A semiconductor vacuum coating apparatus

Abstract

The application discloses a kind of semiconductor vacuum coating equipment, it is related to semiconductor technical field.The frame, reaction chamber, chamber cover, safety hook and controller are included.Reaction chamber is located on frame and is equipped with chamber mouth;Chamber cover is located on frame and is located above reaction chamber, it can be moved relative to reaction chamber, its moving path has the working position corresponding to the cover chamber mouth and the opening position away from chamber mouth;Safety hook is located on frame, it is configured to hook lock when chamber cover is in opening position;Controller is configured to control chamber cover to move to open and close chamber mouth in response to received movement instruction, and control safety hook to rotate to hook lock or release chamber cover.The application can effectively improve the structural stability and safety reliability of chamber cover in opening state, avoid equipment parts damage, protect the personal safety of operator, reduce equipment maintenance cost and downtime failure rate, improve the safety, stability and overall operation reliability of equipment repair operation.

Description

Technical Field

[0001] This invention relates to the field of semiconductor technology, and more specifically, to a semiconductor vacuum coating apparatus. Background Technology

[0002] In semiconductor vacuum deposition equipment, the reaction chamber is the core functional component for wafer film preparation, and all film deposition processes are completed inside the reaction chamber. This chamber mainly consists of the chamber body, air intake system, air exhaust system, heating system, wafer support device, and chamber cover. The chamber cover is a movable structure; it needs to be opened for equipment assembly, routine inspection, and internal maintenance. Once opened, the chamber cover is suspended above the equipment, allowing operators to perform inspection and maintenance of the internal facilities.

[0003] In the existing structure, the chamber cover is suspended on top of the equipment after it is opened, resulting in poor overall safety protection. During operation and work, there is a high risk that the chamber cover may fall off unexpectedly, which will not only cause damage to the equipment structure and internal components, but also pose a serious threat to the personal safety of on-site operators. The overall reliability and operational safety of the equipment cannot be guaranteed. Summary of the Invention

[0004] In view of the shortcomings of the existing technology, the present invention innovatively provides a semiconductor vacuum coating equipment, which can solve the problem that the openable chamber cover of the existing semiconductor vacuum coating equipment is suspended above the equipment after being opened, which poses a risk of accidental fall, as well as the problem that it is easy to damage the equipment and endanger the personal safety of the operators.

[0005] To achieve the above-mentioned technical objectives, the present invention discloses a semiconductor vacuum coating apparatus, comprising: frame; A reaction chamber is mounted on the frame, and the reaction chamber has a chamber opening; A chamber cover is disposed on the frame and located above the reaction chamber. The chamber cover is movable relative to the reaction chamber, wherein: the chamber cover has a working position corresponding to sealing the chamber opening and an open position away from the chamber opening on its moving path; A safety hook, mounted on the frame, is configured to lock the chamber cover when the chamber cover is in the open position; The controller is configured to control the movement of the chamber cover to open and close the chamber opening in response to a received movement command, and to control the rotation of the safety hook to lock / release the chamber cover.

[0006] Preferably, the rack comprises: The lower frame is configured to mount the reaction chamber; The upper frame, located on the upper side of the lower frame, is configured to mount the chamber cover and the safety hook.

[0007] Preferably, the upper frame includes: A crossbeam frame, located above the lower frame, is configured to mount the safety hook; Guide column, connecting the crossbeam frame and the lower frame body; The chamber cover is slidably mounted on the guide post.

[0008] Preferably, the upper frame further includes a linear bearing, sleeved on the guide post, configured to slidably mount the chamber cover on the guide post.

[0009] Preferably, the received movement command includes: receiving a chamber cover lifting command issued by the user operating the first button, and receiving a safety hook rotation command issued by the user operating the second button; When the controller receives both the chamber cover lifting command and the safety hook rotation command simultaneously, the controller controls the chamber cover to move.

[0010] Preferably, the vacuum coating equipment includes an operation panel, which includes a first button and a second button, wherein the distance between the first button and the second button is greater than 15cm.

