A kind of anti-falling device, headgear and anti-falling method

Abstract

The application discloses a kind of anti-falling device, crown and anti-falling method, anti-falling device is symmetrically arranged in the two sides of wafer box first direction, anti-falling device includes fixed frame, rotating drive piece is fixed on fixed frame.First anti-falling plate and second anti-falling plate are rotationally connected on fixed frame, rotating drive piece rotates, first anti-falling plate and second anti-falling plate are respectively swung in horizontal plane around first rotation axis and second rotation axis, to switch between extension position and retracted position.Grasping mechanism is arranged on first anti-falling plate, and grasping mechanism includes elastic component and clamping component, clamping component and first anti-falling plate are hinged, and clamping component can swing in horizontal direction relative to first anti-falling plate while swinging synchronously with first anti-falling plate.First anti-falling plate when in extension position, wafer box and clamping component abut and push clamping component to swing relative to first anti-falling plate, and elastic component generates elastic deformation to press clamping component in the lower region of wafer box side wall.

Description

Technical Field

[0001] This invention relates to the field of wafer processing equipment technology, and more particularly to a fall protection device, overhead crane, and fall protection method. Background Technology

[0002] In semiconductor manufacturing, wafer cassettes are typically moved using overhead crane systems. This method of transporting wafers via cassettes efficiently enables the handling, processing, and processing of wafers. The overhead crane system consists of tracks and the crane itself. The crane grips the wafer cassette and moves it along the tracks. Although the crane has a gripping device to hold the top of the wafer cassette, wafers are fragile, and a fall during transport can cause significant damage. Therefore, the crane is usually equipped with fall arrestors to prevent wafer cassettes from falling. Currently, these fall arrestors only prevent falls, while the gripping device can only hold the top of the wafer cassette. This leaves the wafer cassette suspended in the air, which can cause it to sway during transport. Excessive swaying can damage the wafers inside the cassette, affecting the quality of wafer processing. Summary of the Invention

[0003] To overcome the above-mentioned shortcomings, the present invention aims to provide a fall protection device, overhead crane, and fall protection method that prevents the wafer cassette from falling while elastically clamping the lower part of the wafer cassette to effectively prevent the wafer cassette from shaking.

[0004] To achieve the above objectives, the technical solution adopted by the present invention is: a fall protection device, symmetrically arranged on both sides of a wafer cassette in a first direction, the fall protection device comprising: Fixture; A rotary drive component is fixed on the fixed frame, and a horizontally arranged rotating plate is fixed to the output end of the rotary drive component. A first fall arresting plate is fixed with a first rotating shaft that extends vertically and is rotatably connected to the fixed frame. The first fall arresting plate is connected to the rotating plate via a first connecting rod, and the two ends of the first connecting rod are respectively hinged to the first end of the first fall arresting plate and the rotating plate. The second fall arrestor plate has a second rotating shaft fixed on it, which extends vertically and is rotatably connected to the fixed frame. The first fall arrestor plate and the second fall arrestor plate are connected by a second connecting rod, the two ends of which are respectively hinged to the first end of the first fall arrestor plate and the first end of the second fall arrestor plate. When the rotating drive component rotates, it causes the first fall arrestor plate and the second fall arrestor plate to swing around the first rotating shaft and the second rotating shaft in the horizontal plane, so as to switch between the extended position and the retracted position. A clamping mechanism is disposed on the first fall arresting plate. The clamping mechanism includes an elastic component and a clamping component. The clamping component is hinged to the first fall arresting plate. The clamping component can swing horizontally relative to the first fall arresting plate while swinging synchronously with the first fall arresting plate. When the first fall arrestor is in the extended position, the wafer cassette abuts against the clamping assembly and pushes the clamping assembly to swing relative to the first fall arrestor, and the elastic component generates elastic deformation to press the clamping assembly against the lower region of the wafer cassette sidewall.

[0005] The beneficial effects of this invention are as follows: A rotary drive component, via a first and a second link, causes the first and second fall arresters to swing synchronously, avoiding the asynchrony caused by electrical signal delays or wear differences when using two independent drive components. In the extended position, the second ends of the first and second fall arresters extend into the underside of the wafer cassette to form a support structure, providing physical vertical fall protection. Even if the gripping device at the top of the wafer cassette fails, the wafer cassette will not fall directly.

[0006] The first and second fall arresters rotate around their respective axes, forming levers with the first and second connecting rods. At this time, the rotation drive only needs to provide a small torque to generate a large blocking force through the first connecting rod at the second end of the first fall arrester and the second connecting rod at the second end of the second fall arrester.

[0007] A clamping mechanism is added to the first fall arrestor plate to clamp the wafer cassette, which is clamped between two clamping components.

[0008] The clamping assembly elastically holds the wafer cassette using elastic components. This elastic contact absorbs horizontal vibration energy, preventing the wafer from shifting or breaking due to shaking, while also avoiding over-positioning or indentation damage that rigid clamping might cause to the wafer cassette. Simultaneously, the wafer cassette itself has manufacturing tolerances and may experience positional deviations when fixed by the overhead crane. The clamping assembly can swing relative to the first anti-fall plate, and the clamping head can adaptively follow the actual tilt angle or position of the wafer cassette's sidewall to compensate for positional deviations.

