Section blunting system

Abstract

The application relates to the photovoltaic and semiconductor technical field, in particular to a section passivation system, which solves the problem of slow production rhythm in the section passivation process in the related art. The section passivation system comprises a furnace body with a furnace cavity and a feeding port and a discharging port communicated with the furnace cavity; a material box with a material cavity and a coating opening communicated with the material cavity, the coating opening can be arranged corresponding to the section of the sheet; a plurality of conveying assemblies, at least one conveying assembly is arranged on the side close to the feeding port and the side close to the discharging port, respectively, the conveying assembly on the side close to the feeding port is used for conveying the material box loaded with the sheet without process into the furnace cavity, and the conveying assembly on the side close to the discharging port is used for moving the material box processed in the furnace cavity out of the furnace cavity. The feeding port and the discharging port of the application can be independently operated, the feeding and discharging can be realized simultaneously, continuously and automatically, and the production rhythm and the production capacity are obviously improved.

Description

Technical Field

[0001] This application relates to the fields of photovoltaic and semiconductor technology, and specifically to a cross-sectional passivation system. Background Technology

[0002] Semiconductor and photovoltaic materials are widely used in industries such as electronics and new energy. These materials typically require chemical processing before they can be applied to products. Atomic Layer Deposition (ALD) is one such processing method. ALD technology is now widely used in semiconductor and photovoltaic material processing, and there are many related equipment available in the industry. Appropriate equipment can be selected based on specific processing needs. The processing of semiconductor and photovoltaic materials usually involves feeding sheet-like materials into a reaction chamber and reacting them under specific temperature and pressure conditions.

[0003] Cross-section passivation is a key technology in photovoltaic cell manufacturing. It is mainly used to perform ALD coating surface treatment on the fracture surface after silicon wafer cutting to reduce the density of interface state defects, thereby improving cell efficiency and stability.

[0004] However, in related technologies, the cross-section passivation process suffers from a slow production cycle. Summary of the Invention

[0005] In view of this, the present application provides a cross-section passivation system, which solves the problem of slow production cycle in the cross-section passivation process in related technologies.

[0006] An embodiment of this application provides a cross-section passivation system for passivating the cross-section of a sheet. The cross-section passivation system includes: a furnace body having a furnace cavity and an inlet and an outlet communicating with the furnace cavity; a material box having a material cavity and a coating opening communicating with the material cavity, the material cavity being used to accommodate the sheet, wherein, when the material cavity accommodates the sheet, the coating opening and the cross-section of the sheet are correspondingly arranged so that the coating opening exposes the cross-section of the sheet; and a plurality of transport components, at least one of the transport components being arranged on a side near the inlet and a side near the outlet, the transport component on the side near the inlet being at least used to transport the material box carrying the unprocessed sheet from the inlet into the furnace cavity, and the transport component on the side near the outlet being at least used to remove the processed material box from the outlet from the furnace cavity.

[0007] In some embodiments, the cross-section passivation system further includes: a transfer assembly, disposed adjacent to the furnace body, for transferring the material box unloaded from the discharge port side to the inlet side; and / or, the transport assembly includes: a fork arm assembly, the fork arm assembly near the inlet side for conveying a plurality of material boxes carrying unprocessed sheets from the inlet into the furnace cavity, and the fork arm assembly near the discharge port side for removing processed material boxes from the furnace cavity from the discharge port; and a handling robot, the handling robot near the inlet side for at least handling the material boxes carrying unprocessed sheets onto the fork arm assembly near the inlet side, and the handling robot near the discharge port side for at least handling the material boxes off the fork arm assembly near the discharge port side.

[0008] In some embodiments, when the transport assembly includes the fork arm assembly, the fork arm assembly includes: a carrier paddle capable of inserting and engaging with the material box; a first drive mechanism, tractively connected to the carrier paddle, capable of driving the carrier paddle to move so that the carrier paddle extends into and exits the furnace cavity; and / or, when the transport assembly includes the handling robot, the handling robot includes: a base; a robot body connected to the base; a gripper assembly connected to one end of the robot body away from the base, the gripper assembly being used to grip the material box; and / or, when the transport assembly includes the fork arm assembly, the section passivation system further includes: a plurality of cooling assemblies arranged around the fork arm assembly near the discharge port side, for cooling the sheet material in the material box on the fork arm assembly near the discharge port side.

[0009] In some embodiments, when the transport component includes the handling robot, the cross-section passivation system further includes: a plurality of buffer platforms, at least one of the buffer platforms being disposed near the handling robot on the feed port side, and at least one of the buffer platforms being disposed near the handling robot on the discharge port side, the buffer platforms being used to temporarily store the material boxes; and / or, when the cross-section passivation system includes the transmission component, the cross-section passivation system further includes: a scanning component, disposed adjacent to the transmission component, located on the side of the transmission component near the feed port, at least for scanning the information on the material boxes transmitted by the transmission component. Information code; and / or, if the cross-section passivation system includes the transmission component, the cross-section passivation system further includes: a feeding platform, disposed adjacent to the transmission component and located on the side of the transmission component near the discharge port, wherein the handling robot on the side near the discharge port is capable of placing at least a portion of the unloaded material box on the feeding platform; and / or, if the transport component includes the handling robot, the cross-section passivation system further includes: a loading platform, disposed adjacent to the handling robot on the side near the inlet, wherein the handling robot on the side near the inlet is capable of removing the material box from the loading platform.

[0010] In some embodiments, when the cross-section passivation system includes the feeding platform, the cross-section passivation system further includes: a feeding assembly, which is disposed adjacent to the feeding platform, the handling robot near the feed inlet, and the fork arm assembly near the feed inlet, the feeding assembly being used to place the unprocessed sheet near the feed inlet into the material box transported by the handling robot near the feed inlet; and / or, when the cross-section passivation system includes the unloading platform, the cross-section passivation system further includes: an unloading assembly, which is disposed adjacent to the unloading platform, the handling robot near the discharge outlet, and the fork arm assembly near the discharge outlet, the unloading assembly being used to remove the sheet from the material box transported by the handling robot near the discharge outlet.

[0011] In some embodiments, when the cross-section passivation system includes the fork arm assembly, the feeding assembly, and the unloading assembly, the feeding assembly, the fork arm assembly near the feed inlet, the furnace body, the fork arm assembly near the discharge outlet, and the unloading assembly are sequentially arranged along a first direction; and / or, when the cross-section passivation system includes the handling robot, the feeding assembly, the unloading assembly, and the buffer platform, the feeding assembly, the handling robot near the feed inlet, the buffer platform near the feed inlet, the furnace body, the buffer platform near the discharge outlet, the handling robot near the discharge outlet, and the unloading assembly are sequentially arranged along a first direction; and / or, when the cross-section passivation system includes the transmission assembly, the feeding assembly, the unloading assembly, the feeding platform, the unloading platform, and the scanning assembly, the feeding assembly, the feeding platform, the scanning assembly, the transmission assembly, the unloading platform, and the unloading assembly are sequentially arranged along a first direction.

[0012] In some embodiments, when the cross-section passivation system includes the fork arm assembly, the buffer platform, and the scanning assembly, the fork arm assembly, the buffer platform, and the scanning assembly are sequentially arranged along the second direction near the feed inlet; and / or, when the cross-section passivation system includes the fork arm assembly, the buffer platform, and the transmission assembly, the fork arm assembly, the buffer platform, and the transmission assembly are sequentially arranged along the second direction near the feed inlet; and / or, when the cross-section passivation system includes the fork arm assembly, the buffer platform, and the handling robot, the fork arm assembly, the buffer platform, and the transmission assembly are sequentially arranged along the second direction. The fork arm assembly, the buffer platform, and the transmission assembly are sequentially arranged near the discharge port; and / or, in the case where the cross-section passivation system includes the fork arm assembly, the handling robot, and the loading platform, the fork arm assembly, the handling robot, and the loading platform are sequentially arranged near the feed port along the second direction; and / or, in the case where the cross-section passivation system includes the fork arm assembly, the handling robot, and the unloading platform, the fork arm assembly, the handling robot, and the unloading platform are sequentially arranged near the discharge port along the second direction.

[0013] In some embodiments, when the fork arm assembly includes the first drive mechanism, the first drive mechanism includes: a lateral movement mechanism, drivenly connected to the carrier paddle, for driving the carrier paddle to move laterally; a lifting mechanism, drivenly connected to the lateral movement mechanism, for driving the lateral movement mechanism to lift; and / or, when the handling robot includes the gripper assembly, the handling robot further includes: a positioning component, disposed on the gripper assembly, for acquiring the position information of the material box.

[0014] In some embodiments, where the fork arm assembly includes the load-bearing paddle, the sheet has a first cross-section, and the hopper includes: a hopper body having at least one of the load chambers and at least one of the coating openings, the hopper body also having a load-bearing space and a clearance opening communicating with the load-bearing space, the load-bearing paddle being able to be inserted into the load-bearing space through the clearance opening.

[0015] In some embodiments, there are two material cavities and two coating openings, each of which is connected to one of the two material cavities. The coating openings are located on the side of the corresponding material cavity away from the carrying space. The carrying space is located between the two material cavities. And / or, the side of the carrying space away from the bottom of the box has a positioning groove, configured to engage with the carrying paddle. And / or, the top of the box has a first limiting portion, and the bottom of the box has a second limiting portion, in the case of at least two stacked material boxes. In the case of two adjacent stacked material boxes, the first limiting part of the lower material box and the second limiting part of the upper material box are inserted into each other; and / or, the box body includes: a box body with a mounting groove in the side wall of the box body; a box cover detachably connected to the box body; the material box further includes: a pressing mechanism disposed in the mounting groove and partially extending to the outside of the mounting groove, wherein when the material cavity contains multiple stacked sheets, the portion of the pressing mechanism located outside the mounting groove can abut against the side of the box cover away from the box body, so that the box cover presses against the multiple stacked sheets.

[0016] In some embodiments, when there are two material cavities and two coating openings, the two material cavities have equal volumes and are symmetrically arranged on both sides of the carrying space; and / or, when the carrying space is located between the two material cavities, the sheet also has a second cross-section opposite to the first cross-section, and when the sheet is accommodated in the material cavity, the second cross-section of the sheet faces the carrying space; the top of the housing has a gas inlet, the gas inlet is connected to the carrying space, and some process gas can flow into the carrying space from the gas inlet and flow out of the carrying space from the clearance opening.

[0017] In some embodiments, the cross-section passivation system further includes: a vacuum device connected to the furnace body, the vacuum device communicating with the furnace cavity and configured to evacuate the furnace cavity; and / or, the furnace cavity having a plurality of reaction chambers for accommodating the sheet, the cross-section passivation system further including: a plurality of discharge components, each of the reaction chambers having at least one of the discharge components, the discharge components being configured to ionize the process gas flowing toward the cross-section of the sheet within the reaction chamber.

[0018] In some embodiments, when the cross-section passivation system includes a plurality of the discharge components, the sheet has a first cross-section, and the discharge component includes: a first discharge structure, wherein the first discharge structure and the first cross-section are disposed opposite to each other when the reaction chamber contains the sheet; and / or, when the cross-section passivation system includes a plurality of the discharge components, the sheet has a second cross-section, and the discharge component further includes: a second discharge structure, wherein the second discharge structure and the second cross-section are disposed opposite to each other when the reaction chamber contains the sheet; and / or, when the cross-section passivation system includes the extraction device, the extraction device includes: an extraction pipe communicating with the furnace cavity; an extraction pump connected to the end of the extraction pipe away from the furnace cavity; and a particle trap connected to the extraction pipe, the particle trap being located between the extraction pump and the furnace body.

[0019] In some embodiments, when the discharge assembly includes the first discharge structure and the second discharge structure, the discharge assembly further includes: a third discharge structure located between the first discharge structure and the second discharge structure, wherein the first discharge structure, the third discharge structure, and the second discharge structure are sequentially spaced apart along a third direction, and when the reaction chamber contains the sheet, the sheet is located between the first discharge structure and the third discharge structure, and / or between the third discharge structure and the second discharge structure; or, when the discharge assembly includes the first discharge structure and the second discharge structure, the discharge assembly further includes: a third discharge structure located at the bottom of the sheet; wherein the first discharge structure and the second discharge structure are electrically connected to the first electrode of the first power supply, the third discharge structure is electrically connected to the second electrode of the first power supply, the polarities of the first electrode and the second electrode are opposite, and the frequency of the first power supply is less than or equal to 40kHz; or, one of the first discharge structure and the second discharge structure is electrically connected to the second power supply, and the other is grounded, the third discharge structure is not energized, the second power supply is an alternating power supply, and the frequency of the second power supply is greater than or equal to 13MHz and less than or equal to 14MHz; or, both the first discharge structure and the second discharge structure are grounded, The third discharge structure is electrically connected to a third power supply, which is an alternating power supply with a frequency greater than or equal to 13MHz and less than or equal to 14MHz; and / or, in the case where the extraction device includes the particle trap, the particle trap includes: a first housing having a first trapping chamber inside; a second housing sleeved on the outside of the first housing, with a second trapping chamber formed between the inner wall of the second housing and the outer wall of the first housing, the second trapping chamber communicating with the first trapping chamber; a first helical blade located within the first trapping chamber, the first helical blade and the inner wall of the first housing forming a first helical channel; a second helical blade located within the first trapping chamber. Inside the second capture chamber, a second spiral blade is arranged around the first housing, forming a second spiral channel with the outer wall of the first housing and the inner wall of the second housing. When the first housing has a first air inlet and the second housing has a first air outlet, exhaust gas flows into the first capture chamber from the first air inlet, flows sequentially through the first spiral channel and the second spiral channel, and exits from the first air outlet. When the first housing has the first air outlet and the second housing has the first air inlet, exhaust gas flows into the second capture chamber from the first air inlet, flows sequentially through the second spiral channel and the first spiral channel, and exits from the first air outlet.Alternatively, if the extraction device includes the particulate filter, the particulate filter includes: a housing assembly having a filter chamber, and a second air inlet and an air outlet communicating with the filter chamber, the second air inlet and the air outlet being spaced apart along a fourth direction, the fourth direction being the extending direction of the housing assembly; a plurality of filter element assemblies located within the filter chamber and arranged sequentially along the fourth direction, the first filter element assembly being positioned near the second air inlet, and the last filter element assembly being positioned near the air outlet; exhaust gas flows into the filter chamber from the second air inlet, flows sequentially through the plurality of filter element assemblies, and then flows out from the air outlet.

[0020] In some embodiments, when the third discharge structure is located between the first discharge structure and the second discharge structure, and the sheet is disposed between the first discharge structure and the third discharge structure, there is a gap between the sheet and the first discharge structure and / or the third discharge structure; and / or, when the third discharge structure is located between the first discharge structure and the second discharge structure, and the sheet is disposed between the third discharge structure and the second discharge structure, there is a gap between the sheet and the third discharge structure and / or the second discharge structure; and / or, when the particle trap includes the first housing and the second housing, and the first housing is provided with the first air outlet and the second housing is provided with the first air inlet, the particle trap further includes: a filter assembly, provided with a second air outlet, and the filter assembly and the first trapping chamber are connected through the first air outlet.

[0021] In some embodiments, when the furnace cavity has multiple reaction chambers, the cross-section passivation system further includes: a plurality of first heating elements located within the furnace cavity and spaced apart along a fifth direction, wherein the interval between two adjacent first heating elements forms a reaction chamber, and when the reaction chamber contains the sheet, at least one of two adjacent first heating elements is arranged opposite to the cross-section of the sheet; and / or, when the furnace cavity has multiple reaction chambers, the cross-section passivation system further includes: a gas balancing device connected to the furnace body and communicating with the furnace cavity, wherein the gas balancing device is capable of filling the furnace cavity with inert gas. The process gas is used to make the gas pressure in the furnace cavity greater than or equal to the gas pressure in the reaction chamber, thereby inhibiting the flow of process gas from the reaction chamber into the furnace cavity; and / or, in the case where there are multiple reaction chambers in the furnace cavity, the multiple reaction chambers are arranged along the fifth direction, the cross-section passivation system further includes: a gas equalization component, located in the furnace cavity, disposed on the top of multiple first heating elements, the gas equalization component has multiple gas equalization holes, the multiple gas equalization holes are spaced apart at least along the fifth direction, each reaction chamber and at least one gas equalization hole are correspondingly connected, and the direction from the top to the bottom of the first heating element intersects the fifth direction.