[0011] Preferably, the vacuum coating equipment further includes: A safety latch, detachably mounted on the upper frame, is configured to cooperate with the upper frame to limit the chamber cover in the open position when the chamber cover is in the open position.

[0012] Preferably, the reaction chamber is provided with a return groove, which is configured to receive the safety pin.

[0013] Preferably, the vacuum coating equipment further includes: a detection component configured to detect whether the safety pin is returned to the return groove; The controller is also configured to control the movement of the chamber cover based on the detection result of the detection component and the movement command, including: if the detection structure indicates that the safety pin is not in place, the chamber cover remains in its current position.

[0014] Preferably, the tail end of the safety pin is provided with a locking device, which is used to lock the safety pin onto the upper frame.

[0015] The beneficial effects of this invention are as follows: This invention effectively improves the structural stability and safety reliability of the semiconductor vacuum coating equipment when the chamber cover is open by adding a safety hook to the frame of the vacuum coating equipment. It eliminates the risk of the chamber cover falling off accidentally, avoids damage to equipment parts, effectively protects the personal safety of on-site operators, reduces equipment maintenance costs and downtime failure rate, and significantly improves the safety, stability and overall reliability of equipment maintenance operations. Attached Figure Description

[0016] Figure 1 This is a schematic diagram of a semiconductor vacuum coating apparatus from one perspective, as shown in an embodiment of the present invention. Figure 2 This is a schematic diagram showing another perspective of the semiconductor vacuum coating equipment in an embodiment of the present invention; Figure 3 This diagram illustrates the control logic of a semiconductor vacuum coating apparatus in an embodiment of the present invention.

[0017] In the diagram: 101, upper frame; 1011, guide column; 1012, crossbeam frame; 102, lower frame; 20, reaction chamber; 30, chamber cover; 40, safety hook; 50, return groove; 60, safety pin; 601, locking device. Detailed Implementation

[0018] The semiconductor vacuum coating equipment provided by the present invention will be explained and described in detail below with reference to the accompanying drawings.

[0019] like Figures 1-2 As shown, the present invention provides a semiconductor vacuum coating apparatus, including: a frame, a reaction chamber 20, a chamber cover 30, a safety hook 40, and a controller. The reaction chamber 20 is mounted on the frame and has a chamber opening. The chamber cover 30 is mounted on the frame and located above the reaction chamber 20. The chamber cover 30 is movable relative to the reaction chamber 20, wherein the chamber cover 30 has a working position corresponding to sealing the chamber opening and an open position away from the chamber opening along its movement path. The safety hook 40 is mounted on the frame and is configured to hook and lock the chamber cover 30 when it is in the open position. The controller is configured to control the movement of the chamber cover 30 to open and close the chamber opening in response to a received movement command, and to control the rotation of the safety hook 40 to hook / release the chamber cover 30.

[0020] In this embodiment, a rotatable safety hook 40 and an intelligent control structure are installed on the frame, along with a movable chamber cover 30, to achieve automated safety locking of the chamber cover 30 in its open and closed states. During equipment operation, the controller precisely controls the movement of the chamber cover 30 based on received movement commands, switching it between a closed chamber opening position and an open position away from the chamber opening to complete the opening and closing of the reaction chamber 20. When the chamber cover 30 moves to the open position and is suspended above the equipment for personnel inspection and maintenance, the controller simultaneously controls the rotation of the safety hook 40, reliably locking the chamber cover 30 in place. This mechanical locking structure limits the displacement and swaying of the chamber cover 30, replacing the traditional unprotected suspended opening structure. By constraining the state of the chamber cover 30 from both a mechanical structure and electrical control linkage perspective, the potential for loosening or falling of the chamber cover 30 is eliminated, ensuring the structural stability of the chamber cover 30 in its open state.