[0009] Furthermore, the clamping assembly includes a clamping link and a clamping head. One end of the clamping link is hinged to a first anti-fall plate via a vertically arranged third pivot, and the other end of the clamping link is hinged to the clamping head via a vertically arranged fourth pivot. The clamping head can abut against the side wall of the wafer cassette. The elastic component consists of a first torsion spring sleeved on the third pivot and a second torsion spring sleeved on the fourth pivot.

[0010] The fourth pivot and the second torsion spring are responsible for angle self-adaptation, allowing the gripping head to rotate independently to find the optimal contact angle, ensuring surface contact and preventing edge scratches from the wafer cassette and the generation of particulate matter. The third pivot and the first torsion spring are responsible for displacement compensation, with the first torsion spring acting as a mechanical buffer. Together, they enable the gripping mechanism to effectively compensate for complex positional deviations. When the first and second torsion springs are in the compressed state, their restoring forces are superimposed in series. Even if one torsion spring experiences a slight decrease in stiffness due to long-term fatigue, the other torsion spring can still provide effective gripping force, ensuring long-term operational reliability.

[0011] Furthermore, the clamping link includes a limiting part. The preload of the first torsion spring forces the clamping link to swing until it abuts against the limiting part and the first anti-fall plate. During the swinging of the first anti-fall plate toward the extended position, the clamping link swings in the opposite direction relative to the first anti-fall plate under the constraint of the wafer cassette, and the first torsion spring is continuously twisted. Utilizing the limiting part and the preload of the first torsion spring, the degree of freedom of the clamping link is locked when the wafer cassette is not clamped, and automatically switches to elastic buffering and clamping force supply after the clamping head contacts the wafer cassette.

[0012] Furthermore, in its natural state, the second torsion spring causes the clamping head to form an angle with the side wall of the wafer cassette. After the clamping head abuts against the side wall of the wafer cassette, the wafer cassette pushes the clamping head to swing, making the clamping head parallel to the side wall of the wafer cassette, and the second torsion spring twists and stores force. The preset tilt of the clamping head allows it to first lightly touch, then rotate and fit, and finally clamp tightly. During this process, the second torsion spring twists, applying a force to the clamping head to ensure that the clamping head is pressed firmly against the side wall of the wafer cassette.

[0013] Furthermore, the clamping head includes a clamping substrate, on which clamping rollers are rotatably connected to abut against the sidewall of the wafer cassette. The clamping head and the wafer cassette are in rolling contact, and the clamping head will not damage the wafer cassette during oscillation.

[0014] Furthermore, in the extended position, the first and second fall arrestors form an angle in their horizontal projections, with the second ends of both extending below the wafer cassette. This angular arrangement provides stable support should the wafer cassette fall.

[0015] Furthermore, the second ends of the first and second fall arresters are located on either side of the center of the wafer cassette in the second direction. When the wafer cassette has a tendency to tilt forward or backward in the second direction, the large-span support points can provide a greater stabilizing torque, effectively preventing the wafer cassette from tipping over.

[0016] Furthermore, the first fall arrestor includes a first part and a third part in a stepped structure. The first part and the third part are horizontally arranged, with the height of the first part being higher than that of the third part. The first end of the first fall arrestor is the end of the first part away from the third part, and the second end of the first fall arrestor is the end of the third part away from the first part. The first pivot is fixed on the first part, the third part and the second fall arrestor are at the same height, the clamping mechanism is located above the third part, the first connecting rod is located above the first part, and the second connecting rod is located in the space below the first part and above the third part. The stepped structure of the first fall arrestor makes reasonable use of the vertical space, ensuring that the swinging of the first connecting rod, the second connecting rod, the first fall arrestor, the second fall arrestor, and the clamping mechanism will not cause interference.

[0017] Furthermore, the system includes a detection mechanism comprising two sets of first through-beam sensors fixed to the mounting frame. These two sets of sensors correspond to the extended and retracted positions, respectively. A first light-shielding plate is fixed to the rotating plate to block the light emitted by the first through-beam sensors. The detection mechanism further limits the swing angle of the first and second fall arrestors.

[0018] Furthermore, the device includes a baffle located in front of the wafer cassette cover, which can swing up and down under the drive of the rotary actuator to switch between an avoidance position and an obstruction position. The baffle can block the outside of the wafer cassette, preventing the wafer cassette from falling off the overhead crane in a second direction.

[0019] Furthermore, a fifth rotating shaft extending along the second direction is fixed on the baffle, the fifth rotating shaft is rotatably connected to the fixing frame, a first bevel gear is fixed on the first rotating shaft, and a second bevel gear meshing with the first bevel gear is fixed on the fifth rotating shaft.

[0020] The present invention also discloses an overhead crane including the aforementioned fall protection device.

[0021] The present invention also discloses a fall prevention method, based on the above-mentioned fall prevention device, the method comprising: After the wafer box is in place, the rotary drive is activated. The rotary drive drives the first fall arrestor to swing toward the extended position via the first connecting rod. The first fall arrestor drives the second fall arrestor to swing toward the extended position synchronously via the second connecting rod. When the first and second fall arresters swing to near their extended positions, the clamping head of the clamping assembly first abuts against the lower area of ​​the wafer cassette sidewall. The clamping assembly is restricted from moving forward by the wafer cassette, causing it to swing relative to the first fall arrester in the horizontal plane. The elastic component undergoes elastic deformation, pressing the clamping assembly against the sidewall of the wafer cassette in the opposite direction. The first and second fall arresters swing to the extended position under the action of the rotation drive. Attached Figure Description

[0022] Figure 1 This is a side view of the wafer cassette held by the anti-fall device in an embodiment of the present invention; Figure 2 This is a bottom view of the wafer cassette held by the anti-fall device in an embodiment of the present invention; Figure 3 This is a three-dimensional structural diagram of the fall protection device in an embodiment of the present invention; Figure 4 This is a three-dimensional structural diagram of the fall protection device in an embodiment of the present invention from another angle; Figure 5 This is a three-dimensional structural diagram of the clamping mechanism in an embodiment of the present invention; Figure 6 This is a side view of the clamping mechanism in an embodiment of the present invention; Figure 7 This is a top view of the anti-fall device in an embodiment of the present invention, showing the wafer cassette not being held.

