A system for treating tmaH waste liquid and a method thereof

Abstract

The application discloses a TMAH waste liquid treatment system and method, and belongs to the technical field of industrial waste water treatment. The system comprises a raw water collecting tank, a pretreatment assembly for adjusting the pH value and flocculating of the TMAH waste liquid connected to the liquid outlet end of the raw water collecting tank, a floatation separation assembly connected to the output end of the pretreatment assembly for floatation separation, a scum discharge assembly and a pH value adjusting assembly connected to the floatation separation assembly, an anaerobic fermentation assembly connected to the pH value adjusting assembly, and a filter assembly for filtering water generated by anaerobic fermentation connected to the anaerobic fermentation assembly. The application realizes directional and efficient conversion of the organic nitrogen with difficult biodegradation in the TMAH into inorganic ammonia nitrogen, and the conversion rate can reach more than 85%. This fundamentally and greatly reduces the biological toxicity of the waste liquid, creates necessary conditions for subsequent biological treatment, and solves the industry problem that the TMAH directly inhibits microbial activity.

Description

Technical Field

[0001] This invention relates to the field of industrial wastewater treatment technology, specifically to a TMAH waste liquid treatment system and method. Background Technology

[0002] Tetramethylammonium hydroxide (TMAH) is a photoresist developer widely used in the microelectronics industry. The resulting wastewater is highly alkaline, has high COD, high organic nitrogen (in the form of TMAH), and is highly toxic, classifying it as a difficult-to-treat hazardous waste. Traditional treatment methods mainly suffer from the following problems: 1. Advanced oxidation methods (such as Fenton and ozone oxidation): Although they can effectively degrade TMAH, they have extremely high operating costs and may produce secondary pollution, making them uneconomical and only suitable for low-concentration wastewater.

[0003] 2. Single biological treatment method: TMAH without pretreatment has a strong inhibitory effect on microorganisms, and direct biological treatment is inefficient and the system is difficult to operate stably.

[0004] 3. Simple physicochemical methods (such as resin adsorption and membrane separation): Although TMAH can be recovered or concentrated, the investment cost is high, and the disposal of the concentrate or regenerated liquid still needs to be addressed, thus failing to achieve complete harmlessness.

[0005] 4. Incomplete treatment: Most processes focus on COD removal and pay insufficient attention to the conversion of organic nitrogen to inorganic nitrogen, resulting in high total nitrogen and toxic residues in the effluent, which cannot meet increasingly stringent discharge standards and wastewater treatment and reuse standards, especially the requirements for ammonia nitrogen and total nitrogen.

[0006] In addition, current wastewater treatment requires the use of flotation equipment, but existing flotation equipment has the following problems: 1. The scum scraper scrapes the scum on the upper liquid surface in the scum zone. The scraping depth of the scum scraper is fixed, which makes it impossible to adjust the scraping depth and is not conducive to improving the scum removal efficiency. 2. During the operation of the chain-driven scraper, some of the scum will adhere to the scraper when it is discharged into the scum discharge trough. The scraper will then carry the scum on its surface back into the flotation tank, reducing the scraping effect of the scraper on the scum in the flotation tank and thus reducing the efficiency of the scraping work.

[0007] Based on this, the present invention designs a TMAH waste liquid treatment system and method to solve the above problems. Summary of the Invention

[0008] In view of the above-mentioned shortcomings of the existing technology, the present invention provides a TMAH waste liquid treatment system and method.

[0009] To achieve the above objectives, the present invention provides the following technical solution: A TMAH waste liquid treatment system includes a raw water collection tank; The outlet of the raw water collection tank is connected to a pretreatment component for adjusting the pH value and flocculating TMAH waste liquid. The output of the pretreatment component is connected to a flotation separation component for flotation separation; The flotation separation unit is connected to a scum discharge unit and a pH adjustment unit; The pH adjustment component is connected to the anaerobic fermentation component; The anaerobic fermentation unit is connected to a filter unit for filtering the water produced by anaerobic fermentation.

[0010] Furthermore, the pretreatment components include a pH adjustment tank, a coagulation tank, a flocculation tank, and a raw water tank transfer pump. The input and output ends of the raw water tank transfer pump are connected to the raw water collection tank and the pH adjustment tank respectively via pipelines. The pH adjustment tank is connected to the coagulation tank via a pipeline, the coagulation tank is connected to the flocculation tank via a pipeline, and the flocculation tank is connected to the flotation separation component.

[0011] Furthermore, the flotation separation component includes an air flotation tank, a dissolved air pump, and a sludge scraper. The air flotation tank is fixedly connected to the output end of the flocculation tank, the dissolved air pump is connected to the air flotation tank, and the sludge scraper is fixedly installed on the air flotation tank.

[0012] Furthermore, the scum discharge assembly includes a scum collection tank and a scum conveying pump. The input end of the scum collection tank is connected to the scum discharge output end of the flotation tank, the input end of the scum conveying pump is connected to the output end of the scum collection tank, and the output end of the scum conveying pump is connected to an external scum transport structure via a pipeline.

[0013] Furthermore, the pH adjustment component includes a pH adjustment tank and an anaerobic sludge bed reactor influent pump. The pH adjustment tank is fixedly connected to the drainage end of the flotation tank, the input end of the anaerobic sludge bed reactor influent pump is connected to the pH adjustment tank, and the output end of the anaerobic sludge bed reactor influent pump is connected to the anaerobic fermentation component.