[0021] Based on optimized processing of the vacuum coating equipment, the chamber cover 30 and safety hook 40 are coordinated through controller linkage. Automated mechanical locking is achieved when the chamber cover 30 is open, completely solving the technical defects of traditional chamber covers 30, such as poor safety and reliability when suspended and prone to accidental falls. This effectively avoids damage to equipment parts and chamber structure caused by the chamber cover 30 falling, significantly improving the safety of equipment inspection and maintenance. The electrically controlled locking method automatically completes the hook locking and releasing operations with the opening and closing of the chamber cover 30, eliminating the need for manual locking. This convenient and highly automated operation ensures safety without increasing the difficulty of equipment assembly and maintenance, effectively improving equipment operating efficiency. The cooperation between the mechanical hook and the electrical control system significantly improves the structural stability and overall reliability of the chamber cover 30 during opening and closing, reducing the probability of equipment failure and subsequent maintenance costs, extending equipment lifespan, and effectively improving the overall performance and operational safety of the semiconductor vacuum coating equipment.

[0022] In some alternative configurations, the rack includes a lower frame 102 and an upper frame 101. The lower frame 102 is configured to mount the reaction chamber 20; the upper frame 101 is disposed above the lower frame 102 and is configured to mount the chamber cover 30 and the safety hook 40.

[0023] In this embodiment, by arranging the reaction chamber 20 on the lower frame 102 and concentrating the chamber cover 30 and safety hook 40 on the upper frame 101, the structure has a clear layered layout, neat installation, and reasonable stress distribution. The automatic hook-locking limit of the safety hook 40 when the chamber cover 30 is in the open position effectively restrains the shaking and downward tendency of the chamber cover 30 in the open state, eliminating the risk of accidental fall of the chamber cover 30. This significantly improves the safety and structural stability of equipment maintenance operations, while also facilitating assembly and subsequent maintenance, thus enhancing the overall reliability and safety of the equipment.

[0024] Optionally, the upper frame 101 includes a crossbeam 1012 and a guide post 1011. The crossbeam 1012 is disposed above the lower frame 102 and is configured to mount a safety hook 40; the guide post 1011 connects the crossbeam 1012 and the lower frame 102; wherein the chamber cover 30 is slidably disposed on the guide post 1011.

[0025] In this embodiment, the chamber cover 30 slides smoothly along the guide post 1011 to complete the switching between the working position and the open position; the safety hook 40 is installed on the crossbeam frame 1012. When the chamber cover 30 slides to the open position, the safety hook 40 locks and limits its movement. Combined with the layered frame structure, the guiding movement of the chamber cover 30 and the mechanical fall protection are organically coordinated.

[0026] The design of the guide column 1011 ensures smooth movement and accurate positioning of the chamber cover 30; together with the safety hook 40, it effectively prevents the chamber cover 30 from falling off, greatly improving structural stability and operational safety, and also facilitating equipment assembly and maintenance.

[0027] Alternatively, two or four guide posts 1011 can be provided, symmetrically distributed around the reaction chamber 20 on the lower frame 102. The symmetrical arrangement of the guide posts 1011 ensures uniform force distribution, further improving the smoothness and positioning accuracy of the sliding of the chamber cover 30, resulting in better fall protection and a more stable and reliable overall structure.

[0028] In some alternative configurations, the upper frame 101 also includes a linear bearing, fitted onto the guide post 1011, configured to slidably mount the chamber cover 30 onto the guide post 1011. Using a linear bearing reduces sliding friction, resulting in smoother movement and less resistance to the chamber cover 30, while also improving sliding accuracy and operational stability, and reducing component wear.

[0029] In some alternative configurations, the received movement commands include: receiving a command to raise or lower the chamber cover 30 issued by the user operating a first button, and receiving a command to rotate the safety hook 40 issued by the user operating a second button; wherein, when the controller simultaneously receives both the command to raise or lower the chamber cover 30 and the command to rotate the safety hook 40, the controller controls the chamber cover 30 to move.

[0030] In this embodiment, the user operates the first button and the second button respectively to issue commands for raising and lowering the chamber cover 30 and rotating the safety hook 40. The controller only controls the chamber cover 30 to move when it receives both commands simultaneously. The two buttons employ a two-handed operation mode, logically avoiding the safety hazards of single-handed operation. The use of two-handed button linkage control forms an interlocking operation, effectively preventing misoperation, preventing mechanical crushing accidents, and further improving the safety of equipment operation.