[0023] In the picture: 100. Fall arrestor; 200. Wafer box; 201. Center of the wafer box; 1. Fixture; 2. Rotary drive component; 21. Rotating plate; 3. First fall arrestor plate; 3a. First part; 31a. First end of the first fall arrestor plate; 3b. Second part; 3c. Third part; 31c. Second end of the first fall arrestor plate; 31. First rotating shaft; 311. First bevel gear; 32. First connecting rod; 321. Shaft one; 322. Shaft two; 4. Second fall arrestor plate; 4a. First end of the second fall arrestor plate; 4b. Second end of the second fall arrestor plate; 41. Second pivot; 42. Second connecting rod; 421. Shaft three; 422. Shaft four; 5. Clamping mechanism; 51. Elastic component; 511. First torsion spring; 512. Second torsion spring; 52. Clamping assembly; 521. Clamping link; 521a. Limiting part; 5211. Third rotating shaft; 5212. Fourth rotating shaft; 522. Clamping head; 5221. Clamping base plate; 5222. Clamping roller; 6. First through-beam sensor; 7. Baffle; 71. Fifth rotating shaft; 711. Second bevel gear; 72. Second through-beam sensor; 8. Position sensor. Detailed Implementation

[0024] The preferred embodiments of the present invention will now be described in detail with reference to the accompanying drawings, so that the advantages and features of the present invention can be more easily understood by those skilled in the art, thereby providing a clearer and more explicit definition of the scope of protection of the present invention.

[0025] The present invention provides a fall protection device 100 for preventing the wafer cassette 200 from falling and for elastically clamping the lower part of the wafer cassette 200. At the same time, the fall protection device 100 has the fall protection function and can effectively prevent the wafer cassette 200 from shaking.

[0026] In the figures below, the first direction is the X-axis, the second direction is the Y-axis, and the vertical direction is the Z-axis. The wafer cell 200 includes two side walls, a rear wall, a top wall, a bottom wall, and a cover. The two side walls are spaced apart along the X-axis, the rear wall and the cover are spaced apart along the Y-axis, and the top wall and the bottom wall are spaced apart along the Z-axis.

[0027] See appendix Figure 1 and attached Figure 2 The fall protection device 100 is symmetrically arranged on both sides of the wafer box 200 in the first direction. The fall protection device 100 includes a fixing frame 1, a rotation drive component 2, a first fall protection plate 3, a second fall protection plate 4, and a clamping mechanism 5.

[0028] See appendix Figure 3 and attached Figure 4 The rotary drive component 2 is fixed on the fixed frame 1. A first rotating shaft 31 extending vertically is fixed on the first fall arresting plate 3, and the first rotating shaft 31 is rotatably connected to the fixed frame 1. A second rotating shaft 41 extending vertically is fixed on the second fall arresting plate 4, and the second rotating shaft 41 is rotatably connected to the fixed frame 1. A rotating plate 21 is fixed at the output end of the rotary drive component 2. The rotating plate 21 rotates in the horizontal plane under the drive of the rotary drive component 2. The rotating plate 21 is connected to the first fall arresting plate 3 through a first connecting rod 32. The two ends of the first connecting rod 32 are respectively hinged to the first end 31a of the first fall arresting plate and the rotating plate 21. The first fall arresting plate 3 and the second fall arresting plate 4 are connected through a second connecting rod 42. The two ends of the second connecting rod 42 are respectively hinged to the first end 31a of the first fall arresting plate and the first end 4a of the second fall arresting plate.

[0029] When the rotary drive 2 rotates, it drives the first fall arrestor 3 to swing horizontally around the first pivot 31 via the first connecting rod 32. During the swinging process, the first fall arrestor 3 drives the second fall arrestor 4 to swing horizontally around the second pivot 41 via the second connecting rod 42. In other words, when the rotary drive 2 rotates, the linkage assembly consisting of the first connecting rod 32 and the second connecting rod 42 simultaneously drives the first fall arrestor 3 and the second fall arrestor 4 to swing horizontally around the first pivot 31 and the second pivot 41 respectively, switching between the extended and retracted positions. See Appendix. Figure 2In the extended position, the first fall arrestor 3 and the second fall arrestor 4 form an angle in the horizontal projection, and the second ends 31c and 4b of the first and second fall arrestors extend below the wafer cassette 200 to prevent it from falling. In the retracted position, the first and second fall arrestors 3 and 4 swing completely to directly below the mounting bracket 1. At this time, the fall arrestor 100 is in a non-operating state and does not occupy the transfer space on the side of the wafer cassette 200, ensuring that the wafer cassette 200 can be raised and lowered vertically without obstruction. The first pivot 31 is between the first end 31a and the second end 31c of the first fall arrestor, and the second pivot 41 is between the first end 4a and the second end 4b of the second fall arrestor.