[0022] In some embodiments, when the cross-section passivation system includes a plurality of first heating elements, the cross-section passivation system further includes: a second heating element located within the furnace cavity and disposed at the bottom of the first heating elements, wherein the second heating element and the discharge assembly are insulated from each other; and / or, when the cross-section passivation system includes the gas balancing device, the cross-section passivation system further includes: a gas equalization pipe disposed within the furnace cavity, arranged around the outside of the reaction chamber and communicating with the gas balancing device, wherein the gas equalization pipe has a plurality of first gas outlets along its own extending direction; and / or, when the cross-section passivation system includes a plurality of first heating elements, the cross-section passivation system further includes a third heating element and a fourth heating element, wherein the third heating element and the fourth heating element are arranged at intervals along a sixth direction, the sixth direction intersects with the fifth direction, the third heating element can abut against a first side of the plurality of first heating elements, the fourth heating element can abut against a second side of the plurality of first heating elements, and the plurality of first heating elements, the second heating element, the third heating element, the fourth heating element and the flow equalization plate enclose a plurality of the reaction chambers.

[0023] In some embodiments, when the cross-section passivation system includes a second heating element, the bottoms of the second heating element and a plurality of first heating elements are sealed together. The second heating element has a plurality of second vent holes, which are spaced apart at least along the fifth direction. Each reaction chamber communicates with at least one second vent hole. And / or, when the cross-section passivation system includes the gas distribution pipe, the spacing between the first vent holes gradually decreases along the flow direction of the inert gas within the gas distribution pipe. And / or, when the cross-section passivation system includes the gas distribution pipe, the aperture of the first vent holes gradually increases along the flow direction of the inert gas within the gas distribution pipe. And / or, in the cross-section passivation system... When the system includes the third heating element, the cross-section passivation system further includes: a first furnace door, movably connected to the furnace body, for covering or opening the feed inlet; the third heating element is connected to the first furnace door; when the first furnace door covers the feed inlet, the third heating element is located inside the furnace cavity and abuts against the first side of the plurality of first heating elements; and / or, when the cross-section passivation system includes the fourth heating element, the cross-section passivation system further includes: a second furnace door, movably connected to the furnace body, for covering or opening the discharge port; the fourth heating element is connected to the second furnace door; when the second furnace door covers the discharge port, the fourth heating element is located inside the furnace cavity and abuts against the second side of the plurality of first heating elements.

[0024] The cross-section passivation system provided in this application embodiment has a furnace body with a feed inlet and a discharge outlet, each with at least one transport component on one side. During operation, the transport component on the feed inlet side conveys a cassette containing unprocessed sheets into the furnace cavity, while the transport component on the discharge outlet side removes processed sheets from the furnace cavity through the discharge outlet. After passivation, the fork arm component on the discharge outlet side removes the processed sheets from the furnace cavity through the discharge outlet. The entire operation is continuous and efficient; the feed inlet and discharge outlet can operate independently, achieving simultaneous, continuous, and automated loading and unloading, significantly improving production cycle time and increasing capacity. Attached Figure Description

[0025] Figure 1 The diagram shown is a structural schematic of a cross-section passivation system provided in an embodiment of this application.

[0026] Figure 2 The diagram shown is a structural schematic of a cross-section passivation system provided in another embodiment of this application.

[0027] Figure 3 The diagram shown is a structural schematic of a fork arm assembly provided in an embodiment of this application.

[0028] Figure 4The diagram shown is a structural schematic of the cooperation between the carrier paddle and the material box according to an embodiment of this application.

[0029] Figure 5 The diagram shown is a structural schematic of a handling robot provided in an embodiment of this application.

[0030] Figure 6 The diagram shown is a structural schematic of the gripper assembly, material box, and positioning assembly of a handling robot provided in an embodiment of this application.

[0031] Figure 7 The diagram shown is a structural schematic of a material box provided in an embodiment of this application.

[0032] Figure 8 The diagram shown is a schematic diagram of two stacked material boxes according to an embodiment of this application.

[0033] Figure 9 The image shown is a top view of a material box provided in an embodiment of this application.

[0034] Figure 10 As shown Figure 9 A cross-sectional view along line AA.

[0035] Figure 11 The diagram shown is a structural schematic of a particle trap provided in an embodiment of this application.

[0036] Figure 12 As shown Figure 11 A cross-sectional view along line BB.

[0037] Figure 13 The diagram shown is a structural schematic of a particle trap provided in another embodiment of this application.

[0038] Figure 14 As shown Figure 13 A cross-sectional view along the CC line.

[0039] Figure 15 The diagram shown is a structural schematic of the connection between the furnace body and the exhaust device provided in an embodiment of this application.

[0040] Figure 16 The diagram shown is a structural schematic of the connection between the gas balancing device and the gas equalization pipeline provided in an embodiment of this application.

[0041] Figure 17 As shown Figure 16 A magnified schematic diagram of the structure at point D.

[0042] Figure 18 The diagram shown is a schematic representation of an application scenario for a furnace body provided in another embodiment of this application.

[0043] Figure 19The diagram shown is a partial structural schematic of a cross-section passivation system provided in an embodiment of this application.

[0044] Figure 20 As shown Figure 19 A cross-sectional view along the EE line.

[0045] Figure 21 As shown Figure 19 The cross-section passivation system in the diagram does not include the gas equalization component.

[0046] Figure 22 The diagram shown is a schematic diagram of the structure of a discharge assembly provided in an embodiment of this application.

[0047] Figure 23 The diagram shown is a schematic diagram of the structure of a discharge assembly provided in another embodiment of this application.

[0048] Figure 24 The diagram shown is a schematic diagram of the structure of a discharge assembly provided in another embodiment of this application.

[0049] Figure 25 The diagram shown is a structural schematic of a sheet material provided in an embodiment of this application.

[0050] Figure label: 100. Cross-section passivation system; 1. Furnace body; 11. Furnace cavity; 111. Reaction chamber; 12. Feed inlet; 13. Discharge outlet; 14. Exhaust outlet; 2. Material box; 21. Box body; 211. Material cavity; 212. Coating opening; 213. Bearing space; 2131. Positioning groove; 214. Clearance opening; 215. Gas inlet; 216. First limiting part; 217. Second limiting part; 210. Box body; 2101. Mounting groove; 2102. Abutment part; 220. Box cover; 2201. Abutment groove; 22. Pressing mechanism; 221. Pull rod; 222. Spring; 223. Pressing part; 3. Transport assembly; 31. Fork arm assembly; 31 1. Bearing paddle; 312. First drive mechanism; 3121. Lateral movement mechanism; 3122. Lifting mechanism; 32. Handling robot; 321. Base; 322. Robot body; 323. Gripper assembly; 324. Positioning assembly; 4. Transmission assembly; 5. Cooling assembly; 6. Buffer platform; 7. Scanning assembly; 8. Unloading platform; 9. Loading platform; 10. Loading assembly; 20. Unloading assembly; 30. Air extraction device; 301. Air extraction pipe; 302. Air extraction pump; 303. Particle catcher; 3031. First housing; 30311. First capture chamber; 30312. First air outlet; 3032. Second housing; 303 21. Second capture chamber; 30322. First air inlet; 3033. First spiral blade; 3034. Second spiral blade; 3035. First spiral channel; 3036. Second spiral channel; 3037. Filter assembly; 30371. Second air outlet; 30372. Third housing; 30373. First filter element; 30374. Third capture chamber; 3038. Second drive mechanism; 3030. Housing assembly; 30301. Filter chamber; 30302. Second air inlet; 30303. Air outlet; 3000. Filter element assembly; 40. Discharge assembly; 401. First discharge structure; 402. Second discharge structure; 403. Third discharge structure; 50, First heating element; 60, Gas balance device; 70, Gas equalization assembly; 71, Air inlet plate; 711, Air inlet hole; 72, Flow equalization plate; 721, Gas equalization hole; 73, Gas equalization chamber; 80, Second heating element; 81, Second air outlet hole; 90, Gas equalization pipe; 901, First air outlet hole; 200, Third heating element; 300, Fourth heating element; 400, First furnace door; 500, Second furnace door; 600, Insulating plate; X1, First direction; X2, Second direction; X3, Third direction; X4, Fourth direction; X5, Fifth direction; X6, Sixth direction; N, Sheet; N1, First cross section; N2, Second cross section. Detailed Implementation

[0051] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the scope of protection of this application.

[0052] Figure 1 The diagram shown is a structural schematic of a cross-section passivation system provided in an embodiment of this application. Figure 2 The diagram shown is a structural schematic of a cross-section passivation system provided in another embodiment of this application. Figure 3 The diagram shown is a structural schematic of a fork arm assembly provided in an embodiment of this application. Figure 4 The diagram shown is a structural schematic of the cooperation between the carrier paddle and the material box according to an embodiment of this application. Figure 5 The diagram shown is a structural schematic of a handling robot provided in an embodiment of this application. Figure 6 The diagram shown is a structural schematic of the gripper assembly, material box, and positioning assembly of a handling robot provided in an embodiment of this application. Figure 7 The diagram shown is a structural schematic of a material box provided in an embodiment of this application. Figure 8 The diagram shown is a schematic diagram of two stacked material boxes according to an embodiment of this application. Figure 9 The image shown is a top view of a material box provided in an embodiment of this application. Figure 10 As shown Figure 9 A cross-sectional view along line AA. Figure 11 The diagram shown is a structural schematic of a particle trap provided in an embodiment of this application. Figure 12 As shown Figure 11 A cross-sectional view along line BB. Figure 13 The diagram shown is a structural schematic of a particle trap provided in another embodiment of this application. Figure 14 As shown Figure 13 A cross-sectional view along the CC line. Figure 15 The diagram shown is a structural schematic of the connection between the furnace body and the exhaust device provided in an embodiment of this application. Figure 16 The diagram shown is a structural schematic of the connection between the gas balancing device and the gas equalization pipeline provided in an embodiment of this application. Figure 17 As shown Figure 16 A magnified schematic diagram of the structure at point D. Figure 18 The diagram shown is a schematic representation of an application scenario for a furnace body provided in another embodiment of this application. Figure 19 The diagram shown is a partial structural schematic of a cross-section passivation system provided in an embodiment of this application. Figure 20 As shown Figure 19 A cross-sectional view along the EE line. Figure 21 As shown Figure 19The cross-section passivation system in the diagram does not include the gas equalization component. Figure 22 The diagram shown is a schematic diagram of the structure of a discharge assembly provided in an embodiment of this application. Figure 23 The diagram shown is a schematic diagram of the structure of a discharge assembly provided in another embodiment of this application. Figure 24 The diagram shown is a structural schematic of a discharge assembly provided in another embodiment of this application. Figure 25 The diagram shown is a structural schematic of a sheet material provided in an embodiment of this application.

[0053] like Figure 1 , Figures 3 to 15 As shown, this application embodiment provides a cross-section passivation system 100 for passivating the cross-section of sheet N. The cross-section passivation system 100 includes a furnace body 1, a material box 2, and multiple transport components 3. The furnace body 1 has a furnace cavity 11 and a feed inlet 12 and a discharge outlet 13 communicating with the furnace cavity 11. The material box 2 has a material cavity 211 and a coating opening 212 communicating with the material cavity 211, the material cavity 211 being used to accommodate sheet N. Wherein, when the material cavity 211 accommodates sheet N, the coating opening 212 and the cross-section of sheet N are correspondingly arranged so that the coating opening 212 exposes the cross-section of sheet N. At least one transport component 3 is respectively provided on the side near the feed inlet 12 and the side near the discharge outlet 13. The transport component 3 on the side near the feed inlet 12 is at least used to transport the material box 2 carrying the unprocessed sheet N from the feed inlet 12 into the furnace cavity 11. The transport assembly 3 on the side near the discharge port 13 is used at least to remove the processed material box 2 from the discharge port 13 out of the furnace cavity 11.

[0054] The cross-section passivation system 100 of this application embodiment has a furnace body 1 with a feed inlet 12 and a discharge outlet 13. At least one transport component 3 is provided on one side of both the feed inlet 12 and the discharge outlet 13. During operation, the transport component 3 on the feed inlet 12 transports a material box 2 containing unprocessed sheet N from the feed inlet 12 into the furnace cavity 11. The transport component 3 on the side near the discharge outlet 13 removes the processed material box 2 from the furnace cavity 11 through the discharge outlet 13. The entire operation process is continuous and efficient. The feed inlet 12 and the discharge outlet 13 can operate independently, achieving simultaneous, continuous, and automated loading and unloading, significantly improving production cycle time and increasing capacity.

[0055] For example, the furnace body 1 is a cylindrical shape, a geometric shape (e.g., a cube), or other irregular shape.

[0056] It should be noted that "material box 2 awaiting processing" refers to material box 2 that is waiting to participate in the process reaction. Material box 2 awaiting processing needs to be transported into the furnace cavity 11 to participate in the process reaction. "Material box 2 that has already undergone processing" refers to material box 2 that has completed the process reaction. Material box 2 that has undergone processing needs to be removed from the furnace cavity 11.

[0057] For example, a transport component 3 is provided on both the side near the feed inlet 12 and the side near the discharge outlet 13, which can realize automated operation and avoid increasing costs and space occupation by setting too many transport components 3.

[0058] For example, such as Figure 1 As shown, in this embodiment, the processed material box 2 removed from the furnace cavity 11 can be transferred to the feed port 12 side for centralized unloading, thus eliminating the need to set up unloading equipment and space on the discharge port 13 side.

[0059] like Figure 2 As shown, in some embodiments, the cross-section passivation system 100 further includes a transfer component 4, which is arranged adjacent to the furnace body 1 and is used to transfer the material box 2 after unloading from the discharge port 13 side to the feed port 12 side.

[0060] In the above embodiments, the transmission component 4 can transmit the unloaded material box 2 from the discharge port 13 side to the inlet port 12 side, realizing the automated rotation and transmission of the unloaded material box 2 to the inlet port 12 side for loading, saving manpower, improving the transmission efficiency of the material box 2, and helping to further improve the production cycle.

[0061] For example, the transmission component 4 can be a belt conveyor, but it is not limited to this. The specific structure of the transmission component 4 can be designed as needed.

[0062] like Figures 2 to 4 , Figure 15 As shown, in some embodiments, the transport assembly 3 includes a forklift assembly 31 and a handling robot 32. The forklift assembly 31 near the feed inlet 12 is used to transport multiple boxes 2 carrying unprocessed sheets N from the feed inlet 12 into the furnace chamber 11. The forklift assembly 31 near the discharge outlet 13 is used to remove processed boxes 2 from the furnace chamber 11 from the discharge outlet 13. The handling robot 32 near the feed inlet 12 is at least used to transport the boxes 2 carrying unprocessed sheets N onto the forklift assembly 31 near the feed inlet 12. The handling robot 32 near the discharge outlet 13 is at least used to remove the boxes 2 from the forklift assembly 31 near the discharge outlet 13.

[0063] In the above embodiment, during operation, the handling robot 32 near the feed inlet 12 transports the material box 2 to be processed onto the fork arm assembly 31 near the feed inlet 12. The fork arm assembly 31 then transports the material box 2 into the furnace cavity 11. After the process is completed, the fork arm assembly 31 near the discharge outlet 13 removes the processed material box 2 from the furnace cavity 11 through the discharge outlet 13. Then, the handling robot 32 near the discharge outlet 13 removes the processed material box 2. This achieves automated handling and loading / unloading of the material box 2, improving handling and loading / unloading efficiency and helping to increase production cycle time. In addition, it also saves manpower and solves the problem of high error rate caused by manual operation.

[0064] like Figures 2 to 4 , Figure 18 As shown, in some embodiments, the fork arm assembly 31 includes a support paddle 311 and a first drive mechanism 312. The support paddle 311 can be inserted into the material box 2. The first drive mechanism 312 is kinetically connected to the support paddle 311 and can drive the support paddle 311 to move, so that the support paddle 311 extends into and retracts from the furnace chamber 11.

