A silicon optical gyroscope based on on-chip waveguide resonator and an angular velocity measurement method

Abstract

The application relates to the technical field of silicon optical gyroscopes, in particular to a silicon optical gyroscope based on an on-chip waveguide resonant cavity and an angular velocity measurement method, which comprises a wide-spectrum light source, a beam splitter, a first optical circulator, a second optical circulator, a sensing unit, a balanced photodetector, a lock-in amplifier and an upper computer; the sensing unit comprises, from bottom to top, a substrate, a lower isolation layer, a lower dielectric layer, an upper dielectric layer and an upper isolation layer; a first micro-ring resonant cavity is fixed between the upper dielectric layer and the lower dielectric layer; a second micro-ring resonant cavity, an acousto-optic frequency shifter, a first waveguide, a phase modulator and a second waveguide are fixed between the upper isolation layer and the upper dielectric layer; the first micro-ring resonant cavity, the second micro-ring resonant cavity, the first waveguide and the second waveguide are all located in an abnormal dispersion region. The application solves the problems of low measurement sensitivity and poor measurement accuracy of the existing silicon optical gyroscope and is suitable for the fields of unmanned aerial vehicles, unmanned underwater vehicles, automatic driving and microsatellites.

Description

Technical Field

[0001] This invention relates to the field of silicon optical gyroscope technology, specifically a silicon optical gyroscope based on an on-chip waveguide resonant cavity and a method for measuring angular velocity. Background Technology

[0002] Silicon photonic gyroscopes are angular velocity sensors that integrate multiple optical devices onto a chip using silicon-based integrated photonics technology. They offer advantages such as mass production, small size, and low power consumption, and are widely used in drones, unmanned underwater vehicles, autonomous driving, and microsatellites. However, in practical applications, existing silicon photonic gyroscopes suffer from the following problems due to their inherent structural limitations: First, in existing silicon photonic gyroscopes, both microring resonators are located in the normal dispersion region, resulting in a small Sagnac phase difference caused by rotation, thus leading to low measurement sensitivity. Second, in existing silicon photonic gyroscopes, the two microring resonators are arranged in the same plane, resulting in significant differences in the temperature field and stress environment of the two microring resonators. This leads to higher common-mode noise (temperature drift, vibration, etc.), resulting in poor measurement accuracy. Therefore, it is necessary to invent a silicon photonic gyroscope based on an on-chip waveguide resonator and an angular velocity measurement method to solve the problems of low measurement sensitivity and poor measurement accuracy of existing silicon photonic gyroscopes. Summary of the Invention

[0003] To address the problems of low measurement sensitivity and poor measurement accuracy in existing silicon optical gyroscopes, this invention provides a silicon optical gyroscope based on an on-chip waveguide resonant cavity and a method for measuring angular velocity.

[0004] This invention is achieved using the following technical solution: A silicon optical gyroscope based on an on-chip waveguide resonant cavity includes a broadband light source, a beam splitter, a first optical circulator, a second optical circulator, a sensing element, a balanced photodetector, a lock-in amplifier, and a host computer. The sensitive unit comprises, from bottom to top, a substrate, a lower isolation layer, a lower dielectric layer, an upper dielectric layer, and an upper isolation layer; a first microring resonant cavity is fixed between the upper dielectric layer and the lower dielectric layer; a second microring resonant cavity, an acousto-optic frequency shifter, a first waveguide, a phase modulator, and a second waveguide are fixed between the upper isolation layer and the upper dielectric layer; the tail end of the channel waveguide of the second microring resonant cavity is connected to the head end of the second waveguide in sequence through the acousto-optic frequency shifter, the first waveguide, and the phase modulator; the tail end of the second waveguide is perpendicularly coupled to the tail end of the channel waveguide of the first microring resonant cavity; the first microring resonant cavity, the second microring resonant cavity, the first waveguide, and the second waveguide are all located in the anomalous dispersion region; The output end of the broadband light source is connected to the input end of the beam splitter; the two output ends of the beam splitter are respectively connected to the first port of the first optical circulator and the first port of the second optical circulator; the second port of the first optical circulator is connected to the beginning of the channel waveguide of the first micro-ring resonator; the second port of the second optical circulator is connected to the beginning of the channel waveguide of the second micro-ring resonator; the third ports of the first optical circulator and the third ports of the second optical circulator are respectively connected to the two input ends of the balanced photodetector; the signal output end of the balanced photodetector is connected to the signal input end of the host computer through a lock-in amplifier.

