A method for damage determination and repair of a near field system scanning tube

Abstract

The application discloses a damage determination and repair method of a scanning tube for a near-field system, relates to the technical field of terahertz near-field imaging, and comprises the following steps: S1, calibrating a reference, assembling a brand-new intact scanning tube, locking the resonance frequency of a probe, recording the motion track of a standard scanning table through an optical microscope, and synchronously collecting a standard frequency modulation signal and a reference Z-axis voltage as a control reference; S2, grading the damage of the scanning tube; S3, establishing the corresponding relationship between damage types and system electric signals and motion tracks; and S4, determining the damage category of the scanning tube in combination with the detection parameters of step S3, and matching a corresponding repair scheme to complete repair calibration. Through the establishment of the frequency locking state and the moving track of the brand-new scanning tube as a control reference, the scanning tube is analyzed in multiple dimensions in combination with the near-field imaging system, the systematic and standardized determination of the damage condition of the probe needle tip of the scanning tube is realized, and the problem that there is a lack of scanning tube damage determination standards in the prior art is effectively solved.

Description

Technical Field

[0001] This invention relates to the field of terahertz near-field imaging technology, and more specifically, to a method for determining and repairing damage to scanning tubes in near-field systems. Background Technology

[0002] Near-field imaging technology is an important branch of scanning probe microscopy, represented by scanning near-field optical microscopy. Its core principle is to use tiny probes, much smaller than the wavelength of light, to collect non-radiative elliptic field information from the sample surface, thereby breaking the diffraction limit of traditional optical microscopes and achieving super-resolution optical imaging at the nanoscale. This technology has broad application prospects in fields such as nanomaterial characterization, semiconductor device detection, biomedical imaging, and quantum optics research. As the requirements for spatial resolution and imaging accuracy in microscopic characterization continue to increase, the role of the scanning tube—a key component of near-field imaging systems—is becoming increasingly prominent.

[0003] The scanning tube is the core unit in a near-field imaging system that performs nanoscale positioning and scanning motion. All scanning probe microscopes use scanning tubes made of piezoelectric ceramic material for precise nanoscale positioning. When a voltage is applied, the shape of the piezoelectric ceramic deforms accordingly, and the magnitude of the deformation is proportional to the applied voltage. In near-field imaging systems, the execution unit of the scanning tube is typically a three-dimensional piezoelectric scanning tube, used to achieve three-dimensional nanometer-precision scanning. This, combined with computer acquisition of near-field morphology and optical information of the sample, yields near-field morphology and optical images of the sample.

[0004] Specifically, a piezoelectric ceramic tube scanner is a thin cylindrical tube made of radially polarized piezoelectric material with four external electrodes and continuous internal electrodes. When voltage is applied to one of the external electrodes, the actuator wall in the corresponding area expands, causing vertical contraction and lateral deflection of the tube tip. The circumferential electrodes can be used for vertical or radial extension and contraction. Based on this structure, the scanning tube can control the nanometer-scale spacing between the probe and the sample surface in the vertical direction, while simultaneously achieving grating scanning motion in the XY directions in the horizontal direction, thus completing point-by-point scanning imaging of the entire region of interest. However, during use, the scanning tube is prone to various damages due to excessive current, mechanical vibration, and long-term fatigue, such as internal breakdown, loosening at the bottom, detachment of ceramic connections, and ceramic fracture. Operators often find it difficult to accurately determine the type of damage to the scanning tube and cannot provide targeted repair solutions, often resorting to complete replacement, resulting in unnecessary equipment and maintenance costs. Summary of the Invention

[0005] This invention provides a method for determining and repairing damage to scanning tubes in near-field systems, which can solve the problems of lack of standards for determining scanning tube damage and unclear repair solutions in the prior art.

[0006] A method for damage assessment and repair of scanning tubes in near-field systems includes the following steps: S1. Calibrate the reference, assemble a brand new and intact scanning tube onto the near-field imaging system moving platform, lock the probe resonant frequency through system software, record the standard scanning stage motion trajectory with an optical microscope, and simultaneously acquire the standard frequency modulation signal and the reference Z-axis voltage as a reference. S2. Classify the damage of the scanning tube by classifying the damage of the scanning tube into different categories based on the appearance defects and abnormal power-on phenomena. S3. Test each type of damage scanning tube on the machine, collect three quantitative parameters: frequency modulation and locking status, Z-axis voltage value, and scanning trajectory shape, and establish the correspondence between damage type and system electrical signal and motion trajectory. S4. Based on the detection parameters from step S3, determine the type of damage to the scanning tube and match the corresponding repair plan to complete the repair and calibration.

