Electrode assembly and electronic device

Abstract

The application discloses an electrode assembly and an electronic device, relates to the technical field of semiconductor devices, and aims to solve the problem of how to center a plurality of electrodes in a pair during the stacking and use of the plurality of electrodes. The electrode assembly comprises a base, electrodes, sliding fitting pieces, and limiting pieces, the plurality of electrodes are stacked on the base; each electrode in the plurality of electrodes comprises a main body part and a plurality of centering fitting parts circumferentially arranged around the main body part, and each centering fitting part is provided with an inclined guide surface close to one side of the base; a group of sliding fitting pieces comprises a plurality of sliding fitting pieces circumferentially arranged around the main body part, each sliding fitting piece is in sliding fit with the inclined guide surface of the corresponding centering fitting part; around the circumference of the main body part, the plurality of limiting pieces are staggered with the plurality of centering fitting parts; the centering fitting parts at the same circumferential position in the plurality of electrodes are in contact with the same limiting piece; and the inclined guide surface of each centering fitting part is away from the limiting piece in contact with the centering fitting part in the extension direction of the base.

Description

Technical Field

[0001] This application relates to the field of semiconductor device technology, and more specifically to an electrode assembly and an electronic device. Background Technology

[0002] In related technologies, electronic devices such as charged particle beam equipment typically utilize collimation devices to collimate charged particle beams. Collimation devices may include, for example, multiple layers of electrodes. The positional relationship of these multiple electrodes directly affects the collimation effect; for instance, if any electrode in a multilayer array is not aligned with the others, the collimation effect will deteriorate. Therefore, ensuring the alignment of multiple electrodes during their stacking and use becomes a crucial consideration in the design and integration of multilayer electrodes. Summary of the Invention

[0003] This application discloses an electrode assembly and an electronic device for solving the problem of how to center multiple electrode pairs during the stacking and use of multiple electrodes.

[0004] In a first aspect, this application discloses an electrode assembly, comprising: a base, a plurality of electrodes, at least one set of sliding mating members, and a plurality of limiting members. The plurality of electrodes are stacked on the base. Each electrode includes a main body and a plurality of centering mating parts circumferentially around the main body. Each centering mating part has an inclined guide surface on the side near the base. A set of sliding mating members is provided between two adjacent electrodes. The set of sliding mating members includes a plurality of sliding mating members circumferentially around the main body. The plurality of sliding mating members correspond one-to-one with a plurality of centering mating parts of one of the two adjacent electrodes that is away from the base. Each sliding mating member is used to slide and engage with the inclined guide surface of its corresponding centering mating part. The plurality of limiting members are fixed to the base. The plurality of limiting members and the plurality of centering mating parts are staggered circumferentially around the main body. The centering mating parts of the plurality of electrodes located at the same circumferential position are used to contact the same limiting member among the plurality of limiting members. The inclined guide surface of each centering mating part contacts the limiting member in the extension direction of the base away from the centering mating part.

[0005] Each electrode has an inclined guide surface on its centering mating part, and a corresponding sliding mating part is provided between adjacent electrodes. When the electrodes are stacked, the sliding mating parts slide relative to each other along the inclined guide surface, using the inclined surface to convert the vertical assembly displacement (or gravity or pressure) into a horizontal radial force. This horizontal radial force drives the electrodes to move automatically in the radial direction, guiding the central axes of each electrode to tend to coincide, thereby assisting in adjusting the initial position deviation of each electrode during the stacking process. As a result, multiple electrodes can automatically achieve coaxial alignment during the stacking process, reducing the overall coaxiality deviation caused by single-layer processing or assembly errors.

[0006] In addition, since the limiting member is fixed to the base and contacts the centering mating part, and the inclined guide surface extends in a direction away from the contacting limiting member, the electrode is more likely to move towards the limiting member and stick tightly when subjected to the horizontal thrust applied by the sliding mating part. This restricts the rotational freedom of the electrode around the main body, thereby helping to reduce the probability of relative rotation of the multilayer electrodes in the circumferential direction during use, maintaining the consistency of the angle alignment between electrodes, and improving the stability of the electronic device.

[0007] Furthermore, since the alignment mating parts of multiple electrodes located in the same circumferential position are all configured to contact the same limiting member fixed on the base, the alignment mating parts of multiple electrodes in the same circumferential position can contact the same limiting member, and one limiting member can provide a unified alignment reference for the alignment mating parts of multiple electrodes. Thus, regardless of the number of electrode layers in the electrode assembly, the alignment mating parts of each layer of electrodes are positioned directly with reference to the limiting member on the base, rather than depending on the position of the next layer of electrodes. This cuts off the transmission path of assembly errors between layers, preventing the accumulation of machining or assembly deviations of a single layer of electrodes with the increase of stacked layers; consequently, it improves the overall coaxiality of multi-layer electrodes.

[0008] In one possible structural design, the inclination angles of the inclined guide surfaces of multiple centering mating parts are consistent; at least one set of sliding mating parts consists of multiple sets of sliding mating parts, and the geometric centers of multiple sliding mating parts in each set of sliding mating parts are located on a preset circumference.

[0009] Because the inclined guide surfaces of multiple centering mating parts have the same inclination angle, the radial movement distance generated by each centering mating part is equal for any downward displacement of any electrode. This improves the consistency of the centering stroke of each layer of electrodes and reduces the centering error after multi-layer electrode stacking. Furthermore, the fact that the geometric centers of each set of sliding mating parts are located on the same preset circumference (i.e., symmetrically distributed) ensures that the radial thrust is uniform and symmetrical when each centering mating part contacts the sliding mating part. This symmetry and consistency helps each electrode automatically adjust to the same central axis during axial clamping, thus improving the coaxiality of multi-layer electrodes.

[0010] In one possible structural design, each sliding fit component includes a curved surface, and the curved surface of each sliding fit component slides into the inclined guide surface of the centering fit portion corresponding to that sliding fit component.

[0011] Because the sliding mating parts use curved surface structures (such as spheres) while the centering mating parts use inclined guide surfaces (planes), the two form point or line contact between the curved surface and the plane. Therefore, during the electrode stacking and installation process, the curved surface structure of the sliding mating parts can adaptively adjust the contact points, ensuring that the contact points always maintain a tangential fit. This helps reduce edge interference or jamming, facilitates smoother sliding of the electrodes during axial clamping, reduces assembly resistance caused by installation tilt, and improves the fault tolerance of the assembly process.

[0012] In one possible structural design, each sliding fit includes a first insulating sphere, and the diameters of multiple sliding fits in a set of sliding fits are consistent.

[0013] Since the sliding mating component includes a first insulating sphere, during the electrode assembly stacking process, the first insulating sphere forms an insulating physical isolation layer between two adjacent electrodes. This helps reduce the risk of electrical short circuits or arc discharges caused by direct contact, and improves the operational stability and safety of electronic equipment under high-voltage environments.

[0014] Furthermore, since each set of sliding mating parts uses a first insulating sphere with the same diameter, when multiple first insulating spheres contact two adjacent electrodes, they provide the same vertical support height. This helps reduce local lifting or sinking caused by abnormal height of a single support point (such as an insulating sphere with a diameter that is too large or too small). This, in turn, helps maintain the supported electrodes at a horizontal position or a predetermined angle, providing a basic constraint for establishing a parallel relationship between adjacent electrodes.

[0015] In one possible structural design, the plurality of limiting members includes at least three limiting members, and a channel for charged particles to pass through is formed in the main body of each electrode; the geometric center of the main body of each electrode is located within the projected area of ​​a polygon formed by connecting any two adjacent limiting members in sequence.

[0016] Since the geometric center of the main body of each of the multiple electrodes lies within the projected area of ​​the polygon formed by the sequential connection of any two adjacent limiting members of that main body, at least three limiting members can provide circumferential restraint for the electrodes when they are displaced. This helps to constrain the degrees of freedom of the multiple electrodes in the direction perpendicular to their stacking, reducing the problem that the degrees of freedom of translation in the direction perpendicular to their stacking can not be fully restricted due to an excessively large angle between two adjacent limiting members and the geometric center of the main body; and it is beneficial to make the attitude control of the multiple electrodes in three-dimensional space more stable.

[0017] In one possible structural design, the multiple limiting members include: a first limiting member, a second limiting member, and a third limiting member arranged circumferentially around the main body; and the multiple centering mating parts of each electrode include: a first centering mating part, a second centering mating part, and a third centering mating part arranged circumferentially around the main body; the first centering mating part of each electrode is in contact with the first limiting member; the second centering mating part of each electrode is in contact with the second limiting member; and the third centering mating part of each electrode is in contact with the third limiting member.

