A cache shelf

Abstract

The application provides a buffer shelf which can simultaneously be compatible with REEL reels and CST wafer cassettes, realizes multi-specification material compatible buffering, safe transfer and automatic logistics docking. The buffer shelf comprises a main frame which comprises a front end vertical frame, a middle vertical separation frame, a rear end vertical frame, a bottom frame, a middle layer separation frame and a top layer connecting frame, the number of the middle layer separation frame is at least one, the front end vertical frame, the middle vertical separation frame, the rear end vertical frame, the bottom frame, the middle layer separation frame and the top layer connecting frame are combined to form a plurality of transverse buffering spaces which are arranged in a front-rear double row and multi-layer height direction, a plurality of reel buffering structures and a plurality of wafer cassette buffering structures.

Description

Technical Field

[0001] This invention relates to the technical field of semiconductor automation equipment, specifically a buffer shelf. Background Technology

[0002] Currently, in semiconductor COF production lines, REEL reels and CST wafer casks are typically handled using manual trolleys or ordinary static shelves, which presents the following problems: 1. Traditional shelving cannot accommodate multiple material specifications; reels and wafer bins need to be stored separately, occupying a large amount of production space. 2. Frequent manual handling is inefficient and can easily cause the reel to shake, collide, or the wafer cassette to tilt during the transfer process, posing a quality risk. 3. Ordinary shelves cannot be matched with AGV automated logistics systems, making it difficult to achieve unmanned delivery in automated factories; 4. The existing shelving structure has poor openness, and the reels are prone to shifting after being placed, resulting in insufficient stability during transportation and making it unsuitable for long-distance AGV handling. 5. Traditional mobile shelving lacks a standardized AGV positioning structure, which can easily lead to docking deviations during automated handling, affecting the stable operation of the logistics system.

[0003] Therefore, there is an urgent need for a combined buffer rack that is compatible with a variety of semiconductor materials, suitable for AGV automated handling, and has high stability, high compatibility and high space utilization. Summary of the Invention

[0004] To address the aforementioned issues, this invention provides a buffer rack that is compatible with both REEL reels and CST wafer bins, enabling multi-specification material buffering, secure transfer, and automated logistics integration.

[0005] A cache shelf, characterized in that it comprises: The main frame includes a front vertical frame, a middle vertical partition frame, a rear vertical frame, a bottom frame, a middle layer partition frame, and a top layer connecting frame, wherein the number of middle layer partition frames is at least one; the front vertical frame, the middle vertical partition frame, the rear vertical frame, the bottom frame, the middle layer partition frame, and the top layer connecting frame are combined to form a multi-column horizontal cache space with two rows in the front and back and multiple layers in the height direction. Several sets of disk cache structures; And several sets of wafer cassette cache structures; Each group of horizontal cache spaces is divided into M cache areas along its length by N spacers, where M = N + 1. Each cache area is provided with a set of reel cache structure and a set of wafer cassette cache structure. The bottom frame of the main frame is provided with a standard AGV alignment hole structure.

