Detection device, detection method, and exposure apparatus

Abstract

The application relates to a detection device, a detection method and an exposure apparatus. The detection device comprises a body, a detector, a sealing layer, a light guide layer, a temperature guide layer and a temperature adjusting assembly. The body defines a containing cavity with a top opening. A photosensitive element of the detector is arranged in the containing cavity. The sealing layer is sealingly connected to the opening to seal the containing cavity. The sealing layer is arranged to be capable of transmitting at least part of the to-be-detected laser light incident into the containing cavity through the opening. The light guide layer is arranged between the sealing layer and the photosensitive element. The refractive index of the light guide layer is smaller than that of the sealing layer. The temperature guide layer is arranged between the light guide layer and the photosensitive element. The temperature adjusting assembly is used for heating or cooling the temperature guide layer. The refractive index of the temperature guide layer is smaller than that of the light guide layer. The temperature of the light guide layer and the temperature of the temperature guide layer positively change, so that the temperature of the light guide layer can be changed by the temperature change of the temperature guide layer, and the refractive index of the light guide layer can be changed. The detection device has better detection precision.

Description

Technical Field

[0001] This application relates to the field of projection exposure technology, and in particular to a detection device, detection method and exposure equipment. Background Technology

[0002] In immersion projection lithography (IPL) equipment, beam monitoring is crucial, directly impacting exposure quality and chip yield. By monitoring the beam profile and power, it's possible to ensure the beam remains in optimal condition during exposure, thereby improving lithography accuracy and resolution. High-precision beam monitoring can effectively reduce chip manufacturing problems caused by equipment deviations, such as underexposure or overexposure, thus lowering the defect rate.

[0003] Exposure equipment in related technologies typically monitors the light beam through a detection device. However, the detection accuracy of the detection device in related technologies is low, which can easily lead to low exposure accuracy and affect the exposure quality. Summary of the Invention

[0004] Therefore, it is necessary to provide a detection device, detection method, and exposure equipment to address the problem that the detection accuracy of the detection device in the exposure equipment in the related technology is low, which easily leads to low exposure accuracy of the exposure equipment and affects the exposure quality.

[0005] According to one aspect of this application, a detection apparatus is provided, the detection apparatus comprising:

[0006] The body defines a receiving cavity with a top opening for the laser to be tested to pass through;

[0007] The detector includes a photosensitive element, which is disposed within the receiving cavity and faces the opening;

[0008] A sealing layer is sealed to the opening to close the receiving cavity; the sealing layer is configured to allow at least a portion of the laser to be detected to pass through the opening into the receiving cavity.

[0009] A light guide layer is disposed between the sealing layer and the photosensitive element, wherein the refractive index of the light guide layer is less than the refractive index of the sealing layer; and

[0010] A temperature-conducting layer and a temperature-regulating component are provided, wherein the temperature-conducting layer is disposed between the light-guiding layer and the photosensitive element, and the temperature-regulating component is used to heat or cool the temperature-conducting layer; the refractive index of the temperature-conducting layer is less than the refractive index of the light-guiding layer.

[0011] The temperature of the light guide layer changes in a positive correlation with the temperature of the thermal guide layer, so that the temperature of the light guide layer can be changed by the temperature change of the thermal guide layer, and the refractive index of the light guide layer can be changed.

[0012] In one embodiment, the detection device further includes a refractive layer disposed between the light guide layer and the heat-conducting layer; the refractive index of the refractive layer is greater than the refractive index of the light guide layer.

[0013] In one embodiment, the refractive index n1 of the sealing layer satisfies: 1.5≤n1≤1.9, the refractive index n2 of the light guide layer satisfies: 1.457≤n2≤1.475, the refractive index n3 of the refracting layer satisfies: 1.5≤n3≤2.0, and the refractive index n4 of the heat-conducting layer satisfies: 1.33≤n4≤1.45.

[0014] In one embodiment, along the thickness direction of the light guide layer, the dimension a1 of the light guide layer satisfies: 0.47≤a1≤1.53mm, the dimension a2 of the light refraction layer satisfies: 0.86um≤a2≤1.4um, the dimension a3 of the sealing layer satisfies: 0.7mm≤a3≤2mm, and the dimension a4 of the heat-conducting layer satisfies: 0.9mm≤a4≤2.4mm.

[0015] In one embodiment, the temperature-conducting layer includes a temperature-conducting liquid filled in the receiving cavity; the temperature-regulating assembly includes a circulation pipeline, a circulation pump, a condenser, and a heater, the input and output ends of the circulation pipeline are respectively connected to the receiving cavity and used to circulate the temperature-conducting liquid, and the circulation pump and the condenser are respectively disposed on the circulation pipeline;

[0016] The heater is located on the periphery of a portion of the circulation pipeline; or, the heater is located on the periphery of the heat-conducting layer; one of the heater and the condenser is in the on state.

[0017] In one embodiment, the body includes an inner shell and an outer shell, the inner shell defining the receiving cavity, the light guiding layer and the heat guiding layer being sequentially stacked inside the inner shell; the outer shell is fitted over the outer shell and defines a sealed cavity between the outer shell and the inner shell.

[0018] The detector includes a photosensitive element and a body connected to each other, the body being disposed within the sealed cavity.

[0019] In one embodiment, the light guide layer is filled with inorganic particles or metal oxides, wherein the inorganic particles include titanium dioxide and the metal oxides include zinc oxide.