[0018] Since the first centering mating part only contacts the first limiting member, the second centering mating part only contacts the second limiting member, and the third centering mating part only contacts the third limiting member, the electrode is limited in the circumferential direction. The centering mating part and the multiple limiting members arranged around the main body in a one-to-one correspondence can limit the rotational freedom of the electrode in the circumferential direction, thereby helping to keep the electrode in a preset angular position during the assembly process, reducing the possibility of circumferential offset or rotational misalignment, and thus helping to keep the axes of the charged particle channels of the multilayer electrode coincident.

[0019] In one possible structural design, the first limiting member, the second limiting member, and the third limiting member are evenly spaced around the circumference of the main body; the first centering mating part, the second centering mating part, and the third centering mating part are evenly spaced around the circumference of the main body.

[0020] Because the first, second, and third limiting members are evenly spaced circumferentially, and the first, second, and third centering mating parts are also evenly spaced circumferentially, the three limiting support points (i.e., limiting members) on the electrode in the circumferential direction are distributed symmetrically, and the distance and angular relationship between each support point and the electrode center remain consistent. This helps to ensure that the reaction force provided by each limiting member is more evenly distributed in space when the electrode is subjected to radial force in any direction. This helps to reduce local stress concentration or rotational torque imbalance caused by uneven force distribution, and can make the electrode posture more stable.

[0021] In one possible structural design, a set of sliding mating parts includes a first sliding mating part, a second sliding mating part, and a third sliding mating part. The first sliding mating part is disposed between the first centering mating part of one electrode and the first centering mating part of the other electrode in two adjacent electrodes. The second sliding mating part is disposed between the second centering mating part of one electrode and the second centering mating part of the other electrode in two adjacent electrodes. The third sliding mating part is disposed between the third centering mating part of one electrode and the other third centering mating part in two adjacent electrodes.

[0022] Since the first sliding fit is located between the first alignment fit of two adjacent electrodes, the second sliding fit is located between the second alignment fit of two adjacent electrodes, and the third sliding fit is located between the third alignment fit of two adjacent electrodes, the axial load between the electrode layers (such as the pressure and vibration load of the stacked electrodes) can be evenly distributed across the three sliding fits. This helps to disperse stress across multiple sliding fits, reducing the probability of wear at the contact points between the sliding fits and the electrodes. It also helps to maintain the smooth sliding and alignment accuracy of the sliding fits during long-term assembly, extending the service life of the electrode assembly.

[0023] In one possible structural design, the multiple electrodes include multiple sets of mounting holes, each set of mounting holes corresponding to one of the multiple electrodes. Each set of mounting holes for each electrode is located on the side of the electrode away from the base. Each set of mounting holes includes multiple mounting holes, each set of mounting holes corresponding to multiple centering mating parts, and each set of mounting holes corresponding to multiple sliding mating parts. A portion of each sliding mating part is located within the mounting hole corresponding to the sliding mating part.

[0024] Since multiple mounting holes correspond one-to-one with multiple sliding mating parts, and each sliding mating part is partially located within its corresponding mounting hole, the mounting holes provide positioning support for the sliding mating parts, firmly fixing them to the electrode. This helps limit the radial displacement of the sliding mating parts, making them more likely to remain in the preset mounting position when subjected to axial stacking forces or vibrations. This improves the connection stability between the sliding mating parts and the electrode, reducing the possibility of the sliding mating parts detaching or becoming misaligned.

[0025] In one possible structural design, the geometric centers of multiple sliding mating parts in each set of sliding mating parts are located on a preset circumference; the geometric centers of multiple mounting holes are located on a preset circumference.

[0026] Since the geometric center of the sliding fit and the geometric center of the mounting hole are both located on the same preset circumference and are set in a one-to-one correspondence, this facilitates coaxial alignment in the radial direction. During assembly, this helps the sliding fit enter the mounting hole more smoothly, reducing assembly interference caused by radial deviation, thereby improving the coaxiality and channel alignment accuracy after multi-layer electrode stacking.

[0027] In one possible structural design, for each inclined guide surface, a first straight line passes through at least a portion of the mounting hole corresponding to the centering mating part where the inclined guide surface is located, wherein the first straight line is a straight line perpendicular to the inclined guide surface and passes through the geometric center of the sliding mating part corresponding to the centering mating part where the inclined guide surface is located.

[0028] Thus, when the electrode is subjected to an axial load, the inclined guide surface generates a normal force perpendicular to the inclined surface on the sliding fit. Since the line of action of this normal force (the first straight line) passes through the mounting hole area, the reaction force is more likely to be supported and borne by the hole wall. Therefore, this structure helps to reduce the possibility of the eccentric torque generated by the normal force pushing the insulating ball out or away from the mounting hole, thereby reducing the risk of axial dislodgement of the sliding fit and ensuring that the sliding fit is stably mounted in the mounting hole.

[0029] In one possible structural design, a plurality of sliding alignment members are also included in the circumferential direction of the main body of the electrode adjacent to the base. The plurality of sliding alignment members are disposed between the base and the electrode adjacent to the base. The plurality of sliding alignment members correspond one-to-one with the plurality of alignment mating parts of the electrode adjacent to the base. Each sliding alignment member slides in contact with the inclined guide surface of the corresponding alignment mating part.

[0030] Since multiple sliding alignment components are directly located between the base and the first layer of electrodes, and each corresponds to the alignment mating part of the first layer of electrodes, the cooperation between the sliding alignment components and the inclined guide surface helps to automatically correct the first layer of electrodes to a preset center position relative to the base during the initial stage of electrode stacking. This provides a precise reference position for the subsequent stacking of the upper electrodes, which helps to maintain the overall coaxiality of the entire electrode stack column in an ideal state and improves the alignment stability of the multilayer electrodes during long-term operation.

[0031] In one possible structural design, the geometric centers of multiple sliding mating parts in each set of sliding mating parts are located on a preset circumference; the geometric centers of multiple sliding centering parts are located on a preset circumference.

[0032] Since the geometric centers of multiple sliding fit components in each set of sliding fit components are located on a preset circumference, and the geometric centers of multiple sliding centering components are also located on this preset circumference, the radial distance (lever arm) from the electrode central axis to all centering components (whether sliding centering components or sliding fit components) is the same. Therefore, when the electrode is subjected to lateral forces or eccentric loads, the anti-overturning moment generated by each layer of centering components is the same. This helps to improve the structure's anti-overturning capability under eccentric loads and reduces the risk of centering failure due to uneven moment distribution.

[0033] In one possible structural design, each sliding centering element includes a second insulating sphere, and multiple sliding centering elements have the same diameter. Since the sliding centering element is defined as a second insulating sphere, during the electrode assembly stacking process, the second insulating sphere forms a non-conductive physical isolation layer between the electrode and the base. This helps reduce the risk of electrical short circuits or arcing caused by direct contact, improving the operational stability and safety of electronic equipment under high-voltage environments.

[0034] Furthermore, since each set of sliding mating parts uses a second insulating sphere with the same diameter, when multiple second insulating spheres simultaneously contact the base, they provide the same vertical support height. This helps reduce localized lifting or sinking caused by abnormal heights at individual support points (such as an insulating sphere being too large or too small). This, in turn, helps maintain the supported electrodes in a horizontal state, providing the basic constraint conditions for establishing a parallel relationship between adjacent electrodes.

[0035] In one possible structural design, the base is provided with multiple receiving holes, which are located on the side of the base facing the electrode adjacent to the base; the multiple receiving holes are provided one-to-one with multiple sliding alignment members, and a portion of each sliding alignment member is located in the receiving hole corresponding to that sliding alignment member.

[0036] Since multiple receiving holes are correspondingly provided with multiple sliding alignment components, and a portion of each sliding alignment component is located within a corresponding receiving hole, the receiving holes provide positioning support for the sliding alignment components, firmly fixing them to the base. This helps limit the radial displacement or sway of the sliding alignment components, ensuring they remain in the preset installation position when subjected to axial stacking forces or vibrations. This improves the connection stability between the sliding alignment components and the base, reducing the possibility of the sliding alignment components falling off or becoming misaligned.

[0037] Secondly, embodiments of this application also provide an electronic device that includes the electrode assembly described in the first aspect above.