[0007] The present invention provides a method for damage assessment and repair of near-field system scanning tubes, which, compared with the prior art, has the following beneficial effects, but is not limited to: By establishing a new frequency lock state and movement trajectory of the scanning tube as a reference, and combining it with a near-field imaging system to perform multi-dimensional analysis of the scanning tube, a systematic and standardized determination of the damage to the scanning tube probe tip is achieved, effectively solving the problem of the lack of a standard for determining scanning tube damage in existing technologies.

[0008] By classifying the damage and providing targeted repair methods, the waste of resources caused by blindly replacing the scanning tube is avoided. The operation process is simple and the judgment results are accurate and reliable.

[0009] Furthermore, the specific operation steps of S1 are as follows: S11. Assemble the new and intact scanning tube onto the needle moving platform, turn on the in-field imaging system software, turn on the laser, and adjust the Z-scaling coefficient parameter. S12. Start automatic frequency modulation to capture the probe resonance signal and lock the frequency. After successful frequency locking, the Z-axis voltage stabilizes at +180V. S13. After performing the needle insertion operation, start the grating scan, observe and record the straight standard trajectory through the optical microscope, save the frequency modulation waveform and reference voltage data to establish a standard database, and use the standard database as a reference.

[0010] Furthermore, the specific criteria for classifying the scanning tube damage categories in S2 are as follows: Category 1: The bottom connection of the scanning tube is not damaged or loose, but there is an abnormal current sound when powered on; Category 2: The connection between the bottom base of the scanning tube and the equipment housing is loose. The loosening is divided into two types: Type 1 loosening and Type 2 loosening. Category 3: The metal substrate at the top or bottom of the scanning tube separates from the interface between the metal substrate and the gray piezoelectric ceramic. Category 4: The gray piezoelectric ceramic tube body of the scanning tube is broken.

[0011] Furthermore, the criteria for classifying loosening types in Category 2 are as follows: A gap length less than 1 / 4 of the pipe bottom circumference is classified as the first type of loosening. A gap length greater than or equal to 1 / 4 of the pipe bottom circumference is classified as the second type of loosening.

[0012] Furthermore, in S3, the quantitative characteristics of various damage scanning tubes tested on the machine are as follows: Category 1: Frequency modulation can lock normally, Z-axis voltage is maintained at +180V, scanning trajectory is the first curved curve, and abnormal current noise is accompanied by power-on. Category 2, first loosening type: normal frequency modulation and locking, Z-axis voltage +180V, scanning trajectory is the second curved curve; Category 2, second loosening type; Category 3 and Category 4: Frequency modulation cannot lock the resonance signal, Z-axis voltage jumps to -180V, and needle insertion and scanning operations cannot be performed.

[0013] Furthermore, in S4, the scanning tube repair scheme corresponding to category 1 is as follows: disassemble the faulty scanning tube, determine that the cause of the fault is excessive current breaking down the internal ceramic electrode, replace it with a brand new gray piezoelectric ceramic tube, and reuse it after completing the calibration of the resonant frequency and Z-axis scaling coefficient.

[0014] Furthermore, in S4, the scanning tube repair scheme corresponding to category 2 is as follows: on-site re-tighten the bonding base and the outer shell, adjust the amount of fixing material according to the size of the loose gap, ensure that the connection contact surface is completely flat, and after curing, re-install the machine to complete frequency tuning and Z-axis parameter calibration.

[0015] Furthermore, in S4, the repair scheme for the ceramic interface detachment scanning tube of category 3 is as follows: the metal substrate and the gray ceramic detachment interface are re-bonded and fixed at high temperature, the ceramic body is inspected for microcracks, and the tube is returned for use after all parameters are calibrated and qualified.

[0016] Furthermore, in S4, the repair solution for the gray ceramic broken scanning tube of category 4 is as follows: replace the entire gray piezoelectric ceramic tube with a brand new one, and reuse it after completing the full set of frequency modulation, Z-axis, and scanning trajectory calibration.