[0020] According to another aspect of this application, a detection method is provided, which uses the detection device described in any of the above embodiments for detection, the detection method comprising:

[0021] The laser to be detected is controlled to pass sequentially through the sealing layer, the light guide layer and the temperature guide layer, and then incident on the photosensitive element of the detector;

[0022] The operating temperature of the temperature-conducting layer is determined based on the functional relationship between the temperature of the temperature-conducting layer and the energy of the laser to be detected; wherein, when the temperature-conducting layer is at the operating temperature, the energy of the laser to be detected received by the detector is the maximum.

[0023] In one embodiment, before determining the operating temperature of the temperature-conducting layer based on the functional relationship between the temperature of the temperature-conducting layer and the energy of the laser to be detected, the method further includes:

[0024] The temperature of the thermal conductive layer is adjusted by the temperature control component, and the energy of the laser to be detected is obtained when the temperature of the thermal conductive layer is at different values.

[0025] Obtain the functional relationship between the temperature of the thermally conductive layer and the energy of the laser to be detected.

[0026] According to another aspect of this application, an exposure apparatus is also provided, including the detection device described in any of the above embodiments.

[0027] The aforementioned detection device seals the photosensitive element of the detector within its body using a sealing layer. This sealing structure effectively prevents external moisture, humidity, and dust from intruding into the photosensitive element, avoiding corrosion or contamination and thus extending its service life. Furthermore, this application uses a light guide layer and a temperature guide layer to guide the laser light to be detected through the sealing layer, ensuring a smooth transition. It is understood that the internal structure of a typical detector is sealed, and the refractive index of its internal medium is lower than that of the sealing element, with a significant difference between the two. This can lead to total internal reflection of incident light, affecting the final detection accuracy. This application sets the refractive index of the light guide layer to be lower than that of the sealing layer but higher than that of the temperature guide layer. As the laser light to be detected passes through the sealing layer, light guide layer, and temperature guide layer sequentially, and finally through the photosensitive element into the detector, the refractive index of the medium it passes through gradually decreases, allowing for a smooth transition and reducing abrupt changes in the propagation path or even total internal reflection. This allows more light to enter the detector smoothly, reducing propagation loss of the laser light and improving the detection accuracy. Simultaneously, this application also includes a temperature control component. By adjusting the temperature of the heat-conducting layer, the temperature of the light guide layer can be changed, allowing for flexible adjustment of the refractive index of the light guide layer. This facilitates adapting the refractive index of the light guide layer to the detection of the laser under test. For example, by continuously adjusting the temperature of the heat-conducting layer to change its refractive index, and detecting the energy of the laser under test at different temperatures of the heat-conducting layer, the operating temperature of the heat-conducting layer can be determined. This allows for multiple subsequent tests of the laser under test at that temperature, improving detection accuracy. It can be understood that the refractive index of the light guide layer is most appropriate when the heat-conducting layer is at its operating temperature. At this temperature, the energy of the laser under test received by the detector is maximized, meaning that the loss of the laser under test through the sealing layer, light guide layer, and heat-conducting layer is minimized, and the detection result is closest to the original energy of the laser under test. Thus, the adjustable refractive index of the light guide layer, combined with the settings of the sealing layer, light guide layer, and heat-conducting layer for the laser under test, significantly improves the detection accuracy of the laser under test. Attached Figure Description

[0028] Figure 1 This is a schematic diagram of the structure of the detection device in one embodiment of the present application, in which the heater is located on the periphery of a portion of the circulation pipeline.

[0029] Figure 2 This is a schematic diagram of the structure of the detection device in one embodiment of the present application, showing the heater disposed on the periphery of the heat-conducting layer.

[0030] Figure 3 This is a schematic diagram of the optical path of the laser to be detected passing through the sealing layer, the light guide layer and the temperature guide layer in sequence in one embodiment of this application.

[0031] Figure 4This is a schematic diagram of a detection device with a refractive layer in one embodiment of this application.

[0032] Figure 5 This is a schematic diagram of the structure of a detection device with a filter layer in one embodiment of this application.

[0033] Figure 6 This is a flowchart illustrating the detection method in one embodiment of this application.

[0034] Explanation of icon numbers:

[0035] 10. Detection device;

[0036] 100. Body; 110. Inner shell; 120. Outer shell;

[0037] 200. Detector; 210. Photosensitive element; 220. Main body;

[0038] 310. Sealing layer; 320. Light guide layer; 330. Temperature guide layer; 340. Refractive layer;

[0039] 350. Temperature control assembly; 351. Circulation pipeline; 352. Circulation pump; 353. Condenser; 354. Heater; 360. Filter layer. Detailed Implementation

[0040] To make the above-mentioned objectives, features, and advantages of this application more apparent and understandable, the specific embodiments of this application are described in detail below with reference to the accompanying drawings. Many specific details are set forth in the following description to provide a thorough understanding of this application. However, this application can be implemented in many other ways different from those described herein, and those skilled in the art can make similar modifications without departing from the spirit of this application. Therefore, this application is not limited to the specific embodiments disclosed below.

[0041] In the description of this application, it should be understood that if terms such as "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential" appear, these terms indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this application.

[0042] Furthermore, where the terms "first" and "second" appear, these terms are for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined with "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this application, where the term "multiple" appears, "multiple" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0043] In this application, unless otherwise expressly specified and limited, the terms "installation," "connection," "joining," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components, unless otherwise expressly limited. Those skilled in the art can understand the specific meaning of the above terms in this application based on the specific circumstances.

