Energy recovery device of intelligent semiconductor ultrapure water production system

Abstract

The application provides an energy recovery device of an intelligent semiconductor ultrapure water production system, relates to the technical field of energy recovery of pure water preparation, and comprises a filter, a butt joint pipe is fixedly installed on the right side of the filter, a first shell and a second shell are fixedly installed on the right side of the butt joint pipe, a gear pump is fixedly installed on the right side of the first shell and the second shell, a recovery device is installed on the outer side of the gear pump, helical grooves are respectively formed in the first shell and the second shell, and the helical grooves are downwardly inclined. The device is provided with inclined helical grooves in the first shell and the second shell, and the pressure energy of concentrated water is converted into mechanical energy to drive a booster pump to generate high-pressure gas flow. The motor housing of the booster pump is provided with a helical groove and a flow guide cover, the high-pressure gas flow output by the booster pump is sent into the flow guide cover from the air inlet pipe, and the high-pressure gas flow is discharged into the recovery device from the air outlet pipe after heat is taken away. The device recovers gas flow residual pressure and waste heat, solves the problem of waste of impact force of ultrapure water, and solves the problem of motor heat dissipation through an independent heat dissipation fan.

Description

Technical Field

[0001] This invention relates to the field of energy recovery technology in pure water preparation, and more particularly to an energy recovery device for an intelligent semiconductor ultrapure water production system. Background Technology

[0002] Currently, impurities need to be filtered out during the production of pure water. Pure water production utilizes intelligent semiconductor ultrapure water production systems. These systems produce pure water under high pressure, and pumps are used to pressurize or pump the water flow. The pump's drive motor generates high-temperature heat during operation. This high-pressure flow and high-temperature heat create energy consumption issues in ultrapure water production. The internal high-pressure pure water is discharged directly to the outside through the pressure relief pipe. The high-power gear pump continuously works to increase the pressure, and the huge water pressure impact force brought by the water flow is completely wasted. At present, a separate driven fan is installed on the outside of the water pump drive motor for heat dissipation. However, the addition of the water pump drive motor will increase the drive energy consumption of the motor. During the heat dissipation process, the heat will be directly discharged into the air, resulting in heat energy waste. Summary of the Invention

[0003] This invention relates to an energy recovery device for an intelligent semiconductor ultrapure water production system, which solves the problem of waste of ultrapure water impact force, as well as the problem of motor heat dissipation by an independent cooling fan, and also solves the problem of motor heat being wasted by dissipating through air holes.

[0004] This invention provides an energy recovery device for an intelligent semiconductor ultrapure water production system, specifically comprising: a filter, wherein a connecting pipe is fixedly installed on the right side of the filter, and a first housing and a second housing are fixedly installed on the right side of the connecting pipe; a gear pump is fixedly installed on the right side of the first housing and the second housing, and a recovery device is installed on the outside of the gear pump; The first and second housings each have spiral grooves inside, which slope downwards. Both housings have rotating grooves inside, and water wheels are installed inside the rotating grooves. The right end of the spiral groove is aligned with the upper end of the water wheel. A filter screen is installed on the outside of the booster pump. A support rod is fixedly installed on the front side of the first housing, and the booster pump is snapped onto the outside of the support rod. Rotating shafts are provided on both the front and rear sides of the water wheel. A groove is provided around the front of the water wheel. A docking groove is provided at the center of the rear side of the booster pump. The grooves and the docking groove of the booster pump interlock. An electric motor is fixedly installed on the front side of the gear pump, and a flow guide is fixedly installed on the outside of the electric motor.

[0005] Furthermore, bolt mounting holes are provided at both the upper and lower positions of the first and second housings.

[0006] Furthermore, a sliding hole is provided at the edge of the filter screen, and a sliding rod is inserted inside the hole. A locking groove is provided on the front side of the support rod, and a locking buckle is fixed at the end of the sliding rod. A support spring is installed on the outside of the sliding rod, and the locking buckle is engaged in the locking groove.

[0007] Furthermore, the gear pump has a positioning plate at the bottom of its flange, and the bottom of the first housing and the second housing flange are inserted into the positioning plate.

[0008] Furthermore, the inner side of the drainage cover and the outer side of the electric motor are in slight contact.