[0006] Its further features are: Each set of the reel buffer structure includes four sets of support columns, specifically the first support column and the second support column on the upper layer, and the third support column and the fourth support column on the lower layer. The central vertical partition frame is equipped with a fixing frame corresponding to the position of each set of support columns. Each support column is fixed to the corresponding fixing frame by fasteners. The area enclosed by the four support columns of each set of the reel buffer structure is used for bulk forward and backward stacked reels, which allows the support columns to be set with the corresponding diameter as needed and facilitates replacement operations. The four support columns of each reel buffer structure are inclined upwards from the inside out to ensure that the reel will not slip off accidentally. The outer ends of the third and fourth support columns of the lower layer of the reel buffer structure are also corresponding to support plates. The outer ends of the third and fourth support columns are respectively supported on the upper surface of the support plate, and the fixed parts of the support plate are respectively fixed to the corresponding frame uprights or spacers. The width of the three-dimensional space formed by the four sets of support columns of each reel cache structure is greater than the width of the wafer cassette. The front vertical frame and rear vertical frame of each cache area are fixed with a pair of support blocks corresponding to the internal areas of the third and fourth support columns. The positions of the four support blocks correspond to the positions of the four legs of the wafer cassette. The front and rear double-row buffer areas are symmetrically arranged about the vertical partition frame in the middle. Each set of fixed frames has corresponding support columns at the front and rear ends, which makes the assembly of the support columns quick and efficient. The support blocks installed in the area corresponding to the central vertical partition frame are arranged by connecting plates, which ensures that the assembly of the support blocks is quick and efficient. Casters are fixed at the four corners of the main frame; The bottom frame includes two horizontal connecting plates connected front and rear. The horizontal connecting plates are provided with AGV standard alignment hole structures. The AGV standard alignment hole structures are used to accurately cooperate with the AGV lifting and positioning mechanism to achieve rapid positioning and high-precision docking when the AGV is automatically picking up and placing items, reduce the risk of shelf displacement during handling, and improve the operational stability of the automated logistics system.

[0007] The AGV standard alignment hole structure is a high-strength, wear-resistant structure that is compatible with different types of AGV lifting and handling mechanisms, improving the equipment's versatility and expandability.

[0008] With this invention, the main frame adopts a high-strength profile welded structure, which has a high overall load-bearing capacity; the shelf is equipped with multiple buffer areas, each of which can simultaneously hold REEL reels or CST wafer boxes used in COF production, and the bottom frame of the main frame is equipped with AGV standard alignment hole structure for precise cooperation with the AGV lifting and positioning mechanism, so as to realize rapid positioning and high-precision docking when the AGV automatically picks up and puts down; it can simultaneously accommodate REEL reels and CST wafer boxes, realizing multi-specification material compatibility buffering, safe transfer and automatic logistics docking. Attached Figure Description

[0009] Figure 1 Three-dimensional representation of a specific embodiment of the present invention Figure 1 ; Figure 2 Three-dimensional representation of a specific embodiment of the present invention Figure 2 ; Figure 3 A perspective view showing the placement of the REEL reel and CST wafer cassette in a specific embodiment of the present invention; The names corresponding to the serial numbers in the diagram are as follows: AGV standard alignment hole structure 1; Main frame 10, front vertical frame 11, middle vertical partition frame 12, rear vertical frame 13, bottom frame 14, horizontal connecting plate 141, middle partition frame 15, top connecting frame 16, reel buffer structure 20, first support column 21, second support column 22, third support column 23, fourth support column 24, fixing frame 25, support plate 26, wafer cassette buffer structure 30, support block 31, connecting plate 32, spacer column 40, buffer area 50, casters 60; 100 reels, 200 wafer bins. Detailed Implementation

[0010] A type of cache shelf, see Figures 1-3 It includes a main frame 10, several sets of reel cache structures 20, and several sets of wafer cassette cache structures 30; The main frame 10 includes a front vertical frame 11, a middle vertical partition frame 12, a rear vertical frame 13, a bottom frame 14, a middle partition frame 15, and a top connecting frame 16, with at least one middle partition frame 15. The front vertical frame 11, the middle vertical partition frame 12, the rear vertical frame 13, the bottom frame 14, the middle partition frame 15, and the top connecting frame 16 are combined to form a multi-column horizontal buffer space with two rows in the front and back and multiple layers in the height direction. Each horizontal cache space is divided into M cache areas 50 by N spacers 40 along its length, where M = N + 1. Each cache area 50 contains a set of reel cache structure 20 and a set of wafer cassette cache structure 30. The bottom frame 14 of the main frame 10 is provided with AGV standard alignment hole structure 1.

[0011] In a specific embodiment: the number of middle layer partition frames 15 is one, N=1, then M equals 2, and the main frame 10 is divided into two groups, front and back, with two buffer areas 50 in each layer, for a total of eight buffer areas 50.