[0044] In this application, unless otherwise expressly specified and limited, the use of descriptions such as "above" or "below" the second feature indicates that the first and second features are in direct contact or indirect contact via an intermediate medium. Furthermore, "above," "on top of," and "over" the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply that the first feature is at a higher horizontal level than the second feature. Similarly, "below," "below," and "under" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply that the first feature is at a lower horizontal level than the second feature.

[0045] It should be noted that if an element is referred to as being "fixed to" or "set on" another element, it can be directly on the other element or there may be an intervening element. If an element is considered to be "connected to" another element, it can be directly connected to the other element or there may be an intervening element. If so, the terms "vertical," "horizontal," "upper," "lower," "left," "right," and similar expressions used in this application are for illustrative purposes only and do not represent the only possible implementation.

[0046] In immersion projection lithography (IPL) equipment, the detection of the exposure beam is crucial. By monitoring the beam's profile and power, it's possible to ensure the beam remains in optimal condition during exposure, thereby improving the precision and resolution of the lithography process. High-precision beam monitoring can effectively reduce chip manufacturing problems caused by equipment deviations, such as underexposure or overexposure, thus lowering the defect rate.

[0047] However, achieving high-precision beam monitoring is extremely difficult. Due to the unique immersion environment of liquid projection exposure equipment, the beam propagates in a space filled with liquid medium, and the optical properties of the liquid affect the beam's propagation path and stability. The scattering and refraction phenomena of the beam in the liquid medium are complex, making it very difficult to accurately capture and analyze the original characteristics of the beam. Simultaneously, the detection device in the liquid immersion system needs to be adapted to a high numerical aperture optical system and operate stably in a liquid environment, placing extremely high demands on the design and performance of the detection device. Therefore, achieving high-precision beam monitoring in liquid projection exposure equipment requires overcoming numerous technical challenges. Detection devices in related liquid projection exposure equipment often struggle to overcome these difficulties, resulting in lower monitoring accuracy.

[0048] Based on this, this application provides a detection device, a detection method, and an exposure device to achieve better detection accuracy.

[0049] In some embodiments, see Figure 1 and Figure 2 As shown, Figure 1 This is a schematic diagram of the structure of the heater 354 of the detection device 10 in one embodiment of the present application, which is located on the periphery of a portion of the circulation pipe 351. Figure 2 This is a schematic diagram of the structure of the heater 354 of the detection device 10 in one embodiment of this application, which is disposed on the periphery of the heat-conducting layer 330.

[0050] The detection device 10 provided in this application includes a body 100, a detector 200, a sealing layer 310, a light guide layer 320, a temperature guide layer 330, and a temperature control component 350. The body 100 defines a receiving cavity with a top opening, which is used to house the sealing layer 310, the light guide layer 320, and the temperature guide layer 330. The opening is used to allow the laser to be detected to pass through. In this embodiment, the inner wall of the receiving cavity may be coated with a black film layer to avoid stray light from being repeatedly reflected within the receiving cavity, thus affecting the detection accuracy of the laser to be detected.

[0051] The detector 200 includes a photosensitive element 210, which is disposed in the receiving cavity and facing the opening. The laser to be detected enters through the opening and finally passes through the photosensitive element 210 into the detector 200 for detection.

[0052] The sealing layer 310 is sealed to the opening to close the receiving cavity. The sealing layer 310 is configured to allow at least a portion of the laser light to be detected to pass through the opening into the receiving cavity. The sealing structure effectively prevents external moisture, humidity, and dust from entering the photosensitive element 210, avoiding corrosion or contamination of the photosensitive element 210, thereby extending its service life.

[0053] A light guide layer 320 is disposed between the sealing layer 310 and the photosensitive element 210, and a heat-conducting layer 330 is disposed between the light guide layer 320 and the photosensitive element 210. Thus, the light guide layer 320 and the heat-conducting layer 330 are sequentially stacked between the sealing layer 310 and the photosensitive element 210. In this embodiment, the sealing layer 310, the light guide layer 320, and the sealing layer 310 are all layer structures with a rectangular cross-section.

[0054] Furthermore, the refractive index of the light guide layer 320 is lower than that of the sealing layer 310, and the refractive index of the heat-conducting layer 330 is lower than that of the light guide layer 320. (See also...) Figure 2 As shown, the laser to be tested sequentially passes through the sealing layer 310, the light guide layer 320, and the temperature-conducting layer 330. When the laser enters the sealing layer 310, it enters from an optically less dense medium into an optically denser medium. At this time, the angle of refraction b1 of the light is less than the angle of incidence a1, and the light is deflected inward. After entering the sealing layer 310, when the laser enters the light guide layer 320, it enters from an optically denser medium into an optically less dense medium. At this time, the angle of incidence a2 of the light is equal to the angle of refraction b1, and the angle of refraction b2 is greater than the angle of incidence a2, and the light is deflected outward. After entering the light guide layer 320, when the laser enters the temperature-conducting layer 330, it enters from an optically denser medium into an optically less dense medium. At this time, the angle of incidence a3 of the light is equal to the angle of refraction b2, and the angle of refraction b3 is greater than the angle of incidence a3, and the light is deflected outward.

[0055] Thus, the refractive indices of the sealing layer 310, light guide layer 320, and temperature-conducting layer 330 decrease sequentially, allowing light to pass smoothly and gradually through these layers. It's understandable that the detector 200 typically has a sealed interior, where the refractive index of the internal medium is significantly lower than that of the sealing element. This abrupt change in the light's propagation path and angle alters key factors such as focusing and imaging position. In some cases, total internal reflection can occur, affecting the final detection accuracy. This is particularly problematic for light intensity detection. The abrupt change in the propagation path of the laser leads to excessive energy loss, resulting in inaccurate detection of laser intensity. Furthermore, the abrupt change in the propagation path can cause some light rays to deviate, affecting the detection of the laser spot morphology. The above-mentioned settings in this application enable a smooth transition of light, which helps to reduce phase difference and distortion during light propagation, allowing light to enter the detector 200 smoothly and smoothly, thereby reducing light propagation loss and improving detection accuracy.