[0017] Furthermore, the curvature of the first curved curve is greater than that of the second curved curve. Attached Figure Description

[0018] Figure 1 This is a flowchart illustrating a method for determining and repairing damage to a near-field system scanning tube, according to an embodiment of the present invention. Figure 2 A comprehensive calibration diagram for a brand new, intact scanning tube; Figure 3 Comparison of the appearance morphology of the scanning tubes for four types of faults; Figure 4 This is a comparison chart of test parameters for four types of damage scanning tube systems. Detailed Implementation

[0019] To make the objectives, technical solutions, and advantages of this application clearer, specific embodiments of this application are described clearly and completely below with reference to the accompanying drawings. It should be understood that the described embodiments are only a part of the embodiments of this application, and not all of them. All other embodiments obtained by those skilled in the art based on the embodiments described in this application without creative effort will fall within the scope of protection of this application.

[0020] Unless otherwise defined, all technical and scientific terms used in this application have the same meaning as commonly understood by one of ordinary skill in the art to which this application pertains; the terminology used in the specification of this application is for the purpose of describing specific embodiments only and is not intended to limit this application; the terms "comprising," "including," "having," "containing," "comprise," etc., in the specification, claims, and accompanying drawings of this application are open-ended terms, indicating that a method comprises one or more steps, or an apparatus comprises one or more elements, but do not exclude the inclusion of other steps or elements. The terms "first," "second," etc., in the specification, claims, or accompanying drawings of this application are used to distinguish different objects, not to describe a specific order or primary / secondary relationship. Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, a feature defined with "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this application, unless otherwise stated, "a plurality of" means two or more.

[0021] In the description of this application, it should be understood that the terms "upper", "lower", "left", "right", "front", "rear", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this application.

[0022] In the description of this application, it should be noted that, unless otherwise expressly specified and limited, the terms "installation," "connection," "linking," and "attachment" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal communication between two components. Those skilled in the art can understand the specific meaning of the above terms in this application according to the specific circumstances.

[0023] In this application, the term "and / or" is merely a description of the relationship between related objects, indicating that three relationships can exist. For example, A and / or B can represent: A existing alone, A and B existing simultaneously, or B existing alone. Additionally, in this application, the character " / " generally indicates that the preceding and following related objects have an "or" relationship.

[0024] See Figure 1 As shown in the figure, an embodiment of the present invention provides a method for determining and repairing damage to a scanning tube in a near-field system, comprising the following steps: S1. Calibrate the reference, assemble a brand new and intact scanning tube onto the near-field imaging system moving platform, lock the probe resonance frequency through system software, and use the system's built-in low-magnification optical microscope to record the standard scanning stage's motion trajectory, while simultaneously acquiring the standard frequency modulation signal and the reference Z-axis voltage as a comparison reference.

[0025] Specifically, it includes the following steps: S11. Assemble the new and intact scanning tube onto the needle moving platform, turn on the in-field imaging system software, turn on the laser, select the scanner scaling factor setting in the system function, and adjust the Z scaling factor parameter.

[0026] See Figure 2 As shown, (a) is the appearance of a brand new scanning tube. In actual operation, this parameter needs to be adjusted every time a brand new scanning tube is replaced.

[0027] S12. Start automatic frequency tuning to capture the probe resonance signal and lock the frequency. After successful frequency locking, the Z-axis voltage stabilizes at +180V.

[0028] In specific operation, you need to click on frequency settings, select the automatic frequency adjustment option, and once the frequency adjustment is successful, the probe frequency will be locked, and the Z voltage will become +180V (normally it is +180V, at which point the frequency is locked, and the needle insertion operation can be performed). At this time, you can select the needle insertion operation.

[0029] See Figure 2 As shown, (b) is the automatic frequency modulation resonance feedback waveform of the new scanning tube, and (c) is the interface diagram of the standard Z-axis voltage (+180V) parameters.

[0030] S13. After performing the needle insertion operation, start the grating scan, observe and record the flat straight standard trajectory through a low-magnification optical microscope, save the frequency modulation waveform and reference voltage data to establish a standard database, and use the standard database as a reference.

[0031] See Figure 2 As shown, (d) is a standard flat linear scanning motion trajectory diagram, which serves as the comparison benchmark for all faulty scanning tubes.

[0032] S2. Classify the damage of the scanning tube by classifying the damage into different categories based on the appearance defects and abnormal power-on phenomena of the scanning tube.

