A spraying device, an evaporation coating apparatus and an evaporation coating method

Abstract

The embodiment of the present specification provides a spraying device which can be arranged on a nozzle for use, thereby improving the uniformity of the working gas flow sprayed from the nozzle, so that the evaporated material carried by the working gas flow can be uniformly sprayed onto the substrate to be plated, thereby being uniformly deposited on the substrate to be plated, forming a thin film with high thickness uniformity and improving the film forming quality.

Description

Technical Field

[0001] This specification relates to the field of semiconductor technology, specifically to evaporation coating technology in the field of semiconductor technology, and more specifically to a spraying device, evaporation coating equipment and evaporation coating method. Background Technology

[0002] Evaporation deposition technology is an important thin film deposition technique in semiconductor manufacturing. In a vacuum environment, evaporation deposition involves heating and vaporizing a material. Gaseous atoms or molecules are transported in the vacuum and reach the surface of the substrate (e.g., a wafer) at a certain energy and speed, where they condense to form a solid thin film. The entire evaporation deposition process can include several stages: heating and evaporating the evaporation source, transporting gaseous particles, and nucleation and growth on the surface of the substrate.

[0003] Evaporation coating equipment is the main equipment for the evaporation coating process. The structure of the evaporation coating equipment has a significant impact on the final film quality. Therefore, it is necessary to improve the film quality by modifying the structural features of the equipment. Summary of the Invention

[0004] This specification provides a spraying device, an evaporation coating equipment, and an evaporation coating method to improve the film quality of evaporation coating.

[0005] To achieve the above technical objectives, the embodiments of this specification provide the following technical solutions:

[0006] One embodiment of this specification provides a XXXXX.

[0007] One embodiment of this specification provides a XXXXX.

[0008] Thirdly, one embodiment of this specification also provides a computing device, including a memory, a processor, and a computer program stored in the memory and executable on the processor, wherein the processor executes the computer program to implement the classification method as described above.

[0009] Fourthly, one embodiment of this specification also provides a computer-readable storage medium storing a computer program that, when executed by a processor, implements the classification method as described above.

[0010] Fifthly, embodiments of this specification provide a computer program product or computer program, the computer program product including a computer program stored in a computer-readable storage medium; a processor of a computer device reads the computer program from the computer-readable storage medium, and when the processor executes the computer program, it implements the steps of the classification method described above. Optionally, the computer program may be stored in a computer-readable storage medium of a computer device or in the cloud; the processor of the computer device reads the computer program from the readable storage medium or in the cloud.

[0011] As can be seen from the above technical solutions, the spraying device provided in the embodiments of this specification can be used on the nozzle of the evaporation coating equipment, thereby improving the uniformity of the working airflow sprayed from the nozzle, so that the evaporation material carried by the working airflow can be sprayed evenly onto the substrate to be coated, thereby uniformly depositing on the substrate to be coated, forming a thin film with high thickness uniformity, and improving the film quality. Specifically, the spraying device includes: a spraying housing that forms a spraying channel, one end of the spraying channel being open for connecting the nozzle, and the other end of the spraying channel being open for facing the substrate to be coated; the opening size of the spraying channel first decreases and then increases along a first direction; the first direction includes the direction in which the nozzle faces the substrate to be coated; and a guide fluid disposed in the spraying housing, the cross-sectional size of the guide fluid first decreasing and then increasing along the first direction, and within the same target plane, the cross-sectional size of the guide fluid is smaller than the cross-sectional size of the spraying channel; in a plane perpendicular to the first direction, the smallest portion of the cross-sectional size of the guide fluid is aligned with the smallest portion of the cross-sectional size of the spraying channel. Thus, by cooperating with the spraying housing, the working airflow through the spraying device undergoes a process of compression followed by expansion, which helps to improve the uniformity of the vapor deposition material carried by the working airflow within the airflow, thereby allowing the vapor deposition material carried by the working airflow ejected from the spraying device to be uniformly deposited on the substrate to be coated, improving the film uniformity. Attached Figure Description

[0012] To more clearly illustrate the technical solutions in the embodiments or prior art of this specification, the drawings used in the description of the embodiments or prior art will be briefly introduced below. Obviously, the drawings described below are only embodiments of this specification. For those skilled in the art, other drawings can be obtained based on the provided drawings without creative effort.