[0056] The temperature regulating component 350 is used to heat or cool the temperature-conducting layer 330. The temperature of the light guide layer 320 changes in a positive correlation with the temperature of the temperature-conducting layer 330, thus changing the temperature of the light guide layer 320 and its refractive index. By adjusting the temperature of the temperature-conducting layer 330 through the temperature regulating component 350 and through heat conduction between the temperature-conducting component and the light guide layer 320, the temperature of the light guide layer 320 is changed. When the temperature of the temperature-conducting layer 330 increases, the temperature of the light guide layer 320 also increases due to heat conduction; conversely, when the temperature of the temperature-conducting layer 330 decreases, the temperature of the light guide layer 320 also decreases due to heat conduction. This, in turn, changes the refractive index of the light guide layer 320, achieving adjustment of its refractive index.

[0057] During the detection process, the temperature of the temperature-conducting layer 330 is continuously adjusted by the temperature-regulating component 350 to change the refractive index of the light-guiding layer 320. The energy of the laser to be tested is detected at different temperatures (or at different refractive indices) of the temperature-conducting layer 330. This comparison determines the operating temperature of the temperature-conducting layer 330, facilitating multiple subsequent tests of the laser to be tested at that temperature and improving detection accuracy. It can be understood that when the temperature-conducting layer 330 is at its operating temperature, the refractive index of the light-guiding layer 320 is most appropriate. At this temperature, the energy of the laser to be tested received by the detector 200 is at its maximum. In other words, the loss of the laser to be tested through the sealing layer 310, the light-guiding layer 320, and the temperature-conducting layer 330 is minimized, and the detection result is closest to the original energy of the laser to be tested. This significantly improves the detection accuracy of the detection device 10.

[0058] The detection device 10 of this application guides the laser light to be detected through the sealing layer 310 via the light guide layer 320 and the temperature guide layer 330, making the light transition smoothly. This helps reduce phase difference and distortion during light propagation, allowing the light to enter the detector 200 smoothly and thus improving detection accuracy. Simultaneously, this application also includes a temperature adjustment component 350, which adjusts the temperature of the temperature guide layer 330, thereby adjusting the temperature of the light guide layer 320. This allows for flexible adjustment of the refractive index of the light guide layer 320, making it suitable for detecting the laser light and ensuring the detector 200 receives the most accurate energy. Thus, the adjustable refractive index of the light guide layer 320, combined with the sealing layer 310, the light guide layer 320, and the temperature guide layer 330, significantly improves the detection accuracy of the laser light.

[0059] In some embodiments, see Figure 4 As shown, Figure 4This is a schematic diagram of the structure of a detection device 10 with a refractive layer 340 in one embodiment of this application. The detection device 10 further includes a refractive layer 340, which is disposed between a light guide layer 320 and a heat-conducting layer 330. The refractive index of the refractive layer 340 is greater than that of the light guide layer 320. It can be understood that the refractive indices of the sealing layer 310, the light guide layer 320, and the heat-conducting layer 330 decrease sequentially. Therefore, the propagation of light through the sealing layer 310, the light guide layer 320, and the heat-conducting layer 330 generally tends to be deflected outwards. Setting a refractive layer 340 with a refractive index greater than that of the light guide layer 320 can reduce the divergence angle of the light, which is beneficial to improving the collimation and directionality of the light beam, making the light beam more stable and concentrated in the subsequent transmission process, reducing energy loss and aberrations of the light beam during transmission, and significantly improving detection accuracy.

[0060] In some embodiments, the refractive index n1 of the sealing layer 310 satisfies: 1.5 ≤ n1 ≤ 1.9. Within this refractive index range, the sealing layer 310 can better control the propagation path of light, reduce light scattering and reflection, and make the light beam more focused and stable, which helps to improve the accuracy of photolithography. Satisfying the above range is beneficial for optimizing the interface transmission of light between the sealing layer 310 and the surrounding medium, such as the light guide layer 320, reducing reflection loss, thereby improving the transmittance of light, ensuring that more light can reach the photosensitive element 210 of the detector 200, and improving detection efficiency and signal strength.

[0061] The refractive index n2 of the light guide layer 320 satisfies: 1.457 ≤ n2 ≤ 1.475. Within this refractive index range, the light guide layer 320 helps optimize the focusing characteristics of light, enabling the light to form a clearer and more concentrated spot on the photosensitive element 210 of the detector 200, thus improving image quality. This is particularly important in the laser detection process of high-precision photolithography, as it facilitates precise light transmission and focusing, thereby improving detection accuracy. Simultaneously, edible oil materials within the aforementioned refractive index range possess high transparency and good optical uniformity, which helps improve the efficient transmission of light within the light guide layer 320, reduces light absorption and scattering, and enhances the stability and accuracy of the optical signal received by the detector 200.