[0033] Category 1: Reference Figure 3 As shown, (a) is morphology 1. Morphology 1 is described as having no damage or looseness at the bottom connection of the scanning tube, and having abnormal current noise when powered on.

[0034] Category 2: See also Figure 3 As shown, (b) is morphology 2, which is described as a loose connection between the bottom base of the scanning tube and the device housing. The loosening types are divided into the first loosening type and the second loosening type.

[0035] The criteria for classifying loosened types in Category 2 are as follows: A gap length less than 1 / 4 of the pipe bottom circumference is classified as the first type of loosening.

[0036] A gap length greater than or equal to 1 / 4 of the pipe bottom circumference is classified as the second type of loosening.

[0037] Category 3: See also Figure 3 As shown, (c) is morphology 3, which is described as the separation of the metal substrate at the top or bottom of the scanning tube from the interface of the gray piezoelectric ceramic.

[0038] Category 4: See also Figure 3 As shown, (d) is morphology 4, which is described as the fracture of the gray piezoelectric ceramic tube body of the scanning tube.

[0039] S3. Test each type of damage scanning tube on the machine, collect three quantitative parameters: frequency modulation and locking status, Z-axis voltage value, and scanning trajectory shape, and establish the correspondence between damage type and system electrical signal and motion trajectory.

[0040] The quantitative characteristics of various damage scanning tubes tested on the machine are as follows: Category 1: Frequency modulation can lock normally, Z-axis voltage is maintained at +180V, scanning trajectory is the first curved curve, and abnormal current noise is accompanied by power-on.

[0041] Category 2, first loosening type: normal frequency modulation and locking, Z-axis voltage +180V, scanning trajectory is the second curved curve.

[0042] The first curved curve has a larger radian than the second curved curve, and the radian represents the maximum deflection angle of the trajectory. The first curved curve is a large-radian curve, with a radian range of 0.01 rad to 0.05 rad. The second curved curve is a slightly curved curve, with a radian range of 0.001 rad to 0.01 rad.

[0043] Category 2, second loosening type; Category 3 and Category 4: Frequency modulation cannot lock the resonance signal, Z-axis voltage jumps to -180V, and needle insertion and scanning operations cannot be performed.

[0044] In this embodiment, a near-field imaging system is used to analyze the classified scanning tubes.

[0045] See Figure 4 As shown, the Type 1 fault scanning tube (i.e., Type 1) exhibits abnormal current sound after power-on. The frequency modulation and Z-axis voltage parameters are normal, and scanning operations can be performed. However, the movement trajectory is significantly deformed during scanning, and the overall travel path has a noticeable arc. Figure 4 (a) is the waveform diagram under normal frequency modulation conditions, (b) is the interface diagram of standard Z-axis voltage (+180V) parameters, and (c) is the trajectory diagram of the scanning trajectory being the first curved curve.

[0046] The first type of loosening fault scanning tube in Category 2 (i.e., Type 2-1) has normal frequency modulation and Z-axis voltage parameters and can perform scanning operations, but the movement trajectory is slightly deformed during scanning and the overall travel path has a small twist. Figure 4 (d) is the waveform diagram under normal frequency modulation conditions, (e) is the interface diagram of standard Z-axis voltage (+180V) parameters, and (f) is the trajectory diagram of the scanning trajectory being the second curved curve.

[0047] Category 2, type 2 loosening fault scanning tube (i.e., type 2-2): The scanning tube frequency is abnormal, unable to lock the probe frequency, and the Z-axis voltage parameter changes to -180V. At this time, the needle insertion operation cannot be performed, and the running trajectory cannot be scanned and recorded. Figure 4 In the diagram, (g) is the waveform diagram when frequency modulation fails, and (h) is the interface diagram of the Z-axis voltage (-180V) parameter. Since frequency modulation cannot be performed, scanning is not possible, so a trajectory diagram cannot be formed.

[0048] For the faulty scanning tube in type 3 (i.e. category 3), the scanning tube frequency modulation is abnormal, the probe frequency cannot be locked, and the Z-axis voltage parameter changes to -180V. At this time, the needle insertion operation cannot be performed, and the running trajectory cannot be scanned and recorded. Figure 4 In the diagram, (i) is the waveform diagram when frequency modulation fails, and (j) is the interface diagram of the Z-axis voltage (-180V) parameter. Since frequency modulation cannot be performed, scanning is not possible, so a trajectory diagram cannot be formed.