[0013] Figure 1 A cross-sectional structural schematic diagram of a spraying device provided for one embodiment of this specification;

[0014] Figure 2A cross-sectional structural schematic diagram of another spraying device provided for one embodiment of this specification;

[0015] Figure 3 A top view of a spraying device provided for one embodiment of this specification;

[0016] Figure 4 A cross-sectional structural schematic diagram of another spraying device provided for one embodiment of this specification;

[0017] Figure 5 A top view of another spraying device provided for one embodiment of this specification;

[0018] Figure 6 A cross-sectional structural schematic diagram of another spraying device provided for one embodiment of this specification;

[0019] Figure 7 A schematic diagram of an evaporation coating apparatus provided for one embodiment of this specification;

[0020] Figure 8 This is a schematic flowchart of an evaporation coating method provided for one embodiment of this specification.

[0021] Explanation of reference numerals in the attached figures:

[0022] 100 - Spraying device; 200 - Evaporation coating equipment;

[0023] 10-Spraying housing; 11-First part; 12-Second part; 20-Spraying channel; 30-Flow guide; 40-Support; 50-Nozzle; 60-Flow guide structure; 201-Equipment housing; 202-Deposition section; 203-Material storage section; 204-Deposition space; 205-Crucible; 300-Substrate to be coated. Detailed Implementation

[0024] Unless otherwise defined, the technical or scientific terms used in the embodiments of this specification shall have the ordinary meaning understood by one of ordinary skill in the art to which this specification pertains. The terms "first," "second," and similar terms used in the embodiments of this specification do not indicate any order, quantity, or importance, but are merely used to avoid confusion of constituent elements.

[0025] Unless the context otherwise requires, throughout this specification, "a plurality of" means "at least two," and "including" is interpreted as open-ended or encompassing, that is, "including, but not limited to." In the description of this specification, terms such as "one embodiment," "some embodiments," "exemplary embodiment," "example," "specific example," or "some examples" are intended to indicate that a particular feature, structure, material, or characteristic associated with that embodiment or example is included in at least one embodiment or example of this specification. The illustrative representations of the above terms do not necessarily refer to the same embodiment or example.

[0026] The technical solutions in the embodiments of this specification will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this specification, and not all embodiments. Based on the embodiments in this specification, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this specification.

[0027] Overview

[0028] Evaporation coating equipment may include a housing that encloses a deposition section and a storage section. The storage section is used for operations such as loading and replacing vapor deposition materials, while the deposition section is used for operations such as evaporation coating. To reduce the influence of gas molecules on the vapor deposition material and improve the uniformity and quality of the deposited film, a certain vacuum environment is typically maintained in the deposition space during the evaporation process. Vacuum deposition reduces gas molecule interference with the vapor deposition material, avoids oxidation and turbulence, increases the mean free path of the vapor deposition material particles, improves the stability of the evaporation rate, optimizes particle energy and incident angle, and improves the aggregation and crystallization processes. Therefore, maintaining a vacuum level in the deposition section during operation is of great importance. During operation, the crucible carrying the vapor deposition material in the storage section is connected to the deposition section through a nozzle. After being heated and vaporized, the vapor deposition material is carried by the working gas flow and enters the deposition section through the nozzle, where it is deposited onto the substrate to be coated. Throughout the process, the stability of the working airflow direction and the uniformity of the spray onto the substrate to be coated have a significant impact on the uniformity of the final film formation. To improve the uniformity of the final film formation, the inventors have provided the following approach:

[0029] A spraying device can be designed and fitted onto the nozzle to help improve the flow stability of the working airflow entering the deposition section and the uniformity of the spray onto the substrate to be coated. Specifically, the spraying device includes: a spraying housing that forms a spraying channel, one end of the spraying channel being open for connecting the nozzle, and the other end of the spraying channel being open for facing the substrate to be coated; the opening size of the spraying channel first decreases and then increases along a first direction; the first direction includes the direction in which the nozzle faces the substrate to be coated; and a guide fluid disposed in the spraying housing, the cross-sectional size of the guide fluid first decreasing and then increasing along the first direction, and within the same target plane, the cross-sectional size of the guide fluid is smaller than the cross-sectional size of the spraying channel; in a plane perpendicular to the first direction, the smallest portion of the cross-sectional size of the guide fluid is aligned with the smallest portion of the cross-sectional size of the spraying channel. Thus, by cooperating with the spraying housing, the working airflow through the spraying device undergoes a process of compression followed by expansion, which helps to improve the uniformity of the vapor deposition material carried by the working airflow within the airflow, thereby allowing the vapor deposition material carried by the working airflow ejected from the spraying device to be uniformly deposited on the substrate to be coated, improving the film uniformity.