[0062] The refractive index n3 of the refractive layer 340 satisfies the condition: 1.5 ≤ n3 ≤ 2.0. This refractive index range, being similar to that of the light guide layer 320, facilitates a smooth transition of light passing through both layers, reducing the deflection angle and propagation loss. Furthermore, when light enters the refractive layer 340 from the lower refractive index of the light guide layer 320, the reflectivity is relatively low, further minimizing light loss. In addition, the refractive index of the refractive layer 340, between 1.5 and 2.0, significantly improves the focusing ability of the light beam, allowing it to be more tightly deflected towards the center. This reduces the diffusion of the laser beam during propagation, improves its utilization rate, and enhances the detection accuracy.

[0063] The refractive index n4 of the thermally conductive layer 330 satisfies: 1.33≤n4≤1.45. Thermally conductive liquids within this refractive index range, such as pure water or fluorine-based inactive liquids, exhibit relatively good physical and chemical stability and are less prone to deterioration, aging, or reaction with the surrounding medium during use, thus ensuring the long-term stable operation and reliability of the detection device 10.

[0064] The refractive indices n1 of the sealing layer 310, n2 of the light-guiding layer 320, n3 of the refractive layer 340, and n4 of the heat-conducting layer 330 all meet the aforementioned ranges. With appropriate refractive indices for each layer and a small difference in refractive indices between adjacent layers, this helps reduce light reflection loss at the interface between adjacent layers. According to Fresnel's formula, reflectivity is related to the difference in refractive indices between the two media; the smaller the difference, the lower the reflectivity. This means that more light can pass through the interface, reducing energy loss and improving the overall transmittance of the optical system. This, in turn, allows the photosensitive element 210 to fully receive the laser light to be detected, reducing losses during laser propagation and improving the detection accuracy of the detector 200.

[0065] In this embodiment, the sealing layer 310 can be made of transparent glass, and the light guide layer 320 can be made of transparent edible oil, such as soybean oil, peanut oil and rapeseed oil, which all fall into the category of transparent edible oils. Rapeseed oil, in particular, is clear and transparent, without turbidity, sediment and suspended matter when the temperature is above 20°C.

[0066] The thermally conductive layer 330 can be formed by filling the cavity with a thermally conductive liquid. This liquid can be the same as the liquid used in the exposure equipment, such as pure water or a fluorine-based inactive liquid, which is used between the substrate and the optical system. For example, if pure water is used between the substrate and the optical system, the thermally conductive layer 330 will also use pure water; similarly, if a fluorine-based inactive liquid is used, the thermally conductive layer 330 will also use that same fluorine-based inactive liquid. This allows the thermally conductive layer 330 to not only conduct and refract light but also simulate the actual exposure environment, further improving detection accuracy. Furthermore, the density of the light-guiding layer 320 using transparent edible oil is lower than that of the thermally conductive layer 330 using an inert liquid. Therefore, when both the transparent edible oil and the inert liquid are placed in the cavity, the transparent edible oil will automatically float on top of the inert liquid, automatically separating to form the light-guiding layer 320 and the thermally conductive layer 330, facilitating the fabrication of the detection device 10.

[0067] In this embodiment, the refractive layer 340 can be made of indium tin oxide (ITO). ITO has a relatively stable structure, which can conduct temperature changes from the temperature-conducting layer 330 to the light-conducting layer 320, and is not easily affected by temperature changes. Simultaneously, the ITO refractive layer 340 possesses sufficient mechanical strength and good chemical stability. When positioned between the light-conducting layer 320 and the temperature-conducting layer 330, it can effectively separate the two layers, reducing the risk of interference between them.

[0068] In some embodiments, along the thickness direction of the light guide layer 320, the dimension a1 of the light guide layer 320 satisfies: 0.47≤a1≤1.53mm. If the above range is met, the light guide layer 320 can have good optical performance. While meeting the deflection requirements of the laser to be detected, it reduces the absorption of the laser to be detected by the light guide layer 320, which is beneficial to improving the transmittance of the laser to be detected, thereby improving the detection accuracy of the laser to be detected.

[0069] The dimension a2 of the refractive layer 340 satisfies: 0.86um≤a2≤1.4um. Meeting the above range gives the refractive layer 340 better transmittance and refractive index, reducing light loss during the deflection of the laser to be detected. At the same time, the refractive layer 340 has suitable mechanical strength and good chemical stability. Especially for the refractive layer 340 made of indium tin oxide, meeting the above thickness dimension is beneficial to keep the refractive layer 340 in a suitable thickness range to reduce light loss, and has sufficient hardness or strength to be separated between the light guide layer 320 and the heat conduction layer 330.

[0070] The size a3 of the sealing layer 310 satisfies: 0.7mm≤a3≤2mm. Since the sealing layer 310 meets the above range, it can effectively protect the light guide layer 320, the heat guide layer 330 and the photosensitive element 210 inside the body 100, and can also reduce the impact on the propagation of the light beam, which is conducive to reducing the loss of the light beam by the sealing layer 310.

[0071] The dimension a4 of the thermally conductive layer 330 satisfies: 0.9mm ≤ a4 ≤ 2.4mm. Meeting this range helps reduce the absorption of light by the liquid within the thermally conductive layer 330, and this range also helps maintain the stability of the light beam passing through the thermally conductive layer 330, avoiding beam scattering and absorption problems caused by improper liquid thickness. This reduces the absorption and scattering of the laser light under test by the thermally conductive layer 330, thereby improving the transmittance of the laser light under test and ultimately improving the detection accuracy of the laser light under test.