[0005] Furthermore, the substrate is made of silicon; the lower isolation layer, lower dielectric layer, upper dielectric layer, and upper isolation layer are all made of silicon dioxide; the first microring resonator, the second microring resonator, the first waveguide, and the second waveguide are all made of silicon nitride; the cross-sections of the first microring resonator, the second microring resonator, the first waveguide, and the second waveguide are all rectangular cross-sections; the thicknesses of the first microring resonator, the second microring resonator, the first waveguide, and the second waveguide are all greater than 800 nm.

[0006] Furthermore, the tail end face of the second waveguide is aligned with the tail end face of the channel waveguide of the first microring resonator and faces opposite directions.

[0007] Furthermore, it also includes a signal generator; the first signal output terminal of the signal generator is connected to the driving terminal of the acousto-optic frequency shifter; the second signal output terminal of the signal generator is connected to the driving terminal of the phase modulator; and the third signal output terminal of the signal generator is connected to the reference terminal of the lock-in amplifier.

[0008] Furthermore, a micro heater is fixed between the upper isolation layer and the upper dielectric layer, and the micro heater is located beside the micro ring waveguide of the second micro ring resonant cavity; it also includes a power supply, and the two output terminals of the power supply are respectively connected to the two ends of the micro heater.

[0009] An angular velocity measurement method based on an on-chip waveguide resonant cavity, which is implemented using a silicon optical gyroscope based on an on-chip waveguide resonant cavity as described in this invention, is achieved through the following steps: First, control the gyroscope to enter working mode; the working mode is as follows: The light signal emitted by the broadband light source is incident on the beam splitter and split into two paths: The first optical signal is sequentially transmitted through the first optical circulator, the channel waveguide of the first micro-ring resonator, and then into the micro-ring waveguide of the first micro-ring resonator. It propagates clockwise through the micro-ring waveguide of the first micro-ring resonator, then sequentially through the channel waveguide of the first micro-ring resonator, the upper dielectric layer, the second waveguide, the phase modulator, the first waveguide, the acousto-optic frequency shifter, and the channel waveguide of the second micro-ring resonator to the micro-ring waveguide of the second micro-ring resonator. It propagates counterclockwise through the micro-ring waveguide of the second micro-ring resonator, and then sequentially through the channel waveguide of the second micro-ring resonator and the second optical circulator to the balanced photodetector. The second optical signal is sequentially transmitted through the second optical circulator, the channel waveguide of the second micro-ring resonator, and then into the micro-ring waveguide of the second micro-ring resonator. It propagates clockwise through the micro-ring waveguide of the second micro-ring resonator, then sequentially through the channel waveguide of the second micro-ring resonator, the acousto-optic frequency shifter, the first waveguide, the phase modulator, the second waveguide, the upper dielectric layer, and the channel waveguide of the first micro-ring resonator to the micro-ring waveguide of the first micro-ring resonator. It propagates counterclockwise through the micro-ring waveguide of the first micro-ring resonator, and then sequentially through the channel waveguide of the first micro-ring resonator and the first optical circulator to the balanced photodetector. The two optical signals are converted into differential electrical signals by a balanced photodetector; the differential electrical signals are demodulated by a lock-in amplifier and then transmitted to the host computer. During this process, the two optical signals that propagate in reverse through the micro-ring waveguide of the first micro-ring resonant cavity form a resonant response in the micro-ring waveguide of the first micro-ring resonant cavity, and the two optical signals that propagate in reverse through the micro-ring waveguide of the second micro-ring resonant cavity also form a resonant response in the micro-ring waveguide of the second micro-ring resonant cavity. In operating mode, when the gyroscope is subjected to angular velocity, a Sagnac phase difference related to angular velocity is generated between the two optical signals propagating in reverse through the micro-ring waveguide of the first micro-ring resonant cavity. This phase difference is amplified by the first micro-ring resonant cavity, which is located in the anomalous dispersion region, and manifests as a change in the resonant response. Similarly, a Sagnac phase difference related to angular velocity is generated between the two optical signals propagating in reverse through the micro-ring waveguide of the second micro-ring resonant cavity. This phase difference is amplified by the second micro-ring resonant cavity, which is located in the anomalous dispersion region, and also manifests as a change in the resonant response. The change in the resonant response is converted into a change in the differential electrical signal by a balanced photodetector. The change in the differential electrical signal is demodulated by a lock-in amplifier and then transmitted to the host computer. The host computer calculates the angular velocity to be measured based on the change in the differential electrical signal and in combination with pre-calibrated parameters.