[0009] Furthermore, the electric motor housing of the gear pump has a spiral groove, an air inlet pipe is fixedly installed on the left side of the flow shroud, and an air outlet pipe is fixedly installed on the right side of the flow shroud. The air inlet pipe and the air outlet pipe are staggered backward. A flow pipe is installed between the right side of the booster pump and the air inlet pipe, and a flow pipe is installed between the air outlet pipe and the recovery device.

[0010] Furthermore, the drive shaft of the gear pump extends outward, and a groove distributed around its rear side is provided. A corresponding mating groove is provided on the front side of the rotating rod. The groove on the rear side of the drive shaft is engaged with the mating groove, and the groove and the mating groove are connected.

[0011] Furthermore, a sturdy housing is fixedly installed on the rear side of the second housing, with a limit hole inside, and the rotating rod is inserted into the limit hole, with the rotating rod and the limit hole being rotatably connected.

[0012] Furthermore, a compression pump is fixedly installed on the left side of the recycler, and a driven bevel gear is fixedly installed on the drive shaft of the compression pump; a drive bevel gear is fixedly installed on the rear side of the rotating rod, and the driven bevel gear and the drive bevel gear mesh.

[0013] This invention provides an energy recovery device for an intelligent semiconductor ultrapure water production system. By relying on a recovered airflow-cooled motor, it eliminates the need for a separate cooling fan and simultaneously recovers waste heat and pressure from the airflow, further improving energy efficiency. Specific beneficial effects are as follows: This device features inclined spiral grooves inside the first and second housings to guide high-pressure concentrated water to impact the water impeller, converting the concentrated water pressure energy into mechanical energy to drive the booster pump and generate high-pressure airflow. The booster pump's motor housing is equipped with spiral grooves and a flow guide shroud. The high-pressure airflow output by the booster pump is sent into the flow guide shroud through the air inlet pipe, flows along the spiral grooves of the motor housing, and fully carries away heat before being discharged into the recovery unit through the air outlet pipe. This recovers the residual pressure and heat of the airflow, solving the problem of wasted impact force of ultrapure water and the problem of heat dissipation from the motor by an independent cooling fan, while also solving the problem of wasted heat from the motor dissipating through the air vents.

[0014] The recovery unit is equipped with a compressor pump to assist in the recovery of residual pressure and heat, and simultaneously drives the gear pump to run the compressor pump, saving drive energy consumption.

[0015] The booster pump is equipped with a slot for quick docking with the rotating shaft of the water wheel, and a sliding rod and locking buckle are provided to quickly lock the booster pump, so that it can remain stable even if the booster pump vibrates. In addition, the first and second housings are easy to disassemble and assemble, and the internal spiral groove and water wheel can be easily disassembled and cleaned. Attached Figure Description

[0016] To more clearly illustrate the technical solutions of the embodiments of the present invention, the accompanying drawings of the embodiments will be briefly described below.

[0017] The accompanying drawings described below are only related to some embodiments of the invention and are not intended to limit the invention.

[0018] In the attached diagram: Figure 1 A schematic diagram of the combined structure of the energy recovery device and filter of the present invention is shown.

[0019] Figure 2 A schematic diagram of the energy recovery device of the present invention is shown.

[0020] Figure 3 A schematic diagram of the cross-sectional structure of the drainage cover of the present invention is shown.

[0021] Figure 4 A schematic diagram of the second shell split structure of the present invention is shown.

[0022] Figure 5 The present invention is shown Figure 4 A schematic diagram of the structure from the rear view.

[0023] Figure 6 A schematic diagram of the second housing, booster pump, and filter screen of the present invention is shown.

[0024] Figure 7 A cross-sectional schematic diagram of the rotating rod and the stable housing of the present invention is shown.

[0025] Figure 8 A partial cross-sectional view of the booster pump and filter screen of the present invention is shown.

[0026] Figure 9 The diagram shows a top view of the first and second housings of the present invention after cross-section.