[0072] In some embodiments, continue reading Figure 1 and Figure 2 As shown, the thermally conductive layer 330 includes a thermally conductive liquid filled within a receiving cavity. The temperature control assembly 350 includes a circulation pipe 351, a circulation pump 352, a condenser 353, and a heater 354. The input and output ends of the circulation pipe 351 are respectively connected to the receiving cavity and are used to circulate the thermally conductive liquid. The circulation pump 352 and the condenser 353 are respectively disposed on the circulation pipe 351. The circulation pump 352 drives the circulation of the thermally conductive liquid within the circulation pipe 351. When it is necessary to cool the thermally conductive layer 330, the condenser 353 is turned on to cool the thermally conductive liquid within the circulation pipe 351. In conjunction with the circulation pump 352, the cooled thermally conductive liquid ultimately circulates into the receiving cavity, thereby cooling the thermally conductive layer 330.

[0073] In this embodiment, the heater 354 can be located on the periphery of a portion of the circulation pipe 351 and work in conjunction with the circulation pump 352. After the heater 354 heats the heat-conducting liquid in the circulation pipe 351, the circulation pump 352 drives the heated heat-conducting liquid to flow into the receiving cavity, thereby raising the temperature of the heat-conducting layer 330. Furthermore, one of the heater 354 and the condenser 353 is in an on state. Thus, by turning on the heater 354 or the condenser 353, the temperature of the heat-conducting layer 330 can be raised or lowered.

[0074] In this embodiment, the heater 354 can also be disposed on the periphery of the heat-conducting layer 330, or the heat-conducting layer 330 can be heated by disposing of the heater 354 on the periphery of the heat-conducting layer 330. In this way, the heat-conducting layer 330 can be heated without the need for the circulation pump 352 to drive the flow of the heat-conducting liquid in the circulation pipe 351, which makes the heating process simpler.

[0075] In this embodiment, when the dimension a4 of the heat-conducting layer 330 along the thickness direction of the light-guiding layer 320 satisfies: 0.9mm≤a4≤2.4mm, the circulation pump 352 is located on the side wall of the receiving cavity near the bottom, driving the flow velocity v of the heat-conducting liquid in the circulation pipeline 351 to satisfy: 0.01m / s≤v≤0.1m / s. In this way, the flow of the heat-conducting liquid will not agitate the light-guiding layer 320 above the heat-conducting liquid. In particular, the light-guiding layer 320 filled in the receiving cavity with transparent edible oil is conducive to the flow of the heat-conducting liquid while maintaining the stability of the light-guiding layer 320.

[0076] In some embodiments, the light guide layer 320 is filled with inorganic particles or metal oxides, including titanium dioxide and zinc oxide. Especially when transparent edible oil is used as the light guide layer 320 within the cavity, the inorganic particles or metal oxides exhibit excellent antioxidant properties, acting as free radical scavengers to reduce oxidation of the edible oil during storage and use, extending its shelf life and contributing to the stability of the light guide layer 320. Furthermore, they can adjust the refractive index of the light guide layer 320, thus optimizing its optical performance.

[0077] In some embodiments, see Figure 5 As shown, Figure 5 This is a schematic diagram of a detection device with a filter layer in one embodiment of this application. The detection device 10 provided in this application also includes a filter layer 360, which is disposed on the side of the sealing layer 310 away from the light guide layer 320. The filter layer 360 is configured to transmit light of a specific wavelength in order to filter out stray light and prevent stray light from reflecting back and forth in the sealing layer 310, the light guide layer 320 and the heat-conducting layer 330 and propagating into the detector 200, thus affecting the detection accuracy.

[0078] In this embodiment, the filter layer 360 can be deposited on the side of the sealing layer 310 away from the light guide layer 320 by a coating process. At this time, the dimension a5 of the filter layer 360 along the thickness direction of the light guide layer 320 satisfies: 0.027mm≤a5≤0.068mm. The filter layer 360 is formed by a coating process, which is beneficial to make the filter layer 360 thinner and lighter. While satisfying the above range, the filter layer 360 can be made thinner and lighter, and at the same time, the filter layer 360 has a low light absorption rate, which is beneficial to the efficient transmission of light and reduces the absorption and scattering of light.

[0079] In this embodiment, the filter layer 360 can be implemented by setting a filter on the side of the sealing layer 310 opposite to the light guide layer 320. In this case, the dimension a6 of the filter layer 360 along the thickness direction of the light guide layer 320 satisfies: 0.5mm ≤ a6 ≤ 4mm. Meeting this range facilitates the filter to have high transparency and good optical uniformity, which helps maintain good directionality and focusing ability of light during transmission, ensuring efficient light transmission within the filter and reducing light absorption and scattering. Simultaneously, it helps maintain high transmittance and low reflectivity, thereby improving the signal strength received by the detector and ultimately improving detection accuracy.

[0080] In this embodiment, the refractive index n5 of the filter layer 360 satisfies: 1.37≤n5≤1.48, which meets the above range. The refractive index of the filter layer 360 is less than that of the sealing layer 310, which is beneficial for the smooth transition of the laser to be detected through the filter layer 360 and the filter layer 360, thus improving the light quality. Furthermore, the laser to be detected gradually shifts outward as it passes through the sealing layer 310, the light guide layer 320, and the temperature guide layer 330. The aforementioned refractive index setting of the filter layer 360 is beneficial for the laser to be detected to gradually shift towards the center as it passes through the filter layer 360 and the filter layer 360, which is beneficial for adjusting and neutralizing the outward shift distance of the laser to be detected as it passes through the sealing layer 310, the light guide layer 320, and the temperature guide layer 330, so that the laser to be detected finally incident on the appropriate position on the photosensitive element 210.