[0010] Furthermore, the method also includes processing the optical signal and differential electrical signal using a signal generator, an acousto-optic frequency shifter, a phase modulator, and a lock-in amplifier; the specific steps are as follows: In the operating mode, the signal generator provides a drive signal to the acousto-optic frequency shifter on one hand and a drive signal to the phase modulator on the other hand, and a reference signal to the lock-in amplifier on the third hand; the acousto-optic frequency shifter shifts the two optical signals according to the drive signal; the phase modulator modulates the two optical signals according to the drive signal; and the lock-in amplifier demodulates the differential electrical signal according to the reference signal.

[0011] Furthermore, the method also includes using a micro-heater and a power supply to compensate for the offset of the differential electrical signal; the specific steps are as follows: In the operating mode, the power supply supplies power to the micro heater; the micro heater heats the micro-ring waveguide of the second micro-ring resonant cavity, causing the effective refractive index and resonant frequency of the second micro-ring resonant cavity to change, thereby compensating for the differential electrical signal offset caused by processing deviation and environmental temperature drift.

[0012] Compared with existing silicon optical gyroscopes, the silicon optical gyroscope and angular velocity measurement method based on an on-chip waveguide resonant cavity described in this invention have the following advantages: First, by specifically designing the cross-section and thickness of the waveguide, this invention ensures that the first micro-ring resonant cavity, the second micro-ring resonant cavity, the first waveguide, and the second waveguide are all located in the anomalous dispersion region, thereby significantly increasing the Sagnac phase difference caused by rotation and thus significantly improving the measurement sensitivity. Second, the two micro-ring resonant cavities in this invention are arranged vertically in layers. This arrangement places the two micro-ring resonant cavities in similar temperature fields and stress environments, thereby significantly suppressing common-mode noise (temperature drift, vibration, etc.) and thus significantly improving measurement accuracy.

[0013] This invention effectively solves the problems of low measurement sensitivity and poor measurement accuracy of existing silicon photonic gyroscopes, and is applicable to fields such as drones, unmanned underwater vehicles, autonomous driving, and microsatellites. Attached Figure Description

[0014] Figure 1 This is a schematic diagram of the optical path of the present invention.

[0015] Figure 2 This is a schematic diagram of the structure of the sensitive unit in this invention.

[0016] Figure 3 yes Figure 2 A partial structural diagram.

[0017] Figure 4 yes Figure 3 A partial structural diagram.

[0018] Figure 5 yes Figure 4 A partial structural diagram.

[0019] Figure 6 yes Figure 5A partial structural diagram.

[0020] In the diagram: 1-Broadband light source, 2-Beam splitter, 3-First optical circulator, 4-Second optical circulator, 501-Substrate, 502-Lower isolation layer, 503-Lower dielectric layer, 504-Upper dielectric layer, 505-Upper isolation layer, 506-First micro-ring resonator, 507-Second micro-ring resonator, 508-Acousto-optic frequency shifter, 509-First waveguide, 510-Phase modulator, 511-Second waveguide, 512-Micro heater, 6-Balanced photodetector, 7-Lock-in amplifier, 8-Host computer, 9-Signal generator, 10-Power supply. Detailed Implementation