[0030] Based on the above concept, this specification provides a spraying device, which will be described exemplarily below with reference to the accompanying drawings.

[0031] Exemplary device

[0032] refer to Figures 1 to 7 This specification provides a spraying device 100 applied to an evaporation coating apparatus 200. The evaporation coating apparatus 200 includes an apparatus housing 201, which encloses a deposition section 202 and a storage section 203. The deposition section 202 and the storage section 203 are isolated from each other. The storage section 203 includes a crucible 205 and a nozzle 50. The deposition section 202 includes a deposition space 204, in which a substrate 300 to be coated is disposed. The substrate 300 is disposed facing the nozzle 50. The storage space in the crucible 205 is connected to the deposition space 204 through the nozzle 50. The spraying device 100 includes:

[0033] The spray housing 10 forms a spray channel 20. One end of the spray channel 20 is open for connecting the nozzle 50, and the other end of the spray channel 20 is open for facing the substrate to be coated. Along a first direction, the opening size of the spray channel 20 first decreases and then increases. The first direction includes the direction in which the nozzle 50 faces the substrate 300 to be coated.

[0034] A guide fluid 30 is disposed in the spray housing 10. Along the first direction, the cross-sectional size of the guide fluid 30 first decreases and then increases. In the same target plane, the cross-sectional size of the guide fluid 30 is smaller than the cross-sectional size of the spray channel 20. In a plane perpendicular to the first direction, the part with the smallest cross-sectional size of the guide fluid 30 is aligned with the part with the smallest cross-sectional size of the spray channel 20.

[0035] Regarding the first direction: The first direction includes the direction in which the nozzle 50 faces the substrate 300 to be coated, or, in other words, the first direction can be the direction in which the working airflow is ejected from the nozzle 50 during the evaporation coating process, or, in other words, the first direction can be a vertical direction from bottom to top. Along the first direction, the opening size of the spray channel 20 can be the cross-sectional size of the spray channel 20 in a plane perpendicular to the first direction. In some embodiments, to avoid interference of the spray housing 10 with the flow direction of the working airflow, the cross-sectional shape of the spray channel 20 in the perpendicular direction can be circular or elliptical, and this specification does not limit this. Similarly, along the first direction, the cross-sectional size of the guide fluid 30 can be the cross-sectional size of the guide fluid 30 in a plane perpendicular to the first direction; similarly, to reduce interference of the guide fluid 30 with the flow direction of the working airflow, the cross-sectional shape of the guide fluid 30 in the perpendicular direction can be circular or elliptical, and this specification does not limit this, depending on the actual situation.

[0036] In this embodiment, the guide fluid 30 and the spray housing 10 cooperate to make the volume of the spray channel 20 first decrease and then increase along the first direction. Therefore, the spray device 100 can be used on the nozzle 50 of the evaporation coating equipment 200, thereby improving the uniformity of the working airflow ejected from the nozzle 50. This allows the evaporation material carried by the working airflow to be uniformly sprayed onto the substrate 300 to be coated, thereby uniformly depositing on the substrate 300 to form a thin film with high thickness uniformity and improving the film quality. Specifically, by cooperating with the spray housing 10, the working airflow through the spray device 100 undergoes a process of compression followed by expansion, which helps to improve the uniformity of the vapor deposition material carried by the working airflow within the airflow. This allows the vapor deposition material carried by the working airflow ejected from the spray device 100 to be uniformly deposited on the substrate 300 to be coated, improving the film uniformity.

[0037] In one embodiment, to improve the stability of the working airflow ejected from the injection device 100 and guide the working airflow in the desired direction, the injection device 100 further includes:

[0038] A flow guiding structure 60 is disposed on the inner wall of the spray housing 10, and the flow guiding structure 60 is disposed near the side of the spray housing 10 near the deposition space 204.

[0039] In this embodiment, a flow guiding structure 60 is provided on the inner wall of the spray housing 10 near the deposition space 204. By utilizing the flow stabilization and guiding functions of the flow guiding structure 60, the working airflow passes through the flow guiding structure 60 before being ejected from the spray device 100, thereby improving the stability of the working airflow ejected from the spray device 100 and guiding the working airflow to the desired direction.