[0030] In this embodiment, a rotary drive 2, through a first link 32 and a second link 42, drives the first fall arrestor 3 and the second fall arrestor 4 to swing synchronously, avoiding the asynchrony caused by electrical signal delay or wear differences when using two independent drive components. In the extended position, the second end 31c of the first fall arrestor and the second end 4b of the second fall arrestor extend into the wafer cassette 200 to form a support structure, providing physical fall protection in the vertical direction. Even if the gripping device at the top of the wafer cassette 200 fails, the wafer cassette 200 will not fall directly. The first fall arrestor 3 and the second fall arrestor 4 form an angle in the horizontal projection, providing stable support when the wafer cassette 200 falls. Since the first fall arrestor 3 and the second fall arrestor 4 rotate around their corresponding axes, forming levers with the link assembly, the rotary drive 2 only needs to provide a small torque to generate a large blocking force through the first link 32 at the second end 31c of the first fall arrestor and the second link 42 at the second end 4b of the second fall arrestor.

[0031] See appendix Figure 4 The first link 32 is hinged to the rotating plate 21 via shaft 321 and to the first fall arrestor 3 via shaft 322. The second link 42 is hinged to the first fall arrestor 3 via shaft 321 and to the second fall arrestor 4 via shaft 422.

[0032] The clamping mechanism 5 is disposed on the first fall arrestor plate 3. The clamping mechanism 5 includes an elastic component 51 and a clamping component 52. The clamping component 52 is hinged to the first fall arrestor plate 3. The clamping component 52 can swing horizontally relative to the first fall arrestor plate 3 while swinging synchronously with the first fall arrestor plate 3. When the first fall arrestor plate 3 is in the extended position, the wafer cassette 200 abuts against the clamping component 52 and pushes the clamping component 52 to swing relative to the first fall arrestor plate 3. The elastic component 51 generates elastic deformation to press the clamping component 52 tightly against the lower area of ​​the side wall of the wafer cassette 200. At this time, the lower area of ​​the wafer cassette 200 is clamped between the clamping components 52 of the two fall arrestor devices 100.

[0033] The clamping mechanism 5 is disposed on the first fall arrestor plate 3. The clamping mechanism 5 includes an elastic component 51 and a clamping component 52. The clamping component 52 is hinged to the first fall arrestor plate 3. While swinging synchronously with the first fall arrestor plate 3, the clamping component 52 can swing horizontally relative to the first fall arrestor plate 3. Before the first fall arrestor plate 3 reaches the extended position, the wafer cassette 200 first abuts against the clamping component 52 and pushes the clamping component 52 to swing relative to the first fall arrestor plate 3. The elastic component 51 generates elastic deformation to press the clamping component 52 into the lower area of ​​the side wall of the wafer cassette 200. At this time, the lower area of ​​the wafer cassette 200 is clamped between the clamping components 52 of the two fall arrestor devices 100.

[0034] The rotary drive 2 drives the first fall arrestor 3 to swing from the retracted position to the extended position via the first connecting rod 32. At this time, the clamping assembly 52, hinged to the first fall arrestor 3, rotates synchronously with the first fall arrestor 3 in the horizontal plane, gradually approaching the lower side wall of the wafer cassette 200. When the first fall arrestor 3 swings to near the extended position, the clamping head 522 of the clamping assembly 52 first comes into contact with the lower area of ​​the side wall of the wafer cassette 200. At this time, since the wafer cassette 200 is fixed in position, the continued forward movement of the clamping assembly 52 is hindered, while the first fall arrestor 3 still has the tendency to continue swinging under the action of the rotary drive 2. The clamping assembly 52 and the first fall arrestor 3 are hinged, so the clamping assembly 52 no longer moves with the first fall arrestor 3, but swings relative to the first fall arrestor 3 in the horizontal plane. The relative oscillation of the clamping assembly 52 forces the connected elastic assembly 51 to undergo elastic deformation. The force generated by the elastic assembly 51 reacts on the clamping assembly 52, pressing it against the side wall of the wafer cassette 200. Since the fall arresters 100 are symmetrically arranged on both sides, the lower region of the wafer cassette 200 is elastically clamped horizontally by the clamping assemblies 52 on both sides. Simultaneously, the second end 31c of the first fall arrester and the second end 4b of the second fall arrester, located below the wafer cassette 200, provide vertical fall protection.

[0035] In this embodiment, a clamping mechanism 5 is added to the first fall arrestor plate 3 to clamp the wafer cassette 200, which is clamped between two clamping components 52. The clamping components 52 can elastically clamp the wafer cassette 200 through the elastic component 51. This elastic contact absorbs the horizontal vibration energy, preventing the wafer from shifting or breaking due to shaking, and avoids over-positioning or indentation damage to the wafer cassette 200 that may be caused by rigid clamping. At the same time, the wafer cassette 200 itself has manufacturing tolerances and may also have positional deviations when fixed by the overhead crane. The clamping components 52 can swing relative to the first fall arrestor plate 3, which means that the clamping head 522 can adaptively follow the angle according to the actual tilt angle or position of the side wall of the wafer cassette 200 to compensate for the positional deviation of the wafer cassette 200.