[0014] Furthermore, the anaerobic fermentation component includes an upflow anaerobic sludge bed reactor and a water seal tank. The input end of the upflow anaerobic sludge bed reactor is fixedly connected to the output end of the anaerobic sludge bed reactor feed pump. The top of the upflow anaerobic sludge bed reactor is connected to the water seal tank through a pipe, and the water seal tank is connected to the air through a pipe.

[0015] Furthermore, the filtration assembly includes an intermediate tank, a filter, a resin tower, and an intermediate tank transfer pump. The intermediate tank is connected to the upflow anaerobic sludge bed reactor via a pipeline. The input and output ends of the intermediate tank transfer pump are connected to the input ends of the intermediate tank and the filter via pipelines, respectively. The output end of the filter is connected to the input end of the resin tower. The output end of the resin tower is connected to the wastewater biological denitrification system via a pipeline.

[0016] Furthermore, the slag scraper includes an adaptive slag scraping component, a follow-up cleaning component, and a slag discharge component. The adaptive slag scraping component, the follow-up cleaning component, and the slag discharge component are all connected to the top of the flotation tank. The adaptive slag scraping component is movably connected to the follow-up cleaning component. The top of the slag discharge component is located below the spray end of the follow-up cleaning component, and the liquid outlet end of the slag discharge component is set towards the slag discharge port of the flotation tank.

[0017] Furthermore, the adaptive scraping assembly includes a drive assembly, an elastic scraping assembly, and a guide assembly. The drive assembly is fixedly connected to the flotation tank. Multiple sets of elastic scraping assemblies are installed on the drive assembly at equal intervals along its circumference. Two sets of guide assemblies are fixedly installed on the inner wall of the flotation tank, and the guide assemblies are movably connected to the elastic scraping assemblies.

[0018] To better achieve the objectives of this invention, this invention also provides a treatment method utilizing a TMAH waste liquid treatment system, comprising the following steps: Step 1: TMAH waste liquid is temporarily stored in the raw water collection tank. The pH value of the TMAH waste liquid is adjusted and flocculated through the pretreatment component. The pH value is adjusted to 2-3. Step 2: The flotation separation component removes scum from the flocculated water, and the pH adjustment component readjusts the pH of the water after scum removal. Step 3: Adjust the pH value of the water and introduce it into the anaerobic fermentation unit for anaerobic fermentation. Maintain the anaerobic fermentation temperature at a mesophilic level of 35-38℃. Step 4: The water after anaerobic fermentation enters the filter assembly for filtration treatment, and the final product water enters the wastewater biological denitrification system.

[0019] Compared with existing technologies, the advantages of this invention are as follows: 1. In this invention, TMAH wastewater is temporarily stored in a raw water collection tank. A pretreatment component adjusts the pH and performs flocculation on the TMAH wastewater. A flotation separation component removes the scum after flocculation. A pH adjustment component readjusts the pH of the water after scum removal. The pH-adjusted water then enters an anaerobic fermentation component for anaerobic fermentation. The water after anaerobic fermentation is then filtered in a filtration component. The pretreatment and flotation separation components ensure stable water intake and efficient operation of the anaerobic fermentation component. The anaerobic fermentation component performs the main pollutant removal and detoxification functions. The filtration component acts as a "safety net," ensuring the quality of the final effluent. Through the effective treatment of high-concentration TMAH wastewater by the anaerobic fermentation component, the recalcitrant organic nitrogen in TMAH is converted into inorganic ammonia nitrogen in a targeted and efficient manner, with a conversion rate exceeding 85%. This fundamentally and significantly reduces the biotoxicity of the wastewater, creating the necessary conditions for subsequent biological treatment and solving the industry problem of TMAH directly inhibiting microbial activity.

[0020] 2. As the scraper moves between the sludge discharge guide plate and the flotation tank, sludge gradually accumulates. The scraper moves downwards as the sludge accumulates, preventing the accumulated sludge from returning to the flotation tank and causing incomplete scraping. This prevents the sludge from re-sinking into the water. Furthermore, when the scraper is positioned away from the flotation tank and near the sludge discharge guide plate, the lower underwater section of the scraper reduces movement resistance, contributing to energy savings. Simultaneously, it helps clean sludge adhering to the scraper, second connecting shaft, second rotating bearing, U-shaped plate, and first spring, preventing these components from carrying the sludge back into the flotation tank. This ensures effective sludge removal and improves scraping efficiency. Additionally, it prevents water and impurities from falling back into the flotation tank, avoiding damage to the air bubbles on the water surface and preventing sludge from re-sinking due to bubble rupture, thus guaranteeing the treatment effect. Attached Figure Description

[0021] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the accompanying drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are merely some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without any creative effort.