[0065] In the above embodiments, during operation, the carrier paddle 311 and the material box 2 are inserted and engaged. The first drive mechanism 312 drives the carrier paddle 311 to move, so that the carrier paddle 311 extends into and exits the furnace cavity 11, thereby realizing the conveying of the material box 2. Compared with the related technology that uses the material box 2 boat to transport the material box 2, the material box 2 boat has a service life. After long-term use, it is prone to deformation and failure, and needs to be replaced with a new material box 2 boat regularly, which is very costly. This application directly uses the carrier paddle 311 to transport the material box 2, eliminating the material box 2 boat, simplifying the structure of the fork arm assembly 31, and reducing the material cost of the material box 2 boat. In addition, the presence of the material box 2 boat will absorb a lot of heat, resulting in slow heating of the furnace cavity 11. This application eliminates the material box 2 boat, avoiding the influence of the material box 2 boat on the stability of the thermal field and flow field in the furnace cavity 11, improving the coating uniformity of the N section passivation of the sheet, ensuring the passivation quality of the sheet N; at the same time, it improves the space utilization of the passivation equipment, increases the sheet N passivation capacity, and also shortens the process heating time, increasing the production capacity. In addition, the material box 2 boat is prone to generating dust, causing pollution inside the furnace cavity 11. After a period of use, it needs to be shut down for cleaning and maintenance, which consumes labor time. Eliminating the material box 2 boat helps to improve product yield, increase production capacity, and reduce maintenance costs.

[0066] like Figure 3 As shown, in some embodiments, the first drive mechanism 312 includes a lateral movement mechanism 3121 and a lifting mechanism 3122. The lateral movement mechanism 3121 is driven to the carrier paddle 311 and is used to drive the carrier paddle 311 to move laterally. The lifting mechanism 3122 is driven to the lateral movement mechanism 3121 and is used to drive the lateral movement mechanism 3121 to move up and down.

[0067] The lifting mechanism 3122 drives the horizontal moving mechanism 3121 to lift and lower, which in turn drives the carrier paddle 311 to lift and lower synchronously. The horizontal moving mechanism 3121 can drive the carrier paddle 311 to move laterally, thereby extending into and out of the furnace cavity 11.

[0068] For example, the lifting mechanism 3122 and the lateral movement mechanism 3121 can have various solutions, and the specific structures are conventional technologies in the field, which will not be described in detail here.

[0069] like Figure 2 , Figure 5 As shown, in some embodiments, the handling robot 32 includes a base 321, a robot body 322, and a gripper assembly 323. The robot body 322 is connected to the base 321. The gripper assembly 323 is connected to the end of the robot body 322 away from the base 321. The gripper assembly 323 is used to grip the material box 2.

[0070] In the above embodiments, the base 321 provides overall support for the handling robot 32 and facilitates its fixation in the required position, improving stability during operation. The robot body 322 ensures the flexibility of the handling robot 32. The gripper assembly 323 grasps and fixes the material box 2, ensuring the stability of the material box 2 during transport.

[0071] For example, the robot body 322 of the handling robot 32 has multiple degrees of freedom, which can drive the gripper assembly 323 to achieve multiple degrees of freedom of movement. The specific settings are as needed and will not be described in detail here.

[0072] For example, the gripper assembly 323 can be a vacuum suction cup structure, which adsorbs and fixes the material box 2. For example, the gripper assembly 323 can be a robotic arm, which grasps the material box 2. For example, the gripper assembly 323 can be a magnetic fixing structure, which magnetically fixes the material box 2.

[0073] like Figures 2 to 6 As shown, in some embodiments, when the handling robot 32 includes a gripper assembly 323, the handling robot 32 also includes a positioning assembly 324 disposed on the gripper assembly 323 for obtaining the position information of the material box 2.

[0074] In the above embodiments, the positioning component 324 can move with the gripper component 323 and collect position information in real time by aligning with the area where the material box 2 is located. This avoids the problem of obstruction of the field of view caused by the positioning component 324 being set in other positions, improves the accuracy of position recognition, and allows the gripper component 323 to more accurately align with the material box 2 to complete the pick-up and put-down operation, thereby improving the stability and efficiency of the handling process.

[0075] For example, the positioning component 324 includes at least one camera. For example, the positioning component 324 includes at least one infrared sensor.

[0076] like Figure 2 As shown, in some embodiments, when the transport component 3 includes the fork arm assembly 31, the section passivation system 100 also includes a plurality of cooling components 5 arranged around the fork arm assembly 31 near the discharge port 13 for cooling the sheet N in the material box 2 on the fork arm assembly 31 near the discharge port 13.

[0077] In the above embodiment, multiple cooling components 5 are arranged around the fork arm assembly 31 near the discharge port 13. When the fork arm assembly 31 near the discharge port 13 removes the processed material box 2 from the furnace cavity 11, the multiple cooling components 5 can simultaneously cool the processed sheet N in the material box 2 from multiple directions, thereby improving cooling efficiency, shortening cooling waiting time, accelerating production cycle, shortening the overall process cycle, and further improving production efficiency.

[0078] For example, the cooling assembly 5 includes a cooling fan. For example, the cooling assembly 5 includes a temperature probe mounted on the cooling fan; when the temperature probe detects a temperature lower than a preset value, the cooling fan is turned off. For example, the preset value can be designed as needed, for example, 40°C, and is not limited thereto.

[0079] For example, three cooling components 5 are spaced apart around the fork arm assembly 31 near the discharge port 13.

[0080] like Figure 2 As shown, in some embodiments, when the transport component 3 includes a handling robot 32, the cross-section passivation system 100 also includes a plurality of buffer platforms 6, at least one buffer platform 6 is arranged near the side of the handling robot 32 near the feed port 12, and at least one buffer platform 6 is arranged near the side of the handling robot 32 near the discharge port 13. The buffer platform 6 is used to temporarily store the material box 2.

[0081] In the above embodiments, among the multiple buffer platforms 6 provided, at least one buffer platform 6 configured by the handling robot 32 located on the side of the feed inlet 12 can serve as a temporary turnover and storage platform for the material boxes 2 to be processed. Specifically, when the fork arm assembly 31 on the side near the feed inlet 12 is fully loaded with material boxes 2 to be processed, the handling robot 32 on the side near the feed inlet 12 can temporarily transport and place the excess material boxes 2 that have not been processed in time onto the buffer platform 6 on the side near the feed inlet 12, thereby effectively avoiding work stoppages in the feed inlet 12 area, ensuring the smooth flow of material boxes 2, and further accelerating the work cycle.

[0082] Similarly, at least one buffer platform 6 set on the handling robot 32 near the discharge port 13 can serve as a temporary storage platform for the processed material boxes 2. During operation, when a considerable number of processed material boxes 2 accumulate on the fork arm assembly 31 near the discharge port 13, the handling assembly near the discharge port 13 can temporarily transfer these processed material boxes 2 and store them on the corresponding buffer platform 6, ensuring the continuous operation of the fork arm assembly 31 near the discharge port 13, which helps to speed up the production cycle and improve operational efficiency.

[0083] For example, there are two buffer platforms 6, one buffer platform 6 with a transport robot 32 set near the feed inlet 12 and the other buffer platform 6 with a transport robot 32 set near the discharge outlet 13.

[0084] like Figure 2 , Figure 15 As shown, in some embodiments, when the cross-section passivation system 100 includes a transmission component 4, the cross-section passivation system 100 also includes a scanning component 7, which is disposed adjacent to the transmission component 4 and located on the side of the transmission component 4 near the feed inlet 12, and is used at least to scan the information code on the material box 2 transmitted by the transmission component 4.

[0085] In the above embodiment, the scanning component 7, which is arranged adjacent to the transmission component 4, can scan the material box 2 transmitted by the transmission component 4 to determine the online time and usage cycle of the material box 2, which is beneficial to the maintenance of the material box 2.

[0086] For example, the information code on the material box 2 may be a barcode or a QR code. For example, the scanning component 7 includes a laser scanner.

[0087] like Figure 2 , Figure 15 As shown, in some embodiments, when the cross-section passivation system 100 includes a transfer component 4, the cross-section passivation system 100 also includes a feeding platform 8, which is disposed adjacent to the transfer component 4 and located on the side of the transfer component 4 near the discharge port 13. The handling robot 32 on the side near the discharge port 13 can place at least a portion of the unloaded material box 2 onto the feeding platform 8.

[0088] In the above embodiment, the unloading platform 8, located adjacent to the conveying component 4, is positioned to facilitate connection with subsequent processing flows. After the material unloading operation is completed, the handling robot 32, located on one side of the discharge port 13, places at least a portion of the unloaded material boxes 2 onto the unloading platform 8. Subsequently, the unloading platform 8, according to preset work instructions, transports these unloaded material boxes 2 outwards for subsequent maintenance and other operations. This series of coordinated actions ensures efficient connection of the production line and continuity of material handling.

[0089] Specifically, when the material box 2 reaches the end of its service or maintenance period, the handling robot 32 located on the side of the discharge port 13 will place the unloaded material box 2 on the unloading platform 8 to unload it, which will facilitate subsequent maintenance or replacement.

[0090] For example, the feeding platform 8 can be a belt conveyor platform, which is used to feed the material box 2.

[0091] like Figure 2 , Figure 15 As shown, in some embodiments, when the transport component 3 includes a handling robot 32, the cross-section passivation system 100 also includes a loading platform 9, which is arranged adjacent to the handling robot 32 near the feed inlet 12. The handling robot 32 is capable of carrying the material box 2 off the loading platform 9.

[0092] In the above embodiment, the loading platform 9, which is adjacent to the handling robot 32 near the feed inlet 12, can transport the material box 2 to the working area, so that the handling robot 32 can remove the material box 2 from the loading platform 9 for the next operation.

[0093] Specifically, the maintained or newly replaced material box 2 is loaded via the loading platform 9. For example, the scanning component 7 is also used to scan the information code on the material box 2 transmitted from the loading platform 9.

[0094] For example, the feeding platform 9 can be a belt conveyor platform, which is used to feed the material box 2.

[0095] like Figure 1 , Figure 14 As shown, in some embodiments, when the cross-section passivation system 100 includes a loading platform 9, the cross-section passivation system 100 also includes a loading assembly 10, which is arranged adjacent to the loading platform 9, the handling robot 32 near the feed inlet 12, and the fork arm assembly 31 near the feed inlet 12. The loading assembly 10 is used to place the unprocessed sheet N near the feed inlet 12 into the material box 2 transported by the handling robot 32 near the feed inlet 12.

[0096] In the above embodiments, the feeding assembly 10, the feeding platform 9, the handling robot 32 near the feed inlet 12, and the fork arm assembly 31 near the feed inlet 12 are all arranged adjacent to each other, resulting in a compact structure that helps reduce the volume of the cross-section passivation system 100. The feeding assembly 10 can place the unprocessed sheet N near the feed inlet 12 into the material box 2 transported by the handling robot 32 near the feed inlet 12, achieving automated loading, saving manpower, and increasing the feeding rate.

[0097] like Figure 2 , Figure 15As shown, in some embodiments, when the cross-section passivation system 100 includes a feeding platform 8, the cross-section passivation system 100 also includes a feeding assembly 20, which is disposed adjacent to the feeding platform 8, the handling robot 32 near the discharge port 13, and the fork arm assembly 31 near the discharge port 13. The feeding assembly 20 is used to remove the sheet N from the material box 2 transported by the handling robot 32 near the discharge port 13.

[0098] In the above embodiments, the unloading component 20, the unloading platform 8, the handling robot 32 near the discharge port 13, and the fork arm component 31 near the discharge port 13 are all arranged adjacent to each other, resulting in a compact structure that helps to further reduce the volume of the cross-section passivation system 100. The unloading component 20 can remove the sheet N from the material box 2 brought by the handling robot 32 near the discharge port 13, achieving automated unloading, saving manpower, and increasing the unloading rate.

[0099] Since both the feeding component 10 and the unloading component 20 are existing technologies, they will not be described in detail here.

[0100] like Figure 1 , Figure 14 As shown, in some embodiments, the cross-section passivation system 100 includes a fork arm assembly 31, a feeding assembly 10, and a discharging assembly 20. Along the first direction X1, the feeding assembly 10, the fork arm assembly 31 near the feed inlet 12, the furnace body 1, the fork arm assembly 31 near the discharge outlet 13, and the discharging assembly 20 are arranged sequentially.

[0101] In the above embodiments, the feeding assembly 10, the fork arm assembly 31 near the feed inlet 12, the furnace body 1, the fork arm assembly 31 near the discharge outlet 13, and the unloading assembly 20 are arranged sequentially along the first direction X1, so that each structure is compactly arranged in the first direction X1, which helps to reduce the space occupied in other directions (directions intersecting with the first direction X1), thereby reducing the volume of the cross-section passivation system 100 in other directions (directions intersecting with the first direction X1).

[0102] For example, the feeding assembly 10, the fork arm assembly 31 near the feed inlet 12, the furnace body 1, the fork arm assembly 31 near the discharge outlet 13, and the unloading assembly 20 are arranged at intervals along the first direction X1.

[0103] like Figure 2 , Figure 15As shown, in some embodiments, when the cross-section passivation system 100 includes a handling robot 32, a feeding assembly 10, a discharging assembly 20, and a buffer platform 6, along the first direction X1, the feeding assembly 10, the handling robot 32 near the feed inlet 12, the buffer platform 6 near the feed inlet 12, the furnace body 1, the buffer platform 6 near the discharge outlet 13, the handling robot 32 near the discharge outlet 13, and the discharging assembly 20 are arranged sequentially.

[0104] In the above embodiments, the feeding assembly 10, the handling robot 32 near the feed inlet 12, the buffer platform 6 near the feed inlet 12, the furnace body 1, the buffer platform 6 near the discharge outlet 13, the handling robot 32 near the discharge outlet 13, and the unloading assembly 20 are arranged sequentially along the first direction X1, so that each structure is compactly arranged in the first direction X1, which helps to reduce the space occupied in other directions (directions intersecting the first direction X1), thereby reducing the size of the cross-section passivation system 100 in other directions (directions intersecting the first direction X1).

[0105] For example, the feeding assembly 10, the handling robot 32 near the feed inlet 12, the buffer platform 6 near the feed inlet 12, the furnace body 1, the buffer platform 6 near the discharge outlet 13, the handling robot 32 near the discharge outlet 13, and the unloading assembly 20 are arranged sequentially at intervals along the first direction X1.

[0106] like Figure 2 , Figure 15 As shown, in some embodiments, when the cross-section passivation system 100 includes a transmission component 4, a feeding component 10, a discharging component 20, a feeding platform 9, a discharging platform 8, and a scanning component 7, the feeding component 10, the feeding platform 9, the scanning component 7, the transmission component 4, the discharging platform 8, and the discharging component 20 are arranged sequentially along the first direction X1.

[0107] In the above embodiments, the feeding component 10, the feeding platform 9, the scanning component 7, the transmission component 4, the unloading platform 8, and the unloading component 20 are arranged sequentially along the first direction X1, so that each structure is compactly arranged in the first direction X1, which helps to reduce the space occupied in other directions (directions intersecting with the first direction X1), thereby reducing the size of the cross-section passivation system 100 in other directions (directions intersecting with the first direction X1).

[0108] For example, the feeding component 10, the feeding platform 9, the scanning component 7, the transmission component 4, the unloading platform 8, and the unloading component 20 are arranged at intervals along the first direction X1.

[0109] like Figure 2 , Figure 15As shown, in some embodiments, when the cross-section passivation system 100 includes a fork arm assembly 31, a buffer platform 6, and a scanning assembly 7, the fork arm assembly 31, the buffer platform 6, and the scanning assembly 7 are arranged sequentially along the second direction X2, near the feed inlet 12.

[0110] In the above embodiment, the fork arm assembly 31, the buffer platform 6, and the scanning assembly 7 near the feed inlet 12 are arranged sequentially along the second direction X2, so that each structure is compactly arranged in the second direction X2, which helps to reduce the space occupied in other directions (directions intersecting with the second direction X2), thereby reducing the size of the cross-section passivation system 100 in other directions (directions intersecting with the second direction X2).

[0111] For example, the second direction X2 intersects the first direction X1. For example, the second direction X2 is perpendicular to the first direction X1.