[0036] See appendix Figure 5 and attached Figure 6 The clamping assembly 52 includes a clamping link 521 and a clamping head 522. One end of the clamping link 521 is hinged to the first anti-fall plate 3 via a vertically arranged third pivot 5211, and the other end of the clamping link 521 is hinged to the clamping head 522 via a vertically arranged fourth pivot 5212. The clamping head 522 has a clamping surface that abuts against the side wall of the wafer cassette 200. The elastic assembly 51 consists of a first torsion spring 511 sleeved on the third pivot 5211 and a second torsion spring 512 sleeved on the fourth pivot 5212.

[0037] Under the constraint of the first torsion spring 511 and the second torsion spring 512, when the clamping head 522 is not subjected to external force, the clamping link 521 and the clamping head 522 remain rigidly fixed relative to the first anti-fall plate 3, and as a whole, they swing horizontally toward the wafer cassette 200 along with the first anti-fall plate 3. The clamping surface of the clamping head 522 first contacts the side wall of the wafer cassette 200. Since the clamping surface may not be completely parallel to the side wall of the wafer cassette 200, the reaction force of the side wall of the wafer cassette pushes the clamping head 522 to swing around the fourth rotating axis 5212. At this time, the second torsion spring 512 undergoes torsional deformation, adjusting the angle of the clamping head 522 so that the clamping surface automatically rotates to fully contact the side wall of the wafer cassette 200. At this time, the second torsion spring 512 applies a force to the clamping head 522 to press against the side wall of the wafer cassette. As the first anti-fall plate 3 continues to swing towards the extended position, the clamping head, already pressed against the side wall of the wafer cassette, cannot advance further. The force exerted by the wafer cassette 200 on the clamping head 522 pushes the clamping link 521 to swing relative to the first anti-fall plate 3 around the third pivot 5211. During this process, the first torsion spring 511 undergoes torsional deformation, and also applies a pressing force to the clamping head 522 against the side wall of the wafer cassette. The swinging clamping link 521 and clamping head 522 prevent structural jamming or damage to the wafer cassette 200 due to overshoot of the rotary drive component 2. When the clamping head clamps the wafer cassette 200, the first torsion spring 511 and the second torsion spring 512 are simultaneously torsionally stored, and the resulting restoring force is transmitted in the opposite direction through the clamping link 521 and the clamping head 522, elastically pressing the clamping head 522 against the lower region of the side wall of the wafer cassette 200. The symmetrical devices on both sides act simultaneously, forming a stable elastic counterforce in the horizontal direction. When the rotating drive 2 reverses and drives the first anti-fall plate 3 to retract, the pressure of the wafer box sidewall on the clamping head 522 disappears, and the first torsion spring 511 and the second torsion spring 512 release elastic potential energy in sequence, driving the clamping link 521 and the clamping head 522 to automatically swing back to the initial position, and then retract completely with the first anti-fall plate 3.

[0038] In this embodiment, the fourth rotating shaft 5212 and the second torsion spring 512 are responsible for angle adaptation. Each gripping head 522 can rotate independently to find the optimal contact angle, ensuring surface contact and preventing edge scratches on the wafer cassette 200 that could generate particulate matter. The third rotating shaft 5211 and the first torsion spring 511 are responsible for displacement compensation. The first torsion spring 511 acts as a mechanical buffer stroke. The combination of the two enables the gripping mechanism 5 to effectively compensate for complex positional deviations. When the first torsion spring 511 and the second torsion spring 512 are in the compressed state, their restoring forces are superimposed in series. At this time, the gripping force on the gripping head 522 is large. Even if one of the torsion springs experiences a slight decrease in stiffness due to long-term fatigue, the other torsion spring can still provide an effective gripping force, ensuring the reliability of long-term operation.

[0039] Both the first torsion spring 511 and the second torsion spring 512 include a sleeve portion and two abutment portions. The sleeve portion of the first torsion spring 511 is sleeved on the third rotating shaft 5211, and the two abutment portions of the first torsion spring 511 abut or are fixed to the first anti-fall plate 3 and the clamping connecting rod 521, respectively. The sleeve portion of the second torsion spring 512 is sleeved on the fourth rotating shaft 5212, and the two abutment portions of the second torsion spring 512 abut or are fixed to the clamping connecting rod 521 and the clamping head 522, respectively. The clamping connecting rod 521 and the clamping head 522 are provided with positioning portions for positioning the abutment portions. The positioning portions are insertion holes or blocking blocks, etc.

[0040] The clamping link 521 includes a limiting part 521a. The first torsion spring 511 has a preload. The preload of the first torsion spring 511 forces the clamping link 521 to swing until the limiting part 521a and the first anti-fall plate 3 are against each other. At this time, when the clamping head 522 is not subjected to external force, the clamping link 521 and the first anti-fall plate 3 will not wobble relative to each other, and thus swing simultaneously. During the swing of the first anti-fall plate 3 toward the extended position, due to the limitation of the limiting part 521a, the clamping link 521 swings in the opposite direction relative to the first anti-fall plate 3 under the limitation of the wafer cassette 200. The first torsion spring 511 is continuously twisted. The reverse swing does not mean that the clamping link 521 itself swings, but that the clamping link 521 remains stationary while the first anti-fall plate 3 continues to swing toward the extended position. At this time, the clamping link 521 swings in the opposite direction relative to the first anti-fall plate 3.