[0022] Figure 1 This is a structural diagram of a TMAH waste liquid treatment system according to the present invention; Figure 2 The three-dimensional structure of the slag scraper of the present invention Figure 1 Figure 3 This is a front view of the slag scraper of the present invention; Figure 4 This is a right view of the slag scraper of the present invention; Figure 5 The three-dimensional structure of the slag scraper of the present invention Figure 2 ; Figure 6 The three-dimensional structure of the slag scraper of the present invention Figure 3 ; Figure 7 The three-dimensional structure of the slag scraper of the present invention Figure 4 ; Figure 8 For along Figure 4 A sectional view along the AA direction; Figure 9 for Figure 5 Enlarged view of the structure at point B; Figure 10 for Figure 8 Enlarged view of the structure at point C; Figure 11 for Figure 5 Enlarged view of the structure at point D.

[0023] The labels in the diagram represent: 1. Raw water collection tank 2. pH adjustment tank 3. Coagulation tank 4. Flocculation tank 5. Dissolved air flotation tank 6. Scum collection tank 7. pH adjustment tank 8. Upflow anaerobic sludge bed reactor 9. Intermediate tank 10. Filter 11. Resin tower 12. Water seal tank 13. Raw water tank transfer pump 14. Dissolved air pump 15. Sludge scraper 151. Adaptive sludge scraper assembly 1511. Transmission assembly 1512. Drive motor 1513. Chain 1514. Sprocket 1515. Scraper 1516. Horizontal shaft 1517. First inclined chute 1518. Guide plate 1519. Horizontal chute 15110. Second inclined chute 15111. Slide rod 15112. First spring 15113. U-shaped plate 15114. First rotary bearing 15115. Second rotary bearing 15116. Second connection Shaft 15117. First connecting shaft 15118. First V-groove 15119. Second V-groove 152. Follow-up cleaning assembly 1521. Second spring 1522. Water inlet pipe 1523. Moving frame 1524. U-shaped spray pipe 1525. N-shaped plate 1526. Protrusion 1527. Inclined plate 1528. First support seat 1529. Third rotating bearing 15210. Second support seat 15211. Third spring 15212. Crossbar 15213. Third connecting shaft 15214. Bridge frame 15215. Connecting plate 15216. Cable chain 153. Slag discharge assembly 1531. Inclined collection trough 1532. Connecting frame 1533. Liquid collection trough 16. Scum conveying pump 17. Anaerobic sludge bed reactor inlet pump 18. Intermediate tank conveying pump. Detailed Implementation

[0024] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of the present invention. All other embodiments obtained by those skilled in the art based on the embodiments of the present invention without creative effort are within the scope of protection of the present invention.

[0025] The terms "left," "right," "front," "back," "up," and "down" used in the following description refer to the orientation from the perspective of the front view.

[0026] In some embodiments, please refer to the accompanying drawings. Figures 1-11 A TMAH waste liquid treatment system includes a raw water collection tank 1; The outlet end of the raw water collection tank 1 is connected to a pretreatment component for adjusting the pH value and flocculating the TMAH waste liquid; The output of the pretreatment component is connected to a flotation separation component for flotation separation; The flotation separation unit is connected to a scum discharge unit and a pH adjustment unit; The pH adjustment component is connected to the anaerobic fermentation component; The anaerobic fermentation unit is connected to a filter unit for filtering the water produced by anaerobic fermentation.

[0027] TMAH wastewater is temporarily stored in raw water collection tank 1. The pretreatment component adjusts the pH and performs flocculation on the TMAH wastewater. The flotation separation component removes the scum after flocculation. The pH adjustment component readjusts the pH of the water after scum removal. The pH-adjusted water then enters the anaerobic fermentation component for anaerobic fermentation. The water after anaerobic fermentation is then filtered in the filtration component. The pretreatment and flotation separation components ensure stable water intake and efficient operation of the anaerobic fermentation component. The anaerobic fermentation component performs the main pollutant removal and detoxification functions. The filtration component acts as a "safety net," ensuring the quality of the final effluent. The effective treatment of high-concentration TMAH wastewater through the anaerobic fermentation component achieves the targeted and efficient conversion of recalcitrant organic nitrogen in TMAH into inorganic ammonia nitrogen, with a conversion rate exceeding 85%. This fundamentally and significantly reduces the biotoxicity of the wastewater, creating the necessary conditions for subsequent biological treatment and solving the industry problem of TMAH directly inhibiting microbial activity.