[0040] In one embodiment, a feasible configuration of the flow guiding structure 60 is provided. Optionally, the flow guiding structure 60 includes at least one of a flow guiding groove and a protrusion, wherein the extension direction of the flow guiding groove is parallel to the flow direction of the working airflow, and the extension direction of the protrusion is parallel to the flow direction of the working airflow.

[0041] In this embodiment, the flow guiding structure 60 may include flow guiding grooves or protrusions. These grooves or protrusions can guide the flow direction of the gas, ensuring it flows along a designed path and preventing chaotic flow or eddies within the flow channel. By rationally designing the shape and angle of the flow guiding grooves or protrusions, the gas can flow more smoothly within the flow channel, reducing flow resistance and energy loss. Furthermore, the flow guiding grooves or protrusions can alter the gas flow velocity and pressure distribution, making the gas pressure within the flow channel more stable. When gas flows through the flow guiding grooves or protrusions, its flow velocity and direction change, thereby regulating the gas pressure. This helps reduce fluctuations and non-uniformity in gas flow, allowing the gas to flow within the flow channel at a relatively stable pressure.

[0042] In one alternative implementation, reference Figure 3 The number of the flow guiding structures 60 is multiple, and the multiple flow guiding structures 60 are evenly arranged around the target center. The target center is included in the center of the cross-section of the spray shell 10 in the first direction.

[0043] In this embodiment, the uniformly arranged guide grooves or protrusions can divide the mainstream gas into multiple smaller airflow streams, making the airflow more evenly distributed in various areas of the flow channel. This avoids excessively concentrated or sparse local airflow and improves the uniformity of gas distribution within the flow channel.

[0044] In an optional embodiment, the spraying device 100 further includes a support 40;

[0045] One end of the bracket 40 is connected to the fluid guide, and the other end of the bracket 40 is connected to the inner wall of the spray housing 10;

[0046] By fixing the guide fluid with bracket 40, the guide fluid can be more stably placed inside the guide channel, so that the guide fluid can stably perform its guiding function.

[0047] In one embodiment, the connection between the bracket 40 and the fluid guide can be a fixed connection, a detachable connection, or an abutment connection. This specification does not limit this, and the specific connection depends on the actual situation.

[0048] Optionally, one end of the bracket 40 is connected to the minimum cross-section of the fluid guide, wherein the minimum cross-section is the cross-section with the smallest cross-sectional size of the fluid guide 30 in a plane perpendicular to the first direction.

[0049] In this embodiment, the minimum cross-section of the bracket 40 and the fluid guide can be connected to satisfy various connection methods. For example, the wider upper and lower parts of the fluid guide can be used to achieve abutment or snap-fit, thereby facilitating the removal of the fluid guide from the bracket 40.

[0050] refer to Figure 4 In one embodiment, the cross-sectional shape of the bracket 40 includes an arc surface in a plane parallel to the first direction;

[0051] In this embodiment, the cross-sectional shape of the bracket 40 in a plane parallel to the first direction includes an arc surface. The arc surface has relatively little obstruction to the working airflow, which helps to reduce the obstruction and interference of the bracket 40 to the working airflow and avoid problems such as working airflow turbulence caused by the presence of the bracket 40.

[0052] Optionally, along the first direction, the cross-sectional dimensions of the bracket 40 first increase and then decrease;

[0053] In this embodiment, the cross-sectional dimension of the bracket 40 along the first direction can refer to the cross-section in a plane perpendicular to the first direction. The shape of the bracket 40 configured in this way can provide a curved surface with small changes in the first direction, thereby weakening the obstruction and interference of the bracket 40 to the working airflow.

[0054] Optionally, along the first direction, the outline shape of the support 40 includes a teardrop shape.

[0055] The teardrop shape can refer to a shape with the following characteristics: one end is round and full, and the other end gradually narrows, presenting a natural and smooth curve, similar to the shape of a drop of water hanging or dripping from the surface of an object. The teardrop-shaped support 40 has symmetry and smooth edges, without obvious sharp corners, which can effectively reduce the obstruction and interference of the support 40 to the working airflow.

[0056] In one implementation, reference Figure 6The spray housing 10 includes a first part 11 and a second part 12, which are detachably connected.