[0081] In some embodiments, see Figure 1 , Figure 2 , Figure 4 and Figure 5 As shown, the main body 100 includes an inner shell 110 and an outer shell 120. The inner shell 110 defines the aforementioned receiving cavity. The light guide layer 320 and the temperature guide layer 330 are sequentially stacked inside the inner shell 110. The outer shell 120 is fitted over the inner shell 110, and a sealed cavity is defined between the outer shell 120 and the inner shell 110. The circulation pipeline 351, circulation pump 352, condenser 353, and heater 354 are all located within the sealed cavity, which provides sealing and isolation, thereby improving the accuracy of temperature control of the temperature guide layer 330 and thus improving detection accuracy.

[0082] The detector 200 includes a photosensitive element 210 and a main body 220 connected to each other. The bottom of the inner shell 110 has a channel for the photosensitive element 210 to pass through, allowing it to extend into the receiving cavity. The main body 220 of the detector 200 is located within the sealed cavity. The photosensitive element 210 and the channel opening are sealed together to prevent liquid from the receiving cavity from entering the sealed cavity. The defined sealed cavity also helps reduce the entry of dust, moisture, corrosive gases, etc., from the external environment into the main body 220 of the detector 200, preventing corrosion, short circuits, and other problems caused to the internal components of the main body 220, thereby improving the stability and reliability of the detector 200.

[0083] In some embodiments, the detector 200 of this application can detect the energy of the laser to be detected. The detector 200 can also be configured to detect the spot morphology of the laser to be detected, and can further be configured to detect parameters such as frequency changes, divergence angle, or beam diameter of the laser to be detected, in order to evaluate the propagation characteristics of the laser to be detected. The detector 200 of this application can be configured as a photoelectric position sensor, a pyroelectric detector, a photodetector, a beam quality analyzer, or other similar devices to enrich the detection information of the laser to be detected.

[0084] See Figure 6 As shown, Figure 6 This is a flowchart illustrating the detection method in one embodiment of this application.

[0085] This application also provides a detection method, which uses the detection device 10 in any of the above embodiments for detection. The detection device 10 method includes:

[0086] S1. The laser to be tested is controlled to pass sequentially through the sealing layer 310, the light guide layer 320, and the heat-conducting layer 330, and then incident on the photosensitive element 210 of the detector 200. The laser to be tested in this application can be a laser beam that exposes the substrate to be etched, that is, a laser beam that exposes the substrate to be etched. The detection device 10 can be moved below the laser to be tested, or moved above the detection device 10, so that the detection device 10 can receive the laser to be tested.

[0087] S2. Based on the functional relationship between the temperature of the temperature-conducting layer 330 and the energy of the laser to be detected, the operating temperature of the temperature-conducting layer 330 is determined. Specifically, when the temperature-conducting layer 330 is at its operating temperature, the energy of the laser to be detected received by the detector 200 is maximized. In other words, by continuously adjusting the temperature of the temperature-conducting layer 330, the refractive index of the light-guiding layer 320 is adjusted. This allows for the detection of the energy of the laser to be detected received by the detector 200 at different refractive indices of the light-guiding layer 320, identifying the peak energy. At this peak, the temperature-conducting layer 330 is at its operating temperature, the light-guiding layer 320 has minimal impact on the energy of the laser to be detected, and the loss of the laser passing through the light-guiding layer 320 is minimized, resulting in more accurate detection.

[0088] In this embodiment, after determining the operating temperature of the temperature-conducting layer 330, the reliability of the detection can be improved by repeatedly detecting the laser under test at that operating temperature. If the energy of the laser under test detected differs significantly from the maximum energy detected when the operating temperature of the temperature-conducting layer 330 was determined, the steps described above for determining the operating temperature of the temperature-conducting layer 330 based on the functional relationship between the temperature of the temperature-conducting layer 330 and the energy of the laser under test are repeated to re-determine the operating temperature of the temperature-conducting layer 330.

[0089] In some embodiments, before determining the operating temperature of the temperature-conducting layer 330 based on the functional relationship between the temperature of the temperature-conducting layer 330 and the energy of the laser to be detected, the method further includes adjusting the temperature of the temperature-conducting layer 330 through the temperature-adjusting component 350 and acquiring the energy of the laser to be detected at different temperature values ​​of the temperature-conducting layer 330. The functional relationship between the temperature of the temperature-conducting layer 330 and the energy of the laser to be detected is obtained by repeatedly adjusting the temperature of the temperature-conducting layer 330, thereby adjusting the refractive index change of the light-guiding layer 320, and acquiring the energy of the laser to be detected received by the detector 200. This allows for determining the operating temperature of the temperature-conducting layer 330 when the energy of the laser to be detected received by the detector 200 is maximized. This facilitates multiple detections at this operating temperature, improving detection accuracy.

[0090] This application provides an exposure apparatus, including the detection device 10 described in any of the above embodiments. The exposure apparatus further includes a laser source, an optical system, and a stage. The laser emitted from the laser source passes through the optical system to form the laser to be inspected, and the stage is used to support the substrate to be etched. During exposure of the substrate, the laser emitted from the laser source passes through the optical system and is incident on the substrate supported by the stage, thus exposing it. Before exposure, the detection device 10 can be moved to a position below the laser to be inspected emitted through the optical system by moving the stage and the detection device 10, receiving the laser to be inspected, and performing inspection. Alternatively, the laser source and optical system can be configured as movable structures, moving them above the detection device 10 so that the detection device 10 receives the laser to be inspected and performs inspection.