[0112] For example, the fork arm assembly 31, the buffer platform 6, and the scanning assembly 7 located near the feed inlet 12 are arranged sequentially at intervals along the second direction X2.

[0113] like Figure 2 , Figure 15 As shown, in some embodiments, when the cross-section passivation system 100 includes a fork arm assembly 31, a buffer platform 6, and a transmission assembly 4, the fork arm assembly 31, the buffer platform 6, and the transmission assembly 4 are arranged sequentially along the second direction X2, near the feed inlet 12.

[0114] In the above embodiment, the fork arm assembly 31, the buffer platform 6, and the transmission assembly 4 near the feed inlet 12 are arranged sequentially along the second direction X2, so that each structure is compactly arranged in the second direction X2, which helps to reduce the space occupied in other directions (directions intersecting with the second direction X2), thereby reducing the size of the cross-section passivation system 100 in other directions (directions intersecting with the second direction X2).

[0115] For example, the fork arm assembly 31, the buffer platform 6, and the transmission assembly 4, which are located near the feed inlet 12, are arranged sequentially at intervals along the second direction X2.

[0116] like Figure 2 , Figure 15 As shown, in some embodiments, when the cross-section passivation system 100 includes a fork arm assembly 31, a buffer platform 6, and a transmission assembly 4, the fork arm assembly 31, the buffer platform 6, and the transmission assembly 4 are arranged sequentially along the second direction X2, near the discharge port 13.

[0117] In the above embodiment, the fork arm assembly 31, the buffer platform 6, and the transmission assembly 4 near the discharge port 13 are arranged sequentially along the second direction X2, so that each structure is compactly arranged in the second direction X2, which helps to reduce the space occupied in other directions (directions intersecting with the second direction X2), thereby reducing the size of the cross-section passivation system 100 in other directions (directions intersecting with the second direction X2).

[0118] For example, the fork arm assembly 31, the buffer platform 6, and the transmission assembly 4, which are located near the discharge port 13, are arranged sequentially along the second direction X2.

[0119] like Figure 2 , Figure 15 As shown, in some embodiments, when the cross-section passivation system 100 includes a fork arm assembly 31, a handling robot 32, and a loading platform 9, the fork arm assembly 31, the handling robot 32, and the loading platform 9 are arranged sequentially along the second direction X2, near the feed inlet 12.

[0120] In the above embodiment, the fork arm assembly 31, the handling robot 32, and the loading platform 9 near the feed inlet 12 are arranged sequentially along the second direction X2, so that each structure is compactly arranged in the second direction X2, which helps to reduce the space occupied in other directions (directions intersecting with the second direction X2), thereby reducing the size of the cross-section passivation system 100 in other directions (directions intersecting with the second direction X2).

[0121] For example, the fork arm assembly 31, the handling robot 32, and the loading platform 9, which are located near the feed inlet 12, are arranged sequentially at intervals along the second direction X2.

[0122] like Figure 2 , Figure 15 As shown, in some embodiments, when the cross-section passivation system 100 includes a fork arm assembly 31, a handling robot 32, and a unloading platform 8, the fork arm assembly 31, the handling robot 32, and the unloading platform 8 are arranged sequentially along the second direction X2, near the discharge port 13.

[0123] In the above embodiment, the fork arm assembly 31, the handling robot 32, and the unloading platform 8 near the discharge port 13 are arranged sequentially along the second direction X2, so that each structure is compactly arranged in the second direction X2, which helps to reduce the space occupied in other directions (directions intersecting with the second direction X2), thereby reducing the size of the cross-section passivation system 100 in other directions (directions intersecting with the second direction X2).

[0124] For example, the fork arm assembly 31, the handling robot 32, and the unloading platform 8 near the discharge port 13 are arranged sequentially at intervals along the second direction X2.

[0125] like Figure 3 , Figures 7 to 10 , Figure 25 As shown, in some embodiments, when the fork arm assembly 31 includes a support paddle 311, the sheet N has a first cross-section N1. The material box 2 includes a box body 21 having at least one material cavity 211 and at least one coating opening 212. The box body 21 also has a support space 213 and a clearance opening 214 communicating with the support space 213, through which the support paddle 311 can be inserted into the support space 213.

[0126] In the above embodiments, by setting an independent bearing space 213 inside the box 21, the bearing paddle 311 can be embedded in the bearing space 213 of the box 21, realizing the plug-in cooperation between the bearing paddle 311 and the box 21. No additional fixed support structure is required, which simplifies the cooperation structure and cooperation method between the bearing paddle 311 and the material box 2.

[0127] For example, sheet N can be a silicon wafer, a solar panel, a glass substrate, etc. Sheet N can be formed from a large-sized sheet material through at least one cut, and the cut surface is the cross-section of sheet N. For example, the sheet material is a silicon wafer, specifically a quarter wafer, such as a silicon wafer with a length of 210mm and a width of 210mm. Specifically, sheet N formed by cutting the sheet material only once has only a first cross-section N1, while sheet N formed by cutting the sheet material twice or more may have only a first cross-section N1, or a first cross-section N1 and a second cross-section N2.

[0128] For example, the box 21 can be a cube, cuboid, or other geometric shape. For example, the material cavity 211 can be a rectangular cavity or other geometric cavity. For example, the coating opening 212 can be rectangular, circular, other polygonal, or irregular in shape. For example, the carrying space 213 can be a rectangular space, or other geometric space or irregular space. For example, the clearance opening 214 can be rectangular, U-shaped, circular, etc.

[0129] For example, the box body 21 is a cuboid, the material cavity 211 is a rectangular cavity, the coating opening 212 is rectangular in shape, the carrying space 213 is a rectangular space, and the clearance opening 214 is U-shaped.

[0130] like Figures 7 to 10As shown, in some embodiments, there are two material cavities 211 and two coating openings 212, with each of the two coating openings 212 corresponding to and communicating with one of the two material cavities 211. The coating opening 212 is located on the side of the corresponding material cavity 211 away from the bearing space 213. The bearing space 213 is located between the two material cavities 211.

[0131] In the above embodiment, by placing the carrying space 213 between the two material cavities 211 and inserting the carrying paddle 311 into the carrying space 213 between the two material cavities 211, the center of force of the entire box body 21 is closer to the center of gravity of the material box 2, making the material box 2 more balanced and stable during transportation. At the same time, the two material cavities 211 also further increase the sheet N capacity of the material box 2, effectively improving the production capacity of a single process.

[0132] For example, one material chamber 211 can hold 1,500 sheets N, and the two material chambers 211 of the material box 2 can hold a total of 3,000 sheets N.

[0133] like Figures 7 to 10 In some embodiments, when there are two material cavities 211 and two coating openings 212, the two material cavities 211 have equal volumes and are symmetrically arranged on both sides of the bearing space 213.

[0134] In the above embodiment, the two material cavities 211 are arranged in a symmetrical manner with equal volume, so that the sheet N in the two material cavities 211 is completely symmetrical in spatial position with respect to the central axis of the material box 2. After the bearing paddle 311 is inserted into the bearing space 213, the material cavities 211 on both sides of the bearing paddle 311 are subjected to equal forces, which improves the stability of the transport of the material box 2 and avoids the material box 2 tilting or falling due to uneven forces on both sides of the bearing paddle 311.

[0135] In some embodiments, when the supporting space 213 is located between the two material cavities 211, the sheet N also has a second cross-section N2 disposed opposite to the first cross-section N1. When the sheet N is accommodated in the material cavity 211, the second cross-section N2 of the sheet N faces the supporting space 213. The top of the housing 21 has a gas inlet 215, which communicates with the supporting space 213, allowing some process gas to flow into the supporting space 213 from the gas inlet 215 and out of the supporting space 213 from the clearance opening 214.

[0136] In the above embodiments, the carrying space 213, in addition to cooperating with the carrying paddle 311 to transport the material box 2, also serves as a partial process gas flow channel in the coating reaction to passivate the second cross-section N2 of the sheet N. This eliminates the need for an additional process gas flow channel for the second cross-section N2, simplifying the structure of the material box 2. Compared to schemes where process gas can only flow from the outside of the material box 2 to achieve coating, this embodiment allows a portion of the process gas to flow along the carrying space 213, ensuring that the second cross-section N2 of the sheet N near the carrying space 213 can also fully contact the process gas. This simultaneously achieves coating of both the first cross-section N1 and the second cross-section N2, eliminating the need for secondary processing by adjusting the position of the sheet N and shortening the overall process time.

[0137] For example, the gas inlet 215 may be rectangular, circular, other polygonal, or irregular in shape.

[0138] like Figure 3 and Figure 7 As shown, in some embodiments, the bottom side of the carrying space 213 away from the box 21 has a positioning groove 2131, which is configured to engage with the carrying paddle 311.

[0139] In the above embodiments, to make it easier for the carrier paddle 311 to be inserted into the carrier space 213, the width of the carrier space 213 is usually set to be larger than the width of the carrier paddle 311. However, if the difference in size is too large, the material box 2 will easily sway relative to the carrier paddle 311 during transportation. Therefore, this application provides a positioning groove 2131 on the bottom side of the carrier space 213 away from the box body 21. After the carrier paddle 311 is inserted into the carrier space 213, it further engages with the positioning groove 2131, thereby positioning the carrier paddle 311 through the positioning groove 2131, preventing the material box 2 from moving relative to the carrier paddle 311 during transportation, and improving transportation stability.

[0140] For example, along the width direction of the bearing space 213, two protrusions are provided opposite to each other on the inner wall of the clearance opening 214. The gap between the two protrusions is the positioning groove 2131. When the bearing paddle 311 is inserted into the positioning groove 2131, the two protrusions respectively abut and position the bearing paddle 311 on both sides.

[0141] For example, the cross-sectional size of the positioning groove 2131 gradually decreases along the direction from the bottom to the top of the box 21, so that the carrier paddle 311 can be more easily inserted into the positioning groove 2131. For example, the positioning groove 2131 is a trapezoidal groove.

[0142] like Figures 7 to 8As shown, in some embodiments, the top of the box body 21 has a first limiting portion 216, and the bottom of the box body 21 has a second limiting portion 217. When at least two boxes 2 are stacked, in two adjacent stacked boxes 2, the first limiting portion 216 of the lower box 2 and the second limiting portion 217 of the upper box 2 are inserted and engaged.

[0143] In the above embodiments, the interlocking of the first limiting part 216 and the second limiting part 217 of the stacked upper and lower material boxes 2 can prevent the upper material box 2 from being relatively misaligned during the stacking and transportation of at least two material boxes 2, thereby improving the stability of stacking and transporting multiple material boxes 2. In addition, this interlocking method can also guide the material boxes 2 to quickly align during stacking, thereby improving the stacking efficiency of the material boxes 2.

[0144] For example, the top of the box body 21 is provided with two first limiting parts 216, and the bottom of the box body 21 is provided with two second limiting parts 217.

[0145] For example, the first limiting part 216 is a protruding structure, and the second limiting part 217 is a groove, wherein the protruding structure can be inserted into the groove. For example, the shape of the first limiting part 216 and the shape of the second limiting part 217 are matched, for example, the first limiting part 216 is a rectangular protruding structure, and the second limiting part 217 is a rectangular groove.

[0146] like Figures 7 to 10 As shown, in some embodiments, the box body 21 includes a box body 210 and a box lid 220. The box body 210 has a mounting groove 2101 in its side wall. The box lid 220 is detachably connected to the box body 210. The material box 2 also includes a clamping mechanism 22 disposed within the mounting groove 2101 and partially extending outside the mounting groove 2101. When the material cavity 211 contains a plurality of stacked sheets N, the portion of the clamping mechanism 22 located outside the mounting groove 2101 can abut against the side of the box lid 220 away from the box body 210, so that the box lid 220 clamps the plurality of stacked sheets N.

[0147] In the above embodiments, when multiple sheets N are stacked in the material cavity 211, the cover 220 is connected to the body 210. The pressing mechanism 22 actively applies pressure to the cover 220 to press the multiple stacked sheets N tightly, ensuring that the sheets N stacked in the material cavity 211 remain tightly fitted during handling and processing, and will not experience relative displacement or shaking due to vibration or airflow impact, thus improving handling stability and coating process quality. Furthermore, by placing the pressing mechanism 22 within the mounting groove 2101 of the body 210, the amount of alumina and other dust deposited on the pressing mechanism 22 is reduced, thereby lowering the failure rate of the pressing mechanism 22. Simultaneously, it does not occupy external space of the material box 2, which helps to reduce the volume and height of the material box 2. With the same passivation cavity volume, more material boxes 2 (smaller in size) can be placed, improving the utilization rate of cavity space.

[0148] Specifically, the clamping mechanism 22 is movable and can be in an unlocked state or a locked state. In the unlocked state, the clamping mechanism 22 is separated from the lid 220, and the lid 220 can be detached from the box body 210; in the locked state, the clamping mechanism 22 and the lid 220 abut against each other and provide continuous pressure.

[0149] For example, the operation process is as follows: First, multiple sheets N are stacked and loaded into the material cavity 211, then the box cover 220 is closed, and the pressing mechanism 22 applies a pressure toward the sheet N to the box cover 220. This pressure is transmitted through the box cover 220 to the sheet N near the box cover 220, thereby pressing the entire stack of sheets N together.

[0150] For example, the first limiting part 216 is provided at the top of the box body 210, and the second limiting part 217 is provided at the bottom of the box body 210.

[0151] For example, the material box 2 is a square material box 2, and there are four pressing mechanisms 22, which are located at the four corners of the material box 2, that is, there are mounting grooves 2101 at the four corners of the box body 210. The four pressing mechanisms 22 are installed in the four mounting grooves 2101 respectively, which can realize that the four pressing mechanisms 22 abut against the cover plate at the same time, thereby improving the abutment stability and force uniformity of the cover plate.

[0152] like Figures 7 to 10 As shown, in some embodiments, the side of the lid 220 away from the body 210 has an abutment groove 2201, and the portion of the pressing mechanism 22 located outside the mounting groove 2101 can abut against the abutment groove 2201.

[0153] In the above embodiment, the cover 220 is provided with an abutment groove 2201. When the pressing mechanism 22 is in the locked state, the part of the pressing mechanism 22 located outside the mounting groove 2101 abuts against the abutment groove 2201, which improves the reliability of the cooperation between the cover 220 and the pressing mechanism 22, reduces the probability of the cover 220 shifting laterally, and ensures that the cover 220 always abuts against the pressing mechanism 22 and the sheet N in the preset position.

[0154] For example, the box cover 220 is a square cover plate, and there are four abutment grooves 2201, which are respectively located at the four corners of the box cover 220 and cooperate with the four pressing mechanisms 22 one by one.

[0155] In some embodiments, the pressing mechanism 22 is an elastic structure. When the material cavity 211 contains a plurality of stacked sheets N, the portion of the pressing mechanism 22 located outside the mounting groove 2101 can elastically abut against the side of the lid 220 away from the body 210, so that the lid 220 is elastically pressed against the sheet N.

[0156] In the above embodiments, the pressing mechanism 22 is an elastic structure, which allows the lid 220 to be elastically pressed onto the sheet N, avoiding rigid contact between the lid 220 and the sheet N that could damage the sheet N. Simultaneously, the elastic structure can adaptively adjust the pressing force on the lid 220, maintaining a constant pressure on both the lid 220 and the sheet N without requiring manual adjustment, and can accommodate multiple sheets N with different stacking thicknesses.

[0157] For example, when the thickness of sheet N changes slightly due to processing consumption, or when the number of sheets N changes and the thickness of multiple sheets N stacked together changes, the elastic pressing mechanism 22 can adapt to this change and always maintain contact with the lid 220, so that the sheet N will not be unable to be pressed and thus shift or fall off. It can also reduce the difficulty of feeding sheet N and improve the adaptability and safety of the whole device.