[0027] List of reference numerals 100. Filter; 200. Takeover; 310. First housing; 3101. Support rod; 320. Second housing; 330. Water turbine; 340. Booster pump; 350. Filter screen; 400. Sliding rod; 410. Locking buckle; 500. Gear pump; 510. Drainage shroud; 600. Rotating rod; 610. Stable housing; 700. Recycler; 710. Compression pump. Detailed Implementation

[0028] Example 1: Please refer to Figures 1 to 9 : This invention proposes an energy recovery device for an intelligent semiconductor ultrapure water production system, comprising: a filter 100, a connecting pipe 200 fixedly installed on the right side of the filter 100, and a first housing 310 and a second housing 320 fixedly installed on the right side of the connecting pipe 200; the interiors of the first housing 310 and the second housing 320 are respectively provided with spiral grooves, the spiral grooves being downwardly inclined, and the interiors of both the first housing 310 and the second housing 320 are provided with rotating grooves, and water wheels 330 are installed inside the rotating grooves; the right port of the spiral groove and the upper part of the water wheel 330 are connected. With the ends aligned, the high-pressure concentrate of semiconductor ultrapure water flows along the inclined spiral groove. The spiral water flow accelerates and impacts the blades of the water turbine 330, converting the pressure energy of the concentrate into the rotational power of the water turbine 330. The inclined spiral structure can concentrate the water flow, reduce the loss of water pressure energy, and improve energy recovery efficiency. Bolt mounting holes are provided at the upper and lower positions of the first housing 310 and the second housing 320. The matching bolts are installed in the bolt mounting holes to make the first housing 310 and the second housing 320 firmly connected. At the same time, it is easy to disassemble and assemble, which facilitates the later maintenance and cleaning of the water turbine 330. In this embodiment, a filter screen 350 is installed on the outside of the booster pump 340. A support rod 3101 is fixedly provided on the front side of the first housing 310. Two support rods 3101 are provided, and the booster pump 340 is snapped onto the outside of the support rods 3101. The two support rods 3101 support the booster pump 340, realizing the rapid positioning and support of the booster pump 340. The filter screen 350 filters impurities in the air to prevent impurities from entering the booster pump 340. Rotating shafts are provided on both the front and rear sides of the water wheel 330. The front side of the rotating shaft is provided with a circumferentially distributed slot, which is an arc structure. A docking groove is provided at the center of the rear side of the booster pump 340. The front side of the rotating shaft is snapped into the docking groove. The arc slot and the docking groove of the booster pump 340 interlock with each other. When the water wheel 330 rotates, it can stably drive the impeller inside the booster pump 340 to rotate synchronously, effectively utilizing the impact force of pure water and relying on the recovered energy to boost the air. In this embodiment, a locking groove is provided on the front side of the support rod 3101. The locking groove is a circular ring structure. A locking buckle 410 is fixedly provided at the end of the sliding rod 400. The locking buckle 410 is a U-shaped structure. A support spring is installed on the outside of the sliding rod 400. The support spring pushes the sliding rod 400 and the locking buckle 410 outward. The locking buckle 410 is engaged in the locking groove and locks the support rod 3101 tightly, quickly locking the booster pump 340. The booster pump 340 will not fall off the support rod 3101 when it vibrates during operation. Pressing the sliding rod 400 inward can unlock the booster pump 340. The booster pump 340 can be quickly disassembled, repaired, and replaced. In this embodiment, a gear pump 500 is fixedly installed on the right side of the first housing 310 and the second housing 320. A positioning plate is provided at the bottom of the flange of the gear pump 500. The positioning plate has an arc structure. The bottom of the flange of the first housing 310 and the second housing 320 is inserted into the interior of the positioning plate. The arc positioning plate of the flange of the first housing 310 and the second housing 320 allows for quick alignment when installing the first housing 310 and the second housing 320 without repeated adjustments. This achieves the effect of convenient assembly of the first housing 310, the second housing 320 and the gear pump 500. An electric motor is fixedly installed on the front side of the gear pump 500. A flow guide shroud 510 is fixedly installed on the outside of the electric motor. The inner side of the flow guide shroud 510 is in slight contact with the outer side of the electric motor. The flow guide shroud 510 covers the outer shell of the electric motor. Air flows along the surface of the motor, carrying away the heat generated by the motor operation and preventing the motor from burning out due to high temperature overload. At the same time, it saves the energy consumption of setting up a separate heat sink for the electric motor. In this embodiment, the electric motor housing of the gear pump 500 has a spiral groove, the left side of the flow shroud 510 is fixedly provided with an air inlet pipe, and the right side of the flow shroud 510 is fixedly provided with an air outlet pipe. The air inlet pipe and the air outlet pipe are staggered rearward. A flow shroud is installed between the right side of the booster pump 340 and the air inlet pipe, and a flow shroud is installed between the air outlet pipe and the recovery unit 700. The high-pressure airflow output by the booster pump 340 is sent into the flow shroud 510 through the air inlet pipe, flows along the spiral groove of the motor housing, and after fully removing heat, it is discharged into the recovery unit 700 through the air outlet pipe to recover the residual pressure and heat of the airflow, and at the same time realize the air cooling of the motor, achieving two goals at once. The drive shaft of the gear pump 500 extends outward, and a groove distributed around its rear side is provided. A corresponding docking groove is provided on the front side of the rotating rod 600. The groove on the rear side of the drive shaft is engaged in the docking groove. The groove and the docking groove are connected. When the gear pump 500 is running, it can synchronously drive the rotating rod 600 to rotate synchronously, realizing the recovery and utilization of energy. In this embodiment, a regenerator 700 is installed on the outside of the gear pump 500, and a stabilizing housing 610 is fixedly installed on the rear side of the second housing 320. A limiting hole is opened inside the stabilizing housing 610, and the rotating rod 600 is inserted into the limiting hole. The rotating rod 600 and the limiting hole are rotatably connected. The stabilizing housing 610, in conjunction with the limiting hole, positions and supports the rotating rod 600 back and forth. The limiting hole of the stabilizing housing 610 supports the rotating rod 600, restricting the rotating rod 600 from moving back and forth or shifting left and right, so that the rotating rod 600 rotates stably. A compression pump 710 is fixedly installed on the left side of the regenerator 700, and a driven bevel gear is fixedly installed on the drive shaft of the compression pump 710. A drive bevel gear is fixedly installed on the rear side of the rotating rod 600. The driven bevel gear and the drive bevel gear mesh. The rotating rod 600 drives the bevel gear to rotate, thereby driving the compression pump 710 to operate. The compression pump 710 pressurizes the recovered waste heat gas flow to further recover energy.