[0038] It should be noted that the technical effects of the second implementation method can be found in the technical effects of the corresponding implementation method in the first aspect, and will not be repeated here. Attached Figure Description

[0039] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0040] Figure 1 This is a schematic diagram of the structure of an electrode assembly provided in an embodiment of this application; Figure 2 Provided for the embodiments of this application Figure 1 A cross-sectional view of the electrode assembly in the image; Figure 3 This is one of the schematic diagrams of an electrode structure provided in an embodiment of this application; Figure 4This is a second schematic diagram of the structure of an electrode provided in an embodiment of this application; Figure 5 This is a schematic diagram of an electronic device provided in an embodiment of this application.

[0041] Explanation of reference numerals in the attached figures: 100 - Electrode assembly; 10-Base; 11-Accommodation hole; 20 - Electrode; 21 - Centering mating part; 2101 - Inclined guide surface; 2102 - Mounting hole; 2103 - Contact surface; 211 - First centering mating part; 212 - Second centering mating part; 213 - Third centering mating part; 22 - Main body part; 30 - Limiting component; 31 - First limiting component; 32 - Second limiting component; 33 - Third limiting component; 40 - Sliding fit; 41 - First sliding fit; 42 - Second sliding fit; 43 - Third sliding fit; 401 - First insulating sphere; 4011 - Curved surface; 50 - Sliding centering component; 60 - Electronic device. Detailed Implementation

[0042] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0043] In the description of this application, the terms “center,” “upper,” “lower,” “front,” “rear,” “left,” “right,” “vertical,” “horizontal,” “top,” “bottom,” “inner,” and “outer,” etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this application.

[0044] The terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Therefore, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this application, unless otherwise stated, "a plurality of" means two or more.

[0045] In the description of this application, it should be noted that, unless otherwise expressly specified and limited, the terms "connected" and "linked" should be interpreted broadly, for example, they can refer to a fixed connection, a detachable connection, or an integral connection. Those skilled in the art can understand the specific meaning of the above terms in this application based on the specific circumstances.

[0046] Charged particle beam equipment: refers to a device capable of generating, accelerating, focusing, deflecting, and processing, analyzing, treating, or researching high-energy particle beams. It should be understood that the particle beam emitting device is related to the type of particle beam; for example, a particle beam can be an ion beam or an electron beam, and a particle beam device is the corresponding ion beam device or electron beam device. It should be understood that the particle beam in this application is not limited to electron beams and ion beams.

[0047] Collimation device: It is a core component of an electron optics system. It is mainly used to transform a particle beam (e.g., an electron beam) emitted by a particle beam emitting device (e.g., an electron gun) with a certain divergence angle into a collimated beam with an enlarged diameter and high parallelism.

[0048] Alignment: This refers to ensuring that the central axes of multiple electrodes roughly coincide during installation or assembly, in order to reduce particle beam path deviation caused by misalignment of the electrode positions. Alignment includes aligning the central axes of multiple electrodes (coaxiality) and aligning multiple electrodes along the arrangement direction (i.e., parallel arrangement).

[0049] In related technologies, charged particle beam equipment typically uses a collimation device to collimate the charged particle beam in order to control the divergence angle and propagation direction of the beam. The collimation device often employs a multi-layer electrode structure, for example, consisting of multiple electrode plates with central through holes stacked along the beam direction. Each electrode is applied with a different potential to form a collimating electric field, which focuses or collimates the passing charged particle beam.

[0050] The positional relationship between the multilayer electrodes directly determines the collimation effect. Ideally, the central aperture axes of each electrode should be strictly coincident, i.e., precise alignment should be achieved. If any electrode is laterally offset, tilted, or rotated relative to the other electrodes, it will lead to an asymmetrical electric field distribution, causing the beam to be subjected to non-axisymmetric forces, resulting in beam spot distortion, astigmatism, beam shift, or emissivity increase, thereby reducing the collimation effect.

[0051] Therefore, in the process of stacking and assembling multiple electrodes, how to maintain precise alignment between the electrodes in a long-term and stable manner is an important consideration in the design and integration of multilayer electrodes.

[0052] Based on this, embodiments of this application provide an electronic device whose electrodes are self-aligning. This electronic device can be a charged particle beam device or an electron gun, etc., and this application does not limit the specific type. The charged particle beam device can include electron beam devices and ion beam devices, etc. For example, an electron beam device can be a transmission electron microscope or an electron beam detection device, etc. For example, an ion beam device can be an ion implanter or an ion beam deposition device, etc.

[0053] In addition, the electronic device includes an electrode assembly and a housing, with the electrode assembly housed within the housing. Thus, the housing provides protection for the electrode assembly and provides the necessary internal environment (e.g., a vacuum environment) for it.

[0054] For example, the electrode assembly can be applied to an electron beam device, such as the electron source system of an electron beam device, the collimator system in a multi-beam electron beam device, or the accelerator system in an electron beam device.

[0055] Figure 1 This is a schematic diagram of the structure of an electrode assembly provided in an embodiment of this application. Figure 2 Provided for the embodiments of this application Figure 1 For a cross-sectional view of the electrode assembly, please refer to [link / reference]. Figure 1 and Figure 2 In some embodiments of this application, the electrode assembly 100 includes: a base 10, a plurality of electrodes 20, at least one set of sliding mating parts 40, and a plurality of limiting parts 30. The base 10 is the basic support component of the electrode assembly 100, used to support and install the plurality of electrodes 20 and the limiting parts 30. The base 10 can be a non-magnetic metal part, such as aluminum alloy, titanium alloy, or ceramic, etc., and this application embodiment does not limit it.

[0056] Please continue reading. Figure 1 and Figure 2 Multiple electrodes 20 are stacked on the base 10, wherein the arrangement direction of the base 10 and the multiple electrodes 20 can be consistent with the stacking direction of the multiple electrodes 20. For example, the multiple electrodes 20 can be stacked on top of the base 10 along the thickness direction of the electrodes 20. Thus, by stacking the multiple electrodes 20, an increasing or decreasing voltage can be applied to each electrode 20, thereby decomposing a large voltage difference into multiple small voltage differences distributed layer by layer, thereby forming a smooth gradient electric field. Furthermore, this allows the particle beam to be gradually accelerated or decelerated during its journey, reducing abrupt changes in electric field energy that could cause particle beam divergence.

[0057] Please continue reading. Figure 1 and Figure 2Each of the plurality of electrodes 20 includes a main body portion 22 and a plurality of centering mating portions 21 circumferentially surrounding the main body portion 22. The main body portion 22 is the main functional part of the electrode 20, used to carry a conductive layer or form an electric field. At least some of the electrodes 20 may have a ring-shaped main body portion 22, with a particle beam channel formed at the center of the ring structure, thus providing an undisturbed transmission space for the particle beam.

[0058] For example, the annular structure of the main body 22 can be a circular ring or a polygonal ring (e.g., hexagonal, octagonal, or decagonal), and this embodiment does not limit this. In addition, the base 10 can also be an annular structure, and the annular structure of the base 10 can also be a circular ring or a polygonal ring (e.g., hexagonal, octagonal, or decagonal), and this embodiment does not limit this either.

[0059] In one possible structural design, the centering mating part 21 can be a lug structure, which extends outward from the outer periphery of the main body part 22. The lug structure can be a regular three-dimensional structure (e.g., a cuboid structure, a cube structure, or a hexagonal prism structure), or it can be an irregular three-dimensional structure, etc., which is not limited in this application embodiment.

[0060] Figure 3 This is one of the schematic diagrams of an electrode structure provided in an embodiment of this application. Figure 4 This is a second schematic diagram of an electrode structure provided in an embodiment of this application, wherein, Figure 3 and Figure 4 Please refer to the structural diagrams of this electrode from different perspectives. Figure 1 , Figure 2 , Figure 3 and Figure 4Each centering mating part 21 has an inclined guide surface 2101 on the side near the base 10. For example, the base 10 is located below the plurality of electrodes 20, and the bottom wall of each centering mating part 21 may have an inclined guide surface 2101. A set of sliding mating members is provided between two adjacent electrodes 20. This set of sliding mating members includes multiple sliding mating members 40 circumferentially surrounding the main body 22. The number of these multiple sliding mating members 40 can be 3, 4, 5, or 6, etc., and this embodiment does not limit this. Each of the multiple sliding mating members 40 corresponds one-to-one with a plurality of centering mating parts 21 of one of the two adjacent electrodes 20 that is furthest from the base 10. Each sliding mating member 40 is used for sliding engagement with the inclined guide surface 2101 of its corresponding centering mating part 21. For example, multiple sliding mating parts 40 correspond one-to-one with multiple centering mating parts 21 of the upper electrode 20 among two adjacent electrodes 20, and each sliding mating part 40 slides into contact with the inclined guide surface 2101 of its corresponding centering mating part 21 above it. Here, sliding mating refers to a connection method in which two components (i.e., sliding mating part 40 and centering mating part 21) achieve a predetermined function (such as support or force transmission) through mutual contact and relative sliding.