[0031] Optionally, the vacuum coating equipment includes an operation panel, which includes a first button and a second button, wherein the distance between the first button and the second button is greater than 15cm. In this embodiment, the distance between the two buttons is greater than 15cm, which forces operation with both hands, eliminates the possibility of accidental operation with one hand, further avoids the risk of mechanical compression, and improves operational safety.

[0032] In some optional configurations, the vacuum coating equipment also includes a safety pin 60. The safety pin 60 is detachably mounted on the upper frame 101 and is configured to cooperate with the upper frame 101 to limit the chamber cover 30 to the open position when it is in the open position. The addition of the detachable safety pin 60 creates a double mechanical limit when the chamber cover 30 is in the open position, further locking the chamber cover 30 in conjunction with the safety hook 40. This multiple layer of protection eliminates the risk of falls and significantly improves the safety redundancy and structural reliability of maintenance operations.

[0033] Optionally, a pin hole is provided on the guide post 1011. After the chamber cover 30 is raised to the open position, a safety pin 60 is inserted into the pin hole, thereby cooperating with the guide post 1011 to limit and fix the chamber cover 30. By making a round hole as a pin hole at a fixed position on the guide post 1011 that guides the chamber cover 30 to rise and fall, and using a mechanical safety pin 60, after the chamber cover 30 is raised, the safety pin 60 is inserted into the round hole, which can prevent the chamber cover 30 from accidentally falling off during the maintenance of the chamber, thereby ensuring the safety of the operator.

[0034] In some alternative configurations, the reaction chamber 20 is provided with a return slot 50, which is configured to store the safety pin 60. The return slot 50 stores the safety pin 60, preventing loss or misplacement of the accessory, ensuring convenient access, and maintaining a neat overall layout of the equipment.

[0035] Considering that the safety pin 60 is only a purely mechanical protection mechanism, relying on manual operation, it is prone to being forgotten to install or deliberately left unused due to inconvenience, rendering the protection ineffective. If the chamber cover 30 is lowered without removing the pin, the two will collide. This could result in minor issues such as triggering motor alarms, equipment shutdown, zero-point misalignment, complex recovery processes, and prolonged production stoppages; or more serious issues such as structural deformation, component damage, requiring replacement of parts, readjustment, and electrical adjustments, and even causing deterioration of process materials in the pipelines, leading to major equipment overhauls. The safety pin 60 lacks an anti-detachment structure and is prone to accidental fall during use, potentially damaging fragile components such as the quartz component and graphene workpiece disk within the chamber. Further, optionally, the vacuum coating equipment also includes a detection component configured to detect whether the safety pin 60 has returned to its original position in the return slot 50. Correspondingly, the controller is also configured to control the movement of the chamber cover 30 based on the detection results and movement commands from the detection component, including: if the detection structure indicates that the safety pin 60 has not returned to its original position, the chamber cover 30 remains in its current position.

[0036] In this embodiment, a return slot 50 for the safety pin 60 is added to an empty space in the rack or reaction chamber 20. A detection component (such as a position sensor) is installed in the slot to provide feedback on whether the safety pin 60 is currently placed in the slot. If the safety pin 60 is in the slot, the chamber cover 30 can be moved up / down using the first button ("Cavity Cover 30 Movement Enable" button) and the second button ("Movement Direction" button). If the safety pin 60 is not in the slot, the movement of the chamber cover 30 will be prohibited to prevent the impact risk caused by operating the chamber cover 30 when the pin is forgotten in the guide post 1011.

[0037] Optionally, the tail end of the safety pin 60 is provided with a locking device 601, which is used to lock the safety pin 60 onto the upper frame 101. By adding a locking device 601 to the tail end of the safety pin 60, the pin can be reliably locked after the limit assembly is completed, preventing the pin from loosening or falling, structurally preventing it from falling accidentally, and thus preventing injury to operators or fragile parts in the cavity.