[0028] The pretreatment components include a pH adjustment tank 2, a coagulation tank 3, a flocculation tank 4, and a raw water tank transfer pump 13. The input and output ends of the raw water tank transfer pump 13 are connected to the raw water collection tank 1 and the pH adjustment tank 2 respectively through pipes. The pH adjustment tank 2 is connected to the coagulation tank 3 through a pipe. The coagulation tank 3 is connected to the flocculation tank 4 through a pipe. The flocculation tank 4 is connected to the flotation separation component. Agitators for stirring are installed on pH adjustment tank 2, coagulation tank 3 and flocculation tank 4. pH adjustment tank 2 is also equipped with an online pH analyzer for pH value detection; TMAH waste liquid is temporarily stored in raw water collection tank 1. The raw water tank transfer pump 13 of the pretreatment component pumps the TMAH waste liquid in raw water collection tank 1 to pH adjustment tank 2. The pH online analyzer in pH adjustment tank 2 detects the pH value of TMAH waste liquid. According to the set value requirements, acid and alkali chemical agents are added to pH adjustment tank 2. When the pH value of TMAH waste liquid in pH adjustment tank 2 is adjusted to 2-3, it flows by gravity to coagulation tank 3 and adds coagulant PAC. Then it flows by gravity to flocculation tank 4 and adds flocculant PAM. Finally, it enters the flotation separation component to achieve pH adjustment and flocculation treatment of TMAH waste liquid. The flotation separation assembly includes an air flotation tank 5, a dissolved air pump 14, and a scraper 15. The air flotation tank 5 is fixedly connected to the output end of the flocculation tank 4, the dissolved air pump 14 is connected to the air flotation tank 5, and the scraper 15 is fixedly installed on the air flotation tank 5. After flocculation in flocculation tank 4, the water enters flotation tank 5. Dissolved air pump 14 adds air to flotation tank 5 for flotation treatment. Scum scraper 15 scrapes the scum and discharges it into scum discharge assembly. The water in flotation tank 5 enters pH adjustment assembly for secondary pH adjustment. The scum discharge assembly includes a scum collection tank 6 and a scum conveying pump 16. The input end of the scum collection tank 6 is connected to the scum discharge output end of the flotation tank 5, and the input end of the scum conveying pump 16 is connected to the output end of the scum collection tank 6. The output end of the scum conveying pump 16 is connected to an external scum transport structure through a pipeline. The scum discharged from the flotation tank 5 enters the scum collection tank 6 through the pipeline for temporary storage. When it needs to be transported out, the scum conveying pump 16 is started, and the scum conveying pump 16 pumps the scum in the scum collection tank 6 to the external scum transport structure. The pH adjustment component includes a pH adjustment tank 7 and an anaerobic sludge bed reactor inlet pump 17. The pH adjustment tank 7 is fixedly connected to the drain end of the flotation tank 5. The input end of the anaerobic sludge bed reactor inlet pump 17 is connected to the pH adjustment tank 7. The output end of the anaerobic sludge bed reactor inlet pump 17 is connected to the anaerobic fermentation component. pH adjustment tank 7 is also equipped with an online pH analyzer for pH value detection; The online pH analyzer in pH adjustment tank 7 detects the pH value of the water in pH adjustment tank 7, and acid and alkali chemical agents are added to adjust the pH value of the water in pH adjustment tank 7 to 6.5-7.5; The anaerobic fermentation assembly includes an upflow anaerobic sludge bed reactor 8 and a water seal box 12. The input end of the upflow anaerobic sludge bed reactor 8 is fixedly connected to the output end of the anaerobic sludge bed reactor feed pump 17. The top of the upflow anaerobic sludge bed reactor 8 is connected to the water seal box 12 through a pipe. The water seal box 12 is connected to the air through a pipe. The upflow anaerobic sludge bed reactor 8 is equipped with a three-phase separator and a water distributor. The three-phase separator is located above the water distributor, and the water distributor is set higher than the pipe connection between the upflow anaerobic sludge bed reactor 8 and the anaerobic sludge bed reactor inlet pump 17. The sludge discharge outlet of the upflow anaerobic sludge bed reactor 8 is connected to sludge transport equipment via a pipeline; The wastewater that has undergone pH adjustment in pH adjustment tank 7 is pumped to the upflow anaerobic sludge bed reactor 8 by the anaerobic sludge bed reactor inlet pump 17. After passing through the bottom distributor, the wastewater enters the upflow anaerobic sludge bed reactor 8 evenly. The temperature inside the upflow anaerobic sludge bed reactor 8 is maintained at a mesophilic temperature of 35-38℃. It is filled with long-term acclimatized anaerobic sludge. The biogas produced in the anaerobic process is separated by a three-phase separator and introduced into the water seal tank 12 through a pipeline. The biogas bubbled through the water, cooled and condensed some water vapor and washing droplets, and the dry gas was discharged from the top of the water seal tank 12. The remaining sludge from the anaerobic reaction is transported out by sludge removal equipment. The treated effluent from the upflow anaerobic sludge bed reactor 8 flows to the filter assembly by gravity. The filtration assembly includes an intermediate tank 9, a filter 10, a resin tower 11, and an intermediate tank transfer pump 18. The intermediate tank 9 is connected to the upflow anaerobic sludge bed reactor 8 via a pipeline. The input and output ends of the intermediate tank transfer pump 18 are connected to the input ends of the intermediate tank 9 and the filter 10 via pipelines, respectively. The output end of the filter 10 is connected to the input end of the resin tower 11. The output end of the resin tower 11 is connected to the wastewater biological denitrification system via a pipeline.

[0029] An online NH3-N analyzer and an online COD analyzer are installed on the pipeline between the output end of resin tower 11 and the wastewater biological denitrification system. Wastewater in intermediate tank 9 is transported to filter 10 via pipeline by intermediate tank transfer pump 18. After filter 10 intercepts sludge particles and impurities, the wastewater enters resin tower 11 from bottom to top to complete resin adsorption. The NH3-N online analyzer and COD online analyzer on the pipeline between the output end of resin tower 11 and wastewater biological denitrification system monitor the quality of resin-produced water in real time. Finally, the produced water enters the wastewater biological denitrification system.