[0029] Example 2, based on Example 1, such as Figures 1-9 As shown, the filter 100, the connecting pipe 200, the first housing 310, the second housing 320, and the gear pump 500 are all provided with flanges on both the left and right sides, and matching bolts are installed between the flanges; the left flange of the filter 100 is installed at the terminal of the intelligent semiconductor ultrapure water production system.

[0030] Example 3, based on Example 1, such as Figures 1-9 As shown, the first housing 310, the second housing 320, the water turbine 330, the booster pump 340, and the filter screen 350 work together to form an energy transport unit.

[0031] The working principle of this embodiment: First, install the booster pump 340 on the outside of the support rod 3101. The two support rods 3101 support the booster pump 340. The spring pushes the locking buckle 410 into the locking groove to secure the booster pump 340. The gear pump 500 quickly fits the flanges of the first housing 310 and the second housing 320 through the bottom arc positioning plate, completing the rapid assembly of the first housing 310, the second housing 320 and the gear pump 500, and installing the drain cover 510 on the outside of the electric motor. The high-pressure concentrate generated by the semiconductor ultrapure water system first passes through filter 100 to filter impurities, and then is sent into the first housing 310 and the second housing 320 through connecting pipe 200. The high-pressure concentrate flows downward at an accelerated speed along the inclined spiral grooves inside the first housing 310 and the second housing 320. The high-speed water flow impacts the blades of the water turbine 330, driving the water turbine 330 to rotate continuously, converting the pressure potential energy of the concentrate into rotational mechanical energy. The rotating shaft at the front of the water turbine 330 drives the booster pump 340 to operate synchronously. The high-pressure airflow output by the booster pump 340 is sent into the duct 510 through the air inlet pipe, flows along the spiral groove of the motor housing, and after fully removing the heat, it is discharged into the recovery unit 700 through the air outlet pipe to recover the residual pressure and heat of the airflow. The rear drive shaft of gear pump 500 drives rotating rod 600 to rotate, rotating rod 600 drives bevel gear to rotate, driving compressor pump 710 to operate. Compressor pump 710 pressurizes the recovered waste heat gas flow, helping the recoverer 700 to collect energy and reduce the overall power consumption of the device.