[0049] For the faulty scanning tube in type 4 (i.e. category 4), the scanning tube frequency modulation is abnormal, the probe frequency cannot be locked, and the Z-axis voltage parameter changes to -180V. At this time, the needle insertion operation cannot be performed, and the running trajectory cannot be scanned and recorded. Figure 4 In the diagram, (k) represents the waveform when frequency modulation fails, and (m) represents the Z-axis voltage (-180V) parameter interface. Since frequency modulation cannot be performed, scanning is not possible, and therefore a trajectory diagram cannot be formed.

[0050] S4. Based on the detection parameters from step S3, determine the type of damage to the scanning tube and match the corresponding repair plan to complete the repair and calibration.

[0051] The repair solution for the scanning tube corresponding to category 1 is as follows: disassemble the faulty scanning tube, determine that the cause of the fault is excessive current that breaks down the internal ceramic electrode, return it to the factory to replace it with a brand new gray ceramic tube, and reuse it after completing the calibration of the resonant frequency and Z-axis scaling coefficient.

[0052] The repair solutions for the scanning tubes of the first and second loosening types corresponding to Category 2 are as follows: No need to return to the factory; they can be re-fixed by the user. On-site, re-tighten the adhesive base and shell, adjust the amount of fixing material according to the size of the loose gap, ensure the connection contact surface is completely flat, and after curing, re-install the machine to complete frequency tuning and Z-axis parameter calibration before use.

[0053] The repair plan for the ceramic interface detachment scanning tube in Category 3 is as follows: return to the factory to re-bond and fix the detached interface between the metal substrate and the gray ceramic at high temperature, detect whether there are microcracks in the ceramic body, and return it for use after all parameters are calibrated and qualified.

[0054] The repair solution for the gray ceramic fracture scanning tube in category 4 is as follows: the ceramic body structure is irreversibly damaged, so the whole gray piezoelectric ceramic tube is returned to the factory for replacement, and then reused after completing the full set of frequency modulation, Z-axis and scanning trajectory calibration.

[0055] In this embodiment, by establishing a new scanning tube frequency lock state and movement trajectory as a reference, and combining the near-field imaging system to perform multi-dimensional analysis of the scanning tube, a systematic and standardized judgment of the damage of the scanning tube probe tip is realized, effectively solving the problem of lacking a standard for judging scanning tube damage in the prior art.

[0056] The system categorizes damage and provides targeted repair solutions, avoiding the waste of resources caused by blindly replacing scanning tubes. The operation process is simple and the judgment results are accurate and reliable.

[0057] Specifically, this application establishes a new standardized reference library for intact scanning tubes, using linear trajectories, standard frequency modulation signals, and +180V reference Z-axis voltage as comparisons to achieve visualization and quantitative judgment of latent internal damage, effectively reducing the fault misjudgment rate.

[0058] A standardized damage grading system of four types is constructed to facilitate the differentiation of different faults such as current breakdown with intact appearance, loose casing, ceramic debonding, and ceramic fracture, making fault tracing clear. Furthermore, a joint judgment is made using four dimensions: appearance, frequency modulation signal, Z-axis voltage, and scanning trajectory, avoiding the limitations of relying solely on visual observation of the faulty scanning tube, and accurately identifying latent damage such as current breakdown without visible defects.

[0059] For the repair of faulty scanning tubes, a graded matching repair scheme is adopted. Minor loosening faults can be repaired on-site without returning to the factory, which greatly shortens the equipment downtime. For ceramic fracture and current breakdown faults, the ceramic tube is replaced in a unified manner to eliminate hidden dangers and balance operation and maintenance costs with equipment lifespan.

[0060] The entire process relies on the native software of the near-field system and the standard low-magnification microscope. No additional testing instruments are required. It is simple to operate, highly versatile, and compatible with the full range of terahertz near-field scanning probe systems.

[0061] The above-disclosed embodiments are merely a few specific examples of the present invention. However, the embodiments of the present invention are not limited thereto, and any variations that can be conceived by those skilled in the art should fall within the protection scope of the present invention.