[0021] A silicon optical gyroscope based on an on-chip waveguide resonant cavity includes a broadband light source 1, a beam splitter 2, a first optical circulator 3, a second optical circulator 4, a sensing unit, a balanced photodetector 6, a lock-in amplifier 7, and a host computer 8. The sensitive unit includes, from bottom to top, a substrate 501, a lower isolation layer 502, a lower dielectric layer 503, an upper dielectric layer 504, and an upper isolation layer 505. A first microring resonant cavity 506 is fixed between the upper dielectric layer 504 and the lower dielectric layer 503. A second microring resonant cavity 507, an acousto-optic frequency shifter 508, a first waveguide 509, a phase modulator 510, and a second waveguide 511 are fixed between the upper isolation layer 505 and the upper dielectric layer 504. The tail end of the channel waveguide of the second microring resonant cavity 507 is connected to the head end of the second waveguide 511 in sequence through the acousto-optic frequency shifter 508, the first waveguide 509, and the phase modulator 510. The tail end of the second waveguide 511 is perpendicularly coupled to the tail end of the channel waveguide of the first microring resonant cavity 506. The first microring resonant cavity 506, the second microring resonant cavity 507, the first waveguide 509, and the second waveguide 511 are all located in the anomalous dispersion region. The output end of the broadband light source 1 is connected to the input end of the beam splitter 2; the two output ends of the beam splitter 2 are respectively connected to the first port of the first optical circulator 3 and the first port of the second optical circulator 4; the second port of the first optical circulator 3 is connected to the first end of the channel waveguide of the first micro-ring resonator 506; the second port of the second optical circulator 4 is connected to the first end of the channel waveguide of the second micro-ring resonator 507; the third port of the first optical circulator 3 and the third port of the second optical circulator 4 are respectively connected to the two input ends of the balanced photodetector 6; the signal output end of the balanced photodetector 6 is connected to the signal input end of the host computer 8 through the lock-in amplifier 7.

[0022] The substrate 501 is made of silicon; the lower isolation layer 502, the lower dielectric layer 503, the upper dielectric layer 504, and the upper isolation layer 505 are all made of silicon dioxide; the first microring resonator 506, the second microring resonator 507, the first waveguide 509, and the second waveguide 511 are all made of silicon nitride; the cross-sections of the first microring resonator 506, the second microring resonator 507, the first waveguide 509, and the second waveguide 511 are all rectangular cross-sections; the thicknesses of the first microring resonator 506, the second microring resonator 507, the first waveguide 509, and the second waveguide 511 are all greater than 800 nm.

[0023] The tail end face of the second waveguide 511 is aligned with the tail end face of the channel waveguide of the first micro-ring resonator 506 and faces opposite directions.

[0024] It also includes a signal generator 9; the first signal output terminal of the signal generator 9 is connected to the driving terminal of the acousto-optic frequency shifter 508; the second signal output terminal of the signal generator 9 is connected to the driving terminal of the phase modulator 510; and the third signal output terminal of the signal generator 9 is connected to the reference terminal of the lock-in amplifier 7.

[0025] A micro heater 512 is fixed between the upper isolation layer 505 and the upper dielectric layer 504, and the micro heater 512 is located on the side of the micro-ring waveguide of the second micro-ring resonant cavity 507; it also includes a power supply 10, and the two output terminals of the power supply 10 are respectively connected to the two ends of the micro heater 512.