[0061] For example, when two adjacent electrodes 20 are arranged vertically, the inclined guide surface 2101 of a centering mating portion 21 of the upper electrode 20 contacts the sliding mating member 40 located below the centering mating portion 21 and can slide relative to it. When the electrodes 20 are stacked, the upper electrode 20 moves downward under the action of gravity or external clamping force, and its inclined guide surface 2101 will squeeze the sliding mating member 40, thereby generating a normal force perpendicular to the inclined guide surface 2101. This normal force can be decomposed into a vertically downward component and a horizontal radial component. This radial component will drive the upper electrode 20 to move relative to the lower electrode 20 in the horizontal plane, thereby realizing the radial position adjustment of the electrode 20.

[0062] Please continue reading. Figure 1 and Figure 2 Multiple limiting members 30 are fixed to the base 10. The connection methods between the multiple limiting members 30 and the base 10 can be the same or different, and this application embodiment does not limit this. Optionally, the multiple limiting members 30 can be fixedly connected to the base 10 by welding, riveting, snap-fitting, threaded connection or adhesive bonding. Optionally, the multiple limiting members 30 can also be an integral structure with the base 10, that is, the multiple limiting members 30 and the base 10 are a single structural component. This application embodiment does not limit this.

[0063] In addition, please continue to refer to Figure 1 and Figure 2The limiting members 30 extend along the stacking direction of the plurality of electrodes 20 and are spaced apart circumferentially around the main body 22. The limiting members 30 can be staggered with the multiple centering mating parts 21 around the main body 22. For example, if three centering mating parts 21 are evenly distributed circumferentially on the main body 22 of the electrodes 20, and three limiting members 30 are fixed on the base 10, the three limiting members 30 can also be evenly distributed circumferentially on the main body 22, with each limiting member 30 located at the midpoint between two adjacent centering mating parts 21 (i.e., staggered), and each centering mating part 21 located at the midpoint between two adjacent limiting members 30. The limiting members 30 are used to limit the maximum radial displacement of the centering mating parts 21. Thus, when the plurality of electrodes 20 are stacked, the upper electrode 20 slides downward and radially relative to the lower sliding mating part 40 under the action of the inclined guide surface 2101 of its centering mating part 21, and finally stops sliding under the limiting action of the limiting members 30.

[0064] Please continue reading. Figure 1 and Figure 2 The centering mating portions 21 of the multiple electrodes 20 located at the same circumferential position are used to contact the same limiting member 30 among the multiple limiting members 30. Each electrode 20 includes multiple centering mating portions 21 arranged circumferentially around its main body 22, and the multiple electrodes 20 are stacked. The centering mating portions 21 of the multiple electrodes 20 located at the same circumferential position are in contact with the same limiting member 30 among the multiple limiting members 30.

[0065] For example, when there are three electrodes 20, each of the three electrodes 20 is provided with three centering mating parts 21. The multiple limiting members may include three limiting members 30. One of the three centering mating parts 21 of each electrode 20 is in contact with one of the three limiting members 30. Another centering mating part 21 of each electrode 20 is in contact with another of the three limiting members 30. Finally, yet another centering mating part 21 of each electrode 20 is in contact with yet another of the three limiting members 30.

[0066] In one possible structural design, the limiting member 30 can be a rod-shaped, column-shaped, or strip-shaped structure fixed to the base 10, with its top end extending to the uppermost electrode 20. The limiting member 30 can be made of a non-magnetic metal, such as aluminum alloy, titanium alloy, or ceramic. Multiple centering mating parts 21 extend outward from the main body 22, and the limiting members 30 are positioned between adjacent centering mating parts 21. In the circumferential direction, the centering mating parts 21 and the limiting members 30 are arranged alternately. The side of each centering mating part 21 facing its corresponding limiting member 30 is a contact surface 2103, which can contact the outer wall surface of the limiting member 30. Since the centering mating parts 21 of each electrode 20 at the same circumferential position contact the same limiting member 30, the limiting member 30 can constrain the rotational freedom of the electrode 20 around the main body 22. Furthermore, the contact surface 2103 is used to cooperate with the limiting member 30, thereby constraining the degrees of freedom of the electrode 20 in the X, Y, and Rz directions. The X direction is a specific direction within the horizontal plane where the electrode 20 is located; constraining the X-direction means limiting the electrode 20's ability to translate in the X direction. The Y direction is another direction within the horizontal plane perpendicular to the X direction. Constraining the Y-direction means limiting the electrode 20's ability to translate in the Y direction. The Z direction is the stacking direction of the electrode 20, and the Rz direction is the rotational direction about the Z-axis (i.e., about the central axis of the main body 22). Constraining the Rz-direction means limiting the electrode 20's ability to rotate about its own central axis.

[0067] Furthermore, the inclined guide surface 2101 of each centering mating part 21 extends away from the limiting member 30 that contacts the centering mating part 21 in the extending direction of the base 10. For example, the inclined guide surface 2101 can be provided on the lower surface of the lug structure (i.e., the side near the base 10). The inclined guide surface 2101 can be inclined relative to the bottom surface of the base 10.

[0068] In one possible structural design, the thickness (dimension along the stacking direction of the electrodes 20) of at least part of the centering mating portion 21 can be gradually reduced along the direction from the contact surface 2103 to the direction from the contact surface 2103 away from the limiting member 30 that contacts the contact surface 2103, thereby forming an inclined guide surface 2101.

[0069] Optionally, the thickness (dimension along the electrode 20 stacking direction) of the centering mating portion 21 gradually decreases along the direction from the contact surface 2103 to the direction from the contact surface 2103 away from the limiting member 30 that contacts the contact surface 2103, thereby forming an inclined guide surface 2101. Optionally, the thickness (dimension along the electrode 20 stacking direction) of a portion of the centering mating portion 21 gradually decreases along the direction from the contact surface 2103 to the direction from the contact surface 2103 away from the limiting member 30 that contacts the contact surface 2103, thereby forming an inclined guide surface 2101. The portion of the centering mating portion 21 may be located on the side of the centering mating portion 21 away from the contact surface 2103.

[0070] Optionally, the inclined guide surface 2101 can be a plane, or it can be an arc surface. For example, the arc surface can be a concave arc surface, or it can be a convex arc surface; however, this embodiment does not limit the specific type of arc surface.

[0071] Since each electrode 20 has an inclined guide surface 2101 on its centering mating part 21, and a corresponding sliding mating part 40 is provided between two adjacent electrodes 20, when the electrodes 20 are stacked, the sliding mating parts 40 slide relative to each other along the inclined guide surface 2101. The inclined surface converts the vertical assembly displacement (or gravity or pressure) into a horizontal radial component force. This horizontal radial component force drives the electrodes 20 to move automatically in the radial direction, guiding the central axes of each electrode 20 to tend to coincide, thereby assisting in adjusting the initial position deviation of each electrode 20 during the stacking process. As a result, multiple electrodes 20 can automatically achieve coaxial alignment during the stacking process, reducing the overall coaxiality deviation caused by single-layer processing or assembly errors.

[0072] Furthermore, since the limiting member 30 is fixed to the base 10 and contacts the centering mating part 21, and the inclined guide surface 2101 extends in a direction away from the contacting limiting member 30, the electrode 20 is more likely to move closer to and adhere to the limiting member 30 when subjected to the horizontal thrust applied by the sliding mating part 40. This restricts the rotational freedom of the electrode 20 around the main body 22, thereby helping to reduce the probability of relative rotation of the multilayer electrode 20 in the circumferential direction during use, maintaining the consistency of the angular alignment between the electrodes 20, and improving the stability of the electronic device.