[0030] The slag scraper 15 includes an adaptive slag scraping component 151, a follow-up cleaning component 152, and a slag discharge component 153. The adaptive slag scraping component 151, the follow-up cleaning component 152, and the slag discharge component 153 are all connected to the top of the flotation tank 5. The adaptive slag scraping component 151 is movably connected to the follow-up cleaning component 152. The top of the slag discharge component 153 is located below the spray end of the follow-up cleaning component 152, and the liquid outlet end of the slag discharge component 153 is set towards the slag discharge port of the flotation tank 5. The adaptive scraping assembly 151 includes a driving assembly, an elastic scraping assembly, and a guiding assembly. The driving assembly is fixedly connected to the flotation tank 5. Multiple sets of elastic scraping assemblies are installed on the driving assembly at equal intervals along the circumference of the driving assembly. Two sets of guiding assemblies are fixedly installed on the inner wall of the flotation tank 5, and the guiding assemblies are movably connected to the elastic scraping assemblies. The drive assembly includes a transmission assembly 1511, a drive motor 1512, a chain 1513, a sprocket 1514, and a horizontal shaft 1516. The flotation tank 5 is rotatably connected to the two ends of the two sets of horizontal shafts 1516 through a fixedly connected support base. Each set of horizontal shafts 1516 has a sprocket 1514 fixedly installed at the front and rear ends. The two sets of sprockets 1514 are meshed with a set of chains 1513. The drive motor 1512 is fixedly installed on the side wall of the flotation tank 5. The output end of the drive motor 1512 is connected to one of the sets of horizontal shafts 1516 through the transmission assembly 1511. Multiple sets of elastic scraping assemblies are installed at equal intervals along the circumference of the chain 1513. The elastic scraper assembly includes a scraper 1515, a slide bar 15111, a first spring 15112, a U-shaped plate 15113, a first rotating bearing 15114, a second rotating bearing 15115, a second connecting shaft 15116, and a first connecting shaft 15117. Two sets of first connecting shafts 15117 are arranged opposite each other and are respectively fixedly connected to the chain 1513. Both ends of the U-shaped plate 15113 are fixedly connected to the two sets of first connecting shafts 15117. The outer end of the first connecting shaft 15117 is fixedly connected to the inner ring of the first rotating bearing 15114. Multiple sets of first springs 15112... One end of each of the 12 is fixedly connected to the outer wall of the U-shaped plate 15113. The other end of each set of first springs 15112 is fixedly connected to one end of the slide rod 15111. The other end of the slide rod 15111 passes through the U-shaped plate 15113 and is fixedly connected to the scraper 1515. Two sets of second connecting shafts 15116 are fixedly installed at the end of the thinner part of the scraper 1515. The outer end of the second connecting shaft 15116 is fixedly connected to the inner ring of the second rotating bearing 15115. The outer ring of the second rotating bearing 15115 and the outer ring of the first rotating bearing 15114 are both movably connected to the guide assembly. The front and rear side walls of scraper 1515 are slidably connected to the inner wall of flotation tank 5. The guiding assembly includes guide plates 1518. Two sets of guide plates 1518 are fixedly installed on the upper ends of the front and rear inner walls of the flotation tank 5. A transverse groove 1519 is formed on the upper end of the guide plate 1518. The outer ring of the first rotating bearing 15114 is movably connected to the inner wall of the transverse groove 1519. Below the transverse groove 1519, the guide plate 1518 has a first inclined groove 1517 and a second inclined groove 15110. The first inclined groove 1517 is the same as the second inclined groove 15110. The second inclined groove 15110 is located above the slag discharge inclined guide plate of the flotation tank 5. The end of the first inclined groove 1517 away from the slag discharge inclined guide plate of the flotation tank 5 is higher than the end of the first inclined groove 1517 close to the slag discharge inclined guide plate of the flotation tank 5. The slope of the second inclined chute 15110 is consistent with the slope of the slag discharge inclined guide plate of the flotation tank 5. The end of the first inclined chute 1517 away from the slag discharge inclined guide plate of the flotation tank 5 is provided with a first V-shaped groove 15118. The end of the transverse chute 1519 away from the slag discharge inclined guide plate of the flotation tank 5 is provided with a second V-shaped groove 15119. The outer ring of the second rotating bearing 15115 is movably connected to the first inclined chute 1517 or the second inclined chute 15110. When the outer ring of the second rotating bearing 15115 is movably connected to the second inclined chute 15110, the end of the scraper 1515 away from the second connecting shaft 15116 is in contact with the top of the slag discharge inclined guide plate of the flotation tank 5 and is slidably connected. Transmission component 1511 can be either a belt pulley drive assembly or a chain sprocket drive assembly; During flotation separation, the drive motor 1512 of the adaptive scraping assembly 151 of the scraper 15 drives one set of horizontal shafts 1516 to rotate via the transmission assembly 1511. One set of horizontal shafts 1516 drives the sprockets 1514 connected to it to rotate. The sprockets 1514 connected to the other set of horizontal shafts 1516, in conjunction with the chain 1513, drive the chain 1513 to rotate. The chain 1513 drives the first connecting shaft 15117 of the elastic scraping assembly to move. The first connecting shaft 15117 drives the U-shaped plate 15113 to move. The U-shaped plate 15113 drives the first spring 15112 to move. The first spring 15112 drives the slide rod 15111 to move. The transmission assembly 1511 drives the scraper 1515 to move. A first rotary bearing 15114 moves into the second V-shaped groove 15119 opened in the guide plate 1518 of the guide assembly. The second V-shaped groove 15119 guides the first rotary bearing 15114 to move into the transverse groove 1519. The transverse groove 1519 guides the first rotary bearing 15114. At the same time, the second rotary bearing 15115 moves into the first V-shaped groove 15118. The first V-shaped groove 15118 guides the second rotary bearing 15115 into the first inclined groove 1517. As the second rotary bearing 15115 moves towards the slag discharge inclined guide plate of the flotation tank 5, the first inclined groove 1517 guides the second rotary bearing 15115 to move horizontally and downward at the same time. 5115 drives the second connecting shaft 15116 to move horizontally and downwards simultaneously. The second connecting shaft 15116 drives the scraper 1515 to move horizontally and downwards simultaneously. The scraper 1515 pushes the scum in the flotation tank 5 towards the scum discharge inclined guide plate of the flotation tank 5. As the scraper 1515 moves, scum gradually accumulates between the scraper 1515 and the scum discharge inclined guide plate of the flotation tank 5. As the scum accumulates, the bottom of the scraper 1515 moves downwards to prevent the accumulated scum from returning to the flotation tank 5 from the bottom of the scraper 1515, thus avoiding incomplete scum scraping and preventing the scum from sinking back into the water. When the scraper 1515 is located away from the scum discharge inclined guide plate of the flotation tank 5, the scraper 1515 is in the water... With fewer insertion points in the middle and lower parts, the movement resistance is low, which helps to save energy. It does not require pushing at a fixed depth. After the second rotating bearing 15115 moves to the second inclined groove 15110, the second inclined groove 15110 drives the second connecting shaft 15116 to move horizontally and upward. The second connecting shaft 15116 drives the scraper 1515 to move horizontally and upward. The scraper 1515 moves along the slag discharge inclined guide plate of the flotation tank 5. The scraper 1515 and the slag discharge inclined guide plate of the flotation tank 5 cooperate to completely discharge the scum on the slag discharge inclined guide plate of the flotation tank 5. Compared with the existing rubber soft plate and the slag discharge inclined guide plate of the flotation tank 5, the sliding friction resistance is smaller, the wear is smaller, and the use cost is reduced.