[0041] Using the preload of the limiting part 521a and the first torsion spring 511, the degree of freedom of the clamping link 521 is locked when the wafer cassette 200 is not clamped, and after the clamping head 522 contacts the wafer cassette 200, it automatically switches to elastic buffering and clamping force supply.

[0042] See appendix Figure 7In its natural state, the second torsion spring 512 causes the clamping head to form an angle with the side wall of the wafer cassette 200, i.e., the clamping head is tilted relative to the second direction. When the clamping head 522 and the side wall of the wafer cassette 200 come into contact, the wafer cassette 200 pushes the clamping head 522 to swing, making the clamping head 522 parallel to the side wall of the wafer cassette 200. During this process, the second torsion spring 512 twists and stores force, pressing the clamping head tightly against the side wall of the wafer cassette 200. The preset tilt of the clamping head allows it to first lightly touch, then rotate and fit, and finally grip tightly. During this process, the second torsion spring 512 twists, applying a force to the clamping head 522 to ensure that the clamping head 522 is pressed tightly against the side wall of the wafer cassette 200.

[0043] During the swing of the first anti-fall plate 3 toward the extended position, the wafer box 200 first triggers the clamping head 522 to straighten, and then triggers the clamping link 521 to generate a relative reverse swing. During this process, the wafer box 200 is first subjected to the clamping force generated by the torsion of the second torsion spring 512, and then the first torsion spring 511 gradually stores force, and the radial force gradually increases, which meets the shockproof requirements of the wafer box 200.

[0044] In one embodiment, the clamping head 522 includes a clamping substrate 5221, on which a clamping roller 5222 is rotatably connected and can abut against the side wall of the wafer cassette 200. At this time, the clamping head and the wafer cassette 200 are in rolling contact, and the clamping head will not damage the wafer cassette 200 during the swinging process.

[0045] Multiple clamping rollers 5222 are provided to increase the contact area between the clamping head 522 and the wafer cassette 200, providing more stable clamping. See the attached diagram for an example. Figure 5 There are two clamping rollers 5222.

[0046] The first fall arrestor 3 includes a first part 3a, a second part 3b, and a third part 3c in a stepped structure. The first part 3a and the third part 3c are horizontally arranged, with the height of the first part 3a being higher than that of the third part 3c. The second part 3b is vertically arranged and fixed between the first part 3a and the third part 3c. The first end 31a of the first fall arrestor is the end of the first part 3a away from the third part 3c, and the second end 31c of the first fall arrestor is the end of the third part 3c away from the first part 3a. The first rotating shaft 31 is fixed on the first part 3a. The third part 3c is at the same height as the second fall arrestor 4. The clamping mechanism 5 is located above the third part 3c. The first connecting rod 32 is located above the first part 3a, and the second connecting rod 42 is located in the space below the first part 3a and above the third part 3c. The limiting part 521a abuts against the second part 3b.

[0047] The stepped structure of the first fall arrestor 3 makes reasonable use of the vertical space, ensuring that the swing of the first link 32, the second link 42, the first fall arrestor 3, the second fall arrestor 4, and the clamping mechanism 5 will not cause interference.

[0048] In one embodiment, in the extended position, the second fall arrestor 4 and the first fall arrestor 3 do not contact the wafer cassette 200, and a vertical gap is maintained between the third portion 3c of the second fall arrestor 4 and the first fall arrestor 3. The first fall arrestor 3 and the second fall arrestor 4 do not contact the wafer cassette 200 during the swinging process, and only play a fall arresting role when the wafer cassette 200 accidentally falls.

[0049] See appendix Figure 2 The second end 31c of the first fall arrestor and the second end 4b of the second fall arrestor are located on both sides of the center 201 of the wafer box in the second direction. That is, in the second direction, the center 201 of the wafer box is located between the second end 31c of the first fall arrestor and the second end 4b of the second fall arrestor.

[0050] In the horizontal plane, the projected distance between the second end 31c of the first fall arrestor and the second end 4b of the second fall arrestor in the second direction is greater than 0. This means that the line connecting the two points forms a large effective span in the second direction. When the wafer box 200 has a tendency to tilt forward or backward in the second direction, this large span support point can provide a larger stabilizing torque, effectively preventing the wafer box 200 from overturning.

[0051] In one embodiment, to further limit the swing angle of the first fall arrestor 3 and the second fall arrestor 4, the fall arrestor 100 further includes a detection mechanism. The detection mechanism includes two sets of first through-beam sensors 6 fixed on the mounting frame 1, and a first light-shielding plate that can block the light emitted by the first through-beam sensors 6 is fixed on the rotating plate 21. The two sets of first through-beam sensors 6 are communicatively connected to the rotary drive 2, and the two sets of first through-beam sensors 6 correspond to the extended position and the retracted position, respectively. The rotary drive 2 rotates clockwise until the first light-shielding plate blocks the light emitted by one set of first through-beam sensors 6, indicating that the first fall arrestor 3 and the second fall arrestor 4 have swung to the retracted position, and the rotary drive 2 stops working; the rotary drive 2 rotates counterclockwise until the first light-shielding plate blocks the light emitted by the other set of first through-beam sensors 6, indicating that the first fall arrestor 3 and the second fall arrestor 4 have swung to the extended position, and the rotary drive 2 stops working.