[0012] In a specific embodiment, each reel buffer structure 20 includes four sets of support columns, specifically the first support column 21 and the second support column 22 on the upper layer, and the third support column 23 and the fourth support column 24 on the lower layer. The central vertical partition frame 12 is provided with a fixing frame 25 corresponding to the position of each set of support columns. Each support column is fixed to the corresponding fixing frame 25 by fasteners. The area enclosed by the four support columns of each reel buffer structure 20 is used for bulk forward and backward stacked reels 100, which allows the support columns to be set with the corresponding diameter as needed and facilitates replacement operations. The four support columns of each reel buffer structure 20 are inclined upward from the inside out to ensure that the reel 100 will not accidentally slip during the movement of the buffer shelf; The outer ends of the third support column 23 and the fourth support column 24 of the lower layer of the reel buffer structure 20 are also supported by support plates 26. The outer ends of the third support column 23 and the fourth support column 24 are respectively supported on the upper surface of the support plate 26. The fixed parts of the support plate 26 are respectively fixed to the corresponding frame uprights or spacer columns 40. The width of the three-dimensional space formed by the four sets of support columns of each set of reel cache structure 20 is greater than the width of the wafer cassette 200. The front vertical frame 11 and rear vertical frame 13 of each cache area 50 are fixed with a pair of support blocks 31 corresponding to the internal area of ​​the third support column and the fourth support column. The positions of the four support blocks 31 correspond to the positions of the four legs of the wafer cassette 200. The front and rear double-row buffer areas are symmetrically arranged about the vertical partition frame 12 in the middle. The front and rear ends of each set of fixed frame 25 are respectively equipped with corresponding support columns, which makes the assembly of the support columns quick and efficient. The support blocks 31 installed in the area corresponding to the central vertical partition frame 12 are arranged in combination with the connecting plates 32, which ensures that the assembly of the support blocks 31 is fast and efficient. Casters 60 are fixed at the four corners of the main frame 10 to facilitate manual movement and line adjustment; The bottom frame 14 includes two horizontal connecting plates 141 connected front and rear. The horizontal connecting plates 141 are provided with AGV standard alignment hole structures 1. The AGV standard alignment hole structures 1 are used to cooperate precisely with the AGV lifting and positioning mechanism to achieve rapid positioning and high-precision docking when the AGV is automatically picking up and placing, reduce the risk of shelf displacement during handling, and improve the operational stability of the automated logistics system.

[0013] The AGV standard alignment hole structure 1 is a high-strength and wear-resistant structure that is compatible with different types of AGV lifting and handling mechanisms, improving the equipment's versatility and expandability.

[0014] Its working principle is as follows: The main frame adopts a high-strength profile welded structure, which has a high load-bearing capacity; the rack is equipped with multiple buffer areas, each of which can simultaneously place REEL reels or CST wafer boxes used in COF production, and the bottom frame of the main frame is equipped with AGV standard alignment hole structure, which is used to accurately cooperate with the AGV lifting and positioning mechanism to achieve rapid positioning and high-precision docking when the AGV automatically picks up and puts down.

[0015] Its beneficial effects are as follows: 1. High compatibility: It can simultaneously cache REEL reels and CST wafer cassettes, enabling unified management of multiple semiconductor materials; 2. Supports AGV automated handling: It has a standard AGV docking structure, which can realize unmanned automated logistics and distribution, reducing the cost of manual handling; 3. High transportation stability: The multi-point guiding and limiting structure effectively prevents the reel and material box from shaking or shifting during handling; 4. High AGV docking accuracy: Through the standardized alignment hole design at the bottom, the AGV can achieve high-precision automatic positioning, reducing handling deviation and impact risk; 5. High space utilization: The three-dimensional multi-layer buffer design significantly improves the buffer capacity of materials at the line edge; 6. Strong compatibility: It can be adapted to various AGV lifting structures and scheduling systems, which facilitates the unified planning of subsequent automated logistics; 7. Enhance automation stability: Mechanical limit switches combined with AGV positioning can effectively improve the repeatability and operational reliability of unmanned handling processes; 8. Modular expansion is convenient: The number and structure of buffer workstations can be flexibly adjusted according to the needs of different production lines.