[0031] The follow-up cleaning component 152 includes a reset support component, a follow-up water spray component, and an unlocking component. The reset support component, the follow-up water spray component, and the unlocking component are all connected to the flotation tank 5. The reset support component is in close contact with the follow-up water spray component. The follow-up water spray component is movably connected to the first rotating bearing 15114. The unlocking component is movably connected to the follow-up water spray component. The reset support assembly includes a second support base 15210, a third spring 15211, and a crossbar 15212. Both ends of the two sets of crossbars 15212 are fixedly connected to the second support base 15210. The second support base 15210 is fixedly connected to the flotation tank 5. The two sets of third springs 15211 are respectively sleeved on the two sets of crossbars 15212. One end of the third spring 15211 is fixedly connected to the second support base 15210, and the other end of the third spring 15211 is fixedly connected to the follow-up water spray assembly. The follow-up water spray assembly is in close sliding connection with the crossbar 15212. The follow-up water spray assembly includes a second spring 1521, a water inlet pipe 1522, a movable frame 1523, a U-shaped spray pipe 1524, an n-shaped plate 1525, a protrusion 1526, a ramp 1527, a bridge 15214, a connecting plate 15215, and a cable chain 15216. The other end of the third spring 15211 is fixedly connected to the movable frame 1523, and the third connecting shaft 15213 fits into the sliding hole opened in the movable frame 1523. A sliding connection is used, with the U-shaped nozzle 1524 fixedly installed between the movable frames 1523. The U-shaped nozzle 1524 is connected and fixedly connected to the water inlet pipe 1522. The water inlet pipe 1522 is installed inside the cable chain 15216, which is installed inside the cable tray 15214. The cable tray 15214 is fixedly installed on the side wall of the flotation tank 5. The outer wall of the movable frame 1523 is fixedly connected to the protrusion 1526. One of the n-shaped plates 1525... The upright part is slidably connected to the sliding hole of the protrusion 1526. The side wall of the upright part of the n-shaped plate 1525, which is slidably connected to the protrusion 1526, is fixedly connected to the bottom of the protrusion 1526. The bottom of the upright part of the n-shaped plate 1525, which is slidably connected to the protrusion 1526, is fixedly connected to the inclined plate 1527. The distance from the end of the inclined plate 1527 near the unlocking component to the unlocking component is less than the distance from the end of the inclined plate 1527 away from the unlocking component to the unlocking component. The protrusion 1526 located at the upper end of the bridge frame 15214 is fixedly connected to the movable end of the drag chain 15216 through the connecting plate 15215. When the other upright part of the n-shaped plate 1525 contacts the outer ring of the first rotating bearing 15114, the scraper 1515 is located directly below the U-shaped nozzle 1524, and the nozzle of the U-shaped nozzle 1524 faces the scraper 1515. Inlet pipe 1522 is connected to an external water pump; The unlocking assembly includes a first support base 1528, a third rotary bearing 1529, and a third connecting shaft 15213. The first support base 1528 is fixedly installed on the top of the flotation tank 5. The third connecting shaft 15213 is fixedly connected to the first support base 1528. The inner ring of the third rotary bearing 1529 is fixedly connected to the third connecting shaft 15213. The outer ring of the third rotary bearing 1529 is movably connected to the inclined plate 1527. The third spring 15211 of the reset support assembly of the follow-up cleaning component 152 drives the moving frame 1523 of the follow-up water spray component to move towards the slag discharge inclined guide plate of the flotation tank 5 to the set position. The chain 1513 drives the U-shaped plate 15113 to move above the chain 1513. The chain 1513 drives the outer ring of the first rotating bearing 15114 to contact the other upright part of the n-shaped plate 1525. The first rotating bearing 15114 pushes the n-shaped plate 1525 to move. The n-shaped plate 1525 drives the protrusion 1526 to move. The protrusion 1526 drives the moving frame 1523 to move. The moving frame 1523 drives the U-shaped spray pipe 1524 to move. At the same time, the external water pump sprays water into the U-shaped spray pipe through the inlet pipe 1522. Water is added to pipe 1524, and the U-shaped spray pipe 1524 sprays water onto scraper 1515, second connecting shaft 15116, second rotating bearing 15115, U-shaped plate 15113, and first spring 15112 for rinsing. This allows for simultaneous movement and water spraying, which helps to clean the scum adhering to scraper 1515, second connecting shaft 15116, second rotating bearing 15115, U-shaped plate 15113, and first spring 15112. This prevents the scraper 1515, second connecting shaft 15116, second rotating bearing 15115, U-shaped plate 15113, and first spring 15112 from carrying the scum back into the flotation tank 5, thus ensuring the effective removal of scum in the flotation tank 5 and improving the efficiency of the scum removal work. The n-shaped plate 1525 drives the inclined plate 1527 to move until it contacts the third rotating bearing 1529 of the unlocking component. The third rotating bearing 1529 pushes the inclined plate 1527 to move upward, and the inclined plate 1527 drives the n-shaped plate 1525 to move upward. After the n-shaped plate 1525 moves upward and separates from the first rotating bearing 15114, the third spring 15211 of the reset support component of the follow-up cleaning component 152 drives the moving frame 1523 of the follow-up water spray component to move towards the slag discharge inclined guide plate of the flotation tank 5 to the set position. The follow-up cleaning component 152 achieves follow-up cleaning without additional power drive, which is beneficial for practical use.