[0026] An angular velocity measurement method based on an on-chip waveguide resonant cavity, which is implemented using a silicon optical gyroscope based on an on-chip waveguide resonant cavity as described in this invention, is achieved through the following steps: First, control the gyroscope to enter working mode; the working mode is as follows: The light signal emitted by broadband light source 1 is incident on beam splitter 2 and split into two paths by beam splitter 2: The first optical signal is sequentially transmitted through the first optical circulator 3, the channel waveguide of the first micro-ring resonator 506, and then through the micro-ring waveguide of the first micro-ring resonator 506. It propagates clockwise through the micro-ring waveguide of the first micro-ring resonator 506, then sequentially through the channel waveguide of the first micro-ring resonator 506, the upper dielectric layer 504, the second waveguide 511, the phase modulator 510, the first waveguide 509, the acousto-optic frequency shifter 508, and the channel waveguide of the second micro-ring resonator 507. It propagates counterclockwise through the micro-ring waveguide of the second micro-ring resonator 507, and then sequentially through the channel waveguide of the second micro-ring resonator 507 and the second optical circulator 4 to the balanced photodetector 6. The second optical signal is sequentially transmitted through the channel waveguide of the second optical circulator 4 and the second micro-ring resonator 507 to the micro-ring waveguide of the second micro-ring resonator 507, and propagates clockwise through the micro-ring waveguide of the second micro-ring resonator 507. Then, it is sequentially transmitted through the channel waveguide of the second micro-ring resonator 507, the acousto-optic frequency shifter 508, the first waveguide 509, the phase modulator 510, the second waveguide 511, the upper dielectric layer 504, and the channel waveguide of the first micro-ring resonator 506 to the micro-ring waveguide of the first micro-ring resonator 506, and propagates counterclockwise through the micro-ring waveguide of the first micro-ring resonator 506. Finally, it is sequentially transmitted through the channel waveguide of the first micro-ring resonator 506 and the first optical circulator 3 to the balanced photodetector 6. The two optical signals are converted into differential electrical signals by a balanced photodetector 6; the differential electrical signals are demodulated by a lock-in amplifier 7 and then transmitted to the host computer 8. During this process, the two optical signals that propagate in the opposite direction through the micro-ring waveguide of the first micro-ring resonant cavity 506 form a resonant response in the micro-ring waveguide of the first micro-ring resonant cavity 506, and the two optical signals that propagate in the opposite direction through the micro-ring waveguide of the second micro-ring resonant cavity 507 also form a resonant response in the micro-ring waveguide of the second micro-ring resonant cavity 507. In operating mode, when the gyroscope is subjected to angular velocity, a Sagnac phase difference related to angular velocity is generated between the two optical signals propagating in reverse through the micro-ring waveguide of the first micro-ring resonant cavity 506. This phase difference is amplified by the first micro-ring resonant cavity 506, which is located in the anomalous dispersion region, and manifests as a change in the resonant response. Similarly, a Sagnac phase difference related to angular velocity is generated between the two optical signals propagating in reverse through the micro-ring waveguide of the second micro-ring resonant cavity 507. This phase difference is amplified by the second micro-ring resonant cavity 507, which is located in the anomalous dispersion region, and also manifests as a change in the resonant response. The change in the resonant response is converted into a change in the differential electrical signal by the balanced photodetector 6. The change in the differential electrical signal is demodulated by the lock-in amplifier 7 and then transmitted to the host computer 8. The host computer 8 calculates the angular velocity to be measured based on the change in the differential electrical signal and in combination with the pre-calibrated parameters.

[0027] The method also includes processing the optical signal and differential electrical signal using a signal generator 9, an acousto-optic frequency shifter 508, a phase modulator 510, and a lock-in amplifier 7; the specific steps are as follows: In the operating mode, the signal generator 9 provides a drive signal to the acousto-optic frequency shifter 508 and a drive signal to the phase modulator 510, and a reference signal to the lock-in amplifier 7. The acousto-optic frequency shifter 508 shifts the frequency of the two optical signals according to the drive signal. The phase modulator 510 modulates the phase of the two optical signals according to the drive signal. The lock-in amplifier 7 demodulates the differential electrical signal according to the reference signal.

[0028] The method also includes using a microheater 512 and a power supply 10 to compensate for the offset of the differential electrical signal; the specific steps are as follows: In the working mode, the power supply 10 supplies power to the micro heater 512; the micro heater 512 heats the micro-ring waveguide of the second micro-ring resonant cavity 507, causing the effective refractive index and resonant frequency of the second micro-ring resonant cavity 507 to change, thereby compensating for the differential electrical signal offset caused by processing deviation and environmental temperature drift.

[0029] In specific implementation, the channel waveguide and the first waveguide 509 of the first micro-ring resonator 506 are both L-shaped waveguides; the channel waveguide and the second waveguide 511 of the second micro-ring resonator 507 are both straight waveguides; the micro heater 512 uses an arc-shaped heating wire; and the signal generator 9 uses a function generator.

[0030] While specific embodiments of the present invention have been described above, those skilled in the art should understand that these are merely illustrative examples, and the scope of protection of the present invention is defined by the appended claims. Those skilled in the art can make various changes or modifications to these embodiments without departing from the principles and essence of the present invention, but all such changes and modifications fall within the scope of protection of the present invention.