[0057] In this embodiment, the spray housing 10 may include a first part 11 and a second part 12 that are detachably connected. Thus, when the first part 11 and the second part 12 are in a separated state, it is convenient to install and remove the guide fluid 30 in the spray channel 20.

[0058] Optionally, in one embodiment, the connection position of the first part 11 and the second part 12 is in the same plane as the minimum cross-section of the fluid guide 30, wherein the minimum cross-section is the cross-section with the smallest cross-sectional size of the fluid guide 30 in a plane perpendicular to the first direction.

[0059] In this embodiment, the connection position of the first part 11 and the second part 12 is in the same plane as the minimum cross-section of the fluid guide 30, which facilitates the installation and disassembly of the fluid guide 30.

[0060] Exemplary device

[0061] refer to Figure 7 One embodiment of this specification also provides an evaporation coating apparatus 200, comprising:

[0062] The outer casing 201 of the device forms a deposition section 202 and a storage section 203, which are isolated from each other. The storage section 203 includes a crucible 205 and a nozzle 50. The deposition section 202 includes a deposition space 204, in which a substrate 300 to be coated is disposed. The substrate 300 is disposed facing the nozzle 50. The storage space in the crucible 205 is connected to the deposition space 204 through the nozzle 50.

[0063] The spraying device 100 disposed on the nozzle 50 is the spraying device 100 described in any of the above embodiments.

[0064] In this embodiment, the spraying device 100 can be used on the nozzle 50 of the evaporation coating equipment 200 to improve the uniformity of the working gas flow ejected from the nozzle 50, so that the evaporation material carried by the working gas flow can be uniformly sprayed onto the substrate 300 to be coated, thereby uniformly depositing on the substrate 300 to form a thin film with high thickness uniformity and improving the film quality. Specifically, the spraying device 100 includes: a spraying housing 10, which forms a spraying channel 20, one end of which is open for connecting the nozzle 50, and the other end of which is open for facing the substrate to be coated; along a first direction, the opening size of the spraying channel 20 first decreases and then increases; the first direction includes the direction of the nozzle 50 facing the substrate 300 to be coated; and a guide fluid 30, which is disposed in the spraying housing 10, and along the first direction, the cross-sectional size of the guide fluid 30 first decreases and then increases, and within the same target plane, The cross-sectional dimension of the guide fluid 30 is smaller than that of the spray channel 20. In a plane perpendicular to the first direction, the smallest part of the cross-sectional dimension of the guide fluid 30 is aligned with the smallest part of the cross-sectional dimension of the spray channel 20. In this way, the guide fluid 30, in conjunction with the spray housing 10, allows the working airflow through the spray device 100 to undergo a process of compression followed by expansion, which helps to improve the uniformity of the vapor deposition material carried by the working airflow within the airflow. This allows the vapor deposition material carried by the working airflow ejected from the spray device 100 to be uniformly deposited on the substrate 300 to be coated, thus improving the uniformity of film formation.

[0065] Exemplary methods

[0066] This specification also provides an evaporation coating method, such as... Figure 8 As shown, it includes:

[0067] S801: Provide an evaporation coating apparatus 200; the evaporation coating apparatus 200 is the evaporation coating apparatus 200 described in any of the above embodiments;

[0068] S802: The evaporation coating equipment 200 is used to coat the substrate 300 to be coated in the deposition section 202.

[0069] In this embodiment, the use of the evaporation coating equipment 200 described in any of the above embodiments for evaporation coating is beneficial for improving film uniformity. Specifically, the nozzle 50 of the evaporation coating equipment 200 is provided with a spraying device 100, which includes: a spraying housing 10, which forms a spraying channel 20, one end of which is open for fitting the nozzle 50, and the other end of which is open for facing the substrate to be coated; the opening size of the spraying channel 20 first decreases and then increases along a first direction; the first direction includes the direction in which the nozzle 50 faces the substrate 300 to be coated; and a guide fluid 30, which is disposed in the spraying housing 10, and the cross-sectional size of the guide fluid 30 first decreases and then increases along the first direction. The cross-sectional dimensions of the guide fluid 30 are increased, and within the same target plane, the cross-sectional dimensions of the guide fluid 30 are smaller than those of the spray channel 20. In a plane perpendicular to the first direction, the smallest portion of the cross-sectional dimensions of the guide fluid 30 is aligned with the smallest portion of the cross-sectional dimensions of the spray channel 20. Thus, by cooperating with the spray housing 10, the working airflow through the spray device 100 undergoes a process of compression followed by expansion, which helps to improve the uniformity of the vapor deposition material carried by the working airflow within the airflow. This allows the vapor deposition material carried by the working airflow ejected from the spray device 100 to be uniformly deposited on the substrate 300 to be coated, improving the uniformity of film formation.