[0032] During device maintenance, press the sliding rod 400 inward to unlock the booster pump 340, remove the booster pump 340, loosen and disassemble the connecting bolts of the first housing 310 and the second housing 320, and clean the internal water wheel 330 and spiral groove.

Claims

1. An energy recovery device for an intelligent semiconductor ultrapure water production system, characterized in that, include: A filter (100) is fixedly installed on the right side of the filter (100), and a first housing (310) and a second housing (320) are fixedly installed on the right side of the connecting pipe (200); a gear pump (500) is fixedly installed on the right side of the first housing (310) and the second housing (320), and a recycler (700) is installed on the outside of the gear pump (500). The first housing (310) and the second housing (320) are respectively provided with spiral grooves inside, the spiral grooves are inclined downwards, and the first housing (310) and the second housing (320) are both provided with rotating grooves inside, and water wheels (330) are installed inside the rotating grooves. The right port of the spiral groove is aligned with the upper end of the water wheel (330). A filter screen (350) is installed on the outside of the booster pump (340). A support rod (3101) is fixedly provided on the front side of the first housing (310), and the booster pump (340) is snapped on the outside of the support rod (3101). The water wheel (330) is provided with rotating shafts on both the front and rear sides. A groove is provided around the front side of the water wheel (330). A docking groove is provided at the center of the rear side of the booster pump (340). The groove and the docking groove of the booster pump (340) mesh with each other. An electric motor is fixedly installed on the front side of the gear pump (500), and a diversion cover (510) is fixedly installed on the outside of the electric motor.

2. The energy recovery device of the intelligent semiconductor ultrapure water production system according to claim 1, characterized in that, Bolt mounting holes are provided at the upper and lower positions of the first housing (310) and the second housing (320).

3. The energy recovery device of the intelligent semiconductor ultrapure water production system according to claim 1, characterized in that, The filter screen (350) has a sliding hole at its edge, and a sliding rod (400) is inserted inside it. A locking groove is provided on the front side of the support rod (3101). A locking buckle (410) is fixed at the end of the sliding rod (400). A support spring is installed on the outside of the sliding rod (400). The locking buckle (410) is engaged in the locking groove.

4. The energy recovery device of the intelligent semiconductor ultrapure water production system according to claim 1, characterized in that, The gear pump (500) has a positioning plate at the bottom of its flange, and the bottom of the flanges of the first housing (310) and the second housing (320) are inserted into the interior of the positioning plate.

5. The energy recovery device of the intelligent semiconductor ultrapure water production system according to claim 1, characterized in that, The inner side of the drainage cover (510) and the outer side of the electric motor are in slight contact.

6. The energy recovery device of the intelligent semiconductor ultrapure water production system according to claim 1, characterized in that, The electric motor housing of the gear pump (500) has a spiral groove. An air inlet pipe is fixedly installed on the left side of the shroud (510), and an air outlet pipe is fixedly installed on the right side of the shroud (510). The air inlet pipe and the air outlet pipe are staggered backward. A drainage pipe is installed between the right side of the booster pump (340) and the air inlet pipe, and a drainage pipe is installed between the air outlet pipe and the regenerator (700).

7. The energy recovery device of the intelligent semiconductor ultrapure water production system according to claim 1, characterized in that, The drive shaft of the gear pump (500) extends outward, and a groove is provided around its rear side. A corresponding mating groove is provided on the front side of the rotating rod (600). The groove on the rear side of the drive shaft is engaged in the mating groove, and the groove and the mating groove are connected.

8. The energy recovery device of the intelligent semiconductor ultrapure water production system according to claim 1, characterized in that, A sturdy housing (610) is fixedly installed on the rear side of the second housing (320), and a limiting hole is opened inside it. The rotating rod (600) is inserted into the limiting hole, and the rotating rod (600) and the limiting hole are rotatably connected.

9. The energy recovery device of the intelligent semiconductor ultrapure water production system according to claim 1, characterized in that, A compression pump (710) is fixedly installed on the left side of the recycler (700), and a driven bevel gear is fixedly installed on the drive shaft of the compression pump (710); a drive bevel gear is fixedly installed on the rear side of the rotating rod (600), and the driven bevel gear and the drive bevel gear mesh.

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