Claims

1. A silicon optical gyroscope based on an on-chip waveguide resonant cavity, characterized in that: Includes a broadband light source (1), a beam splitter (2), a first optical circulator (3), a second optical circulator (4), a sensitive unit, a balanced photodetector (6), a lock-in amplifier (7), and a host computer (8); The sensitive unit includes, from bottom to top, a substrate (501), a lower isolation layer (502), a lower dielectric layer (503), an upper dielectric layer (504), and an upper isolation layer (505); a first micro-ring resonant cavity (506) is fixed between the upper dielectric layer (504) and the lower dielectric layer (503); a second micro-ring resonant cavity (507), an acousto-optic frequency shifter (508), a first waveguide (509), and a phase modulator (510) are fixed between the upper isolation layer (505) and the upper dielectric layer (504). The second waveguide (511); the channel waveguide tail end of the second micro-ring resonator (507) is connected to the head end of the second waveguide (511) in sequence through the acousto-optic frequency shifter (508), the first waveguide (509), and the phase modulator (510); the tail end of the second waveguide (511) is perpendicularly coupled to the channel waveguide tail end of the first micro-ring resonator (506); the first micro-ring resonator (506), the second micro-ring resonator (507), the first waveguide (509), and the second waveguide (511) are all located in the anomalous dispersion region; The output end of the broadband light source (1) is connected to the input end of the beam splitter (2); the two output ends of the beam splitter (2) are respectively connected to the first port of the first optical circulator (3) and the first port of the second optical circulator (4); the second port of the first optical circulator (3) is connected to the first end of the channel waveguide of the first micro-ring resonator (506); the second port of the second optical circulator (4) is connected to the first end of the channel waveguide of the second micro-ring resonator (507); the third port of the first optical circulator (3) and the third port of the second optical circulator (4) are respectively connected to the two input ends of the balanced photodetector (6); the signal output end of the balanced photodetector (6) is connected to the signal input end of the host computer (8) through the lock-in amplifier (7).

2. A silicon optical gyroscope based on an on-chip waveguide resonant cavity according to claim 1, characterized in that: The substrate (501) is made of silicon; the lower isolation layer (502), the lower dielectric layer (503), the upper dielectric layer (504), and the upper isolation layer (505) are all made of silicon dioxide; the first micro-ring resonator (506), the second micro-ring resonator (507), the first waveguide (509), and the second waveguide (511) are all made of silicon nitride; the cross-sections of the first micro-ring resonator (506), the second micro-ring resonator (507), the first waveguide (509), and the second waveguide (511) are all rectangular cross-sections; the thicknesses of the first micro-ring resonator (506), the second micro-ring resonator (507), the first waveguide (509), and the second waveguide (511) are all greater than 800 nm.

3. A silicon optical gyroscope based on an on-chip waveguide resonant cavity according to claim 1, characterized in that: The tail end face of the second waveguide (511) is aligned with the tail end face of the channel waveguide of the first micro-ring resonator (506) and faces opposite directions.

4. A silicon optical gyroscope based on an on-chip waveguide resonant cavity according to claim 1, characterized in that: It also includes a signal generator (9); the first signal output terminal of the signal generator (9) is connected to the driving terminal of the acousto-optic frequency shifter (508); the second signal output terminal of the signal generator (9) is connected to the driving terminal of the phase modulator (510); and the third signal output terminal of the signal generator (9) is connected to the reference terminal of the lock-in amplifier (7).

5. A silicon optical gyroscope based on an on-chip waveguide resonant cavity according to claim 1, characterized in that: A micro heater (512) is fixed between the upper isolation layer (505) and the upper dielectric layer (504), and the micro heater (512) is located on the side of the micro ring waveguide of the second micro ring resonant cavity (507); it also includes a power supply (10), and the two output terminals of the power supply (10) are respectively connected to the two ends of the micro heater (512).