[0073] Furthermore, since the alignment mating portions 21 of the multiple electrodes 20 located in the same circumferential position are all configured to contact the same limiting member 30 fixed on the base 10, the alignment mating portions 21 of the multiple electrodes 20 located in the same circumferential position can contact the same limiting member 30, and the limiting member 30 can provide a unified alignment reference for the alignment mating portions 21 of the multiple electrodes 20. Thus, regardless of the number of layers of electrodes 20 stacked in the electrode assembly 100, the alignment mating portions 21 of each layer of electrodes 20 are positioned directly with reference to the limiting member 30 on the base 10, rather than depending on the position of the next layer of electrodes 20. This cuts off the transmission path of assembly errors between layers, so that the processing or assembly deviation of a single layer of electrodes 20 does not accumulate with the increase of the number of stacked layers; thereby, the overall coaxiality of the multi-layer electrodes 20 is improved.

[0074] Please refer to some embodiments of this application. Figure 1 and Figure 2 The inclined guide surfaces 2101 of the multiple centering mating parts 21 have the same inclination angle. The inclination angle can refer to the angle between the inclined guide surface 2101 and the plane (i.e., the horizontal plane) where the base 10 is located. For example, the angle (inclination angle) between the inclined guide surfaces 2101 of the multiple centering mating parts 21 and the plane where the base 10 is located can all be the same. For example, the inclination angle can be 45 degrees or 60 degrees, etc. It should be noted that the consistency of the inclination angle can include: completely consistent inclination angles and nearly consistent inclination angles. Completely consistent inclination angles mean that the inclination angles of the inclined guide surfaces 2101 of the multiple centering mating parts 21 are exactly the same; for example, the inclination angles of the inclined guide surfaces 2101 of the multiple centering mating parts 21 can all be 45 degrees or 60 degrees, etc. The inclination angles are close to being consistent, meaning that the difference in inclination angles of the inclined guide surfaces 2101 of the multiple centering mating parts 21 is less than 6°. For example, the angle (inclination angle) between the inclined guide surfaces 2101 of the multiple centering mating parts 21 and the plane where the base 10 is located can be between 42 degrees and 48 degrees (including 42 degrees and 48 degrees).

[0075] In one possible structural design, the tilt angles of the inclined guide surfaces 2101 of the multiple alignment mating portions 21 of the same electrode 20 are consistent. That is, only the tilt angles of the inclined guide surfaces 2101 of the multiple alignment mating portions 21 of the same electrode 20 are consistent, while the tilt angles of the inclined guide surfaces 2101 of the alignment mating portions 21 in different electrodes 20 may be inconsistent. In another possible structural design, the tilt angles of the inclined guide surfaces 2101 of all alignment mating portions 21 of all electrodes 20 are consistent. That is, the tilt angles of the inclined guide surfaces 2101 of the multiple alignment mating portions 21 of all electrodes 20 are consistent. This application does not limit this aspect.

[0076] Furthermore, at least one set of sliding mating parts 40 may be multiple sets of sliding mating parts 40, with the geometric centers of the multiple sliding mating parts 40 in each set located on a preset circumference. The geometric centers of the multiple sliding mating parts 40 in each set can all be located on this preset circumference. This preset circumference can be a virtual circumference concentric with the main body 22 and with a fixed radius. For example, three sets of sliding mating parts 40 are provided, and the geometric centers of the multiple sliding mating parts 40 in each of the three sets are located on the same preset circumference. It should be understood that, due to limitations such as machining accuracy, the preset circumference may deviate from the ideal circumference; therefore, in actual scenarios, the circumference within the allowable engineering tolerance range should be considered as the preset circumference mentioned in this application.

[0077] Since the inclined guide surfaces 2101 of the multiple centering mating parts 21 have the same inclination angle, the radial movement distance generated by each centering mating part 21 is equal for any downward displacement of an electrode 20. This improves the consistency of the centering stroke of each layer of electrodes 20 and reduces the centering error after stacking multiple layers of electrodes 20. Furthermore, the fact that the geometric centers of each set of sliding mating parts 40 are located on the same predetermined circumference (i.e., symmetrically distributed) ensures that the radial thrust is uniform and symmetrical when each centering mating part 21 contacts the sliding mating part 40. This symmetry and consistency helps each electrode 20 automatically adjust to the same central axis during axial compression, thus improving the coaxiality of the multiple layers of electrodes 20.

[0078] In other embodiments of this application, the geometric centers of the plurality of sliding mating parts 40 in each group of sliding mating parts 40 may also be located on different preset circumferences. For example, three groups of sliding mating parts 40 are provided. The geometric center of each sliding mating part 40 in one group of the three groups may be located on a first preset circumference, the geometric center of each sliding mating part 40 in another group of the three groups may be located on a second preset circumference, and the geometric center of each sliding mating part 40 in yet another group of the three groups may be located on a third preset circumference. The central axes of the first, second, and third preset circumferences may be collinear, and the radii of the first, second, and third preset circumferences may be partially different or all different.

[0079] In some embodiments of this application, each sliding mating member 40 includes a curved surface 4011, and the curved surface 4011 of each sliding mating member 40 slides into contact with the inclined guide surface 2101 of the centering mating portion 21 corresponding to the sliding mating member 40. Since the sliding mating member 40 adopts a curved surface 4011 structure (e.g., a spherical surface), while the centering mating portion 21 adopts an inclined guide surface 2101 (a plane), the two constitute a point contact or line contact between the curved surface 4011 and the plane. Therefore, during the stacking and installation of the electrodes 20, the curved surface 4011 structure of the sliding mating member 40 can also adaptively adjust the contact point, so that the contact surface 2103 always maintains a tangential mating state; thereby helping to reduce edge interference or jamming, which is beneficial for the electrodes 20 to maintain a relatively smooth sliding state during axial pressing, reducing the assembly resistance caused by installation tilt, and improving the fault tolerance of the assembly process.

[0080] In one possible structural design, each sliding mating member 40 includes a first insulating sphere 401, and the diameters of multiple sliding mating members 40 in a group of sliding mating members 40 are consistent. Exemplarily, the first insulating sphere 401 can be a ceramic sphere, a glass sphere, or a plastic sphere, etc., wherein the ceramic sphere can be an alumina ceramic sphere or a silicon nitride ceramic sphere, etc., and this application embodiment does not limit this.

[0081] The diameter refers to the sphere diameter of the first insulating sphere 401. When the diameters are consistent, the dimensions of multiple first insulating spheres 401 in the same group are identical. Since the diameters of multiple sliding mating parts 40 are consistent, during stacking, the spacing between two adjacent electrodes 20 is supported by multiple sliding mating parts 40. The consistent diameters ensure that the heights of each support point are the same, which helps to keep the multiple electrodes 20 parallel during stacking and reduces the probability of the electrodes 20 tilting.

[0082] Optionally, multiple sliding mating parts 40 in the same group of sliding mating parts 40 have the same diameter. In this way, multiple sliding mating parts 40 in the same group of sliding mating parts 40 provide a consistent support point for the electrode 20 away from the base 10 in the circumferential direction. This allows the lower surface of the upper electrode 20 and the upper surface of the lower electrode 20 to maintain the same circumferential distance, thereby helping to make the plate surfaces of the two electrodes 20 tend to be parallel and reducing the risk of the electrodes 20 tilting due to inconsistent support point heights.

[0083] Optionally, all sliding mating parts 40 in all groups of sliding mating parts 40 have the same diameter. This ensures that the spacing between each layer of electrodes 20 is equal. This helps to form an equally spaced parallel plate array along the stacking direction of the entire electrode sequence 20, thereby providing a uniform acceleration or focusing field for the particle beam during axial propagation and reducing beam energy fluctuations caused by local differences in electrode spacing.

[0084] Since the sliding mating member 40 includes a first insulating sphere 401, during the stacking of the electrode assembly 100, the first insulating sphere 401 forms an insulating physical isolation layer between two adjacent electrodes 20. This helps reduce the risk of electrical short circuits or arc discharges caused by direct contact, and improves the operational stability and safety of electronic equipment under high-voltage environments. Furthermore, since each set of sliding mating members 40 uses a first insulating sphere 401 with the same diameter, when multiple first insulating spheres 401 contact two adjacent electrodes 20, they provide the same vertical support height. This helps reduce local lifting or sinking caused by abnormal height of a single support point (such as an insulating sphere with a diameter that is too large or too small). This, in turn, helps maintain the supported electrode 20 at a horizontal position or a predetermined angle, providing a basic constraint for forming a parallel relationship between adjacent electrodes 20.