[0158] like Figures 7 to 10As shown, in some embodiments, the inner wall of the mounting groove 2101 is provided with an abutment portion 2102 when the clamping mechanism 22 is an elastic structure. The clamping mechanism 22 includes a pull rod 221, a spring 222, and a clamping portion 223. The first end of the pull rod 221 is sleeved inside the mounting groove 2101, and the second end of the pull rod 221 extends to the outside of the mounting groove 2101. The spring 222 is located inside the mounting groove 2101 and sleeved outside the pull rod 221. The side of the spring 222 away from the first end of the pull rod 221 contacts the abutment portion 2102, and the side of the spring 222 near the first end of the pull rod 221 is fixedly connected to the pull rod 221. The clamping portion 223 is fixedly connected to the second end of the pull rod 221 and extends to the side of the cover 220 away from the body 210. Under the action of external force, the pull rod 221 can move relative to the mounting groove 2101 in a direction away from the mounting groove 2101, thereby driving the clamping part 223 to move away from the lid 220 and compressing the spring 222, so that the clamping part 223 and the lid 220 are separated. Under the action of the elastic force of the spring 222, the pull rod 221 can move relative to the mounting groove 2101 in a direction close to the mounting groove 2101, thereby driving the clamping part 223 to move closer to the lid 220, so that the clamping part 223 and the lid 220 abut against each other.

[0159] In the above embodiment, after multiple sheets N are stacked and placed into the material cavity 211, the clamping mechanism 22 changes from the unlocked state to the locked state. That is, the pull rod 221 moves relative to the mounting groove 2101 in a direction close to the mounting groove 2101 under the elastic force of the spring 222, thereby driving the clamping part 223 to move towards the box cover 220 until the clamping part 223 and the box cover 220 abut against each other, so that the box cover 220 is elastically pressed onto the sheet N, ensuring the stability of the sheet N during transportation and coating process. When the sheet N needs to be removed, the clamping mechanism 22 changes from the locked state to the unlocked state, that is, an external force is applied to the pull rod 221, and the pull rod 221 moves relative to the mounting groove 2101 in a direction away from the mounting groove 2101, thereby driving the clamping part 223 to move away from the box cover 220 and compressing the spring 222, so that the clamping part 223 and the box cover 220 are separated, and the box cover 220 is removed from the box body 210, so that multiple sheets N can be taken out. The mounting groove 2101 can limit and guide the movement of the pull rod 221. When the pull rod 221 moves, it moves along the mounting groove 2101 to ensure the accuracy of the movement. With the help of the elastic force of the spring 222, the pull rod 221 moves, so that the pressing part 223 automatically abuts against the cover 220. No manual operation is required, simplifying the operation steps and improving the operation efficiency.

[0160] For example, the shape of the pressing part 223 is the same as the shape of the abutment groove 2201. For example, if the abutment groove 2201 is a rectangular groove, the shape of the pressing part 223 is rectangular, or if the abutment groove 2201 is a circular groove, the shape of the pressing part 223 is cylindrical.

[0161] For example, the shape of the mounting groove 2101 is the same as the shape of the pull rod 221. For example, if the cross section of the pull rod 221 along the first direction X1X1 is circular, then the mounting groove 2101 is a circular groove.

[0162] like Figure 2 , Figure 15 , Figure 18 As shown, in some embodiments, the cross-section passivation system 100 further includes an air extraction device 30 connected to the furnace body 1, the air extraction device 30 being connected to the furnace cavity 11 and configured to evacuate the furnace cavity 11.

[0163] In the above embodiments, the vacuum pump 30 can evacuate the furnace chamber 11 to ensure the vacuum level required for the reaction process. Simultaneously, when venting is required after the reaction, the vacuum pump 30 can achieve rapid venting. Furthermore, during the reaction, maintaining a low-frequency suction by the vacuum pump 30 can accelerate the inflow and outflow rate of the process gas, thereby enhancing the reaction effect and preventing the accumulation of process gas in the furnace chamber 11 after the reaction, which would hinder the inflow of new process gas.

[0164] like Figure 15 , Figure 18 As shown, in some embodiments, the extraction device 30 includes an extraction pipe 301, an extraction pump 302, and a particle trap 303. The extraction pipe 301 is connected to the furnace chamber 11. The extraction pump 302 is connected to the end of the extraction pipe 301 away from the furnace chamber 11. The particle trap 303 is connected to the extraction pipe 301 and is located between the extraction pump 302 and the furnace body 1.

[0165] In the above embodiments, the process gas after the reaction will first pass through the particle trap 303 during the discharge process. The by-product particles carried by the gas flow will be trapped in the particle trap 303, which will prevent the particles from entering the air pump 302 and causing pump wear or pipeline blockage. While maintaining the stable operation of the air pump 30, it also reduces the frequency of equipment cleaning and maintenance, and reduces maintenance costs.

[0166] like Figure 11 , Figure 12As shown, in some embodiments, the particle trap 303 includes a first housing 3031, a second housing 3032, a first helical blade 3033, and a second helical blade 3034. The first housing 3031 has a first trapping cavity 30311 inside. The second housing 3032 is sleeved on the outside of the first housing 3031, and a second trapping cavity 30321 is formed between the inner wall of the second housing 3032 and the outer wall of the first housing 3031. The second trapping cavity 30321 and the first trapping cavity 30311 are in communication. The first helical blade 3033 is located within the first trapping cavity 30311. The first helical blade 3033 and the inner wall of the first housing 3031 enclose a first helical channel 3035. The second helical blade 3034 is located within the second trapping cavity 30321 and is arranged around the first housing 3031. The second helical blade 3034 and the outer wall of the first housing 3031 and the inner wall of the second housing 3032 enclose a second helical channel 3036. With the first housing 3031 having a first air inlet 30322 and the second housing 3032 having a first air outlet 30312, exhaust gas flows into the first capture chamber 30311 from the first air inlet 30322, flows sequentially through the first spiral channel 3035 and the second spiral channel 3036, and flows out from the first air outlet 30312. With the first housing 3031 having a first air outlet 30312 and the second housing 3032 having a first air inlet 30322, exhaust gas flows into the second capture chamber 30321 from the first air inlet 30322, flows sequentially through the second spiral channel 3036 and the first spiral channel 3035, and flows out from the first air outlet 30312.

[0167] In the above embodiment, a first helical blade 3033 is provided inside the first housing 3031 to form a first helical channel 3035, and a second helical blade 3034 is provided between the first housing 3031 and the second housing 3032 to form a second helical channel 3036. The second helical channel 3036 and the first helical channel 3035 are connected. The exhaust gas flowing in from the first air inlet 30322 flows sequentially through the first helical channel 3035 and the second helical channel 3036, or sequentially through the second helical channel 3036 and the first helical channel 3035. The arrangement of the double helical channels greatly extends the exhaust gas flow path, allowing as many dust particles in the exhaust gas as possible to be retained in the particulate filter 303, thereby reducing the contamination of the vacuum pump located downstream of the particulate filter 303 by dust and other particulate matter, and protecting the vacuum pump. In addition, during the flow of exhaust gas along the first spiral blade 3033 and the second spiral blade 3034, reactants that can generate particulate matter such as dust in the exhaust gas can adhere to the spiral blades and react to generate dust, thereby reducing the amount of dust carried in the exhaust gas and enhancing the filtration and purification effect of the exhaust gas.

[0168] For example, the first housing 3031 and / or the second housing 3032 may be cylindrical or geometric in shape. For example, both the first housing 3031 and the second housing 3032 are cylindrical in shape, and their center lines coincide.

[0169] For example, the first air inlet 30322 and / or the first air outlet 30312 are circular, elliptical, geometric, or other irregular shapes.

[0170] For example, when the first housing 3031 is provided with a first air outlet 30312 and the second housing 3032 is provided with a first air inlet 30322, the end of the first housing 3031 away from the first air inlet 30322 has an opening, and the first capture chamber 30311 communicates with the second capture chamber 30321 through the opening. The opening is located at the end of the first housing 3031 away from the first air inlet 30322 to extend the flow path of the exhaust gas in the particulate filter 303 as much as possible, thereby improving the dust capture and filtration effect of the particulate filter 303.

[0171] For example, the opening and the first air inlet 30322 and the first air outlet 30312 are arranged vertically at intervals. The end of the first housing 3031 near the opening is suspended in the second capture chamber 30321. In other words, there is a gap between the end of the first housing 3031 near the opening and the bottom of the second capture chamber 30321, which can reserve enough collection space for dust, extend the cleaning cycle of the particle trap 303, and avoid the situation where dust blocks the opening due to insufficient space.

[0172] Exemplarily, the end of the first housing 3031 away from the first air inlet 30322 is not sealed, forming an open opening, which reduces manufacturing steps. Exemplarily, the end of the first housing 3031 away from the first air inlet 30322 is sealed, and the opening is located on the side wall of the first housing 3031. Exemplarily, multiple openings are provided, arranged along the centerline and / or circumferential direction of the first housing 3031, and exhaust gas flows through multiple openings. Exemplarily, the shape of the opening is circular, elliptical, geometric, or other irregular shape.

[0173] like Figure 11 , Figure 12 As shown, in some embodiments, the particulate trap 303 includes a first housing 3031 and a second housing 3032, with the first housing 3031 having a first air outlet 30312 and the second housing 3032 having a first air inlet 30322. The particulate trap 303 also includes a filter assembly 3037, which has a second air outlet 30371. The filter assembly 3037 and the first trapping chamber 30311 are connected through the first air outlet 30312.

[0174] The exhaust gas flowing out of the first spiral channel 3035 enters the filter assembly 3037 through the first outlet 30312 for further filtration, improving the filtration effect. Furthermore, by placing the filter assembly 3037 downstream of the first capture chamber 30311, and considering that the first spiral channel 3035 and the second spiral channel 3036 have pre-sedied most of the larger dust particles, the amount of dust in the exhaust gas flowing into the filter assembly 3037 is significantly reduced. This slows down the clogging rate of the filter assembly 3037, extends its replacement and maintenance cycle, and reduces its filtration pressure, allowing the filter assembly 3037 to more efficiently filter fine dust, thus balancing purification effect and operating costs.

[0175] For example, the filter assembly 3037 includes a third housing 30372 and a first filter element 30373. The third housing 30372 has a third capture chamber 30374 and a second air outlet 30371 communicating with the third capture chamber 30374. One end of the first housing 3031, away from the opening, extends out of the second capture chamber 30321 and is located within the third capture chamber 30374. The portion of the first housing 3031 located within the third capture chamber 30374 has a first air outlet 30312. The third capture chamber 30374 is connected to the first capture chamber 30311 through the first air outlet 30312. The first filter element 30373 is located within the third capture chamber 30374. The exhaust gas flowing out of the first spiral channel 3035 enters the third capture chamber 30374 through the first outlet 30312. The first filter element 30373 in the third capture chamber 30374 can further filter the exhaust gas, intercept the residual dust in the exhaust gas, further improve the overall purification effect of the particulate filter 303 on the exhaust gas, and reduce the particulate matter content in the final exhaust gas.

[0176] Exemplarily, the third housing 30372 can be cylindrical or geometrically shaped. Exemplarily, the second air outlet 30371 is located on the side of the third housing 30372 away from the first housing 3031. Exemplarily, the first filter element 30373 covers the second air outlet 30371, so that the exhaust gas flowing into the third capture chamber 30374 must first be filtered by the first filter element 30373 before flowing to the second air outlet 30371, thereby improving the filtration effect. Exemplarily, the second air outlet 30371 can be circular, elliptical, geometrically shaped, or other irregularly shaped.

[0177] For example, the shape of the first filter element 30373 matches the shape of the third housing 30372. For instance, if the third housing 30372 is cylindrical, then the shape of the first filter element 30373 is cylindrical.

[0178] like Figure 11 , Figure 12As shown, in some embodiments, the particulate trap 303 further includes a second drive mechanism 3038, which is connected to the first filter element 30373 for driving the first filter element 30373 to move within the third capture chamber 30374 to separate at least a portion of the dust on the first filter element 30373.

[0179] In the above embodiments, when it is necessary to clean the dust on the first filter element 30373, the second drive mechanism 3038 drives the first filter element 30373 to move in the third capture chamber 30374, thereby shaking off and separating the dust attached to the first filter element 30373. The cleaning and maintenance of the first filter element 30373 can be completed without disassembling the device, extending the service life of the first filter element 30373, further extending the continuous working time of the particulate trap 303, and reducing the frequency of manual cleaning.

[0180] It should be noted that the second drive mechanism 3038 is not activated when the particulate filter 303 is running, to ensure the normal operation of the particulate filter 303. The first filter element 30373 can only be cleaned and maintained via the second drive mechanism 3038 as needed when the particulate filter 303 is idle.

[0181] For example, the second drive mechanism 3038 can be a linear drive structure to make the particle catcher 303 move linearly back and forth.

[0182] like Figure 13 , Figure 14 As shown, in some embodiments, the particulate filter 303 includes a housing assembly 3030 and a plurality of filter element assemblies 3000. The housing assembly 3030 has a filter chamber 30301, and a second air inlet 30302 and an air outlet 30303 communicating with the filter chamber 30301. The second air inlet 30302 and the air outlet 30303 are spaced apart along a fourth direction X4, where the fourth direction X4 is the extending direction of the housing assembly 3030. The plurality of filter element assemblies 3000 are located within the filter chamber 30301 and are arranged sequentially along the fourth direction X4, with the first filter element assembly 3000 positioned near the second air inlet 30302 and the last filter element assembly 3000 positioned near the air outlet 30303. Exhaust gas flows into the filter chamber 30301 from the second air inlet 30302, flows sequentially through the plurality of filter element assemblies 3000, and then flows out from the air outlet 30303.

[0183] In the above embodiment, multiple filter element assemblies 3000 are arranged in the filter cavity 30301 of the housing assembly 3030. Exhaust gas flows into the filter cavity 30301 from the second air inlet 30302 and sequentially passes through the multiple filter element assemblies 3000 for multi-stage filtration. This allows dust in the exhaust gas to be captured within the filtration device as much as possible. The filtered exhaust gas then flows out from the air outlet 30303, improving the filtration effect, reducing the amount of dust carried in the exhaust gas, and protecting the vacuum pump located downstream of the filtration device. Furthermore, the multiple filter element assemblies 3000 are arranged along the fourth direction X4 (the extension direction of the housing assembly), resulting in a compact structure that does not occupy the direction intersecting with the fourth direction X4, thus reducing the overall size of the filtration device in the direction intersecting with the fourth direction X4.

[0184] For example, the fourth direction X4 is the vertical direction, the housing assembly 3030 extends in the vertical direction, and the multiple filter element assemblies 3000 are arranged in the vertical direction, which helps to reduce the overall size of the filter device in the horizontal direction.

[0185] For example, the second air inlet 30302 and / or air outlet 30303 are circular, elliptical, geometric, or other irregular shapes.

[0186] In some embodiments, the housing assembly 3030 includes a plurality of housings that are detachably connected in sequence along the fourth direction X4. The first housing is provided with a second air inlet 30302, and the last housing is provided with an air outlet. The plurality of housings enclose a filter cavity 30301, and a filter element assembly 3000 is provided in each housing.

[0187] In the above embodiments, the housing assembly 3030 is configured as a split structure comprising multiple housings, which facilitates the assembly of each filter element assembly 3000 one by one along the fourth direction X4, reducing assembly difficulty; it also makes it convenient to disassemble only the housing corresponding to the filter element assembly 3000 when it is necessary to maintain or replace a single filter element assembly 3000, without having to disassemble the entire filter device, thus improving the convenience of maintenance and replacement.

[0188] Exemplarily, the housing assembly 3030 includes two housings, each housing containing a filter assembly 3000. Exemplarily, the fourth direction X4 is a vertical direction, the housing assembly 3030 includes two housings, the lower housing (first housing) has a second air inlet 30302, and the upper housing (last housing) has an air outlet.

[0189] For example, multiple housings are connected sequentially along the fourth direction X4 via flange structures, facilitating disassembly and installation. For example, the housing shape can be cylindrical or geometric.

[0190] For example, the filter assembly 3000 includes at least one second filter element.

[0191] like Figure 18 As shown, in some embodiments, the furnace cavity 11 has multiple reaction chambers 111 for accommodating sheet N. The cross-section passivation system 100 also includes multiple discharge components 40, with at least one discharge component 40 disposed in each reaction chamber 111, the discharge component 40 being configured to ionize the process gas flowing into the cross-section of sheet N within the reaction chamber 111.