[0032] The slag discharge assembly 153 includes an inclined collection trough 1531, a connecting frame 1532, and a liquid collection trough 1533. The connecting frame 1532 is fixedly installed on the top of the flotation tank 5. The top of the connecting frame 1532 is fixedly connected to the bottom of the inclined collection trough 1531. The end of the inclined guide plate for slag discharge of the inclined collection trough 1531 near the flotation tank 5 is fixedly connected to the liquid collection trough 1533. The end of the inclined guide plate for slag discharge of the inclined collection trough 1531 near the flotation tank 5 is lower than the end of the inclined guide plate for slag discharge of the inclined collection trough 1531 away from the flotation tank 5. The end of the inclined guide plate for slag discharge of the liquid collection trough 1533 near the flotation tank 5 is lower than the end of the inclined guide plate for slag discharge of the liquid collection trough 1533 away from the flotation tank 5. The inclined collection trough 1531 completely covers the moving trajectory of the scraper 1515, the second connecting shaft 15116, the second rotating bearing 15115, the U-shaped plate 15113, and the first spring 15112. The water and impurities cleaned by the follow-up cleaning component 152 from the scraper 1515, the second connecting shaft 15116, the second rotating bearing 15115, the U-shaped plate 15113, and the first spring 15112 fall onto the inclined collection trough 1531 of the slag discharge component 153, and then collect in the liquid collection trough 1533. From the liquid collection trough 1533, the water and impurities are discharged to the slag collection position of the flotation tank 5, preventing water and impurities from falling back into the flotation tank 5. This also prevents water and impurities from damaging the air bubbles on the water surface in the flotation tank 5, thus preventing the scum from sinking back into the water due to the bursting of air bubbles and ensuring the treatment effect.

[0033] To better achieve the objectives of this invention, this invention also provides a treatment method utilizing a TMAH waste liquid treatment system, comprising the following steps: Step 1: The TMAH waste liquid is temporarily stored in the raw water collection tank 1. The pH value of the TMAH waste liquid is adjusted and flocculation is performed through the pretreatment component. The pH value is adjusted to 2-3. Step 2: The flotation separation component removes scum from the flocculated water, and the pH adjustment component readjusts the pH of the water after scum removal. Step 3: Adjust the pH value of the water and introduce it into the anaerobic fermentation unit for anaerobic fermentation. Maintain the anaerobic fermentation temperature at a mesophilic level of 35-38℃. Step 4: The water after anaerobic fermentation enters the filter assembly for filtration treatment, and the final product water enters the wastewater biological denitrification system.