[0085] In another possible structural design, each sliding mating part 40 includes a hemispherical structure, wherein the spherical surface of the hemispherical structure faces away from the base 10. Thus, even if the electrode 20 above the hemispherical structure undergoes slight rotation or wobbling during radial adjustment, the spherical surface and the inclined guide surface 2101 can maintain a stable point or line contact, facilitating smooth and stable radial sliding adjustment of the electrode 20 during clamping. Furthermore, the bottom of the hemispherical structure can be flat. This allows it to be stably placed within the mounting hole 2102 of the base 10 or the electrode 20 below. Compared to a complete sphere, the hemispherical structure is less prone to rolling or displacement when not under pressure. During the assembly process of stacking multiple layers of electrodes 20, after placing the hemisphere in the predetermined position, its flat bottom can form a stable surface contact with the bottom surface of the mounting hole 2102, reducing the risk of the sliding mating part 40 rolling off or deviating from the predetermined position, thus improving assembly convenience and safety.

[0086] Please refer to some embodiments of this application. Figure 1 and Figure 2 The plurality of limiting members 30 includes at least three limiting members 30, and a channel for charged particles to pass through is formed in the main body portion 22 of each electrode 20; the geometric center of the main body portion 22 of each electrode 20 is located within the projected area of ​​a polygon formed by connecting any two adjacent limiting members 30 in sequence. The geometric center can be the center of gravity or the centroid, and this embodiment does not limit this.

[0087] For example, when there are three limiting members 30, the projection points of the three limiting members 30 on the base 10 can form a triangle. The projection of the geometric center of the main body 22 of each electrode 20 (i.e., the central axis of the channel) on the base 10 lies inside this triangle. In this way, the limiting members 30 surround the main body 22 of the electrode 20 from three directions, which helps to constrain the electrode 20 within the range defined by the limiting members 30 and reduces the risk of the electrode 20 shifting significantly in the horizontal plane.

[0088] Since the geometric center of the main body 22 of each of the multiple electrodes 20 lies within the projected area of ​​the polygon formed by the sequential connection of any two adjacent limiting members 30 of the main body 22, when the electrode 20 is displaced, at least three limiting members 30 can provide circumferential restraint for it in the stacked multiple electrodes 20. This helps to constrain the degrees of freedom of the multiple electrodes 20 in the direction perpendicular to their stacking, reducing the problem that the degrees of freedom of translation of the multiple electrodes 20 in the direction perpendicular to their stacking are not fully restricted due to the excessively large angle between the line connecting two adjacent limiting members 30 and the geometric center of the main body 22; it also helps to make the attitude control of the multiple electrodes 20 in three-dimensional space more stable.

[0089] Please refer to some embodiments of this application. Figure 1 and Figure 2 The plurality of limiting members 30 may include three limiting members. The plurality of limiting members 30 include: a first limiting member 31, a second limiting member 32, and a third limiting member 33 arranged circumferentially around the main body 22. The plurality of centering mating parts 21 of each electrode 20 include: a first centering mating part 211, a second centering mating part 212, and a third centering mating part 213 arranged circumferentially around the main body 22; the first centering mating part 211 of each electrode 20 is in contact with the first limiting member 31; the second centering mating part 212 of each electrode 20 is in contact with the second limiting member 32; and the third centering mating part 213 of each electrode 20 is in contact with the third limiting member 33.

[0090] Since the first centering mating part 211 only contacts the first limiting member 31, the second centering mating part 212 only contacts the second limiting member 32, and the third centering mating part 213 only contacts the third limiting member 33, the electrode 20 is limited in the circumferential direction. The centering mating part 21 and the multiple limiting members 30 arranged circumferentially around the main body 22 correspond one-to-one, which can limit the rotational freedom of the electrode 20 in the circumferential direction. This helps to keep the electrode 20 in a preset angular position during the assembly process, reducing the possibility of circumferential offset or rotational misalignment. This is conducive to keeping the axes of the charged particle channels of the multilayer electrode 20 coincident.

[0091] In one possible structural design, the first limiting member 31, the second limiting member 32, and the third limiting member 33 are evenly spaced around the main body 22 in the circumferential direction; the first centering mating part 211, the second centering mating part 212, and the third centering mating part 213 are evenly spaced around the main body 22 in the circumferential direction.

[0092] For example, the first limiting member 31, the second limiting member 32, and the third limiting member 33 can be evenly spaced around the circumference of the main body 22. For instance, the included angle between two adjacent limiting members 30 is 120 degrees. Correspondingly, the first centering mating part 211, the second centering mating part 212, and the third centering mating part 213 can also be evenly spaced around the circumference of the main body 22. For instance, the included angle between two adjacent centering mating parts 21 is 120 degrees. In this way, the three limiting members 30 and the three centering mating parts 21 are all evenly distributed at 120 degrees, so that the electrode 20 is subjected to balanced force in the circumferential direction, which is beneficial to improving the coaxiality and angular alignment accuracy of the electrode 20.

[0093] Because the first limiting member 31, the second limiting member 32, and the third limiting member 33 are evenly spaced circumferentially, and the first centering mating part 211, the second centering mating part 212, and the third centering mating part 213 are also evenly spaced circumferentially, the three limiting support points (i.e., limiting members 30) on the electrode 20 in the circumferential direction are distributed symmetrically, and the distance and angular relationship between each support point and the center of the electrode 20 remains consistent. This helps to make the reaction force provided by each limiting member 30 more evenly distributed in space when the electrode 20 is subjected to radial force in any direction. This helps to reduce local stress concentration or rotational torque imbalance caused by uneven force distribution, and can make the posture of the electrode 20 more stable.

[0094] In another possible structural design, the first limiting member 31, the second limiting member 32, and the third limiting member 33 are not uniformly spaced around the circumferential distance of the main body 22. For example, the included angle between two adjacent limiting members 30 can be between 0 and 90° (e.g., 0 degrees, 45 degrees, and 90 degrees), and this embodiment of the application does not limit this.

[0095] Please refer to other embodiments of this application. Figure 1 and Figure 2 The plurality of limiting members 30 may also include 4, 5, 6, 7, or 8 limiting members, etc., and this embodiment of the application does not limit this. In this way, at least two of the plurality of limiting members 30 can be in contact with the centering mating part located in the same circumferential position. In this way, the plurality of limiting members 30 are redundantly arranged, and when one of the limiting members 30 is damaged or disassembled for maintenance, it will not affect the normal operation of the electrode assembly 100, which is beneficial to improving production efficiency.

[0096] In some embodiments of this application, a set of sliding mating parts 40 includes a first sliding mating part 41, a second sliding mating part 42, and a third sliding mating part 43. The first sliding mating part 41 is disposed between the first centering mating portion 211 of one electrode 20 and the first centering mating portion 211 of the other electrode 20 in two adjacent electrodes 20. The second sliding mating part 42 is disposed between the second centering mating portion 212 of one electrode 20 and the second centering mating portion 212 of the other electrode 20 in two adjacent electrodes 20. The third sliding mating part 43 is disposed between the third centering mating portion 213 of one electrode 20 and the third centering mating portion 213 of the other electrode 20 in two adjacent electrodes 20. Thus, the three sliding mating parts 40 and the inclined guide surfaces 2101 of the three centering mating portions 21 form three point contacts, constraining the three degrees of freedom of the electrode 20: Rx, Ry, and Z. The Rx direction refers to the rotation direction about the X-axis. The constraint on the degree of freedom in the Rx direction restricts the ability of the electrode 20 to rotate about the X-axis. The Ry direction refers to the rotation direction about the Y-axis. The constraint on the degree of freedom in the Ry direction refers to the restriction on the ability of electrode 20 to rotate around the Y-axis.

[0097] Since the first sliding fit 41 is located between the first centering fit portion 211 of two adjacent electrodes 20, the second sliding fit 42 is located between the second centering fit portion 212 of two adjacent electrodes 20, and the third sliding fit 43 is located between the third centering fit portion 213 of two adjacent electrodes 20, the axial load between the electrode layers (such as the pressure and vibration load of the stacked electrodes 20) can be evenly distributed to the three sliding fits 40. This helps to distribute stress among multiple sliding fits 40, reduces the probability of wear on the contact surface 2103 between the sliding fits 40 and the electrode 20, and helps to maintain the smooth sliding and centering accuracy of the sliding fits 40 during long-term assembly, thus extending the service life of the electrode assembly 100.