[0192] In the above embodiments, a plurality of reaction chambers 111 are provided inside the furnace body 1, and at least one discharge component 40 is provided in each reaction chamber 111. The sheet N is placed in the reaction chamber 111, and process gas is introduced into the reaction chamber 111. At least one discharge component 40 applies electric field energy to the process gas, causing it to ionize and generate plasma. The active groups in the plasma react chemically with the cross-section of the sheet N, thereby depositing a dense passivation film layer on the cross-section surface. This application significantly improves the coating reaction rate through plasma-enhanced chemical vapor deposition technology, thereby shortening the process time, increasing production capacity, and solving the problem that the slow coating rate of traditional atomic layer deposition technology restricts the overall production capacity. In addition, if the furnace body 1 has only one reaction chamber 111, the internal space of the reaction chamber 111 will be very large. Placing a discharge component 40 in a reaction chamber 111 with a large internal space will result in a large effective range of the discharge component 40, leading to uneven ionization of the process gas in the reaction chamber 111 by the discharge component 40. The furnace body 1 of this application has multiple reaction chambers 111, and at least one discharge component 40 is provided in each reaction chamber 111. This reduces the internal space of each reaction chamber 111, thereby reducing the effective range of the discharge component 40, which improves the ionization uniformity of the process gas throughout the furnace body 1 and avoids local insufficient ionization intensity. In addition, the arrangement of multiple reaction chambers 111 also helps to achieve uniform distribution of the process gas inside the furnace body 1.

[0193] like Figure 18 , Figure 22 , Figure 25 As shown, in some embodiments, when the cross-section passivation system 100 includes a plurality of discharge components 40, the sheet N has a first cross-section N1. The discharge component 40 includes a first discharge structure 401, which is disposed opposite to the first cross-section N1 when the reaction chamber 111 contains the sheet N.

[0194] In the above embodiments, the first discharge structure 401 can apply electric field energy to the process gas flowing towards the first cross-section N1, ensuring that the process gas on the first cross-section N1 side is fully ionized, ensuring that the plasma with sufficient intensity contacts and reacts with the first cross-section N1, thereby improving the passivation quality of the first cross-section N1.

[0195] like Figure 18 , Figure 22 , Figure 25 As shown, in some embodiments, when the cross-section passivation system 100 includes a plurality of discharge components 40, the sheet N has a second cross-section N2. The discharge component 40 also includes a second discharge structure 402, which is disposed opposite to the second cross-section N2 when the reaction chamber 111 contains the sheet N.

[0196] In the above embodiments, the second discharge structure 402 can further apply electric field energy to the process gas flowing towards the second cross-section N2, ensuring that the process gas on the second cross-section N2 side is fully ionized, ensuring that the plasma with sufficient intensity contacts and reacts with the second cross-section N2, and further improving the passivation quality of the second cross-section N2.

[0197] For example, if one of the first discharge structure 401 and the second discharge structure 402 is connected to the positive electrode of the power supply and the other is connected to the negative electrode of the power supply, an electric field can be formed between the first discharge structure 401 and the second discharge structure 402.

[0198] like Figure 18 , Figure 23 , Figure 25 As shown, in the case where the discharge assembly 40 includes a first discharge structure 401 and a second discharge structure 402, the discharge assembly 40 further includes a third discharge structure 403 located at the bottom of the sheet N. The first discharge structure 401 and the second discharge structure 402 are electrically connected to the first electrode of the first power supply, and the third discharge structure 403 is electrically connected to the second electrode of the first power supply. The polarities of the first and second electrodes are opposite, and the frequency of the first power supply is less than or equal to 40 kHz. Alternatively, one of the first discharge structure 401 and the second discharge structure 402 is electrically connected to the second power supply, and the other is grounded. The third discharge structure 403 is not energized, and the second power supply is an alternating power supply with a frequency greater than or equal to 13 MHz and less than or equal to 14 MHz. Alternatively, both the first discharge structure 401 and the second discharge structure 402 are grounded, and the third discharge structure 403 is electrically connected to the third power supply. The third power supply is an alternating power supply with a frequency greater than or equal to 13 MHz and less than or equal to 14 MHz.

[0199] In the above embodiments, the added third discharge structure 403, together with the first discharge structure 401 and the second discharge structure 402 mentioned above, constructs a three-dimensional discharge system. In order to enable the system to flexibly generate electric fields with different distributions to be compatible with the deposition processes of various passivation films such as alumina or amorphous silicon, this application provides at least three optional electrical connection schemes: When the first discharge structure 401 and the second discharge structure 402 are electrically connected to the first electrode of the first power supply, and the third discharge structure 403 is electrically connected to the second electrode of the first power supply, this is a low-frequency discharge ionization scheme. The first discharge structure 401, the second discharge structure 402 and the third discharge structure 403 form a low-frequency, relatively uniform electric field, which can accelerate the coating rate to a certain extent while reducing the ionization damage to the sheet N. When one of the first discharge structure 401 and the second discharge structure 402 is electrically connected to the second power supply, and the other is grounded, with the third discharge structure 403 not energized and the second power supply being an alternating power supply, a high-frequency, alternating electric field can be formed between the first discharge structure 401 and the second discharge structure 402. This can greatly improve the ionization effect on the process gas and accelerate the coating rate, making it particularly suitable for scenarios where only the first section N1 of the sheet N needs to be passivated. When both the first discharge structure 401 and the second discharge structure 402 are grounded, and the third discharge structure 403 is electrically connected to the third power supply, which is an alternating power supply, a high-frequency, relatively uniform electric field can be formed among the first discharge structure 401, the second discharge structure 402, and the third discharge structure 403. This can greatly improve the ionization effect on both sides of the sheet N and accelerate the coating rate on both sides of the sheet N200. This is particularly suitable for scenarios where the first section N1 and the second section N2 of the sheet N need to be passivated simultaneously. However, this scheme is prone to causing some ionization damage to the sheet N. The above solution allows for flexible control of the electric field distribution, enabling the equipment to be compatible with various passivation film processes and expanding its application range.

[0200] For example, the frequency of the first power supply can be 10kHz, 20kHz, 30kHz or 40kHz, and can be designed according to specific needs. This application embodiment does not limit the frequency.

[0201] For example, the frequency of the second power supply can be 13MHz, 13.16MHz, 13.26MHz, 13.36MHz, 13.46MHz, 13.56MHz, 13.66MHz, 13.76MHz, 13.86MHz, 13.96MHz or 14MHz, and can be designed according to specific needs. This application embodiment does not limit the frequency.

[0202] For example, the frequency of the third power supply can be 13MHz, 13.16MHz, 13.26MHz, 13.36MHz, 13.46MHz, 13.56MHz, 13.66MHz, 13.76MHz, 13.86MHz, 13.96MHz or 14MHz, and can be designed according to specific needs. This application embodiment does not limit the frequency.

[0203] For example, the frequency of the first power supply is 40 kHz, the frequency of the second power supply is 13.56 MHz, and the frequency of the third power supply is 13.56 MHz.

[0204] like Figure 18 , Figure 23 , Figure 25 As shown, in some embodiments, multiple sheets N are stacked in a material box 2. The material box 2 has a first coating opening and a second coating opening. The first cross-section N1 of the multiple stacked sheets N is arranged opposite to the first coating opening, and the second cross-section N2 of the multiple stacked sheets N is arranged opposite to the second coating opening. When the reaction chamber 111 contains sheets N, the third discharge structure 403 is located at the bottom of the material box 2. The material box 2 is made of conductive material.

[0205] In the above embodiments, the material box 2 is made of conductive material, that is, the material box 2 is conductive, while the sheet N is usually a conductor or semiconductor material, which also usually has conductive properties. Therefore, when the third discharge structure 403 is energized, the material box 2, the sheet N and the third discharge structure 403 can form a discharge whole. Compared with the solution where only the third discharge structure 403 can discharge, this application significantly increases the discharge range and enhances the ionization intensity of the process gas.

[0206] like Figure 18 , Figure 24 , Figure 25 As shown, in some embodiments, the discharge assembly 40 includes a first discharge structure 401 and a second discharge structure 402. The discharge assembly 40 also includes a third discharge structure 403 located between the first discharge structure 401 and the second discharge structure 402. The first discharge structure 401, the third discharge structure 403, and the second discharge structure 402 are sequentially spaced apart along a third direction X3. When the reaction chamber 111 contains a sheet N, the sheet N is located between the first discharge structure 401 and the third discharge structure 403, and / or between the third discharge structure 403 and the second discharge structure 402.

[0207] Process gas is introduced into furnace chamber 11. Sufficient electric field energy is applied to the process gas using the first discharge structure 401, the second discharge structure 402, and the third discharge structure 403 to fully ionize the process gas, thereby generating sufficient plasma. The active groups in the plasma can then undergo a rapid and sufficient chemical reaction with the cross-section of sheet N, significantly improving the coating reaction rate, shortening the process time, and helping to increase production capacity. This solves the problem that the slow coating rate of traditional atomic layer deposition technology restricts the overall production capacity.

[0208] In some embodiments, when the third discharge structure 403 is located between the first discharge structure 401 and the second discharge structure 402, and a sheet N is provided between the first discharge structure 401 and the third discharge structure 403, a gap exists between the sheet N and the first discharge structure 401 and / or the third discharge structure 403. And / or, when the third discharge structure 403 is located between the first discharge structure 401 and the second discharge structure 402, and a sheet N is provided between the third discharge structure 403 and the second discharge structure 402, a gap exists between the sheet N and the third discharge structure 403 and / or the second discharge structure 402.

[0209] In the above embodiments, there is a gap between the sheet N of this application and at least one of the first discharge structure 401, the second discharge structure 402 and the third discharge structure 403, which can reduce the ionization damage to the sheet N and reduce the damage to the sheet N while increasing the coating rate.

[0210] For example, a sheet N is provided between the first discharge structure 401 and the third discharge structure 403, and there is a gap between the first discharge structure 401 and the sheet N, and / or between the third discharge structure 403 and the sheet N. For example, a sheet N is provided between the second discharge structure 402 and the third discharge structure 403, and there is a gap between the second discharge structure 402 and the sheet N, and / or between the third discharge structure 403 and the sheet N. For example, a sheet N is provided between the first discharge structure 401 and the third discharge structure 403, and between the third discharge structure 403 and the second discharge structure 402, and there are gaps between the first discharge structure 401 and the sheet N, between the third discharge structure 403 and the sheet N, and between the second discharge structure 402 and the sheet N.

[0211] For example, when a sheet N is provided between the first discharge structure 401 and the third discharge structure 403, the first cross-section N1 and the second cross-section N2 of the sheet N are respectively disposed opposite to the first discharge structure 401 and the third discharge structure 403. For example, when a sheet N is provided between the third discharge structure 403 and the second discharge structure 402, the first cross-section N1 and the second cross-section N2 of the sheet N are respectively disposed opposite to the third discharge structure 403 and the second discharge structure 402. For example, a sheet N is provided between both the first discharge structure 401 and the third discharge structure 403 and between the third discharge structure 403 and the second discharge structure 402. The first cross-section N1 and the second cross-section N2 of the sheet N located between the first discharge structure 401 and the third discharge structure 403 are respectively disposed opposite to the first discharge structure 401 and the third discharge structure 403, and the first cross-section N1 and the second cross-section N2 of the sheet N located between the third discharge structure 403 and the second discharge structure 402 are respectively disposed opposite to the third discharge structure 403 and the second discharge structure 402.

[0212] like Figure 2 , Figures 18 to 21 As shown, in some embodiments, when the furnace cavity 11 has multiple reaction chambers 111, the cross-section passivation system 100 further includes multiple first heating elements 50 located in the furnace cavity 11 and spaced apart along the fifth direction X5. The interval between two adjacent first heating elements 50 forms a reaction chamber 111. When the reaction chamber 111 contains a sheet N, at least one of two adjacent first heating elements 50 is arranged opposite to the cross-section of the sheet N.

[0213] In related technologies, the stability and consistency of ALD passivation of silicon wafer cross-sections remain poor. The inventors have found that in atomic layer deposition (ALD), many related technologies employ overall heating of the cavity supporting the silicon wafer, resulting in insufficient temperature control precision of the silicon wafer cross-section, thus affecting the process stability and consistency of the silicon wafer. Therefore, in this embodiment, at least one of two adjacent first heating elements 50 is positioned opposite the cross-section of the wafer N, achieving directional radiative heating of the cross-section of the wafer N. This solves the energy waste and inaccurate temperature control of the cross-section caused by overall heating of the furnace cavity 11 in traditional methods, thereby improving the temperature response speed and control precision of the cross-section, providing a stable thermal environment for subsequent atomic layer deposition and other processes, and ensuring the consistency of the reaction across each cross-section. Furthermore, multiple reaction chambers 111 can be formed by arranging multiple first heating elements 50 at intervals along the fifth direction X5, eliminating the need for a partition structure to divide the furnace cavity 11 within the furnace body 1, thus simplifying the overall structure.

[0214] For example, the fifth direction X5 is consistent with the width direction of the furnace body 1. For example, in each reaction chamber 111, a material box 2 can be provided along the width direction of the furnace body 1, multiple material boxes 2 are arranged along the length direction of the furnace body 1, and two material boxes 2 are stacked along the height direction of the furnace body 1.

[0215] For example, the third discharge structure 403 is located at the bottom of the sheet N, and two adjacent first heating elements 50 are respectively disposed opposite to the first cross-section N1 and the second cross-section N2 of the sheet N. For example, the third discharge structure 403 is located between the first discharge structure 401 and the second discharge structure 402, between the first discharge structure 401 and the third discharge structure 403, or a sheet N is disposed between the third discharge structure 403 and the second discharge structure 402, and one of the two adjacent first heating elements 50 is disposed opposite to the cross-section of the sheet N. For example, the third discharge structure 403 is located between the first discharge structure 401 and the second discharge structure 402, between the first discharge structure 401 and the third discharge structure 403, and a sheet N is disposed between both the third discharge structure 403 and the second discharge structure 402, and two adjacent first heating elements 50 are respectively disposed opposite to the first cross-section N1 and the second cross-section N2 of the sheet N.

[0216] In some embodiments, the power of at least one first heating element 50 corresponding to the reaction chamber 111 is configured to be adjustable. Setting the power of at least one first heating element 50 corresponding to the reaction chamber 111 to be adjustable allows each reaction chamber 111 to independently control its temperature. When the temperatures of multiple reaction chambers 111 become uneven, the power of at least one first heating element 50 corresponding to the respective reaction chamber 111 is adjusted, thereby adjusting the temperature of the respective reaction chamber 111 to be more consistent with the overall temperature. This helps improve the overall temperature uniformity within the furnace body 1 and avoids problems such as excessively high or low local temperatures leading to uneven coating.

[0217] For example, the power of the two first heating elements 50 corresponding to the reaction chamber 111 is configured to be adjustable to improve the temperature regulation rate.

[0218] like Figure 2 , Figures 18 to 21 As shown, in some embodiments, when the cross-section passivation system 100 includes a plurality of first heating elements 50, the cross-section passivation system 100 also includes a second heating element 80 located in the furnace cavity 11 and disposed at the bottom of the first heating elements 50, and the second heating element 80 is insulated from the discharge assembly 40.

[0219] In the above embodiments, by adding a second heating element 80 to heat the bottom of sheet N, the heat source coverage on one side of the bottom of sheet N is completed, achieving synchronous heating of sheet N in multiple directions, increasing the temperature rise rate, and avoiding the decrease in passivation quality caused by insufficient temperature on the bottom side of the cross-sections (first cross-section N1, second cross-section N2) of sheet N, thereby improving the efficiency and temperature consistency of the overall passivation process. In addition, the second heating element 80 and the discharge assembly 40 are insulated, which can prevent the second heating element 80 from conducting electricity, improve the safety of the entire device, and ensure the discharge performance of the discharge assembly 40.

[0220] Exemplarily, one of two adjacent first heating elements 50 is insulated from the first discharge structure 401, and the other is insulated from the second discharge structure 402. A gap exists between the first heating element 50 and the third discharge structure 403, achieving insulation between the first heating element 50 and the discharge assembly 40. Exemplarily, an insulating plate 600 is provided between the first heating element 50 and the first discharge structure 401, and / or, an insulating plate 600 is provided between the first heating element 50 and the second discharge structure 402, thereby achieving an insulated connection. Exemplarily, insulating plates 600 are provided between the first heating element 50 and the first discharge structure 401, and also between the first heating element 50 and the second discharge structure 402.