6. A method for measuring angular velocity based on an on-chip waveguide resonant cavity, the method being implemented based on a silicon optical gyroscope based on an on-chip waveguide resonant cavity as described in claim 1, characterized in that: This method is implemented using the following steps: First, control the gyroscope to enter working mode; the working mode is as follows: The light signal emitted by the broadband light source (1) is incident on the beam splitter (2) and split into two paths by the beam splitter (2): The first optical signal is sequentially transmitted through the channel waveguide of the first optical circulator (3) and the first micro-ring resonator (506) to the micro-ring waveguide of the first micro-ring resonator (506), and propagates clockwise through the micro-ring waveguide of the first micro-ring resonator (506). Then, it is sequentially transmitted through the channel waveguide of the first micro-ring resonator (506), the upper dielectric layer (504), the second waveguide (511), the phase modulator (510), the first waveguide (509), the acousto-optic frequency shifter (508), and the channel waveguide of the second micro-ring resonator (507) to the micro-ring waveguide of the second micro-ring resonator (507), and propagates counterclockwise through the micro-ring waveguide of the second micro-ring resonator (507). Finally, it is sequentially transmitted through the channel waveguide of the second micro-ring resonator (507) and the second optical circulator (4) to the balanced photodetector (6). The second optical signal is sequentially transmitted through the channel waveguide of the second optical circulator (4) and the second micro-ring resonator (507) to the micro-ring waveguide of the second micro-ring resonator (507), and propagates clockwise through the micro-ring waveguide of the second micro-ring resonator (507). Then, it is sequentially transmitted through the channel waveguide of the second micro-ring resonator (507), the acousto-optic frequency shifter (508), the first waveguide (509), the phase modulator (510), the second waveguide (511), the upper dielectric layer (504), and the channel waveguide of the first micro-ring resonator (506) to the micro-ring waveguide of the first micro-ring resonator (506), and propagates counterclockwise through the micro-ring waveguide of the first micro-ring resonator (506). Finally, it is sequentially transmitted through the channel waveguide of the first micro-ring resonator (506) and the first optical circulator (3) to the balanced photodetector (6). The two optical signals are converted into differential electrical signals by a balanced photodetector (6); the differential electrical signals are demodulated by a lock-in amplifier (7) and then transmitted to the host computer (8). During this process, the two optical signals that propagate in the opposite direction through the micro-ring waveguide of the first micro-ring resonator (506) form a resonant response in the micro-ring waveguide of the first micro-ring resonator (506), and the two optical signals that propagate in the opposite direction through the micro-ring waveguide of the second micro-ring resonator (507) also form a resonant response in the micro-ring waveguide of the second micro-ring resonator (507). In the working mode, when the gyroscope is subjected to angular velocity, a Sagnac phase difference related to angular velocity is generated between the two optical signals that propagate in opposite directions through the micro-ring waveguide of the first micro-ring resonant cavity (506). This phase difference is enhanced by the first micro-ring resonant cavity (506) located in the anomalous dispersion region and manifests as a change in the resonant response. The two optical signals propagating in reverse through the micro-ring waveguide of the second micro-ring resonator (507) also generate a Sagnac phase difference related to the angular velocity. This phase difference is enhanced by the second micro-ring resonator (507) located in the anomalous dispersion region and also manifests as a change in the resonant response. The change in the resonant response is converted into a change in the differential electrical signal by the balanced photodetector (6). The change in the differential electrical signal is demodulated by the lock-in amplifier (7) and then transmitted to the host computer (8). The host computer (8) calculates the angular velocity to be measured based on the change in the differential electrical signal and in combination with the pre-calibrated parameters.

7. The angular velocity measurement method based on an on-chip waveguide resonant cavity according to claim 6, characterized in that: The method also includes processing the optical signal and differential electrical signal using a signal generator (9), an acousto-optic frequency shifter (508), a phase modulator (510), and a lock-in amplifier (7); the specific steps are as follows: In the working mode, the signal generator (9) provides a driving signal to the acousto-optic frequency shifter (508) on one hand, and a driving signal to the phase modulator (510) on the other hand, and a reference signal to the lock-in amplifier (7) on the third hand; the acousto-optic frequency shifter (508) shifts the frequency of the two optical signals according to the driving signal; The phase modulator (510) modulates the two optical signals according to the driving signal; the lock-in amplifier (7) demodulates the differential electrical signal according to the reference signal.

8. The angular velocity measurement method based on an on-chip waveguide resonant cavity according to claim 6, characterized in that: The method also includes using a micro heater (512) and a power supply (10) to compensate for the differential electrical signal offset; the specific steps are as follows: In the working mode, the power supply (10) supplies power to the micro heater (512); the micro heater (512) heats the micro-ring waveguide of the second micro-ring resonant cavity (507), causing the effective refractive index and resonant frequency of the second micro-ring resonant cavity (507) to change, thereby compensating for the differential electrical signal offset caused by processing deviation and environmental temperature drift.

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