[0052] In one embodiment, to improve the safety of the wafer cassette 200, the fall arrestor 100 further includes a baffle 7 located in front of the cover of the wafer cassette 200. The baffle 7 can swing up and down under the drive of the rotary drive 2 to switch between a clearance position and a blocking position. In the blocking position, the projection of the baffle 7 on the cover partially overlaps with the cover; in the clearance position, the projection of the baffle 7 on the vertical plane of the cover does not overlap with the cover. In this case, the baffle 7 will not affect the entry and exit of the wafer cassette 200 from the overhead crane.

[0053] The baffle 7 can block the outside of the wafer cassette 200 to prevent the wafer cassette 200 from falling off the overhead crane in the second direction. At the same time, the baffle 7 also swings under the drive of the rotary drive 2. That is, the baffle 7, the first fall arrestor 3, and the second fall arrestor 4 are linked together. No other drive components are needed. A single rotary drive 2 drives the baffle 7, the first fall arrestor 3, and the second fall arrestor 4 to swing synchronously. When the first fall arrestor 3 and the second fall arrestor 4 are in the retracted position, the baffle 7 is in the avoidance position; when the first fall arrestor 3 and the second fall arrestor 4 are in the extended position, the baffle 7 is in the blocking position.

[0054] A fifth rotating shaft 71 extending along a second direction is fixed to the baffle 7. The fifth rotating shaft 71 is rotatably connected to the fixing frame 1. A first bevel gear 311 is fixed to the first rotating shaft 31, and a second bevel gear 711 meshing with the first bevel gear 311 is fixed to the fifth rotating shaft 71. When the first fall arrestor 3 swings, the first rotating shaft 31 rotates around its own axis, thereby driving the second bevel gear 711 and the fifth rotating shaft 71, which is coaxial with the second bevel gear 711, to rotate around their own axes, thus enabling the baffle 7 to swing up and down. The first bevel gear 311 and the second bevel gear 711 constitute a transmission structure, realizing rotational transmission between the first rotating shaft 31 and the fifth rotating shaft 71.

[0055] A second through-beam sensor 72 is fixed on the mounting bracket 1. The second through-beam sensor 72 is communicatively connected to the rotary drive component 2. The baffle 7 at the clearance position can block the through-beam light emitted by the second through-beam sensor 72. At this time, it indicates that the baffle 7 has swung into position, and the rotary drive component 2 stops working. When the baffle 7 can block the through-beam light emitted by the second through-beam sensor 72, the first light-shielding plate also just blocks the through-beam light emitted by a set of first through-beam sensors 6.

[0056] The fixed frame 1 has bearing seats corresponding to the first rotating shaft 31, the second rotating shaft 41 and the fifth rotating shaft 71. The first rotating shaft 31, the second rotating shaft 41 and the fifth rotating shaft 71 are inserted into the corresponding bearing seats and rotate.

[0057] In one embodiment, a position sensor 8 is also fixed on the side of the mounting bracket 1 away from the baffle 7. The position sensor 8 is used to detect whether the wafer box 200 is in position. When the position sensor 8 detects the wafer box 200, the first anti-fall plate 3 and the second anti-fall plate 4 swing toward the anti-fall position to perform anti-fall protection and elastic clamping of the wafer box 200.

[0058] Because the fall arrestor 100 is installed on the overhead crane, and the overhead crane travels in the air, in order to reduce the weight of the fall arrestor 100, any one or more of the first fall arrestor plate 3, the second fall arrestor plate 4, and the baffle plate 7 are provided with weight reduction holes.

[0059] In one embodiment, a fall protection method is described, based on the aforementioned fall protection device 100, specifically including: After the wafer box 200 is in place, the rotation drive 2 is activated. The rotation drive 2 drives the first fall arrestor 3 to swing toward the extended position via the first connecting rod 32. The first fall arrestor 3 drives the second fall arrestor 4 to swing toward the extended position synchronously via the second connecting rod 42.

[0060] When the first fall arrestor 3 and the second fall arrestor 4 swing to near the extended position, the clamping head 522 of the clamping assembly 52 first comes into contact with the lower area of ​​the side wall of the wafer box 200. The clamping assembly 52 is restricted from moving forward by the wafer box 200 and swings relative to the first fall arrestor 3 in the horizontal plane. The elastic component 51 undergoes elastic deformation, pressing the clamping assembly 52 in the opposite direction against the side wall of the wafer box 200.

[0061] The first fall arrestor 3 and the second fall arrestor 4 swing to the extended position under the action of the rotation drive 2.

[0062] In one embodiment, an overhead crane is described, including the aforementioned fall arrestor 100. The fixing frame 1 of the fall arrestor 100 is fixed to the side wall of the overhead crane. The fall arrestor 100 can protect the wafer cassette 200 grasped by the overhead crane from falling, and can elastically clamp the lower part of the wafer cassette 200 to reduce the shaking of the wafer cassette 200 and compensate for the positional displacement of the wafer cassette 200.

[0063] The above embodiments are only for illustrating the technical concept and features of the present invention. Their purpose is to enable those skilled in the art to understand the content of the present invention and implement it. They should not be used to limit the scope of protection of the present invention. All equivalent changes or modifications made in accordance with the spirit and essence of the present invention should be covered within the scope of protection of the present invention.