[0221] For example, gaps exist between the first discharge structure 401 and the second heating element 80, as well as between the second discharge structure 402 and the second heating element 80. The third discharge structure 403 is insulated from the second heating element 80, thereby achieving insulation between the second heating element 80 and the discharge assembly 40. For example, an insulating plate 600 is provided between the third discharge structure 403 and the second heating element 80.

[0222] For example, an insulating plate 600 may not be provided between the first heating element 50 and the first discharge structure 401, and / or between the first heating element 50 and the second discharge structure 402, and / or between the second heating element 80 and the third discharge structure 403, but an insulating coating may be provided to achieve an insulating connection.

[0223] For example, the bottoms of the second heating element 80 and the plurality of first heating elements 50 are all sealed together. The second heating element 80 is provided with a plurality of second vent holes 81, which are spaced at least along the fifth direction X5. The reaction chamber 111 is connected to at least one vent hole. This constrains the flow path of the process gas in the reaction chamber 111, allowing the process gas in the reaction chamber 111 to be exhausted through the plurality of second vent holes 81.

[0224] like Figure 2 , Figures 18 to 21As shown, in some embodiments, the cross-section passivation system 100 further includes a gas equalization component 70 located inside the furnace cavity 11 and disposed on top of a plurality of first heating elements 50. The gas equalization component 70 has a plurality of gas equalization holes 721, which are spaced apart at least along the fifth direction X5. Each reaction chamber 111 is connected to at least one gas equalization hole 721. The direction from the top of the first heating element 50 to the bottom intersects with the fifth direction X5.

[0225] In the above embodiment, a gas equalization component 70 is further provided, which can evenly distribute the incoming process gas into each reaction chamber 111 through multiple gas equalization holes 721, ensuring that the gas concentration distribution in each reaction chamber 111 is consistent, which helps to improve the uniformity of the N coating thickness on the sheet.

[0226] For example, the gas equalization assembly 70 includes an air inlet plate 71 and a flow equalization plate 72. The air inlet plate 71 has an air inlet hole 711. The flow equalization plate 72 and the air inlet plate 71 are connected on the side near the first heating element 50. The flow equalization plate 72 is provided with a plurality of gas equalization holes 721. The flow equalization plate 72 and the air inlet plate 71 enclose a gas equalization cavity 73. The air inlet hole 711 communicates with the plurality of gas equalization holes 721 through the gas equalization cavity 73. The process gas flows into the gas equalization cavity 73 from the air inlet hole 711 for uniform mixing. After being uniformly mixed again, the process gas flows from the plurality of gas equalization holes 721 to the plurality of reaction chambers 111 respectively, thereby ensuring the uniformity of gas distribution in each reaction chamber 111.

[0227] like Figure 1 , Figures 18 to 20 As shown, in some embodiments, the cross-section passivation system 100 further includes a third heating element 200 and a fourth heating element 300. The third heating element 200 and the fourth heating element 300 are arranged at intervals along the sixth direction X6, which intersects with the fifth direction X5. The third heating element 200 can abut against the first side of a plurality of first heating elements 50, and the fourth heating element 300 can abut against the second side of a plurality of first heating elements 50. The plurality of first heating elements 50, the second heating element 80, the third heating element 200, the fourth heating element 300, and the flow equalization plate 72 enclose a plurality of reaction chambers 111.

[0228] For example, the sixth direction X6 is perpendicular to the fifth direction X5. For example, the fifth direction X5 is the width direction of the furnace body 1, and the sixth direction X6 is the length direction of the furnace body 1.

[0229] like Figure 15 , Figure 21As shown, exemplarily, the cross-section passivation system 100 also includes a first furnace door 400, which is movably connected to the furnace body 1. The first furnace door 400 is used to close or open the feed inlet 12, and a third heating element 200 is connected to the first furnace door 400. When the first furnace door 400 closes the feed inlet 12, the third heating element 200 and the first sides of the plurality of first heating elements 50 abut against each other to seal the side of the reaction chamber 111 near the feed inlet 12, preventing process gases from leaking from the side of the reaction chamber 111 near the feed inlet 12 during the reaction. When the first furnace door 400 opens the feed inlet 12, the third heating element 200 and the first sides of the plurality of first heating elements 50 separate, so that the sheet N can be placed from the feed inlet 12 into the plurality of reaction chambers 111 for feeding.

[0230] like Figure 15 , Figure 21 As shown, exemplarily, the cross-section passivation system 100 also includes a second furnace door 500, which is movably connected to the furnace body 1. The second furnace door 500 is used to cover or open the discharge port 13, and the fourth heater 300 is connected to the second furnace door 500. When the second furnace door 500 covers the discharge port 13, the second sides of the fourth heater 300 and the plurality of first heating elements 50 abut against each other to seal the side of the reaction chamber 111 near the discharge port 13, preventing process gases from leaking from the side of the reaction chamber 111 near the discharge port 13 during the reaction. When the second furnace door 500 opens the discharge port 13, the second sides of the fourth heater 300 and the plurality of first heating elements 50 separate, so that the reacted sheet N can be removed from the reaction chamber 111, realizing material discharge.

[0231] For example, the bottom of the furnace body 1 is provided with an exhaust port 14 communicating with the furnace cavity 11. The first exhaust hole 901 is connected to the exhaust port 14, and the process gas after the reaction flows through the first exhaust hole 901 to the exhaust port 14 at the bottom to achieve exhaust. For example, the exhaust port 14 is connected to the air extraction device 30.

[0232] For example, the side walls of the first furnace door 400, the second furnace door 500, and the furnace body 1 are all provided with reinforcing ribs to enhance the overall structural strength of the furnace body 1, the first furnace door 400, and the second furnace door 500. For example, the side walls of the first furnace door 400, the second furnace door 500, and the furnace body 1 are all provided with heat dissipation pipes to enhance the overall heat dissipation performance of the furnace body 1, the first furnace door 400, and the second furnace door 500. For example, the heat dissipation pipes are water-cooled pipes.

[0233] like Figure 15 , Figure 16 , Figure 18As shown, in some embodiments, when there are multiple reaction chambers 111 in the furnace cavity 11, the cross-section passivation system 100 further includes a gas balancing device 60, which is connected to the furnace body 1 and communicates with the furnace cavity 11. The gas balancing device 60 can fill the furnace cavity 11 with inert gas so that the gas pressure in the furnace cavity 11 is greater than or equal to the gas pressure in the reaction chamber 111, thereby inhibiting the process gas in the reaction chamber 111 from flowing into the furnace cavity 11.

[0234] In the above embodiments, during the passivation process of sheet N, the furnace chamber 11 is connected to the gas balancing device 60. The gas balancing device 60 fills the furnace chamber 11 with inert gas so that the gas pressure in the furnace chamber 11 is greater than or equal to the gas pressure in the reaction chamber 111. This effectively suppresses the leakage of process gas from the reaction chamber 111 into the furnace chamber 11, preventing contamination caused by process gas leakage. Furthermore, the greater or equal pressure in the furnace chamber 11 effectively suppresses the leakage of process gas from the reaction chamber 111 into the furnace chamber 11, preventing uneven gas distribution in the reaction chamber 111 due to leakage in local areas. This improves the uniformity of process gas distribution in the reaction chamber 111, thereby enhancing the film formation uniformity of the target sheet N. In addition, after the reaction, filling the furnace chamber 11 with a large amount of inert gas through the gas balancing device 60 can accelerate the vacuum breaking process (the equipment needs to be evacuated before the reaction), reducing waiting time.

[0235] For example, the inert gas can be at least one of argon and nitrogen.

[0236] like Figures 15 to 17 As shown, in some embodiments, the cross-section passivation system 100 further includes a gas equalization pipe 90, which is disposed in the furnace cavity 11, surrounds the outside of the reaction cavity 111, and is connected to the gas balance device 60. The gas equalization pipe 90 is provided with a plurality of first gas outlet holes 901 along its own extension direction.

[0237] In the above embodiment, when pressurization is required in the furnace cavity 11, the gas balancing device 60 is activated, and the inert gas inside flows along the gas equalization pipe 90 and enters the furnace cavity 11 through multiple gas equalization holes 721, thereby achieving pressurization. Multi-directional gas output can be achieved by adjusting the positions of the multiple first gas outlet holes 901, and the multiple first gas outlet holes 901 enable rapid diffusion of the inert gas within the furnace cavity 11, increasing the pressurization rate within the furnace cavity 11.

[0238] For example, when the cross-sectional passivation system 100 includes a gas distribution pipe 90, the spacing between the first outlets 901 gradually decreases along the flow direction of the inert gas within the gas distribution pipe 90. As the inert gas enters the gas distribution pipe 90 and flows along its extension direction, the gas pressure gradually decreases due to flow resistance. Therefore, to prevent the gas flow rate of the first outlet 901 located at the end of the gas distribution pipe 90's extension direction from becoming too low, the spacing between adjacent first outlets 901 is gradually reduced along the gas flow direction to compensate for the pressure drop, thereby improving the uniformity of gas distribution throughout the furnace cavity 11.

[0239] For example, when the cross-sectional passivation system 100 includes a gas distribution pipe 90, the diameter of the first vent 901 gradually increases along the flow direction of the inert gas within the gas distribution pipe 90. By setting the diameter of the first vent 901 to gradually increase along the flow direction of the inert gas, the reduction in gas flow rate caused by the pressure drop due to resistance along the flow direction of the inert gas can be offset. This ensures that the inert gas flow rate output from the first vent 901 at different locations remains relatively consistent, making the gas pressure distribution within the entire furnace cavity 11 more uniform. This reduces the problem of process gas flow deviation caused by pressure differences in different areas of the furnace, ensures the stable operation of the coating process, and improves the yield of the coated product.

[0240] To facilitate understanding of the cross-section passivation system 100 of the embodiments of this application, the following description is provided: Figure 2 To be continued Figure 25 The operation process is described as follows: The loading platform 9 transports the material box 2 to the work area. The handling robot 32, located near the feed inlet 12, moves the material box 2 to the scanning component for scanning to determine the material box 2's online time. Then, the scanned material box 2 is placed at the loading station. The loading component 10 stacks the sheet N to be processed and places it into the material box 2. The handling robot 32, located near the feed inlet 12, moves the material box 2, which is full of sheet N, onto the carrying paddle 311 of the fork arm assembly 31, located near the feed inlet 12. When the fork arm assembly 31 and / or the loading station are full of material boxes 2, the material box 2 can be temporarily placed on the buffer platform 6, located near the feed inlet 12.

[0241] The first drive mechanism 312 of the fork arm assembly 31 drives the carrier paddle 311 to move, so that the carrier paddle 311 extends into the furnace chamber 11 through the feed port 12, thereby driving multiple material boxes 2 to be placed in the furnace chamber 11. Then, the first drive mechanism 312 is controlled to drive the carrier paddle 311 to move, so that the carrier paddle 311 exits the furnace chamber 11 and closes the feed port 12 through the first furnace door 400.

[0242] The vacuum pump 30 evacuates the furnace cavity 11. The first heating element 50, the second heating element 80, the third heating element 200, and the fourth heating element 300 heat the furnace cavity 11. Once the vacuum level and temperature within the furnace cavity 11 meet the process requirements, process gas is introduced into the furnace cavity 11. The process gas flows into the gas equalization chamber 73 through the inlet 711 for uniform mixing, and then flows again through multiple gas equalization holes 721 into multiple reaction chambers 111. Simultaneously, the gas balancing device 60 introduces inert gas into the furnace cavity 11 to ensure that the gas pressure within the furnace cavity 11 is greater than or equal to the gas pressure within the reaction chambers 111, thereby effectively suppressing the leakage of process gas from the reaction chambers 111 into the furnace cavity 11 and preventing contamination. The discharge assembly 40 ionizes the process gas within the reaction chambers 111, and the ionized process gas is deposited on the cross-section of sheet N to form a coating. The process gas after the reaction forms tail gas, which flows into the furnace chamber 11 from multiple second exhaust holes 81, and flows sequentially through the exhaust port 14 and the extraction pipe 301 into the particle trap 303 for filtration and purification. The filtered tail gas flows to the extraction pump 302.

[0243] After the reaction is complete, the discharge port 13 is opened through the second furnace door 500. The fork arm assembly 31 on the side near the discharge port 13 extends into the furnace chamber 11 to remove the processed material box 2. Multiple cooling components 5 cool the processed material box 2. When the temperature is detected to be lower than the preset value, the cooling components 5 are turned off. The handling robot 32 on the side near the discharge port 13 moves the processed material box 2 on the fork arm assembly 31 on the side near the discharge port 13 to the unloading station. After the unloading station is full of material boxes 2, the remaining material boxes 2 can be temporarily stored on the buffer platform 6 on the side near the discharge port 13. The unloading component 20 removes the processed sheet N from the material box 2. The handling robot 32 on the side near the discharge port 13 places the unloaded material box 2 on the transfer component 4. The transfer component 4 transfers the unloaded material box 2 to the feed port 12 to achieve cyclic feeding. Meanwhile, the handling robot 32, located near the discharge port 13, places the material box 2 that needs maintenance or replacement on the unloading platform 8 and transports it out.

[0244] It should be noted that the above description should not be construed as a limitation on the scope of protection of this application. In the absence of contradictions, the above work process can be rearranged as needed.

[0245] In the embodiments of this application, unless otherwise specified, the connection can be a detachable connection using bolts, nuts, screws, clips, magnets, etc. In some connections where there is no particular requirement for a detachable fit, a non-detachable connection can be achieved through welding, bonding, etc.

[0246] The terms "an embodiment" or "embodiment" used in this specification indicate that the described embodiment may include a specific feature, structure, or characteristic, but not every embodiment necessarily includes that specific feature, structure, or characteristic. Furthermore, such phrases do not necessarily refer to the same embodiment. Additionally, when a specific feature, structure, or characteristic is described in connection with an embodiment, implementing such a feature, structure, or characteristic in conjunction with other embodiments, whether explicitly described or not, is within the knowledge scope of those skilled in the art.

[0247] It should be understood that the terms “on,” “above,” and “on top of” in this application should be interpreted in the broadest possible way, such that “on” means not only “directly on something” but also “on something” with an intermediate feature or layer therebetween, and that “above” or “on top of” means not only “on top of something” but also “on top of something” without an intermediate feature or layer therebetween (i.e., directly on something).

[0248] Furthermore, for ease of explanation, spatial relative terms such as "below," "below," "under," "above," and "above" may be used to describe the relationship of a component or feature relative to other components or features as shown in the figures. Spatial relative terms are intended to encompass different orientations of components in use or operation other than those shown in the figures. Devices may have other orientations (rotated 90 degrees or in other orientations), and the spatial relative descriptive terms used herein may be interpreted accordingly.

[0249] It should be noted that, in this document, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus. Unless otherwise specified, an element defined by the phrase "comprising one..." does not exclude the presence of other identical elements in the process, method, article, or apparatus that includes said element.

[0250] The above description is merely a preferred embodiment of this application and is not intended to limit this application. Any modifications or equivalent substitutions made within the spirit and principles of this application should be included within the protection scope of this application.

Claims

1. A cross-sectional passivation system, characterized in that, A passivation system for passivating the cross-section of a sheet material includes: The furnace body has a furnace cavity and a feed inlet and a discharge outlet communicating with the furnace cavity; A material box having a material cavity and a coating opening communicating with the material cavity, the material cavity being used to receive the sheet, wherein, when the material cavity receives the sheet, the coating opening and the cross-section of the sheet are correspondingly arranged so that the coating opening exposes the cross-section of the sheet; Multiple transport components are provided, with at least one transport component on the side near the feed inlet and the side near the discharge outlet. The transport component on the side near the feed inlet is at least used to transport the material box containing the unprocessed sheet from the feed inlet into the furnace cavity, and the transport component on the side near the discharge outlet is at least used to remove the processed material box from the furnace cavity from the discharge outlet.