[0098] In one possible structural design, please refer to Figure 1 , Figure 2 and Figure 3 The plurality of electrodes 20 include a plurality of sets of mounting holes 2102, each set of mounting holes 2102 corresponding to a plurality of electrodes 20. Each set of mounting holes 2102 for each electrode 20 is located on the side of the electrode 20 away from the base 10. Each set of mounting holes 2102 includes a plurality of mounting holes 2102, each set of mounting holes 2102 corresponding to a plurality of centering mating parts 21, and each set of mounting holes 2102 corresponding to a plurality of sliding mating parts 40. A portion of each sliding mating part 40 is located within the mounting hole 2102 corresponding to the sliding mating part 40.

[0099] For example, the mounting hole 2102 can be a blind hole or a through hole. The mounting hole 2102 can be located on the upper surface of the centering mating portion 21 (i.e., the side facing away from the base 10). When multiple electrodes 20 are stacked, the mounting hole 2102 of the lower electrode 20 is used to accommodate the lower half of the sliding mating member 40, while the inclined guide surface 2101 of the upper electrode 20 slides into contact with the upper half of the sliding mating member 40. In this way, the mounting hole 2102 can provide positioning and limiting for the sliding mating member 40, reducing the risk of rolling or displacement of the sliding mating member 40 during radial adjustment.

[0100] Since multiple mounting holes 2102 are correspondingly provided with multiple sliding mating parts 40, and a portion of each sliding mating part 40 is located within the corresponding mounting hole 2102, the mounting holes 2102 can provide positioning support for the sliding mating parts 40, firmly fixing them to the electrode 20. This helps limit the radial displacement of the sliding mating parts 40, making them more likely to remain in the preset mounting position when subjected to axial stacking forces or vibrations. This improves the connection stability between the sliding mating parts 40 and the electrode 20, reducing the possibility of the sliding mating parts 40 falling off or becoming misaligned.

[0101] Please refer to some embodiments of this application. Figure 1 and Figure 2 The geometric centers of the multiple sliding mating parts 40 in each set of sliding mating parts 40 are located on a preset circumference; the geometric centers of the multiple mounting holes 2102 are located on a preset circumference.

[0102] In one possible structural design, the geometric centers of multiple sliding mating parts 40 in the same group of sliding mating parts 40 are located on a predetermined circumference. In another possible structural design, the geometric centers of multiple sliding mating parts 40 in each group of sliding mating parts 40 are all located on the predetermined circumference.

[0103] Since the geometric center of the sliding fit 40 and the geometric center of the mounting hole 2102 are both located on the same preset circumference and are set in a one-to-one correspondence, this facilitates coaxial alignment in the radial direction. During assembly, this helps the sliding fit 40 to enter the mounting hole 2102 more smoothly, reducing assembly interference caused by radial deviation, thereby improving the coaxiality and channel alignment accuracy of the multilayer electrodes 20 after stacking.

[0104] In some embodiments of this application, for each inclined guide surface 2101, a first straight line passes through at least a portion of the mounting hole 2102 corresponding to the centering mating portion 21 where the inclined guide surface 2101 is located. The first straight line is a straight line perpendicular to the inclined guide surface 2101 and passes through the geometric center of the sliding mating member 40 corresponding to the centering mating portion 21 where the inclined guide surface 2101 is located.

[0105] For example, when the sliding fit 40 is a sphere, its geometric center is the center of the sphere. A straight line perpendicular to the inclined guide surface 2101 and passing through the center of the sphere can be extended to pass through the internal space of the mounting hole 2102. Thus, when the upper electrode 20 presses against the sliding fit 40, the direction of the normal force on the sliding fit 40 is approximately along this first straight line. This force can be more effectively transmitted to the lower mounting hole 2102, reducing the lateral component force and improving the stability of the electrode 20 stack.

[0106] Thus, when electrode 20 is subjected to axial load, the inclined guide surface 2101 generates a normal force perpendicular to the inclined surface on the sliding fit member 40. Since the line of action of this normal force (the first straight line) passes through the area of ​​the mounting hole 2102, the reaction force is more likely to be supported and borne by the hole wall of the mounting hole 2102. Therefore, this structure helps to reduce the possibility that the eccentric torque generated by the normal force will push the insulating ball out or away from the mounting hole 2102, thereby reducing the risk of axial dislodgement of the sliding fit member 40 and enabling the sliding fit member 40 to be stably mounted in the mounting hole 2102.

[0107] In one possible structural design, a plurality of sliding centering members 50 are also included in the circumferential direction of the main body 22 of the electrode 20 adjacent to the base 10. The plurality of sliding centering members 50 are disposed between the base 10 and the electrode 20 adjacent to the base 10. The plurality of sliding centering members 50 correspond one-to-one with the plurality of centering mating parts 21 of the electrode 20 adjacent to the base 10. Each sliding centering member 50 slides in contact with the inclined guide surface 2101 of the corresponding centering mating part 21.

[0108] For example, for the first electrode 20 directly adjacent to the base 10, its inclined guide surface 2101 no longer engages with the sliding mating member 40, but instead engages with the sliding centering member 50. One end of the sliding centering member 50 can be disposed on the base 10, and the other end can be slidably engaged with the inclined guide surface 2101 of the first electrode 20. In this way, the sliding centering member 50 provides the first electrode 20 with the same centering function as the other electrodes 20, enabling the bottommost electrode 20 to also achieve radial position adjustment, thereby improving the consistency of the centering effect of all stacked electrodes 20.

[0109] Since multiple sliding alignment members 50 are directly disposed between the base 10 and the first layer electrode 20, and correspond one-to-one with the alignment mating part 21 of the first layer electrode 20, in the initial stage of electrode 20 stacking, the cooperation between the sliding alignment members 50 and the inclined guide surface 2101 helps to automatically correct the first layer electrode 20 to a preset center position relative to the base 10, providing a precise reference position for the subsequent stacking of the upper electrodes 20, which is conducive to maintaining the overall coaxiality of the entire electrode 20 stack column in an ideal state and improving the alignment stability of the multilayer electrodes 20 in long-term operation.

[0110] In one possible structural design, please refer to [link / reference needed]. Figure 1 and Figure 2 The geometric centers of the multiple sliding mating parts 40 in each group of sliding mating parts 40 are located on a preset circumference; the geometric centers of the multiple sliding centering parts 50 are also located on a preset circumference. That is, the geometric centers of the multiple sliding mating parts 40 in each group of sliding mating parts 40 and the geometric centers of the multiple sliding centering parts 50 are located on the same preset circumference.

[0111] Since the geometric centers of the multiple sliding mating parts 40 in each set of sliding mating parts 40 are located on a preset circumference, and the geometric centers of the multiple sliding centering parts 50 are also located on this preset circumference, the radial distance (lever arm) of all centering parts (whether sliding centering parts 50 or sliding mating parts 40) from the central axis of the electrode 20 is the same. Therefore, when the electrode 20 is subjected to lateral forces or eccentric loads, the anti-overturning moment generated by each layer of centering parts is the same. This further helps to improve the structure's anti-overturning capability under eccentric loads and reduces the risk of centering failure caused by uneven moment distribution.

[0112] In one possible structural design, please refer to [link / reference needed]. Figure 1 and Figure 2 Each sliding centering member 50 includes a second insulating sphere, and the diameters of the plurality of sliding centering members 50 are identical. The second insulating sphere can be referred to in the description of the first insulating sphere 401 described above, and will not be repeated here in the embodiments of this application.

[0113] Since the sliding centering member 50 is defined as a second insulating sphere, during the stacking of the electrode assembly 100, the second insulating sphere forms a non-conductive physical isolation layer between the electrode 20 and the base 10. This helps reduce the risk of electrical short circuits or arc discharges caused by direct contact, and improves the operational stability and safety of electronic equipment under high-voltage environments.

[0114] Furthermore, since each set of sliding mating parts 40 uses a second insulating sphere with the same diameter, when multiple second insulating spheres simultaneously contact the base 10, they provide the same vertical support height. This helps reduce local lifting or sinking caused by abnormal height of a single support point (such as an insulating sphere with a diameter that is too large or too small). This, in turn, helps maintain the supported electrode 20 in a horizontal state, providing a basic constraint for establishing a parallel relationship between adjacent electrodes 20.

[0115] In one possible structural design, please refer to [link / reference needed]. Figure 1 and Figure 2 The base 10 is provided with a plurality of receiving holes 11, which are located on the side of the base 10 facing the adjacent electrode 20. Each receiving hole 11 corresponds to a plurality of sliding alignment members 50, and a portion of each sliding alignment member 50 is disposed within the receiving hole 11 corresponding to that sliding alignment member 50. For example, the receiving hole 11 can be a blind hole or a through hole, located on the upper surface of the base 10. The lower half of the sliding alignment member 50 is received within the receiving hole 11, while the upper half slides in engagement with the inclined guide surface 2101 of the first electrode 20. Thus, the receiving hole 11 provides positioning for the sliding alignment member 50, reducing the risk of displacement of the sliding alignment member 50 when pressed by the electrode 20.