[0038] The following describes the method of using a vacuum coating equipment according to the above embodiments.

[0039] like Figure 3As shown, this equipment adds a pair of pneumatic safety hooks 40 to the frame above the chamber cover 30, driven by the chamber cover pneumatic valve. The entire machine uses a PLC (Programmable Logic Controller) as the core controller, relying on the built-in control program to realize the automatic locking and releasing switching of the chamber cover pneumatic valve and the safety hooks 40. Specifically: the PLC sends motion commands to the chamber cover motor servo driver, which drives the chamber cover drive motor, ultimately causing the chamber cover 30 to complete the lifting and lowering action along the guide column 1011. The motor encoder position feedback signal is continuously transmitted back to the PLC for position verification, abnormal alarm, and closed-loop control. The PLC sends control signals to the solenoid valve, which controls the chamber cover pneumatic valve to operate. The chamber cover pneumatic valve is connected to a CDA (Clean Dry Air) air source, driving the safety hooks 40 to complete the "lock / release" switching. After the safety hooks 40 complete their operation, they transmit status signals back to the PLC through the corresponding position sensors, forming a closed-loop verification. When the equipment is powered off or the chamber cover 30 is stationary, the safety hook 40 remains locked by default; the safety hook 40 will only be unlocked when the chamber cover 30 motion enable button is pressed.

[0040] The lifting and lowering action of the chamber cover 30 employs a two-hand operation interlocking logic: When the chamber cover 30 is in the closed state, the chamber cover 30 movement enable and up (UP) buttons must be pressed simultaneously for the chamber cover 30 to move upwards, automatically stopping after reaching the top open position; releasing the enable button immediately relocks the safety hook 40. When the chamber cover 30 is lowering, it must be in the top open position and locked by the hook while the chamber cover 30 movement enable and down (DOWN) buttons are pressed simultaneously. After the hook unlocks, the chamber cover 30 begins to descend, stopping upon reaching the closed position. The lifting and lowering control can be achieved using a single button with two-way positions, or independent up and down buttons can be provided.

[0041] The safety hook 40 is equipped with a position sensor, which can provide real-time feedback on the locking and releasing status to the PLC, forming a closed-loop control. If the PLC issues a locking command but does not receive the corresponding locking feedback signal within a preset time, the equipment immediately triggers an abnormal alarm and uploads the alarm information to the host computer. Maintenance work inside the chamber cannot be carried out until the fault is resolved, thus ensuring the safety of personnel and equipment from a control perspective.

[0042] The overall movement of the chamber cover 30 is as follows: The PLC receives the instruction signal from the operation button and sends the action command to the servo driver, which drives the chamber cover 30 to complete the lifting and lowering. Before the system runs, it will automatically detect the return status of the safety pin. If the safety pin 60 is not returned to the return slot 50, the PLC will prohibit the output of the movement command to avoid the chamber cover 30 colliding with the safety pin 60 and damaging the equipment.

[0043] When the chamber cover movement enable button is pressed, the PLC synchronously controls the solenoid valve and the chamber cover pneumatic valve to operate sequentially, driving the safety hook 40 to switch from locked to released state. The sensor transmits position signals in real time for logic verification. After the chamber cover movement enable button is released, the safety hook 40 automatically resets and locks. If any logical abnormality occurs in the hook command or feedback status, the system immediately pushes an alarm to the host computer. Operation can only continue after the fault is diagnosed.

[0044] This equipment employs a dual protection structure of safety hook 40 and safety pin 60, enhancing fault tolerance and significantly reducing the risk of accidental drop of the chamber cover 30. The safety hook 40 is fully automatically controlled by a PLC, making operation simple and maintenance minimal. The safety pin 60 features a locking mechanism to prevent accidental drop that could damage internal components or injure personnel. Combined with the return groove 50 and pin-in-position detection logic, it effectively avoids impact failures caused by the pin not being returned to its proper position, comprehensively improving the safety and reliability of equipment operation and manual maintenance.