[0016] It will be apparent to those skilled in the art that the present invention is not limited to the details of the exemplary embodiments described above, and that the invention can be implemented in other specific forms without departing from its spirit or essential characteristics. Therefore, the embodiments should be considered in all respects as exemplary and non-limiting, and the scope of the invention is defined by the appended claims rather than the foregoing description. Thus, all variations falling within the meaning and scope of equivalents of the claims are intended to be included within the present invention. No reference numerals in the claims should be construed as limiting the scope of the claims.

[0017] Furthermore, it should be understood that although this specification describes embodiments, not every embodiment contains only one independent technical solution. This narrative style is merely for clarity. Those skilled in the art should consider the specification as a whole, and the technical solutions in each embodiment can also be appropriately combined to form other embodiments that can be understood by those skilled in the art.

Claims

1. A cache shelf, characterized in that, It includes: The main frame includes a front vertical frame, a middle vertical partition frame, a rear vertical frame, a bottom frame, a middle layer partition frame, and a top layer connecting frame, wherein the number of middle layer partition frames is at least one; the front vertical frame, the middle vertical partition frame, the rear vertical frame, the bottom frame, the middle layer partition frame, and the top layer connecting frame are combined to form a multi-column horizontal cache space with two rows in the front and back and multiple layers in the height direction. Several sets of disk cache structures; And several sets of wafer cassette cache structures; Each group of horizontal cache spaces is divided into M cache areas along its length by N spacers, where M = N + 1. Each cache area is provided with a set of reel cache structure and a set of wafer cassette cache structure. The bottom frame of the main frame is provided with a standard AGV alignment hole structure.

2. A cache shelf according to claim 1, characterized in that: Each of the reel buffer structures includes four sets of support columns, specifically the first and second support columns on the upper layer, and the third and fourth support columns on the lower layer. The central vertical partition frame is equipped with a fixing frame corresponding to the position of each set of support columns. Each support column is fixed to the corresponding fixing frame by fasteners. The area enclosed by the four support columns of each reel buffer structure is used for bulk forward and backward stacked reels, which allows the support columns to be set with corresponding diameters as needed.

3. A cache shelf according to claim 2, characterized in that: The four support columns of each reel buffer structure are inclined upwards from the inside out.

4. A cache shelf according to claim 2, characterized in that: The outer ends of the third and fourth support columns of the lower layer of the reel buffer structure are also supported by support plates. The outer ends of the third and fourth support columns are respectively supported on the upper surface of the support plates, and the fixed parts of the support plates are respectively fixed to the corresponding frame uprights or spacers.

5. A cache shelf according to claim 2, characterized in that: The width of the three-dimensional space formed by the four sets of support columns of each reel cache structure is greater than the width of the wafer cassette. The front vertical frame and rear vertical frame of each cache area are fixed with a pair of support blocks corresponding to the internal areas of the third and fourth support columns. The positions of the four support blocks correspond to the positions of the four legs of the wafer cassette.

6. A cache shelf according to claim 5, characterized in that: The front and rear double-row buffer areas are symmetrically arranged about the vertical partition frame in the middle, and corresponding support columns are set at the upper and lower positions of the front and rear ends of each set of fixed frames.

7. A cache shelf according to claim 6, characterized in that: The support blocks installed in the area corresponding to the central vertical partition frame are arranged by connecting plates.

8. A cache shelf according to claim 1, characterized in that: Casters are fixed at the four corners of the main frame.

9. A cache shelf according to claim 1, characterized in that: The bottom frame includes two horizontal connecting plates that are connected front to back, and the horizontal connecting plates are provided with AGV standard alignment hole structures.

10. A cache shelf according to claim 9, characterized in that: The standard alignment hole structure of the AGV is a high-strength and wear-resistant structure.

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