[0034] The above embodiments are only used to illustrate the technical solutions of the present invention, and are not intended to limit it. Although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some of the technical features. Such modifications or substitutions will not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims

1. A TMAH waste liquid treatment system, comprising a raw water collection tank (1), characterized in that: The outlet end of the raw water collection tank (1) is connected to a pretreatment component for adjusting the pH value and flocculation of TMAH waste liquid; The output of the pretreatment component is connected to a flotation separation component for flotation separation; The flotation separation unit is connected to a scum discharge unit and a pH adjustment unit; The pH adjustment component is connected to the anaerobic fermentation component; The anaerobic fermentation unit is connected to a filter unit for filtering the water produced by anaerobic fermentation.

2. The TMAH waste liquid treatment system according to claim 1, characterized in that, The pretreatment components include a pH adjustment tank (2), a coagulation tank (3), a flocculation tank (4), and a raw water tank transfer pump (13). The input and output ends of the raw water tank transfer pump (13) are connected to the raw water collection tank (1) and the pH adjustment tank (2) respectively through pipes. The pH adjustment tank (2) is connected to the coagulation tank (3) through a pipe. The coagulation tank (3) is connected to the flocculation tank (4) through a pipe. The flocculation tank (4) is connected to the flotation separation component.

3. The TMAH waste liquid treatment system according to claim 2, characterized in that, The flotation separation assembly includes an air flotation tank (5), a dissolved air pump (14), and a scraper (15). The air flotation tank (5) is fixedly connected to the output end of the flocculation tank (4), the dissolved air pump (14) is connected to the air flotation tank (5), and the scraper (15) is fixedly installed on the air flotation tank (5).

4. The TMAH waste liquid treatment system according to claim 3, characterized in that, The scum discharge assembly includes a scum collection tank (6) and a scum conveying pump (16). The input end of the scum collection tank (6) is connected to the scum discharge output end of the flotation tank (5). The input end of the scum conveying pump (16) is connected to the output end of the scum collection tank (6). The output end of the scum conveying pump (16) is connected to an external scum transport structure through a pipeline.

5. The TMAH waste liquid treatment system according to claim 4, characterized in that, The pH adjustment component includes a pH adjustment tank (7) and an anaerobic sludge bed reactor inlet pump (17). The pH adjustment tank (7) is fixedly connected to the drain end of the flotation tank (5). The input end of the anaerobic sludge bed reactor inlet pump (17) is connected to the pH adjustment tank (7). The output end of the anaerobic sludge bed reactor inlet pump (17) is connected to the anaerobic fermentation component.

6. The TMAH waste liquid treatment system according to claim 5, characterized in that, The anaerobic fermentation assembly includes an upflow anaerobic sludge bed reactor (8) and a water seal box (12). The input end of the upflow anaerobic sludge bed reactor (8) is fixedly connected to the output end of the anaerobic sludge bed reactor feed pump (17). The top of the upflow anaerobic sludge bed reactor (8) is connected to the water seal box (12) through a pipe. The water seal box (12) is connected to the air through a pipe.

7. The TMAH waste liquid treatment system according to claim 6, characterized in that, The filtration assembly includes an intermediate tank (9), a filter (10), a resin tower (11), and an intermediate tank transfer pump (18). The intermediate tank (9) is connected to the upflow anaerobic sludge bed reactor (8) via a pipeline. The input and output ends of the intermediate tank transfer pump (18) are connected to the input ends of the intermediate tank (9) and the filter (10) via pipelines, respectively. The output end of the filter (10) is connected to the input end of the resin tower (11). The output end of the resin tower (11) is connected to the wastewater biological denitrification system via a pipeline.

8. The TMAH waste liquid treatment system according to any one of claims 3-7, characterized in that, The slag scraper (15) includes an adaptive slag scraping component (151), a follow-up cleaning component (152), and a slag discharge component (153). The adaptive slag scraping component (151), the follow-up cleaning component (152), and the slag discharge component (153) are all connected to the top of the flotation tank (5). The adaptive slag scraping component (151) is movably connected to the follow-up cleaning component (152). The top of the slag discharge component (153) is located below the spray end of the follow-up cleaning component (152), and the liquid outlet end of the slag discharge component (153) is set towards the slag discharge port of the flotation tank (5).

9. The TMAH waste liquid treatment system according to claim 8, characterized in that, The adaptive scraper assembly (151) includes a drive assembly, an elastic scraper assembly and a guide assembly. The drive assembly is fixedly connected to the flotation tank (5). Multiple sets of elastic scraper assemblies are installed on the drive assembly at equal intervals along the circumference of the drive assembly. Two sets of guide assemblies are fixedly installed on the inner wall of the flotation tank (5) and are movably connected to the elastic scraper assembly.

10. A treatment method utilizing the TMAH waste liquid treatment system of claim 9, characterized in that, Includes the following steps: Step 1: TMAH waste liquid is temporarily stored in raw water collection tank (1), and the pH value of TMAH waste liquid is adjusted and flocculated by pretreatment components. The pH value is adjusted to 2-3. Step 2: The flotation separation component removes scum from the flocculated water, and the pH adjustment component readjusts the pH of the water after scum removal. Step 3: Adjust the pH value of the water and introduce it into the anaerobic fermentation unit for anaerobic fermentation. Maintain the anaerobic fermentation temperature at a mesophilic level of 35-38℃. Step 4: The water after anaerobic fermentation enters the filter assembly for filtration treatment, and the final product water enters the wastewater biological denitrification system.

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