Claims

1. A method for determining and repairing damage to scanning tubes in near-field systems, characterized in that, Includes the following steps: S1. Calibrate the reference, assemble a brand new and intact scanning tube onto the near-field imaging system moving platform, lock the probe resonant frequency through system software, record the standard scanning stage motion trajectory with an optical microscope, and simultaneously acquire the standard frequency modulation signal and the reference Z-axis voltage as a reference. S2. Classify the damage of the scanning tube by classifying the damage of the scanning tube into different categories based on the appearance defects and abnormal power-on phenomena. S3. Test each type of damage scanning tube on the machine, collect three quantitative parameters: frequency modulation and locking status, Z-axis voltage value, and scanning trajectory shape, and establish the correspondence between damage type and system electrical signal and motion trajectory. S4. Based on the detection parameters from step S3, determine the type of damage to the scanning tube and match the corresponding repair plan to complete the repair and calibration.

2. The method as described in claim 1, characterized in that, The specific operation steps of S1 are as follows: S11. Assemble the new and intact scanning tube onto the needle moving platform, turn on the in-field imaging system software, turn on the laser, and adjust the Z-scaling coefficient parameter. S12. Start automatic frequency modulation to capture the probe resonance signal and lock the frequency. After successful frequency locking, the Z-axis voltage stabilizes at +180V. S13. After performing the needle insertion operation, start the grating scan, observe and record the straight standard trajectory through the optical microscope, save the frequency modulation waveform and reference voltage data to establish a standard database, and use the standard database as a reference.

3. The method as described in claim 2, characterized in that, The specific criteria for classifying scanning tube damage categories in S2 are as follows: Category 1: The bottom connection of the scanning tube is not damaged or loose, but there is an abnormal current sound when powered on; Category 2: The connection between the bottom base of the scanning tube and the equipment housing is loose. The loosening is divided into two types: Type 1 loosening and Type 2 loosening. Category 3: The metal substrate at the top or bottom of the scanning tube separates from the interface between the metal substrate and the gray piezoelectric ceramic. Category 4: The gray piezoelectric ceramic tube body of the scanning tube is broken.

4. The method as described in claim 3, characterized in that, The criteria for classifying loosening types in Category 2 are as follows: A gap length less than 1 / 4 of the pipe bottom circumference is classified as the first type of loosening. A gap length greater than or equal to 1 / 4 of the pipe bottom circumference is classified as the second type of loosening.

5. The method as described in claim 3, characterized in that, In S3, the quantitative characteristics of various damage scanning tubes tested on the machine are as follows: Category 1: Frequency modulation can lock normally, Z-axis voltage is maintained at +180V, scanning trajectory is the first curved curve, and abnormal current noise is accompanied by power-on. Category 2, first loosening type: normal frequency modulation and locking, Z-axis voltage +180V, scanning trajectory is the second curved curve; Category 2, second loosening type; Category 3 and Category 4: Frequency modulation cannot lock the resonance signal, Z-axis voltage jumps to -180V, and needle insertion and scanning operations cannot be performed.

6. The method as described in claim 1, characterized in that, In S4, the scanning tube repair scheme corresponding to category 1 is as follows: disassemble the faulty scanning tube, determine that the cause of the fault is excessive current breaking down the internal ceramic electrode, replace it with a brand new gray piezoelectric ceramic tube, and reuse it after completing the calibration of the resonant frequency and Z-axis scaling coefficient.

7. The method as described in claim 3, characterized in that, In S4, the scanning tube repair scheme corresponding to category 2 is as follows: on-site re-tighten the adhesive base and the outer shell, adjust the amount of fixing material according to the size of the loose gap, ensure that the connection contact surface is completely flat, and after curing, re-install the machine to complete frequency tuning and Z-axis parameter calibration.

8. The method as described in claim 3, characterized in that, In S4, the repair scheme for the ceramic interface detachment scanning tube of category 3 is as follows: the metal substrate and the gray ceramic detachment interface are re-bonded and fixed at high temperature, the ceramic body is inspected for microcracks, and the tube is returned for use after all parameters are calibrated and qualified.

9. The method as described in claim 3, characterized in that, In S4, the repair solution for the gray ceramic broken scanning tube of category 4 is as follows: replace the entire gray piezoelectric ceramic tube with a brand new one, and reuse it after completing the full set of frequency modulation, Z-axis, and scanning trajectory calibration.

10. The method as described in claim 5, characterized in that, The curvature of the first curved curve is greater than that of the second curved curve.

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