 and receiver 15 are oscillating synchronously to obtain β2=18.250. The crystal orientation adjustment steps, using the difference formulas: α=(α1-α2) / 2=(45.476-45.060) / 2=0.208, β=(β1-β2) / 2=(48.030-18.250) / 2=14.89, and the actual synthesis bias angle... = =14.89, the difference between the actual synthesized bias angle θ2=14.89 degrees and the required synthesized angle θ1=15° is less than 0.2°, which meets the processing requirements.

[0054] If the actual synthesized bias angle θ2 does not meet the machining accuracy requirements, the method for adjusting the initial tilt angle b1 is existing technology and will not be elaborated here.

[0055] The above are merely preferred embodiments of the present invention. It should be noted that those skilled in the art can make several improvements and substitutions without departing from the technical principles of the present invention, and these improvements and substitutions should also be considered within the scope of protection of the present invention.

Claims

1. A method for crystal orientation positioning before crystal rod cutting, wherein the crystal rod has a test end face, characterized in that, Includes the following steps: Crystal rod fixing: Fix the crystal rod and make the end face of the crystal rod to be tested face towards the detection component; Pre-detection steps: Obtain the Bragg angle and required synthesis angle θ1 of the crystal rod to determine the preset receiving angle a2 of the detection component, and rotate the rotating stage towards the detection stage surface by an initial tilt angle b1, wherein the initial tilt angle b1 is equal to the required synthesis angle θ1; Distance adjustment: The intersection of the ray paths of the transmitter and the receiver is used as the measurement point, which is then positioned on the end face to be measured. Coarse crystal orientation detection: The controller drives the rotating shaft to rotate 360° around the first direction. The rotating shaft drives the crystal rod to perform a full-cycle spatial rotation scan, collect diffraction intensity signals and obtain the crystal orientation corresponding to the four first diffraction peaks. Precise crystal orientation detection: The measurement points of the detection component are respectively positioned at the crystal orientation corresponding to the four first diffraction peaks, the preset receiving angle α2 of the detection component is adjusted synchronously, and the actual receiving angles α1, α2, β1 and β2 of the detection component at the four second diffraction peaks are obtained respectively. Crystal orientation adjustment: The actual synthesis bias angle θ2 of the crystal rod is calculated, and the difference between the actual synthesis bias angle θ2 and the required synthesis angle θ1 is compared.

2. The crystal orientation positioning method for crystal rod cutting according to claim 1, characterized in that: In the coarse crystal orientation detection step, the controller controls the rotating shaft to rotate at a first rotational speed. In the fine crystal orientation detection step, after the measurement point is positioned in the crystal orientation, the controller controls the rotating shaft to drive the crystal rod to reciprocate within a preset angle b2 at a second rotational speed. The receiver pauses rotation at the point where it receives the maximum current signal and simultaneously swings the transmitter and receiver. The first rotational speed is greater than the second rotational speed.

3. The crystal orientation positioning method for crystal rod cutting according to claim 2, characterized in that: The first rotational speed is set to 8° / second - 10° / second, and the second rotational speed is set to 0.2° / second - 0.8° / second.

4. The crystal orientation positioning method for crystal rod cutting according to claim 2, characterized in that: The preset angle b2 is set between 5° and 10°.

5. The crystal orientation positioning method for crystal rod cutting according to claim 1, characterized in that: In the crystal orientation detection step, the swing amplitude of the preset receiving angle α2 of the detection component is set to ±3°.

6. The crystal orientation positioning method for crystal rod cutting according to claim 1, characterized in that: In the distance adjustment step, the distance data L1 between the measurement point and the end face to be measured is obtained by the distance sensor of the detection platform, and the distance between the measurement point and the end face to be measured is adjusted according to the distance data L1.

7. The crystal orientation positioning method for crystal rod cutting according to claim 1, characterized in that: In the pre-detection step, when the crystal rod material has multiple Bragg angles, the preset receiving angle a2 is adjusted to be equal to one of the Bragg angles, and the initial tilt angle b1 is set to be equal to the required synthesis angle θ1. Then, the coarse crystal orientation detection step is entered to obtain the partial crystal orientation corresponding to the first diffraction peak. Then, the pre-detection step is entered again, the receiving angle a2 is adjusted to be equal to another Bragg angle, the initial tilt angle b1 remains unchanged, and the coarse crystal orientation detection step is entered to continue obtaining the crystal orientation corresponding to the remaining first diffraction peak.

8. The crystal orientation positioning method for crystal rod cutting according to claim 1, characterized in that: In the distance adjustment step, the radial distance from the measurement point to the center of the end face to be measured is less than the radius of the end face to be measured.

9. A crystal orientation positioning device for crystal rod cutting, having a first direction and a second direction perpendicular to each other, comprising a worktable and a controller, the worktable comprising a base, a universal angle positioning platform and a rotating shaft connected sequentially along the first direction, the base, the universal angle positioning platform and the rotating shaft rotating about the first direction, the base having a crystal rod connecting surface for connecting to a crystal rod at one end of the base opposite to the universal angle positioning platform in the first direction, the universal angle positioning platform having a rotating platform for connecting to the base, the rotating platform being arranged parallel to the crystal rod connecting surface, and the controller being electrically connected to the universal angle positioning platform and the rotating shaft.

10. The crystal orientation positioning device for crystal rod cutting according to claim 9, characterized in that: The device includes a detection assembly comprising a detection platform, a lifting mechanism, and a transmitter, a receiver, and a distance sensor respectively connected to the detection platform. The distance sensor has a distance detection direction of a first direction. The detection platform is connected to the lifting mechanism to move along the first direction. The distance sensor is used to measure the distance between the end face of the crystal rod to be tested and the measurement point. The transmitter has a transmission direction for transmitting detection signals, and the receiver has a reception direction for receiving detection signals. The transmission direction and the first direction form a preset incident angle α1, and the reception direction and the first direction form a reception angle α2. The transmission direction and the reception direction intersect at the measurement point. The controller is electrically connected to the transmitter, the receiver, and the distance sensor.

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