[0045] In the description of this invention, it should be understood that the terms "center," "longitudinal," "lateral," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," "counterclockwise," "axial," "radial," and "circumferential" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing this invention and simplifying the description, and are not intended to indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this invention.

[0046] In this invention, unless otherwise explicitly specified and limited, the terms "installation," "connection," "linking," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components, unless otherwise explicitly limited. Those skilled in the art can understand the specific meaning of the above terms in this invention according to the specific circumstances.

[0047] In the description of this specification, the references to terms such as "this embodiment," "an embodiment," "some embodiments," "example," "specific example," or "some examples," etc., refer to specific features, structures, materials, or characteristics described in connection with that embodiment or example, which are included in at least one embodiment or example of the present invention. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in a suitable manner in any at least one embodiment or example. Moreover, without contradiction, those skilled in the art can combine and integrate the different embodiments or examples described in this specification, as well as the features of different embodiments or examples.

[0048] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this invention, "a plurality of" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0049] The above are merely preferred embodiments of the present invention and are not intended to limit the present invention. Any modifications, equivalent substitutions, and simple improvements made on the substantive content of the present invention should be included within the protection scope of the present invention.

Claims

1. A semiconductor vacuum coating apparatus, characterized in that, include: frame; A reaction chamber is mounted on the frame, and the reaction chamber has a chamber opening; A chamber cover is disposed on the frame and located above the reaction chamber. The chamber cover is movable relative to the reaction chamber, wherein: the chamber cover has a working position corresponding to sealing the chamber opening and an open position away from the chamber opening on its moving path; A safety hook, mounted on the frame, is configured to lock the chamber cover when the chamber cover is in the open position; The controller is configured to control the movement of the chamber cover to open and close the chamber opening in response to a received movement command, and to control the rotation of the safety hook to lock / release the chamber cover.

2. The semiconductor vacuum coating equipment according to claim 1, characterized in that, The rack includes: The lower frame is configured to mount the reaction chamber; The upper frame, located on the upper side of the lower frame, is configured to mount the chamber cover and the safety hook.

3. The semiconductor vacuum coating equipment according to claim 2, characterized in that, The upper frame includes: A crossbeam frame, located above the lower frame, is configured to mount the safety hook; Guide column, connecting the crossbeam frame and the lower frame body; The chamber cover is slidably mounted on the guide post.

4. The semiconductor vacuum coating equipment according to claim 3, characterized in that, The upper frame also includes a linear bearing, sleeved on the guide post, configured to slidably mount the chamber cover on the guide post.

5. The semiconductor vacuum coating equipment according to claim 2, characterized in that, The received movement commands include: receiving a chamber cover lifting command issued by the user operating the first button, and receiving a safety hook rotation command issued by the user operating the second button; When the controller receives both the chamber cover lifting command and the safety hook rotation command simultaneously, the controller controls the chamber cover to move.

6. The semiconductor vacuum coating equipment according to claim 5, characterized in that, The vacuum coating equipment includes an operation panel, which includes a first button and a second button, wherein the distance between the first button and the second button is greater than 15cm.

7. The semiconductor vacuum coating apparatus according to any one of claims 2-6, characterized in that, The vacuum coating equipment also includes: A safety latch, detachably mounted on the upper frame, is configured to cooperate with the upper frame to limit the chamber cover in the open position when the chamber cover is in the open position.

8. The semiconductor vacuum coating equipment according to claim 7, characterized in that, The reaction chamber is provided with a return groove, which is configured to receive the safety pin.

9. The semiconductor vacuum coating equipment according to claim 8, characterized in that, The vacuum coating equipment further includes: a detection component configured to detect whether the safety pin is returned to the return groove; The controller is also configured to control the movement of the chamber cover based on the detection result of the detection component and the movement command, including: if the detection structure indicates that the safety pin is not in place, the chamber cover remains in its current position.

10. The semiconductor vacuum coating equipment according to claim 7, characterized in that, The safety pin is provided with a locking device at its tail end, which is used to lock the safety pin onto the upper frame.

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