2. The cross-section passivation system according to claim 1, characterized in that, Also includes: A transfer component, disposed adjacent to the furnace body, is used to transfer the material box after unloading from the discharge port side to the inlet side; And / or, The transport component includes: The fork arm assembly, the fork arm assembly near the feed port, is used to convey a plurality of the material boxes carrying the unprocessed sheet from the feed port into the furnace cavity, and the fork arm assembly near the discharge port is used to remove the processed material boxes from the furnace cavity from the discharge port. The transport robot, located near the feed inlet, is at least used to transport the cassette containing the unprocessed sheet to the fork arm assembly located near the feed inlet, and the transport robot located near the discharge outlet is at least used to remove the cassette from the fork arm assembly located near the discharge outlet.

3. The cross-section passivation system according to claim 2, characterized in that, When the transport assembly includes the forklift assembly, the forklift assembly includes: The carrier paddle can be inserted and mated with the material box; The first drive mechanism is connected to the carrier paddle and can drive the carrier paddle to move so that the carrier paddle extends into and exits the furnace cavity; And / or, When the transport component includes the handling robot, the handling robot includes: Base; The robot body is connected to the base; A gripper assembly is connected to the end of the robot body away from the base, and the gripper assembly is used to grip the material box; And / or, In the case where the transport assembly includes the forklift assembly, the section passivation system further includes: Multiple cooling components are arranged around the fork arm assembly near the discharge port side for cooling the sheet material in the hopper on the fork arm assembly near the discharge port side.

4. The cross-section passivation system according to claim 2, characterized in that, In the case where the transport component includes the handling robot, the section passivation system further includes: Multiple buffer platforms are provided, at least one of the buffer platforms is located near the material inlet side of the transport robot, and at least one of the buffer platforms is located near the material outlet side of the transport robot. The buffer platforms are used to temporarily store the material boxes. And / or, When the cross-section passivation system includes the transmission component, the cross-section passivation system further includes: A scanning component is disposed adjacent to the transmission component and located on the side of the transmission component closer to the feed inlet, and is used at least to scan the information code on the material box transmitted by the transmission component; And / or, When the cross-section passivation system includes the transmission component, the cross-section passivation system further includes: The unloading platform is arranged adjacent to the transmission component and is located on the side of the transmission component closer to the discharge port. The handling robot on the side closer to the discharge port can place at least a portion of the unloaded material box on the unloading platform. And / or, In the case where the transport component includes the handling robot, the section passivation system further includes: The loading platform is arranged adjacent to the handling robot on the side near the feed inlet. The handling robot on the side near the feed inlet can carry the material box off the loading platform.

5. The cross-section passivation system according to claim 4, characterized in that, In the case where the cross-section passivation system includes the feeding platform, the cross-section passivation system further includes: a feeding assembly, which is arranged adjacent to the feeding platform, the handling robot near the feeding port, and the fork arm assembly near the feeding port. The feeding assembly is used to place the unprocessed sheet near the feeding port into the material box transported by the handling robot near the feeding port. And / or, When the cross-section passivation system includes the unloading platform, the cross-section passivation system further includes an unloading assembly, which is disposed adjacent to the unloading platform, the handling robot near the discharge port, and the fork arm assembly near the discharge port. The unloading assembly is used to remove the sheet material from the material box that is handled by the handling robot near the discharge port.

6. The cross-section passivation system according to claim 5, characterized in that, In the case where the cross-section passivation system includes the fork arm assembly, the feeding assembly and the unloading assembly, the feeding assembly, the fork arm assembly near the feed inlet, the furnace body, the fork arm assembly near the discharge outlet and the unloading assembly are arranged sequentially along the first direction; And / or, In the case where the cross-section passivation system includes the handling robot, the loading component, the unloading component, and the buffer platform, the loading component, the handling robot near the feed inlet, the buffer platform near the feed inlet, the furnace body, the buffer platform near the discharge outlet, the handling robot near the discharge outlet, and the unloading component are arranged sequentially along the first direction. And / or, In the case where the cross-section passivation system includes the transmission component, the feeding component, the unloading component, the feeding platform, the unloading platform, and the scanning component, the feeding component, the feeding platform, the scanning component, the transmission component, the unloading platform, and the unloading component are arranged sequentially along the first direction.

7. The cross-section passivation system according to any one of claims 4 to 6, characterized in that, In the case where the cross-section passivation system includes the fork arm assembly, the buffer platform, and the scanning assembly, the fork arm assembly, the buffer platform, and the scanning assembly are arranged sequentially along the second direction on the side closer to the feed inlet; And / or, In the case where the cross-section passivation system includes the fork arm assembly, the buffer platform, and the transmission assembly, the fork arm assembly, the buffer platform, and the transmission assembly are arranged sequentially along the second direction on the side closer to the feed inlet. And / or, In the case where the cross-section passivation system includes the fork arm assembly, the buffer platform, and the transmission assembly, the fork arm assembly, the buffer platform, and the transmission assembly are arranged sequentially along the second direction on the side closer to the discharge port. And / or, In the case where the cross-section passivation system includes the fork arm assembly, the handling robot, and the loading platform, the fork arm assembly, the handling robot, and the loading platform are arranged sequentially along the second direction, with the fork arm assembly near the feed inlet side being the same as the feed inlet side being the same as the feed inlet side. And / or, In the case where the cross-section passivation system includes the fork arm assembly, the handling robot, and the unloading platform, the fork arm assembly, the handling robot, and the unloading platform are arranged sequentially along the second direction, with the fork arm assembly near the discharge port side being the same as the discharge port side.

8. The cross-section passivation system according to any one of claims 3 to 6, characterized in that, When the fork arm assembly includes the first drive mechanism, the first drive mechanism includes: The lateral movement mechanism is connected to the carrier paddle drive and is used to drive the carrier paddle to move laterally; The lifting mechanism is connected to the lateral moving mechanism and is used to drive the lateral moving mechanism to lift. And / or, In the case where the handling robot includes the gripper assembly, the handling robot further includes: A positioning component is disposed on the gripper assembly and is used to obtain the position information of the material box.

9. The cross-section passivation system according to any one of claims 3 to 6, characterized in that, In the case where the fork arm assembly includes the load-bearing paddle, the sheet has a first cross-section, and the material box includes: The box body has at least one of the material chambers and at least one of the coating openings. The box body also has a carrying space and a clearance opening communicating with the carrying space. The carrying paddle can be inserted into the carrying space through the clearance opening.

10. The cross-section passivation system according to claim 9, characterized in that, The number of material cavities is two, and the number of coating openings is two. The two coating openings are respectively connected to the two material cavities in a one-to-one correspondence. The coating openings are located on the side of the corresponding material cavity away from the bearing space; wherein, the bearing space is located between the two material cavities. And / or, The bottom side of the carrying space away from the box body has a positioning groove, which is configured to engage with the carrying paddle. And / or, The top of the box has a first limiting part, and the bottom of the box has a second limiting part. When at least two of the boxes are stacked, in two adjacent stacked boxes, the first limiting part of the lower box and the second limiting part of the upper box are inserted into each other. And / or, The housing includes: The box body has a mounting groove in the side wall of the box body; The lid is detachably connected to the box body; The material box also includes: A clamping mechanism is disposed within the mounting groove and extends partially to the outside of the mounting groove. When the material cavity contains multiple stacked sheets, the portion of the clamping mechanism located outside the mounting groove can abut against the side of the box cover away from the box body, so that the box cover clamps the multiple stacked sheets.

11. The cross-section passivation system according to claim 10, characterized in that, When there are two material cavities and two coating openings, the two material cavities have equal volumes and are symmetrically arranged on both sides of the bearing space. And / or, When the bearing space is located between the two material cavities, the sheet also has a second cross-section opposite to the first cross-section, and when the sheet is accommodated in the material cavity, the second cross-section of the sheet faces the bearing space; The top of the box has a gas inlet, which is connected to the carrying space. Some process gas can flow into the carrying space from the gas inlet and flow out of the carrying space from the clearance opening.

12. The cross-section passivation system according to any one of claims 1 to 6, characterized in that, Also includes: An extraction device is connected to the furnace body and communicates with the furnace cavity, and is configured to evacuate the furnace cavity. And / or, The furnace cavity has multiple reaction chambers, which are used to accommodate the sheet material. The cross-sectional passivation system further includes: Multiple discharge components are provided, with at least one discharge component disposed in each of the reaction chambers, the discharge components being configured to ionize the process gas flowing into the cross section of the sheet within the reaction chamber.

13. The cross-section passivation system according to claim 12, characterized in that, When the cross-section passivation system includes a plurality of the discharge components, the sheet has a first cross-section, and the discharge component includes: a first discharge structure, wherein when the reaction chamber contains the sheet, the first discharge structure and the first cross-section are disposed opposite to each other; And / or, When the cross-section passivation system includes a plurality of the discharge components, the sheet has a second cross-section, and the discharge component further includes: a second discharge structure, wherein when the reaction chamber contains the sheet, the second discharge structure and the second cross-section are disposed opposite to each other; And / or, In the case where the cross-section passivation system includes the air extraction device, the air extraction device includes: The exhaust pipe is connected to the furnace cavity; An air pump is connected to the end of the air extraction pipe away from the furnace cavity; A particulate trap is connected to the exhaust pipe, and the particulate trap is located between the exhaust pump and the furnace body.

14. The cross-section passivation system according to claim 13, characterized in that, When the discharge assembly includes the first discharge structure and the second discharge structure, the discharge assembly further includes: a third discharge structure located between the first discharge structure and the second discharge structure, wherein the first discharge structure, the third discharge structure and the second discharge structure are sequentially spaced apart along a third direction, and when the reaction chamber contains the sheet, the sheet is located between the first discharge structure and the third discharge structure, and / or between the third discharge structure and the second discharge structure; or, When the discharge assembly includes a first discharge structure and a second discharge structure, the discharge assembly further includes a third discharge structure located at the bottom of the sheet; wherein the first discharge structure and the second discharge structure are electrically connected to a first electrode of a first power supply, and the third discharge structure is electrically connected to a second electrode of the first power supply, the polarities of the first electrode and the second electrode are opposite, and the frequency of the first power supply is less than or equal to 40kHz; or, one of the first discharge structure and the second discharge structure is electrically connected to a second power supply, and the other is grounded, the third discharge structure is not energized, the second power supply is an alternating power supply, and the frequency of the second power supply is greater than or equal to 13MHz and less than or equal to 14MHz; or, both the first discharge structure and the second discharge structure are grounded, the third discharge structure is electrically connected to a third power supply, the third power supply is an alternating power supply, and the frequency of the third power supply is greater than or equal to 13MHz and less than or equal to 14MHz. And / or, When the extraction device includes the particulate trap, the particulate trap includes: a first housing having a first capture chamber inside; a second housing sleeved on the outside of the first housing, with a second capture chamber formed between the inner wall of the second housing and the outer wall of the first housing, and the second capture chamber communicating with the first capture chamber; a first spiral blade located within the first capture chamber, the first spiral blade and the inner wall of the first housing forming a first spiral channel; and a second spiral blade located within the second capture chamber, surrounding the first housing, the second spiral blade and the outer wall of the first housing and the inner wall of the second housing forming a second spiral channel; wherein, when the first housing has a first air inlet and the second housing has a first air outlet, exhaust gas flows into the first capture chamber from the first air inlet, flows sequentially through the first spiral channel and the second spiral channel, and flows out from the first air outlet; when the first housing has the first air outlet and the second housing has the first air inlet, exhaust gas flows into the second capture chamber from the first air inlet, flows sequentially through the second spiral channel and the first spiral channel, and flows out from the first air outlet; or, When the air extraction device includes the particulate trap, the particulate trap includes: a housing assembly having a filter chamber, and a second air inlet and an air outlet communicating with the filter chamber, the second air inlet and the air outlet being spaced apart along a fourth direction, the fourth direction being the extending direction of the housing assembly; a plurality of filter element assemblies located within the filter chamber and arranged sequentially along the fourth direction, the first filter element assembly being located near the second air inlet and the last filter element assembly being located near the air outlet; exhaust gas flows into the filter chamber from the second air inlet, flows through the plurality of filter element assemblies sequentially, and then flows out from the air outlet.

15. The cross-section passivation system according to claim 14, characterized in that, When the third discharge structure is located between the first discharge structure and the second discharge structure, and the sheet is provided between the first discharge structure and the third discharge structure, there is a gap between the sheet and the first discharge structure and / or the third discharge structure; And / or, When the third discharge structure is located between the first discharge structure and the second discharge structure, and the sheet is provided between the third discharge structure and the second discharge structure, there is a gap between the sheet and the third discharge structure and / or the second discharge structure. And / or, In the case where the particulate filter includes a first housing and a second housing, and the first housing is provided with the first air outlet and the second housing is provided with the first air inlet, the particulate filter further includes: The filter assembly is provided with a second air outlet, and the filter assembly and the first capture chamber are connected through the first air outlet.

16. The cross-section passivation system according to claim 12, characterized in that, In the case where the furnace cavity has multiple reaction chambers, the cross-sectional passivation system further includes: Multiple first heating elements are located inside the furnace cavity and are spaced apart along the fifth direction. The interval between two adjacent first heating elements forms the reaction chamber. When the reaction chamber contains the sheet, at least one of the two adjacent first heating elements is arranged opposite to the cross-section of the sheet. And / or, In the case where the furnace cavity has multiple reaction chambers, the cross-sectional passivation system further includes: A gas balancing device is connected to the furnace body and communicates with the furnace cavity. The gas balancing device can fill the furnace cavity with inert gas so that the gas pressure in the furnace cavity is greater than or equal to the gas pressure in the reaction chamber, thereby inhibiting the process gas in the reaction chamber from flowing into the furnace cavity. And / or, In the case where the furnace cavity has multiple reaction chambers arranged along a fifth direction, the cross-sectional passivation system further includes: A gas equalization component is located inside the furnace cavity and is disposed on top of a plurality of first heating elements. The gas equalization component has a plurality of gas equalization holes, which are spaced apart at least along the fifth direction. Each reaction chamber and at least one gas equalization hole are connected to each other. The direction from the top of the first heating element to the bottom intersects with the fifth direction.

17. The cross-section passivation system according to claim 16, characterized in that, In the case where the cross-section passivation system includes multiple first heating elements, the cross-section passivation system further includes: a second heating element located inside the furnace cavity and disposed at the bottom of the first heating elements, wherein the second heating element and the discharge assembly are insulated from each other; And / or, When the cross-section passivation system includes the gas balancing device, the cross-section passivation system further includes: a gas equalization pipe, which is disposed in the furnace cavity, surrounds the outside of the reaction cavity, and is connected to the gas balancing device, and the gas equalization pipe is provided with a plurality of first gas outlet holes along its own extension direction. And / or, In the case where the cross-section passivation system includes a plurality of first heating elements, the cross-section passivation system further includes a third heating element and a fourth heating element, the third heating element and the fourth heating element are arranged at intervals along a sixth direction, the sixth direction intersects with the fifth direction, the third heating element can abut against a first side of the plurality of first heating elements, the fourth heating element can abut against a second side of the plurality of first heating elements, and the plurality of first heating elements, the second heating element, the third heating element, the fourth heating element and the flow equalization plate enclose a plurality of reaction chambers.

18. The cross-section passivation system according to claim 17, characterized in that, In the case where the cross-section passivation system includes the second heating element, the bottoms of the second heating element and the plurality of first heating elements are sealed together. The second heating element is provided with a plurality of second vent holes, which are spaced apart at least along the fifth direction. Each reaction chamber is connected to at least one second vent hole. And / or, When the cross-section passivation system includes the gas equalization pipe, the spacing between the first gas outlets gradually decreases along the flow direction of the inert gas in the gas equalization pipe. And / or, When the cross-section passivation system includes the gas equalization pipe, the diameter of the first gas outlet gradually increases along the flow direction of the inert gas in the gas equalization pipe. And / or, When the cross-section passivation system includes the third heating element, the cross-section passivation system further includes: a first furnace door, which is movably connected to the furnace body and is used to cover or open the feed inlet; the third heating element is connected to the first furnace door; when the first furnace door covers the feed inlet, the third heating element is located inside the furnace cavity and abuts against the first side of a plurality of first heating elements. And / or, In the case where the cross-section passivation system includes the fourth heating element, the cross-section passivation system further includes: The second furnace door is movably connected to the furnace body and is used to cover or open the discharge port. The fourth heating element is connected to the second furnace door. When the second furnace door covers the discharge port, the fourth heating element is located inside the furnace cavity and abuts against the second side of the plurality of first heating elements.

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