[0091] The detection device 10, detection method, and exposure equipment of this application detect the laser to be detected before the substrate to be etched is exposed. As the laser passes through the sealing layer 310, light guide layer 320, and temperature guide layer 330, and finally through the photosensitive element 210 into the detector 200, the refractive index of the medium through which the laser passes gradually decreases. This allows for a smooth transition of the laser's propagation path, reducing abrupt changes in the propagation path and even total internal reflection, thus minimizing propagation loss. Furthermore, the temperature control component 350 continuously adjusts the temperature of the temperature guide layer 330 to change the refractive index of the light guide layer 320. The energy of the laser to be detected is measured at different temperatures of the temperature guide layer 330, and the operating temperature of the temperature guide layer 330 is determined by comparison. This facilitates multiple subsequent detections of the laser to be detected at that temperature, improving detection accuracy. Thus, by adjusting the refractive index of the light guide layer 320 in conjunction with the sealing layer 310, the light guide layer 320, and the heat-conducting layer 330, the laser to be tested can be set, which is beneficial to significantly improving the detection accuracy of the laser to be tested.

[0092] The technical features of the above embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0093] The embodiments described above are merely illustrative of several implementation methods of this application, and while the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the patent application. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this application, and these all fall within the protection scope of this application. Therefore, the protection scope of this patent application should be determined by the appended claims.

Claims

1. A detection device, characterized in that, The detection device includes: The body defines a receiving cavity with a top opening for the laser to be tested to pass through; The detector includes a photosensitive element, which is disposed within the receiving cavity and faces the opening; A sealing layer is sealed to the opening to close the receiving cavity; the sealing layer is configured to allow at least a portion of the laser to be detected to pass through the opening into the receiving cavity. A light guide layer is disposed between the sealing layer and the photosensitive element, wherein the refractive index of the light guide layer is less than the refractive index of the sealing layer; and A temperature-conducting layer and a temperature-regulating component are provided, wherein the temperature-conducting layer is disposed between the light-guiding layer and the photosensitive element, and the temperature-regulating component is used to heat or cool the temperature-conducting layer; the refractive index of the temperature-conducting layer is less than the refractive index of the light-guiding layer. The temperature of the light guide layer changes in a positive correlation with the temperature of the thermal guide layer, so that the temperature of the light guide layer can be changed by the temperature change of the thermal guide layer, and the refractive index of the light guide layer can be changed.

2. The detection device according to claim 1, characterized in that, The detection device further includes a refractive layer disposed between the light guide layer and the heat guide layer; the refractive index of the refractive layer is greater than the refractive index of the light guide layer.

3. The detection device according to claim 2, characterized in that, The refractive index n1 of the sealing layer satisfies: 1.5≤n1≤1.9, the refractive index n2 of the light guide layer satisfies: 1.457≤n2≤1.475, the refractive index n3 of the refracting layer satisfies: 1.5≤n3≤2.0, and the refractive index n4 of the heat-conducting layer satisfies: 1.33≤n4≤1.

45.

4. The detection device according to claim 2, characterized in that, Along the thickness direction of the light guide layer, the dimension a1 of the light guide layer satisfies: 0.47≤a1≤1.53mm, the dimension a2 of the light refraction layer satisfies: 0.86um≤a2≤1.4um, the dimension a3 of the sealing layer satisfies: 0.7mm≤a3≤2mm, and the dimension a4 of the heat-conducting layer satisfies: 0.9mm≤a4≤2.4mm.

5. The detection device according to claim 1, characterized in that, The temperature-conducting layer includes a temperature-conducting liquid filled in the receiving cavity; the temperature-regulating assembly includes a circulation pipeline, a circulation pump, a condenser, and a heater. The input and output ends of the circulation pipeline are respectively connected to the receiving cavity and are used to circulate the temperature-conducting liquid. The circulation pump and the condenser are respectively located on the circulation pipeline. The heater is located on the periphery of a portion of the circulation pipeline; or, the heater is located on the periphery of the heat-conducting layer; one of the heater and the condenser is in the on state.

6. The detection device according to claim 1, characterized in that, The body includes an inner shell and an outer shell. The inner shell defines the receiving cavity, and the light guiding layer and the temperature guiding layer are sequentially stacked inside the inner shell. The outer shell is fitted over the inner shell and defines a sealed cavity between the outer shell and the inner shell. The detector includes a photosensitive element and a body connected to each other, the body being disposed within the sealed cavity.

7. The detection device according to claim 1, characterized in that, The light guide layer is filled with inorganic particles or metal oxides, including titanium dioxide and zinc oxide.

8. A detection method, characterized in that, The detection is performed using the detection apparatus as described in any one of claims 1 to 7, and the detection method includes: The laser to be detected is controlled to pass sequentially through the sealing layer, the light guide layer and the temperature guide layer, and then incident on the photosensitive element of the detector; The operating temperature of the temperature-conducting layer is determined based on the functional relationship between the temperature of the temperature-conducting layer and the energy of the laser to be detected; wherein, when the temperature-conducting layer is at the operating temperature, the energy of the laser to be detected received by the detector is the maximum.

9. The detection method according to claim 8, characterized in that, Before determining the operating temperature of the temperature-conducting layer based on the functional relationship between the temperature of the temperature-conducting layer and the energy of the laser to be detected, the method further includes: The temperature of the thermal conductive layer is adjusted by the temperature control component, and the energy of the laser to be detected is obtained when the temperature of the thermal conductive layer is at different values. Obtain the functional relationship between the temperature of the thermally conductive layer and the energy of the laser to be detected.

10. An exposure apparatus, characterized in that, Includes the detection device as described in any one of claims 1 to 7.

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