Claims

1. A fall protection device, symmetrically arranged on both sides of a wafer cassette in a first direction, characterized in that: The fall protection device includes: Fixture; A rotary drive component is fixed on the fixed frame, and a horizontally arranged rotating plate is fixed to the output end of the rotary drive component. A first fall arresting plate is fixed with a first rotating shaft that extends vertically and is rotatably connected to the fixed frame. The first fall arresting plate is connected to the rotating plate via a first connecting rod, and the two ends of the first connecting rod are respectively hinged to the first end of the first fall arresting plate and the rotating plate. The second fall arrestor plate has a second rotating shaft fixed on it, which extends vertically and is rotatably connected to the fixed frame. The first fall arrestor plate and the second fall arrestor plate are connected by a second connecting rod, the two ends of which are respectively hinged to the first end of the first fall arrestor plate and the first end of the second fall arrestor plate. When the rotating drive component rotates, it causes the first fall arrestor plate and the second fall arrestor plate to swing around the first rotating shaft and the second rotating shaft in the horizontal plane, so as to switch between the extended position and the retracted position. A clamping mechanism is disposed on the first fall arresting plate. The clamping mechanism includes an elastic component and a clamping component. The clamping component is hinged to the first fall arresting plate. The clamping component can swing horizontally relative to the first fall arresting plate while swinging synchronously with the first fall arresting plate. When the first fall arrestor is in the extended position, the wafer cassette abuts against the clamping assembly and pushes the clamping assembly to swing relative to the first fall arrestor, and the elastic component generates elastic deformation to press the clamping assembly against the lower region of the wafer cassette sidewall.

2. The fall arrestor according to claim 1, characterized in that: The clamping assembly includes a clamping link and a clamping head. One end of the clamping link is hinged to a first anti-fall plate via a vertically arranged third pivot, and the other end of the clamping link is hinged to the clamping head via a vertically arranged fourth pivot. The clamping head can abut against the side wall of the wafer cassette. The elastic components are a first torsion spring sleeved on the third rotating shaft and a second torsion spring sleeved on the fourth rotating shaft.

3. The fall arrestor according to claim 2, characterized in that: The clamping link includes a limiting part. The preload of the first torsion spring forces the clamping link to swing to the limiting part and abut against the first fall arrestor. During the swing of the first fall arrestor toward the extended position, the clamping link swings in the opposite direction to the first fall arrestor under the limitation of the wafer cassette, and the first torsion spring is continuously twisted.

4. The fall arrestor according to claim 2, characterized in that: In its natural state, the second torsion spring causes the clamping head to form an angle with the side wall of the wafer cassette. After the clamping head and the side wall of the wafer cassette come into contact, the wafer cassette pushes the clamping head to swing until the clamping head and the side wall of the wafer cassette are parallel, and the second torsion spring twists and stores force.

5. The fall arrestor according to claim 2, characterized in that: The clamping head includes a clamping substrate, on which clamping rollers are rotatably connected and can abut against the side wall of the wafer cassette.

6. The fall arrestor according to claim 1, characterized in that: In the extended position, the first and second fall arresters form an angle in the horizontal projection, with the second ends of the first and second fall arresters extending below the wafer cassette.

7. The fall arrestor according to claim 6, characterized in that: The second end of the first fall arrestor and the second end of the second fall arrestor are located on both sides of the center of the wafer cassette in a second direction.

8. The fall arrestor according to claim 1, characterized in that: The first fall arresting plate includes a first part and a third part in a stepped structure. The first part and the third part are horizontally arranged and the height of the first part is higher than the height of the third part. The first end of the first fall arresting plate is the end of the first part away from the third part, and the second end of the first fall arresting plate is the end of the third part away from the first part. The first rotating shaft is fixed on the first part, the third part and the second anti-fall plate are at the same height, the clamping mechanism is located above the third part, the first connecting rod is located above the first part, and the second connecting rod is located in the space below the first part and above the third part.

9. The fall arrestor according to claim 1, characterized in that: The device includes a detection mechanism, which includes two sets of first through-beam sensors fixed on the fixed frame. The two sets of first through-beam sensors correspond to the extended position and the retracted position, respectively. A first light-shielding plate that can block the light emitted by the first through-beam sensors is fixed on the rotating plate.

10. The fall arrestor according to any one of claims 1-9, characterized in that: It includes a baffle located in front of the cover of the wafer cassette, the baffle being able to swing up and down under the drive of the rotary drive to switch between an avoidance position and an obstruction position.

11. The fall arrestor according to claim 10, characterized in that: A fifth rotating shaft extending in the second direction is fixed on the baffle. The fifth rotating shaft is rotatably connected to the fixing frame. A first bevel gear is fixed on the first rotating shaft, and a second bevel gear meshing with the first bevel gear is fixed on the fifth rotating shaft.

12. An overhead crane, characterized in that: Includes the fall arrest device as described in any one of claims 1-11.

13. A fall prevention method, characterized in that: Based on the fall arrest device according to any one of claims 1-11, the method includes: After the wafer box is in place, the rotary drive is activated. The rotary drive drives the first fall arrestor to swing toward the extended position via the first connecting rod. The first fall arrestor drives the second fall arrestor to swing toward the extended position synchronously via the second connecting rod. When the first and second fall arresters swing to near their extended positions, the clamping head of the clamping assembly first abuts against the lower area of ​​the wafer cassette sidewall. The clamping assembly is restricted from moving forward by the wafer cassette, causing it to swing relative to the first fall arrester in the horizontal plane. The elastic component undergoes elastic deformation, pressing the clamping assembly against the sidewall of the wafer cassette in the opposite direction. The first and second fall arresters swing to the extended position under the action of the rotation drive.

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