[0070] The technical features of the above embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0071] The embodiments described above are merely illustrative of several implementation methods outlined in this specification. While the descriptions are specific and detailed, they should not be construed as limiting the scope of the solutions provided in this specification. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this specification, and these all fall within the scope of protection of this specification. Therefore, the scope of protection for this patent should be determined by the appended claims.

Claims

1. A spraying device, characterized in that, The method is applied to an evaporation coating equipment, which includes an equipment housing that encloses a deposition section and a storage section. The deposition section and the storage section are isolated from each other. The storage section includes a crucible and a nozzle. The deposition section includes a deposition space in which a substrate to be coated is placed. The substrate to be coated is positioned facing the nozzle. The storage space in the crucible is connected to the deposition space through the nozzle. The spraying device includes: The spray housing forms a spray channel, one end of which is open for connecting the nozzle, and the other end of which is open for facing the substrate to be coated; along a first direction, the opening size of the spray channel first decreases and then increases; the first direction includes the direction in which the nozzle faces the substrate to be coated; A guide fluid is disposed in the injection housing. Along the first direction, the cross-sectional size of the guide fluid first decreases and then increases. In the same target plane, the cross-sectional size of the guide fluid is smaller than the cross-sectional size of the injection channel. In a plane perpendicular to the first direction, the portion of the guide fluid with the smallest cross-sectional size is aligned with the portion of the injection channel with the smallest cross-sectional size.

2. The spraying device according to claim 1, characterized in that, Also includes: A flow guiding structure is disposed on the inner wall of the spray housing, and the flow guiding structure is disposed near the side of the spray housing near the deposition space.

3. The spraying device according to claim 2, characterized in that, The flow guiding structure includes a flow guiding groove or a protrusion, wherein the extension direction of the flow guiding groove is parallel to the flow direction of the working airflow, and the extension direction of the protrusion is parallel to the flow direction of the working airflow.

4. The spraying device according to claim 2, characterized in that, The number of the flow guiding structures is multiple, and the multiple flow guiding structures are evenly arranged around the target center, which is included in the center of the cross-section of the spray shell in the first direction.

5. The spraying device according to claim 1, characterized in that, Also includes: support; One end of the bracket is connected to the fluid guide, and the other end of the bracket is connected to the inner wall of the spray housing; Optionally, one end of the bracket is connected to the minimum cross-section of the fluid guide, wherein the minimum cross-section is the cross-sectional area of ​​the fluid guide with the smallest cross-sectional size in a plane perpendicular to the first direction.

6. The spraying device according to claim 5, characterized in that, In a plane parallel to the first direction, the cross-sectional shape of the bracket includes an arc surface; Optionally, along the first direction, the cross-sectional dimensions of the bracket first increase and then decrease; Optionally, along the first direction, the outline shape of the bracket includes a teardrop shape.

7. The spraying device according to claim 1, characterized in that, The spray housing includes a first part and a second part, which are detachably connected.

8. The spraying device according to claim 7, characterized in that, The connection point between the first part and the second part is in the same plane as the minimum cross-section of the fluid guide, which is the cross-section with the smallest cross-sectional size of the fluid guide in a plane perpendicular to the first direction.

9. An evaporation coating apparatus, characterized in that, include: The outer casing of the device encloses a deposition section and a storage section, the deposition section and the storage section being isolated from each other. The storage section includes a crucible and a nozzle. The deposition section includes a deposition space for placing a substrate to be coated in the deposition space. The substrate to be coated is positioned facing the nozzle. The storage space inside the crucible is connected to the deposition space through the nozzle. The spraying device disposed on the nozzle is the spraying device according to any one of claims 1 to 8.

10. An evaporation coating method, characterized in that, include: An evaporation coating apparatus is provided; the evaporation coating apparatus is the evaporation coating apparatus according to claim 9. The evaporation coating equipment is used to coat the substrate to be coated in the deposition section.

Images