[0116] Since multiple receiving holes 11 are correspondingly provided with multiple sliding alignment members 50, and a portion of each sliding alignment member 50 is disposed within the corresponding receiving hole 11, the receiving holes 11 can provide positioning support for the sliding alignment member 50, firmly fixing the sliding alignment member 50 to the base 10. This helps to limit the radial displacement or sway of the sliding alignment member 50, keeping it in a preset installation position when subjected to axial stacking force or vibration, which is beneficial to improving the connection stability between the sliding alignment member 50 and the base 10 and reducing the possibility of the sliding alignment member 50 falling off or becoming misaligned.

[0117] This application also provides an electronic device that includes the electrode assembly of any of the foregoing embodiments. Figure 5 This is a schematic diagram of an electronic device provided in an embodiment of this application.

[0118] As some implementation methods, such as Figure 5 As shown, the electronic device 60 includes the electrode assembly 100 of any of the foregoing embodiments. For example, the electronic device 60 is the foregoing charged particle beam device.

[0119] The above embodiments further illustrate the purpose, technical solution, and advantages of this application. It should be understood that the above descriptions are merely embodiments of this application and are not intended to limit this application. Any modifications, equivalent substitutions, improvements, etc., made within the principles of this application should be included within the protection scope of this application.

Claims

1. An electrode assembly (100), characterized in that, include: Base (10); Multiple electrodes (20) are stacked on the base (10); each electrode (20) includes a main body (22) and multiple centering mating parts (21) circumferentially surrounding the main body (22), and each centering mating part (21) has an inclined guide surface (2101) on the side close to the base (10); At least one set of sliding engagement parts (40) are provided between two adjacent electrodes (20) of the plurality of electrodes (20). The set of sliding engagement parts (40) includes a plurality of sliding engagement parts (40) circumferentially surrounding the main body (22). The plurality of sliding engagement parts (40) correspond one-to-one with a plurality of centering engagement parts (21) of one of the two adjacent electrodes (20) that is away from the base (10). Each sliding engagement part (40) is used to slide engagement with the inclined guide surface (2101) of its corresponding centering engagement part (21). Multiple limiting members (30) are fixed to the base (10); around the circumference of the main body (22), the multiple limiting members (30) are staggered with multiple centering mating parts (21); the centering mating parts (21) located at the same circumferential position among the multiple electrodes (20) are used to contact the same limiting member (30) among the multiple limiting members (30); the inclined guide surface (2101) of each centering mating part (21) contacts the limiting member (30) away from the centering mating part (21) in the extending direction of the base (10).

2. The electrode assembly (100) according to claim 1, characterized in that, The inclined guide surfaces (2101) of the plurality of centering mating parts (21) have the same inclination angle; the at least one set of sliding mating parts (40) consists of multiple sets of sliding mating parts (40), and the geometric center of the plurality of sliding mating parts (40) in each set of sliding mating parts (40) is located on a preset circumference.

3. The electrode assembly (100) according to claim 1, characterized in that, Each sliding fit (40) includes a curved surface (4011), and the curved surface (4011) of each sliding fit (40) slides fit with the inclined guide surface (2101) of the centering fit part (21) corresponding to the sliding fit (40).

4. The electrode assembly (100) according to any one of claims 1-3, characterized in that, Each sliding fit (40) includes a first insulating sphere (401), and the plurality of sliding fits (40) in the set of sliding fits (40) have the same diameter.

5. The electrode assembly (100) according to any one of claims 1-3, characterized in that, The plurality of limiting members (30) includes at least three limiting members, and a channel for charged particles to pass through is formed in the main body (22) of each electrode; The geometric center of the main body (22) of each of the plurality of electrodes (20) is located within the projected area of ​​the polygon formed by the sequential connection of any two adjacent limiting members (30) of the main body (22).

6. The electrode assembly (100) according to any one of claims 1-3, characterized in that, The plurality of limiting members (30) include: a first limiting member (31), a second limiting member (32) and a third limiting member (33) arranged circumferentially around the main body (22). The plurality of centering mating parts (21) of each electrode (20) include: a first centering mating part (211), a second centering mating part (212) and a third centering mating part (213) arranged circumferentially around the main body (22). The first centering mating part (211) of each electrode (20) is in contact with the first limiting member (31). The second centering mating part (212) of each electrode (20) is in contact with the second limiting member (32). The third centering mating part (213) of each electrode (20) is in contact with the third limiting member (33).

7. The electrode assembly (100) according to claim 6, characterized in that, The first limiting member (31), the second limiting member (32) and the third limiting member (33) are evenly spaced around the main body (22); the first centering mating part (211), the second centering mating part (212) and the third centering mating part (213) are evenly spaced around the main body (22).

8. The electrode assembly (100) according to claim 6, characterized in that, The set of sliding mating parts (40) includes a first sliding mating part (41), a second sliding mating part (42), and a third sliding mating part (43). The first sliding mating part (41) is disposed between the first centering mating part (211) of one electrode (20) and the first centering mating part (211) of the other electrode (20) in two adjacent electrodes (20). The second sliding mating part (42) is disposed between the second centering mating part (212) of one electrode (20) and the second centering mating part (212) of the other electrode (20) in two adjacent electrodes (20). The third sliding mating part (43) is disposed between the third centering mating part (213) of one electrode (20) and the other third centering mating part (213) in two adjacent electrodes (20).

9. The electrode assembly (100) according to any one of claims 1-3, characterized in that, The plurality of electrodes (20) includes a plurality of sets of mounting holes (2102), each set of mounting holes (2102) corresponding to one of the plurality of electrodes (20). Each set of mounting holes (2102) for each electrode (20) is located on the side of the electrode (20) away from the base (10). Each set of mounting holes (2102) includes a plurality of mounting holes (2102), each set of mounting holes (2102) corresponding to one of the plurality of centering mating parts (21). Each set of mounting holes (2102) is provided in a corresponding manner to the plurality of sliding mating parts (40), and a portion of each sliding mating part (40) is located in the mounting hole (2102) corresponding to the sliding mating part (40).

10. The electrode assembly (100) according to claim 9, characterized in that, The geometric centers of the multiple sliding fit parts (40) in each set of sliding fit parts (40) are located on a preset circumference; the geometric centers of the multiple mounting holes (2102) are located on the preset circumference.

11. The electrode assembly (100) according to claim 10, characterized in that, For each inclined guide surface (2101), a first straight line passes through at least a portion of the mounting hole (2102) corresponding to the centering mating part (21) where the inclined guide surface (2101) is located. The first straight line is a straight line perpendicular to the inclined guide surface (2101) and passes through the geometric center of the sliding mating part (40) corresponding to the centering mating part (21) where the inclined guide surface (2101) is located.

12. The electrode assembly (100) according to any one of claims 1-3, characterized in that, It also includes a plurality of sliding centering members (50) circumferentially surrounding the main body (22) of the electrode (20) adjacent to the base (10). The plurality of sliding centering members (50) are disposed between the base (10) and the electrode (20) adjacent to the base (10). The plurality of sliding centering members (50) correspond one-to-one with the plurality of centering mating parts (21) of the electrode (20) adjacent to the base (10). Each sliding centering member (50) slides in contact with the inclined guide surface (2101) of the corresponding centering mating part (21).

13. The electrode assembly (100) according to claim 12, characterized in that, The geometric centers of the multiple sliding mating parts (40) in each set of sliding mating parts (40) are located on a preset circumference; the geometric centers of the multiple sliding centering parts (50) are located on the preset circumference.

14. The electrode assembly (100) according to claim 12, characterized in that, Each sliding centering element (50) includes a second insulating sphere, and the plurality of sliding centering elements (50) have the same diameter.

15. The electrode assembly (100) according to claim 12, characterized in that, The base (10) is provided with a plurality of receiving holes (11), which are located on the side of the base (10) facing the electrode (20) adjacent to the base (10); the plurality of receiving holes (11) are provided one-to-one with the plurality of sliding centering members (50), and a portion of each sliding centering member (50) is located in the receiving hole (11) corresponding to the sliding centering member (50).

16. An electronic device, characterized in that, Includes the electrode assembly (100) as described in any one of claims 1-15.

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